Inlet assembly for abatement apparatus

Abstract

An inlet assembly for an abatement apparatus for processing an effluent stream from a semiconductor processing tool is disclosed. The inlet assembly includes an effluent stream inlet configured to deliver an effluent stream to a nozzle conduit for delivery to an abatement chamber, a nozzle conduit scraper assembly having a nozzle conduit scraper housed within the nozzle conduit and configured to reciprocate within the nozzle conduit to reduce effluent stream deposits within the nozzle conduit, a reagent plenum chamber configured to receive a reagent and having a wall through which at least a portion of the nozzle scraper assembly extends, the wall defining at least one reagent orifice configured to deliver the reagent from the plenum chamber into the nozzle conduit.

Description

Technical Field

[0001] The field of this invention relates to inlet components for emission reduction equipment. Background Technology

[0002] Emission reduction equipment is known and is commonly used to treat effluent streams from manufacturing process tools used in industries such as semiconductor or flat panel display manufacturing. During such manufacturing, residual perfluorinated compounds (PFCs) and other compounds are present in the effluent streams pumped from the process tools. PFCs are difficult to remove from effluent gases, and their release into the environment is undesirable because they are known to have relatively high greenhouse activity.

[0003] Known emission reduction devices use combustion to remove PFCs and other compounds from the outflow gas stream. Typically, the outflow gas stream is a nitrogen stream containing PFCs and other compounds. Fuel gas is mixed with the outflow gas stream, and this gas-gas mixture is conveyed to an emission reduction chamber (such as a combustion chamber laterally surrounded by the outlet surface of a perforated gas burner) using an inlet assembly. Fuel gas and air are simultaneously supplied to the perforated burner to influence flameless combustion at the outlet surface, wherein the amount of air passing through the perforated burner is sufficient not only to consume the fuel gas supplied to the burner but also to consume all combustibles in the gas-gas mixture injected into the combustion chamber.

[0004] Although techniques exist for handling outflow, each has its own drawbacks. Therefore, an improved technique for handling outflow is desired. Summary of the Invention

[0005] According to a first aspect, an inlet assembly for an emission reduction device is provided for processing an effluent from a semiconductor processing tool. The inlet assembly includes: an effluent inlet configured to deliver the effluent to a nozzle conduit for delivery to an emission reduction chamber; a nozzle conduit scraper assembly having a nozzle conduit scraper housed within the nozzle conduit and configured to reciprocate within the nozzle conduit to reduce effluent deposits within the nozzle conduit; and a reagent plenum configured to receive a reagent and having a wall through which at least a portion of the nozzle scraper assembly extends, the wall defining at least one reagent orifice configured to deliver the reagent from the plenum into the nozzle conduit.

[0006] The first aspect recognizes that a problem with existing arrangements is the difficulty in reliably introducing reagents into the inlet assembly, which typically requires a nozzle guide scraper assembly to reduce effluent deposits within the nozzle guide. Therefore, an inlet assembly is provided. The inlet assembly can be used in a effluent reduction device. The effluent reduction device can be used to process effluent from semiconductor processing tools. The inlet assembly may include an effluent inlet. The effluent inlet may be configured to deliver or transport the effluent to the nozzle guide. The nozzle guide may deliver the effluent to a effluent reduction chamber. The inlet assembly may include a nozzle guide scraper assembly. The nozzle guide scraper assembly may have a nozzle guide scraper. The nozzle guide scraper may be received or retained within the nozzle guide. The nozzle guide scraper may be configured to reciprocate or displace within the nozzle guide to reduce effluent deposits within the nozzle guide. The inlet assembly may include or define a reagent pressure chamber. The reagent pressure chamber may be configured to receive reagents. The reagent pressure chamber may have a wall or cap through which at least a portion of the nozzle scraper assembly extends. The wall may define at least one reagent orifice, which is configured to deliver reagent from the pressure-regulating chamber into the nozzle conduit. In this way, a compact arrangement is provided that allows for reliable introduction of reagent into the nozzle conduit.

