Method for assembling a thermal expansion of an inner ring and an outer sleeve and machining tool

Abstract

The application discloses a thermal expansion assembling method and processing tool of an inner ring and an outer sleeve, and comprises the following steps: S1, calculating the expansion amount of the inner ring in a heated state to obtain the minimum inner diameter required for the outer sleeve in the heated state to pass through the inner ring in an expanded state; S2, inversely deducing the inner diameter of the outer sleeve in a room temperature state according to the minimum inner diameter of the outer sleeve in the heated state; processing the outer sleeve with a corresponding size; S3, processing a guide cone with a conical structure, the bottom surface of the guide cone is attached to the inner ring and the edges of the two are flush; the guide cone and the inner ring are made of the same material; S4, placing the outer sleeve on the guide cone and heating; the thermal expansion amount of the outer sleeve is greater than that of the guide cone and the inner ring, the inner diameter of the outer sleeve gradually increases and can be sleeved on the inner ring through the guide cone; S5, cooling to room temperature, and the outer sleeve is cold shrunk on the inner ring. The outer sleeve and the inner ring can be sleeved together without expanding the outer sleeve, and the uniformity of the connection of the outer sleeve on the inner ring can be ensured.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a method and tooling for assembling an inner ring and an outer ring by thermal expansion. Background Technology

[0002] For example, publication number "CN114505783A" discloses "a scratch-resistant retaining ring," which includes a rigid ring and an elastic ring. The elastic ring includes a first adhesive surface and a polished surface; the rigid ring includes a second adhesive surface and a fixing surface; the first adhesive surface and the second adhesive surface are tightly bonded together with an adhesive; at least three inclined strip-shaped grooves are evenly spaced on the polished surface; the connection between the strip-shaped grooves and the upper surface of the polished surface has no rounded corners. In practical applications, the connection between the outer and inner rings is generally achieved by expanding the outer ring and fitting it onto the inner ring. When the outer ring is made of Teflon, due to the generally poor elasticity of Teflon, it hardly rebounds after being expanded, resulting in a relatively loose connection between the inner and outer rings. If the inner and outer rings are designed with a gap fit, the connection strength relies entirely on the adhesive, placing high demands on the evenness of the adhesive application and the dimensional processing of the inner and outer rings. Summary of the Invention

[0003] In view of the problem mentioned in the background art that the inner ring and the outer ring cannot be tightly connected, the present invention provides a thermal expansion assembly method for the inner ring and the outer ring, which can connect the outer ring and the inner ring together without expanding the outer ring, and can ensure the uniformity of the connection of the outer ring on the inner ring, while relying on the locking force of the outer ring on the inner ring to ensure the connection strength between the two.

[0004] To achieve the above objectives, the present invention adopts the following technical solution.

[0005] A method for assembling an inner ring and an outer ring by thermal expansion includes the following steps: S1. Calculate the expansion of the inner ring under heating conditions to obtain the minimum inner diameter required for the outer ring to pass through the inner ring under expansion conditions under heating conditions; S2. Based on the minimum inner diameter of the jacket under heating conditions, deduce the inner diameter of the jacket under room temperature conditions; process the jacket to the corresponding size. S3. The guide cone is machined into a tapered structure, with its bottom surface fitting against the inner ring and the edges of both being flush; the guide cone and the inner ring are made of the same material. S4. Place the outer jacket on the guide cone and heat it up. The thermal expansion of the outer jacket is greater than that of the guide cone and the inner ring. The inner diameter of the outer jacket gradually increases and can pass through the guide cone and fit onto the inner ring. S5. Cool to room temperature, the outer jacket contracts on the inner ring due to the cold.

[0006] Preferably, the guide cone has a hollowed-out area.

[0007] Preferably, the guide cone includes several stacked cone rings, with the bottom edge diameter of each stacked cone ring increasing sequentially from top to bottom. In step S3, a stacked cone ring with its bottom edge flush with the inner ring is selected, and stacked cone rings with gradually decreasing bottom edges are placed sequentially on this stacked cone ring.

