A robot chip micro-channel liquid cooling flow equalization method

Abstract

The present application relates to chip liquid cooling control technical field, especially to a kind of robot chip microchannel liquid cooling flow equalization method.The method obtains partition-branch cooling correlation, chip partition temperature, branch actual flow, import and export pressure difference and flow regulating component state, forms branch correlation operating state;According to the change relation of temperature, flow, pressure difference and component state, distinguish heat load increase state and flow restriction state, determine branch adjustable flow interval;Under the constraint of total available flow, allocate partition cooling demand, generate branch target flow set, when target flow exceeds the interval, determine compensation branch and update set;Execute flow regulation, form hydraulic execution response according to actual flow and import and export pressure difference after regulation, update branch flow resistance state for next control cycle.The present application matches chip partition cooling demand with branch liquid supply capacity, reduces invalid flow increase and flow distribution deviation under flow restriction state.

Description

Technical Field

[0001] This invention relates to the field of chip liquid cooling control technology, and in particular to a method for balancing the liquid cooling flow rate of a robot chip microchannel. Background Technology

[0002] In the field of chip liquid cooling control technology, robot chips are typically thermally coupled with microchannel liquid cooling plates. The coolant enters multiple microchannel branches through the supply channel and then converges into the return channel. Existing solutions generally collect chip temperature, branch flow rate, pressure, or inlet / outlet temperature difference data. Based on the chip temperature, operating load, or target flow rate, the branch flow rate adjustment components are adjusted, and the overall liquid supply state is changed through a circulating pump to complete the liquid cooling heat dissipation of different areas of the robot chip.

[0003] Robot chips are prone to dynamic local hotspots during the switching between vision processing, motion control, and computing tasks. Temperature rises in chip zones can be caused by increased thermal load, microchannel branch deposition, bubble retention, localized flow restriction, or malfunctions in flow regulation components. Existing solutions often directly increase the opening of flow regulation components based on temperature or flow deviations, making it difficult to distinguish the cause of temperature rise by analyzing the relationship between actual flow rate, inlet / outlet pressure difference, and the state of the flow regulation components. This can lead to situations where the target flow rate in a branch exceeds the current actual regulation range.

[0004] Existing multi-branch liquid cooling solutions often employ a fixed correspondence between chip partitions and microchannel branches, with each branch adjusted independently. When some microchannel branches are restricted by flow resistance or opening boundaries, the cooling demand of the corresponding chip partition is difficult to match with the actual liquid supply status of the associated branch. Furthermore, the flow rate requirements determined separately for multiple branches may exceed the total available flow rate of the circulating pump. Flow rate and inlet / outlet pressure differential change rapidly after adjustment, while changes in chip partition temperature have a heat transfer delay. Relying on only one type of feedback for subsequent adjustments can easily lead to inconsistencies between the branch's operating status and the flow allocation in the next control cycle. Therefore, it is necessary to address the problem of mismatching the cooling demand of chip partitions with the actual liquid supply capacity of each branch under conditions of restricted flow in microchannel branches and constraints on the total available flow rate, specifically for microchannel liquid cooling scenarios in robotic chips. Summary of the Invention

[0005] To address the aforementioned technical problems, this invention provides a method for equalizing the liquid cooling flow rate in a robot chip microchannel, comprising: S100: Obtain the partition-branch cooling correlation, chip partition temperature, actual flow rate of microchannel branch, inlet and outlet pressure difference, and status of flow regulation components; associate the chip partition temperature with the microchannel branch according to the control cycle to generate the branch association operation status. S200: Based on the branch-related operating status, when the chip partition temperature rises, the actual flow rate increases with the state of the flow regulation component, and the inlet and outlet pressure difference is within the system's allowable pressure difference, the thermal load increase state is determined; when the chip partition temperature rises, the actual flow rate does not increase with the state of the flow regulation component, and the inlet and outlet pressure difference increases, the flow restriction state is determined; and the adjustable flow range of the branch is determined accordingly. S300. Based on the adjustable flow range of the branch and the partition-branch cooling relationship, the cooling demand of the chip partition is allocated to the associated microchannel branch, and a target flow set of the branch is generated under the constraint of total available flow. When the target flow exceeds the adjustable flow range of the branch, a compensation branch is determined from other branches associated with the same chip partition, and the target flow set of the branch is updated. S400: Generate and execute branch flow adjustment commands based on the branch target flow set; obtain the adjusted actual flow and inlet / outlet pressure difference, and generate a hydraulic execution response; update the branch flow resistance state based on the hydraulic execution response and use it for the next control cycle.

[0006] Furthermore, the generation of the partition-branch cooling association includes: The cooling relationship between the chip partitions and the microchannel branches is established based on their spatial location and coverage. The actual flow rate of each microchannel branch was changed, and the temperature change of each chip partition after the corresponding flow rate change was recorded. Based on the correspondence between the flow rate changes of each microchannel branch and the temperature changes of each chip partition, the partition-branch cooling correlation is corrected to form a partition-branch cooling correlation in which one chip partition is associated with multiple microchannel branches or one microchannel branch is associated with multiple chip partitions.

[0007] Furthermore, the generation of the branch association operating status includes: Configure control cycle identifiers for chip partition temperature, actual flow rate of microchannel branches, inlet and outlet pressure difference, and status of flow regulation components; Associate the chip partition temperature, actual flow rate, inlet and outlet pressure difference, and flow regulation component status of chips with the same control cycle identifier and sampling time difference within the set range; Anomaly markers are generated for missing, mutated, or over-range chip partition temperatures, actual flow rates, or inlet / outlet pressure differences, and the associated operating status of the branch is generated based on the state without anomaly markers.

[0008] Furthermore, the branch-related operating status is also used to determine whether the flow regulation component is malfunctioning or the total liquid supply is insufficient, wherein: When the branch flow regulation command changes but the status of the flow regulation component does not change accordingly, it is determined that the flow regulation component is abnormal. When the actual flow rate of multiple microchannel branches is lower than the corresponding target flow rate, multiple flow regulation components reach the opening boundary, and the total available flow rate is lower than the sum of the target flow rates of the branches, the state of insufficient total liquid supply is determined.

[0009] Furthermore, determining the adjustable flow range of the branch includes: Under the condition of increased heat load, the lower limit and upper limit of adjustable flow rate are determined based on the minimum safe flow rate of the branch, the maximum allowable flow rate of the branch, and the remaining opening of the flow regulating component; Under the flow-restricted condition, the adjustable flow rate limit is reduced based on the actual flow rate, inlet and outlet pressure difference, and branch flow resistance. In the event of an malfunction in the flow regulation component, the lower limit and upper limit of the adjustable flow rate are determined based on the confirmed actual flow rate of the branch. In the case of insufficient total liquid supply, the adjustable flow rate upper limit of multiple microchannel branches is adjusted according to the total available flow rate.

