A gas distribution plate hole selection method, device, equipment and medium

Abstract

The application discloses a gas distribution plate gas hole selection method, device, equipment and medium. The method comprises the following steps: receiving a closed area selected by a user, obtaining a region type of the closed area and a region parameter corresponding to the region type; determining a target determination method from a plurality of determination methods according to the region type; for each gas hole in the gas distribution plate, determining whether the gas hole is in the closed area according to the gas hole center position, the region parameter and the target determination method, and obtaining a determination result of each gas hole in the gas distribution plate; obtaining the gas hole in the closed area according to the determination result, generating a gas hole set, and outputting the gas hole set as the gas hole selected by the user. The embodiment of the application can improve the micro-hole screening efficiency.

Description

Technical Field

[0001] This invention relates to the field of semiconductor gas distribution disks, and more particularly to a method, apparatus, device, and medium for selecting gas distribution disk vents. Background Technology

[0002] In the design, inspection, and process analysis of gas distribution plates, engineers frequently need to perform batch operations on micropores by region, such as modifying colors, counting quantities, or deleting them. Micropores refer to the densely distributed tiny pores on the gas distribution plate. The boundary shapes of these regions are diverse, ranging from circular to irregular closed polylines (such as fan-shaped areas). Existing CAD software only provides general selection tools such as rectangular windows and select all, lacking dedicated region selection functions for the interiors of circles, polygons, and fan-shaped rings, making it difficult to meet such refined zoning requirements.

[0003] Currently, selecting areas within a circle relies entirely on manual visual judgment to determine if the center is inside the circle and clicking on each element. While polygon selection offers a "window selection" function, it requires users to manually draw each point and is limited to visible graphics, making it impossible to directly pick existing polyline primitives. Furthermore, there are no built-in tools for selecting sector-shaped annular areas; selection must be based solely on experience and manual clicking. Overall, the existing methods heavily depend on manual judgment and operation, resulting in low efficiency and difficulty in guaranteeing accuracy, severely impacting design analysis and quality control processes. Summary of the Invention

[0004] This invention provides a method, apparatus, device, and medium for selecting pores in a gas distribution plate, which can improve the efficiency of micropore screening.

[0005] According to one aspect of the present invention, an embodiment of the present invention provides a method for selecting vents in a gas distribution plate, the method comprising: Receive the closed area selected by the user, and obtain the area type of the closed area and the area parameters corresponding to the area type; Based on the region type, a target determination method is determined from multiple determination methods; the target determination method includes the distance angle determination method corresponding to the sector region type, the center radius determination method corresponding to the circular region type, and the ray determination method corresponding to the polygon region type; For each vent in the gas distribution plate, based on the vent center position, the region parameters, and the target determination method, it is determined whether the vent is within the closed region, thus obtaining the determination result for each vent in the gas distribution plate. The determination result is obtained as the pores within the closed area, a set of pores is generated, and the set of pores is output as the pores selected by the user.

[0006] According to another aspect of the present invention, embodiments of the present invention also provide a gas distribution plate vent selection device, the device comprising: The region acquisition module is used to receive the closed region selected by the user and obtain the region type of the closed region and the region parameters corresponding to the region type; The method determination module is used to determine the target determination method from multiple determination methods based on the region type; the target determination method includes the distance angle determination method corresponding to the fan-shaped region type, the center radius determination method corresponding to the circular region type, and the ray determination method corresponding to the polygonal region type; The vent determination module is used to determine whether each vent in the gas distribution plate is within a closed area based on the vent center position, the area parameters, and the target determination method, thereby obtaining the determination result of each vent in the gas distribution plate. The selection set output module is used to obtain the pores that are determined to be within the closed area, generate a pore set, and output it as the pores selected by the user.

[0007] According to another aspect of the present invention, embodiments of the present invention also provide a gas distribution plate vent selection device, the gas distribution plate vent selection device comprising: At least one processor; and A memory that is communicatively connected to at least one processor; wherein, The memory stores a computer program that can be executed by at least one processor, such that the at least one processor is able to perform the gas distribution plate vent selection method according to any embodiment of the present invention.

[0008] According to another aspect of the present invention, a computer-readable storage medium is provided, which stores computer instructions for causing a processor to execute and implement the gas distribution disk orifice selection method of any embodiment of the present invention.

[0009] According to another aspect of the present invention, a computer program product is provided, the computer program product comprising a computer program that, when executed by a processor, implements the gas distribution plate vent selection method according to any embodiment of the present invention.

[0010] The technical solution of this invention receives user-selected closed areas and automatically identifies their type and parameters, matches them with corresponding judgment methods, and performs batch judgment on each pore in the gas distribution plate, ultimately outputting a set of selected pores. This eliminates the need for manual verification or point-by-point selection, significantly improving the efficiency of micropore screening. Simultaneously, the use of dedicated judgment methods for different area types ensures the accuracy and reliability of the judgment results, effectively avoiding incorrect or missed selections caused by human visual errors and subjective judgment. The operation is simple and the response is rapid, providing an efficient and accurate auxiliary means for the CAD drawing design of semiconductor gas distribution plates.

[0011] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0013] Figure 1 This is a flowchart of a method for selecting vent holes in a gas distribution plate according to an embodiment of the present invention; Figure 2 This is a flowchart of a method for selecting vent holes in a gas distribution plate according to an embodiment of the present invention; Figure 3 This is a structural diagram of a gas distribution plate vent selection device according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the structure of a gas distribution plate vent selection device provided in an embodiment of the present invention. Detailed Implementation

[0014] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0015] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0016] In the technical solutions of the embodiments of the present invention, the acquisition, storage and application of CAD drawings and regional parameters, etc., all comply with the provisions of relevant laws and regulations and do not violate public order and good morals.

