High-density micro-reflection compound-eye array deflection driving method and device

Abstract

The application discloses a high-density micro-reflection compound eye array deflection driving method and device, belongs to the technical field of micro-optical array driving, and comprises the following steps: generating a target deflection angle distribution according to array structure parameters, an incident light direction and a target outgoing direction; dynamically forming a driving partition according to a spatial adjacency relationship and a difference between adjacent target deflection angles, determining a partition public deflection component and a unit deflection residual error; converting the two into a partition public driving pair and a unit differential driving correction amount respectively, and performing corresponding driving side superposition; maintaining the partition public driving, writing and maintaining the differential driving correction amount into each unit double-maintenance node through row and column gating; and correcting the differential driving correction amount according to an actual deflection angle and an adjacency coupling coefficient. The application can reduce high-density array independent driving lines and inhibit deflection errors caused by adjacent unit coupling by combining partition public driving, unit differential driving and adjacency coupling compensation.

Description

Technical Field

[0001] This invention relates to the field of micro-optical array driving technology, and in particular to a method and apparatus for driving the yaw of a high-density micro-reflective compound eye array. Background Technology

[0002] Micro-reflective compound eye arrays are composed of a large number of microscale optical units with deflectable reflective surfaces integrated in an array configuration. By changing the spatial orientation of the micro-reflective surfaces at different array positions, incident light can be reflected in a predetermined direction. This can be used in optical systems such as beam scanning, spatial light modulation, optical switching, and miniature imaging. As the size of the array units and the array spacing continue to decrease, the number of micro-reflective compound eye units that can be integrated within the array continues to increase. Correspondingly, it is necessary to control the deflection angles of a large number of micro-reflective compound eye units to correspond to the target optical path under limited chip area and driving resources, while maintaining the stability of the deflection state of each unit.

[0003] Existing micromirror array driving methods typically employ independent driving, grouped common driving, or row-column addressing driving. Independent driving assigns a dedicated driving circuit to each micromirror unit, allowing direct adjustment of the unit's state; however, the number of circuits increases with array size. Grouped driving allows multiple spatially adjacent reflective units to share some driving circuitry or a common bias. Row-column addressing uses row gating signals and column driving signals to perform time-division gating of target units in the array, and maintains the written driving state after gating ends through storage capacitors or hold nodes. Some schemes also calculate the driving amount based on the calibration relationship between the driving voltage and the reflector tilt angle, or detect the actual tilt position of the reflector and perform closed-loop adjustments based on the deviation between the target angle and the actual angle.

[0004] For high-density micro-reflection compound eye arrays, the target yaw angle required at different array positions varies spatially with the target reflection direction. When using pre-fixed group boundaries, significant differences in target yaw angles may occur within the same group, making it difficult for the common drive to simultaneously adapt to all elements. If further reliance is placed on individual element-by-element drive, the effect of group drive in reducing the number of lines and ports will be weakened. Furthermore, if there is no clear superposition relationship between the common drive quantity, the individual element drive quantity, and the hold state, the element yaw quantity may synchronously shift after a change in the common state. In addition, when the array spacing decreases, the structural coupling or drive coupling between adjacent micro-reflection compound eye elements has a more significant impact on the actual yaw angle. Conventional feedback based solely on the overall error between the target angle and the actual angle is insufficient to distinguish between the target element's own drive error and the coupling yaw error introduced by adjacent elements, thus limiting the yaw control accuracy of high-density arrays. Summary of the Invention

[0005] To address the aforementioned issues, this invention provides a method and apparatus for driving the sway of a high-density micro-reflection compound eye array. By combining partitioned common driving, unit differential driving, and adjacent coupling compensation, it can reduce the number of independent driving lines in the high-density array while suppressing the sway error caused by the coupling of adjacent units.

[0006] The above objectives can be achieved through the following approach: A method for driving the yaw of a high-density micro-reflection compound eye array includes: acquiring the array structure parameters, incident light direction, and target emission direction of the micro-reflection compound eye array; determining the target yaw angle of each micro-reflection compound eye unit based on the array structure parameters, incident light direction, and target emission direction, generating a target yaw angle distribution; establishing spatial adjacency relationships based on the array positions of each micro-reflection compound eye unit, calculating the target yaw angle difference between spatially adjacent micro-reflection compound eye units, dividing the target yaw angle distribution into continuous regions based on the spatial adjacency relationships and the target yaw angle differences, generating a set of driving partitions; determining the partition common yaw component of each driving partition in the set of driving partitions, generating a unit yaw residual based on the difference between the target yaw angle of each micro-reflection compound eye unit and the partition common yaw component of its driving partition; and converting the partition common yaw component into a corresponding partition common driving quantity based on a pre-established driving calibration relationship between the yaw angle and the driving quantity, and then... The unit yaw residual is converted into the corresponding unit differential driving quantity; the corresponding partition common driving quantity is applied to each driving partition, and a gating sequence is generated according to the row and column positions of each micro-reflection compound eye unit. The corresponding micro-reflection compound eye unit is selected according to the gating sequence and written into the unit differential driving quantity, so that the selected micro-reflection compound eye unit forms an effective driving state jointly determined by the partition common driving quantity and the unit differential driving quantity; after the gating of the current micro-reflection compound eye unit ends, the unit differential driving quantity is maintained, so that each micro-reflection compound eye unit forms a yaw state that matches the corresponding target yaw angle under the continuous action of the partition common driving quantity; the actual yaw angle of each micro-reflection compound eye unit is obtained, the yaw angle error is determined according to the actual yaw angle and the target yaw angle, and the adjacency coupling component is determined by combining the adjacency coupling relationship between spatially adjacent micro-reflection compound eye units. The corresponding unit differential driving quantity is corrected according to the adjacency coupling component to generate the target reflection state of the micro-reflection compound eye array.

[0007] Based on the same inventive concept, this invention also provides a high-density micro-reflection compound eye array yaw driving device. The device includes: a target yaw angle generation module, used to acquire the array structure parameters, incident light direction, and target emission direction of the micro-reflection compound eye array; determine the target yaw angle of each micro-reflection compound eye unit based on the array structure parameters, incident light direction, and target emission direction; and generate a target yaw angle distribution; a dynamic partitioning module, used to establish spatial adjacency relationships based on the array positions of each micro-reflection compound eye unit; calculate the target yaw angle difference between spatially adjacent micro-reflection compound eye units; divide the target yaw angle distribution into continuous regions based on the spatial adjacency relationships and the target yaw angle differences; and generate a driving partition set; a yaw component decomposition module, used to determine the partition common yaw component of each driving partition in the driving partition set; and generate a unit yaw residual based on the difference between the target yaw angle of each micro-reflection compound eye unit and the partition common yaw component of its driving partition; and a driving quantity generation module, used to decompose the partition common yaw component according to a pre-established driving calibration relationship between the yaw angle and the driving quantity. The quantity is converted into the corresponding partition common driving quantity, and the unit yaw residual is converted into the corresponding unit differential driving quantity; the gating driving module is used to apply the corresponding partition common driving quantity to each driving partition, generate a gating timing sequence according to the row and column positions of each micro-reflection compound eye unit, select the corresponding micro-reflection compound eye unit according to the gating timing sequence and write the unit differential driving quantity, so that the selected micro-reflection compound eye unit forms an effective driving state jointly determined by the partition common driving quantity and the unit differential driving quantity; the driving holding module is used to end the current micro-reflection compound eye unit. After the eye unit is selected, the differential driving amount of the unit is maintained, so that each micro-reflection compound eye unit forms a deflection state that matches the corresponding target deflection angle under the continuous action of the partition common driving amount; the adjacency coupling compensation module is used to obtain the actual deflection angle of each micro-reflection compound eye unit, determine the deflection angle error according to the actual deflection angle and the target deflection angle, and determine the adjacency coupling component by combining the adjacency coupling relationship between spatially adjacent micro-reflection compound eye units, and correct the corresponding unit differential driving amount according to the adjacency coupling component to generate the target reflection state of the micro-reflection compound eye array.

