Light source machine automatic detection method and system

Abstract

The application relates to the field of semiconductor technology, in particular to a light source machine automatic detection method and system. The method comprises the following steps: the illumination detection track comprises an initial illumination coordinate point, the color temperature detection track comprises an initial color temperature coordinate point, and the light illumination uniformity detection track comprises an initial detection matrix; a motion module drives an illumination measuring instrument to a working position, then drives the illumination measuring instrument to move to the initial illumination coordinate point, starts the illumination measuring instrument to move along the illumination detection track and measures the light source machine illumination; the motion module drives a color temperature measuring instrument to the working position, then drives the color temperature measuring instrument to move to the initial color temperature coordinate point, starts the color temperature measuring instrument to move along the color temperature detection track and measures the light source machine color temperature; the motion module drives a light illumination uniformity measuring instrument to the working position, then drives the light illumination uniformity measuring instrument to move to the initial detection matrix, starts the light illumination uniformity measuring instrument to move along the light illumination uniformity detection track and measures the light source machine light illumination uniformity. The method improves the detection efficiency of the light source machine.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to an automatic detection method and system for light source machines. Background Technology

[0002] CIS (CMOS Image Sensor) chips, as a type of vision acquisition chip, are currently widely used in vision imaging equipment as a core component. At present, when using a light source machine to perform wafer inspection on CIS chips, the light source machine itself needs to be periodically inspected to prevent the quality of the light source output from affecting the accuracy of CIS chip inspection. Summary of the Invention

[0003] In view of this, the purpose of this application is to propose an automatic detection method and system for light source machines to solve the above-mentioned technical problems.

[0004] To achieve the above objectives, this application provides an automatic detection method for a light source machine, comprising:

[0005] The light source machine, illuminance meter, color temperature meter, and illumination uniformity meter were placed in a dark box; Illuminance detection trajectory, color temperature detection trajectory, and illumination uniformity detection trajectory are respectively planned on the light-emitting surface of the light source; the illuminance detection trajectory includes initial illuminance coordinate points, the color temperature detection trajectory includes initial color temperature coordinate points, and the illumination uniformity detection trajectory includes an initial detection matrix; The motion module drives the illuminance measuring instrument to the working position, then drives the illuminance measuring instrument to move to the initial illuminance coordinate point, and starts the illuminance measuring instrument to move along the illuminance detection trajectory and measure the illuminance of the light source. The motion module drives the color temperature measuring instrument to the working position, then drives the color temperature measuring instrument to move to the initial color temperature coordinate point, and starts the color temperature measuring instrument to move along the color temperature detection trajectory and measure the color temperature of the light source. The motion module drives the illumination uniformity measuring instrument to the working position, then drives the illumination uniformity measuring instrument to move to the initial detection matrix, and starts the illumination uniformity measuring instrument to move along the illumination uniformity detection trajectory and measure the illumination uniformity of the light source.

[0006] Optionally, before placing the light source, illuminance meter, color temperature meter, and illumination uniformity meter inside the dark box, the following steps are included: The detection parameters of the light source machine are preset, and the detection parameters include: working coordinates and the detection matrix.

[0007] Optionally, the preset detection parameters of the light source machine include: Multiple first working coordinates and multiple second working coordinates are preset for the light-emitting surface of the light source; The measurement sequence of the light source machine illuminance meter is planned and the measurement trajectory is generated based on multiple first working coordinates; The measurement sequence of the illuminance meter is planned based on multiple second working coordinates, and a color temperature detection trajectory is generated.

[0008] Optionally, the preset detection parameters of the light source machine further include: Multiple third working coordinates are preset for the light-emitting surface of the light source, and the third working coordinates form the detection matrix; The measurement sequence of the illumination uniformity measuring instrument is planned according to multiple detection matrices, and the illumination uniformity detection trajectory is generated.

[0009] Optionally, the darkroom is equipped with a workbench, and placing the light source machine, illuminance meter, color temperature meter, and illumination uniformity meter inside the darkroom includes: The light source is fixed at a preset position on the worktable inside the dark box.

