A fully integrated three-in-one parallel optical ferrule and a one-shot injection molding method thereof

Abstract

The application discloses a kind of full integration three-in-one parallel optical ferrule and its one-shot injection molding method, including ferrule matrix, optical fiber fixed unit, 45 ° aspherical surface total internal reflection unit, bottom microlens array, mechanical alignment structure and optical exit window.Ferrule matrix is one-shot injection molded by optical-grade transparent material, optical fiber fixed unit is arranged at the front end of ferrule, 45 ° aspherical surface total internal reflection unit is arranged inside ferrule, for turning horizontal propagation light beam into light beam towards the bottom surface of ferrule;Bottom microlens array is integrally arranged at the optical exit window of the bottom surface of ferrule, and directly faces VCSEL / PD chip array, so as to replace independent MOI board-mounted lens assembly.The structure makes ferrule body simultaneously have optical fiber fixing, light path turning, focusing / collimating and chip coupling functions, can reduce the number of parts, cancel air gap, reduce alignment error and insertion loss, improve the integration and assembly consistency of high-speed parallel optical interconnection module.

Description

Technical Field

[0001] This invention relates to the field of optical interconnect technology, specifically to a fully integrated three-in-one parallel optical ferrule and its one-time injection molding method. Background Technology

[0002] In high-speed optical interconnect systems, it is typically necessary to optically couple the horizontally transmitted beam in the optical fiber to the vertically emitting or receiving chip on the circuit board. Existing parallel optical interfaces usually employ a combination of a PLT ferrule and an MOI onboard lens assembly to achieve optical path reversal and beam focusing. In this type of solution, the MOI onboard lens assembly is usually independently mounted on the circuit board for optical coupling with the VCSEL / PD chip array; the PLT ferrule is used to fix the optical fiber and achieves optical path reversal through its internal reflection structure.

[0003] However, the aforementioned split structure still has significant shortcomings: 1. The MOI onboard lens assembly and the PLT ferrule are independent parts, requiring separate manufacturing, mounting, and alignment, resulting in complex assembly processes; 2. The MOI onboard lens assembly needs to be aligned with the VCSEL / PD chip array first, and the PLT ferrule needs to be aligned with the MOI onboard lens assembly, forming a multi-level alignment tolerance chain, which affects the stability of optical coupling; 3. There is usually an air gap between the MOI onboard lens assembly and the PLT ferrule, which can easily introduce Fresnel reflection, contamination risks, and additional insertion loss; 4. The independent MOI onboard lens assembly increases the overall package height, which is not conducive to the miniaturization and thinning design of co-packaged optics and high-density board-level optical interconnect structures. Summary of the Invention

[0004] The purpose of this invention is to address the shortcomings and deficiencies of existing technologies by providing a fully integrated three-in-one parallel optical ferrule and its one-time injection molding method. It integrates the MOI onboard lens array, the 45° aspherical total internal reflection structure, and the fiber fixing structure into the ferrule substrate, so that the bottom microlens array directly faces the VCSEL / PD chip array, thereby eliminating the need for independent MOI lens components, reducing optical interface and alignment errors, lowering insertion loss, and improving the integration and assembly stability of the optical interconnect module.

[0005] To achieve the above objectives, a fully integrated three-in-one parallel optical ferrule employs the following technical solution: it includes a ferrule substrate 10, an optical fiber fixing unit 20, a 45° aspherical total internal reflection unit 30, a bottom microlens array 40, a mechanical alignment structure 50, and an optical exit window 60; the ferrule substrate 10 is a single-piece structure injection molded from optical-grade transparent material; the optical fiber fixing unit 20 is integrally disposed at the front end of the ferrule substrate 10; the 45° aspherical total internal reflection unit 30 is integrally disposed within the ferrule substrate 10 and is inclined relative to the incident optical axis of the optical fiber; the bottom microlens array 40 is integrally disposed at the optical exit window 60 on the bottom surface of the ferrule substrate 10, and the bottom microlens array 40 is correspondingly disposed to the 45° aspherical total internal reflection unit 30; the bottom microlens array 40 directly faces the external VCSEL / PD. The chip array 70 is configured such that no separate MOI onboard lens assembly is required between the VCSEL / PD chip array 70 and the ferrule substrate 10; the mechanical alignment structure 50 is located at the bottom of the ferrule substrate 10.

