Integrated multi-station fluorescent target device

Abstract

This invention discloses an integrated multi-station fluorescence target device, characterized by comprising a feed body, a vacuum chamber, and an imaging system; the feed body is sealed to the vacuum chamber; the fluorescence target and reflector of the feed body are placed inside the vacuum chamber, for the fluorescence excited by the beam hitting the fluorescence target and reflected by the reflector to the imaging system; the positions of the fluorescence target and the lens of the imaging system are adjustable, so that the distance between the fluorescence target, the reflector, and the lens remains relatively fixed to adapt to changes in beam height. In this invention, the target and reflector can synchronously extend and retract with changes in beam height, and the imaging system can also synchronously adapt to changes in object distance. The synchronous automatic zoom lens can switch and adjust the field of view and resolution for different beam sizes, acquiring beam position, contour, and intensity distribution information under multiple modes, multiple stations, and different size ranges and resolution requirements, greatly improving equipment utilization.

Description

Technical Field

[0001] This invention belongs to the field of synchrotron radiation technology and relates to an integrated multi-position fluorescence target device for use in the ultra-high vacuum environment of a synchrotron radiation device beamline. Background Technology

[0002] A ring synchrotron radiation source mainly consists of a storage ring, bending magnets, inserts in the long straight section, beamlines, and experimental stations. Inserts are periodic magnetic field elements installed in the long straight section of the storage ring; typical types include wavelength shifters, multipole oscillators, and undulators. They generate more concentrated, higher-brightness, or specific-polarization-state synchrotron radiation by applying a periodic transverse magnetic field to the electron beam, causing the electrons to oscillate transversely. To conduct various types of scientific experiments, synchrotron radiation facilities require modulation of the synchrotron radiation to meet experimental needs.

[0003] Because synchrotron radiation beam modulation requires various optical devices such as apertures, white light mirrors, deflectors, and monochromators, beam detection technology is indispensable in the operation of synchrotron radiation facilities to ensure the beam reaches the experimental station smoothly and effectively, and is especially significant for beam tuning. Beam tuning is a crucial step in the operation of a synchrotron radiation facility, directly affecting beam output efficiency and beam quality, and consequently influencing the progress and results of experiments in physics, biology, and other fields. Commonly used beam detectors include BPM (Beam Position Monitor), wire scanning detectors, synchrotron radiation imaging detectors, and fluorescent targets. Among them, BPM can only measure the position and intensity distribution of the beam, while wire scanning detectors, imaging detectors, and fluorescent targets can measure the beam position, beam cross-sectional shape, and intensity distribution. Compared with other beam detectors, fluorescent targets not only directly provide information such as beam cross-sectional shape and intensity distribution, but also have the advantages of simple structure and ease of implementation, making them the most commonly used beam detector in the beam tuning stage. The fluorescent target consists of a scintillator material and an imaging system. During the synchrotron radiation beam modulation stage, when parameters such as beam cross-sectional shape and intensity distribution need to be measured, the fluorescent target is fed into the beam track via a mechanical structure. When the beam hits the fluorescent target surface, it generates visible fluorescence. The imaging system then acquires the fluorescence signal on the target surface, and the beam parameters are obtained through beam image analysis. After beam modulation is completed, the fluorescent target needs to be removed from the optical path so that the beam can smoothly reach the downstream experimental station.

[0004] In addition, to avoid the strong absorption of synchrotron radiation by the atmosphere and the carbonization of the scintillator in the atmosphere, it is generally required that the fluorescent target scintillator material be placed in an ultra-high vacuum environment. Although the fluorescent target detection devices mentioned in patents such as CN111208553A and CN202794548U can feed the target sheet into the beam channel for interception detection through cylinders or motors, their imaging system is generally fixed on the cavity and can only monitor the shape and intensity distribution of the beam cross section with a single high output. When the beamline switching insert or the white light mode is switched to the monochromatic light mode, only fuzzy beam spot information or information outside the detection area can be obtained, resulting in poor detection accuracy. When some fluorescent targets with reflectors are working, the reflectors are also placed in the optical path. For high-power white light / powder light detection, the failure rate of the reflectors is extremely high. Summary of the Invention

[0005] To address the problems existing in the prior art, the present invention aims to provide an integrated multi-station fluorescence target device that adapts to different insert working modes, is a high-precision fluorescence target device capable of performing different high white light / monochrome beam stream switching diagnostics, and has a compact structure, high reliability, and high integration.

