Magnetic levitation motor system, electronic device, and storage medium

Abstract

The application provides a magnetic levitation motor system, an electronic device and a storage medium. The system comprises: a magnetic levitation stator track; a plurality of mover assemblies, the mover assembly comprising a magnetic levitation mover and a limiting element, the limiting elements of different mover assemblies being different in length along a first direction; a limiting device, which is arranged opposite to the mover assembly along a second direction, and is used for limiting the maximum displacement of the mover assembly along the second direction, the limiting element being located between the magnetic levitation mover and the limiting device when the mover assembly is in a preset posture; a detection device, which is used for detecting feature information related to the position information of the mover assembly along the second direction; and a control device, which controls the mover assembly to move and abut against the limiting device along the second direction, acquires abutting position information according to the feature information, and determines the identity information of the mover assembly according to the abutting position information. The magnetic levitation motor system provided by the application can effectively improve the reliability and environmental adaptability of the identity recognition of the mover in the magnetic levitation motor system.

Description

Technical Field

[0001] This application relates to the field of magnetic levitation motor technology, and in particular to a magnetic levitation motor system, electronic device and storage medium. Background Technology

[0002] Magnetic levitation planar motor systems (or simply magnetic levitation motor systems) are widely used in cleanroom handling processes during semiconductor device manufacturing due to their advantages such as non-contact operation, low dust generation, and high dynamic response. Specifically, for example... Figure 1 As shown, the maglev motor system mainly consists of a maglev stator track 101 and a mover 102. The maglev stator track 101 provides the magnetic force required for maglev and defines the movement range of the mover 102. The mover 102 is positioned above the maglev stator track 101 and carries semiconductor devices. Driven by the magnetic force, it moves by maglev to achieve material handling. To improve production efficiency, multiple movers 102 are often configured to operate in parallel within the system, each carrying different workpieces and moving between different process chambers. In this case, the control system must be able to clearly identify the identity of each mover assembly in order to achieve precise scheduling, task allocation, and process status tracking. Therefore, the identification of the mover 102 becomes a key technical requirement for maglev motor systems with multiple mover assemblies.

[0003] Currently, existing solutions typically employ Radio Frequency Identification (RFID) technology to identify the mover 102. Specifically, by integrating RFID tags inside each mover 102 and deploying readers on the maglev stator track 101 or at specific locations, when the mover 102 passes by, the readers activate the tags via an electromagnetic field and read their pre-stored unique identification codes, thereby uploading the coded information to the control system to complete the identification of the mover 102.

[0004] However, the reliability of this solution is susceptible to electromagnetic interference, and its long-term reliability is difficult to guarantee. Summary of the Invention

[0005] In view of this, this application provides a magnetic levitation motor system, electronic device and storage medium, which can effectively improve the reliability and environmental adaptability of the moving part identification in the magnetic levitation motor system.

[0006] In a first aspect, embodiments of this application provide a magnetic levitation motor system, comprising: a magnetic levitation stator track; a plurality of mover assemblies, each mover assembly including a magnetic float and a limiting element, the limiting element having a first end and a second end opposite to each other, the direction in which the first end and the second end are connected is a first direction, the first end being fixed to the magnetic float, and the second end being the end away from the magnetic float, the limiting elements of different mover assemblies having different lengths along the first direction; and a limiting device disposed opposite to the mover assembly along a second direction, the limiting device being used to limit the maximum displacement of the mover assembly along the second direction, wherein the mover assembly has a preset posture, when the mover assembly is in a certain position... In the preset posture, the limiting element is located between the magnetic float and the limiting device, with the first direction and the second direction being the same; a detection device is used to detect feature information related to the position information of each moving component along the second direction; and a control device is connected to the magnetic levitation stator track or the magnetic float, the control device being used to control each moving component to move along the second direction to abut against the limiting device, the control device being connected to the detection device to obtain the contact position information of each moving component when it abuts against the limiting device based on the feature information, and to determine the identity information of each moving component based on the contact position information of each moving component. Therefore, in the embodiments of this application, by setting limiting elements with different lengths along the first direction in multiple moving components, when the moving components contact the limiting device in a preset posture and are limited by the limiting device, different moving components exhibit differentiated contact position information, which can be used for the identification of different moving components. The above method eliminates the need for additional RFID tags in the entire process of identifying moving parts, thereby reducing problems caused by electromagnetic interference from RFID tags.

[0007] In conjunction with the first aspect, in one possible implementation, the difference in length of the limiting element of any two of the moving parts along the first direction is greater than a preset length, where the preset length is greater than or equal to 0.5 micrometers. Therefore, in the embodiments of this application, by setting the length difference of the limiting elements of different moving parts to be greater than or equal to 0.5 micrometers, a sufficiently large physical characteristic difference is formed between each moving part. This difference, constrained by the limiting device, is amplified into a positional difference that can be clearly distinguished by the detection device. This effectively reduces the situation where the detection device cannot distinguish or misjudges due to the limiting element lengths being too close, thereby ensuring the accuracy and uniqueness of the identity recognition result.

[0008] In conjunction with the first aspect, in one possible implementation, the magnetic float and the limiting element satisfy one of the following relationships: the magnetic float and the limiting element are detachably connected; the limiting element is foldable relative to the magnetic float; the length of the limiting element along the first direction is adjustable. Therefore, in the embodiments of this application, when the limiting element and the magnetic float are detachably connected, the user can quickly replace limiting elements of different lengths or shapes according to actual coding requirements without replacing the entire mover assembly, thereby reducing spare parts costs and shortening maintenance time; when the limiting element is foldable relative to the magnetic float, the limiting element can be folded in a non-working state to reduce space occupation and unfolded when needed, improving transportation convenience while meeting work requirements; when the length of the limiting element along the first direction is adjustable, the same mover assembly can adapt to different coding requirements by adjusting the length of the limiting element along the first direction. When the system needs to reassign the mover identity, there is no need to customize a new component; only the length of the limiting element needs to be adjusted to complete the recoding, improving system scalability and economy. The aforementioned multiple connection methods enable the moving component to flexibly select the most suitable limit element configuration according to different working conditions, simplifying the disassembly and maintenance process, while enhancing the system's adaptability to different coding scenarios, and significantly improving the versatility and practicality of the overall solution.

[0009] In conjunction with the first aspect, in one possible implementation, the second direction is a vertical direction, and the magnetic levitation stator track, the magnetic float, and the limiting device are arranged sequentially along the second direction. Therefore, in the embodiments of this application, by placing the limiting device on the side of the magnetic float away from the magnetic levitation stator track, the limiting element can naturally contact the limiting device during the floating process of the mover assembly along the second direction, without needing to additionally change the mover's motion attitude. The motion path during the identification process is consistent with the suspension direction during normal operation of the magnetic levitation system, simplifying the control logic of the identification process and improving identification efficiency.

[0010] In conjunction with the first aspect, in one possible implementation, the limiting device is made of a soft magnetic material. Therefore, in the embodiments of this application, the limiting device uses a soft magnetic material. When the mover assembly is operating normally in magnetic levitation, the soft magnetic material can generate a magnetic attraction force on the permanent magnet of the magnetic float, which can overcome at least a portion of the gravity of the magnetic float, thereby reducing the current magnitude of the coils in the magnetic levitation stator track, and thus reducing the power and heat generation of the magnetic levitation stator track.

[0011] In conjunction with the first aspect, in one possible implementation, the control device is specifically used to: determine the identity information of each of the moving parts based on the contact position information of each moving part and a preset mapping relationship, wherein the preset mapping relationship includes: the mapping relationship between the contact position information of the multiple moving parts along the second direction and the corresponding identity information when the limiting element and the limiting device abut. Therefore, in the embodiments of this application, by controlling the moving parts to move in a preset posture along the second direction until they abut against the limiting element and the limiting device, and by matching the detected contact position information with the preset mapping relationship to complete the identity recognition, the entire recognition process relies only on the inherent physical characteristics of the moving parts and the existing control capabilities of the magnetic levitation system. It does not require any external recognition device, making the recognition steps simple and efficient. Furthermore, it can quickly restore the identity information after a system power failure and restart or after the moving parts are rearranged, ensuring the scheduling continuity and operational safety of the multi-moving-part magnetic levitation motor system under complex operating conditions.