[0006] The fiber fixing unit 20 includes a V-groove array 201, which includes a plurality of V-grooves spaced apart along the width direction of the ferrule substrate 10, and each V-groove is used to fix a fiber.

[0007] The 45° aspherical total internal reflection unit 30 is an inclined aspherical surface formed inside or at the rear end of the ferrule substrate 10. The inclined aspherical surface converts the horizontally propagating beam into a vertically propagating beam under the condition of total internal reflection, and simultaneously focuses or collimates the beam.

[0008] The bottom microlens array 40 includes multiple microlenses that correspond one-to-one with the optical fiber channels. Each microlens forms a corresponding optical path with the corresponding optical fiber channel and the corresponding optical region of the 45° aspherical total internal reflection unit 30.

[0009] The 45° aspherical total internal reflection unit 30 and the bottom microlens array 40 together constitute a double-sided aspherical optical system. The 45° aspherical total internal reflection unit 30 is used for optical path deflection and main focusing, while the bottom microlens array 40 is used for secondary focusing, pre-focusing, or aberration compensation.

[0010] The bottom microlens array 40 and the insert substrate 10 are formed in one step using the same injection mold and the same molding cycle, so that the relative position between the bottom microlens array 40 and the 45° aspherical total internal reflection unit 30 is guaranteed by the mold precision.

[0011] The mechanical alignment structure 50 is one of a guide post, a positioning post, or a positioning groove, and the mechanical alignment structure 50 is integrally formed with the insert base 10.

[0012] The optical-grade transparent material is a transparent optical plastic made of polyetherimide, polyethersulfone, or cyclic olefin polymer.

[0013] The optical emission window 60 is disposed at the bottom of the ferrule substrate 10, the bottom microlens array 40 is located above or inside the optical emission window 60, and the VCSEL / PD chip array 70 is located below the optical emission window 60 and is disposed opposite to the bottom microlens array 40.

[0014] A one-time injection molding method for a fully integrated three-in-one parallel optical ferrule includes the following steps:

[0015] S1. Design a ferrule optical system to form a predetermined optical correspondence between the fiber fixing unit 20, the 45° aspherical total internal reflection unit 30, the bottom microlens array 40, and the VCSEL / PD chip array 70.

[0016] S2. Manufacturing a composite precision injection mold, the composite precision injection mold including a main cavity for molding the insert substrate 10, an oblique molding structure for molding the 45° aspherical total internal reflection unit 30, and a bottom microlens molding structure for molding the bottom microlens array 40.

[0017] S3. Inject optical-grade transparent material into the composite precision injection mold, and obtain a single-piece ferrule substrate 10 through one precision injection molding, so that the fiber fixing unit 20, the 45° aspherical total internal reflection unit 30, the bottom microlens array 40, the mechanical alignment structure 50 and the optical emission window 60 are formed simultaneously.

[0018] S4. Anneal the molded ferrule substrate 10 to reduce internal stress;

[0019] S5. Install the optical fiber or optical fiber array in the optical fiber fixing unit 20, and position the bottom microlens array 40 corresponding to the VCSEL / PD chip array 70 through the mechanical alignment structure 50.

[0020] The working principle of this invention is as follows: It integrates fiber fixing, optical path reversal, beam focusing, and chip coupling functions into one unit through the ferrule substrate 10. The optical fiber or fiber array is installed in the fiber fixing unit 20 at the front end of the ferrule substrate 10 and is fixed by the V-groove array 21, ensuring that each fiber channel is aligned with the corresponding optical path inside the ferrule substrate 10. A 45° aspherical total internal reflection unit 30 is provided inside the ferrule substrate 10 to convert the direction of the beam. When the beam propagates along the length of the ferrule substrate 10 to the 45° aspherical total internal reflection unit 30, the beam undergoes total internal reflection at the aspherical reflecting surface, changing from a horizontal direction to a vertical direction towards the bottom surface of the ferrule substrate 10. Simultaneously, the aspherical surface shape focuses or collimates the beam.

