Multi-angle vacuum cavity electron beam welding tooling

Abstract

The application discloses a multi-angle vacuum cavity electron beam welding tool, and aims to solve the problem that the workpiece needs to be disassembled and re-clamped and positioned for multiple times when a semiconductor precision vacuum cavity part is welded by a vacuum electron beam. The application comprises a workbench, a support mechanism capable of moving horizontally and longitudinally is installed on the workbench, a rotary table assembly is installed on the support mechanism, the rotary table assembly comprises a rotary base and a rotary table, the rotary base is rotatably installed on the support mechanism, the rotary table is rotatably installed on the rotary base, the workpiece is loaded on the rotary table, an electron beam welding head is arranged above the workpiece, and the electron beam welding head emits an electron beam towards the workpiece for welding. The workpiece is clamped integrally at one time, welding work of all welding surfaces in different positions is completed at one time under the condition of single clamping, the cumbersome procedures of multiple clamping and repeated breaking and vacuumizing are saved, the machining efficiency is improved, the production cost is reduced, and the welding position precision is ensured.

Description

Technical Field

[0001] This invention relates to the field of vacuum cavity processing technology, and more specifically, to a multi-angle vacuum cavity electron beam welding fixture. Background Technology

[0002] Currently, semiconductor precision vacuum cavity components operate in high vacuum and high cleanliness conditions, requiring stringent standards for weld airtightness, purity, and dimensional accuracy. Traditional welding processes cannot meet these requirements, therefore, vacuum electron beam welding technology is often used to process these components. Vacuum electron beam welding offers advantages such as high weld quality, minimal thermal deformation, and no oxidation contamination. However, its small beam spot and concentrated energy place extremely high demands on workpiece clamping and positioning accuracy and workpiece spatial orientation. Clamping deviations can easily lead to various welding defects.

[0003] Traditional vacuum electron beam welding equipment has a simple tooling structure, enabling welding of a single plane seam in a single clamping operation. For example, Chinese patent application number 2026107969502 discloses an electron beam welding method for large-size hollow annular components, providing a complete solution for electron beam welding manufacturing of such components. However, it can only achieve welding of a single plane seam in a single clamping operation. For semiconductor workpieces with surfaces to be welded distributed in different spatial locations and not on the same plane, existing processes require multiple disassembly and re-clamping of the workpiece. Electron beam welding requires a high vacuum environment, and each adjustment of the workpiece necessitates breaking the vacuum in the cavity and re-evacuating it. The entire process is time-consuming, inefficient, and has high energy consumption and processing costs. Furthermore, positioning errors caused by multiple clamping operations can easily lead to welding quality defects, failing to meet the requirements of high-precision processing. Summary of the Invention

[0004] To overcome the above shortcomings, this invention provides a multi-angle vacuum cavity electron beam welding fixture. The workpiece is clamped as a whole at one time, and the workpiece can be adjusted by multi-degree-of-freedom spatial rotation to change the angle required for welding. Under the conditions of a single vacuum environment and a single clamping, the welding operation of all welding surfaces at different positions can be completed at one time, eliminating the tedious process of multiple clamping, repeated vacuum breaking and vacuuming, improving processing efficiency, reducing production costs, and ensuring welding position accuracy.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: a multi-angle vacuum cavity electron beam welding fixture, including a worktable, a support mechanism that can move laterally and longitudinally is installed on the worktable, a turntable assembly is installed on the support mechanism, the turntable assembly includes a rotating seat and a turntable, the rotating seat is rotatably installed on the support mechanism, the turntable is rotatably installed on the rotating seat, the workpiece is loaded on the turntable, an electron beam welding head is set above the workpiece, and the electron beam welding head emits an electron beam toward the workpiece for welding.

[0006] When performing vacuum electron beam welding on semiconductor precision vacuum cavity workpieces, the entire fixture is placed into the vacuum cavity of the electron beam welding equipment, and then the workpiece is loaded onto the turntable. The electron beam welding equipment then performs the welding on the workpiece.

[0007] The support mechanism can move laterally and longitudinally, achieving two degrees of freedom adjustment for the workpiece. The rotating base and turntable can also rotate, further enabling two degrees of freedom adjustment for the workpiece. In addition, the adjustment of the electron beam focal length emitted by the electron beam welding head achieves one degree of freedom adjustment for workpiece processing. Thus, five degrees of freedom adjustment for workpiece welding are achieved, allowing the workpiece to be adjusted to various welding angles, ensuring that different planes and positions of the workpiece can be sequentially aligned with the electron beam welding source. The entire welding process eliminates the need for multiple workpiece disassembly and assembly, and repeated vacuum breaking and evacuation. All multi-angle welds are completed in a single vacuum environment, solving the problems of cumbersome procedures, low efficiency, high processing costs, and positioning errors caused by multiple clamping in traditional processes, thereby improving welding accuracy and product processing stability.

[0008] Preferably, a mounting platform is provided on the rotating base, the turntable is rotatably mounted on the mounting platform, and a turntable motor is installed on the rotating base, which drives the turntable to rotate.

[0009] The turntable motor drives the turntable to rotate smoothly and reliably at the mounting platform, making it easy to control the rotation angle. Preferably, a support platform is installed on the rotating base, the turntable is supported on the support platform, a rotatable connecting platform is installed on the support platform, the turntable and the connecting platform are fastened together, and the output shaft of the turntable motor is connected to the connecting platform.

[0010] The support platform provides support for the turntable, ensuring its smooth rotation. Furthermore, the connecting platform is rotatably mounted on the support platform; once the turntable is supported on the platform, it can be easily connected and secured to the connecting platform, making installation convenient.

[0011] Preferably, the turntable is provided with several clamping mechanisms at circumferential intervals, which clamp and position the workpiece.

[0012] A clamping mechanism is used to clamp and position the workpiece, ensuring the stability of the welding process and thus guaranteeing the welding quality.

[0013] Preferably, the clamping mechanism includes a support column, a drive piston cylinder, and a clamping rod. The clamping rod and the drive piston cylinder are connected by a hinged connecting rod. The extension rod of the drive piston cylinder is hinged to the clamping rod. The workpiece is supported on the support column, and the clamping rod is pressed against the workpiece.

