An AMC filter membrane testing device and testing method

Abstract

The embodiment of the present application provides an AMC filter membrane testing device and a testing method, and relates to the field of filter membrane testing. The AMC filter membrane testing device of the embodiment of the present application comprises a product verification unit, and an alkaline gas supply pipeline, an acidic gas supply pipeline, an organic matter supply pipeline and an air supply pipeline. The product verification unit comprises a plurality of test stations, each test station comprises a test tank for fixing the AMC filter membrane, a differential pressure gauge is connected between the gas inlet and the gas outlet of the test tank, a first sampling valve is connected to the gas inlet of the test tank, and a second sampling valve is connected to the gas outlet of the test tank. The alkaline gas supply pipeline, the acidic gas supply pipeline and the organic matter supply pipeline are connected to a static mixer in parallel with the air supply pipeline, and then connected to a test station. The AMC filter membrane testing device and the testing method of the embodiment of the present application realize the standardized testing of the filtering performance of the AMC filter membrane.

Description

Technical Field

[0001] This application relates to the field of filter membrane testing, and more specifically, to an AMC filter membrane testing device and testing method. Background Technology

[0002] Airborne molecular contaminants (AMCs) are non-particulate molecules that exist in cleanrooms and related controlled environments in gaseous or vaporous states and can harm products, processes, and equipment. They are chemical substances. To address the hazards of airborne molecular contaminants, factories routinely install AMC filter membranes, which remove airborne molecular contaminants through a synergistic combination of physical and chemical adsorption.

[0003] Standardized testing of the filtration performance of different AMC filter membranes is the foundation for achieving quantitative analysis of AMC filter membrane performance, controllable quality, technological iteration, and application matching. It transforms traditional subjective evaluation into standardized data evaluation, which runs through the entire chain of R&D, production, quality inspection, and selection, while meeting the stringent access requirements of high-precision industries.

[0004] However, there is currently no dedicated testing device for the filtration performance of AMC filter membranes, which cannot meet the standardized testing requirements for the filtration performance of AMC filter membranes. Summary of the Invention

[0005] The purpose of this application is to provide an AMC filter membrane testing device and testing method to achieve standardized testing of the filtration performance of AMC filter membranes.

[0006] In a first aspect, embodiments of this application provide an AMC filter membrane testing device, which includes: a product verification unit, an alkaline gas supply pipeline for providing alkaline gas, an acidic gas supply pipeline for providing acidic gas, an organic matter supply pipeline for providing gaseous organic matter, and an air supply pipeline for providing constant temperature and humidity air. The product verification unit includes several test stations. Each test station includes a test tank for fixing the AMC filter membrane, a differential pressure gauge for testing the pressure difference between the inlet and outlet of the test tank, and a first sampling valve and a second sampling valve for sampling at the inlet and outlet of the test tank. The differential pressure gauge is connected between the inlet and outlet of the test tank, the first sampling valve is connected to the inlet of the test tank, and the second sampling valve is connected to the outlet of the test tank. The alkaline gas supply pipeline, the acidic gas supply pipeline, and the organic matter supply pipeline are respectively connected in parallel with the air supply pipeline to a static mixer, and then connected to the air inlet of the test tank in the test station.

[0007] In the above-mentioned process, this device has multiple testing stations to filter three types of air molecular pollutants with the same background gas: alkaline gaseous pollutants, acidic gaseous pollutants, and gaseous organic pollutants. It can also simultaneously detect the clogging status and filtration performance of the AMC filter membrane online, providing a set of pollutant simulation, testing, and verification devices for the performance testing of AMC filter membranes, and realizing standardized testing of the filtration performance of AMC filter membranes.

[0008] In one possible implementation, at least one of the alkaline gas supply pipeline, the acidic gas supply pipeline, and the organic matter supply pipeline is divided into two or more target gas pipelines, the air supply pipeline is divided into multiple background gas pipelines, and each target gas pipeline is connected in parallel with one background gas pipeline to one of the static mixers and is correspondingly connected to one of the test stations.

[0009] In the above implementation process, more than two test stations can be set up for the filtration performance test of the same type of air molecular pollutants. This allows for simultaneous testing of the product performance of AMC filter membranes for the same type of air molecular pollutants under different concentrations, substances, and other operating conditions. It also allows for simultaneous comparative testing of the product performance of AMC filter membranes for the same type of air molecular pollutants under the same operating conditions.

[0010] In one possible implementation, each of the alkaline gas supply pipeline, the acidic gas supply pipeline, the organic matter supply pipeline, and the air supply pipeline is equipped with a manual isolation valve at its beginning near the source of the raw materials, and an automatic isolation valve is equipped at its end near the static mixer.

[0011] In the above implementation process, this device is equipped with a manual isolation valve at the beginning and an automatic isolation valve at the end for the pipeline used to transport gas. This enables graded shut-off, clear division of labor in operation, precise material control, and adaptation to downstream working conditions.