[0021] In the receiving direction, the light beam output from the optical fiber first propagates horizontally inside the ferrule substrate 10, then bends downwards after passing through the 45° aspherical total internal reflection unit 30, and then enters the bottom microlens array 40 at the bottom of the ferrule substrate 10. The bottom microlens array 40 further focuses the beam onto the photosensitive surface of the PD chip in the VCSEL / PD chip array 70 below. In the transmitting direction, the light beam emitted from the VCSEL chip array is directly directed towards the bottom microlens array 40. It is first collected, pre-focused, or aberration corrected by the bottom microlens array 40, and then propagates to the 45° aspherical total internal reflection unit 30. The beam is then bends to a horizontal direction by the 45° aspherical total internal reflection unit 30 and finally couples into the corresponding optical fiber channel. Thus, the bottom microlens array 40 effectively integrates the traditionally independently set MOI onboard lens array directly onto the bottom surface of the ferrule, allowing it to directly face the VCSEL / PD chip array 70, eliminating the need for a separate MOI lens assembly on the circuit board.

[0022] The 45° aspherical total internal reflection unit 30 and the bottom microlens array 40 together constitute a double-sided aspherical optical system. The 45° aspherical total internal reflection unit 30 mainly undertakes the 90° optical path deflection and main focusing functions, while the bottom microlens array 40 mainly undertakes the chip-side beam collection, secondary focusing, and aberration compensation functions. Since both are injection molded in one piece with the ferrule substrate 10, their relative positions are guaranteed by the mold precision, which can reduce the assembly errors and air gaps between traditional split MOI lenses and ferrules. At the same time, the mechanical alignment structure 50 at the bottom of the ferrule substrate 10 cooperates with the circuit board or mounting base that carries the VCSEL / PD chip array 70 to achieve passive positioning between the bottom microlens array 40 and the VCSEL / PD chip array 70, thereby improving assembly efficiency and optical coupling stability.

[0023] The beneficial effects of this invention, achieved by adopting the above technical solution, are as follows: By integrating the fiber fixing unit, the 45° aspherical total internal reflection unit, and the bottom microlens array into the same ferrule substrate, the ferrule substrate simultaneously possesses fiber positioning, optical path bending, beam focusing / collimation, and chip-side coupling functions. Compared to the traditional scheme of separate PLT ferrules and MOI onboard lenses, this invention directly integrates the MOI onboard lens array, which was originally independently set on the circuit board, into the bottom surface of the ferrule, forming a bottom microlens array that directly faces the VCSEL / PD chip array. This reduces the number of independent optical components, eliminates the air gap between the ferrule and the MOI lens, and reduces optical interface reflection, contamination risks, and insertion loss.

[0024] In this invention, the 45° aspherical total internal reflection unit and the bottom microlens array together constitute a double-sided aspherical optical system. The 45° aspherical total internal reflection unit is used to achieve a 90° optical path deflection and primary focusing, while the bottom microlens array is used for chip-side beam collection, secondary focusing, and aberration compensation. Since the above optical structures are all injection molded from the same ferrule substrate in one step, their relative positions are guaranteed by the mold precision, which can effectively reduce the multi-level alignment tolerance chain in traditional split structures. Furthermore, the passive positioning between the ferrule and the VCSEL / PD chip array is achieved through a mechanical alignment structure, thereby improving assembly efficiency, coupling stability, and batch consistency, and also helping to reduce the overall package height. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the structure of the fully integrated three-in-one parallel optical ferrule in this invention;

[0027] Figure 2 This is a flowchart of the one-time injection molding method for the insert in this invention.

[0028] Explanation of reference numerals in the attached figures: ferrule substrate 10, fiber optic fixing unit 20, V-groove array 201, 45° aspherical total internal reflection unit 30, bottom microlens array 40, mechanical alignment structure 50, optical exit window 60, VCSEL / PD chip array 70. Detailed Implementation

[0029] See Figure 1As shown, the technical solution adopted in this specific embodiment of a fully integrated three-in-one parallel optical ferrule is as follows: it includes a ferrule substrate 10, an optical fiber fixing unit 20, a 45° aspherical total internal reflection unit 30, a bottom microlens array 40, a mechanical alignment structure 50, and an optical exit window 60. The ferrule substrate 10 is injection molded from optical-grade transparent material in one piece, and has an overall elongated transparent block structure, the interior of which can provide for beam propagation; the front end of the ferrule substrate 10 is provided with an optical fiber fixing unit 20, which includes a V-groove array 21. The V-groove array 21 includes multiple V-grooves arranged along the width direction of the ferrule substrate 10, and each V-groove is used to support and position an optical fiber. The optical fiber can be a single-core optical fiber or a multi-core ribbon optical fiber. After the optical fiber is installed in the V-groove array 21, the end face of the optical fiber faces the interior of the ferrule substrate 10, allowing the output or received light beam to propagate along the length of the ferrule substrate 10. A 45° aspherical total internal reflection unit 30 is provided at the rear end or the rear inner region of the ferrule substrate 10. The 45° aspherical total internal reflection unit 30 is an inclined aspherical curved surface integrally formed on the ferrule substrate 10, which is inclined relative to the incident optical axis of the optical fiber. When the light beam propagates along the length of the ferrule substrate 10 to the 45° aspherical total internal reflection unit 30, total internal reflection occurs at the aspherical curved surface, thereby changing the optical path from the horizontal direction to the vertical direction toward the bottom of the ferrule substrate 10.

