A system and method for integrated sensing and detection of coplanarity of conductive array metal pieces

Abstract

The application relates to the technical field of conductive metal detection, and discloses a conductive array metal piece coplanarity integrated sensing and detection system and method, which comprises: a conductive array target induction module coaxially arranged on a rotating shaft system; an integrated eddy current sensing probe module fixed on a closed shell, wherein the sensitive span of a single cycle differential induction coil group of the integrated eddy current sensing probe module matches the width of a single conductive fan blade; a high-frequency excitation module for inputting a sinusoidal current to establish an alternating electromagnetic field; a signal conditioning and collecting module for extracting an induction electromotive force modulated by each fan blade and outputting a discrete sampling sequence; and a geometric size measurement and calculation module for calculating an average axial spacing and a coplanarity installation tolerance according to a peak voltage sequence. The application eliminates spatial electromagnetic aliasing by single cycle sensitive area constraint, and realizes decoupling measurement of the axial spacing and the coplanarity tolerance of the fan blades in the closed cavity.

Description

Technical Field

[0001] This invention belongs to the field of conductive metal detection technology, and particularly relates to an integrated sensing and detection system and method for the coplanarity of conductive array metal components. Background Technology

[0002] The conductive array metal component installed at the end of the shaft system is usually composed of multiple conductive metal fan blades evenly distributed along the circumference. The coplanarity, form and position tolerances and axial installation spacing between each conductive metal fan blade will directly affect the sensing accuracy and mechanical stability of the system during operation. In order to meet the requirements of mechanical sealing and dust prevention, the conductive component under test is usually located inside a fully enclosed cavity after the end cover is tightened.

[0003] In conventional testing processes, due to the obstruction of the enclosed shell and the limitation of internal space, external mechanical probes and optical measurement systems cannot be inserted into the cavity to perform dimensional measurements after the shell is closed and secured. Existing testing methods often employ multi-period differential eddy current induction coils arranged along the entire circumference. When a high-frequency excitation current is applied to the primary transmitting coil to establish an alternating electromagnetic field, each conductive metal blade rotates through the sensing area and generates induced eddy currents, thereby changing the induced electromotive force of the secondary receiving coil. Because this multi-period coil covers the entire circumference, its sensing area simultaneously spans multiple conductive metal blades. The magnetic flux changes caused by different blades are superimposed at the coil output, ultimately yielding a comprehensive signal reflecting the geometric dimensional changes throughout the entire circumference. Besides the aforementioned hardware... Besides the constraints of signal aliasing caused by the physical arrangement of multiple blades, existing technologies also have shortcomings in terms of signal demodulation and spatial multidimensional parameter decoupling algorithms. For example, Chinese invention patent application CN120970459A discloses a method for synchronously decoupling the vibration displacement of a crowned blade and the tip clearance. By making radial openings in the casing and arranging discrete dual eddy current probes, it attempts to construct a binary equation using the changes in the sensing area of ​​the upper and lower edges of the crown and the changes in radial distance measurement to implement parameter decoupling. However, this scheme relies on the casing openings and the discrete dual measurement point layout, which not only destroys the airtightness of the cavity and cannot meet the requirements of in-situ detection of blind cavities, but also its decoupling algorithm is based on the specific geometric assumption of continuous overlapping changes at the edges of a single blade.

[0004] Therefore, the technical problem to be solved by this invention is how to reduce the mutual influence of electromagnetic signals between multiple conductive metal fan blades while maintaining the original installation state of the closed shell, and how to measure the axial air gap and coplanarity installation tolerance of each conductive metal fan blade inside the closed cavity. Summary of the Invention

[0005] To address the problems in the background art, the technical solution of the present invention is as follows: An integrated sensing and detection system for the coplanarity of conductive array metal components, comprising:

[0006] The conductive array target sensing module is coaxially fixed to the rotating axis system and has the following characteristics: A circumferentially distributed conductive metal fan blade. The width of the sector central angle of each conductive metal fan blade is an integer greater than or equal to 2. ;

[0007] An integrated eddy current sensor module, fixed to the measurement port of a closed housing, includes a sensing substrate and a single-cycle differential induction coil group; the single-cycle differential induction coil group includes a central angle of... The primary transmitting coil, and a sensitive span symmetrically arranged inside the primary transmitting coil. The secondary receiving coil ensures that the effective electromagnetic induction area covers only the projected trajectory of a single conductive metal fan blade at any given instant.

[0008] The high-frequency excitation module is electrically connected to the primary transmitting coil and is used to input a high-frequency sinusoidal current signal to establish an alternating electromagnetic field.

[0009] The signal conditioning and acquisition module is differentially connected to both ends of the secondary receiving coil. It is used to extract the induced electromotive force modulated by each conductive metal fan blade when the conductive array target sensing module rotates. After detection, filtering and analog-to-digital conversion, it outputs a discrete sampling voltage sequence.

[0010] The geometric dimension measurement and calculation module and the communication connection signal conditioning and acquisition module are used to extract the peak voltage sequence of each conductive metal fan blade in the discrete sampling voltage sequence. Based on the preset zero-gap reference voltage With displacement sensitivity coefficient Calculate the average axial spacing and coplanarity installation tolerance of the conductive array target sensing modules, and output a quantitative evaluation report on geometric installation accuracy.

[0011] Preferably, the outline, positioning stop surface, mechanical fastening hole position, and electrical pin wiring definition of the integrated eddy current sensor probe module are isomorphically identical to the mounting geometry and electrical interface of the original eddy current angular displacement sensor inside the enclosed housing; the sensing substrate is coaxially positioned and locked through the in-situ pin hole reserved on the end cover of the enclosed housing; the sensing normal center axis of the single-cycle differential induction coil group coincides with the rotation center axis of the rotation axis system, so that the single-cycle differential induction coil group faces the end face of the conductive array target sensing module in the closed and fastened state, and is axially aligned with the nominal static design working air gap.

[0012] Preferably, the secondary receiving coil of the single-cycle differential induction coil group consists of a top-layer induction coil and a bottom-layer induction coil. The top-layer and bottom-layer induction coils are symmetrically arranged along the thickness direction of the sensing substrate and electrically connected in series in opposite directions. The electromagnetic induction areas enclosed by the top-layer and bottom-layer induction coils are equal and opposite in polarity. This is used to ensure that the intrinsic copper resistance changes of the two layers of traces are canceled out at the differential lead-out terminals when the ambient temperature changes, thus maintaining the displacement sensitivity coefficient. With zero air gap reference voltage Stablize.

[0013] Preferably, the signal conditioning and acquisition module includes a hardware zero-crossing comparison circuit and a phase-locked loop synchronization circuit. The signal conditioning and acquisition module uses the sudden change in the amplitude of the induced voltage caused by the edge of each conductive metal fan blade passing through the effective electromagnetic induction area as the reference trigger signal for the circumferential rotation angle. The phase-locked loop synchronization circuit tracks the rotational angular velocity of the rotating shaft system and adaptively adjusts the sampling clock frequency of the analog-to-digital converter so that each conductive metal fan blade collects a fixed number of discrete sampling points at equal angles within the arc segment of the central angle of the effective electromagnetic induction area, which serve as discrete data sources for extracting the peak voltage sequence.

[0014] Preferably, the geometric dimension measurement and calculation module compares the calculated average axial spacing with the preset upper limit threshold of the nominal installation air gap design window; if the average axial spacing exceeds the upper limit threshold of the nominal installation air gap design window, the geometric dimension measurement and calculation module calculates the difference between the average axial spacing and the preset nominal standard air gap, generates displacement adjustment parameters characterizing the increase in the thickness of the axial compensation shim, and outputs the displacement adjustment parameters to the assembly control terminal.

[0015] Preferably, the geometric dimension measurement and calculation module compares the calculated coplanarity installation tolerance with the preset coplanarity tolerance qualified threshold. If the coplanarity installation tolerance is greater than the coplanarity tolerance qualified threshold, the geometric dimension measurement and calculation module retrieves the circumferential physical sector number of the conductive metal fan blade corresponding to the maximum and minimum voltage points in the peak voltage sequence, determines the end face tilt orientation of the conductive array target sensing module in three-dimensional space, and outputs a control command indicating the circumferential tightening torque correction direction to the assembly control terminal.

[0016] Preferably, the carrier frequency of the high-frequency sinusoidal current signal output by the high-frequency excitation module is 1.0MHz to 10.0MHz; the primary transmitting coil includes a multi-turn microstrip coil printed on the surface of the sensing substrate, and a grounded shielding copper sheet is disposed on the same layer around the primary transmitting coil to constrain the spatial distribution of the alternating electromagnetic field and suppress electromagnetic interference to the electrical components inside the enclosed housing.