[0010] Furthermore, the generation of the branch target traffic set includes: The cooling requirements of each chip partition are determined based on the deviation of the chip partition temperature from the target temperature range of the partition and the temperature change status. Based on the partition-branch cooling relationship, the cooling requirements of each chip partition are allocated to the associated microchannel branch, and the cooling requirements of multiple chip partitions associated with the same microchannel branch are merged to generate the initial target flow of the branch. The initial target flow rate for each branch is limited to the adjustable flow rate range of the corresponding branch. When the sum of the initial target flow rates of multiple branches is greater than the total available flow rate, the target flow rate of each microchannel branch is adjusted according to the deviation of the chip partition temperature from the partition target temperature range and the temperature change status, thereby generating the target flow rate set of the branches.

[0011] Furthermore, the determination of the compensation branch and the updating of the target flow set of the branch include: Microchannel branches whose target flow exceeds the adjustable flow range are identified as restricted branches, and cooling requirements are determined to be unmet based on the difference between the target flow and the upper limit of the adjustable flow. Based on the partition-branch cooling relationship, candidate compensation branches associated with the chip partition corresponding to the restricted branch are determined; The compensation branch and compensation flow are determined based on the flow margin between the adjustable flow limit of the candidate compensation branch and the actual flow, as well as the flow resistance status of the branch. The compensated flow is added to the target flow of the compensated branch, and the target flow set of the branch is updated.

[0012] Furthermore, the generation and execution of the branch flow regulation command includes: Based on the difference between the target flow rate and the actual flow rate of each microchannel branch, the target state of the corresponding flow regulation component is generated; Adjust the flow rate control component according to the target state; When the actual flow rate of multiple microchannel branches is lower than the corresponding target flow rate, and multiple flow regulation components reach the opening boundary, a circulation pump compensation command is generated based on the difference between the target flow rate set of the branches and the total available flow rate. The operating state of the circulating pump is adjusted according to the circulating pump compensation command, and the changes in the state of the flow regulating component and the operating state of the circulating pump are limited according to the flow change limit of a single control cycle.

[0013] Furthermore, the update of the branch flow resistance state includes: During the first feedback period, obtain the actual flow rate of the adjusted microchannel branch, the inlet and outlet pressure difference, and the status of the flow regulation components. By comparing the actual flow rate changes, inlet and outlet pressure difference changes, and flow regulation component status changes before and after adjustment, the hydraulic actuation response is generated. When the actual flow increment corresponding to the change in the state of the same flow regulating component in a continuous control cycle decreases and the inlet and outlet pressure difference increases, the branch flow resistance state is updated to the resistance increase state. When the status of the flow regulation component changes and the actual flow rate and inlet / outlet pressure difference do not change accordingly, an invalid regulation flag is generated, and the adjustable flow range of the corresponding microchannel branch is restricted.

[0014] Furthermore, it also includes: acquiring temperature feedback for each chip partition during the second feedback period; Based on the temperature feedback relative to the target temperature range of the partition and the temperature change status, update the cooling requirements of each chip partition. When the chip partition temperature associated with the compensation branch does not change towards the partition target temperature range, reduce the compensation flow of the compensation branch, and redetermine the compensation branch according to the partition-branch cooling relationship. The updated chip partition cooling requirements, branch flow resistance status, and compensation flow allocation results are used as inputs for generating the branch target flow set in the next control cycle.

[0015] The key innovations of this invention include: (1) Combine the chip partition temperature, actual flow rate of microchannel branch, inlet and outlet pressure difference with the status of flow regulation component. Based on the response relationship between actual flow rate and inlet and outlet pressure difference after the status of flow regulation component changes, distinguish between the state of increased heat load and the state of restricted flow. Then convert the branch status judgment result into the adjustable flow range of the branch.

[0016] (2) The adjustable flow range of the branch is used as the distribution boundary of the target flow of the branch. The partition-branch cooling relationship and the total available flow are combined to allocate the cooling requirements of the chip partition. When the target flow exceeds the adjustable flow range of the corresponding branch, the compensation branch is determined from other microchannel branches associated with the same chip partition, and the target flow set of the branch is updated according to the compensation flow.

[0017] (3) After executing the branch flow adjustment command, a hydraulic execution response is formed based on the actual flow before and after adjustment and the inlet and outlet pressure difference, and the branch flow resistance status is updated accordingly. The updated branch flow resistance status enters the next control cycle and continues to participate in the branch status determination, the branch adjustable flow range determination and the branch target flow allocation.

[0018] The following are its main beneficial effects: (1) In response to the possibility that the temperature rise of the chip partition may be caused by the increase of thermal load or the flow restriction of the microchannel branch, the actual flow rate and the inlet and outlet pressure difference response after the change of the state of the flow regulation component are checked to reduce the misjudgment of the state caused by continuously increasing the target flow rate of the branch based solely on the temperature deviation, and to make the subsequent flow distribution constrained by the current actual adjustment range of the branch.

[0019] (2) In cases where some microchannel branches cannot meet the allocated cooling demand due to flow resistance, opening boundary or total available flow, the target flow is limited by the adjustable flow range of the branch, and the unmet cooling demand is allocated to other microchannel branches that are associated with the same chip partition and have flow margin, so that the target flow set of the branch matches the current liquid supply status of the branch and the total liquid supply conditions.

[0020] (3) In response to the situation where the flow characteristics of the microchannel branch deviate due to sedimentation, bubble retention or changes in operating status, the flow resistance state of the branch is updated by adjusting the actual flow rate and the pressure difference between the inlet and outlet, so that the next control cycle can redefine the adjustable flow range of the branch based on the hydraulic response that has occurred, thereby reducing the continuous flow distribution deviation caused by using the original flow adjustment relationship. Attached Figure Description

[0021] Figure 1 This is a flowchart illustrating a method for equalizing the flow rate of a robot chip microchannel liquid cooling system, as provided in an embodiment of this application. Detailed Implementation

[0022] Example 1: Refer to Figure 1 This is a flowchart illustrating a method for equalizing the flow rate of a robot chip microchannel liquid cooling system according to an embodiment of the present invention. The process may include at least steps S100-S400: S100: Obtain the partition-branch cooling correlation, chip partition temperature, actual flow rate of microchannel branch, inlet and outlet pressure difference, and status of flow regulation components; associate the chip partition temperature with the microchannel branch according to the control cycle to generate the branch association operation status. S200: Based on the branch-related operating status, when the chip partition temperature rises, the actual flow rate increases with the state of the flow regulation component, and the inlet and outlet pressure difference is within the system's allowable pressure difference, the thermal load increase state is determined; when the chip partition temperature rises, the actual flow rate does not increase with the state of the flow regulation component, and the inlet and outlet pressure difference increases, the flow restriction state is determined; and the adjustable flow range of the branch is determined accordingly. S300. Based on the adjustable flow range of the branch and the partition-branch cooling relationship, the cooling demand of the chip partition is allocated to the associated microchannel branch, and a target flow set of the branch is generated under the constraint of total available flow. When the target flow exceeds the adjustable flow range of the branch, a compensation branch is determined from other branches associated with the same chip partition, and the target flow set of the branch is updated. S400: Generate and execute branch flow adjustment commands based on the branch target flow set; obtain the adjusted actual flow and inlet / outlet pressure difference, and generate a hydraulic execution response; update the branch flow resistance state based on the hydraulic execution response and use it for the next control cycle.

