Automatic lamination device for the production of electrostatic chuck products

Abstract

The application discloses an automatic lamination device for preparing electrostatic chuck products, mainly comprising a diaphragm automatic adsorption and transportation assembly, a diaphragm inspection and automatic cleaning assembly, an automatic diaphragm separation and diaphragm lamination assembly and a diaphragm placing box, realizes gapless sequential transfer of multiple diaphragms between processes, realizes efficient detection of the diaphragms through LED backlight transmission imaging, realizes surface dust removal without secondary pollution through setting a negative pressure suction port in the same station, realizes low-damage tearing of PET release film through a constant force gas claw, finally realizes tight lamination and equal-pressure scraping to discharge interlayer micro-bubbles, can complete efficient and high-quality lamination of multiple diaphragms, and meets the demand of high-consistency and large-scale production of electrostatic chuck.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor fabrication accessories technology, specifically relating to an automatic stacking device for fabricating electrostatic chuck-type products. Background Technology

[0002] An electrostatic chuck, also known as an electrostatic suction cup, is an ESC / E-Chuck device that uses Coulomb's law and electromagnetic force to hold wafers and other objects in place. It can stably grip conductors, semiconductors, and insulators in atmospheric or vacuum environments, avoiding damage to fragile workpieces caused by traditional mechanical clamping. It is a core component in precision manufacturing. The electrostatic chuck employs a multi-layered, stacked sandwich structure. The core consists of a surface insulating layer, an internal electrode layer, and a substrate support layer. The surface insulating layer, made of materials such as alumina or aluminum nitride, provides insulation and ensures ultra-high flatness and resistance to plasma corrosion. The internal electrode layer is typically made of thin films of metals such as tungsten or molybdenum, which create a stable electric field when energized. The substrate support layer primarily provides mechanical strength, suppresses thermal deformation, and ensures long-term dimensional stability. Electrostatic chucks are widely used in semiconductor manufacturing processes such as etching, PVD, and ion implantation, and also cover applications in panel vacuum bonding, precision optical processing, and solar photovoltaic production. They are key components for achieving damage-free wafer fixation and precise temperature control. In 2025, the market size of electrostatic chucks in my country reached 5.838 billion yuan, and the localization process is rapidly advancing from verification and introduction to mass delivery.

[0003] Currently, the stacking of high-voltage electrostatic diaphragm layers, temperature diaphragm layers, connecting diaphragm layers, and insulating diaphragm layers in electrostatic chucks is mostly done manually using stacking fixtures. This not only results in excessive manpower input but also leads to an excessively high defect rate.

[0004] Japanese Patent Publication JP7111816B2 discloses a substrate lifting device and substrate conveying method, which assembles the substrate onto the table of an electrostatic chuck by setting a specific conveying method. However, this device cannot perform detection, dust removal and compaction operations for multi-layer assembly.

[0005] Therefore, there is an urgent need to develop an automatic stacking fixture that can achieve continuous production, automatic sequential gripping and precise positioning, and real-time detection of each film layer, as well as dust removal and compaction operations, to provide high-quality electrostatic chuck blanks for subsequent sintering. Summary of the Invention

[0006] To address the aforementioned technical problems, this invention provides an automatic stacking device for manufacturing electrostatic chuck-type products.

[0007] To achieve the above objectives, the technical solution adopted by the present invention is as follows: An automatic stacking device includes an automatic stacking equipment housing and a top cover assembly.

[0008] The top cover assembly is located on the housing of the automatic stacking equipment. The top cover assembly contains an automatic film adsorption and transportation assembly, a film inspection and automatic cleaning assembly, an automatic film removal and film stacking and pressing assembly, and a film placement box.

[0009] The membrane placement box is provided with multiple partitioned areas, each for stacking different membranes.

[0010] The automatic membrane adsorption and transport assembly is located above the membrane placement box and includes a multi-axis electric slide, an electric slide drive unit, a connecting fixing plate, a connecting fixing column, a square cylinder, a square cylinder mounting plate, a suction nozzle fixing plate, a pneumatic suction nozzle, and a suction nozzle fixing plate guide column. The automatic membrane adsorption and transport assembly is used to pick up the membrane through the pneumatic suction nozzle and move the picked-up membrane to the membrane inspection and automatic cleaning assembly and the automatic membrane removal and membrane stacking and pressing assembly by the lateral and longitudinal movement of the multi-axis electric slide.

[0011] The diaphragm inspection and automatic cleaning assembly includes a vision camera sensor mounting bracket, a sensor moving cylinder, a sensor mounting plate, a vision camera sensor, a cleaning module mounting bracket, an automatic cleaning module, an LED vision light source, a cleaning installation electric actuator, and a diaphragm positioning column. The diaphragm inspection and automatic cleaning assembly is used to perform vision camera sensor inspection on diaphragms that are automatically picked up and moved onto the LED vision light source and positioned by the diaphragm positioning column by the diaphragm automatic adsorption and transport assembly, and to remove dust by airflow adsorption through the automatic cleaning module.

[0012] The automatic membrane release and membrane stacking assembly includes a gripper, a gripper mounting rotating bracket, a rotary motor, a pressing mounting bracket, a pressing fixing plate, a waste membrane placement box, a membrane pressing block, a pressing mounting electric actuator, a stacking tooling cylinder, a stacking tooling positioning column, a positioning column mounting plate, a membrane mounting and placement plate, a stacked membrane positioning column, a pressing motion cylinder, and a tooling cylinder mounting plate. The automatic membrane release and membrane stacking assembly is used to first clamp the PET membrane, which is placed at the bottom of the membrane, after inspection and dust removal by the membrane inspection and automatic cleaning assembly and then being picked up and moved again by the automatic membrane adsorption and transport assembly. Then, the pressing mounting bracket is moved by the pressing mounting electric actuator to release the PET membrane. The membrane is then placed on the membrane mounting and placement plate by the automatic membrane adsorption and transport assembly, and the pressing mounting bracket is moved by the pressing mounting electric actuator. The membrane pressing block then flattens and presses down the membrane to press it tightly against the electrostatic chuck.

[0013] Preferably, the multi-axis electric slide is mounted on the side wall of the upper cover assembly. The electric slide drive unit is used to drive the multi-axis electric slide to slide laterally and longitudinally. A horizontal connecting and fixing plate is provided at the bottom of the multi-axis electric slide. The connecting and fixing plate is fixed to the square cylinder mounting plate through multiple vertically arranged connecting and fixing columns. The square cylinder is mounted on the square cylinder mounting plate. The piston rod at the bottom of the square cylinder is connected to a horizontally arranged suction cup nozzle fixing plate. Multiple pneumatic suction cup nozzles are vertically arranged at the bottom of the suction cup nozzle fixing plate. One or more suction cup nozzle fixing plate guide columns are vertically fixed to the bottom of the square cylinder mounting plate. The suction cup nozzle fixing plate guide columns penetrate the suction cup nozzle fixing plate, allowing the suction cup nozzle fixing plate to slide up and down along the suction cup nozzle fixing plate guide columns.