[0007] The nozzle conduit can extend between a first end proximates the reagent pressure-regulating chamber and a second end proximates the discharge-reducing chamber. Therefore, the nozzle conduit can be elongated, with the reagent pressure-regulating chamber located at one end and the discharge-reducing chamber at the other end, and can typically be cylindrical.

[0008] The wall can be located at the first end of the nozzle duct. In other words, the wall can be located at the end of the nozzle duct away from the emission reduction chamber.

[0009] The wall can be shared by the nozzle conduit and the reagent pressure chamber. Therefore, the wall can typically separate the reagent pressure chamber and the nozzle conduit.

[0010] The nozzle guide tube scraper assembly may have an actuating rod that extends from the nozzle guide tube scraper through the reagent pressure chamber to the actuator. Therefore, the actuator rod for the nozzle guide tube scraper can extend fully through the reagent pressure chamber. This configuration of the reagent pressure chamber allows the actuator rod to be fully actuated without interference from the reagent pressure chamber.

[0011] The actuator rod can extend through the wall.

[0012] The actuator rod may terminate with a scraper carrier configured to hold the nozzle guide scraper. In other words, the scraper carrier may be located at the end of the actuator rod that holds the nozzle guide scraper.

[0013] The scraper holder may define at least one holder orifice configured to facilitate reagent flow through the scraper holder. Therefore, the scraper holder may be provided with one or more orifices through which reagent can flow. The orifice may be positioned to provide a desired flow direction for the reagent within the nozzle conduit.

[0014] The scraper holder can define multiple holder orifices.

[0015] The plurality of bracket openings can be positioned circumferentially around the scraper bracket. The bracket openings can be positioned coaxially around the scraper bracket.

[0016] The nozzle guide scraper may include a helical spring. Providing a helical spring also helps to introduce a rotating flow of reagent into the nozzle guide.

[0017] The nozzle conduit may define a nozzle inlet configured to receive the outflow, and the scraper holder may be located in a non-actuated position upstream of the nozzle inlet. Positioning the scraper holder upstream of the nozzle inlet helps prevent the outflow into the nozzle conduit from being disturbed by the scraper holder.

[0018] The nozzle conduit may include a baffle conduit coaxially positioned with the nozzle conduit, the baffle conduit being shaped and configured to redirect the outflow from the outflow inlet into the nozzle conduit.

[0019] The nozzle guide scraper assembly can extend through the reagent orifice.

[0020] The size or dimension of the reagent orifice can be set to be larger than the nozzle-scraper assembly. Determining the size of the reagent orifice to be larger than the portion of the nozzle-scraper assembly that extends through the orifice provides a gap through which the reagent can flow.

[0021] The size of at least one of the reagent orifice and the nozzle guide scraper assembly can be configured to provide a gap between the wall and the nozzle guide scraper assembly to facilitate the flow of reagent from the pressure chamber into the nozzle guide.

[0022] The size of at least one of the reagent orifice and the nozzle guide scraper assembly can be configured to provide a gap between the wall and the nozzle guide scraper assembly to control the flow rate of the reagent from the pressure chamber to the nozzle guide.

[0023] At least one of the reagent orifice and the nozzle guide scraper assembly can be shaped to provide a gap between the wall and the nozzle guide scraper assembly to control the flow direction of the reagent from the pressure stabilizing chamber into the nozzle guide. Therefore, the shape or configuration of the reagent orifice and the nozzle guide scraper assembly can be selected to guide the flow of the reagent.

[0024] At least one of the reagent orifice and the nozzle guide scraper assembly can be shaped to provide a gap between the wall and the nozzle guide scraper assembly to control the flow direction of the reagent around the nozzle guide scraper from the pressure chamber into the nozzle guide. Therefore, the shape or configuration of the reagent orifice and the nozzle guide scraper assembly can be selected to guide the flow of reagent around the nozzle guide scraper.

[0025] At least one of the reagent orifice and the nozzle guide tube scraper assembly may be shaped into a conical shape.