[0023] S100: Obtain the partition-branch cooling correlation, chip partition temperature, actual flow rate of the microchannel branch, inlet and outlet pressure difference, and status of the flow regulation component; associate the chip partition temperature with the microchannel branch according to the control cycle to generate the branch-associated operating status: This embodiment applies to a microchannel liquid cooling module for a robot chip. The robot chip is mounted on the heat exchange surface of a microchannel liquid cooling plate. Multiple microchannel branches are arranged inside the microchannel liquid cooling plate, each connecting to a supply channel and a return channel. A flow regulating component is installed at the inlet side of each microchannel branch. This component receives a target state from the liquid cooling controller and feeds back the current state. Flow sensors are installed in the microchannel branches, and pressure detection components are installed at the inlet and outlet sides. The liquid cooling controller obtains the inlet-outlet pressure difference based on the difference between the inlet and outlet pressures. In another embodiment, the inlet-outlet pressure difference is directly obtained from a differential pressure sensor. A circulation pump connects the supply channel and an external coolant circulation loop. The liquid cooling controller adjusts the overall supply state based on the circulation pump's operating status.

[0024] The robot chip is divided into multiple chip partitions based on the distribution of heat sources. These partitions are not arbitrarily divided into equal areas based on the chip's package shape, but rather according to the arrangement of internal computing units, cache units, input / output interfaces, vision processing units, or motion control units, combined with the location of temperature detection points. When a chip partition has only one temperature detection point, the partition temperature is taken from the value detected at that point. When multiple temperature detection points are located within a chip partition, the liquid cooling controller retains multiple detection values ​​and characterizes the partition's temperature state based on the highest temperature and its variation. The temperature value output by the internal temperature detection circuit can also serve as a source of temperature for the chip partition, but this temperature value needs to be correlated with the location of the internal functional units.

[0025] The partition-branch cooling relationship is established before the liquid cooling module is put into operation and is corrected based on the actual temperature response during operation. During initial establishment, the liquid cooling controller reads the spatial position of the chip partition and microchannel branches on the microchannel liquid cooling plate, the branch routing, and the coverage area of ​​the branches over the chip partition. When a microchannel branch passes under the heat exchange area of ​​a chip partition, an initial association is established between the microchannel branch and the chip partition; when the same microchannel branch passes under multiple chip partitions, it is associated with each of the multiple chip partitions; when the same chip partition is covered by multiple adjacent microchannel branches, it is associated with each of the multiple microchannel branches. The resulting partition-branch cooling relationship retains the chip partition identifier, the microchannel branch identifier, and the association status between them.

[0026] After the initial spatial relationship is established, the liquid cooling controller sequentially changes the actual flow rate of each microchannel branch when the robot chip is in stable operating condition. During the change of the flow rate of one microchannel branch, the other microchannel branches maintain their original flow regulation component states, and the liquid cooling controller continuously acquires the temperature change status of multiple chip partitions. If an increase in the actual flow rate of a certain microchannel branch causes a decrease in the temperature of a certain chip partition or a decrease in the rate of temperature rise, the association between that microchannel branch and that chip partition is retained. If the temperature of that chip partition does not change in a direction corresponding to the branch flow rate change within multiple control cycles, the usage order of this association is reduced, or associations in the initial spatial relationship that do not have an actual temperature response are terminated. Due to the lateral heat conduction inside the liquid cooling plate, changes in branch flow rate may simultaneously affect multiple adjacent chip partitions; therefore, the partition-branch cooling association is not limited to a one-to-one correspondence.

[0027] In one implementation, the partition-branch cooling correlation also retains the corresponding order between the flow rate changes of each microchannel branch and the temperature changes of the chip partition. This corresponding order reflects the differences in the cooling effect of different microchannel branches on the same chip partition. When selecting subsequent compensation branches, the liquid cooling controller first calls the microchannel branches with a more significant temperature response and sufficient flow margin. This corresponding order serves only as a basis for selecting compensation branches and does not change the fundamental relationship between the chip partition and the microchannel branches.

[0028] After the liquid cooling module enters the operating state, the liquid cooling controller reads the temperature of each chip partition, the actual flow rate of each microchannel branch, the inlet and outlet pressure difference, and the status of the flow regulation component according to the control cycle. The control cycle is set based on the action response time of the flow regulation component and the sampling cycle of the flow sensor, and is not solely based on the time required for the chip temperature to complete the thermal response. In one embodiment, the liquid cooling controller uses a control cycle of 0.5 seconds. The flow and pressure detection components complete multiple samplings within one control cycle, and the liquid cooling controller takes the continuously changing sampling values ​​within the effective range as the actual flow rate and inlet and outlet pressure difference for that control cycle. This control cycle value is one implementation configuration; other implementations set different control cycles based on the liquid circuit volume of the liquid cooling module and the action time of the flow regulation component.

[0029] The liquid-cooled controller assigns the same control cycle identifier to the chip zone temperature, actual flow rate of the microchannel branch, inlet and outlet pressure difference, and the status of the flow regulation component obtained within the same control cycle. For states with different sampling times, the liquid-cooled controller checks the sampling time difference; if the sampling time difference is within the set range, each state is assigned to the same control cycle. If the sampling time difference exceeds the set range, the earlier and later sampled values ​​are not directly combined into the same operating state; instead, the newer state is retained and the corresponding detection component is allowed to resample. This is because the flow rate and pressure difference change rapidly during valve operation. If the flow rate before valve operation is correlated with the pressure difference after operation, it would lead to inconsistencies between the subsequent branch status determination and the actual operating conditions.

[0030] After obtaining the effective state of the same control cycle, the liquid cooling controller associates the chip partition temperature with the corresponding microchannel branch according to the partition-branch cooling correlation. For a microchannel branch associated with one chip partition, the branch association operation state retains the chip partition temperature and its direction of change relative to the previous control cycle. For a microchannel branch associated with multiple chip partitions, the branch association operation state retains multiple chip partition temperatures separately, without simply averaging the multiple temperatures; during subsequent state determination, priority is given to checking chip partitions whose temperatures exceed the partition target temperature range or continue to rise. In the case where one chip partition is associated with multiple microchannel branches, the same chip partition temperature enters multiple branch association operation states respectively, and the operation status of each branch is then distinguished by combining the flow rate, differential pressure, and flow regulation component status of each branch.

