A high-purity quartz tube surface cleaning device and a cleaning method

Abstract

The application provides a high-purity quartz tube surface cleaning device and a cleaning method, and relates to a quartz tube cleaning device. The high-purity quartz tube surface cleaning device comprises an ultrasonic cleaner, a cleaning tank arranged in the ultrasonic cleaner, a chain plate conveyor, the cleaning tank being arranged below the conveying path of the chain plate conveyor, and the middle section of the chain plate conveyor being recessed and located in the cleaning tank, a cleaning mechanism arranged on one side of the top of the chain plate conveyor, the cleaning mechanism comprising a driving assembly, an adjusting assembly and a processing assembly, the processing assembly comprising an inner tube cleaning mechanism and an outer tube cleaning mechanism, the adjusting assembly being used for switching the quartz tube horizontally and in an inclined posture, the inclined state being beneficial to the timely flow of waste liquid in the tube, avoiding sewage residue, and the quartz tube being cleaned by the ultrasonic cleaner, the impurity waste liquid generated in the cleaning process being directly discharged into the cleaning tank, and the impurity residue being prevented from being brought out to cause secondary pollution of the cleaning tank.

Description

Technical Field

[0001] This invention relates to a quartz tube cleaning device, and more particularly to a high-purity quartz tube surface cleaning device and cleaning method. Background Technology

[0002] High-purity quartz tubes are a special type of glass tube with silicon dioxide as the main component. They are characterized by extremely low impurity content and excellent comprehensive performance, making them an indispensable key material in many high-end manufacturing fields. Specialized cleaning equipment is used in the production and processing of high-purity quartz tubes.

[0003] Quartz tube surface cleaning equipment is a type of high-precision industrial equipment specifically designed to remove contaminants from the inner and outer walls of quartz tubes. Its goal is to restore the cleanliness of the quartz tube to meet the stringent requirements for material surface quality. After cleaning the quartz tube, the uncovered parts cannot be effectively cleaned, and stubborn stains are easily left on the surface of the quartz tube, resulting in cleaning dead zones. In addition, if there is repeated contamination between different batches during the cleaning process, the cleaning solution will be contaminated, affecting the final cleanliness. Summary of the Invention

[0004] The purpose of this invention is to overcome the shortcomings of the prior art by proposing a high-purity quartz tube surface cleaning device and cleaning method.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A high-purity quartz tube surface cleaning device includes: an ultrasonic cleaner with a cleaning tank inside; a chain conveyor with the cleaning tank positioned below the conveying path of the chain conveyor, the middle section of which is recessed and located within the cleaning tank; the chain conveyor including multiple tube clamps, each chain plate connected to a tube clamp; and a cleaning mechanism located on the top side of the chain conveyor, comprising a drive assembly, an adjustment assembly, and a processing assembly. The processing assembly includes an internal tube cleaning mechanism and an external tube cleaning mechanism. The drive assembly is used to drive the... The processing component reciprocates along the extension direction of the quartz tube, so that the inner cleaning mechanism and the outer cleaning mechanism clean the inner and outer walls of the quartz tube simultaneously, respectively. When the processing component reciprocates, the adjusting component switches the quartz tube between a horizontal and an inclined position. When the quartz tube switches from the horizontal position to the inclined position, the cleaning mechanism moves from the lower side to the higher side of the quartz tube. When the quartz tube switches from the inclined position to the horizontal position, the cleaning mechanism moves from the higher side to the lower side of the quartz tube.

[0006] Preferably, the external cleaning mechanism includes a drive assembly, which includes a drive motor, a bidirectional threaded screw, a moving block, and a positioning frame. The drive motor is drivenly connected to the bidirectional threaded screw, the moving block is threadedly connected to the bidirectional threaded screw, and the bottom of the moving block is rotatably connected to one end of the positioning frame.

[0007] Preferably, the drive motor is driven by a transmission mechanism, and the transmission mechanism is driven by multiple cleaning brushes for cleaning the ends of the quartz tube.

