Alumina exhaust ring precision manufacturing apparatus and method

Abstract

The application relates to an alumina exhaust ring precision manufacturing device and method, and belongs to the technical field of semi-part precision machining equipment. The manufacturing device is structurally provided with a mounting frame body, which is sequentially provided with a feeding assembly, a mounting assembly and a grinding assembly. The mounting assembly comprises a mounting rod and a bottom supporting plate. One end of the bottom supporting plate is rotationally arranged on the mounting frame body, one end of the mounting rod is fixedly arranged on the bottom supporting plate in the length direction, and the other end of the mounting rod extends to the upper portion of the mounting frame body. A plurality of groups of position adjusting assemblies are arranged on one side of the mounting frame body along the length direction of the mounting rod. The position adjusting assembly comprises a position adjusting push rod and an adjusting plate. A part taking clamp jaw is arranged on the working end of the position adjusting push rod, and the part taking clamp jaw is used for clamping the adjusting plate. The position adjusting push rod is used for driving the adjusting plate to move towards the mounting rod. The top of the mounting frame is provided with a positioning assembly. The application has the technical effects of improving the batch processing efficiency, processing precision and product consistency of the exhaust ring.

Description

Technical Field

[0001] This application relates to the technical field of precision machining equipment, and in particular to a precision manufacturing equipment and method for alumina exhaust rings. Background Technology

[0002] An alumina exhaust ring is a ring-shaped precision component made of alumina ceramic. It is widely used in high-temperature exhaust systems and in semiconductor device equipment such as lithography machines and etching machines used in integrated circuit manufacturing. The exhaust ring is circular in shape, with multiple through holes evenly distributed around the circumference. The dimensional accuracy, positional accuracy, and inner wall surface quality of the holes directly affect the performance of the exhaust ring, so the manufacturing precision requirements are extremely high.

[0003] Currently, the precision hole machining of alumina exhaust rings mainly adopts the single-piece grinding method. That is, after clamping and positioning a single exhaust ring with a fixture, each hole is ground one by one using a grinding rod. After the machining is completed, the workpiece is removed and the next piece is clamped, and batch processing is completed in a cyclical manner. This method requires clamping and aligning each piece, the single-piece processing cycle is long, and the positioning reference of each exhaust ring is different, making it difficult to guarantee the consistency of hole positions of batch products.

[0004] Regarding the aforementioned technologies, the inventors believe that they suffer from low processing efficiency and poor hole position accuracy and consistency of the exhaust rings. Summary of the Invention

[0005] To address the aforementioned technical problems, this application provides a precision manufacturing equipment and method for alumina exhaust rings.

[0006] Firstly, this application provides a precision manufacturing equipment for alumina exhaust rings, which adopts the following technical solution: A precision manufacturing equipment for alumina exhaust rings includes a mounting frame. The mounting frame is sequentially equipped with a feeding assembly, a mounting assembly, and a grinding assembly. The mounting assembly includes a mounting rod and a bottom support plate. One end of the bottom support plate is rotatably mounted on the mounting frame. One end of the mounting rod is longitudinally fixed to the bottom support plate, and the other end extends to the upper part of the mounting frame. Multiple sets of adjustment assemblies are arranged along the length of the mounting rod on one side of the mounting frame. Each adjustment assembly includes an adjustment push rod and an adjustment plate. A part-removing gripper is provided on the working end of the adjustment push rod, and the part-removing gripper is used to hold the adjustment plate. The adjustment push rod is used to push the adjustment plate towards the mounting rod. A positioning assembly is provided on the top of the mounting frame.

[0007] By adopting the above technical solution, and by sequentially setting the feeding component, installation component, and grinding component on the mounting frame, the entire process of automatic continuous operation of the exhaust ring from feeding and mounting to grinding is realized. The structure of the mounting rod being longitudinally fixed to the bottom support plate, with one end of the bottom support plate rotatably mounted on the mounting frame, allows multiple exhaust rings to be coaxially stacked and mounted on the mounting rod for one-time processing, improving the machining accuracy and consistency of the exhaust ring holes. Furthermore, the bottom support plate can be flipped to achieve overall unloading, avoiding the defects of long processing cycles and low production efficiency caused by individual piece clamping and grinding. By setting multiple sets of adjustment components along the length of the mounting rod on one side of the mounting frame, the adjustment push rod, in conjunction with the part-removing gripper, holds and pushes the adjustment plate, automatically placing the adjustment plate between every two adjacent exhaust rings as a spacing and transmission medium. By setting a positioning component at the top of the mounting frame, the multiple exhaust rings are axially positioned from the top of the stack, providing power input for subsequent hole self-alignment and providing a reference condition for the automatic alignment of the holes of multiple exhaust rings.

[0008] Preferably, the adjusting plate is concave, and the outer ring of the lower surface of the adjusting plate is provided with multiple sets of rubber protrusions, which are used to form frictional contact with the upper surface of the exhaust ring below; the outer ring of the upper surface of the adjusting plate is provided with multiple sets of limiting grooves, and a ball is rotatably disposed in the limiting groove; the ball is used to abut against the lower surface of the exhaust ring above; the plate body of the adjusting plate is in the form of a dense mesh, the mesh of the adjusting plate is a tangential spray hole, the axis of the tangential spray hole forms an acute angle with the radial direction of the adjusting plate, and a clamping protrusion is provided on the outer side of the adjusting plate.

[0009] By adopting the above technical solution, the concave structure of the adjustment plate provides clearance for the installation rod to pass through; multiple sets of rubber protrusions are set on the outer ring of the lower surface of the adjustment plate to form frictional contact with the upper surface of the lower exhaust ring. Utilizing the high coefficient of friction of the rubber material, sufficient frictional torque is provided between the adjustment plate and the lower exhaust ring, realizing reliable frictional transmission between the adjustment plate and the lower exhaust ring, effectively driving the lower exhaust ring to rotate synchronously; multiple sets of limiting grooves are set on the outer ring of the upper surface of the adjustment plate, and rolling balls are rotatably set in the grooves and abut against the lower surface of the upper exhaust ring, so that rolling friction is formed between the adjustment plate and the upper exhaust ring, ensuring that the adjustment plate drives only the lower exhaust ring and not the upper exhaust ring when rotating; the adjustment plate body has a dense mesh structure with tangential spray holes and the axis of the spray holes forming an acute angle with the radial direction of the adjustment plate. When the airflow is obstructed, it can be ejected at high speed from the tangential spray holes and generate a reaction torque to drive the adjustment plate to rotate, realizing self-alignment drive powered by airflow; the clamping protrusions provide clear and reliable clamping and positioning positions for the part-removing claws.

[0010] Preferably, the bottom support plate is provided with a reset slot hole, and the two ends of the reset slot hole are respectively provided with clearance slots away from the mounting rod.

