An ultrasonic consolidation capping device for a tube

Abstract

The application provides an ultrasonic consolidation capping device for a tube shell, which comprises a rack, an ultrasonic consolidation spindle system, a ceramic adaptive buffer clamp, a precision alignment platform, a servo pressure closed loop module, a temperature control unit, a gas tightness online detection unit, a multi-station flow transfer system and a main control unit, an ultrasonic transducer, a variable amplitude rod and a rolling edge welding head are arranged on the ultrasonic consolidation spindle system, which are used for outputting ultrasonic vibration and cooperating with pressure to realize solid-state consolidation capping of a metal cover plate and a tube shell metallization layer; the precision alignment platform is an XYθ three-axis fine adjustment structure, which is provided with a visual automatic alignment mechanism; each functional component is electrically connected with the main control unit. The application has the advantages of simple structure, convenient operation, automatic identification of ceramic material, synchronous switching without manual operation, solving of the problems of complicated manual parameter adjustment and easy error, real-time compensation of edge capping pressure based on a buffer pad deformation variable, suppression of pressure fluctuation within ±1N through distributed strain gauges for collecting the buffer pad deformation variable, elimination of the problem of uneven pressure in the rolling welding head walking process, significant improvement of tube shell circumferential capping consistency and avoidance of the problem of ceramic cracking caused by local pressure overload.

Description

Technical Field

[0001] This invention relates to the field of microelectronic packaging and ultrasonic solid-state bonding technology, specifically to an ultrasonic solid-state sealing device and method for tube shells. Background Technology

[0002] MEMS devices and optoelectronic devices mostly use metal or cermet encapsulation with Al2O3 or AlN ceramics combined with Kovar / copper alloys as the core structure, widely used in aerospace, radio frequency, and high-power devices. However, when using the vacuum sealing and welding integrated machine produced by China Electronics Technology Group Corporation, the following defects were found in the existing sealing process: 1. Parallel seam welding / laser welding has high temperature and a large heat-affected zone, making ceramics prone to edge chipping and cracking, and thermal mismatch leading to airtightness failure; 2. Brazing relies on solder, introducing voids and precipitates, resulting in poor long-term reliability and failing to meet high-reliability airtightness requirements; 3. Traditional conventional ultrasonic sealing equipment mostly uses point welding structures, which cannot achieve continuous sealing of a large circumferential area of ​​the shell, and has poor adaptability to large-size shells; at the same time, it is only equipped with rigid simple clamps, lacking a buffer protection structure for brittle ceramics, resulting in a high ceramic breakage rate; 4. There is a lack of integrated equipment for alignment, buffering, temperature control, and online airtightness testing, resulting in low yield and difficulty in stable mass production.

[0003] Existing ultrasonic welding equipment and ceramic tube capping equipment still have the following common technical shortcomings: 1. The mechanical properties and brittleness of Al2O3 ceramics and AlN ceramics differ greatly. When switching between the two types of workpieces, it is necessary to manually adjust the clamping force of the fixture, the pressure loading curve, the temperature control threshold, and the ultrasonic parameters one by one. The debugging process is cumbersome, inefficient, and prone to errors due to manual parameter adjustment. 2. When using a rolling welding head to achieve continuous circumferential sealing, the constantly changing position and speed of the welding head will cause fluctuations in the deformation of the support pad layer, which will lead to uneven sealing pressure. Excessive local pressure can easily crack the ceramic, while insufficient pressure will cause air leakage at the sealing edge. Existing equipment only relies on pressure sensors for simple closed-loop control and does not combine workpiece support deformation for dynamic compensation. 3. Existing equipment generally only has single pressure overload protection, without combining the deformation of the buffer pad layer and the downward stroke of the welding head for linkage protection, resulting in insufficient reliability of overload protection for highly brittle AlN ceramics; 4. Air tightness testing is only used as a sorting process at the end of production. The process system is an open-loop control system, which cannot automatically correct core process parameters such as ultrasonic amplitude, duration of action, and temperature threshold based on the air tightness of batch products, making it difficult to achieve continuous process optimization.

[0004] Ultrasonic consolidation is a low-temperature solid-state joining technology that does not produce a molten pool at the interface and has minimal thermal stress, making it the optimal technical route for sealing metal / metal-ceramic tube shells. Summary of the Invention

[0005] The present invention aims to overcome the shortcomings of existing ceramic tube shell sealing equipment, such as cumbersome production changeover and debugging, uneven continuous sealing pressure, inability to independently optimize the process, and limited ceramic protection methods, by providing an ultrasonic consolidation sealing device for tube shells.

