Barrier device and work pod

Abstract

The embodiment of the present application relates to the technical field of pollution blocking, in particular to a blocking device and a working cabin. The blocking device comprises a device body and a first gas supply pipe. The device body has a channel penetratingly arranged along a first direction. The cross-sectional area of the first end of the channel is larger than that of the second end of the channel. The first gas supply pipe is used for supplying gas into the channel along a second direction. The second direction is the direction in which the second end of the first gas supply pipe points to the first end of the first gas supply pipe. The first end of the first gas supply pipe has a first opening. The first opening is arranged on the inner side wall of the channel and is in communication with the channel. The second end of the first gas supply pipe is located in the device body. In the first direction, the second end of the first gas supply pipe is closer to the second end of the channel than the first end of the first gas supply pipe. The gas supplied by the first gas supply pipe can send the pollutants in the channel back to the first end of the channel, thereby realizing the blocking of the pollutants.

Description

Technical Field

[0001] This application relates to the field of pollution barrier technology, specifically to a barrier device and a working chamber. Background Technology

[0002] In processes such as semiconductor manufacturing or precision optics, the work chamber contains multiple interconnected working cavities, each with different cleanliness requirements. However, contaminants from working cavities with lower cleanliness requirements can enter working cavities with higher cleanliness requirements, leading to a reduction in the lifespan of equipment in those cavities. Summary of the Invention

[0003] This application discloses a barrier device and a working chamber for reducing the amount of contaminants from a working chamber with low cleanliness requirements entering a working chamber with high cleanliness requirements.

[0004] In a first aspect, this application provides a barrier device comprising a device body and a first air supply pipe. The device body has a channel extending through it in a first direction; a first end of the channel connects to a first working chamber, and a second end connects to a second working chamber, the cleanliness of the second working chamber being greater than that of the first working chamber; the first air supply pipe includes a first air supply section extending in a second direction, a first end of the first air supply section having a first opening located on the inner wall of the channel and communicating with the channel, and a second end of the first air supply section communicating with a first air supply device; in the first direction, the distance between the first end of the first air supply section and the first end of the channel is less than the distance between the second end of the first air supply section and the first end of the channel. Thus, the first opening is inclined towards the first end of the channel, making it easier for the gas supplied by the first air supply device to flow towards the first end of the channel rather than the second end. The gas supplied by the first air supply pipe can return some contaminants in the channel to the first end, reducing the amount of contaminants in the first working chamber that pass through the channel into the second working chamber, thereby improving the cleanliness of the second working chamber.

[0005] In one possible implementation, the blocking device further includes a first gas equalization chamber and a first air inlet pipe. The first gas equalization chamber is disposed within the device body, surrounds the channel, and is connected to the second end of the first air delivery section; the air inlet of the first air inlet pipe is connected to the first air supply device, and the air outlet is connected to the first gas equalization chamber. Thus, on the one hand, the first gas equalization chamber can buffer the gas delivered by the first air supply device to the first gas equalization chamber through the first air inlet pipe, thereby stabilizing the gas pressure and flow velocity within the first gas equalization chamber. This results in more stable gas pressure and flow velocity flowing from the first gas equalization chamber into the first air delivery pipe, leading to a more uniform airflow into the channel. This helps prevent gas flow separation within the channel and avoids turbulence or eddies that could cause asymmetric airflow within the channel. Consequently, it prevents a reduction in the blocking effect of the blocking device on pollutants and ensures the reliability of the blocking effect. On the other hand, impurities in the gas transported by the first air inlet pipe can be deposited in the gas equalization chamber, which helps to improve the cleanliness of the gas transported into the channel by the first air delivery pipe.

[0006] In one possible implementation, the cross-sectional area of ​​the channel gradually decreases along the direction from the first end of the channel to the second end of the channel. The first opening is located on the side of the first gas equalization chamber near the first end of the channel. The blocking device further includes a second air supply pipe, which includes a second air supply section extending in a third direction. The first end of the second air supply section has a second opening, which is located on the inner wall of the channel and communicates with the channel. The second opening is located on the side of the first gas equalization chamber near the first end of the channel. The distance between the first opening and the first end of the channel is not equal to the distance between the second opening and the first end of the channel. The second end of the second air supply section is used to connect to a second air supply device. The distance between the first end of the second air supply section and the first end of the channel is less than the distance between the second end of the second air supply section and the first end of the channel. This allows for a greater number of openings on the first end of the channel within the first gas equalization chamber, increasing the gas flow rate within that channel. This also allows some contaminants from the upper channel of the first gas equalization chamber (which has a larger cross-sectional area and contains more contaminants) to be returned to the first end of the channel. This reduces the amount of contaminants from the first working chamber that pass through the channel into the second working chamber, thus improving the cleanliness of the second working chamber.

[0007] In one possible implementation, the distance between the first opening and the first end of the channel is less than the distance between the second opening and the first end of the channel, and the angle between the second direction and the first direction is less than the angle between the third direction and the first direction. This results in two advantages: First, the larger distance between the first and second openings reduces the influence of gas flowing from the first opening into the channel on gas flowing from the second opening into the channel, making the airflow within the channel more stable, facilitating gas diffusion, and ensuring a more uniform airflow, thus improving the barrier effect of the device on contaminants. Second, the gas flowing into the channel can return some contaminants from the channel to the first end of the channel from two directions, further reducing the amount of contaminants in the first working chamber that pass through the channel into the second working chamber, thereby improving the cleanliness of the second working chamber.

[0008] In one possible implementation, the second end of the second air delivery section is connected to the first air equalization chamber.

[0009] In one possible implementation, the first air supply pipe and the second air supply pipe are located on one side of the first air distribution chamber near the first end of the channel.

[0010] In one possible implementation, the first opening is located on the side of the first gas equalization chamber near the first end of the channel; the blocking device further includes a third gas delivery pipe, the third gas delivery pipe including a third gas delivery section extending along the first direction, the first end of the third gas delivery section having a third opening, the third opening being disposed on the inner sidewall of the channel and communicating with the channel, the third opening being located on the side of the first gas equalization chamber away from the first end of the channel; the second end of the third gas delivery section is used to communicate with a third gas supply device; the distance between the first end of the third gas delivery section and the first end of the channel is less than the distance between the second end of the third gas delivery section and the first end of the channel. Thus, the first opening is located on the upper side of the first gas equalization chamber, and the third opening is located on the lower side of the first gas equalization chamber. On the one hand, the third gas supply device delivers gas through the third gas delivery pipe, which can return a portion of the contaminants (that were not returned to the first end of the channel by the gas from the first opening) to the first end of the channel, further reducing the amount of contaminants in the first working chamber that pass through the channel into the second working chamber 200, thereby improving the blocking effect of the blocking device on contaminants. On the other hand, it facilitates the diffusion of gas at different locations within the channel, thereby improving the barrier effect of the device on pollutants.