[0011] Preferably, a reset assembly is provided at the bottom of the bottom support plate. The reset assembly includes a rotating plate, a reset rod, and a reset motor. The reset motor is fixedly mounted at the bottom of the bottom support plate, and the upper surface of the rotating plate is fixedly mounted at the output end of the reset motor. A sliding groove is provided axially on the upper surface of the rotating plate. One end of the reset rod is slidably mounted in the sliding groove, and the other end of the reset rod extends upward through the reset groove hole to the upper part of the mounting frame. A clearance push rod is provided on the upper surface of the rotating plate. The working end of the clearance push rod is fixedly mounted on the reset rod, and the clearance push rod is used to push the reset rod to slide along the sliding groove.

[0012] By adopting the above technical solution, the circumferential position of the self-aligned adjustment plate is random, and the part-removing gripper cannot accurately clamp the adjustment plate. By driving the rotating plate and the reset rod to rotate circumferentially by the reset motor, all adjustment plates can be rotated and returned to their positions at the same time, so that the clamping protrusions of each adjustment plate are aligned with the part-removing position, and the part-removing gripper can accurately clamp the part. By setting the relief groove at both ends of the reset slot hole and cooperating with the relief push rod to push the reset rod to slide radially along the sliding groove, the reset rod can slide radially into the relief groove to get rid of the interference after the adjustment plate is returned to its position.

[0013] Preferably, a clamping push rod is provided between the two adjacent sets of adjusting push rods, and the working end of the clamping push rod is provided with a clamping claw, which is used to clamp and fix the exhaust ring.

[0014] By adopting the above technical solution, by setting clamping push rods and clamping jaws between the upper and lower sets of adjacent adjusting push rods, the exhaust rings at each level can be clamped and fixed from the side after the exhaust ring holes are aligned, preventing the exhaust rings from shifting circumferentially or moving axially during subsequent grinding processes.

[0015] Preferably, the bottom of the mounting frame is provided with a tilting unloading assembly, which includes a rotating dial and an unloading motor. The unloading motor is fixedly mounted on the mounting frame, and one side of the rotating dial is the output end of the unloading motor. The other side of the rotating dial is provided with a lever, which is fixedly connected to the bottom support plate.

[0016] By adopting the above technical solution, through the structure of the unloading motor driving the rotating dial to rotate and the eccentric lever driving the bottom tray to flip, the rotational motion of the motor is converted into the swinging unloading action of the tray, thus realizing the automatic flipping and unloading of the exhaust ring after processing.

[0017] Preferably, the positioning assembly includes a drive push rod, a connecting hose, and an air pump. The air pump is fixedly mounted on the mounting frame, and the drive push rod is mounted on the mounting frame. One end of the connecting hose is connected to the air pump, and the other end of the connecting hose is fixedly connected to the other end of the drive push rod. The other end of the connecting hose is located above the mounting rod, and the other end of the connecting hose and the mounting rod are on the same axis. The drive push rod is used to push the other end of the connecting hose to move towards the mounting rod. A positioning plate is provided on the other end of the connecting hose, and the positioning plate has multiple sets of positioning holes circumferentially arranged corresponding to the holes on the exhaust ring.

[0018] By adopting the above technical solution, multiple sets of positioning holes corresponding to the exhaust ring holes are set circumferentially on the positioning plate. The hole position of the uppermost exhaust ring is adjusted to the set circumferential reference position by air blowing, providing a unified reference for the self-alignment of each level of exhaust ring. Finally, all exhaust ring hole positions are uniformly aligned, which facilitates the grinding rod to pass through for grinding in one go, significantly improving the hole alignment accuracy and processing consistency. Air is supplied to the positioning plate through the air pump via the connecting hose, driving the push rod to push the connecting hose and positioning plate to move axially, ensuring that the connecting hose and positioning plate are in contact with the uppermost adjustment plate.

[0019] Preferably, the feeding assembly includes a vibratory feeder and a linear feeder; the vibratory feeder is disposed at one end of the mounting frame and is used to arrange the exhaust rings in an orderly manner and feed them out one by one; the feed end of the linear feeder is connected to the discharge port of the vibratory feeder, and the discharge end of the linear feeder is located on one side of the mounting rod; the mounting frames on both sides of the linear feeder are respectively provided with material blocking push rods, the two sets of material blocking push rods are symmetrically arranged, and the relative distance between the two sets of material blocking push rods gradually decreases along the conveying direction; the working section of the material blocking push rod is provided with a limit rod, the limit rod is divided into a limit moving part and a material blocking part; the limit moving part is parallel to the material blocking push rod; the material blocking part is perpendicular to the conveying direction of the linear feeder.

[0020] By adopting the above technical solution, the automatic and orderly arrangement and continuous conveying of exhaust rings are achieved through a vibratory feeder and a linear feeder, ensuring the automation and stability of the feeding process and improving feeding efficiency. Through a wedge structure with two sets of symmetrically arranged baffle push rods and a gradually decreasing relative spacing along the conveying direction, the spacing between the baffle parts narrows and expands when the push rods extend and retract, thereby realizing the individual distribution and release of exhaust rings. The structure is divided into a limiting moving part and a baffle part by a limiting rod. The limiting moving part ensures motion guidance, while the baffle part is perpendicular to the conveying direction to block and release the exhaust rings.

[0021] Preferably, the grinding assembly includes a first slide, a second slide, and an electric spindle; the first slide is slidably disposed at the other end of the mounting frame; the second slide is slidably disposed on the first slide, and the sliding direction of the second slide is parallel to the axis of the mounting rod; the electric spindle is slidably disposed on the second slide; and a diamond grinding rod is clamped on the electric spindle.

[0022] By adopting the above technical solution, the three-dimensional adjustment of radial tool setting and axial feed is achieved by using the double slide structure of the first slide and the second slide in conjunction with the electric spindle; the diamond grinding rod is driven to rotate at high speed by the electric spindle to perform one-time grinding of the aligned multiple exhaust ring holes, which has high processing efficiency, good coaxiality between the holes, and stable grinding accuracy and surface quality.

