High pressure cooling filtration system and method for non-metallic microporous processing

Abstract

The present application belongs to the technical field of machine tool processing cooling and lubrication, and relates to a high-pressure cooling and filtering system and method for non-metallic micropore processing. The present application performs primary filtering on cutting fluid entering a liquid tank through a bag filter assembly, sets a cooling liquid supply area and a liquid supply pump liquid supply area in the liquid tank, and cooperates with a cutting fluid chiller to store liquid in partitions; the cutting fluid in the cooling liquid supply area is pumped into a machine tool to provide external cooling through a cooling pump assembly; the cutting fluid in the liquid supply pump liquid supply area is pumped out and filtered through a precision filter for secondary filtering, a booster liquid tank is provided to provide an independent liquid supply space for a high-pressure pump to ensure stable liquid supply at the inlet of the high-pressure pump, and residual impurities are further removed after precision filtering through a high-pressure filter bottle assembly; the cutting fluid after precision filtering is distributed to at least two branches through a multi-branch control and monitoring assembly, and is supplied to the center of at least two machine tools to realize simultaneous liquid supply of one high-pressure pump to multiple machine tools.

Description

Technical Field

[0001] This invention belongs to the field of machine tool processing cooling and lubrication technology, and relates to a high-pressure cooling and filtration system and method for non-metallic micro-hole processing. Background Technology

[0002] With the rapid development of the semiconductor industry, the proportion of machine tools used in non-metallic machining has increased dramatically. However, the processing efficiency is often affected by the mismatch between the characteristics of semiconductor processing and the capabilities of existing metal machine tools. To meet the needs of single-crystal silicon micro-hole processing in the semiconductor industry and improve processing efficiency, it is necessary to research a high-pressure cooling and filtration system suitable for non-metallic micro-hole processing.

[0003] As an effective method for cooling and lubrication in internal hole machining, high-pressure cooling and filtration systems have seen increasing development in recent years. These systems typically integrate multiple solutions such as filtration, cooling, and high-pressure fluid supply, significantly improving machine tool efficiency while meeting machining requirements. However, directly introducing high-pressure cooling solutions into non-metallic micro-hole machining is not a simple application transplant. With increasingly stringent machining requirements, cutting tools are prone to clogging and overheating during non-metallic micro-hole machining, leading to workpiece scrap or even machine tool damage. Therefore, how to fully integrate high-pressure cooling and filtration systems with non-metallic working conditions to achieve efficient and stable operation in the machining of micro-hole features in single-crystal silicon has become a pressing technical problem to be solved.

[0004] Meanwhile, as more and more machine tools adopt centralized filtration systems, the corresponding high-pressure cooling fluid supply systems also face the challenge of providing stable cooling fluid to multiple machine tools from a single device. Taking a dual-channel internal cooling fluid supply system as an example, it is necessary to solve the problem of rationally distributing the high-pressure pump flow rate when two machine tools are processing asynchronously, ensuring that the high-pressure pump's supply pressure and flow rate can meet the processing needs of each machine tool. The traditional method uses two high-pressure pumps to supply fluid to two machine tools separately, which increases costs and energy consumption, and also leads to a higher failure rate. Therefore, how to achieve stable operation of a multi-channel high-pressure cooling filtration system to better support the processing of micro-holes in single-crystal silicon in the semiconductor industry has become a pressing issue that needs to be addressed.

[0005] Furthermore, to address the challenge of clogging hollow tools in micro-hole machining, current commercially available solutions typically employ high-precision filters before the high-pressure screw pump to intercept impurities, preventing tool blockage and reducing abrasive wear on the high-pressure pump. However, the high-pressure pump outlet piping is complex, and in addition to machining debris, chemical precipitation, high-pressure pump wear debris, and piping filler can also easily clog micro-hole tools. Therefore, how a high-pressure cooling and filtration system can ensure the machine tool's micro-hole machining capability, prevent machining failures caused by tool blockage, and guarantee the operational stability of the high-pressure screw pump is a topic worthy of in-depth research in the field of semiconductor micro-hole machining.

[0006] In summary, high-pressure cooling and filtration systems that meet the requirements of non-metallic micro-hole machining involve many factors, adapting to centralized filtration solutions for multiple machine tools is difficult, and the clogging of micro-hole tools is a complex issue, posing significant challenges to the overall technical solution. Summary of the Invention

[0007] The purpose of this invention is to provide a high-pressure cooling and filtration system and method for non-metallic micro-hole machining, in order to solve the technical problems of existing high-pressure cooling and filtration systems in non-metallic micro-hole machining, such as easy tool clogging and overheating, high energy consumption due to the use of multiple pumps for multi-machine tool liquid supply, and easy entry of impurities from the high-pressure pump outlet into the spindle, leading to tool clogging.

