A method for processing a groove surface of a quartz boat without knife marks

CN122914378APending Publication Date: 2026-10-16HANGZHOU DAHE THERMO MAGNETICS CO LTD
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Patent Information

Application Number
CN202610621565.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-05-08
Publication Date
2026-10-16

AI Technical Summary

Technical Problem

[0006]本发明的目的是解决现有石英舟沟槽加工过程中,存在较多颗粒以及热量无法及时排除,导致表面产生加工刀痕的问题,而提供一种石英舟沟槽表面无刀痕加工方法,通过“先重后轻、先快后精”的加工工艺,能够有效避免加工刀痕的产生,提升产品质量

Benefits of technology

[0017] Preferably, the cutting edge is made of resin-bonded diamond grit and undergoes degreasing treatment. The resin, acting as a binder, firmly bonds the diamond grit particles, forming a uniform grinding surface, which improves processing efficiency and precision, while also enhancing the hardness and wear resistance of the cutting tool.

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Abstract

The application discloses a processing method for groove surface of a quartz boat without tool marks, and the groove surface to be processed is processed in stages, and in each stage, the groove surface is first cut horizontally and then cut longitudinally, and the processing speed is increased in the next stage relative to the previous stage; at least two stages are included: S1: first stage: first, the processing tool is fed horizontally to perform the allowance cutting processing; then, the processing tool is fed longitudinally downward to perform the allowance up-and-down cutting processing; S2: second stage: the processing tool is returned to the processing height in the first stage, and the rotating speed of the processing tool is increased; first, the processing tool is fed horizontally to perform the allowance cutting processing; then, the processing tool is fed longitudinally downward to perform the allowance up-and-down cutting processing. Through the multi-stage step-by-step processing and the processing technology of 'first heavy and then light, first fast and then accurate', the generation of the surface tool marks is effectively avoided, and the processing quality of the product is greatly improved.
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Description

Technical Field

[0001] This invention relates to the field of quartz product processing technology, specifically to a method for machining the grooved surface of a quartz boat without tool marks. Background Technology

[0002] During the existing quartz boat groove processing, obvious tool marks remain on the groove surface after processing. As a result, even after the quartz boat product is fired, tool marks are still present on the groove surface, which cannot meet the requirements for high-precision use.

[0003] For example, Chinese patent document CN223507431U discloses a special machine for grooving semiconductor extended quartz boats, including an extended longitudinal base and a gantry bracket fixed on the longitudinal base. The longitudinal base is provided with a longitudinally movable worktable, and a grooving mechanism is provided above the worktable. The grooving mechanism is connected to a drive mechanism that drives it to lift, move laterally, and is fixed on the gantry bracket. The grooving mechanism includes a grooving cutter. The rear end of the worktable can be moved to the front side of the grooving cutter, and the front end of the worktable can be moved to the rear side of the grooving cutter.

[0004] The above technical solution significantly increases the range of motion of the worktable and workpiece by extending the longitudinal base, which can complete the groove processing of the extended quartz boat in one go, and can greatly improve processing efficiency and the consistency and stability of product quality.

[0005] However, during the process of completing the groove machining of the elongated quartz boat in one go, there is still a problem that tool marks are caused by the inability to dissipate a large number of particles and heat in time. Summary of the Invention

[0006] The purpose of this invention is to solve the problem that in the existing quartz boat groove processing process, there are many particles and heat that cannot be dissipated in time, resulting in processing marks on the surface. The invention provides a quartz boat groove surface processing method without processing marks. Through the processing technology of "heavy first and light later, fast first and precise later", the generation of processing marks can be effectively avoided, thus improving product quality.

[0007] The technical solution adopted by this invention to achieve its objective is: a method for machining the surface of a quartz boat groove without tool marks, wherein the surface of the groove to be machined is machined in stages, and each stage employs transverse cutting followed by longitudinal cutting, with each subsequent stage using a speed-increasing cutting method relative to the previous stage; it includes at least the following two stages: S1: First stage: First, feed the machining tool laterally to perform cutting with a margin; then, feed the machining tool vertically downward to perform cutting with a margin. S2: Second stage: Return the machining tool to the machining height of the first stage and increase the speed of the machining tool; first, feed the machining tool laterally for zero-reserve cutting; then, feed the machining tool longitudinally downwards for zero-reserve up and down cutting.