[0008] Preferably, the guide surfaces of adjacent stacked cone rings are not continuously connected, and a contracting stepped difference is formed between the guide surfaces of adjacent stacked cone rings.

[0009] Preferably, the outer sleeve and the outer ring have the same machining allowance on their outer sides. After step S5, the component formed by combining the inner sleeve and the outer ring is machined as a whole.

[0010] Preferably, the inner ring is made of aluminum.

[0011] Preferably, the outer casing is made of Teflon material.

[0012] The present invention also discloses a machining fixture, including a guide cone, wherein a guide surface is provided on the guide cone, and the bottom edge of the guide surface is flush with the outer diameter of the inner ring.

[0013] Preferably, the guide cone includes a plurality of stacked cone rings, each stacked cone ring having a narrow end and a wide end. The wide ends and narrow ends of adjacent stacked cone rings overlap in both the lateral and vertical directions. The wide end of the uppermost stacked cone ring is partially fitted onto the narrow end of the lowermost stacked cone ring.

[0014] Preferably, the bottom edge of the stacked cone ring is provided with an inwardly tapered arc angle.

[0015] The beneficial effects of this invention are as follows: (1) By using the difference in thermal expansion coefficients, the outer jacket can slide onto the inner ring under heating conditions using the guide cone, thereby avoiding the outer jacket from being stretched open and ensuring the stability and convenience of the connection between the outer jacket and the inner ring; (2) It can avoid the situation where the outer jacket cannot spring back due to being stretched during the connection between the inner ring and the outer jacket, thus ensuring a tight connection between the outer jacket and the inner ring; (3) The guide cone can ensure that the outer sleeve can be smoothly connected to the inner ring. The guide cone is set into a structure of multiple stacked cone rings, which can be adapted to outer sleeves and inner rings of various sizes. A stepped difference is formed between each stacked cone ring, so that the offset can be automatically corrected during the sliding process of the outer sleeve, thereby improving the levelness when the outer sleeve and the inner ring are connected. Attached Figure Description

[0016] Figure 1This is an isometric view of the present invention.

[0017] Figure 2 This is a flowchart illustrating the present invention.

[0018] Figure 3 This is a cross-sectional view of the present invention.

[0019] Figure 4 This is a schematic diagram of the guide cone in Example 2.

[0020] Figure 5 This is a cross-sectional view of the guide cone in Example 3.

[0021] Figure 6 yes Figure 5 A magnified view of a portion of point A in the middle.

[0022] Figure 7 This is a flowchart of Example 3.

[0023] In the picture: 1. Outerwear; 2. Inner ring; 3. Guide cone; 31. Hollowed-out area; 32. Stacked cone ring; 33. Stepped difference; 34. Guide surface; 35. Narrow end; 36. Wide end; 37. Inward-curving arc angle. Detailed Implementation

[0024] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0025] Example 1:

[0026] like Figure 1 , Figure 2 , Figure 3 As shown, a method for assembling an inner ring and an outer ring using thermal expansion includes the following steps: S1. Calculate the expansion of the inner ring 2 under heating conditions to obtain the minimum inner diameter required for the outer ring 1 under heating conditions to pass through the inner ring 2 under expanded conditions. S2. Based on the minimum inner diameter of the outer jacket 1 under heating conditions, deduce the inner diameter of the outer jacket 1 under room temperature conditions; process the outer jacket 1 of the corresponding size. S3. The guide cone 3 is machined into a tapered structure, with the bottom surface of the guide cone 3 fitting against the inner ring 2 and the edges of both being flush; the guide cone 3 and the inner ring 2 are made of the same material. S4. Place the outer jacket 1 on the guide cone 3 and heat it up. The thermal expansion of the outer jacket 1 is greater than that of the guide cone 3 and the inner ring 2. The inner diameter of the outer jacket 1 gradually increases and can pass through the guide cone 3 and fit onto the inner ring 2. S5. Cool to room temperature, the outer jacket 1 shrinks on the inner ring 2 due to the cold; In this embodiment, the inner ring 2 is made of aluminum, and the outer ring 1 is made of Teflon.