[0012] In one possible implementation, each of the alkaline gas supply pipeline, the acidic gas supply pipeline, the organic matter supply pipeline, and the air supply pipeline is further provided with at least one of a pressure regulating valve, a one-way valve, and an automatic isolation valve between the beginning end and the end end.

[0013] In the above implementation process, the device also installs a pressure regulating valve in the middle of the pipeline to stabilize the pipeline gas pressure, a check valve to prevent gas backflow, and an automatic isolation valve to achieve segmented disconnection and isolation of the pipeline with the isolation valves at the beginning and end, thereby improving safety.

[0014] In one possible implementation, each of the alkaline gas supply pipeline, the acidic gas supply pipeline, and the organic matter supply pipeline is further provided with a mass flow controller between the beginning end and the end end; The air supply line is equipped with a mass flow controller located downstream of the automatic isolation valve at the end of the line.

[0015] In the above process, a mass flow controller is installed in the middle of the alkaline gas supply pipeline, the acid gas supply pipeline, and the organic matter supply pipeline. The mass flow controller accurately controls the flow rate of alkaline gas, acid gas, and gaseous organic matter in each pipeline, and then enters the static mixer through the automatic isolation valve at the end.

[0016] A mass flow controller is installed after the automatic isolation valve at the end of the air supply line to precisely control the amount of constant temperature and humidity air entering the static mixer.

[0017] In one possible implementation, the first end of the organic matter supply pipeline is connected to a compressed air source, and a bubble tank for containing volatile organic compounds is provided between the first end and the last end to obtain air carrying gaseous organic compounds.

[0018] In the above process, after the compressed air passes through the bubbling tank, it carries out volatile organic compounds and forms gaseous organic compounds, thereby continuously providing a stable supply of gaseous organic compounds.

[0019] In one possible implementation, the organic matter supply line splits into two or more target gas lines near the beginning end, each of the target gas lines is equipped with the bubbler, and each of the target gas lines is connected in parallel with the air supply line to a static mixer.

[0020] In the above implementation process, when the bubbling tank contains different volatile organic compounds, two or more test stations corresponding to the organic compound supply pipeline can simultaneously test the product performance of the AMC filter membrane for different gaseous organic compounds. When the bubbling tank contains the same volatile organic compounds, these test stations can simultaneously compare and test the product performance of the AMC filter membrane for the same gaseous organic compounds under the same operating conditions.

[0021] In one possible implementation, the first end of the air supply pipeline is connected to a compressed air source, and a water tank equipped with a heater, a heat exchanger, a temperature sensor, and a dew point meter are sequentially arranged between the first end and the last end to obtain constant temperature and humidity air.

[0022] In the above process, compressed air passes through a water tank, and the water temperature in the tank is adjusted by controlling the heater to regulate the water vapor content carried by the compressed air. The water vapor content is also detected by a dew point meter. The compressed air passes through a heat exchanger to regulate the air temperature, and the air temperature is detected by a temperature sensor, thereby continuously providing stable constant temperature and humidity air.

[0023] In one possible implementation, the air supply line is divided into multiple background gas lines after the dew point meter. Each background gas line is equipped with the automatic isolation valve and is connected in parallel with the alkaline gas supply line, the acidic gas supply line, or the organic matter supply line to a static mixer.

[0024] In the above process, the air supply pipeline is divided into multiple background gas pipelines after the dew point meter, so as to provide the same background gas to each test station and realize the standardized testing of the filtration performance of AMC filter membrane.

[0025] Secondly, embodiments of this application provide a testing method based on the AMC filter membrane testing device provided in the first aspect, which includes the following steps: Multiple samples of the AMC filter membrane to be tested are respectively fixed in the test tanks of each of the test stations; The alkaline gas supply pipeline, the acidic gas supply pipeline, the organic matter supply pipeline, and the air supply pipeline are activated to introduce a test gas into each of the test tanks. The test gas includes a mixture of alkaline gas and constant temperature and humidity air, a mixture of acidic gas and constant temperature and humidity air, and a mixture of gaseous organic matter and constant temperature and humidity air. The value of the differential pressure gauge at each test station is used to determine whether the AMC filter membrane is clogged. If no clogging occurs, online sampling is performed using the first sampling valve and the second sampling valve at the test station. The concentration of the test gas before and after filtration through the AMC filter membrane is compared, and the filtration performance of the AMC filter membrane is determined based on the concentration difference.

[0026] In the above implementation process, the standardized testing of the filtration performance of AMC filter membranes can be achieved by using this device and following the above testing method. Attached Figure Description

[0027] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the structure of an AMC filter membrane testing device provided in an embodiment of this application.

