Parallel device and mechanical device

Abstract

The application discloses a parallel device and a mechanical device, and relates to the technical field of mechanical precision manufacturing. The parallel device comprises a static platform, at least three support chains, and at least three displacement adjusting mechanisms; the first end of each support chain is connected to the static platform, and the second end of each support chain is used for being connected with a dynamic platform; each support chain comprises an elastic member and an extension adjusting mechanism; the elastic member is arranged between the static platform and the dynamic platform; the extension adjusting mechanism is connected with the elastic member and is used for adjusting the extension amount of the elastic member; the number of the displacement adjusting mechanisms is arranged in one-to-one correspondence with the number of the support chains; each displacement adjusting mechanism is connected to the static platform and / or the dynamic platform and is used for adjusting the hanging position of the corresponding support chain on the static platform and / or the dynamic platform, so that the pose of the dynamic platform can be calculated, the pose of the dynamic platform can be flexibly adjusted according to requirements, the difficulty of pose calculation is reduced, and the pose adjustment precision of the dynamic platform is improved.

Description

Technical Field

[0001] This application relates to the technical field of precision mechanical manufacturing, and more particularly to a parallel device and mechanical equipment. Background Technology

[0002] In existing flexible suspension parallel devices, the pose of the moving platform requires an additional pose measuring device to measure, and the pose of the moving platform is inconvenient to adjust in three-dimensional space, thus failing to meet the application scenario requirements for high-precision detection and control of the pose of the moving platform. Summary of the Invention

[0003] This application discloses a parallel device and mechanical equipment to solve the technical problem that in existing flexible suspension parallel devices, the pose of the moving platform needs to be measured by an additional pose measuring device, and the pose of the moving platform is inconvenient to adjust in three-dimensional space, thus failing to meet the requirements of high-precision detection and control of the pose of the moving platform in application scenarios.

[0004] In a first aspect, this application provides a parallel device, including a static platform, at least three branches, and at least three displacement adjustment mechanisms; the first end of each branch is connected to the static platform, and the second end of each branch is used to connect to a moving platform; each branch includes an elastic element and a telescopic adjustment mechanism; the elastic element is disposed between the static platform and the moving platform, and the telescopic adjustment mechanism is connected to the elastic element and used to adjust the telescopic amount of the elastic element; the number of displacement adjustment mechanisms corresponds one-to-one with the number of branches, and each displacement adjustment mechanism is connected to the static platform and / or the moving platform and used to adjust the suspension position of the corresponding branch on the static platform and / or the moving platform.

[0005] The parallel device provided in this application, based on the adjustable extension and retraction of the elastic elements and the adjustable suspension positions of the branches, allows the extension adjustment mechanism to change the magnitude of the tension or pressure exerted by the branches on the moving platform by adjusting the extension and retraction of the elastic elements in each branch. It also allows the displacement adjustment mechanism to change the direction of the tension or pressure exerted by the branches by adjusting the suspension points of the branches on the static platform and / or the moving platform. This enables the calculation of the moving platform's position in space based on a spatial equilibrium force system formed by the tension of at least three elastic elements and the gravity of the suspended module, and allows for flexible adjustment of the moving platform's position as needed. The posture calculation is simplified, and the posture adjustment accuracy of the moving platform is improved. On the other hand, the elastic element in the branch can realize the flexible connection between the moving platform and the stationary platform, so that the parallel device has under-constrained characteristics when the moving platform docks with the docking device. This enables the moving platform to actively adapt to the position of the docking device, improves the reliability and smoothness of the docking between the moving platform and the docking device, and enables the elastic element to attenuate the docking impact force when the moving platform docks with the docking device and block the transmission of vibration to the moving platform after docking, thus improving the posture stability of the moving platform after docking with the docking device.

[0006] In one possible implementation, the displacement adjustment mechanism includes a fixed part and a movable part. The fixed part is fixedly connected to the static platform and / or the moving platform, and the movable part is fixedly connected to the branch. The connection position of the movable part on the fixed part is adjustable. Therefore, by adjusting the connection position of the movable part relative to the fixed part, on the one hand, the layout of the branch can be changed without disassembling the moving or static platform, adapting to parallel devices suspending different loads or docking devices of different sizes, and improving the flexibility of adjusting the suspension position of the branch on the static and / or moving platform. On the other hand, errors such as machining deviations of the moving or static platform, inconsistent lengths of multiple branches, and installation tilt can be compensated for by fine-tuning the position of the movable part relative to the fixed part, optimizing the force distribution of the branch. Furthermore, by adjusting the suspension position of the branch, the lever arm, driving direction, and working space of the parallel device can be changed, reducing the risk of the parallel device being in an odd configuration, improving the rigidity, load-bearing stability, and adjustment accuracy of the moving platform, while simplifying the assembly and debugging process and enhancing the versatility and applicability of the mechanism.

[0007] In one possible implementation, the movable part is capable of translating relative to the fixed part in a straight line. This allows the suspension points of the branches to be continuously and smoothly adjusted along a preset straight trajectory. The linear translational movement has clear limits and no deviation in adjustment, enabling precise changes to the mounting fulcrum of a single branch. This allows for simultaneous changes in the spatial angle and force arm between the branches. Combined with elastic elements and a telescopic adjustment mechanism, this achieves refined and continuous control of the dynamic platform's posture and overall support stiffness. The displacement adjustment mechanism has low movement resistance and reliable positioning, stably balancing the load on each branch and improving the adjustable range and accuracy of the dynamic platform's posture adjustment.

[0008] In one possible implementation, the branch further includes a first connecting joint and a second connecting joint. The first connecting joint connects the elastic element and the stationary platform, and has at least two rotational degrees of freedom. The second connecting joint connects the elastic element and the moving platform, and also has at least two rotational degrees of freedom. Thus, on the one hand, by allowing the elastic element to rotate at both ends, the first connecting joint can convert the bending moment transmitted from the stationary platform into a bending moment or torque at its own point, and the second connecting joint can convert the bending moment transmitted from the moving platform into a bending moment or torque at its own point. This allows the elastic element to primarily bear the axial tension or compression, ensuring that the force on the elastic element conforms to Hooke's Law (i.e., force is proportional to displacement). This allows for adjusting the extension or retraction of the elastic element to change the suspension force, simplifying the control algorithm, improving force control accuracy, and extending the lifespan of the elastic element and the extension / retraction adjustment mechanism. On the one hand, the first and second connecting joints, with their multiple degrees of freedom, provide kinematic tolerance, enabling them to absorb minor deviations between the motion law of the branch and the natural motion trajectory of the moving platform. This reduces the risk of self-locking or vibration in the parallel device during high-speed, high-precision operation, and also lowers the precision requirements for machining and the difficulty of assembly. On the other hand, the first connecting joint provides at least two rotational degrees of freedom, allowing the branch to swing flexibly at the root of the stationary platform. This provides a kinematic basis for the moving platform to achieve larger tilt angles or more complex spatial trajectories.

[0009] In one possible implementation, the first connecting joint is configured as a ball joint or a non-ball joint; the second connecting joint is configured as a ball joint or a non-ball joint. Therefore, the ball joint provides multiple rotational degrees of freedom, including the rotational degree of freedom of the branch about its own axis. This allows the elastic element to rotate freely around its own axis without constraint, reducing the influence of lateral forces, bending moments, or torques on the elastic element. This ensures that the direction of the suspension force of the moving platform is the same as the extension direction of the branch, improving the accuracy and reliability of the telescopic adjustment mechanism in adjusting the telescopic extension of the elastic element, extending the lifespan of the elastic element, and improving the structural compactness of the branch. On the other hand, the non-ball joint does not provide multiple rotational degrees of freedom, including the rotational degree of freedom of the branch about its own axis. This allows the non-ball joint to be supported by bearings, improving its ability to withstand bending moments and axial forces, reducing wear and extending its lifespan. It also reduces the risk of joint disengagement in the non-ball joint and allows the elastic element to deflect and swing freely, improving the certainty and reliability of the elastic element's torsional posture.

[0010] In one possible implementation, the telescopic adjustment mechanism is connected to the elastic element and the first connecting joint; and / or, the telescopic adjustment mechanism is connected between the elastic element and the second connecting joint; the displacement adjustment mechanism is connected between the first connecting joint and the stationary platform; and / or, the displacement adjustment mechanism is connected between the second connecting joint and the moving platform. Thus, on the one hand, by placing the telescopic adjustment mechanism between the first and second connecting joints, the branch length adjustment and attitude movement are decoupled, meaning the telescopic adjustment mechanism is only responsible for the telescopic extension of the elastic element without affecting the rotation of the first and second connecting joints, improving the adjustment accuracy of the telescopic adjustment mechanism for the telescopic extension of the elastic element. Meanwhile, the first and second connecting joints are responsible for the swing of the branch without affecting the telescopic extension of the elastic element, adapting to the attitude changes of the moving platform. On the other hand, placing the displacement adjustment mechanism between the first connecting joint and the stationary platform or between the second connecting joint and the moving platform avoids the displacement adjustment mechanism being used to adjust the suspension of the branch. The lateral offset, lateral force, or additional bending moment generated during the pose directly acts on the elastic element, improving the reliability of the elastic element under axial force and avoiding the problem of synchronous adjustment of the suspension position and length of the branch caused by the functional coupling of the displacement adjustment mechanism and the telescopic adjustment mechanism. This improves the adjustment accuracy of the suspension position of the branch by the displacement adjustment mechanism and reduces the difficulty of pose calculation of the moving platform. On the other hand, the displacement adjustment mechanism is set outside the first and second connecting joints, which can reserve more space for the first connecting joint, the second connecting joint, and the telescopic adjustment mechanism, reducing the probability of motion interference, excessively long branches, structural bulkiness, and decreased stiffness.