[0006] This application provides the following technical solution: An ultrasonic consolidation sealing device for pipe shells includes a frame, an ultrasonic consolidation spindle system, an alignment platform, a servo pressure closed-loop module, a temperature control unit, an online airtightness detection unit, a multi-station transfer system, and a main control unit. The ultrasonic consolidation spindle system is equipped with an ultrasonic transducer, an amplitude transformer, and a rolling edge-sealing welding head, used to output ultrasonic vibrations and, in conjunction with pressure, achieve solid-state consolidation sealing between the metal cover plate and the metallized layer of the pipe shell. The precision alignment platform is an XYθ three-axis fine-tuning structure, equipped with a vision-based automatic alignment mechanism. All functional components are electrically connected to the main control unit. The device is characterized by the following features: it is further equipped with an automatic ceramic material identification module and an adaptive process parameter matching subsystem. The automatic ceramic material identification module is communicatively connected to the main control unit and is used to identify Al2O3 ceramic tube shells or AlN ceramic tube shells. The adaptive process parameter matching subsystem has pre-stored corresponding process parameter sets for various tube shell materials. It is communicatively connected to the automatic ceramic material identification module, the servo pressure closed-loop module, the temperature control unit, and the ultrasonic consolidation spindle system, respectively. After identification, it automatically calls the corresponding parameter set and synchronously configures the working parameters of each associated module. The pressure-deformation dynamic compensation subsystem is also connected to the servo pressure closed-loop module and the ultrasonic consolidation spindle system. When the rolling edge sealing welding head seals the edge along the circumference of the pipe shell, the subsystem combines the welding head's walking position and running speed, and adjusts the output pressure of the servo pressure closed-loop module in real time according to the deformation of the buffer pad layer fed back by the deformation acquisition sensor, so that the deformation of the buffer pad layer is maintained within the preset range. The airtightness online detection unit is communicatively connected to the process self-learning optimization subsystem, which is also communicatively connected to the ultrasonic consolidation spindle system and the temperature control unit. Based on the batch workpiece leakage rate data fed back by the airtightness online detection unit, the subsystem iteratively adjusts the amplitude of the ultrasonic consolidation spindle system, the ultrasonic action time, and the temperature threshold of the temperature control unit to form a closed-loop control of sealing-airtightness detection-process parameter iteration. The main control unit limits the maximum downward stroke of the rolling edge sealing welding head based on the maximum allowable deformation of the buffer pad layer; when the deformation of the buffer pad layer exceeds the safety threshold, the main control unit locks the downward movement of the welding head and triggers a fault alarm.

[0007] Based on the above technical solutions, the following further technical solutions are also possible: The automatic ceramic material identification module adopts a combination of visual image and workpiece feature size identification method, with an identification response time of no more than 0.3s and an identification accuracy of no less than 99.9%. The adaptive matching subsystem for process parameters has two sets of independent process data packages, corresponding to Al2O3 and AlN ceramic tube shells respectively. Each set of data packages includes elastic clamping force, pressure loading curve, temperature threshold, ultrasonic amplitude and ultrasonic power parameters.

[0008] The deformation acquisition sensor is a distributed strain gauge, with multiple strain gauges uniformly embedded circumferentially within the composite buffer pad of the ceramic adaptive buffer fixture along the sealing path of the tube shell; the signal compensation response delay of the pressure-deformation dynamic compensation subsystem is no more than 10ms, controlling the deformation fluctuation of the buffer pad within ±0.02mm during the sealing process, and suppressing the output pressure fluctuation of the servo pressure closed-loop module within ±1N.

[0009] The process self-learning optimization subsystem presets a leakage rate judgment threshold. When the leakage rate of five consecutive workpieces is higher than the set threshold, the process self-learning optimization subsystem automatically shortens the ultrasonic action time and raises the temperature threshold of the temperature control unit. When the leakage rate of five consecutive workpieces is lower than the lower limit of the set threshold and the ceramic tube shell is undamaged, the process self-learning optimization subsystem automatically optimizes the amplitude parameters of the ultrasonic consolidation spindle system, and the single parameter adjustment amplitude does not exceed 3% of the total range of the corresponding parameters.