[0017] Preferably, the synchronous phase-sensitive detector circuit of the signal conditioning and acquisition module uses an orthogonal demodulation carrier wave with the same frequency and phase as the high-frequency sinusoidal current signal to perform frequency mixing and down-conversion on the induced electromotive force output from both ends of the secondary receiving coil; the cutoff frequency of the low-pass filter is greater than the rotational fundamental frequency corresponding to the rated maximum speed of the rotating shaft system and less than one-fifth of the carrier frequency of the high-frequency sinusoidal current signal, and is used to filter out high-frequency harmonic components and extract the envelope waveform of the induced electromotive force that changes with the rotational angular position.

[0018] Preferably, the conductive array target sensing module is a conductive metal fan-shaped rotor disk module in the drive motor rotor angular displacement sensor, which is formed by stamping or casting of non-magnetic conductive metal material, and the number of fan blades is... The width of the central angle of the sector for each conductive metal fan blade is 4. The included angle between the slots and the adjacent conductive metal fan blades is 45 degrees; the nominal static design working air gap between the sensing substrate and the conductive array target sensing module is 0.800mm to 2.500mm.

[0019] A method for integrated sensing and detection of the coplanarity of conductive array metal components, applied to an integrated sensing and detection system for the coplanarity of conductive array metal components, includes the following steps:

[0020] Step S1: A high-frequency sinusoidal current signal is input from the high-frequency excitation module to the primary transmitting coil in the single-cycle differential induction coil group to establish a high-frequency alternating electromagnetic field in the gap between the integrated eddy current sensing probe module and the conductive array target sensing module.

[0021] Step S2: When the conductive array target sensing module rotates with the rotating axis, the signal conditioning and acquisition module extracts the induced electromotive force modulated by each conductive metal fan blade sweeping through the effective electromagnetic induction area, and performs synchronous phase-sensitive detection, low-pass filtering and analog-to-digital conversion on the induced electromotive force in sequence to output a discrete sampling voltage sequence.

[0022] Step S3: The geometric dimension measurement and calculation module extracts the fundamental envelope peak voltage sequence corresponding to each conductive metal fan blade sweeping through the effective electromagnetic induction region from the discrete sampling voltage sequence. ;

[0023] Step S4, the geometric dimension measurement and calculation module calculates the zero air gap reference voltage based on the preset zero air gap reference voltage. With displacement sensitivity coefficient The average axial spacing of the conductive array target sensing modules and the coplanarity installation tolerance between each conductive metal fan blade are calculated respectively. The calculated average axial spacing and coplanarity installation tolerance are compared with the preset tolerance threshold range to determine the accuracy, and a quantitative evaluation report of spatial geometric installation accuracy is output.

[0024] Compared with existing technologies, the integrated sensing and detection system and method for the coplanarity of conductive array metal components of the present invention has the following advantages:

[0025] 1. In the integrated sensing and detection of coplanarity of conductive array metal parts, the circumferential span of the single-cycle differential induction coil group is matched with that of a single conductive metal fan blade, so that the effective electromagnetic induction area corresponds to only one conductive metal fan blade at any given time. When each conductive metal fan blade passes through the sensing area in sequence with the rotation axis, it can generate mutually distinguishable induction signals, avoiding signal superposition caused by multiple fan blades entering the sensing range at the same time. As a result, the axial linear geometric dimensions and form and position parameters of each conductive metal fan blade can be measured separately, reducing mutual interference between multiple fan blades and improving the distinguishability of coplanarity and axial spacing measurements.

[0026] 2. By using the peak voltage corresponding to each conductive metal fan blade, the average axial installation spacing of the conductive array components and the coplanarity installation tolerance between each fan blade can be obtained simultaneously. This allows for the differentiation between overall axial installation position changes and dimensional deviations caused by local fan blade warping. Furthermore, the adjustment basis for axial compensation shims can be provided based on the average axial spacing, and the correction direction of the circumferential clamping torque can be determined based on the measurement results of different fan blades. This provides a clear dimensional basis for the assembly and adjustment of the conductive array components inside the enclosed cavity, reducing the need for repeated adjustments based solely on experience.

[0027] 3. The integrated eddy current sensor probe module uses the original angular displacement sensor's installation position and mechanical positioning reference inside the closed housing. It can directly measure the geometric dimensions of the internal rotating components after the housing is closed and tightened, without the need to use mechanical probes or optical measuring equipment to enter the closed space. This can maintain the original sealed state of the whole machine, obtain the actual installation form and position tolerance of the conductive metal components at the rotor end, and advance the inspection of assembly defects before insulation potting and assembly packaging, reducing the process cost and quality control risks caused by subsequent disassembly and rework. Attached Figure Description

[0028] Figure 1 This is a flowchart of the measurement and calculation process for axial spacing and coplanarity tolerance of the present invention;

[0029] Figure 2 This is the state transition diagram for online assembly monitoring and torque correction of the present invention. Detailed Implementation

[0030] The technical solutions of the embodiments of this application will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this application are within the scope of protection of this application.

[0031] An integrated sensing and detection system for the coplanarity of conductive array metal components includes:

[0032] The conductive array target sensing module is coaxially fixed to the rotating axis system and has the following characteristics: A circumferentially distributed conductive metal fan blade. The width of the sector central angle of each conductive metal fan blade is an integer greater than or equal to 2. ;

[0033] An integrated eddy current sensor module, fixed to the measurement port of a closed housing, includes a sensing substrate and a single-cycle differential induction coil group; the single-cycle differential induction coil group includes a central angle of... The primary transmitting coil, and a sensitive span symmetrically arranged inside the primary transmitting coil. The secondary receiving coil ensures that the effective electromagnetic induction area covers only the projected trajectory of a single conductive metal fan blade at any given instant.

[0034] The high-frequency excitation module is electrically connected to the primary transmitting coil and is used to input a high-frequency sinusoidal current signal to establish an alternating electromagnetic field.

[0035] The signal conditioning and acquisition module is differentially connected to both ends of the secondary receiving coil. It is used to extract the induced electromotive force modulated by each conductive metal fan blade when the conductive array target sensing module rotates. After detection, filtering and analog-to-digital conversion, it outputs a discrete sampling voltage sequence.

[0036] The geometric dimension measurement and calculation module and the communication connection signal conditioning and acquisition module are used to extract the peak voltage sequence of each conductive metal fan blade in the discrete sampling voltage sequence. Based on the preset zero-gap reference voltage With displacement sensitivity coefficient Calculate the average axial spacing and coplanarity installation tolerance of the conductive array target sensing modules, and output a quantitative evaluation report on geometric installation accuracy.

[0037] Preferably, the outline, positioning stop surface, mechanical fastening hole position, and electrical pin wiring definition of the integrated eddy current sensor probe module are isomorphically identical to the mounting geometry and electrical interface of the original eddy current angular displacement sensor inside the enclosed housing; the sensing substrate is coaxially positioned and locked through the in-situ pin hole reserved on the end cover of the enclosed housing; the sensing normal center axis of the single-cycle differential induction coil group coincides with the rotation center axis of the rotating axis system, so that the single-cycle differential induction coil group faces the end face of the conductive array target sensing module in the closed and fastened state, and is axially aligned with the nominal static design working air gap.

[0038] Preferably, the secondary receiving coil of the single-cycle differential induction coil group consists of a top-layer induction coil and a bottom-layer induction coil. The top-layer and bottom-layer induction coils are symmetrically arranged along the thickness direction of the sensing substrate and electrically connected in series in opposite directions. The electromagnetic induction areas enclosed by the top-layer and bottom-layer induction coils are equal and opposite in polarity. This is used to ensure that the intrinsic copper resistance changes of the two layers of traces are canceled out at the differential lead-out terminals when the ambient temperature changes, thus maintaining the displacement sensitivity coefficient. With zero air gap reference voltage Stablize.

[0039] Preferably, the signal conditioning and acquisition module includes a hardware zero-crossing comparison circuit and a phase-locked loop synchronization circuit. The signal conditioning and acquisition module uses the sudden change in the amplitude of the induced voltage caused by the edge of each conductive metal fan blade passing through the effective electromagnetic induction area as the reference trigger signal for the circumferential rotation angle. The phase-locked loop synchronization circuit tracks the rotational angular velocity of the rotating shaft system and adaptively adjusts the sampling clock frequency of the analog-to-digital converter so that each conductive metal fan blade collects a fixed number of discrete sampling points at equal angles within the arc segment of the central angle of the effective electromagnetic induction area, which serve as discrete data sources for extracting the peak voltage sequence.

[0040] Preferably, the geometric dimension measurement and calculation module compares the calculated average axial spacing with the preset upper limit threshold of the nominal installation air gap design window; if the average axial spacing exceeds the upper limit threshold of the nominal installation air gap design window, the geometric dimension measurement and calculation module calculates the difference between the average axial spacing and the preset nominal standard air gap, generates displacement adjustment parameters characterizing the increase in the thickness of the axial compensation shim, and outputs the displacement adjustment parameters to the assembly control terminal.

