Fan monitoring device and monitoring method for semiconductor equipment

Abstract

The application relates to the technical field of device monitoring, and particularly provides a fan monitoring device and a monitoring method of a semiconductor device, which comprises a bus communication module, a driving sampling unit and a strong-weak electric isolation filtering protection unit; the strong-weak electric isolation filtering protection unit is arranged between the bus communication module and a plurality of independent driving sampling units; each driving sampling unit is electrically isolated from each other, corresponds to a fan to be monitored, and comprises a PWM speed regulation driving circuit, a current sampling circuit and a feedback acquisition circuit; the output end of the PWM speed regulation driving circuit is connected with a PWM speed regulation pin of the corresponding fan, the current sampling circuit is connected in series in a power supply loop of the corresponding fan, and the input end of the feedback acquisition circuit is connected with a feedback signal pin of the corresponding fan; and the bus communication module is connected with the plurality of driving sampling units. The fan control of the semiconductor device in the related art is not only easy to be interfered, but also can only be controlled in the same way, so that the problem that the more delicate control demand cannot be met is solved.

Description

Technical Field

[0001] This invention relates to the field of equipment monitoring technology, and in particular to a fan monitoring device and monitoring method for semiconductor equipment. Background Technology

[0002] With the increasing integration of industrial automation equipment, energy storage cabinets, and large-scale electrical control devices, the heat generated by power-consuming components inside these devices is concentrated, requiring multiple cooling fans for forced cooling. Traditional fans often use unified switch control, analog voltage regulation, or ordinary PWM (Pulse Width Modulation) centralized speed control, but these methods have the following problems: they can only achieve overall synchronous start / stop and speed limiting, and cannot independently and accurately adjust the speed of each fan, making it difficult to adapt to localized and differentiated heat dissipation needs; they lack digital real-time acquisition and online monitoring functions, making it impossible to collect the speed, current, and operational fault information of each fan individually; the control real-time performance is poor, making it difficult to detect potential equipment malfunctions in a timely manner; and the wiring is cumbersome and messy, making maintenance troublesome.

[0003] There is currently no effective solution to the problem that fan control in semiconductor devices is not only susceptible to interference, but also cannot meet the needs of more precise control due to the limitation of a single control method. Summary of the Invention

[0004] The present invention provides a fan monitoring device and method for semiconductor equipment, which at least solves the problems in the related art that the fan control of semiconductor equipment is not only susceptible to interference, but also cannot meet more refined control requirements due to the limitation of a single control method.

[0005] One aspect of this invention provides a fan monitoring device for a semiconductor device, comprising: a bus communication module, a drive sampling unit, and a high-voltage / low-voltage isolation and filtering protection unit; the high-voltage / low-voltage isolation and filtering protection unit is disposed between the bus communication module and multiple independent drive sampling units, and is used to isolate electromagnetic interference generated by the fan motor; each drive sampling unit is electrically isolated from the others, and each drive sampling unit corresponds one-to-one with the fan to be monitored; each drive sampling unit includes a PWM speed control drive circuit, a current sampling circuit, and a feedback acquisition circuit; the output terminal of the PWM speed control drive circuit is connected to the PWM speed control pin of the corresponding fan, the current sampling circuit is connected in series in the power supply circuit of the corresponding fan, and the input terminal of the feedback acquisition circuit is connected to the feedback signal pin of the corresponding fan; the bus communication module is connected to multiple drive sampling units respectively, and is used to issue fan speed control commands and receive fan speed and current information uploaded by each drive sampling unit.

[0006] As an optional solution, the bus communication module is an EtherCAT communication module, configured with dual network ports (IN and OUT). Multiple fan monitoring devices can be cascaded through the dual network ports to expand the number of fan control channels. The fan monitoring device is also equipped with a program upgrade interface, which is connected to the main control logic chip of the bus communication module for firmware upgrades and operating parameter configuration, and is physically separated from the dual network ports.

[0007] As an optional solution, the drive sampling unit is connected to the corresponding fan via a five-pin quick-connect interface and a corresponding five-pin shielded cable. The five pins of the five-pin quick-connect interface are respectively: the positive power supply pin and the negative power supply pin connected to the power supply circuit, the feedback pin connected to the speed feedback circuit, the drive pin connected to the PWM speed control drive circuit, and the shielding pin connected to the cable shielding layer. The speed control signal output by the PWM speed control drive circuit is connected to the PWM speed control pin of the corresponding fan via the five-pin shielded cable, and the speed signal fed back by the fan is transmitted to the corresponding feedback acquisition circuit via the feedback signal pin and the five-pin shielded cable.

[0008] As an optional solution, a power conversion module is also included; the input terminal of the power conversion module is connected to industrial AC power and a protective ground wire, and the output terminal of the power conversion module is connected to the drive sampling unit to convert the industrial AC power into DC power to supply power to the drive sampling unit.

[0009] As an optional solution, the strong and weak current isolation and filtering protection unit includes an AC input EMI filter circuit and a communication isolation circuit; the AC input EMI filter circuit is set at the AC input terminal of the power conversion module to filter out conducted electromagnetic interference on the AC side; the communication isolation circuit is set between the EtherCAT bus communication module and the drive sampling unit to isolate the power circuit carrying the fan power supply from the bus communication circuit that transmits control and feedback signals.

[0010] As an optional solution, the feedback acquisition loop is connected to the bus communication module to acquire the pulse signal output by the fan, calculate the real-time fan speed, and transmit it to the bus communication module; the current sampling circuit is connected to the bus communication module to calculate the fan operating current based on the voltage drop across the sampling resistor and transmit it to the bus communication module; the bus communication module is configured to determine whether the fan is faulty based on the acquired speed and current values, and generate a corresponding fault signal to upload externally in the event of a fault.