[0012] In conjunction with the first aspect, in one possible implementation, the control device is specifically used to obtain the contact position information of each moving component when it abuts against the limiting device by the following method based on the feature information: when the movement time of each moving component along the second direction is greater than a first preset threshold, the contact position information is determined based on the feature information of each moving component, wherein the first preset threshold is the time it takes for the moving component with the shortest length of the limiting element to move along the second direction at a preset speed to abut against the limiting device; or, multiple feature information of the moving component along the second direction is obtained multiple times at preset time intervals, and the displacement change information corresponding to the current position information is determined based on the position information determined by the current feature information and the position information determined by the previous feature information, and when the displacement change information corresponding to the current position information is less than a second preset threshold, the position information determined by the current feature information is determined as the contact position information, wherein the current feature information is not the first feature information, and the second preset threshold is less than or equal to 1 micrometer. Therefore, in the embodiments of this application, the contact position information is obtained by using the time taken for the shortest moving component of the limiting element to move along the second direction to contact the limiting device, or by acquiring the position information of the moving component along the second direction multiple times at preset intervals, and using the condition that the displacement change information in two adjacent acquisitions is less than or equal to a second preset threshold as the condition for determining that the limiting element has stably contacted the limiting device. This effectively eliminates position information deviations caused by factors such as magnetic force fluctuations, airflow disturbances, system oscillations, or occasional interference in a single measurement during the upward movement of the moving component. This ensures that the acquired contact position information truly reflects the contact position corresponding to the length of the limiting element, significantly improving the reliability and stability of the contact position information, thereby enhancing the anti-interference capability and robustness of the identity recognition results.

[0013] In conjunction with the first aspect, in one possible implementation, the preset mapping relationship is obtained through the following method: controlling the moving component to move towards the limiting device along the second direction in the preset posture; and, when the limiting element of the moving component abuts against the limiting device, acquiring the abutment position information of the moving component along the second direction, and constructing the preset mapping relationship between the abutment position information and the identity information of the moving component. Thus, in the embodiments of this application, by controlling the moving component to move along the second direction in the preset posture until the limiting element abuts against the limiting device, the abutment position information of the moving component is collected and bound to its identity information. Subsequently, a mapping relationship between position and identity can be automatically constructed. This identification process is simple to operate, requires no manual measurement or external calibration equipment, and once the mapping relationship is established, it can be repeatedly used in subsequent identification processes, providing a data foundation for the efficient scheduling and automated operation of the system.

[0014] Secondly, embodiments of this application provide an electronic device that includes the magnetic levitation motor system designed in the first aspect described above.

[0015] Thirdly, embodiments of this application provide a computer-readable storage medium storing a computer program for electronic data interchange, wherein the computer program causes a computer to perform some or all of the steps described in the method performed by the control device of the magnetic levitation motor system in the first aspect of this application.

[0016] Fourthly, embodiments of this application provide a computer program product, wherein the computer program product includes a non-transitory computer-readable storage medium storing a computer program operable to cause a computer to perform some or all of the steps described in the method executed by the control device of the magnetic levitation motor system in the first aspect of this application. The computer program product may be a software installation package.

[0017] The beneficial effects of the technical solutions in the second to fourth aspects can be found in the technical effects of the technical solutions in the first to third aspects, and will not be repeated here. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 A schematic diagram of a magnetic levitation motor system provided for the embodiments of this application; Figure 2 A schematic diagram of a magnetic levitation motor system provided for an embodiment of this application; Figure 3 A schematic diagram of the structure of a moving part assembly provided for an embodiment of this application; Figure 4 A schematic diagram of the working environment of a magnetic levitation motor system provided for the embodiments of this application; Figure 5 A schematic diagram of the structure of a plurality of moving parts provided for embodiments of this application; Figure 6 A flowchart illustrating a method for identifying a moving part of an application; Figure 7 A flowchart illustrating a method for identifying a moving object as provided in this application. Figure 8 A functional unit block diagram of a child identification device provided for embodiments of this application; Figure 9 A functional unit block diagram of a child identification device provided for embodiments of this application; Figure 10 This is a schematic diagram of the structure of a mobile identification or recognition device provided for an embodiment of this application.

[0020] Explanation of reference numerals in the attached figures: Maglev motor system; 101 - Maglev stator track; 102-Motor; 200-Magnetic Levitation Motor System; 210 - Maglev stator track; 220 - Mover assembly; 221 - Magnetic float; 222 - Limiting element; 223 - First end; 224 - Second end; 225 - Robotic arm; 230 - Limiting device; 240 - Detection device; 250 - Control device; 300 - Process Chamber; 800-Mobile Identification Device; 801 - First control unit; 802 - Determining unit; 900-Motorized Identification Device; 901 - Second control unit; 902 - Construction unit; 1000 - Mobile identification or recognition equipment; 1010 - Processor; 1020 - Memory; 1021 - Computer program or instructions. Detailed Implementation

[0021] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings.

[0022] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or apparatuses.

[0023] In the embodiments of this application, "at least one item" or similar expressions refer to any combination of these items, including any combination of a single item or a plurality of items. "One or more" refers to one or more items, while "multiple" refers to two or more items. For example, "at least one item" of a, b, or c can represent the following seven cases: a, b, c; a and b; a and c; b and c; a, b, and c. Each of a, b, and c can be an element or a set containing one or more elements.

[0024] In the embodiments of this application, "connection" refers to various connection methods, such as direct connection or indirect connection, to achieve communication between devices. The embodiments of this application do not impose any limitations on this. In the description of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "connection" should be interpreted broadly. In one example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a connection that allows mutual communication; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal communication of two components or the interaction between two components.

[0025] In this document, the term "implementation" means that a specific feature, structure, or characteristic described in connection with an implementation may be included in at least one implementation of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same implementation, nor is it a separate or alternative implementation mutually exclusive with other implementations. It will be explicitly and implicitly understood by those skilled in the art that the implementations described herein can be combined with other implementations.

[0026] First, it should be noted that the magnetic levitation motor system, mover identification method, and marking method proposed in this application can be applied to the manufacturing of semiconductor devices and can be used to provide a contactless, low-dust, and highly dynamic clean handling process. Of course, this system can also be applied to other scenarios requiring contactless, low-dust, and highly dynamic clean handling processes, such as: workpiece stages, ultra-precision machining platforms, flat panel display manufacturing, biomedical and medical device manufacturing, photovoltaic cell manufacturing, precision assembly and 3C electronics manufacturing, etc. This application will use the semiconductor device manufacturing scenario as an example to describe in detail the magnetic levitation motor system, mover identification method, and marking method proposed in this application. The implementation of this method in other scenarios can refer to the semiconductor device manufacturing scenario, and will not be elaborated here.

[0027] For example, see Figure 2 , Figure 2 This is a structural schematic diagram of a magnetic levitation motor system provided for an embodiment of this application. (See attached diagram.) Figure 2 As shown, the magnetic levitation motor system 200 may include a magnetic levitation stator track 210, multiple mover assemblies 220, a limiting device 230, a detection device 240, and a control device 250.

[0028] In this embodiment of the application, the magnetic levitation stator track 210 serves as the motion platform of the entire system, providing magnetic force for multiple moving components 220 to perform magnetic levitation, enabling the multiple moving components 220 to perform contactless suspension and movement within the area corresponding to the magnetic levitation stator track 210, and providing motion trajectory and suspension support for the multiple moving components 220.

[0029] In the embodiments of this application, see Figure 3 , Figure 3 This is a schematic diagram of the structure of a moving part component provided for an embodiment of this application. For example... Figure 3 As shown, the mover assembly 220 may include a magnetic float 221 and a limiting element 222. The limiting element 222 has a first end 223 and a second end 224 facing each other. The direction in which the first end 223 and the second end 224 are connected is a first direction X. The first end 223 is fixed to the magnetic float 221, and the second end 224 is away from the magnetic float 221. In one example, the first direction X may be the direction of magnetic levitation of the mover assembly 220. For example, if the magnetic levitation stator track 210 is arranged along a horizontal plane, and it is desired that the mover assembly 220 is magnetically levitating perpendicular to the magnetic levitation stator track 210, then the first direction X may be a vertical direction perpendicular to the horizontal plane; this will be used as an example for the following explanation. Of course, in other examples of this application, the first direction X may also be a horizontal direction, depending on the specific needs.

[0030] In the embodiments of this application, see Figure 4 , Figure 4This is a schematic diagram of the working environment of a magnetic levitation motor system provided for an embodiment of this application. (See diagram below.) Figure 4 As shown, the magnetic levitation motor system 200 is positioned close to the process chamber 300, which is used to house and process wafers, including but not limited to cleaning, coating, etching, and resist removal. A robotic arm 225 can be mounted on the magnetic levitation element 221, and the robotic arm 225 moves along with the magnetic levitation element 221. The magnetic levitation motor system 200 is positioned adjacent to each process chamber 300, allowing the magnetic levitation element 221 to move between each process chamber 300, thereby driving the robotic arm 225 to transport wafers between the process chambers 300. In this embodiment, the lengths of the limiting elements 222 of different mover components 220 along the first direction X can be different. Specifically, the difference in lengths of the limiting elements 222 of any two mover components 220 along the first direction X needs to be greater than a preset length, which can be greater than or equal to 0.5 micrometers. For example, see [link to example]. Figure 5 , Figure 5 This is a schematic diagram of the structure of multiple moving parts provided for an embodiment of this application. For example... Figure 5 As shown, the length of the limiting element 222 of the multiple moving parts 220 in the first direction X can be set according to a preset discrete level. The magnitude of the discrete level can be on the order of micrometers. For example, the preset discrete level is an arithmetic sequence with a step size of 2 micrometers and the first term is 10.001 millimeters (the unit of length mentioned below is assumed to be millimeters unless otherwise specified). Under this preset discrete level, if there are n moving parts, the length of the limiting element of the n moving parts in the first direction X can be expressed as follows: Subl={H1=10.001, H2=10.003, H3=10.005,…, Hn=H1+(n-1)H y}, H y =0.002; Where Subl represents the set of lengths of the limiting elements of the n moving parts in the first direction X, and H n H represents the length of the limiting element of the nth moving part in the first direction X. y This indicates the preset step size.

