Self-sealing joint and apparatus for ultra-pure gas filling

Abstract

The application relates to the technical field of super-pure gas production equipment, in particular to a self-sealing joint for super-pure gas filling, which comprises a joint body, a feeding channel for fluid circulation being arranged in the joint body, a diaphragm arranged in the joint body and located on one side of the feeding channel, a sealing head movably arranged in the joint body and fixedly connected with one end of the diaphragm, a first driving assembly for driving the sealing head to make linear reciprocating motion, a plurality of layers of floating support components slidably mounted on the sealing head along the radial direction of the sealing head, and a second driving assembly for driving the floating support components to slide so as to support one side of the diaphragm. By using the application, the floating support components can provide effective support for the side of the diaphragm far away from the material, the diaphragm is prevented from being in a state of pressure deformation for a long time, the risk of diaphragm deformation is reduced, the overall self-sealing property of the joint is ensured, and the service life of the joint is prolonged.

Description

Technical Field

[0001] This invention relates to the technical field of ultrapure gas production equipment, and more particularly to a self-sealing connector for ultrapure gas filling. Background Technology

[0002] Ultrapure gases are high-purity chemical reagents with a purity higher than 99.99%, and some fields require a purity of 99.9999% (6N grade) to 9N grade. These gases are divided into single gases and mixed gases, including types such as sulfur dioxide, carbon monoxide, and helium, and are used in fields such as semiconductor manufacturing, fiber optic production, and nuclear magnetic resonance imaging.

[0003] After the production of ultrapure gas is completed, the product usually needs to be filled into special seamless steel cylinders for storage and transportation. During the filling process of ultrapure gas, diaphragm valves are often used as connectors to achieve pipe connection and self-sealing.

[0004] For example, Chinese patent application number CN202211266003.0 discloses a corrosion-resistant diaphragm valve, including a valve block, with an inlet pipe and an outlet pipe fixedly connected to both sides of the valve block, the inlet pipe and the outlet pipe being connected inside the valve block, the inlet of the inlet pipe being vertically designed inside the valve block, the inner top of the inlet pipe being designed with a flat annular top opening, the inlet pipe and the outlet pipe being connected through the flat annular top opening, and an inner diaphragm being fixedly connected inside the valve block.

[0005] The text mentions that the inner diaphragm is squeezed to the top of the annular opening by the diaphragm drive mechanism, which seals the flow channel of the diaphragm valve. The annular opening is horizontally set, and the overall force center of the inner diaphragm is symmetrically and evenly distributed. The main force on the inner diaphragm is the extrusion force, which is greater than the shear force. This effectively improves the service life of the inner diaphragm. At the same time, because the force on the inner diaphragm is uniform, the sealing effect of the diaphragm valve is effectively guaranteed during long-term use, thus ensuring the stability of the diaphragm valve.

[0006] However, in the above technical solution, regardless of whether the sealing pressure block is pressed down or lifted up, the other side of the inner diaphragm is in a hollow state. The inner diaphragm will be squeezed by the internal fluid, and the inner diaphragm is easily squeezed and deformed, which can easily reduce the overall self-sealing performance of the diaphragm valve. Summary of the Invention

[0007] In view of the above problems, the present invention provides a self-sealing connector for ultrapure gas filling, the purpose of which is to improve the self-sealing performance and service life of the connector.

[0008] To achieve the above objectives, the technical solution adopted by the present invention is as follows: A self-sealing connector for filling ultrapure gases is provided, comprising: a connector body having a feeding channel for fluid flow within the connector body; a diaphragm disposed within the connector body on one side of the feeding channel; a sealing head movably disposed within the connector body, with one end fixedly connected to the diaphragm; a first driving assembly for driving the sealing head to perform linear reciprocating motion; a plurality of floating support components slidably mounted on the sealing head along the radial direction of the sealing head; and a second driving assembly for driving the floating support components to slide, thereby supporting one side of the diaphragm.

[0009] Specifically, the first drive assembly includes: a first chamber, which is located within the connector body; a piston, which is disposed on the sealing head, with the outer wall surface of the piston slidingly sealingly contacting the inner wall surface of the first chamber; a first air inlet and a second air inlet, which are located on the connector body, connecting the first chamber to the outside, and are respectively located on both sides of the piston; and an air source, which is connected to the first air inlet and the second air inlet through a pipe.

[0010] Specifically, the connector also includes a second chamber, which is formed within the connector body, and the diaphragm is fixedly installed in the second chamber by a press-fit ring.

[0011] Specifically, the connector also includes: a guide rod, fixedly installed on the sealing head; and on the same layer, a pair of floating support components slidably sleeved on both ends of the guide rod.

