Beam, jet calibration method and calibration device

Abstract

The application discloses a kind of beam, jet calibration method and calibration device, the calibration method includes: along section point or section line, calibration object is divided into at least 2 parts;Change the moving direction of the sectioned part of the calibration object;Difference between the sectioned part of the calibration object is compared to realize calibration;Calibration device includes: section module, the calibration object is sectioned;Receiving module, the sectioned part of the calibration object is perceived;Through the present application, the cross-sectional shape, cross-sectional size, energy distribution center, direction, divergence angle and other calibration difficult problems of beam, jet in the application scenario of beam, jet are solved, and the application range of beam, jet is expanded.

Description

Technical Field

[0001] This application relates to the field of beam and jet applications, and more specifically, to beam and jet calibration methods and calibration devices. Background Technology

[0002] A beam refers to a particle or radiation beam with a certain energy density, including laser beams, plasma beams, ion beams, and electron beams. A jet refers to a fluid with a certain energy and velocity, including water jets, abrasive jets, and metal jets. Under certain conditions, the material in a beam or jet is constrained by a nozzle or channel and driven by a certain pressure, causing its energy to concentrate and maintain a certain shape and directionality within a certain distance, achieving high energy density and high precision.

[0003] Laser beams and jets are widely used in material removal, welding, and other applications, such as in the cutting industry. The following explanation uses a laser cutting machine as an example. During laser cutting, to maximize laser energy and achieve precise cutting, laser focusing is necessary. In precision machining, the focused spot size needs to be 30-50 micrometers. To achieve straight and dimensionally accurate laser cut edges, the spot shape must be regular, the energy center precisely located, and the optical axis perpendicular to the cutting edge. However, common laser cutting light sources are invisible, and the spot size is tiny, making it difficult to accurately detect the energy distribution center and the perpendicularity of the optical axis. For processing curved or inclined surfaces, a zero-point coordinate system is usually required, and precise beam calibration is also necessary. Current laser cutting machines require multiple trial cuts and adjustments, resulting in high testing and debugging costs and unreliable results. High-precision machining uses position-sensitive detectors (PSDs), which are expensive and require costly maintenance and calibration. The difficulty and high cost in calibrating the cross-sectional shape, size, energy distribution center, direction of motion, and divergence angle of the laser beam and jet hinder their application. Summary of the Invention

[0004] This application provides a beam and jet calibration method and calibration device to at least solve the practical application problem of difficult beam and jet calibration in relevant beam and jet application scenarios.

[0005] According to one aspect of this application, a beam or jet calibration method is provided, comprising: dividing a calibration object into at least two parts along a dividing point or dividing line; changing the motion direction of the divided parts of the calibration object; and comparing the differences between the divided parts of the calibration object in different directions to achieve calibration.

[0006] Furthermore, the reflective surface changes the direction of movement of the segmented part of the calibration object, and the reflective surface is a plane or a curved surface; the reflective surface intersects at the segmentation point or the segmentation line.

[0007] Furthermore, the differences between the segments of the calibration object are compared, including at least one of the following: comparing the energy differences between the segments of the calibration object; comparing the coverage area differences between the segments of the calibration object; comparing the angle differences between the segments of the calibration object and the direction of motion of the calibration object; comparing the shape differences between the segments of the calibration object; and further, at least one of the following is achieved: the cross-sectional shape, cross-sectional size, energy distribution center, direction of motion, and divergence angle of the calibration object.

[0008] According to another aspect of this application, a beam / jet calibration device is also provided. The calibration device includes: a segmentation module for segmenting the calibration object; and a receiving module for sensing the segmented portion of the calibration object. The motion direction of the calibration object after being segmented by the segmentation module is changed by the reflective surface and falls onto the receiving module, where it is sensed by the receiving module to achieve calibration.

[0009] Furthermore, the segmentation module is a cone or a prism.