[0008] To achieve the above objectives, the present invention employs the following technical solution: In a first aspect, the present invention proposes a high-pressure cooling filtration system for non-metallic microporous processing, comprising: A liquid tank, wherein the liquid tank is provided with a flow channel, a cooling liquid supply area and a liquid supply pump supply area; A bag filter assembly is disposed at the inlet of the liquid tank for filtering the cutting fluid entering the liquid tank; A cutting fluid chiller is disposed in the flow channel. The cutting fluid chiller is used to cool the cutting fluid. The outlet of the cutting fluid chiller is connected to the cooling fluid supply area and the fluid supply pump supply area, respectively. At least two cooling pump assemblies are provided, each corresponding to a machine tool. The inlet of each cooling pump assembly is connected to the cooling fluid supply area, and is used to pump the cooled cutting fluid into the machine tool to provide external cooling cutting fluid for the machine tool. A fluid supply pump, the inlet of which is connected to the fluid supply area of ​​the fluid supply pump, is used to pump out the cooled cutting fluid; A precision filter, the inlet of which is connected to the outlet of the fluid supply pump, is used for secondary filtration of the cutting fluid; The pressurization unit includes a pressurization tank and a high-pressure pump. The pressurization tank is disposed inside the tank, and the inlet of the pressurization tank is connected to the outlet of the precision filter. The high-pressure pump is placed inside the pressurization tank. A high-pressure filter assembly, the inlet of which is connected to the outlet of the high-pressure pump, is used for fine filtration of the cutting fluid; A multi-branch control and monitoring component has its inlet connected to the outlet of the high-pressure filter bottle assembly. The outlet of the multi-branch control and monitoring component is divided into at least two branches, which are respectively used to connect to the central water inlet and outlet of at least two machine tools. The multi-branch control and monitoring component includes a first control valve, a first flow sensor, and a first pressure sensor disposed on each branch.

[0009] Secondly, this invention proposes a high-pressure cooling and filtration method for non-metallic microporous processing, employing a high-pressure cooling and filtration system for non-metallic microporous processing, comprising the following steps: S1, the cutting fluid is fed into the bag filter assembly, filtered by the bag filter assembly and then enters the liquid tank. After being cooled by the cutting fluid chiller in the flow channel, one path enters the cooling liquid supply area and the other path enters the liquid supply pump supply area. S2, the cutting fluid in the cooling supply zone is pumped into the corresponding machine tool through the cooling pump assembly to provide external cooling cutting fluid for the machine tool; the cutting fluid in the supply pump zone is pumped into a precision filter for secondary filtration. S3, the cutting fluid after secondary filtration enters the booster tank, and after being pressurized by the high-pressure pump, it enters the high-pressure filter bottle assembly, where the high-pressure filter bottle assembly performs fine filtration on the cutting fluid. S4, the finely filtered cutting fluid enters the multi-branch control and monitoring component and is sent to the central water inlet / outlet of each machine tool. The multi-branch control and monitoring component controls the on / off of each branch according to the processing status of each machine tool, and monitors the flow rate of each branch in real time through the first flow sensor installed in each branch, and monitors the pressure of each branch in real time through the first pressure sensor installed in each branch.

[0010] Compared with the prior art, the present invention has the following beneficial effects: This invention utilizes a partitioned cooling fluid supply zone and a supply pump zone within the liquid tank, with the coolant chiller outlet connected to both zones, achieving multi-functionality within a single machine. A bag filter assembly performs primary filtration of the incoming coolant, removing large particles and extending the lifespan of subsequent precision filters and high-pressure pumps. A cooling pump assembly pumps the coolant from the cooling supply zone into the corresponding machine tool for external cooling, meeting the machine tool's external cooling requirements. The supply pump then pumps the coolant from the supply pump zone for secondary filtration through a precision filter, effectively intercepting fine particles and preventing contamination. The fluid enters the high-pressure pump and cutting tools; a pressurized tank provides an independent supply space for the high-pressure pump, ensuring stable fluid supply at the pump inlet. The cutting fluid undergoes further fine filtration through a high-pressure filter assembly to remove residual impurities. A multi-branch control and monitoring assembly distributes the finely filtered cutting fluid to at least two branches, supplying the central outlet fluid to at least two machine tools. This allows one high-pressure pump to supply fluid to multiple machine tools simultaneously. Control valves, flow sensors, and pressure sensors for each branch independently control the on / off state and monitor the operating status in real time, ensuring independent and adjustable fluid supply to each machine tool. This invention constructs a complete system architecture with parallel external cooling and high-pressure internal cooling, multi-stage gradient filtration, and one high-pressure pump independently supplying fluid to multiple branches. This is beneficial for ensuring cutting fluid cleanliness, extending high-pressure pump life, reducing equipment costs and energy consumption, and achieving precise and controllable fluid supply to multiple machine tools.