[0008] Compared with the prior art, the present invention has the following advantages: This invention forms driving partitions based on spatial adjacency relationships and target yaw angle differences, and decomposes the target yaw angle into a common yaw component of the partitions and a unit yaw residual, so that the common drive can adapt to the spatial distribution of the target yaw angle and reduce the adjustment range required for independent unit drive.

[0009] This invention employs a combination of partitioned common drive and unit differential drive, and uses row and column gating to write and maintain the unit differential drive quantity, enabling multiple micro-reflective compound eye units to share common drive resources while maintaining unit-level yaw adjustment capability, thus reducing the number of independent drive lines required for high-density arrays.

[0010] This invention utilizes the adjacency coupling relationship between spatially adjacent micro-reflective compound eye units to determine the adjacency coupling component, and corrects the differential driving amount of the unit accordingly. This can compensate for the coupling sway caused by adjacent units and reduce the sway error caused by adjacency coupling. Attached Figure Description

[0011] Figure 1 This is a schematic flowchart of a high-density micro-reflection compound eye array yaw driving method according to an embodiment of the present invention.

[0012] Figure 2 This is a schematic diagram illustrating the determination of the target yaw angle according to an embodiment of the present invention.

[0013] Figure 3 This is a schematic diagram of spatial adjacency relationships and driving partition generation according to an embodiment of the present invention.

[0014] Figure 4 This is a schematic diagram illustrating the generation of the partitioned common yaw component and the unit yaw residual in an embodiment of the present invention.

[0015] Figure 5 This is a schematic diagram of drive calibration and common differential drive quantity generation according to an embodiment of the present invention.

[0016] Figure 6 This is a schematic diagram illustrating row and column gating, differential drive writing, and holding in an embodiment of the present invention.

[0017] Figure 7 This is a schematic diagram of adjacent coupling compensation and target reflection state generation according to an embodiment of the present invention.

[0018] Figure 8 This is a schematic diagram of the structure of a high-density micro-reflection compound eye array deflection driving device according to an embodiment of the present invention. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] Reference Figure 1One embodiment of the present invention proposes a yaw driving method for a high-density micro-reflection compound eye array. By combining partitioned common driving, unit differential driving and adjacent coupling compensation, it can suppress the yaw error caused by the coupling of adjacent units while reducing the independent driving lines of the high-density array.

[0021] The method described in this embodiment specifically includes: S1. Obtain the array structure parameters, incident light direction and target emission direction of the micro-reflection compound eye array, determine the target deflection angle of each micro-reflection compound eye unit according to the array structure parameters, incident light direction and target emission direction, and generate the target deflection angle distribution; In one embodiment of the present invention, step S1 includes the following steps: Establish a unified array coordinate system corresponding to the micro-reflection compound eye array; The array position, initial reflective surface normal, and yaw axis direction of each micro-reflective compound eye unit in the unified array coordinate system are obtained. The array position, the initial reflective surface normal, and the yaw axis direction are correlated to generate array structure parameters. Obtain the incident orientation parameters of the incident light in the unified array coordinate system, and determine the direction of the incident light based on the incident orientation parameters; Obtain the target azimuth parameters corresponding to the reflected light from the target, and determine the target emission direction based on the target azimuth parameters; The incident light direction and the target emission direction are spatially correlated with the array structure parameters, and the target reflective surface normal corresponding to each micro-reflective compound eye unit is determined according to the incident light direction and the target emission direction. The candidate deflection angle of each micro-reflection compound eye unit around the corresponding deflection axis is determined based on the initial reflective surface normal, the target reflective surface normal, and the deflection axis direction. The candidate yaw angles are screened based on the achievable yaw range of each micro-reflection compound eye unit to determine the target yaw angle of each micro-reflection compound eye unit, and the target yaw angles are arranged according to the array position to generate a target yaw angle distribution.

[0022] Specifically, such as Figure 2 As shown, establish a right-handed rectangular coordinate system. As a unified array coordinate system, the reference mounting plane of the micro-reflection compound eye array is set as Plane, with the array column direction as The positive axis direction, with the array row direction as the reference. The positive axis direction is defined as the direction perpendicular to the reference mounting plane and towards the array workspace. Positive direction of the axis. For those containing OK, The array of microreflective compound eye units will be located in the first... line, number The microreflection compound eye unit of the column is denoted as ,in , .

[0023] The array position of each microreflection compound eye unit is denoted as... The initial normal of the reflecting surface is denoted as The direction of the yaw axis is denoted as The array position is obtained from the layout parameters of the microreflective compound eye array, the array row and column spacing, and the packaging positioning reference. The initial reflective surface normal is obtained from the optical calibration results after the array is assembled and adjusted. The yaw axis direction is obtained from the drive structure design parameters and assembly direction of the microreflective compound eye unit. The unit identifier, array position, initial reflective surface normal, yaw axis direction, and achievable yaw range are associated to form a set of array structure parameters. ; In the formula, Represents the set of array structure parameters; and These represent the microreflection compound eye units. The minimum and maximum yaw angles that can be stably reached along the specified positive and negative yaw directions, in degrees, are determined by the array's factory static yaw scan results, the mechanical limits of the drive mechanism, and the allowable drive range.

[0024] Incident azimuth parameters include incident azimuth angle and incident elevation angle The normalized incident light direction is formed based on the incident azimuth parameters. : ; In the formula, This represents the unit direction vector pointing towards the microreflective compound eye array along the actual direction of light propagation.

[0025] Target azimuth parameters include target azimuth angle. and target pitch angle Convert the target azimuth parameters into the target launch direction. : ; In the formula, This represents the unit direction vector pointing from the microreflective compound eye array towards the direction of target reflection.

[0026] Determining the microreflection compound eye unit based on the geometric relationship of specular reflection Corresponding target reflector normal : ; In the formula, This indicates the target reflecting surface normal that needs to be formed to reflect incident light toward the target's exit direction. This represents the vector L2 norm. When different array positions have different local incident directions or local target directions, according to... The corresponding local directions are determined based on the light source position and the target position, and then the same reflection geometry is used for calculation. .

[0027] Project the initial reflector normal and the target reflector normal onto a plane perpendicular to the yaw axis: ; ; In the formula, Represents the dot product of vectors; and These represent the normalized projection directions of the two reflecting surfaces' normals onto the plane perpendicular to the yaw axis.

[0028] The candidate yaw angle is determined based on the signed angle between the two projection directions: ; In the formula, This represents the candidate yaw angle corresponding to the transition from the initial reflector attitude to the target reflector attitude around the corresponding yaw axis, and its sign is determined according to the right-hand rule of the yaw axis direction.

[0029] Perform a reachability check on the candidate yaw angles. When the following conditions are met: ; Sure: ; In the formula, Represents the microreflection compound eye unit The corresponding target yaw angle. If the candidate yaw angle exceeds the reachable yaw range, the corresponding unit is marked as unreachable under the current target emission direction, and the target yaw angle is re-determined after the optical system is reconfigured to allow the target emission direction.

[0030] Arrange all target deflection angles according to their array row and column positions to form a target deflection angle distribution. : ; The target yaw angle distribution maintains a one-to-one correspondence between the target yaw angle and the array spatial position, and serves as the input for step S2 to establish spatial adjacency relationships and calculate the target yaw angle differences.

