An ultrahigh-precision coupling device and a coupling method

Abstract

The present application relates to the technical fields of optical communication device manufacturing, and more particularly to an ultra-high precision coupling device and coupling method. The device comprises a rack, an industrial computer, a workbench arranged on the rack, a jig loading mechanism arranged on the workbench, a pair of feeding mechanisms arranged on the workbench, movable clamps arranged on each feeding mechanism, a lower vision mechanism arranged on the front side of the jig loading mechanism, a lower vision camera arranged on the lower vision mechanism, a calibration assembly arranged on the lower vision mechanism, a calibration sheet arranged on the calibration assembly, a three-axis adjusting mechanism arranged on the workbench, a glue dispensing assembly arranged on the moving end of the three-axis adjusting mechanism, an upper vision camera arranged on the glue dispensing assembly, and the three-axis adjusting mechanism can drive the upper vision camera to move above the calibration sheet. The coaxial reference is established by using the lower vision mechanism, the calibration assembly and the upper vision camera, the virtual space coordinate system is fitted by the industrial computer, the movement of each mechanism is in the coordinate system, and the system error is reduced.

Description

Technical Field

[0001] This invention relates to the field of optical communication device manufacturing technology, and more specifically, to an ultra-high precision coupling device and coupling method. Background Technology

[0002] Silicon photonics multichannel chips are integrated optoelectronic devices developed based on silicon materials. They integrate multiple optical channels onto a single chip using semiconductor processes, enabling high-speed data transmission and low-power control. In the manufacturing process of silicon photonic modules, the coupling and alignment of the fiber optic array (FA) with the optical waveguide on the silicon photonic chip (PIC) is a core process determining device performance and yield. The FA needs to achieve sub-micron level precision in its alignment with the waveguide on the chip. In existing technologies, coupling between the FA and PIC is typically achieved using two loading mechanisms and other related mechanisms. However, when multiple mechanisms work together, inconsistencies in the coordinate systems arise, resulting in a lack of an overall spatial coordinate reference for the entire device. This leads to systematic positional deviations between modules during operation, thus affecting the accuracy of subsequent coupling processes. Summary of the Invention

[0003] The purpose of this invention is to address the problems existing in the prior art by providing a common spatial reference for multi-module platforms to work collaboratively, eliminating systematic errors generated between modules during operation, and reducing the impact on coupling accuracy during subsequent coupling processes.

[0004] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0005] An ultra-high precision coupling device and coupling method includes a frame and an industrial control computer. A worktable is mounted on the frame, and a fixture platform mechanism is mounted on the worktable for mounting fixtures. The fixtures have accommodating positions for placing a PIC and an FA. A pair of feeding mechanisms are also mounted on the worktable, symmetrically arranged on the left and right sides of the fixture platform mechanism. Each feeding mechanism has a movable gripper for holding the FA. A lower vision mechanism is located at the front of the fixture platform mechanism, with a lower vision camera mounted on it. A calibration component is detachably mounted on the lower vision mechanism, with a calibration plate positioned above the lower vision camera.

[0006] The worktable is also equipped with a three-axis adjustment mechanism. The moving end of the three-axis adjustment mechanism is equipped with a dispensing assembly. The dispensing assembly is equipped with an upper vision camera. The three-axis adjustment mechanism can drive the upper vision camera to move above the calibration plate.

[0007] Before coupling, the operator first installs the calibration component on the lower vision mechanism, positioning the calibration plate of the calibration component above the lower vision camera, with the optical axis of the lower vision camera facing the calibration plate. The lower vision camera serves as the basis of the virtual space coordinate system. The three-axis adjustment mechanism moves the upper vision camera, aligning its optical axis with the calibration plate, thus establishing a coaxial reference. At this point, the industrial control computer fits a virtual space coordinate system based on the image data. Then, the moving feeding mechanism is adjusted to add its coordinates to the established virtual space coordinate system, ensuring that the operation of each mechanism is within the same space coordinate system to reduce system errors.

[0008] Furthermore, the lower vision mechanism includes a first column mounted on the worktable, with a lower vision camera mounted on the side wall of the first column. The calibration assembly includes a bracket and a calibration plate. One end of the bracket is connected to the upper part of the first column. The calibration plate is perpendicular to the bracket and can slide vertically along the bracket. A calibration piece is mounted on the end of the calibration plate away from the bracket, and the optical axis of the lower vision camera faces the calibration piece. The calibration plate can move along the Z-axis to be within the focal length range of the lower vision camera, facilitating clear imaging by the lower vision camera to obtain coordinate data.