[0011] In step S1 of this invention, the cutting fluid enters the liquid tank after primary filtration by the bag filter assembly. After being cooled by the cutting fluid chiller, it is distributed to the cooling supply area and the supply pump area, achieving primary filtration and temperature control of the cutting fluid, as well as internal and external cooling separation, ensuring the cleanliness and temperature stability of the supplied fluid from the source. In step S2, the cutting fluid in the cooling supply area is pumped into the corresponding machine tool by the cooling pump assembly to provide external cooling, meeting the external cooling requirements of the machine tool. At the same time, the cutting fluid in the supply pump area is pumped into the precision filter for secondary filtration, achieving independent supply and step-by-step filtration for external cooling and high-pressure internal cooling, preventing impurities from entering subsequent high-pressure internal cooling processes. The invention comprises a pressure pump and cutting tools. In step S3, the cutting fluid, after secondary filtration, enters the pressurized fluid tank. After being pressurized by the high-pressure pump, it enters the high-pressure filter assembly for fine filtration, ensuring that the cutting fluid before entering the spindle meets the cleanliness and pressure requirements for micro-hole machining. In step S4, the finely filtered cutting fluid is controlled by a multi-branch control and monitoring assembly according to the machining status of each machine tool. The flow rate and pressure of each branch are monitored in real time by flow sensors and pressure sensors before being sent to the central water inlet / outlet of each machine tool. This achieves independent fluid supply from one high-pressure pump to multiple machine tools, distributing fluid as needed and ensuring stable and reliable fluid supply to each machine tool. This invention forms a systematic, standardized, and reusable high-pressure cooling and filtration operation process by sequentially executing four steps: primary filtration cooling diversion, external cooling fluid supply and secondary filtration, pressurized fine filtration, and multi-branch independent control fluid supply. It realizes multi-stage filtration and temperature control of cutting fluid, independent fluid supply from one high-pressure pump to multiple branches, and real-time monitoring and precise control of fluid supply parameters. Attached Figure Description

[0012] Figure 1 This is a system module diagram of the present invention; Figure 2 This is a three-dimensional structural diagram of the present invention; Figure 3 This is a three-dimensional structural diagram of the present invention from another angle; Figure 4 This is a schematic diagram of the four-stage filtration assembly structure of the present invention; Figure 5 This is a schematic diagram of the multi-branch control and monitoring component structure of the present invention; Figure 6 This is a flowchart of a method according to an embodiment of the present invention.

[0013] The components include: 1. Liquid tank; 2. Liquid tank drain port; 3. First liquid level sensor; 4. Machine tool; 5. Liquid supply pump; 6. Precision filter; 7. Cutting fluid chiller; 8. Centralized liquid supply station; 9. High-pressure pump; 10. First pressure sensor; 11. First control valve; 13. Booster tank; 14. Third flow sensor; 15. High-pressure filter assembly; 16. Cooling pump; 17. Second liquid level sensor; 18. Overflow valve; 19. Third pressure sensor; 20. Second pressure sensor; 21. Bag filter assembly; 22. Second control valve; 23. Second flow sensor; 25. First flow sensor; 26. Sewage tank; 27. Sewage pump; 28. First high-pressure filter; 29. ​​Second high-pressure filter; 31. Multi-branch control and monitoring assembly. Detailed Implementation

[0014] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0015] It should be noted that the terms "first," "second," etc., in the specification and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0016] The present invention will now be described in further detail with reference to the accompanying drawings: See Figures 1 to 3 This invention discloses a high-pressure cooling and filtration system for non-metallic micro-hole processing, which solves problems such as low efficiency, tool clogging, and increased cost and energy consumption of multi-channel liquid supply in semiconductor micro-hole processing.

[0017] See Figure 1 and Figure 2This invention comprises a liquid tank 1, a bag filter assembly 21, a cutting fluid chiller 7, a cooling pump assembly, a liquid supply pump 5, a precision filter 6, a pressurization unit, a high-pressure filter bottle assembly 15, and a multi-branch control and monitoring assembly 31, forming a four-stage filtration system. This embodiment provides a continuous and stable supply of high-cleanliness, constant-temperature, and high-pressure cutting fluid to multiple machine tools 4 (two machine tools are shown in the illustration), meeting the non-metallic micro-pore machining requirements of these machine tools. In practical applications, the number of cooling pump assemblies and multi-branch control and monitoring assemblies 31 can be adjusted according to actual needs to supply fluid to multiple machine tools 4.