[0031] For example, in a microreflective compound eye array The representative area is explained below, with both the array row spacing and column spacing being [missing information]. The center of each cell is located on the array reference mounting plane, therefore: ;For example: ; ; ; The current representative area adopts the approach along Single-axis yaw structure with shaft setting: The calibration and adjustment yielded 16 microreflection compound eye units relative to... Initial normal deflection angle distribution of the axis: ;set up This indicates the corresponding initial deflection angle, and the corresponding initial normal to the reflecting surface is: ;For example: ; ; ; ; Static-driven scanning determined that the achievable yaw range of the current 16 micro-reflection compound eye units is... Define the first [unit] in the current region. Line 1 Record of array structure parameters corresponding to the micro-reflective compound eye unit: Representative records include: ; ; ; The remaining 12 microreflection compound eye units are backfilled using the same data structure to form: The current incident azimuth angle is taken as follows: The incident elevation angle is taken as : ; Target azimuth angle Target pitch angle : ;by For example: The normal of the target reflecting surface relative to... The deflection angle of the axis is ,therefore: ;because: ;therefore: Similarly, the remaining 15 target deflection angles are obtained and backfilled according to the array positions to form: This yields the target yaw angle distribution, which is then used as the input for step S2.

[0032] S2. Establish spatial adjacency relationships based on the array positions of each micro-reflection compound eye unit, calculate the target deflection angle difference between spatially adjacent micro-reflection compound eye units, and divide the target deflection angle distribution into continuous regions based on the spatial adjacency relationships and the target deflection angle differences to generate a driving partition set. In one embodiment of the present invention, step S2 includes the following steps: Based on the array position, spatially adjacent micro-reflection compound eye units are determined, and spatial adjacency relationships between each micro-reflection compound eye unit are established; For each group of adjacent micro-reflection compound eye units in the spatial adjacency relationship, calculate the angle difference between the corresponding target deflection angles to generate an adjacency angle difference distribution; Spatial adjacency relationships in the adjacency angle difference distribution where the angle difference is not greater than a preset adjacency angle difference threshold are defined as partition connectivity relationships; Based on the partition connectivity relationship, the micro-reflection compound eye unit is continuously expanded to generate candidate driving partitions; Calculate the distribution span of the target yaw angle within each candidate drive partition. When the distribution span exceeds the preset partition angle difference range, determine the segmentation position according to the adjacent angle difference distribution within the corresponding candidate drive partition, and segment the corresponding candidate drive partition according to the segmentation position. Candidate driving partitions whose distribution span after segmentation meets the preset partition angle difference range are determined as driving partitions, and a set of driving partitions is generated.

[0033] Specifically, such as Figure 3 As shown, the array structure parameter set formed in step S1 Read array position Spatially adjacent cells are determined according to the row and column positions of the array. For a regular rectangular array, the micro-reflective compound eye cells... and satisfy: ; Then the two are identified as spatially adjacent units.

[0034] All spatially adjacent units are aggregated to form a set of spatial adjacency relationships: ; In the formula, Represents a set of spatial adjacency relationships.

[0035] For any spatial adjacency relationship, read the corresponding target yaw angle and calculate the angle difference: ; In the formula, This represents the target deflection angle difference between two spatially adjacent microreflective compound eye units.

[0036] Associate the spatial adjacency unit identifier with the corresponding target yaw angle difference to form an adjacency angle difference record: ; All adjacent angle difference records constitute the adjacent angle difference distribution: ; Set the adjacent angle difference threshold. Its value is determined based on the range of adjacent angle differences that can be covered when the common drive and the unit differential drive work together, as well as the array drive resolution. When the following conditions are met: ; The corresponding spatial adjacency relationship is determined as the partition connectivity relationship, and all partition connectivity relationships consist of: ; in accordance with By performing continuous region expansion, micro-reflective compound eye units that can be reached from each other through one or more partition connectivity relationships are grouped into the same candidate driving partition, forming: ; In the formula, Indicates the first Candidate drive partitions This indicates the number of candidate driver partitions.

[0037] Further calculation of the first Target yaw angle distribution span within each candidate driver partition: ; In the formula, This represents the difference between the maximum and minimum target yaw angles within the candidate drive partition.

[0038] Set the preset partition angle difference range Its value is determined based on the target angle range that the common yaw component of the same partition can cover and the allowable correction range of the unit differential drive. No more than When the corresponding candidate driver partition is directly retained; when Exceed At this time, from the corresponding adjacent angle difference records, select the adjacency relationship that can form a spatial continuous dividing boundary as the candidate dividing position, disconnect the candidate dividing positions respectively and calculate the distribution span of the resulting continuous sub-regions, so that each continuous sub-region can satisfy Furthermore, the continuous dividing boundary with the largest sub-region distribution span is determined as the dividing position.

[0039] After completing the continuous region segmentation, the final set of driving partitions is formed: ; In the formula, Indicates the first One drive partition This indicates the final number of drive partitions.

[0040] For example, the 16 microreflective compound eye units obtained in step S1 are used. and satisfy: ;therefore and They form a spatial adjacency relationship. and satisfy: ;therefore and They form a spatial adjacency relationship. and satisfy: ;therefore and They do not constitute a direct spatial adjacency relationship. Traversing the 16 microreflection compound eye units in the same manner yields 24 sets of spatial adjacency relationships, forming: (M 1,1 M 1,2 ),(M 1,2 M 1,3 ),(M 1,3 M 1,4 ),(M 2,1 M 2,2 ),(M 2,2 M 2,3 ),(M 2,3 M 2,4 ),(M 3,1 M 3,2 ),(M 3,2 M 3,3 ),(M 3,3 M 3,4 ),(M 4,1 M 4,2 ),(M 4,2 M 4,3 ),(M 4,3 M 4,4 ),(M 1,1 M 2,1 ),(M 1,2 M 2,2 ),(M 1,3 M 2,3 ),(M 1,4 M 2,4 ),(M 2,1 M 3,1 ),(M 2,2 M 3,2 ),(M2,3 M 3,3 ),(M 2,4 M 3,4 ),(M 3,1 M 4,1 ),(M 3,2 M 4,2 ),(M 3,3 M 4,3 ),(M 3,4 M 4,4 The representative target yaw angle difference is: ; ; Similarly, calculate all 24 sets of spatial adjacency relationships and backfill the adjacency angle difference records to obtain: (M 1,1 M 1,2 ,0.15°),(M 1,2 M 1,3 ,0.15°),(M 1,3 M 1,4 ,0.15°),(M 2,1 M 2,2 ,0.15°),(M 2,2 M 2,3 ,0.15°),(M 2,3 M 2,4 ,0.15°),(M 3,1 M 3,2 ,0.15°),(M 3,2 M 3,3 ,0.15°),(M 3,3 M 3,4 ,0.15°),(M 4,1 M 4,2 ,0.15°),(M 4,2 M 4,3 ,0.15°),(M 4,3 M 4,4 ,0.15°),(M 1,1 M 2,1 ,0.05°),(M 1,2 M 2,2 ,0.05°),(M 1,3 M 2,3 ,0.05°),(M 1,4 M 2,4 ,0.05°),(M 2,1 M 3,1 ,1.25°),(M 2,2 M 3,2 ,1.25°),(M 2,3 M 3,3,1.25°),(M 2,4 M 3,4 ,1.25°),(M 3,1 M 4,1 ,0.05°),(M 3,2 M 4,2 ,0.05°),(M 3,3 M 4,3 ,0.05°),(M 3,4 M 4,4 (0.05°); determined based on the current array driving experiment: The target yaw angle differences for the four sets of targets between rows 2 and 3 are all... Therefore, no partition connectivity is formed, and the remaining 20 sets of spatial adjacency relationships are retained, forming: (M 1,1 M 1,2 ),(M 1,2 M 1,3 ),(M 1,3 M 1,4 ),(M 2,1 M 2,2 ),(M 2,2 M 2,3 ),(M 2,3 M 2,4 ),(M 3,1 M 3,2 ),(M 3,2 M 3,3 ),(M 3,3 M 3,4 ),(M 4,1 M 4,2 ),(M 4,2 M 4,3 ),(M 4,3 M 4,4 ),(M 1,1 M 2,1 ),(M 1,2 M 2,2 ),(M 1,3 M 2,3 ),(M 1,4 M 2,4 ),(M 3,1 M 4,1 ),(M 3,2 M 4,2 ),(M 3,3 M 4,3 ),(M 3,4 M 4,4 ); after continuous region expansion, it forms: ; ; Set according to the allowable combination range of common yaw component and unit yaw residual: The target yaw angle distribution span of both candidate driving partitions is: The final driving partition is obtained by dividing the partition along the continuous boundary between columns 2 and 3. ; ; ; The target yaw angle distribution span of each drive partition is... Ultimately, the following is formed: The drive partition set proceeds to step S3.