[0031] In this embodiment, the magnetic float 221 and the limiting element 222 can be detachably connected or foldable. Specifically, the detachable connection can be achieved through threaded connections, snap-fit ​​connections, or quick-connect fittings. For example, threaded holes or slots can be provided on the magnetic float 221, and external threads or hooks can be provided at the second end 224 of the limiting element 222. Users can quickly complete the installation or removal by twisting or pressing. When the limiting element and the magnetic float are detachably connected, users can quickly replace limiting elements of different lengths or shapes according to actual coding needs without replacing the entire moving part assembly, thereby reducing spare parts costs and shortening maintenance time. The foldable connection can be achieved by providing a folding joint or hinge structure in the middle of the limiting element 222, allowing the limiting element 222 itself to be bent, further reducing the storage volume, and fixing it in the working posture by a locking mechanism when unfolded. When the limiting element is foldable relative to the magnetic float, the limiting element can be folded in the non-working state to reduce space occupation and unfolded when needed, improving the convenience of transportation while meeting working requirements. Users can then quickly replace or adjust the limiting element according to actual working conditions, simplifying the disassembly and maintenance process of the mover assembly. Of course, the magnetic float 221 and the limiting element 222 can also be integrally molded to enhance the connection strength and stability of the limiting element, reduce displacement deviation caused by loose connectors or assembly errors, and are suitable for application scenarios where the number of movers is fixed and there is no need to frequently replace the limiting element. This is beneficial for reducing the risk of particle generation under vacuum conditions.

[0032] In this embodiment, the length of the limiting element 222 along the first direction X can be adjustable. For example, the limiting element 222 can adopt a threaded sleeve structure, and the overall length along the first direction X can be changed by rotating and adjusting the screw depth of the sleeve. This allows the mover assembly 220 to adapt to different height encoding requirements. When the system needs to reassign the mover identity, it is not necessary to replace the entire mover assembly 220; only the length of the limiting element 222 needs to be adjusted to complete the recoding, significantly improving the system's adaptability and scalability.

[0033] In this embodiment, the material of the limiting element 222 meets the cleanliness requirements of semiconductor devices and has sufficient mechanical rigidity. For example, it can be stainless steel (such as 304 or 316L), anodized aluminum alloy, alumina ceramic, or silicon carbide. Therefore, the limiting element 222 can be prevented from deforming or wearing down and causing particulate contamination during repeated contact with the limiting device.

[0034] In this embodiment, the limiting device 230 and the mover assembly 220 are arranged opposite each other along the second direction Y. For example, if the maglev stator track 210 is arranged along a horizontal plane, the second direction Y can be a vertical direction. The limiting device 230 can be located above the maglev stator track 210, the mover assembly 220 is located between the maglev stator track 210 and the limiting device 230, and the maglev float 221 is arranged opposite to the limiting device 230 along the vertical direction; that is, the maglev stator track 210, the mover assembly 220 and the limiting device 230 can be arranged sequentially along the second direction Y.

[0035] In this embodiment, the limiting device 230 can be made of a soft magnetic material, such as electromagnetic pure iron (industrial pure iron), silicon steel sheet (iron-silicon alloy), iron-nickel alloy (such as permalloy), iron-aluminum alloy, soft magnetic ferrite (such as manganese-zinc ferrite, nickel-zinc ferrite), etc. Thus, there is a magnetic attraction between the limiting device 230 and the magnetic float 221. This magnetic attraction can overcome at least a portion of the gravity of the magnetic float 221 during normal magnetic levitation operation of the mover assembly 220, thereby reducing the current in the coils within the magnetic levitation stator track, and consequently reducing the power and heat generation of the magnetic levitation stator track. Furthermore, when the limiting element 222 of the moving part assembly 220 comes into contact with it, the soft magnet can generate a magnetic attraction force on the permanent magnet of the magnetic float 221, so that the limiting element 222 and the limiting device 230 maintain a stable contact state, reducing the shaking or displacement of the moving part assembly 220 after contact caused by fluctuations in magnetic force. This ensures that the position information collected by the detection device 240 has good consistency and repeatability, further improving the accuracy of identity recognition. In addition, for the function of assisting in overcoming the gravity of the magnetic float 221, the limiting device 230 can be any structure that can provide a magnetic field, such as including a limiting device body and an auxiliary coil. The limiting device body is used to install the auxiliary coil and to abut against the limiting element 222 in the moving part assembly 220 to achieve limiting. The auxiliary coil is used to generate a magnetic field when energized to form a magnetic attraction force with the magnetic float 221, thereby achieving the above-mentioned effect.

[0036] In this embodiment, the limiting device 230 is used to limit the maximum displacement of the mover assembly 220 along the second direction Y. Specifically, the mover assembly 220 has a preset posture in which the limiting element 222 is located between the magnetic float 221 and the limiting device 230, and the first direction X of the limiting element 222 is the same as the second direction Y. For example, in this embodiment, the second direction Y is a vertical direction, so the magnetic levitation stator track 210 can be applied with current to form a magnetic field and maintain the magnetic float in the preset posture in which the limiting element 222 extends along the second direction Y, that is, at this time the first direction X and the second direction Y are the same. During magnetic levitation motion, the mover assembly 220 will maintain the preset posture and perform magnetic levitation in the second direction Y. Since the second end 224 of the limiting element 222 faces the limiting device 230, a large magnetic force is output on the magnetic levitation stator track 210. The second end 224 of the limiting element 222 of the mover assembly 220 will abut against the limiting device 230 to limit the magnetic levitation range of the mover assembly 220 and reduce collisions or vibrations caused by excessive height. It should be understood that in other embodiments of this application, the second direction Y can also be a direction other than the vertical direction; for example, in some applications, the second direction Y is the horizontal direction. Since the limiting device 230 is a structure used to cooperate with the limiting element 222 of the mover assembly 220 to achieve limiting, the mover assembly 220 should be configured such that the extension direction of the limiting element 222 is the second direction Y, that is, the first direction X is parallel to the second direction Y, and the limiting element 222 is located between the magnetic float 221 and the limiting device 230, that is, the above-mentioned preset posture.

[0037] Therefore, considering that the lengths of the limiting elements 222 of the multiple moving parts 220 are different, the contact position information of each moving part 220 in the second direction Y when it moves along the second direction Y to abut against the limiting element 222 and the limiting device 230 is also different. Based on this, these different contact position information can be used as the identification code of the corresponding moving part 220. Then, by detecting the contact position information when the moving part 220 moves along the second direction Y to abut against the limiting element 222 and the limiting device 230, the identity of the corresponding moving part 220 can be determined.

[0038] In this embodiment, the detection device 240 is used to detect feature information related to the position information of the mover assembly 220 along the second direction Y. The feature information is information related to the position information of the mover assembly 220, which characterizes the position information of the mover assembly 220. The control device 250 can determine the position information of the mover assembly 220 based on this feature information. Specifically, the detection device 240 can be a two-dimensional or three-dimensional Hall sensor array, which can acquire the six-degree-of-freedom pose information of the mover assembly 220 by collecting magnetic field-related information. The six-degree-of-freedom pose information includes the position information of the mover assembly 220 along the second direction Y, and the magnetic field-related information is the feature information.

[0039] In this embodiment, the control device 250 can be connected to the magnetic levitation stator track 210 and / or the mover assembly 220 to control the magnetic float 221 to levitate along the second direction Y. Specifically, when the control device 250 is connected to the mover assembly 220, it can be connected to the magnetic float 221 within the mover assembly 220. Simultaneously, the control device 250 can also be connected to the detection device 240 to obtain feature information detected by the detection device 240, and based on this, obtain the contact position information of the mover assembly when it abuts against the limiting device 230, establishing a mapping relationship and identifying the mover. This method eliminates the need for additional RFID tags during the entire process of identifying the mover assembly 220, thereby reducing problems caused by electromagnetic interference. In this embodiment, the detection device 240 is used as a Hall sensor to detect magnetic field information as feature information, and the control device is used to convert the magnetic field information into position information of the mover assembly 220. However, it should be understood that in other embodiments of this application, the detection device 240 can also be other types of detection elements. For example, the detection device 240 can also be an infrared sensor, which is used to detect the distance between the mover assembly 220 and the sensor as feature information. Correspondingly, after obtaining the distance, the control device 250 can convert it into coordinate information in the magnetic levitation motor system, that is, the position information of the magnetic float 221 in the magnetic levitation motor system. The types of detection devices 240 are diverse, and they will not be listed in detail here. As long as the detection device 240 can obtain feature information that can characterize the position information of the mover assembly 220, it is acceptable.