[0023] Secondly, this application provides a method for precision manufacturing of an alumina exhaust ring, which adopts the following technical solution: A method for precision manufacturing of an alumina exhaust ring includes the following steps: Step S1: Initial loading. The vent rings to be processed are transported to the mounting rod in sequence by the loading assembly, so that each vent ring is fitted onto the mounting rod in sequence and supported by the bottom support plate. Step S2: Stack the adjustment plate, start the adjustment component, use the adjustment push rod to drive the part removal claw to hold the adjustment plate, push the adjustment plate to move towards the installation rod, and accurately stack the adjustment plate on the upper surface of the current topmost exhaust ring; Step S3: Layered stacking, the next exhaust ring is placed on the mounting rod again through the feeding component, so that the next exhaust ring is stacked on the upper surface of the already placed adjustment plate. The adjustment plate is used to isolate and limit the upper and lower exhaust rings. Step S4: Repeat the steps one by one, stacking the adjustment plate on top of each exhaust ring in turn, and then stacking the next exhaust ring, so that multiple sets of exhaust rings and adjustment plates are stacked and arranged alternately on the mounting rod layer by layer. Step S5: Precise positioning. After stacking, the positioning component on the top of the mounting frame, together with the adjustment plates of each layer, is used to calibrate and position the overall stacked structure on the mounting rod. By using the cooperation between the positioning component and the adjustment plate, the circumferential angle of multiple stacked exhaust rings is adjusted so that the holes on all exhaust rings are completely aligned and the hole axis is consistent. Step S6: Precision grinding. After alignment, the adjustment plate is removed by the adjustment component, and the grinding component is started to perform synchronous precision grinding on the aligned holes on multiple sets of exhaust rings at one time, completing the batch precision machining of holes.

[0024] In summary, this application includes at least one of the following beneficial technical effects: 1. The concave structure of the adjustment plate provides clearance for the installation rod to pass through. Multiple sets of rubber protrusions on the outer ring of the lower surface of the adjustment plate create frictional contact with the upper surface of the lower exhaust ring. Utilizing the high coefficient of friction of rubber, sufficient frictional torque is provided between the adjustment plate and the lower exhaust ring, achieving reliable frictional transmission and effectively driving the lower exhaust ring to rotate synchronously. Multiple limiting grooves on the outer ring of the upper surface of the adjustment plate contain rotating balls that abut against the lower surface of the upper exhaust ring, creating rolling friction between them. This ensures that the adjustment plate only drives the lower exhaust ring and not the upper exhaust ring when rotating. The adjustment plate's dense mesh structure, with tangential nozzles and an acute angle between the nozzle axis and the radial direction of the adjustment plate, allows for high-speed ejection from the tangential nozzles when airflow is obstructed, generating a reaction torque that drives the adjustment plate to rotate, achieving self-aligning drive powered by airflow. Clamping protrusions provide clear and reliable clamping and positioning points for the part-removing jaws.

[0025] 2. Multiple sets of positioning holes corresponding to the exhaust ring holes are set circumferentially on the positioning plate. The hole position of the uppermost exhaust ring is adjusted to the set circumferential reference position by air blowing. This provides a unified reference for the self-alignment of each level of exhaust ring, and finally makes all exhaust ring holes uniformly aligned. This facilitates the grinding rod to pass through the grinding in one go, and significantly improves the hole alignment accuracy and processing consistency. Air is supplied to the positioning plate through the air pump via the connecting hose. The push rod pushes the connecting hose and the positioning plate to move axially, ensuring that the connecting hose and the positioning plate are in contact with the uppermost adjustment plate. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the overall structure in the embodiment.

[0027] Figure 2 This is a schematic diagram of the feeding component in the embodiment.

[0028] Figure 3 This is a schematic diagram of the structure of the installed components in the embodiment.

[0029] Figure 4 yes Figure 3 A magnified view of part A in the middle.

[0030] Figure 5 This is a cross-sectional structural diagram of the adjustment plate in the embodiment.

[0031] Figure 6 This is a schematic diagram of the positioning plate in the embodiment.

[0032] Figure 7 This is a schematic diagram of the reset component in the embodiment.

[0033] Figure 8 This is a schematic diagram of the structure of the flipping unloading assembly in the embodiment.

[0034] Explanation of reference numerals in the attached drawings: 1. Mounting frame; 2. Feeding assembly; 21. Vibratory feeder; 22. Linear feeder; 23. Material stop push rod; 24. Limiting rod; 241. Limiting movement part; 242. Material stop part; 3. Mounting assembly; 31. Mounting rod; 32. Bottom support plate; 321. Reset slot; 322. Clearance slot; 4. Grinding assembly; 41. First slide table; 42. Second slide table; 43. Electric spindle; 44. Diamond grinding rod; 5. Adjustment assembly; 51. Adjustment push rod; 52. Adjustment plate; 521. Rubber protrusion; 522. Limiting groove; 523. Ball bearing; 524. Tangential spray nozzle; 525. Clamping protrusion; 53. Picking claw; 6. Positioning assembly; 61. Drive push rod; 62. Connecting hose; 621. Positioning plate; 6211. Positioning hole; 63. Air pump; 7. Reset assembly; 71. Rotating plate; 711. Sliding groove; 712. Displacement push rod; 72. Reset rod; 73. Reset motor; 8. Clamping push rod; 81. Clamping claw; 9. Tilting unloading assembly; 91. Rotating dial; 911. Lever; 92. Unloading motor. Detailed Implementation

[0035] The following is in conjunction with the appendix Figure 1-8 This application will be described in further detail.

[0036] Example 1: This application discloses a precision manufacturing apparatus for alumina exhaust rings. (Refer to...) Figures 1 to 8 The system includes a mounting frame 1, which is sequentially equipped with a feeding assembly 2, a mounting assembly 3, and a grinding assembly 4. The mounting assembly 3 includes a mounting rod 31 and a bottom support plate 32. One end of the bottom support plate 32 is rotatably mounted on the mounting frame 1, and one end of the mounting rod 31 is longitudinally fixed to the bottom support plate 32. The other end of the mounting rod 31 extends to the upper part of the mounting frame 1. Multiple sets of adjustment assemblies 5 are arranged along the length of the mounting rod 31 on one side of the mounting frame 1. The adjustment assembly 5 includes an adjustment push rod 51 and an adjustment plate 52. The working end of the adjustment push rod 51 is equipped with a part-removing gripper 53, which is used to clamp the adjustment plate 52. The adjustment push rod 51 is used to push the adjustment plate 52 to move towards the mounting rod 31. A positioning assembly 6 is arranged on the top of the mounting frame. A clamping push rod 8 is arranged between two adjacent sets of adjustment push rods 51. The working end of the clamping push rod 8 is equipped with a clamping gripper 81, which is used to clamp and fix the exhaust ring.

[0037] Reference Figures 1 to 8The entire equipment is controlled by a PLC control system to ensure that the feeding, installation, positioning, grinding and unloading processes are carried out in an orderly manner according to the predetermined rhythm. During operation, the feeding component 2 starts first and transports the exhaust rings to be processed one by one to the installation station of the installation component 3. The installation rod 31 in the installation component 3 serves as the stacking positioning mandrel for the exhaust rings, allowing the exhaust rings to be set and stacked one by one. The bottom support plate 32 is rotatably set on the installation frame 1 and is used to flip and unload the material after processing.