[0041] S3. Determine the common yaw component of each driving partition in the driving partition set, and generate the unit yaw residual based on the difference between the target yaw angle of each micro-reflection compound eye unit and the common yaw component of the driving partition. In one embodiment of the present invention, step S3 includes the following steps: According to the aforementioned driving partition set, extract the target deflection angle corresponding to the micro-reflection compound eye unit in each driving partition, and generate a partition target deflection angle set corresponding to each driving partition. The common candidate angles are determined based on the angle distribution range of the target deflection angle set for each partition. Calculate the angular residual between each common candidate angle and each target deflection angle in the corresponding partition target deflection angle set, and aggregate the angular residuals to generate the residual characterization value corresponding to each common candidate angle; Based on the residual characterization value, determine the partition common yaw component corresponding to each driving partition from the common candidate angle; Calculate the signed angle difference between the target yaw angle of each micro-reflection compound eye unit and the common yaw component of the corresponding drive partition, and generate the unit yaw residual for each micro-reflection compound eye unit.

[0042] Specifically, such as Figure 4 As shown, the set of drive partitions formed in step S2 The target yaw angle within each drive partition is extracted from the target yaw angle results in step S1. The set of partition target skew angles corresponding to each drive partition is denoted as: ; Determine the corresponding minimum and maximum target yaw angles: ; ; In the interval The intervals are based on the common candidate angles. Form a common candidate angle set: ; In the formula, The adjustment interval is determined based on the angle that can be stably resolved by the static yaw calibration. Indicates the first The number of common candidate corners corresponding to each driver partition.

[0043] Calculate the signed angular residual between the common candidate angle and the target yaw angle: ; And perform squared aggregation on the angular residuals corresponding to the same common candidate angle: ; In the formula, Indicates the first In the first drive partition The residual characterization values ​​corresponding to the common candidate angles.

[0044] Determine the common candidate angle number with the smallest residual characterization value: ; The corresponding common candidate angle is determined as the partition common yaw component: ; Composition of common yaw components across all zones: ; For those belonging to the drive partition The micro-reflection compound eye unit was used to determine the unit yaw residual. ; The yaw residuals of all elements are formed by arranging them according to their array row and column positions: ; Set of common yaw components in the partition and the distribution of unit yaw residuals Proceed to step S4.

[0045] For example, the set of partition target yaw angles corresponding to the four drive partitions are as follows: ; ; ; Static yaw calibration can stably distinguish The angle changes, therefore: ;for : ;by For example: Similarly, we can obtain: ; ; ; ; ;therefore: ; Similarly, we can obtain: ; ; ;form: ;by For example, the corresponding unit yaw residual is: ; ; ; Similarly, all microreflection compound eye units are backfilled to form: .

[0046] S4. Based on the pre-established driving calibration relationship between the yaw angle and the driving quantity, the partition common yaw component is converted into the corresponding partition common driving quantity, and the unit yaw residual is converted into the corresponding unit differential driving quantity. In one embodiment of the present invention, step S4 includes the following steps: Different driving amounts are applied to the micro-reflection compound eye unit, and the actual yaw angle corresponding to each driving amount is collected. The driving calibration relationship between the yaw angle and the driving amount is established based on the correspondence between the driving amount and the actual yaw angle. Based on the driving calibration relationship, the common yaw component of each driving partition is converted into a first common driving component and a second common driving component to generate a common driving quantity of the partition. The residual yaw amplitude and residual yaw direction of the corresponding micro-reflection compound eye unit are determined based on the value and sign of the unit yaw residual. The first differential driving component and the second differential driving component are determined based on the driving calibration relationship, the residual yaw amplitude and the residual yaw direction, and the unit differential driving quantity is generated. The first common driving component is superimposed with the first differential driving component, and the second common driving component is superimposed with the second differential driving component to obtain the effective driving amount on both driving sides of the corresponding micro-reflection compound eye unit. The effective driving quantity is checked for driving range. When the effective driving quantity exceeds the allowable driving range, the corresponding partition common yaw component is adjusted, and the corresponding partition common driving quantity and the unit differential driving quantity are regenerated.

[0047] Specifically, such as Figure 5 As shown, different driving amounts are applied to the two driving sides of the micro-reflection compound eye unit, and the actual yaw angle after stabilization is collected. The first... One driver calibration record: ; The complete driver calibration record consists of: ; Based on the drive calibration data, establish the drive calibration relationship that maps the yaw angle to the drive components on both drive sides: ; When the yaw angle to be converted is located at an adjacent calibrated yaw angle and When interpolating between these intervals, set the interpolation ratio: ; The driving components corresponding to the two driving sides are determined based on adjacent calibration records.

[0048] The first The partition common skew component of each drive partition is converted to: ; Define the partition common drive: ; And form: ; The absolute value of the unit yaw residual is defined as the residual yaw amplitude. And determine the direction of residual yaw based on its sign. : ; ; Common reference drive quantity of both drive sides under zero yaw condition As a differential drive reference, the directional residual yaw angle is converted through the drive calibration relationship and relative to... Determine the first differential driving component and the second differential driving component ,form: ; The two differential driving components are arranged according to the array row and column positions respectively: ; ; The first-side effective driving quantity is generated according to the superposition relationship between the common driving and differential driving determined in step S4. and the effective driving volume on the second side and respectively form: ; ; The effective driving quantity needs to fall within the allowable driving range. When any effective driving quantity exceeds the allowable range, the partition common yaw component is adjusted within the corresponding common candidate angle range, and the unit yaw residual, partition common driving quantity, and unit differential driving quantity of the driving partition are recalculated until all effective driving quantities on both driving sides meet the allowable driving range.

[0049] For example, the common reference drive voltage for the two drive sides in the zero-yaw state during the current drive calibration is: Obtain representative drive calibration records: ; ; ; ; ; ; ;form: The specific representation of the driving calibration relationship corresponding to the current calibration interval is as follows: ;For example: Similarly, we can obtain: ; ; ; ;form: ;by For example, its unit yaw residual is ,therefore: ; ; lie in and The interpolation ratio between the calibration angles is: The corresponding first driving quantity is: The corresponding second driving quantity is: ;therefore The first differential driving component and the second differential driving component are respectively: ; Therefore, we can conclude that: ;for : ;therefore: Similarly, the four types of unit yaw residuals correspond to: ; ; ; Backfill according to array position: ; The common driving components of each driving partition are superimposed with the differential driving components of the corresponding micro-reflection compound eye unit.

[0050] by For example, it belongs to ,therefore: ; ;by For example: ; Similarly, the effective driving quantity backfilled on the first side of all microreflection compound eye units is: The effective driving quantity on the second side of all microreflective compound eye units is backfilled as follows: The permissible drive range is determined based on the driver's rated output range and the static yaw scan results as follows: Currently, all effective drive quantities are within the allowable drive range, therefore, the common yaw components of the four partitions determined in step S3 are retained, and... , and Enter step S5.