[0009] Furthermore, the three-axis adjustment mechanism includes a pair of gantry frames disposed on both sides of the worktable, with a crossbeam spanning between the gantry frames. The crossbeam is slidable along the Y-axis on the gantry frames. A first single-axis slide table moving along the X-axis is provided on the side of the crossbeam, and a second single-axis slide table moving along the Z-axis is provided on the first single-axis slide table. A first mounting plate is provided on the second single-axis slide table. A top vision camera is provided on one side of the first mounting plate, and a first drive cylinder is provided on the other side of the first mounting plate. A point spectrum is driven on the first drive cylinder. Both the point spectrum and the top vision camera are located above the fixture. A second drive cylinder and a third drive cylinder are also sequentially disposed on the first mounting plate. A UV lamp is driven on the second drive cylinder, and a dispensing needle is driven on the third drive cylinder. Both the dispensing needle and the UV lamp are located above the fixture. The point spectrum is used to measure the position of the PIC, measuring the position data of the PIC in the virtual space coordinate system.

[0010] Furthermore, the fixture platform mechanism includes a base disposed on the worktable, a rotary slide on the base, a first angle slide on the rotary slide, a second angle slide on the first angle slide, and a fixture clamping assembly on the second angle slide; the fixture clamping assembly includes a clamping seat disposed on the second angle slide, the clamping seat having a groove, and a pair of cylinder clamping plates slidingly disposed within the groove, forming a fixture clamping area between the cylinder clamping plates.

[0011] Furthermore, each of the cylinder clamps is provided with a prism on the side away from the clamping area, the prism being used to reflect light to the upper visual field.

[0012] Furthermore, each of the aforementioned feeding mechanisms includes a three-axis translational slide table mounted on the worktable. A third-angle slide table is provided on one side of the translational slide table, and a fourth-angle slide table is provided on the third-angle slide table. A second mounting plate is provided on the fourth-angle slide table, and a sensor is provided on the second mounting plate. The gripper is connected to the sensor. The sensor is used to sense the position of the gripper to prevent collisions with surrounding structures, and to sense the distance between the FA and PIC, facilitating the control of the adhesive layer thickness by the dispensing needle.

[0013] Furthermore, the workbench is also equipped with an automatic power supply mechanism and an automatic fiber optic insertion and removal mechanism. The automatic power supply mechanism and the automatic fiber optic insertion and removal mechanism are arranged opposite to each other on the front and rear sides of the fixture platform mechanism, with the lower vision mechanism spaced between the automatic power supply mechanism and the fixture platform mechanism.

[0014] Furthermore, the automatic power supply mechanism includes a third single-axis slide table mounted on the worktable. A second column is mounted on the third single-axis slide table, and a fourth drive cylinder is slidably mounted on the second column. A power supply device is driven onto the fourth drive cylinder, and the power supply device faces the fixture clamping assembly. The power supply device is used to power the PIC, facilitating optical power coupling scanning.

[0015] Furthermore, the automatic fiber optic insertion and removal mechanism includes a fourth single-axis slide on the worktable, a third column on the fourth single-axis slide, a third mounting plate on the third column, and an insertion device on the upper part of the third mounting plate, the insertion device facing the fixture clamping assembly.

[0016] Furthermore, a coupling method for an ultra-high precision coupling device, implemented using an ultra-high precision coupling device, comprises the following steps: S1, the upper vision camera and the lower vision camera respectively photograph the calibration plate to establish a coaxial reference, determine the coordinate anchor point, and establish a virtual space coordinate system; the grippers of each loading mechanism move to the lower vision camera, the lower vision camera photographs the gripper image and converts it into the gripper coordinate data, and the coordinate data of the gripper is introduced into the virtual space coordinate system;

[0017] S2. The FA and the PIC are installed in the corresponding positions of the fixture. The point spectrum measures the height data of different points on the PIC. The height data of the PIC is converted into the coordinate data of the PIC to obtain the pitch angle and yaw angle of the PIC relative to the horizontal reference plane of the virtual space coordinate system.

[0018] S3. The upper vision camera captures an image above the FA and converts it into coordinate data of the upper contour of the FA, thereby obtaining the horizontal deflection angle of the FA based on the horizontal reference plane of the virtual space coordinate system. The feeding mechanism adjusts the horizontal deflection of the FA.