[0038] Reference Figures 1 to 8 During the stacking of exhaust rings, photoelectric sensors are installed on the mounting frame 1 at the set height positions corresponding to each layer of exhaust rings to detect in real time whether the exhaust rings are stacked in place. Whenever an exhaust ring slides down along the mounting rod 31 to the corresponding height position, the photoelectric sensor of that layer is blocked by the exhaust ring, generating a position detection signal and feeding it back to the PLC control system. After receiving the position signal of the exhaust ring of that layer, the PLC immediately sends an action command to the adjustment component 5 at the corresponding height, controlling the extension of the adjustment push rod 51 and the removal of the part at the working end of the adjustment push rod 51. The gripper 53 holds the adjustment plate 52, pushes the adjustment plate 52 to the corresponding position above the mounting rod 31, and then releases it, so that the adjustment plate 52 falls on the upper surface of the newly stacked exhaust ring, thereby forming a gap and transmission medium between two adjacent exhaust rings. After the adjustment plate 52 is placed, the adjustment push rod 51 returns to its original position, and the PLC waits for the arrival detection signal of the next layer of exhaust ring. This cycle continues, and for each stacked exhaust ring, the sensor triggers an adjustment action, and an adjustment plate 52 is placed accordingly, until all exhaust rings and adjustment plates 52 are stacked alternately.

[0039] Reference Figures 1 to 8 After the exhaust rings and adjusting plates 52 are stacked alternately, the positioning component 6 is activated under PLC control, acting downwards from the top of the mounting frame 1 on the uppermost exhaust ring to axially position the stack and provide airflow power for subsequent exhaust ring hole alignment. After positioning, the clamping push rods 8 between the two sets of adjacent adjusting push rods 51 extend sequentially under PLC control. The clamping jaws 81 at the working end of the clamping push rods 8 clamp and fix the exhaust rings of the corresponding layer from the side, so that all exhaust rings maintain a fixed posture after the holes are aligned, preventing circumferential displacement or movement in the subsequent process. After all exhaust rings are clamped and fixed, the grinding component 4 is fed under PLC control to perform one-time grinding on the aligned holes on all exhaust rings. After the processing is completed, the grinding component 4 retracts, the clamping push rods 8 are released and retracted, the bottom support plate 32 is flipped under PLC control, and the processed exhaust rings slide off the mounting rod 31 and are unloaded, completing one work cycle.

[0040] Reference Figures 1 to 8The feeding assembly 2 includes a vibratory feeder 21 and a linear feeder 22. The vibratory feeder 21 is located at one end of the mounting frame 1 and is used to arrange the exhaust rings in an orderly manner and feed them out one by one. The feed end of the linear feeder 22 is connected to the discharge port of the vibratory feeder 21, and the discharge end of the linear feeder 22 is located on one side of the mounting rod 31. Two sets of baffle push rods 23 are respectively provided on the mounting frame 1 on both sides of the linear feeder 22. The two sets of baffle push rods 23 are symmetrically arranged, and the relative distance between the two sets of baffle push rods 23 gradually decreases along the conveying direction. A limit rod 24 is provided on the working section of the baffle push rod 23. The limit rod 24 is divided into a limit moving part 241 and a baffle part 242. The limit moving part 241 is parallel to the baffle push rod 23. 242 is perpendicular to the conveying direction of the linear feeder 22. During operation, the vibratory plate 21 is started, and the exhaust rings to be processed scattered inside it are gradually raised along the spiral track through high-frequency vibration. During the rising process, they pass through a series of posture screening mechanisms, so that the exhaust rings that do not meet the posture requirements fall back to the bottom of the vibratory plate 21 for reordering. Finally, only the exhaust rings with uniform posture can reach the discharge port of the vibratory plate 21, realizing the orderly arrangement of the exhaust rings and sending them out one by one. The exhaust rings sent out from the discharge port of the vibratory plate 21 enter the feed end of the linear feeder 22. The linear feeder 22 drives the exhaust rings to move forward at a uniform speed along the conveying track through linear vibration, and conveys the exhaust rings from the vibratory plate 21 side to the discharge end position on the side of the mounting rod 31.

[0041] Reference Figures 1 to 8Initially, the two sets of stop push rods 23 are in the retracted position. At this time, the stop part 242 of the limit rod 24 blocks the forward path of the exhaust ring, preventing subsequent exhaust rings from moving forward, thus achieving the material-stopping function. When an exhaust ring needs to be delivered, the PLC controls the two sets of stop push rods 23 to extend forward synchronously, and the limit rod 24 slides forward together with the stop push rods 23. As the stop push rods 23 extend forward, the stop part 242 of the limit rod 24 gradually moves to a position where the relative distance between the two sets of push rods is larger, and the effective passage width between the two stop parts 242 gradually increases until it is greater than the outer diameter of the exhaust ring. At this time, the foremost exhaust ring is no longer obstructed and moves forward under the vibration drive of the linear feeder 22. After passing the position of the stop part 242, it continues to be conveyed to the discharge end. The material is fed to the set position on one side of the mounting rod 31, releasing a single exhaust ring. After releasing an exhaust ring, the PLC controls the two sets of stop push rods 23 to retract synchronously, and the limit rod 24 slides back to reset along with the stop push rod 23. The stop part 242 retracts from the position with a larger gap to the position with a smaller gap, and the effective passage width between the two stop parts 242 narrows again to less than the outer diameter of the exhaust ring, blocking the next exhaust ring and keeping it in place for the next release. This cycle repeats, with the stop push rod 23 sliding back and forth, blocking the next exhaust ring when it retracts and releasing an exhaust ring when it extends. With the continuous feeding of the vibratory plate 21 and the continuous conveying of the linear feeder 22, the exhaust rings are fed one by one in an orderly manner at a stable rhythm.

[0042] Reference Figures 1 to 8 The adjusting plate 52 is concave. The outer ring of the lower surface of the adjusting plate 52 is provided with multiple sets of rubber protrusions 521, which are used to form frictional contact with the upper surface of the exhaust ring below. The outer ring of the upper surface of the adjusting plate 52 is provided with multiple sets of limiting grooves 522, and a ball bearing 523 is rotatably arranged in the limiting groove 522. The ball bearing 523 is used to abut against the lower surface of the exhaust ring above. The plate body of the adjusting plate 52 is densely meshed. The mesh of the adjusting plate 52 is tangential spray holes 524. The axis of the tangential spray holes 524 forms an acute angle with the radial direction of the adjusting plate 52. The outer side of the adjusting plate 52 is provided with clamping protrusions 525. The clamping protrusions 525 serve as the clamping and positioning parts of the part removal claw 53.

