A quartz crucible acid immersion cleaning and spray cleaning integrated automatic device
Patent Information
- Application Number
- CN202611301615.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-08-26
- Publication Date
- 2026-10-16
AI Technical Summary
[0005]石英坩埚生产加工后表面及内壁易残留粉尘、金属杂质与氧化物,需借助专用清洗设备完成净化处理,传统清洗方式多为人工手持冲洗或静态浸泡,清洗均匀性差,坩埚内外壁清洁效果不一致,杂质去除不彻底,同时常规清洗设备缺乏可靠的坩埚定位结构,清洗过程中易发生偏移晃动,影响清洗精度,且设备密封防护性不足,清洗药液易发生飞溅,既造成原料浪费,又存在安全隐患,还会污染作业环境
1.本发明结构合理,石英坩埚进入到转盘上的时候,对轴销上的壁板进行转动,通过壁板的转动使弧形板上的限位轮贴合在石英坩埚的表面,在横板上插设有插杆,且插杆的底端固定连接有对接块,对接块上固定连接有卡块,通过壁板的转动使卡块贴合在限位盘的边缘部进行滑动,当限位轮贴合在石英坩埚表面的时候,通过弹簧的弹力使卡块卡设在卡槽的内部,便于对壁板的位置进行固定。
Smart Images

Figure CN122913168A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of crucible acid immersion cleaning technology, and in particular to an automated equipment integrating acid immersion cleaning and spray cleaning of quartz crucibles. Background Technology
[0002] Long quartz crucibles are widely used in the melting and processing of special crystals and photovoltaic materials. During the forming, grinding and transportation processes, metallic impurities, dust and oxide residues easily adhere to their surfaces. Conventional cleaning methods have limited ability to remove impurities and are unable to remove stubborn contaminants in the micropores. Simple water washing cannot meet the requirements for high purity. Therefore, an acid immersion cleaning process is required to remove trace impurities and ensure the performance of the crucible and the quality of the product.
[0003] Patent CN202824030U discloses an automated integrated equipment for acid immersion cleaning and spray cleaning of quartz crucibles. The equipment includes an acid immersion chamber, a transition chamber, a bubbling water immersion tank, an ultrasonic immersion cleaning chamber, an acid-resistant isolation door, a PLC control system, a frequency converter control system, photoelectric sensors, an acid-resistant transmission roller conveyor, and a demisting system. Under PLC control, the equipment uses photoelectric sensors for detection and positioning. Driven by a frequency converter motor, the quartz crucibles are moved along the transmission roller conveyor, passing through the acid immersion chamber and a screw-driven lifting platform to immerse them in the acid tank, bubbling tank, ultrasonic cleaning tank, transition chamber, and spray cleaning chamber, thus completing the cleaning of the quartz crucible surface. The demisting system can promptly remove acid mist and water mist generated during the process, improving work efficiency while avoiding personal injury.
[0004] There are still some issues when cleaning quartz crucibles.
[0005] After the production and processing of quartz crucibles, dust, metal impurities, and oxides are easily left on the surface and inner wall. Specialized cleaning equipment is required to complete the purification treatment. Traditional cleaning methods are mostly manual hand rinsing or static soaking, which result in poor cleaning uniformity, inconsistent cleaning effect on the inner and outer walls of the crucible, and incomplete removal of impurities. At the same time, conventional cleaning equipment lacks a reliable crucible positioning structure, which is prone to displacement and shaking during the cleaning process, affecting the cleaning accuracy. In addition, the equipment has insufficient sealing protection, and the cleaning solution is prone to splashing, which not only wastes raw materials, poses safety hazards, but also pollutes the working environment. Summary of the Invention
[0006] The purpose of this application is to provide an automated equipment integrating acid immersion cleaning and spray cleaning of quartz crucibles. The equipment fixes the crucible on the turntable through a positioning component, and then the rotation of the turntable causes the cleaning component to clean the inside and outside of the crucible. The protective door is closed by a rotating component to prevent the solution from splashing during cleaning.
[0007] To achieve the above objectives, this application provides the following technical solution: an automated equipment integrating acid immersion cleaning and spray cleaning of quartz crucibles, comprising an equipment body, a cleaning chamber provided on the equipment body, a door installed on the surface of the cleaning chamber, a base plate fixedly connected inside the cleaning chamber, a ring fixedly installed on the base plate, a turntable rotatably connected to the ring, and guide rails fixedly installed on both the base plate and the turntable; It also includes a positioning component, a cleaning component, and a rotating component. The positioning component is disposed on the turntable for fixing the crucible. The cleaning component is disposed inside the main body of the equipment for cleaning the surface and interior of the crucible. The rotating component is disposed on the top plate for closing and cleaning the protective door.