[0041] Preferably, the geometric dimension measurement and calculation module compares the calculated coplanarity installation tolerance with the preset coplanarity tolerance qualified threshold. If the coplanarity installation tolerance is greater than the coplanarity tolerance qualified threshold, the geometric dimension measurement and calculation module retrieves the circumferential physical sector number of the conductive metal fan blade corresponding to the maximum and minimum voltage points in the peak voltage sequence, determines the end face tilt orientation of the conductive array target sensing module in three-dimensional space, and outputs a control command indicating the circumferential tightening torque correction direction to the assembly control terminal.

[0042] Preferably, the carrier frequency of the high-frequency sinusoidal current signal output by the high-frequency excitation module is 1.0MHz to 10.0MHz; the primary transmitting coil includes a multi-turn microstrip coil printed on the surface of the sensing substrate, and a grounded shielding copper sheet is disposed on the same layer around the primary transmitting coil to constrain the spatial distribution of the alternating electromagnetic field and suppress electromagnetic interference to the electrical components inside the enclosed housing.

[0043] Preferably, the synchronous phase-sensitive detector circuit of the signal conditioning and acquisition module uses an orthogonal demodulation carrier wave with the same frequency and phase as the high-frequency sinusoidal current signal to perform frequency mixing and down-conversion on the induced electromotive force output from both ends of the secondary receiving coil; the cutoff frequency of the low-pass filter is greater than the rotational fundamental frequency corresponding to the rated maximum speed of the rotating shaft system and less than one-fifth of the carrier frequency of the high-frequency sinusoidal current signal, and is used to filter out high-frequency harmonic components and extract the envelope waveform of the induced electromotive force that changes with the rotational angular position.

[0044] Preferably, the conductive array target sensing module is a conductive metal fan-shaped rotor disk module in the drive motor rotor angular displacement sensor, which is formed by stamping or casting of non-magnetic conductive metal material, and the number of fan blades is... The width of the central angle of the sector for each conductive metal fan blade is 4. The included angle between the slots and the adjacent conductive metal fan blades is 45 degrees; the nominal static design working air gap between the sensing substrate and the conductive array target sensing module is 0.800mm to 2.500mm.

[0045] A method for integrated sensing and detection of the coplanarity of conductive array metal components, applied to an integrated sensing and detection system for the coplanarity of conductive array metal components, includes the following steps:

[0046] Step S1: A high-frequency sinusoidal current signal is input from the high-frequency excitation module to the primary transmitting coil in the single-cycle differential induction coil group to establish a high-frequency alternating electromagnetic field in the gap between the integrated eddy current sensing probe module and the conductive array target sensing module.

[0047] Step S2: When the conductive array target sensing module rotates with the rotating axis, the signal conditioning and acquisition module extracts the induced electromotive force modulated by each conductive metal fan blade sweeping through the effective electromagnetic induction area, and performs synchronous phase-sensitive detection, low-pass filtering and analog-to-digital conversion on the induced electromotive force in sequence to output a discrete sampling voltage sequence.

[0048] Step S3: The geometric dimension measurement and calculation module extracts the fundamental envelope peak voltage sequence corresponding to each conductive metal fan blade sweeping through the effective electromagnetic induction region from the discrete sampling voltage sequence. ;

[0049] Step S4, the geometric dimension measurement and calculation module calculates the zero air gap reference voltage based on the preset zero air gap reference voltage. With displacement sensitivity coefficient The average axial spacing of the conductive array target sensing modules and the coplanarity installation tolerance between each conductive metal fan blade are calculated respectively. The calculated average axial spacing and coplanarity installation tolerance are compared with the preset tolerance threshold range to determine the accuracy, and a quantitative evaluation report of spatial geometric installation accuracy is output.

[0050] Example 1: During the assembly process of the permanent magnet synchronous motor rotor end in the new energy pure electric drive assembly, the conductive array target sensing module is coaxially fixed to the end of the rotating shaft system, and has 4 conductive metal fan blades evenly distributed in a circumferential array. The central angle width of the sector of each conductive metal fan blade is... All angles are 45°, and the slot angle between adjacent conductive metal fan blades is 45°. After the stator end cover is closed and the housing is fastened in place, the conductive array target sensing module is in a fully enclosed blind cavity environment. Conventional contact measuring tools and optical measuring optical paths are restricted by the housing shielding and spatial interference and cannot be extended into the measuring point. At this time, if the rotor shaft end face is misaligned due to the non-uniform distribution of the fastening torque, or if the overall reference displacement is caused by the accumulation of axial limit tolerance, the air gap between each conductive metal fan blade and the stator sensing end face will show circumferential non-uniform undulation or overall deviation. The electromagnetic disturbance generated by the conventional full-circumference multi-cycle coil structure during rotation will generate spatial integral superposition of all fan blades, causing the coplanarity runout caused by local fan blade warping and the overall axial installation deviation to be mixed at the signal output end. It is impossible to directly extract the independent linear displacement of a single conductive metal fan blade in the closed state.

[0051] To address the challenges of obstructed geometric measurement within blind cavities and electromagnetic aliasing in multi-blade spaces, the integrated eddy current sensor module's outline, positioning stop surface, mechanical fastening holes, and electrical pin wiring definitions are identical to the mounting geometry and electrical interface of the original eddy current angular displacement sensor within the enclosed housing. During assembly, the sensing substrate is coaxially positioned and locked using pre-drilled pin holes on the end cap of the enclosed housing. The mechanical fastening and electrical wiring utilize the corresponding mechanical fastening holes and electrical pin wiring definitions of the original eddy current angular displacement sensor. The induction normal center axis of the single-cycle differential induction coil group coincides with the rotation center axis of the rotational axis system. The sensing surface is axially opposite to the end face of the conductive array target sensing module. The nominal static design working air gap between the sensing substrate and the conductive array target sensing module is 0.800mm to 2.500mm, with a preset nominal standard air gap. Take 1.5mm; the central angle of the circumferential envelope of the high-frequency excitation module to the periphery of the sensing substrate is... That is, the primary transmitting coil at 90°. Input a high-frequency sinusoidal current signal, where , A high-frequency alternating electromagnetic field is established between the integrated eddy current sensing probe module and the conductive array target sensing module; the secondary receiving coil in the single-cycle differential induction coil group Arranged in the primary transmitting coil On the inner side, its circumferential effective geometrically sensitive span is limited to That is, 45°, so that when the rotating shaft system rotates at a constant speed of 600 rpm, the effective electromagnetic induction area covers only the rotational projection trajectory of a single conductive metal fan blade at any instant.

[0052] The signal conditioning and acquisition module is differentially connected to the secondary receiving coil. At both ends, the synchronous phase-sensitive detection circuit first uses an orthogonal demodulation carrier synchronized with the high-frequency sinusoidal current signal to power the secondary receiving coil. The output differential induced electromotive force is mixed and down-converted, and then a low-pass filter completely filters out the high-frequency carrier component, outputting a smooth fundamental envelope voltage signal that varies with the rotational position of each conductive metal fan blade. Specifically, the high-frequency reference carrier output from the high-frequency excitation module is directly used as the in-phase demodulation reference signal. A hardware 90° phase-shifting network generates an orthogonal demodulation reference signal with the same frequency. The two reference signals together constitute the orthogonal demodulation carrier. The in-phase multiplier and the orthogonal multiplier perform analog multiplication and mixing on the differential induced electromotive force, respectively. After a subsequent low-pass filter, the in-phase fundamental component and the orthogonal fundamental component are extracted, and the square root operation of the sum of squares of the vector amplitude is performed in the arithmetic unit to compensate for the inherent phase angle offset caused by the distributed inductance of the probe wiring, obtaining the DC envelope amplitude that varies with the geometric air gap. Based on this, the output of the hardware zero-crossing comparator circuit... The input is connected to the output of a low-pass filter. Differential threshold thresholds are set for the fundamental envelope voltage step transition edges caused by the sweeping of the leading and trailing edges of each conductive metal fan blade into and out of the effective electromagnetic induction region. Hysteresis comparison shaping is then performed to convert the envelope voltage abrupt transition edges into periodic square wave reference trigger pulses that are precisely synchronized with the circumferential physical rotation angle of the fan blades. This avoids false triggering of rotational speed caused by dense zero crossings of high-frequency carriers. Subsequently, the phase-locked loop synchronization circuit tracks the rotational angular velocity of the rotating shaft system according to the square wave reference trigger pulses and performs 256-fold frequency locking. The sampling clock frequency of the analog-to-digital converter is adaptively adjusted so that each conductive metal fan blade collects 256 discrete sampling points at equal angles within the 45° central angle arc segment that sweeps through the effective electromagnetic induction region. The output is a discrete sampling voltage sequence containing the independent geometric characteristics of each conductive metal fan blade.

