Projection objective and projection apparatus

Abstract

The application provides a projection objective lens and a projection device. The projection objective lens has an object side and an image side corresponding to the arrangement along the optical axis direction, and comprises 25 lenses arranged in sequence from the object side to the image side. The total length of the object-image conjugate distance is not more than 700 mm, and the numerical aperture is 0.32 to 0.35. Through the optical design of 25 lenses and the numerical aperture of 0.32 to 0.35, sufficient focal depth is realized under the premise of guaranteeing the lithography resolution, the imaging blur problem caused by the insufficient focal depth of the high-numerical-aperture projection objective lens is effectively solved, and the yield of Micro LED lithography is improved.

Description

Technical Field

[0001] This application relates to the technical field of optical systems, and in particular to a projection lens and projection device. Background Technology

[0002] With the development of the semiconductor, flat panel display, and Micro LED industries, the demand for lithography systems is increasing daily. The projection lens is the core optical component of a lithography machine, and its imaging quality directly determines the linewidth quality of the lithographic pattern and the product yield. High numerical aperture lenses can improve resolution, but the depth of focus decreases significantly with increasing numerical aperture, and substrate flatness deviations and equipment vibrations can easily lead to image blurring. Existing projection lenses struggle to achieve sufficient depth of focus while maintaining resolution, thus affecting the yield of Micro LED lithography. Summary of the Invention

[0003] The technical problem to be solved by this application is that the depth of focus of existing projection lenses is insufficient under high numerical aperture conditions, which leads to substrate flatness deviation and image blurring under equipment vibration, affecting the lithography yield.

[0004] This application provides a projection lens. The projection lens has an object side and an image side correspondingly arranged along the optical axis. The projection lens includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens, a tenth lens, an eleventh lens, a twelfth lens, a thirteenth lens, a fourteenth lens, a fifteenth lens, a sixteenth lens, a seventeenth lens, an eighteenth lens, a nineteenth lens, a twentieth lens, a twenty-first lens, a twenty-second lens, a twenty-third lens, a twenty-fourth lens, and a twenty-fifth lens arranged sequentially from the object side to the image side. The total object-image conjugate distance of the projection lens is L, where L ≤ 700 mm. The numerical aperture of the projection lens is NA, where 0.32 ≤ NA ≤ 0.35.

[0005] In some embodiments, the refractive index of the first lens is n1, 1.44≤n1≤1.48; the refractive index of the second lens is n2, 1.57≤n2≤1.63; the refractive index of the third lens is n3, 1.57≤n3≤1.63; the refractive index of the fourth lens is n4, 1.47≤n4≤1.53; the refractive index of the fifth lens is n5, 1.47≤n5≤1.53; the refractive index of the sixth lens is n6, 1.59≤n6≤1.65; and the refractive index of the seventh lens is n7, 1.48≤n1≤1.48. The refractive index of the eighth lens is n8, 1.59≤n8≤1.65; the refractive index of the ninth lens is n9, 1.49≤n9≤1.55; the refractive index of the tenth lens is n10, 1.52≤n10≤1.58; the refractive index of the eleventh lens is n11, 1.50≤n11≤1.56; the refractive index of the twelfth lens is n12, 1.47≤n12≤1.53; the refractive index of the thirteenth lens is n13, 1.47≤n13≤1.5 3; The refractive index of the fourteenth lens is n14, 1.47≤n14≤1.53; the refractive index of the fifteenth lens is n15, 1.47≤n15≤1.53; the refractive index of the sixteenth lens is n16, 1.47≤n16≤1.53; the refractive index of the seventeenth lens is n17, 1.52≤n17≤1.58; the refractive index of the eighteenth lens is n18, 1.59≤n18≤1.65; the refractive index of the nineteenth lens is n19, 1.56≤n19≤1.62; The refractive index of lens 20 is n20, 1.47≤n20≤1.53; the refractive index of lens 21 is n21, 1.52≤n21≤1.58; the refractive index of lens 22 is n22, 1.59≤n22≤1.65; the refractive index of lens 23 is n23, 1.47≤n23≤1.53; the refractive index of lens 24 is n24, 1.56≤n24≤1.62; and the refractive index of lens 25 is n25, 1.44≤n25≤1.48.

[0006] In some embodiments, the dispersion coefficient of the first lens is v1, 65 ≤ v1 ≤ 71; the dispersion coefficient of the second lens is v2, 34 ≤ v2 ≤ 44; the dispersion coefficient of the third lens is v3, 56 ≤ v3 ≤ 66; the dispersion coefficient of the fourth lens is v4, 76 ≤ v4 ≤ 86; the dispersion coefficient of the fifth lens is v5, 31 ≤ v5 ≤ 41; the dispersion coefficient of the sixth lens is v6, 56 ≤ v6 ≤ 66; and the dispersion coefficient of the seventh lens is v7. The dispersion coefficient of the eighth lens is v8, 31≤v8≤41; the dispersion coefficient of the ninth lens is v9, 59≤v9≤69; the dispersion coefficient of the tenth lens is v10, 41≤v10≤51; the dispersion coefficient of the eleventh lens is v11, 44≤v11≤54; the dispersion coefficient of the twelfth lens is v12, 76≤v12≤86; the dispersion coefficient of the thirteenth lens is v13, 76≤v13≤86. The dispersion coefficient of the fourteenth lens is v14, 76 ≤ v14 ≤ 86; the dispersion coefficient of the fifteenth lens is v15, 76 ≤ v15 ≤ 86; the dispersion coefficient of the sixteenth lens is v16, 41 ≤ v16 ≤ 51; the dispersion coefficient of the seventeenth lens is v17, 76 ≤ v17 ≤ 86; the dispersion coefficient of the eighteenth lens is v18, 36 ≤ v18 ≤ 46; the dispersion coefficient of the nineteenth lens is v19, 76 ≤ v19 ≤ 86; the second... The dispersion coefficient of the 10th lens is v20, 41≤v20≤51; the dispersion coefficient of the 21st lens is v21, 31≤v21≤41; the dispersion coefficient of the 22nd lens is v22, 31≤v22≤41; the dispersion coefficient of the 23rd lens is v23, 56≤v23≤66; the dispersion coefficient of the 24th lens is v24, 76≤v24≤86; and the dispersion coefficient of the 25th lens is v25, 65≤v25≤71.

[0007] In some embodiments, the first lens and the twenty-fifth lens are plane lenses; the focal length of the second lens is f2, 260mm≤f2≤350mm; the focal length of the third lens is f3, 140mm≤f3≤185mm; the focal length of the fourth lens is f4, -550mm≤f4≤-410mm; the focal length of the fifth lens is f5, -90mm≤f5≤-66mm; the focal length of the sixth lens is f6, -230mm≤f6≤-170mm; and the focal length of the seventh lens is f7, -1 The focal length of the eighth lens is f8, 175mm≤f8≤230mm; the focal length of the ninth lens is f9, 130mm≤f9≤175mm; the focal length of the tenth lens is f10, -225mm≤f10≤-165mm; the focal length of the eleventh lens is f11, -95mm≤f11≤-70mm; the focal length of the twelfth lens is f12, -340mm≤f12≤-270mm; the focal length of the thirteenth lens is f13, 1... The focal length of the fourteenth lens is f14, 155mm ≤ f14 ≤ 195mm; the focal length of the fifteenth lens is f15, 155mm ≤ f15 ≤ 195mm; the focal length of the sixteenth lens is f16, -130mm ≤ f16 ≤ -105mm; the focal length of the seventeenth lens is f17, 150mm ≤ f17 ≤ 195mm; the focal length of the eighteenth lens is f18, -130mm ≤ f18 ≤ -100mm; the focal length of the nineteenth lens is... The focal length of the 20th lens is f19, 95mm≤f19≤120mm; the focal length of the 21st lens is f21, 155mm≤f21≤200mm; the focal length of the 22nd lens is f22, 140mm≤f22≤185mm; the focal length of the 23rd lens is f23, -215mm≤f23≤-160mm; and the focal length of the 24th lens is f24, 160mm≤f24≤215mm.

[0008] In some embodiments, all twenty-five lenses, from the first lens to the twenty-fifth lens, are configured as spherical lenses.