[0027] In existing technologies, semiconductor thin film deposition equipment is one of the three core pieces of equipment in the chip manufacturing process. This equipment uses a precision component called a thin-walled U-shaped ring. The inner side is made of aluminum alloy to provide support, while the outer side is made of Teflon. It is required to maintain stable performance within a wide temperature range of -200°C to +260°C, which fully covers the temperature requirements of the deposition process. Moreover, the extremely low coefficient of friction can reduce the wear of moving parts of the equipment, while the excellent anti-adhesion properties can prevent reaction byproducts from accumulating on the inner wall of the equipment and reduce particulate contamination sources.

[0028] Current process route: S1. Aluminum plate - rough machining into aluminum rings - stress relief heat treatment - fine machining into aluminum rings according to design requirements - cleaning; S2, Teflon sheet - precision machined into Teflon rings according to design requirements - cleaned; S3. At room temperature, the aluminum ring and Teflon ring are assembled with a clearance fit.

[0029] The cleanliness requirements for semiconductor thin-film deposition equipment chambers are becoming increasingly stringent, particularly in limiting the generation of particulate matter. Teflon itself does not release contaminants and its low coefficient of friction reduces the source of particulate contamination. Therefore, to meet the cleanliness requirements of the chamber, it is becoming a better choice and a growing trend to coat aluminum components with a layer of Teflon. However, the combination of Teflon and aluminum components presents the following main problems. 1. Time-consuming, laborious, and difficult to install; Teflon rings become loose after installation. Teflon is a non-metal and cannot be machined like aluminum, nor can it achieve precise 6-8 grade fit dimensions. Finished Teflon rings are like ropes, lacking a specific shape, and the fit clearance is extremely small. These two factors make it time-consuming, labor-intensive, and difficult to fit onto aluminum parts.

[0030] Teflon has very limited elasticity, and the gap between it and aluminum is very small, so it usually needs to be slightly stretched before installation. However, if this stretching is not controlled properly, it will be stretched too much and will hardly spring back, resulting in it being loose and not adhering well to the aluminum part, making it easy to fall off, and the required precision cannot be met.

[0031] 2. Uneven thickness, failing to meet precision requirements. At room temperature, the Teflon ring was stretched slightly, and even with precise control, some areas could not be avoided from constricting, resulting in uneven thickness. Thinner areas have lower strength and are prone to breakage later; thicker areas are more likely to rub against fittings, causing particulate contamination, which defeats the purpose of using Teflon rings to achieve cavity cleanliness.

[0032] Therefore, to address the aforementioned issues, this embodiment does not employ the connection method of directly opening the outer jacket 1 and fitting it onto the inner ring 2. Instead, by utilizing the significant difference in thermal expansion coefficients between the inner ring 2 and the outer jacket 1, the expansion degree of the outer jacket 1 is greater than that of the inner ring 2 during heating. This allows the inner diameter of the outer jacket 1 to expand to a level that easily fits onto the outer diameter of the inner ring 2 during heating, thus avoiding the processing step of opening the outer jacket 1. Furthermore, a guide cone 3 is placed on the inner ring 2, with the bottom outer diameter of the guide cone 3 being the same as the outer diameter of the inner ring 2. The outer jacket 1 is then... Placed on the guide cone 3, at room temperature, the inner diameter of the outer sleeve 1 is smaller than the outer diameter of the inner ring 2, while the bottom outer diameter of the guide cone 3 is the same as the outer diameter of the outer ring. Therefore, the outer sleeve 1 will be stuck in the middle position of the guide cone 3 and will not slide down. During the heating process, due to the material properties of the outer sleeve 1, it expands rapidly, causing the inner diameter of the outer sleeve 1 to continuously increase. The outer sleeve 1 then slides down the guide cone 3 until its inner diameter expands to be larger than the outer diameter of the inner ring 2, allowing for a clearance fit. At this point, the outer sleeve 1 slides down onto the inner ring 2 through the guide cone 3. During the fitting process of the outer sleeve 1 and the inner ring 2, because the inner diameter of the outer sleeve 1 expands due to thermal expansion, the expansion degree of the outer sleeve 1 is the same and uniform throughout, which can avoid the tension deviation caused by stretching, thus avoiding affecting the uniformity of the fitting. During the subsequent room temperature shrinkage process, all parts of the outer jacket 1 shrink to the same degree, so that the outer jacket 1 can be evenly fitted onto the inner ring 2. In the above process, the outer jacket 1 will not be unable to spring back due to being stretched, and its own elasticity will still exist, ensuring the tight connection between it and the inner ring 2 and avoiding a loose connection due to the inability to spring back.