[0010] Furthermore, at least one of the receiving modules is uniformly distributed around the segmentation module.

[0011] Furthermore, the receiving modules of the same calibration device may be of the same type or different types; the receiving module receives the calibration object and generates at least one of the following effects: light, heat, force, electricity, and sound.

[0012] Furthermore, the receiving module has two groups of eight in total; one group will display color when it receives the calibration object; the other group will generate an electrical effect when it receives the calibration object.

[0013] Furthermore, the calibration device is integrated into a base; the base includes at least one of the following: mounting holes, slots, and magnets.

[0014] Furthermore, the calibration device also includes a positioning module; the positioning module is a scale and / or a surface group; the scale, surface group and the segmentation module have a known positional relationship.

[0015] Furthermore, the calibration device also includes an interaction module; the interaction module can generate at least one of the following based on the sensing of the receiving module: light, numerical display, or electrical signal output, to interact with operators and / or external equipment.

[0016] In this embodiment, the calibration object is divided into rings along the dividing point; the direction of motion of the divided parts of the calibration object is changed; and the differences between the divided parts of the calibration object in different directions are compared to achieve calibration. This application solves the practical application problem of calibrating the cross-sectional shape, cross-sectional size, energy distribution center, direction of motion, and divergence angle of beams and jets in beam and jet application scenarios, thereby expanding the application scenarios of beams and jets and reducing application costs to a certain extent. Attached Figure Description

[0017] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments and descriptions of this application are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings:

[0018] Figure 1 This is a flowchart of a beam and jet calibration method according to an embodiment of this application;

[0019] Figure 2 This is a schematic diagram of a beam and jet calibration device according to an embodiment of this application;

[0020] Figure 3 This is a schematic diagram showing the segmented portion of the calibrated object falling into the receiving module according to an embodiment of this application;

[0021] Figure 4 This is a schematic diagram illustrating the difference perception of the receiving module according to an embodiment of this application;

[0022] Figure 5 This is a front view of a beam / jet device according to an embodiment of this application; and,

[0023] Figure 6 This is a schematic diagram of the bottom surface of a beam / jet device according to an embodiment of this application. Detailed Implementation

[0024] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0025] It should be noted that the steps shown in the flowchart in the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions, and although a logical order is shown in the flowchart, in some cases the steps shown or described may be executed in a different order than that shown here.

[0026] In beam and jet processing applications, the essence is to achieve high energy density by focusing the beam or jet (hereinafter referred to as beam); then, a mechanical device is used to make it move relative to the workpiece along a designed trajectory at a certain speed. Since the beam itself has a certain size, precise offset based on the energy center, shape, and size is necessary during trajectory movement to ensure processing accuracy. For processing on curved or inclined surfaces, it is usually also necessary to detect the normal direction of the processing position to establish a processing coordinate system. Related technologies use sensors to directly measure the beam and record its calibration results to achieve offset during trajectory movement. For example, cameras and position-sensitive detectors (PSDs) can only directly observe the shape and size; measuring the energy distribution center and the axis of motion is difficult, and there are also issues with accuracy and durability.

[0027] According to the inventors' analysis, the reason for the inability to achieve satisfactory measurements is that the focused beam size is typically small. For example, the spot size of a cutting laser beam is 0.1-0.3 mm, the size of a micro-nano processing laser beam is below 0.05 mm, the diameter of a plasma beam is between 0.6-2.0 mm, and the diameter of a water jet is 0.05-0.4 mm. Relative changes in size, shape, and axis of motion result in small changes in physical quantities, making them difficult for sensors to detect and leading to high detection noise. Furthermore, due to the high energy density of the beam, although there may be deviations in internal energy, it is even more difficult to detect the center of energy density in small-sized applications.

[0028] To address the aforementioned problems, an alternative solution is provided in the following embodiments. In these embodiments, a cone-shaped beam splitting principle is proposed, utilizing the characteristic that beam particles maintain their direction of motion without external interference to achieve beam splitting and energy dispersion; then, the different separated portions are processed and detected, and the detection results are compared to determine the beam calibration method and apparatus.