[0017] Figure 1 This is a flowchart illustrating a method for selecting vents in a gas distribution plate according to an embodiment of the present invention. This embodiment is applicable to situations where vents need to be quickly selected based on geometric positional relationships in CAD drawings of semiconductor gas distribution plates. This method can be executed by a gas distribution plate vent selection device, which can be implemented in hardware and / or software. This gas distribution plate vent selection device can be configured in a server.

[0018] See Figure 1 The method for selecting the vents of the gas distribution plate shown includes: S101. Receive the closed area selected by the user, and obtain the area type of the closed area and the area parameters corresponding to the area type.

[0019] The closed region can be a completely closed area. The region type can be a preset type that describes the shape of the region. The region parameters can be parameters for the closed region.

[0020] Users operate within the design system, selecting a region type to create a closed region according to their needs. For example, when the region type is a sector, the user first specifies a center point as the outer center of the sector. Then, they select the first radial line. A radial line is a line along the radius or diameter. Optionally, after the user selects a line, the distance from that line to the center is calculated. If it exceeds a preset deviation distance, a message "Line too far from center" is displayed. This means the line does not pass through the center and is not a radial line along the radius or diameter, prompting the user to select again. Next, the user selects the second radial line. Then, the inner boundary is selected, meaning the user selects an arc or circle as the inner boundary. Finally, the outer boundary is selected, meaning the user selects an arc or circle as the outer boundary. Both the inner and outer boundary arcs or circles should have the user-specified center as their center. However, in practice, a deviation is allowed; that is, the distance between the center of the inner boundary, the center of the outer boundary, and the user-specified center does not exceed a distance threshold to be considered acceptable. Thus, the first radial line, the second radial line, the inner boundary, and the outer boundary can form a closed region. This closed region is identified and used as the closed region selected by the user.

[0021] Different types of closed regions have different region parameters. Understandably, the radius and center position can describe a circular closed region, but not a polygonal closed region; therefore, region parameters correspond to region type.

[0022] S102. Based on the region type, determine the target determination method from multiple determination methods; the target determination method includes the distance angle determination method corresponding to the fan-shaped region type, the center radius determination method corresponding to the circular region type, and the ray determination method corresponding to the polygonal region type.

[0023] The determination method can be a preset method for determining the spatial relationship between vents and closed regions. The sector-shaped region type can be a region type where the closed region is sector-shaped. Optionally, the sector-shaped region type can include: a sector-shaped region type with an inner boundary and a sector-shaped region type without an inner boundary. A sector-shaped region type with an inner boundary is a sector-shaped region type where the two radial line segments do not intersect, and a sector-shaped region type without an inner boundary is a sector-shaped region type where the two radial line segments intersect. The distance-angle determination method can be a method for checking radial distance and circumferential angle. The circular region type can be a region type where the closed region is circular. The center radius determination method can be a determination method that calculates the distance between the center of the vent and the center of the closed region and compares it with the radius of the closed region. The polygonal region type can be a region type where the closed region consists of multiple sides. The ray determination method can be a determination method that emits rays from the center of the vent and counts the number of intersections with the polygon boundary.

[0024] For different region types, a suitable determination method is preset. When the region type of the closed region selected by the user is obtained, the determination method corresponding to that region type is determined as the target determination method.

[0025] Different region types require different determination methods. For example, the ray-mapping method is suitable for polygonal regions but not for sector-shaped regions. This is because the ray-mapping method is designed to resolve the positional relationship between a point and the polygonal boundary line. Its core relies on "odd-even counting of intersections," which involves drawing a ray at the target location, counting the number of intersections between the ray and the boundary line, and determining whether the target is inside the closed region based on the parity of the number of intersections. If the number of intersections is odd, the target is inside the closed region. If the number of intersections is even (including 0), the target is not inside the closed region. Forcibly applying the ray-mapping method to sector-shaped regions not only requires discretizing the arc boundary of the sector-shaped region into a large number of straight line segments to approximate the boundary, resulting in a significant increase in computation, but also, when the central angle is greater than or equal to 180 degrees, there may be a special case where the ray drawn from an opening inside the closed region intersects with the arc of the inner boundary at two points, leading to misjudgment. In contrast, the distance-angle determination method directly uses the original parameters in the definition of sector polar coordinates for numerical comparison, without any boundary approximation or special cases, making it faster and more accurate.

[0026] Optionally, the region type can also be extended to include regions such as ellipses and polygons enclosed by curves. Since these are not commonly used in engineering, they will not be described in detail in this embodiment.

[0027] S103. For each air hole in the gas distribution plate, based on the air hole center position, the area parameters, and the target determination method, determine whether the air hole is within the closed area, and obtain the determination result of each air hole in the gas distribution plate.

[0028] The center position of the vent refers to the location of the center point of each vent in the gas distribution plate. Optionally, the position can be represented by two-dimensional coordinates from the CAD drawing of the gas distribution plate. The determination result can be the result after determining each vent individually.

[0029] The process iterates through all the vents on the gas distribution plate. For each vent, a target determination method is used to determine whether the vent is within the closed area based on the vent's center position and the area parameters of the closed area, so that all vents in the gas distribution plate have a determination result.

[0030] In an optional embodiment, the region type includes a circular region type, and the region parameters corresponding to the region type include: the region center position and the region radius length. The step of determining whether each air hole in the gas distribution plate is within a closed region based on the air hole center position, the region parameters, and the target determination method, to obtain the determination result for each air hole in the gas distribution plate, includes: calculating a second distance between the air hole center position and the region center position for each air hole in the gas distribution plate; determining whether the second distance is less than the region radius length, to obtain the determination result for each air hole in the gas distribution plate.