[0051] S5. Apply the corresponding partition common driving amount to each driving partition, generate a gating sequence according to the row and column positions of each micro-reflection compound eye unit, select the corresponding micro-reflection compound eye unit according to the gating sequence and write the unit differential driving amount, so that the selected micro-reflection compound eye unit forms an effective driving state determined by the partition common driving amount and the unit differential driving amount. In one embodiment of the present invention, step S5 includes the following steps: The corresponding row and column addresses are determined based on the array positions of each micro-reflection compound eye unit; Establish the address correspondence between the micro-reflection compound eye unit and the row and column gating signals according to the row address and the column address; The gating timing is generated based on the micro-reflective compound eye unit of the differential driving quantity of the unit to be written and the address correspondence; The corresponding common driving quantity of each driving partition is continuously applied, and row gating signal and column gating signal are output according to the gating timing to determine the currently gating micro-reflection compound eye unit; Write the first differential driving component and the second differential driving component corresponding to the currently selected micro-reflection compound eye unit into the first driving side and the second driving side, respectively. The first differential driving component is superimposed with the corresponding first common driving component, and the second differential driving component is superimposed with the corresponding second common driving component to form the effective driving state corresponding to the currently selected micro-reflection compound eye unit.

[0052] Specifically, such as Figure 6 As shown, based on the array structure parameter set Establish address correspondences between the recorded microreflection compound eye unit identifiers and array row and column positions: ; In the formula, This indicates the address correspondence between the microreflection compound eye unit and the row and column addresses.

[0053] The row strobe signal is denoted as The column strobe signal is denoted as When both the corresponding row gating signal and column gating signal are active, the micro-reflection compound eye unit enters the current gating state.

[0054] A single differential drive write cycle is divided into multiple consecutive gating time slots, and the length of a single gating time slot is denoted as . The value is determined based on the row and column gating frequency, the differential drive write setup time, and the time required for a node to reach a stable write state. The start time of each gating time slot is: ; Associating the current gating time, row address, column address, first differential driving component, and second differential driving component to form the first... One gating record: ; All gating records are formed in chronological order: ; In the formula, This indicates the strobe timing of the current differential drive write cycle.

[0055] During the gating sequence execution, the common driving variables corresponding to each driving partition remain active and are not removed with the gating state of the cell row and column. The corresponding row and column addresses are used to select the current micro-reflective compound eye unit, and the corresponding first differential driving component and second differential driving component are written to the two driving sides respectively. The two driving sides form an effective driving quantity according to the superposition relationship of the common driving and differential driving determined in step S4.

[0056] Define microreflection compound eye unit Valid driver state record after differential driver writing is completed: ; The effective driving states of the microreflective compound eye unit after all writing is completed consist of: ; The set of valid drive states proceeds to step S6.

[0057] For example, currently The complete address mapping for a representative array is as follows: Based on the current driver circuit's write stabilization time test, the following was determined: ;Pick Write the data row by row and column by column. A representative gating record is: ; ; ; ; ; Continue generating according to the same rules until: ;form: ;implement At that time, select It belongs to Combined with the existing driving quantity formed in step S4: ;implement Later formed: ;implement Later formed: ;by For example, it is formed as follows: ;by For example, it is formed as follows: The remaining units complete the differential drive writing in the same way, forming: .

[0058] S6. After the current micro-reflection compound eye unit selection is terminated, the differential driving amount of the unit is maintained, so that each micro-reflection compound eye unit forms a deflection state that matches the target deflection angle under the continuous action of the partition common driving amount; In one embodiment of the present invention, step S6 includes the following steps: When the micro-reflection compound eye unit is in the gating state, the first differential driving component is written to the corresponding first holding node, and the second differential driving component is written to the corresponding second holding node; After the current micro-reflection compound eye unit is gated, the first differential driving component is held through the first holding node, and the second differential driving component is held through the second holding node. Under the continuous action of the common driving quantity of the corresponding driving partition, the first differential driving component and the second differential driving component are maintained and work together with the corresponding common driving component to form an effective driving state on both sides. The differential driving effect is generated based on the driving difference formed on both sides of the corresponding yaw axis according to the effective driving state on both sides, so that each micro-reflection compound eye unit maintains the yaw state that matches the corresponding target yaw angle. Monitor the holding state of each micro-reflection compound eye unit. When the preset refresh condition is met, add the corresponding micro-reflection compound eye unit to the subsequent gating timing and rewrite the corresponding unit differential driving quantity.

[0059] Specifically, such as Figure 6 As shown, each microreflection compound eye unit is provided with a first holding node. Second holding node When the micro-reflection compound eye unit enters the gating state according to the gating timing sequence of step S5, the first differential driving component is written to the first holding node, and the second differential driving component is written to the second holding node; after the current gating time slot ends, the two holding nodes are disconnected from the differential driving write path, and the currently written differential driving components are saved respectively.

[0060] The differential driving quantities stored by the two holding nodes are denoted as follows: and Upon completion of the write and entry into the hold state: ; ; The microreflection compound eye unit identifier, the differential driving quantity stored in the two hold nodes, and the end gating time are correlated to form a hold state record: ; The complete state record consists of: ; During the holding period, each driving partition continues to maintain the corresponding partition common driving quantity. The differential driving quantity saved by the two holding nodes works together with the partition common driving quantity according to the superposition relationship determined in step S4, so that the micro-reflection compound eye unit after the row and column gating signal is cancelled continues to maintain the corresponding effective driving state.

[0061] The refresh time threshold is set based on the holding capacitor parameters, the leakage current characteristics of the switching devices, and the static holding test results. During the monitoring period Calculate the holding time: ; When the hold time reaches the refresh time threshold, the corresponding micro-reflection compound eye unit is added to the refresh unit set: ; The row and column addresses of the refresh unit are redefined according to the address correspondence. Define the first... One refresh gating record: ; In the formula, , This indicates the number of microreflection compound eye units that need to be refreshed.

[0062] The refresh gating time is based on: ; Configure sequentially, and refresh all strobe records as follows: ; Drive controller according to Rewrite the corresponding differential driving quantity and update the end strobe time in the hold state record so that the hold time is accumulated again.

[0063] For example, At The gating process begins and ends after the first gating slot, therefore: The two hold nodes store the data separately: ; ;form: Similarly, representative records of maintained states include: ; ; ; All 16 microreflection compound eye units were backfilled to form: ; Static circuit testing to determine: ; Retrieve the current monitoring time: ;for : ;for : Similarly, , and The corresponding holding times are respectively , and ,therefore: ;at this time: Based on the existing row and column addresses and corresponding differential drive quantities in step S5, the following is formed: ; ; ; ; ;therefore: After the refresh is complete, the current... The representative area continues to maintain the array yaw state corresponding to the target yaw angle.