[0019] S4. The upper vision camera captures a side image of the FA using the prism and converts it into coordinate data of the side profile of the FA, obtaining the pitch angle data of the FA based on the horizontal reference plane of the virtual space coordinate system. The feeding mechanism adjusts the pitch angle of the FA according to the pitch angle data of the PIC. The point spectrum measures the height data of the FA and converts the height data of the FA into coordinate data of the FA, obtaining its left and right yaw angles based on the horizontal reference plane of the virtual space coordinate system. The feeding mechanism adjusts the left and right yaw angles of the FA according to the left and right yaw angles of the PIC, so that the FA is parallel to the end face of the PIC.

[0020] S5. The dispensing is performed on the end faces of the FA and the PIC;

[0021] S6. The feeding mechanism fine-tunes the FA to position it at the target point coupled with the PIC, and the UV lamp performs curing.

[0022] Compared with the prior art, the beneficial effects of the present invention are:

[0023] (1) This device uses the lower vision mechanism, calibration component and upper vision mechanism to establish a virtual spatial coordinate reference through the control system in the industrial control computer, so that the position of FA and PIC and the movement of each mechanism are based on the spatial coordinate reference, reducing the systematic position deviation when the mechanism is leveling FA and PIC; (2) The point spectrum first determines the actual position of PIC, and the adjustment mechanism then adjusts the position of FA based on the position of PIC, reducing error accumulation and improving coupling accuracy; (3) The three-axis adjustment structure can make precise adjustments to the dispensing component in the X, Y and Z directions, which helps the upper vision camera to accurately align with the calibration plate, and the point spectrum, dispensing needle and UV lamp can also be adjusted relative to the dispensing component in the Z-axis direction to prevent the optical device from touching the coupling device during the coupling process and causing the coupling position to shift; (4) The gripper of the feeding mechanism holds FA, and can adjust the horizontal position and angle position of FA in the X, Y and Z axes based on the position of PIC, with high adjustment accuracy, which helps FA and PIC to be accurately aligned. Attached Figure Description

[0024] Figure 1 This is a three-dimensional view of the overall structure of an ultra-high precision coupling device according to the present invention;

[0025] Figure 2 This is a top view of an ultra-high precision coupling device according to the present invention;

[0026] Figure 3 This is a three-dimensional structural view of the feeding mechanism of an ultra-high precision coupling device according to the present invention;

[0027] Figure 4 This is a three-dimensional structural view of a three-axis adjustment mechanism for an ultra-high precision coupling device according to the present invention;

[0028] Figure 5 This is a three-dimensional structural view of the dispensing assembly of an ultra-high precision coupling device according to the present invention;

[0029] Figure 6 This is a three-dimensional structural view of the jig platform for an ultra-high precision coupling device according to the present invention;

[0030] Figure 7 This is a three-dimensional structural view of the lower vision mechanism of an ultra-high precision coupling device according to the present invention;

[0031] Figure 8 This is a three-dimensional structural view of an automatic power supply mechanism for an ultra-high precision coupling device according to the present invention;

[0032] Figure 9 This is a three-dimensional structural view of the automatic fiber optic insertion and removal mechanism of an ultra-high precision coupling device according to the present invention.

[0033] In the diagram: 1. Worktable; 2. Loading mechanism; 201. Translational three-axis slide; 202. Third angle slide; 203. Fourth angle slide; 205. Second mounting plate; 206. Gripper; 3. Three-axis adjustment mechanism; 301. Gantry frame; 302. Crossbeam; 3021. First single-axis slide; 3022. Second single-axis slide; 303. Dispensing assembly; 3031. First mounting plate; 3032. Upper vision camera; 3033. First drive cylinder; 3034. Dot spectrum; 3035. Second drive cylinder; 3036. UV lamp; 3037. Third drive cylinder; 3038. Dispensing needle; 4. Fixture platform mechanism; 401 402. Mounting base; 403. Rotary slide; 404. First angle slide; 405. Second angle slide; 406. Clamping seat; 407. Cylinder clamping plate; 408. Prism; 5. Lower vision mechanism; 501. First column; 502. Lower vision camera; 503. Bracket; 504. Calibration plate; 505. Calibration disc; 6. Automatic power supply mechanism; 601. Third single-axis slide; 602. Second column; 603. Fourth drive cylinder; 604. Power supply device; 605. Height adjustment device; 7. Automatic fiber optic insertion and removal mechanism; 701. Fourth single-axis slide; 702. Third column; 703. Third mounting plate; 704. Insertion device. Detailed Implementation

[0034] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0035] In the description of this invention, it should be noted that the terms "middle," "upper," "lower," "left," "right," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0036] Example:

[0037] like Figures 1-9 As shown, an ultra-high precision coupling device includes a frame (not shown) and an industrial control computer (not shown). A workbench 1 is mounted on the frame, and the industrial control computer controls the mechanisms on the workbench 1. The workbench 1 serves as the basic support platform for the entire device, integrating a fixture carrier mechanism 4, a pair of loading mechanisms 2, a lower vision mechanism 5, a three-axis adjustment mechanism 3, an automatic power supply mechanism 6, and an automatic fiber optic insertion / removal mechanism 7. Specifically, the fixture carrier mechanism 4 is located in the central area of ​​the workbench 1 and is used to mount fixtures. In this embodiment, the fixture has corresponding receiving positions for placing a PIC and an FA, respectively, allowing the FA and PIC to be coupled within a single fixture.

