Laser and electrochemical combined machining method and device

Abstract

The application discloses a laser and electrochemical combined machining method and device. The laser and electrochemical combined machining method comprises the following steps: machining a preformed hole in a machining area of a workpiece by using a laser; placing a micro spiral electrode into the preformed hole, and electrically connecting the workpiece and the micro spiral electrode with a positive electrode and a negative electrode of a power supply respectively, and making electrolyte flow into the preformed hole at least along spiral grooves on the surface of the micro spiral electrode, so that the workpiece and the micro spiral electrode are connected in series by the electrolyte to form a conductive path, and the micro spiral electrode is rotated around its own axis and ultrasonically vibrates at least in the axial direction, so that electrochemical machining is performed on the preformed hole, and when a machining current in the conductive path is lower than a set threshold, the electrochemical machining is completed, and a target hole is obtained. The method can realize mutual promotion of laser machining and electrochemical machining to complete more efficient micro hole machining, and overcomes the technical prejudice that heat damage caused by laser machining hinders electrochemical machining in the prior art.

Description

Technical Field

[0001] This invention belongs to the field of hole processing technology, specifically relating to a laser and electrochemical composite processing method and apparatus. Background Technology

[0002] Micro-hole structures are widely used in aerospace, energy and chemical engineering, automotive manufacturing, electronic devices, and medical and biological fields, playing a decisive role in component performance. Currently, micro-hole machining methods mainly include electrical discharge machining (EDM), precision mechanical drilling, laser machining, and electrochemical machining. With the use of difficult-to-machine materials such as high-temperature alloys and titanium alloys, the requirements for machining accuracy, efficiency, surface quality, and aspect ratio of micro-hole structures have increased, making it difficult for current micro-hole machining methods to simultaneously meet these demands. Therefore, existing micro-hole machining methods tend to combine laser machining and electrochemical machining.

[0003] However, it is difficult to completely avoid thermal damage to the workpiece surface during laser processing. Therefore, there is often a technical bias in the existing technology regarding the combination of laser processing and electrochemical processing. It is believed that the thermal damage generated by laser processing will hinder electrochemical processing, thereby reducing the processing efficiency and quality of micro-hole structures when laser processing and electrochemical processing are combined. Summary of the Invention

[0004] To address the shortcomings of existing technologies, the present invention aims to provide a laser-electrochemical composite processing method and apparatus.

[0005] To achieve the aforementioned objectives, the technical solution adopted by this invention includes:

[0006] This invention provides a laser-electrochemical composite processing method, comprising:

[0007] A pre-drilled hole is created in the processing area of ​​the workpiece using a laser;

[0008] A micro spiral electrode is placed into the pre-made hole, and the workpiece and the micro spiral electrode are electrically connected to the positive and negative terminals of the power supply, respectively. The electrolyte flows into the pre-made hole at least along the spiral grooves on the surface of the micro spiral electrode, so that the workpiece and the micro spiral electrode are connected in series through the electrolyte to form a conductive path. The micro spiral electrode is rotated around its own axis and subjected to ultrasonic vibration at least along the axial direction, thereby performing electrochemical machining on the pre-made hole. When the machining current in the conductive path is lower than a set threshold, the electrochemical machining is completed and the target hole is obtained.

[0009] Furthermore, the laser and electrochemical composite processing method specifically includes: firstly applying an anti-splashing coating to at least the first surface of the workpiece, and then processing the workpiece with the laser from the first surface to process the pre-made hole in the processing area.

[0010] In some preferred embodiments, the thickness of the anti-splashing coating is 0.2 to 1.0 mm.

[0011] In some preferred embodiments, the coating comprises silicon carbide powder and silicone in a mass ratio of 1:1 to 1:5.

[0012] Furthermore, the laser and electrochemical composite processing method specifically includes: before performing the electrochemical processing, determining the structural parameters and operating parameters of the spiral tool electrode based on the structural parameters of the target hole, wherein the structural parameters of the target hole include the hole diameter and hole depth, the structural parameters of the spiral tool electrode include the electrode diameter and the length of the spiral portion, and the operating parameters of the spiral tool electrode include the electrode rotation speed and the ultrasonic vibration frequency.

[0013] Furthermore, electrolyte is injected into the gap between the micro-spiral electrode and the pre-fabricated pore wall.