[0008] This method for machining grooves on quartz boats without tool marks employs a multi-stage, step-by-step machining process. Following a "heavy-to-light, fast-to-precise" approach, the first stage rapidly removes most of the excess material, leaving a uniform and small allowance for the subsequent stage. The later stage increases the machining speed, resulting in lower and more stable cutting forces, effectively reducing vibration and achieving more precise dimensions and a smoother surface. This effectively avoids surface tool marks and significantly improves product quality. The staged machining method greatly improves machining efficiency while maintaining accuracy. Layered cutting, starting horizontally and then vertically, with pre-reserved machining allowance, reduces cutting forces and thermal stress in each cut, helping to maintain the integrity of the groove edges and reduce micro-chipping.

[0009] Preferably, the first stage in step 1 includes the following steps: S11: the machining tool is fed laterally along the groove axis at a speed of 2500 to 5000 rpm and then cuts the surface to be machined, and the cutting is carried out to a position 0.1 to 0.5 mm away from the final surface machining dimension; S12: Move the cutting tool downwards along the longitudinal direction of the groove, and cut the surface to be machined at a feed rate of 1mm / min to 5mm / min, cutting to a position 0.1 to 0.5mm away from the final machining dimension of the upper and lower surfaces.

[0010] Preferably, the second stage in step 2 includes the following steps: S21: The machining tool retracts to its initial height, and the rotational speed of the machining tool is increased by at least 500 revolutions. S22: The machining tool is fed laterally along the groove axis at a speed of 3000 to 5500 rpm to cut the surface to be machined and machine to the final surface size; S23: Move the cutting tool downwards along the longitudinal direction of the groove, and cut the surface to be machined at a feed rate of 1mm / min to 5mm / min until the final dimensions of the upper and lower surfaces are reached.

[0011] As a preferred option, when the machining allowance in the first stage is large, corresponding machining stages are added, with the rotational speed of the machining tool in each subsequent stage increasing stepwise from the previous stage. Machining stages can be added based on the product's machining allowance, thus achieving a machining process with decreasing allowance at each point, preventing premature tool wear or chipping. The increased rotational speed in each subsequent stage, compared to the previous stage, results in a much smaller cutting depth, minimizing impact and wear on the machining tool, significantly improving tool durability, effectively protecting the tool, and extending its lifespan.

[0012] Preferably, each machining stage includes both transverse cutting and longitudinal cutting.

[0013] Preferably, the machining tool includes a tool body, with a machining edge smaller than the machining surface of the groove provided on the outer circumference of the tool body. For machining processes that prioritize "heavy-to-light" and "fast-to-precise" machining, a dedicated machining tool is designed with the area of ​​the machining edge smaller than the machining surface area of ​​the groove to be machined. This provides sufficient lateral and longitudinal cutting space for the machining tool while facilitating cutting and heat dissipation, thus ensuring machining quality.

[0014] Preferably, a tool shaft mounting hole is provided at the center of the tool body, and a tool body annular groove is provided between the outer side of the tool shaft mounting hole and the cutting edge. Abrasive powder and debris generated during the machining of quartz grooved rods can be quickly carried out through the tool body annular groove as the machining tool rotates, greatly reducing the repeated crushing and accumulation of debris in the groove, preventing increased machining resistance, heat buildup, and surface scratches. Simultaneously, only the cutting edge contacts the machined surface of the groove during machining, significantly reducing frictional heat, which helps control the machining temperature and protects the machining tool and the product.

[0015] Preferably, an inclined cutting edge is provided between the cutting edge and the annular groove of the tool body, with the included angle between the two inclined cutting edge surfaces being 30 to 60 degrees. The inclined cutting edge facilitates effective cutting of the surface to be machined and avoids interference between the cutting edge and other surfaces of the groove.

[0016] Preferably, an inclined surface of the annular groove is provided between the cutter body annular groove and the cutter body on one side of the cutter shaft mounting hole, and the included angle between the two inclined surfaces of the annular groove is 30 to 60 degrees.