[0011] As an optional solution, the fan monitoring device also includes a split-type electrical control box; the electrical control box is provided with multiple five-pin quick-connect interfaces; the AC input terminal of the power conversion module, the dual network ports of the EtherCAT bus communication module, and the program upgrade interface are all located on the same side of the electrical control box; the housing of the electrical control box is provided with mounting holes for fixing the fan monitoring device separately on the rack inside the semiconductor equipment cabinet.

[0012] As an optional solution, a status indicator component is also provided. The status indicator components are all located on the electrical control box. The status indicators include a power indicator, a running indicator, and a fault indicator. The power indicator reflects the power supply status of the whole machine, the running indicator reflects the working status of the EtherCAT bus communication module, and the fault indicator is used to light up an alarm when any fan malfunctions.

[0013] Another aspect of this invention provides a method for monitoring fans in a semiconductor device, applied to the aforementioned fan monitoring device for a semiconductor device, comprising: converting input industrial AC power into DC power to power a bus communication module and drive sampling units for each fan; the bus communication module receiving a single-channel fan speed control command from a host computer and controlling the speed of the corresponding fan by outputting a PWM speed control signal through the corresponding drive sampling unit; each drive sampling unit independently acquiring the speed pulse signal and power supply current signal of the corresponding fan and uploading the speed and current data to the bus communication module; the bus communication module determining whether a fan has malfunctioned based on the speed and current data, and generating a fault signal if a fault occurs.

[0014] As an optional solution, the input industrial AC power is converted to DC power, including: using an AC input EMI filter circuit to filter out conducted electromagnetic interference from the input industrial AC power before converting it to DC power; and using a communication isolation circuit within the strong and weak current isolation filter protection unit to achieve electrical isolation between the power circuit carrying the fan power supply and the bus communication circuit transmitting control signals.

[0015] As an optional solution, the bus communication module determines whether the fan has malfunctioned based on the speed and current data of each channel. After generating a fault signal in the event of a fault, the method further includes: the bus communication module uploading the real-time fan operation data and fault signal to the host computer via the EtherCAT bus; and / or, using the power indicator, operation indicator, and fault indicator on the control box to complete local power supply, communication operation, and fan abnormal status prompts.

[0016] The fan monitoring device for semiconductor equipment provided in this invention isolates electromagnetic interference generated by the fan motor by setting up a strong and weak current isolation filter protection unit between the bus communication module on the weak current side and multiple fan drive sampling units. At the same time, each fan is equipped with an independent drive sampling unit that is electrically isolated from each other and corresponds one-to-one. The drive sampling unit integrates an independent PWM speed control drive circuit, a current sampling circuit and a feedback acquisition circuit to realize single-channel fan speed control, working current acquisition and speed signal acquisition, respectively. Then, the bus communication module establishes a bidirectional connection with each drive sampling unit, distributing single-channel independent speed control commands downward and summarizing the speed and current acquisition data of each channel fan upward. This solves the existing technical problems of multi-channel fan power circuit interference with the communication bus, crosstalk between channels, and inability to independently control and monitor a single fan. It achieves the technical effects of electromagnetic interference suppression, independent speed control of multiple fans and independent acquisition and monitoring of single-channel operating parameters. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely some embodiments of the present invention. For those skilled in the art, other embodiments can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of a fan monitoring device for a semiconductor device according to an embodiment of the present invention.

[0019] Figure 2 This is a schematic diagram of the fan monitoring logic of an embodiment of the present invention.

[0020] Figure 3 This is a schematic diagram of the internal circuit architecture of the fan monitoring device according to an embodiment of the present invention.

[0021] Figure 4 This is a schematic diagram of the specific circuit logic of the fan monitoring device according to an embodiment of the present invention.

[0022] Figure 5 This is a schematic diagram illustrating the control principle of EtherCAT communication in an embodiment of the present invention.

[0023] Figure 6 This is a schematic diagram of the front structure of a fan monitoring device according to an embodiment of the present invention.

[0024] Figure 7 This is a schematic diagram of the rear structure of the fan monitoring device according to an embodiment of the present invention.

[0025] Figure 8This is a schematic diagram of the interface structure of the fan monitoring device according to an embodiment of the present invention.

[0026] Figure 9 This is a flowchart of a method for monitoring the fan of a semiconductor device according to an embodiment of the present invention.

[0027] The reference numerals in the above figures are as follows:

[0028] 1. Bus communication module; 2. Drive sampling unit; 21. PWM speed control drive circuit; 22. Current sampling circuit; 23. Feedback acquisition circuit; 3. Strong and weak current isolation and filtering protection unit; 4. Power input port; 5. EtherCAT dual network port; 6. Program upgrade interface; 7. Five-pin quick-connect interface. Detailed Implementation

[0029] Embodiments of the present invention will now be described in more detail with reference to the accompanying drawings. While some embodiments of the invention are shown in the drawings, it should be understood that the invention can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the invention. It should be understood that the accompanying drawings and embodiments are for illustrative purposes only and are not intended to limit the scope of protection of the invention.

[0030] To address the existing technical problems of multi-fan power loop interference with the communication bus, crosstalk between channels, and the inability to individually control and monitor a single fan, embodiments of the present invention provide a fan monitoring device for semiconductor devices, such as... Figure 1 As shown, the device includes: a bus communication module 1, a drive sampling unit 2, and a strong and weak current isolation and filtering protection unit 3.

[0031] The strong and weak current isolation and filtering protection unit 3 is located between the bus communication module 1 and multiple independent drive sampling units 2 to isolate electromagnetic interference generated by the fan motor.

[0032] Each drive sampling unit 2 is electrically isolated from the others. Each drive sampling unit 2 corresponds to a fan to be monitored. The drive sampling unit 2 includes a PWM speed control drive circuit 21, a current sampling circuit 22, and a feedback acquisition circuit 23. The output of the PWM speed control drive circuit 21 is connected to the PWM speed control pin of the corresponding fan. The current sampling circuit 22 is connected in series in the power supply circuit of the corresponding fan. The input of the feedback acquisition circuit 23 is connected to the feedback signal pin of the corresponding fan.