[0014] Furthermore, the diameter of the micro spiral electrode is 0.2 to 0.45 mm, and the length of the spiral portion is 5 to 20 mm.

[0015] Furthermore, during the electrochemical processing, the rotation speed of the micro spiral electrode is 50–1000 r / min.

[0016] Furthermore, the ultrasonic vibration frequency of the micro spiral electrode is 20–50 kHz.

[0017] Furthermore, the laser and electrochemical composite processing method specifically includes: before performing the electrochemical processing, concentrically positioning the micro spiral electrode within the pre-made hole, and ensuring that the tip of the spiral tool electrode enters the pre-made hole to a depth of 0.3–1.5 mm.

[0018] In some preferred embodiments, prior to the electrochemical processing, the center of the micro spiral electrode is aligned with the pre-formed hole, the front end of the electrode is positioned at the center of the pre-formed hole, and then the electrode is inserted into the hole.

[0019] Furthermore, the voltage used during the electrochemical processing is 10–20V.

[0020] Furthermore, the target hole includes a through hole or a blind hole.

[0021] Furthermore, the electrolyte includes one or more combinations of salt solutions and acidic solutions.

[0022] Furthermore, the temperature of the electrolyte is 24–50°C.

[0023] Furthermore, the electrolyte contains tiny abrasive particles.

[0024] This invention also provides a laser-electrochemical composite processing device, comprising:

[0025] A laser processing module, including a laser processing head, and used at least for laser processing of a workpiece to be processed;

[0026] An electrochemical machining module includes a micro spiral electrode, a rotary drive shaft, an ultrasonic vibration mechanism, and a jet mechanism, and is used at least for electrochemical machining of the workpiece. The micro spiral electrode is connected to the rotary drive shaft, the ultrasonic vibration mechanism, and the jet mechanism respectively. The jet mechanism is connected to an electrolyte supply module. The rotary drive shaft is used at least to drive the micro spiral electrode to rotate around its own axis. The ultrasonic vibration mechanism is used at least to drive the micro spiral electrode to perform ultrasonic vibration along the axial direction. The jet mechanism is used at least to provide electrolyte to the spiral grooves on the surface of the micro spiral electrode.

[0027] The motion module is connected to the laser processing module and the electrochemical processing module respectively, and is at least used to drive the laser processing head and the micro spiral electrode to move along a set path;

[0028] A data acquisition module is connected to the micro spiral electrode and is used at least to monitor the processing current in the electrochemical working circuit during the electrochemical processing.

[0029] The control module is connected to the laser processing module, electrochemical processing module, motion module, and data acquisition module, respectively.

[0030] Furthermore, the electrochemical working circuit includes a conductive path mainly formed by the workpiece, the micro spiral electrode, the power source, and the electrolyte connected in series, wherein the workpiece and the micro spiral electrode are electrically connected to the anode and cathode of the power source, respectively.

[0031] Furthermore, the jetting mechanism is coaxially mounted on the micro spiral electrode.

[0032] Furthermore, the electrochemical machining module also includes a conductive brush, a retaining ring, an insulating plug, and a waterproof bearing. One end of the retaining ring is mounted on the rotary drive shaft, and the other end is fixedly connected to the micro-spiral electrode. The conductive brush, the jetting mechanism, and the ultrasonic vibration mechanism are all mounted on the rotary drive shaft, positioned between the two ends of the retaining ring. The waterproof bearing and the insulating plug are coaxially arranged from the outside to the inside at the upper opening of the pre-drilled hole. The conductive brush is connected to the power cathode for contact with the rotating electrode, ensuring contact between the electrode and the power cathode. During electrochemical machining of the pre-drilled hole, the electrode is the cathode and the hole is the anode, ensuring smooth electrochemical machining.

[0033] Furthermore, the motion module includes an x-axis motion mechanism, a y-axis motion mechanism, and a z-axis motion mechanism that are interconnected. There are one or more z-axis motion mechanisms. The laser processing head and the micro spiral electrode are mounted on the same z-axis motion mechanism, or the laser processing head and the micro spiral electrode are mounted on different z-axis motion mechanisms.

[0034] Furthermore, the laser and electrochemical composite processing device also includes an electrolytic cell, which is mounted on the motion module, and the lower end face of the electrolytic cell is provided with a liquid exchange port.

