A battery plate non-destructive scribing machine

CN122895706APending Publication Date: 2026-10-13ZHEJIANG HUACHEN NEW ENERGY CO LTD
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Patent Information

Application Number
CN202611360836.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-09-03
Publication Date
2026-10-13

AI Technical Summary

Technical Problem

由于划片工艺通常为连续进行,当前区域加工完成后,激光需迅速移动至下一相邻区域继续作业,而前一道工序残留的水迹尚未来得及完全挥发或清除,当激光束对后续相邻区域进行划片时,对激光束造成持续的散射与干扰,影响光斑质量与定位精度,残留水迹的存在还会改变电池片表面的光学特性,导致激光在下一划片区域的能量耦合效率产生动态波动,进而影响热应力场的稳定建立,最终降低连续划片工艺的一致性与产品良率

Benefits of technology

[0016]本发明提供的技术方案带来的有益效果包括:

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Abstract

The application discloses a battery plate nondestructive scribing machine, which comprises a hot cracking laser light path mechanism and a cooling spray mechanism. The hot cracking laser light path mechanism comprises a hot cracking laser head, an annular air knife assembly and an air guide assembly. The annular air knife assembly comprises a high-pressure outer ring and a high-pressure inner ring. A vertically downward air outlet gap is arranged between the lower edges of the high-pressure outer ring and the high-pressure inner ring. The air guide assembly comprises a connecting support, an air guide inner ring, a connecting outer ring and two dust collection pipes. A plurality of outwardly inclined air guide rib plates are arranged on the outer wall of the air guide inner ring. An air guide gap is arranged between the air guide inner ring and the connecting outer ring. The cooling spray mechanism comprises an air channel nozzle, a water mist spray head and an air-water joint. A spray gap is arranged between the air channel nozzle and the water mist spray head. In the application, the annular air curtain can be used to block water mist splashing, and the annular air curtain and the air channel nozzle are cooperated to improve the drying efficiency in the process of cracking.
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Description

Technical Field

[0001] This invention relates to the field of photovoltaic technology, and in particular to a non-destructive dicing machine for solar panels. Background Technology

[0002] The water-based non-destructive laser scribing machine for photovoltaic panels is a processing device based on the principle of laser thermal stress controlled fracture. It uses a laser spot to heat the surface of the solar cell along a predetermined scribing path, and then uses a nozzle to spray atomized water onto the scribing path for rapid cooling. The solar cell then cracks along this path under thermal stress. Compared to traditional laser ablation scribing, this method effectively avoids performance degradation and appearance defects caused by scratches.

[0003] As disclosed in Chinese Patent CN113284981B, a non-destructive dicing device and process for silicon and silicon-based semiconductor wafers actively controls the temperature of the entire dicing platform and the silicon wafer body at a low temperature of 0-4℃ using a water-cooled plate. Then, a thermal cracking laser is used to locally heat the surface of the silicon wafer along a predetermined cutting line, followed by deionized cooling water spraying to cool the heated area. Due to the large and stable temperature gradient formed between the silicon wafer body and the heated area, concentrated thermal stress is generated inside the material, thereby guiding the crack to automatically propagate along the cutting line, achieving non-destructive dicing. This solution, through the combination of global cooling and localized rapid heating, effectively improves the stability of the dicing process and mitigates the risk of microcracks to a certain extent.

[0004] However, the aforementioned existing technology still has the following drawbacks: (1) Water mist is sprayed at a certain pressure. After being sprayed onto the surface of the battery cell, it is easy to splash. The splashed water droplets will adhere to the unprocessed area. These water droplets will cause diffuse reflection and absorption of the subsequent incident laser, resulting in additional loss of laser energy. If the splashed water droplets fall onto the laser transmission path, the water droplets will interfere with the laser beam through reflection, refraction and scattering, causing the transmission direction of the laser beam to deflect, the focal plane to shift, and even causing a significant attenuation of laser power, which seriously affects the processing accuracy and dicing quality.

