Cooling device for grinding of aluminum nitride workpieces

Abstract

The application discloses a cooling device for grinding processing of an aluminum nitride workpiece and relates to the technical field of grinding processing equipment. The cooling device comprises a grinding mechanism, a bed body assembly and a cooling mechanism. The grinding mechanism is arranged on one side of the bed body assembly. The bed body assembly comprises a workbench and a longitudinal guide arranged along the length direction of the workbench. The cooling mechanism is slidably arranged on the longitudinal guide and located above the grinding area of the grinding mechanism. The cooling mechanism comprises a sliding assembly, an angle adjusting assembly, a cooling assembly and two lateral blowing assemblies. The overall height and overall spray angle of the cooling assembly can be synchronously adjusted by driving the rotating seat to rotate around the connecting position of the rotating seat and the adjusting arm through the telescopic driving element. The local spray angles of the two side nozzles are respectively adjusted through the two side adjusting driving elements. The overall adjustment and local adjustment are matched, and the adaptability of the cooling liquid spray direction is improved.

Description

Technical Field

[0001] This invention relates to the field of grinding equipment technology, specifically a cooling device for grinding aluminum nitride workpieces. Background Technology

[0002] Aluminum nitride workpieces are characterized by high hardness, high brittleness, and high thermal conductivity. During grinding, grinding heat, grinding chips, and coolant splashes containing fine particles are generated in the grinding zone. If the coolant cannot be continuously directed at the grinding zone, localized temperature increases can easily occur, affecting the machining quality of the aluminum nitride workpiece.

[0003] Existing grinding equipment typically employs a single-point spray method or fixes multiple spray outlets in the same installation position. The single-point spray method has limited coverage width, while multiple fixed spray outlets make it difficult to adjust the spray direction according to the grinding position, workpiece width, and grinding contact area. Furthermore, as the grinding position moves along the machining path, the relative position between the fixed spray outlets and the grinding area changes, easily leading to coolant deviating from the grinding contact position.

[0004] Furthermore, coolant splashes and grinding debris generated during grinding easily diffuse from the spray area to both sides. Existing air blowing methods are usually set up separately from the spray method, and there is a lack of stable positional coordination between the air blowing area and the spray area, making it difficult to form an airflow boundary that moves with the spray position outside the spray area.

[0005] To address this issue, we propose a cooling device for grinding aluminum nitride workpieces. Summary of the Invention

[0006] In view of this, and in view of the shortcomings of the prior art, the present invention provides a cooling device for grinding aluminum nitride workpieces to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, the present invention provides the following technical solution: a cooling device for grinding aluminum nitride workpieces, comprising a grinding mechanism, a bed assembly, and a cooling mechanism. The grinding mechanism is disposed on one side of the bed assembly. The bed assembly includes a worktable and a longitudinal guide member disposed along the length of the worktable. The cooling mechanism is slidably disposed on the longitudinal guide member and located above the grinding area of ​​the grinding mechanism. The cooling mechanism includes a sliding component, an angle adjustment component, a cooling component, and two lateral air blowing components. The sliding component is slidably engaged with the longitudinal guide member. The angle adjustment component is disposed between the sliding component and the cooling component. The two lateral air blowing components are respectively disposed on both sides of the cooling component. The angle adjustment component includes an adjusting arm, a telescopic drive component, a rotating seat, a liquid supply connector, and multiple liquid delivery components. The adjusting arm is connected to the sliding component. The rotating seat is rotatably connected to the adjusting arm, and the telescopic drive is connected between the adjusting arm and the rotating seat to drive the rotating seat to rotate around its connection position with the adjusting arm. The cooling assembly includes a fluid distributor, a connector, a central spray assembly, and two side spray assemblies. The fluid distributor is connected to the rotating seat, and the fluid distributor has a first infusion channel, a second infusion channel, and a third infusion channel inside. The liquid supply connector communicates with the first infusion channel, the second infusion channel, and the third infusion channel through the rotating seat and multiple infusion components, respectively. The central spray assembly is installed in the middle of the fluid distributor through the connector, and the two side spray assemblies are respectively disposed on both sides of the fluid distributor. The first infusion channel communicates with the central spray assembly, and the second and third infusion channels communicate with the two side spray assemblies, respectively.