[0035] Compared with the prior art, the advantages of the present invention include:

[0036] 1. The laser and electrochemical composite processing method of the present invention changes the material structure of the hole wall surface by laser processing the pre-made hole, which improves the permeability and diffusion rate of the electrolyte into the hole wall during subsequent electrochemical processing. The subsequent electrochemical processing can remove the thermal damage caused by laser processing and eliminate the taper of the pre-made hole wall, so that laser processing and electrochemical processing can promote each other to complete more efficient micro-hole processing, overcoming the technical bias in the prior art that the thermal damage caused by laser processing will hinder electrochemical processing.

[0037] 2. In this invention, micro-abrasive particles are added to the electrolyte. When the electrode rotates axially and drives the electrolyte to flow, the micro-abrasive particles polish the hole wall of the pre-made hole, which, together with electrochemical processing, further improves the surface quality of the micro-hole processing.

[0038] 3. In this invention, before laser preparation of pre-drilled holes, an anti-splatter coating is applied to the surface of the workpiece to be processed, and after electrochemical processing, the workpiece is immersed in a silicone solvent to remove the anti-splatter coating, thus ensuring the surface quality of other parts of the workpiece during laser processing and electrochemical processing. Attached Figure Description

[0039] Figure 1 This is a schematic diagram of the structure of a laser and electrochemical composite processing device according to an embodiment of the present invention;

[0040] Figure 2 This is an enlarged schematic diagram of the electrode portion of a laser-electrochemical composite processing device according to an embodiment of the present invention;

[0041] Figure 3 This is a cross-sectional view of a pre-formed hole in a laser-electrochemical composite processing device according to an embodiment of the present invention;

[0042] Figure 4 This is a cross-sectional view of a micro-hole in a laser and electrochemical composite processing device according to an embodiment of the present invention.

[0043] Explanation of reference numerals in the attached diagram: 1. Laser processing head; 2. Miniature spiral electrode; 3. Power supply; 4. Pre-drilled hole; 5. Liquid supply port; 6. Liquid replacement port; 7. Rotary drive shaft; 8. Ultrasonic vibration mechanism; 9. Jet mechanism; 10. Electrolytic cell; 11. Support frame; 12. Workpiece; 13. Marble base; 14. X-axis motion mechanism; 15. Y-axis motion mechanism; 16. Z-axis motion mechanism; 17. Liquid supply tank; 18. Waste liquid tank; 19. Liquid supply pump; 20. Waste liquid pump; 21. Filter pump; 22. Filter plate frame; 23. Filter paper; 24. Waterproof bearing; 25. Insulating plug; 26. Shaft retainer; 27. Conductive brush; 28. Electrochemical processing module. Detailed Implementation

[0044] In view of the shortcomings of the prior art, the inventors of this invention, through long-term research and extensive practice, have proposed the technical solution of this invention. The following will further explain and illustrate this technical solution, its implementation process, and its principles.

[0045] Example 1

[0046] This embodiment provides a laser-electrochemical composite processing method. A laser is used to process the workpiece 12, creating pre-drilled holes. The laser processing alters the material structure around the pre-drilled holes, making the surface of the holes more porous, facilitating faster and deeper penetration of the electrolyte into the hole walls. However, the pre-drilled hole walls suffer some thermal damage after laser processing, and due to losses during laser penetration, the holes have a certain taper. After laser processing, a micro-spiral electrode 2 is used to electrochemically process the pre-drilled hole walls. The laser-processed holes facilitate electrolyte penetration, resulting in higher permeability and diffusion rates. Electrochemical processing at this stage ensures higher reaction efficiency and significantly improves the surface roughness of the micro-hole walls, thereby eliminating thermal damage and taper issues associated with the pre-drilled holes.

[0047] Specifically, this embodiment includes the following steps:

[0048] S1. Apply an anti-splashing coating to the upper and lower surfaces of the workpiece 12 to be processed;

[0049] S2. Pre-fabricated holes are prepared rapidly and efficiently using high-power lasers;

[0050] S3. Electrochemical machining treats the pre-formed holes from laser processing to remove surface thermal damage caused by laser processing and reduce or eliminate the taper of the laser pre-formed holes to ensure the surface quality and processing accuracy of the micro-holes.

[0051] S4. Apply ultrasonic vibration to the micro spiral electrode 2, at least to remove the electrolysis products from the electrolyte;

[0052] S5. After completing the electrochemical machining, immerse the machined workpiece 12 in the silicone solvent to remove the anti-splatter coating.