[0031] During status acquisition, the liquid-cooled controller checks for missing, abrupt, or out-of-range detection values. If a temperature detection value exceeds the robot chip's detection range and no corresponding change occurs at adjacent temperature detection locations, an anomaly flag is generated for that temperature value. If the actual flow rate of a branch changes abruptly within a single cycle without a change in the flow regulation component's status, and no corresponding change occurs in the inlet / outlet pressure difference, an anomaly flag is generated for that flow rate detection value. If the inlet or outlet pressure exceeds the range of the pressure detection component, an anomaly flag is generated for the inlet / outlet pressure difference resulting from that pressure value. Statuses with anomaly flags are not included in the branch status determination for this control cycle.

[0032] When a single detection value is missing but the rest of the statuses are valid, the liquid cooling controller does not directly stop the control of all branches. When the chip partition temperature is missing, the cooling requirement of that chip partition in the previous control cycle is maintained, and the increase in flow rate of the associated microchannel branch in this control cycle is limited; when the actual flow rate is missing, the status of the corresponding flow regulation component is maintained, and no large adjustment is made based on the individual inlet and outlet pressure difference; when the inlet and outlet pressure difference is missing, the corresponding microchannel branch is temporarily excluded from the flow-restricted status determination. If both the actual flow rate and the inlet and outlet pressure difference of the same microchannel branch are missing, the target flow rate of that branch in the previous control cycle is retained, and a detection status abnormality mark is generated. The branch status determination is re-entered after the detection status is restored.

[0033] After completing time correlation, abnormal state verification, and zone-branch correlation, the liquid cooling controller establishes a branch-related operating status. This branch-related operating status includes microchannel branch identifier, associated chip zone identifier, valid chip zone temperature, temperature change status, actual branch flow rate, inlet / outlet pressure difference, flow regulation component status, and control cycle identifier. The branch-related operating status is stored separately for each microchannel branch and sent to S200 within the same control cycle; the chip zone temperature and temperature change status are used to distinguish changes in cooling demand, while the actual flow rate, inlet / outlet pressure difference, and flow regulation component status are used to verify the branch hydraulic response.

[0034] S200: Based on the branch-related operating status, when the chip partition temperature rises, the actual flow rate increases with the state of the flow regulation component, and the inlet and outlet pressure difference is within the system's allowable pressure difference, the thermal load increase state is determined; when the chip partition temperature rises, the actual flow rate does not increase with the state of the flow regulation component, and the inlet and outlet pressure difference increases, the flow restriction state is determined; accordingly, the adjustable flow range of the branch is determined: After receiving the branch-related operating status generated by S100, the liquid cooling controller first checks whether the status of the current control cycle is continuous with that of the previous control cycle. This continuity includes continuous control cycle identifiers, consistent source of flow regulation component status, and no switching of associated chip partitions. If the robot chip experiences a shutdown, power-on, or coolant circulation interruption between two control cycles, the liquid cooling controller does not directly use the hydraulic execution response before the shutdown. Instead, it uses the current control cycle as the new starting cycle and calls the initial branch flow resistance status saved during the liquid cooling module debugging phase. Within the starting cycle, the current state of the flow regulation component is maintained, and after obtaining a continuous set of actual flow rates and inlet / outlet pressure differences, the branch status determination is then initiated.

[0035] The preceding cycle hydraulic response is derived from the actual flow rate changes, inlet / outlet pressure difference changes, and flow regulation component status changes before and after the flow regulation action in the previous control cycle. Its function is not to directly replace the current state, but rather to verify whether the same microchannel branch produces hydraulic changes consistent with historical responses to the flow regulation action. For example, if increasing the flow regulation component opening in the previous control cycle resulted in an increase in the branch's actual flow rate while the inlet / outlet pressure difference remained within the system's allowable pressure difference, then the hydraulic response indicates that the branch still has the conditions for increased flow. If, after increasing the opening, the actual flow rate increase significantly decreases while the inlet / outlet pressure difference continues to increase, then the preceding cycle hydraulic response indicates a change in the branch's flow resistance.

[0036] For each microchannel branch, the liquid cooling controller first checks whether the temperature of the associated chip partition has risen. A temperature rise includes an increase in the chip partition temperature compared to the previous control cycle, and also includes the chip partition temperature still rising but not yet reaching the partition's target temperature range. When a microchannel branch is associated with multiple chip partitions, if the temperature of any one chip partition exceeds the partition's target temperature range and continues to rise, that microchannel branch enters the temperature rise status verification process; the temperatures of the remaining associated chip partitions are used to allocate the cooling needs of that branch subsequently, and the processing of high-temperature partitions is not canceled simply because the temperature of a single partition is normal.

[0037] When the chip partition temperature rises, the liquid cooling controller compares the status of the flow regulation component and the actual flow rate in the current control cycle with those in the previous control cycle. If the flow regulation component status changes towards increasing the flow area, and the actual flow rate increases with this change, the inlet and outlet pressure difference is then checked to ensure it is within the system's allowable pressure range. This allowable pressure range is pre-configured based on the operating range of the microchannel liquid cooling plate, sealed connections, flow sensors, and flow regulation components. If the inlet and outlet pressure difference is within the system's allowable range, it indicates that the increase in actual flow rate is not accompanied by an abnormal increase in liquid path resistance. In this case, the liquid cooling controller identifies the corresponding microchannel branch as experiencing increased thermal load. Increased thermal load indicates that the cooling demand of the chip partition is increasing, while the branch liquid path and flow regulation component still have normal response.

[0038] If the chip partition temperature rises, and the flow regulation component has changed its state to increase the flow area, but the actual flow rate does not increase, or the actual flow rate increment is lower than the previous cycle hydraulic response of this branch under similar regulation conditions, and the inlet and outlet pressure difference increases, then the liquid cooling controller determines that the microchannel branch is in a flow-restricted state. This state corresponds to hydraulic behavior caused by deposition inside the microchannel, bubble retention, local flow channel obstruction, or reduced flow area at the supply and return fluid connection. At this point, it is not advisable to continue increasing the target flow rate solely based on the temperature rise, because further adjusting the flow regulation component's state may only increase the inlet and outlet pressure difference without generating a corresponding actual flow rate increment.

[0039] In another operating scenario, the chip partition temperature rises, and the flow regulation command changes, but the feedback status of the flow regulation component does not change accordingly. The liquid cooling controller first checks the command transmission status and the drive receipt of the flow regulation component; if the drive receipt has been received but the feedback status has not changed, the microchannel branch is identified as having a flow regulation component malfunction. If the drive receipt is not returned, the original target status is maintained for a predetermined waiting time, and communication or drive receipt delays are not directly identified as flow restriction. If no feedback status is obtained after the waiting time expires, a flow regulation component malfunction status is generated.