[0008] Preferably, the grinding mechanism includes a gantry frame, a lifting drive, a lifting seat, and a grinding assembly. The gantry frame is disposed on one side of the bed assembly, the lifting seat is slidably disposed on the gantry frame, the lifting drive is connected to the lifting seat, and the grinding assembly is disposed on the lifting seat, so that the lifting drive can drive the grinding assembly to move up and down through the lifting seat.

[0009] Preferably, the sliding assembly includes two parallel guide rods and a sliding seat slidably sleeved on the two guide rods. The two guide rods are arranged along the extension direction of the longitudinal guide member. The adjusting arm is mounted on the sliding seat, so that the sliding seat can drive the angle adjusting assembly and the cooling assembly to move along the grinding position through the adjusting arm.

[0010] Preferably, the liquid supply connector is disposed on the rotating seat, and a plurality of liquid delivery components are spaced apart between the rotating seat and the distributor, so that the coolant entering the liquid supply connector can be delivered to the first liquid delivery channel, the second liquid delivery channel and the third liquid delivery channel respectively through the rotating seat and the plurality of liquid delivery components.

[0011] Preferably, the connector includes a connecting plate and a communicating hole disposed on the connecting plate, the connecting plate being connected between the fluid distributor and the central spraying assembly, and the communicating hole being connected between the first infusion channel and the central spraying assembly.

[0012] Preferably, the central spraying assembly includes a central mounting base, a central flow divider, and a plurality of central nozzles. The central mounting base is connected to the flow divider via the connector. The central flow divider is disposed on the central mounting base. The plurality of central nozzles are spaced apart along the length of the central mounting base and are respectively connected to the central flow divider.

[0013] Preferably, each of the side spraying components includes a side adjustment drive, a nozzle connector, a side nozzle, and a side mounting component. The side mounting component is connected to the side of the fluid distributor, the nozzle connector is rotatably connected to the side mounting component, the side adjustment drive is connected between the side mounting component and the nozzle connector, and the side nozzle is disposed on the nozzle connector.

[0014] Preferably, when the telescopic drive drives the rotating seat to rotate, it can simultaneously change the overall height and overall spray angle of the fluid distributor, the central spray assembly, and the two side spray assemblies. When the side adjustment drive drives the nozzle connector to rotate relative to the side mounting member, it can individually change the local spray angle of the corresponding side nozzle.

[0015] Preferably, the two lateral air blowing assemblies are located outside the central liquid spraying assembly and the two lateral liquid spraying assemblies, respectively. The air outlet direction of the two lateral air blowing assemblies is towards the grinding area and inclined towards each other to form an air curtain on both sides of the cooling assembly.

[0016] Preferably, the plurality of central nozzles form a central spraying area along the width direction of the worktable, and the two side nozzles respectively form side spraying areas located on both sides of the central spraying area. The central spraying area and the two side spraying areas together cover the contact position between the grinding assembly and the aluminum nitride workpiece.

[0017] Compared with the prior art, the present invention provides a cooling device for grinding aluminum nitride workpieces, which has the following beneficial effects: By sliding the cooling mechanism onto the longitudinal guide of the bed assembly, the cooling mechanism can move with the grinding position of the grinding assembly, thereby ensuring that the coolant spray area continuously corresponds to the actual grinding position of the aluminum nitride workpiece, reducing the possibility of the coolant spray area deviating from the grinding position.

[0018] By using a telescopic drive to rotate the rotating seat around the connection point between the rotating seat and the adjusting arm, the overall height and overall spray angle of the cooling assembly can be adjusted synchronously. By using two side adjustment drives to adjust the local spray angle of the two side nozzles respectively, the overall adjustment and local adjustment are combined to improve the adaptability of the coolant spray direction.

[0019] Coolant is supplied to the central spray assembly and the two side spray assemblies through the first, second, and third liquid supply channels, respectively, so that multiple central nozzles and two side nozzles form a coolant spray area that cooperates with the central and side sides, thereby improving the cooling coverage and cooling uniformity of the grinding contact area.