[0029] Icons: 1-Alkaline gas supply line; 2-Acidic gas supply line; 3-Organic gas supply line; 4-Air supply line; 5-Product verification unit; 6-Analysis sampling unit; 01-Manual isolation valve; 02-Pressure regulating valve; 03-Check valve; 04-Automatic isolation valve; 05-Mass flow controller; 06-Bubbling tank; 07-Water tank; 08-Heat exchanger; 09-Temperature sensor; 10-Dew point meter; 11-Pressure sensor; 12-Circulating chiller; 13-Static mixer; 14-Test tank; 15-Differential pressure gauge; 16-First sampling valve; 17-Second sampling valve; 20-Outer casing; 21-Exhaust pipe. Detailed Implementation

[0030] The technical solutions in the embodiments of this application will now be described with reference to the accompanying drawings.

[0031] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0032] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments in this application without inventive effort are within the scope of protection of this application.

[0033] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0034] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0035] Please refer to Figure 1 The AMC filter membrane testing device provided in this embodiment includes: a product verification unit 5, an alkaline gas supply pipeline 1 for providing alkaline gas, an acid gas supply pipeline 2 for providing acidic gas, an organic matter supply pipeline 3 for providing gaseous organic matter, and an air supply pipeline 4 for providing constant temperature and humidity air. Product verification unit 5 includes several test stations. Each test station includes a test tank 14 for fixing the AMC filter membrane, a differential pressure gauge 15 for testing the pressure difference between the inlet and outlet of the test tank 14, and a first sampling valve 16 and a second sampling valve 17 for sampling at the inlet and outlet of the test tank 14. The differential pressure gauge 15 is connected between the inlet and outlet of the test tank 14, the first sampling valve 16 is connected to the inlet of the test tank 14, and the second sampling valve 17 is connected to the outlet of the test tank 14. The first sampling valve 16 and the second sampling valve 17 of each test station together form the analysis and sampling unit 6. Alkaline gas supply line 1, acidic gas supply line 2, and organic matter supply line 3 are connected in parallel with air supply line 4 to a static mixer 13, and then connected to the air inlet of test tank 14 in a test station.

[0036] In this application, test tank 14 refers to a tank used to fix an AMC filter membrane for filtration testing. It has an inlet for introducing mixed gas and an outlet for discharging mixed gas. The method of fixing the AMC filter membrane in test tank 14 and the positions of the inlet and outlet are such that the mixed gas flowing into test tank 14 from the inlet must pass through the AMC filter membrane before flowing out from the outlet. According to the above-mentioned flow direction of the mixed gas, "before the membrane" refers to the position in front of the AMC filter membrane, where the inlet is located in front of the membrane, and "behind the membrane" refers to the position behind the AMC filter membrane, where the outlet is located behind the membrane.

[0037] In the embodiments of this application, the device has multiple testing stations to filter three types of air molecular pollutants with the same background gas: alkaline gaseous pollutants, acidic gaseous pollutants, and gaseous organic pollutants. It can also simultaneously detect the clogging status and filtration performance of the AMC filter membrane online, providing a set of pollutant simulation, testing, and verification devices for the performance testing of AMC filter membranes, and realizing standardized testing of the filtration performance of AMC filter membranes.

[0038] Specifically, this device is equipped with an alkaline gas supply pipeline 1, an acidic gas supply pipeline 2, and an organic matter supply pipeline 3, as well as a separate air supply pipeline 4 to provide constant temperature and humidity air, thereby continuously generating background gas consistent with the cleanroom air environment. The alkaline gas supply pipeline 1, acidic gas supply pipeline 2, and organic matter supply pipeline 3 are connected in parallel with the air supply pipeline 4 to a static mixer 13 to form different mixed gases, thereby simulating the cleanroom air containing alkaline gaseous pollutants, acidic gaseous pollutants, and gaseous organic pollutants. These mixed gases are then used to test the filtration performance of the AMC filter membrane at the test station, enabling accurate testing of the AMC filter membrane's filtration performance.

[0039] Each test station is equipped with a differential pressure gauge 15 and a first sampling valve 16 and a second sampling valve 17 for online sampling before and after the AMC filter membrane. During the test, the differential pressure gauge 15 is used to determine whether the AMC filter membrane is clogged, and the filtration performance of the AMC filter is initially judged. Then, by comparing the sampling concentration before and after the membrane, the filtration performance of the AMC filter is further judged, thus forming a standardized test for the filtration performance of the AMC filter membrane.

[0040] This application does not impose any special requirements on the placement of the first sampling valve 16 and the second sampling valve 17, as long as they can achieve sampling. In one implementation, the first sampling valve 16 and the second sampling valve 17 at some testing stations are connected to the air inlet and outlet of the test tank 14 via pipelines, respectively, so that the analytical sampling unit 6 formed by the first sampling valve 16 and the second sampling valve 17 is independent of the product verification unit 5; the first sampling valve 16 and the second sampling valve at other testing stations are directly installed at the air inlet and outlet of the test tank 14, and the analytical sampling unit 6 at this location is integrated into the product verification unit 5 from a positional perspective.