[0026] The wall may define an orifice through which the nozzle guide scraper assembly extends, and the at least one of the reagent orifices may include at least one separate orifice defined by the wall. Therefore, in addition to the orifice receiving the nozzle guide scraper assembly, at least one additional orifice through which reagent can flow may be provided.

[0027] The inlet assembly may include a plurality of individual orifices defined by walls, the plurality of individual orifices being configured to facilitate reagent flow from the pressure-regulating chamber into the nozzle conduit. Thus, more than one orifice may be provided to distribute the reagent flow around the nozzle conduit.

[0028] The multiple individual orifices can be positioned circumferentially and coaxially around the scraper support.

[0029] The size of the plurality of individual orifices can be set to control the flow rate of the reagent from the pressure stabilizing chamber to the nozzle conduit.

[0030] The multiple individual orifices can be shaped to control the flow direction of the reagent from the pressure stabilizing chamber to the nozzle conduit.

[0031] The plurality of individual orifices can be shaped to control the flow direction of the reagent around the nozzle guide scraper from the pressure stabilizing chamber into the nozzle guide.

[0032] The pressure stabilizing chamber can be defined as the inlet of the pressure stabilizing chamber configured to receive reagents.

[0033] The pressure stabilizing chamber may include a second wall opposite to the wall through which the nozzle guide scraper assembly extends.

[0034] Further specific and preferred aspects are set forth in the appended independent and dependent claims. Features of the dependent claims may be combined with features of the independent claims where appropriate, and in combinations other than those expressly stated in the claims.

[0035] When a device feature is described as operable to provide a function, it will be understood that this includes device features that provide that function or are adapted or configured to provide that function. Attached Figure Description

[0036] Embodiments of the invention will now be described in further detail with reference to the accompanying drawings, in which: Figure 1 The diagram schematically illustrates the inlet section of the emission reduction equipment; Figure 2 The illustration shows an inlet component for an emission reduction device according to one embodiment; Figure 3 The diagram illustrates an inlet component for an emission reduction device according to one embodiment; and Figure 4 The illustration shows an inlet component for an emission reduction device according to one embodiment. Detailed Implementation

[0037] Before discussing the embodiments in more detail, an overview will first be provided. Some embodiments provide an arrangement that allows reagents to be introduced simply and efficiently into the effluent within the inlet nozzle to help optimize the rate of compound destruction within the effluent, without the complex arrangement of actuators required to actuate the nozzle scraper to reduce particulate buildup within the inlet nozzle. In particular, a pressure chamber facilitates reagent delivery to the inlet nozzle without the complex arrangement of actuators required to actuate the nozzle scraper, wherein the pressure chamber supplies the reagent to the inlet nozzle, and an actuator rod for actuating the nozzle scraper extends through the pressure chamber. The pressure chamber can supply reagents through dedicated orifices, and / or reuse orifices through which the actuator rod extends. Those orifices can control the flow rate of reagents entering the inlet nozzle and / or control the flow direction of reagents entering the inlet nozzle. The nozzle scraper can be held by a support coupled to the actuator rod. The support may also be provided with orifices or recesses through which reagents can flow. Those orifices or recesses can also control the flow rate of reagents entering the inlet nozzle and / or control the flow direction of reagents entering the inlet nozzle.

[0038] Entry Components - Overview Figure 1An example inlet assembly 10 of an emissions reduction device is schematically illustrated. An inlet nozzle 20 is provided, which includes an elongated cylindrical conduit. A concentrically positioned helical spring 40 is positioned against the inner surface of the inlet nozzle 20. In this example, a gas (such as fuel or oxidant) is supplied to a port 65. A baffle 50 is provided in the upper portion of the inlet nozzle 20. The baffle 50 includes a cylindrical tube having a plurality of orifices 60 formed through its wall. The wall of the inlet nozzle 20 has orifices 70 that receive an outflow conduit 80. In operation, an outflow 100 is fed into the outflow conduit 80. When activated, an injection delivers a gas (such as fuel or oxidant) into the outflow 100 as the outflow 100 passes through the orifices 70 into the outflow conduit 80. The baffle 50 presents a cylindrical surface to the incoming outflow 100 being fed through the orifices 70. Baffle 50 seals the upper portion of inlet nozzle 20, and the only way for outflow 100 to advance through inlet nozzle 20 is via orifice 60. As outflow 100 travels along the elongated axis of inlet nozzle 20, spring turbulence disrupts the flow near the inner wall of inlet nozzle 20. Outflow 100 exits inlet nozzle 20 and enters a reduction chamber (not shown) concentrically surrounded by gas delivered from spray gun 55. To promote mixing and improve the stability of outflow 100, spring 40 also imparts a rotational component to outflow 100 as it passes along inlet nozzle 20. Thus, spring 40 helps improve the mixing of outflow 100 with any reagent, which helps improve the performance of the reduction device. Particulate matter and condensate within outflow 100 accumulate on the inner surface of inlet nozzle 20, and therefore, spring 40 can be displaced along the axial length of inlet nozzle 20 using an actuator coupled to actuator rod 130 to help remove such accumulations.