[0005] (2) During the continuous dicing process, water stains or tiny water droplets will inevitably remain on the newly formed cutting grooves and the surrounding cell surface after spray cooling. Since the dicing process is usually carried out continuously, after the current area is processed, the laser needs to move quickly to the next adjacent area to continue the operation. However, the water stains left over from the previous process have not yet had time to completely evaporate or be removed. When the laser beam dices the subsequent adjacent area, it causes continuous scattering and interference to the laser beam, affecting the spot quality and positioning accuracy. The presence of residual water stains will also change the optical properties of the cell surface, causing dynamic fluctuations in the energy coupling efficiency of the laser in the next dicing area, which in turn affects the stable establishment of the thermal stress field, and ultimately reduces the consistency of the continuous dicing process and the product yield. Summary of the Invention

[0006] To address the shortcomings of existing technologies, this invention provides a non-destructive dicing machine for solar panels, which solves the problems mentioned in the background section. The technical solution provided by this invention is as follows: A non-destructive dicing machine for solar panels includes a mounting base plate, a mounting bracket, a moving drive mechanism, and a cutting platform. A grooving laser optical path mechanism, a thermal cracking laser optical path mechanism, and a cooling spray mechanism are sequentially mounted on the mounting bracket. The thermal cracking laser optical path mechanism includes a thermal cracking laser head, an annular air knife assembly, and an air guide assembly. The thermal cracking laser head is fixed on the mounting bracket, and a positioning flange is fixed on the outer wall of the thermal cracking laser head. The annular air knife assembly includes a high-pressure outer ring and a high-pressure inner ring. The high-pressure outer ring flange is connected to the lower side of the positioning flange. The high-pressure inner ring is fitted and installed inside the high-pressure outer ring. A compressed air chamber is formed between the high-pressure outer ring and the high-pressure inner ring. A vertically downward air outlet slit communicating with the compressed air chamber is provided between the lower edges of the high-pressure outer ring and the high-pressure inner ring. An air curtain vent is connected to the side wall of the high-pressure outer ring. The air guiding assembly includes a connecting bracket, an inner air guiding ring, a connecting outer ring, and two dust collection pipes. The connecting bracket is connected to the lower side of the positioning flange. Several air guiding ribs are provided on the outer wall of the inner air guiding ring. The connecting outer ring is integrally formed and provided on the outer end of the air guiding ribs. An air guiding gap is provided between the inner air guiding ring and the connecting outer ring. The air guiding gap is located directly below the air outlet slit. Several air guiding ribs on the side of the inner air guiding ring facing the cooling spray mechanism are symmetrically arranged from the middle to both sides, tilting outwards with the tilt angle gradually changing from the inside to the outside. The two dust collection pipes are provided on the left and right sides of the inner air guiding ring.

[0007] Preferably, an integrally formed closed plate is provided on the top of the two inner air guide ribs facing the cooling spray mechanism, and a negative pressure cavity is formed between the lower sides of the two air guide ribs.

[0008] Preferably, the outer edge of the connecting outer ring is provided with a connecting flange, the connecting bracket includes a plurality of vertically distributed connecting screws, the upper and lower ends of the connecting screws are respectively threaded with positioning nuts, the positioning nuts respectively abut against the positioning flange and the connecting flange on both sides, the lower side of the positioning flange is provided with a support nut, the support nut is threaded to the connecting screw, a support ring is fixed in the middle of the connecting screw, and a buffer spring is connected between the support ring and the connecting flange.

[0009] Preferably, a convergence ring is provided on the upper side of the inner air guide ring and the connecting outer ring, and an air guide slope is provided on the inner side of the convergence ring on both the inner and outer sides. A deflection ring is provided on the lower outer wall of the inner air guide ring, and a transverse gap is provided between the deflection ring and the lower edge of the air guide rib.

[0010] Preferably, the cooling spray mechanism includes an air duct nozzle, a water mist nozzle, and an air-water connector. The top of the air-water connector is connected to an air inlet, and the interior of the air-water connector is provided with a flow-dividing chamber communicating with the air inlet. The lower end of the air-water connector is integrally formed with a threaded ring seat. The air duct nozzle is fixed to the inner side of the threaded ring seat, and the water mist nozzle is threadedly connected to the outer wall of the threaded ring seat. A water inlet is connected to the side wall of the water mist nozzle, and the water mist nozzle is concentrically sleeved on the outer side of the air duct nozzle. A spray gap is provided between the air duct nozzle and the water mist nozzle.

[0011] Preferably, the air-water connector has a flow divider chamber communicating with the air inlet, and a mixing chamber communicating with the water inlet is provided between the inner wall of the water mist nozzle, the outer wall of the air channel nozzle and the threaded ring seat. A mixing air channel is provided between the flow divider chamber and the mixing chamber, and an air jet channel is provided between the flow divider chamber and the air channel nozzle.