[0041] In some embodiments of this application, at least one of the alkaline gas supply line 1, the acidic gas supply line 2, and the organic matter supply line 3 is divided into two or more (≥2) target gas lines, and the air supply line 4 is divided into multiple background gas lines. Each target gas line is connected in parallel with a background gas line to a static mixer 13 and is connected to a test station.

[0042] In this embodiment, the alkaline gas supply line 1, acidic gas supply line 2, and organic matter supply line 3 in this device are each divided into two target gas lines, and the air supply line 4 is divided into six background gas lines. Six test stations are set up. Specifically, the two target gas lines (alkaline gas lines) of the alkaline gas supply line 1 are connected in parallel with the two background gas lines to their respective static mixers 13, and are also connected to the two test stations to perform filtration testing of alkaline gaseous pollutants by the AMC filter membrane; the acidic gas supply line 4 is divided into six background gas lines. The two target gas pipelines (acid gas pipelines) of pipeline 2 are connected in parallel with the two background gas pipelines to their respective static mixers 13, and are also connected to the two test stations to perform filtration tests of the AMC filter membrane for acid gaseous pollutants; the two target gas pipelines (gaseous organic matter pipelines) of organic matter supply pipeline 3 are connected in parallel with the two background gas pipelines to their respective static mixers 13, and are also connected to the two test stations to perform filtration tests of the AMC filter membrane for gaseous organic pollutants.

[0043] like Figure 1 As shown, in this embodiment, the first sampling valves 16 and second sampling valves 17 of the four test stations connected by the two alkaline gas supply pipelines 1 and the two acidic gas supply pipelines 2 are respectively connected to the air inlet and air outlet of the test tank 14 through pipelines, so that the position of the analysis sampling unit 6 composed of these first sampling valves 16 and second sampling valves 17 is independent of the position of the product verification unit 5; the first sampling valves 16 and second sampling valves 17 of the two test stations connected by the two organic matter supply pipelines 3 are directly set at the air inlet and air outlet of the test tank 14, that is, the analysis sampling unit 6 at this position is integrated into the position of the product verification unit 5, so it is not marked.

[0044] In other embodiments, the alkaline gas supply line 1, the acidic gas supply line 2, and the organic matter supply line 3 can each be a single line, each connected to a background gas line and corresponding to a test station; or one of them can be divided into two or more target gas lines, and a matching number of background gas lines and test stations can be provided.

[0045] In the embodiments of this application, at least one of the alkaline gas supply pipeline 1, acidic gas supply pipeline 2, and organic matter supply pipeline 3 is divided into two or more target gas pipelines. Each target gas pipeline is mixed with the corresponding background gas pipeline and then connected to a test station. That is, two or more test stations are set up for the filtration performance test of the same type of air molecular pollutants. This allows for simultaneous testing of the product performance of the AMC filter membrane for the same type of air molecular pollutants under different concentrations, different substances, and other different operating conditions. It also allows for simultaneous comparative testing of the product performance of the AMC filter membrane for the same type of air molecular pollutants under the same operating conditions.

[0046] In some embodiments of this application, each of the alkaline gas supply pipeline 1, acidic gas supply pipeline 2, organic matter supply pipeline 3, and air supply pipeline 4 is equipped with a manual isolation valve 01 at its beginning near the raw material source and an automatic isolation valve 04 at its end near the static mixer 13. All automatic isolation valves 04 in this embodiment are pneumatic isolation valves; in other embodiments, other automatically controllable regulating valves may also be used.

[0047] In this application, each pipeline is divided into a beginning end and an end end according to the direction of gas flow. The beginning end refers to the end where gas flows into the pipeline, and the end end refers to the end where gas flows out of the pipeline.

[0048] In the embodiments of this application, the device for conveying gas pipelines is equipped with a manual isolation valve 01 at the beginning and an automatic isolation valve 04 at the end. This setup enables tiered shut-off with clear division of labor: the manual isolation valve 01 at the beginning acts as the main isolation valve, normally fully open, and can be manually closed under special circumstances to achieve complete physical isolation; the automatic isolation valve 04 at the end uses gas as a power source to automatically start and stop, adapting to the frequent operation requirements of continuous production; at the same time, there is less residual gas after the valve is closed, reducing media waste and the risk of gas accumulation in the pipeline. This setup also enables precise material control and adapts to downstream operating conditions: the automatic isolation valve 04 is located near the end of the pipeline, has a small opening and closing lag, and can quickly respond to the state of the static mixer 13 downstream of the pipeline.