[0053] The geometric dimension measurement and calculation module communicates with the signal conditioning and acquisition module to extract the fundamental envelope peak voltage sequence corresponding to each conductive metal fan blade based on the discrete sampled voltage sequence. Within the nominal static design air gap range of 0.800mm to 2.500mm, the secondary receiving coil Output demodulated peak voltage Distance from absolute axial air gap Follow the linearized transfer function relationship ,in, The fundamental envelope peak voltage after detection. The zero-gap reference voltage has a calibration constant value of 4.2V. The displacement sensitivity coefficient has a calibration constant value of 1.6 V / mm. The absolute axial air gap distance between the conductive metal fan blades and the end face of the sensing substrate is calculated by the geometric dimension measurement module based on the inversion formula. Calculate the values ​​of each conductive metal fan blade separately. absolute axial air gap distance ,in, For the first The absolute axial air gap distance corresponding to each conductive metal fan blade. For the first The fundamental envelope peak voltage corresponding to the sweep of a conductive metal fan blade across the effective electromagnetic induction region. For positive integers ranging from 1 to 4, then according to the formula Calculate the average axial spacing of the conductive array target sensing modules. ,in, The average axial spacing, The total number of conductive metal fan blades and ; This is the arithmetic mean of the fundamental envelope peak voltage sequence, i.e. According to the formula Calculate the coplanarity installation tolerance between each conductive metal fan blade. ,in, For coplanarity installation tolerance, The maximum range of the fundamental envelope peak voltage sequence is denoted as . .

[0054] When the average axial spacing When the nominal installation air gap exceeds the upper limit threshold of the design window of 1.300mm to 1.700mm, the geometric dimension measurement and calculation module calculates the gap according to the formula. Generate displacement adjustment parameters characterizing the increase in the thickness of the axial compensation shim. ,in, This is the gasket thickness compensation amount, in mm. The nominal standard air gap is preset and taken as 1.5mm; when the coplanarity installation tolerance is... When the coplanarity tolerance exceeds the preset threshold of 0.1mm, the geometric dimension measurement and calculation module retrieves the circumferential physical sector number of the conductive metal fan blade corresponding to the maximum and minimum voltage points in the fundamental envelope peak voltage sequence, determines the end face tilt orientation of the conductive array target sensing module in three-dimensional space, and outputs a control command to the assembly control terminal indicating the direction of circumferential tightening torque correction.

[0055] In the specific geometric calculation and assembly control, the geometric dimension measurement and calculation module extracts the fundamental envelope peak voltage corresponding to the four conductive metal fan blades evenly distributed along the circumference. Based on the preset displacement sensitivity coefficient, the peak voltage of each fan blade is converted into the corresponding absolute axial air gap distance. Using the air gap difference between the relatively sector areas orthogonally distributed around the circumference as the orthogonal component, the tilt slope components of the end face in the horizontal and vertical axes are calculated. The circumferential physical angle of the maximum tilt orientation of the end face is determined by tangent inversion, and this tilt amount is calculated as the axial geometric displacement of the four fastening bolt measuring points evenly distributed around the circumference of the conductive array target sensing module. Deviation vector; Based on the preset bolt pitch and flange end face structural stiffness coefficient, the assembly control terminal linearly converts the axial displacement deviation vector of the four measuring points into the differential preload torque compensation amount required for each installation bolt, and outputs the corresponding bolt incremental or decrement tightening command to the servo tightening mechanism to realize the physical correction of end face runout. After completing the above judgment, the geometric dimension measurement and calculation module summarizes the average axial spacing, coplanarity installation tolerance and corresponding threshold comparison results to form a geometric installation accuracy quantitative evaluation report, and outputs the displacement adjustment parameters or the control command of the circumferential tightening torque correction direction to the assembly control terminal.

[0056] To suppress the impact of temperature drift and high-frequency electromagnetic radiation within the enclosed cavity on the accuracy of linear dimension measurement, the secondary receiving coil of the single-cycle differential induction coil group... A differential topology is adopted, in which the top and bottom induction coils are symmetrically arranged along the thickness direction of the sensing substrate and electrically connected in opposite directions. The electromagnetic induction areas enveloped by the two layers of trace loops are equal and opposite in polarity. When the ambient temperature changes, the intrinsic copper resistance changes of the top and bottom traces due to the same temperature rise form common-mode cancellation at the differential leads. However, there is an axial distance difference between the two induction coils and the conductive array target sensing module, resulting in different eddy current reaction magnetic fluxes. After being connected in reverse series, an effective differential induced electromotive force that varies with the axial air gap is still retained, thus maintaining the displacement sensitivity coefficient. With zero air gap reference voltage Stable, with a temperature drift coefficient below 0.01% / ℃; simultaneously, the primary transmitting coil... The outer layer is equipped with grounded shielding copper foil to confine the high-frequency alternating electromagnetic field within the single-cycle sensitive central angle range corresponding to the effective electromagnetic induction area, thereby suppressing stray electromagnetic coupling to the stator windings and lead structure inside the enclosed shell. After the motor assembly is closed and tightened, the entire system reuses the in-situ installation physical boundary. At the time-domain physical level, the absolute axial air gap distance inversion and coplanarity installation tolerance calculation of each conductive metal fan blade are transformed into mutually orthogonal discrete characteristic peak extraction, so that the assembly shape and position dimensions of the rotating components inside the blind cavity can be quantitatively confirmed and compensated for in-situ before insulation potting and structural encapsulation.

[0057] Example 2: This example constructs a dedicated eddy current length measurement test platform to measure the average axial spacing and coplanarity installation tolerance of the conductive array target sensing module in a closed blind cavity environment. The test platform includes a precision frequency conversion drive spindle system, a coaxial grating angular displacement encoder, a three-axis micron-level precision micro-motion stage, a constant temperature and humidity environment test chamber, a high-frequency signal generator, and a multi-channel high-speed data acquisition and analysis instrument. The displacement resolution of the three-axis micro-motion stage is 0.001 mm, and the repeatability is better than 0.002 mm. The coaxial grating angular displacement encoder has 2048 lines to provide an absolute angular position reference. The conductive array target sensing module is a 60 mm outer diameter 4-blade cast aluminum conductive metal fan-shaped rotor module. The central angle width of each conductive metal fan blade's sector is... Both angles are 45°. The integrated eddy current sensing probe module is mounted on the displacement stage measuring point fixture, so that the single-cycle differential induction coil group on the sensing substrate and the conductive array target sensing module are arranged coaxially opposite each other; the high-frequency excitation module transmits to the primary transmitting coil. Applying a sinusoidal excitation current, the primary transmitting coil The circumferential envelope central angle is 90°, and the secondary receiving coil The circumferential sensitive span is limited to 45°, and a high-frequency alternating electromagnetic field is established between the probe end face and the conductive metal fan blade.

[0058] The experiment used 3.5MHz as the excitation carrier frequency. At the reference operating point, when the excitation frequency is below 1.0 MHz, the transmission depth of the alternating magnetic field inside the aluminum alloy increases, the eddy current reaction magnetic field weakens, and the displacement sensitivity coefficient... When the excitation frequency is higher than 10.0MHz, the distributed capacitance and high-frequency dielectric loss of the microstrip coil on the printed circuit board increase, and the excitation waveform becomes distorted. The sampling clock is synchronously tracked by the spindle speed by the hardware phase-locked loop based on the sudden change in amplitude of the induced voltage generated when the edge of the fan blade passes through the effective electromagnetic induction area, and the sampling clock frequency is adjusted with the speed. When the spindle speed is between 300rpm and 1800rpm, 256 discrete sampling points with equal angles are collected in the arc segment of the effective electromagnetic induction area swept by each conductive metal fan blade.

[0059] During measurement, the main spindle drives the conductive array target sensing module to rotate at a constant speed of 600 rpm. A three-axis micrometer-level precision micro-motion stage adjusts the initial physical air gap and circumferential tilt of each conductive metal fan blade, creating different spatial geometric orientations. The signal conditioning and acquisition module is differentially connected to the secondary receiving coil. At both ends, the induced electromotive force modulated when each conductive metal fan blade sweeps across the effective electromagnetic induction region is extracted, and synchronous phase-sensitive detection and low-pass filtering are performed sequentially to obtain the discrete fundamental envelope sampling voltage sequence after filtering out the high-frequency carrier. At the same time, broadband Gaussian electromagnetic noise with a signal-to-noise ratio of 25dB is injected into the signal channel to simulate the common-mode interference generated by the high-frequency inverter inside the drive motor. The geometric dimension measurement and calculation module extracts the fundamental envelope peak voltage sequence corresponding to the four conductive metal fan blades according to the sampling time sequence. Combined with the zero air gap reference voltage obtained from calibration and displacement sensitivity coefficient The absolute axial air gap distance of each fan blade is obtained sequentially, and the average axial spacing is calculated. Coplanarity Installation Tolerance The maximum range of the peak voltage sequence is denoted as . .

[0060] The test setup used sample groups A1 to A4 of this embodiment with a single-cycle differential topology and temperature compensation structure; control group B1 used a full-time four-cycle multi-coil electromagnetic superposition topology, control group B2 used a single-layer structure without differential temperature compensation coils; control group C1 was used to examine the response outside the nominal static design working air gap range, and control group C2 was used to examine the response outside the excitation frequency range of 1.0MHz to 10.0MHz.