[0010] The rolling edge sealing welding head has a circular passivated structure, with a wear-resistant coating on the working surface and an annular vacuum adsorption groove inside; the ultrasonic consolidation spindle system is linked with the servo pressure closed-loop module for speed regulation, and the welding head automatically reduces its travel speed at the corner position of the tube shell, while the servo pressure closed-loop module synchronously increases the output pressure slightly.

[0011] The temperature control unit is equipped with four K-type contact thermocouples to achieve zoned temperature measurement. The temperature control logic of the temperature control unit is to limit the interface working temperature to less than half of the melting point of the corresponding base material. The temperature control unit is connected to the process parameter adaptive matching subsystem and automatically matches differentiated temperature protection thresholds for ceramic tube shells of different materials.

[0012] The servo pressure closed-loop module is configured with a four-segment segmented loading curve, which includes a pre-compression stage, a pressure stabilization stage, an ultrasonic consolidation stage, and a pressure holding stage. The pressure value and duration of each stage are automatically switched and configured by the process parameter adaptive matching subsystem according to the ceramic material.

[0013] The multi-station transfer system is a linear automatic transfer structure; the process self-learning optimization subsystem calculates the airtightness defect rate of workpieces according to production batches. When the batch airtightness defect rate exceeds the preset warning value, the main control unit controls the multi-station transfer system to suspend material feeding and outputs a process review prompt signal.

[0014] The maximum downward stroke threshold of the rolling edge sealing welding head is dynamically set by the main control unit according to the ceramic material and the maximum allowable deformation of the buffer pad. Different stroke locking thresholds are configured for Al2O3 ceramic tube shells and AlN ceramic tube shells respectively, so as to achieve dual overload protection of mechanical cooperation and electrical control.

[0015] The equipment is adapted for the combined sealing of Al2O3 ceramic tube shells and AlN ceramic tube shells with Kovar alloy, copper alloy, and aluminum alloy metal cover plates, respectively; the equipment is used in the hermetically sealed metal-ceramic tube shells in the fields of aerospace, radio frequency power devices, MEMS, and optoelectronic devices.

[0016] Advantages of the invention: This invention features a simple structure and convenient operation. It can automatically identify ceramic materials and adaptively configure process parameters across the entire process chain, allowing for simultaneous switching of pressure, temperature control, and ultrasonic process parameters without manual intervention. This solves the problems of tedious and error-prone manual parameter adjustments in traditional equipment. Based on real-time compensation of sealing pressure using the deformation of the buffer pad layer, and by collecting the deformation of the buffer pad layer through distributed strain gauges, pressure fluctuations can be suppressed within ±1N. This eliminates the problem of uneven pressure during the movement of the rolling welding head, significantly improving the consistency of circumferential sealing of the tube shell, while avoiding ceramic cracking caused by local pressure overload. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 yes Figure 1 A magnified view along direction A in the image. Detailed Implementation

[0018] like Figure 1 and 2 As shown, an ultrasonic consolidation sealing device for pipe shells includes a frame 1, a servo lifting mechanism, an alignment platform 4, and an ultrasonic consolidation spindle system 3, which are assembled from top to bottom. The frame 1 integrates a main control unit, a servo pressure closed-loop module, a temperature control unit, and various electrical control subsystems. An airtightness online detection unit is arranged on the outside of the device, and a heat dissipation vent 6 for exhaust is provided on the top.

[0019] The machine adopts a linear three-station layout, with an upper and lower area distributed sequentially on the frame 1. The upper area is equipped with an ultrasonic consolidation spindle system and a corresponding alignment platform. The frame 1 in this area also has a built-in temperature control unit and an online airtightness detection unit. A transparent outer wall cover is installed sequentially in this area.

[0020] The servo lifting mechanism (which is a mature structure in existing technology and will not be described in detail here) is connected to an ultrasonic consolidation spindle system 3 at one end. The ultrasonic consolidation spindle includes two horizontally movable mounting arms 1a. At the ends of the mounting arms 1a, a horizontally distributed pressure sensor, an ultrasonic transducer, an amplitude transformer, and a rolling edge-sealing welding head 2 are sequentially mounted. The servo lifting mechanism drives the clamp to move up and down, and the clamp drives the rolling edge-sealing welding head 2 to clamp from both sides. The system operates at a frequency of 20-40kHz and the vibration frequency is continuously adjustable from 10-30μm. The end of the rolling edge sealing welding head 2 has a rounded passivated structure.