[0039] Entry Component - Configuration 1 Figure 2 The figure illustrates an inlet assembly 10A for an emission reduction device according to one embodiment. The inlet assembly 10A is similar in overall configuration to... Figure 1 The arrangement shown is similar. However, this arrangement provides compact and efficient delivery of the reagent for mixing with the outflow 100 within the inlet nozzle 20A. The inlet nozzle 20A is provided to accommodate a concentrically positioned baffle 50A, within which a helical spring 40A is positioned. The helical spring 40A is supported by a bracket 120A, which is held at one end of the actuator rod 130A.

[0040] The upper portion of the inlet nozzle 20A has a structure defining a reagent pressure chamber 140A. Specifically, the upper portion of the inlet nozzle 20A has a cylindrical structure 150A with an upper cap 160A and a lower cap 170A defining the reagent pressure chamber 140A. An actuator rod 130A passes through an orifice 133A in the upper cap 160A and an orifice 173A in the lower cap 170A. The spacing between the outer surface of the actuator rod 130A and the orifice 133A in the upper cap 160A provides a substantial fluid seal between the actuator rod 130A and the upper cap 160A. However, the spacing between the outer surface of the actuator rod 130A and the orifice 173A passing through the lower cap 170A allows fluid communication between the space within the reagent pressure chamber 140A and the baffle 50A. The actuator rod 130A has an elongated cylindrical portion, and the lower end of the actuator rod 130A has an outwardly tapering surface 135A. The orifice 173A in the lower cap 170A has a complementary tapering surface 175A. The orifice 173A in the lower cap 170A also has a parallel portion 177A through which the elongated cylindrical portion of the actuator rod 130A extends. The cylindrical structure 150A also defines a reagent inlet 180A through which reagent is delivered to the reagent pressure chamber 140A.

[0041] In operation, reagent is delivered to reagent pressure chamber 140A via reagent inlet 180A. An upper cap 160A, a cylindrical structure 150A, and a lower cap 170A prevent reagent from escaping from reagent pressure chamber 140A (except through a gap, opening, or orifice between the outer surface of actuator rod 130A and the orifice 173A defined by lower cap 170A). Specifically, reagent flows through a gap between the outer surface of the elongated cylindrical portion of actuator rod 130A and the parallel portion 177A of the orifice defined by lower cap 170A. The dimension of this gap is typically used to control the flow rate of reagent from reagent pressure chamber 140A into baffle 50A. The shape of the tapered portion helps guide the flow of reagent into baffle 50A. When inlet nozzle 20A requires scraping, actuator rod 130A can be displaced downwards without interrupting the flow of reagent into baffle 50A. This provides a particularly compact and convenient way to deliver reagents into the inlet nozzle 20A for mixing with the outflow 100.

[0042] Entry Component - Configuration 2 Figure 3The illustration shows an inlet assembly 10B for an emission reduction device according to one embodiment. This arrangement also provides compact and efficient delivery of reagents for mixing with the outflow 100 within the inlet nozzle 20B. The inlet nozzle 20B is provided to accommodate a concentrically positioned baffle 50A, within which a helical spring 40A is positioned. The helical spring 40A is supported by a bracket 120B, which is held at one end of an actuator rod 130A.