[0014] Preferably, the multi-axis linear electric slide includes left and right slide rails and front and rear slide rails. The two ends of the left and right slide rails are respectively fixed to the two inner side walls of the upper cover assembly. The top of the front and rear slide rails are fixed with left and right sliders, which can drive the front and rear slide rails to slide left and right on the left and right slide rails. The top of the connecting fixing plate is fixed with front and rear sliders, which can drive the connecting fixing plate to slide back and forth on the front and rear slide rails.

[0015] Preferably, the bottom end of the guide post of the suction nozzle fixing plate is provided with a thick end, which is used to limit the suction nozzle fixing plate from moving further downward.

[0016] Preferably, the visual camera sensor mounting bracket is fixed to the bottom wall of the upper cover assembly. A sensor moving cylinder is horizontally mounted on the top of the visual camera sensor mounting bracket. A horizontal sensor fixing plate is provided on the piston rod of the sensor moving cylinder. A downward-facing visual camera sensor is provided at the bottom of the sensor fixing plate. An LED visual light source is provided on the bottom wall of the upper cover assembly below the visual camera sensor. A diaphragm positioning column is mounted on the LED visual light source. A cleaning installation electric actuator is provided on the side of the LED visual light source. An "L"-shaped cleaning module mounting bracket is slidably connected to the cleaning installation electric actuator. An automatic cleaning module is provided on the cleaning module mounting bracket. The automatic cleaning module includes multiple downward-facing gas nozzles.

[0017] Preferably, a vacuum corrugated pipe is installed inside the automatic stacking equipment housing, and an automatic vacuum processor is installed outside the automatic stacking equipment housing. The inlet of the vacuum corrugated pipe is connected to the gas nozzle on the automatic cleaning module, and the outlet of the vacuum corrugated pipe is connected to the automatic vacuum processor. The automatic vacuum processor is equipped with a dust collection box, and the dust on the diaphragm is transferred to the dust collection box through the vacuum corrugated pipe.

[0018] Preferably, the tooling cylinder mounting plate is fixed to the bottom wall of the upper cover assembly. Multiple vertical stacked tooling positioning posts are provided on the tooling cylinder mounting plate. A horizontal positioning post mounting plate is mounted on the stacked tooling positioning posts. A diaphragm mounting plate is provided on the positioning post mounting plate, and multiple vertical stacked diaphragm positioning posts are provided on the diaphragm mounting plate. The stacked tooling cylinder can extend and retract the stacked diaphragm positioning posts through the movement of its piston rod. A pressing and mounting electric actuator is provided on one or both sides of the tooling cylinder mounting plate. A pressing and mounting bracket is slidably fixed on the pressing and mounting electric actuator. One or two pressing and moving cylinders are provided on the pressing and mounting bracket. The piston rod of the pressing and moving cylinder can move vertically... A pressing plate is fixed to the piston rod of the pressing motion cylinder for elongation and shortening. A diaphragm pressing block is fixed to the side of the pressing plate. The diaphragm pressing block is used to flatten the diaphragm placed on the diaphragm mounting plate by driving the pressing mounting bracket to slide back and forth through the pressing mounting electric actuator, and at the same time, press the diaphragm down through the downward pressure of the pressing motion cylinder to press the electrostatic chuck diaphragm tightly. A waste film placement box is provided behind the pressing mounting bracket, and a pneumatic gripper mounting rotating bracket is provided at the top of the pressing mounting bracket. The pneumatic gripper mounting rotating bracket is rotated by a rotary motor provided on the shaft. A pneumatic gripper is provided at the top of the pneumatic gripper mounting rotating bracket. The pneumatic gripper can close and open, and the pneumatic gripper can rotate to above the waste film placement box under the rotation of the pneumatic gripper mounting rotating bracket.

[0019] Preferably, the automatic stacking equipment housing includes a vacuum pump, a vacuum pump isolation plate, a DC power supply, an electric slide control driver, a vision storage system, a computer host, and a dust collection bellows; the outer side of the automatic stacking equipment housing includes an air source pressure control element and an automatic dust collection processor; a vacuum pump is located on one side of the vacuum pump isolation plate, which provides negative pressure to components requiring negative pressure within the automatic stacking device (including providing negative pressure to the automatic dust collection processor, which allows dust to be sucked up through the gas nozzle and transported through the dust collection bellows); a DC power supply, an electric slide control driver, a vision storage system, and a computer host are located on the other side of the vacuum pump isolation plate; the DC power supply is used to provide negative pressure to the automatic stacking device... The various components within the stacking device are powered. The electric slide control driver is used to plan and control the execution of the multi-axis electric slide, the cleaning and mounting electric actuator, and the pressing and mounting electric actuator (i.e., the electric slide control driver writes the program for each electric slide in the entire equipment and controls the overall execution). The visual memory system is used to control and store signals transmitted from the visual camera sensor and to make judgments. The computer host is used to set and plan the actions of all devices (i.e., to process the program of how all these devices should be executed in sequence and how each process should be executed). The vacuum bellows connects the automatic cleaning module and the automatic vacuum processor. The air source pressure control element is used to supply and control the gas to each cylinder.

[0020] Preferably, a computer touch screen is also connected to the side wall of the upper cover assembly via a touch screen mounting bracket. The computer touch screen is used to control the various components within the automatic stacking device.

[0021] Preferably, each of the pneumatic grippers includes two opposing gripper plates, each gripper plate including a rotating support portion and a clamping portion, wherein the thickness of the support portion is H1 and the thickness of the clamping portion is H2, satisfying the following conditions: Furthermore, a rubber sleeve is provided at the top of the clamping part.

[0022] An automatic stacking method for an electrostatic chuck, using the aforementioned automatic stacking device, includes the following steps: (1) Place the perforated films of different layers of the electrostatic chuck into different compartments of the film placement box with the film facing down.

[0023] (2) Start the automatic adsorption and transport assembly of the diaphragm. Move the multi-axis electric slide left and right and back and forth so that the suction nozzle fixing plate is directly above the required diaphragm. Then start the square cylinder and move the suction nozzle fixing plate downward so that multiple pneumatic suction nozzles contact the diaphragm and continue to press down to lift the diaphragm by air pressure.