[0008] Preferably, the positioning component includes a through hole in the middle of the turntable, a pair of stop blocks are fixedly connected to the top surface of the turntable, shaft seats are fixedly connected to both sides of the top surface of the turntable, shaft pins are fixedly connected to the shaft seats, wall plates are rotatably connected to both ends of the shaft pins, an arc plate is rotatably connected to the top of the wall plate, and limit wheels are rotatably connected to both ends of the arc plate.
[0009] Preferably, a horizontal plate is fixedly connected to the inner wall of the wall panel, a rod is inserted into the middle of the horizontal plate, a docking block is fixedly connected to the bottom end of the rod, a locking block is fixedly connected to the docking block, a limiting plate is fixedly connected to the shaft pin, a locking groove is opened on the limiting plate, and one end of the locking block is locked inside the limiting plate.
[0010] Preferably, a collar is fixedly connected to the top end of the insertion rod, and a spring is fixedly connected to the insertion rod. The two ends of the spring are fixedly connected to the top surface of the horizontal plate and the bottom surface of the collar, respectively.
[0011] Preferably, the cleaning assembly includes a first gear ring fixedly installed on the bottom surface of the turntable, a first gear disc meshing on the first gear ring, the first gear disc being rotatably connected to a main shaft, the bottom end of the main shaft being fixedly connected to the inner wall of the device body, a second gear disc meshing on the first gear disc, the second gear disc being fixedly connected to a transmission shaft, the top end of the transmission shaft being fixedly connected to the output end of a first motor, and the first motor being fixedly installed on the device body.
[0012] Preferably, a stepping slide is fixedly installed inside the main body of the device. A slider is slidably connected to the stepping slide. A push rod is fixedly connected to the slider. A crossbar is fixedly connected to the bottom end of the push rod at a horizontal position. A first water pipe is fixedly connected to the other end of the crossbar. The top end of the first water pipe extends through the through hole to the top position of the turntable. A first nozzle is fixedly connected to the top end of the first water pipe.
[0013] Preferably, a fixed base is fixedly connected to the inner wall of the cleaning chamber, a second water pipe is fixedly connected to the fixed base, and a second nozzle is installed on the surface of the second water pipe.
[0014] Preferably, the rotating assembly includes a top plate fixedly installed at the top of the cleaning chamber, a rotating sleeve rotatably connected to the top plate, a protective door fixedly connected to the bottom end of the rotating sleeve, a third toothed disc fixedly connected to the top end of the rotating sleeve, a fourth toothed disc meshing on the third toothed disc, the fourth toothed disc being fixedly connected to the output end of a second motor, and the second motor being fixedly installed on the top plate.
[0015] Preferably, a third water pipe is inserted inside the rotating sleeve, the top end of the third water pipe is rotatably connected to the top plate, and a branch pipe is fixedly connected to the bottom end of the third water pipe, with several sets of third nozzles installed on the branch pipe.
[0016] Preferably, a second toothed ring is fixedly connected to the third water pipe, a fifth toothed disc meshes with the second toothed ring, the fifth toothed disc is fixedly connected to the output end of the third motor, and the third motor is fixedly mounted on the top plate.
[0017] In summary, the present invention has the following beneficial effects: 1. The present invention has a reasonable structure. When the quartz crucible enters the turntable, the wall plate on the shaft pin rotates. The rotation of the wall plate causes the limiting wheel on the arc plate to fit against the surface of the quartz crucible. An insert rod is inserted into the horizontal plate, and a docking block is fixedly connected to the bottom end of the insert rod. A locking block is fixedly connected to the docking block. The rotation of the wall plate causes the locking block to slide against the edge of the limiting plate. When the limiting wheel fits against the surface of the quartz crucible, the elastic force of the spring causes the locking block to be locked inside the locking groove, which facilitates the fixation of the wall plate position.