[0006] The technical solution of this invention is as follows: An integrated multi-station fluorescence target device, characterized in that it includes a feeding body, a vacuum cavity, and an imaging system; The feed body is sealed to the vacuum cavity; the fluorescent target and reflector of the feed body are placed in the vacuum cavity, so that after the beam hits the fluorescent target, the fluorescence is excited and reflected by the reflector to the imaging system; The positions of the fluorescent target and the lens of the imaging system are adjustable, so that the distance between the fluorescent target, the reflector and the lens remains relatively fixed to adapt to changes in the beam height.

[0007] Preferably, the lens is a variable magnification lens, used to adjust the lens magnification according to changes in beam exit height or beam spot size, so as to complete high-resolution detection tasks with different exit beam heights and different beam spot sizes.

[0008] Preferably, the feed body includes a stepper motor 101, a coupling 102, a collimation reference seat 103, a fixed mounting support plate 104, a split loose flange 105, a reflector 107, a reflector clamping plate 108, a feed connecting plate 109, a lead screw assembly 110, a bellows assembly 111, a target holder connecting feed sleeve weldment 112, a water-cooled target holder weldment 113, a target plate pressure plate 114, a diamond target plate 115, a linear guide rail 116, and a guide rail connecting plate 117; the target holder connecting feed sleeve weldment 112 includes a feed connecting sealing upper flange 11201, a feed connecting sleeve 11202, and a target holder sealing mating shoulder ring 11203 connected in sequence. The target base connecting feed sleeve weldment 112 is fitted inside the bellows assembly 111, and the feed connection sealing upper flange 11201 is sealed to the upper loose flange 11101 of the bellows assembly 111. The two linear guide rails 116 are respectively mounted on the mounting plates on both sides of the fixed mounting support plate 104. The guide rail connecting plate 117 is connected and fixed to the linear guide rails 116 on both sides and then mounted on the bottom plate of the fixed mounting support plate 104 to form an assembly. The assembly is fitted onto the fixed protruding ring structure at the bottom of the bellows assembly 111. The feed connection plate 109 is a through connector, with one side connected to the lead screw assembly 110 and the other two sides used to connect to the guide rail connection plate 117. The upper surface is equipped with a disc spring bolt assembly, which is used to connect and fix to the feed connection sealing upper flange 11201 of the feed connection sleeve weldment 112 of the target seat and to adjust the assembly straightness of the feed connection sleeve weldment 112 of the target seat. The stepper motor 101 is connected to the lead screw assembly 110 via a coupling 102; The diamond target 115 is fixedly installed in the front hollowed-out groove of the water-cooled target base weldment 113 by the target plate 114, and has a set angle θ with the horizontal plane; the reflector 107 is installed in the back hollowed-out groove of the water-cooled target base weldment 113 and fixed by the reflector clamping plate 108, and has a set angle θ / 2 with the horizontal plane; the lower part of the reflector 107 has a hollow structure, which is used for the incident beam to pass through the diamond target 115 and be emitted downstream.

[0009] Preferably, the water-cooled target holder welding component 113 includes a stainless steel water-cooling pipe 11301, a target holder reinforcing fixing lug 11302, a target holder connecting flange 11303, a target holder transition water-cooling block 11304, a water passage plug 11305, and a target holder 11306. The target holder transition water cooling block 11304 and the target holder 11306 have an integrated water channel, which is connected to the stainless steel water cooling pipe 11301, the target holder transition water cooling block 11304 and the water channel plug 11305 to form a water channel interconnection loop. The target holder 11306 has hollowed-out grooves on its front and back sides for mounting the diamond target 115 and the reflector 107. The stainless steel water-cooling pipe 11301 of the water-cooled target holder weldment 113 passes through the target holder connecting feed sleeve weldment 112, and is connected to the external pipeline in sequence through the feed connection sealing upper flange 11201 and the round hole in the center of the feed connection plate 109. The target holder sealing shoulder ring 11203 and the target holder connecting flange 11303 are pressed and sealed by the segmented loose flange 105, so that the diamond target 115 and the reflector 107 are placed in a vacuum environment, while the stainless steel water cooling pipe 11301 wrapped in the feed connecting sleeve 11202 is placed in an atmospheric environment. The collimation reference base 103 is distributed on the fixed mounting support plate 104 and is used to bring out the position coordinates of the diamond target 115 to the vacuum.