[0012] Preferably, the top of the air-water connector is provided with an adjustment channel concentrically arranged with the air nozzle. The adjustment channel includes a limiting hole and a guide hole. Sealing bushings are fixed at the upper and lower ends of the limiting hole. An adjustment screw is rotatably connected inside the sealing bushing. An adjustment component is slidably installed inside the guide hole. The adjustment component is threadedly connected to the adjustment screw.

[0013] Preferably, the jet duct includes an interconnected inner conical channel and a guide channel. The adjustment assembly includes a threaded sleeve, an adjusting slider, and a hinged rocker arm. The threaded sleeve is slidably installed in the guide hole. The adjusting slider includes a frustum block, a support rod, and a guide ring. An air gap is provided between the outer wall of the frustum block and the inner conical channel. The guide ring is slidably disposed in the guide channel. The support rod is connected between the frustum block and the guide ring. The guide ring has several communicating holes. An adjusting ring seat is provided at the bottom of the threaded sleeve. The two ends of the hinged rocker arm are respectively hinged between the rear end of the guide ring and the adjusting ring seat.

[0014] Preferably, the inner end of the guide channel is provided with an inner protruding edge. When the rear side of the truncated cone block is flush with the inner edge of the inner cone channel, the hinge rocker arm abuts against the inner protruding edge. When the front side of the truncated cone block is flush with the outer edge of the inner cone channel, the threaded sleeve abuts against the sealing bushing on the lower side.

[0015] Preferably, the inner wall of the guide hole is provided with an axial strip, and the outer wall of the threaded sleeve is provided with a limiting groove that slides and engages with the axial strip.

[0016] The beneficial effects of the technical solution provided by this invention include: 1. In this invention, an annular air knife assembly is provided on the outside of the thermal cracking laser head. The annular air knife assembly forms an annular high-pressure annular air curtain on the outside of the thermal cracking laser head, which can be used to block water droplets splashed after being sprayed onto the surface of the battery cell by the cooling spray mechanism, so as to avoid the water droplets causing diffuse reflection and absorption of the subsequently incident laser, resulting in additional loss of laser energy.

[0017] 2. In this invention, the cooling spray mechanism is designed so that the air nozzle and water mist nozzle spray a dry airflow in the center and a ring-shaped spray around the perimeter to cool the photovoltaic cells. This allows the water mist to be sprayed onto the heated photovoltaic cells at a certain pressure, causing the photovoltaic cells to crack under thermal stress. At the same time, the dry airflow in the center acts on the grooves, blowing away the water residue left in the grooves and on the surface after processing. This solves the problem of laser energy fluctuation and inaccurate positioning caused by water residue during continuous dicing.

[0018] 3. In this invention, by setting an air guide component at the bottom of the annular air knife assembly, the vertically downward air curtain can enter the air guide gap through the air guide slope. The high-pressure air curtain is then guided by the air guide ribs, causing the air curtain facing the cooling spray mechanism to form a high-pressure airflow towards both sides at the bottom, which is then sucked away through the dust collection pipe. This creates a negative pressure in the negative pressure chamber. This negative pressure is stronger than the combination of the high-pressure airflow and the drying airflow of the cooling spray mechanism. Under the Coanda effect, the drying airflow is split to both sides, thereby generating airflow to both sides in the groove. Under this negative pressure, the drying airflow dries the water mist while also carrying away and entraining the water vapor attached to the groove, thus sucking out the residual water in the groove and improving the drying effect.

[0019] 4. In this invention, the adjusting screw pushes the adjusting component to slide, thereby changing the gap between the inner cone channel and the cone block, thereby changing the gas distribution ratio between the airway nozzle and the water mist nozzle, thereby adjusting the gas ratio between the airway nozzle and the water mist nozzle, adjusting the cooling effect and the cleaning and drying effect, thereby achieving a dynamic balance between the water mist atomization quality and the intermediate drying gas, so as to achieve better flake splitting and drying effects. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of a non-destructive dicing machine for solar panels according to the present invention; Figure 2 for Figure 1 Enlarged view of a portion of point A in the middle; Figure 3 This is a schematic diagram of the thermal cracking laser optical path mechanism in this invention; Figure 4 This is a schematic diagram of the air guide assembly in the present invention. Figure 1 ; Figure 5 This is a schematic diagram of the air guide assembly in the present invention. Figure 2 ; Figure 6 This is a schematic diagram of the annular air knife assembly in this invention; Figure 7 This is a cross-sectional view of the annular air knife assembly in this invention; Figure 8 This is a schematic diagram of the cooling spray mechanism in this invention; Figure 9 This is a cross-sectional view of the cooling spray mechanism in this invention; Figure 10 A schematic diagram of the adjustment component in this invention.