[0053] It should be noted that in step S1, the main components of the anti-spatter coating are silicon carbide powder and silicone. The silicon carbide powder and silicone are fully mixed in a ratio of 1:1.34 and uniformly coated on the upper and lower surfaces of the workpiece 12. The coating thickness of the anti-spatter coating is controlled at 0.8 mm, which can ensure the surface quality of other parts of the workpiece 12 during laser processing and electrochemical processing.

[0054] Step S2 is laser processing. The laser type in this step includes, but is not limited to, continuous laser, quasi-continuous laser, millisecond pulse laser, etc. After the pre-made hole is laser-processed, the axial position of the pre-made hole is located by CCD.

[0055] In this way, the microstructure of the pre-formed hole wall surface can be altered while using laser to prepare the pre-formed hole, and the microstructure and geometry of the pre-formed hole wall can be optimized. This change significantly improves the distribution and reaction efficiency of the electrolyte in subsequent electrochemical processing, thereby increasing the processing efficiency of the subsequent electrochemical processing. Finally, the surface roughness of the micro-hole wall is reduced, and the micro-holes include through holes and blind holes. The laser drilling depth can be controlled by controlling the number of laser pulses, avoiding damage to the back wall of components with internal cavities caused by laser processing.

[0056] Step S3 is electrochemical machining. The main component of electrochemical machining is the micro spiral electrode 2. In this embodiment, the micro spiral electrode 2 is made of titanium alloy tungsten steel with high hardness and strong corrosion resistance. The surface of the micro spiral electrode 2 has multiple spiral parts. The micro spiral electrode 2 meets the following parameters: the diameter is 0.2 to 0.45 mm. The micro spiral electrode 2 serves as the cathode for electrochemical machining. The diameter of the micro spiral electrode 2 is 0.1 to 0.2 mm smaller than the diameter of the pre-made hole. The size of the micro spiral electrode 2 can be selected according to the diameter and depth of the pre-made hole formed by laser machining. The diameter of the pre-made hole is preferably 0.5 mm, and the diameter of the micro spiral electrode 2 is preferably 0.3 mm.

[0057] The length of the spiral portion of the micro spiral electrode 2 is 5 to 20 mm, preferably 10 mm.

[0058] The rotational speed of the micro spiral electrode 2 is 50-1000 r / min, preferably 200 r / min.

[0059] Before secondary processing, the end of the micro spiral electrode 2 extends 0.3 to 1.5 mm beyond the pre-made hole, preferably 1 mm.

[0060] The materials of the micro spiral electrode 2 include, but are not limited to, titanium alloy tungsten steel, stainless steel, and brass.

[0061] Furthermore, the essence of electrochemical machining is to use the hole wall of the pre-made hole as the anode, the micro spiral electrode 2 as the cathode, and the electrolyte as the medium to form a circuit after energizing, thereby eliminating the thermal damage to the hole wall of the pre-made hole caused by laser machining, and at the same time eliminating the taper of the pre-made hole. In addition, the typical voltage used for energizing is 10-20V, preferably 18V.

[0062] After the CCD positions the axis of the pre-made hole in step S2, the micro spiral electrode 2 is controlled to move directly above the axis of the pre-made hole, thereby ensuring that the pre-made hole and the micro spiral electrode 2 remain coaxial during secondary processing, thus ensuring the processing accuracy of the micro hole.

[0063] Furthermore, in step S3, micro-abrasive particles are added to the electrolyte. When the micro-spiral electrode 2 rotates, causing the electrolyte to flow, the micro-abrasive particles polish the hole walls of the pre-made holes, improving the surface quality of the micro-holes. Additionally, the micro-spiral electrode 2 meets the following requirements:

[0064] The electrolyte includes any one of salt solution, acidic solution, or mixed solution;

[0065] Electrolytes include, but are not limited to, NaNO3 solution, NaCl solution, HCl solution, and mixed solutions of NaCl and HCl;

[0066] The temperature of the electrolyte is 24–50°C, preferably 27°C.

[0067] During secondary processing, a current sensor and a high-speed data acquisition system are used to collect special current signals in real time. Combined with LabVIEW program, the relationship between the current in the circuit and the current threshold is determined. When the current in the electrolyte is lower than the current threshold, the electrochemical processing power supply 3 is cut off, and the electrochemical processing is completed, thus completing step S3.