[0010] Preferably, the vacuum chamber includes a feed body connecting flange 201, a main chamber 202, a beam inlet flange 203, a beam outlet flange 204, an ion pump interface flange 205, an observation window interface flange 206, an observation window support lug 207, a chamber base 208, an observation window 209, and a spare flange 210. The feed body connecting flange 201 is connected to the lower end special-shaped welded flange 11106 of the bellows assembly 111, and is used to support the feed body; The beam inlet flange 203 is used for alignment and installation connection with the upstream equipment of the beamline; the observation window lug 207 is welded to the observation window interface flange 206; the relative positional relationship between the observation window interface flange 206 and the feed body connection flange 201 needs to be determined according to the position of the diamond target 115 and the reflector 107 in the vacuum cavity, and is used to monitor the beam spot through the observation window 209; The cavity base 208 is welded to the main cavity 202; When there is a detection task, the stepper motor 101 transmits the rotational motion to the lead screw assembly 110 through the coupling 102. The lead screw assembly 110 converts the rotational motion into linear motion and transmits it to the feed connection plate 109. Under the guidance of the linear guide rail 116, the bellows assembly 111 is compressed downward in a single direction, thereby realizing the feed linear motion of the target holder connecting feed sleeve weldment 112 and the water-cooled target holder weldment 113 in the main cavity 202.

[0011] Preferably, the imaging system includes a one-dimensional linear slide 301, a camera 302, an automatic zoom lens assembly 303, structural reinforcing ribs 304, a mounting base 305, a lens support and fixing seat 306, a lens guide rail 307, and a camera mounting adapter plate 308; wherein, the mounting base 305 and the two side structural reinforcing ribs 304 are connected and fixed to the observation window lugs 207, the lens guide rail 307 and the one-dimensional linear slide 301 are mounted on the inner mounting surface of the mounting base 305, the automatic zoom lens assembly 303 is mounted and fixed to the lens guide rail 307 through the lens support and fixing seat 306, the camera 302 is mounted on the one-dimensional linear slide 301 through the camera mounting adapter plate 308, and the camera 302 and the automatic zoom lens assembly 303 are connected through a C-type threaded interface.

[0012] Preferably, the vacuum chamber further includes a beam outlet flange and a beam inlet flange for connecting upstream and downstream equipment of the beam.

[0013] Preferably, the observation window is installed at the bottom of the vacuum cavity, and the center line of the observation window is perpendicular to the line connecting the centers of the beam outlet flange and the beam inlet flange.

[0014] This invention constructs a novel target holder structure and an optical path for a vacuum scintillator-reflector-vacuum imaging system with infinitely adjustable positions, enabling the switching of different inserts and monitoring of beam spot information for various high-white-light / monochrome-light beam streams.

[0015] This invention utilizes the fluorescence and light transmission properties of diamond to convert synchrotron radiation light into fluorescent visible light and project it onto an imaging system via a reflector to analyze the shape and position information of the synchrotron radiation beam. Most of the beam is then directed downstream to prevent equipment failure due to excessive heat load.

[0016] The multi-position fluorescence target device used in this invention mainly includes a feed body, a vacuum cavity, and an automatic focusing imaging system. During synchrotron radiation beam modulation, the beam hits the feed body placed in the vacuum cavity and excites fluorescence. The fluorescence beam spot is reflected to the imaging system to acquire the image signal. When the beam height changes due to switching insert modes or passing through optical elements such as deflectors and monochromators, the fluorescent target motor drives the lead screw assembly to move the feed body, composed of the target holder and reflector, linearly along the guide rail direction through the compressed bellows, so that the center of the target sheet re-aligns with the center of the beam with the changed beam height. At the same time, the imaging system moves the linearly driven slide closer to or further away from the observation window facing the reflector, keeping the distance between the target sheet, reflector, and lens relatively fixed. In addition, when the optical elements modulate the beam, causing the beam height and beam spot size to change simultaneously, in addition to maintaining a fixed object distance by synchronously adjusting the positions of the target holder, reflector, and imaging system, the lens magnification can also be adjusted using the motorized assembly of the zoom lens. This allows a single device to complete high-resolution detection tasks with different beam heights and beam spot sizes, with a resolution generally reaching within 10 μm, improving the efficiency of equipment use while controlling costs.

