Automatic assembly apparatus for mask plate and assembly method thereof

Abstract

The application relates to an automatic assembly device for a mask plate and an assembly method thereof. The automatic assembly device for the mask plate comprises a feeding unit, a positioning unit, a collecting unit, a transfer unit and a control unit. The feeding unit is used for carrying the mask plate. The positioning unit is used for positioning glass. The collecting unit is used for collecting first position information of the mask plate and collecting alignment deviation information of the mask plate and the glass. The control unit is in communication connection with the collecting unit and the transfer unit, is used for controlling the transfer unit to adsorb the mask plate according to the first position information, and is used for controlling the transfer unit to cover the mask plate on the surface of the glass according to the alignment deviation information. Through the above setting, full-process automatic assembly of the mask plate is realized, traditional manual operation is replaced, alignment accuracy of the mask plate and the glass is greatly improved, glass coating quality problems caused by alignment deviation are effectively avoided, manual cost is reduced, operation time of mask plate assembly is shortened, and assembly efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of automated machinery technology, and in particular to an automated assembly equipment and assembly method for mask plates. Background Technology

[0002] With the continuous development of vehicle cockpit comfort and intelligent connectivity, the use of functional films on glass surfaces is becoming more and more common. Functional films are formed on the glass surface through coating. For some areas that do not need coating, a mask plate is used to cover the glass surface to block them.

[0003] Currently, when covering glass surfaces with photomasks, the process mainly relies on manual assembly. However, this manual method is prone to inaccurate alignment, affecting product quality; moreover, manual work is time-consuming and labor-intensive, making it difficult to meet the market's demand for high efficiency and low cost. Summary of the Invention

[0004] Therefore, it is necessary to address the current problem of low automation in the assembly of photomasks onto glass by providing an automated assembly device and method for photomasks.

[0005] An automated assembly device for photomasks, comprising a feeding unit, a positioning unit, a data acquisition unit, a transfer unit, and a control unit, wherein:

[0006] The feeding unit is used to carry the mask plate;

[0007] The positioning unit is used to position the glass;

[0008] The acquisition unit is used to acquire the first position information of the mask plate, and to acquire the alignment deviation information between the mask plate and the glass;

[0009] The control unit is communicatively connected to the acquisition unit and the transfer unit, and is used to control the transfer unit to adsorb the mask plate according to the first position information, and to control the transfer unit to cover the mask plate onto the surface of the glass according to the alignment deviation information.

[0010] In one embodiment, the mask is provided with a digital identification tag;

[0011] The automated assembly equipment for photomasks also includes a detection unit that is communicatively connected to the control unit, the detection unit being used to detect the type information stored in the digital identification tag;

[0012] The control unit is used to control the transfer unit to transfer the mask plate to the glass according to the type information and the preset position information of the glass.

[0013] In one embodiment, the detection unit is further configured to detect second location information of the digital identification tag;

[0014] The control unit is used to control the transfer unit to transfer the mask plate to the glass according to the type information, the second position information and the preset position information of the glass.

[0015] In one embodiment, the transfer unit includes a robotic arm and an adsorption mechanism, the adsorption mechanism being connected to the robotic arm and used to adsorb the mask plate.

[0016] In one embodiment, the adsorption mechanism includes an adsorption frame and suction cups. The adsorption frame is connected to the robotic arm, and there are multiple suction cups spaced apart on the adsorption frame.

[0017] In one embodiment, the feeding unit includes a feeding platform for carrying the mask and a feeding light source disposed on the feeding platform, the feeding light source being used to illuminate the mask;

[0018] The acquisition unit includes a first acquisition device disposed on the loading platform, the first acquisition device being used to acquire the first position information of the mask plate.

[0019] In one embodiment, the acquisition unit includes a second acquisition device disposed in the positioning unit, the second acquisition device being used to acquire alignment deviation information between the mask and the glass.

[0020] In one embodiment, the positioning unit includes at least one positioning rod, a transmission platform communicatively connected to the control unit, and a positioning drive, wherein:

[0021] The transmission platform is used to transmit the glass and is started and stopped under the control of the control unit;

[0022] The positioning drive is installed on the transmission platform, and its output end is connected to the positioning rod. Under the control of the control unit, it drives the positioning rod to carry the glass and move the glass to a preset position.

[0023] In one embodiment, the positioning unit includes a force sensor communicatively connected to the control unit. The force sensor is located on the side of the positioning rod away from the transmission platform. The force sensor is used to collect the pressure value experienced by the positioning rod when it carries the glass. The control unit controls the operation of the positioning drive based on the pressure value.

