Three-way gas source automatic switching turret mechanism

Abstract

The present application relates to the technical field of semiconductor, particularly to a three-way gas source automatic switching turret mechanism, comprising a hollow center gas distribution shaft, a DD motor, a rotating disc, a hinge socket, a lower gas ring, a graphite gas distribution ring, an upper gas ring and a vacuum gas distribution ring. The center gas distribution shaft passes through the DD motor, the bottom end is connected with a vacuum source, and the upper end is divided into multiple paths of vacuum through the vacuum gas distribution ring; the DD motor drives the rotating disc and the lower gas ring and the graphite gas distribution ring to rotate, and the upper gas ring is fixed; each gas distribution ring is provided with inner and outer double-layer gas paths, the inner layer is connected with nitrogen, and the outer layer is connected with vacuum and compressed air, and three-way gas source automatic switching is realized by rotating the rotating disc. More than ten work stations are switched by only two electromagnetic valves, the switching is stable, and the mechanism is suitable for SiC chip high pressure test sorting.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a three-way gas source automatic switching turret mechanism. Background Technology

[0002] With the large-scale deployment of new energy vehicles, photovoltaic inverters, energy storage, industrial drives, and data center power supplies, SiC is gradually replacing silicon-based IGBTs. High-voltage reliability has become a core threshold for mass production and automotive-grade approval. Verifying the insulation stability, gate oxide reliability, and dynamic robustness of SiC chips under rated high voltage, high temperature, high frequency, and complex environments, eliminating early failures, and calibrating lifespan, supports automotive / industrial-grade mass production approval. Traditional XY-axis serial movement for multi-site testing requires switching between vacuum, compressed air, and nitrogen gas paths via multiple solenoid valves. This results in complex gas path switching efficiency and risks of product scratches and electromagnetic interference from high-voltage testing to moving parts, affecting product quality. Existing production methods and equipment have the following drawbacks: 1. Traditional translation stage with serial XY axis movement results in long station switching times during multi-site SiC testing. Frequent material handling is required for multiple tests, and repeated mechanical positioning / handling can easily scratch the surface or electrodes of SiC devices, affecting insulation / conductivity. Furthermore, frequent switching between vacuum, compressed air, and nitrogen pipelines via multiple solenoid valves and other components is time-consuming, has low UPH (upper pressure per hour), and is structurally complex, offering no advantages for multi-site translation. 2. High-speed translation at multiple sites results in significant vibration. Excessive mechanical vibration can lead to unstable probe contact, high test noise, and low yield. 3. SiC testing is often conducted under high-voltage environments, and electromagnetic interference can affect the stability of servo / encoder systems. Summary of the Invention

[0003] In view of the problems existing in the prior art, the present invention is proposed.

[0004] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a three-way gas source automatic switching turret mechanism, comprising a central gas distribution shaft, a gas distribution shaft fixing block, a DD motor fixing seat, a DD motor, a turntable, a hinged socket, a lower gas ring, a graphite gas distribution ring, an upper gas ring, a vacuum gas distribution ring, a three-way solenoid valve, and a three-way connector; the central gas distribution shaft is a hollow structure, its lower part is connected to the gas distribution shaft fixing block, the gas distribution shaft fixing block is fixedly connected to the bottom surface of the machine base, the central gas distribution shaft passes through the center of the DD motor, and the upper part of the central gas distribution shaft is connected to the vacuum gas distribution ring; the DD motor is fixed to the machine base through the DD motor fixing seat, and the rotating part of the DD motor is fixedly connected to the turntable; The hinged socket is fixed to the turntable; the lower air ring is connected to the turntable, and the graphite gas distribution ring is connected to the lower air ring. The lower air ring, graphite gas distribution ring, hinged socket, and turntable rotate synchronously with the DD motor; the upper air ring is fixed; the bottom end of the central gas distribution shaft is connected to a vacuum source, and the upper end is divided into multiple vacuum air paths through the vacuum gas distribution ring; the upper air ring, graphite gas distribution ring, and lower air ring are provided with independent vacuum / compressed air paths and nitrogen air paths. The nitrogen air path is located in the inner layer, and the vacuum / compressed air path is located in the outer layer. The rotation of the turntable realizes the automatic switching of the three air sources: vacuum air path, compressed air path, and nitrogen air path.