[0009] In some embodiments, the second lens has an object-side radius of R21 and an image-side radius of R22, where 305mm≤R21≤360mm and -490mm≤R22≤-410mm; the third lens has an object-side radius of R31 and an image-side radius of R32, where 85mm≤R31≤100mm and 860mm≤R32≤1030mm; the fourth lens has an object-side radius of R41 and an image-side radius of R42, where 88mm≤R41≤105mm and 60mm≤R42≤72mm; the fifth lens has an object-side radius of R51 and an image-side radius of R52, where -480mm≤R51≤-400mm and 54mm≤R52≤65mm; the sixth lens has an object-side radius of R21 and an image-side radius of R22, where 305mm≤R21≤360mm and -490mm≤R22≤-410 ... third lens has an object-side radius of R31 and an image-side radius of R32, where 85mm≤R31≤100mm and 860mm≤R32≤1030mm; the fourth lens has an object-side radius of R41 and an image-side radius of R42, where 88mm≤R41≤105mm and 60mm≤R42≤72mm; the fifth lens has an object-side radius of R51 and an image-side radius of R52, where -480mm≤R51≤-400mm and 54mm≤R52≤65mm; the sixth lens has an object-side radius of R21 and an image- The object-side radius of the seventh lens is R61, and the image-side radius is R62, with 230mm ≤ R61 ≤ 275mm and 73mm ≤ R62 ≤ 87mm; the object-side radius of the eighth lens is R81, and the image-side radius is R72, with -63mm ≤ R71 ≤ -53mm and -77mm ≤ R72 ≤ -64mm; the object-side radius of the eighth lens is R81, and the image-side radius is R82, with 1230mm ≤ R81 ≤ 1490mm and -163mm ≤ R82 ≤ -135mm; the object-side radius of the ninth lens is R91, and the image-side radius is R92, with 113mm ≤ R91 ≤ 136mm and -580mm ≤ R92 ≤ -480mm; the object-side radius of the tenth lens is R101. The eleventh lens has an object-side radius of R102, where 96mm ≤ R101 ≤ 115mm and 44mm ≤ R102 ≤ 53mm; the eleventh lens has an object-side radius of R111 and an image-side radius of R112, where -99mm ≤ R111 ≤ -82mm and 96mm ≤ R112 ≤ 116mm; the twelfth lens has an object-side radius of R121 and an image-side radius of R122, where 885mm ≤ R121 ≤ 1070mm and 130mm ≤ R122 ≤ 158mm; the thirteenth lens has an object-side radius of R131 and an image-side radius of R132, where 161mm ≤ R131 ≤ 194mm and -158mm ≤ R132 ≤ -130mm; the fourteenth lens has an object-side radius of R102. The first lens has an object-side radius of R141 and an image-side radius of R142, with a radius of 168mm ≤ R141 ≤ 203mm and a radius of -182mm ≤ R142 ≤ -150mm; the second lens has an object-side radius of R151 and an image-side radius of R152, with a radius of 136mm ≤ R151 ≤ 165mm and a radius of -232mm ≤ R152 ≤ -192mm; the third lens has an object-side radius of R161 and an image-side radius of R162, with a radius of -350mm ≤ R161 ≤ -290mm and a radius of 79mm ≤ R162 ≤ 96mm; the fourth lens has an object-side radius of R171 and an image-side radius of R172, with a radius of 97mm ≤ R171 ≤ 117mm and a radius of -510mm ≤ R172 ≤ -420mm.The object-side radius of the eighteenth lens is R181, and the image-side radius is R182, with -203mm ≤ R181 ≤ -168mm and 108mm ≤ R182 ≤ 130mm; the object-side radius of the nineteenth lens is R191, and the image-side radius is R192, with 157mm ≤ R191 ≤ 190mm and -85mm ≤ R192 ≤ -70mm; the object-side radius of the twentieth lens is R201, and the image-side radius is R202, with -80mm ≤ R201 ≤ -67mm and -940mm ≤ R202 ≤ -770mm; the object-side radius of the twenty-first lens is R211, and the image-side radius is R212, with 145mm... m≤R211≤175mm, -460mm≤R212≤-380mm; The object-side radius of the twenty-second lens is R221, and the image-side radius is R222, 95mm≤R221≤114mm, 2450mm≤R222≤2960mm; The object-side radius of the twenty-third lens is R231, and the image-side radius is R232, -1940mm≤R231≤-1590mm, 111mm≤R232≤134mm; The object-side radius of the twenty-fourth lens is R241, and the image-side radius is R242, 75mm≤R241≤90mm, 535mm≤R242≤650mm.

[0010] In some embodiments, the projection lens further includes an aperture stop, which is disposed between the fourteenth lens and the fifteenth lens, and the distance between the aperture stop and the image side of the fourteenth lens is d, where 1mm≤d≤3mm.

[0011] In some embodiments, along the optical axis from the object side to the image side, the projection objective lens sequentially includes: a first lens group, including a first lens to a fourth lens, having positive optical power; a second lens group, including a fifth lens and a sixth lens, having negative optical power; a third lens group, including a seventh lens to a ninth lens, having positive optical power; a fourth lens group, including a tenth lens and an eleventh lens, having negative optical power; and a fifth lens group, including a twelfth lens to a twenty-fifth lens and an aperture stop, having positive optical power; the optical power of the five lens groups is distributed positive, negative, positive, negative, positive along the optical axis from the object side to the image side.

[0012] In some embodiments, the focal length of the first lens group is f01, 95mm≤f01≤143mm; the focal length of the second lens group is f02, -60mm≤f02≤-40mm; the focal length of the third lens group is f03, 68mm≤f03≤102mm; the focal length of the fourth lens group is f04, -70mm≤f04≤-46mm; and the focal length of the fifth lens group is f05, 94mm≤f05≤142mm.

[0013] The second aspect of this application provides a projection device, including the projection lens provided in the first aspect of this application.

[0014] This application achieves sufficient depth of focus while ensuring lithographic resolution through a structure of 25 lenses and an optical design with a numerical aperture of 0.32 to 0.35. This effectively solves the imaging blurring problem caused by insufficient depth of focus of high numerical aperture projection lenses and improves the yield of Micro LED lithography. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 A schematic diagram of the structure of an embodiment of the projection lens provided in this application; Figure 2 for Figure 1 Field curvature and distortion diagram of the projection objective; Figure 3 for Figure 1 Aberration curves of the projection lens.

[0017] Figure label: 100. Projection lens; 1. First lens; 2. Second lens; 3. Third lens; 4. Fourth lens; 5. Fifth lens; 6. Sixth lens; 7. Seventh lens; 8. Eighth lens; 9. Ninth lens; 10. Tenth lens; 11. Eleventh lens; 12. Twelfth lens; 13. Thirteenth lens; 14. Fourteenth lens; 15. Fifteenth lens; 16. Sixteenth lens; 17. Seventeenth lens; 18. Eighteenth lens; 19. Nineteenth lens; 20. Twentieth lens; 21. Twenty-first lens; 22. Twenty-second lens; 23. Twenty-third lens; 24. Twenty-fourth lens; 25. Twenty-fifth lens; A01, First lens group; A02, Second lens group; A03, Third lens group; A04, Fourth lens group; A05, Fifth lens group. Detailed Implementation

[0018] The present application will now be described in further detail with reference to the accompanying drawings and embodiments. It should be particularly noted that the following embodiments are for illustrative purposes only and do not limit the scope of the application. Similarly, the following embodiments are only some, not all, embodiments of the present application, and all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of the present application.

[0019] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0020] The directional terms used in this description, such as "up," "down," "left," "right," "inner," and "outer," are only for reference to the directions shown in the attached diagram. These directional terms should be changed if the directions in the attached diagram change.

[0021] See Figure 1 , Figure 1 This is a schematic diagram of the structure of an embodiment of the projection lens provided in this application. The first aspect of this application provides a projection lens 100, which has an object side and an image side correspondingly arranged along the optical axis. The projection lens 100 includes a first lens 1, a second lens 2, a third lens 3, a fourth lens 4, a fifth lens 5, a sixth lens 6, a seventh lens 7, an eighth lens 8, a ninth lens 9, a tenth lens 10, an eleventh lens 11, a twelfth lens 12, a thirteenth lens 13, a fourteenth lens 14, a fifteenth lens 15, a sixteenth lens 16, a seventeenth lens 17, an eighteenth lens 18, a nineteenth lens 19, a twentieth lens 20, a twenty-first lens 21, a twenty-second lens 22, a twenty-third lens 23, a twenty-fourth lens 24, and a twenty-fifth lens 25, arranged sequentially from the object side to the image side. The total object-image conjugate distance of the projection lens 100 is L, where L ≤ 700 mm. The numerical aperture of the projection lens 100 is NA, where 0.32 ≤ NA ≤ 0.35.