[0018] 2. In this invention, the first motor operates to rotate the second gear disk on the transmission shaft. The rotation of the second gear disk drives the first gear disk to rotate, and the rotation of the first gear disk drives the first gear ring on the turntable to rotate, thereby facilitating the turntable to rotate the quartz crucible. Then, the stepping slide operates to move the slider. The movement of the slider causes the crossbar to move through the push rod. The movement of the crossbar causes the first water pipe to enter the interior of the quartz crucible through the through hole. The interior of the quartz crucible is cleaned through the first nozzle, and the surface of the quartz crucible is cleaned through the second nozzle on the second water pipe.
[0019] 3. In this invention, before cleaning, the second motor operates to rotate the fourth toothed disc, the rotation of the fourth toothed disc drives the rotating sleeve on the third toothed disc to rotate, and the rotation of the rotating sleeve drives the protective door to rotate, preventing the cleaning liquid from splashing outside the cleaning room. Then, the third motor operates to rotate the fifth toothed disc, the rotation of the fifth toothed disc drives the third water pipe on the second toothed ring to rotate, and then the branch pipe rotates to make the third nozzle clean the top of the quartz crucible. Attached Figure Description
[0020] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0021] Figure 1 This is a schematic diagram of the three-dimensional structure of the equipment body; Figure 2 This is a schematic diagram of the internal three-dimensional structure of the equipment body; Figure 3 This is a schematic diagram of the three-dimensional structure of the turntable; Figure 4 This is a schematic diagram of the three-dimensional structure of the base plate viewed from below. Figure 5 This is a schematic diagram of the three-dimensional structure of the base plate; Figure 6 This is a schematic diagram of the three-dimensional cross-sectional structure of the top slab; Figure 7 This is a schematic diagram of a partial three-dimensional structure of the protective door; Figure 8 for Figure 3 Enlarged structural diagram at point A in the middle.
[0022] In the diagram: 1. Equipment body; 101. Cleaning chamber; 102. Door; 103. Base plate; 104. Ring; 105. Turntable; 106. Guide rail; 2. Through hole; 201. Stop block; 202. Shaft seat; 203. Shaft pin; 204. Wall panel; 205. Arc plate; 206. Limiting wheel; 207. Horizontal plate; 208. Insert rod; 209. Connecting block; 210. Locking block; 211. Limiting disc; 212. Locking groove; 213. Collar; 214. Spring; 3. First gear ring; 301. First gear disc; 302. Main shaft; 303. Second gear disc 304. Drive shaft; 305. First motor; 306. Stepping slide; 307. Slider; 308. Push rod; 309. Crossbar; 310. First water pipe; 311. First nozzle; 312. Fixed base; 313. Second water pipe; 314. Second nozzle; 4. Top plate; 401. Rotating sleeve; 402. Protective door; 403. Third gear plate; 404. Fourth gear plate; 405. Second motor; 406. Third water pipe; 407. Branch pipe; 408. Third nozzle; 409. Second gear ring; 410. Fifth gear plate; 411. Third motor. Detailed Implementation
[0023] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0024] Example: Reference Figure 1 - Figure 8 The diagram shows an automated equipment integrating acid immersion cleaning and spray cleaning of quartz crucibles. It includes a main body 1, a cleaning chamber 101 on the main body 1, a door 102 on the surface of the cleaning chamber 101, a base plate 103 fixedly connected inside the cleaning chamber 101, a ring 104 fixedly mounted on the base plate 103, and a turntable 105 rotatably connected to the ring 104. Guide rails 106 are fixedly mounted on both the base plate 103 and the turntable 105. The equipment also includes a positioning component, a cleaning component, and a rotating component. The positioning component is mounted on the turntable 105 for fixing the crucible, the cleaning component is located inside the main body 1 for cleaning the surface and interior of the crucible, and the rotating component is mounted on the top plate 4 for closing and cleaning the protective door 402.
[0025] Specifically, it should be noted that the quartz crucible is guided downwards onto the turntable 105 via the guide rail 106, and then the quartz crucible is fixed on the turntable 105 by the positioning component. The rotation of the turntable 105 causes the first nozzle 311 and the second nozzle 314 to clean the inner and outer walls of the quartz crucible. The first motor 305, the stepper slide 306, the second motor 405 and the third motor 411 are all electrically connected to the control unit via wires. The specific working principle is based on existing technology and will not be elaborated further here.