[0011] In one possible implementation, the static platform includes a platform base and a support frame, the support frame being fixedly connected to the platform base. The branch chain further includes a pulley and a cable. The pulley is connected to the end of the support frame facing away from the platform base and has at least two rotational degrees of freedom relative to the support frame. The cable is wound around the pulley and connected between the moving platform and the elastic element. The end of the elastic element facing away from the cable is connected to the platform base and / or the support frame. The cable is configured as a rigid rope or an elastic rope. Therefore, on the one hand, the pulley design decouples the complex spatial motion of the moving platform into the tensioning motion of the rigid rope. The cable between the pulley and the moving platform can rotate freely around its own axis. No matter how the moving platform tilts or rotates, the force transmitted to the rigid rope is always a linear force along the central axis of the rigid rope. That is, the suspension force of the parallel device is always along the direction of force on the cable, thus realizing the change of the suspension force of the parallel device by adjusting the extension and retraction of the elastic element through the telescopic adjustment mechanism. On the other hand, the connection of the elastic element and the pulley to the stationary platform reduces the moment of inertia of the moving platform and reduces the overturning moment of the moving platform. Furthermore, the pulley has at least two rotational degrees of freedom relative to the support frame, thus realizing the separation of the transmission direction and the driving direction, allowing the rigid rope to move freely under any posture of the moving platform. The alignment of the suspension force direction of the parallel device reduces the risk of rigid ropes detaching from or jamming with pulleys. Furthermore, when the cable is configured as a rigid rope, its excellent structural strength extends its lifespan and improves the accuracy of adjusting the tension of the branch chain by measuring the expansion and contraction of the elastic element. When the cable is configured as an elastic rope, it acts as both a force transmission medium and an elastic element, allowing the entire elastic rope to absorb and dissipate the impact energy generated when the moving platform is subjected to impact, rather than concentrating it in a specific section of the branch chain. This improves the protection of the precision end effector on the moving platform. Simultaneously, the elastic rope can replace the elastic element, eliminating the need for a rigid rope, thus reducing the number of components and simplifying assembly.

[0012] In one possible implementation, the static platform includes a platform base and a support frame, the support frame being fixedly connected to the platform base. The branch also includes a pulley connected to the end of the support frame facing away from the platform base and having at least two rotational degrees of freedom relative to the support frame; the elastic element is configured as an elastic rope wound around the pulley and connected to the moving platform and the platform base; and / or, the elastic rope connects the moving platform and the support frame. On the one hand, the support frame raises the installation position of the pulley, reserving sufficient space for the installation of the elastic rope and avoiding friction and interference between the rope and the static platform body. On the other hand, the pulley has two degrees of rotational freedom, which can adaptively deflect and guide according to the changes in the posture of the moving platform, and match the tension angle of the elastic rope in real time to prevent rope twisting, wear, and jamming, and ensure smooth and uniform tension transmission. Furthermore, the two ends of the elastic rope are respectively connected to the platform base and / or the support frame and the moving platform, relying on the pulley to achieve flexible traction support, and using the elasticity of the rope itself to provide a buffering and shock absorption effect. With the help of the branch chain telescopic adjustment mechanism, the effective tension length of the rope can be changed simultaneously, flexibly adjusting the support tension and overall suspension stiffness of the moving platform in all directions. The multi-directional adaptive guidance structure has low force loss and smooth movement, while the overall layout is simple and compact, making it easy to disassemble and maintain.

[0013] In one possible implementation, the displacement adjustment mechanism is disposed on the support frame, the pulley is connected to the displacement adjustment mechanism and has at least two rotational degrees of freedom relative to the displacement adjustment mechanism; and / or, the displacement adjustment mechanism is disposed on the moving platform. Thus, on the one hand, the displacement adjustment mechanism being connected to the support frame of the static platform reduces the moment of inertia of the moving platform, decreases the overturning moment of the moving platform, and facilitates maintenance of the displacement adjustment mechanism and provides a convenient rope pretensioning and slack compensation mechanism; on the other hand, the displacement adjustment mechanism being disposed between the moving platform and the cable allows for the design of the displacement adjustment mechanism as a friction pair or fracture groove with a preset pressure, so that in the event of an accidental collision or overload of the moving platform, the enormous tension of the cable will first act on the displacement adjustment mechanism, causing it to slip or break, thereby reducing the risk of damage to the more expensive moving platform.

[0014] In one possible implementation, the support frame includes at least three support rods, which are spaced apart and connected one-to-one with at least three branches. This independent arrangement of multiple support rods improves installation and layout flexibility, increases maintenance and replacement efficiency, reduces the number of components, and lowers cost.

[0015] In one possible implementation, the telescopic adjustment mechanism includes an adjustment section and a push-pull section. One end of the push-pull section is movably connected to the adjustment section, and the other end is connected to the elastic element. The adjustment section is used to adjust the relative position of the push-pull section and the push-pull section. The direction of movement of the push-pull section relative to the adjustment section is parallel to the telescopic direction of the elastic element. Therefore, on the one hand, the output capacity of the telescopic adjustment mechanism is entirely converted into axial tension or pressure on the elastic element, reducing the risk of lateral force on the elastic element, extending the lifespan of the elastic element, and improving the dynamic stability and response speed of the adjustment. On the other hand, the displacement of the adjustment section is proportional to the telescopic amount of the elastic element, simplifying the closed-loop control algorithm of the suspension force of the parallel device. It should be noted that the push-pull section refers to the structure that pushes the elastic element to extend or retract.

[0016] In one possible implementation, the static equilibrium of the spatial force system of the moving platform in three-dimensional space satisfies the following relationship: ∑F x =0, ∑F y =0, ∑F z =0,∑M x =0,∑M y =0, and ∑M z =0, where F x F represents the component of the force exerted by each branch on the moving platform along the X-axis of the fixed coordinate system. y F represents the component of the force exerted by each branch on the moving platform along the Y-axis of the fixed coordinate system. z M represents the component of the force exerted by each branch on the moving platform along the Z-axis of the fixed coordinate system. x M represents the torque component about the X-axis of a fixed coordinate system generated by the forces acting on each of the branches relative to the reference point of the moving platform. y M represents the torque component about the Y-axis of the fixed coordinate system generated by the forces of each branch relative to the reference point of the moving platform. z This represents the torque component about the Z-axis of a fixed coordinate system generated by the forces of each branch relative to the reference point of the moving platform. Therefore, based on this static equilibrium relationship, the pose parameters of the moving platform can be solved quickly and accurately under static conditions where there are no external force disturbances, reducing the computational complexity of pose solving and improving the reliability of the pose analysis results.

[0017] In one possible implementation, the number of branches is three, and the coordinates of the six suspension points of the three branches on the static platform and the moving platform in the three-dimensional coordinate system are respectively defined as O1(o 1x o 1y o 1z O2 (o) 2x o2y o 2z O3 (o) 3x o 3y o 3z ), I1 (i 1x i 1y i 1z ), I2 (i 2x i 2y i 2z ), and I3 (i 3x i 3y i 3z The parallel device satisfies:

[0018] Wherein, n1, n2, and n3 represent the tensile coefficients of the three branches, respectively; g x g represents the projection component of the external resultant force acting on the moving platform onto the X-axis of the fixed coordinate system. y g represents the projection component of the external resultant force acting on the moving platform onto the Y-axis of the fixed coordinate system. z This represents the projection component of the external resultant force acting on the moving platform onto the Z-axis of the fixed coordinate system; m x The expression represents the projection component of the external resultant torque acting on the moving platform onto the X-axis of the fixed coordinate system, m. y This represents the projection component of the external resultant torque acting on the moving platform onto the Y-axis of the fixed coordinate system, m. z This represents the projection component of the external resultant torque acting on the moving platform onto the Z-axis of the fixed coordinate system. Therefore, based on the number of equations above, six unknowns can be solved. For example, n1, n2, and n3 are related to the tension of each branch and can be three unknowns to be solved; the other three unknowns are selected from the coordinate components (a total of 18 components) of the six suspension points of the three branches 30. This allows for the simultaneous solution of branch tension and suspension point positions, achieving integrated calculation of structural geometry and stress, facilitating iterative optimization design, and ensuring a definite and unique solution to the equations, avoiding singular problems such as underdetermined multiple solutions or overdetermined no solution.

[0019] Secondly, this application provides a mechanical device, including a moving platform, a docking device, and a parallel device as described above. The docking device is connected to the moving platform. Thus, by connecting the moving platform to the parallel device and then connecting the docking device to the moving platform, the docking device can achieve multi-degree-of-freedom flexible attitude adjustment and impact buffering during docking, adaptively compensate for docking deviations, and improve docking accuracy and success rate. Simultaneously, it can optimize load distribution, adjust system stiffness, and balance compliant docking with rigid locking, enhancing the stability, reliability, and environmental adaptability of the mechanical device. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the parallel device and moving platform provided in the embodiments of this application; Figure 2 A schematic diagram of the branch and displacement adjustment mechanism of the parallel device provided in the embodiments of this application; Figure 3 This is a schematic diagram of the parallel device and moving platform provided in the embodiments of this application; Figure 4 A schematic diagram of the structure of the mechanical equipment provided in the embodiments of this application.