[0024] (3) The square cylinder moves the suction nozzle fixing plate upward, and then moves the multi-axis linear electric slide left and right and back and forth, so that the suction nozzle fixing plate moves to the top of the LED visual light source and the hole of the film is vertically aligned with the film positioning post. Then the square cylinder is started, and the suction nozzle fixing plate is moved downward, so that the film is placed on the LED visual light source and the film positioning post passes through the hole of the film. The LED visual light source is started and the visual camera sensor is used to check whether the film has defects and dust. When the film has defects, the automatic adsorption and transport structure assembly is started to pick up the film and move it to the top of the waste film placement box and place the film in the waste film placement box. When the film has no defects but has dust, the automatic cleaning module is started. The dust is sucked away by the multiple downward-facing gas nozzles of the automatic cleaning module and adsorbed into the automatic dust collector through the dust suction corrugated pipe. After the adsorption is completed or when the film has no defects and no dust is detected, step (4) is performed.

[0025] (4) The multi-axis electric slide is used to contact the film again through multiple pneumatic suction cups and continue to press down to lift the film by air pressure. Then the square cylinder moves the suction cup fixing plate upward. Then the multi-axis electric slide moves left and right and back and forth to move the suction cup fixing plate to the air gripper directly above the film mounting plate. The air gripper is activated to close and fold the corner of the film to separate the film from the PET film. The PET film is clamped by the air gripper. Then the pressing and mounting electric actuator is activated to move the pressing and mounting bracket. The air gripper moves with the pressing and mounting bracket to remove the PET film from the film. The rotary motor is activated simultaneously to rotate the air gripper to the side of the waste film placement box. Then the air gripper is released and the removed PET film is placed in the waste film placement box.

[0026] (5) Continue to lower the suction nozzle fixing plate through the square cylinder, place the diaphragm on the diaphragm mounting plate and pass the stacking tool positioning column through the hole of the diaphragm, start the stacking tool cylinder to retract the stacking tool positioning column downward, then start the pressing and mounting electric actuator to move the pressing and mounting bracket, press the diaphragm pressing block down through the pressing motion cylinder to press the electrostatic chuck diaphragm tightly, and at the same time, the diaphragm is scraped flat by the diaphragm pressing block through the movement of the pressing and mounting bracket.

[0027] (6) Then, in sequence, the other layers of film are stacked on top of the already placed film and pressed tightly to obtain a multi-layered electrostatic chuck blank.

[0028] The technical effects of this invention are as follows: 1. This invention, through a specially structured automatic membrane adsorption and transport assembly (which uses multiple pneumatic suction nozzles to lift the membrane, while other components move, achieving sequential and coordinated transfer), enables a virtually unmanned continuous flow of each layer of membrane in an electrostatic chuck, from material handling, inspection, dust removal, membrane separation to stacking and flattening. This breaks the traditional production mode of layered blanks produced by electrostatic chucks, which relies on manual, piece-by-piece operation. The production cycle per station can be reduced to approximately 30% of the original, and uninterrupted, continuous automated production can be achieved, significantly reducing the production time and cost of this type of product.

[0029] 2. This invention employs a specific film inspection method, combining LED backlight imaging with visual camera inspection. The film to be inspected is laid flat on an LED light source, and relying on backlight transmission imaging, it can accurately capture visible defects such as tiny scratches, wrinkles (or pinholes) on the film surface. Furthermore, it can also identify hidden quality problems such as uneven internal stress and localized abnormal light transmission, which cannot be detected by conventional surface visual inspection. Compared with traditional processes, this significantly improves the inspection effect and efficiency.

[0030] 3. This invention further improves production efficiency by integrating detection and dust removal into a single automatic cleaning assembly. For qualified membranes with adhering micro-dust, a negative pressure adsorption dust-free cleaning solution replaces traditional methods such as wiping with cleanroom cloths or high-pressure airflow blowing. This not only improves dust removal efficiency but also avoids secondary pollution caused by blowing dust into other areas of the cleanroom. Furthermore, the directional negative pressure suction solution of this invention can thoroughly remove floating dust and micro-particles adhering to the membrane surface without contacting the membrane surface or generating airflow diffusion, meeting the ultra-high cleanliness requirements of the electrostatic chuck core membrane. This avoids quality risks such as uneven electrostatic distribution or abnormal partial discharge in subsequent finished products caused by impurities on the membrane surface, thus improving both production efficiency and the quality of the final product.

[0031] 4. This invention uses a pneumatic suction cup nozzle to precisely fix the film body, and in conjunction with a dedicated pneumatic gripper, it can efficiently and effectively complete the automated tearing operation of PET release film. This solves the problems of film stretching and deformation, edge wrinkling, or uneven tearing force that easily occur when manually tearing release film in traditional methods, leading to film damage. Subsequent stacking, pressing, and air-scraping processes performed at the same station further achieve air-free and tight bonding between multiple layers of film, avoiding problems such as interlayer misalignment, air bubble residue, and localized poor bonding that often occur in traditional manual stacking. The final electrostatic chuck layered blank has high overall flatness and uniform interlayer bonding force, providing a highly consistent layered base structure for subsequent electrostatic chuck finishing. Furthermore, by setting guide posts and positioning posts at each station, this invention greatly improves the positioning of the film, further enhancing the accuracy of stacking.

[0032] 5. In a preferred embodiment, by specifically designing the claw plate structure of the pneumatic gripper, the rear half of the claw plate is thickened, thereby concentrating the overall mass distribution of the claw plate towards the pivot point. This brings the center of gravity closer to the pivot point, effectively reducing the torque burden during operation and moderately reducing the power input during gripping. This avoids excessive force when gripping the PET film and prevents the film from slipping. The front half of the claw plate only contacts the PET film along a relatively straight line for gripping, enabling precise alignment and localized clamping of the film, avoiding large-area compression that could cause wrinkling and tearing. Furthermore, by providing a rubber sleeve at the gripping point (top) of the claw plate, the elasticity of the rubber sleeve further enhances the clamping effect on the film, preventing slippage. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0034] Figure 1 This is a schematic diagram of the internal structure of the automatic stacking device for the electrostatic chuck of the present invention.

[0035] Figure 2 This is a schematic diagram of the automatic adsorption and transport assembly of the membrane in this invention.

[0036] Figure 3 This is a schematic diagram of the diaphragm inspection and automatic cleaning assembly of the present invention.

[0037] Figure 4 This is a schematic diagram of the automatic membrane release and membrane stacking assembly of the present invention.