[0026] In one embodiment of this invention, the positioning component includes a through hole 2 located in the center of the turntable 105. A pair of stop blocks 201 are fixedly connected to the top surface of the turntable 105. Shaft seats 202 are fixedly connected to both sides of the top surface of the turntable 105. Shaft pins 203 are fixedly connected to the shaft seats 202. Wall plates 204 are rotatably connected to both ends of the shaft pins 203. An arc-shaped plate 205 is rotatably connected to the top end of the wall plate 204. Limiting wheels 206 are rotatably connected to both ends of the arc-shaped plate 205. A horizontal plate 2 is fixedly connected to the inner wall of the wall plate 204. 07. A rod 208 is inserted into the middle of the horizontal plate 207. A docking block 209 is fixedly connected to the bottom end of the rod 208. A locking block 210 is fixedly connected to the docking block 209. A limiting plate 211 is fixedly connected to the shaft pin 203. A locking groove 212 is opened on the limiting plate 211. One end of the locking block 210 is locked inside the limiting plate 211. A collar 213 is fixedly connected to the top end of the rod 208. A spring 214 is fixedly connected to the rod 208. The two ends of the spring 214 are fixedly connected to the top surface of the horizontal plate 207 and the bottom surface of the collar 213, respectively.
[0027] Specifically, when the quartz crucible enters the turntable 105, the wall plate 204 on the shaft pin 203 is rotated. The rotation of the wall plate 204 causes the limiting wheel 206 on the arc plate 205 to fit against the surface of the quartz crucible. An insert rod 208 is inserted into the horizontal plate 207, and a docking block 209 is fixedly connected to the bottom end of the insert rod 208. A locking block 210 is fixedly connected to the docking block 209. The rotation of the wall plate 204 causes the locking block 210 to slide against the edge of the limiting plate 211. When the limiting wheel 206 fits against the surface of the quartz crucible, the elastic force of the spring 214 causes the locking block 210 to be locked inside the slot 212, which facilitates the fixation of the position of the wall plate 204.
[0028] In one embodiment of this invention, the cleaning assembly includes a first gear ring 3 fixedly mounted on the bottom surface of a turntable 105. A first gear disc 301 meshes with the first gear ring 3. The first gear disc 301 is rotatably connected to a main shaft 302. The bottom end of the main shaft 302 is fixedly connected to the inner wall of the device body 1. A second gear disc 303 meshes with the first gear disc 301. The second gear disc 303 is fixedly connected to a drive shaft 304. The top end of the drive shaft 304 is fixedly connected to the output end of a first motor 305. The first motor 305 is fixedly mounted on the device body 1. A stepping slide is fixedly mounted inside the device body 1. 306. A slider 307 is slidably connected to the stepping slide 306. A push rod 308 is fixedly connected to the slider 307. A crossbar 309 is fixedly connected to the bottom horizontal position of the push rod 308. A first water pipe 310 is fixedly connected to the other end of the crossbar 309. The top end of the first water pipe 310 extends to the top position of the turntable 105 through the through hole 2. A first nozzle 311 is fixedly connected to the top end of the first water pipe 310. A fixed seat 312 is fixedly connected to the inner wall of the cleaning chamber 101. A second water pipe 313 is fixedly connected to the fixed seat 312. A second nozzle 314 is installed on the surface of the second water pipe 313.
[0029] Specifically, the first motor 305 operates to rotate the second gear disk 303 on the transmission shaft 304. The rotation of the second gear disk 303 drives the first gear disk 301 to rotate, and the rotation of the first gear disk 301 drives the first gear ring 3 on the turntable 105 to rotate, thereby facilitating the turntable 105 to rotate the quartz crucible. Then, the stepping slide 306 operates to move the slider 307. The movement of the slider 307 moves the crossbar 309 through the push rod 308. The movement of the crossbar 309 allows the first water pipe 310 to enter the interior of the quartz crucible through the through hole 2. The interior of the quartz crucible is cleaned through the first nozzle 311, and the surface of the quartz crucible is cleaned through the second nozzle 314 on the second water pipe 313.
[0030] In one embodiment of this invention, the rotating assembly includes a top plate 4 fixedly installed at the top of the cleaning chamber 101. A rotating sleeve 401 is rotatably connected to the top plate 4. A protective door 402 is fixedly connected to the bottom end of the rotating sleeve 401. A third gear disc 403 is fixedly connected to the top end of the rotating sleeve 401. A fourth gear disc 404 meshes with the third gear disc 403. The fourth gear disc 404 is fixedly connected to the output end of a second motor 405. The second motor 405 is fixedly installed on the top plate 4. A third water pipe 406 is inserted inside the rotating sleeve 401. The top end of the third water pipe 406 is rotatably connected to the top plate 4. A branch pipe 407 is fixedly connected to the bottom end of the third water pipe 406. Several sets of third nozzles 408 are installed on the branch pipe 407. A second toothed ring 409 is fixedly connected to the third water pipe 406. A fifth gear disc 410 meshes with the second toothed ring 409. The fifth gear disc 410 is fixedly connected to the output end of a third motor 411. The third motor 411 is fixedly installed on the top plate 4.
