Actuator and fluid control device

Abstract

The actuator includes: a first plate with a drive body, a central portion, a frame, and a connecting member. The central portion is capable of vibrating in a direction orthogonal to the plate surface by the drive body. The frame, when viewed from above, is positioned outside the central portion. The connecting member is positioned between the central portion and the frame, connecting the central portion to allow it to vibrate relative to the frame. An annular support body is positioned opposite the frame of the first plate and supports the first plate. An auxiliary member is positioned between the first plate and the support body. The frame has a first inner circumferential surface facing the outer peripheral end of the central portion. The auxiliary member has a second inner circumferential surface on the central side. The connecting member has a frame side beam portion connected to the frame and extending protruding from the first inner circumferential surface towards the central portion. When viewed from above, the second inner circumferential surface is positioned closer to the central portion than the first inner circumferential surface. The frame, auxiliary member, and support body overlap when viewed from above. The frame and auxiliary member are in contact with each other, and the auxiliary member and support body are in contact with each other. In a first region of a predetermined length extending from the end connected to the frame in the side beam of the frame, the side beam contacts the auxiliary component. In a second region of the side beam of the frame, which is closer to the center than the first region, the side beam does not contact the auxiliary component.

Description

Technical Field

[0001] The present invention relates to an actuator that generates vibration and a fluid control device having the actuator. Background Technology

[0002] Patent Document 1 describes a pump. The pump in Patent Document 1 uses a flexible component (connecting component) to support a vibrating plate against a component (sidewall component) that forms the sidewall of the housing. The connecting component has a constant thickness.

[0003] Patent Document 1: International Publication No. 2020 / 111064

[0004] However, in the configuration described in Patent Document 1, the cross-sectional area of ​​the connecting member and the sidewall member changes drastically. As a result, damage and vibration loss occur at the connection point between the connecting member and the sidewall member. Summary of the Invention

[0005] Therefore, the object of the present invention is to provide an actuator that suppresses breakage and vibration loss.

[0006] An actuator according to one embodiment of the present invention includes: a first plate having a drive body, a central portion, a frame, and a connecting member, the central portion being capable of vibrating in a direction orthogonal to the plate surface by the drive body; the frame, when viewed from above, being disposed outside the central portion; the connecting member being disposed between the central portion and the frame, connecting the central portion to be capable of vibrating relative to the frame; an annular support body disposed opposite to the frame of the first plate, supporting the first plate; and an auxiliary member disposed between the first plate and the support body. The frame has a first inner peripheral surface facing the outer peripheral end face of the central portion. The auxiliary member has a second inner peripheral surface on the central side. The connecting member has a frame side beam portion connected to the frame, extending from the first inner peripheral surface towards the central portion.

[0007] Viewed from above, the second inner circumferential surface is located closer to the center than the first inner circumferential surface. The frame, auxiliary components, and support body overlap when viewed from above. The frame and auxiliary components are in contact with each other, and the auxiliary components and support body are in contact with each other. In a first region of a predetermined length from the end connected to the frame on the side beam of the frame, the side beam of the frame is in contact with the auxiliary components. In a second region of the side beam of the frame, closer to the center than the first region, the side beam of the frame is not in contact with the auxiliary components.

[0008] Furthermore, one embodiment of the actuator according to the present invention includes: a first plate having a drive body, a central portion, a frame, and a connecting member, the central portion being capable of vibrating in a direction orthogonal to the plate surface by the drive body, the frame being disposed outside the central portion when viewed from above, and the connecting member being disposed between the central portion and the frame, connecting the central portion to be capable of vibrating relative to the frame; an annular support body disposed opposite to the frame of the first plate, supporting the first plate; and an auxiliary member disposed between the first plate and the support body. The actuator includes a first component, the first plate of which and the auxiliary member are constituted by a single component. The frame has a first inner peripheral surface facing the outer peripheral end face of the central portion. The auxiliary member has a second inner peripheral surface on the central side. The connecting member has a frame side beam portion connected to the frame and extending from the first inner peripheral surface towards the central portion.

[0009] When viewed from above, the second inner circumferential surface is located closer to the center than the first inner circumferential surface. The frame, auxiliary components, and support have overlapping portions when viewed from above. In a first region of a predetermined length from the end connected to the frame in the side beam of the frame, the side beam of the frame overlaps with the auxiliary component when viewed from above. In a second region of the side beam of the frame that is closer to the center than the first region, the side beam of the frame does not overlap with the auxiliary component when viewed from above.