[0010] Optionally, the motion module includes a rotary disk and a three-axis linear motion module, wherein the step of using the motion module to drive the illuminance measuring instrument to the working position and then driving the illuminance measuring instrument to move to the initial illuminance coordinate point includes: The illuminance measuring instrument is driven to rotate to the working position by the rotary disk, and then the illuminance measuring instrument is driven to move linearly to the initial illuminance coordinate point by the three-axis linear motion module. And / or, The step of using the motion module to drive the color temperature measuring instrument to the working position, and then driving the color temperature measuring instrument to move to the initial color temperature coordinate point, includes: The color temperature measuring instrument is driven to rotate to the working position by the rotating disk, and then the color temperature measuring instrument is driven to move linearly to the initial color temperature coordinate point by the three-axis linear motion module. And / or, The step of using the motion module to drive the illumination uniformity measuring instrument to the working position, and then driving the illumination uniformity measuring instrument to move to the initial detection matrix, includes: The light uniformity measuring instrument is driven to rotate to the working position by the rotating disk, and then the light uniformity measuring instrument is driven to move linearly to the initial detection matrix by the triaxial linear motion module.

[0011] Optionally, the step of activating the illumination uniformity measuring instrument to move linearly along the illumination uniformity detection trajectory and measuring the illumination uniformity of the light source includes: The illuminance data of each coordinate point in the detection matrix are obtained by measuring the detection matrix one by one according to the measurement sequence of the light uniformity measuring instrument.

[0012] Optionally, after starting the illumination uniformity measuring instrument to move along the illumination uniformity detection trajectory and measure the illumination uniformity of the light source, the process includes: After the illuminance meter, color temperature meter, and light uniformity meter have all completed their measurements, the motion module is reset to its initial state, and the test results are recorded.

[0013] Optionally, the recorded detection results include: The test results are uploaded to the production management system, and it is determined whether the test results meet the usage specifications of the light source machine. If the conditions are met, the test passes. If the requirements are not met, the test fails, and the light source machine cannot be used for production.

[0014] Based on the same inventive concept, this application also provides an automatic detection system for a light source machine, comprising: Dark box, illuminance meter, color temperature meter, illumination uniformity meter, motion module and controller; The light source, the illuminance meter, the color temperature meter, the illumination uniformity meter, and the motion module are housed inside the dark box. The illuminance meter, the color temperature meter, the illumination uniformity meter, and the motion module are all connected to the controller; The controller is used to plan an illuminance detection trajectory, a color temperature detection trajectory, and an illumination uniformity detection trajectory on the light-emitting surface of the light source machine, respectively; the illuminance detection trajectory includes an initial illuminance coordinate point, the color temperature detection trajectory includes an initial color temperature coordinate point, and the illumination uniformity detection trajectory includes an initial detection matrix; The controller is also used to control the illuminance measuring instrument to move along the illuminance detection trajectory at the initial illuminance coordinate point, and to measure the illuminance of the light source using the illuminance measuring instrument; It is also used to control the color temperature measuring instrument to move along the color temperature detection trajectory at the initial color temperature coordinate point, and to measure the color temperature of the light source using the color temperature measuring instrument; It is also used to control the illumination uniformity measuring instrument to move along the illumination uniformity detection trajectory on the initial detection matrix, and to measure the illumination uniformity of the light source using the illumination uniformity measuring instrument.

[0015] As can be seen from the above, the automatic detection method and system for light source machines provided in this application achieves accurate detection and comprehensive measurement of the light source machine by performing automatic detection on the light source machine, planning the detection trajectory on the light-emitting surface of the light source machine, and precisely controlling the detection trajectory of the illuminance meter, color temperature meter, and illumination uniformity meter through a motion module, thereby improving the detection efficiency of the light source machine. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in this application or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A flowchart of an automatic detection method for a light source machine provided in an embodiment of this application; Figure 2 A flowchart of an automatic detection method for a light source machine provided in another embodiment of this application; Figure 3 This is a flowchart illustrating the process of determining the detection result in the production management system of an automatic detection method for a light source machine provided in an embodiment of this application. Figure 4 This is a block diagram of an automatic detection system for a light source provided in an embodiment of this application. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with specific embodiments and the accompanying drawings.