[0061] At 25℃, sample group A1 had an average air gap of 1.5mm, a coplanarity error of 0.04mm, and an excitation frequency of 3.5MHz. The range of the peak voltages collected was... The value is 0.066V. After processing by the geometric dimension measurement and calculation module, the average axial spacing is... The coplanarity installation tolerance is 1.502mm. The air gap is 0.041 mm, the absolute error of the air gap calculation is +0.002 mm, and the coplanarity is qualified. The judgment value is less than or equal to 0.1 mm. For sample group A2, the set average air gap is kept constant at 1.5 mm, the excitation frequency is 3.5 MHz, and the ambient temperature is 25 ℃. The set coplanarity error is increased to 0.16 mm. Increasing the voltage to 0.254V, the calculated average axial clearance was 1.498mm, the coplanarity installation tolerance was 0.159mm, and the absolute error of the air gap calculation was -0.002mm. The system output a coplanarity over-tolerance alarm and indicated the deflection angle. Sample group A3 further adjusted the set average air gap to 2.175mm and set the coplanarity error to 0.15mm, under conditions of 3.5MHz and 25℃. The value is 0.238V, the calculated average axial spacing is 2.173mm, the coplanarity installation tolerance is 0.149mm, and the absolute error of the air gap calculation is -0.002mm. Since the average axial spacing exceeds the nominal installation air gap design window, and the coplanarity installation tolerance exceeds the qualified threshold, the judgment result is that the air gap is out of tolerance and the coplanarity is out of tolerance. When A1 to A3 correspond to different coplanarity deviations and axial reference positions, the absolute error of the average axial spacing calculation is within ±0.003mm, and the absolute deviation of the coplanarity installation tolerance from the micro-motion displacement stage setting value is not greater than 0.002mm.

[0062] In the temperature test, sample group A4 was set with an average air gap of 1.5 mm, a coplanarity error of 0.08 mm, an excitation frequency of 3.5 MHz, and an ambient temperature of 85 ℃. The measured values ​​were as follows: With a voltage of 0.130V, the calculated average axial spacing is 1.503mm, the coplanarity installation tolerance is 0.081mm, and the absolute error of the air gap calculation is +0.003mm. The coplanarity is still considered acceptable and less than or equal to 0.1mm. The corresponding average axial spacing offset is 0.003mm, and the coplanarity calculation error is 0.001mm. Under this condition, the secondary receiving coil... The top-level induction coil and the bottom-level induction coil are connected in reverse series, and the change in intrinsic copper resistance caused by ambient temperature forms common-mode cancellation at the differential lead.

[0063] The control group B2, which uses a single layer and does not have a differential temperature compensation coil, was also tested at 85℃ and 3.5MHz, with an average air gap of 1.5mm and a coplanarity error of 0.04mm. Its peak voltage range was... The value is 0.211V, the calculated average axial spacing is 1.632mm, the coplanarity installation tolerance is 0.132mm, the absolute error of the air gap calculation is +0.132mm, and the judgment status is false alarm, temperature drift, and impedance inaccuracy; the originally set acceptable coplanarity of 0.04mm is thus judged as 0.132mm out of tolerance.

[0064] To investigate the impact of multi-blade spatial electromagnetic aliasing on coplanarity identification, control group B1 employed a full-cycle four-period multi-coil electromagnetic superposition topology. The average air gap was set to 1.5 mm, the coplanarity error to 0.16 mm, the excitation frequency to 3.5 MHz, and the ambient temperature to 25 °C. The magnetic flux changes caused by the four conductive metal blades, after being superimposed in the full-cycle coil, resulted in a peak voltage range... The value was only 0.018V; after calculation with the same geometric dimensions, the average axial spacing was 1.501mm, the coplanarity installation tolerance was only 0.011mm, and the absolute error of the air gap calculation was +0.001mm, which resulted in the actual coplanarity deviation of 0.16mm being missed. The control state showed multi-cycle cascading homogenization.

[0065] The nominal static design working air gap boundary test included control groups C1-1 and C1-2. For C1-1, the average air gap was set to 0.6 mm, lower than the nominal static design working air gap lower limit of 0.800 mm. The coplanarity error was set to 0.05 mm, the excitation frequency was 3.5 MHz, and the ambient temperature was 25℃. The measured values ​​were... After setting the voltage to 0.048V, the calculated average axial spacing is 0.685mm, the coplanarity installation tolerance is 0.030mm, and the absolute error of the air gap calculation is +0.085mm. The output exhibits near-field eddy current nonlinear distortion. C1-2 sets the average air gap to 3mm, which is higher than the nominal static design working air gap upper limit of 2.500mm. The remaining settings are: coplanarity error 0.05mm, excitation frequency 3.5MHz, and ambient temperature 25℃. When the voltage drops to 0.021V, the calculated average axial spacing is 2.760mm, the coplanarity installation tolerance is 0.013mm, the absolute error of the air gap calculation is -0.240mm, and the output shows far-field flux attenuation saturation distortion. The two sets of data correspond to near-field nonlinear transition below 0.800mm and eddy current modulation depth attenuation above 2.500mm, indicating that the linear transfer relationship deviates significantly outside this range.

[0066] The excitation frequency boundary test maintained the set average air gap of 1.5 mm, the set coplanarity error of 0.06 mm, and the ambient temperature of 25℃. The control group C2-1 had its excitation frequency reduced to 0.5 MHz, and the measured values ​​were... The calculated average axial spacing was 1.565 mm, the coplanarity installation tolerance was 0.022 mm, and the absolute error of the air gap calculation was +0.065 mm, indicating sensitivity degradation caused by insufficient skin effect. The control group C2-2 increased the excitation frequency to 15 MHz and measured... The value is 0.182V, the calculated average axial spacing is 1.412mm, the coplanarity installation tolerance is 0.114mm, the absolute error of the air gap calculation is -0.088mm, high-frequency distributed capacitance distortion occurs and misjudgment occurs. The above data corresponds to the two boundaries of the operating frequency range of 1.0MHz to 10.0MHz: below this range, the eddy current induction intensity decreases, and above this range, the high-frequency parasitic parameters have a significant impact on the signal phase and amplitude.

[0067] The active low-pass filter in the signal conditioning and acquisition module adopts a fourth-order voltage-controlled voltage source type Bessel active analog filter circuit with a cutoff frequency of 25kHz. Under the high-frequency excitation condition of 3.5MHz, the filter filters out the excitation carrier and its higher harmonics, and keeps the group delay in the passband at 12.5μs to reduce the influence of phase nonlinearity on the edge of the fundamental wave envelope, providing a continuous envelope waveform for equal-angle discrete sampling.

[0068] Example 3: In this example, the displacement sensitivity coefficient of the conductive array target sensing module is first measured. With zero air gap reference voltage Offline calibration is performed, followed by in-situ measurement at the rotor end of the permanent magnet synchronous motor in the new energy pure electric drive assembly. The conductive array target sensing module is coaxially fixed at the end of the rotating shaft system, and the motor end cover is tightened into place to form a fully enclosed blind cavity. The calibration uses a length measuring machine with a measurement stroke of 0mm to 5mm and an indication error of 0.0005mm. A cast aluminum conductive metal fan-shaped rotor disk module of the same material as the conductive array target sensing module is fixed to the end face of the main shaft. The integrated eddy current sensing probe module is coaxially fixed to the micrometer shaft coaxial measuring base, so that the primary transmitting coil With secondary receiving coil The high-frequency excitation module directs the axial direction of the conductive metal sector-shaped rotor disk module's planar area towards the primary transmitting coil. Injection frequency Peak-to-peak value The constant amplitude sinusoidal current; the length measuring machine advances at 0.1mm increments, changing the axial air gap within the nominal static design working air gap range of 0.800mm to 2.500mm. The detector output voltage was recorded, and a total of 18 sets of discrete displacement voltage data were obtained. The data fitting unit performed first-order linear least squares fitting on the 18 sets of data. When the fitting decision coefficient... When the zero-gap reference voltage is reached, the intercept of the fitted straight line is taken as the reference voltage. The absolute value of the slope of the fitted straight line is taken as the displacement sensitivity coefficient. , which serve as the reference parameters for subsequent air gap inversion.

[0069] In the microstrip layout of the sensing substrate, the primary transmitting coil Printed on the surface of a multilayer printed circuit board, with an outer diameter of 35mm and an inner diameter of 20mm, a microstrip linewidth of 0.25mm, and a line spacing of 0.2mm, it features four layers of concentric spiral traces; the secondary receiving coil... Printed on the primary transmitting coil The inner side has an outer diameter of 33mm and an inner diameter of 22mm. The microstrip linewidth and line spacing are both 0.2mm. A total of 6 layers of concentric spiral traces are set. At an excitation frequency of 3.5MHz, this coil layout forms a columnar high-frequency alternating magnetic field with an axial divergence angle of less than 15°. It maintains a monotonic gradient in the axial air gap range of 0.800mm to 2.500mm, and the linear fitting determination coefficient reaches more than 0.9995.