[0020] By forming an air curtain with two lateral air blowing components on both sides of the cooling assembly, the spread of coolant droplets and grinding debris to both sides of the bed assembly can be limited, and the coolant and grinding debris can be guided to concentrate in the central area of ​​the worktable, reducing the impact of coolant splashing on the surrounding environment. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the overall structure from another perspective of the present invention; Figure 3 This is a schematic diagram of the installation structure of the cooling mechanism of the present invention; Figure 4 This is a schematic diagram of the sliding component, angle adjustment component, and cooling component of the present invention; Figure 5 This is a bottom view of the angle adjustment component and cooling component of the present invention. Figure 6 This is a partial structural schematic diagram of the side spraying assembly of the present invention; Figure 7 This is a side view of the angle adjustment component of the present invention. Figure 8 This is a bottom view of the cooling assembly of the present invention. Figure 9 This is a front view of the cooling assembly of the present invention. Figure 10 This is a schematic diagram of the internal structure of the fluid separator of the present invention.

[0022] In the diagram: 1. Grinding mechanism; 2. Bed assembly; 3. Cooling mechanism; 11. Gantry frame; 12. Lifting drive; 13. Lifting seat; 14. Grinding assembly; 21. Worktable; 22. Longitudinal guide; 31. Sliding assembly; 32. Angle adjustment assembly; 34. Cooling assembly; 35. Lateral air blowing assembly; 311. Guide rod; 312. Sliding seat; 321. Adjusting arm; 322. Telescopic drive; 323. Rotary seat; 324. Liquid supply connector; 325. Infusion unit; 3 41. Flow divider; 342. Connector; 343. Central spray assembly; 344. Side spray assembly; 3411. First infusion channel; 3412. Second infusion channel; 3413. Third infusion channel; 3421. Connecting plate; 3422. Connecting hole; 3431. Central mounting base; 3432. Central flow divider; 3433. Central nozzle; 3441. Side adjustment drive; 3442. Nozzle connector; 3443. Side nozzle; 3444. Side mounting component. Detailed Implementation

[0023] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] Embodiments of the present invention like Figure 1 and Figure 2 As shown, the cooling device for grinding aluminum nitride workpieces includes a grinding mechanism 1, a bed assembly 2, and a cooling mechanism 3. The grinding mechanism 1 is located on one side of the bed assembly 2. The bed assembly 2 includes a worktable 21 and a longitudinal guide 22 arranged along the length of the worktable 21. The worktable 21 is used to support the aluminum nitride workpiece to be ground. The grinding mechanism 1 includes a gantry frame 11, a lifting drive 12, a lifting seat 13, and a grinding assembly 14. The lifting seat 13 is slidably arranged on the gantry frame 11. The lifting drive 12 is connected to the lifting seat 13. The grinding assembly 14 is installed on the lifting seat 13, so that the lifting drive 12 can drive the grinding assembly 14 to approach or move away from the aluminum nitride workpiece on the worktable 21 through the lifting seat 13.

[0025] like Figure 3As shown, the cooling mechanism 3 includes a sliding component 31, an angle adjustment component 32, a cooling component 34, and two lateral air blowing components 35. The sliding component 31 is disposed on the longitudinal guide 22 and is used to drive the angle adjustment component 32 and the cooling component 34 to move along the length direction of the worktable 21. The angle adjustment component 32 is disposed between the sliding component 31 and the cooling component 34 and is used to adjust the overall height and overall spray angle of the cooling component 34 relative to the grinding position. The two lateral air blowing components 35 are respectively disposed on both sides of the cooling component 34 and are used to form an air curtain outside the coolant spray area.

[0026] like Figure 4 As shown, the sliding assembly 31 includes two parallel guide rods 311 and a sliding seat 312. The sliding seat 312 is slidably mounted on the two guide rods 311. The two guide rods 311 jointly limit the movement direction of the sliding seat 312 and provide support for the sliding seat 312. When the sliding seat 312 moves along the two guide rods 311, it drives the angle adjustment assembly 32 and the cooling assembly 34 to move together. At the same time, the cooling mechanism 3 changes its position along the longitudinal guide 22 in the length direction of the worktable 21, so that the cooling assembly 34 can move above the current grinding position of the grinding assembly 14.

[0027] like Figure 4 and Figure 7 As shown, the angle adjustment assembly 32 includes an adjustment arm 321, a telescopic drive 322, a rotating seat 323, a liquid supply connector 324, and multiple liquid delivery components 325. The adjustment arm 321 is connected to the sliding seat 312, and the rotating seat 323 is rotatably connected to the adjustment arm 321. The telescopic drive 322 is connected between the adjustment arm 321 and the rotating seat 323. The adjustment arm 321 is used to support the rotating seat 323 and determine the rotation reference of the rotating seat 323. When the telescopic drive 322 is activated, it pushes the rotating seat 323 to rotate around the connection position between the rotating seat 323 and the adjustment arm 321. The rotating seat 323 drives the cooling assembly 34 to rise, fall, and deflect as a whole, thereby changing the overall height of the cooling assembly 34 relative to the worktable 21 and the overall spray angle of the cooling assembly 34 toward the grinding area.