[0031] In this context, a circular closed region can be simply referred to as a circular closed region. The center of the region can be the location of the center of the circular closed region. The radius of the region can be the length of the radius of the circular closed region. The second distance can refer to the distance between the center of the pores and the center of the region.

[0032] Obtain the coordinates of the center position and the radius of the circular closed region. Simultaneously, read the coordinates of the center positions of all vents in the gas distribution disk and arrange the coordinates of the vent center positions in order as the sequence to be calculated.

[0033] Sequentially extract the coordinates of the stomatal center from the sequence to be calculated, and calculate the second distance between the coordinates of the stomatal center and the coordinates of the region center. Compare the calculated second distance with the region radius to determine if the second distance is less than the region radius.

[0034] If the second distance is less than the radius of the region, the result is that the vent is within the circular closed area. If the second distance is greater than or equal to the radius of the region, the result is that the vent is not within the circular closed area. Record the vent number and the result together. Continue processing the next vent in the sequence to be calculated, repeating the distance calculation and numerical comparison operations until all vents have been determined, obtaining the determination result for each vent in the gas distribution plate.

[0035] As can be seen, for a circular closed region, calculating the second distance between the center of the vent and the center of the region, and comparing it with the radius of the region, allows for a quick determination of the positional relationship between each vent and the closed region. The determination result is objective, reliable, and highly repeatable, avoiding screening errors caused by visual bias or subjective judgment in manual operations.

[0036] In an optional embodiment, the region type includes a polygonal region type, and the region parameters corresponding to the region type include: target point position. The determination of whether a vent in the gas distribution plate is within a closed region based on the vent center position, the region parameters, and the target determination method, for each vent in the gas distribution plate, includes: generating a ray from the vent center position at a target angle for each vent in the gas distribution plate; determining the number of intersections between the ray and the edge of the closed region based on the target point position; and determining whether the vent is within the closed region based on the number of intersections, thus obtaining the determination result for each vent in the gas distribution plate.

[0037] Among them, the closed region of the polygonal region type can be simply referred to as a polygonal closed region. The target point position can be the position of each vertex of the polygonal closed region. The target angle is the ray emission direction preset by the device. The ray is a geometric straight line that starts from the center of the vent and extends to infinity along the target angle. The number of intersection points is the total number of times the ray intersects with each side of the closed region.

[0038] Obtain the target point positions of the closed region of the polygon, i.e., the coordinate sequence of each vertex of the polygon. Construct the edge set of the closed region based on the target point positions, connect adjacent points in the coordinate sequence to form straight line segments, and connect the last vertex of the sequence to the first vertex of the sequence to form a closed boundary.

[0039] Read the center positions of all pores in the gas distribution disk and arrange them into a sequence to be calculated. Take the center position of one pore from the sequence to be calculated in turn, and construct a ray along the target angle starting from that position.

[0040] The process involves sequentially intersecting the ray with each line segment in the edge set, determining if the ray intersects with the current edge, and accumulating the total number of intersections. Based on the accumulated number of intersections, a result is generated for each air vent. If the number of intersections is odd, the air vent is considered to be within a closed region. If the number is even, the air vent is considered to be outside a closed region. The air vent number is then recorded in combination with the result. This process is repeated for the next air vent in the sequence to be calculated, until all air vents have been determined, yielding the results for each air vent in the gas distribution disk.

[0041] As can be seen, for a polygonal closed region, the ray determination method is used to emit rays from the center of each pore and to determine the inside and outside of the region by counting the number of intersections between the ray and the set of closed edges constructed from the target point. The determination logic is rigorous and reliable, which improves the efficiency and accuracy of batch micropore screening in the gas distribution plate CAD drawing.

[0042] S104. Obtain the pores within the closed area as determined by the judgment result, generate a set of pores, and output them as the pores selected by the user.

[0043] The pore set is a set of pores that are determined to be within the closed area.

[0044] The effective pores located within the closed area are selected from all the pores that have been identified, and they are integrated into a dataset for subsequent use. The result is to generate a complete set of pores, which can be directly presented to the user as the selection result.

[0045] In an optional embodiment, the step of obtaining the pores that the determination result indicates are within the closed area, generating a pore set, and outputting the pore set as the pores selected by the user includes: obtaining the pores that the determination result indicates are within the closed area, generating a pore set; counting the number of pores in the pore set; highlighting each pore in the pore set to obtain a processing result; and outputting the number of pores and the processing result as the output result.

[0046] Here, the number of pores refers to the total number of pores contained in the pore set. Highlighting is the process of marking each pore in the pore set with a visual style distinct from pores outside the pore set in the CAD drawing display interface. The result can be a drawing presented after highlighting.

[0047] The selected internal pores are highlighted visually, along with their total count, allowing users to intuitively view the selection results and understand the selection scale. In a specific embodiment, the pore set can be used as a selection set, highlighted using the CAD's "selection set priority" function, and the number of selected pores can be output in the command line.

[0048] As can be seen, by filtering out pores located within the closed area from the judgment results and generating a pore set, the system simultaneously counts the number of pores and highlights them, finally outputting the statistical values ​​and highlighting results to the user interface. This allows users to intuitively obtain information on the spatial distribution and total number of selected pores, effectively improving human-computer interaction efficiency and result readability, and providing clear and complete selection feedback for subsequent process operations.