[0008] Preferably, the pipe cleaning mechanism includes an adjustment assembly, which includes a turntable, a connecting rod, a first lever, a second lever, a push rod, and a fixed frame. The end of the bidirectional threaded screw away from the first drive motor is connected to the turntable. The outer periphery of the turntable is rotatably connected to one end of the connecting rod. The other end of the connecting rod is rotatably connected to the bottom of the fixed frame. The middle of the first lever is rotatably connected to the push rod. The two ends of the second lever are respectively rotatably connected to the top of the push rod and the fixed frame. The first lever and the second lever are parallel to each other.

[0009] Preferably, the driving assembly further includes a second driving motor, and the processing assembly includes a rotating shaft, a cleaning plug, an annular scraper, and a planetary gear set. One side of the sun gear of the planetary gear set is driven by the second driving motor, and the other side of the sun gear is fixed with a rotating shaft. The front end of the rotating shaft is respectively provided with the cleaning plug and the annular scraper. The cleaning plug and the annular scraper slide against the inner wall of the quartz tube.

[0010] Preferably, the processing component further includes cleaning rods, a plurality of cleaning rods being rotatably connected to the planetary gears of the planetary gear set, and the drive motor driving the plurality of cleaning rods to perform circular motion through the planetary gear set.

[0011] Preferably, the inner wall of the cleaning tank is equipped with a filter tank, and the side wall of the cleaning tank is connected to a collection tank, which is located at the rear port of the quartz pipe.

[0012] Preferably, the ultrasonic cleaner is equipped with a rejection mechanism inside. When the drive assembly cleans the quartz tube, the rejection mechanism is in a closed state. When the drive assembly finishes cleaning the quartz tube, the rejection mechanism is in an open state and fits against the cleaning rod.

[0013] Preferably, the removal mechanism includes a support frame, a W-shaped frame, an arc-shaped scraper, and a spring. The top two sides of the support frame are rotatably connected to the two ends of multiple sets of W-shaped frames. The middle of the W-shaped frame is fixedly connected to the top of the spring. Two arc-shaped scrapers are fixedly connected to the top of the W-shaped frame and rotatably connected to the top two sides of the support frame. The W-shaped frame is arranged on both sides of the outer wall of the cleaning rod.

[0014] Preferably, a cleaning method, based on the high-purity quartz tube surface cleaning equipment described above, includes the following steps: S1: The quartz tube is placed on multiple clamps on the chain plate of the chain conveyor and transported along the length of the chain conveyor. The transport stops when the quartz tube is transported to the bottom of the cleaning mechanism. S2: The driving component reciprocates to push the processing component to clean the quartz tube placed along the width direction through the internal and external cleaning mechanisms. The adjusting component is used to switch the quartz tube between horizontal and inclined positions to complete the cleaning and drainage of the quartz tube. S3: The quartz tube is transported to the subsequent cleaning tank for secondary treatment by the chain plate conveyor and finally transported to the discharge port by the chain plate conveyor.

[0015] Compared with the prior art, the beneficial effects of the present invention are: The quartz tube is fixed on the chain conveyor by a pipe clamp and transported into the cleaning mechanism. After entering the cleaning mechanism, the drive component drives the internal and external cleaning mechanism to reciprocate and scrub along the tube. At the same time, the adjustment component switches the quartz tube to reciprocating horizontal and inclined positions. The inclined position facilitates the timely flow of waste liquid inside the tube and avoids sewage residue. Then, it is cleaned by an ultrasonic cleaner to efficiently remove impurities adhering to the inner and outer walls of the quartz tube. The impurities and waste liquid generated during cleaning are directly discharged into the cleaning tank to prevent impurities from being retained in the tube and carried out, causing secondary pollution to the cleaning tank. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the high-purity quartz tube surface cleaning equipment proposed in this invention; Figure 2 This is a cross-sectional view of the high-purity quartz tube surface cleaning equipment proposed in this invention; Figure 3 An exploded view of the high-purity quartz tube surface cleaning device proposed in this invention; Figure 4 This is a schematic diagram of the high-purity quartz tube surface cleaning equipment proposed in this invention; Figure 5 This is a partial structural schematic diagram of the high-purity quartz tube surface cleaning equipment proposed in this invention; Figure 6 This is a diagram showing the changing states of the cleaning mechanism proposed in this invention; Figure 7 This is a schematic diagram of the cleaning mechanism proposed in this invention; Figure 8 This is a schematic diagram of the processing mechanism proposed in this invention; Figure 9 This is an exploded view of the cleaning mechanism proposed in this invention; Figure 10This is a schematic diagram of the rejection mechanism proposed in this invention.