[0017] Preferably, the cutting edge is made of resin-bonded diamond grit and undergoes degreasing treatment. The resin, acting as a binder, firmly bonds the diamond grit particles, forming a uniform grinding surface, which improves processing efficiency and precision, while also enhancing the hardness and wear resistance of the cutting tool.

[0018] The beneficial effects of this invention are as follows: The method for machining the grooved surface of a quartz boat without tool marks involves multi-stage, step-by-step machining. Using a "heavy-to-light, fast-to-precise" machining process, the first stage quickly removes most of the excess material, leaving a uniform and small allowance for the subsequent stage. The subsequent stage, by increasing the machining speed, results in smaller and more stable cutting forces, effectively reducing vibration and achieving more precise dimensions and a smoother surface. This effectively avoids the formation of surface tool marks, greatly improving product machining quality and significantly increasing machining efficiency.

[0019] By employing layered cutting—first cutting laterally and then vertically—and allowing for machining allowances, the cutting force and thermal stress of a single cut can be reduced, helping to maintain the integrity of the groove edges and reduce micro-chipping. Dividing the machining process into multiple stages facilitates centralized control of parameters at critical final allowances and allows for inspection or adjustment between stages, reducing the risk of directly machining to the final dimensions. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of a machining tool used in this invention.

[0021] Figure 2 This is a side view of the machining tool used in this invention.

[0022] Figure 3 yes Figure 2 Sectional view of AA.

[0023] Figure 4 This is a schematic diagram of a quartz groove rod according to the present invention.

[0024] Figure 5 This is a schematic diagram of a machining tool used to process a quartz grooved rod in Embodiment 1 of the present invention.

[0025] Figure 6 yes Figure 5 The front view.

[0026] Figure 7 yes Figure 6 BB section view.

[0027] Figure 8 It is a drawing of the processed product in the existing technology.

[0028] Figure 9 This is a drawing of the processed product of this invention.

[0029] Figure 10 This is a schematic diagram of a quartz groove rod in Example 5. In the figure: 1. Machining tool, 11. Tool body, 12. Tool shaft mounting hole, 13. Machining cutting edge, 14. Tool body annular groove, 15. Cutting edge inclined surface, 16. Annular groove inclined surface; 2. Quartz boat groove bar to be processed, 21. Groove, 22. Groove non-mounting surface. Detailed Implementation

[0030] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Component structures not specifically described in the present invention adopt common prior art. Example 1:

[0031] In this embodiment, a method for machining the surface of grooves on a quartz boat without tool marks is provided. This method is applicable to the non-mounted surfaces of various grooves on a quartz boat bar without tool marks. It can be used to machine a single groove or to machine several parallel grooves at the same point.

[0032] The surface of the groove to be machined is processed in stages, with each stage employing a transverse cutting followed by a longitudinal cutting, and each subsequent stage using a speed-increasing cutting method relative to the previous stage; it includes at least the following two stages: Step 1: First stage: First, feed the machining tool laterally to perform cutting with allowance; then, feed the machining tool vertically downward to perform cutting with allowance both vertically and horizontally. The first phase specifically includes the following steps: S11: The machining tool is fed laterally along the groove axis at a speed of 2500 to 5000 rpm to cut the surface to be machined, and the cutting tool is machined to a position 0.1 to 0.5 mm away from the final surface machining dimension; S12: Move the cutting tool downwards along the longitudinal direction of the groove, and cut the surface to be machined at a feed rate of 1mm / min to 5mm / min, cutting to a position 0.1 to 0.5mm away from the final machining dimension of the upper and lower surfaces.

[0033] Step 2: Second stage: Return the machining tool to the machining height of the first stage and increase the speed of the machining tool; first, feed the machining tool laterally for zero-reserve cutting; then, feed the machining tool longitudinally downwards for zero-reserve up and down cutting.

[0034] The second phase specifically includes the following steps: S21: The machining tool retracts to its initial height, and the rotational speed of the machining tool is increased by at least 500 revolutions. S22: The machining tool is fed laterally along the groove axis at a speed of 3000 to 5500 rpm to cut the surface to be machined and machine to the final surface size; S23: Move the cutting tool downwards along the longitudinal direction of the groove, and cut the surface to be machined at a feed rate of 1mm / min to 5mm / min until the final dimensions of the upper and lower surfaces are reached.