[0029] Figure 1 This is a flowchart of the beam calibration method according to an embodiment of this application; the following is a description of... Figure 1 The steps involved in the Chinese method are explained below:

[0030] In step S102, the beam is divided into at least two parts by a splitting point or splitting line. The total energy of the separated parts is equal to the original total energy, but there is a difference between the separated parts. If one side has more energy, the other side will have less. The difference is determined by the position of the splitting point or splitting line in the beam; when one side increases, the other side will necessarily decrease, thus achieving differential measurement and improving accuracy.

[0031] In step S104, the separated parts are still small in size, have high energy density, and are too close to be easily detected. Therefore, it is necessary to change their direction of motion. Particle collisions can be used to change the direction of motion, and the direction of motion can be maintained without interference. After changing the direction, the parts can be detected.

[0032] In step S106, after the beam is split, the split portion can be easily amplified, attenuated, or otherwise processed to aid in detection. Since it is divided into at least two parts, they can be processed separately, avoiding interference.

[0033] The beam cross-section is a two-dimensional structure. If the beam is divided by a dividing line and the two reflecting surfaces are planes, then the beam is divided into two parts, and the difference is compared between the two parts. The calibration difference is a one-dimensional difference, which means that only one direction can be calibrated, and the center of energy density cannot be determined.

[0034] Optionally, if a split point is used for beam division, when the reflecting surface is planar, the beam is divided into N parts due to the presence of N surfaces. The differences in the N parts vary depending on the location of the split point at the beam cross-section. By comparing the differences between the N parts, the beam shape and the relationship between the energy density centers can be determined. When the reflecting surface is curved, such as a cone, theoretically there are infinitely many parts, forming a ring. Comparing the differences in the two directions separately will reveal the distinctions, thus achieving calibration.

[0035] Furthermore, the contour design of the reflector can produce a magnification effect when the beam's direction of motion is changed. Due to the different designs of the reflectors, the magnification effect of the segmented portion remains constant. Therefore, by comparing the energy differences between the magnified objects, the energy density center can be determined; by comparing the coverage area of ​​the segmented portion, the beam size, shape, and the relative position of the segmentation point to the beam can be determined; by comparing the angle difference between the segmented portion and the original beam, the angular deviation between its axis of motion and the symmetry line of the segmented surface can be determined.

[0036] Figure 2 This is a schematic diagram of a beam calibration device according to an embodiment of this application; this embodiment uses a splitting point in the calibration method, and the reflecting surface is a conical surface. Figure 2 As shown, the beam splitting module 1 is a cone, and the receiving module 2 is located below the splitting module 1. The beam is split in the cone at the apex of the splitting module 1, changes direction, and then falls onto the receiving module 2. Figure 2 It can be seen that the beam motion axis is not coaxial with the splitting module 1, and there is an offset in the beam cross-section, resulting in one side of the split beam being narrow and the other side being wide. After passing through the conical reflecting surface, the cross-sectional area is larger than the original beam cross-sectional area, achieving amplification and dispersing the beam energy. This is due to the amplification effect of the inclined surface of the conical splitting module 1. The splitting module 1 differs for different beams. For example, for laser beams, a reflecting cone mirror or conical lens is used. The beam changes direction after passing through the cone mirror or lens due to reflection and refraction. For ion beams, a charged cone resistant to ion beam impact is used. The ion beam changes direction after splitting due to the inter-ion force. For water jets, a hard, wear-resistant cone is used. The direction is changed through water flow impact, fluid viscosity, and interactions.