[0022] Explanation of reference numerals in the attached figures: 1000 - Mechanical equipment; 100 - Docking device; 200 - Moving platform; 300 - Parallel connection device; 10-Static platform; 11-Platform base; 12-Support frame; 121-Support rod; 122-Connecting rod; 30-Branch; 31-Telescopic adjustment mechanism; 311-Adjustment part; 312-Push-pull part; 32-Elastic element; 33-First connecting joint; 331-First connector; 332-Second connector; 34-Second connecting joint; 35-Damper; 36-Mechanical measuring instrument; 37-Pulley; 38-Cable; 40 - Displacement adjustment mechanism; 41 - Fixed part; 42 - Moving part; 50-Pose measuring device; X - First direction; Y - Second direction; Z - Third direction. Detailed Implementation

[0023] To enable those skilled in the art to better understand the present application, the technical solutions of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present application.

[0024] The terms “first,” “second,” etc. (if present) in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a particular order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms “comprising” and “having,” and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0025] In existing flexible suspension parallel devices, the pose of the moving platform requires an additional pose measuring device to measure, and the pose of the moving platform is inconvenient to adjust in three-dimensional space, thus failing to meet the application scenario requirements for high-precision detection and control of the pose of the moving platform.

[0026] This application provides a parallel device to address the technical problem in existing flexible suspension parallel devices where the pose of the moving platform requires an additional pose measuring device, and the pose adjustment of the moving platform in three-dimensional space is inconvenient, thus failing to meet the requirements of high-precision detection and control of the moving platform's pose. In other words, the parallel device provided in this application achieves precise adjustment of the moving platform's position by setting six adjustable degrees of freedom. Specifically, the pose of the moving platform in space is calculated based on the spatial equilibrium force system formed by the tension of the elastic element and the gravity of the suspended module. Furthermore, the extension and retraction of the elastic element and the suspension position of the support chain can be adjusted through a telescopic adjustment mechanism and a displacement adjustment mechanism, allowing for flexible adjustment of the moving platform's pose as needed. This reduces the difficulty of pose calculation and improves the accuracy of the moving platform's pose adjustment, meeting the application scenarios where the parallel device needs to isolate vibration and achieve precise alignment under static equilibrium.

[0027] In this embodiment, the parallel device can be applied to mechanical equipment (i.e., semiconductor equipment) in the semiconductor field. Semiconductor equipment can be, but is not limited to, etching machines, wafer inspection equipment, ion implanters, deposition equipment, or metrology equipment. In some embodiments, the parallel device can also be applied to mechanical equipment in other fields such as automobiles, construction machinery, optical measurement equipment, and optical transmission equipment.

[0028] Example 1 Please see Figure 1 , Figure 1This is a schematic diagram of the parallel device 300 and the moving platform 200 provided in the embodiments of this application. The parallel device 300 includes a stationary platform 10, at least three branches 30, and at least three displacement adjustment mechanisms 40. The first end of each branch 30 is connected to the stationary platform 10, and the second end of each branch 30 is used to connect to the moving platform 200. Each branch 30 includes an elastic element 32 and a telescopic adjustment mechanism 31. The elastic element 32 is disposed between the stationary platform 10 and the moving platform 200. The telescopic adjustment mechanism 31 is connected to the elastic element 32 and is used to adjust the telescopic amount of the elastic element 32. The number of displacement adjustment mechanisms 40 corresponds one-to-one with the number of branches 30. Each displacement adjustment mechanism 40 is connected to the stationary platform 10 and / or the moving platform 200 and is used to adjust the suspension position of the corresponding branch 30 on the stationary platform 10 and / or the moving platform 200.

[0029] The parallel device 300 provided in this application embodiment is based on the adjustable extension and retraction of the elastic element 32 and the adjustable suspension position of the branch 30. This allows the extension adjustment mechanism 31 to change the magnitude of the tension or pressure exerted by the branch 30 on the moving platform 200 by adjusting the extension and retraction of the elastic element 32 in each branch 30. Furthermore, the displacement adjustment mechanism 40 can actively adjust the suspension point position of the branch 30 on the static platform 10 and / or the moving platform 200 to change the direction of the tension or pressure exerted by the branch 30. This allows the device to calculate the spatial pose of the moving platform 200 based on the spatial equilibrium force system formed by the tension of at least three elastic elements 32 and the gravity of the suspended module, and enables flexible adjustment of the moving platform 200 as needed. The pose calculation is reduced, and the pose adjustment accuracy of the moving platform 200 is improved. On the other hand, the elastic element 32 in the branch chain 30 can realize the flexible connection between the moving platform 200 and the stationary platform 10, so that the parallel device 300 has under-constraint characteristics when the moving platform 200 docks with the docking device. This enables the moving platform 200 to actively adapt to the position of the docking device, improves the reliability and smoothness of docking between the moving platform 200 and the docking device, and enables the elastic element 32 to attenuate the docking impact force when the moving platform 200 docks with the docking device and to block the transmission of vibration to the moving platform 200 after docking with the docking device, thus improving the attitude stability of the moving platform 200 after docking with the docking device.

[0030] like Figure 1As shown, for example, the number of branches 30 can be set to three. The number of displacement adjustment mechanisms 40 can also be set to three. Thus, on the one hand, the parallel device 300 of the three branches 30 realizes the six degrees of freedom (the degree of freedom to adjust the extension and retraction height of the three elastic elements 32 and the degree of freedom to adjust the position of the suspension points of the three branches 30) attitude positioning of the moving platform 200 in space, and the three connection points of the three branches 30 and the moving platform 200 determine a plane, improving the accuracy and stability of the horizontal, pitch and other posture adjustments of the moving platform 200; on the other hand, the setting of three branches 30 makes it easy to set the parallel device 300 in a non-over-constrained or low-over-constrained state, reducing the impact of manufacturing errors, thermal deformation, etc. The resulting internal stress, combined with the elastic element 32, allows the elastic deformation of the elastic element 32 to more naturally absorb geometric errors, improving the smoothness and stability of the motion. Furthermore, the extension and retraction of the elastic element 32 in each branch 30, along with the suspension position, can be independently adjusted, making the force control of the telescopic adjustment mechanism 31 direct and decoupled, eliminating the need for complex force distribution algorithms and simplifying calculation and control. On the other hand, the arrangement of three branches 30 reduces redundant constraints and singular configurations, improving the overall stiffness, load-bearing capacity, and vibration damping effect of the mechanism. The three branches 30 can be arranged at 120° intervals, ensuring balanced force distribution on the moving platform 200 and preventing uneven loading. Of course, in one possible implementation, the number of branches 30 can be four or five, and the number of displacement adjustment mechanisms 40 can also be four or five.

[0031] It should be noted that the static platform 10, also known as the fixed platform, refers to the load-bearing component in the parallel device 300 that is rigidly fixed to the ground and / or the frame. The static platform 10 is used to support the parallel drive elements and each branch 30, and remains stationary relative to the frame or ground during the movement of the parallel device 300. The moving platform 200 refers to the end effector of the parallel device 300, that is, the motion output component of the parallel device 300. Specifically, the moving platform 200 refers to the end output platform in the parallel device 300 that is jointly pulled by multiple independent branches 30 and can realize spatial translation and / or rotational motion within the workspace. The pose of the moving platform 200 includes the spatial position and the orientation of the moving platform 200. The spatial position of the moving platform 200 refers to the spatial coordinates of the moving platform 200 in a fixed coordinate system. The orientation of the moving platform 200 refers to the rotational orientation of the moving platform 200 relative to the fixed coordinate system.

[0032] For example, the ends of multiple branches 30 furthest from the stationary platform 10 are respectively hinged to the moving platform 200. Under the coordinated action of the drive units of each branch 30, the moving platform 200 can achieve multi-degree-of-freedom spatial motion relative to the stationary platform 10. The suspension position refers to the connection position of the branch 30 relative to the stationary platform 10 or the moving platform 200. For example, one end of the branch 30 is hinged to the moving platform 200, and the other end of the branch 30 is hinged to the stationary platform 10. In the parallel device 300 configured as a multi-axis parallel structure (i.e., a non-rope parallel structure), if the displacement adjustment mechanism 40 is provided on the stationary platform 10, the suspension position can refer to the hinge point position of the branch 30 relative to the stationary platform 10; if the displacement adjustment mechanism 40 is connected to the moving platform 200, the suspension position can refer to the hinge point position of the branch 30 relative to the moving platform 200. Specifically, each branch 30 has two suspension points, and the six suspension points of the three branches 30 are defined as O1, O2, O3, I1, I2, and I3. Pose characterizes the spatial relative relationship between a coordinate system and a reference coordinate system. For example, taking the moving platform 200 relative to the stationary platform 10, pose refers to the position and orientation of the moving platform 200 relative to the stationary platform 10 in three-dimensional space; where the position parameter corresponds to the coordinate values ​​of the preset reference point of the moving platform 200 in three-dimensional space, and the orientation parameter corresponds to the rotational deflection angle of the moving platform 200 around the spatial coordinate axis. The combination of position and orientation can completely characterize the entire spatial state of the moving platform 200.

[0033] like Figure 1 As shown, exemplarily, the telescopic adjustment mechanism 31 includes an adjustment section 311 and a push-pull section 312. One end of the push-pull section 312 is movably connected to the adjustment section 311, and the other end of the push-pull section 312 is connected to the elastic member 32. The direction of movement of the push-pull section 312 relative to the adjustment section 311 is parallel to the extension and retraction direction of the elastic member 32. Thus, on the one hand, the output capacity of the telescopic adjustment mechanism 31 is entirely converted into axial tension or pressure on the elastic member 32, reducing the risk of lateral force on the elastic member 32, extending the lifespan of the elastic member 32, and improving the dynamic stability and response speed of the adjustment; on the other hand, the displacement of the adjustment section 311 is proportional to the extension and retraction of the elastic member 32, simplifying the closed-loop control algorithm of the suspension force of the parallel device 300. It should be noted that the push-pull section 312 refers to the structure that pushes the elastic member 32 to extend and retract.