[0017] The bellows assembly consists of, from top to bottom, an upper flange, an upper welded shoulder ring, a welded corrugated plate assembly, a lower welded shoulder ring, and a lower irregular welded flange. The upper flange is a standard knife-edge type rotatable flange, while the lower irregular welded flange is a welded component of two different shaped flanges. The larger flange is at the bottom and retains a knife-edge sealing surface for sealing connection with the vacuum chamber. The smaller flange has no knife edge and only retains four threaded holes for fixing the fixed support mounting plate of the feed assembly. The bellows assembly is connected to the aforementioned feed connection plate. The feed body consists of a stepper motor, coupling, lead screw assembly, guide rail, fixed mounting support plate, feed connection plate, bellows assembly, target holder connecting feed sleeve welded component, segmented loose flange, target holder, target holder fixing block, scintillator target plate, target plate pressure plate, reflector, reflector clamping plate, and collimation reference seat. The fixed mounting support plate forms a frame-type support structure, used to support and fix the stepper motor, lead screw assembly, guide rail, etc., and is fitted onto the bellows assembly. The lower end of the target holder connecting feed sleeve welded part is sealed to the target holder through a split loose flange, and the upper end is sealed to the upper flange of the bellows assembly. The feed connecting plate is used to fix the lead screw assembly's lead screw nut pair and is connected to the upper end of the target holder connecting feed sleeve welded part. By compressing the bellows assembly, the vacuum internal and external motion transmission of the motor-coupling-lead screw-target holder connecting feed sleeve welded part-target holder is realized. The scintillator target and reflector are mounted on the target holder. When the above-mentioned movement occurs, both move synchronously into and out of the optical path. The reflector is downstream of the target sheet along the light transmission direction. When the incident beam has a white light / powder beam, the lowest point of the target holder frame used to mount the reflector must be higher than the uppermost edge of the beam cross-section. The purpose is to ensure that the beam passes through the target sheet and is incident downstream without obstruction, thereby avoiding excessive beam heat power density during detection that could burn the components. The fluorescent target is a scintillator target, made of polycrystalline diamond, YAG:Ce, or a YAG:Ce-carbon composite material. The choice of material depends on the beam power. The target is at a certain angle A with the incident beam, generally ≥45°. The reflector is located downstream of the target, with an angle to the incident beam of A / 2. The selection and determination of this angle depend on the mechanical design dimensions of the target, target holder, and cavity. The specific dimensions of the bellows also need to be determined in conjunction with the spot size, travel distance, and the mechanical structure of the feed unit.

[0018] The feed body is mounted on the upper flange of the vacuum chamber via a non-standard welded flange at the lower end of the bellows assembly. The upper flange of the vacuum chamber is a loose flange, which facilitates adjustment of the bolt hole positions during installation. The vacuum chamber also includes beam inlet and outlet flanges, one end of which is an internally welded flange, and the other end is a loose flange, facilitating connection to upstream and downstream equipment of the beam.

[0019] The vacuum chamber also includes a loose flange for the ion pump interface, an observation window and its mounting flange, and reserved flanges for the vacuum gauge and angle valve. The observation window is installed at the bottom of the vacuum chamber, and the center line of the observation window is perpendicular to the line connecting the centers of the beam outlet flange and the beam inlet flange.

[0020] The autofocus imaging system is fixedly connected to the observation window flange lug, facing the observation window. It includes a 4K high-resolution camera, a motorized zoom lens assembly, a one-dimensional motorized linear slide, and their connecting supports. The camera and motorized zoom lens need to be calculated and selected based on usage conditions such as spot size and resolution requirements. When the beam exit height changes, the imaging system is adjusted to a matching object distance using the motorized linear slide, and then the appropriate magnification is selected using the lens's motorized assembly.

[0021] Both the feed body and the vacuum cavity are equipped with collimation target holders for placing optical target balls when calibrating collimation equipment such as laser trackers and measuring arms.

[0022] The integrated machining target base of this invention is made of oxygen-free copper or chromium-zirconium copper material, and the cooling water channel is directly machined, which reduces the welding length in the vacuum and improves the reliability of the equipment.

[0023] In this invention, the target and reflector can be synchronously extended and retracted as the beam exit height changes, and the imaging system can also synchronously complete adaptive adjustment movements to change the object distance, realizing multi-mode, multi-position beam spot diagnosis, improving equipment utilization, and reducing design costs.

[0024] In this invention, the water-cooled target holder weldment can be removed separately, which facilitates later debugging, maintenance and replacement.

[0025] This invention relates to an integrated multi-station fluorescence target device, a crucial detection component in the beamline modulation stage of synchrotron radiation. Typically installed downstream of key beamline optical elements such as mirror boxes and monochromators, it monitors white light, pink light, and monochromatic light modulated by various optical mirrors, lenses, and monochromators. Particularly useful when the beamline switches to different insertion modes or the mirror / monochromator tilt angle changes to filter beams of different energies, resulting in variations in beam height and beam cross-section, this invention adapts to the diagnostic needs of different positions, sizes, and resolutions. It accurately analyzes beam spot size and distribution to provide feedback on beam modulation requirements, adjusting the beam to suit experimental needs and improving modulation efficiency and beam quality. One device performs the functions of multiple devices, reducing design costs.