[0024] This application also provides an assembly method for an automated assembly device for photomasks as described in any of the above embodiments, comprising the following steps:

[0025] The acquisition unit acquires the first position information of the mask plate at the feeding unit;

[0026] The control unit controls the transfer unit to adjust to a suitable position based on the first position information, so that the transfer unit can adsorb the mask plate;

[0027] The control unit controls the transfer unit to move according to a preset path, so that the transfer unit drives the mask plate to align with the glass on the positioning unit;

[0028] The acquisition unit acquires the alignment deviation information between the mask and the glass;

[0029] The control unit controls the transfer unit to adjust to a suitable position based on the alignment deviation information, so that the transfer unit can cover the mask plate on the glass.

[0030] The aforementioned automated assembly equipment and method for photomasks, by setting up a control unit to precisely control the transfer unit to complete the adsorption and alignment assembly of the photomasks according to the first position information and alignment deviation information, replaces manual alignment operation. On the one hand, it avoids subjective errors caused by manual operation, significantly improves the alignment accuracy between the photomask and the glass, and effectively avoids glass coating quality problems caused by alignment deviation. On the other hand, it significantly shortens the photomask assembly operation time, further improves production efficiency, reduces labor costs, and meets the current market requirements for high-efficiency and low-cost production of glass coating products, thereby enhancing the company's market competitiveness. Attached Figure Description

[0031] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments of this application and their descriptions are used to explain this application and do not constitute an undue limitation of this application.

[0032] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 This is a schematic diagram of an automated assembly equipment for photomasks provided in an embodiment of this application.

[0034] Figure 2 for Figure 1 A schematic diagram of the transfer unit in the diagram.

[0035] Figure 3 for Figure 1 A schematic diagram of the positioning unit in the diagram.

[0036] Figure 4 This is a flowchart illustrating an automatic mask assembly method provided in an embodiment of this application.

[0037] Explanation of reference numerals in the attached figures

[0038] 10. Automated assembly equipment for photomasks; a. First direction; b. Second direction;

[0039] 100. Feeding unit; 110. Feeding platform;

[0040] 200. Positioning unit; 210. Positioning rod; 220. Transmission platform;

[0041] 300. Transfer unit; 310. Robotic arm; 320. Adsorption mechanism; 321. Adsorption frame; 3211. Longitudinal rod; 3212. Reinforcing rod; 3213. Transverse rod; 322. Suction cup;

[0042] 400. Detection unit. Detailed Implementation

[0043] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0044] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0045] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0046] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0047] The technical solutions provided by the embodiments of the present invention are described below with reference to the accompanying drawings.

[0048] like Figure 1 As shown, one embodiment of this application provides an automatic assembly device 10 for photomasks. The automatic assembly device 10 for photomasks includes a feeding unit 100, a positioning unit 200, a data acquisition unit, a transfer unit 300, and a control unit.

[0049] The feeding unit 100 carries the photomask and provides an initial position for its transfer. The positioning unit 200 positions the glass to define its orientation for alignment and assembly with the photomask. The acquisition unit acquires the first position information of the photomask and the alignment deviation information between the photomask and the glass.

[0050] The control unit is communicatively connected to the acquisition unit and the transfer unit 300. The control unit receives the first position information and alignment deviation information transmitted by the acquisition unit. The control unit controls the transfer unit 300 to adsorb the mask plate according to the first position information; the control unit controls the transfer unit 300 to cover the mask plate onto the surface of the glass according to the alignment deviation information, thereby completing the automatic assembly of the mask plate and the glass.

[0051] It should also be noted that the first position information is the initial position information of the mask plate when it is located in the feeding unit 100, and the alignment deviation information is the alignment deviation information between the mask plate adsorbed on the transfer unit 300 and the glass.

[0052] The aforementioned automatic assembly equipment 10 for photomasks, through a control unit that precisely controls the transfer unit 300 to complete the adsorption and alignment assembly of the photomasks based on the first position information and alignment deviation information, replaces manual alignment operations. On the one hand, it avoids subjective errors caused by manual operation, significantly improves the alignment accuracy between the photomask and the glass, and effectively avoids glass coating quality problems caused by alignment deviations. On the other hand, it significantly shortens the photomask assembly operation time, further improves production efficiency, reduces labor costs, and meets the current market requirements for high-efficiency and low-cost production of glass coating products, thereby enhancing the company's market competitiveness.