[0030] The 45° aspherical total internal reflection unit 30 is used not only to change the direction of the optical path, but also to perform main focusing or collimation of the light beam. Specifically, by designing the radius of curvature, conic coefficient, and higher-order aspherical parameters of the 45° aspherical total internal reflection unit 30, the light beam reflected by it can form a light spot suitable for reception or transmission by the bottom microlens array 40 at a predetermined working distance, thereby improving the optical coupling efficiency.

[0031] The bottom of the ferrule substrate 10 is provided with an optical exit window 60, which corresponds to the reflected light path of the 45° aspherical total internal reflection unit 30. A bottom microlens array 40 is integrally formed at the optical exit window 60, and the bottom microlens array 40 and the 45° aspherical total internal reflection unit 30 are correspondingly arranged on the optical path. The bottom microlens array 40 includes multiple spaced microlenses, each microlens corresponding to a specific fiber optic channel. Thus, light beams from different fiber optic channels, after being deflected by the 45° aspherical total internal reflection unit 30, can enter their respective microlenses.

[0032] In this specific embodiment, the bottom microlens array 40 is an MOI onboard lens array integrated into the bottom surface of the ferrule. In other words, the MOI onboard lens array, which is independently set on the circuit board in the traditional structure, no longer exists as a separate component, but is directly integrally formed with the ferrule substrate 10 and located at the optical exit window 60 on the bottom surface of the ferrule substrate 10. In this way, the bottom microlens array 40 can directly face the VCSEL / PD chip array 70, thereby achieving direct optical coupling between the ferrule substrate 10 and the VCSEL / PD chip array 70.

[0033] The VCSEL / PD chip array 70 is disposed below the ferrule substrate 10 and can be mounted on a circuit board, photoelectric conversion substrate, or other support base. The bottom microlens array 40 is disposed opposite to the VCSEL / PD chip array 70, so that the light beam emitted by the VCSEL can enter the ferrule substrate 10 through the bottom microlens array 40 and be coupled to the optical fiber after being deflected by the 45° aspherical total internal reflection unit 30; at the same time, the light beam output from the optical fiber can also be deflected by the 45° aspherical total internal reflection unit 30 and enter the bottom microlens array 40, and be further focused onto the photosensitive surface of the PD chip.

[0034] The bottom of the ferrule base 10 is also provided with a mechanical alignment structure 50. The mechanical alignment structure 50 can be a guide post, a positioning post, a positioning protrusion, a positioning groove, or a combination thereof. In this embodiment, the mechanical alignment structure 50 is a positioning post provided on both sides of the bottom of the ferrule base 10. The mechanical alignment structure 50 cooperates with the positioning holes and positioning grooves on the circuit board or mounting base that carries the VCSEL / PD chip array 70, so that the bottom microlens array 40 can achieve passive precision alignment with the VCSEL / PD chip array 70.

[0035] Since the bottom microlens array 40 and the mechanical alignment structure 50 are both integrally formed with the ferrule substrate 10, their positional relationship is guaranteed by the precision of the injection mold. When the ferrule substrate 10 is mounted on the circuit board or mounting base through the mechanical alignment structure 50, the bottom microlens array 40 can directly maintain a predetermined alignment relationship with the VCSEL / PD chip array 70, reducing or avoiding active optical adjustment processes.

[0036] In the transmission direction, the beam emitted by the VCSEL chip first enters the bottom microlens array 40, where it is collected and pre-focused. Then, the beam propagates upward or toward the 45° aspherical total internal reflection unit 30 inside the ferrule substrate 10. After reaching the 45° aspherical total internal reflection unit 30, the beam undergoes total internal reflection and changes from the vertical direction to the horizontal direction. Finally, the beam propagates along the length of the ferrule substrate 10 and couples into the corresponding optical fiber.