[0068] In step S4, ultrasonic vibration is applied to the micro spiral electrode 2, that is, the micro spiral electrode 2 is vibrated with ultrasound. The products generated during the electrolysis post-treatment process can be smoothly discharged through ultrasonic vibration. Axial vibration is more conducive to promoting the discharge of electrolyte and electrolysis products than radial vibration, ensuring the smooth progress of electrochemical processing, while ensuring timely renewal of electrolyte and promoting the smooth progress of post-treatment process.

[0069] This embodiment improves the reaction efficiency of electrochemical processing through laser processing, while also eliminating the thermal damage and taper caused by laser processing. Experimental data shows that the surface roughness after processing using the combined laser and electrochemical processing method in this embodiment reaches Ra 0.7 μm, while the surface roughnesses using laser processing or electrochemical processing alone are Ra 2.6 μm and Ra 0.8 μm, respectively. Furthermore, the overall processing efficiency of the combined laser and electrochemical processing method is improved by 80%, and the processing consistency is significantly better than that of the single process.

[0070] Figure 3 The image shows a side cross-section of a pre-formed hole processed by a high-power laser. It can be seen from the image that the diameter of the pre-formed hole varies considerably from top to bottom, exhibiting a certain degree of taper. Scanning electron microscopy reveals poor surface quality of the micropore's inner wall, with defects such as microcracks and a recast layer. Figure 4 The image shows micro-holes after electrochemical post-treatment. It is evident from the image that the electrochemically treated micro-holes have almost no taper and exhibit uniform diameter variation. Measurement of the inner wall of the hole using a confocal laser microscope revealed that the average surface roughness decreased from Ra 2.37 μm to Ra 0.64 μm. No recast layer or microcracks were found on the sidewalls of the micro-holes under scanning electron microscopy, indicating good surface quality. Therefore, this embodiment combines the advantages of high-power laser processing and electrochemical processing, enabling the efficient processing of micro-holes with high surface quality, free of microcracks and recast layers, on the material workpiece 12.

[0071] Example 2

[0072] This embodiment provides a laser-electrochemical hybrid processing device, such as... Figure 1 As shown, it includes: a laser processing module, an electrochemical processing module, and a liquid supply module. The laser processing module is used to perform laser processing on the workpiece 12 to form a pre-made hole, thereby changing the material microstructure around the pre-made hole. The electrochemical module is used to perform electrochemical processing on the pre-made hole after laser processing to eliminate thermal damage and taper of the pre-made hole wall. The liquid supply module is used to provide a conductive medium to the electrochemical module and form a circuit for electrochemical processing.

[0073] The laser and electrochemical composite processing device includes a marble base 13, which has a processing space inside. The processing space is used to accommodate the workpiece 12 to be processed, the laser processing module, and the electrochemical processing module. The processing of the workpiece 12 by the laser processing module and the electrochemical processing module is carried out inside the processing space. In addition, an X-axis motion mechanism 14 and a Y-axis motion mechanism 15 are fixedly arranged in the processing space. The X-axis motion mechanism 14 is located above the Y-axis motion mechanism 15, and the workpiece 12 to be processed is fixedly arranged on the X-axis motion mechanism 14. The X-axis motion mechanism 14 and the Y-axis motion mechanism 15 are used to drive the workpiece 12 to be processed to move along the X and Y directions and place it in the processing position of the laser processing module and the processing position of the electrochemical processing module, respectively.

[0074] The laser processing module includes a laser processing head 1, which is mounted on a z-axis motion mechanism 16. The z-axis motion mechanism 16 drives the laser processing head 1 to move along the z-axis, approaching or moving away from the workpiece 12 to be processed. When the workpiece 12 to be processed is located at the processing station of the laser processing module (i.e., directly below the laser processing head 1), the z-axis motion mechanism 16 drives the laser processing head 1 to approach the workpiece 12 to be processed and to process a pre-made hole on the workpiece 12.