[0018] See Figure 1 In this embodiment of the invention, a bag filter assembly 21 is disposed at the inlet of the liquid tank 1 for primary filtration of the cutting fluid entering the liquid tank 1. The bag filter assembly 21 includes a bag filter, a second pressure sensor 20, a three-way ball valve, and a supply pipeline. The inlet of the three-way ball valve is connected to a centralized liquid supply station 8. A second control valve 22 and a second flow sensor 23 are disposed at the inlet of the three-way ball valve. In this embodiment, the second control valve 22 is a solenoid valve. The first outlet of the three-way ball valve is connected to the flow channel through the bag filter, and the second outlet of the three-way ball valve is connected to the flow channel through the supply pipeline. The interfaces between the bag filter and the flow channel, and between the supply pipeline and the flow channel, are both located upstream of the cutting fluid chiller 7. The second pressure sensor 20 is disposed at the inlet of the bag filter.

[0019] See Figure 1 The cutting fluid discharged from multiple machine tools 4 enters the corresponding wastewater tank 26. A wastewater pump 27 pumps the cutting fluid from the wastewater tank 26 into the centralized fluid supply station 8 for coarse filtration. After filtration, the two streams of cutting fluid merge into one and enter the bag filter assembly 21 through the second control valve 22 and the second flow sensor 23. Primary filtration occurs within the bag filter assembly 21. The second control valve 22 controls the on / off flow, and the second flow sensor 23 is installed at the inlet of the bag filter assembly 21 for real-time flow monitoring. During normal operation, the cutting fluid enters the bag filter, passes through the internal filter bag, and then enters the liquid tank 1. When the internal filter bag becomes clogged, the second pressure sensor 20 detects that the inlet pressure exceeds a predetermined value and triggers an alarm. If the machine tool 4 is in operation, to ensure continuous processing, the three-way ball valve is switched so that the cutting fluid flows directly to the liquid tank 1 through the second outlet. In this embodiment, the predetermined value is 0.15 MPa.

[0020] See Figure 2 In this embodiment of the invention, the cutting fluid chiller 7 is disposed in the flow channel of the liquid tank 1. The cutting fluid chiller 7 is used to cool the cutting fluid. The outlet of the cutting fluid chiller 7 is connected to the cooling liquid supply area and the liquid supply pump supply area, respectively.

[0021] In this embodiment of the invention, there are at least two cooling pump assemblies, each corresponding to one of the machine tools 4. The inlet of each cooling pump assembly is connected to the cooling fluid supply area, and is used to pump the cooled cutting fluid into the corresponding machine tool 4, providing external cooling cutting fluid to the machine tool 4. See also Figure 1 The cooling pump assembly includes a cooling pump 16, a ball valve, a coolant supply pipeline, a third flow sensor 14, and a check valve. The cooling pump 16 is located in the coolant supply area. The outlet of the cooling pump 16 is connected to the coolant supply pipeline through the ball valve. The third flow sensor 14 and the check valve are installed on the coolant supply pipeline. The cutting fluid entering the liquid tank 1 flows through the liquid tank channel and is fully cooled by the cutting fluid chiller 7 before entering the coolant supply area. It is then pumped into the corresponding machine tool 4 by the cooling pump 16 to provide external cooling for the machine tool 4. The third flow sensor 14 monitors the flow rate of the cutting fluid pumped into the machine tool 4, and the ball valve can adjust the pumping flow rate.

[0022] See Figure 1 In this embodiment of the invention, the liquid tank 1 is provided with a first liquid level sensor 3 corresponding to each machine tool 4 and a temperature sensor corresponding to each machine tool 4, and the bottom of the liquid tank 1 is provided with a liquid tank drain port 2.

[0023] In this embodiment of the invention, the inlet of the fluid supply pump 5 is connected to the fluid supply area of ​​the fluid supply pump, and is used to pump out the cooled cutting fluid. See also Figure 1 The inlet of the precision filter 6 is connected to the outlet of the fluid supply pump 5 for secondary filtration of the cutting fluid. Specifically, the fluid supply pump 5 is located in the fluid supply area, the outlet of the fluid supply pump 5 is connected to the inlet of the precision filter 6, and the outlet of the precision filter 6 is connected to the inlet of the booster tank 13. A pressure gauge is installed between the outlet of the fluid supply pump 5 and the inlet of the precision filter 6, and an outlet pressure gauge and a turbine flow meter are installed at the outlet of the precision filter 6. The difference between the pressure value of the pressure gauge and the pressure value of the outlet pressure gauge is used to determine whether the filter element of the precision filter 6 is clogged. If cloggedness occurs, the filter element of the precision filter 6 needs to be replaced.