[0019] It should be noted that, unless otherwise defined, the technical or scientific terms used in the embodiments of this application should have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar terms used in the embodiments of this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the component or object preceding the word covers the components or objects listed after the word and their equivalents, without excluding other components or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are only used to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0020] It should be noted that the method in this embodiment can be executed by a single device, such as a controller or server. The method can also be applied in a distributed scenario, where multiple devices cooperate to complete the process. In such a distributed scenario, one of these devices may execute only one or more steps of the method in this embodiment, and the multiple devices will interact with each other to complete the method.

[0021] CIS (CMOS Image Sensor) chips, as a type of vision acquisition chip, are currently widely used in visual imaging equipment as a core component. At present, probe cards are typically used to perform wafer inspection on CIS chips. Specifically, a lens is first mounted on the probe card, and then a light source is placed above the lens. When the light source performs wafer inspection on the CIS chip, it emits light that passes through the lens and illuminates the photosensitive surface of the CIS chip. The photosensitive pixel units on the photosensitive surface of the CIS chip receive the incident light signal and generate raw pixel data. This raw pixel data is then transmitted to the inspection machine for analysis and inspection of the CIS chip.

[0022] Because CIS chips are extremely sensitive to light, if the illuminance, color temperature, and uniformity of the light source output by the light source machine are inaccurate when performing wafer inspection on the CIS chip, the raw pixel data output by the CIS chip will be further erroneous. Therefore, in order to ensure the accuracy, uniformity, and traceability of the inspection results, it is necessary to perform regular inspections and tests on the light source machine.

[0023] However, current detection methods for light source machines suffer from low detection efficiency.

[0024] Reference Figure 1 This application provides an automatic detection method for a light source machine, comprising: Step S100: Place the light source machine, illuminance meter, color temperature meter, and illumination uniformity meter inside the dark box; Step S200: Plan the illuminance detection trajectory, color temperature detection trajectory, and illumination uniformity detection trajectory on the light-emitting surface of the light source machine respectively; the illuminance detection trajectory includes the initial illuminance coordinate point, the color temperature detection trajectory includes the initial color temperature coordinate point, and the illumination uniformity detection trajectory includes the initial detection matrix; Step S300: Use the motion module to drive the illuminance measuring instrument to the working position, then drive the illuminance measuring instrument to move to the initial illuminance coordinate point, start the illuminance measuring instrument to move along the illuminance detection trajectory and measure the illuminance of the light source machine; Step S400: Use the motion module to drive the color temperature measuring instrument to the working position, then drive the color temperature measuring instrument to move to the initial color temperature coordinate point, start the color temperature measuring instrument to move along the color temperature detection trajectory and measure the color temperature of the light source; Step S500: Use the motion module to drive the illumination uniformity measuring instrument to the working position, then drive the illumination uniformity measuring instrument to move to the initial detection matrix, start the illumination uniformity measuring instrument to move along the illumination uniformity detection trajectory and measure the illumination uniformity of the light source.

[0025] In this embodiment, the performance of the light source machine is automatically tested. First, a test trajectory is planned on the light-emitting surface of the light source machine to achieve comprehensive testing of the light-emitting surface. Then, by setting a motion module to control the illuminance meter, color temperature meter and illumination uniformity meter to execute the test process along the test trajectory, the light source machine's light-emitting surface is accurately tested, thus improving the testing efficiency of the light source machine.