[0070] During the rotation sampling process, the signal conditioning and acquisition module is equipped with a hardware zero-crossing comparison circuit and a phase-locked loop synchronization circuit. When the rotating shaft system drives the conductive array target sensing module to rotate, the leading edge and trailing edge of each conductive metal fan blade sequentially sweep across the secondary receiving coil. The effective electromagnetic induction region boundary, the differential induced electromotive force envelope generates positive and negative high-steep voltage jumps; the hardware zero-crossing comparator circuit captures the voltage jump edges and shapes them into a periodic square wave pulse sequence, the phase-locked loop synchronization circuit tracks the square wave pulse period and performs a 256-fold frequency multiplication to generate a sampling clock, and the multi-channel analog-to-digital converter, driven by this sampling clock, operates on the effective geometrically sensitive span in the circumferential direction. The induced waveform within the device is sampled at 256 discrete points at equal angles. The data processing logic retrieves the maximum instantaneous amplitude from these 256 sampling points, which is used as the fundamental envelope peak voltage when the corresponding conductive metal fan blade sweeps across the effective electromagnetic induction area. .

[0071] In the specific signal flow process, the secondary receiving coil The output high-frequency amplitude-modulated induced electromotive force first enters the synchronous phase-sensitive demodulation circuit. The synchronous phase-sensitive demodulation circuit uses an orthogonal demodulation carrier with the same frequency as the high-frequency sinusoidal current signal. One path is in phase with the high-frequency sinusoidal current signal, and the other path is orthogonal to its phase. The two paths perform mixing and down-conversion respectively. Then, the ripple of the 3.5MHz high-frequency modulation carrier is completely filtered out by an active low-pass filter to obtain a smooth fundamental envelope voltage signal that changes with the mechanical angular position of the rotating conductive metal fan blade. The input of the hardware zero-crossing comparator circuit is connected to the output of the active low-pass filter. It compares the voltage jumps corresponding to the leading rising edge and the trailing falling edge of the filtered fundamental envelope waveform and sets a differential threshold to perform hysteresis shaping. The envelope jump edge is converted into a square wave reference clock pulse that is synchronized with the circumferential physical position of the conductive metal fan blade. Then, the phase-locked loop synchronization circuit is triggered to perform 256-fold frequency locking, thereby avoiding the mis-triggering of speed synchronization sampling caused by the dense zero crossings of the 3.5MHz high-frequency carrier.

[0072] Under temperature variation conditions, the secondary receiving coil of the single-cycle differential induction coil group... The system employs a three-dimensional symmetrical arrangement of the top and bottom layers of a multilayer FR4 substrate. The top and bottom traces maintain a mirror topology along the geometric center line of the substrate and are electrically connected in reverse series. The top traces form a clockwise loop, and the bottom traces form a counterclockwise loop. The spatial electromagnetic induction projection area error of the two loop envelopes is controlled within 0.2%. When the ambient temperature varies within the range of -40℃ to 125℃, the intrinsic DC resistance and high-frequency AC impedance increments generated by the copper foils of the top and bottom layers are treated as co-directional changes, forming common-mode cancellation at the differential leads. This keeps the temperature drift coefficient of the integrated eddy current sensor module within 0.008% / ℃ and maintains a zero-gap reference voltage during continuous length measurement. and displacement sensitivity coefficient Stablize.

[0073] During electromagnetic induction coupling, the integrated eddy current sensing probe module is arranged facing one side of the conductive metal fan blade. The axial distance between the top induction coil and the conductive metal fan blade is smaller than the axial distance between the bottom induction coil and the conductive metal fan blade. The reaction secondary alternating magnetic field excited by the high-frequency eddy current on the surface of the conductive metal fan blade exhibits near-field exponential decay along the axial space. The eddy current flux linked by the top induction coil is greater than the eddy current flux linked by the bottom induction coil. After the two layers are connected in reverse series, a net effective induced electromotive force difference is retained at the differential lead-out end. This difference varies with the axial air gap. At the same time, when the two layers of mirror traces are geometrically corresponding and subjected to the same ambient temperature rise, the intrinsic copper resistance of the top and bottom traces generates a DC resistance drift in the same direction. After being connected in reverse series, this drift is canceled out as a common mode at the differential lead-out end, so that the differential induction quantity corresponding to the axial air gap is retained.

[0074] During the in-situ testing of the motor assembly after the cover is closed, the geometric dimension measurement and calculation module sequentially acquires the fundamental envelope peak voltage sequence of the four conductive metal fan blades according to the sampling clock sequence. ,according to Calculate the absolute axial air gap distance for each conductive metal fan blade. ; then according to Calculate the average axial spacing of the conductive array target sensing modules. and in accordance with Calculate coplanarity installation tolerance When the average axial spacing When the nominal installation air gap exceeds the upper limit threshold of 1.700 mm, the geometric dimension measurement and calculation module calculates according to... Generate displacement adjustment parameters characterizing the increase in axial compensation shim thickness. The pre-set nominal standard air gap Take 1.5mm; when coplanarity installation tolerance When the coplanarity tolerance exceeds the acceptable threshold of 0.1 mm, the geometric dimension measurement and calculation module retrieves the maximum voltage from the peak voltage sequence. and minimum voltage The end face tilt orientation is determined according to the circumferential physical sector number of the corresponding conductive metal fan blades, and the control command for the circumferential tightening torque correction direction is output to the assembly control terminal, so that the tightening bolts of the corresponding sector perform pre-tightening torque increment compensation, and complete the geometric dimension measurement and assembly status correction of the conductive array target sensing module in the closed blind cavity.

[0075] Example 4: This example combines Figures 1 to 2 This paper describes an integrated sensing and detection system and method for the coplanarity of conductive array metal components, such as... Figure 1As shown, in step S1, a high-frequency sinusoidal current signal is input from the high-frequency excitation module to the primary transmitting coil in the single-cycle differential induction coil group, establishing a high-frequency alternating electromagnetic field in the gap between the integrated eddy current sensing probe module and the conductive array target sensing module. In step S2, as the conductive array target sensing module rotates with the rotating axis, the signal conditioning and acquisition module extracts the induced electromotive force modulated by each conductive metal fan blade sweeping through the effective electromagnetic induction area, and performs synchronous phase-sensitive detection, low-pass filtering, and analog-to-digital conversion on the induced electromotive force in sequence, outputting a discrete sampling voltage sequence. In step S3, the geometric dimensions... The measurement and calculation module extracts the fundamental envelope peak voltage sequence V1, V2, ..., VN corresponding to each conductive metal fan blade sweeping through the effective electromagnetic induction area from the discrete sampling voltage sequence. In step S4, the geometric dimension measurement and calculation module calculates the average axial spacing of the conductive array target sensing modules and the coplanarity installation tolerance between each conductive metal fan blade based on the preset zero air gap reference voltage V0 and displacement sensitivity coefficient kz. The calculated average axial spacing and coplanarity installation tolerance are compared with the preset tolerance threshold range to determine the accuracy, and a spatial geometric installation accuracy quantitative evaluation report is output.

[0076] like Figure 2 As shown, the integrated sensing and detection system for the coplanarity of conductive array metal parts enters the high-frequency alternating electromagnetic field establishment state by inputting a high-frequency sinusoidal current signal. Under the action of the conductive array target sensing module rotating with the rotating axis, it moves to the effective electromagnetic induction area sweep state. It enters the differential induced electromotive force modulation state triggered by the sudden change in the amplitude of the induced voltage. After synchronous phase-sensitive detection, low-pass filtering and analog-to-digital conversion in sequence, it flows to the discrete fundamental envelope sampling sequence output state. By extracting the fundamental envelope peak voltage sequence, it enters the absolute axial air gap distance inversion and coplanarity installation tolerance calculation state. Then, based on the preset zero air gap reference voltage and displacement sensitivity coefficient, it enters the spatial geometric installation accuracy quantification evaluation and circumferential fastening torque correction state. Finally, by comparing with the preset tolerance threshold range, it performs online assembly and boundary state monitoring cycle, and the closed loop feedback is returned to the high-frequency alternating electromagnetic field establishment state.