[0034] like Figure 1As shown, the telescopic adjustment mechanism 31 can be configured as a manual adjustment mechanism, thereby reducing the cost of the displacement adjustment mechanism 40 and decreasing its space occupancy and weight. Exemplarily, the manual adjustment mechanism can be configured as a screw mechanism. Specifically, the screw mechanism includes a lead screw and a nut screwed to the lead screw, so that the suspension position of the branch chain 30 can be changed by adjusting the position of the nut relative to the lead screw. In other words, the adjustment part 311 is configured as a nut, and the push-pull part 312 is configured as a lead screw. In one possible embodiment, the manual adjustment mechanism can also be configured as a graded adjustment mechanism. The graded adjustment mechanism includes a limiting part with multiple limiting holes and a limiting pin, so that the suspension position of the branch chain 30 can be changed by adjusting the position of the limiting pin in the limiting hole on the limiting part. In other words, the adjustment part 311 is configured as a limiting pin, and the push-pull part 312 is configured as a limiting part with multiple limiting holes. In another possible implementation, the telescopic adjustment mechanism 31 can also be configured as, but is not limited to, an electric adjustment mechanism, a pneumatic adjustment mechanism, or a hydraulic adjustment mechanism, thereby improving the adjustment efficiency, adjustment force range, and adjustment accuracy of the telescopic adjustment mechanism 31.

[0035] Please refer to the following: Figure 1 and Figure 2 , Figure 2 This is a schematic diagram of the structure of the branch 30 and the displacement adjustment mechanism 40 of the parallel device 300 provided in this application embodiment. The displacement adjustment mechanism 40 includes a fixed part 41 and a movable part 42. The fixed part 41 is fixedly connected to the static platform 10 and / or the moving platform 200. The movable part 42 is fixedly connected to the branch 30, and the connection position of the movable part 42 on the fixed part 41 is adjustable. Therefore, based on the adjustable connection position of the movable part 42 relative to the fixed part 41, on the one hand, the layout of the branch chain 30 can be changed without disassembling the moving platform 200 or the stationary platform 10, adapting to the parallel device 300 to suspend docking devices of different loads or sizes, and improving the flexibility of adjusting the suspension position of the branch chain 30 on the stationary platform 10 and / or the moving platform 200; on the other hand, errors such as machining deviations of the moving platform 200 or the stationary platform 10, inconsistent lengths of multiple branch chains 30, and installation tilt can be compensated by fine-tuning the position of the movable part 42 relative to the fixed part 41, optimizing the force distribution of the branch chain 30, and by adjusting the suspension position of the branch chain 30, the lever arm, driving direction, and working space of the parallel device 300 can be changed, reducing the risk of the parallel device 300 being in an odd configuration, improving the rigidity, load-bearing stability, and adjustment accuracy of the moving platform 200, while simplifying the assembly and debugging process and enhancing the versatility and applicability of the mechanism.

[0036] like Figure 2As shown, exemplarily, the displacement adjustment mechanism 40 can also be configured as a manual adjustment mechanism, thereby reducing the cost of the displacement adjustment mechanism 40 and decreasing its space occupancy and weight. The structure of the displacement adjustment mechanism 40 can be the same as or similar to the structure of the telescopic adjustment mechanism 31, that is, the fixed part 41 can be configured as a lead screw and the movable part 42 can be configured as a nut; or, the movable part 42 can be configured as a limiting pin and the fixed part 41 can be configured as a limiting part with multiple limiting holes. Of course, in some embodiments, the structure of the displacement adjustment mechanism 40 can be different from the structure of the telescopic adjustment mechanism 31, and this application embodiment does not specifically limit it. In another possible implementation, the displacement adjustment mechanism 40 can also be configured as, but is not limited to, an electric adjustment mechanism, a pneumatic adjustment mechanism, or a hydraulic adjustment mechanism, thereby improving the adjustment efficiency, adjustment force range, and adjustment accuracy of the displacement adjustment mechanism 40.

[0037] like Figure 1 As shown, it can be understood that the movable part 42 moves relative to the fixed part 41 in three-dimensional space along the first direction X, the second direction Y, or the third direction Z, wherein the first direction X, the second direction Y, and the third direction Z are perpendicular to each other, that is, the first direction X, the second direction Y, and the third direction Z are three orthogonal directions. Therefore, the movable part 42 can move in multiple directions (up, down, left, right, front, and back) in three-dimensional space relative to the fixed part 41. On the one hand, it can flexibly adjust the connection points between the branch chain 30 and the static platform 10 and the moving platform 200 according to assembly requirements and working conditions, making the layout of the branch chain 30 more reasonable and the force more balanced. Furthermore, the movable part 42 can drive the branch chain 30 to make fine adjustments in multiple directions (up, down, left, right, front, and back) relative to the static platform 10 or the moving platform 200, thereby compensating for processing and assembly errors and optimizing the force distribution of the branch chain 30 and the posture of the moving platform 200. On the other hand, by changing the spatial position of the action point of the branch chain 30, the initial posture of the moving platform 200, the lever arm of the branch chain 30, and the stiffness of the parallel device 300 can be adjusted, expanding the working space, reducing singular configurations, improving the stability of movement and load-bearing capacity, and facilitating assembly, debugging, and subsequent maintenance.

[0038] This description uses the connection point between the displacement adjustment mechanism 40 and the moving platform 200 or the stationary platform 10 as an example, with the origin of the three-dimensional coordinate system as the reference point. In other words, the initial connection position between the fixed part 41 and the moving part 42 is the origin of the three-dimensional coordinate system. The initial connection position can be factory-set by the parallel device 300 or customized; this embodiment does not specifically limit it. For accuracy, all references to direction herein should be taken as... Figure 1 For reference, Figure 1For example, the first direction X is the extension direction of the X-axis, which is the front-back direction (where the positive X-axis is front); the second direction Y is the extension direction of the Y-axis, which is the left-right direction (where the positive Y-axis is right); and the third direction Z is the extension direction of the Z-axis, which is the up-down direction (where the positive Z-axis is up). In other words, the third direction Z is the arrangement direction of the static platform 10 and the moving platform 200. For ease of description, the up-down, left-right, and front-back directions in this application are relative positions and do not constitute a limitation on implementation.

[0039] like Figure 1 and Figure 2 As shown, the movable part 42 moves in a straight line relative to the fixed part 41. This allows the suspension point of the branch chain 30 to be continuously and smoothly adjusted along a preset straight trajectory. The linear translational movement has clear limits and no deviation in adjustment, enabling precise changes to the mounting point of a single branch chain. This allows for simultaneous changes in the spatial angle and force arm between each branch chain 30. Combined with the elastic element and displacement adjustment mechanism 40, this achieves refined and continuous control of the position and overall support stiffness of the moving platform 200. The displacement adjustment mechanism 40 has low movement resistance and reliable positioning, stably balancing the load on each branch chain 30 and improving the adjustable range and accuracy of the moving platform 200's posture adjustment.

[0040] For example, the movable part 42 is capable of translating relative to the fixed part 41 in the vertical direction. In other words, the movable part 42 moves vertically relative to the fixed part 41 in three-dimensional space along the third direction Z. Therefore, by adjusting the connection position of the movable part 42 relative to the fixed part 41 in the third direction Z, on the one hand, adjusting the suspension position of the vertically adjustable branch 30 can maintain the horizontal suspension position of the branch 30, making the geometric configuration of the parallel device 300 stable and preventing additional lateral offset or torque from being introduced due to horizontal displacement, thus reducing the difficulty of linearly adjusting the attitude of the moving platform 200; on the other hand, compared with the horizontal adjustment method of the suspension position of the branch 30 in multiple directions, the guide structure of the vertically adjustable suspension position of the branch 30 is easier to process, lock and position, with small gaps and good rigidity, and is less prone to loosening or shifting, thus improving the repeatability and reliability of the suspension position adjustment of the branch 30; furthermore, the vertical adjustment path of the suspension position of the branch 30 is simple and clear, and is less likely to interfere with the surrounding structure of the parallel device 300, improving the compactness and safety of the overall layout of the parallel device 300, and the overall height adjustment of the parallel device 300 can quickly adapt to the docking assembly of docking devices of different sizes. Of course, in one possible implementation, the movable part 42 can also translate relative to the fixed part 41 in three-dimensional space along the first direction X (i.e., the front-back direction); or, the movable part 42 can also translate relative to the fixed part 41 in three-dimensional space along the second direction Y (i.e., the left-right direction).

[0041] like Figure 1 and Figure 2 As shown, the branch chain 30 also includes a first connecting joint 33 and a second connecting joint 34. The first connecting joint 33 connects the elastic element 32 and the static platform 10, and has at least two rotational degrees of freedom. The second connecting joint 34 connects the elastic element 32 and the moving platform 200, and has at least two rotational degrees of freedom. Thus, on the one hand, by allowing both ends of the elastic element 32 to rotate arbitrarily, the first connecting joint 33 can convert the bending moment transmitted from the static platform 10 into a bending moment or torque at the first connecting joint 33, and the second connecting joint 34 can convert the bending moment transmitted from the moving platform 200 into a bending moment or torque at the second connecting joint 34. This allows the elastic element 32 to primarily bear the axial tension or compression, ensuring that the force and extension of the elastic element 32 conform to Hooke's Law (i.e., force is proportional to displacement). This allows for adjusting the extension of the elastic element 32 to change the suspension force, simplifying the control algorithm, improving force control accuracy, and extending the service life of the elastic element 32 and the extension adjustment mechanism 31. On the one hand, the first connecting joint 33 and the second connecting joint 34, which have multiple degrees of freedom, provide kinematic tolerance, so that the first connecting joint 33 and the second connecting joint 34 can absorb the small deviations between the motion law of the branch 30 and the natural motion trajectory of the moving platform 200, thereby reducing the risk of self-locking or vibration of the parallel device 300 during high-speed and high-precision operation, and reducing the precision requirements of machining and assembly difficulty. On the other hand, the first connecting joint 33 provides at least two rotational degrees of freedom, so that the branch 30 can swing flexibly at the root of the stationary platform 10, which provides a kinematic basis for the moving platform 200 to achieve a larger tilt angle or a more complex spatial trajectory.