[0037] In the receiving direction, the light beam output from the optical fiber propagates along the length of the ferrule substrate 10 to the 45° aspherical total internal reflection unit 30. The 45° aspherical total internal reflection unit 30 deflects the light beam into a vertical beam pointing towards the bottom and collimates or focuses it. The light beam then enters the bottom microlens array 40 and is further focused by the bottom microlens array 40 onto the photosensitive surface of the PD chip in the VCSEL / PD chip array 70.

[0038] In this specific embodiment, the 45° aspherical total internal reflection unit 30 and the bottom microlens array 40 constitute a double-sided aspherical optical system. The 45° aspherical total internal reflection unit 30 performs optical path deflection and primary focusing functions, while the bottom microlens array 40 performs secondary focusing, pre-focusing, or aberration compensation functions. Their synergistic effect improves beam coupling efficiency and reduces inter-channel differences and insertion loss.

[0039] The ferrule substrate 10 may be made of polyetherimide, polyethersulfone, cyclic olefin polymer, or other high-refractive-index transparent optical plastics. Preferably, the ferrule substrate 10 is made of an optical-grade transparent plastic with a high refractive index and good heat resistance to ensure that the 45° aspherical total internal reflection unit 30 meets the total internal reflection conditions, while also meeting the temperature reliability requirements in co-packaged optics or board-level optical interconnects.

[0040] See Figure 2 The one-time injection molding method for the fully integrated three-in-one parallel optical ferrule in this specific embodiment includes the following steps:

[0041] 1. Based on the number of fiber channels, fiber core diameter, spacing of VCSEL / PD chip array 70, and working distance, design the optical parameters of 45° aspherical total internal reflection unit 30 and bottom microlens array 40 to form a one-to-one optical coupling relationship between fiber channels, 45° aspherical total internal reflection unit 30, bottom microlens array 40, and VCSEL / PD chip array 70.

[0042] 2. Manufacturing a composite precision injection mold. The composite precision injection mold includes a main cavity for molding the shape of the ferrule substrate 10, a front cavity for molding the fiber fixing unit 20 and the V-groove array 21, an oblique core or oblique pin structure for molding the 45° aspherical total internal reflection unit 30, a microlens cavity structure for molding the bottom microlens array 40, and a positioning structure cavity for molding the mechanical alignment structure 50.

[0043] 3. Optical-grade transparent material is injected into a composite precision injection mold, and the ferrule substrate 10 is obtained through a single injection molding process. The molded ferrule substrate 10 simultaneously comprises an optical fiber fixing unit 20, a 45° aspherical total internal reflection unit 30, a bottom microlens array 40, a mechanical alignment structure 50, and an optical exit window 60. Since the above structures are formed by the same mold and the same injection cycle, the relative positional accuracy between the various optical structures can be guaranteed.

[0044] 4. Annealing is performed on the injection-molded ferrule substrate 10 to release the internal stress formed during the injection molding process and improve the dimensional stability and optical stability of the ferrule substrate 10.

[0045] 5. Install the optical fiber or optical fiber array into the V-groove array 21 of the optical fiber fixing unit 20 and fix it by adhesive, curing or other means; then install the ferrule substrate 10 onto the circuit board or mounting base carrying the VCSEL / PD chip array 70 through the mechanical alignment structure 50, so that the bottom microlens array 40 is directly opposite to the VCSEL / PD chip array 70.

[0046] Through the above structure and method, the present invention can integrate the originally discrete MOI onboard lens array, 45° reflection structure and PLT ferrule body into a single transparent optical ferrule, effectively reducing the number of parts, assembly cost, number of optical interfaces and alignment error of optical interconnect modules, and is suitable for high-speed parallel optical interconnect systems.

[0047] The above description is only for illustrating the technical solution of the present invention and is not intended to limit it. Any other modifications or equivalent substitutions made by those skilled in the art to the technical solution of the present invention, as long as they do not depart from the spirit and scope of the technical solution of the present invention, should be covered within the scope of the claims of the present invention.

