Radial transmission structure and radial array pneumatic pump comprising same

Abstract

The application relates to the technical field of air pumps, and discloses a radial transmission structure and a radial array type air pump containing the same, which comprises a base provided with a cylindrical hole at the upper end and the lower end; a radial sliding rotating shaft which is provided with a support and a sliding part mounted on the top of the support; the support is rotatably connected to the inner side of the cylindrical hole; when rotating, the central axis of the support is arranged to be non-coaxial with the central axis of the sliding part; the radial transmission structure drives the sliding part to produce stable revolution through the uniform rotation of the support in the cylindrical hole of the base; the sliding part realizes radial sliding in rotation through the cooperation of the sliding key and the radial groove on the sliding table, and forms controllable eccentric motion; the eccentric motion is transmitted to the moving disc through the ball bearings in the connecting holes, so that the moving disc produces corresponding translational offset; finally, the support plate is continuously and smoothly pushed to do radial linear reciprocating motion in the positioning sliding groove of the base through the slide rails.

Description

Technical Field

[0001] This invention relates to the field of pneumatic pump technology, and more specifically, to a radial drive structure and a radial array pneumatic pump comprising the same. Background Technology

[0002] In the field of microelectronics manufacturing, the transportation of chemicals faces extreme operating conditions such as no metal contact and no lubrication throughout the process, which makes it difficult to directly apply pumping equipment suitable for conventional fluids. Pneumatic pumps have become an important choice in this field due to their corrosion resistance and pollution prevention characteristics. Their core operation relies on the cylinder driving the diaphragm or air bag of the internal directional valve to reciprocate. Although this design brings advantages such as high pressure resistance and corrosion resistance, its inherent intermittent reciprocating motion characteristics result in periodic pulsations in outlet flow and pressure.

[0003] Despite numerous efforts by the industry to optimize the motion process and add energy storage links, the results have been limited. The fundamental reason is that the intermittent motion characteristics of reciprocating cylinders are determined by their inherent mechanical structure, making it difficult to achieve truly continuous and stable fluid output through external optimization. This contradiction highlights the limitations of a single and fixed motion structure in meeting diverse precision conveying needs, and also results in a narrow range of equipment applications and high costs.

[0004] Therefore, to break through the existing bottlenecks, innovation is needed from the root of the motion generation mechanism; there is an urgent need for a core transmission mechanism that can convert rotational motion into continuous, smooth, and flexibly adjustable linear motion with radial stroke; based on this, by driving multiple parallel pumping units through modular design, it is possible to achieve a high degree of stability and adjustability of flow and pressure while meeting stringent chemical compatibility requirements, thereby providing a better solution for high-end process equipment. Summary of the Invention

[0005] To overcome the above-mentioned technical problems, the present invention proposes a radial transmission structure and a radial array pneumatic pump containing the same.

[0006] The present invention achieves the above objectives through the following technical solutions: A radial transmission structure, comprising: The base has cylindrical holes at both its top and bottom ends; A radial sliding shaft has a support member and a sliding member mounted on the top of the support member. The support member is rotatably connected to the inner side of the cylindrical hole. When rotating, the central axis of the support member is not coaxial with the central axis of the sliding member. At least one set of motion conversion components is rotatably connected to the sliding member to convert the rotation of the radial sliding shaft about the central axis of the support member into radial transmission; The limiting mechanism includes a bidirectional threaded rod that extends through the sliding member in the radial displacement direction, and mounting plates are fastened between the two ends of the bidirectional threaded rod and the top of the support member.

[0007] As a further optimization of the present invention, the bottom of the support member is axially connected to the driving device, and a bearing is installed between the inner wall of the cylindrical hole and the outer wall of the support member.

[0008] As a further optimization of the present invention, the top of the support member is provided with a slide table, the top of the slide table is provided with a radial groove, and the side of the sliding member is provided with a sliding key that cooperates with the radial groove. The sliding key slides radially along the radial sliding axis in the radial groove so that the central axis of the sliding member is not coaxial with the central axis of the support member.