[0037] As an optional implementation, Figure 3 This is a schematic diagram showing the segmented portion of the calibrated object falling into the receiving module according to an embodiment of this application, as shown below. Figure 3 The receiving module 2 has two groups. The first group consists of four strip-shaped modules with diameters of 2.2, 2.4, 2.6, and 2.8. The second group consists of four fan-shaped modules with diameters of 2.1, 2.3, 2.5, and 2.7. Both groups are located on the same plane and are evenly distributed around the splitting module 1. The projection of the beam splitting onto the eight receiving modules is shown below. Figure 3 The shaded area. Clearly, there is a significant difference between the first and second groups because the receiving modules in the first and second groups are of different types, resulting in different physical phenomena after receiving the beam.

[0038] Optionally, in the calibration device of this embodiment, the first set of bar receiving modules is an electro-effect device, which facilitates the generation of electrical signals for calculation, enabling accurate calibration and parameter determination. Examples include thermistors and photoresistors for laser beams, and capacitive sensors for water jets and ion beams. The second set is an optical effect device, which facilitates quick alignment by operators. Examples include frequency doubling coatings, fluorescent coatings, and color-developing coatings for invisible laser beams, ion beams, and water jets.

[0039] Figure 4 This is a schematic diagram of the perception differences between two groups of different types of receiving modules according to an embodiment of this application; the first group A1, A2, A3, and A4 are the sensing parts 2.2, 2.4, 2.6, and 2.8 of the receiving module 2, respectively; the second group B1, B2, B3, and B4 are the sensing parts 2.1, 2.3, 2.5, and 2.7 of the receiving module 2, respectively.

[0040] Furthermore, such as Figure 4 The electrical signals generated in the first group are acquired and analyzed to achieve precise calibration and parameter determination; assuming the distance between the inner edge of the sensing part and the conical sectioning module 1 is... L， The length of the sensing part on the receiving module 2 is S。 Let the inner edge distances sensed by receiver module 2 be respectively LA1, LA2, LA3, LA4 The lengths of the perception intervals are respectively: SA1, SA2, SA3 SA4. The following calibration methods can be achieved by comparing various parameters:

[0041] Achieve the following: Shape calibration

[0042] Because the beam is segmented along the segmentation point, the outer circular boundary of the beam falling on the receiving module 2 after the beam segmentation position changes direction is consistent with the segmentation point of the segmentation module 1. However, the inner boundary of the landing point caused by the shape change will have obvious differences. The beam contour radius is related to the sensing quantity and the magnification. This embodiment of the application uses a conical reflector and the receiving module 2, which has a fixed magnification. K Among them, there are 4 electrical effect sensing modules, so through calculation SA1, SA2, SA3, SA4 With magnification K The relationship between these parameters allows us to obtain the radius of the beam distance splitting point, which is inversely: SA1 / K, SA2 / K, SA3 / K, SA4 / K. Shape detection in any direction can be achieved by rotating the calibration device. This can also be achieved by increasing the number of electrical effect sensing modules.

[0043] Implementation 2: Dimensional Calibration

[0044] Beam size calibration is similar to shape calibration, the difference being that size calibration requires summing the sensed quantities in both directions. The beam size is the relationship between the sum of sensed quantities and the magnification. Therefore, in this embodiment, the beam size in the X direction is ( SA2+ SA4 ) / K The beam dimension in the Y direction is: ( SA1+ SA3 ) / K。

[0045] Achieve the third step: Energy density center calibration.

[0046] After the beam is split, the sum of the energies of the split parts is the total energy. Therefore, calibrating the energy center only requires collecting and comparing the energy of each split part to determine the coordinates of the energy density center. In this embodiment, only the sensing differences of A1, A2, A3, and A4 need to be compared, which are coordinates in the X and Y directions. When the sensing part is a thermistor or photoresistor for a laser beam, the total voltage can be used; for a capacitive sensor for a water jet or ion beam, the total charge can be used.