[0010] Furthermore, one embodiment of the actuator according to the present invention includes: a first plate having a drive body, a central portion, a frame, and a connecting member, the central portion being capable of vibrating in a direction orthogonal to the plate surface by the drive body, the frame being disposed outside the central portion when viewed from above, and the connecting member being disposed between the central portion and the frame, connecting the central portion to be capable of vibrating relative to the frame; an annular support body positioned opposite the frame of the first plate, supporting the first plate; and an auxiliary member disposed between the first plate and the support body. The actuator includes a second component, the auxiliary member of which is formed by a single component from the support body. The frame has a first inner peripheral surface facing the outer peripheral end face of the central portion. The auxiliary member has a second inner peripheral surface on the central side. The connecting member has a frame side beam portion connected to the frame and extending from the first inner peripheral surface towards the central portion.

[0011] When viewed from above, the second inner circumferential surface is located closer to the center than the first inner circumferential surface. The frame and the auxiliary component have overlapping portions when viewed from above. In a first region of a predetermined length from the end connected to the frame side beam, the frame side beam contacts the auxiliary component. In a second region of the frame side beam, which is closer to the center than the first region, the frame side beam does not contact the auxiliary component.

[0012] In any of these configurations, in the direction in which the central portion, connecting member, and frame are sequentially connected, there is a first portion consisting only of the thickness of the connecting member, a second portion comprising at least the thickness of the connecting member and auxiliary member, and a third portion comprising the thickness of the frame, auxiliary member, and support. The first, second, and third portions increase in thickness sequentially. This prevents significant thickness variations at the connection between the connecting member and the frame, suppresses stress concentration at the connection point as is common in conventional configurations, and reduces vibration losses caused by stress concentration.

[0013] According to the present invention, damage and vibration loss can be suppressed. Attached Figure Description

[0014] Figure 1 This is a side sectional view showing an example of the configuration of a fluid control device according to an embodiment of the present invention.

[0015] Figure 2 This is an exploded perspective view showing an example of the configuration of a fluid control device according to an embodiment of the present invention.

[0016] Figure 3 This is a top view showing only the first plate and auxiliary components in the fluid control device according to an embodiment of the present invention.

[0017] Figure 4 (A) is a top view that magnifies the overlapping position of the connecting component and the auxiliary component. Figure 4 (B) is its three-dimensional diagram.

[0018] Figure 5 (A) is a cross-sectional view of the portion corresponding to the second region in the connecting component of the first plate (and...). Figure 4 (CSA corresponding sectional view of section (A)). Figure 5 (B) is a cross-sectional view of the portion corresponding to the first region in the connecting component of the first plate (and...). Figure 4 (The sectional view corresponding to section CSB in section (A)). Figure 5 (C) is a sectional view of the portion corresponding to the frame of the first plate (and) Figure 4 (A) is the section view corresponding to section CSC.

[0019] Figure 6 This is a graph illustrating an example of the relationship between the protrusion amount LB of the auxiliary component and the maximum stress applied to the frame.

[0020] Figure 7 This is a graph illustrating an example of the relationship between the protrusion amount LB of the auxiliary component and the drive time until a failure occurs.

[0021] Figure 8This is a graph illustrating an example of the relationship between the protrusion amount LB of the auxiliary component and the vibration displacement at the center Po of the central part.

[0022] Figure 9 This is a top view that magnifies the overlapping position of the connecting parts and auxiliary parts in the fluid control device of Derivative Example 1.

[0023] Figure 10 This is a top view that enlarges the overlapping position of the connecting parts and auxiliary parts in the fluid control device of Derivative Example 2.

[0024] Figure 11 This is a side sectional view of the fluid control device in Derivative Example 3.

[0025] Figure 12 This is a side sectional view of the fluid control device in Derivative Example 4.

[0026] Figure 13 This is a side sectional view of the fluid control device in Derivative Example 5.

[0027] Figure 14 This is a side sectional view of the fluid control device in Derivative Example 6.

[0028] Figure 15 This is a side sectional view of the fluid control device in Derivative Example 7.

[0029] Figure 16 This is a side sectional view of the fluid control device in Derivative Example 8.

[0030] Figure 17 This is an exploded perspective view of the fluid control device in Derivative Example 8. Detailed Implementation

[0031] The actuator and fluid control device according to embodiments of the present invention will be described with reference to the figures. Furthermore, the contact between the two components in this embodiment includes both direct contact and contact where the two components are sandwiched together by an adhesive material for fixing them together.