[0043] Reference Figures 1 to 8The outer ring of the lower surface of the adjusting plate 52 is provided with multiple sets of rubber protrusions 521. When the adjusting plate 52 rests on the upper surface of the lower exhaust ring, the rubber protrusions 521 form elastic frictional contact with the upper surface of the lower exhaust ring. Since the coefficient of friction of rubber is much higher than that of metal, the rubber protrusions 521 can provide a sufficiently large frictional force between the adjusting plate 52 and the lower exhaust ring. When the adjusting plate 52 rotates circumferentially under the reaction force of the tangential airflow, the rubber protrusions 521 transmit the rotational torque to the lower exhaust ring through friction, causing the lower exhaust ring to rotate synchronously with the adjusting plate 52, thereby... The adjusting plate 52 provides frictional drive to the lower exhaust ring, allowing it to rotate with the adjusting plate 52 until the holes are aligned. The ball bearing 523 can rotate freely within the limiting groove 522. When the adjusting plate 52 rotates circumferentially, the ball bearing 523 experiences rolling friction with the upper exhaust ring, resulting in minimal friction. Therefore, the rotation of the adjusting plate 52 does not cause the upper exhaust ring to rotate synchronously. In other words, the adjusting plate 52 only drives the lower exhaust ring to rotate, without generating circumferential driving force on the upper exhaust ring. This ensures that each level of exhaust ring can independently and sequentially complete hole alignment without interference. The limiting groove 522 radially limits the ball bearing 523, preventing it from dislodging or shifting during rotation.

[0044] Reference Figures 1 to 8 When the holes of the upper and lower exhaust rings are not aligned, the airflow entering downward from the hole of the upper exhaust ring is blocked by the upper surface of the lower exhaust ring and cannot pass directly downward. It is forced to enter the mesh of the adjusting plate 52 and be ejected at high speed from the tangential nozzle 524. Since the tangential nozzle 524 is inclined along the tangential direction, the reaction force generated when the airflow is ejected acts along the circumferential tangential direction of the adjusting plate 52. Multiple sets of tangential nozzles 524 work together to form a resultant torque, driving the adjusting plate 52 to rotate around its central axis. When the lower exhaust ring is rotated by the adjusting plate 52 until the hole of the exhaust ring is vertically aligned with the hole of the upper exhaust ring, the airflow instantly finds a low-resistance channel and passes directly from the hole of the upper exhaust ring through the hole of the lower exhaust ring to continue downward. At this time, the airflow through the tangential nozzle 524 drops sharply, the reaction torque disappears, and the adjusting plate 52 and the lower exhaust ring automatically stop rotating, completing the hole alignment of the exhaust rings at this stage.

[0045] Reference Figures 1 to 8The positioning component 6 includes a drive push rod 61, a connecting hose 62, and an air pump 63. The air pump 63 is fixedly mounted on the mounting frame 1, and the drive push rod 61 is mounted on the mounting frame 1. One end of the connecting hose 62 is connected to the air pump 63, and the other end of the connecting hose 62 is fixedly connected to the other end of the drive push rod 61. The other end of the connecting hose 62 is located above the mounting rod 31, and the other end of the connecting hose 62 and the mounting rod 31 are located on the same axis. The drive push rod 61 is used to push the other end of the connecting hose 62 to move towards the mounting rod 31. A positioning plate 621 is provided on the other end of the connecting hose 62. The positioning plate 621 is provided with multiple sets of positioning holes 6211 in the circumferential direction, corresponding to the holes on the exhaust ring. The positioning plate 621 is provided with multiple sets of positioning holes 6211 evenly arranged in the circumferential direction. The number, diameter, and pitch circle radius of the positioning holes 6211 correspond one-to-one with the holes to be processed on the exhaust ring.

[0046] Reference Figures 1 to 8After the exhaust ring and adjustment plate 52 are alternately stacked on the mounting rod 31, the positioning assembly 6 begins to work. First, the drive push rod 61 extends downward under the control of the PLC, pushing the lower end of the connecting hose 62, together with the positioning plate 621, towards the mounting rod 31, until the lower surface of the positioning plate 621 presses against the uppermost adjustment plate 52. After the positioning plate 621 is pressed into place, the air pump 63 starts, and the generated compressed air is delivered to the positioning plate 621 through the connecting hose 62. The airflow flows from the positioning holes 6211 of the positioning plate 621 towards... The airflow is ejected downwards, acting on the uppermost adjusting plate 52 below it. Since the uppermost adjusting plate 52 has a dense mesh structure with tangential nozzles 524, the airflow ejected from the positioning hole 6211 enters the adjusting plate 52 and is ejected at high speed from the tangential nozzles 524, generating a reaction torque that drives the uppermost adjusting plate 52 to rotate around the axis of the mounting rod 31. When the adjusting plate 52 rotates, the frictional contact between the rubber protrusions 521 on its lower surface and the upper surface of the first exhaust ring below it causes the first exhaust ring to rotate synchronously. When the first exhaust ring is carried... When the rotating part is vertically aligned with the positioning hole 6211 on the positioning plate 621, the airflow instantly finds a low-resistance channel and passes directly from the positioning hole 6211 through the hole of the first exhaust ring to continue downward. At this time, the airflow through the tangential nozzle 524 of the uppermost adjusting plate 52 drops sharply, the reaction torque disappears, and the uppermost adjusting plate 52 and the first exhaust ring automatically stop rotating. Thus, the circumferential position of the first exhaust ring is precisely adjusted and fixed at the reference position set by the positioning hole 6211 on the positioning plate 621. This reference position is consistent with the grinding assembly. The feed position of the diamond grinding rod 44 corresponds to ensure that the grinding rod can accurately pass into the hole during subsequent grinding. After the first exhaust ring is aligned, the airflow continues to be transmitted downwards, driving the lower adjustment plates 52 and exhaust rings to rotate step by step with the same air-blowing self-aligning mechanism, so that the hole of each exhaust ring is aligned with the hole of the exhaust ring above it in turn. Finally, all the holes of the exhaust rings are automatically aligned and uniformly located in the same circumferential reference position determined by the positioning hole 6211 of the positioning plate 621, providing an accurate hole position reference for subsequent one-time through-grinding.

[0047] Reference Figures 1 to 8The bottom support plate 32 has a reset slot 321, which extends in an arc-shaped elongated hole along the circumference of the bottom support plate 32. Both ends of the reset slot 321 are respectively provided with clearance grooves 322 extending away from the mounting rod 31. The clearance grooves 322 are connected to the reset slot 321 to provide radial clearance space for the reset rod 72. The upper surface of the rotating plate 71 is provided with a sliding groove 711 along its radial direction. The lower end of the reset rod 72 is slidably installed in the sliding groove 711, so that the reset rod 72 slides radially along the rotating plate 71. The upper end of the reset rod 72 passes upward through the reset slot 321 on the bottom support plate 32 and extends to the upper space of the mounting frame 1, that is, it extends into the height range of the adjustment plates 52 at each level. The clearance push rod 712 is used to push the reset rod 72 to slide radially back and forth along the sliding groove 711.