[0026] The advantages of this invention are mainly as follows: First, the target holder is made of oxygen-free copper or chromium-zirconium copper and is machined as a single piece with an integrated cooling water system, which reduces the welding length in the vacuum and improves the reliability of the equipment. Secondly, the target and reflector can be synchronously extended and retracted as the beam exit height changes, and the imaging system can also synchronously complete the adaptive adjustment movement for changes in object distance. The synchronous automatic zoom lens can switch and adjust the field of view and resolution for different beam spot sizes, and obtain beam spot position, contour and intensity distribution information under multiple modes, multiple positions and different size ranges and resolution requirements, thereby improving equipment utilization and reducing design costs. Third, the water-cooled target holder weldment can be removed separately, which facilitates later debugging, maintenance and replacement. Attached Figure Description

[0027] Figure 1 This is a diagram of a multi-station fluorescent target device.

[0028] Figure 2 This is a diagram of the main feed structure.

[0029] Figure 3 This is a diagram of the main feed-in structure; (a) is the front view of the feed-in main structure, and (b) is the sectional view of the feed-in main structure.

[0030] Figure 4 This is a structural diagram of a bellows assembly.

[0031] Figure 5 This is a structural diagram of the feed sleeve welded component for connecting the target holder.

[0032] Figure 6 This is a structural diagram of the water-cooled target holder welding component.

[0033] Figure 7 This is a cross-sectional view of the target's water passage.

[0034] Figure 8 This is a structural diagram of a vacuum chamber.

[0035] Figure 9 This is a diagram showing the location of the observation window in the vacuum chamber.

[0036] Figure 10 This is a diagram of an autofocus imaging system. Detailed Implementation

[0037] Exemplary embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

[0038] To facilitate understanding of the key technologies of this invention, a specific embodiment is described below: like Figure 1The multi-station fluorescence target device shown is an example of the present invention, mainly comprising a feed body 1, a vacuum chamber 2, and an autofocus imaging system 3. The feed body 1 and the vacuum chamber 2 are connected by bolts to their paired knife-edge flanges and a metal sealing gasket is pressed to achieve a vacuum seal. The autofocus system 3 is connected to the vacuum chamber 2 by screws. After the entire device is connected and fixed, it is mounted on a device support via the base of the vacuum chamber 2.

[0039] like Figure 2 , Figure 3 , Figure 4 , Figure 5As shown, the feed body 1 includes a stepper motor 101, a coupling 102, a collimation reference seat 103, a fixed mounting support plate 104, a split loose flange 105, a target seat fixing block 106, a reflector 107, a reflector clamping plate 108, a feed connection plate 109, a lead screw assembly 110, a bellows assembly 111, a target seat connecting feed sleeve weldment 112, a water-cooled target seat weldment 113, a target plate pressing plate 114, a diamond target plate 115, a linear guide rail 116, and a guide rail connecting plate 117. The bellows assembly 111 described above consists of an upper loose flange 11101, an upper shoulder ring 11102, a welded corrugated plate assembly 11103, a lower shoulder ring 11104, a lower flange boss 11105, and a lower end special-shaped welded flange 11106. The target seat connecting feed sleeve weldment 112 described above consists of a feed connecting sealing upper flange 11201, a feed connecting sleeve 11202, and a target seat sealing mating shoulder ring 11203. The target seat connecting feed sleeve weldment 112 is first fitted into the bellows assembly 111 from top to bottom. The feed connecting sealing upper flange 11201 and the upper loose flange 11101 are connected by mating knife-edge flange bolts, and a vacuum seal is achieved by pressing a metal sealing gasket. Linear guide rails 116 are respectively mounted on the mounting plates on both sides of the fixed mounting support plate 104. After the guide rail connecting plate 117 is fixed to the linear guide rails 116 on both sides with screws, it can be installed on the base plate of the fixed mounting support plate 104. Then, the above-mentioned assembly is placed on the fixing convex ring structure at the bottom of the bellows assembly 111 from top to bottom. The feed connecting plate 109 is a through connector. Its protruding part has a round hole for accommodating and connecting the lead screw assembly 110 nut pair and four sets of threaded holes. The protruding parts on both sides have threaded holes for connecting the guide rail connecting plate 117. The upper surface has three sets of bolt holes evenly distributed for installing the disc spring bolt assembly and the feed connection sealing flange 11201 of the feed connection sleeve welded part 112 of the target seat connection to the feeder connection to the target seat connection to adjust the assembly straightness of the feeder sleeve welded part 112. The stepper motor 101 is connected to the lead screw assembly 110 through the coupling 102. The diamond target plate 115 is fixedly mounted in the hollowed-out groove of the water-cooled target holder weldment 113 using the target plate clamping plate 114, forming a 60° angle with the horizontal plane. The reflector 107 is mounted in the hollowed-out groove on the back of the water-cooled target holder weldment 113 and fixed by the reflector clamping plate 108, forming a 30° angle with the horizontal plane. The target holder part of the water-cooled target holder weldment 113 has a triangular-like design, and the area below the reflector 107 has a hollowed-out structure to ensure that the incident beam can pass through the diamond target plate 115 and be emitted downstream. To ensure the reliability of the target holder weldment, the target holder reinforcing fixing lug 11302 and the target holder 11306 are connected and reinforced using the target holder fixing block 106.