[0026] Furthermore, the technical solution used in this embodiment can effectively avoid the problem of low detection efficiency of the light source machine compared to manual operation by the operator. The motion module is driven to execute the light source machine detection process in sequence according to the preset program and output the detection results. This avoids the problem of movement errors caused by manually adjusting the position and height of the measuring instrument. At the same time, it also further avoids the operator from missing the detection data and causing misjudgment.

[0027] In some embodiments, before placing the light source machine, illuminance meter, color temperature meter, and illumination uniformity meter into the dark box in step S100, the following steps are included: Step S010: Preset the detection parameters of the light source machine. The detection parameters include: working coordinates and detection matrix.

[0028] In this embodiment, the detection parameters within the light source machine include the working coordinates of the illuminance meter and the color temperature meter, as well as the detection matrix of the illumination uniformity meter. By preloading the detection parameters before testing the light source machine, operators do not need to manually configure the parameters, thus improving the testing efficiency of the light source machine. Furthermore, in this embodiment, different detection parameters are adapted for different specifications and models of light source machines to standardize the testing process and avoid affecting the testing accuracy of the light source machine due to equipment differences between different light source machines.

[0029] In some embodiments, in step S010, the detection parameters of the preset light source machine are referenced. Figure 2 ,include: Step S011: Preset multiple first working coordinates and multiple second working coordinates for the light-emitting surface of the light source machine; Step S012: Plan the measurement sequence of the light source machine illuminance meter according to multiple first working coordinates and generate the measurement trajectory; Step S013: Plan the measurement sequence of the illuminance measuring instrument based on multiple second working coordinates and generate the color temperature detection trajectory.

[0030] In this embodiment, multiple first working coordinates and multiple second working coordinates are preset on the light-emitting surface of the light source machine, so that when performing light source machine illuminance testing or light source machine color temperature testing, the measurement sequence is planned and the detection trajectory is generated according to the working coordinates respectively.

[0031] Furthermore, when performing illuminance or color temperature tests on the light source, specific detection trajectories can be divided on the light-emitting surface of the light source. Optimal test paths can also be planned within a limited detection area to achieve full coverage detection of the light-emitting surface of the light source, maximizing the detection efficiency and quality of the light source.

[0032] Optionally, in this embodiment, the illuminance test, color temperature test, and illumination uniformity test of the light source are independent of each other, and the execution order is not important.

[0033] In some embodiments, in step S010, the preset detection parameters of the light source machine further include: Step S014: Preset multiple third working coordinates for the light-emitting surface of the light source machine, and the third working coordinates form a detection matrix; Step S015: Plan the measurement sequence of the illumination uniformity measuring instrument according to multiple detection matrices and generate the illumination uniformity detection trajectory.

[0034] In this embodiment, multiple third working coordinates are preset on the light-emitting surface of the light source machine, and multiple detection matrices are formed by the third working coordinates. This allows for the planning of the measurement sequence and the generation of the light uniformity detection trajectory according to the detection matrices during subsequent light uniformity detection.

[0035] Furthermore, when performing illumination uniformity testing, specific detection trajectories can be divided on the light-emitting surface of the light source. The optimal test path can also be planned within a limited detection area for illumination uniformity testing, so as to achieve full coverage detection of the light-emitting surface of the light source and maximize the detection efficiency and quality of illumination uniformity testing within the light source.

[0036] Meanwhile, this embodiment assigns multiple detection matrices to the emitting surface of the light source to prevent measurement gaps from occurring when a single large-area detection matrix is ​​used to directly perform measurement operations, which would affect the measurement effect of illumination uniformity and ensure that the light source does not miss any detections in illumination uniformity measurement.

[0037] At this point, the linear movement of the illumination uniformity measuring instrument on the light-emitting surface of the light source machine is used to avoid repeated measurement of some detection matrices or missed detection of some detection matrices. This further achieves accurate detection connection between detection matrices without overlap or omission, thus improving the detection quality of the light source machine.