[0021] Reference numerals: 1. Mounting base plate; 2. Mounting bracket; 3. Moving drive mechanism; 4. Cutting platform; 5. Grooving laser head; 6. Thermal cracking laser head; 7. Annular air knife assembly; 71. High-pressure outer ring; 72. High-pressure inner ring; 73. Air curtain vent; 74. Air outlet; 8. Air guide assembly; 81. Connecting screw; 82. Air guide inner ring; 83. Connecting outer ring; 84. Dust collection duct; 9. Positioning flange; 10. Buffer spring; 11. Air guide rib; 12. 13. Connecting flange; 14. Steering ring; 15. Airway nozzle; 16. Water mist nozzle; 17. Air-water connector; 18. Air inlet; 19. Dividing chamber; 20. Threaded ring seat; 21. Spray gap; 22. Mixing chamber; 23. Water inlet; 24. Mixing airway; 25. Air jet airway; 26. Adjusting screw; 27. Threaded sleeve; 27. Adjusting slider; 271. Frustum block; 272. Support rod; 273. Guide ring plate; 28. Hinge rocker arm. Detailed Implementation

[0022] like Figures 1-2As shown, a non-destructive dicing machine for solar panels includes a mounting base plate 1, a mounting bracket 2, a moving drive mechanism 3, and a cutting platform 4. The moving drive mechanism 3 includes a guide rail beam fixed on the mounting base plate 1, with dual-movement linear motors on both sides of the guide rail beam. The cutting platform 4 includes two independently operating first cutting platforms and a second cutting platform, which are respectively mounted on the movers of the dual-movement linear motors on both sides of the guide rail beam. The mounting base plate 1 has loading and unloading robotic arms mounted on its front and rear sides of the guide rail beam. The mounting bracket 2 is fixedly mounted on the mounting base plate 1, and a grooving laser optical path mechanism, a thermal cracking laser optical path mechanism, and a cooling spray mechanism are sequentially mounted on the mounting bracket 2. The grooving laser optical path mechanism includes several grooving laser heads 5 fixed on the mounting bracket 2.

[0023] like Figures 2-6 As shown, the thermal cracking laser optical path mechanism includes a thermal cracking laser head 6, an annular air knife assembly 7, and an air guide assembly 8. The thermal cracking laser head 6 is fixed on the mounting bracket 2. The thermal cracking laser head 6 and the grooving laser head 5 are on the same straight line. A positioning flange 9 is fixed on the outer wall of the thermal cracking laser head 6. The inner ring of the positioning flange 9 is provided with a plurality of flange holes for fixing and connecting to the annular air knife assembly 7. The outer ring of the positioning flange 9 is provided with a plurality of connection holes for fixing the air guide assembly 8. like Figures 6-7 As shown, the annular air knife assembly 7 includes a high-pressure outer ring 71 and a high-pressure inner ring 72. The high-pressure outer ring 71 is flanged and connected to the lower side of the flange hole of the positioning flange 9. A mating ring groove is provided in the middle of the inner wall of the high-pressure outer ring 71. A mating convex ring with interference fit to the mating ring groove is provided on the upper edge of the high-pressure outer ring 71. A compressed air chamber is formed between the high-pressure outer ring 71 and the high-pressure inner ring 72. An air curtain port 73 communicating with the compressed air chamber is connected to the side wall of the high-pressure outer ring 71. The air curtain port 73 is connected to a high-pressure generator and an air pump through a pipe. A guide sidewall is provided on one side of the compressed air chamber for the high-pressure outer ring 71 and the high-pressure inner ring 72. A vertically downward air outlet slit 74 communicating with the compressed air chamber is provided between the lower edges of the high-pressure outer ring 71 and the high-pressure inner ring 72, so that the annular air knife can generate a vertically downward annular high-pressure air curtain, so that the air curtain can block splash to the greatest extent.

[0024] like Figure 2 As shown, the air guide assembly 8 includes a connecting bracket, an inner air guide ring 82, a connecting outer ring 83, and two dust collection pipes 84; like Figure 3As shown, the connecting bracket includes several vertically distributed connecting screws 81. Positioning nuts are threaded to the upper and lower ends of each connecting screw 81, respectively abutting against the upper side of the positioning flange 9 and the lower side of the connecting outer ring 83. A support nut is also provided on the upper side of the connecting screw 81, abutting against the lower side of the positioning flange 9. The positioning nut and support nut are used to fix the connecting screw 81 to the positioning flange 9. A support ring is fixed in the middle of the connecting screw 81. A buffer spring 10 is connected between the support ring and the connecting flange 12. Through the action of the buffer spring 10, the connecting outer ring 83 can slide slightly in the axial direction of the connecting screw 81, thereby providing a buffering effect and preventing rigid impact between the wind guide assembly and the photovoltaic cell.