[0028] like Figure 4 , Figure 5 and Figure 10As shown, the liquid supply connector 324 is disposed on the rotating seat 323 and is used to receive externally supplied coolant. Multiple liquid supply components 325 are disposed between the rotating seat 323 and the distributor 341. After the coolant enters the rotating seat 323 through the liquid supply connector 324, it passes through the internal conveying path of the rotating seat 323 and enters the multiple liquid supply components 325. Then, the multiple liquid supply components 325 respectively deliver the coolant to the first liquid supply channel 3411, the second liquid supply channel 3412 and the third liquid supply channel 3413 in the distributor 341, so that the three liquid supply channels that are separated from each other can respectively deliver coolant to the central spray assembly 343 and the two side spray assemblies 344.

[0029] The cooling assembly 34 includes a fluid distributor 341, a connector 342, a central spray assembly 343, and two side spray assemblies 344. The fluid distributor 341 is connected to the rotating seat 323 and is used to support the central spray assembly 343 and the two side spray assemblies 344. The first liquid delivery channel 3411 is correspondingly connected to the central spray assembly 343, and the second liquid delivery channel 3412 and the third liquid delivery channel 3413 are respectively correspondingly connected to the two side spray assemblies 344, thereby forming three sets of mutually cooperating coolant spray structures between the central spray assembly 343 and the two side spray assemblies 344.

[0030] like Figures 8 to 10 As shown, the connector 342 includes a connecting plate 3421 and a connecting hole 3422 disposed on the connecting plate 3421. The connecting plate 3421 is connected between the distributor 341 and the central spray assembly 343 and the central spray assembly 343 is installed in the middle of the distributor 341. The connecting hole 3422 connects the first liquid delivery channel 3411 and the central spray assembly 343. The connector 342 is used to connect the distributor 341 and the central spray assembly 343 and form a coolant communication path. The connector 342 itself does not constitute a coolant nozzle. The coolant entering the connector 342 continues to be delivered to the central spray assembly 343 through the connecting hole 3422.

[0031] The central spray assembly 343 includes a central mounting base 3431, a central distribution component 3432, and multiple central nozzles 3433. The central mounting base 3431 is mounted on the central part of the distribution component 341 via a connector 342. The central distribution component 3432 is disposed on the central mounting base 3431. The multiple central nozzles 3433 are spaced apart along the length of the central mounting base 3431. The coolant in the first liquid delivery channel 3411 enters the central distribution component 3432 through the connecting hole 3422 and is then distributed to the multiple central nozzles 3433, so that the multiple central nozzles 3433 form a continuously distributed central spray area along the central part of the grinding area.

[0032] like Figures 5 to 7As shown, each side spray assembly 344 includes a side adjustment drive 3441, a nozzle connector 3442, a side nozzle 3443, and a side mounting component 3444. The side mounting component 3444 is mounted on the side of the distributor 341. The nozzle connector 3442 is rotatably connected to the side mounting component 3444. The side nozzle 3443 is disposed on the nozzle connector 3442. The side adjustment drive 3441 is connected between the side mounting component 3444 and the nozzle connector 3442. When the side adjustment drive 3441 is activated, it drives the nozzle connector 3442 to rotate relative to the side mounting component 3444, thereby individually changing the local spray angle of the corresponding side nozzle 3443.

[0033] The second liquid delivery channel 3412 and the third liquid delivery channel 3413 respectively deliver coolant to the two side liquid spraying assemblies 344. The coolant entering the two side liquid spraying assemblies 344 is sprayed out by the two side nozzles 3443 respectively, forming side spraying areas on both sides of the central spraying area formed by multiple central nozzles 3433. When the area to be ground of the aluminum nitride workpiece is narrow, the two side nozzles 3443 deflect towards the central spraying area. When the area to be ground of the aluminum nitride workpiece is wide, the two side nozzles 3443 deflect towards the outside of the central spraying area respectively, so that the two side nozzles 3443 and the multiple central nozzles 3433 together form a coolant spraying range adapted to the width of the area to be ground.