[0040] Specifically, the control device 250 can determine the identity information of each moving component 220 based on the contact position information of each moving component 220 and a preset mapping relationship. The preset mapping relationship includes the mapping relationship between the contact position information of multiple moving components 220 along the second direction Y and the corresponding identity information when the limiting element 222 and the limiting device 230 come into contact.

[0041] In this embodiment, when establishing a preset mapping relationship, the moving component 220, to which the preset mapping relationship needs to be established, can be placed above the maglev stator track 210, and the maglev motor system 200 can be powered on. The control device 250 controls the maglev stator track 210 to generate a magnetic force that causes the moving component 220 to levitate, causing the moving component 220 to continuously float upwards along the second direction Y in a preset posture until the first end 223 of its limiting element 222 abuts against the limiting device 230. When the first end 223 of the limiting element 222 of the moving component 220 abuts against the limiting device 230, the abutment position information of the moving component 220 along the second direction Y is obtained, and a preset mapping relationship is constructed between the abutment position information and the identity information of the moving component 220.

[0042] In this embodiment, when the control device 250 obtains the contact position information of each moving component 220 when it abuts against the limiting device 230 based on the feature information, it can determine the contact position information of each moving component 220 based on its feature information when the movement time of each moving component 220 along the second direction Y exceeds a first preset threshold. Specifically, the first preset threshold is the time it takes for the moving component 220 with the shortest length of the limiting element 222 to move along the second direction Y at a preset speed to abut against the limiting device 230, that is, the maximum theoretical time required for the moving component 220 to move along the second direction Y until the limiting element 222 contacts the limiting device 230. For example, in some embodiments of this application, the first preset threshold can be 100 milliseconds. Thus, after controlling the moving component 220 to move along the second direction Y for 100 milliseconds, the contact position information of the moving component 220 in the second direction Y can be determined. Thus, when the movement duration of the moving component 220 along the second direction Y exceeds the first preset threshold, the limiting element 222 of the moving component 220 has contacted the limiting device 230 and is in a stable state, reducing the possibility of incorrect contact position information being obtained due to the moving component 220 not finishing its movement.

[0043] Alternatively, in this embodiment, the control device 250 can acquire the contact position information of the moving component 220 along the second direction Y when the change in displacement information of the moving component 220 along the second direction Y is less than a second preset threshold. For example, the control device 250 can acquire multiple feature information of the moving component 220 along the second direction Y multiple times at preset time intervals using the detection device 240. Then, after each acquisition after the first acquisition, the control device 250 can determine the displacement change information corresponding to the current position information, i.e., the change in displacement information, based on the position information determined by the currently acquired feature information and the position information determined by the previously acquired feature information. For example, during the second acquisition, position information 2 can be determined based on the feature information acquired in the second acquisition, and the difference between position information 2 and position information 1 determined by the feature information acquired in the first acquisition can be calculated. This difference can then be used as the displacement change information corresponding to position information 2. Similarly, during the third acquisition, position information 3 can be determined based on the feature information acquired in the third acquisition. The difference between position information 3 and position information 2 determined by the feature information acquired in the second acquisition is calculated, and this difference is used as the displacement change information corresponding to position information 3. Then, when the displacement change information corresponding to the current position information is less than the second preset threshold, the position information determined by the current feature information is determined as the contact position information of the moving component 220 along the second direction Y.

[0044] Specifically, the moving part 220 moves from its starting position at a preset speed until it comes into contact with the limiting element 222 and the limiting device 230. Before contact, the displacement change of the moving part 220 in the second direction Y will remain at a stable value. That is, if the displacement is not restricted due to contact with the limiting device 230, the displacement change of the moving part 220 in the second direction Y should remain at a non-zero stable value between every two adjacent acquisition intervals. This stable value is related to the preset speed. When the limiting element 222 contacts the limiting device 230, the displacement change of the moving part 220 in the second direction Y will decrease instantaneously due to the obstruction of the limiting device 230. Afterward, due to the contact relationship, the displacement change will approach zero. Subsequently, by setting a small second preset threshold, such as less than or equal to 1 micrometer, when the change in displacement information of the moving component 220 along the second direction Y in a unit time is less than the threshold, it can be determined that the moving component 220 is in a stable contact state. At this time, the position information obtained can truly reflect the maximum displacement value corresponding to the length of the limiting element 222, which can reduce the identification deviation caused by data acquisition when the moving component is not yet stable.

[0045] In this embodiment, the second preset threshold can be determined based on the preset speed of the moving component 220, or based on the discrete levels of the lengths of the multiple limiting elements 222. For example, in some embodiments of this application, if the preset speed is 20 mm / s, the preset time interval can be 10 ms, and the displacement change information between two adjacent samples when the moving component 220 is not in contact with the limiting device 230 is 200 μm, then the second preset threshold can be set much less than 200 μm, for example, it can be less than or equal to 1 μm. Alternatively, when the discrete level of the lengths of each limiting element is 2 μm, the second preset threshold can be selected as a value less than 2 μm, such as the second preset threshold can be 1 μm. Thus, after controlling the moving component 220 to move along the second direction Y, the displacement change information of the moving component 220 along the second direction Y can be determined each time feature information is acquired (not the first time). When the displacement change information is less than 1 μm, it can be determined that the moving component 220 is in contact with the limiting device 230, and the position information corresponding to the feature information acquired this time can be used as the contact position information. In this embodiment, the preset time interval rule can be an equal-period rule, that is, the system periodically acquires the feature information of the moving component 220 along the second direction Y at a fixed sampling period (e.g., 10 milliseconds). Specifically, when the moving component 220 moves toward the limiting device at a preset speed, the feature information of the moving component 220 along the second direction Y can be continuously acquired at 10-millisecond intervals, with one feature information acquired each time. Of course, the preset time interval rule can also be other regular rules, such as an arithmetic sequence with a fixed step size or a random sequence, and this application does not limit this.

[0046] In this embodiment, after the initial sampling confirms that the moving component is in contact with the limiting device, the control device 250 can further control the detection device 240 to continue sampling multiple times at preset time intervals. The feature information collected multiple times is used to calculate position information, and the average or median value of these position information is taken as the actual contact position information of the moving component. This effectively reduces deviations in the acquired position information caused by occasional interference in a single measurement, significantly improving the reliability and stability of the contact position information.

[0047] In this application, the control device 250 can be a device with communication functions, and may be referred to as a terminal, user equipment (UE), mobile station, mobile terminal, access terminal equipment, industrial control terminal equipment, UE unit, UE station, mobile station, remote station, remote terminal equipment, mobile device, UE terminal equipment, wireless communication equipment, UE agent, or UE device, etc. In some embodiments of this application, the control device 250 can also be a device with transceiver functions, such as a chip system. The chip system may include chips, and may also include other discrete components.

[0048] In some embodiments of this application, the control device 250 may also be a processor or a controller. For example, when the control device 250 is a processor, it may be a processor or a controller, such as a baseband processor, baseband chip, central processing unit (CPU), general-purpose processor, digital signal processor (DSP), application-specific integrated circuit (ASIC), field-programmable gate array (FPGA), or other programmable logic device, transistor logic device, hardware component, or any combination thereof. Alternatively, it may be a logic block, module, or circuit that implements or executes the various embodiments described in connection with the disclosure of this application. Alternatively, it may be a combination that implements computational functions, such as a combination of one or more microprocessors, a combination of a DSP and a microprocessor, etc. When the control device 250 is a controller, it may include a processor and memory, wherein the processor is as described above and will not be repeated here. The memory may be, but is not limited to, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM), or compact disc read-only memory (CD-ROM). The memory is used to store the program code executed by the processor and the data transmitted.

[0049] In some embodiments of this application, the control device 250 may also be a server, such as an independent server or a cloud server that provides basic cloud computing services such as cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communication, middleware services, domain name services, security services, content delivery networks, and big data and artificial intelligence platforms. This application does not make specific limitations in this regard.

[0050] In this embodiment, the magnetic levitation motor system 200 may further include a database for storing data required by the system or collected data. The database may also be a server or a storage device providing data storage services, such as: a read-only memory or other type of static storage device capable of storing static information and instructions; a random access memory or other type of dynamic storage device capable of storing information and instructions; an electrically erasable programmable read-only memory; a read-only optical disc or other optical disc storage; an optical disc storage device (including compressed optical discs, laser discs, optical discs, digital universal optical discs, Blu-ray discs, etc.); a magnetic disk storage medium or other magnetic storage device; or any other medium capable of carrying or storing desired program code having an instruction or data structure form and accessible by a computer. This application does not specifically limit this type of storage device. In this embodiment, the database may also be a storage unit integrated into the processing device, forming a component of the processing device.