[0033] like Figure 1 , Figure 2 , Figure 3 As shown, the guide cone 3 has a hollowed-out area 31. In this embodiment, the hollowed-out area 31 is located in the middle of the guide cone 3. The hollowed-out area 31 consists of multiple discontinuous holes. The hollowed-out area 31 is designed to prevent excessive heat absorption during heating, which would affect overall heating efficiency and increase unnecessary production time. It also reduces the contact area of ​​the outer jacket 1 on the guide cone 3, preventing jamming caused by an excessively large contact area.

[0034] The outer sleeve 1 and the inner ring 2 have the same machining allowance on their outer sides. After step S5, the component formed by the combination of the inner sleeve and the outer ring is machined as a whole. The outer sleeve 1 is set with the same machining allowance as the inner ring 2. First, the outer sleeve 1 and the inner ring 2 are joined together using the method described above. Then, the outer sleeve 1 and the inner ring 2 are machined as a whole. Since the outer sleeve 1 is fitted onto the inner ring 2, the outer sleeve 1 can be guaranteed to have high stability and is not prone to displacement during the machining process, thus improving the machining quality.

[0035] Example 2:

[0036] like Figure 1 , Figure 4 As shown, a method for assembling an inner ring and an outer ring using thermal expansion includes the following steps: S1. Calculate the expansion of the inner ring 2 under heating conditions to obtain the minimum inner diameter required for the outer ring 1 under heating conditions to pass through the inner ring 2 under expanded conditions. S2. Based on the minimum inner diameter of the outer jacket 1 under heating conditions, deduce the inner diameter of the outer jacket 1 under room temperature conditions; process the outer jacket 1 of the corresponding size. S3. The guide cone 3 is machined into a tapered structure, with the bottom surface of the guide cone 3 fitting against the inner ring 2 and the edges of both being flush; the guide cone 3 and the inner ring 2 are made of the same material. S4. Place the outer jacket 1 on the guide cone 3 and heat it up. The thermal expansion of the outer jacket 1 is greater than that of the guide cone 3 and the inner ring 2. The inner diameter of the outer jacket 1 gradually increases and can pass through the guide cone 3 and fit onto the inner ring 2. S5. Cool to room temperature, the outer jacket 1 shrinks on the inner ring 2 due to the cold; In this embodiment, the inner ring 2 is made of aluminum, and the outer ring 1 is made of Teflon.

[0037] The guide cone 3 includes several stacked cone rings 32. From top to bottom, the diameter of the bottom edge of each stacked cone ring 32 increases sequentially. In step S3, a stacked cone ring 32 with its bottom edge flush with the inner ring 2 is selected, and stacked cone rings 32 with gradually decreasing bottom edges are placed sequentially on this stacked cone ring 32. The guide cone 3 is configured as a structure of multiple stacked cone rings 32. Each stacked cone ring 32 has similar shape characteristics but different structural dimensions. The dimensions of each stacked cone ring 32 increase sequentially from top to bottom. That is, the outer diameter of the bottom edge of the lower stacked cone ring 32 is larger than the outer diameter of the bottom edge of the upper stacked cone ring 32. This makes the guide cone 3 formed by stacking the various stacked cone rings 32 present a tower-like structural feature. Since the stacked cone rings 32 can be freely combined, different stacking combinations can be made according to the corresponding dimensions of the inner ring 2 and the outer ring 1. This allows the dimension of the bottom stacked cone ring 32 to match the outer diameter of the inner ring 2. The entire guide cone 3 can adapt to the inner diameter of the outer ring 1 under normal temperature conditions through different combinations and stacking, thereby ensuring that outer rings 1 and inner rings 2 of different specifications can be assembled adaptively.