[0022] The technical solution of this application, through the structural arrangement of 25 lenses and an optical design with a numerical aperture of 0.32 to 0.35, achieves sufficient depth of focus while ensuring lithographic resolution. This effectively solves the imaging blurring problem caused by insufficient depth of focus in high numerical aperture projection lenses in related technologies, thus improving the yield of Micro LED lithography. In the embodiments of this application, the 25 lenses are arranged sequentially along the optical axis, providing sufficient degrees of freedom for aberration correction. This allows the projection lens 100 to meet the lithographic resolution requirements while retaining sufficient depth of focus under the condition of a numerical aperture of 0.32 to 0.35, effectively addressing the imaging effects caused by substrate flatness deviations and minor equipment vibrations. The constraint of a total object-image conjugate distance L ≤ 700 mm ensures the compactness of the overall structure of the projection lens 100, enabling it to adapt to the overall space requirements of the lithography equipment.

[0023] like Figure 1As shown, the 25 lenses are divided into five lens groups. Among them, the first lens group A01 includes the first lens 1 to the fourth lens 4, the second lens group A02 includes the fifth lens 5 and the sixth lens 6, the third lens group A03 includes the seventh lens 7 to the ninth lens 9, the fourth lens group A04 includes the tenth lens 10 and the eleventh lens 11, and the fifth lens group A05 includes the twelfth lens 12 to the twenty-fifth lens 25 and the aperture stop (not shown in the figure).

[0024] In some embodiments, in order to meet the optical performance requirements of different lenses of the projection objective 100 and to achieve aberration correction and chromatic aberration optimization, the refractive indices of the first lens 1 to the twenty-fifth lens 25 satisfy the following conditions.

[0025] The refractive index of the first lens 1 is n1, where 1.44≤n1≤1.48. n1 can be set to 1.44, 1.45, 1.46, 1.47, 1.48, etc. For example, n1 is 1.46.

[0026] The refractive index of the second lens 2 is n2, 1.57≤n2≤1.63. n2 can be set to 1.57, 1.58, 1.59, 1.60, 1.61, 1.62, 1.63, etc., for example, n2 is 1.60.

[0027] The refractive index of the third lens 3 is n3, where 1.57≤n3≤1.63. n3 can be set to 1.57, 1.58, 1.59, 1.60, 1.61, 1.62, 1.63, etc. For example, n3 is 1.60.

[0028] The refractive index of the fourth lens 4 is n4, 1.47≤n4≤1.53. n4 can be set to 1.47, 1.48, 1.49, 1.50, 1.51, 1.52, 1.53, etc., for example, n4 is 1.50.

[0029] The refractive index of the fifth lens 5 is n5, 1.47≤n5≤1.53. n5 can be set to 1.47, 1.48, 1.49, 1.50, 1.51, 1.52, 1.53, etc., for example, n5 is 1.50.

[0030] The refractive index of the sixth lens 6 is n6, where 1.59≤n6≤1.65. n6 can be set to 1.59, 1.60, 1.61, 1.62, 1.63, 1.64, 1.65, etc. For example, n6 is 1.62.

[0031] The refractive index of the seventh lens 7 is n7, 1.56≤n7≤1.62. n7 can be set to 1.56, 1.57, 1.58, 1.59, 1.60, 1.61, 1.62, etc. For example, n7 is 1.59.

[0032] The refractive index of the eighth lens 8 is n8, where 1.59≤n8≤1.65. n8 can be set to 1.59, 1.60, 1.61, 1.62, 1.63, 1.64, 1.65, etc. For example, n8 is 1.62.

[0033] The refractive index of the ninth lens 9 is n9, 1.49≤n9≤1.55. n9 can be set to 1.49, 1.50, 1.51, 1.52, 1.53, 1.54, 1.55, etc. For example, n9 is 1.52.

[0034] The refractive index of the tenth lens 10 is n10, 1.52≤n10≤1.58. n10 can be set to 1.52, 1.53, 1.54, 1.55, 1.56, 1.57, 1.58, etc., for example, n10 is 1.55.

[0035] The refractive index of the eleventh lens 11 is n11, 1.50≤n11≤1.56. n11 can be set to 1.50, 1.51, 1.52, 1.53, 1.54, 1.55, 1.56, etc., for example, n11 is 1.53.

[0036] The refractive index of the twelfth lens 12 is n12, 1.47≤n12≤1.53. n12 can be set to 1.47, 1.48, 1.49, 1.50, 1.51, 1.52, 1.53, etc., for example, n12 is 1.50.

[0037] The refractive index of the thirteenth lens 13 is n13, 1.47≤n13≤1.53. n13 can be set to 1.47, 1.48, 1.49, 1.50, 1.51, 1.52, 1.53, etc., for example, n13 is 1.50.

[0038] The refractive index of the fourteenth lens 14 is n14, 1.47≤n14≤1.53. n14 can be set to 1.47, 1.48, 1.49, 1.50, 1.51, 1.52, 1.53, etc., for example, n14 is 1.50.

[0039] The refractive index of the fifteenth lens 15 is n15, 1.47≤n15≤1.53. n15 can be set to 1.47, 1.48, 1.49, 1.50, 1.51, 1.52, 1.53, etc., for example, n15 is 1.50.

[0040] The refractive index of the sixteenth lens 16 is n16, where 1.47≤n16≤1.53. n16 can be set to 1.47, 1.48, 1.49, 1.50, 1.51, 1.52, 1.53, etc. For example, n16 is 1.50.

[0041] The refractive index of the seventeenth lens 17 is n17, 1.52≤n17≤1.58. n17 can be set to 1.52, 1.53, 1.54, 1.55, 1.56, 1.57, 1.58, etc., for example, n17 is 1.55.

[0042] The refractive index of the eighteenth lens 18 is n18, where 1.59≤n18≤1.65. n18 can be set to 1.59, 1.60, 1.61, 1.62, 1.63, 1.64, 1.65, etc. For example, n18 is 1.62.

[0043] The refractive index of the nineteenth lens 19 is n19, 1.56≤n19≤1.62. n19 can be set to 1.56, 1.57, 1.58, 1.59, 1.60, 1.61, 1.62, etc. For example, n19 is 1.59.

[0044] The refractive index of the twentieth lens 20 is n20, where 1.47 ≤ n20 ≤ 1.53. n20 can be set to 1.47, 1.48, 1.49, 1.50, 1.51, 1.52, 1.53, etc. For example, n20 is 1.50.

[0045] The refractive index of the twenty-first lens 21 is n21, 1.52≤n21≤1.58. n21 can be set to 1.52, 1.53, 1.54, 1.55, 1.56, 1.57, 1.58, etc., for example, n21 is 1.55.

[0046] The refractive index of the twenty-second lens 22 is n22, 1.59≤n22≤1.65. n22 can be set to 1.59, 1.60, 1.61, 1.62, 1.63, 1.64, 1.65, etc. For example, n22 is 1.62.

[0047] The refractive index of the twenty-third lens 23 is n23, 1.47≤n23≤1.53. n23 can be set to 1.47, 1.48, 1.49, 1.50, 1.51, 1.52, 1.53, etc., for example, n23 is 1.50.

[0048] The refractive index of the twenty-fourth lens 24 is n24, 1.56≤n24≤1.62. n24 can be set to 1.56, 1.57, 1.58, 1.59, 1.60, 1.61, 1.62, etc. For example, n24 is 1.59.

[0049] The refractive index of the twenty-fifth lens 25 is n25, where 1.44 ≤ n25 ≤ 1.48. n25 can be set to 1.44, 1.45, 1.46, 1.47, 1.48, etc. For example, n25 is 1.46.

[0050] Of course, in other embodiments of this application, the refractive indices of the first lens 1 to the twenty-fifth lens 25 can be set to other values, as long as the refractive indices of each lens are within the corresponding range, and this application does not impose any restrictions on this.

[0051] In some embodiments, in order to achieve chromatic aberration complementarity and reasonable matching of optical materials among the lenses and to ensure the imaging quality of the projection lens 100, the dispersion coefficients of the first lens 1 to the twenty-fifth lens 25 satisfy the following conditions.