[0049] The technical solution of this invention receives user-selected closed areas and automatically identifies their type and parameters, matches them with corresponding judgment methods, and performs batch judgment on each pore in the gas distribution plate, ultimately outputting a set of selected pores. This eliminates the need for manual verification or point-by-point selection, significantly improving the efficiency of micropore screening. Simultaneously, the use of dedicated judgment methods for different area types ensures the accuracy and reliability of the judgment results, effectively avoiding incorrect or missed selections caused by human visual errors and subjective judgment. The operation is simple and the response is rapid, providing an efficient and accurate auxiliary means for the CAD drawing design of semiconductor gas distribution plates.

[0050] Figure 2 This is a flowchart illustrating a method for selecting vents in a gas distribution disk according to an embodiment of the present invention. Based on the above embodiments, this embodiment defines the region type as a fan-shaped region. The region parameters corresponding to this region type include: inner and outer arc parameters and radial line segment parameters. The inner and outer arc parameters include: the outer center position of the closed region, a first radius length, and a second radius length; the first radius length is the radius length of the inner arc, and the second radius length is the radius length of the outer arc. The radial line segment parameters include: the starting angle and the ending angle of the closed region. The starting angle is determined by the direction of the first radial line segment, and the ending angle is determined by the angle between the first and second radial line segments and the starting angle. This method is applied to the gas distribution disk... For each vent, based on the vent center position, the region parameters, and the target determination method, it is determined whether the vent is within the closed region, thus obtaining the determination result for each vent in the gas distribution plate. This is limited to: determining distance conditions based on the first radius length and the second radius length; determining angle conditions based on the starting angle and the ending angle; for each vent in the gas distribution plate, calculating the first distance and direction angle between the vent center and the outer center based on the vent center position and the outer center position; determining whether the first distance satisfies the distance condition and whether the direction angle satisfies the angle condition, thus obtaining the determination result for each vent in the gas distribution plate.

[0051] It should be noted that for parts not described in detail in the embodiments of the present invention, please refer to the descriptions in other embodiments.

[0052] See Figure 2 The method for selecting the vents of the gas distribution plate shown includes: S201. Receive the closed region selected by the user, and obtain the region type of the closed region and the region parameters corresponding to the region type. The region type includes a fan-shaped region type. The region parameters corresponding to the region type include: inner and outer arc parameters and radial line segment parameters. The inner and outer arc parameters include: the outer center position of the closed region, the first radius length, and the second radius length; the first radius length is the radius length of the inner arc, and the second radius length is the radius length of the outer arc; the radial line segment parameters include: the starting angle and the ending angle of the closed region. The starting angle is determined by the direction of the first radial line segment, and the ending angle is determined by the angle between the first radial line segment and the second radial line segment and the starting angle.

[0053] The inner and outer arc parameters can be used to define the two arc boundaries of the sector. The radial segment parameters can be used to define the two straight edge boundaries and directions of the sector. The outer center position can be the position of the center point corresponding to both the inner and outer arcs of the sector. The first radius length is the length of the radius of the inner arc of the sector. The second radius length is the length of the radius of the outer arc of the sector. The first radius length is less than the second radius length. The starting angle is the starting angle of the closed sector region. The ending angle is the ending angle of the closed sector region. The first radial segment is the straight line boundary in the sector region used to determine the starting angle. The second radial segment is another straight line boundary in the sector region that, together with the first radial segment, determines the angle of the closed sector region. The included angle is the angle between the first radial segment and the second radial segment.

[0054] In this embodiment, the starting angle of the sector-shaped closed region is first determined based on the direction of the first radial line segment in the polar coordinate system. Then, the angle between the first and second radial line segments is calculated. The starting angle plus the angle in degrees is used to determine the ending angle. Specifically, the ending angle can exceed 360 degrees. For example, the first radial line segment may be in the fourth quadrant, that is, between 270° and 360°. If the angle exceeds 90°, the ending angle will necessarily exceed 360°.

[0055] In an optional embodiment, the region type includes: a fan-shaped region type; the inner and outer arc parameters further include: the first center position and the second center position of the closed region, wherein the first center position is the center position of the inner circle corresponding to the inner arc; the second center position is the center position of the outer circle corresponding to the outer arc; before determining the distance condition based on the first radius length and the second radius length; and before determining the angle condition based on the starting angle and the ending angle, the method further includes: obtaining the first radius length in the radial line segment parameters, and determining whether the first radius length is 0; when the first radius length is not 0, obtaining the first center position and the second center position of the closed region; determining whether the position difference between the first center position and the second center position is less than a difference threshold; when the position difference is less than the difference threshold, determining the first center position as the outer center position of the closed region; and when the position difference is greater than or equal to the difference threshold, issuing an alarm.

[0056] In this system, the first center position is the center of the inner circle corresponding to the inner arc. The second center position is the center of the outer circle corresponding to the outer arc. The inner circle is a virtual circle used to define the boundary of the inner arc of the sector. The outer circle is a virtual circle used to define the boundary of the outer arc of the sector. The positional difference is the distance difference between the first and second center positions. The difference threshold is the maximum distance value that the device presets allows for the first and second center positions to deviate from each other. The outer center position is the final determined common center coordinate used to uniformly determine the boundary of the sector area.

[0057] When an inner arc exists, the user-selected closed region can be validated to ensure it is a fan-shaped closed region. The first and second center positions of the closed region are obtained. The positional difference between the first and second center positions is calculated.

[0058] The device compares the positional difference with a preset difference threshold. When the positional difference is less than the threshold, the device writes the first center position to the external center position storage area as the unified center coordinate for subsequent determinations. When the device determines that the positional difference is greater than or equal to the difference threshold, it generates an alarm signal and pushes the alarm information to the user interface, indicating that the inner and outer arc centers deviate too much, and terminates the current determination process.