[0075] like Figure 2 As shown, the electrochemical machining module includes a micro spiral electrode 2 and a power supply 3. The micro spiral electrode 2 is an axially rotatable spiral micro spiral electrode 2, that is, the surface of the micro spiral electrode 2 has a micro spiral structure. The micro spiral electrode is mounted on another z-axis motion mechanism 16. The z-axis motion mechanism 16 drives the micro spiral electrode 2 to move along the Z-axis, approaching or moving away from the workpiece 12 to be processed. When the workpiece 12 to be processed is located at the processing position of the electrochemical machining module (i.e., directly below the micro spiral electrode 2), the z-axis motion mechanism 16 drives the processing head of the micro spiral electrode 2 to approach the workpiece 12 to be processed, so that the micro spiral electrode 2 and the pre-made hole are coaxial and set inside the pre-made hole. At this time, there is a gap between the micro spiral electrode 2 and the inner wall of the pre-made hole. At the same time, the cathode of the power supply 3 is electrically connected to the micro spiral electrode 2, and the anode of the micro spiral electrode 2 is electrically connected to the workpiece 12 to be processed.

[0076] It should also be noted that the electrochemical processing module also includes a rotary drive shaft 7 and an ultrasonic vibration mechanism 8. The micro spiral electrode 2, the ultrasonic vibrator and the rotary drive shaft 7 are coaxially mounted. The micro spiral electrode 2 is mounted on the end of the rotary drive shaft 7 through the connection of the shaft retainer 26 and rotates axially under the drive of the rotary drive shaft 7. The ultrasonic vibration mechanism 8 is set between the micro spiral electrode 2 and the rotary drive shaft 7 to provide ultrasonic vibration to the micro spiral electrode 2. The ultrasonic vibration combined with the rotation of the micro spiral electrode 2 removes impurities generated in the electrolyte after the current is applied.

[0077] It should also be noted that the electrochemical processing module also includes a jetting mechanism 9, and a waterproof bearing 24 and an insulating plug 25 are coaxially arranged from the outside to the inside at the upper opening of the pre-made hole. When the micro spiral electrode 2 is placed inside the pre-made hole, the jetting mechanism 9 is connected to the liquid supply port 5, and the micro spiral electrode 2 is coaxially jetted with water through the waterproof bearing 24, thereby ensuring that the supply direction of the electrolyte is consistent with the axis of the micro spiral electrode 2.

[0078] The electrochemical processing module also includes an electrochemical control component, which is used at least in real time to determine whether the current flowing into the electrolyte is lower than the current threshold.

[0079] The electrolyte supply module includes a supply tank 17, a waste tank 18, a supply pump 19, a waste pump 20, a filter pump 21, and a filter plate frame 22. The supply tank 17 and the supply pump 19 are connected. The supply tank 17 contains the electrolyte before processing, and the waste tank 18 contains the processed electrolyte. The waste tank 18 is connected to the waste pump 20. The filter pump 21 and the filter plate frame 22 are located between the waste tank 18 and the supply tank 17. The filter plate frame 22 includes multiple layers of filter paper 23, which are arranged in parallel along the flow direction of the electrolyte in the supply module. The supply module also has a supply port 5 and a replacement port 6. The supply port 5 is located on the micro spiral electrode 2 and is connected to the supply pump 19. Electrolyte is drawn from the supply tank 17 and injected into the gap. When the gap is full of electrolyte, the micro spiral electrode 2 is used as the cathode, the workpiece 12 to be processed is used as the anode, and the electrolyte is used as the medium. When the power supply 3 is turned on, a complete circuit is formed, and the electrolyte begins to electrochemically process the pre-made hole wall. The electrolyte exchange port 6 draws the processed electrolyte into the waste liquid tank 18 for storage through the waste liquid pump 20. Then, the electrolyte in the waste liquid tank 18 is drawn into the filter plate frame 22 for filtration by the filter pump and sent back to the supply tank 17 to realize the renewal of electrolyte and realize the circulation of electrolyte, avoiding environmental pollution. The supply module also includes a heater controlled by a temperature controller, which is characterized by the controllability of electrolyte pressure and temperature.

[0080] The laser and electrochemical composite processing device in this embodiment also includes a CCD positioning module. The CCD positioning module is used at least to position the axis of the pre-made hole processed by the laser processing head 1, and to control the micro spiral electrode 2 and the pre-made hole to be coaxially arranged.