[0053] Before assembling the photomask onto the glass, its model number needs to be checked to ensure that the photomask used on the glass is the specified one, thus guaranteeing assembly accuracy. Currently, photomask model verification relies on manual labor, but the efficiency and accuracy of manual verification are both low, making it difficult to meet market demands.

[0054] Therefore, to improve the efficiency and accuracy of mask model detection, in some embodiments, the mask is equipped with a digital identification tag. The automatic assembly equipment 10 for the mask includes a detection unit 400 communicatively connected to a control unit. The detection unit 400 is used to detect the type information stored in the digital identification tag. The control unit is used to control the transfer unit 300 to transfer the mask to the glass according to the type information and the preset position information of the glass.

[0055] In practice, the control unit determines the accuracy of the mask model based on the received mask type information and preset specifications. If the mask model is accurate, the control unit controls the transfer unit 300 to transfer the mask to the glass according to the preset position information of the glass, completing the alignment of the mask and the glass. Subsequently, the control unit further adjusts the position of the transfer unit 300 by collecting alignment deviation information from the acquisition unit, ensuring precise alignment between the mask on the transfer unit 300 and the glass, guaranteeing accurate sealing.

[0056] It should also be emphasized that when the mask model is inaccurate, the control unit can control the transfer unit 300 to transfer the mask to the non-conforming area or control the alarm to sound an alarm to prompt the worker to handle the situation.

[0057] With the above settings, compared with manual visual inspection, the automatic reading method of digital identification tags can effectively improve detection efficiency and avoid human subjective error, ensuring the accuracy of model matching between the mask and the glass to be assembled.

[0058] In one embodiment, the digital identification label is preferably a QR code, and the detection unit 400 includes a barcode reader for reading the QR code. In this embodiment, to facilitate the formation of the digital identification label on the mask, the mask is made of metal, and the digital identification label is set on the mask by laser marking.

[0059] Specifically, the photomask is preferably made of stainless steel, with a thickness of 2.5 ± 0.1 mm. A dot-matrix QR code with a depth of 0.02 mm is formed on the surface of the photomask using laser technology, with a processing accuracy error of <0.01 mm. Salt spray testing for at least 1000 hours shows that the QR code formed using the above setup can be used stably for a long time in environments ranging from 0℃ to 200℃, exhibiting high strength, high temperature resistance, and corrosion resistance, meeting the requirements of production conditions.

[0060] More specifically, the digital identification tag is preferably set in the lower right corner of the mask plate, and the digital identification tag is located on the side of the mask plate closer to the feeding unit 100, so that the transfer unit 300 can adsorb the side of the mask plate away from the feeding unit 100. This facilitates the exposure of the surface of the mask plate with the digital identification tag above the detection unit 400 during the transfer of the mask plate by the transfer unit 300, which is beneficial to the detection by the detection unit 400.

[0061] In another embodiment, the digital identification tag can also be an RFID tag, and the reader is a corresponding RFID reader.

[0062] To further ensure the accuracy of the alignment between the mask and the glass, the detection unit 400 is also used to detect the second position information of the digital identification tag, and the control unit is used to control the transfer unit 300 to transfer the mask to align with the glass according to the type information, the second position information and the preset position information of the glass.

[0063] It should also be noted that the second position information is the position of the digital identification tag on the mask when the mask is being detected by the detection unit 400.

[0064] With the above settings, in addition to detecting the type information of the mask, the detection unit 400 also simultaneously collects the second position information of the digital identification tag. The second position information can be used as an auxiliary reference for the positioning of the mask so as to ensure accurate alignment between the mask and the glass.

[0065] In specific operation: The control unit controls the transfer unit 300 to move to the mask plate and complete the adsorption of the mask plate according to the first position information; the control unit then controls the transfer unit 300 to transfer the mask plate to the detection unit 400 for detection according to the preset path. The control unit receives the type information and second position information transmitted by the detection unit 400; the control unit controls the transfer unit 300 to transfer the mask plate to align with the glass according to the type information, second position information and preset position information of the glass; the control unit then adjusts the position of the transfer unit 300 according to the alignment deviation information so that the transfer unit 300 can cover the surface of the glass with the mask plate. Through the above settings, the coordinates of the digital identification tag and the visual contour detection coordinates of the mask plate and glass alignment are linked and calibrated to ensure that the positioning deviation between the digital identification tag and the mask plate contour positioning meets the accuracy requirements, achieving accurate matching of both position and information. Compared with the method of alignment based on only a single position information, the coordinated cooperation of multi-dimensional position information further improves the alignment and assembly accuracy of the mask plate and glass, effectively avoids quality problems caused by alignment deviation, and significantly improves the yield of glass coating products.