[0052] The dispersion coefficient of the first lens 1 is v1, 65≤v1≤71. v1 can be set to 65, 66, 67, 68, 69, 70, 71, etc. For example, v1 is 67.8.

[0053] The dispersion coefficient of the second lens 2 is v2, 34≤v2≤44. v2 can be set to 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, etc. For example, v2 is 39.3.

[0054] The dispersion coefficient of the third lens 3 is v3, 56≤v3≤66. v3 can be set to 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, etc. For example, v3 is 60.7.

[0055] The dispersion coefficient of the fourth lens 4 is v4, 76≤v4≤86. v4 can be set to 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, etc. For example, v4 is 81.1.

[0056] The dispersion coefficient of the fifth lens 5 is v5, 31≤v5≤41. v5 can be set to 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, etc. For example, v5 is 36.3.

[0057] The dispersion coefficient of the sixth lens 6 is v6, 56≤v6≤66. v6 can be set to 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, etc. For example, v6 is 61.2.

[0058] The dispersion coefficient of the seventh lens 7 is v7, 76≤v7≤86. v7 can be set to 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, etc. For example, v7 is 81.1.

[0059] The dispersion coefficient of the eighth lens 8 is v8, 31≤v8≤41. v8 can be set to 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, etc. For example, v8 is 36.3.

[0060] The dispersion coefficient of the ninth lens 9 is v9, 59≤v9≤69. v9 can be set to 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, etc. For example, v9 is 64.2.

[0061] The dispersion coefficient of the tenth lens 10 is v10, 41≤v10≤51. v10 can be set to 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, etc. For example, v10 is 45.7.

[0062] The dispersion coefficient of the eleventh lens 11 is v11, 44≤v11≤54. v11 can be set to 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, etc. For example, v11 is 49.0.

[0063] The dispersion coefficient of the twelfth lens 12 is v12, 76≤v12≤86. v12 can be set to 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, etc. For example, v12 is 81.1.

[0064] The dispersion coefficient of the thirteenth lens 13 is v13, 76≤v13≤86. v13 can be set to 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, etc. For example, v13 is 81.1.

[0065] The dispersion coefficient of the fourteenth lens 14 is v14, 76≤v14≤86. v14 can be set to 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, etc. For example, v14 is 81.1.

[0066] The dispersion coefficient of the fifteenth lens 15 is v15, 76≤v15≤86. v15 can be set to 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, etc. For example, v15 is 81.1.

[0067] The dispersion coefficient of the sixteenth lens 16 is v16, 41≤v16≤51. v16 can be set to 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, etc. For example, v16 is 45.7.

[0068] The dispersion coefficient of the seventeenth lens 17 is v17, 76≤v17≤86. v17 can be set to 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, etc. For example, v17 is 81.1.

[0069] The dispersion coefficient of the eighteenth lens 18 is v18, 36≤v18≤46. v18 can be set to 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, etc. For example, v18 is 40.9.

[0070] The dispersion coefficient of the nineteenth lens 19 is v19, 76≤v19≤86. v19 can be set to 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, etc. For example, v19 is 81.1.

[0071] The dispersion coefficient of the twentieth lens 20 is v20, 41≤v20≤51. v20 can be set to 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, etc. For example, v20 is 45.7.

[0072] The dispersion coefficient of the twenty-first lens 21 is v21, 31≤v21≤41. v21 can be set to 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, etc. For example, v21 is 36.3.

[0073] The dispersion coefficient of the twenty-second lens 22 is v22, 31≤v22≤41. v22 can be set to 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, etc. For example, v22 is 36.3.

[0074] The dispersion coefficient of the twenty-third lens 23 is v23, 56≤v23≤66. v23 can be set to 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, etc. For example, v23 is 61.2.

[0075] The dispersion coefficient of the twenty-fourth lens 24 is v24, 76≤v24≤86. v24 can be set to 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, etc. For example, v24 is 81.1.

[0076] The dispersion coefficient of the 25th lens is v25, 65≤v25≤71. v25 can be set to 65, 66, 67, 68, 69, 70, 71, etc. For example, v25 is 67.8.

[0077] Of course, in other embodiments of this application, the dispersion coefficients of the first lens 1 to the twenty-fifth lens 25 can be set to other values, as long as the dispersion coefficients of each lens are within the corresponding range, this application does not impose any restrictions on this.

[0078] In some embodiments, in order to reasonably allocate the optical power of each lens and enable the projection objective lens 100 to balance resolution and depth of focus under the condition of numerical aperture of 0.32 to 0.35, the focal lengths of the first lens 1 to the twenty-fifth lens 25 satisfy the following conditions. Wherein, the first lens 1 and the twenty-fifth lens 25 are plane lenses with infinite focal lengths. The focal lengths of the second lens 2 to the twenty-fourth lens 24 are as follows.

[0079] The focal length of the second lens 2 is f2, 260mm≤f2≤350mm. f2 can be set to 260mm, 270mm, 280mm, 290mm, 300mm, 310mm, 320mm, 330mm, 340mm, 350mm, etc. For example, f2 is 302.86mm.

[0080] The focal length of the third lens 3 is f3, 140mm≤f3≤185mm. f3 can be set to 140mm, 150mm, 160mm, 170mm, 180mm, 185mm, etc. For example, f3 is 161.37mm.

[0081] The focal length of the fourth lens 4 is f4, -550mm≤f4≤-410mm. f4 can be set to -550mm, -540mm, -530mm, -520mm, -510mm, -500mm, -490mm, -480mm, -470mm, -460mm, -450mm, -440mm, -430mm, -420mm, -410mm, etc. For example, f4 is -474.95mm.

[0082] The focal length of the fifth lens 5 is f5, -90mm≤f5≤-66mm. f5 can be set to -90mm, -85mm, -80mm, -75mm, -70mm, -66mm, etc. For example, f5 is -77.66mm.

[0083] The focal length of the sixth lens 6 is f6, -230mm≤f6≤-170mm. f6 can be set to -230mm, -220mm, -210mm, -200mm, -190mm, -180mm, -170mm, etc. For example, f6 is -197.88mm.

[0084] The focal length of the seventh lens 7 is f7, -1230mm≤f7≤-1020mm. f7 can be set to -1230mm, -1180mm, -1130mm, -1080mm, -1030mm, -1020mm, etc. For example, f7 is -1120.89mm.

[0085] The focal length of the eighth lens 8 is f8, 175mm≤f8≤230mm. f8 can be set to 175mm, 180mm, 190mm, 200mm, 210mm, 220mm, 230mm, etc. For example, f8 is 201.70mm.

[0086] The focal length of the ninth lens 9 is f9, 130mm≤f9≤175mm. f9 can be set to 130mm, 140mm, 150mm, 160mm, 170mm, 175mm, etc., for example, f9 is 152.03mm.

[0087] The focal length of the tenth lens 10 is f10, -225mm≤f10≤-165mm. f10 can be set to -225mm, -215mm, -205mm, -195mm, -185mm, -175mm, -165mm, etc. For example, f10 is -192.91mm.

[0088] The focal length of the eleventh lens 11 is f11, -95mm≤f11≤-70mm. f11 can be set to -95mm, -90mm, -85mm, -80mm, -75mm, -70mm, etc. For example, f11 is -82.44mm.

[0089] The focal length of the twelfth lens 12 is f12, -340mm≤f12≤-270mm. f12 can be set to -340mm, -330mm, -320mm, -310mm, -300mm, -290mm, -280mm, -270mm, etc. For example, f12 is -303.36mm.

[0090] The focal length of the thirteenth lens 13 is f13, 140mm≤f13≤178mm. f13 can be set to 140mm, 145mm, 150mm, 155mm, 160mm, 165mm, 170mm, 175mm, 178mm, etc. For example, f13 is 157.94mm.

[0091] The focal length of the fourteenth lens 14 is f14, 155mm≤f14≤195mm. f14 can be set to 155mm, 160mm, 170mm, 180mm, 190mm, 195mm, etc. For example, f14 is 174.19mm.

[0092] The focal length of the fifteenth lens 15 is f15, 155mm≤f15≤195mm. f15 can be set to 155mm, 160mm, 170mm, 180mm, 190mm, 195mm, etc. For example, f15 is 174.53mm.