[0014] The driving piston cylinder rotates the clamping rod, pressing it against the workpiece and clamping it between the support column and the clamping rod, thus achieving workpiece clamping and positioning. The driving piston cylinder returns to its original position, causing the clamping rod to reverse, thereby separating it from the workpiece and facilitating workpiece removal.

[0015] Preferably, the clamping mechanism also includes a clamping seat, a support column and a drive piston cylinder are disposed on the clamping seat, and the clamping seat is radially movable and mounted on the turntable.

[0016] The clamping base can be moved radially to accommodate the clamping and positioning of workpieces of different sizes, making it highly versatile.

[0017] Preferably, the drive piston cylinder is connected to an inverted T-shaped connecting seat, and the connecting rod is hinged to the upper end of the connecting seat.

[0018] The connector makes the installation of the connecting rod easier.

[0019] Preferably, the support mechanism includes a transverse sliding seat and a longitudinal sliding seat, wherein the transverse sliding seat is mounted on the worktable for transverse movement, and the longitudinal sliding seat is mounted on the transverse sliding seat for longitudinal movement.

[0020] The transverse sliding seat moves laterally, and the longitudinal sliding seat moves longitudinally, thus realizing the lateral and longitudinal movement of the support mechanism.

[0021] Preferably, both ends of the rotating seat are connected to supports, which are fixedly installed on the support mechanism. The supports are provided with mounting holes, and both ends of the rotating seat are provided with rotating shafts. The two rotating shafts are rotatably connected to the two mounting holes respectively. A rotating seat motor is installed on one of the supports, and the rotating seat motor drives the rotating seat to rotate.

[0022] The rotating base is mounted on two supports at both ends to ensure smooth rotation of the entire base. The rotating base is driven by a rotating base motor, which facilitates control of the rotation angle.

[0023] Preferably, a radially movable attitude adjustment seat is installed on the rotating base, a telescopic column is installed on the attitude adjustment seat, a buffer spring is installed between the telescopic column and the attitude adjustment seat, and a touch sensor is installed on the attitude adjustment seat; a window adapted to the telescopic column is set on the side wall of the workpiece; after the workpiece is transferred to the turntable, the attitude adjustment seat moves towards the workpiece so that the end of the telescopic column hits the outer wall of the workpiece, and after the workpiece rotates with the turntable until the window is aligned with the telescopic column, the telescopic column inserts into the window and touches the touch sensor.

[0024] After the workpiece is loaded onto the turntable, its initial position is uncertain. At this point, the attitude adjustment seat moves towards the workpiece, causing the end of the telescopic column to press against the outer wall of the workpiece. Because there is a window on the outer wall of the workpiece, the telescopic column can only be inserted into the window after it is fully aligned with it. As the turntable rotates until the window and telescopic column are aligned, the telescopic column inserts into the window and touches the touch sensor. The touch sensor then receives a signal and transmits it to the control system, stopping the turntable. At this point, the initial position of the workpiece is adjusted. Then, the attitude adjustment seat moves in the opposite direction, separating the telescopic column from the workpiece. This structural design facilitates the adjustment of the workpiece to its initial position, ensuring accurate determination of the welding position and improving welding quality.

[0025] Compared with the prior art, the beneficial effects of the present invention are: (1) The workpiece welding realizes the adjustment of five degrees of freedom space, and the workpiece can change the angle required for each welding, so that the welding surfaces of different planes and different positions of the workpiece can be aligned with the electron beam welding beam source in sequence. The entire welding process does not require multiple disassembly and assembly of the workpiece, nor does it require repeated vacuum breaking and vacuuming. All multi-angle welds are completed in one go under a single vacuum environment, solving the problems of cumbersome process, low efficiency, high processing cost and positioning error caused by multiple clamping in traditional processes, and improving welding accuracy and product processing stability; (2) The clamping mechanism can adapt to the clamping and positioning of workpieces of different sizes, and has good versatility; (3) After the workpiece is loaded onto the turntable, its posture can be adjusted to ensure that the initial position after each clamping is in the same position, thereby ensuring the accurate determination of the welding position and improving the welding quality. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of the present invention.

[0027] Figure 2 This is a structural diagram of the turntable assembly of the present invention.

[0028] Figure 3 This is a cross-sectional view of the turntable assembly according to Embodiment 1 of the present invention.

[0029] Figure 4 This is a top view of the turntable assembly in embodiments 2 and 4 of the present invention.

[0030] Figure 5 These are cross-sectional views of the turntable assembly in embodiments 3 and 4 of the present invention.

[0031] In the diagram: 1. Worktable; 2. Support mechanism; 3. Turntable assembly; 4. Horizontal slide seat; 5. Vertical slide seat; 6. Horizontal slide guide rail; 7. Horizontal slide screw; 8. Horizontal slide motor; 9. Vertical slide guide rail; 10. Vertical slide screw; 11. Vertical slide motor; 12. Rotary seat; 13. Turntable; 14. Support; 15. Rotary seat motor; 16. Connecting shaft; 17. Rotating shaft; 18. Electron beam welding head; 19. Mounting platform; 20. Turntable motor; 21. Support platform; 22. Connecting platform; 23. 24. Connecting hole, clamping mechanism, 25. Support column, 26. Drive piston cylinder, 27. Clamping rod, 28. Connecting rod, 29. Flange, 30. Clamping seat, 31. Slide groove, 32. Connecting column, 33. Connecting seat, 34. Attitude adjustment seat, 35. Bracket, 36. Attitude adjustment piston cylinder, 37. Telescopic column, 38. Buffer spring, 39. Touch sensor, 40. Slide cavity, 41. Protruding edge, 42. Protrusion, 43. End cap, 44. Window, 45. Ball bearing, 46. Workpiece. Detailed Implementation

[0032] The technical solution of the present invention will be further described in detail below through specific embodiments and with reference to the accompanying drawings: Example 1: A multi-angle vacuum cavity electron beam welding fixture includes a worktable 1, a support mechanism 2 capable of lateral and longitudinal movement mounted on the worktable 1, and a turntable assembly 3 mounted on the support mechanism 2. The support mechanism 2 includes a transverse sliding seat 4 and a longitudinal sliding seat 5, with the longitudinal sliding seat 5 positioned above the transverse sliding seat 4. The transverse sliding seat 4 is laterally movable and mounted on the worktable 1, while the longitudinal sliding seat 5 is longitudinally movable and mounted on the transverse sliding seat 4.