[0059] As can be seen, by verifying whether the centers of the inner and outer arcs of the sector input by the user meet the precondition of concentricity or near-concentricity, and determining a unified center reference based on the verification results, it is ensured that the subsequent calculations of distance and angle conditions are based on a valid center position, avoiding the failure of the judgment logic due to excessive deviation between the inner and outer arc centers.

[0060] S202. Based on the region type, determine the target determination method among multiple determination methods; the target determination method includes the distance and angle determination method corresponding to the sector region type.

[0061] S203. Determine the distance condition based on the first radius length and the second radius length; determine the angle condition based on the starting angle and the ending angle.

[0062] The distance condition can be a criterion used to determine the distance between pores. The distance condition can be greater than or equal to the first radius length minus the length tolerance and less than or equal to the second radius length plus the length tolerance. The length tolerance is a set allowable difference value. In some embodiments, the length tolerance can be set to 0.1 mm.

[0063] Angle conditions can be used to determine the pore angle. The pore angle should be between the starting angle and the ending angle. In practice, the angle between the pore center and the outer center is represented by an angle not exceeding 360°. However, when setting the ending angle, to ensure that the physical meaning is that the ending angle is greater than the starting angle, the ending angle can be greater than 360°. Therefore, when specifically setting angle conditions, it is necessary to add a judgment on the angle range between the starting angle and the ending angle.

[0064] In an optional embodiment, determining the angle condition based on the starting angle and the ending angle includes: when the starting angle and the ending angle do not include 360 ​​degrees, the angle condition is greater than or equal to the starting angle minus the tolerance angle and less than or equal to the ending angle plus the tolerance angle; when the starting angle and the ending angle include 360 ​​degrees, the angle condition is greater than or equal to the starting angle minus the tolerance angle or less than or equal to the ending angle minus 360 degrees plus the tolerance angle.

[0065] Where the angle interval between the starting angle and the ending angle does not include 360°, the angle condition can be greater than or equal to the starting angle minus the angle tolerance and less than or equal to the ending angle plus the angle tolerance. This is expressed as θ∈[starting angle - angle tolerance, ending angle + angle tolerance]. Where the angle interval between the starting angle and the ending angle includes 360°, the angle condition can be greater than or equal to the starting angle minus the angle tolerance or less than or equal to the ending angle minus 360 degrees plus the angle tolerance. This is expressed as: θ ≥ Starting angle - angle tolerance or θ ≤ (Ending angle - 360°) + angle tolerance.

[0066] For example, the starting angle is 290°, the included angle is 80°, and the ending angle is 370°. In a two-dimensional coordinate system, 370° and 10° are essentially the same. If the angle of a vent is 5°, then the vent is located between 290° and 370° in the coordinate system. Therefore, the vent angle can be judged by whether it is less than or equal to 370°-360°.

[0067] As can be seen, by considering whether the starting and ending angles cross 360 degrees, an angle determination boundary condition suitable for the sector region is constructed. This generates a clear angle range for subsequent determination of the angle at which each vent center is located, ensuring that the angle determination can correctly handle sector regions crossing the 0-degree boundary line and guaranteeing the accuracy of the determination.

[0068] It's important to note that you can set whether or not to include "equals" when setting distance and angle conditions. If you need to include the circle within the closed interval, you can add "equals". For example: greater than or equal to the starting angle and less than or equal to the ending angle. If you don't need to include the circle within the closed interval, you don't need to add "equals". For example: greater than the starting angle and less than the ending angle.

[0069] It should also be noted that this method can select pores outside the closed area. For example, after obtaining the pores within the closed area, reverse selection can be performed.

[0070] S204. For each air hole in the gas distribution plate, calculate the first distance and direction angle between the air hole center and the outer center based on the position of the air hole center and the position of the outer center.

[0071] The first distance is the distance between the center of the stomata and the outer center. The directional angle can be the relative angle between the outer center and the center of the stomata.

[0072] Calculate the polar coordinate parameters of the center of each pore relative to the unified center of the fan-shaped region to obtain the first distance and direction angle used for judgment.

[0073] S205. Determine whether the first distance meets the distance condition and whether the direction angle meets the angle condition, and obtain the determination result of each air hole in the gas distribution plate.

[0074] This involves determining whether the first distance of each pore meets a distance condition, for example, whether the first distance is greater than or equal to the first radius length and less than or equal to the second radius length. Simultaneously, it involves determining whether the directional angle of each pore meets an angle condition, for example, whether the directional angle is within the range defined by the angle condition.

[0075] When a pore meets both the distance and angle conditions, it is determined that the pore is within a fan-shaped closed area.

[0076] When a pore does not meet the distance or angle conditions, it is determined that the pore is not within the fan-shaped closed area.

[0077] S206. Obtain the pores within the closed area as determined by the judgment result, generate a set of pores, and output them as the pores selected by the user.

[0078] This invention addresses a sector-shaped enclosed region by determining distance conditions using the outer center position, first radius length, and second radius length from the inner and outer arc parameters. Simultaneously, it determines angle conditions using the starting and ending angles from the radial line segment parameters. For each vent, it calculates the first distance and direction angle between the vent and the outer center, and jointly determines whether the first distance and direction angle satisfy the distance and angle conditions, thus obtaining the determination result for each vent. The dual constraints of distance and angle ensure the integrity and accuracy of the determination logic. Calculations based on polar coordinate parameters eliminate the need for boundary discretization or complex geometric transformations, resulting in extremely high efficiency for processing batches of vents. This effectively improves the adaptability and convenience of micro-pore screening in gas distribution plate design.