[0038] Figure 5 for Figure 4 Enlarged structural diagram of the pneumatic gripper section.

[0039] Figure 6 This is a schematic diagram of the external structure of the automatic stacking device for the electrostatic chuck of the present invention.

[0040] Wherein: 1-Automatic stacking equipment housing, 101-Housing door; 2-Air source pressure control element, 3-Vacuum pump, 4-Vacuum pump isolation plate, 5-DC power supply, 6-Electric slide control driver, 7-Vision memory system, 8-Computer host, 9-Automatic vacuum cleaner, 10-Vacuum bellows; 11-Automatic membrane release and membrane stacking and pressing assembly; 1101-Pneumatic gripper; 11011-Rotating support; 11012-Clamping part; 11013-Top of clamping part; 1102-Pneumatic gripper mounting rotating bracket; 1103-Rotary motor; 1104-Pressing mounting bracket; 1105-Pressing fixing plate; 1106-Waste membrane placement box; 1107-Membrane pressing block; 1108-Pressing mounting electric actuator; 1109-Stacking tooling cylinder; 1110-Stacking tooling positioning post; 1111-Positioning post mounting plate; 1112-Membrane mounting and placement plate; 1113-Temperature electrode membrane; 1114-Stacked membrane positioning post; 1115-Pressing motion cylinder; 1116-Tooling cylinder mounting plate; 12- Computer touch screen; 13- Touch screen mounting bracket; 14-Diaphragm inspection and automatic cleaning assembly; 1401-Vision camera sensor mounting bracket; 1402-Sensor moving cylinder; 1403-Sensor mounting plate; 1404-Vision camera sensor; 1405-Cleaning module mounting bracket; 1406-Automatic cleaning module; 1407-LED vision light source; 1408-Cleaning installation electric actuator; 1409-Diaphragm positioning column; 1410-High voltage electrostatic electrode diaphragm. 15-Automatic membrane adsorption and transport assembly; 1501-Multi-axis linear electric slide; 1502-Electric slide drive unit; 1503-Connecting fixing plate; 1504-Connecting fixing column; 1505-Square cylinder; 1506-Square cylinder mounting plate; 1507-Suction cup nozzle fixing plate; 1508-Pneumatic suction cup nozzle; 1509-Guide column for suction cup nozzle fixing plate. 16-Automatic stacking equipment cover assembly; 1601-Cover assembly door; 17-Membrane placement box. Detailed Implementation

[0041] The process technology solution of the present invention will be further described below with reference to embodiments and accompanying drawings. Unless otherwise specified, each feature is merely one example of a series of equivalent or similar features. These embodiments are merely for the purpose of aiding understanding the present invention and should not be considered as specific limitations thereof.

[0042] Unless otherwise stated, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The terms "front," "rear," "left," "right," "inner," and "outer" used in this invention refer to relative positions and directions, not absolute positions, and do not absolutely limit the scope of protection of the invention.

[0043] While only preferred methods and materials have been described in this invention, any methods and materials similar or equivalent to those described herein may be used in the implementation or testing of this invention. All references to this specification are incorporated by way of citation to disclose and describe the methods and / or materials associated with those references. In the event of any conflict with any incorporated reference, the content of this specification shall prevail.

[0044] Various modifications and variations can be made to the specific embodiments described in this specification without departing from the scope or spirit of the invention, as will be apparent to those skilled in the art. Other embodiments derived from this specification will also be readily apparent to those skilled in the art. This specification and embodiments are merely exemplary.

[0045] The terms “include,” “including,” “have,” “contain,” etc., used in this article are all open-ended terms, meaning that they include but are not limited to.

[0046] Example 1

[0047] like Figure 1As shown, this embodiment of an automatic stacking device for electrostatic chuck products includes an automatic stacking device housing 1. An air source pressure control element 2 is installed on the outside of the housing 1 to supply air to the entire device. A vacuum pump 3 is placed inside the housing 1, and a vacuum pump isolation plate 4 is installed. A DC power supply 5, an electric slide control driver 6, and a vision memory system 7 are installed inside the housing 1, and a computer host 8 is also placed there. An automatic stacking device cover assembly 16 is installed on top of the housing 1. A computer touch screen 12 is fixedly mounted on the automatic stacking device cover assembly 16 via a touch screen mounting bracket 13. The automatic stacking device cover assembly 16 contains an automatic film adsorption and transport assembly 15, a film inspection and automatic cleaning assembly 14, an automatic film release and film stacking and pressing assembly 11, and a film placement box 17. The film placement box 17 can orderly place perforated electrostatic chuck films, printed electrostatic chuck films, and PET electrostatic chuck films that need to be stacked.

[0048] like Figure 2 As shown, the automatic membrane adsorption and transport assembly is used to pick up the membrane using a pneumatic suction nozzle and move the picked-up membrane to the membrane inspection and automatic cleaning assembly and the automatic membrane removal and membrane stacking assembly by the lateral and longitudinal movement of the multi-axis electric slide. The automatic membrane adsorption and transport assembly 15 includes a multi-axis linear electric slide 1501, an electric slide drive unit 1502, a connecting fixing plate 1503, a connecting fixing column 1504, a square cylinder 1505, a square cylinder mounting plate 1506, a suction nozzle fixing plate 1507, a pneumatic suction nozzle 1508, and a suction nozzle fixing plate guide column 1509. The multi-axis electric slide 1501 is equipped with a connecting fixing plate 1503. The connecting fixing plate 1503 is connected to the connecting fixing column 1504, and the square cylinder mounting plate 1506 is mounted on the square cylinder mounting plate 1506. The square cylinder 1505 is mounted on the square cylinder mounting plate 1506 and connected to the suction nozzle fixing plate 1507, which is guided and limited by the suction nozzle fixing plate guide column 1509. The suction nozzle fixing plate 1507 is equipped with a pneumatic suction nozzle 1508 (the pneumatic suction nozzle 1508 is...). Figure 2 The diagram shows a compressible, hollow, top-sealed, preferably air-evacuating, spring-shaped cylindrical structure made of rubber. The pneumatic suction nozzle 1508 can firmly hold the electrostatic chuck diaphragms that need to be stacked. For example... Figure 2 The multi-axis linear electric slide table shown includes upper left and right slide rails and lower front and rear slide rails. The two ends of the left and right slide rails are respectively fixed to the two inner side walls of the upper cover assembly. Left and right sliders are fixed to the top of the front and rear slide rails, and these sliders can drive the front and rear slide rails to slide left and right on the left and right slide rails. Front and rear sliders are fixed to the top of the connecting fixing plate, and these sliders can drive the connecting fixing plate to slide back and forth on the front and rear slide rails. Furthermore, as shown... Figure 2As shown, the bottom end of the guide post of the suction nozzle fixing plate is provided with a thick end, which is used to limit the suction nozzle fixing plate from moving further downward, that is, to limit the lowest position of the suction nozzle fixing plate.