[0005] As a preferred embodiment of the three-way gas source automatic switching turret mechanism of the present invention, it includes: a test connector, which is independently supported and separated from the main turret where the central gas distribution shaft is located and the hinged socket; the test connector is connected to a cylinder on the support; when the hinged socket rotates with the turntable to the test position, the cylinder extends to make the test connector contact the hinged socket for testing; after the test is completed, the cylinder retracts, and the hinged socket rotates with the turntable to the next position.

[0006] As a preferred embodiment of the three-way air source automatic switching turret mechanism of the present invention, the turntable is provided with a plurality of hinged sockets, corresponding to test stations A1-A4, feeding station B1 and picking station B2, the physical positions of feeding station B1 and picking station B2 are fixed; when the hinged socket rotates to the feeding station B1 position, the product is fed onto the socket at that position, and when it rotates to the picking station B2 position, the product is picked up from the socket at that position.

[0007] As a preferred embodiment of the three-way gas source automatic switching turret mechanism of the present invention, the vacuum / compressed air path and the nitrogen path of the upper gas ring, the graphite gas distribution ring and the lower gas ring are separated from each other and do not interfere with each other. The nitrogen path is arranged in the inner layer and the vacuum / compressed air path is arranged in the outer layer, and the two gas paths do not mix.

[0008] As a preferred embodiment of the three-way gas source automatic switching turret mechanism of the present invention, the nitrogen gas path is provided with nitrogen input ports corresponding to test stations A1-A4. Nitrogen gas passes sequentially through the nitrogen gas path inside the upper gas ring, the nitrogen gas path of the graphite gas distribution ring, and the nitrogen internal gas path corresponding to the lower gas ring, and is connected to the nitrogen input port of the hinge socket via an adapter. The upper gas ring is only provided with nitrogen input ports corresponding to the number of test stations. During the rotation of the turret, only the hinge socket at the test station position obtains nitrogen gas, while the hinge sockets at other stations cannot obtain nitrogen gas. Automatic switching of nitrogen gas is achieved by rotating the turret.

[0009] As a preferred embodiment of the three-way gas source automatic switching turret mechanism of the present invention, wherein: the vacuum path is divided into multiple vacuum paths by the vacuum distribution ring, which are connected to the outer vacuum path of the upper part of the gas ring, and then sequentially pass through the vacuum path of the graphite distribution ring and the vacuum path of the lower part of the gas ring, and are connected to the hinged socket interface at the corresponding position; when the turntable rotates to the corresponding position, the vacuum path at that position is automatically connected and the vacuum is maintained continuously.

[0010] As a preferred embodiment of the three-way air source automatic switching turret mechanism of the present invention, wherein: the switching of vacuum and compressed air paths at the material feeding station B1 and the material picking station B2 is achieved through the three-way solenoid valve and the three-way connector; the vacuum outlet of the vacuum distribution ring corresponding to the material feeding station B1 and the material picking station B2 is connected to the A port of the three-way connector, the external compressed air path is connected to the B port of the three-way connector after being connected to the three-way solenoid valve at the corresponding position, and the C port of the three-way connector is connected to the vacuum / compressed air path inlet of the upper part of the air ring corresponding to the material feeding station B1 and the material picking station B2; when the DD motor drives the hinged socket to rotate to the material feeding station B1 or the material picking station B2, the three-way solenoid valve opens to connect the compressed air, thereby breaking the vacuum path from the upper part of the air ring through the graphite distribution ring to the lower part of the air ring at that position, so as to realize vacuum breaking and material picking.

[0011] As a preferred embodiment of the three-way gas source automatic switching turret mechanism of the present invention, the graphite gas distribution ring is made of graphite material and is connected to the lower gas ring by screws. The graphite gas distribution ring rotates synchronously with the lower gas ring and the turntable, and is used to realize the conduction and sliding fit sealing of the nitrogen gas path and the vacuum / compressed air gas path between the fixed upper gas ring and the lower gas ring that rotates with the turntable.

[0012] As a preferred embodiment of the three-way air source automatic switching turret mechanism of the present invention, wherein: the number of hinged sockets is determined according to the station settings, the number of vacuum air paths divided by the vacuum air distribution ring corresponds to the number of hinged sockets on the turntable; the number of hinged sockets is 6, 8, 10, 12 or 16, which correspond to testing station, material picking station, material discharging station and clearance station.