[0035] When the machining allowance is large in the first stage, the number of machining stages is increased accordingly, and the rotational speed of the machining tool in the subsequent stage is increased stepwise based on the previous stage. Each machining stage includes transverse cutting and longitudinal cutting.

[0036] In this embodiment, the processing of the non-mounted surface on a single groove is used as an example for explanation. The structure of the quartz groove rod is as follows: Figure 4 As shown.

[0037] To address the issue of surface tool marks, a groove machining tool 1 was designed. (See [reference]) Figure 1 , Figure 2 , Figure 3 It includes a cutter body 11, a cutter shaft mounting hole 12 is provided at the center of the cutter body 11, a machining cutting edge 13 smaller than the groove machining surface is provided on the outer circumference of the cutter body 11, and a cutter body annular groove 14 is provided between the outer side of the cutter shaft mounting hole 12 and the machining cutting edge 13.

[0038] The annular groove 14 on the cutter body allows abrasive powder and debris generated during the machining of quartz grooved bars to be quickly carried out through the groove as the cutting tool rotates. This significantly reduces the repeated crushing and accumulation of debris within the groove, preventing increased machining resistance, heat buildup, and surface scratches. Simultaneously, the design of the annular groove drastically reduces the actual contact area between the cutter body and the groove, essentially limiting contact to the cutting edge. This significantly reduces frictional heat, facilitating temperature control and protecting both the cutting tool and the product.

[0039] The machining surface of the cutting edge is smaller than the area of ​​the groove to be machined, ensuring that only the cutting edge participates in cutting during the machining process, and other parts of the tool body will not rub or interfere with the sidewall of the groove, thus achieving high-precision dimensions and a good sidewall machining surface.

[0040] The specific structure of the machining tool can be designed and matched according to different grooves. In this embodiment, for example, the thickness of the tool body 11 is 4mm, the thickness of the tool body annular groove 14 is 2mm, and the thickness of the machining cutting edge 13 is 3mm, with a width of 1.75mm. A cutting edge inclined surface 15 is provided between the machining cutting edge and the tool body annular groove, and the included angle α between the two cutting edge inclined surfaces is 60 degrees. The total width of the tool body inclined surface and the machining cutting edge is 4mm, which is less than the width of the groove to be machined.

[0041] An inclined surface 16 is also provided between the cutter body annular groove and the cutter body on one side of the cutter shaft mounting hole, and the included angle β between the two inclined surfaces 16 is 60 degrees. The width of the cutter body annular groove is 36mm.

[0042] The machining tool is made of resin-bonded diamond grit and undergoes degreasing treatment after the tool is manufactured.

[0043] The design structure of the grooving tool reduces the tool's machining surface area, making it smaller than the groove surface on the product. This increases the space for the tool to move up and down on the groove surface, and also allows for the effective and timely removal of machining particles and heat.

[0044] The design structure of the grooving tool effectively solves the chip removal and heat dissipation problems in the grooving process of quartz bar grooves made of hard and brittle materials. At the same time, the non-full-size cutting edge ensures machining accuracy and effectively controls manufacturing costs, making it particularly suitable for the mass production of parts with high requirements for grooving of quartz boat bars.

[0045] When in use, the cutting tool is mounted on the cutter shaft of the grooving equipment, which can be an existing grooving machine. Example 2:

[0046] See Figure 5 , Figure 6 , Figure 7 A method for machining the grooved surface of a quartz boat without tool marks is disclosed. This method employs a three-stage, step-by-step machining process. Each stage utilizes a transverse-then-longitudinal cutting method, and a speed-increasing cutting method is used between the first and second stages, and between the second and third stages, thereby achieving tool mark-free machining. The specific steps are as follows: Step 1: Install the machining tool 1 on the cutter shaft of the grooving equipment; Step 2: Install the quartz boat groove bar 2 to be processed in the corresponding position on the grooving equipment. Specifically, it can be clamped and positioned using the quartz boat groove bar clamp before being installed on the grooving equipment.

[0047] Step 3: Start the grooving equipment and feed the cutting tool 1 laterally (axis of the grooving bar) at a speed of 3500 rpm to cut the surface of the part and process it to a distance of 0.5 mm from the final processing dimension.