[0049] In some embodiments of this application, each of the alkaline gas supply pipeline 1, acidic gas supply pipeline 2, organic matter supply pipeline 3, and air supply pipeline 4 is further provided with at least one of a pressure regulating valve 02, a one-way valve 03, and an automatic isolation valve 04 between its beginning and end.

[0050] In the embodiments of this application, based on the above-mentioned pipeline, the device also provides a pressure regulating valve 02 in the middle of the pipeline to stabilize the gas pressure in the pipeline, and stabilize the fluctuating inlet pressure at the beginning of the pipeline to the rated pressure required by the static mixer 13 and other equipment downstream of the pipeline, so as to avoid damage to downstream equipment and pipelines due to excessive pressure, or insufficient gas output and abnormal operating conditions due to excessive pressure; a one-way valve 03 is provided to prevent gas backflow; an automatic isolation valve 04 is provided to achieve segmented cut-off and isolation of the pipeline with the isolation valves at the beginning and end, thereby improving safety; at the same time, the above valves constitute a complete valve group, forming a complete protection chain of "manual main isolation at the beginning → pressure regulation and stabilization → backflow prevention → segmented pneumatic cut-off → pneumatic cut-off at the end".

[0051] In some embodiments of this application, each of the alkaline gas supply pipeline 1, the acidic gas supply pipeline 2, and the organic matter supply pipeline 3 is further provided with a mass flow controller 05 (MFC) between its beginning and end. A mass flow controller (MFC) is installed at the end of the air supply line 4, after the automatic isolation valve 04.

[0052] In this embodiment, the mass flow controllers 05 in the alkaline gas supply pipeline 1, acidic gas supply pipeline 2, organic matter supply pipeline 3, and air supply pipeline 4 are selected according to the type of gas to meet the flow control requirements of different gases.

[0053] In the embodiments of this application, a mass flow controller 05 is installed in the middle of each of the alkaline gas supply pipeline 1, the acid gas supply pipeline 2, and the organic matter supply pipeline 3. The mass flow controller 05 precisely controls the flow rate of alkaline gas, acid gas, and gaseous organic matter in each pipeline, and then enters the static mixer 13 through the automatic isolation valve 04 at the end.

[0054] A mass flow controller 05 is installed after the automatic isolation valve 04 at the end of the air supply line 4 to precisely control the amount of constant temperature and humidity air entering the static mixer 13.

[0055] In this application, since alkaline gases, acidic gases, and gaseous organic compounds are all considered pollutants, while constant temperature and humidity air is considered clean air, the design considerations for alkaline gas supply pipeline 1, acidic gas supply pipeline 2, organic compound supply pipeline 3, and air supply pipeline 4 differ. Specifically, near the end of alkaline gas supply pipeline 1, acidic gas supply pipeline 2, and organic compound supply pipeline 3, a mass flow controller 05 is installed first, followed by an automatic isolation valve 04. Similarly, near the end of air supply pipeline 4, an automatic isolation valve 04 is installed first, followed by a mass flow controller 05. This ensures that before the pollutants merge with the clean air, the automatic isolation valves 04 at the ends of each pipeline isolate the pollutants, allowing clean air to purge the static mixer 13 at the merging point, as well as the downstream pipelines and test tank. Using this pipeline design, at the start of the test, clean air is first introduced into the static mixer 13, as well as the downstream pipelines and test tank, followed by the pollutants; after the test, the pollutants are stopped first, followed by the clean air.

[0056] In this embodiment, the alkaline gas supply pipeline 1 consists of a manual isolation valve 01, a pressure regulating valve 02, a check valve 03, an automatic isolation valve 04, a mass flow controller 05, and an automatic isolation valve 04 connected in sequence. The manual isolation valve 01 at the beginning is connected to the alkaline gas source (NH3Gas), and the automatic isolation valve 04 at the end is connected to the corresponding static mixer 13. The alkaline gas supply pipeline 1 splits into two target gas pipelines (alkaline gas pipelines) after the automatic isolation valve 04 in the middle. Each alkaline gas pipeline is equipped with a mass flow controller 05 and an automatic isolation valve 04 in sequence, thereby controlling the flow rate of alkaline gas in each pipeline and automatically switching the pipeline on and off.

[0057] In this embodiment, the acid gas supply pipeline 2 consists of a manual isolation valve 01, a pressure regulating valve 02, a check valve 03, an automatic isolation valve 04, a mass flow controller 05, and an automatic isolation valve 04 connected in sequence. The manual isolation valve 01 at the beginning is connected to the acid gas source (SO2Gas), and the automatic isolation valve 04 at the end is connected to the corresponding static mixer 13. The acid gas supply pipeline 2 splits into two target gas pipelines (acid gas pipelines) after the automatic isolation valve 04 in the middle. Each acid gas pipeline is equipped with a mass flow controller 05 and an automatic isolation valve 04 in sequence, thereby controlling the flow rate of acid gas in each acid gas pipeline and automatically opening and closing the pipeline.