[0032] Figure 1 This is a side sectional view showing an example of the configuration of a fluid control device according to an embodiment of the present invention. Figure 1 Instead of a sectional view created by cutting with a straight plane, the section was appropriately adjusted to facilitate understanding of the fluid control device's structure. Furthermore, incorporating... Figure 1 In each of the drawings, the dimensional relationships are appropriately adjusted to facilitate understanding of the composition. Figure 2 This is an exploded perspective view showing an example of the configuration of a fluid control device according to an embodiment of the present invention. Figure 3This is a top view showing only the first plate and auxiliary components in the fluid control device according to an embodiment of the present invention.

[0033] like Figure 1 , Figure 2 As shown, the fluid control device 10 includes a first plate 30, a drive body 40, a second plate 51, a support body 52, and an auxiliary component 60. Moreover, the actuator 20 is formed by the first plate 30, the drive body 40, the support body 52, and the auxiliary component 60.

[0034] The first plate 30 is made of a conductor. The first plate 30 has a central part 31, a frame 32, and a plurality of connecting parts 33.

[0035] The central portion 31 is a flat plate with a circular shape when viewed from above (its shape when viewed in the thickness direction). The central portion 31 has a circular outer peripheral surface 311 when viewed from above.

[0036] The frame 32 is a flat plate, positioned outside the outer periphery 311 of the central portion 31 when viewed from above. The frame 32 is an annular body with a circular opening in the center. The frame 32 has an inner periphery 321. The inner periphery 321 corresponds to the "first inner periphery surface" of this invention.

[0037] The central portion 31 is disposed within the opening of the frame 32. The center of the central portion 31 coincides with the center of the frame 32 when viewed from above. Furthermore, this coincidence includes a range of manufacturing tolerances, and for the performance of the fluid control device 10 and the actuator 20, it includes a range of permissible tolerances. Hereinafter, "coincidence" has the same meaning. The diameter of the opening of the frame 32 is larger than the diameter of the central portion 31, and the inner peripheral surface 321 of the frame 32 is disposed at a distance from the outer peripheral surface 311 of the central portion 31.

[0038] Multiple connecting components 33 are beams of uniform thickness. These connecting components 33 are positioned between the central portion 31 and the frame 32. The multiple connecting components 33 are connected to the outer peripheral surface 311 of the central portion 31 and the inner peripheral surface 321 of the frame 32. The multiple connecting components 33 are arranged at predetermined intervals along the circumferential direction of the outer peripheral surface 311 of the first plate 30.

[0039] like Figure 3 As shown, the multiple connecting parts 33 each have a first beam portion 331, a second beam portion 332, and a third beam portion 333.

[0040] The first beam 331 is a strip that extends radially from the center Po of the central part 31 when viewed from above.

[0041] The second beam 332 is a strip that extends along the outer periphery 311 of the central part 31 when viewed from above.

[0042] The third beam 333 is a strip-shaped section extending radially from the center Po of the central section 31 when viewed from above. The third beam 333 corresponds to the "frame side beam" of the present invention.

[0043] The end of the first beam portion 331 on the center Po side in the extension direction is connected to the outer peripheral surface 311 of the central portion 31. The end of the first beam portion 331 on the outer side (opposite to the center Po side) in the extension direction is connected to the center in the extension direction of the second beam portion 332.

[0044] The two ends of the extension direction of the second beam 332 are respectively connected to the third beam 333.

[0045] The end of the third beam 333 extending in the direction of its center Po is connected to the second beam 332. The outer end of the third beam 333 extending in the direction of its center Po is connected to the inner circumferential surface 321 of the frame 32.

[0046] The first plate 30, as described above, has a plurality of openings 34. The plurality of openings 34 penetrate the first plate 30 in the thickness direction. The plurality of openings 34 are disposed between the central portion 31 and the frame 32. The plurality of openings 34 are located in the area between the central portion 31 and the frame 32, where the central portion 31, the frame 32, and the plurality of connecting members 33 are not disposed, and are the portion enclosed by the central portion 31, the frame 32, and the plurality of connecting members 33. The openings 34 correspond to the "first opening" of the present invention.

[0047] The driving body 40 has a circular piezoelectric element and driving electrodes. The driving electrodes are formed on the two main surfaces of the piezoelectric element.

[0048] The second plate 51 is a flat plate having a circular opening 510 in its center when viewed from above. The opening 510 corresponds to the "second opening" of the present invention.

[0049] The support 52 is a flat plate having a circular opening 520 in its center when viewed from above. The planar shape of the inner peripheral surface 521 of the support 52 formed by the opening 520 is the same as the planar shape of the inner peripheral surface 321 of the frame 32. The inner peripheral surface 321 of the frame 32 corresponds to the "first inner peripheral surface" of the present invention, and the inner peripheral surface of the support 52 corresponds to the "third inner peripheral surface".