Claims

1. A fully integrated three-in-one parallel optical ferrule, characterized in that: It includes a ferrule substrate (10), an optical fiber fixing unit (20), a 45° aspherical total internal reflection unit (30), a bottom microlens array (40), a mechanical alignment structure (50), and an optical exit window (60). The ferrule substrate (10) is a single-piece structure injection molded from optical-grade transparent material. The optical fiber fixing unit (20) is integrally disposed at the front end of the ferrule substrate (10), and the 45° aspherical total internal reflection unit (30) is integrally disposed inside the ferrule substrate (10) and is inclined relative to the incident optical axis of the optical fiber. The bottom microlens array (40) is integrally disposed at the optical exit window (60) on the bottom surface of the ferrule substrate (10), and the bottom microlens array (40) is correspondingly disposed with the 45° aspherical total internal reflection unit (30). The bottom microlens array (40) directly faces the external VCSEL / PD. The chip array (70) is configured such that no separate MOI onboard lens assembly is required between the VCSEL / PD chip array (70) and the ferrule substrate (10); the mechanical alignment structure (50) is located at the bottom of the ferrule substrate (10).

2. The fully integrated three-in-one parallel optical ferrule according to claim 1, characterized in that: The fiber fixing unit (20) includes a V-groove array (201), which includes multiple V-grooves spaced apart along the width direction of the ferrule substrate (10), and each V-groove is used to fix a fiber.

3. The fully integrated three-in-one parallel optical ferrule according to claim 1, characterized in that: The 45° aspherical total internal reflection unit (30) is an inclined aspherical surface formed inside or in the rear end region of the ferrule substrate (10). The inclined aspherical surface converts the horizontally propagating beam into a vertically propagating beam under the condition of total internal reflection, and simultaneously focuses or collimates the beam.

4. The fully integrated three-in-one parallel optical ferrule according to claim 1, characterized in that: The bottom microlens array (40) includes multiple microlenses that correspond one-to-one with the optical fiber channels. Each microlens forms a corresponding optical path with the corresponding optical fiber channel and the corresponding optical region of the 45° aspherical total internal reflection unit (30).

5. The fully integrated three-in-one parallel optical ferrule according to claim 1, characterized in that: The 45° aspherical total internal reflection unit (30) and the bottom microlens array (40) together constitute a double-sided aspherical optical system. The 45° aspherical total internal reflection unit (30) is used for optical path reversal and main focusing, while the bottom microlens array (40) is used for secondary focusing, pre-focusing, or aberration compensation.

6. The fully integrated three-in-one parallel optical ferrule according to claim 1, characterized in that: The bottom microlens array (40) and the insert substrate (10) are formed in one step using the same injection mold and the same molding cycle, so that the relative position between the bottom microlens array (40) and the 45° aspherical total internal reflection unit (30) is guaranteed by the mold precision.

7. The fully integrated three-in-one parallel optical ferrule according to claim 1, characterized in that: The mechanical alignment structure (50) is one of a guide post, a positioning post, or a positioning groove, and the mechanical alignment structure (50) is integrally formed with the insert base (10).

8. The fully integrated three-in-one parallel optical ferrule according to claim 1, characterized in that: The optical-grade transparent material is polyetherimide, polyethersulfone, or a cyclic olefin polymer transparent optical plastic.

9. The fully integrated three-in-one parallel optical ferrule according to claim 1, characterized in that: The optical emission window (60) is located at the bottom of the ferrule substrate (10), the bottom microlens array (40) is located above or inside the optical emission window (60), and the VCSEL / PD chip array (70) is located below the optical emission window (60) and is arranged opposite to the bottom microlens array (40).

10. A one-time injection molding method for a fully integrated three-in-one parallel optical ferrule, characterized in that: Injection molding methods include the following steps: S1. Design a ferrule optical system to form a predetermined optical correspondence between the fiber fixing unit (20), the 45° aspherical total internal reflection unit (30), the bottom microlens array (40), and the VCSEL / PD chip array (70); S2. Manufacturing a composite precision injection mold, the composite precision injection mold comprising a main cavity for molding the insert substrate (10), an oblique molding structure for molding the 45° aspherical total internal reflection unit (30), and a bottom microlens molding structure for molding the bottom microlens array (40); S3. Inject optical-grade transparent material into the composite precision injection mold, and obtain a single-piece ferrule substrate (10) through one-time precision injection molding, so that the fiber fixing unit (20), the 45° aspherical total internal reflection unit (30), the bottom microlens array (40), the mechanical alignment structure (50) and the optical emission window (60) are formed simultaneously. S4. Anneal the molded ferrule substrate (10) to reduce internal stress; S5. Install the optical fiber or optical fiber array in the optical fiber fixing unit (20) and position the bottom microlens array (40) corresponding to the VCSEL / PD chip array (70) through the mechanical alignment structure (50).

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