[0013] As a preferred embodiment of the three-way gas source automatic switching turret mechanism of the present invention, the lower gas ring has 16 nitrogen outlets and 16 vacuum outlets, the upper gas ring has 4 nitrogen inlets and 16 vacuum inlets, and the vacuum distribution ring has 16 vacuum outlets; the nitrogen inlets of the upper gas ring are set corresponding to the test stations A1-A4, and the machine nitrogen inlet is divided into four and connected to the nitrogen inlets respectively; two of the vacuum outlets of the vacuum distribution ring corresponding to the material feeding station B1 and the material picking station B2 are connected to the upper gas ring through the three-way connector and the three-way solenoid valve, and the remaining 14 vacuum outlets are directly connected to the corresponding vacuum inlets of the upper gas ring; the turret mechanism also includes quick connectors for quick connection of each gas path.

[0014] The beneficial effects of this invention are: it can automatically switch between the three gas paths of vacuum, compressed air and nitrogen during the rotation of the turret; the mechanism is simple and reliable; and only two electronic valves are needed to change the gas path for more than a dozen stations. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the three-way gas path automatic switching main tower mechanism in this invention; Figure 2 This is a schematic diagram of the three-way automatic gas path switching mechanism in this invention; Figure 3This is a schematic diagram of the lower gas ring structure in this invention; Figure 4 This is a schematic diagram of the graphite gas distribution ring structure in this invention; Figure 5 This is a schematic diagram of the upper part of the gas ring structure in this invention; Detailed Implementation To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0017] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0018] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments.

[0019] like Figures 1 to 5 As shown, this invention provides a three-way gas source automatic switching turret mechanism, mainly used for high-voltage, high-current testing of SiC automotive electronic chips during the testing and sorting process. During testing, the test voltage can reach 2000V and the test current can reach 140A. To prevent arcing damage during product testing, nitrogen gas is required for protection. Simultaneously, frequent switching between three gas sources is necessary: ​​vacuum gas (for product adsorption), compressed air gas (for vacuum breaking and material removal), and nitrogen gas (for arcing protection). This invention achieves automatic switching of the three gas sources through turret rotation, using only two three-way solenoid valves to complete gas path changes for more than a dozen stations.

[0020] In this embodiment, the main tower of the turret mechanism is mainly composed of the following components: a central air distribution shaft 101, an air distribution shaft fixing block 102, a DD motor mounting base 103, a DD motor 104, a test connector 105, a hinged socket 106, a turntable 107, a lower air ring 108, a graphite air distribution ring 109, an upper air ring 110, a three-way solenoid valve 111, a vacuum air distribution ring 112, a quick connector 113, and a three-way connector 114. The turntable 107 has multiple stations arranged along its circumference, including test stations A1-A4 (i.e., test stations 1#-4#), a material feeding station B1, and a material picking station B2. The remaining stations are clearance stations or other stations. This turret is equipped with 16 hinged sockets 106, corresponding to 16 workstations. Four of these are testing workstations (A1-A4), one is a material handling workstation (B2), one is a material unloading workstation (B1), and the remaining 10 are clearance or other workstations. Depending on the actual workstation requirements, the number of hinged sockets 106 can also be set to 6, 8, 10, 12, etc. The number of vacuum air paths branched out by the vacuum distribution ring 112 corresponds to the number of hinged sockets 106.