[0050] The auxiliary component 60 is a flat plate having a circular opening 600 in its center when viewed from above. The auxiliary component 60 is, for example, made of the same material as the first plate 30. The planar shape (circular) of the inner peripheral surface 61 of the auxiliary component 60 formed by the opening 600 is similar to the planar shape (circular) of the inner peripheral surface 521 of the support 52 and the inner peripheral surface 321 of the frame 32. The diameter of the circle formed by the inner peripheral surface 61 of the auxiliary component 60 is smaller than the diameter of the circle formed by the inner peripheral surface 521 of the support 52 and the inner peripheral surface 321 of the frame 32. The inner peripheral surface 61 of the auxiliary component 60 corresponds to the "second inner peripheral surface" of the present invention.

[0051] like Figure 1 , Figure 2 As shown, the drive body 40 is disposed on a main surface of the central portion 31 in the first plate 30. At this time, the center of the drive body 40 coincides with the center of the central portion 31.

[0052] The auxiliary component 60, the support body 52, and the second plate 51 are sequentially arranged on another main surface side of the first plate 30. At this time, the center of the circle formed by the inner peripheral surface 61 of the auxiliary component 60, the center of the circle formed by the inner peripheral surface 521 of the support body 52, and the center of the circle formed by the inner peripheral surface 321 of the frame 32 overlap when viewed from above (when viewed in the stacking direction of the auxiliary component 60, the support body 52, and the second plate 51 arranged sequentially).

[0053] With this configuration, the frame 32 of the first plate 30 is supported by the support 52 via the auxiliary member 60. Therefore, if a drive signal is supplied to the drive body 40 via a drive signal application mechanism (not shown), the drive body 40 deforms. The central portion 31 of the first plate 30 is composed of multiple strips and is connected to the frame 32 via easily deformable connecting members 33. The frame 32 is supported by the fixed support 52 via the auxiliary member 60. Therefore, the central portion 31 generates bending vibration in a direction orthogonal to the plate surface. Thus, it functions as an actuator 20.

[0054] Furthermore, a space is formed enclosed by the first plate 30, the second plate 51, the support body 52, and the auxiliary component 60. This space communicates with the outside through an opening 510 in the second plate 51, which is positioned to overlap with the center Po of the first plate 30 when viewed from above. Additionally, this space communicates with the outside through multiple openings 34 formed between the outer peripheral surface 311 of the central portion 31 in the first plate 30 and the inner peripheral surface 321 of the frame 32. Here, as described above, if the central portion 31 experiences bending vibration, gas is drawn in through the opening 510, for example, and discharged through the multiple openings 34. Thus, the function of the fluid control device 10 is achieved.

[0055] Moreover, such as Figure 1 , Figure 3 As shown, in this top view, the inner peripheral surface 521 of the support 52 overlaps with the inner peripheral surface 321 of the frame 32. Furthermore, the inner peripheral surface 61 of the auxiliary member 60 is located closer to the center Po side of the central portion 31 than the inner peripheral surfaces 521 of the support 52 and 321 of the frame 32. In other words, in a top view, the inner peripheral surface 61 of the auxiliary member 60 protrudes further towards the center Po than the inner peripheral surfaces 521 of the support 52 and 321 of the frame 32. In other words, in a top view, the inner peripheral surfaces 521 of the support 52 and 321 of the frame 32 extend outwards from the inner peripheral surface 61 of the auxiliary member 60, overlapping with the auxiliary member 60.

[0056] Moreover, with this configuration, when viewed from above, the auxiliary component 60 overlaps with a portion of the third beam 333 among the multiple connecting components 33.

[0057] Figure 4 (A) is a top view that magnifies the overlapping position of the connecting component and the auxiliary component. Figure 4 (B) is its three-dimensional diagram.

[0058] like Figure 4 (A) Figure 4 As shown in (B), in top view, the auxiliary member 60 protrudes further towards the center Po (inner side) than the inner peripheral surface 321 of the frame 32, thereby overlapping a portion of the auxiliary member 60 with the connecting member 33. Specifically, the auxiliary member 60 overlaps with a portion of the third beam portion 333 in the connecting member 33. More specifically, the protruding length LP60 of the auxiliary member 60 towards the center Po is shorter than the length of the third beam portion 333 (= the distance W34 between the inner peripheral surface 321 of the frame 32 and the second beam portion 332 in top view). As a result, the auxiliary member 60 overlaps with a first region 333o of the third beam portion 333, which is a predetermined length (=LP60) on the side connected to the inner peripheral surface 321 of the frame 32. On the other hand, the auxiliary member 60 does not overlap with a second region 333i of the third beam portion 333, which is closer to the second beam portion 332 than the first region 333o.