[0017] In the diagram: 1. Ultrasonic cleaner; 11. Cleaning tank; 12. Collection tank; 2. Chain conveyor; 21. Pipe clamp; 3. Quartz tube; 4. Cleaning mechanism; 41. Drive assembly; 411. Drive motor one; 412. Bidirectional threaded screw; 413. Moving block; 414. Positioning frame; 415. Drive motor two; 42. Adjustment assembly; 421. Turntable; 422. Connecting rod; 423. Lever one; 424. Lever two; 425. Push rod; 426. Fixing frame; 43. Processing assembly; 431. Rotating shaft; 432. Cleaning plug; 433. Annular scraper; 434. Planetary gear set; 435. Cleaning rod; 436. Transmission mechanism; 437. Cleaning brush; 5. Removal mechanism; 51. Support frame; 52. W-shaped frame; 53. Arc-shaped scraper; 54. Spring. Detailed Implementation

[0018] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0019] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0020] The terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature.

[0021] Combination Figure 1 , Figure 2 , Figure 8 and Figure 9This invention provides a high-purity quartz tube surface cleaning device, comprising: an ultrasonic cleaner 1, with a cleaning tank 11 inside; a chain conveyor 2, the cleaning tank 11 being disposed below the conveying path of the chain conveyor 2, with the middle section of the chain conveyor 2 recessed and located within the cleaning tank 11, the chain conveyor 2 including multiple tube clamps 21, each chain plate of the chain conveyor 2 being connected to a tube clamp 21; and a cleaning mechanism 4 disposed on one side of the top of the chain conveyor 2, the cleaning mechanism 4 including a drive assembly 41, an adjustment assembly 42, and a processing assembly 43, the processing assembly 43 including an internal tube cleaning mechanism and an external tube cleaning mechanism. The drive assembly 41 is used to drive the processing assembly 43 to reciprocate along the extension direction of the quartz tube 3, so that the inner cleaning mechanism and the outer cleaning mechanism clean the inner and outer walls of the quartz tube 3 simultaneously. When the processing assembly 43 reciprocates, the adjustment assembly 42 switches the quartz tube 3 between a horizontal posture and an inclined posture. When the quartz tube 3 switches from a horizontal posture to an inclined posture, the cleaning mechanism 4 moves from the lower side of the quartz tube 3 to the higher side of the quartz tube 3. When the quartz tube 3 switches from an inclined posture to a horizontal posture, the cleaning mechanism 4 moves from the higher side of the quartz tube 3 to the lower side of the quartz tube 3. Specifically, the quartz tube 3 is clamped and fixed to each chain plate of the chain conveyor 2 by multiple pipe clamps 21. The multiple pipe clamps 21 are fixed to the front and rear ends of each chain plate by bolts. The chain conveyor 2 transports the quartz tube 3 along its length. When the quartz tube 3 is transported to the bottom of the cleaning mechanism 4, the cleaning mechanism 4 starts to work. The drive component 41 drives the processing component 43 to clean. The adjustment component 42 adjusts the quartz tube 3 up and down according to the reciprocating movement of the drive component 41. The processing component 43 is divided into an internal cleaning mechanism and an external cleaning mechanism, which can clean the inner and outer walls of the quartz tube 3 respectively, realizing simultaneous cleaning of the inner and outer walls. The drive processing component 43 reciprocates along the extension direction of the quartz tube 3, providing power for internal rotation cleaning. While the processing component 43 reciprocates to clean, the adjustment component 42 adjusts the up and down of one end of the quartz tube 3 held by the pipe clamps 21, so that the quartz tube 3 moves back and forth between a horizontal and an inclined posture. The cleaning mechanism 4 moves synchronously with the orientation of the quartz tube 3. When the quartz tube 3 changes from a horizontal to an inclined orientation, the cleaning mechanism 4 moves from the lower side to the higher side of the quartz tube 3. When the quartz tube 3 changes from an inclined to a horizontal orientation, the cleaning mechanism 4 moves from the higher side to the lower side of the quartz tube 3. The inclined orientation allows the waste liquid generated during cleaning inside the tube to flow out along the tube wall, preventing the cleaning wastewater from stagnating inside the quartz tube 3. The synchronous mechanical scrubbing inside and outside the tube is combined with the subsequent ultrasonic cleaning in the tank of the ultrasonic cleaner 1. At the same time, the middle section of the chain conveyor 2 is recessed downward and placed inside the cleaning tank 11 of the ultrasonic cleaner 1. The quartz tube 3 can be immersed in the cleaning liquid in the cleaning tank 11 to complete the ultrasonic pre-cleaning and complete the deep impurity removal cleaning of the inner and outer surfaces of the quartz tube 3. After cleaning, the chain conveyor 2 continues to transport the quartz tube 3 away from the cleaning tank 11, completing the discharge and cleaning.