[0093] The focal length of the sixteenth lens 16 is f16, -130mm≤f16≤-105mm. f16 can be set to -130mm, -125mm, -120mm, -115mm, -110mm, -105mm, etc. For example, f16 is -117.33mm.

[0094] The focal length of the seventeenth lens 17 is f17, 150mm≤f17≤195mm. f17 can be set to 150mm, 160mm, 170mm, 180mm, 190mm, 195mm, etc. For example, f17 is 171.63mm.

[0095] The focal length of the eighteenth lens 18 is f18, -130mm≤f18≤-100mm. f18 can be set to -130mm, -125mm, -120mm, -115mm, -110mm, -105mm, -100mm, etc. For example, f18 is -115.13mm.

[0096] The focal length of the nineteenth lens 19 is f19, 95mm≤f19≤120mm. f19 can be set to 95mm, 100mm, 105mm, 110mm, 115mm, 120mm, etc. For example, f19 is 107.34mm.

[0097] The focal length of the twentieth lens 20 is f20, -160mm≤f20≤-120mm. f20 can be set to -160mm, -150mm, -140mm, -130mm, -120mm, etc. For example, f20 is -139.55mm.

[0098] The focal length of the twenty-first lens 21 is f21, 155mm≤f21≤200mm. f21 can be set to 155mm, 160mm, 170mm, 180mm, 190mm, 200mm, etc. For example, f21 is 175.97mm.

[0099] The focal length of the twenty-second lens 22 is f22, 140mm≤f22≤185mm. f22 can be set to 140mm, 150mm, 160mm, 170mm, 180mm, 185mm, etc. For example, f22 is 162.01mm.

[0100] The focal length of the twenty-third lens 23 is f23, -215mm≤f23≤-160mm. f23 can be set to -215mm, -205mm, -195mm, -185mm, -175mm, -165mm, -160mm, etc. For example, f23 is -185.75mm.

[0101] The focal length of the twenty-fourth lens 24 is f24, 160mm≤f24≤215mm. f24 can be set to 160mm, 170mm, 180mm, 190mm, 200mm, 210mm, 215mm, etc. For example, f24 is 185.32mm.

[0102] Of course, in other embodiments of this application, the focal lengths of the second lens 2 to the twenty-fourth lens 24 can be set to other values, as long as the focal lengths of each lens are within the corresponding range, this application does not impose any restrictions on this.

[0103] In some embodiments, to reduce the processing difficulty and manufacturing cost of the projection lens 100, all twenty-five lenses, from the first lens 1 to the twenty-fifth lens 25, are spherical lenses. Compared to aspherical lenses, spherical lenses have a mature processing technology, which can ensure lower processing costs and higher finished product yield, while reducing the sensitivity of optical assembly and improving the industrialization feasibility of the projection lens 100.

[0104] In some embodiments, in order to achieve the optical power distribution and aberration correction of each lens and meet the optical performance requirements of the projection objective lens 100, the first lens 1 and the twenty-fifth lens 25 are planar protective glass, with both their object-side and image-side surfaces being planar and without a radius of curvature. The object-side radii and image-side radii of the second lens 2 to the twenty-fourth lens 24 satisfy the following conditions.

[0105] The object-side radius of the second lens 2 is R21, and the image-side radius is R22. 305mm≤R21≤360mm, -490mm≤R22≤-410mm. R21 can be set to 305mm, 310mm, 315mm, 320mm, 325mm, 330mm, 335mm, 340mm, 345mm, 350mm, 355mm, 360mm, etc., and R22 can be set to -490mm, -480mm, -470mm, -460mm, -450mm, -440mm, -430mm, -420mm, -410mm, etc.

[0106] The object-side radius of the third lens 3 is R31, and the image-side radius is R32. 85mm≤R31≤100mm, 860mm≤R32≤1030mm. R31 can be set to 85mm, 90mm, 95mm, 100mm, etc., and R32 can be set to 860mm, 880mm, 900mm, 920mm, 940mm, 960mm, 980mm, 1000mm, 1020mm, 1030mm, etc.

[0107] The fourth lens 4 has an object side radius of R41 and an image side radius of R42, where 88mm≤R41≤105mm and 60mm≤R42≤72mm. R41 can be set to 88mm, 90mm, 95mm, 100mm, 105mm, etc., and R42 can be set to 60mm, 62mm, 64mm, 66mm, 68mm, 70mm, 72mm, etc.

[0108] The object-side radius of the fifth lens 5 is R51, and the image-side radius is R52. The values ​​are -480mm≤R51≤-400mm and 54mm≤R52≤65mm. R51 can be set to -480mm, -470mm, -460mm, -450mm, -440mm, -430mm, -420mm, -410mm, -400mm, etc., and R52 can be set to 54mm, 55mm, 56mm, 58mm, 60mm, 62mm, 64mm, 65mm, etc.

[0109] The object-side radius of the sixth lens 6 is R61, and the image-side radius is R62. 230mm≤R61≤275mm, 73mm≤R62≤87mm. R61 can be set to 230mm, 235mm, 240mm, 245mm, 250mm, 255mm, 260mm, 265mm, 270mm, 275mm, etc., and R62 can be set to 73mm, 75mm, 77mm, 79mm, 81mm, 83mm, 85mm, 87mm, etc.

[0110] The object-side radius of the seventh lens 7 is R71, and the image-side radius is R72. The values ​​are -63mm≤R71≤-53mm and -77mm≤R72≤-64mm. R71 can be set to -63mm, -61mm, -59mm, -57mm, -55mm, -53mm, etc., and R72 can be set to -77mm, -75mm, -73mm, -71mm, -69mm, -67mm, -65mm, -64mm, etc.

[0111] The object-side radius of the eighth lens 8 is R81, and the image-side radius is R82. 1230mm≤R81≤1490mm, -163mm≤R82≤-135mm. R81 can be set to 1230mm, 1260mm, 1290mm, 1320mm, 1350mm, 1380mm, 1410mm, 1440mm, 1470mm, 1490mm, etc., and R82 can be set to -163mm, -160mm, -155mm, -150mm, -145mm, -140mm, -135mm, etc.

[0112] The object-side radius of the ninth lens 9 is R91, and the image-side radius is R92. 113mm≤R91≤136mm, -580mm≤R92≤-480mm. R91 can be set to 113mm, 116mm, 119mm, 122mm, 125mm, 128mm, 131mm, 134mm, 136mm, etc., and R92 can be set to -580mm, -570mm, -560mm, -550mm, -540mm, -530mm, -520mm, -510mm, -500mm, -490mm, -480mm, etc.

[0113] The object-side radius of the tenth lens 10 is R101, and the image-side radius is R102. 96mm≤R101≤115mm, 44mm≤R102≤53mm. R101 can be set to 96mm, 100mm, 105mm, 110mm, 115mm, etc., and R102 can be set to 44mm, 45mm, 46mm, 48mm, 50mm, 52mm, 53mm, etc.

[0114] The object-side radius of the eleventh lens 11 is R111, and the image-side radius is R112. The radius is -99mm≤R111≤-82mm, and the radius is 96mm≤R112≤116mm. R111 can be set to -99mm, -96mm, -93mm, -90mm, -87mm, -84mm, -82mm, etc., and R112 can be set to 96mm, 100mm, 105mm, 110mm, 115mm, 116mm, etc.

[0115] The object-side radius of the twelfth lens 12 is R121, and the image-side radius is R122. 885mm≤R121≤1070mm, 130mm≤R122≤158mm. R121 can be set to 885mm, 900mm, 920mm, 940mm, 960mm, 980mm, 1000mm, 1020mm, 1040mm, 1060mm, 1070mm, etc., and R122 can be set to 130mm, 132mm, 135mm, 138mm, 141mm, 144mm, 147mm, 150mm, 153mm, 156mm, 158mm, etc.

[0116] The object-side radius of the thirteenth lens 13 is R131, and the image-side radius is R132. 161mm≤R131≤194mm, -158mm≤R132≤-130mm. R131 can be set to 161mm, 164mm, 167mm, 170mm, 174mm, 177mm, 181mm, 184mm, 187mm, 190mm, 194mm, etc., and R132 can be set to -158mm, -155mm, -150mm, -145mm, -140mm, -135mm, -130mm, etc.