[0012] Specifically, the second drive assembly includes: a drive rod rotatably mounted on the sealing head, located on the same layer between a pair of floating support members; a drive block fixedly mounted on the drive rod; an arc-shaped surface that slides in contact with the floating support members; and a motor for driving the drive rod to rotate.

[0013] Specifically, along the axial direction of the drive rod, the diameter of each layer of floating support components decreases.

[0014] Specifically, the cross-section of the drive block is elliptical.

[0015] Also provided is an apparatus for filling ultrapure gases, including a self-sealing connector for filling ultrapure gases.

[0016] The beneficial effects of the present invention are as follows: by using the present invention, regardless of whether the diaphragm valve is in the open or closed state, the floating support assembly can provide effective support for the side of the diaphragm away from the material, prevent the diaphragm from being under pressure and deformed for a long time, reduce the risk of diaphragm deformation, ensure the overall self-sealing of the joint, and extend the service life of the joint. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the connector closed state provided in an embodiment of this application.

[0018] Figure 2This is a schematic diagram of the connector in the open state provided in an embodiment of this application.

[0019] Figure 3 This is a schematic diagram of the installation of the floating support component provided in an embodiment of this application.

[0020] Among them, 1. Connector body; 11. Diaphragm; 2. Sealing head; 31. First chamber; 32. Piston; 33. First air inlet; 34. Second air inlet; 35. Second chamber; 36. Guide rod; 4. Floating support component; 51. Drive rod; 52. Drive block; 53. Arc-shaped surface; 54. Motor. Detailed Implementation

[0021] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0022] Reference Figure 1 , Figure 2 and Figure 3 As shown in the figure, this application discloses a self-sealing connector for filling ultrapure gas, comprising: a connector body 1, with a feeding channel for fluid flow opened in the connector body 1; a diaphragm 11, disposed in the connector body 1 and located on one side of the feeding channel; a sealing head 2, movably disposed in the connector body 1, with one end fixedly connected to the diaphragm 11; a first driving assembly for driving the sealing head 2 to perform linear reciprocating motion; several layers of floating support components 4, slidably mounted on the sealing head 2 along the radial direction of the sealing head 2; and a second driving assembly for driving the floating support components 4 to slide, thereby supporting one side of the diaphragm 11.

[0023] In this embodiment, the first drive assembly includes: a first chamber 31, which is located inside the connector body 1; a piston 32, which is disposed on the sealing head 2, and the outer wall surface of the piston 32 slides and seals against the inner wall surface of the first chamber 31; a first air inlet 33 and a second air inlet 34, which are located on the connector body 1, connecting the first chamber 31 and the outside, and are respectively located on both sides of the piston 32; and an air source, which is connected to the first air inlet 33 and the second air inlet 34 through a pipe.

[0024] Preferably, the piston 32 is slidably and sealed within the first chamber 31 by means of an existing sealing structure, and the sealing head 2 is also slidably and sealed within the connector body 1 by means of an existing sealing mechanism; the existing sealing structure can be a packing seal or a skeleton seal.

[0025] In this embodiment, the air source is an air compressor, which provides high-pressure air. By supplying high-pressure air to the first air inlet 33 and the second air inlet 34, the piston 32 can be driven to make linear motion in the first chamber 31, thereby driving the sealing head 2 to move and realize the opening and closing of the joint.

[0026] It is understood that the connector also includes a second chamber 35, which is opened inside the connector body 1, and the diaphragm 11 is fixedly installed in the second chamber 35 by a pressure ring; in this embodiment, it is used for filling ultrapure gas, and the diaphragm 11 can be made of modified polytetrafluoroethylene or perfluoroalkoxy resin, depending on the requirements of corrosion resistance, temperature and pressure resistance and purity.

[0027] Specifically, the connector also includes: a guide rod 36, which is fixedly installed on the sealing head 2; and on the same layer, a pair of floating support components 4 are slidably sleeved on both ends of the guide rod 36.

[0028] It is understandable that a stepped hole is provided in the floating support component 4, and the guide rod 36 is slidably installed in the stepped hole.

[0029] It is worth mentioning that the second drive assembly includes: a drive rod 51, which is rotatably mounted on the sealing head 2, and is located between a pair of floating support members 4 on the same layer; a drive block 52, which is fixedly mounted on the drive rod 51; an arc-shaped surface 53, which slides in contact with the floating support members 4; and a motor 54, which drives the drive rod 51 to rotate.

[0030] Specifically, along the axial direction of the drive rod 51, the diameter of each layer of floating support component 4 decreases.