[0024] See Figure 1 In this embodiment of the invention, the pressurization unit includes a pressurization tank 13 and a high-pressure pump 9. The pressurization tank 13 is disposed within the tank 1 to form an independent liquid supply space. The inlet of the pressurization tank 13 is connected to the outlet of the precision filter 6. The high-pressure pump 9 is placed inside the pressurization tank 13. The pressurization unit is specifically described below: See [link to details]. Figure 3The outlet of the high-pressure pump 9 is connected to the inlet of the high-pressure filter assembly 15 via an overflow valve 18. A third pressure sensor 19 is provided between the overflow valve 18 and the high-pressure filter assembly 15. The overflow valve 18 also has an overflow port, which is connected to the liquid tank 1, allowing the overflow to flow directly into the liquid tank. A second liquid level sensor 17 is provided on the pressurized liquid tank 13 to monitor the liquid level within the pressurized liquid tank 13.

[0025] See Figure 1 In this embodiment of the invention, the inlet of the high-pressure filter bottle assembly 15 is connected to the outlet of the high-pressure pump 9 for fine filtration of the cutting fluid. See [link to previous section]. Figure 4 Specifically, the high-pressure filter assembly 15 includes a first high-pressure filter 28 and a second high-pressure filter 29 connected in series. The outlet of the high-pressure pump 9 is connected to the inlet of the first high-pressure filter 28 through an overflow valve 18. The outlet of the first high-pressure filter 28 is connected to the inlet of the second high-pressure filter 29. The outlet of the second high-pressure filter 29 is connected to the multi-branch control and monitoring assembly 31. The first high-pressure filter 28 contains a melt-blown filter element, and the second high-pressure filter 29 contains a stainless steel filter element. Pressure gauges are respectively installed at the front end of the first high-pressure filter 28, between the first high-pressure filter 28 and the second high-pressure filter 29, and at the rear end of the second high-pressure filter 29. The replacement cycle of the melt-blown filter element is determined by observing the pressure difference between the pressure gauges at the front and rear ends of the first high-pressure filter 28, and the replacement cycle of the stainless steel filter element is determined by observing the pressure difference between the pressure gauges at the front and rear ends of the second high-pressure filter 29.

[0026] See Figure 1 and Figure 5 In this embodiment of the invention, the inlet of the multi-branch control and monitoring component 31 is connected to the outlet of the high-pressure filter bottle assembly 15, and the outlet of the multi-branch control and monitoring component 31 is divided into at least two branches, which are respectively used to connect to the central water inlet of at least two machine tools 4; the multi-branch control and monitoring component 31 includes a first control valve 11, a first flow sensor 25 and a first pressure sensor 10 disposed in each branch.

[0027] In this embodiment of the invention, the first control valve 11 is a solenoid valve, which is respectively disposed at the inlet end of each branch of the multi-branch control and monitoring component 31, and is used to control the on / off state of each branch according to the processing status of each machine tool 4. The first flow sensor 25 is used to monitor the flow rate of the corresponding branch in real time. The first pressure sensor 10 is used to monitor the pressure of the corresponding branch in real time.

[0028] In this embodiment of the invention, the detection accuracy of the first flow sensor 25 is 0.001 L / min. The first flow sensor 25 is used to connect to the machine tool CNC system. The machine tool CNC system has a low flow warning value. When the flow value detected by the first flow sensor 25 is lower than the low flow warning value, the machine tool CNC system issues a tool blockage warning signal. The low flow warning value is a critical value of the cutting fluid flow rate when there is a risk of tool blockage. This value is preset by the machine tool CNC system according to the tool specifications and machining parameters.

[0029] In this embodiment of the invention, the high-pressure pump 9 is a high-pressure screw pump, and the screw surface of the high-pressure screw pump is provided with a diamond-like carbon coating, the hardness of which is at least 4000 HV.