[0038] The fixture platform mechanism 4 includes a mounting base 401 mounted on the worktable 1. The mounting base 401 has a rotary slide 402, a first angle slide 403, and a second angle slide 404 mounted on the first angle slide 403. The second angle slide 404 has a fixture clamping assembly. The rotary slide 402 controls the rotation of the fixture clamping assembly, the first angle slide 403 controls the swing angle of the fixture clamping assembly along the X-axis, and the second angle slide 404 controls the swing angle of the fixture clamping assembly along the Y-axis. The fixture clamping assembly includes a clamping seat 405, which is fixedly mounted on the second angle slide 404. The clamping seat 405 has a groove, and a pair of cylinder clamping plates are slidably mounted within the groove. The cylinder clamping plates move relative to each other within the groove, forming a fixture clamping area for clamping and fixing the fixture.

[0039] The lower vision mechanism 5 is located on the front side of the fixture platform mechanism 4. The lower vision mechanism 5 includes a first column 501 mounted on the worktable 1. A camera mounting block is provided on the side of the first column 501. The lower vision camera 502 is vertically mounted on the camera mounting block, with the observation end of the lower vision camera 502 pointing vertically upward. A bracket 503 is provided on the top of the first column 501. The bottom of the bracket 503 can be bolted to the first column 501. A calibration plate 504 can slide along the bracket 503 in the Z-axis direction. Specifically, a vertical slide rail is provided on the side wall of the bracket 503. A slider slides on the slide rail, and a calibration plate 504 perpendicular to the slide rail is provided on the slider. The calibration plate 504 can be plugged into or threadedly connected to the slider. A calibration piece 505 is provided at the end of the calibration plate 504 away from the slide rail. The optical axis of the lower vision camera 502 faces the calibration piece 505. An adjusting bolt is also provided on the top of the bracket 503, with one end of the adjusting bolt abutting against the surface of the calibration plate 504. The height of the calibration plate 505 is adjusted by turning the adjusting bolt to ensure that the lower vision camera 502 can clearly capture and recognize the image of the calibration plate 505. The slider is also provided with a locking structure for locking the position of the calibration plate 504. The locking structure can be a locking bolt. In this embodiment, the calibration plate 505 is provided with high-precision calibration marks, such as cross marks or an array of dot marks. The physical quantities of the known positions of each calibration mark are used as a reference for establishing a virtual space coordinate system.

[0040] A pair of gantry frames 301 are also provided on both sides of the workbench 1. A crossbeam 302 is erected between the gantry frames 301, and the crossbeam 302 is parallel to the X-axis. A Y-axis linear motion module is provided on the top of one gantry frame 301, and a guide rail parallel to the Y-axis is provided on the top of the other gantry frame 301. One end of the crossbeam 302 is connected to the output end of the Y-axis linear module, and the other end is slidably connected to the guide rail, so that the crossbeam 302 can move along the Y-axis. A first single-axis slide 3021 that moves along the X-axis is provided on the side of the crossbeam 302. A second single-axis slide 3022 that moves along the Z-axis is provided on the first single-axis slide 3021. A dispensing assembly 303 is installed on the second single-axis slide 3022. Specifically, the second single-axis slide 3022... A first mounting plate 3031 is provided on the upper part. The first mounting plate 3031 is a rectangular mounting plate set perpendicular to the crossbeam 302. Under the joint action of the Y-axis linear motion module, the first single-axis slide 3021 and the second single-axis slide 3022, the first mounting plate 3031 can be freely adjusted in the X, Y and Z directions. A camera mounting block is also provided on one side of the first mounting plate 3031. The upper vision camera 3032 is vertically mounted on the camera mounting block. The observation end of the upper vision camera 3032 is vertically downward and facing the calibration plate 505. The three-axis adjustment mechanism 3 can drive the upper vision camera 3032 to move above the calibration plate 505, and the optical axis of the upper vision camera 3032 is coaxial with the optical axis of the lower vision camera 502.