[0021] In terms of structural connections, the central air distribution shaft 101 is a hollow structure. Its lower part is connected to the air distribution shaft fixing block 102, and the upper part of the air distribution shaft fixing block 102 is connected and fixed to the bottom surface of the machine base, so that the central air distribution shaft 101 is fixed on the machine base. The central air distribution shaft 101 passes through the center of the DD motor 104—the DD motor 104 is a hollow structure, through which the central air distribution shaft 101 passes, forming a rotational fit between the two. The upper part of the central air distribution shaft 101 is connected to the vacuum air distribution ring 112, through which multiple vacuum air paths are branched out. The number of vacuum air paths is related to the number of hinged sockets 106 on the turntable 107, which is 16 in this embodiment. The DD motor mounting base 103 is fixedly connected to the DD motor 104 and is fixedly connected to the top of the machine base. The rotating part of the DD motor 104 is fixedly connected to the turntable 107. When the DD motor 104 rotates, it drives the turntable 107 to rotate. Hinged socket 106 is fixed to turntable 107 and rotates with it. The lower air ring 108 is connected to turntable 107 by screws, and the graphite air distribution ring 109 is connected to the lower air ring 108 by screws. The lower air ring 108 has 16 vacuum / compressed air outlets and 16 nitrogen outlets, corresponding to 16 hinged sockets 106, each with one vacuum / compressed air outlet. The lower air ring 108, hinged sockets 106, graphite air distribution ring 109, and turntable 107 rotate counterclockwise with DD motor 104. The upper air ring 110 is fixed, and the three-way connector 114 and three-way solenoid valve 111 are fixed to the machine support.

[0022] The test connector 105 is independently supported, separate from the main tower where the central air shaft 101 is located and the hinged socket 106, and has no connection to the turret. The test connector 105 is connected to a cylinder on the support. When the hinged socket 106 rotates with the turntable 107 to the corresponding test positions A1-A4, the cylinder extends, and the test connector 105 contacts the hinged socket 106 for testing. After the test, the cylinder retracts, and the hinged socket 106 rotates with the turntable 107 to the next position. This independent support design keeps the test connector 105 away from the DD motor 104, avoiding the impact of electromagnetic interference under high-voltage testing conditions on the stability of the servo motor and encoder.

[0023] The physical positions of the feeding station B1 and the picking station B2 are fixed. When the hinged socket 106 rotates to the feeding station B1, it feeds the product onto the socket at position B1; when the hinged socket 106 rotates to the picking station B2, it picks up the product from the socket at position B2.

[0024] The core of this invention lies in the automatic switching principle of the three gas sources. The working process of the nitrogen gas path, the vacuum gas path, and the vacuum / compressed air switching gas path will be explained in detail below.

[0025] In the overall layout of the three gas sources, the central gas distribution shaft 101 is a hollow structure, with its bottom end connected to a vacuum source (vacuum pump) and its upper end connected to a vacuum distribution ring 112, which distributes multiple vacuum streams (16 streams in this embodiment). The vacuum / compressed air and nitrogen gas paths of the upper gas ring 110, graphite gas distribution ring 109, and lower gas ring 108 are separate and do not interfere with each other, preventing the gases from mixing. The inner layer is the nitrogen gas path, and the outer layer is the vacuum / compressed air path. This double-layered gas path layout is one of the key designs of this invention, allowing the two gases to travel independently and without interference within the same gas distribution ring assembly.

[0026] Regarding the principle of nitrogen gas path switching (corresponding to test stations A1-A4): The nitrogen inlet of the machine is divided into four parts, which are connected to nitrogen inlets 501 #1-#4 of the upper gas ring 110 respectively. Nitrogen gas passes through the nitrogen gas path inside the upper gas ring 110, then through the nitrogen gas path of the graphite gas distribution ring 109, and directly reaches the nitrogen gas path corresponding to the lower gas ring 108. It then connects to the nitrogen input port of the hinged socket 106 via an adapter. Since the upper gas ring 110 only has four nitrogen input ports 501, corresponding to the four test stations A1-A4, only the hinged sockets 106 at the four test positions can obtain nitrogen during turret rotation; the hinged sockets 106 at other stations cannot obtain nitrogen. Automatic switching of the nitrogen gas path is achieved through turret rotation, eliminating the need for additional solenoid valve control and supplying nitrogen only to the actual test station, thus saving nitrogen consumption.

[0027] Regarding the principle of vacuum circuit connection and disconnection (excluding the feeding station B1 and the unloading station B2): The vacuum distribution ring 112 divides the vacuum transmitted from the central distribution shaft 101 into multiple paths, which in this embodiment are 16 paths. 14 of these paths are directly connected to the 14 vacuum inlets 601 of the upper part of the air ring 110, and the other two paths correspond to stations B1 and B2, as described below regarding the vacuum / compressed air switching path. The vacuum circuit passes through the outer vacuum circuit of the upper part of the air ring 110, then through the vacuum circuit of the graphite distribution ring 109 and the vacuum circuit of the lower part of the air ring 108, and connects to the hinged socket 106 interface at the corresponding position. When the turntable 107 rotates to the corresponding position, the vacuum circuit at that position is automatically connected, and the vacuum is maintained continuously. Since the vacuum distribution ring 112 is fixed along with the central distribution shaft 101, and the upper gas ring 110 is also fixed, all vacuum channels are always connected. When the turret rotates to any position, the hinged socket 106 at that position is in a vacuum adsorption state.