[0038] Example 3:

[0039] like Figure 1 , Figure 5 , Figure 6 , Figure 7 As shown, a method for assembling an inner ring and an outer ring using thermal expansion includes the following steps: S1. Calculate the expansion of the inner ring 2 under heating conditions to obtain the minimum inner diameter required for the outer ring 1 under heating conditions to pass through the inner ring 2 under expanded conditions. S2. Based on the minimum inner diameter of the outer jacket 1 under heating conditions, deduce the inner diameter of the outer jacket 1 under room temperature conditions; process the outer jacket 1 of the corresponding size. S3. The guide cone 3 is machined into a tapered structure, with the bottom surface of the guide cone 3 fitting against the inner ring 2 and the edges of both being flush; the guide cone 3 and the inner ring 2 are made of the same material. S4. Place the outer jacket 1 on the guide cone 3 and heat it up. The thermal expansion of the outer jacket 1 is greater than that of the guide cone 3 and the inner ring 2. The inner diameter of the outer jacket 1 gradually increases and can pass through the guide cone 3 and fit onto the inner ring 2. S5. Cool to room temperature, the outer jacket 1 shrinks on the inner ring 2 due to the cold; In this embodiment, the inner ring 2 is made of aluminum, and the outer ring 1 is made of Teflon.

[0040] The guide cone 3 includes several stacked cone rings 32. From top to bottom, the diameter of the bottom edge of each stacked cone ring 32 increases sequentially. In step S3, a stacked cone ring 32 with its bottom edge flush with the inner ring 2 is selected, and stacked cone rings 32 with gradually decreasing bottom edges are placed sequentially on this stacked cone ring 32. The guide surfaces 34 of adjacent stacked cone rings 32 are not continuously connected, and a contracting step difference 33 is formed between the guide surfaces 34 of adjacent stacked cone rings 32.

[0041] In Embodiment 2, the guide surfaces 34 of each stacked cone ring 32 (the stacked cone ring 32 includes a guide surface 34, which is the oblique cone surface that contacts the outer sleeve 1) can be continuously connected, thereby ensuring the continuity of movement of the outer sleeve 1 between each stacked cone ring 32. In this embodiment, unlike Embodiment 2, the guide surfaces 34 of each stacked cone ring 32 are not continuously connected. There are step differences 33 between the guide surfaces 34 of each stacked cone ring 32, and the junction of the guide surfaces 34 of each stacked cone ring 32 is contracting. This makes the entire guide cone 3 exhibit a continuous cycle of expansion-contraction-expansion-contraction in the vertical direction from top to bottom. In this embodiment, when the outer sleeve 1 tilts horizontally due to placement deviation and movement path deviation, when the outer sleeve 1 moves from the upper stacked cone ring 32 to the lower stacked cone ring 32... When the outer jacket 1 is in the upper layer, the side with the lower horizontal position moves from the upper stacked cone ring 32 to the lower stacked cone ring 32. At this time, the side with the higher horizontal position is still on the upper stacked cone ring 32. Since there is a contraction step difference 33 between each stacked cone ring 32, when the side with the lower horizontal position moves from the upper stacked cone ring 32 to the lower stacked cone ring 32, it first moves to the contraction step difference 33. That is, at this time, the lower side of the outer jacket 1 does not contact the stacked cone ring 32, so that there is a part of the outer jacket 1 that does not contact. This avoids the movement stagnation caused by the entire area of ​​the outer jacket 1 abutting against the guide cone 3. Due to the partial lack of contact, the continuous expansion of the inner diameter of the outer jacket 1 and the gravity of the outer jacket 1 can improve the smoothness of the outer jacket 1 in the tilted state.