[0033] Two transverse guide rails 6 are provided on the upper surface of the worktable 1. The cross section of the transverse guide rails 6 is trapezoidal. Two transverse grooves corresponding to and adapted to the two transverse guide rails 6 are provided on the lower surface of the transverse seat 4. The transverse grooves are slidably connected to the transverse guide rails 6. A transverse screw 7 driven by a transverse motor 8 is rotatably installed on the worktable 1. The transverse screw 7 is threadedly connected to the transverse seat 4. The rotation of the transverse screw 7 drives the transverse seat 4 to move laterally.

[0034] Two longitudinal guide rails 9 are provided on the upper surface of the transverse base 4. The cross section of the longitudinal guide rails 9 is trapezoidal. Two longitudinal grooves corresponding to and adapted to the two longitudinal guide rails 9 are provided on the lower surface of the longitudinal base 5. The longitudinal grooves are slidably connected to the longitudinal guide rails 9. A longitudinal screw 10 driven by a longitudinal motor 11 is rotatably installed on the transverse base 4. The longitudinal screw 10 is threadedly connected to the longitudinal base 5. The rotation of the longitudinal screw 10 drives the longitudinal base 5 to move longitudinally.

[0035] The turntable assembly 3 includes a rotating base 12 and a turntable 13. The rotating base 12 is rotatably mounted on the support mechanism 2. Supports 14 are connected to both ends of the rotating base 12, and the two supports 14 are arranged opposite to each other. The supports 14 are fixedly mounted on the longitudinal sliding base 5 of the support mechanism 2, and mounting holes are provided on the supports 14. Rotating shafts 17 are provided at both ends of the rotating base 12. The axes of the rotating shafts 17 are parallel to the transverse guide rail 6, and the two rotating shafts 17 are rotatably connected to the two mounting holes respectively. A turntable motor 15 is mounted on one of the supports 14, and the turntable motor 15 drives the rotating base 12 to rotate. The output shaft of the turntable motor 15 is connected to a docking shaft 16, and the docking shaft 16 is securely connected to the rotating shaft 17.

[0036] The turntable 13 is rotatably mounted on the rotating base 12. The workpiece 46 is loaded on the turntable 13. An electron beam welding head 18 is set above the workpiece 46. The electron beam welding head 18 is vertically arranged and emits an electron beam toward the workpiece 46 for welding.

[0037] A mounting platform 19 is provided on the rotating base 12. The center of the rotating base 12 is recessed to form the mounting platform 19. The turntable 13 is rotatably mounted on the mounting platform 19. A turntable motor 20 is mounted on the rotating base 12, and the turntable motor 20 drives the turntable 13 to rotate. A support platform 21 is mounted on the rotating base 12 and is securely mounted on the mounting platform 19. The turntable 13 is supported on the support platform 21. A rotatably mounted connecting platform 22 is mounted on the support platform 21. The connecting platform 22 is located in the center of the support platform 21. The turntable 13 is securely connected to the connecting platform 22. The output shaft of the turntable motor 20 is connected to the connecting platform 22. A T-shaped connecting hole 23 is provided in the center of the support platform 21. The connecting platform 22 is installed on the upper part of the connecting hole 23. The turntable motor 20 is inserted into the lower part of the connecting hole 23 and is fixedly mounted on the mounting platform 19.

[0038] A plurality of clamping mechanisms 24 are circumferentially spaced on the turntable 13, and the clamping mechanisms 24 clamp and position the workpiece 46. Three clamping mechanisms 24 are evenly distributed circumferentially. Each clamping mechanism 24 includes a support column 25, a drive piston cylinder 26, and a clamping rod 27. A hinged connecting rod 28 connects the clamping rod 27 and the drive piston cylinder 26. The extension rod of the drive piston cylinder 26 is hinged to the clamping rod 27. The workpiece 46 is supported on the support column 25. A flange 29 is provided on the edge of the workpiece 46. A plurality of through holes are circumferentially spaced on the flange 29. The flange 29 is supported on the support column 25. The upper end of the support column 25 has a pointed structure, and the upper end of the support column 25 is inserted into the through holes to achieve positioning of the workpiece 46. The clamping rod 27 presses against the workpiece 46. The clamping mechanism 24 also includes a clamping seat 30, which is fastened to the turntable 13. The support column 25 and the drive piston cylinder 26 are mounted on the clamping seat 30. The drive piston cylinder 26 is connected to the inverted T-shaped connecting seat 33, and the connecting rod 28 is hinged to the upper end of the connecting seat 33.

[0039] When performing vacuum electron beam welding on semiconductor precision vacuum cavity workpiece 46, the entire fixture is placed into the vacuum cavity of the electron beam welding equipment, and then the workpiece 46 is loaded onto the turntable 13. The electron beam welding equipment then performs welding on the workpiece 46.

[0040] The support mechanism 2 can move laterally and longitudinally, achieving two degrees of freedom adjustment for the workpiece 46. The rotating seat 12 and turntable 13 can also rotate, achieving two degrees of freedom adjustment for the workpiece 46 as well. Furthermore, the adjustment of the electron beam focal length emitted by the electron beam welding head 18 achieves one degree of freedom adjustment for the machining of the workpiece 46. Thus, five degrees of freedom adjustment for welding the workpiece 46 are achieved. The workpiece 46 can be changed to various angles required for welding, allowing different planes and positions of the workpiece 46 to be aligned sequentially with the electron beam welding source. The entire welding process eliminates the need for multiple disassemblies and reassemblies of the workpiece 46, and avoids repeated vacuum breaking and evacuation. All multi-angle welds are completed in a single vacuum environment, solving the problems of cumbersome procedures, low efficiency, high processing costs, and positioning errors caused by multiple clamping in traditional processes, thereby improving welding accuracy and product processing stability.