[0011] In one possible implementation, the blocking device includes a second gas equalization chamber and a second air inlet pipe. The second gas equalization chamber is disposed within the device body, surrounds the channel, and is connected to the second end of the third air delivery section; the air inlet of the second air inlet pipe is connected to the third air supply device, and the air outlet is connected to the second gas equalization chamber. Thus, on the one hand, the second gas equalization chamber can buffer the gas supplied by the third air supply device to the second gas equalization chamber through the second air inlet pipe, thereby stabilizing the gas pressure and flow velocity within the second gas equalization chamber. This results in more stable gas pressure and flow velocity flowing from the second gas equalization chamber into the second air delivery pipe, leading to a more uniform airflow into the channel. This helps prevent gas flow separation within the channel and avoids the formation of turbulence or eddies that could cause asymmetric airflow within the channel. Consequently, it prevents a reduction in the blocking effect of the blocking device on pollutants, ensuring the reliability of the blocking effect. On the other hand, impurities in the gas delivered by the second air inlet pipe can be deposited in the gas equalization chamber, which helps to improve the cleanliness of the gas delivered into the channel by the third air delivery pipe.

[0012] In one possible implementation, the third air delivery pipe is located on the side of the first air distribution chamber away from the first end of the channel; the second air distribution chamber is located between the first air distribution chamber and the third air delivery pipe.

[0013] In one possible implementation, in the first direction, the distance between the third opening and the second end of the channel is in the range of 2 mm to 10 mm.

[0014] In one possible implementation, there are multiple first air supply pipes, which are spaced apart circumferentially along the channel, and the first openings of the multiple first air supply pipes are spaced apart circumferentially along the channel, or the first openings of the multiple first air supply pipes are interconnected.

[0015] In one possible implementation, the barrier device further includes a cooling conduit located within the device body and between the inner wall of the first gas equalization chamber and the channel. A cool liquid or gas can be introduced into the cooling conduit to cool the device body, the gas in the first gas equalization chamber, and the contaminants in the channel. This reduces the temperature within the channel, thereby decreasing the molecular thermal motion of the contaminants and further reducing the amount of contaminants in the first working chamber that pass through the channel into the second working chamber, thus further improving the barrier effect of the barrier device.

[0016] Secondly, this application provides a working chamber, which includes a first working chamber, a second working chamber, and a barrier device as described in any of the above embodiments. The first working chamber is connected to a first end of a channel, and the second working chamber is connected to a second end of the channel. The cleanliness of the second working chamber is greater than that of the first working chamber. Thus, the barrier device can prevent contaminants in the first working chamber from passing through the channel into the second working chamber, achieving a barrier between the first and second working chambers.

[0017] In one possible implementation, a suction pipe is further included, having a suction port located on the inner wall of the first working chamber. The suction port communicates with the first working chamber and is also connected to a channel. This allows the suction pipe to extract gas and any floating contaminants from the first working chamber, effectively preventing contaminants from entering the channel and the second working chamber.

[0018] In one possible implementation, the extraction pipe is adjacent to the barrier device. This proximity of the extraction port to the barrier device helps prevent contaminants in the first working chamber from entering the channel, and also helps prevent contaminants in the channel from entering the first working chamber. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a structural diagram of the working cabin and equipment in one embodiment;

[0021] Figure 2 This is a structural diagram of a channel in one embodiment;

[0022] Figure 3 This is a structural diagram of the channel in another embodiment;

[0023] Figure 4 This is a structural diagram of the channel in yet another embodiment;

[0024] Figure 5 This is a structural diagram of the cooling pipes in one embodiment;

[0025] Figure 6 This is a structural diagram of the cooling pipes in another embodiment;

[0026] Figure 7 This is a structural diagram of the cooling pipes in another embodiment.

[0027] Explanation of reference numerals in the attached figures:

[0028] 10. Work pod;

[0029] 100. First working chamber; 200. Second working chamber; 300. Barrier device; 310. Device body; 311. Channel; 3111. Inner wall of the channel; 3112. Outer wall of the channel; 312. First end of the channel; 313. Second end of the channel; 320. First air supply pipe; 321. First air supply section; 3211. First end of the first air supply section; 3212. Second end of the first air supply section; 3201. First opening; 322. First connecting section; 3221. First end of the first connecting section; 3222. Second end of the first connecting section; 330. Second air supply pipe; 331. Second air supply section; 3311. First end of the second air supply section; 3312. Second end of the second air supply section; 3301. Second opening; 332. Second connecting section; 3321, First end of the second connecting section; 3322, Second end of the second connecting section; 340, Third air supply pipe; 341, Third air supply section; 3411, First end of the third air supply section; 3412, Second end of the third air supply section; 3401, Third opening; 342, Third connecting section; 3421, First end of the third connecting section; 3422, Second end of the third connecting section; 350, First air distribution chamber; 360, First air inlet pipe; 361, Air inlet of the first air inlet pipe; 362, Air outlet of the first air inlet pipe; 370, Second air distribution chamber; 380, Second air inlet pipe; 381, Air inlet of the second air inlet pipe; 382, ​​Air outlet of the second air inlet pipe; 390, Cooling pipe; 400, Extraction pipe; 410, Extraction port;

[0030] 20. Equipment. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all possible embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0032] In the embodiments of this application, the terms "exemplary" or "for example" are used to indicate that something is an example, illustration, or description. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or designs. Specifically, the use of the terms "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0033] As used herein, terms such as “equal,” “parallel,” and “perpendicular” include the described situation and situations that are similar to the described situation, within an acceptable range of deviation, which is determined by those skilled in the art taking into account the measurement under discussion and the error associated with the measurement of the particular quantity (i.e., the limitations of the measurement system). For example, “equal” includes absolute equality and approximate equality, where an acceptable range of deviation for approximate equality may be, for example, a difference between the two equal items less than or equal to 5% of either one.

[0034] In the embodiments of this application, the directional indications used to explain the structure and movement of different components, such as up, down, left, right, front, and back, are relative. These indications are appropriate when the components are in the positions shown in the figures. However, if the description of the component positions changes, these directional indications will also change accordingly.

[0035] In the description of embodiments of this disclosure, unless otherwise stated, "a plurality of" means two or more.

[0036] This application provides a working cabin, such as Figure 1 As shown, the working chamber 10 includes a first working chamber 100 and a second working chamber 200, and the first working chamber 100 and the second working chamber 200 have different requirements for cleanliness.

[0037] It should be noted that cleanliness can be understood as an evaluation standard for the content of pollutants in a space. Pollutants can include gases, such as acidic gases like carbon dioxide or sulfur dioxide, alkaline gases like ammonia or phosphine, strong oxidizing gases like ozone or fluorine, and neutral gases like carbon monoxide, oxygen, water vapor, or hydrocarbon gases. Alternatively, pollutants can include solid particulate matter such as metal particles, dust, organic particles, or radioactive particles. Of course, pollutants are not limited to gases or solid particulate matter.

[0038] The cleanliness level of the second working chamber 200 is higher than that of the first working chamber 100. This means the first working chamber 100 has lower cleanliness requirements and contains a relatively higher concentration of contaminants. Conversely, the second working chamber 200 has higher cleanliness requirements and contains a relatively lower concentration of contaminants.

[0039] Based on this, the first working chamber 100 can be used to house devices that may generate contaminants. The second working chamber 200 can be used to house equipment 20 that needs to operate in a high-cleanliness environment, such as at least one of the following: optical instruments such as laser equipment or spectrometers, precision measuring instruments such as particle counters or differential pressure transmitters, electronic equipment such as lithography machines or electron microscopes, and mechanical equipment such as spraying equipment or robotic arms.