[0117] The object-side radius of the fourteenth lens 14 is R141, and the image-side radius is R142. 168mm≤R141≤203mm, -182mm≤R142≤-150mm. R141 can be set to 168mm, 172mm, 176mm, 180mm, 185mm, 189mm, 193mm, 197mm, 200mm, 203mm, etc., and R142 can be set to -182mm, -178mm, -174mm, -170mm, -166mm, -162mm, -158mm, -154mm, -150mm, etc.

[0118] The object-side radius of the fifteenth lens 15 is R151, and the image-side radius is R152. 136mm≤R151≤165mm, -232mm≤R152≤-192mm. R151 can be set to 136mm, 140mm, 144mm, 148mm, 151mm, 155mm, 159mm, 163mm, 165mm, etc., and R152 can be set to -232mm, -228mm, -224mm, -220mm, -216mm, -212mm, -208mm, -204mm, -200mm, -196mm, -192mm, etc.

[0119] The object-side radius of the sixteenth lens 16 is R161, and the image-side radius is R162. The radius is -350mm≤R161≤-290mm, and the radius is 79mm≤R162≤96mm. R161 can be set to -350mm, -340mm, -330mm, -320mm, -310mm, -300mm, -290mm, etc., and R162 can be set to 79mm, 80mm, 82mm, 84mm, 86mm, 88mm, 90mm, 92mm, 94mm, 96mm, etc.

[0120] The object-side radius of the seventeenth lens 17 is R171, and the image-side radius is R172. 97mm≤R171≤117mm, -510mm≤R172≤-420mm. R171 can be set to 97mm, 100mm, 102mm, 104mm, 107mm, 109mm, 112mm, 114mm, 117mm, etc., and R172 can be set to -510mm, -500mm, -490mm, -480mm, -470mm, -460mm, -450mm, -440mm, -430mm, -420mm, etc.

[0121] The object-side radius of the eighteenth lens 18 is R181, and the image-side radius is R182. The radius is -203mm≤R181≤-168mm, and the radius is 108mm≤R182≤130mm. R181 can be set to -203mm, -200mm, -195mm, -190mm, -185mm, -180mm, -175mm, -170mm, -168mm, etc., and R182 can be set to 108mm, 110mm, 112mm, 115mm, 118mm, 121mm, 124mm, 127mm, 130mm, etc.

[0122] The object-side radius of the nineteenth lens 19 is R191, and the image-side radius is R192. 157mm≤R191≤190mm, -85mm≤R192≤-70mm. R191 can be set to 157mm, 160mm, 164mm, 167mm, 170mm, 174mm, 177mm, 180mm, 184mm, 187mm, 190mm, etc., and R192 can be set to -85mm, -83mm, -81mm, -79mm, -77mm, -75mm, -73mm, -71mm, -70mm, etc.

[0123] The object-side radius of the twentieth lens 20 is R201, and the image-side radius is R202. The radius is -80mm≤R201≤-67mm, and -940mm≤R202≤-770mm. R201 can be set to -80mm, -78mm, -76mm, -74mm, -72mm, -70mm, -68mm, -67mm, etc., and R202 can be set to -940mm, -920mm, -900mm, -880mm, -860mm, -840mm, -820mm, -800mm, -780mm, -770mm, etc.

[0124] The object-side radius of the twenty-first lens 21 is R211, and the image-side radius is R212. 145mm≤R211≤175mm, -460mm≤R212≤-380mm. R211 can be set to 145mm, 148mm, 151mm, 155mm, 158mm, 160mm, 165mm, 168mm, 172mm, 175mm, etc., and R212 can be set to -460mm, -450mm, -440mm, -430mm, -420mm, -410mm, -400mm, -390mm, -380mm, etc.

[0125] The object-side radius of the twenty-second lens 22 is R221, and the image-side radius is R222. 95mm≤R221≤114mm, 2450mm≤R222≤2960mm. R221 can be set to 95mm, 97mm, 100mm, 103mm, 106mm, 109mm, 112mm, 114mm, etc., and R222 can be set to 2450mm, 2500mm, 2550mm, 2600mm, 2650mm, 2700mm, 2750mm, 2800mm, 2850mm, 2900mm, 2950mm, 2960mm, etc.

[0126] The object-side radius of the twenty-third lens 23 is R231, and the image-side radius is R232. The range is -1940mm≤R231≤-1590mm, and 111mm≤R232≤134mm. R231 can be set to -1940mm, -1910mm, -1880mm, -1850mm, -1820mm, -1790mm, -1760mm, -1730mm, -1700mm, -1670mm, -1640mm, -1610mm, -1590mm, etc., and R232 can be set to 111mm, 114mm, 117mm, 120mm, 123mm, 126mm, 129mm, 132mm, 134mm, etc.

[0127] The object-side radius of the twenty-fourth lens 24 is R241, and the image-side radius is R242. 75mm≤R241≤90mm, 535mm≤R242≤650mm. R241 can be set to 75mm, 77mm, 80mm, 83mm, 86mm, 88mm, 90mm, etc., and R242 can be set to 535mm, 545mm, 555mm, 565mm, 575mm, 585mm, 595mm, 605mm, 615mm, 625mm, 635mm, 645mm, 650mm, etc.

[0128] Of course, in other embodiments of this application, the object-side radius and image-side radius of the second lens 2 to the twenty-fourth lens 24 can be set to other values, as long as the object-side radius and image-side radius of each lens are within the corresponding range, this application does not impose any restrictions on this.

[0129] In some embodiments, to limit the light beam aperture and optimize the imaging quality of the projection lens 100, the projection lens 100 further includes an aperture stop. The aperture stop is disposed between the fourteenth lens 14 and the fifteenth lens 15, located in the middle of the fifth lens group A05. The distance between the aperture stop and the image-side surface of the fourteenth lens 14 is d, where 1mm ≤ d ≤ 3mm. d can be set to 1mm, 1.5mm, 2mm, 2.5mm, 3mm, etc., for example, d is 1.5mm. The aperture stop limits the light beam aperture along the optical axis, improving imaging quality while ensuring the required resolution of the projection lens 100.

[0130] In some embodiments, in order to balance the optical power burden of each part of the projection lens 100 and optimize the light propagation path, the projection lens 100 sequentially includes a first lens group A01 to a fifth lens group A05 along the optical axis from the object side to the image side.

[0131] The first lens group A01 includes a first lens 1 to a fourth lens 4, which have positive optical power and are used to initially converge light rays incident from the object side.

[0132] The second lens group A02 includes a fifth lens 5 and a sixth lens 6, and has negative optical power. It is used to diverge light and compensate for the aberrations generated by the first lens group A01.

[0133] The third lens group A03 includes the seventh lens 7 to the ninth lens 9, which has positive optical power and is used to re-converge light rays to further correct aberrations.

[0134] The fourth lens group A04 includes the tenth lens 10 and the eleventh lens 11, which have negative optical power and are used to diverge light and balance the optical power of the preceding lens group.

[0135] The fifth lens group A05 includes the twelfth lens 12 to the twenty-fifth lens 25 and the aperture stop, and has positive optical power. It is used to finally converge the light rays so that the light rays converge onto the image plane.

[0136] The optical power of the five lens groups is distributed along the optical axis from the object side to the image side in a positive, negative, positive, negative, positive pattern. This alternating positive and negative optical power distribution allows the optical power of each lens group to compensate for each other, ensuring that the projection objective 100 has sufficient optical power while effectively controlling aberrations such as field curvature and astigmatism. At the same time, it effectively controls the incident angle of light on the surface of each lens, resulting in smoother light propagation.

[0137] In some embodiments, in order to accurately allocate the optical power of each lens group and ensure that the projection lens 100 achieves an optimized balance between depth of focus and resolution under the condition of numerical aperture of 0.32 to 0.35, the focal lengths of the first lens group A01 to the fifth lens group A05 satisfy the following conditions.

[0138] The focal length of the first lens group A01 is f01, 95mm≤f01≤143mm. f01 can be set to 95mm, 100mm, 105mm, 110mm, 115mm, 119mm, 120mm, 125mm, 130mm, 135mm, 140mm, 143mm, etc. For example, f01 is 118.97mm.

[0139] The focal length of the second lens group A02 is f02, -60mm≤f02≤-40mm. f02 can be set to -60mm, -55mm, -50mm, -45mm, -40mm, etc. For example, f02 is -50.24mm.