[0041] Example 2: A multi-angle vacuum cavity electron beam welding fixture includes a worktable 1, a support mechanism 2 capable of lateral and longitudinal movement mounted on the worktable 1, and a turntable assembly 3 mounted on the support mechanism 2. The support mechanism 2 includes a transverse sliding seat 4 and a longitudinal sliding seat 5, with the longitudinal sliding seat 5 positioned above the transverse sliding seat 4. The transverse sliding seat 4 is laterally movable and mounted on the worktable 1, while the longitudinal sliding seat 5 is longitudinally movable and mounted on the transverse sliding seat 4.

[0042] Two transverse guide rails 6 are provided on the upper surface of the worktable 1. The cross section of the transverse guide rails 6 is trapezoidal. Two transverse grooves corresponding to and adapted to the two transverse guide rails 6 are provided on the lower surface of the transverse seat 4. The transverse grooves are slidably connected to the transverse guide rails 6. A transverse screw 7 driven by a transverse motor 8 is rotatably installed on the worktable 1. The transverse screw 7 is threadedly connected to the transverse seat 4. The rotation of the transverse screw 7 drives the transverse seat 4 to move laterally.

[0043] Two longitudinal guide rails 9 are provided on the upper surface of the transverse base 4. The cross section of the longitudinal guide rails 9 is trapezoidal. Two longitudinal grooves corresponding to and adapted to the two longitudinal guide rails 9 are provided on the lower surface of the longitudinal base 5. The longitudinal grooves are slidably connected to the longitudinal guide rails 9. A longitudinal screw 10 driven by a longitudinal motor 11 is rotatably installed on the transverse base 4. The longitudinal screw 10 is threadedly connected to the longitudinal base 5. The rotation of the longitudinal screw 10 drives the longitudinal base 5 to move longitudinally.

[0044] The turntable assembly 3 includes a rotating base 12 and a turntable 13. The rotating base 12 is rotatably mounted on the support mechanism 2. Supports 14 are connected to both ends of the rotating base 12, and the two supports 14 are arranged opposite to each other. The supports 14 are fixedly mounted on the longitudinal sliding base 5 of the support mechanism 2, and mounting holes are provided on the supports 14. Rotating shafts 17 are provided at both ends of the rotating base 12. The axes of the rotating shafts 17 are parallel to the transverse guide rail 6, and the two rotating shafts 17 are rotatably connected to the two mounting holes respectively. A turntable motor 15 is mounted on one of the supports 14, and the turntable motor 15 drives the rotating base 12 to rotate. The output shaft of the turntable motor 15 is connected to a docking shaft 16, and the docking shaft 16 is securely connected to the rotating shaft 17.

[0045] The turntable 13 is rotatably mounted on the rotating base 12. The workpiece 46 is loaded on the turntable 13. An electron beam welding head 18 is set above the workpiece 46. The electron beam welding head 18 is vertically arranged and emits an electron beam toward the workpiece 46 for welding.

[0046] A mounting platform 19 is provided on the rotating base 12. The center of the rotating base 12 is recessed to form the mounting platform 19. The turntable 13 is rotatably mounted on the mounting platform 19. A turntable motor 20 is mounted on the rotating base 12, and the turntable motor 20 drives the turntable 13 to rotate. A support platform 21 is mounted on the rotating base 12 and is securely mounted on the mounting platform 19. The turntable 13 is supported on the support platform 21. A rotatably mounted connecting platform 22 is mounted on the support platform 21. The connecting platform 22 is located in the center of the support platform 21. The turntable 13 is securely connected to the connecting platform 22. The output shaft of the turntable motor 20 is connected to the connecting platform 22. A T-shaped connecting hole 23 is provided in the center of the support platform 21. The connecting platform 22 is installed on the upper part of the connecting hole 23. The turntable motor 20 is inserted into the lower part of the connecting hole 23 and is fixedly mounted on the mounting platform 19.

[0047] The turntable 13 is circumferentially spaced with several clamping mechanisms 24, which clamp and position the workpiece 46. Three clamping mechanisms 24 are evenly distributed circumferentially. Each clamping mechanism 24 includes a support column 25, a drive piston cylinder 26, and a clamping rod 27. A hinged connecting rod 28 connects the clamping rod 27 and the drive piston cylinder 26. The extension rod of the drive piston cylinder 26 is hinged to the clamping rod 27. The workpiece 46 is supported on the support column 25. A flange 29 is provided on the edge of the workpiece 46. Several through holes are circumferentially spaced on the flange 29. The flange 29 is supported on the support column 25. The upper end of the support column 25 has a pointed structure, and the upper end of the support column 25 is inserted into the through holes to achieve positioning of the workpiece 46. The clamping rod 27 presses against the workpiece 46.

[0048] The clamping mechanism 24 also includes a clamping seat 30, which is radially movably mounted on a turntable 13. A T-shaped groove 31 corresponding to the clamping seat 30 is provided on the upper surface of the turntable 13. An inverted T-shaped connecting post 32 is slidably connected within the groove 31. The connecting post 32 is inserted into the clamping seat 30, and a fastening nut is connected to the connecting post 32. The fastening nut abuts against the upper surface of the clamping seat 30 to position the clamping seat 30. A support post 25 and a drive piston cylinder 26 are mounted on the clamping seat 30. The drive piston cylinder 26 is connected to an inverted T-shaped connecting seat 33, and a connecting rod 28 is hinged to the upper end of the connecting seat 33. The clamping seat 30 can be radially movable, thus adapting to the clamping and positioning of workpieces 46 of different sizes, exhibiting good versatility.

[0049] When performing vacuum electron beam welding on semiconductor precision vacuum cavity workpiece 46, the entire fixture is placed into the vacuum cavity of the electron beam welding equipment, and then the workpiece 46 is loaded onto the turntable 13. The electron beam welding equipment then performs welding on the workpiece 46.