[0040] like Figure 1 As shown, the working chamber 10 also includes a barrier device 300, which is connected between the first working chamber 100 and the second working chamber 200. The extending direction of the barrier device 300 is parallel to the arrangement direction of the first working chamber 100 and the second working chamber 200. For ease of explanation, the arrangement direction of the first working chamber 100 and the second working chamber 200 is referred to as the first direction M1.

[0041] The barrier device 300 has a channel 311 extending along a first direction M1, with a first end 312 communicating with a first working chamber 100 and a second end 313 communicating with a second working chamber 200. Thus, the channel 311 connects the first working chamber 100 and the second working chamber 200, and the device 20 in the second working chamber 200 can scan, detect, or process the device in the first working chamber 100.

[0042] For example, in an example where the second working chamber 200 is used to house an electron microscope, the electron microscope can scan the device in the first working chamber 100 through channel 311. Alternatively, in an example where the second working chamber 200 is used to house a spraying device, the nozzle of the spraying device can pass through channel 311 and spray the device in the first working chamber 100.

[0043] In the above example, both the first working chamber 100 and the second working chamber 200 can be connected to vacuum equipment such as a mechanical vacuum pump or a gas trapping pump. The vacuum equipment can extract the gas in the first working chamber 100 or the second working chamber 200 to increase the vacuum level in the first working chamber 100 or the second working chamber 200, so that the device 20 in the second working chamber 200 can scan, detect or process the device in the first working chamber 100.

[0044] like Figure 1 As shown, this application embodiment provides a blocking device 300, which includes a device body 310. The device body 310 is connected between a first working chamber 100 and a second working chamber 200, and the extending direction of the device body 310 is parallel to the first direction M1.

[0045] The material of the device body 310 is not limited in this application embodiment. For example, the device body 310 can be made of plastic, and the material used to make the device body 310 can include at least one of plastics such as acrylonitrile butadiene styrene (ABS) or polyethylene terephthalate (PET). Accordingly, the device body 310 can be manufactured using 3D printing technology. Alternatively, the device body 310 can be made of metal, and the material used to make the device body 310 can include at least one of metals such as stainless steel, aluminum alloy, or titanium alloy. Accordingly, the device body 310 can be formed by casting. Of course, the material used to make the device body 310 is not limited to plastic or metal.

[0046] The device body 310 has a channel 311 that extends through the device body 310 along a first direction M1. The first end 312 of the channel is connected to the first working chamber 100, and the second end 313 of the channel is connected to the second working chamber 200. Thus, the channel 311 connects the first working chamber 100 and the second working chamber 200.

[0047] In some implementations, the cross-sectional shape of channel 311 is circular, triangular, rectangular, regular polygonal, square, or irregular. Here, the cross-section of channel 311 is perpendicular to the first direction M1.

[0048] like Figure 1 As shown, the blocking device 300 includes a first air supply pipe 320, which includes a first air supply section 321 extending along a second direction M2. A first end 3211 of the first air supply section has a first opening 3201 located on the inner wall 3111 of the channel and communicating with the channel 311. A second end 3212 of the first air supply section is used to communicate with a first air supply device (e.g., an air pump or a fan). In the first direction M1, the distance between the first end 3211 of the first air supply section and the first end 312 of the channel is less than the distance between the second end 3212 of the first air supply section and the first end 312 of the channel. In this way, the first opening 3201 is inclined toward the first end 312 of the channel. The gas supplied by the first gas supply device into the channel 311 through the first gas supply pipe 320 is more likely to flow toward the first end 312 of the channel, rather than the second end 313 of the channel. The gas supplied by the first gas supply pipe 320 can send some of the contaminants in the channel 311 back to the first end 312 of the channel. This can reduce the amount of contaminants in the first working chamber 100 that pass through the channel 311 into the second working chamber 200, which is beneficial to improving the cleanliness of the second working chamber 200.

[0049] This application embodiment does not limit the gas supplied by the first gas supply device to the channel 311 through the first gas delivery pipe 320. For example, the gas supplied by the first gas supply device to the channel 311 through the first gas delivery pipe 320 may include at least one of high-purity argon, helium, hydrogen, and nitrogen.

[0050] In some implementations, the distance between the first end 3211 of the first air supply section and the first axis L1 is less than the distance between the second end 3212 of the first air supply section and the first axis L1, and the angle α between the second direction M2 and the first direction M1 is greater than 0° and less than 90°. The first axis L1 is parallel to the first direction M1 and passes through the center of the channel 311. For example, the angle α between the second direction M2 and the first direction M1 is 1°, 5°, 10°, 13°, 17°, 20°, 25°, 30°, 36°, 40°, 45°, 50°, 53°, 57°, 60°, 64°, 70°, 77°, 80°, or 85°.

[0051] In some embodiments, please combine Figure 1 and Figure 2 The cross-sectional shape of the first air supply section 321 is circular. The diameter of the circle is 0.1mm to 3mm. For example, the diameter of the circle is 0.1mm, 0.5mm, 1mm, 1.2mm, 1.6mm, 1.8mm, 2mm, 2.1mm, 2.4mm, 2.7mm or 3mm.

[0052] In other embodiments, please refer to Figure 1 and Figure 3 The cross-sectional shape of the first air supply section 321 is strip-shaped. The width of the strip is 0.1mm to 3mm. For example, the width of the strip is 0.1mm, 0.5mm, 1mm, 1.2mm, 1.6mm, 1.8mm, 2mm, 2.1mm, 2.4mm, 2.7mm or 3mm.

[0053] In some examples, the strip may have a certain curvature and extend circumferentially along the channel 311. The first opening 3201 is a slit. The width of the first opening 3201 may be in the range of 0.1 mm to 3 mm.

[0054] In some other embodiments, the cross-sectional shape of the first air delivery section 321 is annular. The width of the annulus is 0.1 mm to 3 mm. For example, the width of the annulus is 0.1 mm, 0.5 mm, 1 mm, 1.2 mm, 1.6 mm, 1.8 mm, 2 mm, 2.1 mm, 2.4 mm, 2.7 mm, or 3 mm.

[0055] Of course, in other examples, the shape of the cross-section of the first air delivery section 321 can be other shapes. This application embodiment does not limit the shape of the cross-section of the first air delivery section 321.

[0056] According to the formula Q = AV (where Q is the volumetric flow rate, A is the cross-sectional area through which the fluid flows, and V is the average velocity of that cross-section), when the volumetric flow rate remains constant, the cross-sectional area through which the fluid flows is inversely proportional to the average velocity of that cross-section. Different shapes of the cross-section of the first air delivery section 321 can result in different cross-sectional areas through which the gas flows, thus affecting the average velocity of the cross-section. Therefore, the shape and / or size of the cross-section of the first air delivery section 321 can be adjusted according to different gas velocity requirements. Furthermore, using a circular shape with a diameter of 0.1mm to 3mm, a strip shape with a width of 0.1mm to 3mm, or an annular shape with a width of 0.1mm to 3mm, allows for a smaller cross-sectional area of ​​the first air delivery section 321. This results in a higher gas velocity delivered by the first air supply device to the channel 311 through the first air delivery pipe 320, which is beneficial for improving the barrier effect of the barrier device 300 on pollutants.