[0048] Step 4: Move the machining tool 1 downward (radial of the groove bar) and cut at a feed rate of 5 mm / min until it reaches a position 0.5 mm away from the final machining dimension.

[0049] Step 5: Return the tool to its initial height, adjust the machining tool speed to 4000 rpm, and feed the machining tool 1 laterally (axis of the groove bar) at a speed of 4000 rpm to cut the surface of the part, and machine to a distance of 0.3 mm from the final machining dimension.

[0050] Step 6: Move the machining tool 1 downward (radial of the groove bar) and cut at a feed rate of 5 mm / min until it reaches a position 0.3 mm away from the final machining dimension.

[0051] Step 7: Return the tool to its initial height, adjust the machining tool speed to 4500 rpm, feed laterally (groove bar axis) and cut the surface of the part until it is close to the final surface.

[0052] Step 8: Move the tool downwards (radial to the groove bar) and cut at a feed rate of 5 mm / min until the final surface is reached.

[0053] Step 9: Complete the groove machining and retract the tool.

[0054] In this embodiment, in the first stage, the machining tool first feeds laterally at a speed of 3500 rpm and then cuts the surface of the part to be machined until it is 0.5 mm away from the final surface. Then it moves downward and cuts at a feed speed of 5 mm / min, cutting the remaining material at the position 0.5 mm away from the final surface.

[0055] In the second stage, after the first stage of machining is completed, the machining tool returns to its initial height. The machining tool first feeds laterally at a speed of 4000 rpm and then cuts the surface of the workpiece until it is 0.3 mm away from the final surface. Then it moves downward and cuts up and down at a feed speed of 5 mm / min, cutting the remaining material at the position 0.3 mm away from the final surface.

[0056] In the third stage, after the second stage of machining is completed, the machining tool returns to its initial height, and the speed of the machining tool is increased by 500 revolutions to a speed of 4500 revolutions. The remaining 0.3mm allowance is machined along the same trajectory as in the second stage until the final surface is reached.

[0057] In other embodiments, the number of processing stages can be set in layers according to the required dimensional allowance.

[0058] By using a staged machining process on the surface of the groove to be machined, and employing a transverse-to-longitudinal cutting method in each stage, with the subsequent stage using a speed-increasing cutting method compared to the previous stage, the generation of machining tool marks is effectively avoided, thus improving the machining quality. Example 3:

[0059] In this embodiment, a method for machining the grooved surface of a quartz boat without tool marks is described. This method employs a two-stage machining process, with each stage using a transverse-then-longitudinal cutting method. A speed-increasing cutting method is used between the first and second stages to achieve tool mark-free machining. The specific steps are as follows: Step 1: Install the machining tool 1 on the cutter shaft of the grooving equipment; Step 2: Install the quartz boat groove bar 2 to be processed in the corresponding position on the grooving equipment. Specifically, it can be clamped and positioned using the quartz boat groove bar clamp before being installed on the grooving equipment.

[0060] Step 3: Start the grooving equipment and feed the cutting tool 1 laterally (axis of the grooving bar) at a speed of 3200 rpm to cut the surface of the part and process it to a distance of 0.4 mm from the final processing dimension.

[0061] Step 4: Move the machining tool 1 downward (radial of the groove bar) and cut at a feed rate of 5 mm / min until it reaches a position 0.4 mm away from the final machining dimension.

[0062] Step 5: Return the tool to its initial height, adjust the machining tool speed to 3700 rpm, feed laterally (groove bar axis) and cut the surface of the part until it is close to the final surface.

[0063] Step 6: Move the tool downwards (radial to the groove bar) and cut at a feed rate of 5 mm / min until the final surface is reached.

[0064] Step 7: Complete the groove machining and retract the tool.

[0065] In this embodiment, in the first stage, the machining tool first feeds laterally at a speed of 3200 rpm and then cuts the surface of the part to be machined until it is 0.4 mm away from the final surface. Then it moves downward and cuts up and down at a feed speed of 2 mm / min, cutting the remaining material at the position 0.4 mm away from the final surface.