[0079] Figure 3 This is a schematic diagram of a gas distribution plate orifice selection device provided in an embodiment of the present invention. This embodiment of the invention is applicable to situations where rapid selection of orifices based on geometric positional relationships is required in CAD drawings of semiconductor gas distribution plates. The device can execute a gas distribution plate orifice selection method and can be implemented in hardware and / or software.

[0080] See Figure 3 The gas distribution plate orifice selection device shown includes: The region acquisition module 301 is used to receive a closed region selected by the user and obtain the region type of the closed region and the region parameters corresponding to the region type. The method determination module 302 is used to determine a target determination method among multiple determination methods based on the region type; the target determination method includes the distance angle determination method corresponding to the fan-shaped region type, the center radius determination method corresponding to the circular region type, and the ray determination method corresponding to the polygonal region type; The vent determination module 303 is used to determine whether each vent in the gas distribution plate is within a closed area based on the vent center position, the area parameters, and the target determination method, and to obtain the determination result of each vent in the gas distribution plate. The selection set output module 304 is used to obtain the pores that are determined to be within the closed area, generate a pore set, and output it as the pores selected by the user.

[0081] The technical solution of this invention receives user-selected closed areas and automatically identifies their type and parameters, matches them with corresponding judgment methods, and performs batch judgment on each pore in the gas distribution plate, ultimately outputting a set of selected pores. This eliminates the need for manual verification or point-by-point selection, significantly improving the efficiency of micropore screening. Simultaneously, the use of dedicated judgment methods for different area types ensures the accuracy and reliability of the judgment results, effectively avoiding incorrect or missed selections caused by human visual errors and subjective judgment. The operation is simple and the response is rapid, providing an efficient and accurate auxiliary means for the CAD drawing design of semiconductor gas distribution plates.

[0082] In an optional embodiment, the region type includes a sector region type, and the region parameters corresponding to the region type include: inner and outer arc parameters and radial line segment parameters; the inner and outer arc parameters include: the outer center position of the closed region, a first radius length, and a second radius length; the first radius length is the radius length of the inner arc, and the second radius length is the radius length of the outer arc; the radial line segment parameters include: the starting angle and the ending angle of the closed region, the starting angle being determined by the direction of the first radial line segment, and the ending angle being determined by the angle between the first radial line segment and the second radial line segment and the starting angle; Pore ​​detection module 303 includes: The condition setting unit is used to determine distance conditions based on the first radius length and the second radius length; and to determine angle conditions based on the starting angle and the ending angle. The first calculation unit is used to calculate the first distance and direction angle between the center of the gas hole and the outer center of the gas hole for each gas hole in the gas distribution plate, based on the position of the center of the gas hole and the position of the outer center of the gas hole. The first determination unit is used to determine whether the first distance meets the distance condition and whether the direction angle meets the angle condition, and to obtain the determination result of each air hole in the gas distribution plate.

[0083] In an optional embodiment, the region type includes a circular region type, and the region parameters corresponding to the region type include: the center position of the region and the radius length of the region. The pore determination module 303 includes: The second calculation unit is used to calculate the second distance between the center position of the air hole and the center position of the region for each air hole in the gas distribution plate. The second determination unit is used to determine whether the second distance is less than the radius of the region, and to obtain the determination result of each air hole in the gas distribution plate.

[0084] In an optional embodiment, the region type includes a polygonal region type, and the region parameters corresponding to the region type include: target point location, and the stomatal determination module 303 includes: A ray generation unit is used to generate a ray at a target angle from the center of the vent in each vent of the gas distribution plate. The intersection point counting unit is used to determine the number of intersection points between the ray and the edge of the closed region based on the position of the target point; The third determination unit is used to determine whether the vent is within the closed area based on the number of intersections, and to obtain the determination result of each vent in the gas distribution plate.

[0085] In an optional embodiment, the region type includes: a fan-shaped region type; the inner and outer arc parameters further include: the first center position and the second center position of the closed region, wherein the first center position is the center position of the inner circle corresponding to the inner arc; the second center position is the center position of the outer circle corresponding to the outer arc, and further includes: The inner arc determination unit is used to obtain the first radius length in the radial line segment parameters and determine whether the first radius length is 0. The center acquisition unit is used to acquire the first center position and the second center position of the closed region when the first radius length is not 0. The center detection unit is used to determine whether the positional difference between the first center position and the second center position is less than the difference threshold. An outer center determination unit is used to determine the first center position as the outer center position of the closed region when the position difference is less than a difference threshold. An alarm unit is used to issue an alarm when the position difference is greater than or equal to a difference threshold.

[0086] In an optional embodiment, the condition setting unit includes: The first angle condition setting unit is used to determine the angle condition as greater than or equal to the starting angle minus the tolerance angle and less than or equal to the ending angle plus the tolerance angle when there is no 360 degrees between the starting angle and the ending angle. The second angle condition setting unit is used to determine the angle condition as greater than or equal to the starting angle minus the tolerance angle or less than or equal to the ending angle minus 360 degrees plus the tolerance angle when the starting angle and the ending angle include 360 ​​degrees.

[0087] In an optional embodiment, the selection set output module 304 includes: A quantity counting unit is used to obtain the pores that are determined to be within the closed area, generate a set of pores, and count the number of pores in the set of pores. A highlighting unit is used to highlight each pore in the pore set to obtain a processing result. The selection set output unit is used to output the number of pores and the processing result as output results.