[0042] It should be noted that if two components can move relative to each other in two or more unrelated directions, then the joint is called a joint with at least two rotational degrees of freedom. For example, the first connecting joint 33 is a connecting member that connects the elastic member 32 and the moving platform 200, such that the elastic member 32 has at least two rotational degrees of freedom relative to the moving platform 200; the second connecting joint 34 is a connecting member that connects the elastic member 32 and the stationary platform 10, such that the elastic member 32 has at least two rotational degrees of freedom relative to the stationary platform 10.

[0043] Understandably, since the elastic element 32 mainly bears axial tension and compression in the branch 30, the elastic element 32 of each branch 30 can have its extension and contraction precisely controlled by the telescopic adjustment mechanism 31. The displacement adjustment mechanism 40 can actively set and lock the coordinates of the suspension connection points of the branch 30 on the static platform 10 and the moving platform 200. Therefore, based on the determined controllable extension and contraction of the elastic element 32 and the determined coordinates of the suspension points, a force balance equation can be established, thereby achieving an analytical solution for the pose of the moving platform 200. In other words, since the moving platform 200 has only one set of poses that satisfies force and torque balance, the pose of the moving platform 200 does not require external measurement and can be directly and accurately calculated from the various parameters of the parallel device 300. In addition, the length of the branch 30 is controlled by the telescopic adjustment mechanism 31 and the suspension point is controlled by the displacement adjustment mechanism 40, thereby realizing the decoupling adjustment of the six degrees of freedom of the parallel device 300. Furthermore, with the compliance characteristics of the elastic element 32 and the stable constraint of the multiple branches 30, the driving platform 200 can reach and stabilize at any position in three-dimensional space.

[0044] like Figure 1 As shown, the static equilibrium equations of the spatial force system of the moving platform 200 in the parallel device 300 in three-dimensional space include six independent equations, which respectively balance the projections of stress on the three orthogonal coordinate axes and the moments about these three axes. Specifically, the algebraic sum of the components of all forces in the X-axis direction is zero, the algebraic sum of the components of all forces in the Y-axis direction is zero, the algebraic sum of the components of all forces in the Z-axis direction is zero, the algebraic sum of the moments of all forces about the X-axis is zero, the algebraic sum of the moments of all forces about the Y-axis is zero, and the algebraic sum of the moments of all forces about the Z-axis is zero. Therefore, the condition for force equilibrium is: ∑F x =0, ∑F y =0, and ∑F z =0. The condition for torque equilibrium is: ∑M x =0,∑M y =0, and ∑M z =0. Where, F x F represents the component of the force exerted by each branch 30 on the moving platform 200 along the X-axis of the fixed coordinate system. y F represents the component of the force exerted by each branch 30 on the moving platform 200 along the Y-axis of the fixed coordinate system. z M represents the component of the force exerted by each branch 30 on the moving platform 200 along the Z-axis of the fixed coordinate system. x M represents the torque component about the fixed coordinate system generated by the forces acting on each branch 30 relative to the reference point of the moving platform 200. y M represents the torque component about the Y-axis of the fixed coordinate system generated by the forces acting on each branch 30 relative to the reference point of the moving platform 200. zThis represents the torque component about the Z-axis of the fixed coordinate system generated by the forces acting on each branch 30 relative to the reference point of the moving platform 200. Therefore, based on this static equilibrium relationship, the pose parameters of the moving platform 200 can be solved quickly and accurately under static conditions where there are no external force disturbances, reducing the computational complexity of pose solving and improving the reliability of the pose analysis results.

[0045] The elastic force of each branch (30) satisfies the relationship based on Hooke's Law: F=k L, where k is the elastic coefficient of elastic element 32. L represents the extension / contraction of the elastic element 32. Since the gravity and center of gravity of the moving platform 200 are known or measurable, the elastic coefficient and extension / contraction of the elastic element 32 are known or measurable, and the direction of the tension in the branch 30 is uniquely determined by the coordinates of the suspension point and the length of the branch 30, the unknowns in the above equations only involve the pose parameters of the moving platform 200. Therefore, the pose of the moving platform 200 can be uniquely solved analytically.

[0046] Define the coordinates of the six suspension points of the three branches 30 on the static platform 10 and the moving platform 200 in the three-dimensional coordinate system as O1 (o 1x o 1y o 1z O2 (o) 2x o 2y o 2z O3 (o) 3x o 3y o 3z ), I1 (i 1x i 1y i 1z ), I2 (i 2x i 2y i 2z ), and I3 (i 3x i 3y i 3z Based on the conditions of force equilibrium and torque equilibrium, the following set of equations can be derived (1).

[0047] (1) Assuming that the elastic element 32 is not under tension, the original length between the two suspension points of each branch 30 is... L The elastic modulus of elastic element 32 is k After being stretched, the elongation of elastic element 32 is... ΔL The distance between point I and point O is represented by a vector. model This indicates that the elastic force of the elastic element 32 in each branch 30 satisfies the following relationship based on Hooke's Law: Among them: [This is a phrase that doesn't need to be translated but can be left as is]n It is the tensile coefficient, and Among them, the elastic force of the elastic element 32 of the branch 30 satisfies the following set of equations (2).

[0048] (2) Based on the simultaneous operation of equation system (1) and equation system (2), equation system (3) is obtained: (3) Where n1, n2, and n3 represent the tensile coefficients of the three branches 30, respectively; g x The projection component of the external resultant force acting on the moving platform 200 onto the X-axis of the fixed coordinate system is represented by g. y g represents the projection component of the external resultant force acting on the moving platform 200 onto the Y-axis of the fixed coordinate system. z This represents the projection component of the external resultant force acting on the moving platform 200 onto the Z-axis of the fixed coordinate system; m x This represents the projection component of the external resultant torque acting on the moving platform 200 onto the X-axis of the fixed coordinate system, in m. y This represents the projection component of the external resultant torque acting on the moving platform 200 onto the Y-axis of the fixed coordinate system, m. z This represents the projection component of the external resultant torque acting on the moving platform 200 onto the Z-axis of the fixed coordinate system. Based on the number of equations above, six unknowns can be solved. For example, n1, n2, and n3 are related to the magnitude of the tension and can be three unknowns to be solved; the other three unknowns are selected from the coordinate components (a total of 18 components) of the six suspension points of the three branches 30. This allows for the simultaneous solution of the branch tension and suspension point positions, achieving integrated calculation of structural geometry and force, facilitating iterative optimization design, and ensuring a definite and unique solution to the equations, avoiding singular problems such as underdetermined multiple solutions or overdetermined no solution. For example, the Z-axis components of suspension points O1, O2, and O3 are selected as variable (adjustable) unknowns. Since the gravity G(g) of the suspended object... x g y g z The centroid M(mx, my, mz) and the center of gravity M(mx, my, mz) are known or measurable quantities; the suspension point I1(i 1x i 1y i 1z ), suspension point I2(i 2x i 2y i 2z ), suspension point I3(i 3x i 3y i 3z The coordinates of point O1 can be obtained through attitude measurement and are known or measurable quantities; the suspension point O1(o 1x o 1y o1z ), suspension point O2(o 2x o 2y o 2z ), suspension point O3 (o 3x o 3y o 3z The X and Y components of the equation are known quantities; by substituting these unknown quantities into the system of equations, we can solve for n1, n2, n3, and o. 1z o 2z o 3z Furthermore, according to the formula = / ( + The elongations ΔL1, ΔL2, and ΔL3 of the three elastic elements 32 can be calculated, and the results can be compared with those obtained from the comparison. 1z o 2z o 3z By calculating the changes in ΔL1, ΔL2, and ΔL3 from the initial state, the adjustment amount of the telescopic adjustment mechanism 31 of each branch 30 on the telescopic extension of the elastic element 32 can be obtained.

[0049] like Figure 2 As shown, exemplarily, the first connecting joint 33 can be configured as a ball-joint universal joint. Thus, the ball-joint universal joint provides multiple rotational degrees of freedom, including the rotational degree of freedom of the branch 30 about its own axis, allowing the elastic element 32 to rotate unrestrainedly about its own axis. This reduces the influence of lateral forces, bending moments, or torques on the elastic element 32, ensuring that the direction of the suspension force of the moving platform 200 is the same as the extension direction of the branch 30. This improves the accuracy and reliability of the telescopic adjustment mechanism 31 in adjusting the telescopic amount of the elastic element 32, extends the lifespan of the elastic element 32, and improves the structural compactness of the branch 30. Exemplarily, the first connecting joint 33 includes a first connector 331 and a second connector 332. One of the first connector 331 and the second connector 332 is provided with a spherical groove, and the other of the first connector 331 and the second connector 332 is provided with a spherical protrusion that rotatably engages with the spherical groove, thereby giving the first connector 331 more than two rotational degrees of freedom relative to the second connector 332. The first connecting member 331 and the second connecting member 332 are configured as rigid structures. It should be noted that a ball joint refers to a universal transmission device that uses a spherical joint as its core to realize continuous rotation of two shafts at any angle in space and transmit torque and motion. For example, a ball joint includes a ball head and a ball seat that contacts the spherical surface of the ball head.