[0030] Based on the above system, this invention also discloses a high-pressure cooling filtration method for non-metallic microporous processing, see [link to relevant documentation]. Figure 6 This includes the following steps: S1, the waste chips generated by the machine tool 4 flow into the waste liquid tank 26 at the bottom of the machine tool 4 along with the cutting fluid. A waste liquid pump 27 is installed on the waste liquid tank 26, which is connected to the inlet of the centralized liquid supply station 8. The start and stop of the waste liquid pump 27 are controlled according to the liquid level in the waste liquid tank 26. The cutting fluid is sent to the bag filter assembly 21 through the centralized liquid supply station 8. After being filtered by the bag filter assembly 21, it enters the liquid tank 1. After being cooled by the cutting fluid chiller 7 in the flow channel, one path enters the cooling liquid supply area, and the other path enters the liquid supply pump supply area. A second control valve 22 and a second flow sensor 23 are installed at the inlet of the bag filter assembly 21. The second flow sensor 23 is used to detect the stability of the liquid supply from the station in real time. The second control valve 22 controls the opening and closing of the liquid path to achieve stable liquid level in the high-pressure cooling filtration system.

[0031] In this embodiment of the invention, a second pressure sensor 20 is provided at the inlet of the bag filter assembly 21. When the second pressure sensor 20 detects that the inlet pressure exceeds 0.15 MPa, it is determined that the filter bag of the bag filter assembly 21 is blocked and needs to be replaced. Simultaneously, in order to ensure the continuity of processing, the three-way ball valve is switched to directly supply the cutting fluid to the liquid tank 1. After the filter bag is replaced, the flow is switched back to the filter bag for filtration in a timely manner.

[0032] S2, the cutting fluid in the cooling supply zone is pumped into the corresponding machine tool 4 through the cooling pump assembly to provide external cooling cutting fluid for the machine tool 4; the cutting fluid in the supply pump zone is pumped into the precision filter 6 through the supply pump 5 for secondary filtration. S3, the cutting fluid after secondary filtration enters the pressurized fluid tank 13, and after being pressurized by the high-pressure pump 9, it enters the high-pressure filter bottle assembly 15, where the cutting fluid is finely filtered.

[0033] In this embodiment of the invention, a second liquid level sensor 17 is arranged on the booster tank 13 to prevent the high-pressure pump 9 from running without water. A third pressure sensor 19 is arranged at the outlet of the high-pressure pump 9 to detect the outlet pressure. The water pressure of the overflow valve 18 is adjusted by the reading of the third pressure sensor 19 to meet the requirements of the center outlet pressure for internal cooling processing. The high-pressure pump 9 is connected to the inlet of the high-pressure filter bottle assembly 15 through a pipeline. The high-pressure filter bottle assembly 15 includes a first high-pressure filter bottle 28 and a second high-pressure filter bottle 29 connected in series. The first high-pressure filter bottle 28 and the second high-pressure filter bottle 29 are connected in series to achieve two-stage fine filtration of the cutting fluid. The pressure difference between the pressure gauges before and after the first high-pressure filter bottle 28 and the second high-pressure filter bottle 29 is observed to determine whether the filter bottle is blocked.

[0034] S4, the cutting fluid after fine filtration enters the multi-branch control and monitoring component 31 and is sent to the central water inlet / outlet of each machine tool 4. The multi-branch control and monitoring component 31 controls the on / off of each branch according to the processing status of each machine tool 4, and monitors the flow rate of each branch in real time through the first flow sensor 25 set in each branch, and monitors the pressure of each branch in real time through the first pressure sensor 10 set in each branch.

[0035] This invention enables a single device to supply fluid to multiple machine tools 4, allowing the application of high-pressure screw pumps in oil-free fully synthetic cutting fluids and extending the lifespan of the screw pumps. The invention employs a high-precision flow monitoring and early warning system to mitigate the risks caused by micro-hole tool clogging. It utilizes a multi-stage filtration system with the same filtration precision but different filtration efficiencies, and the rationally distributed arrangement of the four-stage filtration ensures the machining stability of the machine tools 4. Through four-stage filtration, this invention significantly improves the filtration efficiency of the cutting fluid in the machine tools 4, effectively solving the problem of easy clogging of micro-hole machining tools. By setting two stages of filtration at the front end of the high-pressure pump 9, the operating conditions of the high-pressure pump 9 are met, extending its service life. By setting two stages of fine filtration at the outlet end of the high-pressure pump 9, the risk of large particles such as chemical precipitation, high-pressure pump wear, and high-pressure pipeline connecting packing entering the central water outlet spindle is avoided, ensuring the machining stability of the machine tools 4.

[0036] This invention enables a single high-pressure pump 9 to supply liquid to the central water-discharge spindles of multiple machine tools 4 through a multi-branch control and monitoring component. This solves the problems of large footprint, doubled energy consumption, and high product failure rate caused by multiple high-pressure pumps and supporting pipelines. By arranging high-precision first flow sensor 25 and first pressure sensor 10 on multiple branches, the invention achieves real-time monitoring of the central water-discharge function of multiple machine tools 4, ensuring that the liquid output of the central spindles of multiple machine tools 4 meets the processing requirements of multiple machine tools 4, and improving the processing stability of machine tools 4.