[0077] Example 5: Before assembling and matching the integrated eddy current sensing probe module with conductive array target sensing modules of different batches of conductive materials, a standard stepped gauge block test frame is used for on-site pre-assembly parameter calibration to correct the eddy current response reference offset caused by the difference in conductivity of different conductive metal materials. The integrated eddy current sensing probe module is fixed to the micro-motion fixture of the test frame, and a standard conductive metal target of the same material as the batch to be tested is selected and placed in the axial relative position of the probe sensing end face; the high-frequency excitation module transmits to the primary transmitting coil. Input frequency Peak-to-peak value of excitation source exchange The voltage difference between the maximum positive and negative peak values ​​of the high-frequency sinusoidal alternating excitation source is the full-wave voltage difference, representing the constant electromagnetic excitation source intensity input to the primary transmitting coil. It is used to compare the peak DC fundamental envelope voltage Va of each individual conductive metal fan blade, acquired by the subsequent secondary receiving coil after detection. i A distinct high-frequency carrier sinusoidal excitation signal controls the micro-motion fixture to stop at two physical measurement endpoints with an absolute axial air gap distance of 0.800 mm and 2.500 mm, respectively. The signal conditioning and acquisition module acquires the DC reference voltages obtained from the two calibration endpoints after synchronous phase-sensitive detection and low-pass filtering, denoted as follows: and The geometric dimension measurement and calculation module calculates the displacement sensitivity coefficient corresponding to the standard conductive metal target in the current batch based on the slope relationship between two points. Then, the zero-gap reference voltage is calculated based on the zero-point extrapolation relationship: The updated zero-gap reference voltage With displacement sensitivity coefficient Write it to the storage register as the reference parameter for the geometric dimension calculation of the current batch of conductive array target sensing modules.

[0078] Within the nominal static design working air gap range of 0.800mm to 2.500mm, the primary transmitting coil With secondary receiving coil The geometric distribution span is spatially matched according to the quasi-uniform magnetic field boundary, so that the alternating eddy current response is in the monotonic region of the spatial magnetic field gradient. The signal conditioning and acquisition module is equipped with an analog piecewise programmable gain amplifier and a polynomial nonlinear fitting correction unit. It performs linear gain normalization on the discrete sampling voltage after synchronous phase-sensitive detection and low-pass filtering, and uses the pre-calibrated first-order linear transfer coefficient and zero air gap bias constant stored in the memory. The digital signal processor performs hardware multiplication and inverse operation to output discrete distance readings corresponding to the actual geometric air gap in space, so that the output in the range of 0.800mm to 2.500mm meets the predetermined measurement accuracy requirements.

[0079] During the online assembly and boundary condition monitoring process after the motor cover is closed, for situations where the rotor shaft installation is tilted or axial overtravel causes the sensing signal to deviate from the linear response range, the geometric dimension measurement and calculation module presets the upper and lower limit threshold range of the signal amplitude envelope to 0.200V to 2.920V. When the rotating shaft drives the conductive array target sensing module with 4 conductive metal fan blades to rotate, the signal conditioning and acquisition module uses a hardware zero-crossing comparison circuit and a phase-locked loop synchronization circuit to obtain the sweep of each conductive metal fan blade across the secondary receiving coil. Fundamental envelope peak voltage sequence in the effective electromagnetic induction region The geometric dimension measurement and calculation module compares each peak voltage with a threshold range of 0.200V to 2.920V. If the peak voltage corresponding to any conductive metal fan blade exceeds this threshold range, it is determined that there is axial interference or loss of effective linear working air gap between the integrated eddy current sensor module and the conductive array target sensing module, and an alarm signal for stopping the turning and verifying coaxiality is output. If all peak voltages are within the threshold range, the average axial spacing is calculated based on the discrete sampling voltage sequence. Coplanarity Installation Tolerance .

[0080] The nominal installation air gap design window is 1.300mm to 1.700mm, when the average axial spacing When the nominal installation air gap exceeds the upper limit threshold of 1.700mm in the design window, the geometric dimension measurement and calculation module calculates according to... Calculate the difference between the average axial spacing and the preset nominal standard air gap of 1.5 mm, and generate displacement adjustment parameters characterizing the increase in the thickness of the axial compensation shims. When coplanarity installation tolerance When the coplanarity tolerance is greater than the acceptable threshold of 0.1mm, the geometric dimension measurement and calculation module determines the end face tilt position according to the circumferential physical sector number of the conductive metal fan blade corresponding to the maximum and minimum points in the peak voltage sequence, and outputs the control command of the circumferential fastening torque correction direction to the assembly control terminal for online assembly adjustment and status correction of the geometric shape and position dimensions inside the closed blind cavity.

[0081] Example 6: During continuous assembly on an automated production line for motor assemblies, the rotating shaft system operates at dynamically increasing speeds from 300 rpm to 1800 rpm. To address the phase group delay generated by the low-pass filtering stage in the signal conditioning and acquisition module, an integrated eddy current sensor module works in conjunction with the signal conditioning and acquisition module to perform dynamic group delay hardware phase compensation. The high-frequency excitation module transmits power to the primary transmitting coil. Input frequency Peak-to-peak value A constant amplitude high-frequency carrier sinusoidal current signal is used. A conductive array target sensing module with four conductive metal fan blades is coaxially fixed at the end of the rotating shaft system. Each conductive metal fan blade is positioned with a central angle width of... Scanning the secondary receiving coil in sequence The corresponding effective electromagnetic induction region; the hardware zero-crossing comparator circuit extracts the abrupt change in the amplitude of the induced voltage caused by the leading edge of the conductive metal fan blade and forms a circumferential reference pulse signal. The phase-locked loop synchronization circuit synchronously tracks this reference pulse to generate a 256-fold frequency-multiplied sampling clock. The internal time delay compensator uses the real-time captured rotation period as the basis for the signal. Calculate the intrinsic group delay time constant of the active low-pass filter. Angular displacement advance compensation amount at the current speed : ,in, Let be the rotation period of the rotating shaft system. Let be the intrinsic group delay time constant of the active low-pass filter. The internal time delay compensator uses the angular displacement advance compensation corresponding to the time delay of this group at the current speed as the basis for controlling the sampling start trigger time of the analog-to-digital converter to be shifted forward. The corresponding time difference is used to compensate for the time broadening and amplitude attenuation of the fundamental envelope peak point capture position caused by the dynamic change of rotational angular velocity, and outputs a discrete sampled voltage sequence aligned with the spatial geometric center of the conductive metal fan blade.

[0082] During the dynamic group delay hardware phase compensation process, the signal conditioning and acquisition module sets up a continuously running ring-shaped first-in-first-out data buffer. The analog-to-digital converter, driven by the frequency multiplication sampling clock generated by the phase-locked loop synchronization circuit, performs uninterrupted high-speed conversion on the filtered inductive signal and continuously writes discrete data into the buffer. The internal delay compensator calculates the offset of the number of discrete sampling points corresponding to the group delay at the current speed based on the real-time rotation speed measured in the previous complete rotation cycle and the 12.5μs group delay time constant. When the edge trigger pulse of the current conductive metal fan blade is captured, the data reading pointer reads the historical sampling sequence with the corresponding number of points shifted forward from the ring-shaped first-in-first-out data buffer. Under the condition of maintaining the hardware physical causal relationship, the fundamental envelope waveform aligned with the spatial geometric center of the conductive metal fan blade is reconstructed.

[0083] After obtaining the discrete sampled voltage sequence, the geometric dimension measurement and calculation module extracts the fundamental envelope peak voltage sequence corresponding to the four conductive metal fan blades based on the sampling time sequence. And read the preset zero-air-gap reference voltage from the memory. and displacement sensitivity coefficient Through inversion Calculate the absolute axial air gap distance of each of the four conductive metal fan blades. Based on Calculate the average axial spacing and based on Calculate coplanarity installation tolerance To convert assembly dimensional deviations into mechanical adjustment actions, the geometric dimension measurement and calculation module constructs a circumferential four-channel bolt preload torque differential compensation matrix; when coplanarity installation tolerances... When the coplanarity tolerance is greater than the acceptable threshold of 0.1 mm, the circumferential physical sector number of the conductive metal fan blade corresponding to the maximum and minimum points in the fundamental envelope peak voltage sequence is first extracted. Based on this, the tilt orientation of the end face is determined and the tilt angle and circumferential azimuth angle in three-dimensional space are calculated. Then, the tilt amount is converted into a displacement correction vector distributed at four mounting bolt measuring points at 0°, 90°, 180° and 270° of the circumference. The control command containing the circumferential tightening torque correction direction of the corresponding bolt differential torque compensation amount is output to the servo tightening machine terminal.

[0084] The nominal installation air gap design window is 1.300mm to 1.700mm, when the average axial spacing When the nominal installation air gap exceeds the upper limit threshold of 1.700mm, the geometric dimension measurement and calculation module calculates the axial compensation shim thickness adjustment: By adjusting the axial compensation shims and correcting the circumferential tightening torque, the coplanarity installation tolerance of each conductive metal fan blade inside the blind cavity after the motor cover is tightened is brought to within 0.1mm, and the average installation air gap is made to fall within the nominal installation air gap design window. The circumferential four-channel bolt preload torque differential compensation matrix adopts a fourth-order diagonal torque stiffness transfer matrix. The main diagonal elements correspond to the comprehensive torque stiffness conversion coefficient of the fastening bolts at the physical measurement points of 0°, 90°, 180° and 270° of the circumference, respectively. This conversion coefficient is calibrated offline and preset according to the nominal pitch size of the pre-installed bolts, the thread friction coefficient and the axial elastic stiffness of the outer shell end cover flange. After the geometric dimension measurement and calculation module obtains the axial geometric displacement correction vector corresponding to the four sectors, it performs matrix-vector multiplication operation with the four-dimensional displacement deviation vector and the fourth-order diagonal torque stiffness transfer matrix to output the preload torque increment value of each of the four bolt channels, driving the multi-axis servo tightening system to perform the corresponding tightening adjustment in parallel.