[0040] like Figure 6 , Figure 7As shown, the water-cooled target holder welding component 113 consists of a stainless steel water-cooling pipe 11301, a target holder reinforcing fixing lug 11302, a target holder connecting flange 11303, a target holder transition water-cooling block 11304, a water channel plug 11305, and a target holder 11306. The target holder transition water-cooling block 11304 and the target holder 11306 have an integrally machined water channel, which is fixedly connected to the stainless steel water-cooling pipe 11301, the target holder transition water-cooling block 11304, and the water channel plug 11305 via electron beam welding or argon arc welding. The water channel connects to the stroke loop. During welding, tooling is required to ensure the welding position and angle. The target holder 11306 is made of oxygen-free copper or chromium-zirconium copper. Grooves are machined on both sides to facilitate the installation of the diamond target 115 and the reflector 107. The groove surface roughness and flatness requirements are high to reduce contact thermal resistance.

[0041] The aforementioned water-cooled target holder weldment 113 is inserted from bottom to top into the target holder connecting feed sleeve weldment 112, and sequentially connects to the external pipeline through the circular hole in the center of the feed connecting sealing upper flange 11201 and the feed connecting plate 109. The target holder sealing shoulder ring 11203 and the target holder connecting flange 11303 are connected by mating knife-edge flange bolts via a split-type loose flange 105, and a vacuum seal is achieved by pressing a metal sealing gasket. This ensures that the diamond target 115 and the reflector 107 are placed in a vacuum environment, while the stainless steel water-cooled pipe 11301, encased in the feed connecting sleeve 11202, is placed in an atmospheric environment. Collimation reference seats 103 are evenly distributed around the fixed mounting support plate 104, used to bring the position coordinates of the diamond target 115 out of the vacuum, thereby correctly installing it to the theoretically designed position of the beamline. The water-cooled target holder weldment 113 is now the entire feeding device, which is fixed by the structural connection. It converts the rotational motion of the motor in the atmospheric environment into linear motion and transmits it to the target in the vacuum environment, so as to realize the synchronous up and down extension and retraction of the diamond target 115 and the reflector 107 in the vacuum.

[0042] like Figure 8 , Figure 9As shown, the vacuum chamber 2 mainly consists of a feed body connecting flange 201, a main chamber 202, a beam inlet flange 203, a beam outlet flange 204, an ion pump interface flange 205, an observation window interface flange 206, an observation window support 207, a chamber base 208, an observation window 209, and a spare flange 210. Except for the observation window 209, all are welded structures. All welds are required to be internally continuous welds, with external reinforcement intermittent welds possible. The feed body connecting flange 201 is a loose flange used to connect to the lower irregular welded flange 11106 of the bellows assembly 111, thus providing overall support for the feed body 1 and facilitating the adjustment of its installation direction during installation to lock it with the mating flange to ensure a vacuum seal. The beam inlet flange 203 is a loose flange, facilitating alignment and connection with upstream equipment in the beamline. The observation window support 207 is welded to the observation window interface flange 206; tooling is required during welding to ensure the welding angle. The relative positional relationship between the observation window interface flange 206 and the feed body connecting flange 201 needs to be determined based on the positions of the diamond target 115 and the reflector 107 within the vacuum chamber 1. This ensures that the fluorescence generated after the incident beam hits the diamond target 115 is reflected by the reflector 107 and then output sequentially through the observation window interface flange 206, the observation window lug 207, and the observation window 209. The chamber base 208 is welded to the main chamber 202. During welding, tooling is required to ensure the welding position and angle. When there is a detection mission, the overall motion transmission sequence is as follows: the stepper motor 101 transmits the rotational motion to the lead screw assembly 110 through the coupling 102, and then the lead screw assembly 110 converts the rotational motion into linear motion and transmits it to the feed connection plate 109. Under the guidance of the linear guide rail 116, the bellows assembly 111 is compressed downward in a single direction, thereby realizing the feed linear motion of the target holder connecting feed sleeve weldment 112 and the water-cooled target holder weldment 113 in the main cavity 202.