[0040] When the actual flow rates of multiple microchannel branches are lower than their corresponding target flow rates, and multiple flow regulation components have reached their opening limits, the liquid cooling controller checks the total available flow rate. If the total available flow rate is lower than the sum of the target flow rates of the current branches, the current operating condition is determined to be a state of insufficient total liquid supply. The difference between the state of insufficient total liquid supply and the state of restricted flow in a single branch is that the former is characterized by multiple branches experiencing insufficient flow in the same direction simultaneously, while the latter is mainly characterized by an increase in the pressure difference between the inlet and outlet of a single or local branch and a weakening of the actual flow response. When multiple branches have insufficient flow simultaneously but the total available flow rate has not decreased, the liquid cooling controller continues to check the pressure status of the supply and return channels, and does not directly classify it as a state of insufficient total liquid supply.

[0041] After determining the branch status, the liquid-cooled controller identifies the adjustable flow range for each branch based on the determination results. This adjustable flow range includes a lower and upper limit, reflecting the target flow range allowed for the corresponding microchannel branch within the current control cycle. The adjustable flow range is not a fixed copy of the microchannel branch's designed flow range, but rather a combination of the current actual flow rate, the remaining opening of the flow regulation component, the inlet and outlet pressure difference, the branch flow resistance status, and the overall liquid supply status.

[0042] For microchannel branches under increasing heat load, the lower limit of their adjustable flow rate must not be lower than the branch's minimum safe flow rate. The liquid cooling controller checks the branch's maximum allowable flow rate based on the current actual flow rate and the remaining opening of the flow regulating component. If the flow regulating component still has room to increase its opening, and the inlet and outlet pressure difference is still below the system's maximum allowable pressure difference limit, the branch's maximum allowable flow rate or the achievable flow rate under current liquid supply conditions is used as the upper limit of the adjustable flow rate. If the branch is already close to its maximum allowable flow rate, the upper limit of the adjustable flow rate will not be increased due to the continued rise in chip partition temperature; instead, the cooling demand will be distributed in the S300 through other associated microchannel branches.

[0043] For microchannel branches in a flow-restricted state, the liquid-cooled controller lowers the adjustable flow rate limit based on the current actual flow rate, inlet / outlet pressure difference, and the flow resistance status of the branch in the previous cycle. When the inlet / outlet pressure difference increases compared to the previous control cycle, but the actual flow rate does not increase, the adjustable flow rate limit is set to no higher than the sum of the currently confirmed actual flow rate and the allowable small increment; when multiple consecutive control cycles exhibit the same state, the adjustable range in the direction of increase is further reduced. This processing prevents the S300 from allocating a target flow rate that significantly exceeds its current hydraulic response capability to the flow-restricted branch.

[0044] For microchannel branches where the flow regulation component is in an abnormal state, the liquid cooling controller limits the adjustable flow range based on the most recently confirmed effective actual flow rate. If the flow regulation component remains in a fixed state, the lower and upper limits of the adjustable flow rate are set around the current actual flow rate, and no increments dependent on the continued operation of the flow regulation component are allocated to that branch. When the total liquid supply is insufficient, the liquid cooling controller uniformly adjusts the upper limits of the adjustable flow rates of multiple microchannel branches based on the relationship between the total available flow rate and the current actual flow rates of multiple branches, to prevent the sum of the target flow rates of subsequent branches from still exceeding the current total liquid supply capacity.

[0045] S200 ultimately generates the branch status determination result and the corresponding adjustable flow range for the branch. For each microchannel branch, the output includes the branch status, adjustable flow lower limit, adjustable flow upper limit, and current branch flow resistance status. The branch status determination result determines whether S300 allows continued allocation of increments to that branch; the adjustable flow range of the branch directly serves as the flow boundary when S300 generates the target flow set for the branch.

[0046] S300. Based on the adjustable flow range of the branch and the partition-branch cooling correlation, the cooling demand of the chip partition is allocated to the associated microchannel branches, and a target flow set for the branches is generated under the constraint of total available flow. When the target flow exceeds the adjustable flow range of the branch, a compensation branch is determined from other branches associated with the same chip partition, and the target flow set of the branch is updated. S300 is executed by the target flow generation section in the liquid cooling controller. It receives the branch status determination result and the adjustable flow range of the branch from the output of S200, and reads the partition-branch cooling correlation established by S100. The liquid cooling controller first forms the cooling requirements of each chip partition based on the state of the chip partition temperature relative to the partition target temperature range and the temperature change state. When the chip partition temperature is within the partition target temperature range and the temperature change is gradual, the cooling requirements corresponding to the current heat dissipation state of the partition are maintained; when the chip partition temperature is higher than the partition target temperature range, the cooling requirements are increased according to the temperature deviation and the temperature rise state; when the chip partition temperature drops towards the target temperature range, the current cooling requirements are retained or the cooling requirements are reduced cycle by cycle to avoid repeated increases and decreases in flow within adjacent control cycles.

[0047] Chip partition cooling requirements represent the coolant flow rate demand that the corresponding microchannel branch of the chip partition needs to handle in the current control cycle, and are not directly equivalent to the target flow rate of any single branch. The liquid cooling controller allocates the cooling requirements of a chip partition to multiple microchannel branches associated with that partition according to the partition-branch cooling relationship. When a chip partition is associated with only one microchannel branch, the cooling requirements are all channeled into the initial target flow rate of that microchannel branch; when a chip partition is associated with multiple microchannel branches, the cooling requirements are allocated separately based on the coverage area of ​​each branch over the partition, the temperature response to flow rate changes, and the adjustable flow rate range of the current branch.

[0048] When a microchannel branch is associated with multiple chip partitions, the liquid cooling controller aggregates the cooling demands allocated to that branch by these chip partitions. If all associated chip partitions are experiencing temperature increases, the demands from these partitions are combined to form the initial target flow rate for that branch. If one chip partition requires increased flow while the temperature of another chip partition is already below the target range, the cooling demands of the two partitions are not simply offset. Instead, the actual temperature response of the branch's flow rate change to the two partitions is assessed. If the increased flow demand has a significant cooling effect on the high-temperature partition and a weaker impact on the low-temperature partition, it is retained. If the increased flow demand has a significant cooling effect on both partitions, the increase in flow rate for that branch is limited, and other microchannel branches associated only with the high-temperature partition are prioritized.

[0049] After establishing the initial target flow rate for each microchannel branch, the liquid cooling controller compares it one by one with the adjustable flow rate range output by the S200. If the initial target flow rate is lower than the lower limit of the adjustable flow rate, it is adjusted to the lower limit; if the initial target flow rate is within the adjustable flow rate range, the initial target flow rate is retained; if the initial target flow rate is higher than the upper limit of the adjustable flow rate, the current target flow rate of that branch is limited to the upper limit of the adjustable flow rate, and the excess is determined as insufficient cooling demand. Therefore, the branch status determination result actually affects the target flow rate allocation through the adjustable flow rate range, rather than simply being stored as an alarm status.