[0038] For example, the light-emitting surface of the light source is divided into multiple 9x9 unit grids, each 9x9 unit grid corresponds to a detection matrix, and a detection matrix based on the 9x9 unit grid is established. The illumination uniformity measuring instrument is driven to move linearly on multiple 9x9 unit grids to realize the sequential measurement of illumination uniformity of the detection matrix.

[0039] In some embodiments, a workbench is provided inside the dark box. In step S100, the light source machine, illuminance meter, color temperature meter, and illumination uniformity meter are placed inside the dark box, including: Fix the light source machine to the preset position on the worktable inside the darkroom.

[0040] In this embodiment, the light source is fixed inside the dark box to isolate the external light source and avoid interference from the external light source, which would reduce the detection accuracy of the light source.

[0041] Meanwhile, a platform for placing the light source machine is set up inside the dark box to perform optical performance testing on the light source machine. Before testing the light source machine, it is pre-fixed on the platform inside the dark box to prevent the light source machine from moving during testing and affecting the accuracy of the test results. Then, the power supply to the light source machine is turned on to start the testing.

[0042] In some embodiments, the motion module includes a rotary disk and a three-axis linear motion module, wherein... In step S300, the illuminance measuring instrument is driven to the working position using the motion module, and then driven to move to the initial illuminance coordinate point, including: The illuminance measuring instrument is driven to rotate to the working position by a rotary disk, and then the illuminance measuring instrument is driven to move linearly to the initial illuminance coordinate point by a three-axis linear motion module. And / or, In step S400, the motion module drives the color temperature measuring instrument to the working position, and then drives the color temperature measuring instrument to move to the initial color temperature coordinate point, including: The color temperature measuring instrument is driven to rotate to the working position by a rotating disk, and then the color temperature measuring instrument is driven to move linearly to the initial color temperature coordinate point by a three-axis linear motion module. And / or, In step S500, the illumination uniformity measuring instrument is driven to the working position using a motion module, and then driven to move to the initial detection matrix, including: The illumination uniformity measuring instrument is driven to rotate to the working position by a rotary disk, and then the illumination uniformity measuring instrument is driven to move linearly to the initial detection matrix by a three-axis linear motion module.

[0043] In this embodiment, a rotating disk is installed above the light source machine, and an illuminance meter, a color temperature meter, and an illumination uniformity meter are mounted on the rotating disk to achieve automatic switching between the various measuring instruments.

[0044] Meanwhile, in this embodiment, a three-axis linear motion module is set between the dark box and the rotating disk. The three-axis linear motion module drives each measuring instrument to perform linear movement along the x-axis, y-axis, or z-axis. When different measuring instruments need to be used to perform different measurement tasks, the rotating disk and the three-axis linear motion module are used to sequentially drive the illuminance measuring instrument, color temperature measuring instrument, and illumination uniformity measuring instrument to rotate and move linearly to the measurement position, so as to realize the automated detection of the light source machine and improve the detection efficiency of the light source machine.

[0045] In some embodiments, in step S500, the illumination uniformity measuring instrument is activated to move linearly along the illumination uniformity detection trajectory and measure the illumination uniformity of the light source, including: Step S501: Measure the detection matrix one by one according to the measurement sequence of the illumination uniformity measuring instrument, and obtain the illuminance data of each coordinate point in the detection matrix.

[0046] In this embodiment, the technical solution utilizes a rotating disk to drive the illumination uniformity measuring instrument to rotate to the working position, and a three-axis linear motion module to drive the color temperature measuring instrument to move linearly to the initial detection matrix. The illumination uniformity measuring instrument is then activated to move linearly on the light-emitting surface of the light source and measure the illumination uniformity of the light source.

[0047] Optionally, the first point illuminance (initial detection matrix) is measured using an illumination uniformity measuring instrument, and the color temperature measuring instrument is driven by a three-axis linear motion module to move linearly to the second point illuminance (second detection matrix) according to the set detection matrix coordinates. After the remaining point illuminances are detected sequentially according to the detection matrix coordinates, the illumination uniformity measurement ends, and the rotating disk and the three-axis linear motion module are reset to the initial state.