[0140] The focal length of the third lens group A03 is f03, 68mm≤f03≤102mm. f03 can be set to 68mm, 70mm, 75mm, 80mm, 85mm, 90mm, 95mm, 100mm, 102mm, etc. For example, f03 is 85.05mm.

[0141] The focal length of the fourth lens group A04 is f04, -70mm≤f04≤-46mm. f04 can be set to -70mm, -65mm, -60mm, -55mm, -50mm, -46mm, etc. For example, f04 is -57.79mm.

[0142] The focal length of the fifth lens group A05 is f05, 94mm≤f05≤142mm. f05 can be set to 94mm, 100mm, 105mm, 110mm, 115mm, 118mm, 120mm, 125mm, 130mm, 135mm, 140mm, 142mm, etc. For example, f05 is 117.80mm.

[0143] Of course, in other embodiments of this application, the focal lengths of the first lens group A01 to the fifth lens group A05 can be set to other values, as long as the focal lengths of each lens group are within the corresponding range. This application does not impose any restrictions on this.

[0144] In some embodiments, in order to maintain a stable magnification and reduce distortion throughout the entire depth of field, the projection lens 100 adopts a double telecentric structure with an object-side telecentricity of less than 3 mrad and an image-side telecentricity of less than 1 mrad.

[0145] In some embodiments, to accommodate the process requirements of photolithographic reduction projection, the magnification of the projection lens 100 is 0.15 to 0.25, for example, 0.2.

[0146] In some embodiments, in order to provide sufficient exposure area to meet the photolithography requirements of large-area substrates, the image size of the projection lens 100 is 18mm to 22mm, for example, the image size is 22mm.

[0147] In some embodiments, to provide sufficient object-side and image-side mounting space and reduce interference from optical elements on the mask and wafer, the object-side working distance of the projection objective 100 is 60 mm to 80 mm, and the image-side working distance is 20 mm to 30 mm. A larger object-side working distance provides ample space for mask loading and alignment, while a larger image-side working distance helps reduce the impact of contaminants near the image plane on image quality.

[0148] In some embodiments, in order to control the incident angle of light on each lens surface, reduce the lens processing accuracy requirements and assembly sensitivity, the incident angle of light on each lens of the projection objective 100 is less than 45 degrees, for example, between 30 and 45 degrees. Controlling the incident angle makes the propagation of light on each lens surface smoother, reduces reflection loss and polarization effects caused by excessive incident angles, and improves the yield of lens processing and assembly.

[0149] In some embodiments, to reduce the difficulty of lens processing and manufacturing costs, the maximum lens diameter of the projection lens 100 is 100mm to 120mm. A smaller maximum diameter reduces the processing difficulty and material cost of a single lens, while also facilitating the compact design of the optical system.

[0150] In some embodiments, to improve the heat resistance and optical stability of the projection lens 100 under high-power lithography conditions, the first lens 1 and the second fifth lens 25 are made of fused silica material. Fused silica has excellent ultraviolet transmittance and an extremely low coefficient of thermal expansion, which can ensure the imaging stability of the projection lens 100 under long-term high-power exposure conditions.

[0151] The following provides data for a specific embodiment of the projection lens 100. Table 1 shows the optical parameters of each lens in the projection lens 100 of this embodiment, and Table 2 shows the focal length parameters of each lens group in this embodiment.

[0152]

[0153] Table 1

[0154] Table 2 See Figure 2 , Figure 2 This is a field curvature and distortion diagram of the projection lens 100 in this embodiment. As can be seen from the diagram, the field curvature and distortion of the projection lens 100 have been effectively corrected and controlled, ensuring the uniformity and consistency of the lithographic imaging.

[0155] See Figure 3 , Figure 3 This is an aberration curve of the projection lens 100 in this embodiment. As can be seen from the figure, the aberrations of each wavelength of light under different fields of view are controlled within a very small range, indicating that the projection lens 100 of this application has excellent imaging quality and high resolution.

[0156] The second aspect of this application provides a projection device. The projection device includes the projection lens 100 provided in the first aspect of this application. Specifically, the projection device can be an i-line lithography projection device, suitable for lithography processes in fields such as semiconductor chip manufacturing, semiconductor packaging lithography, flat panel display and Micro LED manufacturing, and MEMS manufacturing. The specific structure of the projection lens 100 in the projection device is as described in the above embodiments. Since this projection device adopts all the technical solutions of all the above embodiments, it at least has all the beneficial effects brought about by the technical solutions of the above embodiments, and will not be described in detail here.

[0157] It should be noted that the terms "first," "second," and "third" in this application are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0158] The above description is only a part of the embodiments of this application and does not limit the scope of protection of this application. Any equivalent device or equivalent process transformation made based on the content of this application specification and drawings, or direct or indirect application in other related technical fields, are similarly included in the patent protection scope of this application.

Claims

1. A projection lens, characterized in that, The projection lens has an object side and an image side that are correspondingly arranged along the optical axis. The projection lens includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens, a tenth lens, an eleventh lens, a twelfth lens, a thirteenth lens, a fourteenth lens, a fifteenth lens, a sixteenth lens, a seventeenth lens, an eighteenth lens, a nineteenth lens, a twentieth lens, a twenty-first lens, a twenty-second lens, a twenty-third lens, a twenty-fourth lens, and a twenty-fifth lens, arranged sequentially from the object side to the image side. The total length of the object-image conjugate distance of the projection lens is L, where L≤700mm; The numerical aperture of the projection lens is NA, where 0.32 ≤ NA ≤ 0.

35.

2. The projection lens as described in claim 1, characterized in that, The refractive index of the first lens is n1, where 1.44 ≤ n1 ≤ 1.48; The refractive index of the second lens is n2, where 1.57 ≤ n2 ≤ 1.63; The refractive index of the third lens is n3, where 1.57 ≤ n3 ≤ 1.63; The refractive index of the fourth lens is n4, where 1.47 ≤ n4 ≤ 1.53; The refractive index of the fifth lens is n5, where 1.47 ≤ n5 ≤ 1.53; The refractive index of the sixth lens is n6, where 1.59 ≤ n6 ≤ 1.65; The refractive index of the seventh lens is n7, where 1.56 ≤ n7 ≤ 1.62; The refractive index of the eighth lens is n8, where 1.59 ≤ n8 ≤ 1.65; The refractive index of the ninth lens is n9, where 1.49 ≤ n9 ≤ 1.55; The refractive index of the tenth lens is n10, where 1.52 ≤ n10 ≤ 1.58; The refractive index of the eleventh lens is n11, where 1.50 ≤ n11 ≤ 1.56; The refractive index of the twelfth lens is n12, where 1.47 ≤ n12 ≤ 1.53; The refractive index of the thirteenth lens is n13, where 1.47 ≤ n13 ≤ 1.53; The refractive index of the fourteenth lens is n14, where 1.47 ≤ n14 ≤ 1.53; The refractive index of the fifteenth lens is n15, where 1.47 ≤ n15 ≤ 1.53; The refractive index of the sixteenth lens is n16, where 1.47 ≤ n16 ≤ 1.53; The refractive index of the seventeenth lens is n17, where 1.52 ≤ n17 ≤ 1.58; The refractive index of the eighteenth lens is n18, where 1.59 ≤ n18 ≤ 1.65; The refractive index of the nineteenth lens is n19, where 1.56 ≤ n19 ≤ 1.62; The refractive index of the twentieth lens is n20, where 1.47 ≤ n20 ≤ 1.53; The refractive index of the 21st lens is n21, where 1.52 ≤ n21 ≤ 1.58; The refractive index of the 22nd lens is n22, where 1.59 ≤ n22 ≤ 1.65; The refractive index of the 23rd lens is n23, where 1.47 ≤ n23 ≤ 1.53; The refractive index of the 24th lens is n24, where 1.56 ≤ n24 ≤ 1.62; The refractive index of the 25th lens is n25, where 1.44 ≤ n25 ≤ 1.

48.