[0050] After defining the limits for each branch interval, the liquid cooling controller calculates the sum of the target flow rates for multiple microchannel branches and compares it with the total available flow rate. The total available flow rate is derived from the current operating status of the circulation pump, the flow rate detection value of the liquid supply channel, or the calibrated flow rate of the circulation pump under the corresponding liquid supply condition. If the sum of the target flow rates for multiple branches is not greater than the total available flow rate, the liquid cooling controller retains the target flow rates after defining the limits for each branch interval. If the sum of the target flow rates for multiple branches is greater than the total available flow rate, the liquid cooling controller adjusts the target flow rates for multiple microchannel branches based on the deviation of the temperature of each chip partition from the partition's target temperature range and the temperature change status.

[0051] When the total available flow rate is insufficient, the liquid cooling controller first reserves the minimum safe flow rate for each microchannel branch, and then allocates the remaining available flow rate to chip partitions whose associated temperatures exceed the target temperature range and continue to rise. When multiple chip partitions are at high temperatures, the chip partitions with larger temperature deviations or faster temperature rise rates receive the remaining flow rate first; when multiple branches are associated with the same high-temperature partition, flow rate is allocated only within the adjustable flow rate range of each branch. If a branch is in a flow-restricted state, even if its associated partition temperature is high, flow rate exceeding the adjustable flow rate limit will not be allocated to that branch; instead, the compensation branch determination process will begin.

[0052] When the initial target flow rate of any microchannel branch exceeds its adjustable flow rate limit, the liquid cooling controller identifies that microchannel branch as a restricted branch. Restricted branches include microchannel branches that are in a flow-restricted state, have an abnormal flow regulation component, or have already reached their maximum permissible flow rate. The liquid cooling controller identifies unmet cooling requirements based on the difference between the initial target flow rate and the adjustable flow rate limit of the branch, and then locates the chip partition associated with the restricted branch.

[0053] For each chip partition with unmet cooling requirements, the liquid cooling controller filters out other associated microchannel branches (excluding the restricted branches) based on the partition-branch cooling correlation, forming candidate compensation branches. Candidate compensation branches must have an adjustable flow rate upper limit higher than the current target flow rate and must not be in an abnormal state of the flow regulation component. The flow margin of a candidate compensation branch is formed by the difference between its adjustable flow rate upper limit and the current target flow rate; its branch flow resistance status is used to exclude branches with continuously increasing resistance.

[0054] When multiple candidate compensation branches exist, the liquid cooling controller first compares the temperature response of the candidate compensation branches to the target chip partition, and then compares the flow margin and the flow resistance status of the branch. When the temperature response is the same or close, the branch with a larger flow margin and no increase in the flow resistance status is selected; if a candidate compensation branch cannot handle all the unmet cooling requirements, the unmet cooling requirements are distributed to multiple candidate compensation branches in sequence, but the target flow rate of each compensation branch after the increase does not exceed its adjustable flow rate limit.

[0055] For example, chip partition A is associated with microchannel branches 1 and 2. Branch 1 is determined to be in a flow-restricted state due to an increased inlet-outlet pressure difference, and its initial target flow rate is higher than its adjustable flow rate limit. The liquid cooling controller identifies the excess as the unmet cooling demand of partition A. If branch 2 is associated with cooling partition A, and its current target flow rate is lower than its adjustable flow rate limit, then branch 2 is designated as a compensation branch, and the portion of the unmet cooling demand not exceeding the flow rate margin of branch 2 is added to the target flow rate of branch 2. This process changes the set of target flow rates for the branches, but does not change the current adjustable flow rate limit of the restricted branch.

[0056] If the chip partition corresponding to the restricted branch has no other associated microchannel branches, or if all candidate compensation branches have no flow margin, the liquid cooling controller retains the adjustable flow limit of the restricted branch and generates a flag indicating that the cooling demand is not met. This flag is sent to S400 along with the branch's target flow set. S400 no longer issues adjustment commands exceeding the adjustable flow range to the restricted branch, but instead checks whether the overall liquid supply status of the circulating pump needs to be adjusted based on the current branch target flow set.

[0057] After completing the total available flow constraint and compensation flow allocation, the liquid cooling controller forms a branch target flow set. This branch target flow set records the target flow of multiple microchannel branches within the same control cycle and retains the correspondence between restricted branches, compensation branches, and compensation flows. S400 directly uses the difference between the target flow and actual flow of each microchannel branch to generate branch flow adjustment commands; the compensation flow allocation results are used to distinguish whether an increase in a target flow originates from the direct demand of the associated zone of this branch or from unmet cooling demands of other restricted branches.

[0058] S400: Generate and execute branch flow adjustment commands based on the branch target flow set; obtain the adjusted actual flow and inlet / outlet pressure difference, and generate a hydraulic execution response; update the branch flow resistance state based on the hydraulic execution response and use it for the next control cycle. After receiving the set of branch target flow rates generated by S300, the liquid-cooled controller compares the target flow rate of each microchannel branch with the current actual flow rate. When the target flow rate is higher than the actual flow rate, based on the flow difference, the current state of the flow regulating component, and the flow resistance state of the branch, a target state for the flow regulating component that changes towards increasing the flow area is generated; when the target flow rate is lower than the actual flow rate, a target state that changes towards decreasing the flow area is generated; when the difference between the target flow rate and the actual flow rate is within the flow detection fluctuation range, the current state of the flow regulating component is maintained, and the flow regulating component is not repeatedly changed in adjacent control cycles.

[0059] The target state of the flow regulating component is not solely determined by the difference between the target flow rate and the actual flow rate. For microchannel branches with normal flow resistance, the liquid-cooled controller determines the target state for the current control cycle based on the correspondence between the flow regulating component state and the actual flow rate obtained during the commissioning phase of that branch. For microchannel branches with increased resistance, changes in the opening corresponding to the same target flow rate may lead to a further increase in the inlet and outlet pressure difference. The liquid-cooled controller limits the target state according to the adjustable flow range determined in S200 and does not issue commands that would cause the target flow rate to exceed the upper limit of the adjustable flow rate. Microchannel branches with an invalid adjustment flag retain the state of the flow regulating component that was most recently confirmed to be valid.

[0060] The liquid-cooled controller prioritizes the adjustment of flow regulation components in each microchannel branch. After the target states of multiple flow regulation components are issued, the liquid-cooled controller checks the relationship between the target flow sets of the branches and the total available flow. If the actual flow of multiple microchannel branches is lower than the corresponding target flow, and multiple flow regulation components have reached their opening boundaries, a circulation pump compensation command is generated based on the difference between the sum of the target flow sets of the branches and the total available flow. The circulation pump compensation command includes the direction of increase in the circulation pump operating state and the change amount in the current control cycle, but does not directly change the distribution relationship between the target flow of each branch.

[0061] When the actual flow rates of multiple microchannel branches are all higher than their corresponding target flow rates, and multiple flow regulating components are approaching the boundary for reducing their opening, the liquid cooling controller generates a command to reduce the operating state of the circulating pump based on the difference between the target flow rate set of the branches and the current total available flow rate. If the flow rate of a single branch is insufficient while the flow rates of other branches are normal, the operating state of the circulating pump is not immediately increased. Instead, the corresponding flow regulating component is adjusted based on the state determination result of that branch to avoid an increase in total liquid supply that would cause the actual flow rates of other branches to deviate from the target flow rates simultaneously.