[0043] The upper portion of the inlet nozzle 20B has a structure defining a reagent pressure chamber 140B. Specifically, the upper portion of the inlet nozzle 20B has a cylindrical structure 150B with an upper cap 160A and a lower cap 170B defining the reagent pressure chamber 140B. An actuator rod 130A passes through an orifice 133A in the upper cap 160A and an orifice 173B in the lower cap 170B.

[0044] This arrangement and Figure 2 The arrangement shown is similar, except that the lower cap 170B and the support 120B have slightly different configurations. Specifically, the orifice 173B in the lower cap 170B does not have a tapered portion, but instead has only a parallel portion 177B through which the actuator rod 130A passes. Additionally, a plurality of reagent orifices 190B extending through the lower cap 170B are provided. In this embodiment, four reagent orifices 190B are provided circumferentially positioned around the lower cap 170B. The support 120B comprises a cylindrical elongated structure that engages with a multi-turn coil spring 40A. The support 120B is provided with a plurality of recesses 125B extending along the axial length of the support 120B.

[0045] The spacing between the outer surface of actuator rod 130A and the orifice 133A in upper cap 160A provides a substantial fluid seal between actuator rod 130A and upper cap 160A. Additionally, the spacing between the outer surface of actuator rod 130A and the orifice 173B passing through lower cap 170B provides a substantial fluid seal between actuator rod 130A and upper cap 160A. However, the spacing between the outer surface of actuator rod 130A and the orifice 173B passing through lower cap 170B can also be selected to allow fluid communication between the spaces within reagent pressure chamber 140A and baffle 50A. A plurality of reagent orifices 190B extending through lower cap 170B are provided, the size of which is configured to allow fluid communication between the spaces within reagent pressure chamber 140A and baffle 50A. In this example, the plurality of reagent orifices 190B extend axially parallel to the elongated axis of the actuator rod 130A, but this is not required, and they may extend at an angle to the elongated axis of the actuator rod 130A. Furthermore, in this example, the plurality of reagent orifices 190B extend axially parallel to the elongated axis of the support 120B, but this is not required, and they may extend at an angle to the elongated axis of the support 120B.

[0046] In operation, reagent is delivered into reagent pressure chamber 140B via reagent inlet 180A. An upper cap 160A, a cylindrical structure 150A, and a lower cap 170B prevent reagent from escaping from reagent pressure chamber 140B (except by flowing through a reagent orifice 190B defined by the lower cap 170B). The dimensional determination of the reagent orifice 190B is typically used to control the flow rate of reagent from reagent pressure chamber 140B toward baffle 50A. The orientation of the reagent orifice 190B helps guide the flow of reagent toward baffle 50A. The provision of a support 120B prevents reagent from flowing into baffle 50 (except by flowing through a recess 125B defined by the support 120B). The orientation of the recess 125B helps guide the flow of reagent into baffle 50A.

[0047] When the inlet nozzle 20B needs to be scraped, the actuator rod 130A can be moved downward without interrupting the flow of reagent into the baffle 50A. This provides a particularly compact and convenient way to deliver reagent into the inlet nozzle 20B for mixing with the outflow 100.

[0048] Entry Component - 3rd Configuration Figure 4The illustration shows an inlet assembly 10C for an emission reduction device according to one embodiment. This arrangement also provides compact and efficient delivery of reagents for mixing with the outflow 100 within the inlet nozzle 20C. The inlet nozzle 20C is provided to accommodate a concentrically positioned baffle 50A, within which a helical spring 40A is positioned. The helical spring 40A is supported by a bracket 120C, which is held at one end of the actuator rod 130C.

[0049] The upper portion of the inlet nozzle 20C has a structure defining a reagent pressure regulating chamber 140C. Specifically, the upper portion of the inlet nozzle 20C has a cylindrical structure 150C with an upper cap 160C and a lower cap 170C defining the reagent pressure regulating chamber 140C. An actuator rod 130C passes through orifices in the upper cap 160C and the lower cap 170C.