3. The projection lens as described in claim 1, characterized in that, The dispersion coefficient of the first lens is v1, 65≤v1≤71; The dispersion coefficient of the second lens is v2, 34≤v2≤44; The dispersion coefficient of the third lens is v3, 56≤v3≤66; The dispersion coefficient of the fourth lens is v4, 76≤v4≤86; The dispersion coefficient of the fifth lens is v5, 31≤v5≤41; The dispersion coefficient of the sixth lens is v6, 56≤v6≤66; The dispersion coefficient of the seventh lens is v7, 76≤v7≤86; The dispersion coefficient of the eighth lens is v8, 31≤v8≤41; The dispersion coefficient of the ninth lens is v9, 59≤v9≤69; The dispersion coefficient of the tenth lens is v10, 41≤v10≤51; The dispersion coefficient of the eleventh lens is v11, 44≤v11≤54; The dispersion coefficient of the twelfth lens is v12, 76≤v12≤86; The dispersion coefficient of the thirteenth lens is v13, 76≤v13≤86; The dispersion coefficient of the fourteenth lens is v14, 76≤v14≤86; The dispersion coefficient of the fifteenth lens is v15, 76≤v15≤86; The dispersion coefficient of the sixteenth lens is v16, 41≤v16≤51; The dispersion coefficient of the seventeenth lens is v17, 76≤v17≤86; The dispersion coefficient of the eighteenth lens is v18, 36≤v18≤46; The dispersion coefficient of the nineteenth lens is v19, 76≤v19≤86; The dispersion coefficient of the twentieth lens is v20, 41≤v20≤51; The dispersion coefficient of the 21st lens is v21, 31≤v21≤41; The dispersion coefficient of the 22nd lens is v22, 31≤v22≤41; The dispersion coefficient of the 23rd lens is v23, 56≤v23≤66; The dispersion coefficient of the 24th lens is v24, 76≤v24≤86; The dispersion coefficient of the 25th lens is v25, 65≤v25≤71.

4. The projection lens as described in claim 1, characterized in that, The first lens and the twenty-fifth lens are planar lenses; The focal length of the second lens is f2, where 260mm ≤ f2 ≤ 350mm; The focal length of the third lens is f3, 140mm≤f3≤185mm; The focal length of the fourth lens is f4, -550mm≤f4≤-410mm; The focal length of the fifth lens is f5, -90mm≤f5≤-66mm; The focal length of the sixth lens is f6, -230mm≤f6≤-170mm; The focal length of the seventh lens is f7, -1230mm≤f7≤-1020mm; The focal length of the eighth lens is f8, 175mm≤f8≤230mm; The focal length of the ninth lens is f9, 130mm≤f9≤175mm; The focal length of the tenth lens is f10, -225mm≤f10≤-165mm; The focal length of the eleventh lens is f11, -95mm≤f11≤-70mm; The focal length of the twelfth lens is f12, -340mm≤f12≤-270mm; The focal length of the thirteenth lens is f13, 140mm≤f13≤178mm; The focal length of the fourteenth lens is f14, 155mm≤f14≤195mm; The focal length of the fifteenth lens is f15, where 155mm ≤ f15 ≤ 195mm; The focal length of the sixteenth lens is f16, -130mm≤f16≤-105mm; The focal length of the seventeenth lens is f17, 150mm≤f17≤195mm; The focal length of the eighteenth lens is f18, -130mm≤f18≤-100mm; The focal length of the nineteenth lens is f19, 95mm≤f19≤120mm; The focal length of the twentieth lens is f20, -160mm≤f20≤-120mm; The focal length of the 21st lens is f21, 155mm≤f21≤200mm; The focal length of the 22nd lens is f22, 140mm≤f22≤185mm; The focal length of the 23rd lens is f23, -215mm≤f23≤-160mm; The focal length of the 24th lens is f24, and 160mm≤f24≤215mm.

5. The projection lens as described in claim 1, characterized in that, All twenty-five lenses, from the first lens to the twenty-fifth lens, are spherical lenses.

6. The projection lens as described in claim 5, characterized in that, The second lens has an object-side radius of R21 and an image-side radius of R22, where 305mm ≤ R21 ≤ 360mm and -490mm ≤ R22 ≤ -410mm. The object-side radius of the third lens is R31, the image-side radius is R32, 85mm≤R31≤100mm, and 860mm≤R32≤1030mm. The fourth lens has an object-side radius of R41 and an image-side radius of R42, where 88mm ≤ R41 ≤ 105mm and 60mm ≤ R42 ≤ 72mm. The object-side radius of the fifth lens is R51, the image-side radius is R52, -480mm≤R51≤-400mm, and 54mm≤R52≤65mm; The object-side radius of the sixth lens is R61, the image-side radius is R62, 230mm≤R61≤275mm, and 73mm≤R62≤87mm. The seventh lens has an object-side radius of R71 and an image-side radius of R72, where -63mm≤R71≤-53mm and -77mm≤R72≤-64mm. The object-side radius of the eighth lens is R81, the image-side radius is R82, 1230mm≤R81≤1490mm, -163mm≤R82≤-135mm; The object-side radius of the ninth lens is R91, the image-side radius is R92, 113mm≤R91≤136mm, and -580mm≤R92≤-480mm; The object-side radius of the tenth lens is R101, the image-side radius is R102, 96mm≤R101≤115mm, and 44mm≤R102≤53mm. The object-side radius of the eleventh lens is R111, the image-side radius is R112, -99mm≤R111≤-82mm, and 96mm≤R112≤116mm. The object-side radius of the twelfth lens is R121, and the image-side radius is R122, where 885mm≤R121≤1070mm and 130mm≤R122≤158mm. The object-side radius of the thirteenth lens is R131, the image-side radius is R132, 161mm≤R131≤194mm, and -158mm≤R132≤-130mm; The object-side radius of the fourteenth lens is R141, the image-side radius is R142, 168mm≤R141≤203mm, -182mm≤R142≤-150mm; The object-side radius of the fifteenth lens is R151, the image-side radius is R152, 136mm≤R151≤165mm, and -232mm≤R152≤-192mm. The object-side radius of the sixteenth lens is R161, the image-side radius is R162, -350mm≤R161≤-290mm, 79mm≤R162≤96mm; The object-side radius of the seventeenth lens is R171, the image-side radius is R172, 97mm≤R171≤117mm, and -510mm≤R172≤-420mm. The object-side radius of the eighteenth lens is R181, the image-side radius is R182, -203mm≤R181≤-168mm, and 108mm≤R182≤130mm; The object-side radius of the nineteenth lens is R191, the image-side radius is R192, 157mm≤R191≤190mm, and -85mm≤R192≤-70mm. The object-side radius of the twentieth lens is R201, and the image-side radius is R202. -80mm≤R201≤-67mm, -940mm≤R202≤-770mm; The object-side radius of the 21st lens is R211, and the image-side radius is R212. 145mm≤R211≤175mm, -460mm≤R212≤-380mm; The object-side radius of the 22nd lens is R221, and the image-side radius is R222. 95mm≤R221≤114mm, 2450mm≤R222≤2960mm; The object-side radius of the 23rd lens is R231, the image-side radius is R232, -1940mm≤R231≤-1590mm, and 111mm≤R232≤134mm; The object-side radius of the 24th lens is R241, and the image-side radius is R242. 75mm≤R241≤90mm, 535mm≤R242≤650mm.

7. The projection lens as described in claim 1, characterized in that, The projection lens also includes an aperture stop, which is disposed between the fourteenth lens and the fifteenth lens; the distance between the aperture stop and the image side of the fourteenth lens is d, where 1mm≤d≤3mm.

8. The projection lens as described in claim 1, characterized in that, Along the optical axis from the object side to the image side, the projection objective lens comprises, in sequence: The first lens group, including the first lens to the fourth lens, has positive optical power; The second lens group, including the fifth lens and the sixth lens, has negative optical power; The third lens group, including the seventh to the ninth lenses, has positive optical power; The fourth lens group, including the tenth lens and the eleventh lens, has negative optical power; The fifth lens group, including the twelfth to the twenty-fifth lenses and the aperture stop, has positive optical power; Among them, the optical power of the five lens groups is distributed along the optical axis from the object side to the image side in the order of positive, negative, positive, negative, positive.

9. The projection lens as described in claim 8, characterized in that, The focal length of the first lens group is f01, 95mm≤f01≤143mm; The focal length of the second lens group is f02, -60mm≤f02≤-40mm; The focal length of the third lens group is f03, 68mm≤f03≤102mm; The focal length of the fourth lens group is f04, -70mm≤f04≤-46mm; The focal length of the fifth lens group is f05, 94mm≤f05≤142mm.

10. A projection device, characterized in that, Includes the projection lens as described in any one of claims 1 to 9.

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