[0050] In one possible implementation, the first connecting joint 33 can also be configured as a non-spherical universal joint. Therefore, the multiple rotational degrees of freedom provided by the non-spherical universal joint do not include the rotational degree of freedom of the branch 30 about its own axis, allowing the non-spherical universal joint to be supported by bearings. This improves the non-spherical universal joint's ability to withstand bending moments and axial forces, reduces wear and extends its lifespan, lowers the risk of joint disengagement, and allows the elastic element 32 to freely deflect and oscillate, improving the determinism and reliability of the elastic element 32's torsional posture. The first connecting joint 33 has at least two orthogonal rotational degrees of freedom. Specifically, the first connecting member 331 can rotate relative to the second connecting member 332 about a first axis and a second axis, wherein the first axis is perpendicular to the second axis. This avoids the branch 30 exhibiting a singular posture where the direction of the suspension force of the moving platform 200 differs from the extension direction of the branch 30, and eliminates the need to process redundant joint angle parameters in the control algorithm, greatly simplifying the solution process for forward and inverse kinematics. Of course, in one possible implementation, the first and second axes intersect and are not perpendicular. It should be noted that a non-spherical universal joint refers to a general term for universal joints that transmit torque and motion through fork-shaped, pin-shaped, shaft-shaped, slider-shaped, or cage-like structures, without relying on spherical joints to achieve spatial rotational transmission; for example, a cross-shaft universal joint.

[0051] like Figure 2 As shown, exemplarily, the structure of the second connecting joint 34 can be the same as that of the first connecting joint 33. For example, the first connecting joint 33 can be configured as a ball-joint universal joint, and the second connecting joint 34 can also be configured as a ball-joint universal joint; or, the first connecting joint 33 can also be configured as a non-ball-joint universal joint, and the second connecting joint 34 can also be configured as a non-ball-joint universal joint. The structure of the second connecting joint 34 can be referred to the specific description of the structure of the first connecting joint 33 above, and will not be repeated here. Of course, in one possible implementation, the structure of the first connecting joint 33 can be different from that of the second connecting joint 34. For example, the first connecting joint 33 can be configured as a ball-joint universal joint, and the second connecting joint 34 can also be configured as a non-ball-joint universal joint; or, the first connecting joint 33 can be configured as a non-ball-joint universal joint, and the second connecting joint 34 can also be configured as a ball-joint universal joint. It should be noted that the structures of the first connecting joint 33 and the second connecting joint 34 can be set according to actual conditions, and the embodiments of this application do not impose specific limitations.

[0052] like Figure 1 and Figure 2As shown, the telescopic adjustment mechanism 31 is connected to the elastic member 32 and the first connecting joint 33; and / or, the telescopic adjustment mechanism 31 is connected between the elastic member 32 and the second connecting joint 34. Thus, by placing the telescopic adjustment mechanism 31 between the first connecting joint 33 and the second connecting joint 34, the length adjustment of the branch 30 is decoupled from its posture movement. That is, the telescopic adjustment mechanism 31 is only responsible for the extension and retraction of the elastic member 32 without affecting the rotation of the first connecting joint 33 and the second connecting joint 34, improving the adjustment accuracy of the telescopic adjustment mechanism 31 for the extension and retraction of the elastic member 32. Meanwhile, the first connecting joint 33 and the second connecting joint 34 are responsible for the oscillation of the branch 30 without affecting the extension and retraction of the elastic member 32, thus adapting to the posture changes of the moving platform 200. For example, the telescopic adjustment mechanism 31 can be connected between the elastic member 32 and the first connecting joint 33, so that the displacement, inertia, and vibration of the telescopic adjustment mechanism 31 during adjustment are not easily directly transmitted to the moving platform 200, thus improving the compliance and stability of the movement of the moving platform 200. On the other hand, the elastic member 32 is positioned close to the moving platform 200, which can shorten the force transmission path of the moving platform 200 and improve the vibration isolation, buffering, and force control response speed of the elastic member 32. Of course, in some embodiments, the telescopic adjustment mechanism 31 can also be connected between the elastic member 32 and the second connecting joint 34, so that the elastic member 32 is closer to the stationary platform 10 relative to the moving platform 200, thereby improving the response to vibrations transmitted from the stationary platform 10, adapting to the vibration scenarios of the stationary platform 10, and the telescopic adjustment mechanism 31 being close to the moving platform 200 can improve the rigidity of the moving platform 200 side, improve the positioning rigidity of the moving platform 200, and optimize the center of mass of the moving platform 200.

[0053] like Figure 1 and Figure 2As shown, the displacement adjustment mechanism 40 is connected between the first connecting joint 33 and the static platform 10; and / or, the displacement adjustment mechanism 40 is connected between the second connecting joint 34 and the moving platform 200. Therefore, by placing the displacement adjustment mechanism 40 between the first connecting joint 33 and the static platform 10, or between the second connecting joint 34 and the moving platform 200, on the one hand, it avoids the lateral offset, lateral force, or additional bending moment generated by the displacement adjustment mechanism 40 when adjusting the suspension posture of the branch chain 30 from directly acting on the elastic element 32, thereby improving the reliability of the elastic element 32 under axial force. On the other hand, it avoids the problem of synchronous adjustment of the suspension position and length of the branch chain 30 caused by the functional coupling between the displacement adjustment mechanism 40 and the telescopic adjustment mechanism 31, thereby improving the adjustment accuracy of the suspension position of the branch chain 30 by the displacement adjustment mechanism 40 and reducing the difficulty of posture calculation of the moving platform 200. Furthermore, placing the displacement adjustment mechanism 40 outside the first connecting joint 33 and the second connecting joint 34 can also reserve more space for the first connecting joint 33, the second connecting joint 34, and the telescopic adjustment mechanism 31, reducing the probability of motion interference, excessively long branch chain 30, structural bulkiness, and decreased stiffness. For example, in this embodiment, the displacement adjustment mechanism 40 can be connected between the first connecting joint 33 and the static platform 10. Thus, the displacement adjusted by the displacement adjustment mechanism 40 and the coordinates of the suspension point are both within a fixed coordinate system, eliminating the need for additional dynamic coordinate system transformation. This simplifies the forward and inverse kinematics models of the parallel mechanism, reduces the complexity of pose calculation, and improves position calculation efficiency and real-time control. Simultaneously, the motion, inertia, and reaction forces of the displacement adjustment mechanism 40 during the adjustment process are largely not transmitted to the moving platform 200, improving the stability and reliability of the moving platform 200's adjustment actions. Of course, in some embodiments, the displacement adjustment mechanism 40 can also be connected between the second connecting joint 34 and the moving platform 200.

[0054] like Figure 1 and Figure 2 As shown, in one possible implementation, the elastic element 32 is configured as a linear elastic element 32, thereby enabling a strictly linear relationship between the force and deformation of the branch 30, constant stiffness, and precise reset, ensuring uniform force and stable motion of the moving platform 200. Simultaneously, it simplifies the static equilibrium equations and pose calculation model, achieving a linear mapping between the deformation of the branch 30 and the pose of the moving platform 200, reducing computational complexity, and improving pose solution accuracy and real-time control. The elastic element 32 can be configured as, but is not limited to, at least one of a spring, a spring sheet, and an elastic body. For example, in this embodiment, the elastic element 32 can be configured as a spring. The elastic body can be an elastic rubber column or a polyurethane column, etc. It should be noted that a linear elastic element 32 refers to a component whose expansion and contraction are linearly related to the load on the elastic element 32, and whose deformation can be completely restored after the load is removed.

[0055] like Figure 1 and Figure 2 As shown, in one possible implementation, the parallel device 300 further includes a damper 35. The damper 35 and the elastic element 32 are separate structures, and can be connected in series, in parallel, or coaxially nested; alternatively, the damper 35 and the elastic element 32 are an integral structure. Thus, the damper 35, acting as an energy-absorbing device, can absorb vibrational energy when the parallel device 300 vibrates, thereby enabling the parallel device 300 to quickly reach a static equilibrium state and improving the anti-sway effect of the parallel device 300. Exemplarily, the damper 35 and the elastic element 32 are arranged side-by-side, allowing them to extend and retract synchronously, jointly bearing the tensile and compressive deformation of the branch 30, extending the lifespan of the elastic element 32, improving the vibration suppression effect and efficiency, improving the uniformity of force distribution and structural compactness of the branch 30, and not affecting the rotational degrees of freedom of the first connecting joint 33 and the second connecting joint 34. Specifically, one end of the elastic element 32 is connected to the telescopic adjustment mechanism 31, and the other end of the elastic element 32 is connected to the second joint 34. One end of the damper 35 is connected to the telescopic adjustment mechanism 31, and the other end of the damper 35 is connected to the second joint 34. The damper 35 can be, but is not limited to, silicone, rubber, polyurethane, damping adhesive, viscoelastic sheet, etc.