[0049] like Figure 3 As shown, the diaphragm inspection and automatic cleaning assembly 14 in this embodiment includes a vision camera sensor mounting bracket 1401, a sensor moving cylinder 1402, a sensor mounting plate 1403, a vision camera sensor 1404, a cleaning module mounting bracket 1405, an automatic cleaning module 1406, an LED vision light source 1407, a cleaning installation electric actuator 1408, and a diaphragm positioning column 1409. The diaphragm inspection and automatic cleaning assembly 14 is used to inspect the diaphragm, which is automatically lifted and moved by the diaphragm suction and transport assembly, placed on the LED vision light source 1407 and positioned by the diaphragm positioning column 1409, using the vision camera sensor 1404. The automatic cleaning module 1406 removes dust through airflow adsorption, and the cleaning installation electric actuator 1408 drives the cleaning module mounting bracket 1405 to drive the automatic cleaning module 1406 to adsorb and remove dust from the entire diaphragm area. Figure 3 As shown, the visual camera sensor mounting bracket 1401 is fixed to the bottom wall of the upper cover assembly. A sensor moving cylinder 1402 is horizontally mounted on the top of the visual camera sensor mounting bracket, and a horizontal sensor fixing plate 1403 is provided on the piston rod of the sensor moving cylinder (e.g., Figure 3 As shown, the horizontal sensor fixing plate 1403 is also connected to the piston rod via an L-shaped plate that changes direction, thus enabling the sensor fixing plate 1403 to also move horizontally. A downward-facing visual camera sensor 1404 is installed at the bottom of the sensor fixing plate. An LED visual light source 1407 is installed on the bottom wall of the upper cover assembly below the visual camera sensor. A diaphragm positioning post 1409 is mounted on the LED visual light source. A cleaning installation electric actuator 1408 is installed on the side of the LED visual light source. An L-shaped cleaning module mounting bracket 1405 is slidably connected to the cleaning installation electric actuator. An automatic cleaning module 1406 is installed on the cleaning module mounting bracket, and the automatic cleaning module includes multiple downward-facing gas nozzles. And as... Figure 1 As shown, a suction corrugated pipe 10 is installed inside the automatic stacking equipment housing, and an automatic dust collector 9 is installed outside the automatic stacking equipment housing. The inlet of the suction corrugated pipe 10 is connected to the air nozzle on the automatic cleaning module 1406, and the outlet of the suction corrugated pipe 10 is connected to the automatic dust collector 9. The automatic dust collector 9 is equipped with a dust collection box and a suction pump. The suction pump draws dust from the diaphragm into the dust collection box through the suction corrugated pipe and the air nozzle. Figure 3 As shown, an exemplary demonstration is provided of a high-voltage electrostatic electrode diaphragm 1410 placed on an LED visual light source for detection.

[0050] like Figure 4 As shown, the automatic membrane separation and membrane stacking and pressing assembly 11 includes a pneumatic gripper 1101, a pneumatic gripper mounting rotating bracket 1102, a rotary motor 1103, a pressing mounting bracket 1104, a pressing fixing plate 1105, a waste membrane placement box 1106, a membrane pressing block 1107, a pressing mounting electric actuator 1108, a stacking tooling cylinder 1109, a stacking tooling positioning post 1110, a positioning post mounting plate 1111, a membrane mounting and placement plate 1112, a stacked membrane positioning post 1114, a pressing motion cylinder 1115, and a tooling cylinder mounting plate 1116. The automatic membrane release and membrane stacking assembly 11 is used to first clamp the PET membrane set at the bottom of the membrane by the air gripper 1101 after the membrane has been inspected and dusted by the membrane inspection and automatic cleaning assembly and then picked up by the membrane automatic adsorption and transport assembly. Then, the PET membrane is removed by the movement of the pressure mounting bracket 1104 driven by the pressure mounting electric actuator 1108. Then, the membrane after release is placed on the membrane mounting plate 1112 by the membrane automatic adsorption and transport assembly. The pressure mounting bracket 1104 is moved by the pressure mounting electric actuator 1108 and the membrane pressing block 1107 is used to scrape and press down the membrane to press the electrostatic chuck membrane tightly. The tooling cylinder mounting plate 1116 is fixed to the bottom wall of the upper cover assembly. Multiple vertical stacked tooling positioning posts 1110 are provided on the tooling cylinder mounting plate 1116. A horizontal positioning post mounting plate 1111 is mounted on the stacked tooling positioning posts 1110. A diaphragm mounting plate 1112 is provided on the positioning post mounting plate 1111. Multiple vertical stacked diaphragm positioning posts 1114 are provided on the diaphragm mounting plate 1112. The stacked diaphragm positioning posts 1114 are used to position the diaphragms placed on the diaphragm mounting plate 1112. The tooling cylinder 1109 can extend and retract the stacked diaphragm positioning post through the movement of the piston rod; a pressing and mounting electric actuator 1108 is provided on one or both sides of the tooling cylinder mounting plate 1116, and a pressing and mounting bracket 1104 is slidably fixed on the pressing and mounting electric actuator 1108. One or two pressing motion cylinders 1115 are provided on the pressing and mounting bracket 1104. The piston rod of the pressing motion cylinder 1115 can extend and retract in the vertical direction, and a pressing fixing plate 1105 is fixed on the piston rod of the pressing motion cylinder 1115 (via...). Figure 4As can be seen, the pressing and fixing plate 1105 is set vertically, but an L-shaped vertical plate is also set at its rear. The horizontal part of the bottom of the L-shaped vertical plate is connected to the piston rod of the pressing motion cylinder 1115, so that the pressing and fixing plate 1105 can also be displaced vertically along the side of the pressing motion cylinder 1115. A diaphragm pressing block 1107 is fixedly connected to the side of the pressing and fixing plate 1105. The diaphragm pressing block 1107 is used to flatten the diaphragm placed on the diaphragm mounting plate 1112 by driving the pressing and mounting bracket 1104 back and forth through the pressing and mounting electric actuator 1108. The pressing cylinder 1115 applies downward pressure to press the diaphragm down, thus pressing the electrostatic chuck diaphragm tightly. A waste film placement box 1106 is located behind the pressing mounting bracket 1104. A pneumatic gripper mounting rotating bracket 1102 is located at the top of the pressing mounting bracket 1104. The pneumatic gripper mounting rotating bracket 1102 rotates via a rotary motor 1103 located on its shaft. A pneumatic gripper 1101 is located at the top of the pneumatic gripper mounting rotating bracket 1102. The pneumatic gripper 1101 can close and open, and under the rotation of the pneumatic gripper mounting rotating bracket 1102, the pneumatic gripper 1101 can rotate to a position above the waste film placement box 1106. Figure 4 As shown, an exemplary demonstration shows the pressing of a temperature electrode diaphragm 1113 onto a diaphragm mounting plate 1112.