[0062] The changes in the state of the flow regulating components and the circulating pump are limited by the flow rate variation within a single control cycle. The liquid-cooled controller sets the action amplitude for the current cycle based on the current actual flow rate, the target flow rate, and the hydraulic response of the previous cycle. If the actual flow rate in the previous control cycle responds significantly to the same state change, the state change amount for the current cycle is reduced. If the response in the previous control cycle is small and the inlet and outlet pressure difference is not close to the system's allowable pressure difference, the state change amount is allowed to increase within a specified range. This limitation applies to the command execution process and does not change the branch target flow rate set formed by S300.

[0063] After the command is issued, the liquid-cooled controller reads the execution acknowledgment from the flow regulation component. If the acknowledgment indicates that the target status has been received, the first feedback period begins. If no execution acknowledgment is received, the current target flow rate and the original state of the flow regulation component for that branch are maintained for a predetermined waiting time, and unconfirmed commands are not used as the starting point for the hydraulic execution response. If no acknowledgment is received after the waiting time, the branch is marked as having a flow regulation component malfunction, and its subsequent adjustable flow range is limited.

[0064] The first feedback period is set based on the action time of the flow regulation component and the coolant delivery delay in the branch, and its duration is shorter than the time required for the chip partition to complete the temperature response. In one embodiment, the first feedback period begins when the feedback state of the flow regulation component changes, continuously acquiring the actual flow rate of the branch and the inlet and outlet pressure difference until the actual flow rate enters a stable variation range or reaches the predetermined feedback duration. When instantaneous flow fluctuations occur during the feedback period, the liquid cooling controller retains continuous sampling values ​​and does not use a single peak value as the adjusted actual flow rate.

[0065] After the first feedback period ends, the liquid-cooled controller compares the actual flow rate, inlet and outlet pressure difference, and the state of the flow regulating component before and after adjustment to generate a hydraulic execution response. When the flow regulating component changes in the direction of increasing the flow area, and the actual flow rate increases accordingly while the inlet and outlet pressure difference remains within the system's allowable pressure difference, this response is recorded as an effective flow increase response. When the actual flow rate increase is lower than the flow rate increase of similar actions in the same branch in the previous period after the flow regulating component changes, and the inlet and outlet pressure difference increases, this response is recorded as a resistance increase response. When the state of the flow regulating component has changed, but the actual flow rate and inlet and outlet pressure difference have not changed accordingly, an invalid adjustment flag is generated.

[0066] The branch flow resistance status is updated based on the hydraulic execution response during continuous control cycles. A short-term increase in the inlet and outlet pressure difference during a control cycle does not directly update the branch to an increased resistance state. However, when the actual flow increment corresponding to changes in the status of similar or related flow regulating components gradually decreases during continuous control cycles, while the inlet and outlet pressure difference continues to increase, the liquid-cooled controller updates the corresponding microchannel branch flow resistance status to an increased resistance state. Subsequently, S200 lowers the adjustable flow rate limit of the branch based on this status, and S300 no longer allocates a target flow rate exceeding the updated adjustable flow rate range to this branch.

[0067] If the state of the flow regulating component changes but the actual flow rate and inlet / outlet pressure difference do not change accordingly, the liquid-cooled controller generates a regulation invalidation flag and uses the most recently confirmed valid actual flow rate of the corresponding branch as the temporary flow boundary. The regulation invalidation flag enters S200 of the next control cycle, and the liquid-cooled controller determines the abnormal state of the flow regulating component accordingly. If subsequent control cycles obtain changes in actual flow rate and inlet / outlet pressure difference corresponding to the state of the flow regulating component, the regulation invalidation flag is removed, and the branch flow resistance state is re-determined based on the recovered hydraulic actuation response.

[0068] After completing the hydraulic execution response and branch flow resistance status update, the liquid-cooled controller enters the second feedback period. The second feedback period begins after the end of the first feedback period, and its duration is set based on the heat transfer delay between the robot chip, thermal interface material, microchannel liquid cooling plate, and coolant. During the second feedback period, the liquid-cooled controller continues to acquire the temperature of each chip zone, but does not immediately change the executed branch target flow rate due to changes in a single temperature sample value. Instead, it verifies the direction and continuity of temperature changes relative to the zone target temperature range.

[0069] When the chip partition temperature changes towards the target temperature range, the direction of cooling demand change formed in the current control cycle is retained, and the cooling demand is gradually corrected in the next control cycle based on the temperature deviation. If the chip partition temperature continues to rise, the liquid cooling controller re-forms the cooling demand for that partition based on the updated branch flow resistance status. If the original branch is in a flow-restricted state, the target flow rate of that branch is not directly increased; instead, in the next control cycle, S300 searches for other microchannel branches associated with that chip partition.

[0070] For microchannel branches responsible for compensation flow, the liquid cooling controller checks the temperature changes of their associated chip zones during the second feedback period. If the target chip zone temperature changes towards the target temperature range after the compensation branch flow increases, the compensation flow allocation result is retained. If the compensation branch flow has reached the updated target flow, but the target chip zone temperature has not changed towards the target temperature range, the compensation flow of that compensation branch is reduced, and compensation branches are re-selected based on the zone-branch cooling correlation. During the re-selection, microchannel branches that have reached the adjustable flow limit or whose flow resistance has increased are excluded.

[0071] If the microchannel branch responsible for the compensation flow is also associated with another chip partition whose temperature is close to the lower limit of the target temperature range, the liquid cooling controller checks the temperature change of that partition after the compensation flow is increased. If the temperature of that partition continues to decrease, the compensation flow is limited from further increasing, and in the next control cycle, the microchannel branch that has a cooling association with the target high-temperature partition and has a smaller impact on the low-temperature partition is preferentially selected. Thus, the compensation flow is not fixed but is continuously corrected based on the actual temperature response during the second feedback period.

[0072] At the end of this control cycle, the liquid cooling controller retains the updated chip partition cooling requirements, branch flow resistance status, adjustment invalidation flags, and compensation flow allocation results. Upon arrival of the next control cycle, S100 re-establishes the branch-related operating status; S200 updates the branch status determination results and adjustable flow range based on the current status and the hydraulic execution response from the previous control cycle; S300 then forms a new set of target flow rates for the branch based on the updated chip partition cooling requirements, branch flow resistance status, and compensation flow allocation results. Thus, the hydraulic and temperature responses generated by the flow regulation actions enter the status determination and flow allocation processes of the next control cycle, respectively.