[0025] like Figures 4-5 As shown, the outer wall of the inner air guide ring 82 is provided with several air guide ribs 11. The connecting outer ring 83 is integrally formed on the outer end of the air guide ribs 11. The outer edge of the connecting outer ring 83 is provided with a connecting flange 12. The positioning nut abuts against the lower side of the connecting flange 12. An air guide gap is provided between the inner air guide ring 82 and the connecting outer ring 83. A converging ring is provided on the upper side of the inner air guide ring 82 and the connecting outer ring 83. An air guide slope is provided on the inner side of the converging ring on both the inner and outer sides. The cross-section of the converging ring is "bucket" shaped. The air guide gap is located directly below the air outlet slit 74, so that the vertically downward air curtain can smoothly enter the air guide gap.

[0026] The air guide inner ring 82 has several air guide ribs 11 symmetrically arranged on both sides of the laser path of the thermal cracking laser head 6 on the outer wall of the semi-ring facing the cooling spray mechanism. These air guide ribs 11 are symmetrically arranged from the middle to both sides, tilting outwards with the tilt angle gradually changing from the inside to the outside. The air guide ribs 11 of the front and rear semi-rings of the air guide inner ring 82 are symmetrically arranged. A deflecting ring 13 is provided on the lower outer wall of the air guide inner ring 82. A transverse gap is provided between the deflecting ring 13 and the lower edge of the air guide ribs 11. The vertically downward annular air curtain, after passing through the air guide gap, is diverted to both sides under the guidance of the air guide ribs 11 and flows to both sides along the transverse gap. Two dust collection pipes 84 are arranged on the left and right sides of the air guide inner ring 82. The dust collection pipes 84 are connected to a vacuum pump via pipes, and dust collectors are connected inside the pipes. The dust collection box, by setting dust collection pipes 84 on both sides and drawing in the negative pressure on both sides, allows the horizontally diverted high-pressure air curtain to enter the dust collection pipes 84, forming a complete airflow circulation system. During the flow of high-pressure air, the debris generated during the sliding process is entrained and cleaned. The top of the two inner air guide ribs 11 facing the cooling spray mechanism is provided with an integrally formed closed plate. A negative pressure cavity is formed between the lower sides of the two air guide ribs 11. During the diversion of high-pressure air, a negative pressure is formed in the negative pressure cavity. In addition, the air guide ribs 11 orderly divert and guide the vertically downward annular air curtain, which can ensure that the air curtain blocks splashes to the greatest extent while ensuring that the air curtain does not collide with the photovoltaic panel and diffuse due to total reflection, avoiding turbulence, and ensuring that the airflow can smoothly blow the molten slag and dust away from the workpiece surface in a timely and directional manner.

[0027] like Figures 8-10 As shown, the cooling spray mechanism includes an air duct nozzle 14, a water mist nozzle 15, and an air-water connector 16; The top of the air-water connector 16 is connected to an air inlet 17, which is connected to a high-pressure air source. The air pressure entering the air-water connector 16 is much lower than the air pressure inside the annular air knife assembly 7. The air-water connector 16 is provided with a diversion chamber 18 that communicates with the air inlet 17. The inner wall of the diversion chamber 18 is provided with a flow guiding annular surface. The lower end of the air-water connector 16 is integrally formed with a threaded ring seat 19. The airway nozzle 14 is fixed to the inner side of the threaded ring seat 19 and extends vertically downward. The water mist nozzle 15 is threadedly connected to the outer wall of the threaded ring seat 19. A sealing ring is provided between the water mist nozzle 15 and the air-water connector 16. The water mist nozzle 15 is concentrically sleeved on the outer side of the airway nozzle 14. A spray gap 20 is provided between the airway nozzle 14 and the water mist nozzle 15. A mixing chamber 21 communicating with the water inlet 22 is provided between the inner wall of the water mist nozzle 15, the outer wall of the airway nozzle 14 and the threaded ring seat 19. A water inlet 22 communicating with the mixing chamber 21 is connected to the side wall of the water mist nozzle 15. The water inlet 22 is connected to a deionized water circulation system through a pipe.