[0033] The bus communication module 1 is connected to multiple drive sampling units 2 respectively, and is used to send fan speed control commands and receive fan speed and current information uploaded by each drive sampling unit 2.

[0034] The aforementioned bus communication module is the main control unit for signal interaction of the monitoring device. It belongs to the low-voltage side and adopts the EtherCAT (Ethernet for Control Automation Technology) bus protocol. It is responsible for bidirectional communication with the upper PLC (Programmable Logic Controller), distributing speed control commands of each fan downwards and summarizing the operating data collected by all fans upwards.

[0035] The aforementioned drive sampling unit is a dedicated channel unit for a single fan, with one independent drive sampling unit corresponding to each fan. The drive sampling unit integrates hardware circuits such as speed control output, current acquisition, and speed feedback acquisition to achieve full-link control of a single fan.

[0036] The aforementioned strong and weak current isolation and filtering protection unit is a protection circuit component arranged between the weak current side and the strong current side. It blocks the cross-loop conduction of electromagnetic interference generated by the fan motor on the strong current side through an electrical isolation structure.

[0037] The device consists of three core components: a bus communication module, a multi-channel drive sampling unit, and a strong and weak current isolation and filtering protection unit. The strong and weak current isolation and filtering protection unit is installed between the bus communication module and the multi-channel independent drive sampling unit, specifically to block the electromagnetic interference generated by the fan motor and prevent interference from entering the communication bus.

[0038] Each drive sampling unit is electrically isolated from the others, and each drive sampling unit is paired with a controlled fan to achieve independent channel hardware. Single-channel faults or interference will not cross-talk other fan channels.

[0039] It adopts a one-to-one independent drive sampling unit architecture, with electrical isolation between each unit, completely separating the drive and acquisition links of each fan. Interference and faults in a single channel are confined to this channel and will not spread to other fans.

[0040] Each drive sampling unit integrates three types of dedicated circuits: a PWM speed control drive circuit that outputs speed control pulses to the fan speed control pin; a current sampling circuit that is connected in series with the fan power supply circuit to collect the current; and a speed feedback acquisition circuit that connects to the fan feedback pin to pick up the speed signal, enabling a single channel to simultaneously complete control and data acquisition.

[0041] Each drive sampling unit is equipped with three types of circuits: speed control, current acquisition, and speed acquisition. It simultaneously acquires the control quantity and two types of operating status data of a single fan, and has a complete understanding of the working condition of a single fan.

[0042] The aforementioned PWM speed control drive circuit receives speed control commands from the bus, generates corresponding duty cycle pulse signals, and outputs them to the fan drive circuit to achieve speed regulation. The aforementioned current sampling circuit is connected in series in the power supply circuit of a single fan, serving as a detection circuit for acquiring the fan's real-time operating current. The aforementioned feedback acquisition circuit receives the speed pulse signals transmitted back from the fan, completing the speed data acquisition.

[0043] The bus communication module establishes an independent signal link with all drive sampling units, sends speed control commands to each fan individually, and receives speed and current data from each fan, enabling centralized control and branch monitoring.

[0044] The bus communication module independently interfaces with each drive sampling unit to enable the separate issuance of speed control commands and the separate uploading of operating data, allowing for individual control and monitoring of each fan.

[0045] This embodiment effectively isolates electromagnetic interference from the fan motor, ensuring stable EtherCAT bus communication and preventing data packet loss and feedback anomalies. Multiple fan hardware channels are mutually isolated, ensuring that single-channel short circuits and overload faults will not affect other fans, thus improving equipment reliability. It supports independent speed control commands for any individual fan, allowing for flexible and differentiated adjustment of each fan's speed. Synchronous acquisition of real-time current and speed data for each fan enables precise fault location and rapid identification of abnormal operating conditions such as stalled fans, overloads, and short circuits.

[0046] Electromagnetic interference generated by fan motors is blocked by setting up strong and weak current isolation and filtering protection units between the bus communication module on the weak current side and multiple fan drive sampling units. Simultaneously, each fan is equipped with an independently isolated, one-to-one corresponding drive sampling unit. Each drive sampling unit integrates an independent PWM speed control drive circuit, a current sampling circuit, and a feedback acquisition circuit to respectively realize single-channel fan speed control, operating current acquisition, and speed signal pickup. The bus communication module then establishes a bidirectional connection with each drive sampling unit, distributing independent speed control commands downwards and summarizing the speed and current acquisition data of each fan upwards. This solves the existing technical problems of multi-channel fan power circuit interference with the communication bus, crosstalk between channels, and the inability to independently control and monitor a single fan, achieving the technical effects of electromagnetic interference suppression, independent speed control of multiple fans, and independent acquisition and monitoring of single-channel operating parameters.

[0047] As an optional embodiment, the bus communication module is an EtherCAT communication module, configured with dual network ports (IN and OUT). Multiple fan monitoring devices can be cascaded through the dual network ports to expand the number of fan control channels. The fan monitoring device is also equipped with a program upgrade interface 6, which is connected to the main control logic chip of the bus communication module for device firmware upgrades and operating parameter configuration, and is physically separated from the dual network ports.

[0048] The aforementioned EtherCAT communication module is a communication unit adapted to industrial real-time bus protocols. It features dual IN / OUT input / output Ethernet ports, serving as both bus input and bus output Ethernet interfaces for multi-device cascading networking. Multiple fan monitoring devices can be cascaded end-to-end to expand the number of fan control channels and the number of fans monitored.

[0049] The aforementioned program upgrade interface 6 is an independent debugging interface, used only for firmware burning and parameter configuration, and does not participate in normal device linkage communication. This embodiment adds an independent program upgrade interface 6, which is directly connected to the module's main control logic chip and can independently complete firmware updates and operating parameter settings. Furthermore, the program upgrade interface 6 is physically separate from the EtherCAT dual network ports; the two types of interfaces have independent functions and hardware pathways.