[0041] A virtual spatial coordinate system is established. The operator installs the calibration component on the first column 501. By adjusting the height of the calibration plate 504, the lower vision camera 502 can clearly capture and identify the calibration mark on the calibration piece 505. At this time, the lower vision camera 502 acquires the visual image and converts it into position coordinates in the pixel coordinate system of the lower vision camera 502 through the control system of the industrial control computer. Subsequently, the three-axis adjustment mechanism 3 drives the first mounting plate 3031 to move, so that the upper vision camera 3032 is directly above the calibration piece 505. The height of the second single-axis slide 3022 is adjusted so that the upper vision camera 3032 can clearly capture and identify the same calibration mark, obtaining the position coordinates of the calibration mark in the pixel coordinate system of the upper vision camera 3032. The control system in the industrial control computer of the equipment uses the known physical coordinates of the above calibration mark as anchor points and uses an algorithm to transform the pixel coordinate system of the upper vision camera 3032 and the pixel coordinate system of the lower vision camera 502 into the same virtual spatial coordinate system (XY plane).

[0042] Furthermore, the position of the gripper 206 of the loading mechanism 2 is incorporated into the virtual space coordinate system. Specifically, the loading mechanism 2 drives the gripper 206 to move above the lower vision camera 502. The lower vision camera 502 captures the outline of the gripper 206 and converts the image information into coordinate data of the gripper 206 in the virtual space coordinate system; simultaneously, it reads the coordinate data of each motion axis of the loading mechanism 2, thereby registering the loading mechanism 2 into the virtual space coordinate system. Any positional adjustment of the gripper 206 by the loading mechanism 2 is performed based on this virtual space coordinate system.

[0043] The side of the first mounting plate 3031 is also provided with a point spectrum 3034. The point spectrum 3034 is used to determine the position of the PIC and the left and right yaw angles of the FA. The point spectrum 3034 is located on the side adjacent to the upper vision camera 3032. In this embodiment, the first mounting plate 3031 is provided with a first drive cylinder 3033. The drive end of the first drive cylinder 3033 is connected to the point spectrum 3034, so that the point spectrum 3034 can be finely adjusted up and down. The three-axis adjustment mechanism 3 adjusts the point spectrum 3034 to be located above the PIC in the fixture. The point spectrum 3034 selects at least three measuring points on the PIC to measure the Z-axis height. The control system in the industrial control computer fits the pitch angle and left and right yaw angle of the PIC in the virtual space coordinate system based on the height data of the measuring points, and determines the position of the PIC in the virtual space coordinate system. The point spectrum 3034 can also fit the left and right yaw angles in the virtual space coordinate system of the FA by selecting measuring points on the left and right sides of the FA using the control system of the industrial control computer. Obtaining the actual angle data of the PIC serves as the basis for subsequent FA adjustments, which helps improve the final coupling accuracy between the FA and the PIC.

[0044] Preferably, the first mounting plate 3031 is further provided with a second driving cylinder 3035 and a third driving cylinder 3037. The moving end of the second driving cylinder 3035 is provided with a UV base, and a set of UV lamps 3036 are provided on the UV base. The third driving cylinder 3037 is installed on one side of the second driving cylinder 3035, and the moving end of the third driving cylinder 3037 is provided with an inclined dispensing needle 3038. Both the dispensing needle 3038 and the UV lamps 3036 can be moved to the top of the fixture via the three-axis adjustment mechanism 3.

[0045] After determining the position of the PIC itself, the three-axis moving assembly adjusts the first mounting plate 3031 in the X, Y, and Z directions so that the upper vision camera 3032 is positioned above the FA accommodating position in the fixture. The upper vision camera 3032 captures the visual image of the FA, and the industrial control computer's control system calculates the horizontal deflection angle of the FA based on the horizontal reference plane of the virtual space coordinate system.

[0046] Each cylinder clamping plate 406 has a prism 407 on the side away from the clamping area. Specifically, the cylinder clamping plate 406 has a frame on the side away from the clamping area, and a groove is provided on the upper part of the frame. The prism 407 is embedded in the groove. The prism 407 is at a 45° angle to the horizontal reference plane. The reflecting surface of the prism 407 faces the side of the FA and is used to reflect the contour light of the side of the FA to the upper vision camera 3032. This allows the upper vision camera 3032 to still obtain the graphic information of the side of the FA even when the upper vision camera 3032 cannot observe the side contour of the FA due to structural obstruction. This facilitates the control system to calculate the pitch angle of the FA relative to the horizontal reference plane in the virtual space coordinate system based on the image information of the side of the FA.