[0066] In a specific configuration, the detection unit 400 includes a label image acquisition device, which is used to detect the second location information of the digital identification label. The label image acquisition device is preferably an industrial camera.

[0067] To ensure smooth data acquisition from digital identification tags, both the reader and the tag image acquisition unit are equipped with LEDs to prevent glare from the tags and thus improve the accuracy of tag recognition. These features ensure accurate reading even under complex conditions such as partial damage or slight obstruction of the digital identification tags.

[0068] It should also be noted that setting LED beads in barcode readers and tag image collectors is a mature technology, which will not be elaborated on here.

[0069] Combination Figure 2 As shown, to facilitate the design of the transfer unit 300, in some embodiments, the transfer unit 300 includes a robotic arm 310 and an adsorption mechanism 320. The adsorption mechanism 320 is connected to the robotic arm 310 and is used to adsorb the mask plate. In specific settings, the robotic arm 310 is configured to drive the adsorption mechanism 320 to move and rotate in three-dimensional space. The robotic arm 310 is a mature technology and will not be elaborated on here.

[0070] With the above settings, the robotic arm 310 can move in multiple degrees of freedom, which can flexibly drive the adsorption mechanism 320 to and from the loading station, the inspection station and the glass assembly station, adapting to the transfer needs of different sizes and models of photomasks; the adsorption mechanism 320 can stably adsorb and fix the photomask, and there is no rigid squeezing during the gripping process, avoiding scratches and bumps on the surface of the photomask and the glass coating surface.

[0071] To facilitate the design of the adsorption mechanism 320, in some embodiments, the adsorption mechanism 320 includes an adsorption frame 321 and suction cups 322. The adsorption frame 321 is connected to the robotic arm 310, and there are multiple suction cups 322, which are spaced apart from each other on the adsorption frame 321. Specifically, the connection between the robotic arm 310 and the adsorption frame 321 can be a fixed connection or a detachable connection. The preferred detachable connection method is to detachably connect the robotic arm 310 and the adsorption frame 321 through a flange assembly.

[0072] With the above settings, the adsorption frame 321 in the adsorption mechanism 320 can be quickly assembled and fixed with the end of the robotic arm 310; the multiple suction cups 322 are arranged at intervals to adsorb the mask plate at multiple points evenly, the adsorption force is dispersed, and the local deformation and warping of the mask plate caused by the concentration of single-point suction force is avoided, ensuring that the mask plate maintains a flat posture after adsorption and improving the subsequent alignment and assembly accuracy.

[0073] To ensure the structural strength of the adsorption frame 321, the adsorption frame 321 includes two spaced longitudinal rods 3211 and a reinforcing rod 3212 connecting the two longitudinal rods 3211. The two longitudinal rods 3211 and the reinforcing rod 3212 form an I-shaped structure. Each longitudinal rod 3211 has two transverse rods 3213 connected to the side away from the reinforcing rod 3212. The two transverse rods 3213 are spaced apart along the length of the longitudinal rods 3211.

[0074] With the above configuration, the adsorption frame 321 adopts an I-shaped main frame composed of two longitudinal rods 3211 and a reinforcing rod 3212. The overall structure is rigid and has excellent bending and torsional resistance. It is not easy to bend or deform during transportation, thus avoiding alignment deviation caused by frame deformation. The reinforcing rod 3212 connects the two longitudinal rods 3211 into one, dispersing the negative pressure and tension generated when gripping the mask plate, reducing stress concentration in the rods, improving the service life of the adsorption frame 321, and reducing the risk of deformation failure under long-term reciprocating motion.

[0075] To evenly distribute the suction cups 322 on the adsorption frame 321, in one embodiment, each horizontal bar 3213 is provided with a suction cup 322, and each vertical bar 3211 is provided with suction cups 322 at both ends along its length. With this arrangement, the suction cups 322 are distributed at both ends of the lengths of each horizontal bar 3213 and vertical bar 3211, ensuring that the suction cups 322 are evenly distributed along the overall contour of the adsorption frame 321. When gripping the mask, the negative pressure suction can cover multiple areas of the mask, resulting in evenly distributed force. This effectively prevents the mask from warping or bending due to concentrated local force, maintaining its flatness and ensuring the accuracy of subsequent alignment and assembly with the glass.