[0050] The aforementioned main control logic chip is the core processing chip inside the EtherCAT module, responsible for data processing, instruction parsing, and firmware storage.

[0051] This embodiment utilizes an IN / OUT dual-port serial topology to achieve multi-device bus cascading, linearly expanding the total number of controlled fans. The debugging function is separated into an independent hardware interface, and the upgrade configuration link and service communication link are physically isolated, ensuring that the two types of work do not occupy or interfere with each other. It supports the cascading expansion of multiple devices, adapting to the management needs of a large number of cooling fans in semiconductor equipment, and simplifying overall cabling and bus point planning.

[0052] Based on the independent program upgrade interface 6, firmware can be upgraded offline / online, fault thresholds can be modified, and speed adjustment parameters can be adjusted independently. Real-time fan monitoring can be performed without interruption during debugging, improving the convenience of equipment operation and maintenance.

[0053] As an optional embodiment, the drive sampling unit is connected to the corresponding fan via a five-pin quick-connect interface and a corresponding five-pin shielded cable. The five pins of the five-pin quick-connect interface are: the positive power supply pin and the negative power supply pin connected to the power supply circuit; the feedback pin connected to the speed feedback circuit; the drive pin connected to the PWM speed control drive circuit; and the shielding pin connected to the cable shielding layer. The speed control signal output by the PWM speed control drive circuit is connected to the PWM speed control pin of the corresponding fan via the five-pin shielded cable. The speed signal fed back by the fan is transmitted to the corresponding feedback acquisition circuit via the feedback signal pin and the five-pin shielded cable.

[0054] The aforementioned five-pin quick-connect interface is a dedicated integrated connector between the drive sampling unit and the fan. It includes five pins: power supply positive / negative pins, speed control drive pins, speed feedback pins, and shielding pins. The shielding pins are connected to the outer shielding mesh of the five-pin shielded cable and are dedicated pins for dissipating electromagnetic interference.

[0055] Five-core shielded cable is a special cable that integrates power supply core wire, signal core wire and outer metal shielding mesh.

[0056] Each set of drive sampling units is individually connected to the corresponding fan through a set of five-core quick-connect interface and matching five-core shielded cable;

[0057] The signal flow of the five-pin interface is bidirectional and independent. The speed control signal output by the PWM speed control drive circuit is sent to the fan via a cable, and the speed feedback signal generated by the fan is transmitted back to the speed feedback acquisition circuit in the opposite direction along the same cable.

[0058] Traditional solutions involve separate wiring for power supply, control, and feedback lines, resulting in complex wiring harnesses and inconvenient disassembly and maintenance. Ordinary unshielded cables cannot suppress electromagnetic interference from the fan motor, easily causing distortion of speed control signals and false alarms in speed acquisition. Power supply lines and signal lines have separate connectors, resulting in numerous wiring points and making fault diagnosis difficult.

[0059] This embodiment integrates power supply, speed regulation, feedback, and shielding functions into a single five-core connector and matching shielded cable. The single cable simultaneously completes power supply and bidirectional signal transmission. The metal shielding mesh of the cable is conductive through the two ends of the shielding pins, forming a complete shielding circuit, which, together with the overall isolation structure, suppresses motor conduction and radiation interference.

[0060] Not only is the wiring simple, with only one cable required for a single fan, but on-site disassembly and maintenance are also convenient. The cable shielding layer, combined with shielded pins, forms an anti-interference path, reducing the impact of motor interference on speed regulation and speed acquisition signals. The power supply, control, and feedback links are integrated into one unit, with each channel line independent, avoiding crosstalk between different functional lines.

[0061] As an optional embodiment, it also includes a power conversion module; the input terminal of the power conversion module is connected to industrial AC power and a protective ground wire, and the output terminal of the power conversion module is connected to the drive sampling unit to convert industrial AC power into DC power to supply power to the drive sampling unit.

[0062] The aforementioned power conversion module is a built-in AC / DC power conversion unit that supplies power to the fan drive channel of the entire machine. The protective ground (PE) wire is the equipment's safety grounding terminal, used to discharge static electricity, suppress leakage current and high-frequency interference, and improve the electrical safety of the equipment.

[0063] This embodiment is additionally configured with an independent power conversion module. The input terminal of this module is connected to industrial AC power and reliably connected to the protective ground wire. It can convert high-voltage industrial AC power into DC power suitable for fan operation and provide stable DC power supply for each drive sampling unit and fan drive circuit.

[0064] The entire unit integrates power supply through a built-in dedicated power conversion module, uniformly converting industrial AC mains power into the DC operating voltage required by the fan; at the same time, the input terminal is connected to a protective ground wire, which can effectively filter out grid noise, discharge high-frequency interference and static electricity, and provide a clean and stable DC power supply base for each independent driving sampling unit.

[0065] As an optional embodiment, the strong and weak current isolation and filtering protection unit includes an AC input EMI (Electromagnetic Interference) filter circuit and a communication isolation circuit. The AC input EMI filter circuit is located at the AC input terminal of the power conversion module to filter out conducted electromagnetic interference on the AC side. The communication isolation circuit is located between the EtherCAT bus communication module and the drive sampling unit to isolate the power circuit carrying the fan power supply from the bus communication circuit that transmits control and feedback signals.

[0066] The aforementioned AC input EMI filter circuit is a filter circuit located at the front end of the power supply, used to filter out conducted interference, noise, and surge noise in the industrial AC power grid. The aforementioned communication isolation circuit is an electrical isolation circuit located between the bus communication module and the drive sampling unit, used to isolate the electrical coupling between the high-power circuit and the low-power signal circuit.