[0028] A mixing channel 23 is provided between the diversion chamber 18 and the mixing chamber 21. Part of the gas in the diversion chamber 18 enters the mixing chamber 21 through the mixing channel 23, mixes with the deionized water that enters through the water inlet 22, and is sprayed out through the spray gap 20 to generate deionized water mist for cooling. The flow-dividing chamber 18 has an inwardly facing airflow guide ring surface with a jet duct 24 communicating with the inside of the threaded ring seat 19. The jet duct 24 is interconnected with the air duct nozzle 14. Part of the gas from the flow-dividing chamber 18 enters the air duct nozzle 14 through the jet duct 24 and is ejected, thus forming a centrally located high-speed dry gas flow. This gas flow combines with the annular water mist ejected from the spray gap 20, creating a cooling pattern of a central dry airflow surrounded by annular cooling water mist. The surrounding water mist is used to spray and cool the heated area, guiding the crack to automatically propagate along the cutting line through thermal stress, achieving non-destructive cleavage. During the cooling process, the central... The drying airflow is sprayed directly into the groove to disperse the water residue remaining in the groove and on the surface after the flaking. The drying airflow in the middle is sprayed directly into the air guide assembly. After contacting the air curtain airflow that has been diverted by the air guide rib 11, the lower-pressure drying airflow will be diverted to both sides by the high-pressure air curtain airflow under the Coanda effect. This causes the drying airflow in the groove to flow upward into the negative pressure chamber. Then, through the flow path of the diversion on both sides of the transverse gap, the drying airflow dries the water mist and also has a certain entrainment and entrapment effect on the water vapor attached to the groove, drawing out the residual water in the groove to improve the drying effect.

[0029] Further settings, such as Figures 8-10 As shown, the top of the air-water connector 16 is provided with an adjustment channel concentrically arranged with the air nozzle 14. The adjustment channel includes a limiting hole and a guide hole. The inner diameter of the guide hole is larger than the inner diameter of the limiting hole, thereby forming a stepped structure at the lower end of the limiting hole. Sealing bushings are fixed at the upper and lower ends of the limiting hole. An adjustment screw 25 is rotatably connected inside the sealing bushing. A knob cap for rotating the adjustment screw 25 is provided at the top of the adjustment screw 25. The adjustment screw 25 passes through the sealing bushing and extends downward into the guide hole.

[0030] The jet duct 24 includes an inner conical channel and a guide channel that are interconnected. The outer end of the inner conical channel is interconnected with the diversion chamber 18. The inner end of the guide channel is interconnected with the inner wall of the guide hole. The inner wall of the guide channel is provided with a guide strip along the axial direction. The guide channel is provided with an inner protruding edge on the side facing the guide hole.

[0031] An adjustment assembly is slidably installed in the guide hole. The adjustment assembly includes a threaded sleeve 26, an adjustment slider 27, and a hinged rocker arm 28.

[0032] The threaded sleeve 26 is threadedly fitted onto the adjusting screw 25. The threaded sleeve 26 is slidably installed in the guide hole. An axial strip is provided on the inner wall of the guide hole. A limiting groove that slides with the axial strip is provided on the outer wall of the threaded sleeve 26. The axial strip limits the circumferential movement of the threaded sleeve 26. Rotating the adjusting screw 25 can realize the axial movement of the threaded sleeve 26.

[0033] The adjusting slider 27 includes a frustum block 271, a support rod 272, and a guide ring 273. The frustum block 271 has the same inclination as the inner conical channel. An air gap is provided between the outer wall of the frustum block 271 and the inner conical channel. The frustum block 271 slides back and forth in the inner conical channel, which can adjust the cross-sectional width of the air gap between the frustum block 271 and the inner conical channel, change the cross-sectional ratio between the air gap and the mixing air channel 23, thereby changing the gas distribution ratio between the air channel nozzle 14 and the water mist nozzle 15. This can adjust the gas ratio between the air channel nozzle 14 and the water mist nozzle 15, and adjust the cooling effect and the cleaning and drying effect. This can achieve a dynamic balance between the water mist atomization quality and the intermediate drying gas, so as to achieve better fracturing and drying effects. In addition, the scale line can be marked on the top of the air-water connector 16 through experiments to facilitate the operator to adjust the scale.