[0034] The telescopic drive 322 is used to adjust the overall height and overall spray angle of the fluid distributor 341, the central spray assembly 343 and the two side spray assemblies 344. The two side adjustment drive 3441 are used to adjust the local spray angle of the two side nozzles 3443 respectively, so that the cooling assembly 34 forms a two-stage spray angle adjustment mode that combines overall adjustment and local adjustment, and enables multiple central nozzles 3433 and two side nozzles 3443 to move from the center and both sides toward the contact position between the grinding assembly 14 and the aluminum nitride workpiece.

[0035] like Figure 3 and Figure 9 As shown, two lateral air blowing assemblies 35 are respectively disposed on both sides of the cooling assembly 34 and located outside the coolant spray area. The air outlet direction of the two lateral air blowing assemblies 35 is towards the grinding area and inclined towards each other, so that the airflow output by the two lateral air blowing assemblies 35 forms an air curtain on both sides of the cooling assembly 34. The air curtain applies airflow towards the middle of the grinding area to the outward moving coolant droplets and grinding chips, so as to limit the diffusion of coolant droplets and grinding chips to both sides of the bed assembly 2 and promote the concentration of coolant and grinding chips in the middle area of ​​the worktable 21.

[0036] The overall working process and principle of the above embodiments are as follows: In the initial state, the aluminum nitride workpiece is placed on the worktable 21, the grinding assembly 14 is spaced apart from the aluminum nitride workpiece, the cooling mechanism 3 is located on one side of the grinding area, the sliding seat 312 can move along the two guide rods 311, the telescopic drive 322 can change the overall height and overall spray angle of the cooling assembly 34 through the rotating seat 323, the two side adjustment drive 3441 can change the local spray angle of the two side nozzles 3443 respectively, and the liquid supply connector 324, multiple liquid supply components 325, the first liquid supply channel 3411, the second liquid supply channel 3412 and the third liquid supply channel 3413 together constitute the delivery path of the coolant into the three sets of spray structures.

[0037] During the grinding process, the cooling mechanism 3 is first moved along the longitudinal guide 22 toward the grinding area of ​​the aluminum nitride workpiece. At the same time, the sliding seat 312 is moved along the two guide rods 311. The sliding seat 312 drives the angle adjustment component 32 and the cooling component 34 to move together through the adjusting arm 321 until the cooling component 34 is above the predetermined contact position between the grinding component 14 and the aluminum nitride workpiece, so that the central spray component 343 and the two side spray components 344 can cover the predetermined grinding area from the middle and both sides.

[0038] After the cooling assembly 34 reaches the predetermined position, the telescopic drive 322 pushes the rotating seat 323 to rotate around the connection position between the rotating seat 323 and the adjusting arm 321. The rotating seat 323 drives the fluid distributor 341, the central spray assembly 343 and the two side spray assemblies 344 to rise, fall and deflect together, so that the multiple central nozzles 3433 and the two side nozzles 3443 are aligned with the predetermined contact position between the grinding assembly 14 and the aluminum nitride workpiece, thereby completing the overall height and overall spray angle adjustment of the cooling assembly 34.

[0039] After the overall adjustment is completed, the two side adjustment drive components 3441 drive the corresponding nozzle connectors 3442 to rotate relative to the side mounting components 3444. The nozzle connectors 3442 drive the side nozzles 3443 to rotate synchronously, so that the two side nozzles 3443 adjust the local spray angle according to the width of the area to be ground on the aluminum nitride workpiece, and connect the side spray area formed by the two side nozzles 3443 with the central spray area formed by multiple central nozzles 3433.

[0040] After the spray angle adjustment is completed, the coolant enters the rotating seat 323 through the supply connector 324, and then enters multiple delivery components 325 through the internal delivery path of the rotating seat 323. The multiple delivery components 325 then enter the first delivery channel 3411, the second delivery channel 3412, and the third delivery channel 3413 respectively. The coolant entering the first delivery channel 3411 enters the middle diversion component 3432 through the connecting hole 3422 of the connector 342 and is sprayed out to the center of the grinding area by multiple middle nozzles 3433. The coolant entering the second delivery channel 3412 and the third delivery channel 3413 enters the two side spraying components 344 respectively and is sprayed out to both sides of the grinding area by two side nozzles 3443.