[0059] With this configuration, the connecting component 33 in the second region 333i of the third beam 333 does not contact the auxiliary component 60, nor does it contact the support body 52.

[0060] The connecting component 33 overlaps with and contacts the auxiliary component 60 in the first region 333o of the third beam 333, but does not overlap with or contact the support 52.

[0061] The frame 32 overlaps with and contacts the auxiliary component 60. The stacked body of the frame 32 and the auxiliary component 60 overlaps with and contacts the support 52.

[0062] Therefore, as Figure 5 (A) Figure 5 (B) Figure 5 As shown in (C), the thickness of the portion from the third beam 333 of the connecting member 33 to the frame 32 varies in three stages. Figure 5 (A) is a cross-sectional view of the portion corresponding to the second region in the connecting component of the first plate (and...). Figure 4 (CSA corresponding sectional view of section (A)). Figure 5 (B) is a cross-sectional view of the portion corresponding to the first region in the connecting component of the first plate (and...). Figure 4 (The sectional view corresponding to section CSB in section (A)). Figure 5 (C) is a sectional view of the portion corresponding to the frame of the first plate (and) Figure 4 (A) is the section view corresponding to section CSC.

[0063] like Figure 5 As shown in (A), the thickness DA of the first portion corresponding to the second region 333i of the third beam portion 333 in the connecting member 33 is only the thickness of the connecting member 33. Figure 5 As shown in (B), the thickness DB of the second part corresponding to the first region 333o of the third beam portion 333 in the connecting member 33 is the thickness obtained by adding the thickness of the connecting member 33 to the thickness of the auxiliary member 60. Figure 5 As shown in (C), the thickness DC of the third part corresponding to the frame 32 is the thickness obtained by adding the thickness of the frame 32 (= the thickness of the connecting part 33), the thickness of the auxiliary part 60, and the support body.

[0064] Therefore, the relationship that the thickness DA of the first part < the thickness DB of the second part < the thickness DC of the third part holds true. That is, in the first plate 30, in the direction from the central part 31 to the frame 32, the thickness gradually increases in three stages from the third beam 333 of the connecting member 33 to the frame 32. That is, compared with the conventional configuration, the number of thickness changes increases.

[0065] In the fluid control device 10 and actuator 20 configured as described above, the stress of vibration generated by the central part 31 is applied to the frame 32, which serves as the fixed part.

[0066] However, by incorporating the aforementioned fluid control device 10 and actuator 20, the stress directly applied to the frame 32 is reduced. This is because the stress is applied more heavily at locations where the thickness changes. Therefore, as described above, the fluid control device 10 and actuator 20 also have locations where the thickness changes before reaching the frame 32. Thus, the fluid control device 10 and actuator 20 can prevent large thickness changes at the connection between the connecting member 33 and the frame 32, and can distribute the stress applied to the frame 32 to other points of thickness change. Therefore, the stress applied to the frame 32 is suppressed.

[0067] Therefore, the fluid control device 10 and the actuator 20 can suppress the peeling of the frame 32, the auxiliary component 60 and the support 52, and can suppress breakage. Furthermore, the fluid control device 10 and the actuator 20 can suppress stress concentration at the fixed end of the frame 32, i.e., the central part 31, and suppress stress loss, thereby suppressing vibration loss of the central part 31.

[0068] Furthermore, based on the shape of the central part 31 and the connecting part 33, and the magnitude of the vibration of the central part 31, the protruding length LP60 of the auxiliary part 60 has a more appropriate value.

[0069] Figure 6 This is a graph illustrating an example of the relationship between the protrusion amount LB of the auxiliary component and the maximum stress applied to the frame. Figure 6 In the example, up to a protrusion length LP60 of approximately 0.10 mm, the larger the protrusion length LP60, the lower the maximum stress. Moreover, if the protrusion length LP60 is greater than approximately 0.10 mm, the maximum stress hardly changes and remains low. Therefore, in this case, it is preferable to make the protrusion amount 0.10 mm or greater.

[0070] Figure 7 This is a graph illustrating an example of the relationship between the protrusion amount LB of the auxiliary component and the drive time until a failure occurs. Figure 7 In the example, up to a protrusion length LP60 of approximately 0.10 mm, the larger the protrusion length LP60, the longer the drive time until a failure occurs. Furthermore, if the protrusion length LP60 is approximately 0.10 mm or more, the drive time until a failure occurs remains almost unchanged and is stable. Therefore, in this case, it is preferable to make the protrusion amount 0.10 mm or more.