[0066] In the second stage, after the first stage of machining is completed, the machining tool returns to its initial height, and the speed of the machining tool is increased by 500 revolutions to a speed of 3700 revolutions. The remaining 0.4mm allowance is machined along the same trajectory as in the first stage until the final surface is reached.

[0067] By using a staged machining process on the surface of the groove to be machined, and employing a transverse-to-longitudinal cutting method in each stage, with the subsequent stage using a speed-increasing cutting method compared to the previous stage, the generation of machining tool marks is effectively avoided, thus improving the machining quality. Example 4:

[0068] In this embodiment, a method for machining the grooved surface of a quartz boat without tool marks is described. This method employs a two-stage machining process, with each stage using a transverse-then-longitudinal cutting method. Between the first and second stages, a speed-increasing cutting method is used to achieve tool mark-free machining. The specific steps are as follows: Step 1: Install the machining tool 1 on the cutter shaft of the grooving equipment; Step 2: Install the quartz boat groove bar 2 to be processed in the corresponding position on the grooving equipment. Specifically, it can be clamped and positioned using the quartz boat groove bar clamp before being installed on the grooving equipment.

[0069] Step 3: Start the grooving equipment and feed the cutting tool 1 laterally (axis of the grooving bar) at a speed of 3000 rpm to cut the surface of the part and process it to a distance of 0.3 mm from the final processing dimension.

[0070] Step 4: Move the machining tool 1 downward (radial of the groove bar) and cut at a feed rate of 3 mm / min until it reaches a position 0.3 mm away from the final machining dimension.

[0071] Step 5: Return the tool to its initial height, adjust the machining tool speed to 3500 rpm, feed laterally (along the groove axis) to cut the surface of the part, and machine to the distance from the final surface.

[0072] Step 6: Move the tool downwards (radial to the groove bar) and cut at a feed rate of 3 mm / min until the final surface is reached.

[0073] Step 7: Complete the groove machining and retract the tool.

[0074] In this embodiment, in the first stage, the machining tool first feeds laterally at a speed of 3000 rpm and then cuts the surface of the part to be machined until it is 0.3 mm away from the final surface. Then it moves downward and cuts up and down at a feed speed of 3 mm / min, cutting the remaining material at the position 0.3 mm away from the final surface.

[0075] In the second stage, after the first stage of machining is completed, the machining tool returns to its initial height, and the speed of the machining tool is increased by 500 revolutions to a speed of 3500 revolutions. The remaining 0.3mm allowance is machined along the same trajectory as in the first stage until the final surface is reached.

[0076] By using a staged machining process on the surface of the groove to be machined, and employing a transverse-to-longitudinal cutting method in each stage, with the subsequent stage using a speed-increasing cutting method compared to the previous stage, the generation of machining tool marks is effectively avoided, thus improving the machining quality. Example 5:

[0077] A method for machining the grooved surface of a quartz boat without tool marks is disclosed. This method employs a staged machining process, with each stage using a transverse-to-longitudinal cutting method. Between the first and second stages, a velocity-increasing cutting method is used to achieve tool mark-free machining. The specific steps are as follows: Step 1: Install the machining tool 1 on the cutter shaft of the grooving equipment; Step 2: Install the quartz boat groove bar 2 to be processed in the corresponding position on the grooving equipment. Specifically, it can be clamped and positioned using the quartz boat groove bar clamp before being installed on the grooving equipment.

[0078] Step 3: Start the grooving equipment and feed the cutting tool 1 laterally (axis of the grooving bar) at a speed of 2800 rpm to cut the surface of the part and process it to 0.2 meters away from the final processing dimension.

[0079] Step 4: Move the machining tool 1 downward (radial of the groove bar) and cut at a feed rate of 2 mm / min until it reaches a position 0.2 mm away from the final machining dimension.

[0080] Step 5: Return the tool to its initial height, adjust the machining tool speed to 3300 rpm, feed laterally (along the groove axis) to cut the surface of the part, and machine to the distance from the final surface.

[0081] Step 6: Move the tool downwards (radial to the groove bar) and cut at a feed rate of 2 mm / min until the final surface is reached.

[0082] Step 7: Complete the groove machining and retract the tool.