[0009] As a further optimization of the present invention, the motion transformation component includes: A movable disk, which is rotatably connected to the sliding member; A slide rail is installed on the side wall of the movable disk. A support plate is provided on the side of the slide rail away from the movable disk. The bottom of the support plate slides on the top of the base, and the top of the base is provided with a positioning groove that is adapted to slide with the bottom of the support plate.

[0010] As a further optimization of the present invention, a connecting hole is provided at the central axis position of the moving disk, and a ball bearing is installed between the outer side wall of the sliding member and the inner side wall of the connecting hole.

[0011] As a further optimization of the present invention, the limiting mechanism further includes: Two sets of limiting sleeve rods are symmetrically threaded on the outside of the bidirectional threaded rod, and the two ends of the limiting sleeve rods extend to the inside of the radial groove. The two ends of the inner wall of the radial groove are provided with positioning grooves that slide and adapt to the ends of the limiting sleeve rods. An elongated groove is provided in the middle of the inner sidewall of the radial groove and is slidably engaged with the sliding key.

[0012] To address the aforementioned technical problems, a second aspect of the present invention is to provide a radial array pneumatic pump including the aforementioned radial transmission structure.

[0013] As a further optimization of the present invention, the support has a one-way valve seat fastened to its bottom. One side of the support and the one-way valve seat is engaged with the side of the base. The side of the base is provided with a slot that matches the side of the support and the one-way valve seat. Limiting grooves are symmetrically provided on both sides of the top of the support. The pump body is slidably installed on the top of the limiting groove. Two sets of connecting tubing, one end of which is connected to the two sets of liquid inlet ends on the side of the one-way valve seat; The connecting rod has its piston end securely and sealed to the inside of the pump body.

[0014] As a further optimization of the present invention, the bottom of the one-way valve seat is symmetrically provided with two sets of liquid outlets, and the liquid outlets and liquid inlets are interconnected inside the one-way valve seat.

[0015] As a further optimization of the present invention, the end of the connecting rod away from the pump body is fastened to the side of the support plate, and the end of the pump body away from the connecting rod is provided with a support plate that is fastened to the limiting slide groove.

[0016] The beneficial effects of this invention are as follows: 1. This invention drives a sliding component to generate a stable revolution by rotating the support component at a constant speed within the cylindrical hole of the base. The sliding component achieves radial sliding during rotation through the cooperation of the sliding key and the radial groove on the slide table, forming a controllable eccentric motion. This eccentric motion is transmitted to the moving disk through the ball bearing in the connecting hole, causing the moving disk to produce a corresponding translational offset. Finally, the sliding rail pushes the support plate to make a continuous and smooth radial linear reciprocating motion within the positioning groove of the base. This transmission chain fundamentally transforms the rotational input into a radial linear output without rigid impact, resulting in continuous and stable motion.

[0017] 2. This invention, by rotating a bidirectional threaded rod, can synchronously adjust the distance between its two end limiting sleeves in the radial groove, thereby precisely limiting the sliding stroke of the sliding key, thus achieving stepless adjustment of the eccentricity of the sliding component; this adjustment directly and linearly changes the final reciprocating stroke amplitude of the support plate, allowing the output displacement to be flexibly adjusted according to process requirements; this core transmission mechanism can drive multiple support plates arranged in a regular polygonal array along the circumference of the base; each support plate independently drives a pump body through a connecting rod, and a single rotary power source can synchronously drive all pump units to work in coordination.

[0018] 3. This invention uses multiple pump bodies to compress sequentially in time, and their outputs converge at the fluid end, thereby significantly reducing the pulsation of a single pump body and converging into a nearly continuous and stable total flow rate. The entire transmission process mainly relies on the dry sliding fit between the sliding key and the radial groove, as well as the slide rail connection between the moving disk and the support plate. No lubricant is required, and key contact parts can be made of non-metallic materials such as ceramics, which perfectly meets the stringent working conditions of microelectronic chemical transportation. Attached Figure Description

[0019] Figure 1 This is a three-dimensional structural schematic diagram of the present invention; Figure 2 This is a schematic diagram of the explosive decomposition of the present invention; Figure 3 This is an enlarged schematic diagram of the structure at the radial sliding shaft in this invention; Figure 4 This is an exploded dissection diagram of the structure at the radial sliding pivot in this invention; Figure 5 This is an enlarged cross-sectional view of the base structure in this invention.