[0050] The support mechanism 2 can move laterally and longitudinally, achieving two degrees of freedom adjustment for the workpiece 46. The rotating seat 12 and turntable 13 can also rotate, achieving two degrees of freedom adjustment for the workpiece 46 as well. Furthermore, the adjustment of the electron beam focal length emitted by the electron beam welding head 18 achieves one degree of freedom adjustment for the machining of the workpiece 46. Thus, five degrees of freedom adjustment for welding the workpiece 46 are achieved. The workpiece 46 can be changed to various angles required for welding, allowing different planes and positions of the workpiece 46 to be aligned sequentially with the electron beam welding source. The entire welding process eliminates the need for multiple disassemblies and reassemblies of the workpiece 46, and avoids repeated vacuum breaking and evacuation. All multi-angle welds are completed in a single vacuum environment, solving the problems of cumbersome procedures, low efficiency, high processing costs, and positioning errors caused by multiple clamping in traditional processes, thereby improving welding accuracy and product processing stability.

[0051] Example 3: A multi-angle vacuum cavity electron beam welding fixture includes a worktable 1, a support mechanism 2 capable of lateral and longitudinal movement mounted on the worktable 1, and a turntable assembly 3 mounted on the support mechanism 2. The support mechanism 2 includes a transverse sliding seat 4 and a longitudinal sliding seat 5, with the longitudinal sliding seat 5 positioned above the transverse sliding seat 4. The transverse sliding seat 4 is laterally movable and mounted on the worktable 1, while the longitudinal sliding seat 5 is longitudinally movable and mounted on the transverse sliding seat 4.

[0052] Two transverse guide rails 6 are provided on the upper surface of the worktable 1. The cross section of the transverse guide rails 6 is trapezoidal. Two transverse grooves corresponding to and adapted to the two transverse guide rails 6 are provided on the lower surface of the transverse seat 4. The transverse grooves are slidably connected to the transverse guide rails 6. A transverse screw 7 driven by a transverse motor 8 is rotatably installed on the worktable 1. The transverse screw 7 is threadedly connected to the transverse seat 4. The rotation of the transverse screw 7 drives the transverse seat 4 to move laterally.

[0053] Two longitudinal guide rails 9 are provided on the upper surface of the transverse base 4. The cross section of the longitudinal guide rails 9 is trapezoidal. Two longitudinal grooves corresponding to and adapted to the two longitudinal guide rails 9 are provided on the lower surface of the longitudinal base 5. The longitudinal grooves are slidably connected to the longitudinal guide rails 9. A longitudinal screw 10 driven by a longitudinal motor 11 is rotatably installed on the transverse base 4. The longitudinal screw 10 is threadedly connected to the longitudinal base 5. The rotation of the longitudinal screw 10 drives the longitudinal base 5 to move longitudinally.

[0054] The turntable assembly 3 includes a rotating base 12 and a turntable 13. The rotating base 12 is rotatably mounted on the support mechanism 2. Supports 14 are connected to both ends of the rotating base 12, and the two supports 14 are arranged opposite to each other. The supports 14 are fixedly mounted on the longitudinal sliding base 5 of the support mechanism 2, and mounting holes are provided on the supports 14. Rotating shafts 17 are provided at both ends of the rotating base 12. The axes of the rotating shafts 17 are parallel to the transverse guide rail 6, and the two rotating shafts 17 are rotatably connected to the two mounting holes respectively. A turntable motor 15 is mounted on one of the supports 14, and the turntable motor 15 drives the rotating base 12 to rotate. The output shaft of the turntable motor 15 is connected to a docking shaft 16, and the docking shaft 16 is securely connected to the rotating shaft 17.

[0055] The turntable 13 is rotatably mounted on the rotating base 12. The workpiece 46 is loaded on the turntable 13. An electron beam welding head 18 is set above the workpiece 46. The electron beam welding head 18 is vertically arranged and emits an electron beam toward the workpiece 46 for welding.

[0056] A mounting platform 19 is provided on the rotating base 12. The center of the rotating base 12 is recessed to form the mounting platform 19. The turntable 13 is rotatably mounted on the mounting platform 19. A turntable motor 20 is mounted on the rotating base 12, and the turntable motor 20 drives the turntable 13 to rotate. A support platform 21 is mounted on the rotating base 12 and is securely mounted on the mounting platform 19. The turntable 13 is supported on the support platform 21. A rotatably mounted connecting platform 22 is mounted on the support platform 21. The connecting platform 22 is located in the center of the support platform 21. The turntable 13 is securely connected to the connecting platform 22. The output shaft of the turntable motor 20 is connected to the connecting platform 22. A T-shaped connecting hole 23 is provided in the center of the support platform 21. The connecting platform 22 is installed on the upper part of the connecting hole 23. The turntable motor 20 is inserted into the lower part of the connecting hole 23 and is fixedly mounted on the mounting platform 19.

[0057] A plurality of clamping mechanisms 24 are circumferentially spaced on the turntable 13, and the clamping mechanisms 24 clamp and position the workpiece 46. Three clamping mechanisms 24 are evenly distributed circumferentially. Each clamping mechanism 24 includes a support column 25, a drive piston cylinder 26, and a clamping rod 27. A hinged connecting rod 28 connects the clamping rod 27 and the drive piston cylinder 26. The extension rod of the drive piston cylinder 26 is hinged to the clamping rod 27. The workpiece 46 is supported on the support column 25. A flange 29 is provided on the edge of the workpiece 46. A plurality of through holes are circumferentially spaced on the flange 29. The flange 29 is supported on the support column 25. The upper end of the support column 25 has a pointed structure, and the upper end of the support column 25 is inserted into the through holes to achieve positioning of the workpiece 46. The clamping rod 27 presses against the workpiece 46. The clamping mechanism 24 also includes a clamping seat 30, which is fastened to the turntable 13. The support column 25 and the drive piston cylinder 26 are mounted on the clamping seat 30. The drive piston cylinder 26 is connected to the inverted T-shaped connecting seat 33, and the connecting rod 28 is hinged to the upper end of the connecting seat 33.