[0088] The gas distribution plate vent selection device provided in this embodiment of the invention can execute the gas distribution plate vent selection method provided in any embodiment of the invention, and has the corresponding functional modules and beneficial effects for executing the gas distribution plate vent selection method.

[0089] Figure 4 A schematic diagram of the structure of a gas distribution plate vent selection device 400 that can be used to implement an embodiment of the present invention is shown.

[0090] like Figure 4 As shown, the gas distribution plate orifice selection device 400 includes at least one processor 401 and a memory, such as a read-only memory 402 or a random access memory 403, communicatively connected to the at least one processor 401. The memory stores computer programs executable by the at least one processor. The processor 401 can perform various appropriate actions and processes based on the computer program stored in the read-only memory 402 or loaded from the storage unit 408 into the random access memory 403. The random access memory 403 can also store various programs and data required for the operation of the gas distribution plate orifice selection device 400. The processor 401, read-only memory 402, and random access memory 403 are interconnected via a bus 404. An input / output interface 405 is also connected to the bus 404.

[0091] Multiple components in the gas distribution plate orifice selection device 400 are connected to an input / output interface 405, including: an input unit 406, such as a keyboard or mouse; an output unit 407, such as various types of displays or speakers; a storage unit 408, such as a hard disk or optical disk; and a communication unit 409, such as a network card, modem, or wireless transceiver. The communication unit 409 allows the gas distribution plate orifice selection device 400 to exchange information / data with other devices through computer networks such as the Internet and / or various telecommunications networks.

[0092] Processor 401 can be a variety of general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of processor 401 include, but are not limited to, central processing units, graphics processing units, various special-purpose artificial intelligence computing chips, various processors running machine learning model algorithms, digital signal processors, and any suitable processor, controller, microcontroller, etc. Processor 401 performs the various methods and processes described above, such as the gas distribution plate orifice selection method.

[0093] In some embodiments, the gas distribution plate orifice selection method may be implemented as a computer program tangibly contained in a computer-readable storage medium, such as storage unit 408. In some embodiments, part or all of the computer program may be loaded and / or installed on the gas distribution plate orifice selection device 400 via read-only memory 402 and / or communication unit 409. When the computer program is loaded into random access memory 403 and executed by processor 401, one or more steps of the gas distribution plate orifice selection method described above may be performed. Alternatively, in other embodiments, processor 401 may be configured to perform the gas distribution plate orifice selection method by any other suitable means (e.g., by means of firmware).

[0094] Various embodiments of the systems and techniques described above herein can be implemented in digital electronic circuit systems, integrated circuit systems, field-programmable gate arrays, application-specific integrated circuits (ASICs), application-specific standard products (ASICs), systems-on-a-chip (SoCs), complex programmable logic devices, computer hardware, firmware, software, and / or combinations thereof. These various embodiments may include implementations in one or more computer programs that can be executed and / or interpreted on a programmable system including at least one programmable processor, which may be a dedicated or general-purpose programmable processor, capable of receiving data and instructions from a storage system, at least one input device, and at least one output device, and transmitting data and instructions to the storage system, the at least one input device, and the at least one output device.

[0095] Computer programs used to implement the methods of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device, such that when executed by the processor, the computer programs cause the functions / operations specified in the flowcharts and / or block diagrams to be performed. The computer programs may be executed entirely on a machine, partially on a machine, or as a standalone software package, partially on a machine and partially on a remote machine, or entirely on a remote machine or server.

[0096] In the context of this invention, a computer-readable storage medium can be a tangible medium that may contain or store a computer program for use by or in conjunction with an instruction execution system, apparatus, or device. A computer-readable storage medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatus, or devices, or any suitable combination thereof. Alternatively, a computer-readable storage medium may be a machine-readable signal medium. More specific examples of machine-readable storage media include electrical connections based on one or more wires, portable computer disks, hard disks, random access memory, read-only memory, erasable programmable read-only memory, flash memory, optical fiber, portable compact disk read-only memory, optical storage devices, magnetic storage devices, or any suitable combination thereof.

[0097] To provide user interaction, the systems and techniques described herein can be implemented on the operating detection device, which includes: a display device (e.g., a cathode ray tube or liquid crystal monitor) for displaying information to the user; and a keyboard and pointing device (e.g., a mouse or trackball) through which the user provides input to the gas distribution plate orifice selection device. Other types of devices can also be used to provide user interaction; for example, feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including acoustic input, voice input, or tactile input).

[0098] The systems and technologies described herein can be implemented in computing systems that include backend components (e.g., as data servers), or computing systems that include middleware components (e.g., application servers), or computing systems that include frontend components (e.g., user computers with graphical user interfaces or web browsers through which users can interact with implementations of the systems and technologies described herein), or any combination of such backend, middleware, or frontend components. The components of the system can be interconnected via digital data communication of any form or medium (e.g., communication networks). Examples of communication networks include local area networks (LANs), wide area networks (WANs), blockchain networks, and the Internet.

[0099] A computing system can include clients and servers. Clients and servers are generally located far apart and typically interact through communication networks. The client-server relationship is created by computer programs running on the respective computers and having a client-server relationship with each other. The server can be a cloud server, also known as a cloud computing server or cloud host, which is a host product within the cloud computing service system. This addresses the shortcomings of traditional physical hosts and virtual private servers, such as high management difficulty and weak business scalability.

[0100] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this invention can be achieved, and this is not limited herein.