[0081] Furthermore, the laser and electrochemical composite processing device of this embodiment also includes an electrolytic cell 10 and a support frame 11. The support frame 11 is disposed inside the electrolytic cell 10. The electrolytic cell 10 is fixed on the x-axis motion mechanism 14 and the workpiece 12 is moved between the laser processing station and the electrochemical processing station by the x-axis motion mechanism 14 and the y-axis motion mechanism 15. The support frame 11 is at least used to place the workpiece 12. The electrolyte after electrochemical processing flows into the electrolytic cell 10. The liquid exchange port 6 is located on the lower end face of the electrolytic cell 10, which facilitates the waste liquid pump 20 to pump it into the liquid supply module for filtration.

[0082] In other words, the processing flow of this embodiment is as follows: a micro spiral electrode 2 made of conductive titanium alloy tungsten steel material is used as the cathode, and the size of the cathode is 0.1 to 0.2 mm smaller than the pre-drilled hole; a micro spiral electrode 2 of appropriate diameter is selected according to the diameter and depth of the pre-drilled hole; the surface of the micro spiral electrode 2 has a micro spiral structure, and the micro spiral electrode 2, ultrasonic vibrator and rotary drive shaft 7 are coaxially installed, and the micro spiral electrode 2 is coaxially sprayed with water through the waterproof bearing 24; the liquid supply module maintains a constant temperature through a temperature control heating device; during electrochemical processing, the power supply 3 is energized, and while the micro spiral electrode 2 with micro spiral structure moves, the electrolyte is coaxially supplied from the top of the cathode. The electrochemical processing process is disturbed by the rotary drive shaft 7 and the ultrasonic vibrator, which can not only improve the efficiency of electrochemical processing, ensure timely replenishment of electrolyte and discharge of electrolytic products, promote the smooth progress of the post-electrolysis process, effectively remove defects such as microcracks and recast layers generated by laser drilling, improve the quality of micro-holes, but also remove the stress generated on the surface of the pre-drilled hole wall during high-power laser processing. After a certain period of time, power supply 3 is cut off to stop electro-electrochemical machining. Workpiece 12 is then removed, cleaned, and dried to obtain micropores without microcracks or recast layers.

[0083] It should be understood that the above embodiments are merely illustrative of the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly. They should not be construed as limiting the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A laser-electrochemical composite processing method, characterized in that, include: A pre-drilled hole (4) is formed in the processing area of ​​the workpiece (12) using a laser; The micro spiral electrode (2) is placed into the pre-made hole (4), and the workpiece (12) and the micro spiral electrode (2) are electrically connected to the positive and negative terminals of the power supply (3), respectively. The electrolyte flows into the pre-made hole (4) at least along the spiral grooves on the surface of the micro spiral electrode (2), so that the workpiece (12) and the micro spiral electrode (2) are connected in series through the electrolyte to form a conductive path. The micro spiral electrode (2) is rotated around its own axis and subjected to ultrasonic vibration at least along the axial direction, thereby performing electrochemical processing on the pre-made hole (4). When the processing current in the conductive path is lower than the set threshold, the electrochemical processing is completed and the target hole is obtained.

2. The laser and electrochemical composite processing method according to claim 1, characterized in that, Specifically, it includes: First, an anti-splash coating is applied to at least the first surface of the workpiece (12), and then the workpiece (12) is processed by the laser from the first surface to process the pre-made hole (4) in the processing area. Preferably, the thickness of the anti-splash coating is 0.2 to 1.0 mm; Preferably, the coating comprises silicon carbide powder and silicone in a mass ratio of 1:1 to 1:

5.

3. The laser and electrochemical composite processing method according to claim 1, characterized in that, Specifically, it includes: Before performing the electrochemical machining, the structural parameters and operating parameters of the spiral tool electrode are determined based on the structural parameters of the target hole. The structural parameters of the target hole include the hole diameter and hole depth. The structural parameters of the spiral tool electrode include the electrode diameter and the length of the spiral portion. The operating parameters of the spiral tool electrode include the electrode rotation speed and the ultrasonic vibration frequency. And / or, inject electrolyte into the gap between the micro spiral electrode (2) and the pre-made hole (4) wall.

4. The laser and electrochemical composite processing method according to claim 3, characterized in that: The diameter of the micro spiral electrode (2) is 0.2 to 0.45 mm, and the length of the spiral portion is 5 to 20 mm; And / or, during the electrochemical processing, the rotation speed of the micro spiral electrode (2) is 50 to 1000 r / min; And / or, the ultrasonic vibration frequency of the micro spiral electrode (2) is 20 to 50 kHz.