[0028] Regarding the switching principle of the vacuum / compressed air circuit (vacuum-compressed air switching at the discharge station B1 and the pick-up station B2, i.e., vacuum-vacuum breaking switching): The vacuum outlet of the vacuum distribution ring 112 corresponding to the discharge station B1 and the pick-up station B2 is connected to the A1141 interface of the three-way connector 114. The external compressed air circuit is connected to the three-way solenoid valve 111 at the B1 / B2 positions. Then, the outlet of the three-way solenoid valve 111 is connected to the B1142 interface of the three-way connector 114. The C1143 interface of the three-way connector 114 is connected to the vacuum / compressed air circuit inlet of the upper air ring 110 corresponding to the B1 / B2 positions. The three-way solenoid valve 111 is a normally closed valve, which closes the compressed air circuit and keeps the vacuum circuit open in the default state. When the DD motor 104 rotates the hinged socket 106 to the unloading station B1 or the unloading station B2, the three-way solenoid valve 111 opens, connecting the compressed air. The compressed air enters the air path corresponding to the upper air ring 110 through the three-way connector 114, disrupting the vacuum path from the upper air ring 110 to the graphite distribution air ring 109 and the lower air ring 108 at that position. This breaks the vacuum in the hinged socket 106, enabling the unloading or loading operation. The switching between vacuum and compressed air paths at the unloading station B1 and the unloading station B2 is achieved solely through the three-way solenoid valve 111 and the three-way connector 114. The entire turret mechanism, with its dozen or so stations, requires only two three-way solenoid valves 111 to complete all air path changes, resulting in a simple and reliable structure.

[0029] Regarding the gas path interface arrangement of each gas distribution ring, the lower gas ring 108 has 16 nitrogen outlets 301 and 16 vacuum outlets 401, corresponding to 16 hinged sockets 106 respectively. The upper gas ring 110 has 4 nitrogen inlets 501 and 16 vacuum inlets 601, with nitrogen inlets 501 corresponding to test stations A1-A4. The vacuum gas distribution ring 112 has 16 vacuum outlets 701, of which two vacuum outlets corresponding to the material discharge station B1 and the material pick-up station B2 are connected to the upper gas ring 110 via a three-way connector 114 and a three-way solenoid valve 111, while the remaining 14 vacuum outlets are directly connected to the corresponding vacuum inlets 601 of the upper gas ring 110. Quick connectors 113 are used for quick connection of each gas path, facilitating gas path installation and maintenance.

[0030] The graphite gas distribution ring 109 is made of graphite material, possessing excellent self-lubricating and wear-resistant properties. It is connected to the lower gas ring 108 via screws and rotates synchronously with the lower gas ring 108 and the turntable 107. The graphite gas distribution ring 109 is positioned between the stationary upper gas ring 110 and the rotating lower gas ring 108, utilizing the self-lubricating properties of graphite material to achieve a sliding fit and seal between them. When the turntable 107 drives the lower gas ring 108 and the graphite gas distribution ring 109 to rotate, the upper gas ring 110 remains fixed, and the upper surface of the graphite gas distribution ring 109 slides in contact with the lower surface of the upper gas ring 110. This ensures that the nitrogen gas path and the vacuum / compressed air gas path remain open and sealed throughout the rotation process, preventing leakage or cross-contamination of gas paths due to rotation.