[0056] like Figure 1 and Figure 2 As shown, the parallel device 300 also includes at least three force measuring devices 36. Each force measuring device 36 is located on a corresponding branch 30. Thus, the force measuring device 36 can directly obtain the force state of the branch 30, thereby decoupling the algorithm and enabling independent control of the tension of each branch 30. This reduces force interference between different branches 30, achieves high-precision mechanical feedback and closed-loop control, and enables precise force control and structural health self-diagnosis of the parallel device 300 under complex loads. The force measuring devices 36 may include, but are not limited to, axial force sensors, joint torque sensors, and six-dimensional force sensors. Axial force sensors can be used to directly measure the tension and compression of the branch 30. Joint torque sensors can be used to measure the real-time torque values ​​generated by the first connecting joint 33 and the second connecting joint 34 during movement or under force. Six-dimensional force sensors can be used to measure the multi-directional external forces acting on the moving platform 200.

[0057] like Figure 2As shown, in one possible implementation, the parallel device 300 further includes a pose measuring device 50. The pose measuring device is mounted on the static platform 10 and is used to measure the pose of the moving platform 200. Thus, on the one hand, the pose measuring device 50 can directly obtain the pose deviation of the moving platform 200 relative to the static platform 10 without complex coordinate transformations, and avoids data noise caused by external reference installation errors, improving the accuracy and stability of pose adjustment, achieving high-precision pose feedback and closed-loop control, and realizing precise force control and structural health self-diagnosis of the parallel device 300 under complex loads; on the other hand, the pose measuring device 50 completes the pose detection of the moving platform 200 without transmitting any external force to the moving platform 200, thereby improving the performance of the parallel device 300. The device exhibits underconstrained compliant connection characteristics. Furthermore, because the pose measuring device 50 can establish a spatial position closed loop to enable the moving platform 200 to reach the desired spatial coordinates, and the force measuring device 36 can establish a force sensing closed loop to monitor the load on the branch 30 in real time, the force measuring device 36 and the pose measuring device 50 work in coordination. This allows the control system of the parallel device 300 to use pose deviation as the primary control target and mechanical data as the constraint condition, automatically recalculating the adjustment strategy until the target pose is reached under safe force conditions, thereby improving the accuracy and adaptability of fully automatic adjustment. The pose measuring device 50 can be a laser tracker, a vision measuring instrument, an infrared locator, etc. The vision measuring instrument can be, but is not limited to, a monocular vision measuring instrument, a binocular vision measuring instrument, or a multi-view vision measuring instrument. It should be noted that pose includes, but is not limited to, the position and attitude information of the moving platform 200 in space. For example, position information includes the position of the moving platform 200 in the X-axis direction, the position of the moving platform 200 in the Y-axis direction, and the position of the moving platform 200 in the Z-axis direction. Attitude information describes the rotation of the moving platform 200 in space. Depending on the application scenario and algorithm, attitude information can be represented in various ways, such as Euler angles / rotation angles, rotation matrices, or quaternions.

[0058] Example 2 Please see Figure 3 , Figure 3This is a schematic diagram of the parallel device 300 and the moving platform 200 provided in the embodiments of this application. In Embodiment 2, the structure of the parallel device 300 is similar to that of the parallel device 300 in Embodiment 1. The parallel device 300 includes a static platform 10, a moving platform 200, at least three branches 30, and at least three displacement adjustment mechanisms 40. The difference lies in that, in Embodiment 2, the structure and arrangement of the static platform 10 and the branches 30 are different from those in Embodiment 1. Specifically, in Embodiment 2, the static platform 10 includes a platform base 11 and a support frame 12. The support frame 12 is fixedly connected to the platform base 11. The branches 30 include a telescopic adjustment mechanism 31, an elastic element 32, a pulley 37, and a cable 38. The pulley 37 is connected to the end of the support frame 12 facing away from the platform base 11 and has at least two rotational degrees of freedom relative to the support frame 12. Cable 38 is wound around pulley 37 and connected between moving platform 200 and elastic member 32. The end of elastic member 32 facing away from cable 38 is connected to platform base 11 and / or support frame 12. Cable 38 is configured as a rigid rope or elastic rope. Therefore, on the one hand, the pulley 37 decouples the complex spatial motion of the moving platform 200 into the tensioning motion of the rigid rope. The cable 38 between the pulley 37 and the moving platform 200 can rotate freely around its own axis. No matter how the moving platform 200 tilts or rotates, the force transmitted to the rigid rope is always a straight force along the central axis of the rigid rope. That is, the suspension force of the parallel device 300 is always along the direction of force on the cable 38, thus realizing the change of the suspension force of the parallel device 300 by adjusting the extension and retraction of the elastic element 32 only by adjusting the extension and retraction of the telescopic adjustment mechanism 31. On the other hand, the elastic element 32 and the pulley 37 are connected to the stationary platform 10, reducing the moment of inertia of the moving platform 200 and reducing the overturning moment of the moving platform 200. Furthermore, the pulley 37 has at least two rotational degrees of freedom relative to the support frame 12, thus realizing the separation of the transmission direction and the driving direction, allowing the rigid rope to rotate freely in any direction. Regardless of the platform 200's posture, it can automatically align with the suspension force direction of the parallel device 300, reducing the risk of the rigid rope detaching from or jamming the pulley 37. Furthermore, when the cable 38 is configured as a rigid rope, it possesses good structural strength, extending its lifespan and improving the accuracy of adjusting the tension of the branch chain 30 by measuring the extension and contraction of the elastic element 32. When the cable 38 is configured as an elastic rope, it serves as both a force transmission medium and an elastic element, allowing the entire elastic rope to participate in absorbing and dissipating the impact energy generated when the platform 200 is subjected to impact, rather than concentrating it in a specific section of the branch chain 30. This improves the protection of the precision end effector on the platform 200, and allows the elastic element 32 to be replaced by the elastic rope, eliminating the rigid rope and reducing the number of components, thus simplifying assembly. For example, the platform base 11 can be the ground.One end of the elastic element 32 is fixedly connected to the telescopic adjustment mechanism 31, and the other end of the elastic element 32 is fixedly connected to the platform base 11. Of course, in some embodiments, the platform base 11 can also be a mounting base. One end of the elastic element 32 is fixedly connected to the cable 38, and the other end of the elastic element 32 is fixedly connected to the platform base 11 through the telescopic adjustment mechanism 31.

[0059] It should be noted that an elastic rope refers to a flexible component capable of withstanding axial tensile loads and exhibiting reversible elastic elongation under tensile loads. In one possible implementation, the elastic rope is configured as a linear elastic rope. Specifically, it is a flexible component capable of withstanding axial tensile loads, where the tensile deformation of the elastic rope within its elastic range is linearly proportional to the applied tension. In the parallel device 300, if the displacement adjusting mechanism 40 is connected to the stationary platform 10, the suspension position can refer to the anchor point position between the rope and the stationary platform 10; if the displacement adjusting mechanism 40 is connected to the moving platform 200, the suspension position can refer to the anchor point position between the rope and the moving platform 200.

[0060] In one possible implementation, the cable 38 and the elastic element 32 are integrated into a single component. Specifically, the branch 30 includes a telescopic adjustment mechanism 31, the elastic element 32, and a pulley 37. The pulley 37 is connected to one end of the support frame 12 facing away from the platform base 11 and has at least two rotational degrees of freedom relative to the support frame 12. The elastic element 32 is configured as an elastic rope, which is wound around the pulley 37 and connected to the moving platform 200 and the platform base 11; and / or, the elastic rope connects the moving platform 200 and the support frame 12. Therefore, by setting a pulley 37 with at least two rotational degrees of freedom in the branch chain 30, and configuring the elastic element 32 as an elastic rope wound around the pulley 37, it is possible to achieve flexible guidance and adaptive reversal of the elastic tension, so that the elastic rope only bears pure tension and is not subjected to bending and torsional loads, ensuring stable elastic characteristics; at the same time, it makes the branch chain 30 lightweight, compact and smooth in movement, expands the attitude adjustment range of the moving platform 200, improves the smoothness of movement and dynamic response speed, and enhances assembly fault tolerance, making it easy to achieve precise control of elastic preload and stiffness through the telescopic adjustment mechanism 31.

[0061] like Figure 3As shown, in one possible implementation, the displacement adjustment mechanism 40 is mounted on the support frame 12. The pulley 37 is connected to the displacement adjustment mechanism 40 and has at least two rotational degrees of freedom relative to the displacement adjustment mechanism 40; and / or, the displacement adjustment mechanism 40 is mounted on the moving platform 200. Thus, on the one hand, the displacement adjustment mechanism 40, connected to the support frame 12 of the stationary platform 10, reduces the moment of inertia of the moving platform 200, reduces the overturning moment of the moving platform 200, and facilitates maintenance of the displacement adjustment mechanism 40 and provides a convenient rope pretensioning and slack compensation mechanism; on the other hand, the displacement adjustment mechanism 40 is positioned between the moving platform 200 and the cable 38, thereby enabling the displacement adjustment mechanism 40 to be designed as a friction pair or fracture groove with a preset pressure, so that in the event of an accidental collision or overload of the moving platform 200, the enormous tension of the cable 38 will first act on the displacement adjustment mechanism 40, causing it to slip or break, thereby reducing the risk of damage to the more expensive moving platform 200. Exemplarily, the displacement adjustment mechanism 40 is fixedly mounted on the stationary platform 10.

[0062] like Figure 3 As shown, exemplarily, the support frame 12 includes at least three support rods 121, which are spaced apart and connected one-to-one with at least three branches 30. Thus, the independent arrangement of multiple support rods 121 improves installation and layout flexibility, increases maintenance and replacement efficiency, reduces the number of components, and lowers cost. The multiple support rods 121 are a modular structure.