[0064] S7. Obtain the actual sway angle of each micro-reflection compound eye unit, determine the sway angle error based on the actual sway angle and the target sway angle, and determine the adjacency coupling component based on the adjacency coupling relationship between spatially adjacent micro-reflection compound eye units. Correct the unit differential driving quantity of the corresponding micro-reflection compound eye unit based on the adjacency coupling component to generate the array target reflection state. In one embodiment of the present invention, step S7 includes the following steps: According to the spatial adjacency relationship, a preset yaw perturbation is applied to each micro-reflection compound eye unit in sequence, and the induced yaw change corresponding to the spatially adjacent micro-reflection compound eye units is detected. The adjacency coupling coefficient is determined according to the preset yaw perturbation and the induced yaw change. Arrange the adjacency coupling coefficients according to the spatial adjacency relationship to generate an adjacency coupling coefficient matrix; The actual yaw angle of each micro-reflection compound eye unit under the current effective driving state is collected, and the yaw angle error is determined based on the difference between the actual yaw angle and the corresponding target yaw angle. The sway angle error is decomposed into adjacent coupling components based on the adjacent coupling coefficient matrix and the actual sway changes of spatially adjacent micro-reflection compound eye units to determine the adjacent coupling components corresponding to each micro-reflection compound eye unit. The coupling sway direction and coupling sway amount are determined based on the adjacent coupling components, and the reverse compensation direction is determined based on the coupling sway direction, and the compensation sway amount is determined based on the coupling sway amount, thereby generating the reverse compensation angle. The reverse compensation angle is converted into a differential drive compensation amount according to the drive calibration relationship, and the corresponding unit differential drive amount is corrected according to the differential drive compensation amount to generate the corrected unit differential drive amount. According to the gating timing, the corrected unit differential driving quantity is rewritten into the corresponding micro-reflection compound eye unit, the actual deflection angle after rewriting is collected, and an updated actual deflection angle is generated. The updated sway angle error is determined based on the updated actual sway angle and the corresponding target sway angle. When the updated sway angle error does not fall within the preset sway error range, the corresponding corrected unit differential driving amount is further corrected based on the updated sway angle error until the updated sway angle error of each micro-reflection compound eye unit falls within the preset sway error range, thereby generating the array target reflection state.

[0065] Specifically, such as Figure 7 As shown, adjacency coupling calibration is performed before normal array operation or after array assembly and adjustment. Disturbance elements are selected sequentially according to the spatial adjacency relationships established in step S2, and a preset yaw disturbance is applied to their stable yaw state. Simultaneously, the induced yaw changes generated by spatially adjacent micro-reflection compound eye units are detected. .

[0066] Define the adjacency coupling coefficient: ; In the formula, Represents the microreflection compound eye unit When a unit yaw change occurs, the micro-reflection compound eye unit in the space is adjacent. The proportion of the transmitted yaw.

[0067] Will The microreflection compound eye units are numbered row by row and column by column: ; All adjacency coupling coefficients are arranged according to spatial adjacency relationships to form: ; In the formula, Represents the adjacency coupling coefficient matrix; Indicates matrix index as The matrix index of the microreflective compound eye unit is The adjacency coupling coefficient generated by the micro-reflection compound eye unit; the corresponding elements of the non-directly adjacent units and the diagonal elements of the matrix are set to 0.

[0068] In step S6, the actual yaw angle of each microreflective compound eye unit is collected under the holding state and formed according to the array position: ; Calculate the yaw angle error: ; The total yaw angle error is formed as follows: ; Record the reference actual yaw angle before the current effective drive state is established. Determine the actual change in yaw: ; For microreflex compound eye unit The adjacency coupling component is determined based on the actual yaw changes of the corresponding spatial adjacent units and the adjacency coupling coefficient: ; In the formula, Indicates and A set of microreflective compound eye units that are directly spatially adjacent; This represents the adjacency coupling component introduced by the sway variation of adjacent spatial units.

[0069] After separating the adjacent coupling contribution from the yaw angle error, the non-adjacent coupling residual component is obtained: ; The first round of reverse compensation angle is determined based on the adjacent coupling components: ; Using the drive calibration relationship established in step S4, the reverse compensation angle is converted into the first differential drive compensation component. Second differential drive compensation component ,form: ; The differential drive compensation is added to the current unit differential drive to form the corrected unit differential drive: ; The corrected unit differential driving quantity is rewritten according to the row and column gating method in step S5. After reaching a stable state, the actual yaw angle is collected and updated. ,calculate: ; Set the preset yaw error threshold. Its value is determined based on the allowable angular deviation of the target's emission direction, the accuracy of optical angle measurement, and the allowable error of array assembly. When the following conditions are met: ; Determine if the corresponding micro-reflection compound eye unit has reached the target yaw accuracy; if not, generate a subsequent compensation angle based on the updated yaw angle error: ; The subsequent compensation angle is converted into an incremental differential drive compensation amount and the current corrected unit differential drive amount is continuously corrected until the updated yaw angle error enters the preset yaw error range.

[0070] The final actual yaw angle is denoted as... ,form: ; When the final yaw angle error of all microreflection compound eye units does not exceed At that time, the array target reflection state is generated.

[0071] For example, the current adjacency coupling calibration setting has a preset yaw disturbance: ;by As a representative, its spatially adjacent units are , , and .Towards Apply After a positive yaw disturbance, it was detected produce This induces a change in yaw, therefore: ;Towards After applying the same perturbation: Similarly, we can obtain: ; All spatial adjacency relationships were labeled in the same manner, and the complete adjacency coupling coefficient matrix was backfilled. .by Taking its four spatially adjacent units as representatives, a local matrix is ​​extracted from the complete matrix: ; Belongs to the complete adjacency coupling coefficient matrix Representative local structures. After the array enters the stable state formed in step S6, the following data is collected: ;; Calculated based on the corresponding target deflection angle: Before the current driving cycle is established, each micro-reflection compound eye unit is in a zero-yaw reference state relative to the attitude of its corresponding initial reflective surface. Therefore, with For example, the actual yaw changes of its four spatially adjacent units are as follows: , , and The adjacent coupling component is: ; The current yaw angle error is ,therefore: The first round of reverse compensation angle is: Using the existing drive calibration relationship from step S4, we obtain: In step S4 The original unit differential drive quantity is ,therefore: After rewriting and reaching a stable state, the following was detected: ;therefore: ;Set according to the array's allowable optical deviation and measurement accuracy: ;because: Continue generating the second round of compensation angles: The corresponding incremental differential drive compensation amount is: Further adjustments will be made based on the differential driving quantity of the unit after the first round of adjustments: After rewriting and reaching a stable state: The corresponding final yaw angle error is: ;because: ;therefore The target yaw accuracy is achieved. Adjacent coupling compensation and necessary iterative corrections are then performed on the remaining micro-reflection compound eye units in the same manner, ultimately forming: The maximum absolute error in the final yaw angle is: ;because: Therefore, all 16 micro-reflection compound eye units meet the preset sway error range, and the current representative area forms the array target reflection state.

[0072] Based on the same inventive concept, such as Figure 8 As shown, the present invention also provides a high-density micro-reflection compound eye array deflection driving device, the device comprising: The target deflection angle generation module is used to obtain the array structure parameters, incident light direction and target emission direction of the micro-reflection compound eye array, determine the target deflection angle of each micro-reflection compound eye unit according to the array structure parameters, incident light direction and target emission direction, and generate the target deflection angle distribution; The dynamic partitioning module is used to establish spatial adjacency relationships based on the array positions of each micro-reflection compound eye unit, calculate the target deflection angle difference between spatially adjacent micro-reflection compound eye units, divide the target deflection angle distribution into continuous regions based on the spatial adjacency relationships and the target deflection angle differences, and generate a driving partition set. The yaw component decomposition module is used to determine the common yaw component of each driving partition in the driving partition set, and generate the unit yaw residual based on the difference between the target yaw angle of each micro-reflection compound eye unit and the common yaw component of the driving partition. The driving quantity generation module is used to convert the partition common yaw component into the corresponding partition common driving quantity according to the pre-established driving calibration relationship between the yaw angle and the driving quantity, and to convert the unit yaw residual into the corresponding unit differential driving quantity. The gating drive module is used to apply the corresponding partition common drive quantity to each drive partition, generate a gating timing sequence according to the row and column positions of each micro-reflection compound eye unit, select the corresponding micro-reflection compound eye unit according to the gating timing sequence and write the unit differential drive quantity, so that the selected micro-reflection compound eye unit forms an effective drive state jointly determined by the partition common drive quantity and the unit differential drive quantity. The drive holding module is used to hold the differential drive amount of the unit after the gating of the current micro-reflection compound eye unit ends, so that each micro-reflection compound eye unit forms a deflection state that matches the deflection angle of the corresponding target under the continuous action of the partition common drive amount; The adjacency coupling compensation module is used to obtain the actual sway angle of each micro-reflection compound eye unit, determine the sway angle error based on the actual sway angle and the target sway angle, determine the adjacency coupling component based on the adjacency coupling relationship between spatially adjacent micro-reflection compound eye units, correct the corresponding unit differential driving quantity based on the adjacency coupling component, and generate the target reflection state of the micro-reflection compound eye array.