[0076] In specific settings, the pressure of each suction cup 322 is between -0.4pa and -0.6pa, which can prevent the mask from shifting or falling off during the adsorption process, improve adsorption stability, and prevent the mask from slipping or falling off during the transfer process.

[0077] To facilitate the acquisition of the first position information of the photomask, in some embodiments, the loading unit 100 includes a loading platform 110 for carrying the photomask, and the acquisition unit includes a first acquisition device disposed on the loading platform 110. The first acquisition device is used to acquire the first position information of the photomask. In a specific configuration, the first acquisition device is preferably an industrial camera, and the first acquisition device is disposed above the loading platform 110 so that the first acquisition device can acquire the first position information of the photomask.

[0078] In the specific operation, the first collector collects the first position information of the mask and transmits it to the control unit. As mentioned earlier, the control unit controls the robotic arm 310 to adjust its position according to the first position information so that the adsorption mechanism 320 on the robotic arm 310 can adsorb the mask and complete the acquisition of the mask.

[0079] To ensure smooth data acquisition by the first data acquisition unit, in some embodiments, the loading unit 100 further includes a loading light source disposed on the loading platform 110, which is used to illuminate the mask. With this configuration, compared to current sensors such as inductive and capacitive sensors that are susceptible to interference from metal reflections, the loading light source provides stable illumination for the first data acquisition unit, suppresses reflections on the mask surface, and ensures the imaging quality of the mask.

[0080] See again Figure 1 To facilitate the transfer unit 300's transfer of the mask plate between the loading station, the inspection station, and the glass assembly station, in some embodiments, the loading unit 100, the inspection unit 400, and the positioning unit 200 are arranged sequentially, with the arrangement direction of the three units being a first direction a. The transfer unit 300 and the inspection unit 400 are arranged along a second direction b, which is perpendicular to the first direction a.

[0081] With the above setup, the feeding unit 100, the detection unit 400, and the positioning unit 200 are arranged in a straight line along the first direction a, forming a linear process route for mask loading, detection, and glass alignment and assembly. This simplifies the movement path of the transfer unit 300 and reduces the difficulty of developing motion algorithms for the control unit. At the same time, this layout makes full use of the equipment's planar space, resulting in a compact structure, reduced overall machine footprint, and suitability for limited installation space in workshops.

[0082] To facilitate the acquisition of alignment deviation information between the mask and the glass, in some embodiments, the acquisition unit includes a second acquisition device disposed on the positioning unit 200. The second acquisition device is used to acquire the alignment deviation information between the mask and the glass. In a specific configuration, the second acquisition device is preferably an industrial camera, and the second acquisition device is disposed above the positioning unit 200 so that the second acquisition device can acquire the alignment deviation information between the mask and the glass.

[0083] In actual operation, the control unit is used to control the transfer unit 300 to cover the mask plate onto the surface of the glass according to the alignment deviation information transmitted by the second collector.

[0084] To ensure smooth data acquisition by the second acquisition unit, industrial cameras are equipped with LEDs to prevent data acquisition failures caused by reflections from the mask and glass, thereby improving the accuracy of alignment deviation information.

[0085] Combination Figure 3 As shown, in order to facilitate the design of the positioning unit 200 for positioning the glass to a preset position, the positioning unit 200 includes at least one positioning rod 210, a transmission platform 220 and a positioning drive that are communicatively connected to the control unit.

[0086] The transmission platform 220 is used to transmit glass, and it starts and stops under the control of the control unit. Specifically, the transmission platform 220 transmits glass along its own length to achieve movement of the glass along the length of the transmission platform 220.

[0087] The positioning drive is mounted on the transmission platform 220. The output end of the positioning drive is connected to the positioning rod 210. Under the control of the control unit, the positioning drive drives the positioning rod 210 to carry the glass and move the glass to a preset position. Specifically, under the control of the control unit, the positioning drive drives the positioning rod 210 to move the glass along the width direction of the transmission platform 220, thereby positioning the glass to the preset position.

[0088] In a specific configuration, the positioning rod 210 can be connected to the slider, and a slide rail adapted to the slider is installed on the transmission platform 220, extending along the width direction of the transmission platform 220. The positioning drive is connected to the slider, and the positioning drive drives the slider to move along the slide rail stroke, thereby causing the positioning rod 210 to move along the width direction of the transmission platform 220.