[0058] In some embodiments of this application, the first end of the organic matter supply pipeline 3 is connected to a compressed air source, and a bubble tank 06 for containing volatile organic compounds is provided between the first end and the last end to obtain air carrying gaseous organic compounds.

[0059] In the embodiments of this application, after compressed air passes through the bubbling tank 06, it carries out volatile organic compounds to form air containing saturated organic compounds (i.e., gaseous organic compounds). After merging with constant temperature and humidity air, it is supplied to the testing station for testing. The above-mentioned structure of the organic compound supply pipeline 3 can continuously provide stable gaseous organic compounds.

[0060] In some embodiments of this application, the organic matter supply line 3 is divided into two or more target gas lines near the beginning end. Each target gas line is equipped with a bubbler 06, and each target gas line is connected in parallel with the air supply line 4 to a static mixer 13.

[0061] In the embodiments of this application, the organic matter supply pipeline 3 is divided into two or more target gas pipelines, and each target gas pipeline is equipped with a bubble tank 06. When the bubble tank 06 contains different volatile organic compounds, the two or more test stations corresponding to the organic matter supply pipeline 3 can simultaneously test the product performance of the AMC filter membrane for different gaseous organic compounds (i.e., under different operating conditions). When the bubble tank 06 contains the same volatile organic compounds, these test stations can simultaneously compare and test the product performance of the AMC filter membrane for the same gaseous organic compounds under the same operating conditions.

[0062] In this embodiment, the organic matter supply pipeline 3 consists of a manual isolation valve 01, a pressure regulating valve 02, an automatic isolation valve 04, a mass flow controller 05, a bubble tank 06, a check valve 03, and an automatic isolation valve 04 connected in sequence. The manual isolation valve 01 at the beginning of the pipeline is connected to a compressed air source (CAD Gas), and the automatic isolation valve 04 at the end of the pipeline is connected to the corresponding static mixer 13. After passing through the bubble tank 06, the compressed air carries out the volatile organic compounds inside the bubble tank 06, forming gaseous organic matter. The organic matter supply pipeline 3 splits into two target gas pipelines (gaseous organic matter pipelines) after the pressure regulating valve 02 near the beginning. Each gaseous organic matter pipeline is equipped with an automatic isolation valve 04, a mass flow controller 05, a bubble tank 06, a check valve 03, and an automatic isolation valve 04 in sequence, thereby enabling each gaseous organic matter pipeline to form gaseous organic matter and controlling the flow rate of gaseous organic matter and the automatic on / off of the pipeline.

[0063] In some embodiments of this application, the first end of the air supply pipeline 4 is connected to a compressed air source, and a water tank 07 equipped with a heater, a heat exchanger 08, a temperature sensor 09, and a dew point meter 10 are sequentially arranged between the first end and the last end to obtain constant temperature and humidity air.

[0064] In the embodiments of this application, compressed air passes through water tank 07. The water vapor content carried by the compressed air is adjusted by controlling the heater to regulate the water temperature in water tank 07. The water vapor content is detected by dew point meter 10. Based on the data detected by dew point meter 10, the heater is controlled to adjust the water vapor content, thereby obtaining compressed air carrying a fixed amount of water vapor (constant humidity compressed air). The compressed air passes through heat exchanger 08 to regulate the air temperature. The air temperature is detected by temperature sensor 09. Based on the data detected by temperature sensor 09, the heat exchanger 08 is controlled to adjust the air temperature, thereby obtaining compressed air at a fixed temperature (constant temperature compressed air). Therefore, the above-described structure of compressed air supply pipeline 4 can continuously provide stable constant temperature and humidity air.

[0065] In some embodiments of this application, the air supply line 4 is divided into multiple background gas lines after the dew point meter 10. Each background gas line is equipped with an automatic isolation valve 04 and is connected in parallel with the alkaline gas supply line 1, the acidic gas supply line 2, or the organic matter supply line 3 to a static mixer 13.

[0066] In the embodiments of this application, the air supply line 4 is divided into multiple background gas lines after the dew point meter 10, thereby providing the same constant temperature and humidity air (i.e. the same background gas) to each test station and realizing standardized testing of the filtration performance of the AMC filter membrane.

[0067] In this embodiment, the air supply pipeline 4 consists of a manually operated isolation valve 01, a pressure regulating valve 02, an automatically operated isolation valve 04, a water tank 07, a heat exchanger 08, a one-way valve 03, a temperature sensor 09, a dew point meter 10, a pressure sensor 11, an automatically operated isolation valve 04, and a mass flow controller 05 connected in sequence. The heat exchanger 08 is also cyclically connected to a high-precision circulating chiller 12. The manually operated isolation valve 01 at the beginning of the pipeline is connected to a compressed air source (CAD Gas), and the mass flow controller 05 at the end of the pipeline is connected to the corresponding static mixer 13. The water tank 07 is also connected to a water source (Water) through the manually operated isolation valve 01 and the automatically operated isolation valve 04. The air supply pipeline 4 is divided into six target gas pipelines (constant temperature and humidity air pipelines) after the pressure sensor 11. Each constant temperature and humidity air pipeline is equipped with a mass flow controller and an automatically operated isolation valve 04 in sequence, thereby realizing the automatic on / off of each constant temperature and humidity air pipeline and controlling the amount of constant temperature and humidity air passing through the pipeline.