[0051] Understandable Figure 2 The configuration and quantity of the magnetic levitation motor system 200 shown in the illustration, including the magnetic levitation stator track 210, multiple mover assemblies 220, limiting device 230, detection device 240, and control device 250, are merely examples and do not constitute a limitation on the embodiments of this application. For example, the magnetic levitation motor system 200 may also include other equipment such as servers, network devices, and user equipment; it may also include other magnetic levitation stator tracks, other mover assemblies, other limiting devices, other detection devices, or other control devices.

[0052] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the above content and the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application. At the same time, these embodiments can be related to each other or independent of each other, and the same content between different embodiments can be referenced by each other, which will not be elaborated here.

[0053] Furthermore, this application also provides a method for identifying a mobile device. Hereinafter, it will be discussed in conjunction with... Figure 2This application describes one method for identifying a mobile device. Figure 6 A flowchart illustrating a method for identifying a moving part of an entity, provided in this application, is shown below. This method can be applied to... Figure 2 The magnetic levitation motor system 200 shown can be specifically executed by the control device 250, and in this embodiment, the second direction Y can refer to the vertical direction for ease of explanation. Figure 6 As shown, the method includes the following steps: S601: Control the moving part to move toward the limiting device in a preset posture along the second direction.

[0054] In this embodiment of the application, the moving component that needs to be identified can be placed above the magnetic levitation stator track, the magnetic levitation motor system is powered on, and the magnetic levitation stator track is controlled by the control device to generate a magnetic force that makes the moving component levitate, so that the moving component floats continuously in the second direction Y in a preset posture until its limiting element abuts against the limiting device.

[0055] Specifically, the mover assembly has a preset posture in which the limiting element is located between the magnetic float and the limiting device, and the first direction X of the limiting element extends in the same direction as the second direction Y. For example, in this embodiment, if the magnetic levitation stator track is arranged horizontally, the second direction Y can be vertical. The limiting device can be located above the magnetic levitation stator track, and the mover assembly is located between the magnetic levitation stator track and the limiting device. The magnetic float and the limiting device are arranged opposite each other in the vertical direction. Current can be applied to the magnetic levitation stator track to form a magnetic field, maintaining the magnetic float in the preset posture where the limiting element extends in the second direction Y, i.e., the first direction X and the second direction Y are the same at this time. During magnetic levitation motion, the mover assembly will maintain the preset posture and move in the second direction Y. Since the second end of the limiting element faces the limiting device, a large magnetic force is output from the magnetic levitation stator track. After the mover assembly continues to float, the second end of its limiting element will abut against the limiting device.

[0056] In this embodiment of the application, when performing maglev, all moving parts located above the maglev stator track can be selected to be magleved simultaneously, depending on the actual working conditions and requirements, for example, when there are multiple moving parts that need to be identified. Alternatively, only the moving parts that need to be identified can be magleved.

[0057] S602: When the limiting element of the moving component comes into contact with the limiting device, the contact position information of the moving component along the second direction is obtained, and a mapping relationship between the contact position information and the identity information of the moving component is constructed.

[0058] In this embodiment of the application, the mapping relationship includes: a mapping relationship between the contact position information of multiple moving components along the second direction Y and the corresponding identity information when the limiting element and the limiting device abut. Simply put, as... Figure 5 As shown, since the length of the limiting element of each moving component is different in the second direction Y, its contact position information in the second direction Y is also different when it floats up to the limiting element and abuts against the limiting device. Therefore, this application constructs a mapping relationship between the contact position information of each moving component and its identity information. This allows for subsequent identification by obtaining the contact position information of the moving component again when it floats up to the limiting element and abuts against the limiting device, and then querying the constructed mapping relationship to determine the identity information of the moving component.

[0059] For example, taking a magnetic levitation motor system comprising four moving parts, with identification (ID) values ​​of 00 to 03 for each of the four moving parts, the mapping relationship can be illustrated as follows: When the step size of the limiting element length for each moving part is 2µm, the mapping relationship can be illustrated as follows: ID: 00, contact position information: Z=20.100mm; ID: 01, contact position information: Z=20.098mm; ID: 02, contact position information: Z=20.096mm; ID: 03, contact position information: Z=20.094mm.

[0060] It is evident that accurately acquiring the contact position information is a prerequisite for establishing a reliable mapping relationship in this process. Subsequently, in this embodiment, after controlling the moving component to move along the second direction Y in a preset posture, when the movement time of the moving component along the second direction Y exceeds a first preset threshold, the contact position information of the moving component along the second direction Y is acquired. Specifically, in the moving component identification mode, the moving component moves from the starting position to the limiting element and contacting the limiting device at a preset speed. Since the lengths of the limiting elements of different moving components are different, the time taken for different moving components to contact the limiting device varies. The first preset threshold is the time required for the moving component with the shortest limiting element to move to the limiting device at the preset speed, which is also the maximum theoretical time required for the moving component to move along the second direction Y until the limiting element contacts the limiting device. Thus, when the moving component moves for a duration greater than the first preset threshold along the second direction Y, the limiting element of the moving component has contacted the limiting device and is in a stable state. At this time, collecting the contact position information of the moving component can reduce the problem of incorrect contact position information obtained due to the moving component not finishing its movement.

[0061] For example, in some embodiments of this application, the first preset threshold can be 100 milliseconds. Thus, after controlling the moving component to move along the second direction Y for 100 milliseconds, the contact position information of the moving component in the second direction Y can be determined, and a mapping relationship can be established between the contact position information of the moving component and the corresponding identity information. After the mapping between the contact position information and identity information is established for each moving component, a preset mapping relationship can be obtained. This preset mapping relationship includes: the mapping relationship between the contact position information of the moving component along the second direction Y and the corresponding identity information when the limiting element and the limiting device contact. Then, subsequently, based on the extreme position of the moving component in the second direction Y, the corresponding identity information can be indexed in the preset mapping relationship, that is, the identity of the moving component can be determined.

[0062] Alternatively, in this embodiment, the contact position information of the moving component along the second direction Y can be obtained when the change in displacement information of the moving component along the second direction Y is less than a second preset threshold. Specifically, in the moving component identification mode, the moving component moves from the starting position to the limiting element and the limiting device at a preset speed. Before contact, the change in displacement of the moving component in the second direction Y will remain at a stable value, which is related to the preset speed. When the limiting element and the limiting device contact, the change in displacement of the moving component in the second direction Y will decrease instantaneously due to the obstruction of the limiting device. Afterwards, due to the contact relationship, the change in displacement will approach zero. Then, by setting a small second preset threshold, multiple feature information of the moving component along the second direction Y can be obtained multiple times at preset time intervals. Then, each time a non-first acquisition occurs, the displacement change information corresponding to the current position information, i.e., the change in displacement information, is determined based on the position information determined by the currently acquired feature information and the position information determined by the previously acquired feature information. For example, during the second acquisition, position information 2 can be determined based on the feature information acquired in the second acquisition. The difference between position information 2 and position information 1 determined by the feature information acquired in the first acquisition is calculated, and this difference is used as the displacement change information corresponding to position information 2. Similarly, during the third acquisition, position information 3 can be determined based on the feature information acquired in the third acquisition. The difference between position information 3 and position information 2 determined by the feature information acquired in the second acquisition is calculated, and this difference is used as the displacement change information corresponding to position information 3. Subsequently, when the displacement change information corresponding to the current position information is less than a second preset threshold, the position information determined by the current feature information is determined as the contact position information of the moving component along the second direction Y. At this time, the acquired contact position information can truly reflect the maximum displacement value corresponding to the length of the limiting element, which can reduce the identification deviation caused by data acquisition when the moving component is not yet stable.

[0063] In this application's embodiments, the second preset threshold can be determined based on the preset speed of the moving component during the construction of the preset mapping relationship, or it can be determined based on the discrete levels of the lengths of the aforementioned multiple limiting elements. For example, in some embodiments of this application, if the preset speed is 20 mm / s, then the second preset threshold can be less than or equal to 1 μm. Alternatively, when the discrete level of the lengths of each limiting element is 2 μm, the second preset threshold can be selected as a value less than 2 μm, such as 1 μm. Thus, after controlling the moving component to move along the second direction Y, the displacement change information of the moving component along the second direction Y can be determined each time feature information is acquired (not the first time). When the displacement change information is less than 1 μm, it can be determined that the moving component is in contact with the limiting device, and the position information corresponding to the feature information acquired this time can be used as the contact position information.

[0064] In this embodiment, the preset time interval rule can be an equal-period rule, meaning the system periodically acquires the position information of the moving component along the second direction Y at a fixed sampling period (e.g., 10 milliseconds). Specifically, when the moving component moves toward the limiting device at a preset speed, the position information of the moving component along the second direction Y can be continuously acquired at 10-millisecond intervals, with one position information acquired each time. Of course, the preset time interval rule can also be other regular rules, such as an arithmetic sequence with fixed step sizes or a random sequence; this application does not impose any restrictions on this.