[0041] After the central spray assembly 343 and the two side spray assemblies 344 begin spraying coolant, the two lateral air blowing assemblies 35 blow air toward the grinding area and form an air curtain on both sides of the cooling assembly 34. The coolant sprayed by the multiple central nozzles 3433 and the two side nozzles 3443 is confined between the two air curtains, so that the coolant can be concentrated on the grinding contact position, and the grinding debris moving outward with the coolant is constrained by the airflow and concentrated in the central area of ​​the worktable 21.

[0042] After the coolant is sprayed and the air curtain is formed, the lifting drive 12 drives the grinding assembly 14 to descend through the lifting seat 13. The grinding assembly 14 contacts the aluminum nitride workpiece and performs grinding. Multiple central nozzles 3433 continuously spray coolant into the center of the grinding contact position, and two side nozzles 3443 continuously spray coolant into both sides of the grinding contact position. The coolant entering the grinding contact position absorbs the heat generated during the grinding process and carries the grinding debris away from the grinding contact area, thereby reducing the temperature of the aluminum nitride workpiece at the grinding position and reducing the accumulation of grinding debris at the grinding contact position.

[0043] As the grinding position of the grinding assembly 14 moves along the aluminum nitride workpiece, the cooling mechanism 3 moves synchronously along the longitudinal guide 22. The sliding seat 312 slides along the two guide rods 311, so that multiple central nozzles 3433, two side nozzles 3443, and two lateral air blowing assemblies 35 continuously correspond to the current grinding position of the grinding assembly 14. When the height or grinding direction of the grinding position changes, the telescopic drive 322 readjusts the overall height and overall spray angle of the cooling assembly 34 through the rotating seat 323. The two side adjustment drive assemblies 3441 respectively supplement the local spray angle of the two side nozzles 3443, so that the coolant spray area continuously covers the grinding contact position.

[0044] After grinding, the lifting drive 12 drives the grinding assembly 14 away from the aluminum nitride workpiece via the lifting seat 13. Then, it stops supplying coolant to the liquid supply connector 324 and stops blowing air from the two side air blowing assemblies 35. This causes the first liquid supply channel 3411, the second liquid supply channel 3412, and the third liquid supply channel 3413 to stop supplying coolant to the central liquid spray assembly 343 and the two side liquid spray assemblies 344. Then, the cooling mechanism 3 moves away from the grinding area along the longitudinal guide 22, thereby completing the grinding and cooling process of the aluminum nitride workpiece.

[0045] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0046] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A cooling device for grinding aluminum nitride workpieces, comprising a grinding mechanism (1), a bed assembly (2), and a cooling mechanism (3), characterized in that: The bed assembly (2) includes a worktable (21) slidably connected to a longitudinal guide (22). The grinding mechanism (1) includes a grinding assembly (14) located above the worktable (21). The cooling mechanism (3) is located on one side of the grinding assembly (14) and includes a guide rod (311), a sliding seat (312) slidably connected thereto, an angle adjustment assembly (32), a cooling assembly (34), and two lateral air blowing assemblies (35) carried on the sliding seat (312). The angle adjustment assembly (32) includes an adjustment arm (321), a rotating seat (323), and a telescopic drive (322). The adjustment arm (321) is connected to the sliding seat (312), the rotating seat (323) is rotatably connected to the adjustment arm (321), and the telescopic drive... The moving part (322) is hinged between the two, and the cooling assembly (34) is located below the rotating seat (323) and rotates with it. The fluid distribution (341) of the cooling assembly (34) is provided with a first liquid delivery channel (3411), a second liquid delivery channel (3412) and a third liquid delivery channel (3413). The three are respectively connected to the central spray assembly (343) and two side spray assemblies (344) located on both sides. Both side spray assemblies (344) include a nozzle connector (3442) driven to rotate by the side adjustment drive (3441). Two side blowing assemblies (35) are respectively located outside the two side spray assemblies (344). The sliding seat (312) moves along the guide rod (311) with the grinding position. The angle adjustment assembly (32) also includes a liquid supply connector (324) and multiple infusion fittings (325). The outlet end of the liquid supply connector (324) is connected to the inlet end of a plurality of liquid delivery components (325). The outlet end of each liquid delivery component (325) is connected to the inlet end of the first liquid delivery channel (3411), the second liquid delivery channel (3412), and the third liquid delivery channel (3413). The outlet end of the first liquid delivery channel (3411) is connected to the central spray assembly (343) with a central nozzle (3433) through a connector (342). The outlet ends of the second liquid delivery channel (3412) and the third liquid delivery channel (3413) are connected to two side spray assemblies (344) respectively. Each side spray assembly (344) is provided with a side nozzle (3443). Each of the side spraying assemblies (344) includes a side mounting member (3444), a nozzle connector (3442), a side adjustment drive member (3441), and a plurality of side nozzles (3443). The side mounting member (3444) is connected to the distributor (341), the nozzle connector (3442) is rotatably connected to the side mounting member (3444), and the two ends of the side adjustment drive member (3441) are rotatably connected to the side mounting member (3444) and the nozzle connector (3442) respectively. The plurality of side nozzles (3443) are spaced apart along the length direction of the nozzle connector (3442). The rotation axis between the rotating seat (323) and the adjusting arm (321) constitutes the primary adjustment axis, and the rotation axis between the nozzle connector (3442) and the side mounting component (3444) constitutes the secondary adjustment axis. The primary adjustment axis and the two secondary adjustment axes are spaced apart. The telescopic drive component (322) drives the central spray assembly (343) and the two side spray assemblies (344) to rotate as a whole. The two side adjustment drive components (3441) drive the corresponding side nozzles (3443) to rotate independently relative to the central nozzle (3433).