[0050] This arrangement and Figure 3 The arrangement shown is similar, except that the lower cap 170C and the bracket 120C have slightly different configurations. In particular, the opening in the lower cap 170C is defined by an upright cylindrical portion 200C.

[0051] The spacing between the outer surface of the support 120C and the inner surface of the cylindrical portion 200C provides a substantial fluid seal. Additionally, the spacing between the outer surface of the cylindrical portion 200C and the orifice passing through the upper cap 160C provides a substantial fluid seal. A plurality of reagent orifices 190C are provided, extending through the lower cap 170C and sized to allow fluid communication between the spaces within the reagent pressure chamber 140C and the baffle 50A. In this example, the plurality of reagent orifices 190C extend axially parallel to the elongated axis of the actuator rod 130C, but this is not required, and they may extend at an angle to the elongated axis of the actuator rod 130C.

[0052] In operation, reagent is delivered into reagent pressure chamber 140C via reagent inlet (not shown). An upper cap 160C, a cylindrical structure 150C, and a lower cap 170C prevent reagent from escaping from reagent pressure chamber 140C (except by flowing through a reagent orifice 190C defined by the lower cap 170C). The dimensional determination of the reagent orifice 190C is typically used to control the flow rate of reagent from reagent pressure chamber 140C toward baffle 50A. The orientation of the reagent orifice 190C helps guide the flow of reagent toward baffle 50A.

[0053] When the inlet nozzle 20C needs to be scraped, the actuator rod 130C can be moved downward without interrupting the flow of reagent into the baffle 50A. This provides a particularly compact and convenient way to deliver reagent into the inlet nozzle 20C for mixing with the outflow 100.

[0054] It will be understood that the features of the first, second, and third configurations can be combined or interchanged. For example, the lower cap 170A may be provided with reagent orifices 190B and 190C. Similarly, the supports 120A, 120B, and 120C can be interchanged. Likewise, the gap between orifice 173B and actuator rod 130A or support 120C allows for fluid communication of reagents, and orifice 173B may be provided with a tapered surface 175A.

[0055] Therefore, some embodiments recognize that providing reagent (such as fuel) feed to supply an alternative injection source to a swept inlet on the emission reduction system is desirable. Existing etch emission reduction systems have complex actuator designs for providing fuel injection useful for semiconductor gas emission reduction (PFC), and separating the actuator spring system from the fuel feed (such as a spray gun) would prove advantageous. During swept inlet testing, a swept inlet is used to minimize fuel consumption—an extended swept inlet is preferred—however, design conflicts arise between the actuator and the bellows. By providing an inlet assembly configured as described above, reagent can be introduced to provide optimal disruption efficiency of the outflow, while also providing easy actuation of the nozzle scraper, which reduces the complexity of the actuator design.

[0056] Although illustrative embodiments of the invention have been disclosed in detail herein with reference to the accompanying drawings, it should be understood that the invention is not limited to the precise embodiments, and that various changes and modifications can be made therein by those skilled in the art without departing from the scope of the invention as defined by the appended claims and their equivalents.

[0057] Figure Labels Entry components 10; 10A; 10B; 10C Inlet nozzles 20; 20A; 20B; 20C 40A coil spring Baffle 50; 50A Spray gun 55 60mm orifice Port 65 70mm orifice Outflow conduit 80 Outflow 100 Bracket 120A; 120B; 120C Recessed portion 125B Actuator rod 130; 130A; 130C Orifice 133A tapered surface 135A Reagent pressure stabilizing chambers 140A; 140B; 140C Cylindrical structures 150A; 150B; 150C Hat 160A; 160C Cap 170A; 170B; 170C Orifice 173A; 173B tapered surface 175A Parallel section 177A Reagent inlet 180A; 180B Reagent orifice 190B; 190C Cylindrical section 200°C.