[0067] This embodiment refines the strong and weak current isolation and filtering protection unit into two types of functional circuits: an EMI filter circuit is configured at the AC input terminal of the power conversion module to pre-filter and purify the input industrial AC power; at the same time, a communication isolation circuit is set between the EtherCAT bus communication module and each drive sampling unit to electrically isolate the high-power power supply circuit of the fan from the high-precision weak current communication and signal circuit.

[0068] The front-end EMI filter circuit filters out electromagnetic interference conducted from the power grid side at the AC input end, purifying the power supply head of the whole machine; then, the communication isolation circuit cuts off the electrical connection between the high-power circuit and the low-power communication circuit at the signal interaction level, realizing dual-layer protection of power supply anti-interference and communication end strong and weak current isolation, blocking the interference coupling path from both the input and signal interaction ends.

[0069] As an optional embodiment, the feedback acquisition loop is connected to the bus communication module to acquire the pulse signal output by the fan, convert it into the real-time fan speed, and transmit it to the bus communication module; the current sampling circuit is connected to the bus communication module to calculate the fan operating current based on the voltage drop of the sampling resistor and transmit it to the bus communication module; the bus communication module is configured to determine whether the fan is faulty based on the acquired speed and current values, and generate a corresponding fault signal to upload to the outside in the event of a fault.

[0070] The aforementioned sampling resistor is a sampling element connected in series in the fan power supply circuit, reflecting the magnitude of the circuit current through its own voltage drop. The fault signal is an identification information generated by the bus communication module after identifying a fan malfunction, used to report to the host computer.

[0071] The speed feedback acquisition circuit and the current sampling circuit independently acquire the fan pulse speed signal and power supply current data and upload them to the bus communication module. The bus communication module integrates the two types of data, autonomously identifies fan faults, and generates fault signals to send to the outside.

[0072] The hardware circuit picks up two types of raw signals, namely speed pulse and sampling resistor voltage drop, and converts them into quantized values. The values ​​are then compared with the threshold by the built-in logic of the bus module to match the speed and current characteristics corresponding to different faults and generate corresponding fault codes.

[0073] It enables comprehensive monitoring of fan operating conditions, accurately identifies various fan anomalies, facilitates rapid location of fault channels, and improves equipment operation and maintenance efficiency.

[0074] As an optional embodiment, the fan monitoring device also includes a separate electrical control box; the electrical control box is provided with multiple five-pin quick-connect interfaces; the AC input terminal of the power conversion module, the dual network ports of the EtherCAT bus communication module, and the program upgrade interface are all located on the same side of the electrical control box; the housing of the electrical control box is provided with mounting holes for fixing the fan monitoring device separately on the rack inside the semiconductor equipment cabinet.

[0075] The aforementioned split-type electrical control box is an independent enclosure integrating all functional modules of the device, and can be installed separately from the cooling fan. The control box casing has pre-drilled mounting holes for securing it to the cabinet or rack.

[0076] The five-pin quick-connect interface, AC input terminal, EtherCAT dual network port, and program upgrade interface are centrally arranged on the same side of the enclosure. The housing has reserved mounting holes to allow the entire unit to be assembled in an independent cabinet.

[0077] All external interfaces are integrated on one side of the enclosure, and the hardware modules are encapsulated in an independent box, allowing for modular and individual fixed installation through pre-drilled holes.

[0078] The wiring is neat and aesthetically pleasing, and it is easy to disassemble, install, and maintain. The entire unit can be independently placed in any position in the cabinet, making it suitable for the narrow installation space inside semiconductor equipment.

[0079] As an optional embodiment, a status indicator component is also provided. The status indicator components are all located on the electrical control box. The status indicators include a power indicator, a running indicator, and a fault indicator. The power indicator reflects the power supply status of the whole machine, the running indicator reflects the working status of the EtherCAT bus communication module, and the fault indicator is used to light up an alarm when any fan malfunctions.

[0080] The control box is equipped with three independent indicator lights for power, operation, and fault, corresponding to three working states: power supply, EtherCAT communication, and fan malfunction. When any fan fails, the fault light will illuminate and trigger a local alarm.

[0081] The indicator lights collect fault detection signals from the power supply circuit, bus communication module, and each fan, and switch between on and off states according to the corresponding signal level to achieve on-site visual feedback.

[0082] Power supply, communication, and fan faults can be diagnosed on-site intuitively without the need for a host computer, significantly improving the efficiency of on-site equipment inspection and debugging.

[0083] It should be noted that this embodiment also provides an optional implementation method, which will be described in detail below.

[0084] Currently, the industry is gradually adopting multi-channel fan modules based on the EtherCAT industrial real-time bus. Leveraging the high-speed synchronous communication advantages of EtherCAT, remote speed control and status feedback for multiple fans can be achieved, effectively simplifying wiring and improving control real-time performance. However, significant technical shortcomings still exist, as follows:

[0085] When multiple channels are running at full load, bus cycle jitter increases and clock synchronization accuracy decreases. A single point of failure in a linear topology can easily cause overall communication interruption. Electromagnetic interference generated by the fan motor can easily couple into the communication circuit. Insufficient isolation design between strong and weak currents can easily lead to bus packet loss and link interruption.

[0086] Poor linearity of PWM speed regulation, large speed fluctuations at low speeds, severe heat generation due to multi-channel drive, and reduced speed control accuracy due to device temperature drift.

[0087] The monitoring methods are limited, mostly collecting total speed and total current, lacking detailed detection of faults such as single-channel fan stall, overload, short circuit, and jamming, resulting in vague fault location.

[0088] The core components are mostly imported, resulting in high costs, low flexibility in channel expansion, and insufficient adaptability and field versatility for domestic production.