[0021] A 50-80μm thick high-entropy alloy wear-resistant coating is sprayed onto its circular passivated working surface 2a; an annular vacuum adsorption groove is opened inside the welding head, and a matching vacuum generator maintains the vacuum degree in the groove at -0.08--0.1MPa. The vacuum adsorption response time is no more than 0.5s, which can fix a metal cover plate with a thickness of 0.1-0.5mm, thereby effectively preventing the cover plate from warping and shifting during welding.

[0022] The alignment platform adopts an XYθ three-axis fine-tuning structure and is equipped with a high-definition vision automatic alignment mechanism. The platform's vision alignment accuracy is ±0.01mm, and the coaxiality between the cover plate and the tube shell welding frame is no more than 0.02mm, enabling precise alignment of square and round tube shells.

[0023] A composite cushioning layer 5 is placed on top. The composite cushioning layer 5 has a layered composite structure: the upper and lower layers are hard alloy plates 5b with a thickness of 1mm and a hardness of HRA90, and the middle layer is a 2mm thick material with a temperature resistance of not less than 300°C. ° The polyimide layer of C serves as padding layer 5a, with a thickness of 4 mm. The overall positioning accuracy of the fixture is ±0.01 mm, and the basic pressure overload threshold is 50 N.

[0024] Inside the composite buffer layer 5, multiple sets of distributed strain gauges are uniformly embedded along the circumferential sealing path of the tube shell as deformation acquisition sensors; the strain gauge signal output ends are led out with cables and electrically connected to the pressure and deformation dynamic compensation subsystem.

[0025] The temperature control unit is equipped with four K-type contact thermocouples to monitor the temperature at four locations: the welding head interface, the surface of the metal cover plate, the sidewall of the ceramic tube shell, and the buffer pad. The temperature measurement range is room temperature - 250°C. ° C, Temperature control accuracy ±2 ° C. The equipment mandates that the interface operating temperature not exceed half the melting point of the corresponding base material: the interface temperature of Kovar alloys should not exceed 500°C. ° C, Copper alloy not exceeding 350 ° C, Aluminum alloy not exceeding 250 ° C. When the measured temperature exceeds 250°C °At time C, the temperature control unit 52 immediately cuts off the ultrasonic output, while simultaneously controlling the spindle to rise and triggering an audible and visual alarm; the temperature control threshold can be automatically switched according to the ceramic material.

[0026] The airtightness online detection unit integrates a helium mass spectrometer micro-flow leak detector, fluororubber flexible sealing fixtures, upper and lower sealing cylinders, and a 99.9% high-purity helium injection nozzle. The leak detector has a resolution of no more than 5 × 10⁻¹¹ Pa⋅m. 3 / s, with a single workpiece detection response time of no more than 2s. Since it is an existing component in existing vacuum sealing and welding integrated machines, its structure will not be described in detail here.

[0027] Equipment judgment rule: Leakage rate not greater than 1×10⁻⁹ Pa⋅m 3 / s indicates that the workpiece is qualified; unqualified workpieces are automatically diverted to the rework area by the multi-station transfer system; all inspection data are transmitted back to the process self-learning optimization subsystem in real time.

[0028] The three-station layout includes a servo motor and synchronous belt drive; the single-station turnaround time is 3-5 seconds, and the overall machine capacity is no less than 1 piece per hour.

[0029] The system is equipped with replaceable anti-static tooling trays with a surface resistance of 106-109Ω, which are compatible with square or round metal or metal-ceramic tubes with dimensions of 5-80mm.

[0030] An integrated main control unit, a servo pressure closed-loop module temperature control unit, and an operation panel are installed on the lower layer of rack 1 for setting equipment parameters, displaying status, and alarming faults.

[0031] The servo pressure closed-loop module has a pressure adjustment range of 0.1-800N and a basic control accuracy of ±1N; it has an internally preset four-segment loading program. Operating parameters for each stage are as follows: pre-pressure stage 1-2s, pressure 0.1-10N; stabilization stage 0.5-1s, pressure 0.3-20N; ultrasonic consolidation stage 2-5s, pressure 0.5-30N; holding pressure stage 1-3s, pressure 0.3-50N. All pressure and time parameters within the module can be automatically rewritten by the process parameter adaptive matching subsystem.