[0057] In some embodiments, there can be multiple first air supply pipes 320, which are spaced apart circumferentially along the channel 311. This increases the gas flow rate within the channel 311, which facilitates gas diffusion within the channel 311 and makes the circumferential airflow more uniform, thereby improving the blocking effect of the blocking device 300 on pollutants.

[0058] Based on this, please combine Figure 1 and Figure 4 The first openings 3201 of multiple first air supply pipes 320 can be interconnected to form an annular opening, the width of which can be in the range of 0.1mm to 3mm. For example, the width of the annular opening can be 0.1mm, 0.5mm, 1mm, 1.2mm, 1.6mm, 1.8mm, 2mm, 2.1mm, 2.4mm, 2.7mm, or 3mm. This results in a smaller annular opening size and cross-sectional area, allowing for a higher gas velocity when the first air supply device delivers gas into the channel 311 through the first air supply pipes 320. When the gas in the first air supply pipes 320 enters the channel 311 through the annular opening, it can form an air curtain within the channel 311, which helps improve the barrier effect of the barrier device 300 on pollutants. Here, "air curtain" can be understood as a gas flow layer with a high gas velocity.

[0059] In some embodiments, such as Figure 1As shown, the blocking device 300 also includes a first air equalization chamber 350 and a first air inlet pipe 360. The first air equalization chamber 350 is disposed inside the device body 310 and is connected to the second end 3212 of the first air supply section. The air inlet 361 of the first air inlet pipe is connected to the first air supply device, and the air outlet 362 of the first air inlet pipe is connected to the first air equalization chamber 350. In this way, on the one hand, the first gas equalization chamber 350 can buffer the gas supplied by the first gas supply device to the first gas equalization chamber 350 through the first gas inlet pipe 360, thereby making the gas pressure and flow velocity in the first gas equalization chamber 350 more stable. This results in more stable gas pressure and flow velocity flowing from the first gas equalization chamber 350 into the first gas delivery pipe 320, further ensuring a more uniform airflow into the channel 311. This helps prevent gas flow separation in the channel 311 and avoids the formation of turbulence or eddies that could lead to asymmetrical airflow in the channel 311. Consequently, it helps prevent a reduction in the blocking effect of the barrier device 300 on contaminants, ensuring the reliability of the barrier device 300's contaminant blocking effect. On the other hand, impurities in the gas supplied by the first gas inlet pipe 360 ​​can be deposited in the gas equalization chamber, which helps improve the cleanliness of the gas supplied by the first gas delivery pipe 320 into the channel 311.

[0060] In some implementations, the first air-regulating cavity 350 can be rectangular, spherical, or annular.

[0061] In the example where the first gas equalization chamber 350 is annular, the first gas equalization chamber 350 can be arranged around the channel 311, thereby increasing the volume of the first gas equalization chamber 350.

[0062] Based on this, the distance between the first gas equalization chamber 350 and the inner wall 3111 of the channel can be in the range of 3mm to 10mm, and the distance between the first gas equalization chamber 350 and the outer wall of the blocking device 300 can be in the range of 3mm to 10mm. This allows for an increase in the volume of the first gas equalization chamber 350. For example, the distance between the first gas equalization chamber 350 and the inner wall 3111 of the channel can be 3mm, 4mm, 5mm, 6mm, 7mm, 8mm, 9mm, or 10mm. The distance between the first gas equalization chamber 350 and the outer wall of the blocking device 300 can be 3mm, 4mm, 5mm, 6mm, 7mm, 8mm, 9mm, or 10mm.

[0063] The cross-section of the first gas-uniforming cavity 350 can be trapezoidal, rectangular, or circular. This application embodiment does not limit the shape of the cross-section of the first gas-uniforming cavity 350. Here, the cross-section of the gas-uniforming cavity is parallel to the first direction M1.

[0064] In some implementations, the second end 3212 of the first air delivery section can be directly connected to the first air distribution chamber 350.

[0065] In other implementations, such as Figure 1 As shown, the first air supply pipe 320 also includes a first connecting section 322, which extends along the first direction M1. The first end 3221 of the first connecting section is connected to the second end 3212 of the first air supply section, and the second end 3222 of the first connecting section is connected to the first air equalization chamber 350.

[0066] In an example where there are multiple first air supply pipes 320, there are multiple first connecting segments 322, and the multiple first connecting segments 322 respectively connect the first air equalization chamber 350 and different first air supply pipes 320.

[0067] In some implementations, such as Figure 1 As shown, the air inlet 361 of the first air inlet pipe is located outside the device body 310.

[0068] In some other implementations, the air inlet 361 of the first air inlet pipe is located inside the device body 310.

[0069] In some implementations, the first gas supply device supplies gas to the first gas equalization chamber 350 through only a first air inlet pipe 360. This helps to prevent gas flow separation in the first gas equalization chamber 350 and helps to prevent the formation of turbulence or eddies in the gas in the first gas equalization chamber 350, thus making the airflow in the first gas equalization chamber 350 more stable.

[0070] In some implementations, the first air supply pipe 320 is located on the side of the first air equalization chamber 350 near the first end 312 of the channel, that is, the first air supply pipe 320 is located between the first air equalization chamber 350 and the first end 312 of the channel. This facilitates communication between the first air equalization chamber 350 and the first air supply pipe 320. In this case, in the first direction M1, the first end 312 of the channel, the first air supply pipe 320, the first air equalization chamber 350, and the second end 313 of the channel are arranged sequentially.

[0071] In some embodiments, the cross-sectional area of ​​the channel 311 gradually decreases along the direction from the first end 312 to the second end 313 of the channel. At this time, the inner wall 3111 of the channel forms an angle with the first direction M1. This embodiment does not limit the angle between the inner wall 3111 of the channel and the first direction M1. Therefore, contaminants in the first working chamber 100 are less likely to enter the second working chamber 200, which helps ensure the cleanliness of the second working chamber 200 and protects the equipment 20 within the second working chamber 200 from the influence of contaminants.

[0072] Based on this, the inner wall 3111 of the channel is relatively smooth, thereby reducing or even avoiding the deposition of pollutants in the channel 311.

[0073] In some embodiments, such as Figure 1As shown, the first opening 3201 is located on the side of the first gas distribution chamber 350 near the first end 312 of the channel. The blocking device 300 also includes a second air supply pipe 330, which includes a second air supply section 331. The second air supply section 331 extends along a third direction M3, and the first end 3311 of the second air supply section has a second opening 3301. The second opening 3301 is located on the inner sidewall 3111 of the channel and communicates with the channel 311. The second end 3312 of the second air supply section is used to connect to the second air supply device. The distance between the first end 3311 of the second air supply section and the first end 312 of the channel is less than the distance between the second end 3312 of the second air supply section and the first end 312 of the channel. In this way, the second opening 3301 is inclined toward the first end 312 of the channel. Thus, the gas supplied by the second gas supply device to the channel 311 through the second gas supply pipe 330 is more likely to flow toward the first end 312 of the channel, rather than the second end 313. The gas supplied by the first gas supply pipe 320 can send some of the contaminants in the channel 311 back to the first end 312 of the channel. This can reduce the amount of contaminants in the first working chamber 100 that pass through the channel 311 into the second working chamber 200, which is beneficial to improving the cleanliness of the second working chamber 200.