[0031] The working process of this invention is as follows: The DD motor 104 drives the turntable 107 to rotate counterclockwise, and the hinged socket 106 fixed on the turntable 107 rotates accordingly, passing sequentially through the feeding station B1, each test station A1-A4, and the picking station B2. At the feeding station B1, the product is fed onto the hinged socket 106. At this time, the three-way solenoid valve 111 opens to connect compressed air to break the vacuum. After the product falls smoothly into the socket, the three-way solenoid valve 111 closes to restore vacuum adsorption. The hinged socket 106 maintains a vacuum adsorption state throughout the rotation of the turntable. When the hinged socket 106 rotates to the test station A1-A4, the nitrogen inlet 501 of the upper air ring 110 connects with the nitrogen gas path at this position, and nitrogen is automatically introduced into the socket for anti-sparking protection. At the same time, the test connector 105 contacts the socket under the push of the cylinder to perform high-voltage and high-current testing. After the test is completed, the cylinder retracts, and the socket continues to rotate to the next station. When the socket rotates to the material handling station B2, the three-way solenoid valve 111 opens again to connect compressed air to break the vacuum and remove the tested product. Throughout the process, the switching of the three air sources is automatically completed through the mechanical alignment of the turret rotation and the opening and closing of the two three-way solenoid valves 111, without the need for complex electrical control logic. The air switching pressure is stable, ensuring the stability and consistency of product testing.

[0032] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A three-source gas source automatic switching turret mechanism, characterized in that, The system includes a central air distribution shaft (101), an air distribution shaft fixing block (102), a DD motor mounting base (103), a DD motor (104), a turntable (107), a hinged socket (106), a lower air ring (108), a graphite air distribution ring (109), an upper air ring (110), a vacuum air distribution ring (112), a three-way solenoid valve (111), and a three-way connector (114). The central air distribution shaft (101) has a hollow structure, and its lower part is fixed to the air distribution shaft. The fixed block (102) is connected to the bottom surface of the machine base. The central air distribution shaft (101) passes through the center of the DD motor (104). The upper part of the central air distribution shaft (101) is connected to the vacuum air distribution ring (112). The DD motor (104) is fixed to the machine base through the DD motor mounting base (103). The rotating part of the DD motor (104) is fixed to the turntable (107). The hinge type S The socket (106) is fixed on the turntable (107); the lower air ring (108) is connected to the turntable (107), and the graphite air distribution ring (109) is connected to the lower air ring (108). The lower air ring (108), the graphite air distribution ring (109), the hinged socket (106), and the turntable (107) rotate synchronously with the DD motor (104); the upper air ring (110) remains stationary; the central air distribution shaft... The bottom end of (101) is connected to a vacuum source, and the upper end is divided into multiple vacuum air paths through the vacuum gas distribution ring (112). The upper gas ring (110), the graphite gas distribution ring (109) and the lower gas ring (108) are provided with independent vacuum / compressed air paths and nitrogen gas paths. The nitrogen gas path is located in the inner layer and the vacuum / compressed air path is located in the outer layer. The automatic switching of the three gas sources of vacuum air path, compressed air path and nitrogen gas path is realized by the rotation of the turntable (107).

2. The three-way gas source automatic switching turret mechanism according to claim 1, characterized in that, It also includes a test connector (105), which is independently supported and separated from the main tower where the central air distribution shaft (101) is located and the hinged socket (106). The test connector (105) is connected to a cylinder on the support. When the hinged socket (106) rotates to the test station with the turntable (107), the cylinder extends to make the test connector (105) contact the hinged socket (106) for testing. After the test is completed, the cylinder retracts and the hinged socket (106) rotates to the next station with the turntable (107).

3. The three-way gas source automatic switching turret mechanism according to claim 1, characterized in that, The turntable (107) is provided with a plurality of hinged sockets (106), and correspondingly provided with test stations A1-A4, feeding station B1 and picking station B2. The physical positions of feeding station B1 and picking station B2 are fixed. When the hinged socket (106) rotates to the feeding station B1, the product is fed onto the socket at that position. When it rotates to the picking station B2, the product is picked up from the socket at that position.

4. The three-way gas source automatic switching turret mechanism according to claim 1, characterized in that, The vacuum / compressed air path and nitrogen path of the upper gas ring (110), graphite gas distribution ring (109) and lower gas ring (108) are separate and do not interfere with each other. The nitrogen path is arranged in the inner layer and the vacuum / compressed air path is arranged in the outer layer. The two gas paths do not mix.