[0071] Figure 8 This is a graph illustrating an example of the relationship between the protrusion amount LB of the auxiliary component and the vibration displacement at the center Po of the central part. (Example) Figure 8 As the example shows, the greater the protrusion length LP60, the greater the vibration displacement.

[0072] In this way, by setting the protrusion amount above a predetermined threshold, the fluid control device 10 and the actuator 20 can suppress stress and extend the driving time until a failure occurs without unnecessarily attenuating the vibration displacement.

[0073] Furthermore, the configuration shown in the above description is an example, and derived configurations as described below can also be adopted.

[0074] Figure 9 This is a top view that magnifies the overlapping position of the connecting parts and auxiliary parts in the fluid control device of Derivative Example 1. (See attached image.) Figure 9 As shown, the fluid control device 10A of Derivative Example 1 differs from the fluid control device 10 in that it includes the auxiliary component 60A. The other components of the fluid control device 10A are the same as those of the fluid control device 10.

[0075] The portion of the auxiliary component 60A that protrudes from the inner circumferential surface 321 of the frame 32 does not cover the entire circumference, but only partially protrudes, including the portion that overlaps with the third beam portion 333 of the connecting component 33.

[0076] Therefore, the fluid control device 10A can achieve the same effect as the fluid control device 10. Furthermore, the fluid control device 10A can reduce the portion of the opening 34 blocked by the auxiliary component 60A. Moreover, by having the auxiliary component 60, which protrudes throughout the circumference like the auxiliary component 60 of the fluid control device 10, the stress suppression effect can be further improved.

[0077] Figure 10 This is a top view that magnifies the overlapping position of the connecting parts and auxiliary parts in the fluid control device of Derivative Example 2. (See attached image.) Figure 10 As shown, the fluid control device 10B of Derivative Example 2 differs from the fluid control device 10 in that it includes the auxiliary component 60B. The other components of the fluid control device 10B are the same as those of the fluid control device 10.

[0078] In the auxiliary component 60B, the protrusion at the part that overlaps with the third beam portion 333 of the connecting component 33 is greater than the protrusion at the part that does not overlap with the third beam portion 333.

[0079] Therefore, the fluid control device 10B can achieve the same effect as the fluid control device 10.

[0080] Figure 11 This is a side sectional view of the fluid control device in Derivative Example 3. (See example...) Figure 11 As shown, the fluid control device 10C of Derivative Example 3 differs from the fluid control device 10 in that it includes a support body 52C. The other components of the fluid control device 10C are the same as those of the fluid control device 10.

[0081] The circle formed by the inner circumferential surface 521 of the support 52C is larger than the circle formed by the inner circumferential surface 321 of the frame 32.

[0082] Therefore, the fluid control device 10C can achieve the same effect as the fluid control device 10.

[0083] Figure 12 This is a side sectional view of the fluid control device in Derivative Example 4. (See example...) Figure 12 As shown, the fluid control device 10D of Derivative Example 4 differs from the fluid control device 10 in that it includes a support body 52D. The other components of the fluid control device 10D are the same as those of the fluid control device 10.

[0084] The circle formed by the inner circumferential surface 521 of the support body 52D is smaller than the circle formed by the inner circumferential surface 321 of the frame 32. At this time, the circle formed by the inner circumferential surface 521 of the support body 52D is larger than the circle formed by the inner circumferential surface 61 of the auxiliary component 60.

[0085] Therefore, the fluid control device 10D can achieve the same effect as the fluid control device 10.

[0086] Figure 13 This is a side sectional view of the fluid control device in Derivative Example 5. (See example...) Figure 13 As shown, the fluid control device 10E of Derivative Example 5 differs from the fluid control device 10 in its use of the first component 71. The other components of the fluid control device 10E are the same as those of the fluid control device 10.

[0087] The fluid control device 10E includes a first component 71. The first plate 30 of the first component 71 and the auxiliary component 60 are composed of a single component.

[0088] Therefore, the fluid control device 10E can achieve the same effect as the fluid control device 10. Furthermore, in the fluid control device 10E, there is no need to bond the first plate 30 to the auxiliary component 60. Therefore, the fluid control device 10E can reduce the number of bonding areas and suppress thickness errors.

[0089] Figure 14 This is a side sectional view of the fluid control device in Derivative Example 6. (See example...) Figure 14 As shown, the fluid control device 10F of Derivative Example 6 differs from the fluid control device 10 in its use of the second component 72. The other components of the fluid control device 10F are the same as those of the fluid control device 10.