[0037] This invention, by customizing the high-pressure pump 9 and adding a diamond-like carbon coating, achieves a surface hardness of up to 4000 HV, significantly improving the wear resistance of the pump's screw and solving the problem that high-pressure screw pumps cannot be used with fully synthetic cutting fluids. Furthermore, the high-pressure cooling and filtration system incorporates a high-precision first flow sensor 25 on a branch of the multi-branch control and monitoring component 31, achieving a detection accuracy of 0.001 L / min. Through the CNC program on the machine tool 4, the fluid flow rate from the micro-orifice tool can be monitored in real time. When the flow rate reaches a low warning value, an early warning is issued indicating a risk of tool blockage, allowing for timely intervention and mitigation of losses caused by blockage.

[0038] The above content is only for illustrating the technical concept of the present invention and should not be construed as limiting the scope of protection of the present invention. Any modifications made to the technical solution based on the technical concept proposed in this invention shall fall within the scope of protection of this invention.

Claims

1. A high-pressure cooling and filtration system for non-metallic microporous processing, characterized in that, include: Liquid tank (1), wherein the liquid tank (1) is provided with a flow channel, a cooling liquid supply area and a liquid supply pump supply area; A bag filter assembly (21) is disposed at the inlet of the liquid tank (1) for filtering the cutting fluid entering the liquid tank (1); A cutting fluid chiller (7) is disposed in the flow channel. The cutting fluid chiller (7) is used to cool the cutting fluid. The outlet of the cutting fluid chiller (7) is connected to the cooling supply area and the supply pump supply area, respectively. At least two cooling pump assemblies correspond one-to-one with each machine tool (4). The inlet of the cooling pump assembly is connected to the cooling liquid supply area and is used to pump the cooled cutting fluid into the machine tool (4) to provide external cooling cutting fluid for the machine tool (4). A liquid supply pump (5) has its inlet connected to the liquid supply area of ​​the liquid supply pump and is used to pump out the cooled cutting fluid. A precision filter (6) is connected at its inlet to the outlet of the liquid supply pump (5) for secondary filtration of the cutting fluid; The pressurization unit includes a pressurization tank (13) and a high-pressure pump (9). The pressurization tank (13) is located inside the tank (1). The inlet of the pressurization tank (13) is connected to the outlet of the precision filter (6). The high-pressure pump (9) is located inside the pressurization tank (13). The high-pressure filter bottle assembly (15), whose inlet is connected to the outlet of the high-pressure pump (9), is used for fine filtration of the cutting fluid; The multi-branch control and monitoring component (31) has its inlet connected to the outlet of the high-pressure filter bottle assembly (15). The outlet of the multi-branch control and monitoring component (31) is divided into at least two branches, which are used to connect to the central water inlet of at least two machine tools (4). The multi-branch control and monitoring component (31) includes a first control valve (11), a first flow sensor (25), and a first pressure sensor (10) installed in each branch.

2. The high-pressure cooling and filtration system for non-metallic microporous processing according to claim 1, characterized in that, The bag filter assembly (21) includes a bag filter, a three-way ball valve and a liquid supply line. The inlet of the three-way ball valve is used to connect to the centralized liquid supply station (8). A second control valve (22) and a second flow sensor (23) are provided at the inlet of the three-way ball valve. The first outlet of the three-way ball valve is connected to the flow channel through the bag filter. The second outlet of the three-way ball valve is connected to the flow channel through the liquid supply line. The interface between the bag filter and the flow channel and the interface between the liquid supply line and the flow channel are both located upstream of the cutting fluid chiller (7).

3. The high-pressure cooling and filtration system for non-metallic microporous processing according to claim 2, characterized in that, The bag filter is equipped with a second pressure sensor (20) at the inlet. When the second pressure sensor (20) detects that the inlet pressure exceeds a predetermined value, the three-way ball valve is switched so that the cutting fluid flows directly to the liquid tank (1) through the second outlet.

4. The high-pressure cooling and filtration system for non-metallic microporous processing according to claim 1, characterized in that, The liquid supply pump (5) is located in the liquid supply area of ​​the liquid supply pump. A pressure gauge is provided between the outlet of the liquid supply pump (5) and the inlet of the precision filter (6). An outlet pressure gauge and a turbine flow meter are provided at the outlet of the precision filter (6). The difference between the pressure value of the pressure gauge and the pressure value of the outlet pressure gauge is used to determine whether the filter element of the precision filter (6) is clogged.