[0020] In the picture: 101. Base; 102. One-way valve seat; 103. Connecting conduit; 104. Support plate; 105. Pump body; 106. Connecting rod; 107. Moving plate; 108. Sliding component; 109. Support plate; 110. Support; 111. Slide table; 112. Support component; 113. Bearing; 114. Slide rail; 115. Limiting groove; 116. Connecting hole; 117. Cylindrical hole; 118. Positioning groove; 119. Slot; 200. Limiting mechanism; 201. Bidirectional threaded rod; 202. Sliding key; 203. Limiting sleeve rod; 204. Mounting plate; 205. Positioning groove; 206. Radial groove; 207. Long oval groove. Detailed Implementation

[0021] The subject matter described herein will now be discussed with reference to exemplary embodiments. It should be understood that these embodiments are discussed only to enable those skilled in the art to better understand and implement the subject matter described herein, and changes may be made to the function and arrangement of the elements discussed without departing from the scope of this specification. Various processes or components may be omitted, substituted, or added as needed in the examples. Furthermore, features described in some examples may be combined in other examples.

[0022] Example 1 like Figures 1 to 5 As shown, a radial transmission structure has a base 101 with cylindrical holes 117 at both its upper and lower ends. A radial sliding shaft has a support member 112 and a sliding member 108 mounted on the top of the support member 112. The support member 112 is rotatably connected to the inner side of the cylindrical hole 117. When rotating, the central axis of the support member 112 is not coaxial with the central axis of the sliding member 108. At least one set of motion conversion components is rotatably connected to the sliding member 108 to convert the rotation of the radial sliding shaft about the central axis of the support member 112 into radial transmission; The limiting mechanism 200 includes a bidirectional threaded rod 201 that runs through the sliding member 108 in the radial displacement direction, and mounting plates 204 are fastened between the two ends of the bidirectional threaded rod 201 and the top of the support member 112. The bottom of the support member 112 is axially connected to the drive device, and a bearing 113 is installed between the inner wall of the cylindrical hole 117 and the outer wall of the support member 112. The top of the support member 112 is provided with a slide table 111, the top of the slide table 111 is provided with a radial groove 206, and the side of the sliding member 108 is provided with a sliding key 202 that cooperates with the radial groove 206. The sliding key 202 slides radially along the radial sliding axis in the radial groove 206 so that the central axis of the sliding member 108 is not coaxial with the central axis of the support member 112. The motion transformation components include: The movable disk 107 is rotatably connected to the sliding member 108; The slide rail 114 is installed on the side wall of the movable disk 107. A support plate 109 is provided on the side of the slide rail 114 away from the movable disk 107. The bottom of the support plate 109 slides on the top of the base 101, and the top of the base 101 is provided with a positioning groove 118 that is adapted to slide with the bottom of the support plate 109. A connecting hole 116 is provided at the central axis position of the movable disk 107, and a ball bearing is installed between the outer side wall of the sliding member 108 and the inner side wall of the connecting hole 116.

[0023] The radial transmission structure proposed in this embodiment is used as follows: the support member 112 is rotated by an external drive device, and then the sliding member 108 at the top of the slide table 111 is rotated axially by the support member 112. At this time, the bearing 113 on the outer side of the support member 112 ensures that the support member 112 can rotate stably inside the cylindrical hole 117. During the axial rotation of the sliding member 108, due to centrifugal force, the sliding member 108 undergoes radial sliding displacement inside the radial groove 206. The radial sliding displacement of the sliding member 108 makes the central axis of the sliding member 108 not be on the same vertical line as the central axis of the support member 112 during the rotation process. Furthermore, the radial offset of the sliding member 108 causes the moving disk 107 to follow the offset. During the rotation of the sliding member 108, a ball bearing is provided between the outer side of the sliding member 108 and the inner side wall of the connecting rod 106, thereby ensuring the normal rotation of the sliding member 108. The outer side of the movable disk 107 is slidably connected to the support plate 109 via the slide rail 114. As the movable disk 107 moves along with it, it pushes the support plate 109 connected to the slide rail 114 to make radial horizontal displacement.