[0090] The fluid control device 10F includes a second component 72. The auxiliary component 60 of the second component 72 and the support body 52 are composed of a single component.

[0091] Therefore, the fluid control device 10F can achieve the same effect as the fluid control device 10. Furthermore, in the fluid control device 10F, there is no need to bond the first plate 30 to the auxiliary component 60. Therefore, the fluid control device 10F can reduce the number of bonded areas and suppress thickness errors.

[0092] Figure 15 This is a side sectional view of the fluid control device in Derivative Example 7. (See example...) Figure 15 As shown, the fluid control device 10G of derivative example 7 differs from the fluid control device 10 in the configuration of the support 52G and the use of the third component 73G.

[0093] The fluid control device 10G includes a third component 73G. The support 52G of the third component 73G and the second plate 51 are composed of a single component.

[0094] When viewed from above, the inner circumferential surface 521 of the support 52G is located closer to the center of the fluid control device 10G than the inner circumferential surface 61 of the auxiliary component 60. In other words, the entire surface of the support 52G side of the auxiliary component 60 is connected to the support 52G.

[0095] Therefore, the fluid control device 10G can achieve the same effect as the fluid control device 10. Furthermore, in the fluid control device 10G, the support 52G and the second plate 51 are formed by a single component, thus eliminating the need for bonding between the support 52G and the second plate 51. Therefore, the fluid control device 10G can reduce the number of bonded areas and suppress thickness errors.

[0096] Figure 16 This is a side sectional view of the fluid control device in Derivative Example 8. Figure 17 This is an exploded perspective view of the fluid control device in Derivative Example 8. (See diagram below.) Figure 16 , Figure 17 As shown, the fluid control device 10H in Derivative Example 8 differs from the fluid control device 10 in the configuration of the support 52H and the use of the third component 73H. Furthermore, in Figure 17 In the middle, it indicates that the thickness of the central region of the central part 31 in the first plate 30 is greater than the thickness of the outer edge region.

[0097] The fluid control device 10H includes a third component 73H. The support 52H of the third component 73H and the second plate 51 are composed of a single component.

[0098] When viewed from above, the inner circumferential surface 521 of the support 52H is located closer to the center of the fluid control device 10H than the inner circumferential surface 61 of the auxiliary component 60.

[0099] Therefore, the fluid control device 10G can achieve the same effect as the fluid control device 10.

[0100] Additionally, an annular groove 590 is formed in the support body 52H. The groove 590 is a recessed shape from the side of the auxiliary component 60 in the support body 52H (the side opposite to the side of the second plate 51). The diameter of the groove 590 is larger than the diameter of the circle when viewed from above the inner circumferential surface 521.

[0101] Furthermore, when viewed from above, if the groove 590 overlaps with the inner circumferential surface 61 of the auxiliary component 60, for example, when fixed by the support 52H, the auxiliary component 60, and the adhesive material, excess adhesive material is contained in the groove 590, which can suppress overflow toward the opening 600 side (pump chamber side).

[0102] The fluid control devices and actuators shown in the above examples can also be appropriately configured as follows.

[0103] • The thickness of the central part 31 may also be different from that of the connecting part 33.

[0104] • It can also be that the thickness of the central region of the central part 31 is thicker than that of its outer edge region.

[0105] • A valve diaphragm may also be provided on the side of the second plate 51 in the central part 31.

[0106] The above-described embodiments and their derivative configurations can be appropriately combined to achieve the corresponding effects of each combination.

[0107] Explanation of reference numerals in the attached figures

[0108] 10, 10A, 10B, 10C, 10D, 10E, 10F... Fluid control device; 20... Actuator; 30... First plate; 31... Central part; 32... Frame; 33... Connecting component; 34... Opening; 40... Drive body; 51... Second plate; 52, 52C, 52D... Support body; 60, 60A, 60B... Auxiliary component; 61... Inner circumferential surface; 71... First component; 72... Second component; 311... Outer circumferential end; 321... Inner circumferential surface; 331... First beam part; 332... Second beam part; 333... Third beam part; 333i... Second region; 333o... First region; 510, 520... Opening; 521... Inner circumferential end; 600... Opening.