[0031] When it is necessary to close the feeding channel, the sealing head 2 moves downward and presses down the diaphragm 11 until the feeding channel is closed; the floating support component 4 presses against the other side of the diaphragm 11, so that even if the high-pressure material in the feeding channel squeezes the diaphragm 11, the floating support component 4 can support the diaphragm 11, preventing the diaphragm 11 from being in a hollow state in the second chamber 35, and preventing the diaphragm 11 from being in a state of compression and deformation for a long time.

[0032] When the feeding channel needs to be opened, the sealing head 2 moves upward, and the sealing head 2 drives the diaphragm 11 upward until the feeding channel is opened; simultaneously, the motor 54 rotates, driving the drive rod 51 to rotate, thereby driving the drive block 52 to rotate. The drive block 52 pushes the floating support component 4 to slide, and the floating support component 4 re-presses the other side of the diaphragm 11. Even if the material flowing in the feeding channel impacts and squeezes the diaphragm 11, the floating support component 4 can still support the diaphragm 11, preventing the diaphragm 11 from being in a hollow state in the second chamber 35, and preventing the diaphragm 11 from being in a state of compression and deformation for a long time.

[0033] By using this invention, regardless of whether the diaphragm 11 valve is in the open or closed state, the floating support assembly can provide effective support for the side of the diaphragm 11 away from the material, preventing the diaphragm 11 from being under pressure and deformed for a long time, reducing the risk of diaphragm 11 deformation, ensuring the overall self-sealing of the joint, and extending the service life of the joint.

[0034] For joints where the material flow rate needs to be adjusted, the distance the sealing head 2 moves can be different. The motor 54 can drive the drive rod 51 to rotate at different angles, causing the drive block 52 to abut against the floating support component 4 and unfold to different sizes, thereby supporting the diaphragm 11.

[0035] In this embodiment, the cross-section of the drive block 52 can be elliptical, or it can be formed by splicing together a rectangular block and two semicircular blocks.

[0036] Those skilled in the art will understand that although preferred embodiments of the invention have been described, those skilled in the art, once they understand the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the invention. Clearly, those skilled in the art can make various alterations and modifications to the invention without departing from its spirit and scope. Thus, if these modifications and modifications of the invention fall within the scope of the claims of the invention and their equivalents, the invention also intends to include these modifications and modifications.

Claims

1. A self-sealing connector for filling ultrapure gases, characterized in that, include: The connector body (1) has a feeding channel for fluid flow inside the connector body (1); A diaphragm (11) is disposed inside the connector body (1) and located on one side of the feeding channel; A sealing head (2) is movably disposed inside the connector body (1), and one end is fixedly connected to a diaphragm (11); The first drive assembly is used to drive the sealing head (2) to perform linear reciprocating motion; Several layers of floating support components (4) are slidably mounted on the sealing head (2) along the radial direction of the sealing head (2); The second drive assembly is used to drive the floating support component (4) to slide, thereby supporting one side of the diaphragm (11).

2. The self-sealing connector for ultrapure gas filling according to claim 1, characterized in that, The first driving component includes: The first chamber (31) is located inside the connector body (1); A piston (32) is mounted on a sealing head (2), and the outer wall of the piston (32) slides and seals against the inner wall of the first chamber (31). The first air inlet (33) and the second air inlet (34) are opened on the connector body (1), connecting the first chamber (31) and the outside, respectively located on both sides of the piston (32); The air source is connected to the first air inlet (33) and the second air inlet (34) through a pipe fitting.

3. The self-sealing connector for ultrapure gas filling according to claim 1, characterized in that, Also includes: The second chamber (35) is located inside the connector body (1), and the diaphragm (11) is fixedly installed in the second chamber (35) by a press-fit ring.

4. The self-sealing connector for ultrapure gas filling according to claim 1, characterized in that, Also includes: The guide rod (36) is fixedly installed on the sealing head (2); on the same layer, a pair of floating support components (4) are slidably sleeved on both ends of the guide rod (36).

5. The self-sealing connector for ultrapure gas filling according to claim 4, characterized in that, The second drive component includes: The drive rod (51) is rotatably mounted on the sealing head (2) in the same layer, and the drive rod (51) is located between a pair of floating support members (4); The drive block (52) is fixedly installed on the drive rod (51); Arc-shaped surface (53), sliding contact floating support component (4); The motor (54) is used to drive the drive rod (51) to rotate.

6. The self-sealing connector for ultrapure gas filling according to claim 5, characterized in that, Along the axial direction of the drive rod (51), the diameter of each layer of floating support member (4) decreases.

7. The self-sealing connector for ultrapure gas filling according to claim 5, characterized in that, The cross-section of the drive block (52) is elliptical.

8. An apparatus for filling ultrapure gases, characterized in that, Includes the self-sealing connector for ultrapure gas filling as described in any one of claims 1-7.

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