[0047] The fixture platform mechanism 4 is symmetrically equipped with loading mechanisms 2 on both sides. Each loading mechanism 2 is equipped with a movable gripper 206, which clamps and adjusts FA. Each loading mechanism 2 includes a three-axis translation slide 201 mounted on the worktable 1. A third angle slide 202 is provided on one side of the three-axis translation slide 201, and a fourth angle slide 203 is provided on the third angle slide 202. The three-axis translation slide 201 consists of a forward and backward moving part, a left and right moving part, and a vertical moving part connected in sequence, used to control the horizontal displacement of the gripper 206 in three directions. The third angle slide 202 controls the deflection angle of the gripper 206 in the horizontal direction, and the fourth angle slide 203 controls the deflection angle of the gripper 206 in the vertical direction. The fourth angle slide 203 has a second mounting plate 205 on one side. The second mounting plate 205 is a combination of a T-shaped plate and an L-shaped plate. The horizontal part of the L-shaped plate is fixedly connected to the horizontal part of the T-shaped plate. The vertical part of the T-shaped plate is connected to the fourth angle slide 203. A sensor is provided on the L-shaped plate. A connecting plate is provided on the outside of the sensor. A gripper 206 is provided on the connecting plate. In this embodiment, the gripper 206 is a cylinder gripper 206 with a suction nozzle. Based on the data of the control system and the known position data of the PIC, the feeding mechanism 2 clamps the FA with the gripper 206. According to the angular deviation between the PIC and the FA, the FA is adjusted to sway left and right, swerve horizontally and pitch, so that the end faces of the FA and the PIC are precisely parallel.

[0048] The workbench 1 is also equipped with an automatic power supply mechanism 6 and an automatic fiber optic insertion / removal mechanism 7. These mechanisms are positioned opposite each other on the front and rear sides of the fixture platform mechanism 4. The automatic power supply mechanism 6 includes a third single-axis slide 601 mounted on the workbench 1. An adjustable second column 602 is mounted on the third single-axis slide 601. A fourth drive cylinder 603 is slidably mounted on the second column 602. The fourth drive lever is horizontally positioned on the top of the second column 602. The third single-axis slide 601 drives the second column 602 away from or towards the fixture platform mechanism 4. Specifically, a sliding module along the Z-axis is provided on the side wall of the second column 602. A power supply device 604 is located on the top of the sliding module. The sliding module can control the power supply device 604 to slide up and down, with the power supply device 604 facing the fixture clamping assembly. After the fixture is fixed, the power supply device 604 automatically extends forward or adjusts up and down to contact and supply power to the electrodes of the PIC, causing the PIC's laser to emit light.

[0049] The automatic fiber optic insertion and removal mechanism 7 includes a fourth single-axis slide 701 mounted on the worktable 1. A third column 702 is mounted on the fourth single-axis slide 701, and a third mounting plate 703 is mounted on the third column 702. The third mounting plate 703 consists of two rectangular flat plates that fit together. An insertion device 704 is located on the upper part of the third mounting plate 703. Preferably, a height adjustment device 605 is located at the bottom of the third mounting plate 703. The height adjustment device 605 is a micrometer head height adjustment device, and it is located at the four corners of the bottom of the third mounting plate 703. The height adjustment device 605 adjusts the horizontal alignment of the insertion device 704 relative to the FA. The insertion device 704 is used to connect the external test fiber to the FA during coupling, so that the optical power meter can monitor the coupled optical power in real time.

[0050] The coupling method based on the above-mentioned ultra-high precision coupling device includes the following steps:

[0051] S1. The upper vision camera 3032 and the lower vision camera 502 respectively photograph the calibration plate 505 to establish a coaxial reference, determine the coordinate anchor point, and establish a virtual space coordinate system. The gripper 206 of each feeding mechanism 2 moves to the lower vision camera 502. The lower vision camera 502 photographs the gripper 206 and obtains the coordinate data of the gripper 206. The coordinate data of the gripper 206 is introduced into the virtual space coordinate system so that the adjustment of the feeding mechanism 2 to the FA is all located in the virtual coordinate system.

[0052] S2. Install the FA and PIC into the corresponding positions of the fixture. Use point spectrum 3034 to measure the relative height data of at least three points of the PIC. Convert the height data of the PIC into the coordinate data of the PIC to obtain the pitch angle and yaw angle of the PIC relative to the horizontal reference plane of the virtual space coordinate system, providing a data basis for the subsequent adjustment of the FA.