[0032] Workflow: The automatic ceramic material identification module and the adaptive matching subsystem for process parameters are installed on the frame above the loading position of the equipment, i.e. above the alignment platform. It adopts a combination of visual image recognition and workpiece feature size comparison for identification. The identification response time is no more than 0.3s and the identification accuracy is no less than 99.5%. It can accurately distinguish between Al2O3 and AlN ceramic tube shells.

[0033] The process parameter adaptive matching subsystem has two built-in independent process data packages: Group 1 (Adapted for A) l2 O3 ceramic): The sealing welding head 2 on the two mounting arms 1a has a clamping force of 0.6N and a padding hardness of 85A on the ceramic tube shell, matched with the corresponding pressure curve, temperature threshold and ultrasonic parameters; The second group (compatible with AlN ceramics): clamping force 0.3N, padding hardness 80A, with corresponding pressure curves, temperature thresholds, and ultrasonic parameters.

[0034] After the material identification module determines the workpiece, it transmits the signal to the main control unit. The main control unit then calls the corresponding data packet to simultaneously and automatically configure all parameters of the ultrasonic consolidation spindle system 3, including clamping force, pressure loading curve, temperature control threshold, ultrasonic amplitude, and power. The entire process requires no manual operation and enables rapid production changeover for different ceramic workpieces.

[0035] Deformation acquisition sensor and pressure and deformation dynamic compensation subsystem The distributed strain gauges collect deformation data of the buffer pad in real time and transmit it to the pressure and deformation dynamic compensation subsystem in the form of analog signals; the subsystem also collects the travel position and running speed signals of the rolling welding head 2.

[0036] Compensation control rules: The system signal compensation response delay is no more than 10ms. Combined with real-time deformation correction of servo pressure output, the deformation fluctuation of the composite buffer pad 5 is controlled within ±0.02mm, ultimately stabilizing the servo pressure output fluctuation within ±0.1N. When the welding head 2 reaches the corner position of the pipe shell, the system automatically reduces the welding head travel speed and slightly increases the output pressure to ensure uniform sealing quality at the corner position.

[0037] The online airtightness detection unit transmits the leakage rate data of each workpiece back to the process self-learning optimization subsystem in real time. The system calculates the airtightness defect rate by production batch and executes the following iterative rules: The system presets a leakage rate threshold; when the leakage rate of five consecutive workpieces exceeds this threshold, it automatically shortens the ultrasonic treatment time and raises the temperature threshold of the temperature control unit to improve the interface bonding strength. When the leakage rate of five consecutive workpieces is below the lower threshold and the ceramic tube shell is undamaged, the amplitude parameters of the ultrasonic consolidation spindle system are automatically optimized. The single adjustment amplitude does not exceed 3% of the total parameter range. Under the premise of ensuring airtightness, the ultrasonic energy input is reduced and the ceramic stress is reduced. When the overall batch airtightness failure rate exceeds the preset warning value, the main control unit controls the multi-station transfer system to suspend material feeding and outputs a process verification prompt signal.

[0038] This module enables reverse optimization of front-end processes based on end-of-production quality data, and constructs a fully closed-loop self-learning control system.

[0039] The main control unit dynamically sets the maximum downward stroke of the welding head based on the ceramic material and the maximum allowable deformation of the composite buffer layer 5, and configures independent stroke lock-up thresholds for Al2O3 and AlN ceramics respectively.

[0040] Protection logic: When the deformation acquisition sensor detects that the deformation of the pad 5a exceeds the safety threshold, the main control unit immediately sends a lock signal to lock the downward movement of the welding head and triggers a fault alarm. This structure combines electrical travel limits and mechanical structural limits to form dual overload protection, which can effectively prevent the ceramic from breaking under pressure.

[0041] This embodiment operates entirely automatically. The specific steps are as follows: The multi-station transfer system transports the tube shell workpiece to the loading position, the ceramic material automatic identification module completes the material determination, and the process parameter adaptive matching subsystem automatically loads the corresponding complete set of process parameters.

[0042] The workpiece is transferred to the composite buffer pad 5 in the center of the alignment platform 4, and then the outer wall cover is closed.