[0065] In this embodiment, after the initial sampling confirms that the moving component is in contact with the limiting device, multiple samplings can be performed at preset time intervals. The feature information collected multiple times is used to calculate position information, and the average or median value of these position information is used as the actual contact position information of the moving component for constructing a preset mapping relationship. This effectively reduces deviations in the acquired position information caused by occasional interference in a single measurement, significantly improving the reliability and stability of the contact position information, thereby enhancing the anti-interference capability and robustness of the identification results.

[0066] As can be seen, by controlling the moving component to move in a preset posture along the second direction until it abuts against the limiting element and the limiting device, the abutment position information of the moving component is collected and bound to its identity information. Subsequently, a mapping relationship between the abutment position and the identity can be automatically constructed. This identification process is simple to operate, requires no manual measurement or external calibration equipment, and once the mapping relationship is established, it can be repeatedly used in subsequent identification processes, providing a data foundation for the efficient scheduling and automated operation of the system.

[0067] This application also provides a method for identifying a moving entity. Hereinafter, it will be combined with... Figure 2This application describes one method for identifying a mobile device's identity. Figure 7 A flowchart illustrating a method for identifying a moving object is provided for an embodiment of this application. This method can be applied to... Figure 2 The magnetic levitation motor system 200 shown can be specifically executed by the control device 250, and in this embodiment, the second direction will refer to the vertical direction for ease of explanation. Figure 7 As shown, the method includes the following steps: S701: Control the actuator assembly to move toward the limiting device in a preset posture along the second direction.

[0068] In this embodiment of the application, the moving component that needs to be identified can be placed above the magnetic levitation stator track, the magnetic levitation motor system is powered on, and the magnetic levitation stator track is controlled by the control device to generate a magnetic force that makes the moving component that needs to be identified levitate, so that the moving component floats continuously in a preset posture along the second direction until its limiting element abuts against the limiting device.

[0069] Specifically, the mover assembly has a preset posture in which the limiting element is located between the magnetic float and the limiting device, and the first direction X of the limiting element extends in the same direction as the second direction Y. For example, in this embodiment, if the magnetic levitation stator track is arranged horizontally, the second direction Y can be vertical. The limiting device can be located above the magnetic levitation stator track, and the mover assembly is located between the magnetic levitation stator track and the limiting device. The magnetic float and the limiting device are arranged opposite each other in the vertical direction. Current can be applied to the magnetic levitation stator track to form a magnetic field, maintaining the magnetic float in the preset posture where the limiting element extends in the second direction Y, i.e., the first direction X and the second direction Y are the same at this time. During magnetic levitation motion, the mover assembly will maintain the preset posture and move in the second direction Y. Since the second end of the limiting element faces the limiting device, a large magnetic force is output from the magnetic levitation stator track. After the mover assembly continues to float, the second end of its limiting element will abut against the limiting device.

[0070] In this embodiment of the application, when performing maglev, all moving parts located above the maglev stator track can be selected to be magleved simultaneously, depending on the actual working conditions and requirements, for example, when there are multiple moving parts that need to be identified. Alternatively, only the moving parts that need to be identified can be magleved.

[0071] S702: When the limiting element of the moving part comes into contact with the limiting device, the identity information of the moving part is determined according to the contact position information of the moving part along the second direction and the preset mapping relationship.

[0072] In this embodiment of the application, the preset mapping relationship includes: a mapping relationship between the contact position information of multiple moving components along the second direction Y and the corresponding identity information when the limiting element and the limiting device abut. For example, this preset mapping relationship can be constructed through steps S501-S502, which will not be described in detail here.

[0073] Specifically, such as Figure 5 As shown, since the length of the limiting element of each moving component is different in the second direction Y, its contact position information in the second direction Y is also different when it floats up to the limiting element and abuts against the limiting device. Therefore, this application constructs a mapping relationship between the contact position information of each moving component and its identity information. This allows for subsequent identification by obtaining the contact position information of the moving component again when it floats up to the limiting element and abuts against the limiting device, and then querying the constructed mapping relationship to determine the identity information of the moving component.

[0074] For example, taking a magnetic levitation motor system comprising four moving parts, with IDs of 00 to 03 respectively, the mapping relationship can be described as follows: When the step size of the limiting element length of each moving part is 2µm, the mapping relationship can be described as follows: ID: 00, contact position information: Z=20.100mm; ID: 01, contact position information: Z=20.098mm; ID: 02, contact position information: Z=20.096mm; ID: 03, contact position information: Z=20.094mm.

[0075] Subsequently, during the identification process, if the contact position information of a moving component is 20.096mm, its ID can be determined to be 02 based on this mapping information.

[0076] Similarly, in the identification process, accurately obtaining the contact position information is a prerequisite for constructing a reliable mapping relationship. Therefore, in this embodiment, after controlling the moving component to move along the second direction Y in a preset posture, when the movement time of the moving component along the second direction Y exceeds a first preset threshold, the contact position information of the moving component along the second direction Y is obtained. Specifically, in the moving component identification mode, the moving component moves from the starting position to the limiting element and contacting the limiting device at a preset speed. Since the lengths of the limiting elements of different moving components are different, the time taken for different moving components to contact the limiting device varies. The first preset threshold is the time taken for the moving component with the shortest limiting element to move to the limiting device at the preset speed, which is also the maximum theoretical time required for the moving component to move along the second direction Y until the limiting element contacts the limiting device. Thus, when the moving component moves for a duration greater than the first preset threshold along the second direction Y, the limiting element of the moving component has contacted the limiting device and is in a stable state. At this time, collecting the contact position information of the moving component reduces the problem of incorrect position information obtained due to the moving component not finishing its movement.

[0077] For example, in some embodiments of this application, the first preset threshold can be 100 milliseconds. In this way, after controlling the moving component to move along the second direction Y for 100 milliseconds, the contact position information of the moving component in the second direction Y can be determined, and the identity information of the moving component can be determined based on the contact position information of the moving component and the preset mapping relationship.

[0078] Alternatively, in this embodiment, the contact position information of the moving component along the second direction Y can be obtained when the change in displacement information of the moving component along the second direction Y is less than a second preset threshold. Specifically, in the moving component identification mode, the moving component moves from the starting position to the limiting element and the limiting device at a preset speed. Before contact, the change in displacement of the moving component in the second direction Y will remain at a stable value, which is related to the preset speed. When the limiting element and the limiting device contact, the change in displacement of the moving component in the second direction Y will decrease instantaneously due to the obstruction of the limiting device. Afterwards, due to the contact relationship, the change in displacement will approach zero. Then, by setting a small second preset threshold, multiple feature information of the moving component along the second direction Y can be obtained multiple times at preset time intervals. Then, each time a non-first acquisition occurs, the displacement change information corresponding to the current position information, i.e., the change in displacement information, is determined based on the position information determined by the currently acquired feature information and the position information determined by the previously acquired feature information. For example, during the second acquisition, position information 2 can be determined based on the feature information acquired in the second acquisition. The difference between position information 2 and position information 1 determined by the feature information acquired in the first acquisition is calculated, and this difference is used as the displacement change information corresponding to position information 2. Similarly, during the third acquisition, position information 3 can be determined based on the feature information acquired in the third acquisition. The difference between position information 3 and position information 2 determined by the feature information acquired in the second acquisition is calculated, and this difference is used as the displacement change information corresponding to position information 3. Subsequently, when the displacement change information corresponding to the current position information is less than a second preset threshold, the position information determined by the current feature information is determined as the contact position information of the moving component along the second direction Y. At this time, the acquired contact position information can truly reflect the maximum displacement value corresponding to the length of the limiting element, which can reduce the identification deviation caused by data acquisition when the moving component is not yet stable.

[0079] In this application's embodiments, the selection of the second preset threshold can be based on the moving speed of the moving component during the construction of the preset mapping relationship, or it can be based on the discrete levels of the lengths of the aforementioned multiple structural components. For example, in some embodiments of this application, if the preset speed is 20 mm / s, then the second preset threshold can be less than or equal to 1 μm. Alternatively, when the discrete level of the lengths of each limiting element is 2 μm, the second preset threshold can be selected as a value less than 2 μm, such as 1 μm. Thus, after controlling the moving component to move along the second direction Y, the displacement change information of the moving component along the second direction Y can be determined each time feature information is acquired (not the first time). When the displacement change information is less than 1 μm, it can be determined that the moving component is in contact with the limiting device, and the position information corresponding to the feature information acquired this time can be used as the contact position information.

[0080] In this embodiment, the preset time interval rule can be an equal-period rule, meaning the system periodically acquires the position information of the moving component along the second direction Y at a fixed sampling period (e.g., 10 milliseconds). Specifically, when the moving component moves toward the limiting device at a preset speed, the position information of the moving component along the second direction Y can be continuously acquired at 10-millisecond intervals, with one position information acquired each time. Of course, the preset time interval rule can also be other regular rules, such as an arithmetic sequence with fixed step sizes or a random sequence; this application does not impose any restrictions on this.