[0053] S3. The upper vision camera 3032 captures an image above the FA and converts it into coordinate data of the upper contour of the FA, obtaining the horizontal deflection angle of the FA based on the virtual space coordinate system. The loading mechanism 2 adjusts the horizontal deflection of the FA by driving the gripper 206 to move above the FA and clamp the FA. Based on the measured horizontal deflection angle, the horizontal deflection angle of the gripper 206 is adjusted using the fourth angle slide 203.

[0054] S4. The upper vision camera 3032 captures a side image of the FA with the help of the prism 407, converts the image data into coordinate data of the side profile of the FA, and obtains the pitch angle data of the FA based on the horizontal reference plane of the virtual space coordinate system. The feeding mechanism 2 adjusts the pitch angle of the FA according to the deviation between the pitch angle data of the PIC and the pitch angle data of the FA. The point spectrum 3034 measures the height data of the left and right sides of the FA, converts the height data of the FA into coordinate data of the FA, and obtains its left and right sway angles based on the horizontal reference plane of the virtual space coordinate system. The feeding mechanism 2 adjusts the left and right sway angles of the FA according to the deviation between the left and right sway angle data of the PIC and the left and right sway angles of the FA, so that the end face of the FA is parallel to that of the PIC.

[0055] S5. The dispensing needle 3038 dispenses adhesive to the end faces of FA and PIC. The three-axis adjustment mechanism 3 drives the dispensing needle 3038 on the first mounting plate 3031 to position it at the coupling point of FA and PIC, and applies adhesive to the coupling gap.

[0056] S6. The feeding mechanism 2 adjusts the FA to the target coupling point with the PIC. The UV lamp 3036 irradiates the adhesive to cure it. Specifically, the power supply device 604 powers the PIC, and the PIC's laser emits light. An optical power meter (not shown in the figure) monitors the optical power output from the FA in real time. The feeding mechanism 2 clamps and adjusts the FA, finds the optimal coupling position corresponding to the maximum optical power, which is the target coupling point, and locks this position. The three-axis adjustment mechanism 3 drives the UV lamp 3036 to move above the coupling gap, and the second drive cylinder 3035 drives the UV lamp 3036 to descend, irradiating the adhesive with ultraviolet light to cure it, thereby permanently locking the FA and PIC in the optimal coupling position. After curing, the UV lamp 3036 retracts, the automatic power supply mechanism 6 and the automatic fiber optic insertion and removal mechanism 7 reset, the feeding mechanism 2 releases the gripper 206, and the operator removes the coupled fixture and device.

[0057] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present invention should still fall within the scope of the present invention.

Claims

1. An ultra-high precision coupling device, comprising a frame and an industrial control computer, wherein a worktable is provided on the frame, characterized in that... The workbench is equipped with a fixture platform mechanism for mounting fixtures. The fixtures have accommodating positions for placing PICs and FAs. The workbench is also equipped with a pair of feeding mechanisms symmetrically arranged on the left and right sides of the fixture platform mechanism. Each feeding mechanism has a movable gripper for holding the FA. A lower vision mechanism is provided on the front side of the fixture platform mechanism. A lower vision camera is provided on the lower vision mechanism. A calibration component is detachably provided on the lower vision mechanism. A calibration plate is provided on the calibration component and is located above the lower vision camera. The worktable is also equipped with a three-axis adjustment mechanism. The moving end of the three-axis adjustment mechanism is equipped with a dispensing assembly. The dispensing assembly is equipped with an upper vision camera. The three-axis adjustment mechanism can drive the upper vision camera to move above the calibration plate.

2. The ultra-high precision coupling device according to claim 1, characterized in that... The lower vision mechanism includes a first column mounted on the workbench, a lower vision camera mounted on the side wall of the first column, and a calibration assembly including a bracket and a calibration plate. One end of the bracket is connected to the upper part of the first column, the calibration plate is perpendicular to the bracket and can slide vertically along the bracket, and the calibration plate is provided with a calibration piece at the end of the calibration plate away from the bracket. The optical axis of the lower vision camera is oriented toward the calibration piece.

3. The ultra-high precision coupling device according to claim 1, characterized in that... The three-axis adjustment mechanism includes a pair of gantry frames arranged on both sides of the worktable, with a crossbeam between the gantry frames. The crossbeam can slide along the Y-axis on the gantry frames. A first single-axis slide table that moves along the X-axis is provided on the side of the crossbeam. A second single-axis slide table that moves along the Z-axis is provided on the first single-axis slide table. A first mounting plate is provided on the second single-axis slide table. The upper vision camera is provided on one side of the first mounting plate. A first drive cylinder is provided on the other side of the first mounting plate. A point spectrum is driven on the first drive cylinder. The point spectrum and the upper vision camera are both located above the fixture. The first mounting plate is also provided with a second driving cylinder and a third driving cylinder in sequence. A UV lamp is driven on the second driving cylinder, and a dispensing needle is driven on the third driving cylinder. The dispensing needle and the UV lamp are both located above the fixture.