[0073] All equivalent changes and modifications made in accordance with the teachings of this invention are still within the scope of this invention. Those skilled in the art will readily conceive of other embodiments of this invention upon considering the specification and the disclosure of practical truth. This application is intended to cover any variations, uses, or adaptations of this invention that follow the general principles of this invention and include common knowledge or conventional techniques in the art not described herein.

Claims

1. A method for driving the yaw of a high-density micro-reflection compound eye array, characterized in that, The method includes: The array structure parameters, incident light direction, and target emission direction of the micro-reflection compound eye array are obtained. The target deflection angle of each micro-reflection compound eye unit is determined based on the array structure parameters, incident light direction, and target emission direction, and a target deflection angle distribution is generated. Establish spatial adjacency relationships based on the array positions of each micro-reflection compound eye unit, calculate the target deflection angle difference between spatially adjacent micro-reflection compound eye units, and divide the target deflection angle distribution into continuous regions based on the spatial adjacency relationships and the target deflection angle differences to generate a set of driving partitions. The common yaw component of each driving partition in the driving partition set is determined respectively. Based on the difference between the target yaw angle of each micro-reflection compound eye unit and the common yaw component of the driving partition, the unit yaw residual is generated. Based on the pre-established driving calibration relationship between the yaw angle and the driving quantity, the partition common yaw component is converted into the corresponding partition common driving quantity, and the unit yaw residual is converted into the corresponding unit differential driving quantity. Apply the corresponding partition common driving amount to each driving partition, generate a gating timing sequence according to the row and column positions of each micro-reflection compound eye unit, select the corresponding micro-reflection compound eye unit according to the gating timing sequence and write the unit differential driving amount, so that the selected micro-reflection compound eye unit forms an effective driving state jointly determined by the partition common driving amount and the unit differential driving amount. After the gating of the current micro-reflection compound eye unit ends, the differential driving amount of the unit is maintained, so that each micro-reflection compound eye unit forms a deflection state that matches the deflection angle of the corresponding target under the continuous action of the partition common driving amount; The actual yaw angle of each micro-reflection compound eye unit is obtained, the yaw angle error is determined based on the actual yaw angle and the target yaw angle, and the adjacency coupling component is determined by combining the adjacency coupling relationship between spatially adjacent micro-reflection compound eye units. The corresponding unit differential driving quantity is corrected based on the adjacency coupling component to generate the target reflection state of the micro-reflection compound eye array.

2. The method for driving the yaw of a high-density micro-reflection compound eye array according to claim 1, characterized in that, The process of acquiring the array structure parameters, incident light direction, and target emission direction of the micro-reflection compound eye array, determining the target deflection angle of each micro-reflection compound eye unit based on the array structure parameters, incident light direction, and target emission direction, and generating a target deflection angle distribution includes: Establish a unified array coordinate system corresponding to the micro-reflection compound eye array; The array position, initial reflective surface normal, and yaw axis direction of each micro-reflective compound eye unit in the unified array coordinate system are obtained. The array position, the initial reflective surface normal, and the yaw axis direction are correlated to generate array structure parameters. Obtain the incident orientation parameters of the incident light in the unified array coordinate system, and determine the direction of the incident light based on the incident orientation parameters; Obtain the target azimuth parameters corresponding to the reflected light from the target, and determine the target emission direction based on the target azimuth parameters; The incident light direction and the target emission direction are spatially correlated with the array structure parameters, and the target reflective surface normal corresponding to each micro-reflective compound eye unit is determined according to the incident light direction and the target emission direction. The candidate deflection angle of each micro-reflection compound eye unit around the corresponding deflection axis is determined based on the initial reflective surface normal, the target reflective surface normal, and the deflection axis direction. The candidate yaw angles are screened based on the achievable yaw range of each micro-reflection compound eye unit to determine the target yaw angle of each micro-reflection compound eye unit, and the target yaw angles are arranged according to the array position to generate a target yaw angle distribution.

3. The method for driving the yaw of a high-density micro-reflection compound eye array according to claim 2, characterized in that, The process involves establishing spatial adjacency relationships based on the array positions of each micro-reflection compound eye unit, calculating the target deflection angle difference between spatially adjacent micro-reflection compound eye units, and dividing the target deflection angle distribution into continuous regions based on the spatial adjacency relationships and the target deflection angle differences to generate a driving partition set, including: Based on the array position, spatially adjacent micro-reflection compound eye units are determined, and spatial adjacency relationships between each micro-reflection compound eye unit are established; For each group of adjacent micro-reflection compound eye units in the spatial adjacency relationship, calculate the angle difference between the corresponding target deflection angles to generate an adjacency angle difference distribution; Spatial adjacency relationships in the adjacency angle difference distribution where the angle difference is not greater than a preset adjacency angle difference threshold are defined as partition connectivity relationships; Based on the partition connectivity relationship, the micro-reflection compound eye unit is continuously expanded to generate candidate driving partitions; Calculate the distribution span of the target yaw angle within each candidate drive partition. When the distribution span exceeds the preset partition angle difference range, determine the segmentation position according to the adjacent angle difference distribution within the corresponding candidate drive partition, and segment the corresponding candidate drive partition according to the segmentation position. Candidate driving partitions whose distribution span after segmentation meets the preset partition angle difference range are determined as driving partitions, and a set of driving partitions is generated.

4. The method for driving the yaw of a high-density micro-reflection compound eye array according to claim 3, characterized in that, The step of determining the common yaw component of each driving partition in the driving partition set, and generating the unit yaw residual based on the difference between the target yaw angle of each micro-reflection compound eye unit and the common yaw component of the driving partition, includes: According to the aforementioned driving partition set, extract the target deflection angle corresponding to the micro-reflection compound eye unit in each driving partition, and generate a partition target deflection angle set corresponding to each driving partition. The common candidate angles are determined based on the angle distribution range of the target deflection angle set for each partition. Calculate the angular residual between each common candidate angle and each target deflection angle in the corresponding partition target deflection angle set, and aggregate the angular residuals to generate the residual characterization value corresponding to each common candidate angle; Based on the residual characterization value, determine the partition common yaw component corresponding to each driving partition from the common candidate angle; Calculate the signed angle difference between the target yaw angle of each micro-reflection compound eye unit and the common yaw component of the corresponding drive partition, and generate the unit yaw residual for each micro-reflection compound eye unit.

5. The method for driving the yaw of a high-density micro-reflection compound eye array according to claim 4, characterized in that, The step of converting the partition common yaw component into the corresponding partition common driving quantity and converting the unit yaw residual into the corresponding unit differential driving quantity according to the pre-established driving calibration relationship between the yaw angle and the driving quantity includes: Different driving amounts are applied to the micro-reflection compound eye unit, and the actual yaw angle corresponding to each driving amount is collected. The driving calibration relationship between the yaw angle and the driving amount is established based on the correspondence between the driving amount and the actual yaw angle. Based on the driving calibration relationship, the common yaw component of each driving partition is converted into a first common driving component and a second common driving component to generate a common driving quantity of the partition. The residual yaw amplitude and residual yaw direction of the corresponding micro-reflection compound eye unit are determined based on the value and sign of the unit yaw residual. The first differential driving component and the second differential driving component are determined based on the driving calibration relationship, the residual yaw amplitude and the residual yaw direction, and the unit differential driving quantity is generated. The first common driving component is superimposed with the first differential driving component, and the second common driving component is superimposed with the second differential driving component to obtain the effective driving amount on both driving sides of the corresponding micro-reflection compound eye unit. The effective driving quantity is checked for driving range. When the effective driving quantity exceeds the allowable driving range, the corresponding partition common yaw component is adjusted, and the corresponding partition common driving quantity and the unit differential driving quantity are regenerated.