[0081] In this embodiment, after the initial sampling confirms that the moving component is in contact with the limiting device, multiple samplings can be performed at preset time intervals. The feature information collected multiple times is used to calculate position information, and the average or median value of these position information is used as the actual contact position information of the moving component for subsequent matching. This effectively reduces deviations in the acquired position information caused by occasional interference in a single measurement, significantly improving the reliability and stability of the position information, thereby enhancing the anti-interference capability and robustness of the identity recognition results.

[0082] As can be seen, by controlling the mover assembly to move in a preset posture along the second direction until it comes into contact with the limiting element and the limiting device, and matching the preset mapping relationship based on the detected contact position information, the identity recognition is completed. The entire recognition process relies only on the inherent physical characteristics of the mover assembly and the existing control capability of the magnetic levitation system. It does not require any external recognition device. The recognition steps are simple and efficient, and the identity information can be quickly restored after the system is powered off and restarted or the mover is rearranged, ensuring the scheduling continuity and operational safety of the multi-motor magnetic levitation motor system under complex working conditions.

[0083] The foregoing primarily describes the implementation scheme of this application from a methodological perspective. It is understood that, to achieve the above functions, the apparatus may include hardware structures and / or software circuits corresponding to the execution of each function. Those skilled in the art should readily recognize that, based on the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein, this application can be implemented in hardware or a combination of hardware and computer software. Whether a function is executed in a hardware or computer software-driven hardware manner depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0084] The embodiments of this application can divide the device into functional units according to the above method examples. For example, each function can be divided into a separate functional unit, or two or more functions can be integrated into one processing unit. It should be noted that the unit division in the embodiments of this application is illustrative and is only a logical functional division, while other division methods may be used in actual implementation.

[0085] See Figure 8 , Figure 8 This is a functional unit block diagram of a mobile identification device provided in an embodiment of this application. The mobile identification device 800 includes a first control unit 801 and a determination unit 802.

[0086] In the embodiments of this application, the first control unit 801 and the determination unit 802 can be a circuit unit used to receive and process signals, information, etc., or to determine a monitoring mechanism, and there are no specific limitations on this.

[0087] In this embodiment of the application, the mobile identification device 800 may further include a storage unit for storing computer program code or instructions executed by the mobile identification device 800. The storage unit may be a memory.

[0088] In this embodiment of the application, the mobile identification device 800 may be a chip or a chip module.

[0089] In this embodiment of the application, the first control unit 801 and the determining unit 802 can be integrated into the communication unit. The communication unit can be a communication interface, transceiver, transceiver circuit, etc.

[0090] In this embodiment, the first control unit 801 and the determination unit 802 can be integrated into the processing unit.

[0091] It should be noted that the processing unit can be a processor or controller, such as a baseband processor, baseband chip, CPU, general-purpose processor, DSP, ASIC, FPGA, or other programmable logic device, transistor logic device, hardware component, or any combination thereof. It can implement or execute the various exemplary logic blocks, modules, and circuits described in conjunction with the disclosure of this application. The processing unit can also be a combination that implements computational functions, such as including one or more microprocessor combinations, a combination of a DSP and a microprocessor, etc.

[0092] In this embodiment, the mobile identification device 800 is used to perform any of the steps performed by network devices / chips / chip modules, etc., as described in the above method embodiments.

[0093] In specific implementation, the first control unit 801 and the determining unit 802 are used to execute any step as described in the above method embodiments, and when performing actions such as sending, other units can be selectively invoked to complete the corresponding operation. A detailed explanation follows.

[0094] The first control unit 801 is used to control the moving part to move toward the limiting device in the second direction in the preset posture; The determining unit 802 is used to determine the identity information of the moving component when the limiting element of the moving component abuts against the limiting device, based on the abutment position information of the moving component along the second direction and a preset mapping relationship, wherein the preset mapping relationship includes: the mapping relationship between the abutment position information of the plurality of moving components along the second direction and the corresponding identity information when the limiting element abuts against the limiting device.

[0095] In this embodiment of the application, when the limiting element of the moving component abuts against the limiting device, the determining unit 802, in terms of determining the identity information of the moving component based on the abutment position information of the moving component along the first direction and a preset mapping relationship, is specifically used for: When the movement time of the moving component along the second direction exceeds a first preset threshold, the identity information of the moving component is determined according to the contact position information of the moving component along the second direction and a preset mapping relationship. The first preset threshold is the time it takes for the moving component with the shortest length of the limiting element to move along the second direction at a preset speed until it contacts the limiting device; or... Multiple feature information of the moving component along the second direction are acquired multiple times at preset time intervals. Based on the position information determined by the current feature information and the position information determined by the previous feature information, the displacement change information corresponding to the current position information is determined. When the displacement change information corresponding to the current position information is less than a second preset threshold, the position information determined by the current feature information is determined as the contact position information. Based on the contact position information and a preset mapping relationship, the identity information of the moving component is determined. The current feature information is not the first feature information, and the second preset threshold is less than or equal to 1 micrometer.

[0096] See Figure 9 , Figure 9 This is a functional unit block diagram of a vehicle identification device provided in an embodiment of this application. The vehicle identification device 900 includes a second control unit 901 and a construction unit 902.

[0097] In the embodiments of this application, the second control unit 901 and the construction unit 902 can be a circuit unit used to receive and process signals, information, etc., or to determine a monitoring mechanism, and there are no specific limitations on this.

[0098] In this embodiment of the application, the mobile identification device 900 may further include a storage unit for storing computer program code or instructions executed by the mobile identification device 900. The storage unit may be a memory.

[0099] In this embodiment of the application, the child identification device 900 may be a chip or a chip module.

[0100] In this embodiment, the second control unit 901 and the building unit 902 can be integrated into the communication unit. The communication unit can be a communication interface, transceiver, transceiver circuit, etc.

[0101] In this embodiment of the application, the second control unit 901 and the building unit 902 can be integrated into the processing unit.

[0102] It should be noted that the processing unit can be a processor or controller, such as a baseband processor, baseband chip, CPU, general-purpose processor, DSP, ASIC, FPGA, or other programmable logic device, transistor logic device, hardware component, or any combination thereof. It can implement or execute the various exemplary logic blocks, modules, and circuits described in conjunction with the disclosure of this application. The processing unit can also be a combination that implements computational functions, such as including one or more microprocessor combinations, a combination of a DSP and a microprocessor, etc.

[0103] In this embodiment, the mobile identification device 900 is used to perform any of the steps performed by network devices / chips / chip modules, etc., as described in the above method embodiments.

[0104] In specific implementation, the second control unit 901 and the construction unit 902 are used to execute any of the steps in the above method embodiments, and when performing actions such as sending, other units can be selectively invoked to complete the corresponding operation. A detailed explanation follows.

[0105] The second control unit 901 is used to control the moving part to move toward the limiting device in the second direction in the preset posture; The construction unit 902 is used to acquire the contact position information of the moving component along the second direction when the limiting element of the moving component abuts against the limiting device, and to construct a mapping relationship between the contact position information and the identity information of the moving component.

[0106] In this embodiment of the application, in terms of obtaining the abutment position information of the moving part assembly along the second direction when the limiting element of the moving part assembly abuts against the limiting device, the construction unit 902 is specifically used for: When the movement time of the moving component along the second direction exceeds a first preset threshold, the contact position information of the moving component along the second direction is obtained, wherein the first preset threshold is the time it takes for the moving component with the shortest length of the limiting element to move along the second direction at a preset speed until it contacts the limiting device; or... Multiple feature information of the moving component along the second direction are acquired multiple times at preset time intervals. Based on the position information determined by the current feature information and the position information determined by the previous feature information, the displacement change information corresponding to the current position information is determined. When the displacement change information corresponding to the current position information is less than a second preset threshold, the position information determined by the current feature information is determined as the contact position information. The current feature information is not the first feature information, and the second preset threshold is less than or equal to 1 micrometer.

[0107] It should be noted that, Figure 8 and Figure 9 The specific implementation of each operation in the implementation method can be found in the description of the method implementation method shown above, and will not be repeated here.

[0108] See Figure 10 , Figure 10 This is a schematic diagram of the structure of a mobile identification or recognition device provided in an embodiment of this application. The mobile identification or recognition device 1000 may include a processor 1010, a memory 1020, and a communication bus for connecting the processor 1010 and the memory 1020.

[0109] Optionally, the memory 1020 may include, but is not limited to, RAM, ROM, EPROM or CD-ROM, and the memory 1020 is used to store the program code executed by the electronic identification or recognition device 1000 and the data transmitted.

[0110] In this embodiment of the application, the mobile identification or recognition device 1000 further includes a communication interface for receiving and sending data.

[0111] In the embodiments of this application, the processor 1010 may be one or more CPUs. When the processor 1010 is a CPU, the CPU may be a single-core CPU or a multi-core CPU.

[0112] In the embodiments of this application, the processor 1010 may be a baseband chip, a chip, a CPU, a general-purpose processor, a DSP, an ASIC, an FPGA, or other programmable logic devices, transistor logic devices, hardware components, or any combination thereof.