[0043] The servo lifting mechanism drives the ultrasonic consolidation spindle system to descend, and the rolling edge-sealing welding head 2 clamps the tube shell on both sides. The servo pressure closed-loop module executes the pre-compression, pressure stabilization, ultrasonic consolidation, and pressure holding processes in sequence according to the four-segment loading curve. During the edge-sealing process, the pressure and deformation dynamic compensation subsystem corrects the pressure in real time according to the deformation of the pad layer to ensure uniform pressure throughout the entire area.

[0044] After the sealing process is completed, the ultrasonic spindle is lifted, and the multi-station transfer system moves the workpiece to the airtightness testing station.

[0045] The helium mass spectrometer leak detector completes the airtightness test. Qualified workpieces are unloaded, while unqualified workpieces are automatically diverted to the rework area. The test data is synchronously transmitted back to the process self-learning optimization subsystem.

[0046] Based on batch testing data, the process self-learning optimization subsystem autonomously iterates and optimizes the core parameters of ultrasonic and temperature control, allowing the equipment to enter the next production cycle.

[0047] Mass production verification results: The equipment in this embodiment has been tested by a third-party authoritative organization and has completed a batch production test of 10,000 units. The test results are as follows: Air tightness: The leakage rate of all sampled samples was no greater than 1×10⁻⁹ Pa⋅m. 3 / s, airtightness pass rate 100%; Ceramic integrity: The Al2O3 and AlN ceramic tube shells showed no chipping, cracking, or porcelain peeling, with a 100% ceramic integrity rate; Overall yield rate: Relying on a triple control mechanism of material adaptive configuration, dynamic pressure compensation, and process self-learning, the overall yield rate of the equipment is consistently no less than 99%. The equipment has undergone -55... ° C-125 ° C high and low temperature cycling, 85 ° After undergoing multiple reliability tests, including C / 85% RH damp heat aging and rapid thermal shock, no abnormalities were found in the packaging airtightness or interface bonding status.

Claims

1. An ultrasonic consolidation sealing device for pipe shells, comprising a frame, an ultrasonic consolidation spindle system, an alignment platform, a servo pressure closed-loop module, a temperature control unit, an online airtightness detection unit, a multi-station transfer system, and a main control unit; the ultrasonic consolidation spindle system is equipped with an ultrasonic transducer, an amplitude transformer, and a rolling edge-sealing welding head, used to output ultrasonic vibrations and cooperate with pressure to achieve solid-state consolidation sealing between the metal cover plate and the metallized layer of the pipe shell; the precision alignment platform is an XYθ three-axis fine-tuning structure, equipped with a vision automatic alignment mechanism; all functional components are electrically connected to the main control unit; Its features are: The equipment also includes an automatic ceramic material identification module and a process parameter adaptive matching subsystem. The automatic ceramic material identification module is communicatively connected to the main control unit and is used to identify Al2O3 ceramic tube shells or AlN ceramic tube shells. The process parameter adaptive matching subsystem has pre-stored corresponding process parameter sets for various tube shell materials. It is communicatively connected to the automatic ceramic material identification module, the servo pressure closed-loop module, the temperature control unit, and the ultrasonic consolidation spindle system, respectively. After identification, it automatically calls the corresponding parameter set and synchronously configures the working parameters of each associated module. The pressure-deformation dynamic compensation subsystem is also connected to the servo pressure closed-loop module and the ultrasonic consolidation spindle system. When the rolling edge sealing welding head seals the edge along the circumference of the pipe shell, the subsystem combines the welding head's walking position and running speed, and adjusts the output pressure of the servo pressure closed-loop module in real time according to the deformation of the buffer pad layer fed back by the deformation acquisition sensor, so that the deformation of the buffer pad layer is maintained within the preset range. The airtightness online detection unit is communicatively connected to the process self-learning optimization subsystem, which is also communicatively connected to the ultrasonic consolidation spindle system and the temperature control unit. Based on the batch workpiece leakage rate data fed back by the airtightness online detection unit, the subsystem iteratively adjusts the amplitude of the ultrasonic consolidation spindle system, the ultrasonic action time, and the temperature threshold of the temperature control unit to form a closed-loop control of sealing-airtightness detection-process parameter iteration. The main control unit limits the maximum downward stroke of the rolling edge sealing welding head based on the maximum allowable deformation of the buffer pad layer; when the deformation of the buffer pad layer exceeds the safety threshold, the main control unit locks the downward movement of the welding head and triggers a fault alarm.