[0022] Combination Figure 5 , Figure 6 and Figure 7 The external cleaning mechanism includes a drive assembly 41, which includes a drive motor 411, a bidirectional threaded screw 412, a moving block 413, and a positioning frame 414. The drive motor 411 is driven to the bidirectional threaded screw 412, the moving block 413 is threaded to the bidirectional threaded screw 412, and the bottom of the moving block 413 is rotatably connected to one end of the positioning frame 414. Specifically, when the external cleaning mechanism is working, the drive motor 411 drives the bidirectional threaded screw 412 to rotate. The moving block 413, which is threaded onto the bidirectional threaded screw 412, can reciprocate linearly along the groove inside the screw. The bottom of the moving block 413 drives the positioning frame 414, which is connected to it, to move synchronously. The positioning frame 414 is L-shaped, which makes it easy to insert into the inside of the quartz pipe 3. The external cleaning component on the positioning frame 414 reciprocates along the outer wall of the quartz pipe 3 to complete the cleaning operation of the outer wall of the pipe.

[0023] Combination Figure 1 , Figure 2 and Figure 3 The drive motor 411 is connected to the transmission mechanism 436, and the transmission mechanism 436 is connected to multiple cleaning brushes 437. The multiple cleaning brushes 437 are used to clean the ends of the quartz tube 3. Specifically, the drive motor 411 outputs power and drives the drive gear of the transmission mechanism 436 to rotate. The drive gear drives the driven gears on both sides of the bottom to rotate using a chain. A cleaning brush 437 is fixed on one side of each of the two driven gears, which drives the cleaning brush 437 to rotate, thereby brushing and cleaning the end of the quartz tube 3 to remove impurities and dirt attached to the end of the tube.

[0024] Combination Figure 2 , Figure 4 and Figure 10 The pipe cleaning mechanism includes an adjustment assembly 42, which includes a turntable 421, a connecting rod 422, a first lever 423, a second lever 424, a push rod 425, and a fixed frame 426. One end of a bidirectional threaded screw 412 away from the first drive motor 411 is connected to the turntable 421. One end of the connecting rod 422 is rotatably connected to the outer periphery of the turntable 421. The other end of the connecting rod 422 is rotatably connected to the bottom of the fixed frame 426. The push rod 425 is rotatably connected to the middle of the first lever 423. The two ends of the second lever 424 are rotatably connected to the top of the push rod 425 and the fixed frame 426, respectively. The first lever 423 and the second lever 424 are parallel to each other. Specifically, the bidirectional threaded screw 412 drives the turntable 421 to rotate synchronously during rotation. A connecting rod 422 is rotatably connected to one side of the turntable 421. The other end of the connecting rod 422 pulls the lever 423 to move up and down. Since the bottom of the lever 423 is fixed to the bottom of the fixed frame 426, one side of the lever 423 moves up and down. During the up and down rotation of one side of the lever 423, the push rod 425 is fixed in the middle of the lever 423 and the top of the lever 424. The top of the push rod 425 is an integral arc groove, which facilitates lifting the quartz tube 3. The lever 423 and the lever 424 always remain parallel. While the lever 423 moves, it guides the push rod 425 up and down.