[0058] A radially movable attitude adjustment seat 34 is mounted on a rotating base 12. A bracket 35 is provided on the rotating base 12. The attitude adjustment seat 34 is slidably mounted on the bracket 35. An attitude adjustment piston cylinder 36 is mounted on the bracket 35. The telescopic rod of the attitude adjustment piston cylinder 36 is connected to the attitude adjustment seat 34. The telescopic movement of the telescopic rod of the attitude adjustment piston cylinder 36 drives the attitude adjustment seat 34 to move radially. A telescopic column 37 is mounted on the attitude adjustment seat 34. A buffer spring 38 is installed between the telescopic column 37 and the attitude adjustment seat 34. A touch sensor 39 is mounted on the attitude adjustment seat 34. A sliding cavity 40 is provided on the attitude adjustment seat 34. A protruding edge 41 is provided on the outer wall of the telescopic column 37. The protruding edge 41 is adapted to slide with the sliding cavity 40. A protrusion 42 is provided at one end of the sliding cavity 40. The touch sensor 39 is mounted on the protrusion 42. An end cap 43 is installed at the other end of the sliding cavity 40. The buffer spring 38 abuts against the end cap 43 and the telescopic column 37.

[0059] A window 44 adapted to the telescopic column 37 is provided on the side wall of the workpiece 46. The width of the telescopic column 37 is adapted to the circumferential width of the window 44. A ball bearing 45 is installed at the front end of the telescopic column 37, and the ball bearing 45 rests against the outer wall of the workpiece 46. The end of the telescopic column 37 gradually decreases in size towards the front end, making it easy to insert into the window 44. Several slots of different sizes are provided on the outer wall of the workpiece 46, but each slot is smaller than the size of the window 44. Therefore, the telescopic column 37 can only be inserted into the window 44, not into the slot. After the workpiece 46 is transferred to the turntable 13, the attitude adjustment seat 34 moves towards the workpiece 46 so that the end of the telescopic column 37 rests against the outer wall of the workpiece 46. After the workpiece 46 rotates with the turntable 13 until the window 44 is aligned with the telescopic column 37, the telescopic column 37 inserts into the window 44 and touches the touch sensor 39.

[0060] After workpiece 46 is loaded onto turntable 13, its initial position is uncertain. At this time, the attitude adjustment seat 34 moves towards workpiece 46 so that the end of the telescopic column 37 abuts against the outer wall of workpiece 46. Since there is a window 44 on the outer wall of workpiece 46, the telescopic column 37 can only be inserted into the window 44 after it is fully aligned with the window 44. After workpiece 46 rotates with turntable 13 until the window 44 is aligned with the telescopic column 37, the telescopic column 37 inserts into the window 44 and touches the touch sensor 39. At this time, the touch sensor 39 receives a signal and transmits it to the control system. The control system controls the turntable motor 20 to stop, so that the turntable 13 stops rotating. At this time, the initial position of workpiece 46 is adjusted into place. Then, the attitude adjustment seat 34 moves in the opposite direction to separate the telescopic column 37 from workpiece 46. This structural design makes it easy to adjust workpiece 46 to its initial position, thereby ensuring the accurate determination of the welding position and improving the welding quality.

[0061] When performing vacuum electron beam welding on semiconductor precision vacuum cavity workpiece 46, the entire fixture is placed into the vacuum cavity of the electron beam welding equipment, and then the workpiece 46 is loaded onto the turntable 13. The electron beam welding equipment then performs welding on the workpiece 46.

[0062] The support mechanism 2 can move laterally and longitudinally, achieving two degrees of freedom adjustment for the workpiece 46. The rotating seat 12 and turntable 13 can also rotate, achieving two degrees of freedom adjustment for the workpiece 46 as well. Furthermore, the adjustment of the electron beam focal length emitted by the electron beam welding head 18 achieves one degree of freedom adjustment for the machining of the workpiece 46. Thus, five degrees of freedom adjustment for welding the workpiece 46 are achieved. The workpiece 46 can be changed to various angles required for welding, allowing different planes and positions of the workpiece 46 to be aligned sequentially with the electron beam welding source. The entire welding process eliminates the need for multiple disassemblies and reassemblies of the workpiece 46, and avoids repeated vacuum breaking and evacuation. All multi-angle welds are completed in a single vacuum environment, solving the problems of cumbersome procedures, low efficiency, high processing costs, and positioning errors caused by multiple clamping in traditional processes, thereby improving welding accuracy and product processing stability.

[0063] Example 4: A multi-angle vacuum cavity electron beam welding fixture includes a worktable 1, a support mechanism 2 capable of lateral and longitudinal movement mounted on the worktable 1, and a turntable assembly 3 mounted on the support mechanism 2. The support mechanism 2 includes a transverse sliding seat 4 and a longitudinal sliding seat 5, with the longitudinal sliding seat 5 positioned above the transverse sliding seat 4. The transverse sliding seat 4 is laterally movable and mounted on the worktable 1, while the longitudinal sliding seat 5 is longitudinally movable and mounted on the transverse sliding seat 4.

[0064] Two transverse guide rails 6 are provided on the upper surface of the worktable 1. The cross section of the transverse guide rails 6 is trapezoidal. Two transverse grooves corresponding to and adapted to the two transverse guide rails 6 are provided on the lower surface of the transverse seat 4. The transverse grooves are slidably connected to the transverse guide rails 6. A transverse screw 7 driven by a transverse motor 8 is rotatably installed on the worktable 1. The transverse screw 7 is threadedly connected to the transverse seat 4. The rotation of the transverse screw 7 drives the transverse seat 4 to move laterally.

[0065] Two longitudinal guide rails 9 are provided on the upper surface of the transverse base 4. The cross section of the longitudinal guide rails 9 is trapezoidal. Two longitudinal grooves corresponding to and adapted to the two longitudinal guide rails 9 are provided on the lower surface of the longitudinal base 5. The longitudinal grooves are slidably connected to the longitudinal guide rails 9. A longitudinal screw 10 driven by a longitudinal motor 11 is rotatably installed on the transverse base 4. The longitudinal screw 10 is threadedly connected to the longitudinal base 5. The rotation of the longitudinal screw 10 drives the longitudinal base 5 to move longitudinally.