[0048] Reference Figures 1 to 8 After all the exhaust ring holes are automatically aligned, the clamping push rods 8 extend, and the clamping jaws 81 clamp and fix the corresponding exhaust rings from the side, keeping all exhaust rings in the hole alignment state and preventing them from rotating. At this time, the adjusting plates 52 are still fitted on the mounting rod 31, and the circumferential position of the clamping protrusions 525 of each adjusting plate 52 is random and may not be aligned with the position of the picking jaws 53 of the adjusting push rod 51. Subsequently, the PLC control system drives the reset motor 73 to start, and the reset motor 73 drives the rotating plate 71 to rotate around its axis. When the rotating plate 71 rotates, the sliding groove 711 drives the reset rod 72 to rotate synchronously, and the upper end of the reset rod 72 moves circumferentially around the axis of the mounting rod 31 along the arc trajectory of the reset groove hole 321. During circumferential rotation, the reset rod 72 abuts against the clamping protrusions 525 on the outer side of each layer of adjustment plate 52 in sequence. As the reset rod 72 continues to rotate, since the clamping claws 81 clamp and fix the exhaust ring, the reset rod 72 pushes the clamping protrusions 525 to drive the adjustment plate 52 to rotate synchronously around the mounting rod 31. Since the reset rod 72 passes through the height range of all adjustment plates 52 along the axial direction, during the rotation of the reset rod 72, it can simultaneously abut against and drive all adjustment plates 52 to rotate together, so that the clamping protrusions 525 of all adjustment plates 52 are rotated uniformly to the set pick-up position. The pick-up position corresponds to the circumferential position of the pick-up claws 53 of the adjustment push rod 51, ensuring that the pick-up claws 53 can accurately clamp the clamping protrusions 525.

[0049] Reference Figures 1 to 8When the reset rod 72 rotates with the rotating plate 71 to the other end of the reset slot 321, all the clamping protrusions 525 of the adjusting plates 52 have been rotated to the part removal position, and the circumferential return is completed. Afterwards, the clearance push rod 712 extends under PLC control, pushing the reset rod 72 to slide away from the mounting rod 31 along the sliding groove 711 on the rotating plate 71, causing the reset rod 72 to slide from the end of the reset slot 321 into the corresponding clearance groove 322. After the reset rod 72 enters the clearance groove 322, it disengages from the adjusting plate 52. The abutment relationship of the clamping protrusion 525 avoids interference during subsequent part removal; after the reset rod 72 has moved aside, the part removal claws 53 of each set of adjustment push rods 51 can extend from the corresponding height position and accurately clamp the clamping protrusions 525 of each adjustment plate 52. Then the adjustment push rod 51 retracts, pulls all the adjustment plates 52 off the mounting rod 31 and removes them, completing the removal and reset of the adjustment plates 52; after all the adjustment plates 52 have been removed, only the air vent ring with aligned holes remains on the mounting rod 31, and it can then proceed to the subsequent grinding process.

[0050] Reference Figures 1 to 8 The grinding assembly 4 includes a first slide 41, a second slide 42, and an electric spindle 43. The first slide 41 is slidably disposed at the other end of the mounting frame 1, and the sliding direction of the first slide 41 is away from or towards the mounting rod 31. The second slide 42 is slidably disposed on the first slide 41, and the sliding direction of the second slide 42 is parallel to the axis of the mounting rod 31. The electric spindle 43 is slidably disposed on the second slide 42, and the electric spindle 43 slides along the width direction of the mounting frame 1. A diamond grinding rod 44 is clamped on the electric spindle 43.

[0051] Reference Figures 1 to 8Once all the holes of the exhaust rings are aligned, the clamping jaws 81 at each stage hold and fix the exhaust rings, and the adjusting plates 52 at each stage have been removed from the mounting rod 31, the grinding assembly 4 begins to work. First, the first slide 41 slides radially under PLC control, driving the second slide 42, the electric spindle 43, and the diamond grinding rod 44 to move radially as a whole, adjusting the radial distance between the axis of the diamond grinding rod 44 and the axis of the mounting rod 31, so that the axis of the diamond grinding rod 44 is accurately aligned with the pitch circle position of the hole to be machined on the exhaust ring, thus completing the radial tool setting. After the radial tool setting is completed, the electric spindle 43 starts, driving the diamond grinding rod 44 to rotate at high speed to reach the set grinding speed. Subsequently, the second slide 42 slides axially under PLC control, and the mounting rod 31 moves radially. The side slide drives the high-speed rotating diamond grinding rod 44 to slowly feed axially. The front end of the diamond grinding rod 44 first contacts the hole of the uppermost vent ring. As the second slide 42 continues to feed, the diamond grinding rod 44 passes through the aligned holes of each vent ring in sequence, and uses the cutting action of the diamond abrasive grains to perform precision grinding on the inner wall of each hole. When the second slide 42 feeds to the set grinding endpoint position, the diamond grinding rod 44 completely penetrates the holes of all vent rings, and the grinding of the entire hole is completed. Subsequently, the second slide 42 slides back in the opposite direction, driving the diamond grinding rod 44 to withdraw axially from each hole. After returning to the initial safe position, the electric spindle 43 stops rotating, and the first slide 41 returns to its original position or remains in the current position to wait for the next cycle as needed.

[0052] Reference Figures 1 to 8The bottom of the mounting frame 1 is equipped with a tilting unloading assembly 9, which includes a rotating dial 91 and an unloading motor 92. The unloading motor 92 is fixedly mounted on the mounting frame 1, and the output end of the unloading motor 92 is located on one side of the rotating dial 91. A lever 911 is provided on the other side of the rotating dial 91, and the lever 911 is fixedly connected to the bottom support plate 32. When the grinding process is completed, the diamond grinding rod 44 exits from the hole of the exhaust ring, and after the clamping jaws 81 at each stage release the exhaust ring, the tilting unloading assembly 9 starts to unload the material. The unloading motor 92 starts and rotates under the control of the PLC, driving the rotating dial 91 to rotate around the axis of the motor output shaft. The lever 911 moves in a circular motion together with the rotating dial 91. While lever 911 is making a circular motion, since lever 911 is fixedly connected to bottom support plate 32, lever 911 drives bottom support plate 32 to flip downward around its hinge point with mounting frame 1; the finished exhaust ring sleeved on mounting rod 31 slides downward along the inclined mounting rod 31 under the action of gravity, and finally slides off from the lower end of mounting rod 31 to complete the unloading action; after unloading, unloading motor 92 rotates in the opposite direction, rotating dial 91 to drive lever 911 to make a circular motion in the opposite direction, lever 911 pulls bottom support plate 32 to flip upward around the hinge point to reset, until bottom support plate 32 returns to the horizontal position, mounting rod 31 returns to the vertical state, ready for the next work cycle of loading and stacking.