[0068] In some embodiments of this application, a housing 20 and an exhaust pipe 21 are also included. The above structures are all disposed inside the housing 20, and the housing 20 is provided with an exhaust pipe 21 for discharging overflow gas.

[0069] In some embodiments of this application, a fully automatic controller is also included, specifically including a PLC (Programmable Logic Controller) and a touch screen. The PLC is connected to the aforementioned automatic separation valve, pressure regulating valve 02, mass flow controller 05 and other devices to realize automatic process control, parameter monitoring and fault alarm.

[0070] This embodiment also provides a testing method for the AMC filter membrane testing device based on the foregoing embodiment, which includes the following steps: Multiple samples of the AMC filter membrane to be tested were fixed in the test tank 14 of each test station; Start alkaline gas supply line 1, acidic gas supply line 2, organic matter supply line 3, and air supply line 4, and introduce a test gas into each test tank 14. The test gas includes a mixture of alkaline gas and constant temperature and humidity air, a mixture of acidic gas and constant temperature and humidity air, and a mixture of gaseous organic matter and constant temperature and humidity air. The value of the differential pressure gauge 15 at each test station is used to determine whether the AMC filter membrane is clogged. If no clogging occurs, online sampling is performed through the first sampling valve 16 and the second sampling valve 17 at the test station. The concentration of the test gas before and after filtration through the AMC filter membrane is compared, and the filtration performance of the AMC filter membrane is determined based on the concentration difference.

[0071] In the embodiments of this application, the standardized testing of the filtration performance of the AMC filter membrane can be achieved by using this device according to the above testing method.

[0072] In the test method of this embodiment, the air supply pipeline 4 is started, and the compressed air source (CAD Gas) sequentially passes through the manual isolation valve 01, pressure regulating valve 02, automatic isolation valve 04, water tank 07, heat exchanger 08, one-way valve 03, temperature sensor 09, dew point meter 10, and pressure sensor 11 to form constant temperature and pressure air. Then, through the automatic isolation valve 04 of the 6-way constant temperature and humidity air pipeline and the flow controller, constant temperature and pressure air is supplied to different test stations.

[0073] Start alkaline gas supply line 1. The alkaline gas source (NH3Gas) sequentially passes through manual isolation valve 01, pressure regulating valve 02, check valve 03, and automatic isolation valve 04, and then through the mass flow controller 05 and automatic isolation valve 04 of the two alkaline gas lines to provide alkaline gas. After being fully mixed with the constant temperature and humidity air provided by the two constant temperature and humidity air lines in the above-mentioned constant temperature and humidity air lines, the mixture is supplied to the corresponding static mixture and then supplied to the corresponding test station for filtration testing.

[0074] Start the acid gas supply line 2. The acid gas source (SO2Gas) passes through the manual isolation valve 01, pressure regulating valve 02, check valve 03, and automatic isolation valve 04 in sequence. Then, it passes through the mass flow controller 05 and automatic isolation valve 04 of the two acid gas lines to provide acid gas. The acid gas is then fully mixed with the constant temperature and humidity air provided by the two constant temperature and humidity air lines in the above-mentioned constant temperature and humidity air lines and flows into the corresponding static mixture before being supplied to the corresponding test station for filtration testing.

[0075] When the organic matter supply line 3 is started, the compressed air source (CAD Gas) passes through the manual isolation valve 01 and the pressure regulating valve 02 in sequence, and then through the automatic isolation valve 04, mass flow controller 05, bubble tank 06, check valve 03 and automatic isolation valve 04 of the two gaseous organic matter lines to form gaseous organic matter. This gaseous organic matter is then fully mixed with the constant temperature and humidity air provided by the two constant temperature and humidity air lines in the above-mentioned constant temperature and humidity air lines and flows into the corresponding static mixture before being supplied to the corresponding test station for filtration testing.

[0076] At each test station, the filtration performance of the AMC filter membrane is verified by continuously introducing mixed gas into the test tank 14. First, the value of the differential pressure gauge 15 is used to determine if the membrane is clogged. Generally, a reading greater than 300 Pa indicates clogging, while a reading less than or equal to 300 Pa indicates no clogging. If no clogging occurs, the in-membrane concentration is sampled online using the first sampling valve 16, and the post-membrane concentration is sampled online using the second sampling valve 17. By comparing the difference between the in-membrane and post-membrane concentrations, the filtration performance of the AMC filter membrane is determined. Generally, a concentration difference of 40 Pa to 60 Pa indicates excellent filtration performance, greater than 60 Pa to 100 Pa indicates acceptable filtration performance, and greater than 100 Pa indicates poor filtration performance.