[0113] In specific implementation, the processor 1010 in the mobile identification or recognition device 1000 executes the computer program or instructions 1021 stored in the memory 1020 to perform the following operations: Control the moving part to move toward the limiting device in the second direction in the preset posture; When the limiting element of the moving component abuts against the limiting device, the identity information of the moving component is determined according to the abutment position information of the moving component along the second direction and a preset mapping relationship. The preset mapping relationship includes: the mapping relationship between the abutment position information of the plurality of moving components along the second direction and the corresponding identity information when the limiting element abuts against the limiting device.

[0114] Alternatively, perform the following operations: Control the moving part to move toward the limiting device in the second direction in the preset posture; When the limiting element of the moving component abuts against the limiting device, the abutment position information of the moving component along the second direction is obtained, and a mapping relationship between the abutment position information and the identity information of the moving component is constructed.

[0115] It should be noted that, Figure 10 The specific implementation of each operation in the above-described method implementation can be found in the description of the method implementation, and will not be repeated here.

[0116] This application also provides an electronic device, which includes any of the magnetic levitation motor systems described in the above embodiments. For example, the electronic device can be a semiconductor device, such as a physical vapor deposition device, a chemical vapor deposition device, an epitaxial device, etc. The electronic device includes the aforementioned magnetic levitation motor system and a moving load. The moving load is mounted on the mover assembly of the aforementioned magnetic levitation motor system to drive the load to move under the drive of a control device. The load can be a robotic arm, a motion table, or other structure, and is not limited thereto.

[0117] This application also provides a computer storage medium storing a computer program for electronic data exchange, which causes a computer to perform some or all of the steps of any method performed by the control device of the magnetic levitation motor system described in the above embodiments.

[0118] This application also provides a computer program product, which includes a non-transitory computer-readable storage medium storing a computer program operable to cause a computer to perform some or all of the steps of any of the methods described in the above method embodiments. This computer program product can be a software installation package.

[0119] It should be noted that, for the sake of simplicity, the various embodiments described above are all presented as a series of actions. Those skilled in the art should understand that this application is not limited to the described order of actions, as some steps in the embodiments of this application may be performed in other orders or simultaneously.

[0120] In the above embodiments, the descriptions of each embodiment in this application have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0121] The steps of the methods or algorithms described in this application can be implemented in hardware or by a processor executing software instructions. The software instructions can consist of corresponding software modules, which can be stored in RAM, flash memory, ROM, EPROM, electrically erasable programmable read-only memory (EEPROM), registers, hard disk, portable hard disk, read-only optical disk (CD-ROM), or any other form of storage medium known in the art. An exemplary storage medium is coupled to a processor, enabling the processor to read information from and write information to the storage medium. Of course, the storage medium can also be a component of the processor. The processor and storage medium can reside in an ASIC. Furthermore, the ASIC can reside in a terminal device or management device. Alternatively, the processor and storage medium can exist as discrete components in the terminal device or management device.

[0122] Those skilled in the art will recognize that, in one or more of the examples above, the functions described in the embodiments of this application can be implemented, in whole or in part, by software, hardware, firmware, or any combination thereof. When implemented in software, it can be implemented, in whole or in part, as a computer program product. This computer program product includes one or more computer instructions. When these computer program instructions are loaded and executed on a computer, all or part of the processes or functions described in the embodiments of this application are generated. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another. For example, the computer instructions can be transmitted from one website, computer, server, or data center to another via wired (e.g., coaxial cable, fiber optic, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) means. The computer-readable storage medium can be any available medium accessible to a computer or a data storage device such as a server or data center that integrates one or more available media. The available media can be magnetic media (e.g., floppy disks, hard disks, magnetic tapes), optical media (e.g., digital video discs (DVDs)), or semiconductor media (e.g., solid-state disks (SSDs)).

[0123] The modules / units included in the various devices and products described in the above embodiments can be software modules / units, hardware modules / units, or a combination of both. For example, for devices and products applied to or integrated into a chip, all modules / units can be implemented using hardware methods such as circuits, or at least some modules / units can be implemented using software programs that run on a processor integrated within the chip, while the remaining (if any) modules / units can be implemented using hardware methods such as circuits. For devices and products applied to or integrated into a chip module, all modules / units can be implemented using hardware methods such as circuits. Different modules / units can be located in the same component (e.g., chip, circuit module, etc.) or different components of the chip module, or at least some modules / units can be implemented using hardware methods such as circuits. The implementation is achieved through a software program that runs on the processor integrated within the chip module. The remaining modules / units (if any) can be implemented using hardware methods such as circuits. For various devices and products applied to or integrated into terminal equipment, each of their modules / units can be implemented using hardware methods such as circuits. Different modules / units can be located in the same component (e.g., chip, circuit module, etc.) or different components within the terminal equipment. Alternatively, at least some modules / units can be implemented through a software program that runs on the processor integrated within the terminal equipment, while the remaining modules / units (if any) can be implemented using hardware methods such as circuits.

[0124] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the embodiments of this application. It should be understood that the above description is only a specific embodiment of the embodiments of this application and is not intended to limit the protection scope of the embodiments of this application. Any modifications, equivalent substitutions, improvements, etc., made on the basis of the technical solution of the embodiments of this application should be included within the protection scope of the embodiments of this application.

Claims

1. A magnetic levitation motor system, characterized in that, include: Maglev stator track; Multiple moving parts are provided, each of which includes a magnetic float and a limiting element. The limiting element has a first end and a second end opposite to each other. The direction in which the first end and the second end are connected is a first direction. The first end is fixed to the magnetic float, and the second end is the end away from the magnetic float. The length of the limiting element along the first direction is different for different moving parts. A limiting device is disposed opposite to the moving part assembly along a second direction. The limiting device is used to limit the maximum displacement of the moving part assembly along the second direction. The moving part assembly has a preset posture. When the moving part assembly is in the preset posture, the limiting element is located between the magnetic float and the limiting device. The first direction is the same as the second direction. A detection device is used to detect feature information related to the position information of each of the moving parts along the second direction; as well as, A control device is connected to the magnetic levitation stator track or the magnetic float. The control device is used to control each of the moving parts to move along the second direction to abut against the limiting device. The control device is connected to the detection device to obtain the contact position information of each moving part when it abuts against the limiting device based on the feature information, and to determine the identity information of each moving part based on the contact position information of each moving part.

2. The magnetic levitation motor system according to claim 1, characterized in that, The difference in length of the limiting element of any two of the moving parts along the first direction is greater than a preset length, wherein the preset length is greater than or equal to 0.5 micrometers.

3. The magnetic levitation motor system according to claim 1 or 2, characterized in that, The magnetic float and the limiting element satisfy one of the following relationships: The magnetic float is detachably connected to the limiting element; The limiting element is foldable relative to the magnetic float; The length of the limiting element along the first direction is adjustable.

4. The magnetic levitation motor system according to any one of claims 1-3, characterized in that, The second direction is the vertical direction, and the magnetic levitation stator track, the magnetic float and the limiting device are arranged sequentially along the second direction.

5. The magnetic levitation motor system according to claim 4, characterized in that, The limiting device is made of soft magnetic material.

6. The magnetic levitation motor system according to any one of claims 1-5, characterized in that, The control device is specifically used for: Based on the contact position information of each of the moving components and the preset mapping relationship, the identity information of each moving component is determined. The preset mapping relationship includes the mapping relationship between the contact position information of the multiple moving components along the second direction and the corresponding identity information when the limiting element and the limiting device contact.

7. The magnetic levitation motor system according to claim 6, characterized in that, The control device is specifically used to obtain the contact position information of each moving component when it abuts against the limiting device based on the feature information using the following method: When the movement time of each of the moving components along the second direction exceeds a first preset threshold, the abutment position information is determined based on the characteristic information of each of the moving components, wherein the first preset threshold is the time it takes for the moving component with the shortest length of the limiting element to move along the second direction at a preset speed to abut against the limiting device; or... Multiple feature information of the moving component along the second direction are acquired multiple times at preset time intervals. Based on the position information determined by the current feature information and the position information determined by the previous feature information, the displacement change information corresponding to the current position information is determined. When the displacement change information corresponding to the current position information is less than a second preset threshold, the position information determined by the current feature information is determined as the contact position information. The current feature information is not the first feature information, and the second preset threshold is less than or equal to 1 micrometer.

8. The magnetic levitation motor system according to claim 6 or 7, characterized in that, The preset mapping relationship is obtained through the following method: Control the moving part to move toward the limiting device in the second direction in the preset posture; and, When the limiting element of the moving component abuts against the limiting device, the abutment position information of the moving component along the second direction is obtained, and the preset mapping relationship between the abutment position information and the identity information of the moving component is constructed.

9. An electronic device, characterized in that, The electronic device includes the magnetic levitation motor system according to any one of claims 1-8.

10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer-readable instructions, which, when executed on a computer, cause the computer to perform the functions performed by the control device of the magnetic levitation motor system in claims 1-8.

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