[0063] like Figure 3 As shown, in one possible implementation, the support frame 12 further includes a connecting rod 122, which connects at least two support rods 121; and / or, the connecting rod 122 can also be connected to the support rods 121 and the platform base 11. Thus, on the one hand, the connecting rod 122 enhances the overall support stiffness of the support frame 12, improving its bending and torsional resistance, and increasing the positioning accuracy and anti-disturbance capability of the moving platform 200; on the other hand, it increases the overall frame damping of the support frame 12, improving its ability to dampen the vibration of the cable 38, reducing the risk of resonance, and making it suitable for high-speed, high-precision motion control. Exemplarily, multiple support rods 121 are connected by connecting rods 122 to form an integral structure. Multiple support rods 121 and connecting rods 122 can be integrally formed; or, multiple support rods 121 and connecting rods 122 can be independently arranged and fixedly connected. Of course, in some embodiments, some of the multiple support rods 121 are connected by connecting rods 122. In some other embodiments, the connecting rod 122 includes a first rod and a second rod. One end of the first rod is connected to a support rod 121, and the other end of the first rod is connected to a platform base 11. The second rod connects to at least two support rods 121. The first rod and the second rod are separate structures and are independently arranged; or, the first rod and the second rod are integrally formed.

[0064] Example 3 Please see Figure 4 , Figure 4 This is a schematic diagram of the structure of the mechanical device 1000 provided in this application embodiment. Based on the above embodiments, this embodiment provides a mechanical device 1000. The mechanical device 1000 includes a docking device 100, a moving platform 200, and the aforementioned parallel device 300. The parallel device 300 is connected to the moving platform 200. Exemplarily, the moving platform 200 is suspended from the stationary platform 10 by at least three branches 30. The docking device 100 is connected to the moving platform 200. Thus, by connecting the moving platform 200 to the parallel device 300, and then connecting the docking device 100 to the moving platform 200, the docking device 100 can achieve multi-degree-of-freedom flexible attitude adjustment and impact buffering during the docking process, adaptively compensate for docking deviations, and improve docking accuracy and success rate; at the same time, it can optimize load distribution, adjust system stiffness, and balance compliant docking and rigid locking, thereby enhancing the stability, reliability, and environmental adaptability of the mechanical device 1000.

[0065] For example, the mechanical device 1000 is applied in the semiconductor field. Specifically, the mechanical device 1000 can be configured as a scanning capacitance microscopy (SCM). The moving platform 200 can be configured as an interface coupler (IFC). The docking device 100 can be configured as a remotecenter compliance (RCC). One end of the RCC is fixedly connected to the IFC, and the other end of the RCC is fixedly connected to the machine tool vacuum chamber. In the mechanical device 1000, the IFC acts as an active motion carrier, with one end hinged to the stationary platform 10 via a branch 30, and the other end fixed to the RCC, achieving a rigid connection between the RCC and the machine tool vacuum chamber, transmitting the driving force of the branch 30 and the compliance compensation force of the RCC. The light source vacuum chamber is a relatively fixed end. The docking end of the light source vacuum chamber is provided with an interface point (IF point), a sealing surface, and a positioning reference for physical docking and vacuum sealing with the machine tool vacuum chamber. The pose detection module is used to acquire the coordinates and relative pose of the IF reference points of the machine tool vacuum cavity and the light source vacuum cavity in real time, and feeds the acquired pose data back to the control system. The SVI pose detection module is used to acquire the coordinates and relative pose of the IF reference points of the machine tool vacuum cavity and the light source vacuum cavity in real time, and feeds the acquired pose data back to the control system.

[0066] The above embodiments further illustrate the purpose, technical solution, and advantages of this application. It should be understood that the above descriptions are merely embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, improvements, etc., made within the principles of this application should be included within the protection scope of this application.

Claims

1. A parallel device, characterized in that, include: Static platform; At least three branches, the first end of each branch is connected to the stationary platform, the second end of each branch is used to connect to the moving platform, each branch includes an elastic element and a telescopic adjustment mechanism, the elastic element is disposed between the stationary platform and the moving platform, and the telescopic adjustment mechanism is connected to the elastic element and is used to adjust the telescopic amount of the elastic element; At least three displacement adjustment mechanisms are provided, with the number of displacement adjustment mechanisms corresponding one-to-one with the number of branches. Each displacement adjustment mechanism is connected to the static platform and / or the moving platform and is used to adjust the suspension position of the corresponding branch on the static platform and / or the moving platform.

2. The parallel device as described in claim 1, characterized in that, The displacement adjustment mechanism includes a fixed part and a movable part. The fixed part is fixedly connected to the static platform and / or the moving platform, and the movable part is fixedly connected to the branch chain. The connection position of the movable part on the fixed part can be adjusted.

3. The parallel device as described in claim 2, characterized in that, The movable part is capable of translating relative to the fixed part in a straight line.

4. The parallel device as described in any one of claims 1-3, characterized in that, The branch also includes: A first connecting joint connects the elastic member and the static platform, and the first connecting joint has at least two rotational degrees of freedom. The second connecting joint is connected between the elastic member and the moving platform, and the second connecting joint has at least two rotational degrees of freedom.

5. The parallel device as described in claim 4, characterized in that, The first connecting joint is configured as a ball joint or a non-ball joint; the second connecting joint is configured as a ball joint or a non-ball joint.

6. The parallel device as described in any one of claims 4-5, characterized in that, The telescopic adjustment mechanism is connected to the elastic element and the first connecting joint; and / or, the telescopic adjustment mechanism is connected between the elastic element and the second connecting joint; The displacement adjustment mechanism is connected between the first connecting joint and the static platform; And / or, the displacement adjustment mechanism is connected between the second connecting joint and the moving platform.

7. The parallel device as described in any one of claims 1-2, characterized in that, The static platform includes a platform base and a support frame, the support frame being fixedly connected to the platform base, and the branch also includes: A pulley is connected to one end of the support frame facing away from the platform base and has at least two rotational degrees of freedom relative to the support frame; A cable is wound around the pulley and connected between the moving platform and the elastic element. One end of the elastic element facing away from the cable is connected to the platform base and / or the support frame. The cable is configured as a rigid rope or an elastic rope.

8. The parallel device as described in any one of claims 1-2, characterized in that, The static platform includes a platform base and a support frame, the support frame being fixedly connected to the platform base, and the branch also includes: A pulley is connected to one end of the support frame facing away from the platform base and has at least two rotational degrees of freedom relative to the support frame; the elastic element is configured as an elastic rope, which is wound around the pulley and connected to the moving platform and the platform base; and / or, the elastic rope is connected to the moving platform and the support frame.

9. The parallel device as described in any one of claims 7-8, characterized in that, The displacement adjustment mechanism is disposed on the support frame, the pulley is connected to the displacement adjustment mechanism and has at least two rotational degrees of freedom relative to the displacement adjustment mechanism; and / or, the displacement adjustment mechanism is disposed on the moving platform.

10. The parallel device as described in any one of claims 7-9, characterized in that, The support frame includes at least three support rods, which are spaced apart and connected to at least three branches in a one-to-one correspondence.

11. The parallel device as described in any one of claims 1-10, characterized in that, The telescopic adjustment mechanism includes an adjustment part and a push-pull part. One end of the push-pull part is movably connected to the adjustment part, and the other end of the push-pull part is connected to the elastic element. The adjustment part is used to adjust the relative position of the push-pull part and the push-pull part. The movement direction of the push-pull part relative to the adjustment part is parallel to the telescopic direction of the elastic element.

12. The parallel device as described in any one of claims 1-11, characterized in that, The static equilibrium of the spatial force system of the moving platform in three-dimensional space satisfies the following relationship: ∑F x =0,∑F y =0,∑F z =0,∑M x =0,∑M y =0, and ∑M z =0, where F x F represents the component of the force exerted by each branch on the moving platform along the X-axis of the fixed coordinate system. y F represents the component of the force exerted by each branch on the moving platform along the Y-axis of the fixed coordinate system. z M represents the component of the force exerted by each branch on the moving platform along the Z-axis of the fixed coordinate system. x M represents the torque component about the X-axis of a fixed coordinate system generated by the forces acting on each of the branches relative to the reference point of the moving platform. y M represents the torque component about the Y-axis of the fixed coordinate system generated by the forces of each branch relative to the reference point of the moving platform. z This represents the torque component about the Z-axis of the fixed coordinate system generated by the force of each branch relative to the reference point of the moving platform.

13. The parallel device as described in claim 12, characterized in that, The number of branches is three, and the coordinates of the six suspension points of the three branches on the static platform and the moving platform in the three-dimensional coordinate system are defined as O1 (o 1x o 1y o 1z O2 (o) 2x o 2y o 2z O3 (o) 3x o 3y o 3z ), I1 (i 1x i 1y i 1z ), I2 (i 2x i 2y i 2z ), and I3 (i 3x i 3y i 3z The parallel device satisfies: Wherein, n1, n2, and n3 represent the tensile coefficients of the three branches, respectively; g x g represents the projection component of the external resultant force acting on the moving platform onto the X-axis of the fixed coordinate system. y g represents the projection component of the external resultant force acting on the moving platform onto the Y-axis of the fixed coordinate system. z This represents the projection component of the external resultant force acting on the moving platform onto the Z-axis of the fixed coordinate system; m x The expression represents the projection component of the external resultant torque acting on the moving platform onto the X-axis of the fixed coordinate system, m. y This represents the projection component of the external resultant torque acting on the moving platform onto the Y-axis of the fixed coordinate system, m. z This represents the projection component of the external resultant torque acting on the moving platform onto the Z-axis of the fixed coordinate system.

14. A mechanical device, characterized in that, include: Dynamic platform; The parallel device as described in any one of claims 1-13, wherein the parallel device is connected to the moving platform; A docking device is provided, which is docked and connected to the moving platform.

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