[0048] In some embodiments, after step S500, where the illumination uniformity measuring instrument is started to move along the illumination uniformity detection trajectory and measure the illumination uniformity of the light source, the following steps are included: Step S510: After the illuminance meter, color temperature meter and light uniformity meter have completed their measurements, reset the motion module to its initial state and record the test results.

[0049] Optionally, in this embodiment, multiple working coordinates are preset for the emitting surface of the light source, including: setting a termination illuminance coordinate point on the illuminance detection trajectory; setting a termination color temperature coordinate point on the color temperature detection trajectory; and setting a termination detection matrix on the illumination uniformity detection trajectory.

[0050] Here, this embodiment assigns start and end working coordinates to the detection trajectory to automatically control the start and end of the light source machine's illuminance measurement, color temperature measurement, and illumination uniformity measurement, thereby achieving precise control of the automated detection light source machine and ensuring its efficient operation.

[0051] In some embodiments, in step S510, the detection result is recorded and referenced. Figure 3 ,include: Step S511: Upload the test results to the production management system and determine whether the test results meet the usage specifications of the light source machine; Step S512: If the conditions are met, the test passes. Step S513: If the requirements are not met, the test fails and the light source machine cannot be used for production.

[0052] In this embodiment, the test results are automatically summarized and uploaded to the production management system. At the same time, the production management system automatically determines whether the test results are qualified, which is used to realize the automated control of the production process, improve the testing efficiency of the light source machine, effectively avoid the operator's MO (Mistake-Operation) problem, and reduce the risk of omissions or misjudgments in the test data.

[0053] Based on the same inventive concept, this application also provides an automatic detection system for a light source machine, referring to... Figure 4 ,include: Dark box, illuminance meter, color temperature meter, illumination uniformity meter, motion module and controller; The light source, illuminance meter, color temperature meter, illumination uniformity meter, and motion module are housed in a dark box; The illuminance meter, color temperature meter, light uniformity meter, and motion module are all connected to the controller; The controller is used to plan the illuminance detection trajectory, color temperature detection trajectory, and illumination uniformity detection trajectory on the light-emitting surface of the light source machine, respectively; the illuminance detection trajectory includes the initial illuminance coordinate point, the color temperature detection trajectory includes the initial color temperature coordinate point, and the illumination uniformity detection trajectory includes the initial detection matrix; The controller is also used to control the illuminance measuring instrument to move along the illuminance detection trajectory at the initial illuminance coordinate point, and to measure the illuminance of the light source using the illuminance measuring instrument; It is also used to control the color temperature measuring instrument to move along the color temperature detection trajectory at the initial color temperature coordinate point, and to measure the color temperature of the light source using the color temperature measuring instrument; It is also used to control the movement of the illumination uniformity measuring instrument along the illumination uniformity detection trajectory in the initial detection matrix, and to measure the illumination uniformity of the light source using the illumination uniformity measuring instrument.

[0054] Here, the testing process for the light source machine includes: after the light source machine enters the factory, a visual inspection and a comprehensive optical performance test are carried out simultaneously. If both the visual inspection and the comprehensive optical performance test are qualified, the light source machine can be put into production.

[0055] In this embodiment, an automatic detection system for the light source machine is built to achieve automated detection of the light source machine. After multiple measuring instruments are rotated to the working position by a motion module, each measuring instrument is adjusted to the designated initial test point. Through the coordinated control of rotation drive and linear drive, high-efficiency test control of the three measuring instruments is achieved.

[0056] Furthermore, this embodiment effectively and precisely positions each measuring instrument at the test point during the execution of the detection process by pre-planning the detection trajectory and detection matrix on the light-emitting surface, preventing errors in detection data acquisition due to positioning deviations between the measuring instrument and the light source, and ensuring the consistency of the detection coordinate points.