2. The cooling device for grinding aluminum nitride workpieces according to claim 1, characterized in that: The grinding mechanism (1) further includes a gantry (11), a lifting drive (12) and a lifting seat (13). The lifting seat (13) is slidably connected to the gantry (11). The lifting drive (12) is set on the gantry (11) and is connected to the lifting seat (13) in a transmission manner. The grinding assembly (14) is set on the lifting seat (13). The lifting drive (12) drives the grinding assembly (14) to rise and fall relative to the worktable (21) through the lifting seat (13).

3. The cooling device for grinding aluminum nitride workpieces according to claim 1, characterized in that: The guide rods (311) are two parallel rods. The sliding seat (312) spans and slides across the two guide rods (311). The adjusting arm (321), rotating seat (323), cooling assembly (34) and two lateral blowing assemblies (35) are all supported by the sliding seat (312) so as to move synchronously along the two guide rods (311).

4. A cooling device for grinding aluminum nitride workpieces according to claim 1, characterized in that: The connector (342) includes a connecting plate (3421) and a connecting hole (3422) disposed on the connecting plate (3421). The central spraying assembly (343) includes a central mounting base (3431), a central flow divider (3432), and a plurality of central nozzles (3433). The central mounting base (3431) is connected to the flow divider (341) through the connecting plate (3421). The central flow divider (3432) is disposed on the central mounting base (3431). The connecting hole (3422) connects the first infusion channel (3411) and the central flow divider (3432). The plurality of central nozzles (3433) are spaced apart along the length direction of the central flow divider (3432).

5. A cooling device for grinding aluminum nitride workpieces according to claim 1, characterized in that: The two lateral blowing assemblies (35) are located on the side of the two side spraying assemblies (344) away from the central spraying assembly (343). The air outlet directions of the two lateral blowing assemblies (35) are inclined towards each other and are respectively directed toward the outer edge of the three sets of spraying areas. The spraying areas of the central nozzle (3433) and the two side nozzles (3443) are located between the two lateral blowing assemblies (35).

6. A cooling device for grinding aluminum nitride workpieces according to claim 1, characterized in that: The liquid supply connector (324) is located on the upper part of the rotating seat (323), and multiple liquid delivery components (325) are spaced apart between the rotating seat (323) and the distributor (341). Each liquid delivery component (325) is connected to one of the first liquid delivery channel (3411), the second liquid delivery channel (3412), or the third liquid delivery channel (3413). The liquid supply connector (324) forms three liquid supply paths leading to the central spray assembly (343) and the two side spray assemblies (344), respectively.

7. A cooling device for grinding aluminum nitride workpieces according to claim 5, characterized in that: The central spraying assembly (343) and the two side spraying assemblies (344) are all directed toward the grinding area between the grinding assembly (14) and the worktable (21). The air outlet directions of the two side blowing assemblies (35) are directed toward the outer edges of the two sides of the grinding area. The cooling assembly (34) and the two side blowing assemblies (35) move synchronously with the sliding seat (312).

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