5. The high-pressure cooling and filtration system for non-metallic microporous processing according to claim 1, characterized in that, The cooling pump assembly includes a cooling pump (16), a ball valve, a coolant supply pipeline, a third flow sensor (14), and a check valve. The cooling pump (16) is located in the coolant supply area. The outlet of the cooling pump (16) is connected to the coolant supply pipeline through the ball valve. The third flow sensor (14) and the check valve are installed on the coolant supply pipeline. The liquid tank (1) is equipped with a first liquid level sensor (3) corresponding to each machine tool (4) and a temperature sensor corresponding to each machine tool (4). The bottom of the liquid tank (1) is equipped with a liquid tank drain port (2).

6. The high-pressure cooling and filtration system for non-metallic microporous processing according to claim 1, characterized in that, The outlet of the high-pressure pump (9) is connected to the inlet of the high-pressure filter bottle assembly (15) through an overflow valve (18). A third pressure sensor (19) is provided between the overflow valve (18) and the high-pressure filter bottle assembly (15). The overflow valve (18) also has an overflow port, which is connected to the liquid tank (1). A second liquid level sensor (17) is provided on the pressurized liquid tank (13). The second liquid level sensor (17) is used to monitor the liquid level in the pressurized liquid tank (13).

7. The high-pressure cooling and filtration system for non-metallic microporous processing according to claim 6, characterized in that, The high-pressure filter assembly (15) includes a first high-pressure filter (28) and a second high-pressure filter (29) connected in series. The outlet of the overflow valve (18) is connected to the inlet of the first high-pressure filter (28), the outlet of the first high-pressure filter (28) is connected to the inlet of the second high-pressure filter (29), and the outlet of the second high-pressure filter (29) is connected to the multi-branch control and monitoring assembly (31). The first high-pressure filter (28) is provided with a melt-blown filter element, and the second high-pressure filter (29) is provided with a stainless steel filter element. Pressure gauges are provided at the front end of the first high-pressure filter (28), between the first high-pressure filter (28) and the second high-pressure filter (29), and at the rear end of the second high-pressure filter (29). The replacement cycle of the melt-blown filter element is determined by observing the pressure difference between the pressure gauges at the front end and the rear end of the first high-pressure filter (28), and the replacement cycle of the stainless steel filter element is determined by observing the pressure difference between the pressure gauges at the front end and the rear end of the second high-pressure filter (29).

8. The high-pressure cooling and filtration system for non-metallic microporous processing according to claim 1, characterized in that, The detection accuracy of the first flow sensor (25) is 0.001 L / min. The first flow sensor (25) is used to connect to the machine tool CNC system. The machine tool CNC system is equipped with a low flow warning value. When the flow value detected by the first flow sensor (25) is lower than the low flow warning value, the machine tool CNC system issues a tool blockage warning signal.

9. The high-pressure cooling and filtration system for non-metallic microporous processing according to claim 1, characterized in that, The high-pressure pump (9) is a high-pressure screw pump, and the screw surface of the high-pressure screw pump is provided with a diamond-like coating.

10. A high-pressure cooling and filtration method for non-metallic microporous machining, employing the high-pressure cooling and filtration system for non-metallic microporous machining as described in any one of claims 1 to 9, characterized in that, Includes the following steps: S1, the cutting fluid is fed into the bag filter assembly (21), and after being filtered by the bag filter assembly (21), it enters the liquid tank (1). After being cooled by the cutting fluid chiller (7) in the flow channel, one path enters the cooling liquid supply area and the other path enters the liquid supply pump supply area. S2, the cutting fluid in the cooling supply zone is pumped into the corresponding machine tool (4) through the cooling pump assembly to provide external cooling cutting fluid for the machine tool (4); the cutting fluid in the supply zone of the supply pump is pumped into the precision filter (6) through the supply pump (5) for secondary filtration. S3, the cutting fluid after secondary filtration enters the pressurized fluid tank (13), and after being pressurized by the high-pressure pump (9), it enters the high-pressure filter bottle assembly (15), where the high-pressure filter bottle assembly (15) performs fine filtration on the cutting fluid; S4, the cutting fluid after fine filtration enters the multi-branch control and monitoring component (31) and is sent to the central water inlet of each machine tool (4). The multi-branch control and monitoring component (31) controls the on / off of each branch according to the processing status of each machine tool (4), and monitors the flow rate of each branch in real time by the first flow sensor (25) set in each branch, and monitors the pressure of each branch in real time by the first pressure sensor (10) set in each branch.

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