6. The method for driving the yaw of a high-density micro-reflection compound eye array according to claim 5, characterized in that, The steps include applying the corresponding partition common driving quantity to each driving partition, generating a gating sequence based on the row and column positions of each micro-reflection compound eye unit, selecting the corresponding micro-reflection compound eye unit according to the gating sequence and writing the unit differential driving quantity, so that the selected micro-reflection compound eye unit forms an effective driving state jointly determined by the partition common driving quantity and the unit differential driving quantity, including: The corresponding row and column addresses are determined based on the array positions of each micro-reflection compound eye unit; Establish the address correspondence between the micro-reflection compound eye unit and the row and column gating signals according to the row address and the column address; The gating timing is generated based on the micro-reflective compound eye unit of the differential driving quantity of the unit to be written and the address correspondence; The corresponding common driving quantity of each driving partition is continuously applied, and row gating signal and column gating signal are output according to the gating timing to determine the currently gating micro-reflection compound eye unit; Write the first differential driving component and the second differential driving component corresponding to the currently selected micro-reflection compound eye unit into the first driving side and the second driving side, respectively. The first differential driving component is superimposed with the corresponding first common driving component, and the second differential driving component is superimposed with the corresponding second common driving component to form the effective driving state corresponding to the currently selected micro-reflection compound eye unit.

7. The method for driving the yaw of a high-density micro-reflection compound eye array according to claim 6, characterized in that, After terminating the gating of the current microreflection compound eye unit, the differential driving quantity of the unit is maintained, so that each microreflection compound eye unit forms a yaw state that matches the corresponding target yaw angle under the continuous action of the partition common driving quantity, including: When the currently selected micro-reflection compound eye unit is in the selected state, the corresponding first differential driving component is written into the first holding node, and the corresponding second differential driving component is written into the second holding node. After the current micro-reflection compound eye unit is gating, the first differential driving component and the second differential driving component are maintained by the first holding node and the second holding node, respectively. Under the continuous action of the corresponding partition common driving quantity, the first differential driving component and the first common driving component are superimposed to form the first side effective driving quantity, and the second differential driving component and the second common driving component are superimposed to form the second side effective driving quantity. A differential driving torque is formed around the yaw axis based on the difference between the effective driving amount on the first side and the effective driving amount on the second side, so that the corresponding micro-reflection compound eye unit is kept in a yaw state. Monitor the holding status of the first holding node and the second holding node. When the holding status reaches the preset refresh condition, add the corresponding micro-reflection compound eye unit to the subsequent gating timing sequence to refresh the unit differential driving quantity.

8. The method for driving the yaw of a high-density micro-reflection compound eye array according to claim 7, characterized in that, The process of obtaining the actual yaw angle of each micro-reflection compound eye unit, determining the yaw angle error based on the actual yaw angle and the target yaw angle, and determining the adjacency coupling component by combining the adjacency coupling relationship between spatially adjacent micro-reflection compound eye units includes: According to the spatial adjacency relationship, a preset yaw disturbance is applied to the micro-reflection compound eye unit in sequence, and the follow-up yaw change generated by the micro-reflection compound eye unit spatially adjacent to the disturbed micro-reflection compound eye unit is detected. The adjacency coupling coefficient between spatially adjacent micro-reflection compound eye units is determined based on the correspondence between the preset yaw disturbance and the follow-up yaw change. Arrange the adjacency coupling coefficients according to the spatial adjacency relationship to construct an adjacency coupling coefficient matrix; Collect the actual yaw angle of each micro-reflection compound eye unit under the current effective driving state; Calculate the angle difference between the actual yaw angle of each micro-reflection compound eye unit and the corresponding target yaw angle to generate the yaw angle error; Based on the adjacency coupling coefficient matrix and the actual yaw changes corresponding to the micro-reflection compound eye units spatially adjacent to each micro-reflection compound eye unit, the yaw angle error is decomposed by adjacency coupling to determine the adjacency coupling component corresponding to each micro-reflection compound eye unit.

9. The method for driving the yaw of a high-density micro-reflection compound eye array according to claim 8, characterized in that, The step of correcting the corresponding unit differential driving quantity according to the adjacent coupling component to generate the target reflection state of the micro-reflection compound eye array includes: The coupling deflection direction and coupling deflection amount are determined based on the adjacent coupling components corresponding to each micro-reflection compound eye unit; The reverse compensation direction is determined based on the coupling sway direction, and the compensation sway amount is determined based on the coupling sway amount, thereby generating the reverse compensation angle; The reverse compensation angle is converted into a differential drive compensation amount according to the drive calibration relationship. The differential driving compensation amount is used to correct the unit differential driving amount of the corresponding micro-reflection compound eye unit, and the corrected unit differential driving amount is generated. The corrected unit differential driving quantity is written into the corresponding micro-reflection compound eye unit according to the gating timing, and the actual deflection angle after writing is collected to generate an updated actual deflection angle. An updated yaw angle error is generated based on the updated actual yaw angle and the corresponding target yaw angle. When the updated yaw angle error does not meet the preset yaw error range, the corrected unit differential drive quantity is further corrected based on the updated yaw angle error. When the updated sway angle error corresponding to each micro-reflection compound eye unit meets the preset sway error range, the target reflection state of the micro-reflection compound eye array is generated.

10. A high-density micro-reflection compound eye array oscillation driving device, characterized in that, The device includes: The target deflection angle generation module is used to obtain the array structure parameters, incident light direction and target emission direction of the micro-reflection compound eye array, determine the target deflection angle of each micro-reflection compound eye unit according to the array structure parameters, incident light direction and target emission direction, and generate the target deflection angle distribution; The dynamic partitioning module is used to establish spatial adjacency relationships based on the array positions of each micro-reflection compound eye unit, calculate the target deflection angle difference between spatially adjacent micro-reflection compound eye units, divide the target deflection angle distribution into continuous regions based on the spatial adjacency relationships and the target deflection angle differences, and generate a driving partition set. The yaw component decomposition module is used to determine the common yaw component of each driving partition in the driving partition set, and generate the unit yaw residual based on the difference between the target yaw angle of each micro-reflection compound eye unit and the common yaw component of the driving partition. The driving quantity generation module is used to convert the partition common yaw component into the corresponding partition common driving quantity according to the pre-established driving calibration relationship between the yaw angle and the driving quantity, and to convert the unit yaw residual into the corresponding unit differential driving quantity. The gating drive module is used to apply the corresponding partition common drive quantity to each drive partition, generate a gating timing sequence according to the row and column positions of each micro-reflection compound eye unit, select the corresponding micro-reflection compound eye unit according to the gating timing sequence and write the unit differential drive quantity, so that the selected micro-reflection compound eye unit forms an effective drive state jointly determined by the partition common drive quantity and the unit differential drive quantity. The drive holding module is used to hold the differential drive amount of the unit after the gating of the current micro-reflection compound eye unit ends, so that each micro-reflection compound eye unit forms a deflection state that matches the deflection angle of the corresponding target under the continuous action of the partition common drive amount; The adjacency coupling compensation module is used to obtain the actual sway angle of each micro-reflection compound eye unit, determine the sway angle error based on the actual sway angle and the target sway angle, determine the adjacency coupling component based on the adjacency coupling relationship between spatially adjacent micro-reflection compound eye units, correct the corresponding unit differential driving quantity based on the adjacency coupling component, and generate the target reflection state of the micro-reflection compound eye array.

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