[0025] Combination Figure 6 , Figure 7 and Figure 8The drive assembly 41 also includes a second drive motor 415. The processing assembly 43 includes a rotating shaft 431, a cleaning plug 432, an annular scraper 433 and a planetary gear set 434. One side of the sun gear of the planetary gear set 434 is driven by the second drive motor 415, and the other side of the sun gear is fixed with a rotating shaft 431. The front end of the rotating shaft 431 is respectively provided with a cleaning plug 432 and an annular scraper 433. The cleaning plug 432 and the annular scraper 433 slide against the inner wall of the quartz tube 3. Specifically, the drive motor 415 provides rotational power to the sun gear of the planetary gear set 434. The rotating shaft 431 fixes the sun gear in the middle of the planetary gear set 434 to rotate. The cleaning plug 432 and the annular scraper 433 at the front end of the rotating shaft 431 rotate accordingly and slide against the inner wall of the quartz tube 3. The annular scraper 433 scrapes off the impurities attached to the inner wall of the tube. The cleaning plug 432 is fixed at the front end of the rotating shaft 431 and wipes off the scraped impurities, thus realizing the cleaning operation of the dirt on the inner wall of the quartz tube 3.

[0026] Combination Figure 5 , Figure 6 and Figure 7 The processing component 43 also includes cleaning rods 435, and multiple cleaning rods 435 are rotatably connected to the planetary gears of the planetary gear set 434. The drive motor 415 drives the multiple cleaning rods 435 to perform circular motion through the planetary gear set 434. Specifically, the drive motor 415 outputs power to drive the sun gear of the planetary gear set 434 to rotate. The power is transmitted to each planetary gear through the sun gear, which drives the multiple cleaning rods 435 rotating inside the planetary gears to make circular motion together. The rotating multiple cleaning rods 435 can adhere to the outer wall of the quartz pipe 3 to sweep and clean, further scraping away residual impurities on the pipe wall and improving the cleaning effect of the inner wall of the pipe.

[0027] Combination Figure 1 and Figure 2 The inner wall of the cleaning tank 11 is equipped with a filter tank, and the side wall of the cleaning tank 11 is connected to a collection tank 12, which is located at the rear port of the quartz pipe 3. Specifically, the filter tank on the inner wall of the cleaning tank 11 can intercept and filter the dirt and impurities generated by the ultrasonic cleaner 1 to ensure the cleaning environment. The waste liquid and impurities generated by the cleaning mechanism 4 through the quartz pipe 3 flow backward and are discharged into the collection tank 12.

[0028] Combination Figure 3 and Figure 10 The ultrasonic cleaner 1 is equipped with a rejection mechanism 5. When the drive assembly 41 cleans the quartz tube 3, the rejection mechanism 5 is in a closed state. When the drive assembly 41 finishes cleaning the quartz tube 3, the rejection mechanism 5 is in an open state and fits the cleaning rod 435. Specifically, during the cleaning process of the quartz tube 3, when the drive assembly 41 cleans the quartz tube 3, the rejection mechanism 5 remains closed, which does not affect the cleaning action of the cleaning rod 435 and the quartz tube 3. After the drive assembly 41 completes the cleaning operation of the quartz tube 3, when it moves backward, the rejection mechanism 5 is squeezed and switches to the open state and fits against the surface of the cleaning rod 435, scraping away the impurities and dirt adhering to the cleaning rod 435, realizing the self-cleaning of the cleaning rod 435, and avoiding secondary pollution of the next quartz tube 3 by the residue of impurities.