[0089] like Figure 5 As shown, EtherCATThe traditional fan control schematic diagram consists of a PLC controller, a fan box with a built-in EtherCAT communication module and a built-in fan drive module, an external fan, and an independent 24V power supply. The workflow is as follows: the PLC controller sends a PWM speed control percentage command to the EtherCAT module in the fan box via EtherCAT communication. The internal module of the fan box converts and outputs a PWM pulse signal to drive the external fan. The independent 24V power supply provides power to the external fan. At the same time, the operating status of the external fan is transmitted back to the PLC via EtherCAT communication through the EtherCAT module in the fan box, realizing remote speed control and status feedback of the fan. However, the fan power supply circuit and the signal control circuit are not isolated and protected.

[0090] This embodiment provides a multi-channel adjustable speed and monitored fan box based on EtherCAT communication, which has the following advantages compared to existing technologies:

[0091] The system incorporates protective structures such as strong and weak current isolation and input filtering to effectively suppress electromagnetic interference generated by the fan motor, eliminate bus data packet loss and communication interruptions, and significantly improve the operational stability of the device in complex industrial electromagnetic environments.

[0092] Each fan adopts a completely independent drive sampling unit design, which can monitor the speed and current parameters of a single channel in real time, accurately identify abnormal faults such as stall, overload, and short circuit, and upload alarm information. The fault location is clear, which facilitates quick repair and reduces the risk of equipment downtime.

[0093] It adopts an EtherCAT bus distributed control architecture, which has low communication latency and strong clock synchronization. It supports individual speed control of multiple fans and can provide differentiated heat dissipation according to the heat generation of different areas of the equipment, resulting in lower overall energy consumption.

[0094] It features a high degree of integration, uses quick-connect plugs, has simple wiring, flexible channel expansion, and domestic substitution of core components, reducing production costs and supply constraints. It is adaptable to various application scenarios of industrial control equipment, and has significant versatility and economic benefits.

[0095] like Figure 2 As shown, the control logic of this fan box is as follows: 208V AC power is converted to 24V DC, and then powered to each fan via a fuse; the control unit outputs a PWM speed control signal to adjust the fan speed, and simultaneously, the fan feeds back speed signals to the control unit, achieving closed-loop control. The specific implementation plan is as follows:

[0096] 1. Power input and conversion module.

[0097] Input: 208VAC+PE (L1, L2 live wires + PE protective ground) industrial AC power supply, with a wide input voltage range of 176VAC~264VAC, and EMI filter circuit to isolate external electromagnetic interference.

[0098] Function: Converts 208V AC power to a stable 24V DC power supply, outputting 24V+ (positive) and 24V- (negative) to power 6 fans.

[0099] 2. PWM speed control section.

[0100] PWM control signal (duty cycle): output to the fan to achieve stepless speed regulation.

[0101] FG feedback signal: Receives the fan's returned speed pulse signal, the actual fan speed, current, and operating status.

[0102] 3. Fan power and interface section.

[0103] like Figure 3 and Figure 4 As shown, power supply and protection: Each fan is equipped with a 3.15A fuse to provide overcurrent protection and prevent damage to the equipment from short circuits or overloads.

[0104] Current sampling: Each fan has an independent current sampling circuit, which can monitor the fan's operating current in real time and determine whether the fan is working properly, such as locked rotor, phase loss, or abnormal power consumption.

[0105] 4. Communication interface section.

[0106] like Figure 3 and Figure 4 As shown, the EtherCAT communication interface supports industrial Ethernet communication, can be connected to a host computer or PLC to achieve remote monitoring and control, can be cascaded and expanded, and also reserves an RS485 program upgrade interface for equipment firmware upgrade and parameter configuration.

[0107] 5. Status indicator lights.

[0108] like Figure 3 and Figure 4 As shown, POWER: Power status indicator (green).

[0109] RUN: System running status indicator (green).

[0110] FAULT: Fault alarm indicator (red).

[0111] like Figure 6 and Figure 7As shown, this fanbox measures 150*74*88 mm in length, width, and height. It integrates the internal power supply and control unit, uses small components to compress the size, and reduces the external space occupied.

[0112] like Figure 8 As shown, the line interface design includes a power input port 4, a dual EtherCAT network port 5 for communication, and an M12L type five-pin quick-connect interface 7 for the fan. All interfaces are located on the same side, making maintenance and wiring simple.

[0113] Figure 8 J1 is the power input port 4, single-phase 100Vac~264Vac+PE input. J2 is an EtherCAT dual network port 5. J3 is an A+ / B- RS485 port, used as a program upgrade interface. C1, C2, C3, C4, C5, and C6 are the five-pin quick-connect interfaces for the six fans 7.

[0114] This implementation is a fanbox based on the mainstream EtherCAT communication protocol. Its core competitiveness is that it has built-in multi-channel independent speed regulation and full-dimensional status monitoring, which replaces the traditional switch quantity control, analog quantity voltage regulation or ordinary PWM speed regulation methods.

[0115] The advantages of this implementation are: Small footprint: Integrated power supply and control unit, high integration, saving equipment space. Communication advantages: Integrated EtherCAT communication, convenient remote control, and higher cascading scalability. Control advantages: Multi-channel independent control, without interference, achieving stepless speed regulation, and greater flexibility. Safety advantages: Each channel independently collects fan status, achieving full-dimensional status monitoring, enabling timely detection of anomalies, and enhancing safety. Maintenance advantages: Interfaces are located on the same side, with quick-connect fan connections, reducing maintenance difficulty and simplifying wiring.

[0116] Based on the fan monitoring device for semiconductor devices provided in the embodiments of the present invention, the embodiments of the present invention also provide a method for monitoring the fan of a semiconductor device, such as... Figure 9 As shown, the method includes:

[0117] Step S901: Convert the input industrial AC power to DC power to power the bus communication module and the drive sampling units of each fan.

[0118] In step S902, the bus communication module receives the single-channel fan speed control command sent by the host computer and outputs a PWM speed control signal through the corresponding drive sampling unit to control the speed of the corresponding fan.

[0119] In step S903, each drive sampling unit independently collects the speed pulse signal and power supply current signal of the corresponding fan, and uploads the speed and current data to the bus communication module.