[0024] Example 2 like Figures 1 to 3 As shown, in a radial transmission structure, the limiting mechanism 200 further includes: Two sets of limiting sleeve rods 203 are symmetrically threaded on the outside of the bidirectional threaded rod 201, and the two ends of the limiting sleeve rods 203 extend to the inside of the radial groove 206 respectively. The two ends of the inner wall of the radial groove 206 are provided with positioning grooves 205 that are slidably adapted to the ends of the limiting sleeve rods 203. The elongated groove 207 is located in the middle of the inner wall of the radial groove 206 and is slidably engaged with the sliding key 202.

[0025] The radial transmission structure proposed in this embodiment is used as follows: when the sliding member 108 is radially displaced, it slides on the outside of the bidirectional threaded rod 201, thereby driving the sliding key 202 to slide inside the elongated groove 207. By rotating the bidirectional threaded rod 201, the two sets of limiting sleeve rods 203 are driven to move closer or further apart, thereby realizing the function of adjusting the distance between the two sets of limiting sleeve rods 203. As the distance between the limiting sleeve rods 203 changes, the radial offset distance of the sliding part 108 is controlled. This reduces or increases the radial deflection radius of the sliding component 108, thereby adjusting the deflection amplitude of the moving disk 107. By changing the deflection amplitude of the moving disk 107, the radial displacement radius of the support plate 109 is adjusted.

[0026] Example 3 like Figure 1 , Figure 2 As shown, a radial array pneumatic pump has a support 110, the bottom of which is fastened to a one-way valve seat 102. One side of the support 110 and the one-way valve seat 102 is engaged with the side of the base 101. The side of the base 101 is provided with a slot 119 that matches the side of the support 110 and the one-way valve seat 102. The top two sides of the support 110 are symmetrically provided with limiting grooves 115. The pump body 105 is slidably installed on the top of the limiting grooves 115. Two sets of connecting conduits 103, one end of which is connected to two sets of liquid inlet ends on the side of the one-way valve seat 102; Connecting rod 106, the piston end of connecting rod 106 is tightly and sealed to the inside of pump body 105; Two sets of liquid outlets are symmetrically arranged at the bottom of the one-way valve seat 102, and the liquid outlets and liquid inlets are interconnected inside the one-way valve seat 102. The end of the connecting rod 106 away from the pump body 105 is fastened to the side of the support plate 109, and the end of the pump body 105 away from the connecting rod 106 is provided with a support plate 104 that is fastened to the limiting slide groove 115.

[0027] The radial array pneumatic pump proposed in this embodiment is used as follows: as the support plate 109 is radially displaced, the connecting rod 106 drives the pump body 105 to contract, thereby compressing the gas inside the pump body 105. Compressed gas passes through the interior of the pneumatic pump at one end of the pump body 105, thereby providing high-pressure gas to the interior of the pneumatic pump; The liquid inside the pneumatic pump is driven by gas to flow into the inlet end of the connecting pipe 103, and then output from the outlet end of the one-way valve seat 102. By axially arraying several groups of pump bodies 105 distributed on the outside of the base 101, the function of continuously providing stable airflow to the inside of the pneumatic pump is realized, thereby realizing the function of the pneumatic pump to stably pump liquid. Furthermore, the more pump bodies 105 evenly distributed on the outside of the base 101, the more high-pressure gas is provided, and the more stable the liquid pumping becomes. It should be noted that the pneumatic pump body is existing technology and will not be described in detail here. In addition, the side facades of the base 101 and the movable plate 107 are both regular polygonal structures, and the number of sides of the regular polygons is even.

[0028] The specific implementation methods of the embodiments of the present invention have been described above. However, the embodiments of the present invention are not limited to the specific implementation methods described above. The specific implementation methods described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of the embodiments of the present invention, all of which are within the protection scope of the embodiments of the present invention.