[0101] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A method for selecting vent holes in a gas distribution plate, characterized in that, The method includes: Receive the closed area selected by the user, and obtain the area type of the closed area and the area parameters corresponding to the area type; Based on the region type, a target determination method is determined from multiple determination methods; the target determination method includes the distance angle determination method corresponding to the sector region type, the center radius determination method corresponding to the circular region type, and the ray determination method corresponding to the polygon region type; For each vent in the gas distribution plate, based on the vent center position, the region parameters, and the target determination method, it is determined whether the vent is within the closed region, thus obtaining the determination result for each vent in the gas distribution plate. The determination result is obtained as the pores within the closed area, a set of pores is generated, and the set of pores is output as the pores selected by the user.

2. The method according to claim 1, characterized in that, The region type includes a sector-shaped region type, and the region parameters corresponding to the region type include: inner and outer arc parameters and radial line segment parameters; the inner and outer arc parameters include: the outer center position of the closed region, the first radius length, and the second radius length; the first radius length is the radius length of the inner arc, and the second radius length is the radius length of the outer arc; the radial line segment parameters include: the starting angle and the ending angle of the closed region, the starting angle is determined by the direction of the first radial line segment, and the ending angle is determined by the angle between the first radial line segment and the second radial line segment and the starting angle; The determination of whether each air hole in the gas distribution plate is within a closed area is based on the air hole center position, the region parameters, and the target determination method, thereby obtaining the determination result for each air hole in the gas distribution plate, including: Based on the first radius length and the second radius length, determine the distance condition; based on the starting angle and the ending angle, determine the angle condition; For each air hole in the gas distribution plate, the first distance and directional angle between the air hole center and the outer center are calculated based on the position of the air hole center and the position of the outer center. Determine whether the first distance meets the distance condition and whether the direction angle meets the angle condition to obtain the determination result of each air hole in the gas distribution plate.

3. The method according to claim 1, characterized in that, The region type includes a circular region type, and the region parameters corresponding to the region type include: the center position of the region and the radius length of the region. For each air hole in the gas distribution plate, based on the center position of the air hole, the region parameters, and the target determination method, it is determined whether the air hole is within a closed region, obtaining the determination result for each air hole in the gas distribution plate, including: For each vent in the gas distribution plate, calculate the second distance between the center position of the vent and the center position of the region. Determine whether the second distance is less than the radius of the region to obtain the determination result of each air hole in the gas distribution plate.

4. The method according to claim 1, characterized in that, The region type includes a polygonal region type, and the region parameters corresponding to the region type include: target point location. For each vent in the gas distribution plate, based on the vent center position, the region parameters, and the target determination method, it is determined whether the vent is within a closed region, obtaining the determination result for each vent in the gas distribution plate, including: For each vent in the gas distribution plate, a ray is generated from the center of the vent at a target angle. Based on the location of the target point, determine the number of intersections between the ray and the edge of the closed region; Based on the number of intersections, it is determined whether the vent is within the closed area, thus obtaining the determination result of each vent in the gas distribution plate.

5. The method according to claim 2, characterized in that, The region type includes: a sector-shaped region type; the inner and outer arc parameters further include: the first center position and the second center position of the closed region, wherein the first center position is the center position of the inner circle corresponding to the inner arc; and the second center position is the center position of the outer circle corresponding to the outer arc. Before determining the distance condition based on the first radius length and the second radius length, and determining the angle condition based on the starting angle and the ending angle, the method further includes: Obtain the first radius length from the radial line segment parameters, and determine whether the first radius length is 0; When the first radius length is not 0, obtain the first center position and the second center position of the closed region; Determine whether the positional difference between the first center position and the second center position is less than a difference threshold; When the positional difference is less than the difference threshold, the first center position is determined as the outer center position of the closed region; An alarm is triggered when the positional difference is greater than or equal to the difference threshold.

6. The method according to claim 2, characterized in that, The step of determining the angle conditions based on the starting angle and the ending angle includes: When the starting angle and the ending angle do not include 360 ​​degrees, the angle determination condition is that the starting angle is greater than or equal to the starting angle minus the tolerance angle and less than or equal to the ending angle plus the tolerance angle. When the starting angle and the ending angle include 360 ​​degrees, the angle determination condition is greater than or equal to the starting angle minus the tolerance angle or less than or equal to the ending angle minus 360 degrees plus the tolerance angle.

7. The method according to claim 1, characterized in that, The process of obtaining the determination result as pores within a closed area, generating a pore set, and outputting the pore set as the pores selected by the user includes: The determination result is to identify pores within the closed area, and a pore set is generated; the number of pores in the pore set is then counted. Each pore in the pore set is highlighted to obtain the processing result; The number of pores and the processing result are output as output results.

8. A gas distribution plate orifice selection device, characterized in that, The device includes: The region acquisition module is used to receive the closed region selected by the user and obtain the region type of the closed region and the region parameters corresponding to the region type; The method determination module is used to determine the target determination method from multiple determination methods based on the region type; the target determination method includes the distance angle determination method corresponding to the fan-shaped region type, the center radius determination method corresponding to the circular region type, and the ray determination method corresponding to the polygonal region type; The vent determination module is used to determine whether each vent in the gas distribution plate is within a closed area based on the vent center position, the area parameters, and the target determination method, thereby obtaining the determination result of each vent in the gas distribution plate. The selection set output module is used to obtain the pores that are determined to be within the closed area, generate a pore set, and output it as the pores selected by the user.

9. A gas distribution plate pore selection device, characterized in that, The gas distribution plate vent selection device includes: At least one processor; and A memory communicatively connected to the at least one processor; wherein, The memory stores a computer program that can be executed by the at least one processor, the computer program being executed by the at least one processor to enable the at least one processor to perform the gas distribution plate vent selection method according to any one of claims 1-7.

10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer instructions that are used to cause a processor to execute the gas distribution plate orifice selection method according to any one of claims 1-7.

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