[0089] In order to facilitate the positioning rod 210 in carrying the glass and moving the glass to a preset position, in another embodiment, the gap between two adjacent conveying rollers in the conveying platform 220 has a set value. The positioning rod 210 can also be movably installed on the conveying platform 220 along the length direction of the conveying platform 220. Under the control of the control unit, the positioning drive drives the positioning rod 210 to move the glass along the length and width directions of the conveying platform 220, thereby realizing that the positioning rod 220 moves the glass to the preset position.

[0090] To better support the glass, the positioning rod 210 is vertically mounted on the transfer platform 220 so that the positioning rod can support glass of different weights and types.

[0091] It should also be noted that the positioning rod 210 moves along three-dimensional space, that is, the positioning rod 210 can be raised and lowered, can move along the width direction of the transmission platform 220, and can move along the length direction of the transmission platform 220. This is a mature technology and will not be elaborated on here.

[0092] In specific settings, the number of positioning rods 210 can be multiple, specifically 2, 4, 6, 8 or more, and the specific number of positioning rods 210 can be set according to the shape of the glass.

[0093] With the above settings, during operation, when the conveying platform 220 stops feeding under the control unit's control, the positioning drive unit moves the positioning rod 210 to carry the glass and moves it to a preset position according to a preset path. This allows the control unit to control the transfer unit 300 to transfer the mask plate above the glass, achieving initial alignment between the mask plate and the glass. The control unit then precisely controls the transfer unit 300 to adjust its position based on the alignment deviation information collected by the second data acquisition device, achieving precise alignment between the mask plate and the glass.

[0094] In order to better support the glass and provide a stable state for the subsequent cover of the mask, in some embodiments, the positioning unit 200 includes a force sensor that is communicatively connected to the control unit. The force sensor is located on the side of the positioning rod 210 away from the transmission platform 220. The force sensor is used to collect the pressure value of the positioning rod 210 when it carries the glass. The control unit controls the operation of the positioning drive according to the pressure value.

[0095] With the above settings, a force sensor is installed at the contact end between the positioning rod 210 and the glass, which can collect pressure data in real time during the glass carrying process and transmit it to the control unit. The control unit adjusts the position of the positioning rod 210 according to the real-time feedback pressure value to ensure that the multiple positioning rods 210 effectively limit and support the glass, avoid the glass from slipping or shifting during transportation and assembly, and ensure the stability of the glass positioning reference.

[0096] In the specific setup, each positioning rod 210 is equipped with a corresponding sensor to control the multiple positioning rods 210 to be distributed at intervals along the circumference of the glass, ensuring stable support for the glass.

[0097] Combination Figure 4 As shown, one embodiment of this application also provides an assembly method for an automated assembly device 10 for photomasks as described in any of the above embodiments, comprising the following steps:

[0098] Step S1: The acquisition unit acquires the first position information of the mask at 100 locations in the feeding unit to obtain the accurate position of the mask.

[0099] Step S2: The control unit controls the transfer unit 300 to adjust to a suitable position according to the first position information so that the transfer unit 300 adsorbs the mask plate. Specifically, the control unit controls the mechanical wall to adjust to a suitable position according to the first position information, and the adsorption mechanism 320 on the robotic arm 310 adsorbs the mask plate.

[0100] Step S3: The control unit controls the transfer unit 300 to move according to the preset path, so that the transfer unit 300 drives the mask plate to align with the glass on the positioning unit 200, thereby achieving the initial alignment of the mask plate and the glass.

[0101] Step S4: The acquisition unit acquires the alignment deviation information between the mask and the glass in order to achieve accurate alignment between the mask and the glass.

[0102] Step S5: The control unit controls the transfer unit 300 to adjust to a suitable position according to the alignment deviation information, so that the transfer unit 300 can cover the mask plate on the glass, thereby completing the assembly of the mask plate and the glass.

[0103] The aforementioned automatic assembly method for photomasks, by setting up a control unit to precisely control the transfer unit 300 to complete the adsorption and alignment assembly of the photomasks according to the first position information and alignment deviation information, replaces manual alignment operation. On the one hand, it avoids subjective errors caused by manual operation, significantly improves the alignment accuracy between the photomask and the glass, and effectively avoids glass coating quality problems caused by alignment deviation. On the other hand, it significantly shortens the photomask assembly operation time, further improves production efficiency, reduces labor costs, and meets the current market requirements for high-efficiency and low-cost production of glass coating products, thereby enhancing the company's market competitiveness.