[0066] The turntable assembly 3 includes a rotating base 12 and a turntable 13. The rotating base 12 is rotatably mounted on the support mechanism 2. Supports 14 are connected to both ends of the rotating base 12, and the two supports 14 are arranged opposite to each other. The supports 14 are fixedly mounted on the longitudinal sliding base 5 of the support mechanism 2, and mounting holes are provided on the supports 14. Rotating shafts 17 are provided at both ends of the rotating base 12. The axes of the rotating shafts 17 are parallel to the transverse guide rail 6, and the two rotating shafts 17 are rotatably connected to the two mounting holes respectively. A turntable motor 15 is mounted on one of the supports 14, and the turntable motor 15 drives the rotating base 12 to rotate. The output shaft of the turntable motor 15 is connected to a docking shaft 16, and the docking shaft 16 is securely connected to the rotating shaft 17.

[0067] The turntable 13 is rotatably mounted on the rotating base 12. The workpiece 46 is loaded on the turntable 13. An electron beam welding head 18 is set above the workpiece 46. The electron beam welding head 18 is vertically arranged and emits an electron beam toward the workpiece 46 for welding.

[0068] A mounting platform 19 is provided on the rotating base 12. The center of the rotating base 12 is recessed to form the mounting platform 19. The turntable 13 is rotatably mounted on the mounting platform 19. A turntable motor 20 is mounted on the rotating base 12, and the turntable motor 20 drives the turntable 13 to rotate. A support platform 21 is mounted on the rotating base 12 and is securely mounted on the mounting platform 19. The turntable 13 is supported on the support platform 21. A rotatably mounted connecting platform 22 is mounted on the support platform 21. The connecting platform 22 is located in the center of the support platform 21. The turntable 13 is securely connected to the connecting platform 22. The output shaft of the turntable motor 20 is connected to the connecting platform 22. A T-shaped connecting hole 23 is provided in the center of the support platform 21. The connecting platform 22 is installed on the upper part of the connecting hole 23. The turntable motor 20 is inserted into the lower part of the connecting hole 23 and is fixedly mounted on the mounting platform 19.

[0069] The turntable 13 is circumferentially spaced with several clamping mechanisms 24, which clamp and position the workpiece 46. Three clamping mechanisms 24 are evenly distributed circumferentially. Each clamping mechanism 24 includes a support column 25, a drive piston cylinder 26, and a clamping rod 27. A hinged connecting rod 28 connects the clamping rod 27 and the drive piston cylinder 26. The extension rod of the drive piston cylinder 26 is hinged to the clamping rod 27. The workpiece 46 is supported on the support column 25. A flange 29 is provided on the edge of the workpiece 46. Several through holes are circumferentially spaced on the flange 29. The flange 29 is supported on the support column 25. The upper end of the support column 25 has a pointed structure, and the upper end of the support column 25 is inserted into the through holes to achieve positioning of the workpiece 46. The clamping rod 27 presses against the workpiece 46.

[0070] The clamping mechanism 24 also includes a clamping seat 30, which is radially movably mounted on a turntable 13. A T-shaped groove 31 corresponding to the clamping seat 30 is provided on the upper surface of the turntable 13. An inverted T-shaped connecting post 32 is slidably connected within the groove 31. The connecting post 32 is inserted into the clamping seat 30, and a fastening nut is connected to the connecting post 32. The fastening nut abuts against the upper surface of the clamping seat 30 to position the clamping seat 30. A support post 25 and a drive piston cylinder 26 are mounted on the clamping seat 30. The drive piston cylinder 26 is connected to an inverted T-shaped connecting seat 33, and a connecting rod 28 is hinged to the upper end of the connecting seat 33. The clamping seat 30 can be radially movable, thus adapting to the clamping and positioning of workpieces 46 of different sizes, exhibiting good versatility.

[0071] A radially movable attitude adjustment seat 34 is mounted on a rotating base 12. A bracket 35 is provided on the rotating base 12. The attitude adjustment seat 34 is slidably mounted on the bracket 35. An attitude adjustment piston cylinder 36 is mounted on the bracket 35. The telescopic rod of the attitude adjustment piston cylinder 36 is connected to the attitude adjustment seat 34. The telescopic movement of the telescopic rod of the attitude adjustment piston cylinder 36 drives the attitude adjustment seat 34 to move radially. A telescopic column 37 is mounted on the attitude adjustment seat 34. A buffer spring 38 is installed between the telescopic column 37 and the attitude adjustment seat 34. A touch sensor 39 is mounted on the attitude adjustment seat 34. A sliding cavity 40 is provided on the attitude adjustment seat 34. A protruding edge 41 is provided on the outer wall of the telescopic column 37. The protruding edge 41 is adapted to slide with the sliding cavity 40. A protrusion 42 is provided at one end of the sliding cavity 40. The touch sensor 39 is mounted on the protrusion 42. An end cap 43 is installed at the other end of the sliding cavity 40. The buffer spring 38 abuts against the end cap 43 and the telescopic column 37.

[0072] A window 44 adapted to the telescopic column 37 is provided on the side wall of the workpiece 46. The width of the telescopic column 37 is adapted to the circumferential width of the window 44. A ball bearing 45 is installed at the front end of the telescopic column 37, and the ball bearing 45 rests against the outer wall of the workpiece 46. The end of the telescopic column 37 gradually decreases in size towards the front end, making it easy to insert into the window 44. Several slots of different sizes are provided on the outer wall of the workpiece 46, but each slot is smaller than the size of the window 44. Therefore, the telescopic column 37 can only be inserted into the window 44, not into the slot. After the workpiece 46 is transferred to the turntable 13, the attitude adjustment seat 34 moves towards the workpiece 46 so that the end of the telescopic column 37 rests against the outer wall of the workpiece 46. After the workpiece 46 rotates with the turntable 13 until the window 44 is aligned with the telescopic column 37, the telescopic column 37 inserts into the window 44 and touches the touch sensor 39.