[0042] Furthermore, due to the tilting effect of the outer jacket 1, as the outer jacket 1 continues to move, the lower side of the outer jacket 1 comes into contact with the lower stacking cone ring 32, while the higher side of the outer jacket 1 remains in contact with the upper stacking cone ring 32. Since the outer jacket 1 spans both upper and lower stacking cone rings 32, there is still a contact area between the outer jacket 1 and the contracting stepped difference 33 between the upper and lower layers. As the outer jacket 1 continues to move downward, the area contacting the stepped difference 33 gradually shifts from the lower end of the outer jacket 1 to the higher end, which makes the outer jacket 1 more horizontally positioned when its horizontal position is within a certain range. When the highest point of the outer jacket 1 is moved to the bottom edge of the upper stacked cone ring 32, the contact area between the outer jacket 1 and the step difference 33 also reaches the higher end of the outer jacket 1. At this time, except for the highest point of the outer jacket 1 and the area contacting the step difference 33, the rest of the outer jacket 1 is in contact with the lower stacked cone ring 32. As the outer jacket 1 continues to expand, the highest point of the outer jacket 1 separates from the upper stacked cone ring 32. At this time, since the rest of the outer jacket 1 is on the lower stacked cone ring 32, and the higher end of the outer jacket 1 is aligned with the step difference 33, it is not in contact with the lower stacked cone ring. With the outer jacket 1 in contact with the lower stacked cone ring 32, and the other end of the outer jacket 1 positioned below the higher end, the higher end of the outer jacket will fall towards the guide surface 34 of the lower stacked cone ring 32 in a relatively free state under the influence of gravity, rather than sliding, and will generate a certain impact. Since the lower end of the outer jacket 1 is still in contact with the lower stacked cone ring 32 and is in a relatively slow sliding state, the height difference between the higher and lower ends will be reduced under the inertial impact. This allows the entire outer jacket 1 to maintain a relatively stable position at both ends during the transition between the upper and lower stacked cone rings 32. Correction of the low difference: When the outer jacket 1 initially jumps between the upper and lower layers, although the lower end is also on the step difference 33, since most of the area of ​​the outer jacket 1 is on the stacked cone ring 32 of the upper layer, it can play a traction and resistance role for the lower end. Therefore, when the lower end is aligned with the step difference 33, it will not fall. This reduces the risk that the high inclination of the outer jacket 1 will affect the smoothness of docking with the inner ring 2, and improves the smoothness of movement of the outer jacket 1 in the inclination state. It also avoids the outer jacket 1 being in a state where the entire area is in contact with the guide cone 3, and improves the sliding performance.

[0043] In this embodiment, the guide cone ensures a smooth connection between the outer sleeve and the inner ring. The guide cone is configured as a structure of multiple stacked cone rings, which can accommodate outer sleeves and inner rings of various sizes. A stepped difference is formed between the stacked cone rings, which allows the outer sleeve to automatically correct the offset during the sliding process, thereby improving the levelness when the outer sleeve and the inner ring are docked.

[0044] Example 4:

[0045] like Figure 5As shown, a machining fixture includes a guide cone 3 with a guide surface 34. The bottom edge of the guide surface 34 is flush with the outer diameter of the inner ring 2. The machining fixture is a guide cone 3, which has a conical structure. The guide surface 34 is provided on the guide cone 3, and the bottom edge of the entire guide cone is flush with the outer diameter of the inner ring 2, thereby ensuring that the outer sleeve 1 can move onto the inner ring 2.

[0046] like Figure 5 As shown, the guide cone 3 includes several stacked cone rings 32. Each stacked cone ring 32 includes a narrow end 35 and a wide end 36. The wide end 36 and the narrow end 35 of adjacent stacked cone rings 32 overlap in both the lateral and vertical directions. The wide end 36 of the uppermost stacked cone ring 32 is partially sleeved on the narrow end 35 of the lowermost stacked cone ring 32. The guide cone 3 is formed by combining several stacked cone rings 32. Each stacked cone ring 32 is also a cone-shaped structure. Therefore, each stacked cone ring 32 includes a narrow end 35 and a wide end 36. The stacked cone rings 32 are ring-shaped structures, and the dimensions of each stacked cone ring 32 are not the same. Therefore, when each stacked cone ring 32 is stacked, the narrow end 35 and the wide end 36 are in a partially fitted state. The area where the lower stacked cone ring 32 does not contact the upper stacked cone ring 32 has a region smaller than the maximum outer diameter of the upper stacked cone ring 32. This region is the contractionary step difference 33.