[0085] The embodiments of this application have been described above with reference to the accompanying drawings. Unless otherwise specified, the embodiments and features in the embodiments of this application can be combined with each other. This application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of this application without departing from the spirit of this application and the scope of protection of this invention, and all of these forms are within the protection scope of this application.

Claims

1. A coplanarity sensing and detection system for conductive array metal components, characterized in that, include: The conductive array target sensing module is coaxially fixed to the rotating axis system and has the following characteristics: A circumferentially distributed conductive metal fan blade. The width of the sector central angle of each conductive metal fan blade is an integer greater than or equal to 2. ; An integrated eddy current sensor module, fixed to the measurement port of a closed housing, includes a sensing substrate and a single-cycle differential induction coil group; the single-cycle differential induction coil group includes a central angle of... The primary transmitting coil, and a sensitive span symmetrically arranged inside the primary transmitting coil. The secondary receiving coil ensures that the effective electromagnetic induction area covers only the projected trajectory of a single conductive metal fan blade at any given instant. The high-frequency excitation module is electrically connected to the primary transmitting coil and is used to input a high-frequency sinusoidal current signal to establish an alternating electromagnetic field. The signal conditioning and acquisition module is differentially connected to both ends of the secondary receiving coil. It is used to extract the induced electromotive force modulated by each conductive metal fan blade when the conductive array target sensing module rotates. After detection, filtering and analog-to-digital conversion, it outputs a discrete sampling voltage sequence. The geometric dimension measurement and calculation module and the communication connection signal conditioning and acquisition module are used to extract the peak voltage sequence of each conductive metal fan blade in the discrete sampling voltage sequence. ; Based on the preset zero air gap reference voltage With displacement sensitivity coefficient Calculate the average axial spacing and coplanarity installation tolerance of the conductive array target sensing modules, and output a quantitative evaluation report on geometric installation accuracy.

2. The integrated sensing and detection system for the coplanarity of conductive array metal components according to claim 1, characterized in that, The overall shape, positioning stop surface, mechanical fastening hole positions, and electrical pin wiring definitions of the integrated eddy current sensor probe module are identical to the mounting geometry and electrical interface of the original eddy current angular displacement sensor inside the enclosed housing. The sensing substrate is coaxially positioned and locked through the pre-drilled pin holes on the end cover of the enclosed housing. The induction normal center axis of the single-cycle differential induction coil group coincides with the rotation center axis of the rotation axis system, so that the single-cycle differential induction coil group faces the end face of the conductive array target sensing module in its original position when the cover is closed and fastened, and is axially aligned with the nominal static design working air gap.

3. The integrated sensing and detection system for the coplanarity of conductive array metal components according to claim 1, characterized in that, The secondary receiving coil of the single-cycle differential induction coil group consists of a top-layer induction coil and a bottom-layer induction coil. The top-layer and bottom-layer induction coils are symmetrically arranged along the thickness direction of the sensing substrate and electrically connected in series in opposite directions. The electromagnetic induction areas enclosed by the top-layer and bottom-layer induction coils are equal and opposite in polarity. This is used to ensure that the intrinsic copper resistance changes of the two layers of traces are canceled out at the common-mode output when the ambient temperature changes, thus maintaining the displacement sensitivity coefficient. With zero air gap reference voltage Stablize.

4. The integrated sensing and detection system for the coplanarity of conductive array metal components according to claim 1, characterized in that, The signal conditioning and acquisition module includes a hardware zero-crossing comparison circuit and a phase-locked loop synchronization circuit. The signal conditioning and acquisition module uses the sudden change in the amplitude of the induced voltage caused by the edge of each conductive metal fan blade passing through the effective electromagnetic induction area as the reference trigger signal for the circumferential rotation angle. The phase-locked loop synchronization circuit tracks the rotational angular velocity of the rotating shaft system and adaptively adjusts the sampling clock frequency of the analog-to-digital converter so that each conductive metal fan blade collects a fixed number of discrete sampling points at equal angles within the arc segment of the central angle of the effective electromagnetic induction area, which serve as discrete data sources for extracting the peak voltage sequence.

5. The integrated sensing and detection system for the coplanarity of conductive array metal components according to claim 1, characterized in that, The geometric dimension measurement and calculation module compares the calculated average axial spacing with the preset upper limit threshold of the nominal installation air gap design window. If the average axial spacing exceeds the upper limit threshold of the nominal installation air gap design window, the geometric dimension measurement and calculation module calculates the difference between the average axial spacing and the preset nominal standard air gap, generates displacement adjustment parameters that characterize the increase in the thickness of the axial compensation shim, and outputs the displacement adjustment parameters to the assembly control terminal.

6. The integrated sensing and detection system for the coplanarity of conductive array metal components according to claim 1, characterized in that, The geometric dimension measurement and calculation module compares the calculated coplanarity installation tolerance with the preset coplanarity tolerance qualified threshold. If the coplanarity installation tolerance is greater than the coplanarity tolerance qualified threshold, the geometric dimension measurement and calculation module retrieves the circumferential physical sector number of the conductive metal fan blade corresponding to the maximum and minimum voltage points in the peak voltage sequence, determines the end face tilt orientation of the conductive array target sensing module in three-dimensional space, and outputs a control command to the assembly control terminal indicating the direction of circumferential fastening torque correction.

7. The integrated sensing and detection system for the coplanarity of conductive array metal components according to claim 1, characterized in that, The carrier frequency of the high-frequency sinusoidal current signal output by the high-frequency excitation module is 1.0MHz to 10.0MHz; the primary transmitting coil includes a multi-turn microstrip coil printed on the surface of the sensing substrate, and a grounded shielding copper sheet is provided on the same layer around the primary transmitting coil to constrain the spatial distribution of the alternating electromagnetic field and suppress electromagnetic interference to the electrical components inside the enclosed housing.

8. The integrated sensing and detection system for the coplanarity of conductive array metal components according to claim 1, characterized in that, The synchronous phase-sensitive detector circuit of the signal conditioning and acquisition module uses an orthogonal demodulation carrier with the same frequency and phase as the high-frequency sinusoidal current signal to perform frequency mixing and down-conversion on the induced electromotive force output from both ends of the secondary receiving coil. The cutoff frequency of the low-pass filter is greater than the rotational fundamental frequency corresponding to the rated maximum speed of the rotating shaft system and less than one-fifth of the carrier frequency of the high-frequency sinusoidal current signal. It is used to filter out high-frequency harmonic components and extract the envelope waveform of the induced electromotive force that changes with the rotational angular position.

9. The integrated sensing and detection system for the coplanarity of conductive array metal components according to claim 1, characterized in that, The conductive array target sensing module is a conductive metal fan-shaped rotor disk module in the drive motor rotor angular displacement sensor. It is made of non-magnetic conductive metal material by stamping or casting, and the number of fan blades is... The width of the central angle of the sector for each conductive metal fan blade is 4. The included angle between the slots and the adjacent conductive metal fan blades is 45 degrees; the nominal static design working air gap between the sensing substrate and the conductive array target sensing module is 0.800mm to 2.500mm.

10. A method for integrated sensing and detection of the coplanarity of conductive array metal components, applied to the integrated sensing and detection system for the coplanarity of conductive array metal components as described in claim 1, characterized in that, Includes the following steps: Step S1: A high-frequency sinusoidal current signal is input from the high-frequency excitation module to the primary transmitting coil in the single-cycle differential induction coil group to establish a high-frequency alternating electromagnetic field in the gap between the integrated eddy current sensing probe module and the conductive array target sensing module. Step S2: When the conductive array target sensing module rotates with the rotating axis, the signal conditioning and acquisition module extracts the induced electromotive force modulated by each conductive metal fan blade sweeping through the effective electromagnetic induction area, and performs synchronous phase-sensitive detection, low-pass filtering and analog-to-digital conversion on the induced electromotive force in sequence to output a discrete sampling voltage sequence. Step S3: The geometric dimension measurement and calculation module extracts the fundamental envelope peak voltage sequence corresponding to each conductive metal fan blade sweeping through the effective electromagnetic induction region from the discrete sampling voltage sequence. ; Step S4, the geometric dimension measurement and calculation module calculates the zero air gap reference voltage based on the preset zero air gap reference voltage. With displacement sensitivity coefficient The average axial spacing of the conductive array target sensing modules and the coplanarity installation tolerance between each conductive metal fan blade are calculated respectively. The calculated average axial spacing and coplanarity installation tolerance are compared with the preset tolerance threshold range to determine the accuracy, and a quantitative evaluation report of spatial geometric installation accuracy is output.

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