[0074] Based on this, the distance between the first opening 3201 and the first end 312 of the channel is not equal to the distance between the second opening 3301 and the first end 312 of the channel. The second opening 3301 is located on the side of the first gas equalization chamber 350 near the first end 312 of the channel. In this way, the number of openings on the side of the first gas equalization chamber 350 near the first end 312 of the channel can be increased, which can increase the gas flow rate in the channel 311 on the side of the first gas equalization chamber 350 near the first end 312 of the channel. This can send some of the contaminants in the channel 311 on the upper side of the first gas equalization chamber 350 (the cross-sectional area of ​​the channel 311 on the upper side of the first gas equalization chamber 350 is larger, and there are more contaminants in the channel 311) back to the first end 312 of the channel. This can reduce the amount of contaminants in the first working chamber 100 that pass through the channel 311 into the second working chamber 200, which is beneficial to improving the cleanliness of the second working chamber 200.

[0075] It is understandable that the closer to the first end 312 of the channel, the larger the cross-sectional area of ​​the channel 311, and the more pollutants are in the channel 311.

[0076] This application embodiment does not limit the gas supplied by the second gas supply device to the channel 311 through the second gas supply pipe 330. For example, the gas supplied by the second gas supply device to the channel 311 through the second gas supply pipe 330 may include at least one of high-purity argon, helium, hydrogen, and nitrogen.

[0077] In some implementations, the distance between the first end 3311 of the second air delivery section and the first axis L1 is less than the distance between the second end and the first axis L1, and the angle β between the third direction M3 and the first direction M1 is greater than 0° and less than 90°. For example, the angle β between the third direction M3 and the first direction M1 is 1°, 5°, 10°, 13°, 17°, 20°, 25°, 30°, 36°, 40°, 45°, 50°, 53°, 57°, 60°, 64°, 70°, 77°, 80°, or 85°.

[0078] In some embodiments, please combine Figure 1 and Figure 2 The cross-sectional shape of the second air supply section 331 is circular. The diameter of the circle is 0.1mm to 3mm. For example, the diameter of the circle is 0.1mm, 0.5mm, 1mm, 1.2mm, 1.6mm, 1.8mm, 2mm, 2.1mm, 2.4mm, 2.7mm or 3mm.

[0079] In other embodiments, please refer to Figure 1 and Figure 3 The cross-sectional shape of the second air supply section 331 is strip-shaped. The width of the strip is 0.1mm to 3mm. For example, the width of the strip is 0.1mm, 0.5mm, 1mm, 1.2mm, 1.6mm, 1.8mm, 2mm, 2.1mm, 2.4mm, 2.7mm or 3mm.

[0080] In some examples, the strip may have a certain curvature and extend circumferentially along the channel 311, and the second opening 3301 is a slit. The width of the second opening 3301 may be in the range of 0.1 mm to 3 mm.

[0081] In some other embodiments, the cross-sectional shape of the second air delivery section 331 is annular. The width of the annulus is 0.1 mm to 3 mm. For example, the width of the annulus is 0.1 mm, 0.5 mm, 1 mm, 1.2 mm, 1.6 mm, 1.8 mm, 2 mm, 2.1 mm, 2.4 mm, 2.7 mm, or 3 mm.

[0082] Of course, in other examples, the shape of the cross-section of the second air supply pipe 330 can also be other shapes. This application embodiment does not limit the shape of the cross-section of the first air supply pipe.

[0083] Different cross-sectional shapes of the second air delivery section 331 can result in different cross-sectional areas through which the gas flows, thus leading to different average flow velocities across the cross-section. Therefore, the shape and / or size of the first air delivery pipe's cross-section can be adjusted according to different gas flow velocity requirements. Furthermore, using a circular diameter of 0.1mm to 3mm, a strip width of 0.1mm to 3mm, or an annular width of 0.1mm to 3mm allows for a smaller cross-sectional area of ​​the second air delivery section 331, resulting in a higher gas flow velocity delivered by the second air supply device to the channel 311 through the second air delivery pipe 330. This, in turn, improves the barrier effect of the barrier device 300 on contaminants.

[0084] In some embodiments, there can be multiple second air supply pipes 330, which are spaced apart circumferentially along the channel 311. This increases the gas flow rate within the channel 311, which facilitates gas diffusion within the channel 311 and makes the circumferential airflow more uniform, thereby improving the blocking effect of the barrier device 300 on pollutants.

[0085] Based on this, please combine Figure 1 and Figure 4 The second openings 3301 of the second air supply pipe 330 can be interconnected to form an annular opening. The width of the annular opening can be in the range of 0.1mm to 3mm. For example, the width of the annular opening can be 0.1mm, 0.5mm, 1mm, 1.2mm, 1.6mm, 1.8mm, 2mm, 2.1mm, 2.4mm, 2.7mm, or 3mm. In this way, the size of the annular opening is small, the cross-sectional area of ​​the annular opening is small, the flow velocity of the gas delivered by the second air supply device to the channel 311 through the second air supply pipe 330 is relatively large, and when the gas in the second air supply pipe 330 enters the channel 311 through the annular opening, it can form an air curtain in the channel 311, which is beneficial to improving the blocking effect of the blocking device 300 on pollutants.

[0086] In some embodiments, such as Figure 1As shown, the distance between the first opening 3201 and the first end 312 of the channel is less than the distance between the second opening 3301 and the first end 312 of the channel, and the angle α between the second direction M2 and the first direction M1 is less than the angle β between the third direction M3 and the first direction M1. Thus, on the one hand, the larger distance between the first opening 3201 and the second opening 3301 reduces the influence of the gas flowing from the first opening 3201 into the channel 311 on the gas flowing from the second opening 3301 into the channel 311, making the airflow within the channel 311 more stable, facilitating gas diffusion within the channel 311, and making the airflow within the channel 311 more uniform, thereby improving the blocking effect of the barrier device 300 on pollutants. On the other hand, the gas flowing into the channel 311 can send some of the pollutants within the channel 311 back to the first end 312 of the channel from two directions, which can further reduce the amount of pollutants in the first working chamber 100 that pass through the channel 311 into the second working chamber 200, improving the cleanliness of the second working chamber 200.

[0087] In other embodiments, the distance between the first opening 3201 and the first end 312 of the channel is less than the distance between the second opening 3301 and the first end 312 of the channel, and the second direction M2 is parallel to the third direction M3. This allows for a larger airflow rate in the second direction M2, improving the airflow's ability to intercept pollutants.

[0088] In some implementations, the second end 3312 of the second air supply section is connected to the first air distribution chamber 350. In this case, the second air supply device and the first air supply device are the same air supply device.

[0089] In other implementations, such as Figure 1 As shown, the second air supply pipe 330 also includes a second connecting section 332. The second connecting section 332 extends along the first direction M1, with its first end 3321 communicating with the second end 3212 of the first air supply section, and its second end 3322 communicating with the first air equalization chamber 350. In this case, the second air supply device and the first air supply device are the same air supply device.