[0104] In specific operation, step S3 also includes: step S31, the control unit controls the transfer unit 300 to transfer the mask plate to the detection unit 400 for detection according to the preset path; step S32, the control unit receives the type information and second position information transmitted by the detection unit 400; step S33, the control unit controls the transfer unit 300 to transfer the mask plate to the glass according to the type information, the second position information and the preset position information of the glass, so as to further ensure the accuracy of the initial alignment between the mask plate and the glass.

[0105] To ensure the glass is accurately positioned in the preset location, the following steps are also included: the control unit controls the positioning unit 200 to operate, so that the positioning unit 200 positions the glass to the preset location; so that the control unit can control the transfer unit 300 to transfer the mask plate that meets the requirements to the top of the glass more accurately according to the preset location of the glass, combined with the type information and the second location information, thereby achieving the initial alignment of the mask plate and the glass and enhancing the accuracy of their initial positioning.

[0106] To ensure accurate assembly, before step S1, the following steps are included: calibrating the force sensors in the acquisition unit, detection unit 400, and positioning unit 200, specifically:

[0107] The calibration process of the acquisition unit and detection unit 400 is as follows: A calibration plate, shaped like a mask, is placed on the loading platform 110; the installation position and lens focal length of the first acquisition unit are adjusted so that the calibration plate appears completely in the center of the field of view of the first acquisition unit, without distortion or obstruction; during the detection process, the installation position of the detection unit 400 is adjusted so that the detection unit 400 can recognize the QR code on the calibration plate; subsequently, during the alignment process of the calibration plate being transported by the transfer unit 300, the installation position and lens focal length of the second acquisition unit are adjusted so that the calibration plate and glass appear completely in the center of the field of view of the second acquisition unit, without distortion or obstruction.

[0108] When making specific adjustments to the above-mentioned data acquisition devices, Zhang's calibration method is used to acquire multiple sets of images of the calibration board at different angles and positions. Feature points are extracted through the control unit to complete the data acquisition device calibration.

[0109] For example, the calibration process of the second data acquisition device is as follows: During the alignment of the calibration plate with the glass, the second data acquisition device collects the alignment feature points of the calibration plate and the glass. The control unit establishes an alignment deviation detection benchmark model, thereby setting a reasonable judgment threshold and saving it. When assembling the mask plate, when the alignment feature points of the mask plate and the glass collected by the second data acquisition device are within the set threshold, the alignment process of the mask plate and the glass is completed, so as to proceed with the subsequent capping operation.

[0110] The calibration process for the first data acquisition device is similar to that described above, and will not be elaborated upon here. Through the above settings, the joint calibration of multiple data acquisition devices ensures that the coordinate system among the data acquisition devices is consistent and the positioning is accurate.

[0111] In specific settings, different types of calibration boards can be used to verify the calibration effect. If there is a deviation, it can be compensated in real time by software to ensure the accuracy of the operation. At the same time, regular recalibration and maintenance should be carried out.

[0112] The process of calibrating the force sensor is as follows: In the natural state where the force sensor is not subjected to external force, the control unit executes the zero-point calibration command to eliminate the zero drift error of the force sensor itself, ensuring that the zero-point deviation of the force sensor within the range of ±50N is ≤0.005N. After calibration, the zero-point parameters are locked.

[0113] A standard force loading device is used to sequentially apply standard force values ​​of 0N, 10N, 20N, 30N, 40N, and 50N to each force sensor. The force sensor feeds back measurement data, and the control unit establishes a calibration curve between the standard force value and the measurement data. The control unit performs linear compensation on the output value of the force sensor according to the calibration curve to ensure that the measurement error of the force sensor is ≤0.01N, thus completing the range calibration of the force sensor.

[0114] Simultaneously, uniform and non-uniform external forces are applied to each force sensor, and the feedback synchronization of each force sensor is detected. Based on the feedback speed of each force sensor, the signal transmission delay parameter of the force sensor is adjusted to ensure that the feedback time difference of each force sensor is ≤0.02s, so as to accurately determine the force distribution of each force sensor during glass positioning.

[0115] Different working conditions during glass positioning are simulated, such as slight glass misalignment, loose glass adhesion, and precise glass positioning. Specifically, the glass under the above conditions is gently pressed by a robotic arm, and the force sensor provides feedback on the force value. Based on the pressure value, a force threshold range for precise glass positioning is set to ensure that the force deviation of each force sensor is ≤0.5N. When the pressure value is within the threshold range, the glass positioning is deemed qualified, and the next step of mask placement can be executed.