[0047] like Figure 6 As shown, the bottom edge of the stacked cone ring 32 is provided with an inwardly tapered arc. By setting the bottom edge of the stacked cone ring 32 with an inwardly tapered arc, the outer jacket 1 can slide smoothly when passing through this area, avoiding sharp corners from hindering the sliding of the outer jacket 1.

[0048] In addition to the above embodiments, within the scope disclosed in the claims and specification of this invention, the technical features of this invention can be reselected and combined to form new embodiments. These can be achieved by those skilled in the art without creative effort. Therefore, these embodiments not described in detail in this invention should also be regarded as specific embodiments of this invention and within the protection scope of this invention.

Claims

1. A method for assembling an inner ring and an outer ring using thermal expansion, characterized in that, Includes the following steps: S1. Calculate the expansion of the inner ring under heating conditions to obtain the minimum inner diameter required for the outer ring to pass through the inner ring under expansion conditions under heating conditions; S2. Based on the minimum inner diameter of the jacket under heating conditions, deduce the inner diameter of the jacket under room temperature conditions; process the jacket to the corresponding size. S3. The guide cone is machined into a tapered structure, with its bottom surface fitting against the inner ring and the edges of both being flush; the guide cone and the inner ring are made of the same material. S4. Place the outer jacket on the guide cone and heat it up. The thermal expansion of the outer jacket is greater than that of the guide cone and the inner ring. The inner diameter of the outer jacket gradually increases and can pass through the guide cone and fit onto the inner ring. S5. Cool to room temperature, the outer jacket contracts on the inner ring due to the cold.

2. The method for assembling an inner ring and an outer ring by thermal expansion according to claim 1, characterized in that, The guide cone has a hollowed-out area.

3. The method for assembling an inner ring and an outer ring by thermal expansion according to claim 1, characterized in that, The guide cone includes several stacked cone rings. From top to bottom, the diameter of the bottom edge of each stacked cone ring increases sequentially. In step S3, a stacked cone ring with its bottom edge flush with the inner ring is selected, and stacked cone rings with gradually decreasing bottom edges are placed sequentially on this stacked cone ring.

4. The method for assembling an inner ring and an outer ring by thermal expansion according to claim 3, characterized in that, The guide surfaces of adjacent stacked cone rings are not continuously connected, and a contracting stepped difference is formed between the guide surfaces of adjacent stacked cone rings.

5. The method for assembling an inner ring and an outer ring by thermal expansion according to claim 1, characterized in that, The outer sleeve and the outer ring have the same machining allowance on their outer sides. After step S5, the component formed by combining the inner sleeve and the outer ring is machined as a whole.

6. A method for assembling an inner ring and an outer ring by thermal expansion according to any one of claims 1-5, characterized in that, The inner ring is made of aluminum.

7. A method for assembling an inner ring and an outer ring by thermal expansion according to any one of claims 1-5, characterized in that, The outer cover is made of Teflon.

8. A processing fixture, applied to the thermal expansion assembly method of an inner ring and an outer ring as described in any one of claims 1-7, characterized in that, It includes a guide cone, on which a guide surface is provided, and the bottom edge of the guide surface is flush with the outer diameter of the inner ring.

9. A machining fixture according to claim 8, characterized in that, The guide cone includes a plurality of stacked cone rings, each stacked cone ring having a narrow end and a wide end. The wide ends and narrow ends of adjacent stacked cone rings overlap in both the lateral and vertical directions. The wide end of the uppermost stacked cone ring is partially fitted onto the narrow end of the lowermost stacked cone ring.

10. A machining fixture according to claim 9, characterized in that, The bottom edge of the stacked cone ring is provided with an inward-curving arc angle.

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