[0120] In step S904, the bus communication module determines whether the fan has malfunctioned based on the speed and current data of each channel, and generates a fault signal if a fault occurs.

[0121] This embodiment describes the overall monitoring process corresponding to the aforementioned fan monitoring device, which sequentially completes power supply conversion, branch speed control, independent parameter acquisition, and intelligent fault diagnosis.

[0122] First, industrial AC power is converted to DC power to supply the entire module. The bus communication module receives single-channel speed control commands from the host computer and outputs PWM signals through the corresponding drive sampling unit to achieve independent speed control of a single fan. The aforementioned PWM speed control signal is a pulse signal with an adjustable duty cycle, used to precisely adjust the fan operating speed.

[0123] Each fan drive sampling unit independently collects fan speed pulses and operating current and uploads them to the bus module. Finally, the bus communication module combines the speed and current parameters to determine the fan's operating status and generate a fault signal. Each fan drive sampling unit operates independently, collecting the speed and current data of its corresponding fan separately.

[0124] Traditional fan control methods mostly involve unified speed regulation and centralized data acquisition, which cannot achieve independent control of individual fans. Relying solely on a single state to determine the operating condition cannot accurately identify faults such as fan stall, overload, and short circuit. The monitoring accuracy is low and the fault identification is poor, which cannot meet the high reliability monitoring requirements of semiconductor equipment.

[0125] This embodiment relies on the hardware architecture of multi-channel independent drive sampling, and adopts the working logic of single-channel independent control, dual-parameter synchronous acquisition and bus centralized discrimination. It achieves precise speed regulation through PWM signal, and achieves accurate judgment of abnormal fan conditions through mutual verification of two core operating parameters: speed and current.

[0126] It enables independent speed control, independent monitoring, and accurate fault diagnosis for multiple fans, providing a high degree of monitoring sophistication. This effectively improves the operational stability and fault identification accuracy of semiconductor equipment fan systems, facilitating equipment maintenance and rapid fault location.

[0127] As an optional embodiment, converting the input industrial AC power to DC power includes: using an AC input EMI filter circuit to filter out conducted electromagnetic interference from the input industrial AC power before converting it to DC power; and using a communication isolation circuit within the strong and weak current isolation filter protection unit to achieve electrical isolation between the power circuit carrying the fan power supply and the bus communication circuit transmitting control signals.

[0128] The aforementioned conducted electromagnetic interference refers to superimposed noise, surges, and high-frequency interference signals in industrial AC power grids, which can easily affect the stability of power supply and signals. A protective mechanism is implemented to physically disconnect high-power circuits from low-power signal circuits to avoid interference coupling across circuits.

[0129] In the power conversion process, the industrial AC power is first filtered and purified by the AC input EMI filter circuit before the AC-DC power conversion is completed. At the same time, the communication isolation circuit is used to realize the electrical isolation between the high power supply circuit of the fan and the communication control circuit of the weak current bus, and anti-interference protection is achieved in two layers of power supply head and signal link.

[0130] Front-end EMI filtering eliminates external conducted interference from the power grid side, purifying the power supply base; communication isolation circuits cut off interference coupling paths between strong and weak currents, constructing a complete anti-interference protection system from both the input power supply and signal interaction ends.

[0131] This significantly reduces the impact of power grid fluctuations and motor electromagnetic interference on fan speed regulation, parameter acquisition, and bus communication, thereby improving the overall machine's operational stability and adaptability to complex industrial electromagnetic environments.

[0132] As an optional embodiment, the bus communication module determines whether the fan has malfunctioned based on the speed and current data of each channel. After generating a fault signal in the event of a fault, the method further includes: the bus communication module uploading the real-time operating data of the fan and the fault signal to the host computer via the EtherCAT bus; and / or, using the power indicator, running indicator, and fault indicator lights set on the control box to complete local power supply, communication operation, and fan abnormal status prompts.

[0133] The aforementioned host computer is the main control system for the semiconductor equipment, which can be a PLC controller used for centralized monitoring, data storage, and fault early warning. It utilizes the device's built-in indicator lights to provide on-site visual status feedback.

[0134] After completing the fan fault diagnosis and generating a fault signal, the device has a dual feedback mechanism: on the one hand, the bus communication module uploads the real-time fan operation data and fault information to the host computer via the EtherCAT bus to achieve remote monitoring; on the other hand, the local device status of the whole machine power supply, bus communication, and fan fault is displayed intuitively through multiple sets of indicator lights on the control box.

[0135] It not only meets the needs of automated remote monitoring and fault recording of equipment, but also enables intuitive and visual troubleshooting on site, greatly improving the convenience and efficiency of equipment debugging, inspection and fault repair.

[0136] It should be noted that the term "comprising" and its variations used in the embodiments of the present invention are open-ended, meaning "including but not limited to". The term "based on" means "at least partially based on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". The modifications of "one" and "a plurality" mentioned in the embodiments of the present invention are illustrative and not restrictive, and those skilled in the art should understand that unless explicitly indicated otherwise in the context, they should be understood as "one or more".

[0137] The steps described in the method embodiments provided by the present invention can be performed in different orders and / or in parallel. Furthermore, the method embodiments may include additional steps and / or omit the steps shown. The scope of protection of the present invention is not limited in this respect.

[0138] The term "embodiment" in this specification refers to a specific feature, structure, or characteristic described in connection with an embodiment that may be included in at least one embodiment of the invention. The appearance of this phrase in various places in the specification does not necessarily imply the same embodiment, nor does it imply independence or alternativeity from other embodiments. The various embodiments in this specification are described in a related manner, with reference to each other for similar or identical parts. In particular, for apparatus, device, and system embodiments, since they are substantially similar to method embodiments, the description is relatively simple, and relevant details are referred to in the description of the method embodiments.

[0139] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of protection. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the appended claims.