Claims

1. A method for equalizing the flow rate of liquid cooling in a robot chip microchannel, characterized in that, include: S100: Obtain the cooling relationship between the partition and branch, the chip partition temperature, the actual flow rate of the microchannel branch, the inlet and outlet pressure difference, and the status of the flow regulation component; The chip partition temperature is associated with the microchannel branch according to the control cycle, generating the branch associated operating status; S200: Based on the branch-related operating status, when the chip partition temperature rises, the actual flow rate increases with the state of the flow regulation component, and the inlet and outlet pressure difference is within the system's allowable pressure difference, the heat load increase state is determined; when the chip partition temperature rises, the actual flow rate does not increase with the state of the flow regulation component, and the inlet and outlet pressure difference increases, the flow restriction state is determined. This determines the adjustable flow range of the branch; S300. Based on the adjustable flow range of the branch and the partition-branch cooling relationship, the chip partition cooling requirements are allocated to the associated microchannel branches, and a branch target flow set is generated under the total available flow constraint. When the target traffic exceeds the adjustable traffic range of a branch, a compensation branch is determined from other branches associated with the same chip partition, and the target traffic set of the branch is updated. S400: Generate and execute branch flow adjustment instructions based on the branch target flow set; The actual flow rate and inlet / outlet pressure difference after adjustment are obtained, and a hydraulic execution response is generated. The branch flow resistance state is updated based on the hydraulic execution response and used in the next control cycle.

2. The method according to claim 1, characterized in that, The generation of the partition-branch cooling association includes: The cooling relationship between the chip partitions and the microchannel branches is established based on their spatial location and coverage. The actual flow rate of each microchannel branch was changed, and the temperature change of each chip partition after the corresponding flow rate change was recorded. Based on the correspondence between the flow rate changes of each microchannel branch and the temperature changes of each chip partition, the partition-branch cooling correlation is corrected to form a partition-branch cooling correlation in which one chip partition is associated with multiple microchannel branches or one microchannel branch is associated with multiple chip partitions.

3. The method according to claim 1, characterized in that, The generation of the branch association operation status includes: Configure control cycle identifiers for chip partition temperature, actual flow rate of microchannel branches, inlet and outlet pressure difference, and status of flow regulation components; Associate the chip partition temperature, actual flow rate, inlet and outlet pressure difference, and flow regulation component status of chips with the same control cycle identifier and sampling time difference within the set range; Anomaly markers are generated for missing, mutated, or over-range chip partition temperatures, actual flow rates, or inlet / outlet pressure differences, and the associated operating status of the branch is generated based on the state without anomaly markers.

4. The method according to claim 1, characterized in that, The branch-related operating status is also used to determine whether the flow regulation component is malfunctioning or the total liquid supply is insufficient, wherein: When the branch flow regulation command changes but the status of the flow regulation component does not change accordingly, it is determined that the flow regulation component is abnormal. When the actual flow rate of multiple microchannel branches is lower than the corresponding target flow rate, multiple flow regulation components reach the opening boundary, and the total available flow rate is lower than the sum of the target flow rates of the branches, the state of insufficient total liquid supply is determined.

5. The method according to claim 4, characterized in that, The determination of the adjustable flow range of the branch includes: Under the condition of increased heat load, the lower limit and upper limit of adjustable flow rate are determined based on the minimum safe flow rate of the branch, the maximum allowable flow rate of the branch, and the remaining opening of the flow regulating component; Under the flow-restricted condition, the adjustable flow rate limit is reduced based on the actual flow rate, inlet and outlet pressure difference, and branch flow resistance. In the event of an malfunction in the flow regulation component, the lower limit and upper limit of the adjustable flow rate are determined based on the confirmed actual flow rate of the branch. In the case of insufficient total liquid supply, the adjustable flow rate upper limit of multiple microchannel branches is adjusted according to the total available flow rate.

6. The method according to claim 5, characterized in that, The generation of the branch target traffic set includes: The cooling requirements of each chip partition are determined based on the deviation of the chip partition temperature from the target temperature range of the partition and the temperature change status. Based on the partition-branch cooling relationship, the cooling requirements of each chip partition are allocated to the associated microchannel branch, and the cooling requirements of multiple chip partitions associated with the same microchannel branch are merged to generate the initial target flow of the branch. The initial target flow rate for each branch is limited to the adjustable flow rate range of the corresponding branch. When the sum of the initial target flow rates of multiple branches is greater than the total available flow rate, the target flow rate of each microchannel branch is adjusted according to the deviation of the chip partition temperature from the partition target temperature range and the temperature change status, thereby generating the target flow rate set of the branches.

7. The method according to claim 6, characterized in that, The determination of the compensation branch and the updating of the target flow set of the branch include: Microchannel branches whose target flow exceeds the adjustable flow range are identified as restricted branches, and cooling requirements are determined to be unmet based on the difference between the target flow and the upper limit of the adjustable flow. Based on the partition-branch cooling relationship, candidate compensation branches associated with the chip partition corresponding to the restricted branch are determined; The compensation branch and compensation flow are determined based on the flow margin between the adjustable flow limit of the candidate compensation branch and the actual flow, as well as the flow resistance status of the branch. The compensated flow is added to the target flow of the compensated branch, and the target flow set of the branch is updated.

8. The method according to claim 7, characterized in that, The generation and execution of the branch flow regulation command includes: Based on the difference between the target flow rate and the actual flow rate of each microchannel branch, the target state of the corresponding flow regulation component is generated; Adjust the flow rate control component according to the target state; When the actual flow rate of multiple microchannel branches is lower than the corresponding target flow rate, and multiple flow regulation components reach the opening boundary, a circulation pump compensation command is generated based on the difference between the target flow rate set of the branches and the total available flow rate. The operating state of the circulating pump is adjusted according to the circulating pump compensation command, and the changes in the state of the flow regulating component and the operating state of the circulating pump are limited according to the flow change limit of a single control cycle.

9. The method according to claim 8, characterized in that, The update of the branch flow resistance state includes: During the first feedback period, obtain the actual flow rate of the adjusted microchannel branch, the inlet and outlet pressure difference, and the status of the flow regulation components. By comparing the actual flow rate changes, inlet and outlet pressure difference changes, and flow regulation component status changes before and after adjustment, the hydraulic actuation response is generated. When the actual flow increment corresponding to the change in the state of the same flow regulating component in a continuous control cycle decreases and the inlet and outlet pressure difference increases, the branch flow resistance state is updated to the resistance increase state. When the status of the flow regulation component changes and the actual flow rate and inlet / outlet pressure difference do not change accordingly, an invalid regulation flag is generated, and the adjustable flow range of the corresponding microchannel branch is restricted.

10. The method according to claim 9, characterized in that, Also includes: During the second feedback period, acquire the temperature feedback of each chip partition; Based on the temperature feedback relative to the target temperature range of the partition and the temperature change status, update the cooling requirements of each chip partition. When the chip partition temperature associated with the compensation branch does not change towards the partition target temperature range, reduce the compensation flow of the compensation branch, and redetermine the compensation branch according to the partition-branch cooling relationship. The updated chip partition cooling requirements, branch flow resistance status, and compensation flow allocation results are used as inputs for generating the branch target flow set in the next control cycle.

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