Claims

1. An actuator, wherein, have: The first plate is equipped with a drive body, and has a central part, a frame, and a connecting member. The central part can vibrate in a direction orthogonal to the plate surface by the drive body. When viewed from above, the frame is arranged outside the central part. The connecting member is arranged between the central part and the frame, connecting the central part so that it can vibrate relative to the frame. An annular support body is disposed opposite to the frame of the first plate, supporting the first plate; and An auxiliary component is disposed between the first plate and the support body. The aforementioned frame has a first inner peripheral surface facing the outer peripheral end face of the aforementioned central portion. The aforementioned auxiliary component has the aforementioned second inner peripheral surface on the central side. The aforementioned connecting component includes a frame side beam portion, which is connected to the frame and extends from the first inner periphery towards the central portion. In the aforementioned top view, the second inner circumferential surface is positioned closer to the central portion than the first inner circumferential surface. The aforementioned frame, auxiliary components, and support overlap in the aforementioned top view. The aforementioned frame is in contact with the aforementioned auxiliary components, and the aforementioned auxiliary components are in contact with the aforementioned support body. In a first region of a predetermined length extending from the end of the frame side beam that is connected to the frame, the frame side beam contacts the auxiliary component. In the second region of the frame side beam portion, which is closer to the center than the first region, the frame side beam portion does not contact the auxiliary component.

2. An actuator, wherein, have: The first plate is equipped with a drive body, and has a central part, a frame, and a connecting member. The central part can vibrate in a direction orthogonal to the plate surface by the drive body. When viewed from above, the frame is arranged outside the central part. The connecting member is arranged between the central part and the frame, connecting the central part so that it can vibrate relative to the frame. An annular support body is disposed opposite to the frame of the first plate, supporting the first plate; and An auxiliary component is disposed between the first plate and the support body. The aforementioned frame has a first inner peripheral surface facing the outer peripheral end face of the aforementioned central portion. The aforementioned auxiliary component has the aforementioned second inner peripheral surface on the central side. It includes a first component, wherein the first plate of the first component and the auxiliary component are constituted by a single component. The aforementioned connecting component includes a frame side beam portion, which is connected to the frame and extends from the first inner periphery towards the central portion. In the aforementioned top view, the second inner circumferential surface is positioned closer to the central portion than the first inner circumferential surface. The aforementioned frame, auxiliary components, and support have overlapping portions when viewed from above. In a first region of a predetermined length extending from the end of the frame side beam connected to the frame, the frame side beam overlaps with the auxiliary component when viewed from above. In the second region of the frame side beam that is closer to the center than the first region, the frame side beam and the auxiliary component do not overlap when viewed from above.

3. An actuator, wherein, have: The first plate is equipped with a drive body, and has a central part, a frame, and a connecting member. The central part can vibrate in a direction orthogonal to the plate surface by the drive body. When viewed from above, the frame is arranged outside the central part. The connecting member is arranged between the central part and the frame, connecting the central part so that it can vibrate relative to the frame. An annular support body, positioned opposite the frame of the first plate, supports the first plate; and An auxiliary component is disposed between the first plate and the support body. The aforementioned frame has a first inner peripheral surface facing the outer peripheral end face of the aforementioned central portion. The aforementioned auxiliary component has the aforementioned second inner peripheral surface on the central side. It includes a second component, wherein the aforementioned auxiliary component and the aforementioned support body are constituted by a single component. The aforementioned connecting component includes a frame side beam portion, which is connected to the frame and extends from the first inner periphery towards the central portion. In the aforementioned top view, the second inner circumferential surface is positioned closer to the central portion than the first inner circumferential surface. The aforementioned frame and the aforementioned auxiliary components have overlapping portions when viewed from above. In a first region of a predetermined length extending from the end of the frame side beam that is connected to the frame, the frame side beam contacts the auxiliary component. In the second region of the frame side beam portion, which is closer to the center than the first region, the frame side beam portion does not contact the auxiliary component.

4. The actuator according to any one of claims 1 to 3, wherein, The aforementioned support body has the aforementioned third inner circumferential surface on the central side. In the above top view, the third inner circumferential surface is positioned closer to the center than the second inner circumferential surface.

5. The actuator according to any one of claims 1 to 4, wherein, The aforementioned connecting components are multiple. The aforementioned connecting components are arranged at intervals along the outer periphery of the central portion. The aforementioned auxiliary component is ring-shaped.

6. The actuator according to claim 5, wherein, The aforementioned central section appears circular when viewed from above. The aforementioned second inner circumferential surface is circular when viewed from above.

7. A fluid control device, wherein, The actuator comprising any one of claims 1 to 6 The first plate has a first opening, which is formed by the central portion, the frame, and the connecting member. It includes a second plate, which is opposite to the first plate, and has a second opening at a position overlapping the central portion when viewed from above. The second plate contacts the support body to form a space enclosed by the first plate, the auxiliary component, the support body, and the second plate.

8. The fluid control device according to claim 7, wherein, The second plate and the support body mentioned above are composed of a single component.

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