[0029] Combination Figure 10 The removal mechanism 5 includes a support frame 51, a W-shaped frame 52, an arc-shaped scraper 53, and a spring 54. The top two sides of the support frame 51 are rotatably connected to the two ends of multiple sets of W-shaped frames 52. The middle part of the W-shaped frame 52 is fixedly connected to the top of the spring 54. Two arc-shaped scrapers 53 are fixedly connected to the top of the W-shaped frame 52, and the arc-shaped scrapers 53 are rotatably connected to the top two sides of the support frame 51. The W-shaped frame 52 is set on both sides of the outer wall of the cleaning rod 435. Specifically, when the removal mechanism 5 is working, the spring 54 provides downward pulling force, causing the W-shaped frame 52 on both sides to drive the arc-shaped scraper 53 to remain in a closed state. The arc-shaped scraper 53 is symmetrically distributed on the left and right, each being semi-circular, which facilitates adhering to the outer wall of the cleaning rod 435. During the cleaning stage of the quartz tube 3, the W-shaped frame 52 drives the two arc-shaped scrapers 53 to separate to both sides, in a closed avoidance position, so as not to obstruct the cleaning rod 435 from entering and exiting the quartz tube 3. When the cleaning of the quartz tube 3 is completed and the cleaning rod 435 is retracted, under the squeezing action of the arc-shaped scrapers 53 on both sides of the spring 54, the W-shaped frame 52 rotates around the top of the support frame 51 to both sides, and the arc-shaped scrapers 53 on both sides retract inward and adhere tightly to the outer wall of the cleaning rod 435. The arc-shaped scrapers 53 can then scrape off the impurities adhering to the surface of the rod, completing the cleaning of the cleaning rod 435.

[0030] A cleaning method, based on the high-purity quartz tube surface cleaning equipment described above, includes the following steps: S1: Place the quartz tube 3 on the multiple tube clamps 21 on the chain plate of the chain conveyor 2 and transport it along the length of the chain conveyor 2. Stop transporting the quartz tube 3 when it reaches the bottom of the cleaning mechanism 4. S2: The drive component 41 reciprocates to push the processing component 43 to clean the quartz pipe 3 placed along the width direction by the internal cleaning mechanism and the external cleaning mechanism. The adjustment component 42 is used to switch the quartz pipe 3 between the horizontal and inclined postures to complete the cleaning and sewage discharge of the quartz pipe 3. S3: The material is conveyed to the subsequent cleaning tank 11 by the chain conveyor 2 for secondary processing, and finally conveyed to the discharge port by the chain conveyor 2.

[0031] While the present invention has been disclosed above, its scope of protection is not limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, and all such changes and modifications will fall within the scope of protection of the present invention.

Claims

1. A high-purity quartz tube surface cleaning device, characterized in that, include: An ultrasonic cleaner (1) is provided with a cleaning tank (11). The chain conveyor (2) has a cleaning tank (11) located under the conveying path of the chain conveyor (2), and the middle section of the chain conveyor (2) is recessed and located in the cleaning tank (11). The chain conveyor (2) includes multiple pipe clamps (21), and each chain plate of the chain conveyor (2) is connected to a pipe clamp (21). A cleaning mechanism (4) is disposed on the top side of the chain conveyor (2). The cleaning mechanism (4) includes a drive assembly (41), an adjustment assembly (42), and a processing assembly (43). The processing assembly (43) includes an internal cleaning mechanism and an external cleaning mechanism. The drive assembly (41) is used to drive the processing assembly (43) to reciprocate along the extension direction of the quartz pipe (3) so that the internal cleaning mechanism and the external cleaning mechanism clean the inner and outer walls of the quartz pipe (3) simultaneously. When the cleaning component (43) moves back and forth, the adjusting component (42) switches the quartz tube (3) between a horizontal posture and an inclined posture. When the quartz tube (3) switches from the horizontal posture to the inclined posture, the cleaning mechanism (4) moves from the lower side of the quartz tube (3) to the higher side of the quartz tube (3). When the quartz tube (3) switches from the inclined posture to the horizontal posture, the cleaning mechanism (4) moves from the higher side of the quartz tube (3) to the lower side of the quartz tube (3).

2. The high-purity quartz tube surface cleaning equipment according to claim 1, characterized in that, The external cleaning mechanism includes a drive assembly (41), which includes a drive motor (411), a bidirectional threaded screw (412), a moving block (413), and a positioning frame (414). The drive motor (411) is drivenly connected to the bidirectional threaded screw (412), and the moving block (413) is threadedly connected to the bidirectional threaded screw (412). The bottom of the moving block (413) is rotatably connected to one end of the positioning frame (414).