[0051] In this embodiment, as Figure 5 As shown, each of the pneumatic grippers 1101 includes two opposing gripper plates. Each gripper plate includes a rotating support portion 11011 and a clamping portion 11012. In this embodiment, the thickness H1 of the support portion is 30mm, and the thickness H2 of the clamping portion is 24mm, which satisfies... The requirements are met. Furthermore, in this embodiment, a rubber sleeve is provided at the top end 11013 of the clamping part. This design further reduces the risk of the PET film being punctured while still clamping it securely.

[0052] The above are all internal views of the automatic stacking device in this embodiment, such as... Figure 6 The image shows the appearance of the automatic stacking device of this embodiment, which also includes the box door 101 of the automatic stacking device housing and the upper cover assembly door (1601) of the automatic stacking device cover assembly to form a complete device.

[0053] Example 2

[0054] This embodiment illustrates the process of automatic stacking using the apparatus described in Embodiment 1, including the following steps: (1) Place the perforated films of different layers for preparing the electrostatic chuck in different compartments of the film placement box with the film facing down; for example Figure 1The four partitioned areas are used to place various perforated diaphragms. All diaphragms have an initial square plate structure, with positioning through holes at each of the four corners.

[0055] (2) Start-up Figure 2 The diaphragm automatic adsorption and transport assembly shown uses a multi-axis linear electric slide to move left and right and back and forth, so that the suction nozzle fixing plate is positioned directly above the desired diaphragm (for example, in this embodiment, a high-voltage electrostatic electrode diaphragm is being transported). Then, a square cylinder is activated to move the suction nozzle fixing plate downward, so that multiple pneumatic suction nozzles come into contact with the diaphragm and continue to press down to lift the diaphragm by air pressure.

[0056] (3) The square cylinder moves the suction cup nozzle fixing plate upward, and then the multi-axis electric slide moves left and right and forward and backward, so that the suction cup nozzle fixing plate moves to Figure 3 Position the diaphragm inspection and automatic cleaning assembly directly above the LED vision light source, aligning the diaphragm's holes vertically with the diaphragm positioning posts. Then, activate the square cylinder to move the suction cup nozzle fixing plate downwards, and place the diaphragm (such as...) Figure 3 In this embodiment, a high-voltage electrostatic electrode diaphragm 1410 is placed on an LED visual light source, with the diaphragm positioning post passing through the holes in the diaphragm. The LED visual light source is activated, and a visual camera sensor is used to check the diaphragm for defects and dust. If a defect is detected, the automatic adsorption and transport assembly is activated to pick up the diaphragm and move it above the waste film placement box, placing the diaphragm into the waste film placement box. If no defects are detected but dust is present, the automatic cleaning module is activated, and simultaneously, the cleaning installation electric actuator drives the cleaning module mounting bracket to move the automatic cleaning module. Figure 3 The membrane moves back and forth within the area shown. The dust is sucked away by the multiple downward-facing gas nozzles of the automatic cleaning module and adsorbed into the automatic dust collector through the dust-collecting bellows. After adsorption is completed (i.e., it is a qualified membrane) or when the membrane is detected to be without defects and without dust (also a qualified membrane), step (4) is performed.

[0057] (4) The multi-axis electric slide is used to contact the film again through multiple pneumatic suction cups and continue to press down to lift the film by air pressure. Then the square cylinder moves the suction cup fixing plate upward. Then the multi-axis electric slide moves left and right and back and forth to move the suction cup fixing plate to the air gripper directly above the film mounting plate. The air gripper is activated to close and fold the corner of the film to separate the film from the PET film. The PET film is clamped by the air gripper. Then the pressing and mounting electric actuator is activated to move the pressing and mounting bracket. The air gripper moves with the pressing and mounting bracket to remove the PET film from the film. The rotary motor is activated simultaneously to rotate the air gripper to the side of the waste film placement box. Then the air gripper is released and the removed PET film is placed in the waste film placement box.

[0058] (5) The suction cup nozzle fixing plate is lowered further by the square cylinder, the diaphragm is placed on the diaphragm mounting plate and the stacking fixture positioning post passes through the hole in the diaphragm (for illustrative purposes, other steps in the embodiment are as follows). Figure 4 As shown, the diaphragm in the example is a temperature electrode diaphragm 1113). The stacking tooling cylinder is activated to retract the stacking tooling positioning column downwards. Then, the pressing and mounting electric actuator is activated to move the pressing and mounting bracket. The pressing motion cylinder presses down the diaphragm pressing block to press the electrostatic chuck diaphragm tightly. At the same time, the diaphragm is flattened by the diaphragm pressing block through the movement of the pressing and mounting bracket.

[0059] (6) Then, in sequence, the other layers of film are stacked on top of the already placed film and pressed tightly to obtain a multi-layered electrostatic chuck blank.

[0060] The obtained electrostatic chuck blank can be further subjected to static pressing and sintering, as well as the removal of the square portion of the outer disk, to ultimately form the electrostatic chuck product.

[0061] This invention enables fully automated processes such as orderly selection of membranes, automatic membrane adsorption and transport structure, membrane inspection and automatic cleaning structure, and automatic PET membrane release and membrane stacking and pressing mechanism. It also greatly improves the product stacking qualification rate.

[0062] Comparative Example 1 This comparative example illustrates a comparative test using a gripper, gripper mounting bracket, and rotary motor setup not described in Example 1. The difference between this comparative example and Example 1 is that the gripper is directly configured with the gripper plate opening facing upwards, and the gripper mounting bracket and rotary motor are not included. All other settings are identical to Example 1. After 50 comparative operations, it was found that after the gripper was activated and closed, it was unable to fold the corners of the film and could not fully clamp the PET film, indicating that this setup in the comparative example cannot achieve efficient and stable results.