[0053] Example 2: This application discloses a method for precision manufacturing of an alumina exhaust ring, including the following steps: Step S1: Initial loading. The vent rings to be processed are transported sequentially to the mounting rod 31 by the loading component 2, so that each vent ring is sequentially fitted onto the mounting rod 31 and supported by the bottom support plate 32. Step S2: Stack the adjustment plate 52, start the adjustment component 5, use the adjustment push rod 51 to drive the part removal claw 53 to clamp the adjustment plate 52, push the adjustment plate 52 to move towards the mounting rod 31, and accurately stack the adjustment plate 52 on the upper surface of the current topmost exhaust ring. Step S3: Layered stacking, the next exhaust ring is placed on the mounting rod 31 again through the feeding component 2, so that the next exhaust ring is stacked on the upper surface of the already placed adjustment plate 52, and the upper and lower exhaust rings are isolated and limited by the adjustment plate 52. Step S4: Repeat the steps and stack the adjustment plate 52 on the top of each exhaust ring in turn, and then stack the next exhaust ring to achieve multiple sets of exhaust rings and adjustment plates 52 stacked alternately on the mounting rod 31. Step S5: Precise positioning. After stacking, the positioning component 6 on the top of the mounting frame 1, together with the adjustment plates 52 of each layer, is used to calibrate and position the overall stacked structure on the mounting rod 31. By using the cooperation between the positioning component 6 and the adjustment plates 52, the circumferential angle of multiple stacked exhaust rings is adjusted so that the holes on all exhaust rings are fully aligned and the hole axes are consistent. Step S6: Precision grinding. After alignment, the adjustment plate 52 is removed by the adjustment component 5, and the grinding component 4 is started to perform synchronous precision grinding on the aligned holes on multiple sets of exhaust rings at one time, thus completing the batch precision machining of holes.

[0054] The working principle of the alumina exhaust ring precision manufacturing equipment in this application is as follows: the entire equipment is controlled by a PLC control system to uniformly control the working sequence, and each action link is executed in an orderly manner according to a predetermined rhythm. During operation, the vibratory plate 21 arranges the exhaust rings to be processed in an orderly manner and sends them out one by one. They are conveyed to the discharge end by the linear feeder 22. Two sets of material blocking push rods 23 slide back and forth. When they retract, they block the subsequent exhaust rings, and when they extend, they release one, so as to realize the orderly distribution of exhaust rings one by one. After the material is distributed, the exhaust rings are put into the mounting rod 31 one by one and slide down the rod. The photoelectric sensors on each layer of the mounting frame 1 detect the stacking status of the exhaust rings in real time. When an exhaust ring is detected to be in place, the PLC controls the corresponding height adjustment push rod 51 to extend, and the picking claw 53 clamps the adjustment plate 52 and pushes it to the top of the mounting rod 31 to release it, so that the adjustment plate 52 falls on the upper surface of the exhaust ring. This cycle continues, and the exhaust rings and adjustment plates 52 are stacked alternately until the set number is reached. After stacking, the drive push rod 61 pushes the positioning plate 621 down to the top adjustment plate 52. The air pump 63 starts to generate compressed air. The airflow is sprayed downward through the positioning hole 6211 of the positioning plate 621. After entering the top adjustment plate 52, it is sprayed out at high speed from the tangential nozzle 524, generating a reaction torque. This drives the adjustment plate 52 to rotate and drives the first exhaust ring below to rotate synchronously through the rubber protrusion 521 on the lower surface. When the hole of the first exhaust ring is aligned with the positioning hole 6211, the airflow is smooth and the torque disappears. This stage stops rotating. The airflow continues to flow downward and drives the subsequent adjustment plates 52 and exhaust rings to rotate and align in the same way. Finally, all the holes of the exhaust rings are automatically aligned and uniformly located at the circumferential reference position set by the positioning plate 621. After alignment, the clamping push rods 8 extend, and the clamping claws 81 clamp and fix the exhaust rings of each layer from the side to keep the holes aligned. Then, the reset motor 73 drives the rotating plate 71 and the reset rod 72 to rotate around the mounting rod 31. The reset rod 72 simultaneously abuts against and drives all the adjustment plates 52 to rotate, so that the clamping protrusions 525 of each adjustment plate 52 rotate uniformly to the picking position. After reaching the position, the clearance push rod 712 pushes the reset rod 72 to slide radially into the clearance groove 322 to get rid of the interference. The picking claws 53 of each set of adjustment push rods 51 then extend to clamp the adjustment plate 52 and retract, removing all the adjustment plates 52 from the mounting rod 31. After the adjustment plate 52 is removed, the first slide 41 slides radially to complete the radial tool setting of the diamond grinding rod 44. The electric spindle 43 drives the diamond grinding rod 44 to rotate at high speed. The second slide 42 feeds axially. The grinding rod passes through all the holes with the exhaust rings aligned in one go, completing the precision grinding of the inner walls of all the holes. After the machining is completed, the second slide 42 retracts, the grinding rod exits from the hole, the electric spindle 43 stops rotating, and the clamping jaws 81 release the exhaust rings.Finally, the unloading motor 92 drives the rotating dial 91 to rotate, and the eccentric lever 911 drives the bottom support plate 32 to flip and tilt downward around the hinge point. The finished exhaust ring slides down and is unloaded along the inclined mounting rod 31 under the action of gravity. After unloading is completed, the unloading motor 92 reverses, the bottom support plate 32 flips and resets to the horizontal position, the mounting rod 31 returns to the vertical state, and the equipment enters the next working cycle.

[0055] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A precision manufacturing equipment for alumina venting rings, used for processing and producing alumina venting rings used in special etching machines and semiconductor device special equipment, characterized in that: The system includes a mounting frame (1), which is sequentially equipped with a feeding assembly (2), a mounting assembly (3), and a grinding assembly (4). The mounting assembly (3) includes a mounting rod (31) and a bottom support plate (32). One end of the bottom support plate (32) is rotatably mounted on the mounting frame (1), and one end of the mounting rod (31) is longitudinally fixed to the bottom support plate (32). The other end of the mounting rod (31) extends to the upper part of the mounting frame (1). Multiple sets of adjustment components (5) are provided on one side of the body (1) along the length direction of the mounting rod (31); the adjustment component (5) includes an adjustment push rod (51) and an adjustment plate (52); a part-removing claw (53) is provided on the working end of the adjustment push rod (51), and the part-removing claw (53) is used to clamp the adjustment plate (52); the adjustment push rod (51) is used to push the adjustment plate (52) to move towards the mounting rod (31); a positioning component (6) is provided on the top of the mounting frame.