[0090] In some implementations, the second air supply pipe 330 is located on the side of the first air equalization chamber 350 near the first end 312 of the channel, that is, the second air supply pipe 330 is located between the first air equalization chamber 350 and the first end 312 of the channel. This facilitates communication between the first air equalization chamber 350 and the second air supply pipe 330. In this case, in the first direction M1, the first end 312 of the channel, the first air supply pipe 320, the second air supply pipe 330, the first air equalization chamber 350, and the second end 313 of the channel are arranged sequentially.

[0091] In some embodiments, such as Figure 1As shown, the first opening 3201 is located on the side of the first gas distribution chamber 350 near the first end 312 of the channel. The blocking device 300 also includes a third air supply pipe 340, which includes a third air supply section 341 extending along the first direction M1. The first end 3411 of the third air supply section has a third opening 3401, which is located on the inner wall 3111 of the channel and communicates with the channel 311. The second end 3412 of the third air supply section is used to communicate with a third air supply device. The distance between the first end 3411 of the third air supply section and the first end 312 of the channel is less than the distance between the second end 3412 of the third air supply section and the first end 312 of the channel. In this way, the direction of gas flow delivered by the third gas supply device through the third gas delivery pipe 340 is opposite to the direction from the first end 312 of the channel to the second end 313 of the channel. This can reduce the amount of pollutants in the first working chamber 100 that pass through the channel 311 into the second working chamber 200, which is beneficial to improving the blocking effect of the blocking device 300 on pollutants.

[0092] Based on this, the third opening 3401 is located on the side of the first gas equalization chamber 350 away from the first end 312 of the channel. Thus, the first opening 3201 is located above the first gas equalization chamber 350, and the third opening 3401 is located below the first gas equalization chamber 350. On one hand, the third gas supply device delivers gas through the third gas delivery pipe 340, which can return a portion of the contaminants (those not returned by the gas from the first opening 3201 to the first end of the channel 311) to the first end of the channel 311. This further reduces the amount of contaminants in the first working chamber 100 that pass through the channel 311 into the second working chamber 200, improving the barrier effect of the barrier device 300 on contaminants. On the other hand, it facilitates gas diffusion at different locations within the channel 311, further improving the barrier effect of the barrier device 300 on contaminants.

[0093] In some implementations, such as Figure 1 As shown, from the first end 312 of the channel to the second end of the channel 311, the first opening 3201, the second opening 3301 and the third opening 3401 can be arranged sequentially on the inner wall 3111 of the channel.

[0094] In some embodiments, the distance between the third opening 3401 and the second end 313 of the channel in the first direction M1 can be in the range of 2 mm to 10 mm. Therefore, with a smaller distance between the third opening 3401 and the second end 313 of the channel, the gas delivered by the third air supply pipe 340 can flow between the second end 313 of the channel and the first end 312 of the channel. This results in a wider flow range and a longer flow distance for the gas delivered by the third air supply pipe 340, improving the blocking effect of the blocking device 300 on pollutants.

[0095] This application embodiment does not limit the gas supplied by the third gas supply device to the channel 311 through the third gas supply pipe 340. For example, the gas supplied by the third gas supply device to the channel 311 through the third gas supply pipe 340 may include at least one of high-purity argon, helium, hydrogen, and nitrogen.

[0096] In some embodiments, please combine Figure 1 and Figure 2 The cross-sectional shape of the third air supply section 341 is circular. The diameter of the circle is 0.1mm to 3mm. For example, the diameter of the circle is 0.1mm, 0.5mm, 1mm, 1.2mm, 1.6mm, 1.8mm, 2mm, 2.1mm, 2.4mm, 2.7mm or 3mm.

[0097] In other embodiments, please refer to Figure 1 and Figure 3 The cross-sectional shape of the third air supply section 341 is strip-shaped. The width of the strip is 0.1mm to 3mm. For example, the width of the strip is 0.1mm, 0.5mm, 1mm, 1.2mm, 1.6mm, 1.8mm, 2mm, 2.1mm, 2.4mm, 2.7mm or 3mm.

[0098] In some examples, the strip may have a certain curvature and extend circumferentially along the channel 311. The third opening 3401 is a slit. The width of the first opening 3201 may be in the range of 0.1 mm to 3 mm.

[0099] In some other embodiments, the cross-sectional shape of the third air delivery section 341 is annular. The width of the annulus is 0.1 mm to 3 mm. For example, the width of the annulus is 0.1 mm, 0.5 mm, 1 mm, 1.2 mm, 1.6 mm, 1.8 mm, 2 mm, 2.1 mm, 2.4 mm, 2.7 mm, or 3 mm.

[0100] Of course, in other examples, the shape of the cross-section of the third air delivery section 341 can be other shapes. This application embodiment does not limit the shape of the cross-section of the first air delivery pipe.

[0101] Different cross-sectional shapes of the third gas delivery section 341 can result in different cross-sectional areas through which gas flows, thus leading to different average flow velocities across the cross-section. Therefore, the shape and / or size of the cross-section of the third gas delivery section 341 can be adjusted according to different gas flow velocity requirements. Furthermore, using a circular shape with a diameter of 0.1mm to 3mm, a strip shape with a width of 0.1mm to 3mm, or an annular shape with a width of 0.1mm to 3mm allows for a smaller cross-sectional size of the third gas delivery section 341. This results in a higher flow velocity of the gas delivered by the third gas supply device to the channel 311 through the third gas delivery pipe 340, which is beneficial for improving the barrier effect of the barrier device 300 on pollutants.

[0102] In some embodiments, there can be multiple third air supply pipes 340, and multiple first air supply pipes 320 are arranged at intervals along the circumference of the channel 311. This increases the gas flow rate within the channel 311, which facilitates gas diffusion within the channel 311, making the airflow in the circumferential direction within the channel 311 more uniform, and improving the blocking effect of the blocking device 300 on pollutants.

[0103] Based on this, please combine Figure 1 and Figure 4 The third openings 3401 of multiple third air supply pipes 340 can be interconnected to form an annular opening. The width of the annular opening can be in the range of 0.1mm to 3mm. The width of the annular opening is 0.1mm, 0.5mm, 1mm, 1.2mm, 1.6mm, 1.8mm, 2mm, 2.1mm, 2.4mm, 2.7mm or 3mm.

[0104] In this way, the size and cross-sectional area of ​​the annular opening are relatively small. The gas supplied by the first gas supply device to the channel 311 through the third gas supply pipe 340 has a relatively high flow velocity. When the gas in the third gas supply pipe 340 enters the channel 311 through the annular opening, it can form an air curtain within the channel 311, which is beneficial to the blocking effect of the blocking device 300 on pollutants. Here, "air curtain" can be understood as a layer of airflow with a high gas velocity.