[0063] Comparative Example 2 This comparative example illustrates a comparative test using a gripper 1101 not specifically configured as described in Example 1. The difference between this comparative example and Example 1 is that the gripper 1101 only includes the clamping part 11012 and does not include the rotating support part 11011 (i.e., each gripper plate has the same thickness) and does not have a rubber sleeve. All other configurations are identical to Example 1. After 50 comparative operations, the PET film in the waste film storage box of this comparative example was inspected, and wrinkles and cracks were found, indicating that a small amount of PET film remained during film removal. This is because the gripper used excessive clamping force when clamping the PET film, and since the gripper plates cannot be perfectly straight, they damaged a portion of the PET film. This demonstrates that the gripper plate configuration of this embodiment can guarantee the final product quality.

[0064] The technical principles of the present invention have been described above with reference to specific embodiments. These descriptions are merely for explaining the principles of the invention and should not be construed as limiting the scope of protection of the invention in any way. Based on this explanation, those skilled in the art can readily conceive of other specific embodiments of the invention without inventive effort, and these embodiments will all fall within the scope of protection of the present invention.

Claims

1. An automatic stacking device, characterized in that, Includes the automatic stacking equipment housing and top cover assembly; The top cover assembly is located on the box of the automatic stacking equipment and includes an automatic membrane adsorption and transportation assembly, a membrane inspection and automatic cleaning assembly, an automatic membrane separation and membrane stacking and pressing assembly, and a membrane placement box. The membrane placement box is equipped with multiple compartments, each for stacking different membranes; The automatic membrane adsorption and transport assembly is located above the membrane placement box and includes a multi-axis electric slide, an electric slide drive unit, a connecting fixing plate, a connecting fixing column, a square cylinder, a square cylinder mounting plate, a suction nozzle fixing plate, a pneumatic suction nozzle, and a suction nozzle fixing plate guide column. The automatic membrane adsorption and transport assembly is used to pick up the membrane through the pneumatic suction nozzle and move the picked-up membrane to the membrane inspection and automatic cleaning assembly and the automatic membrane removal and membrane stacking and pressing assembly by the lateral and longitudinal movement of the multi-axis electric slide. The diaphragm inspection and automatic cleaning assembly includes a vision camera sensor mounting bracket, a sensor moving cylinder, a sensor mounting plate, a vision camera sensor, a cleaning module mounting bracket, an automatic cleaning module, an LED vision light source, a cleaning installation electric actuator, and a diaphragm positioning column. The diaphragm inspection and automatic cleaning assembly is used to perform vision camera sensor inspection on diaphragms that are automatically picked up and moved onto the LED vision light source and positioned by the diaphragm positioning column by the diaphragm automatic adsorption and transport assembly, and to remove dust by airflow adsorption through the automatic cleaning module. The automatic membrane release and membrane stacking assembly includes a pneumatic gripper, a pneumatic gripper mounting rotating bracket, a rotary motor, a pressing mounting bracket, a pressing fixing plate, a waste membrane placement box, a membrane pressing block, a pressing mounting electric actuator, a stacking tooling cylinder, a stacking tooling positioning column, a positioning column mounting plate, a membrane mounting and placement plate, a stacked membrane positioning column, a pressing motion cylinder, and a tooling cylinder mounting plate. The automatic membrane release and membrane stacking assembly is used to first clamp the PET membrane, which has been inspected and dusted by the membrane inspection and automatic cleaning assembly and is then picked up and moved by the automatic membrane adsorption and transport assembly. The pneumatic gripper clamps the PET membrane located at the bottom of the membrane. Then, the pressing mounting electric actuator drives the pressing mounting bracket to move, thus removing the PET membrane. The automatic membrane adsorption and transport assembly then places the released membrane onto the membrane mounting and placement plate. The pressing mounting electric actuator drives the pressing mounting bracket to move, and the membrane pressing block flattens and presses down the membrane, thus pressing the electrostatic chuck membrane tightly.

2. The automatic stacking device according to claim 1, characterized in that, The multi-axis linear electric slide is mounted on the side wall of the upper cover assembly. The electric slide drive unit is used to drive the multi-axis linear electric slide to slide laterally and longitudinally. A horizontal connecting and fixing plate is provided at the bottom of the multi-axis linear electric slide. The connecting and fixing plate is fixed to the square cylinder mounting plate through multiple vertically arranged connecting and fixing columns. The square cylinder is mounted on the square cylinder mounting plate. The piston rod at the bottom of the square cylinder is connected to a horizontally arranged suction cup nozzle fixing plate. Multiple pneumatic suction cup nozzles are vertically arranged at the bottom of the suction cup nozzle fixing plate. One or more suction cup nozzle fixing plate guide columns are vertically fixed to the bottom of the square cylinder mounting plate. The suction cup nozzle fixing plate guide columns pass through the suction cup nozzle fixing plate, allowing the suction cup nozzle fixing plate to slide up and down along the suction cup nozzle fixing plate guide columns.

3. The automatic stacking device according to claim 1 or 2, characterized in that, The multi-axis linear electric slide table includes left and right slide rails and front and rear slide rails. The two ends of the left and right slide rails are respectively fixed to the two inner side walls of the upper cover assembly. The top of the front and rear slide rails are fixed with left and right sliders, which can drive the front and rear slide rails to slide left and right on the left and right slide rails. The top of the connecting fixing plate is fixed with front and rear sliders, which can drive the connecting fixing plate to slide back and forth on the front and rear slide rails. The bottom of the guide post of the suction nozzle fixing plate is provided with a thick end, which is used to limit the suction nozzle fixing plate from moving further downward.

4. The automatic stacking device according to claim 1, characterized in that, A visual camera sensor mounting bracket is fixed to the bottom wall of the upper cover assembly. A sensor moving cylinder is horizontally mounted on the top of the visual camera sensor mounting bracket. A horizontal sensor fixing plate is set on the piston rod of the sensor moving cylinder. A downward-facing visual camera sensor is set at the bottom of the sensor fixing plate. An LED visual light source is set on the bottom wall of the upper cover assembly below the visual camera sensor. A diaphragm positioning post is mounted on the LED visual light source. A cleaning installation electric actuator is set on the side of the LED visual light source. An "L"-shaped cleaning module mounting bracket is slidably connected to the cleaning installation electric actuator. An automatic cleaning module is set on the cleaning module mounting bracket. The automatic cleaning module includes multiple downward-facing gas nozzles.

5. The automatic stacking device according to claim 4, characterized in that, A vacuuming corrugated pipe is installed inside the automatic stacking equipment housing, and an automatic vacuuming processor is installed outside the automatic stacking equipment housing. The inlet of the vacuuming corrugated pipe is connected to the gas nozzle on the automatic cleaning module, and the outlet of the vacuuming corrugated pipe is connected to the automatic vacuuming processor. The automatic vacuuming processor is equipped with a dust collection box, and the dust on the diaphragm is transferred to the dust collection box through the vacuuming corrugated pipe.