[0043] like Figure 10As shown, the automatic focusing imaging system 3 mainly consists of a one-dimensional linear slide 301, a 4K high-resolution camera 302, an automatic zoom lens group 303, a structural reinforcing rib 304, a mounting base 305, a lens support and fixing seat 306, a lens guide rail 307, and a camera mounting adapter plate 308. The mounting base 305 and the side reinforcing ribs 304 are connected and fixed to the observation window lugs 207 of the vacuum chamber 2. The lens guide rail 307 and the one-dimensional linear slide 301 are mounted on the inner mounting surface of the mounting base 305 with screws. The automatic zoom lens assembly 303 is mounted and fixed on the lens guide rail 307 through the lens support mounting base 306. The 4K high-resolution camera 302 is mounted on the one-dimensional linear slide 301 through the camera mounting adapter plate 308. The 4K high-resolution camera 302 and the automatic zoom lens assembly 303 are connected through a C-type threaded interface. The above structure enables the linear movement of the 4K high-resolution camera 302 and the automatic zoom lens assembly 303 towards / away from the observation window 209 to adapt to the changes in imaging object distance that occur when the reflector 107 and the diamond target 115 switch positions. Note that the thickness of the camera mounting adapter plate 308 needs to match the size of the lens support mounting base 306 to ensure smooth and fluid movement. In addition, the automatic zoom lens group 303 can be connected to the control system for remote electric control of magnification switching, which can meet different resolution requirements when monitoring light spots of different sizes that are focused and unfocused.

[0044] The device can also be made into a fluorescent target with multiple sets of drive-feed structures. This requires increasing the cavity length to fabricate multiple fluorescent target feed body mounting ports. The feed bodies are then arranged in a specific order for different beam output heights, and their corresponding imaging systems are installed. Each set of feed bodies and imaging systems is used to monitor the beam state at a fixed output height. However, compared to the structure of this invention, the fluorescent target structure with multiple sets of drive-feed structures is more complex, more expensive, and occupies more space. This complex structure can be adopted for beamlines where the energy switching between white light / powder light / monochromatic beams is relatively frequent.

[0045] The above are preferred embodiments of the present invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. An integrated multi-station fluorescent target device, characterized in that, Includes the feed body, vacuum chamber, and imaging system; The feed body is sealed to the vacuum cavity; the fluorescent target and reflector of the feed body are placed in the vacuum cavity, so that after the beam hits the fluorescent target, the fluorescence is excited and reflected by the reflector to the imaging system; The positions of the fluorescent target and the lens of the imaging system are adjustable, so that the distance between the fluorescent target, the reflector and the lens remains relatively fixed to adapt to changes in the beam height.

2. The integrated multi-station fluorescence target device according to claim 1, characterized in that, The lens is a variable magnification lens, used to adjust the lens magnification according to changes in beam exit height or beam spot size, to complete high-resolution detection tasks with different exit beam heights and different beam spot sizes.

3. The integrated multi-station fluorescence target device according to claim 1 or 2, characterized in that, The feed body includes a stepper motor (101), a coupling (102), a collimation reference seat (103), a fixed mounting support plate (104), a split loose flange (105), a reflector (107), a reflector clamping plate (108), a feed connection plate (109), a lead screw assembly (110), a bellows assembly (111), a target holder connecting feed sleeve weldment (112), a water-cooled target holder weldment (113), a target plate pressure plate (114), a diamond target plate (115), a linear guide rail (116), and a guide rail connecting plate (117); the target holder connecting feed sleeve weldment (112) includes a feed connection sealing upper flange (11201), a feed connection sleeve (11202), and a target holder sealing docking shoulder ring (11203) connected in sequence. The target base connecting feed sleeve weldment (112) is fitted inside the bellows assembly (111), and the feed connection sealing upper flange (11201) is sealed to the upper loose flange (11101) of the bellows assembly (111). The two linear guides (116) are respectively installed on the mounting plates on both sides of the fixed mounting support plate (104). The guide rail connecting plate (117) is connected and fixed to the linear guides (116) on both sides and then installed on the bottom plate of the fixed mounting support plate (104) to form an assembly. The assembly sits on the fixed convex ring structure at the bottom of the bellows assembly (111). The feed connection plate (109) is a through connector, with one side connected to the lead screw assembly (110) and the other two sides used to connect to the guide rail connection plate (117). The upper surface is equipped with a disc spring bolt assembly, which is used to connect and fix with the feed connection sealing upper flange (11201) of the target seat connecting feed sleeve weldment (112) and adjust the assembly straightness of the target seat connecting feed sleeve weldment (112). The stepper motor (101) is connected to the lead screw assembly (110) via a coupling (102); The diamond target (115) is fixedly installed in the hollow groove on the front side of the water-cooled target base weldment (113) by the target plate clamping plate (114), and has a set angle θ with the horizontal plane; the reflector (107) is installed in the hollow groove on the back side of the water-cooled target base weldment (113) and fixed by the reflector clamping plate (108), and has a set angle θ / 2 with the horizontal plane; the reflector (107) has a hollow structure below it, which is used for the incident beam to pass through the diamond target (115) and be emitted downstream.