[0034] The guide ring 273 is slidably disposed within the guide channel. The outer wall of the guide ring 273 is provided with a guide groove that cooperates with the guide strip. The support rod 272 connects the frustum block 271 and the guide ring 273. The guide ring 273 is provided with several communicating holes. The lower edge of the threaded sleeve 26 is provided with an adjusting ring seat. The two ends of the hinge rocker arm 28 are respectively hinged between the rear end of the guide ring 273 and the adjusting ring seat. Through the above technical solution, Rotating the adjusting screw 25 allows the threaded sleeve 26 to slide axially, thereby pulling the adjusting slider 27 inward and outward within the jet passage 24 via the hinge lever 28, thus adjusting the cross-sectional ratio between the ventilation gap and the mixing passage 23. When the rear side of the frustum block 271 is flush with the inner edge of the inner conical channel, the hinge lever 28 abuts against the inner convex edge. When the front side of the frustum block 271 is flush with the outer edge of the inner conical channel, the threaded sleeve 26 abuts against the sealing bushing on the lower side.

[0035] Working principle: In this invention, a vertically downward annular air curtain is set on the outside of the hot-splitting laser head 6. Under the guidance of the "bucket"-shaped structure of the beam-gathering ring, the annular air curtain smoothly enters the air guide gap. Under the guidance of the air guide rib 11, the air curtain airflow is diverted and flows rapidly to both sides into the dust collection pipes 84 on both sides, forming a stable airflow circulation path. Under this airflow circulation path, the disordered turbulence caused by the air curtain airflow hitting the photovoltaic panel can be avoided, ensuring that the airflow can blow the slag and dust away from the workpiece surface in a timely and directional manner. Through the above technical solution, the air curtain airflow can be vertically set to ensure that the annular high-pressure air curtain can achieve the purpose of blocking splashes to the greatest extent. In addition, the diversion on both sides can also form a transverse air curtain, preventing water mist from drifting across the air curtain to the sides and falling in front of the laser spot path.

[0036] In addition, by designing the structure of the cooling spray mechanism, the cooling process of the central dry airflow and the surrounding annular cooling water mist sprayed from the cooling spray mechanism allows the water mist to be sprayed onto the heated photovoltaic cells at a certain pressure, causing the photovoltaic cells to crack under thermal stress. At the same time, the central dry airflow acts on the grooves, blowing away the water stains remaining in the grooves and on the surface after processing, thus solving the problem of laser energy fluctuation and inaccurate positioning caused by water stains during continuous dicing. The continuous spraying of dry air in the middle replenishes the groove with dry air. The dry gas is sprayed forward and comes into contact with the high-pressure air curtain airflow that is split on both sides. Under the Coanda effect, the dry air in the groove is split to both sides along with the high-pressure air curtain airflow. Under the action of negative pressure, the dry gas can have a certain entrainment and entrapment effect on the water vapor attached to the groove, and draw out the residual water in the groove. This further improves the drying effect on the water traces left over from the previous process, ensuring that the grooving laser head 5 and the hot cracking laser head 6 can quickly move to the next adjacent area to continue the operation, thereby improving the dicing efficiency. The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. The scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A non-destructive dicing machine for solar panels, comprising a mounting base plate, a mounting bracket, a moving drive mechanism, and a cutting platform, characterized in that: The mounting bracket is sequentially equipped with a slotting laser optical path mechanism, a thermal cracking laser optical path mechanism, and a cooling spray mechanism. The thermal cracking laser optical path mechanism includes a thermal cracking laser head, an annular air knife assembly, and an air guide assembly. The thermal cracking laser head is fixed on the mounting bracket, and a positioning flange is fixed on the outer wall of the thermal cracking laser head. The annular air knife assembly includes a high-pressure outer ring and a high-pressure inner ring. The high-pressure outer ring flange is connected to the lower side of the positioning flange. The high-pressure inner ring is fitted and installed inside the high-pressure outer ring. A compressed air chamber is formed between the high-pressure outer ring and the high-pressure inner ring. A vertically downward air outlet slit communicating with the compressed air chamber is provided between the lower edges of the high-pressure outer ring and the high-pressure inner ring. An air curtain vent is connected to the side wall of the high-pressure outer ring. The air guiding assembly includes a connecting bracket, an inner air guiding ring, a connecting outer ring, and two dust collection pipes. The connecting bracket is connected to the lower side of the positioning flange. Several air guiding ribs are provided on the outer wall of the inner air guiding ring. The connecting outer ring is integrally formed and provided on the outer end of the air guiding ribs. An air guiding gap is provided between the inner air guiding ring and the connecting outer ring. The air guiding gap is located directly below the air outlet slit. Several air guiding ribs on the side of the inner air guiding ring facing the cooling spray mechanism are symmetrically arranged from the middle to both sides, tilting outwards with the tilt angle gradually changing from the inside to the outside. The two dust collection pipes are provided on the left and right sides of the inner air guiding ring.