[0073] After workpiece 46 is loaded onto turntable 13, its initial position is uncertain. At this time, the attitude adjustment seat 34 moves towards workpiece 46 so that the end of the telescopic column 37 abuts against the outer wall of workpiece 46. Since there is a window 44 on the outer wall of workpiece 46, the telescopic column 37 can only be inserted into the window 44 after it is fully aligned with the window 44. After workpiece 46 rotates with turntable 13 until the window 44 is aligned with the telescopic column 37, the telescopic column 37 inserts into the window 44 and touches the touch sensor 39. At this time, the touch sensor 39 receives a signal and transmits it to the control system. The control system controls the turntable motor 20 to stop, so that the turntable 13 stops rotating. At this time, the initial position of workpiece 46 is adjusted into place. Then, the attitude adjustment seat 34 moves in the opposite direction to separate the telescopic column 37 from workpiece 46. This structural design makes it easy to adjust workpiece 46 to its initial position, thereby ensuring the accurate determination of the welding position and improving the welding quality.

[0074] When performing vacuum electron beam welding on semiconductor precision vacuum cavity workpiece 46, the entire fixture is placed into the vacuum cavity of the electron beam welding equipment, and then the workpiece 46 is loaded onto the turntable 13. The electron beam welding equipment then performs welding on the workpiece 46.

[0075] The support mechanism 2 can move laterally and longitudinally, achieving two degrees of freedom adjustment for the workpiece 46. The rotating seat 12 and turntable 13 can also rotate, achieving two degrees of freedom adjustment for the workpiece 46 as well. Furthermore, the adjustment of the electron beam focal length emitted by the electron beam welding head 18 achieves one degree of freedom adjustment for the machining of the workpiece 46. Thus, five degrees of freedom adjustment for welding the workpiece 46 are achieved. The workpiece 46 can be changed to various angles required for welding, allowing different planes and positions of the workpiece 46 to be aligned sequentially with the electron beam welding source. The entire welding process eliminates the need for multiple disassemblies and reassemblies of the workpiece 46, and avoids repeated vacuum breaking and evacuation. All multi-angle welds are completed in a single vacuum environment, solving the problems of cumbersome procedures, low efficiency, high processing costs, and positioning errors caused by multiple clamping in traditional processes, thereby improving welding accuracy and product processing stability.

[0076] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the present invention in any way. Other variations and modifications are possible without departing from the technical solutions described in the claims.

Claims

1. A multi-angle vacuum cavity electron beam welding fixture, characterized in that, It includes a worktable, on which a support mechanism capable of horizontal and vertical movement is installed. A turntable assembly is installed on the support mechanism. The turntable assembly includes a rotating base and a turntable. The rotating base is rotatably mounted on the support mechanism, and the turntable is rotatably mounted on the rotating base. The workpiece is loaded on the turntable, and an electron beam welding head is set above the workpiece. The electron beam welding head emits an electron beam toward the workpiece for welding.

2. The multi-angle vacuum cavity electron beam welding fixture according to claim 1, characterized in that, A mounting platform is set on the rotating base, and the turntable is rotatably mounted on the mounting platform. A turntable motor is installed on the rotating base, and the turntable motor drives the turntable to rotate.

3. The multi-angle vacuum cavity electron beam welding fixture according to claim 2, characterized in that, A support platform is installed on the rotating base, the turntable is supported on the support platform, a rotating connecting platform is installed on the support platform, the turntable and the connecting platform are fastened together, and the output shaft of the turntable motor is connected to the connecting platform.

4. The multi-angle vacuum cavity electron beam welding fixture according to claim 1, characterized in that, Several clamping mechanisms are arranged at intervals around the turntable to clamp and position the workpiece.

5. The multi-angle vacuum cavity electron beam welding fixture according to claim 4, characterized in that, The clamping mechanism includes a support column, a drive piston cylinder, and a clamping rod. The clamping rod and the drive piston cylinder are connected by a hinged connecting rod. The extension rod of the drive piston cylinder is hinged to the clamping rod. The workpiece is supported on the support column, and the clamping rod is pressed against the workpiece.

6. The multi-angle vacuum cavity electron beam welding fixture according to claim 5, characterized in that, The clamping mechanism also includes a clamping seat, a support column and a drive piston cylinder, which are mounted on the clamping seat and are radially movable on the turntable.

7. The multi-angle vacuum cavity electron beam welding fixture according to claim 5, characterized in that, The drive piston cylinder is connected to an inverted T-shaped connecting seat, and the connecting rod is hinged to the upper end of the connecting seat.

8. The multi-angle vacuum cavity electron beam welding fixture according to claim 1, characterized in that, The support mechanism includes a transverse sliding seat and a longitudinal sliding seat. The transverse sliding seat is mounted on the worktable for lateral movement, and the longitudinal sliding seat is mounted on the transverse sliding seat for longitudinal movement.

9. The multi-angle vacuum cavity electron beam welding fixture according to claim 1, characterized in that, Both ends of the rotating seat are connected to supports, which are fixedly installed on the support mechanism. The supports are provided with mounting holes. Both ends of the rotating seat are provided with rotating shafts, which are rotatably connected to the two mounting holes respectively. A rotating seat motor is installed on one of the supports, and the rotating seat motor drives the rotating seat to rotate.

10. A multi-angle vacuum cavity electron beam welding fixture according to any one of claims 1 to 9, characterized in that, A radially movable attitude adjustment seat is installed on the rotating base, a telescopic column is installed on the attitude adjustment seat, a buffer spring is installed between the telescopic column and the attitude adjustment seat, and a touch sensor is installed on the attitude adjustment seat; a window adapted to the telescopic column is set on the side wall of the workpiece; after the workpiece is transferred to the turntable, the attitude adjustment seat moves towards the workpiece so that the end of the telescopic column hits the outer wall of the workpiece, and after the workpiece rotates with the turntable until the window is aligned with the telescopic column, the telescopic column inserts into the window and touches the touch sensor.

Images