[0057] Meanwhile, in this embodiment, after the illuminance meter, color temperature meter, and light uniformity meter have all completed their measurements, the motion module is reset to its initial state and the test results are automatically recorded, avoiding data entry errors caused by manual operation and improving the overall testing efficiency of the light source machine.

[0058] It should be noted that the above description describes some embodiments of this application. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be performed in a different order than that shown in the above embodiments and still achieve the desired result. Furthermore, the processes depicted in the drawings do not necessarily require a specific or sequential order to achieve the desired result. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0059] The embodiments of the various products and devices in this application are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. Similar embodiments can be referred to interchangeably. For ease of description, the above devices are divided into various modules based on their functions. Of course, in implementing this application, the functions of each module can be implemented in one or more software or hardware components.

[0060] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of this application (including the claims) is limited to these examples; within the framework of this application, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of different aspects of the above embodiments of this application, which are not provided in detail for the sake of brevity.

[0061] Additionally, to simplify the description and discussion, and to avoid obscuring the embodiments of this application, the well-known power / ground connections to the integrated circuit (IC) wafer and other components may or may not be shown in the provided drawings. Furthermore, the apparatus may be shown in block diagram form to avoid obscuring the embodiments of this application, and this also takes into account the fact that the details of the implementation of these block diagram apparatuses are highly dependent on the platform on which the embodiments of this application will be implemented (i.e., these details should be fully understood by those skilled in the art). While specific details (e.g., circuits) have been set forth to describe exemplary embodiments of this application, it will be apparent to those skilled in the art that the embodiments of this application can be implemented without these specific details or with variations thereof. Therefore, these descriptions should be considered illustrative rather than restrictive.

[0062] Although this application has been described in conjunction with specific embodiments thereof, many substitutions, modifications and variations of these embodiments will be apparent to those skilled in the art from the foregoing description.

[0063] The embodiments of this application are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the embodiments of this application should be included within the protection scope of this application.

Claims

1. An automatic detection method for a light source machine, characterized in that, include: The light source machine, illuminance meter, color temperature meter, and illumination uniformity meter were placed in a dark box; Illuminance detection trajectory, color temperature detection trajectory, and illumination uniformity detection trajectory are respectively planned on the light-emitting surface of the light source; the illuminance detection trajectory includes initial illuminance coordinate points, the color temperature detection trajectory includes initial color temperature coordinate points, and the illumination uniformity detection trajectory includes an initial detection matrix; The motion module drives the illuminance measuring instrument to the working position, then drives the illuminance measuring instrument to move to the initial illuminance coordinate point, and starts the illuminance measuring instrument to move along the illuminance detection trajectory and measure the illuminance of the light source. The motion module drives the color temperature measuring instrument to the working position, then drives the color temperature measuring instrument to move to the initial color temperature coordinate point, and starts the color temperature measuring instrument to move along the color temperature detection trajectory and measure the color temperature of the light source. The motion module drives the illumination uniformity measuring instrument to the working position, then drives the illumination uniformity measuring instrument to move to the initial detection matrix, and starts the illumination uniformity measuring instrument to move along the illumination uniformity detection trajectory and measure the illumination uniformity of the light source.

2. The automatic detection method for the light source machine according to claim 1, characterized in that, Before placing the light source machine, illuminance meter, color temperature meter, and illumination uniformity meter into the dark box, the process includes: The detection parameters of the light source machine are preset, including working coordinates and detection matrix.

3. The automatic detection method for the light source machine according to claim 2, characterized in that, The preset detection parameters of the light source machine include: Multiple first working coordinates and multiple second working coordinates are preset for the light-emitting surface of the light source; The measurement sequence of the light source machine illuminance meter is planned and the measurement trajectory is generated based on multiple first working coordinates; The measurement sequence of the illuminance meter is planned based on multiple second working coordinates, and a color temperature detection trajectory is generated.

4. The automatic detection method for the light source machine according to claim 2, characterized in that, The preset detection parameters of the light source machine also include: Multiple third working coordinates are preset for the light-emitting surface of the light source, and the third working coordinates form the detection matrix; The measurement sequence of the illumination uniformity measuring instrument is planned according to multiple detection matrices, and the illumination uniformity detection trajectory is generated.