4. The integrated multi-station fluorescence target device according to claim 3, characterized in that, The water-cooled target holder welding component (113) includes a stainless steel water-cooling pipe (11301), a target holder reinforcing fixing lug (11302), a target holder connecting flange (11303), a target holder transition water-cooling block (11304), a water channel plug (11305), and a target holder (11306). The target holder transition water cooling block (11304) and the target holder (11306) have an integrated water channel, which is connected to the stainless steel water cooling pipe (11301), the target holder transition water cooling block (11304) and the water channel plug (11305) to form a water channel interconnection loop. The target holder (11306) has hollowed-out grooves on its front and back sides for mounting the diamond target (115) and the reflector (107). The stainless steel water-cooling pipe (11301) of the water-cooled target base weldment (113) is inserted into the target base connecting feed sleeve weldment (112), and is connected to the external pipeline in sequence through the round hole in the center of the feed connection sealing upper flange (11201) and the feed connection plate (109). The target seat sealing shoulder ring (11203) and the target seat connecting flange (11303) are pressed and sealed together by the split loose flange (105), so that the diamond target (115) and the reflector (107) are placed in a vacuum environment, and the stainless steel water cooling pipe (11301) wrapped in the feed connecting sleeve (11202) is placed in an atmospheric environment. The collimation reference base (103) is distributed on the fixed mounting support plate (104) and is used to bring out the position coordinates of the diamond target (115) to the vacuum.

5. The integrated multi-station fluorescence target device according to claim 3, characterized in that, The vacuum chamber includes a feed body connecting flange (201), a main chamber (202), a beam inlet flange (203), a beam outlet flange (204), an ion pump interface flange (205), an observation window interface flange (206), an observation window support (207), a chamber base (208), an observation window (209), and a spare flange (210). The feed body connecting flange (201) is connected to the lower end special-shaped welded flange 11106 of the bellows assembly (111) to support the feed body; The beam inlet flange (203) is used for alignment and installation connection with the upstream equipment of the beamline; the observation window lug (207) is welded to the observation window interface flange (206); the relative positional relationship between the observation window interface flange (206) and the feed body connection flange (201) needs to be determined according to the position of the diamond target (115) and the reflector (107) in the vacuum cavity, and is used to monitor the beam spot through the observation window (209); The cavity base (208) is welded to the main cavity (202); When there is a detection task, the stepper motor (101) transmits the rotational motion to the lead screw assembly (110) through the coupling (102). The lead screw assembly (110) converts the rotational motion into linear motion and transmits it to the feed connection plate (109). Under the guidance of the linear guide rail (116), the bellows assembly (111) is compressed downward in a single direction, thereby realizing the feed linear motion of the target base connecting feed sleeve weldment (112) and the water-cooled target base weldment (113) in the main cavity (202).

6. The integrated multi-station fluorescence target device according to claim 5, characterized in that, The imaging system includes a one-dimensional linear slide (301), a camera (302), an automatic zoom lens assembly (303), structural reinforcing ribs (304), a mounting base (305), a lens support fixture (306), a lens guide rail (307), and a camera mounting adapter plate (308). The mounting base (305) and the two side structural reinforcing ribs (304) are connected and fixed to the observation window lugs (207). The lens guide rail (307) and the one-dimensional linear slide (301) are mounted on the inner mounting surface of the mounting base (305). The automatic zoom lens assembly (303) is mounted and fixed to the lens guide rail (307) via the lens support fixture (306). The camera (302) is mounted on the one-dimensional linear slide (301) via the camera mounting adapter plate (308). The camera (302) and the automatic zoom lens assembly (303) are connected via a C-type threaded interface.

7. The integrated multi-station fluorescence target device according to claim 5, characterized in that, The vacuum chamber also includes a beam outlet flange and a beam inlet flange for connecting upstream and downstream equipment of the beam.

8. The integrated multi-station fluorescence target device according to claim 7, characterized in that, The observation window is installed at the bottom of the vacuum chamber, and the center line of the observation window is perpendicular to the line connecting the centers of the beam outlet flange and the beam inlet flange.

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