2. The ultrasonic consolidation and sealing device according to claim 1, characterized in that: The automatic ceramic material identification module adopts a combination of visual image and workpiece feature size identification method, with an identification response time of no more than 0.3s and an identification accuracy of no less than 99.9%. The adaptive matching subsystem for process parameters has two sets of independent process data packages, corresponding to Al2O3 and AlN ceramic tube shells respectively. Each set of data packages includes elastic clamping force, pressure loading curve, temperature threshold, ultrasonic amplitude and ultrasonic power parameters.

3. The ultrasonic consolidation and sealing device according to claim 1, characterized in that: The deformation acquisition sensor is a distributed strain gauge, with multiple strain gauges uniformly embedded circumferentially within the composite buffer pad of the ceramic adaptive buffer fixture along the sealing path of the tube shell; the signal compensation response delay of the pressure-deformation dynamic compensation subsystem is no more than 10ms, controlling the deformation fluctuation of the buffer pad within ±0.02mm during the sealing process, and suppressing the output pressure fluctuation of the servo pressure closed-loop module within ±1N.

4. The ultrasonic consolidation and sealing device according to claim 1, characterized in that: The process self-learning optimization subsystem presets a leakage rate judgment threshold. When the leakage rate of five consecutive workpieces is higher than the set threshold, the process self-learning optimization subsystem automatically shortens the ultrasonic action time and raises the temperature threshold of the temperature control unit; when the leakage rate of five consecutive workpieces is lower than the lower limit of the set threshold and the ceramic tube shell is undamaged, the process self-learning optimization subsystem automatically optimizes the amplitude parameters of the ultrasonic consolidation spindle system, and the single parameter adjustment amplitude does not exceed 3% of the total range of the corresponding parameters.

5. The ultrasonic consolidation and sealing device according to claim 1, characterized in that: The rolling edge sealing welding head has a circular passivated structure, with a wear-resistant coating on the working surface and an annular vacuum adsorption groove inside; the ultrasonic consolidation spindle system is linked with the servo pressure closed-loop module for speed regulation, and the welding head automatically reduces its travel speed at the corner position of the tube shell, while the servo pressure closed-loop module synchronously increases the output pressure slightly.

6. The ultrasonic consolidation and sealing device according to claim 1, characterized in that: The temperature control unit is equipped with four K-type contact thermocouples to achieve zoned temperature measurement. The temperature control logic of the temperature control unit is to limit the interface working temperature to less than half of the melting point of the corresponding base material. The temperature control unit is connected to the process parameter adaptive matching subsystem and automatically matches differentiated temperature protection thresholds for ceramic tube shells of different materials.

7. The ultrasonic consolidation and sealing device according to claim 1, characterized in that: The servo pressure closed-loop module is configured with a four-segment segmented loading curve, which includes a pre-compression stage, a pressure stabilization stage, an ultrasonic consolidation stage, and a pressure holding stage. The pressure value and duration of each stage are automatically switched and configured by the process parameter adaptive matching subsystem according to the ceramic material.

8. The ultrasonic consolidation and sealing device according to claim 1, characterized in that: The multi-station transfer system is a linear automatic transfer structure; the process self-learning optimization subsystem calculates the airtightness defect rate of workpieces according to production batches. When the batch airtightness defect rate exceeds the preset warning value, the main control unit controls the multi-station transfer system to suspend material feeding and outputs a process review prompt signal.

9. The ultrasonic consolidation and sealing device according to claim 1, characterized in that: The maximum downward stroke threshold of the rolling edge sealing welding head is dynamically set by the main control unit according to the ceramic material and the maximum allowable deformation of the buffer pad. Different stroke locking thresholds are configured for Al2O3 ceramic tube shells and AlN ceramic tube shells respectively, so as to achieve dual overload protection of mechanical cooperation and electrical control.

10. The ultrasonic consolidation and sealing device according to any one of claims 1 to 9, characterized in that: The equipment is adapted for the combined sealing of Al2O3 ceramic tube shells and AlN ceramic tube shells with Kovar alloy, copper alloy, and aluminum alloy metal cover plates, respectively; the equipment is used in the hermetically sealed metal-ceramic tube shells in the fields of aerospace, radio frequency power devices, MEMS, and optoelectronic devices.

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