6. The automatic stacking device according to claim 1, characterized in that, The tooling cylinder mounting plate is fixed to the bottom wall of the upper cover assembly. Multiple vertical stacked tooling positioning posts are provided on the tooling cylinder mounting plate. A horizontal positioning post mounting plate is mounted on these posts. A diaphragm mounting plate is positioned on top of the positioning post mounting plate, and multiple vertical stacked diaphragm positioning posts are provided on the diaphragm mounting plate. These posts are used to position the diaphragms placed on the diaphragm mounting plate. The stacked tooling cylinder can extend and retract the stacked diaphragm positioning posts through the movement of its piston rod. A pressing and mounting electric actuator is provided on one or both sides of the tooling cylinder mounting plate. A pressing and mounting bracket is slidably fixed to the pressing and mounting electric actuator. One or two pressing and moving cylinders are provided on the pressing and mounting bracket. The piston rods of these pressing and moving cylinders can extend vertically. The compression motion cylinder has a compression fixing plate fixed on its piston rod. A diaphragm compression block is fixed to the side of the compression fixing plate. The diaphragm compression block is used to flatten the diaphragm placed on the diaphragm mounting plate by driving the compression mounting bracket to slide back and forth through the compression mounting electric actuator. At the same time, the compression motion cylinder presses the diaphragm down to compress the electrostatic chuck diaphragm. A waste film placement box is provided behind the compression mounting bracket. A pneumatic gripper mounting rotating bracket is provided at the top of the compression mounting bracket. The pneumatic gripper mounting rotating bracket is rotated by a rotary motor located on the shaft. A pneumatic gripper is provided at the top of the pneumatic gripper mounting rotating bracket. The pneumatic gripper can close and open, and it can rotate to the top of the waste film placement box under the rotation of the pneumatic gripper mounting rotating bracket.

7. The automatic stacking device according to claim 1, characterized in that, The automatic stacking equipment housing includes a vacuum pump, a vacuum pump isolation plate, a DC power supply, an electric slide control driver, a vision storage system, a computer host, and a dust collection bellows. Outside the housing are an air source pressure control element and an automatic dust collector. A vacuum pump is located on one side of the vacuum pump isolation plate, providing negative pressure to components requiring it within the automatic stacking device. On the other side of the isolation plate are the DC power supply, electric slide control driver, vision storage system, and computer host. The DC power supply provides power to all components within the automatic stacking device. The electric slide control driver plans and controls the operation of the multi-axis electric slide, the cleaning and mounting electric actuator, and the pressing and mounting electric actuator. The vision storage system controls, stores, and interprets signals from the vision camera sensor. The computer host sets and plans the operation of all devices. The dust collection bellows connects the automatic cleaning module to the automatic dust collector. The air source pressure control element supplies and controls the gas to each cylinder.

8. The automatic stacking device according to claim 1, characterized in that, A computer touchscreen is also connected to the side wall of the upper cover assembly via a touchscreen mounting bracket. The computer touchscreen is used to control the various components within the automatic stacking device.

9. The automatic stacking device according to claim 1, characterized in that, Each of the aforementioned pneumatic grippers includes two opposing gripper plates. Each gripper plate includes a rotating support portion and a clamping portion, wherein the thickness of the support portion is H1, and the thickness of the clamping portion is H2, satisfying the following conditions: Furthermore, a rubber sleeve is provided at the top of the clamping part.

10. An automatic stacking method for an electrostatic chuck, characterized in that, The process, performed using the automatic stacking apparatus according to any one of claims 1 to 9, includes the following steps: (1) Place the perforated films of different layers of the electrostatic chuck into different compartments of the film placement box with the film facing down; (2) Start the automatic adsorption and transport assembly of the diaphragm. Move the multi-axis electric slide left and right and back and forth so that the suction nozzle fixing plate is directly above the required diaphragm. Then start the square cylinder and move the suction nozzle fixing plate downward so that multiple pneumatic suction nozzles contact the diaphragm and continue to press down to lift the diaphragm by air pressure. (3) The square cylinder moves the suction nozzle fixing plate upward, and then moves the multi-axis linear electric slide left and right and back and forth, so that the suction nozzle fixing plate moves to the top of the LED visual light source and the hole of the film is vertically aligned with the film positioning post. Then the square cylinder is started, and the suction nozzle fixing plate is moved downward, so that the film is placed on the LED visual light source and the film positioning post passes through the hole of the film. The LED visual light source is started and the visual camera sensor is used to check whether the film has defects and dust. When the film has defects, the automatic adsorption and transport structure assembly is started to pick up the film and move it to the top of the waste film placement box and place the film in the waste film placement box. When the film has no defects but has dust, the automatic cleaning module is started. The dust is sucked away by the multiple downward-facing gas nozzles of the automatic cleaning module and adsorbed into the automatic dust collector through the dust suction corrugated pipe. After the adsorption is completed or when the film has no defects and no dust is detected, step (4) is performed. (4) The multi-axis electric slide table contacts the diaphragm again through multiple pneumatic suction nozzles and continues to press down to lift the diaphragm by air pressure. Then the square cylinder moves the suction nozzle fixing plate upward. Then the multi-axis electric slide table moves left and right and forward and backward to move the suction nozzle fixing plate to the air gripper directly above the diaphragm mounting plate. The air gripper is activated to close and fold the corner of the diaphragm to separate the diaphragm and PET film. The air gripper clamps the PET film. Then the pressing and mounting electric actuator is activated to move the pressing and mounting bracket. The air gripper moves with the pressing and mounting bracket to remove the PET film from the diaphragm. After the PET film is removed, the pressing and mounting bracket moves to the initial position. The rotary motor is activated simultaneously to rotate the air gripper to the side of the waste film placement box. Then the air gripper is released and the removed PET film is placed in the waste film placement box. (5) Continue to lower the suction nozzle fixing plate through the square cylinder, place the diaphragm on the diaphragm mounting plate and the stacking tooling positioning column passes through the hole of the diaphragm, start the stacking tooling cylinder to retract the stacking tooling positioning column downward, then start the pressing and mounting electric actuator to move the pressing and mounting bracket, press the diaphragm pressing block down through the pressing motion cylinder to press the electrostatic chuck diaphragm tightly, and at the same time, scrape the diaphragm flat through the diaphragm pressing block by moving the pressing and mounting bracket. (6) Then, in sequence, the other layers of film are stacked on top of the already placed film and pressed tightly to obtain a multi-layered electrostatic chuck blank.

Images