2. The non-destructive dicing machine for solar panels according to claim 1, characterized in that: An integrally formed closed plate is provided on the top of the two inner air guide ribs facing the cooling spray mechanism, and a negative pressure cavity is formed between the lower sides of the two air guide ribs.

3. The non-destructive dicing machine for solar panels according to claim 2, characterized in that: The outer edge of the connecting outer ring is provided with a connecting flange. The connecting bracket includes several vertically distributed connecting screws. The upper and lower ends of the connecting screws are respectively threaded with positioning nuts. The positioning nuts abut against the positioning flange and the connecting flange on both sides. The lower side of the positioning flange is provided with a support nut. The support nut is threaded onto the connecting screw. A support ring is fixed in the middle of the connecting screw. A buffer spring is connected between the support ring and the connecting flange.

4. The non-destructive dicing machine for solar panels according to claim 3, characterized in that: A convergence ring is provided on the upper side of the inner air guide ring and the connecting outer ring. An air guide slope is provided on the inner side of the convergence ring on both the inner and outer sides. A deflection ring is provided on the lower outer wall of the inner air guide ring. A transverse gap is provided between the deflection ring and the lower edge of the air guide rib.

5. A non-destructive dicing machine for solar panels according to claim 1, characterized in that: The cooling spray mechanism includes an air duct nozzle, a water mist nozzle, and an air-water connector. The top of the air-water connector is connected to an air inlet, and the interior of the air-water connector is provided with a flow-dividing chamber communicating with the air inlet. The lower end of the air-water connector is integrally formed with a threaded ring seat. The air duct nozzle is fixed to the inner side of the threaded ring seat, and the water mist nozzle is threadedly connected to the outer wall of the threaded ring seat. The side wall of the water mist nozzle is connected to a water inlet, and the water mist nozzle is concentrically sleeved on the outer side of the air duct nozzle. A spray gap is provided between the air duct nozzle and the water mist nozzle.

6. A non-destructive dicing machine for solar panels according to claim 5, characterized in that: The air-water connector has a flow divider chamber that communicates with the air inlet. The inner wall of the water mist nozzle, the outer wall of the air channel nozzle, and the threaded ring seat are provided with a mixing chamber that communicates with the water inlet. A mixing air channel is provided between the flow divider chamber and the mixing chamber. An air jet channel is provided between the flow divider chamber and the air channel nozzle.

7. A non-destructive dicing machine for solar panels according to claim 6, characterized in that: The top of the air-water connector is provided with an adjustment channel concentrically arranged with the air nozzle. The adjustment channel includes a limiting hole and a guide hole. Sealing bushings are fixed at the upper and lower ends of the limiting hole. An adjustment screw is rotatably connected inside the sealing bushing. An adjustment component is slidably installed inside the guide hole. The adjustment component is threadedly connected to the adjustment screw.

8. A non-destructive dicing machine for solar panels according to claim 7, characterized in that: The jet duct includes an interconnected inner conical channel and a guide channel. The adjustment assembly includes a threaded sleeve, an adjusting slider, and a hinged rocker arm. The threaded sleeve is slidably installed in the guide hole. The adjusting slider includes a frustum block, a support rod, and a guide ring. An air passage is provided between the outer wall of the frustum block and the inner conical channel. The guide ring is slidably disposed in the guide channel. The support rod is connected between the frustum block and the guide ring. The guide ring has several communicating holes. An adjusting ring seat is provided at the bottom of the threaded sleeve. The two ends of the hinged rocker arm are respectively hinged between the rear end of the guide ring and the adjusting ring seat.

9. A non-destructive dicing machine for solar panels according to claim 8, characterized in that: The inner end of the guide channel is provided with an inner protruding edge. When the rear side of the truncated cone block is flush with the inner edge of the inner cone channel, the hinge rocker arm abuts against the inner protruding edge. When the front side of the truncated cone block is flush with the outer edge of the inner cone channel, the threaded sleeve abuts against the sealing bushing on the lower side.

10. A non-destructive dicing machine for solar panels according to claim 9, characterized in that: The inner wall of the guide hole is provided with an axial strip, and the outer wall of the threaded sleeve is provided with a limiting groove that slides and engages with the axial strip.

Citation Information

Patent Citations

  • A non-destructive cutting device and process for silicon and silicon-based semiconductor wafers.

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