[0047] Fourth, motion direction calibration:

[0048] Motion direction calibration utilizes particle collisions. When particles collide at different angles, their reflection angles also differ. The positions where the beam lands on the receiving module also differ. The amount of difference is a trigonometric function. In this embodiment, the beam is segmented by segmentation module 1. If the beam's motion axis is not aligned with the axis of segmentation module 1, the angular offset due to this misalignment causes the beam to land on receiving module 2 after passing the reflecting surface. LA1, LA2, LA3, LA4 The difference lies in the angle of deviation in the X / Y direction: arctan( LA2 / h )-arctan( LA4 / h arctan LA1 / h)-arctan( LA2 / h ); where h is an inherent parameter of the beam calibration device in this application embodiment.

[0049] Fifth, divergence angle calibration:

[0050] The divergence angle is calibrated as the change in beam size at two distances. The steps are as follows: calibrate the first size according to the first pair; move the beam a certain distance in the Z direction and calibrate the second size according to the second pair; compare the first size, the second size and the moving distance to obtain the trigonometric function relationship of the divergence angle.

[0051] Optional, such as Figure 4 The color rendering effect of the second set of receiving modules is analyzed to quickly locate the problem. Specifically, the color rendering area of ​​areas B1, B2, B3, and B4, as well as their distance from the subdivision module (1), are quickly determined by the operator's naked eye. The following situations can be quickly determined visually:

[0052] Judgment 1:

[0053] If only one of regions B1, B2, B3, and B4 shows color, it indicates that the beam is located outside of the segmentation module 1 and needs to be moved quickly to bring the beam into the precise calibration area.

[0054] Judgment 2:

[0055] Regions B1, B2, B3, and B4 all show color and form a ring, but some areas show a larger color area, indicating that they have entered the precise calibration area, but there is a slight displacement deviation, which requires fine-tuning.

[0056] Judgment 3:

[0057] Regions B1, B2, B3, and B4 are all colored and have a uniform ring-shaped area. However, the boundary of a certain region is closer to the partitioning module 1, indicating that there is an angular deviation between the beam motion axis and the axis of partitioning module 1.

[0058] Judgment 4:

[0059] Regions B1, B2, B3, and B4 are all colored and have a uniform ring-shaped area, but they are not adjacent to segmentation module 1. This indicates that the beam is a divergent beam or is at an overfocus point, and further adjustment of the beam's Z-direction is needed for determination.

[0060] As another optional implementation, the beam calibration device of the above-described embodiments of this application can be integrated on a base, the base including at least one of a hole, a slot, and a magnet for easy installation and use.

[0061] Furthermore, the beam calibration device described in the above embodiments of this application may also include a positioning module; the positioning module uses scales, surface groups, etc., to achieve rapid alignment of the device and realize coordinate calculation. For example, it can be used for marking and alignment on machine tools, or for optical magnification and alignment, to achieve rapid alignment by means of surfaces.

[0062] Furthermore, the beam calibration device of the above-described embodiments of this application may also include an interaction module, which can generate at least one of light, numerical display, and electrical signal output according to the sensing of the receiving module, and interact with the operator and / or external equipment.

[0063] The beam calibration device of the above embodiment will now be described in its entirety:

[0064] Figure 5 This is a front view of the beam calibration device according to an embodiment of this application, as shown below. Figure 5 As shown, the segmentation module 1, receiving module 2, visual scale 3, calibration cylinder 4, mounting hole 5, calibration scale 6, calibration plane 7, interaction interface 8, interaction light 9, interaction display screen 10, and interaction button 11 are integrated into the base 12. The calibration cylinder 4 and calibration plane 7 are precision surface groups, facilitating calibration of the beam device using common measuring instruments such as calipers, micrometers, and dial indicators. The calibration scale 6 is a precise microscopic scale, enabling visual measurement using a microscope. The calibration cylinder 4, calibration plane 7, and calibration scale 6 have a precise positional relationship with the segmentation module 1; beam parameters can be calculated based on this positional relationship during beam calibration. The mounting hole 5 allows for quick and secure fixation of the device, preventing errors during calibration. The interaction interface 8, interaction light 9, interaction display screen 10, and interaction button 11 are used for interaction with operators or external equipment, enabling manual and / or automatic calibration operations, expanding the application scenarios of this beam device.