2. The precision manufacturing equipment for alumina exhaust rings according to claim 1, characterized in that: The adjusting plate (52) is concave. The outer ring of the lower surface of the adjusting plate (52) is provided with multiple sets of rubber protrusions (521). The rubber protrusions (521) are used to form frictional contact with the upper surface of the exhaust ring below. The outer ring of the upper surface of the adjusting plate (52) is provided with multiple sets of limiting grooves (522). A ball bearing (523) is rotatably arranged in the limiting groove (522). The ball bearing (523) is used to abut against the lower surface of the exhaust ring above. The plate body of the adjusting plate (52) is densely meshed. The mesh of the adjusting plate (52) is a tangential spray hole (524). The axis of the tangential spray hole (524) forms an acute angle with the radial direction of the adjusting plate (52). A clamping protrusion (525) is provided on the outer side of the adjusting plate (52).

3. The precision manufacturing equipment for alumina exhaust rings according to claim 1, characterized in that: The bottom support plate (32) is provided with a reset slot (321), and the two ends of the reset slot (321) are respectively provided with clearance slots (322) away from the mounting rod (31).

4. The precision manufacturing equipment for alumina exhaust rings according to claim 3, characterized in that: The bottom of the bottom support plate (32) is provided with a reset assembly (7). The reset assembly (7) includes a rotating plate (71), a reset rod (72), and a reset motor (73). The reset motor (73) is fixedly installed at the bottom of the bottom support plate (32). The upper surface of the rotating plate (71) is fixedly installed at the output end of the reset motor (73). The upper surface of the rotating plate (71) is provided with a sliding groove (711) along the axial direction. One end of the reset rod (72) is slidably installed in the sliding groove (711). The other end of the reset rod (72) passes through the reset groove hole (321) and extends upward to the upper part of the mounting frame (1). The upper surface of the rotating plate (71) is provided with a clearance push rod (712). The working end of the clearance push rod (712) is fixedly installed on the reset rod (72). The clearance push rod (712) is used to push the reset rod (72) to slide along the sliding groove (711).

5. The precision manufacturing equipment for alumina exhaust rings according to claim 1, characterized in that: A clamping push rod (8) is provided between the two adjacent sets of adjustment push rods (51). The working end of the clamping push rod (8) is provided with a clamping claw (81), which is used to clamp and fix the exhaust ring.

6. The precision manufacturing equipment for alumina exhaust rings according to claim 1, characterized in that: The bottom of the mounting frame (1) is provided with a tilting unloading assembly (9). The tilting unloading assembly (9) includes a rotating dial (91) and an unloading motor (92). The unloading motor (92) is fixedly mounted on the mounting frame (1). One side of the rotating dial (91) is the output end of the unloading motor (92). The other side of the rotating dial (91) is provided with a lever (911). The lever (911) is fixedly connected to the bottom support plate (32).

7. The precision manufacturing equipment for alumina exhaust rings according to claim 1, characterized in that: The positioning component (6) includes a drive push rod (61), a connecting hose (62), and an air pump (63). The air pump (63) is fixedly mounted on the mounting frame (1). The drive push rod (61) is mounted on the mounting frame (1). One end of the connecting hose (62) is connected to the air pump (63), and the other end of the connecting hose (62) is fixedly connected to the other end of the drive push rod (61). The other end of the connecting hose (62) is located above the mounting rod (31), and the other end of the connecting hose (62) and the mounting rod (31) are located on the same axis. The drive push rod (61) is used to push the other end of the connecting hose (62) to move towards the mounting rod (31). A positioning plate (621) is provided on the other end of the connecting hose (62). The positioning plate (621) is provided with multiple sets of positioning holes (6211) in the circumferential direction corresponding to the holes on the exhaust ring.

8. The precision manufacturing equipment for alumina exhaust rings according to claim 1, characterized in that: The feeding assembly (2) includes a vibratory feeder (21) and a linear feeder (22); the vibratory feeder (21) is located at one end of the mounting frame (1), and the vibratory feeder (21) is used to arrange the exhaust rings in an orderly manner and feed them out one by one; the feed end of the linear feeder (22) is connected to the discharge port of the vibratory feeder (21), and the discharge end of the linear feeder (22) is located on one side of the mounting rod (31); the mounting frames (1) on both sides of the linear feeder (22) are respectively equipped with There are two sets of material blocking push rods (23), which are arranged symmetrically. The relative distance between the two sets of material blocking push rods (23) gradually decreases along the conveying direction. A limit rod (24) is provided on the working section of the material blocking push rod (23). The limit rod (24) is divided into a limit moving part (241) and a material blocking part (242). The limit moving part (241) is parallel to the material blocking push rod (23). The material blocking part (242) is perpendicular to the conveying direction of the linear feeder (22).

9. The precision manufacturing equipment for alumina exhaust rings according to claim 1, characterized in that: The grinding assembly (4) includes a first slide (41), a second slide (42), and an electric spindle (43); the first slide (41) is slidably disposed at the other end of the mounting frame (1); the second slide (42) is slidably disposed on the first slide (41), and the sliding direction of the second slide (42) is parallel to the axis of the mounting rod (31); the electric spindle (43) is slidably disposed on the second slide (42); the sliding direction of the electric spindle (43) is such that a diamond grinding rod (44) is clamped on the electric spindle (43).

10. A method for precision manufacturing of an alumina exhaust ring, using the manufacturing equipment described in any one of claims 1-9, characterized in that, Includes the following steps: Step S1: Initial loading. The vent rings to be processed are transported to the mounting rod (31) in sequence by the loading component (2), so that each vent ring is put on the mounting rod (31) in sequence and supported by the bottom support plate (32). Step S2: Stack the adjustment plate (52), start the adjustment component (5), use the adjustment push rod (51) to drive the part removal claw (53) to clamp the adjustment plate (52), push the adjustment plate (52) towards the mounting rod (31), and accurately stack the adjustment plate (52) on the upper surface of the current topmost exhaust ring; Step S3: Layered stacking, the next exhaust ring is placed on the mounting rod (31) again through the feeding component (2), so that the next exhaust ring is stacked on the upper end face of the already placed adjustment plate (52), and the upper and lower exhaust rings are isolated and limited by the adjustment plate (52); Step S4: Repeat steps 2 and 3, stacking adjustment plates (52) on the top of each exhaust ring in turn, and then stacking the next exhaust ring, so that multiple sets of exhaust rings and adjustment plates (52) are stacked alternately on the mounting rod (31). Step S5: Precise positioning. After stacking, the positioning component (6) at the top of the mounting frame (1) is used in conjunction with the adjustment plates (52) of each layer to calibrate and position the overall stacked structure on the mounting rod (31). By using the cooperation between the positioning component (6) and the adjustment plate (52), the circumferential angle of multiple stacked exhaust rings is adjusted so that the holes on all exhaust rings are fully aligned and the hole axes are consistent. Step S6: Precision grinding. After alignment, the adjustment plate (52) is removed by the adjustment component (5), and the grinding component (4) is started to perform synchronous precision grinding on the aligned holes on multiple sets of exhaust rings at one time, thus completing the batch precision machining of holes.

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