[0105] In some embodiments, such as Figure 1 As shown, the blocking device 300 also includes a second air equalization chamber 370 and a second air inlet pipe 380. The second air equalization chamber 370 is disposed inside the device body 310 and is connected to the second end 3412 of the third air supply section. The air inlet 381 of the second air inlet pipe is connected to the third air supply device, and the air outlet 382 of the second air inlet pipe is connected to the second air equalization chamber 370. In this way, on the one hand, the second gas equalization chamber 370 can buffer the gas supplied by the third gas supply device through the second air inlet pipe 380 to the second gas equalization chamber 370, thereby making the gas pressure and flow velocity in the second gas equalization chamber 370 more stable. This results in more stable gas pressure and flow velocity flowing from the second gas equalization chamber 370 into the second air delivery pipe 330, further ensuring a more uniform airflow into the channel 311. This helps prevent gas flow separation in the channel 311 and avoids the formation of turbulence or eddies that could lead to asymmetrical airflow in the channel 311. Consequently, it helps prevent a reduction in the blocking effect of the barrier device 300 on contaminants, ensuring the reliability of the barrier device 300's contaminant blocking effect. On the other hand, impurities in the gas supplied by the second air inlet pipe 380 can be deposited in the gas equalization chamber, which helps improve the cleanliness of the gas supplied by the third air delivery pipe 340 into the channel 311.

[0106] In some implementations, the shape and / or size of the second air-equalizing chamber 370 may be equal to the shape and / or size of the first air-equalizing chamber 350.

[0107] In some implementations, the second end 3412 of the third air delivery section can be directly connected to the second uniform air chamber 370.

[0108] In other implementations, such as Figure 1 As shown, the third air supply pipe 340 also includes a third connecting section 342. The first end 3421 of the third connecting section 342 is connected to the second end 3412 of the third air supply section, and the second end 3422 of the third connecting section is connected to the first air equalization chamber 350.

[0109] In an example where there are multiple first air supply pipes 320, there are multiple third connecting segments 342, and the multiple third connecting segments 342 respectively connect the first air equalization chamber 350 and different first air supply pipes 320.

[0110] In some implementations, such as Figure 1 As shown, the air inlet 381 of the second air inlet pipe is located outside the device body 310.

[0111] In some other implementations, the air inlet 381 of the second air inlet pipe is located inside the device body 310.

[0112] In some implementations, the third gas supply device supplies gas to the second gas equalization chamber 370 through only one second air inlet pipe 380. This helps to prevent gas flow separation in the second gas equalization chamber 370 and helps to prevent the formation of turbulence or eddies in the gas in the second gas equalization chamber 370, thus making the airflow in the second gas equalization chamber 370 more stable.

[0113] In some implementations, the third air supply pipe 340 is located on the side of the first air distribution chamber 350 away from the first end 312 of the channel, and the second air distribution chamber 370 is located between the first air distribution chamber 350 and the third air supply pipe 340. This facilitates communication between the second air distribution chamber 370 and the third air supply pipe 340. In this case, in the first direction M1, the first end 312 of the channel, the first air supply pipe 320, the second air supply pipe 330, the first air distribution chamber 350, the second air distribution chamber 370, the third air supply pipe 340, and the second end 313 of the channel are arranged sequentially.

[0114] In the above implementation, the structures of the first air supply pipe 320, the second air supply pipe 330, the third air supply pipe 340, the first air equalization chamber 350, and the second air equalization chamber 370 are relatively simple, which reduces the structural complexity of the blocking device 300.

[0115] In some implementations, the first gas equalization chamber 350 and the second gas equalization chamber 370 are not connected. Thus, the process of adjusting the gas pressure and / or flow rate entering the first gas equalization chamber 350 by the first gas supply device and the process of adjusting the gas pressure and / or flow rate entering the second gas equalization chamber 370 by the third gas supply device, thereby adjusting the gas flow rate in the gas inlet channel 311 at the third opening 3401, do not affect each other. Therefore, during adjustment, the flow rates in the gas inlet channel 311 at the first opening 3201 and the gas inlet channel 311 at the third opening 3401 can both be adjusted to the required flow rates.

[0116] In some embodiments, the blocking device 300 may also include a fourth air supply line or a fifth air supply line, etc., which will not be described in detail here.

[0117] In some embodiments, such as Figure 5 As shown, the barrier device 300 also includes a cooling pipe 390, which is located within the device body 310 and between the first gas equalization chamber 350 and the inner wall 3111 of the channel. A cool liquid or gas can be introduced into the cooling pipe 390 (for example, the temperature of the liquid or gas in the cooling pipe 390 can be in the range of 20°C to 25°C) to cool the gas in the device body 310, the first gas equalization chamber 350, and the contaminants in the channel 311. This reduces the temperature within the channel 311, thereby reducing the molecular thermal motion of the contaminants and further reducing the amount of contaminants in the first working chamber 100 that pass through the channel 311 into the second working chamber 200, thus further improving the barrier effect of the barrier device 300.

[0118] In one example, such as Figure 5 As shown, in the first direction M1, the two ends of the cooling pipe 390 extend out from the two ends of the first air supply pipe 320, respectively. This improves the heat exchange efficiency between the cooling pipe 390 and the first air supply pipe 320, which helps to reduce the temperature of the gas supplied by the first air supply pipe 320 into the channel 311.

[0119] In yet another example, such as Figure 5As shown, the first end 312 of the channel, the first air supply pipe 320, the second air supply pipe 330, the first air distribution chamber 350, the second air distribution chamber 370, the third air supply pipe 340, and the second end 313 of the channel are arranged sequentially. In the first direction M1, the distance between the end of the cooling pipe 390 near the first end 312 of the channel and the first end 312 of the channel is less than the distance between the end of the first air supply pipe 320 near the first end 312 of the channel and the first end 312 of the channel; the distance between the end of the cooling pipe 390 near the second end 313 of the channel and the second end 313 of the channel is less than the distance between the end of the third air supply pipe 340 near the second end 313 of the channel and the second end 313 of the channel. This can improve the heat exchange efficiency between the cooling pipe 390 and the first air supply pipe 320, the second air supply pipe 330, the third air supply pipe 340, the first air distribution chamber 350, and the second air distribution chamber 370, which is beneficial to reducing the temperature of the gas delivered into the channel 311 by the first air supply pipe 320, the second air supply pipe 330, and the third air supply pipe 340.

[0120] In some implementations, the material used to make the device body 310 may include at least one of the following materials with high thermal conductivity: stainless steel, aluminum alloy, or copper alloy.

[0121] In some implementations, such as Figure 5 As shown, the cooling pipe 390 includes a water-cooled pipe. The water-cooled pipe may extend in a spiral shape along the circumference of the channel 311.

[0122] In other implementations, such as Figure 6 As shown, the cooling pipe 390 includes two water-cooled pipes. One of the two water-cooled pipes can be located on one side of the channel 311, and the other can be located on the other side of the channel 311. Each cooling pipe 390 can extend in an "S" shape along the outer wall 3112 of the channel.

[0123] In some examples, the cross-section of the water-cooling tube is circular, and the diameter of the circle is 2mm to 8mm. For example, the diameter of the circle is 2mm, 3mm, 4mm, 5mm, 6mm, 7mm or 8mm.

[0124] In some other implementations, such as Figure 7 As shown, the cooling pipe 390 includes a water-cooled plate arranged around the channel 311.

[0125] In some other implementations, such as Figure 7 As shown, the cooling pipe 390 includes two water-cooled plates, one of which can be located on one side of the channel 311 and the other can be located on the other side of the channel 311, and each water-cooled plate is arranged around a portion of the channel 311.