Claims

1. An inlet component for an emission reduction device, the emission reduction device being used to process an outflow from a semiconductor processing tool, the inlet component comprising: An outflow inlet is configured to deliver the outflow to a nozzle conduit for delivery to the emission reduction chamber; A nozzle guide scraper assembly having a nozzle guide scraper, the nozzle guide scraper being housed within the nozzle guide and configured to reciprocate within the nozzle guide to reduce outflow deposits within the nozzle guide; A reagent pressure-regulating chamber configured to receive reagent and having a wall through which at least a portion of the nozzle scraper assembly extends, the wall defining at least one reagent orifice configured to deliver the reagent from the pressure-regulating chamber into the nozzle conduit.

2. The inlet component according to claim 1, wherein, The nozzle conduit extends between a first end near the reagent pressure stabilizing chamber and a second end near the emission reduction chamber.

3. The inlet component according to claim 1 or 2, wherein, The wall is at least one of the following: Located at the first end of the nozzle conduit; and It is shared by the nozzle conduit and the reagent pressure stabilizing chamber.

4. The inlet component according to any of the preceding claims, wherein, The nozzle guide tube scraper assembly has an actuator rod that extends from the nozzle guide tube scraper through the reagent pressure chamber to the actuator.

5. The inlet component according to claim 4, wherein, The actuator rod is at least one of the following: Extending through the wall; and It terminates at a scraper holder, which is configured to hold the nozzle guide scraper.

6. The inlet component according to claim 5, wherein, The scraper holder is defined as at least one of the following: At least one support orifice is configured to facilitate the flow of the reagent through the scraper support; Multiple bracket openings.

7. The inlet component according to claim 6, wherein, The plurality of bracket openings are positioned circumferentially and coaxially around the scraper bracket.

8. The inlet component according to any of the preceding claims, wherein, The nozzle conduit is at least one of the following: The nozzle inlet is configured to receive the outflow, and the scraper support is located in a non-actuated position upstream of the nozzle inlet; Includes a baffle duct, the baffle duct being shaped and configured to redirect the outflow from the outflow inlet to the nozzle duct; as well as It extends through the reagent orifice.

9. The inlet component according to any of the preceding claims, wherein, The size of the reagent orifice is set to be larger than that of the nozzle guide tube scraper assembly.

10. The inlet component according to any of the preceding claims, wherein, At least one of the reagent orifice and the nozzle guide scraper assembly is at least one of the following: The size is set to provide a gap between the wall and the nozzle conduit scraper assembly to facilitate the flow of the reagent from the pressure chamber to the nozzle conduit; The size is set to provide the gap between the wall and the nozzle conduit scraper assembly to control the flow rate of the reagent from the pressure chamber to the nozzle conduit; The spacer is shaped to provide the gap between the wall and the nozzle conduit scraper assembly to control the flow direction of the reagent from the pressure chamber to the nozzle conduit. The spacer is shaped to provide the gap between the wall and the nozzle conduit scraper assembly to control the flow direction of the reagent from the pressure chamber to the nozzle conduit around the nozzle conduit scraper. as well as It is shaped into a cone.

11. The inlet component according to any of the preceding claims, wherein, The wall defines an orifice through which the nozzle guide scraper assembly extends, and at least one of the reagent orifices includes at least one separate orifice defined by the wall.

12. The inlet assembly according to any of the preceding claims, comprising a plurality of individual orifices defined by the wall, the plurality of individual orifices being configured to facilitate the flow of the reagent from the pressure chamber to the nozzle conduit.

13. The inlet component according to claim 12, wherein, The plurality of individual orifices are at least one of the following: Positioned circumferentially and coaxially around the scraper bracket; The size setting controls the flow rate of the reagent from the pressure stabilizing chamber to the nozzle conduit; Shaped to control the flow direction of the reagent from the pressure stabilizing chamber to the nozzle conduit; and It is shaped to control the flow direction of the reagent from the pressure stabilizing chamber to the nozzle conduit around the nozzle conduit scraper.

14. The inlet component according to any of the preceding claims, wherein, The pressure stabilizing chamber is defined as a pressure stabilizing chamber inlet configured to receive the reagent.

15. The inlet component according to any of the preceding claims, wherein, The pressure stabilizing chamber includes a second wall opposite to the wall through which the nozzle guide scraper assembly extends.

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