[0077] In summary, the AMC filter membrane testing device and testing method of this application realize the standardized testing of the filtration performance of AMC filter membranes.

[0078] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. An AMC filter membrane testing device, characterized in that, It includes: a product verification unit, an alkaline gas supply pipeline for providing alkaline gas, an acid gas supply pipeline for providing acidic gas, an organic matter supply pipeline for providing gaseous organic matter, and an air supply pipeline for providing constant temperature and humidity air. The product verification unit includes several test stations. Each test station includes a test tank for fixing the AMC filter membrane, a differential pressure gauge for testing the pressure difference between the inlet and outlet of the test tank, and a first sampling valve and a second sampling valve for sampling at the inlet and outlet of the test tank. The differential pressure gauge is connected between the inlet and outlet of the test tank, the first sampling valve is connected to the inlet of the test tank, and the second sampling valve is connected to the outlet of the test tank. The alkaline gas supply pipeline, the acidic gas supply pipeline, and the organic matter supply pipeline are respectively connected in parallel with the air supply pipeline to a static mixer, and then connected to the air inlet of the test tank in the test station.

2. The AMC filter membrane testing device according to claim 1, characterized in that, At least one of the alkaline gas supply pipeline, the acidic gas supply pipeline, and the organic matter supply pipeline is divided into two or more target gas pipelines. The air supply pipeline is divided into multiple background gas pipelines. Each target gas pipeline is connected in parallel with one background gas pipeline to one static mixer and is connected to one test station.

3. The AMC filter membrane testing device according to claim 1 or 2, characterized in that, Each of the alkaline gas supply pipeline, the acidic gas supply pipeline, the organic matter supply pipeline, and the air supply pipeline is equipped with a manual isolation valve at its beginning near the source of the raw materials, and an automatic isolation valve at its end near the static mixer.

4. The AMC filter membrane testing device according to claim 3, characterized in that, Each of the alkaline gas supply pipeline, the acidic gas supply pipeline, the organic matter supply pipeline, and the air supply pipeline is further provided with at least one of a pressure regulating valve, a one-way valve, and an automatic isolation valve between its starting end and its ending end.

5. The AMC filter membrane testing device according to claim 3, characterized in that, Each of the alkaline gas supply pipeline, the acidic gas supply pipeline, and the organic matter supply pipeline is further equipped with a mass flow controller between its starting end and its ending end; The air supply line is equipped with a mass flow controller located downstream of the automatic isolation valve at the end of the line.

6. The AMC filter membrane testing device according to claim 3, characterized in that, The first end of the organic matter supply pipeline is connected to a compressed air source, and a bubble tank for containing volatile organic compounds is provided between the first end and the last end to obtain air carrying gaseous organic compounds.

7. The AMC filter membrane testing device according to claim 6, characterized in that, The organic matter supply pipeline splits into two or more target gas pipelines near the first end. Each target gas pipeline is equipped with a bubbler, and each target gas pipeline is connected in parallel with the air supply pipeline to a static mixer.

8. The AMC filter membrane testing device according to claim 3, characterized in that, The first end of the air supply pipeline is connected to a compressed air source, and a water tank equipped with a heater, a heat exchanger, a temperature sensor, and a dew point meter are sequentially arranged between the first end and the last end to obtain constant temperature and humidity air.

9. The AMC filter membrane testing device according to claim 8, characterized in that, The air supply line is divided into multiple background gas lines after the dew point meter. Each background gas line is equipped with an automatic isolation valve and is connected in parallel with the alkaline gas supply line, the acidic gas supply line, or the organic matter supply line to a static mixer.

10. A test method based on the AMC filter membrane test apparatus as described in any one of claims 1 to 9, characterized in that, It includes the following steps: Multiple samples of the AMC filter membrane to be tested are respectively fixed in the test tanks of each of the test stations; The alkaline gas supply pipeline, the acidic gas supply pipeline, the organic matter supply pipeline, and the air supply pipeline are activated to introduce a test gas into each of the test tanks. The test gas includes a mixture of alkaline gas and constant temperature and humidity air, a mixture of acidic gas and constant temperature and humidity air, and a mixture of gaseous organic matter and constant temperature and humidity air. The value of the differential pressure gauge at each test station is used to determine whether the AMC filter membrane is clogged. If no clogging occurs, online sampling is performed using the first sampling valve and the second sampling valve at the test station. The concentration of the test gas before and after filtration through the AMC filter membrane is compared, and the filtration performance of the AMC filter membrane is determined based on the concentration difference.

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