[0031] Specifically, before cleaning, the second motor 405 operates to rotate the fourth gear disk 404. The rotation of the fourth gear disk 404 drives the rotating sleeve 401 on the third gear disk 403 to rotate. The rotation of the rotating sleeve 401 drives the protective door 402 to rotate, preventing the cleaning fluid from splashing outside the cleaning chamber 101. Then, the third motor 411 operates to rotate the fifth gear disk 410. The rotation of the fifth gear disk 410 drives the third water pipe 406 on the second gear ring 409 to rotate. Then, the branch pipe 407 rotates to make the third nozzle 408 clean the top of the quartz crucible.
[0032] The working principle of this invention is as follows: When the quartz crucible enters the turntable 105, the wall plate 204 on the shaft pin 203 rotates. The rotation of the wall plate 204 causes the limiting wheel 206 on the arc plate 205 to adhere to the surface of the quartz crucible. An insert rod 208 is inserted on the horizontal plate 207, and a docking block 209 is fixedly connected to the bottom end of the insert rod 208. A locking block 210 is fixedly connected to the docking block 209. The rotation of the wall plate 204 causes the locking block 210 to slide against the edge of the limiting plate 211. When the limiting wheel 206 adheres to the surface of the quartz crucible, the elastic force of the spring 214 causes the locking block 210 to be locked inside the slot 212, which facilitates the fixation of the position of the wall plate 204.
[0033] Then, the first motor 305 operates to rotate the second gear disk 303 on the transmission shaft 304. The rotation of the second gear disk 303 drives the first gear disk 301 to rotate. The rotation of the first gear disk 301 drives the first gear ring 3 on the turntable 105 to rotate, thereby facilitating the turntable 105 to rotate the quartz crucible. Then, the stepping slide 306 operates to move the slider 307. The movement of the slider 307 moves the crossbar 309 through the push rod 308. The movement of the crossbar 309 allows the first water pipe 310 to enter the interior of the quartz crucible through the through hole 2. The interior of the quartz crucible is cleaned through the first nozzle 311, and the surface of the quartz crucible is cleaned through the second nozzle 314 on the second water pipe 313.
[0034] Before cleaning, the second motor 405 operates to rotate the fourth gear disk 404. The rotation of the fourth gear disk 404 drives the rotating sleeve 401 on the third gear disk 403 to rotate. The rotation of the rotating sleeve 401 drives the protective door 402 to rotate, preventing the cleaning fluid from splashing outside the cleaning chamber 101. Then, the third motor 411 operates to rotate the fifth gear disk 410. The rotation of the fifth gear disk 410 drives the third water pipe 406 on the second gear ring 409 to rotate. Then, the branch pipe 407 rotates to make the third nozzle 408 clean the top of the quartz crucible.
[0035] Finally, it should be noted that the above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. An automated equipment integrating acid immersion cleaning and spray cleaning of quartz crucibles, characterized in that, include: The equipment body (1) is provided with a cleaning chamber (101). A door (102) is installed on the surface of the cleaning chamber (101). A base plate (103) is fixedly connected inside the cleaning chamber (101). A ring (104) is fixedly installed on the base plate (103). A turntable (105) is rotatably connected on the ring (104). Guide rails (106) are fixedly installed on both the base plate (103) and the turntable (105). It also includes a positioning component, a cleaning component and a rotating component. The positioning component is set on the turntable (105) for fixing the crucible. The cleaning component is set inside the equipment body (1) for cleaning the surface and interior of the crucible. The rotating component is set on the top plate (4) for closing and cleaning the protective door (402).
2. The automated equipment for integrated acid immersion cleaning and spray cleaning of quartz crucibles according to claim 1, characterized in that: The positioning component includes a through hole (2) in the middle of the turntable (105). A pair of stop blocks (201) are fixedly connected to the top surface of the turntable (105). Shaft seats (202) are fixedly connected to both sides of the top surface of the turntable (105). Shaft pins (203) are fixedly connected to the shaft seats (202). Wall plates (204) are rotatably connected to both ends of the shaft pins (203). Arc plates (205) are rotatably connected to the top end of the wall plates (204). Limiting wheels (206) are rotatably connected to both ends of the arc plates (205).