Claims

1. A radial transmission structure, characterized in that, include: The base (101) has cylindrical holes (117) at its upper and lower ends. A radial sliding shaft has a support (112) and a sliding member (108) mounted on the top of the support (112). The support (112) is rotatably connected to the inner side of the cylindrical hole (117). When rotating, the central axis of the support (112) is not coaxial with the central axis of the sliding member (108). At least one set of motion conversion components is rotatably connected to the sliding member (108) to convert the rotation of the radial sliding shaft about the central axis of the support member (112) into radial transmission; The limiting mechanism (200) includes a bidirectional threaded rod (201) that extends through the sliding member (108) in the radial displacement direction, and mounting plates (204) are fastened between the two ends of the bidirectional threaded rod (201) and the top of the support member (112).

2. The radial transmission structure according to claim 1, characterized in that, The bottom of the support member (112) is axially connected to the drive device, and a bearing (113) is installed between the inner wall of the cylindrical hole (117) and the outer wall of the support member (112).

3. The radial transmission structure according to claim 1, characterized in that, The support member (112) has a slide (111) on its top, and a radial groove (206) is provided on the top of the slide (111). The sliding member (108) has a sliding key (202) on its side that cooperates with the radial groove (206). The sliding key (202) slides radially along the radial sliding axis in the radial groove (206) so that the central axis of the sliding member (108) is not coaxial with the central axis of the support member (112).

4. The radial transmission structure according to claim 1, characterized in that, The motion transformation component includes: A movable disk (107) is rotatably connected to the sliding member (108); A slide rail (114) is installed on the side wall of the movable disk (107). A support plate (109) is provided on the side of the slide rail (114) away from the movable disk (107). The bottom of the support plate (109) slides on the top of the base (101). The top of the base (101) is provided with a positioning groove (118) that is adapted to slide with the bottom of the support plate (109).

5. A radial transmission structure according to claim 4, characterized in that, A connecting hole (116) is provided at the central axis position of the movable disk (107), and a ball bearing is installed between the outer side wall of the sliding member (108) and the inner side wall of the connecting hole (116).

6. A radial transmission structure according to claim 1, characterized in that, The limiting mechanism (200) further includes: Two sets of limiting sleeve rods (203) are symmetrically threaded on the outside of the bidirectional threaded rod (201), and the two ends of the limiting sleeve rods (203) extend to the inside of the radial groove (206). The two ends of the inner wall of the radial groove (206) are provided with positioning grooves (205) that slide and adapt to the ends of the limiting sleeve rods (203). The elongated groove (207) is located in the middle of the inner wall of the radial groove (206) and is slidably engaged with the sliding key (202).

7. A radial array pneumatic pump comprising the radial drive structure according to any one of claims 1-6.

8. A radial array pneumatic pump according to claim 6, characterized in that, include: A support (110) has a one-way valve seat (102) fastened to its bottom. One side of the support (110) and the one-way valve seat (102) is engaged with the side of the base (101). The side of the base (101) is provided with a slot (119) that is adapted to the side of the support (110) and the one-way valve seat (102). The top two sides of the support (110) are symmetrically provided with limit grooves (115). The pump body (105) is slidably installed on the top of the limit groove (115). Two sets of connecting conduits (103) are connected at one end to two sets of liquid inlet ends on the side of the one-way valve seat (102); The connecting rod (106) has its piston end securely and sealed to the inside of the pump body (105).

9. A radial array pneumatic pump according to claim 1, characterized in that, The bottom of the one-way valve seat (102) is symmetrically provided with two sets of liquid outlets, and the liquid outlets and liquid inlets are interconnected inside the one-way valve seat (102).

10. A radial array pneumatic pump according to claim 1, characterized in that, The end of the connecting rod (106) away from the pump body (105) is fastened to the side of the support plate (109), and the end of the pump body (105) away from the connecting rod (106) is provided with a support plate (104) that is fastened to the limiting slide groove (115).

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