5. The laser and electrochemical composite processing method according to claim 1, characterized in that, Specifically, it includes: Before performing the electrochemical processing, the micro spiral electrode (2) is concentrically positioned in the pre-made hole (4), and the front end of the spiral tool electrode enters the pre-made hole (4) to a depth of 0.3 to 1.5 mm. Preferably, before performing the electrochemical processing, the center of the micro spiral electrode is concentric with the pre-made hole, the front end of the spiral tool electrode is positioned at the center of the pre-made hole, and then the electrode is inserted into the hole; And / or, the voltage used during the electrochemical processing is 10 to 20 V.

6. The laser and electrochemical composite processing method according to claim 1, characterized in that: The target hole includes a through hole or a blind hole; And / or, the electrolyte includes one or more combinations of salt solutions and acidic solutions; And / or, the temperature of the electrolyte is 24–50°C; And / or, the electrolyte contains tiny abrasive particles.

7. A laser-electrochemical composite processing device, characterized in that, include: A laser processing module includes a laser processing head (1) and is used at least for laser processing of a workpiece (12) to be processed; An electrochemical processing module (28) includes a micro spiral electrode (2), a rotary drive shaft (7), an ultrasonic vibration mechanism (8), and a jet mechanism (9), and is used at least for electrochemical processing of the workpiece (12). The micro spiral electrode (2) is connected to the rotary drive shaft (7), the ultrasonic vibration mechanism (8), and the jet mechanism (9) respectively. The jet mechanism (9) is connected to an electrolyte supply module. The rotary drive shaft (7) is used at least to drive the micro spiral electrode (2) to rotate around its own axis. The ultrasonic vibration mechanism (8) is used at least to drive the micro spiral electrode (2) to perform ultrasonic vibration along the axial direction. The jet mechanism (9) is used at least to provide electrolyte to the spiral grooves on the surface of the micro spiral electrode (2). The motion module is connected to the laser processing module and the electrochemical processing module (28) respectively, and is at least used to drive the laser processing head (1) and the micro spiral electrode (2) to move along a set path; A data acquisition module is connected to the micro spiral electrode (2) and is used at least to monitor the processing current in the electrochemical working circuit during the electrochemical processing. The control module is connected to the laser processing module, the electrochemical processing module (28), the motion module, and the data acquisition module, respectively.

8. The laser and electrochemical composite processing apparatus according to claim 7, characterized in that: The electrochemical working circuit includes a conductive path mainly formed by the workpiece (12), the micro spiral electrode (2), the power supply (3) and the electrolyte connected in series, wherein the workpiece (12) and the micro spiral electrode (2) are electrically connected to the anode and cathode of the power supply (3), respectively.

9. The laser and electrochemical composite processing apparatus according to claim 7, characterized in that: The jet mechanism (9) is coaxially sleeved on the micro spiral electrode (2); And / or, the electrochemical processing module (28) further includes a conductive brush (27), a retaining ring (26), an insulating plug (25), and a waterproof bearing (24), wherein one end of the retaining ring (26) is disposed on the rotary drive shaft (7), and the other end is fixedly connected to the micro spiral electrode (2), the conductive brush (27), the jet mechanism (9) and the ultrasonic vibration mechanism (8) are all disposed on the rotary drive shaft (7), and the conductive brush (27), the jet mechanism (9) and the ultrasonic vibration mechanism (8) are located between the two ends of the retaining ring (26), and the waterproof bearing (24) and the insulating plug (25) are coaxially disposed from the outside to the inside at the upper opening of the pre-made hole (4).

10. The laser and electrochemical composite processing apparatus according to claim 7, characterized in that: The motion module includes an x-axis motion mechanism (14), a y-axis motion mechanism (15), and a z-axis motion mechanism (16) connected to each other. There are one or more z-axis motion mechanisms (16). The laser processing head (1) and the micro spiral electrode (2) are mounted on the same z-axis motion mechanism (16), or the laser processing head (1) and the micro spiral electrode (2) are mounted on different z-axis motion mechanisms (16). And / or, the laser and electrochemical composite processing device further includes an electrolytic cell (10), which is disposed on the motion module, and the lower end face of the electrolytic cell (10) is provided with a liquid exchange port (6).

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