[0126] In some examples, the thickness of the water-cooled plate is 2mm to 8mm. For example, the thickness of the water-cooled plate is 2mm, 3mm, 4mm, 5mm, 6mm, 7mm or 8mm.

[0127] If the cooling pipe 390 includes a water-cooled plate, an avoidance opening needs to be provided on the water-cooled plate, through which the air supply pipe passes.

[0128] In some implementations, such as Figure 1 As shown, the working chamber 10 also includes an extraction pipe 400. One end of the extraction pipe 400 has an extraction port 410, which is located on the inner wall of the first working chamber 100 and communicates with the first working chamber 100 and the channel 311. The other end of the extraction pipe 400 can be located outside the first working chamber 100. Thus, the gas and pollutants floating in the gas in the first working chamber 100 and the channel 311 can be extracted through the extraction pipe 400, reducing the amount of pollutants in the first working chamber 100 and the channel 311. This reduces the amount of pollutants in the first working chamber 100 that pass through the channel 311 into the second working chamber 200, improving the barrier effect of the barrier device 300 on pollutants.

[0129] In some implementations, the extraction pipe 400 may be adjacent to the barrier device 300, thereby bringing the extraction port 410 close to the barrier device 300, which helps to prevent contaminants in the first working chamber 100 from entering the channel 311.

[0130] In other embodiments, the extraction port 410 is disposed on the inner sidewall 3111 of the channel and communicates with the first working chamber 100 and the channel 311. The other end of the extraction pipe 400 can be disposed outside the device body. Thus, the gas and pollutants floating in the gas in the first working chamber 100 and the channel 311 can be extracted through the extraction pipe 400, reducing the amount of pollutants in the first working chamber 100 and the channel 311, thereby reducing the amount of pollutants in the first working chamber 100 that pass through the channel 311 into the second working chamber 200, and improving the blocking effect of the blocking device 300 on pollutants.

[0131] In the above embodiments, one or more suction pipes 400 may be provided. For example, in an example where two suction pipes 400 are provided, one suction pipe 400 may be located on one side of the channel 311, and the other suction pipe 400 may be located on the other side of the channel 311. In an example where multiple suction pipes 400 are provided, the multiple suction pipes 400 may be arranged at circumferential intervals along the channel 311.

[0132] In the above embodiments, the device body 310 and the channels 311, first air supply pipe 320, second air supply pipe 330, third air supply pipe 340, first air distribution chamber 350, first air inlet pipe 360, second air distribution chamber 370, second air inlet pipe 380 and cooling pipe 390 within the device body 310 can all be integrally formed by 3D printing or casting.

[0133] It should be noted that, in the description of the embodiments of this application, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection or an integral connection; they can also refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; or they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application according to the specific circumstances.

[0134] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the embodiments of this application, and are not intended to limit them; although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some or as many of the technical features as possible; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A blocking device, characterized in that, include: The device body has a channel extending through it along a first direction; The first end of the channel is used to connect to the first working chamber, and the second end is used to connect to the second working chamber, wherein the cleanliness of the second working chamber is greater than that of the first working chamber. The first air supply pipe includes a first air supply section extending along a second direction. The first end of the first air supply section has a first opening located on the inner sidewall of the channel and communicating with the channel. The second end of the first air supply section is used to communicate with a first air supply device. In the first direction, the distance between the first end of the first air supply section and the first end of the channel is less than the distance between the second end of the first air supply section and the first end of the channel.

2. The barrier device according to claim 1, characterized in that, Also includes: A first gas equalization chamber is disposed within the device body. The first gas equalization chamber is arranged around the channel and is connected to the second end of the first gas delivery section. The first air intake pipe has its air inlet connected to the first air supply device and its air outlet connected to the first air distribution chamber.

3. The barrier device according to claim 2, characterized in that, Along the direction from the first end of the channel to the second end of the channel, the cross-sectional area of ​​the channel gradually decreases, and the first opening is located on the side of the first air-regulating chamber near the first end of the channel; The barrier device further includes: The second air supply pipe includes a second air supply section extending in a third direction. The first end of the second air supply section has a second opening. The second opening is located on the inner wall of the channel and communicates with the channel. The second opening is located on the side of the first air distribution chamber near the first end of the channel. The distance between the first opening and the first end of the channel is not equal to the distance between the second opening and the first end of the channel. The second end of the second air delivery section is used to connect to the second air supply device, and the distance between the first end of the second air delivery section and the first end of the channel is less than the distance between the second end of the second air delivery section and the first end of the channel.

4. The barrier device according to claim 3, characterized in that, The distance between the first opening and the first end of the channel is less than the distance between the second opening and the first end of the channel, and the angle between the second direction and the first direction is less than the angle between the third direction and the first direction.

5. The barrier device according to claim 3 or 4, characterized in that, The second end of the second air delivery section is connected to the first air equalization chamber.

6. The barrier device according to claim 5, characterized in that, The first air supply pipe and the second air supply pipe are located on the side of the first air distribution chamber near the first end of the channel.

7. The barrier device according to claim 2, characterized in that, The first opening is located on the side of the first gas equalization chamber near the first end of the channel; The barrier device further includes: The third air supply pipe includes a third air supply section extending along the first direction. The first end of the third air supply section has a third opening located on the inner wall of the channel and communicating with the channel. The third opening is located on the side of the first air distribution chamber away from the first end of the channel. The second end of the third air supply section is used to communicate with a third air supply device. The distance between the first end of the third air supply section and the first end of the channel is less than the distance between the second end of the third air supply section and the first end of the channel.

8. The barrier device according to claim 7, characterized in that, Also includes: The second gas equalization chamber is located inside the device body. The second gas equalization chamber is arranged around the channel and is connected to the second end of the third gas delivery section. The second air inlet pipe has its inlet connected to the third air supply device and its outlet connected to the second air distribution chamber.

9. The barrier device according to claim 8, characterized in that, The third air delivery pipe is located on the first end of the first air distribution chamber away from the channel; the second air distribution chamber is located between the first air distribution chamber and the third air delivery pipe.

10. The barrier device according to any one of claims 7 to 9, characterized in that, In the first direction, the distance between the third opening and the second end of the channel is in the range of 2mm to 10mm.

11. The barrier device according to any one of claims 1 to 10, characterized in that, The number of first air supply pipes is multiple, and the multiple first air supply pipes are arranged at intervals along the circumference of the channel. The first openings of the multiple first air supply pipes are arranged at intervals along the circumference of the channel, or the first openings of the multiple first air supply pipes are interconnected.

12. The barrier device according to any one of claims 2 to 11, characterized in that, Also includes: The cooling pipe is located inside the device body and between the inner wall of the first air distribution chamber and the channel.

13. A working cabin, characterized in that, include: The barrier device according to any one of claims 1 to 12; The first working chamber is connected to the first end of the channel in the blocking device; The second working chamber is connected to the second end of the channel in the barrier device; the cleanliness of the second working chamber is greater than that of the first working chamber.

14. The working cabin according to claim 13, characterized in that, Also includes: An air extraction pipe has an air extraction port located on the inner wall of the first working chamber. The air extraction port is connected to the first working chamber and is also connected to the channel.

15. The working cabin according to claim 14, characterized in that, The air extraction pipe is adjacent to the barrier device.

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