[0065] Optional, Figure 6 This is a schematic diagram of the bottom surface of the beam device according to an embodiment of this application. The base 12 also includes a magnet 13, a mounting groove 14, and a standard angle surface 15. The magnet 13 enables the beam device to be quickly mounted on a ferrous metal surface. The mounting groove 14 enables quick alignment on curved surfaces, reducing auxiliary operation time. There can be multiple standard angle surfaces 15, designed according to commonly used angles; for example, bevels of 30°, 55°, etc. It can be directly placed on a workbench to achieve rapid alignment of the cutting angle.

[0066] The above implementation method solves the practical application problem of difficulty in calibrating the cross-sectional shape, cross-sectional size, energy distribution center, motion direction, and divergence angle of beams and jets in beam and jet application scenarios; and provides a beam and jet calibration method that is easier to use, easier to install, and enables interaction.

[0067] The above are merely embodiments of this application and are not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. A method for calibrating beams and jets, characterized in that, include: Divide the calibration object into at least two parts along the partition point or partition line; Change the direction of movement of the segmented part of the calibration object; Calibration is achieved by comparing the differences between the segmented parts of the calibration object in different directions.

2. The calibration method according to claim 1, characterized in that, The reflective surface, which is either a plane or a curved surface, changes the direction of motion of the segmented part of the calibration object. The reflective surfaces intersect at the dividing point or the dividing line.

3. The calibration method according to claim 2, characterized in that, The comparison of differences between the subdivided parts of the calibration object includes at least one of the following: The energy difference between the segments of the calibrated object; The difference in coverage area between the segments of the calibrated object; The angle between the segmented part of the calibration object and the direction of motion of the calibration object is different; The shape differences of the segments of the calibrated object.

4. The calibration method according to claim 3, characterized in that, The calibration method calibrates at least one of the following: cross-sectional shape, cross-sectional dimensions, energy distribution center, direction of motion, and divergence angle of the calibration object.

5. A beam / jet calibration device, characterized in that, include: The subdivision module performs subdivision of the calibration object according to any one of the calibration methods described in claims 1 to 4; The receiving module perceives the segmented part of the calibration object according to any one of the calibration methods described in claims 1 to 4; The direction of motion of the calibration object after being segmented by the segmentation module is changed by the reflective surface, and it falls onto the receiving module, where it is sensed by the receiving module, thus realizing any one of the calibration methods described in claims 1 to 4.

6. The calibration device according to claim 5, characterized in that, The segmentation module is a cone or a prism.

7. The calibration device according to claim 6, characterized in that, At least one of the receiving modules is uniformly distributed around the segmentation module.

8. The calibration device according to claim 7, characterized in that, The receiving modules of the same calibration device may be of the same type or different types; the receiving module receives the calibration object and generates at least one of the following effects: light, heat, force, electricity, and sound.

9. The calibration device according to claim 8, characterized in that, The receiving module consists of two groups of eight modules in total. One group receiving the calibration object will display color; the other group receiving the calibration object will generate an electrical effect.

10. The calibration device according to claim 9, characterized in that, The calibration device can be integrated into a base; The base includes at least one of the following: mounting holes, slots, and magnets.

11. The calibration apparatus according to any one of claims 6 to 10, characterized in that, The calibration device further includes a positioning module; the positioning module is a scale and / or a surface group; the scale and surface group have a known positional relationship with the segmentation module.

12. The calibration apparatus according to any one of claims 6 to 10, characterized in that, The calibration device also includes an interaction module; the interaction module can generate at least one of the following based on the sensing of the receiving module: light, numerical display, or electrical signal output, to interact with operators and / or external equipment.

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