[0116] After calibration, actual operation simulations are conducted using glass and a mask to verify the accuracy of their positioning. If a misjudgment occurs, the force threshold is recalibrated.

[0117] To ensure the accuracy of the force sensors, a full calibration is performed every 2000 hours of operation, so that inaccurate force sensors can be replaced in a timely manner.

[0118] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0119] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. An automated assembly device (10) for photomasks, characterized in that, The automatic assembly equipment (10) for photomasks includes a feeding unit (100), a positioning unit (200), a data acquisition unit, a transfer unit (300), and a control unit, wherein: The feeding unit (100) is used to carry the mask plate; The positioning unit (200) is used to position the glass; The acquisition unit is used to acquire the first position information of the mask plate, and to acquire the alignment deviation information between the mask plate and the glass; The control unit is communicatively connected to the acquisition unit and the transfer unit (300), and is used to control the transfer unit (300) to adsorb the mask plate according to the first position information, and to control the transfer unit (300) to cover the mask plate on the surface of the glass according to the alignment deviation information.

2. The automatic assembly equipment (10) for photomasks according to claim 1, characterized in that, The mask plate is equipped with a digital identification tag; The automatic assembly equipment (10) for mask plates further includes a detection unit (400) communicatively connected to the control unit, the detection unit (400) being used to detect the type information stored in the digital identification tag; The control unit is used to control the transfer unit (300) to transfer the mask plate to the glass according to the type information and the preset position information of the glass.

3. The automatic assembly equipment (10) for photomasks according to claim 2, characterized in that, The detection unit (400) is also used to detect the second location information of the digital identification tag; The control unit is used to control the transfer unit (300) to transfer the mask plate to the glass according to the type information, the second position information and the preset position information of the glass.

4. The automatic assembly equipment (10) for photomasks according to claim 1, characterized in that, The transfer unit (300) includes a robotic arm (310) and an adsorption mechanism (320). The adsorption mechanism (320) is connected to the robotic arm (310) and is used to adsorb the mask plate.

5. The automatic assembly equipment (10) for photomasks according to claim 4, characterized in that, The adsorption mechanism (320) includes an adsorption frame (321) and suction cups (322). The adsorption frame (321) is connected to the robotic arm (310). There are multiple suction cups (322), which are spaced apart from each other on the adsorption frame (321).

6. The automatic assembly equipment (10) for photomasks according to claim 1, characterized in that, The feeding unit (100) includes a feeding platform (110) for carrying the mask plate and a feeding light source disposed on the feeding platform (110), the feeding light source being used to illuminate the mask plate; The acquisition unit includes a first acquisition device disposed on the loading platform (110), which is used to acquire the first position information of the mask plate.

7. The automatic assembly equipment (10) for photomasks according to claim 1, characterized in that, The acquisition unit includes a second acquisition device disposed in the positioning unit (200), which is used to acquire the alignment deviation information between the mask and the glass.

8. The automatic assembly equipment (10) for photomasks according to claim 7, characterized in that, The positioning unit (200) includes at least one positioning rod (210), a transmission platform (220) communicatively connected to the control unit, and a positioning drive, wherein: The transmission platform (220) is used to transmit the glass and is started and stopped under the control of the control unit; The positioning drive is mounted on the transmission platform (220), and its output end is connected to the positioning rod (210). Under the control of the control unit, it drives the positioning rod (210) to carry the glass and move the glass to a preset position.

9. The automatic assembly equipment (10) for photomasks according to claim 8, characterized in that, The positioning unit (200) includes a force sensor that is communicatively connected to the control unit. The force sensor is located on the side of the positioning rod (210) away from the transmission platform (220). The force sensor is used to collect the pressure value of the positioning rod (210) when it carries the glass. The control unit controls the operation of the positioning drive according to the pressure value.

10. An assembly method for an automated assembly device (10) for a photomask as described in any one of claims 1-9, characterized in that, Includes the following steps: The acquisition unit acquires the first position information of the mask plate at the feeding unit (100); The control unit controls the transfer unit (300) to adjust to a suitable position according to the first position information, so that the transfer unit (300) adsorbs the mask plate; The control unit controls the transfer unit (300) to move according to a preset path, so that the transfer unit (300) drives the glass on the mask alignment and positioning unit (200); The acquisition unit acquires the alignment deviation information between the mask and the glass; The control unit controls the transfer unit (300) to adjust to a suitable position according to the alignment deviation information, so that the transfer unit (300) can cover the mask plate on the glass.

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