3. The automated equipment for integrated acid immersion cleaning and spray cleaning of quartz crucibles according to claim 2, characterized in that: A horizontal plate (207) is fixedly connected to the inner wall of the wall panel (204). A rod (208) is inserted into the middle of the horizontal plate (207). A docking block (209) is fixedly connected to the bottom end of the rod (208). A locking block (210) is fixedly connected to the docking block (209). A limiting plate (211) is fixedly connected to the shaft pin (203). A locking groove (212) is opened on the limiting plate (211). One end of the locking block (210) is locked inside the limiting plate (211).
4. The automated equipment for integrated acid immersion cleaning and spray cleaning of quartz crucibles according to claim 3, characterized in that: A collar (213) is fixedly connected to the top end of the insertion rod (208), and a spring (214) is fixedly connected to the insertion rod (208). The two ends of the spring (214) are fixedly connected to the top surface of the horizontal plate (207) and the bottom surface of the collar (213), respectively.
5. The automated equipment for integrated acid immersion cleaning and spray cleaning of quartz crucibles according to claim 2, characterized in that: The cleaning assembly includes a first gear ring (3) fixedly installed on the bottom surface of the turntable (105), a first gear disc (301) meshing on the first gear ring (3), the first gear disc (301) being rotatably connected to the main shaft (302), the bottom end of the main shaft (302) being fixedly connected to the inner wall of the device body (1), a second gear disc (303) meshing on the first gear disc (301), the second gear disc (303) being fixedly connected to the transmission shaft (304), the top end of the transmission shaft (304) being fixedly connected to the output end of the first motor (305), and the first motor (305) being fixedly installed on the device body (1).
6. The automated equipment for integrated acid immersion cleaning and spray cleaning of quartz crucibles according to claim 5, characterized in that: A stepping slide (306) is fixedly installed inside the main body (1) of the device. A slider (307) is slidably connected to the stepping slide (306). A push rod (308) is fixedly connected to the slider (307). A crossbar (309) is fixedly connected to the bottom of the push rod (308) at a horizontal position. A first water pipe (310) is fixedly connected to the other end of the crossbar (309). The top end of the first water pipe (310) extends through the through hole (2) to the top position of the turntable (105). A first nozzle (311) is fixedly connected to the top end of the first water pipe (310).
7. The automated equipment for integrated acid immersion cleaning and spray cleaning of quartz crucibles according to claim 5, characterized in that: A fixed seat (312) is fixedly connected to the inner wall of the cleaning chamber (101), and a second water pipe (313) is fixedly connected to the fixed seat (312). A second nozzle (314) is installed on the surface of the second water pipe (313).
8. The automated equipment for integrated acid immersion cleaning and spray cleaning of quartz crucibles according to claim 2, characterized in that: The rotating assembly includes a top plate (4) fixedly installed at the top of the cleaning chamber (101), a rotating sleeve (401) rotatably connected to the top plate (4), a protective door (402) fixedly connected to the bottom end of the rotating sleeve (401), a third gear disc (403) fixedly connected to the top end of the rotating sleeve (401), a fourth gear disc (404) meshing on the third gear disc (403), and the fourth gear disc (404) fixedly connected to the output end of a second motor (405), which is fixedly installed on the top plate (4).
9. The automated equipment for integrated acid immersion cleaning and spray cleaning of quartz crucibles according to claim 8, characterized in that: The rotating sleeve (401) is equipped with a third water pipe (406), the top end of the third water pipe (406) is rotatably connected to the top plate (4), and the bottom end of the third water pipe (406) is fixedly connected to a branch pipe (407). Several sets of third nozzles (408) are installed on the branch pipe (407).
10. The automated equipment for integrated acid immersion cleaning and spray cleaning of quartz crucibles according to claim 9, characterized in that: A second toothed ring (409) is fixedly connected to the third water pipe (406), and a fifth toothed disc (410) meshes with the second toothed ring (409). The fifth toothed disc (410) is fixedly connected to the output end of the third motor (411), and the third motor (411) is fixedly installed on the top plate (4).
Citation Information
Patent Citations
Quartz crucible acid-soaking cleaning and spray cleaning integral automation device
CN202824030U