3. The high-purity quartz tube surface cleaning equipment according to claim 2, characterized in that, The drive motor (411) is connected to a transmission mechanism (436), which is connected to a plurality of cleaning brushes (437) for cleaning the ends of the quartz tube (3).

4. The high-purity quartz tube surface cleaning equipment according to claim 2, characterized in that, The pipe cleaning mechanism includes an adjustment component (42), which includes a turntable (421), a connecting rod (422), a lever one (423), a lever two (424), a push rod (425), and a fixed frame (426). The end of the bidirectional threaded screw (412) away from the drive motor one (411) is connected to the turntable (421). The outer periphery of the turntable (421) is rotatably connected to one end of the connecting rod (422). The other end of the connecting rod (422) is rotatably connected to the bottom of the fixed frame (426). The middle of the lever one (423) is rotatably connected to the push rod (425). The two ends of the lever two (424) are rotatably connected to the top of the push rod (425) and the fixed frame (426), respectively. The lever one (423) and the lever two (424) are parallel to each other.

5. The high-purity quartz tube surface cleaning equipment according to claim 2, characterized in that, The drive assembly (41) further includes a second drive motor (415). The processing assembly (43) includes a rotating shaft (431), a cleaning plug (432), an annular scraper (433), and a planetary gear set (434). The sun gear of the planetary gear set (434) is driven by the second drive motor (415) on one side. The rotating shaft (431) is fixed on the other side of the sun gear. The cleaning plug (432) and the annular scraper (433) are respectively provided at the front end of the rotating shaft (431). The cleaning plug (432) and the annular scraper (433) slide against the inner wall of the quartz tube (3).

6. The high-purity quartz tube surface cleaning equipment according to claim 5, characterized in that, The processing component (43) also includes cleaning rods (435), a plurality of cleaning rods (435) being rotatably connected to the planetary gears of the planetary gear set (434), and the second drive motor (415) driving the plurality of cleaning rods (435) to perform circular motion through the planetary gear set (434).

7. The high-purity quartz tube surface cleaning equipment according to claim 1, characterized in that, The inner wall of the cleaning tank (11) is equipped with a filter tank, and the side wall of the cleaning tank (11) is connected to a collection tank (12), which is located at the rear port of the quartz pipe (3).

8. The high-purity quartz tube surface cleaning equipment according to claim 6, characterized in that, The ultrasonic cleaner (1) is equipped with a rejection mechanism (5). When the drive assembly (41) cleans the quartz tube (3), the rejection mechanism (5) is in a closed state. When the drive assembly (41) finishes cleaning the quartz tube (3), the rejection mechanism (5) is in an open state and fits against the cleaning rod (435).

9. The high-purity quartz tube surface cleaning equipment according to claim 8, characterized in that, The removal mechanism (5) includes a support frame (51), a W-shaped frame (52), an arc-shaped scraper (53), and a spring (54). The top two sides of the support frame (51) are rotatably connected to the two ends of multiple sets of W-shaped frames (52). The middle part of the W-shaped frame (52) is fixedly connected to the top of the spring (54). The two arc-shaped scrapers (53) are fixedly connected to the top of the W-shaped frame (52), and the arc-shaped scrapers (53) are rotatably connected to the top two sides of the support frame (51). The W-shaped frame (52) is set on both sides of the outer wall of the cleaning rod (435).

10. A cleaning method, based on the high-purity quartz tube surface cleaning equipment as described in any one of claims 1-9, characterized in that, Includes the following steps: S1: Place the quartz tube (3) on the chain plate of the chain conveyor (2) and transport it along the length of the chain conveyor (2). Stop transporting when the quartz tube (3) is transported to the bottom of the cleaning mechanism (4). S2: The drive component (41) reciprocates to push the processing component (43) to clean the quartz pipe (3) placed along the width direction by the cleaning mechanism inside the pipe and the cleaning mechanism outside the pipe. The adjustment component (42) is used to switch the quartz pipe (3) between the horizontal and inclined postures to complete the cleaning and sewage discharge of the quartz pipe (3). S3: The material is conveyed to the subsequent cleaning tank (11) by the chain conveyor (2) for secondary processing, and finally conveyed to the discharge port by the chain conveyor (2).

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