5. The three-way gas source automatic switching turret mechanism according to claim 1, characterized in that, The nitrogen gas path is provided with nitrogen inlets corresponding to test stations A1-A4. Nitrogen gas passes sequentially through the nitrogen gas path inside the upper gas ring (110), the nitrogen gas path of the graphite gas distribution ring (109), and the nitrogen gas path inside the lower gas ring (108), and is connected to the nitrogen inlet of the hinge socket (106) via an adapter. The upper gas ring (110) is only provided with nitrogen inlets corresponding to the number of test stations. During the rotation of the turntable (107), only the hinge socket (106) at the test station position obtains nitrogen gas, while the hinge sockets (106) at other stations cannot obtain nitrogen gas. The automatic switching of nitrogen gas is achieved by rotating the turret.

6. The three-way gas source automatic switching turret mechanism according to claim 1, characterized in that, The vacuum path is divided into multiple vacuum paths by the vacuum distribution ring (112), which are connected to the outer vacuum path of the upper part of the gas ring (110), and then pass through the vacuum path of the graphite distribution ring (109) and the vacuum path of the lower part of the gas ring (108) in sequence, and are connected to the hinged socket (106) interface at the corresponding position; when the turntable (107) rotates to the corresponding position, it automatically connects the vacuum path at that position and maintains the vacuum continuously.

7. The three-way gas source automatic switching turret mechanism according to claim 3, characterized in that, The switching of vacuum and compressed air paths at the feeding station B1 and the picking station B2 is achieved through the three-way solenoid valve (111) and the three-way connector (114). The vacuum outlet of the vacuum distribution ring (112) at the feeding station B1 and the picking station B2 is connected to the A port of the three-way connector (114). The external compressed air path is connected to the three-way solenoid valve (111) at the corresponding position and then connected to the B port of the three-way connector (114). The C port of the three-way connector (114) is connected to the vacuum outlet of the vacuum distribution ring (112) at the feeding station B1 and the picking station B2 at the picking station B2. The vacuum / compressed air inlet is connected to the upper air ring (110) at the corresponding feeding station B1 and picking station B2. When the DD motor (104) drives the hinged socket (106) to rotate to the feeding station B1 or picking station B2, the three-way solenoid valve (111) opens to connect the compressed air, thereby breaking the vacuum air path from the upper air ring (110) through the graphite air distribution ring (109) to the lower air ring (108) at that position, so as to realize vacuum breaking and material picking.

8. The three-way gas source automatic switching turret mechanism according to claim 1, characterized in that, The graphite gas distribution ring (109) is made of graphite material and is connected to the lower gas ring (108) by screws. The graphite gas distribution ring (109) rotates synchronously with the lower gas ring (108) and the turntable (107) to realize the conduction and sliding fit sealing of the nitrogen gas path and the vacuum / compressed air gas path between the fixed upper gas ring (110) and the lower gas ring (108) that rotates with the turntable.

9. The three-way gas source automatic switching turret mechanism according to claim 1, characterized in that, The number of hinged sockets (106) is determined according to the station settings. The number of vacuum air paths divided by the vacuum distribution ring (112) corresponds to the number of hinged sockets (106) on the turntable (107). The number of hinged sockets (106) is 6, 8, 10, 12 or 16, which correspond to testing station, material picking station, material unloading station and clearance station.

10. The three-way gas source automatic switching turret mechanism according to claim 1, characterized in that, The lower gas ring (108) has 16 nitrogen outlets (301) and 16 vacuum outlets (401), the upper gas ring (110) has 4 nitrogen inlets (501) and 16 vacuum inlets (601), and the vacuum distribution ring (112) has 16 vacuum outlets (701). The nitrogen inlets (501) of the upper gas ring (110) are set corresponding to the test stations A1-A4, and the nitrogen inlet of the machine is divided into four parts, which are respectively connected to the nitrogen outlets. The air inlet (501) is connected; the two paths of the vacuum outlet (701) of the vacuum distribution ring (112) corresponding to the material feeding station B1 and the material picking station B2 are connected to the upper part of the air ring (110) through the three-way connector (114) and the three-way solenoid valve (111), and the remaining 14 vacuum outlets are directly connected to the vacuum inlet (601) corresponding to the upper part of the air ring (110); the turret mechanism also includes a quick connector (113) for quick connection of each air path.

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