Claims

1. A fan monitoring device for a semiconductor device, characterized in that, include: Bus communication module, drive sampling unit, strong and weak current isolation and filtering protection unit; The strong and weak current isolation and filtering protection unit is located between the bus communication module and multiple independent drive sampling units to isolate electromagnetic interference generated by the fan motor. Each of the driving sampling units is electrically isolated from each other. Each driving sampling unit corresponds to a fan to be monitored. Each driving sampling unit includes a PWM speed control driving circuit, a current sampling circuit, and a feedback acquisition circuit. The output terminal of the PWM speed control driving circuit is connected to the PWM speed control pin of the corresponding fan. The current sampling circuit is connected in series in the power supply circuit of the corresponding fan. The input terminal of the feedback acquisition circuit is connected to the feedback signal pin of the corresponding fan. The bus communication module is connected to multiple drive sampling units respectively, and is used to issue fan speed control commands and receive fan speed and current information uploaded by each drive sampling unit.

2. The fan monitoring device for semiconductor equipment according to claim 1, characterized in that, The bus communication module is an EtherCAT communication module, configured with dual network ports (IN input and OUT output). Multiple fan monitoring devices can be cascaded through the dual network ports to expand the number of fan control channels. The fan monitoring device is also equipped with a program upgrade interface, which is connected to the main control logic chip of the bus communication module and is used for device firmware upgrade and operating parameter configuration, and is physically separated from the dual network ports.

3. The fan monitoring device for semiconductor equipment according to claim 1, characterized in that, The drive sampling unit is connected to the corresponding fan through a five-pin quick-connect interface and a corresponding five-pin shielded cable. The five pins of the five-pin quick-connect interface are: the positive power supply pin and the negative power supply pin connected to the power supply circuit; the feedback pin connected to the speed feedback circuit; the drive pin connected to the PWM speed control drive circuit; and the shielding pin connected to the cable shielding layer. The speed control signal output by the PWM speed control drive circuit is connected to the PWM speed control pin of the corresponding fan through the five-core shielded cable. The fan speed feedback signal is transmitted to the corresponding feedback acquisition circuit through the feedback signal pin and the five-core shielded cable.

4. The fan monitoring device for semiconductor equipment according to claim 1, characterized in that, It also includes a power conversion module; The input terminal of the power conversion module is connected to industrial AC power and a protective ground wire, and the output terminal of the power conversion module is connected to the drive sampling unit to convert the industrial AC power into DC power to supply power to the drive sampling unit.

5. The fan monitoring device for semiconductor equipment according to claim 4, characterized in that, The strong and weak current isolation and filtering protection unit includes an AC input EMI filter circuit and a communication isolation circuit. The AC input EMI filter circuit is located at the AC input terminal of the power conversion module to filter out conducted electromagnetic interference on the AC side. The communication isolation circuit is set between the EtherCAT bus communication module and the drive sampling unit to isolate the power circuit carrying the fan power supply from the bus communication circuit that transmits control and feedback signals.

6. The fan monitoring device for semiconductor equipment according to claim 1, characterized in that, The feedback acquisition loop is connected to the bus communication module and is used to acquire the pulse signal output by the fan, calculate the real-time fan speed, and transmit it to the bus communication module. The current sampling circuit is connected to the bus communication module and is used to calculate the fan operating current based on the voltage drop across the sampling resistor and transmit it to the bus communication module. The bus communication module is configured to determine whether the fan is faulty based on the collected speed and current values, and generate a corresponding fault signal to upload to the outside in the event of a fault.

7. The fan monitoring device for semiconductor equipment according to claim 1, characterized in that, The fan monitoring device also includes a separate electrical control box; The electrical control box is equipped with multiple five-pin quick-connect interfaces; the AC input terminal of the power conversion module, the dual network ports of the EtherCAT bus communication module, and the program upgrade interface are all located on the same side of the electrical control box. The electrical control box housing has pre-drilled mounting holes for separately fixing the fan monitoring device to the rack inside the semiconductor equipment cabinet.

8. The fan monitoring device for semiconductor equipment according to claim 7, characterized in that, A status indicator component is also provided, all of which are located on the electrical control box. The status indicators include a power indicator, a running indicator, and a fault indicator. The power indicator light reflects the overall power supply status, the operation indicator light reflects the working status of the EtherCAT bus communication module, and the fault indicator light is used to light up and alarm when any fan malfunctions.

9. A method for monitoring the fan of a semiconductor device, applied to the fan monitoring device of the semiconductor device according to any one of claims 1 to 8, characterized in that, include: The input industrial AC power is converted into DC power to power the bus communication module and the drive sampling units of each fan; The bus communication module receives single-channel fan speed control commands from the host computer and outputs PWM speed control signals through the corresponding drive sampling unit to control the speed of the corresponding fan. Each drive sampling unit independently collects the speed pulse signal and power supply current signal of the corresponding fan, and uploads the speed and current data to the bus communication module; The bus communication module determines whether the fan has malfunctioned based on the speed and current data of each channel, and generates a fault signal if a malfunction occurs.

10. The method for monitoring the fan of a semiconductor device according to claim 9, characterized in that, Converting input industrial AC power to DC power includes: An AC input EMI filter circuit is used to filter out conducted electromagnetic interference from the input industrial AC power before converting it to DC power. Electrical isolation between the power circuit carrying the fan power supply and the bus communication circuit transmitting control signals is achieved through the communication isolation circuit within the strong and weak current isolation filter protection unit.

11. The method for monitoring the fan of a semiconductor device according to claim 9, characterized in that, The bus communication module determines whether the fan has malfunctioned based on the speed and current data of each channel. After generating a fault signal in the event of a fault, the method further includes: The bus communication module uploads real-time fan operation data and fault signals to the host computer via the EtherCAT bus; And / or, local power supply, communication operation, and fan abnormality status prompts can be achieved through the power indicator, operation indicator, and fault indicator on the electrical control box.

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