4. The ultra-high precision coupling device according to claim 1, characterized in that... The fixture platform mechanism includes a mounting base disposed on the worktable, a rotary slide on the mounting base, a first angle slide on the rotary slide, a second angle slide on the first angle slide, and a fixture clamping assembly on the second angle slide. The fixture clamping assembly includes a clamping seat disposed on the second angle slide, and a groove on the clamping seat. A pair of cylinder clamping plates are slidably disposed in the groove, and a fixture clamping area is formed between the cylinder clamping plates.

5. The ultra-high precision coupling device according to claim 4, characterized in that... Each cylinder clamp plate is provided with a prism on the side away from the clamping area, the prism being used to reflect light to the upper visual field.

6. The ultra-high precision coupling device according to claim 1, characterized in that... Each of the aforementioned feeding mechanisms includes a three-axis translation slide table disposed on the worktable. A third angle slide table is provided on one side of the three-axis translation slide table, a fourth angle slide table is provided on the third angle slide table, a second mounting plate is provided on the fourth angle slide table, and a sensor is provided on the second mounting plate. The gripper is connected to the sensor.

7. The ultra-high precision coupling device according to claim 1, characterized in that... The workbench is also equipped with an automatic power supply mechanism and an automatic fiber optic insertion and removal mechanism. The automatic power supply mechanism and the automatic fiber optic insertion and removal mechanism are arranged opposite each other on the front and rear sides of the fixture platform mechanism, with the lower vision mechanism spaced between the automatic power supply mechanism and the fixture platform mechanism.

8. The ultra-high precision coupling device according to claim 7, characterized in that... The automatic power supply mechanism includes a third single-axis slide table disposed on the workbench, a second column disposed on the third single-axis slide table, a fourth drive cylinder slidably disposed on the second column, and a power supply device driven on the fourth drive cylinder, the power supply device being oriented toward the fixture clamping assembly.

9. The ultra-high precision coupling device according to claim 7, characterized in that... The automatic fiber optic insertion and removal mechanism includes a fourth single-axis slide on the worktable, a third column on the fourth single-axis slide, a third mounting plate on the third column, and an insertion device on the upper part of the third mounting plate, the insertion device facing the fixture clamping assembly.

10. A coupling method for an ultra-high precision coupling device according to any one of claims 1-9, characterized in that: Includes the following steps: S1. The upper vision camera and the lower vision camera respectively take pictures of the calibration plate to establish a coaxial reference, determine the coordinate anchor point, and establish a virtual space coordinate system. The gripper of each feeding mechanism moves to the lower vision camera. The lower vision camera takes pictures of the gripper and converts them into the coordinate data of the gripper. The coordinate data of the gripper is introduced into the virtual space coordinate system. S2. The FA and the PIC are installed in the corresponding positions of the fixture. The point spectrum measures the height data of different points on the PIC. The height data of the PIC is converted into the coordinate data of the PIC to obtain the pitch angle and yaw angle of the PIC relative to the horizontal reference plane of the virtual space coordinate system. S3. The upper vision camera captures an image above the FA and converts it into coordinate data of the upper contour of the FA, thereby obtaining the horizontal deflection angle of the FA based on the horizontal reference plane of the virtual space coordinate system. The feeding mechanism adjusts the horizontal deflection of the FA. S4. The upper vision camera captures a side image of the FA using the prism and converts it into coordinate data of the side profile of the FA, obtaining the pitch angle data of the FA based on the horizontal reference plane of the virtual space coordinate system. The feeding mechanism adjusts the pitch angle of the FA according to the pitch angle data of the PIC. The point spectrum measures the height data of the FA and converts the height data of the FA into coordinate data of the FA, obtaining its left and right yaw angles based on the horizontal reference plane of the virtual space coordinate system. The feeding mechanism adjusts the left and right yaw angles of the FA according to the left and right yaw angles of the PIC, so that the FA is parallel to the end face of the PIC. S5. The dispensing is performed on the end faces of the FA and the PIC; S6. The feeding mechanism fine-tunes the FA to position it at the target point coupled with the PIC, and the UV lamp performs curing.

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