5. The automatic detection method for a light source machine according to claim 1, characterized in that, The dark box is equipped with a workbench. The process of placing the light source machine, illuminance meter, color temperature meter, and illumination uniformity meter inside the dark box includes: The light source is fixed at a preset position on the worktable inside the dark box.

6. The automatic detection method for a light source machine according to claim 1, characterized in that, The motion module includes a rotating disk and a three-axis linear motion module. The step of using the motion module to drive the illuminance measuring instrument to the working position and then to move the illuminance measuring instrument to the initial illuminance coordinate point includes: The illuminance measuring instrument is driven to rotate to the working position by the rotary disk, and then the illuminance measuring instrument is driven to move linearly to the initial illuminance coordinate point by the three-axis linear motion module. And / or, The step of using the motion module to drive the color temperature measuring instrument to the working position, and then driving the color temperature measuring instrument to move to the initial color temperature coordinate point, includes: The color temperature measuring instrument is driven to rotate to the working position by the rotating disk, and then the color temperature measuring instrument is driven to move linearly to the initial color temperature coordinate point by the three-axis linear motion module. And / or, The step of using the motion module to drive the illumination uniformity measuring instrument to the working position, and then driving the illumination uniformity measuring instrument to move to the initial detection matrix, includes: The light uniformity measuring instrument is driven to rotate to the working position by the rotating disk, and then the light uniformity measuring instrument is driven to move linearly to the initial detection matrix by the triaxial linear motion module.

7. The automatic detection method for a light source machine according to claim 1, characterized in that, The step of activating the illumination uniformity measuring instrument, moving linearly along the illumination uniformity detection trajectory, and measuring the illumination uniformity of the light source includes: The illuminance data of each coordinate point in the detection matrix are obtained by measuring the detection matrix one by one according to the measurement sequence of the light uniformity measuring instrument.

8. The automatic detection method for a light source machine according to claim 1, characterized in that, After the illumination uniformity measuring instrument is activated, moves along the illumination uniformity detection trajectory, and measures the illumination uniformity of the light source, the process includes: After the illuminance meter, color temperature meter, and light uniformity meter have all completed their measurements, the motion module is reset to its initial state, and the test results are recorded.

9. The automatic detection method for a light source machine according to claim 8, characterized in that, The recorded detection results include: The test results are uploaded to the production management system, and it is determined whether the test results meet the usage specifications of the light source machine. If the conditions are met, the test passes. If the requirements are not met, the test fails, and the light source machine cannot be used for production.

10. An automatic detection system for a light source machine, characterized in that, include: Dark box, illuminance meter, color temperature meter, illumination uniformity meter, motion module and controller; The light source, the illuminance meter, the color temperature meter, the illumination uniformity meter, and the motion module are housed inside the dark box. The illuminance meter, the color temperature meter, the illumination uniformity meter, and the motion module are all connected to the controller; The controller is used to plan an illuminance detection trajectory, a color temperature detection trajectory, and an illumination uniformity detection trajectory on the light-emitting surface of the light source machine, respectively; the illuminance detection trajectory includes an initial illuminance coordinate point, the color temperature detection trajectory includes an initial color temperature coordinate point, and the illumination uniformity detection trajectory includes an initial detection matrix; The controller is also used to control the illuminance measuring instrument to move along the illuminance detection trajectory at the initial illuminance coordinate point, and to measure the illuminance of the light source using the illuminance measuring instrument; It is also used to control the color temperature measuring instrument to move along the color temperature detection trajectory at the initial color temperature coordinate point, and to measure the color temperature of the light source using the color temperature measuring instrument; It is also used to control the illumination uniformity measuring instrument to move along the illumination uniformity detection trajectory on the initial detection matrix, and to measure the illumination uniformity of the light source using the illumination uniformity measuring instrument.

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