[0083] In this embodiment, in the first stage, the machining tool first feeds laterally at a speed of 2800 rpm and then cuts the surface of the part to be machined until it is 0.2 mm away from the final surface. Then it moves downward and cuts up and down at a feed speed of 2 mm / min, cutting the remaining material at the position 0.2 mm away from the final surface.

[0084] In the second stage, after the first stage of machining is completed, the machining tool returns to its initial height, and the speed of the machining tool is increased by 500 revolutions to a speed of 3300 revolutions. The remaining 0.2mm allowance is machined along the same trajectory as in the first stage until the final surface is reached.

[0085] By using a staged machining process on the surface of the groove to be machined, and employing a transverse-to-longitudinal cutting method in each stage, with the subsequent stage using a speed-increasing cutting method compared to the previous stage, the generation of machining tool marks is effectively avoided, thus improving the machining quality. Example 6:

[0086] like Figure 10As shown, in order to further improve processing efficiency, multiple grooves can be processed simultaneously using a grooving device. Specifically, multiple processing tools can be set on the cutter shaft to achieve simultaneous processing of multiple grooves.

[0087] The processing method described in the above embodiments produces a product whose non-mounted surface, i.e., the processed surface, is as follows: Figure 9 The product shown has no obvious tool marks. Even after fine firing, the product, which was processed without tool marks, also shows no obvious tool marks. Figure 8 Compared to existing products with obvious tool marks on the machined surface, this technology greatly improves the processing quality of the product.

[0088] This method for machining the grooved surface of quartz boats without tool marks involves a first-stage machining process that quickly removes most of the excess material, leaving a uniform and well-locked allowance for the subsequent machining stage. The second stage, compared to the first, uses a higher rotational speed, resulting in lower and more stable cutting forces, effectively reducing vibration and achieving more precise dimensions and a smoother surface, thus effectively preventing surface tool marks. After precision firing, the tool-mark-free product shows no obvious tool marks, significantly improving the overall machining quality.

[0089] This method for machining the grooved surface of a quartz boat without tool marks employs a staged machining process. By prioritizing heavy-duty machining over lighter-duty, and fast-duty machining over precision machining, it significantly improves machining efficiency while ensuring accuracy. Due to the high hardness and wear resistance of the quartz groove rod, the first stage uses a relatively reasonable rotational speed to handle the main allowance, preventing premature tool wear or chipping. In the later stage, the rotational speed of the machining tool is increased, but the cutting depth is minimal, primarily focusing on finishing, resulting in minimal impact and wear on the tool. This staged machining process with different rotational speeds significantly improves tool durability, effectively protects the machining tool, and extends its lifespan.

[0090] The previous machining stage can withstand a relatively high material removal rate, quickly completing most of the work. The subsequent machining stage only requires handling a very small amount of material, greatly optimizing machining efficiency. Quartz groove rods are brittle materials, prone to chipping at the machining edges. Using layered cutting (horizontal first, then vertical) and reserving finishing allowance can reduce the cutting force and thermal stress of a single cut, helping to maintain the integrity of the groove edges and reduce micro-chipping.

[0091] Dividing the machining process into clearly defined stages facilitates centralized control of parameters at critical final allowances and allows for inspection or adjustment between stages, reducing the risk of directly machining to the final dimensions. This method for machining quartz boat grooves without tool marks effectively solves the problem of tool marks appearing on the surface due to the inability to dissipate heat and numerous particles in existing quartz boat groove machining processes.

Claims

1. A method for machining the grooved surface of a quartz boat without tool marks, characterized in that: The surface of the groove to be machined is processed in stages, with each stage employing a transverse cutting followed by a longitudinal cutting, and each subsequent stage using a speed-increasing cutting method relative to the previous stage; it includes at least the following two stages: S1: First stage: First, feed the machining tool laterally to perform cutting with a margin; then, feed the machining tool vertically downward to perform cutting with a margin. S2: Second stage: Return the machining tool to the machining height of the first stage and increase the speed of the machining tool; first, feed the machining tool laterally for zero-reserve cutting; then, feed the machining tool longitudinally downwards for zero-reserve up and down cutting.

2. The method for machining the groove surface of a quartz boat without tool marks according to claim 1, characterized in that: Step 1, first stage The process includes the following steps: S11: The machining tool is fed laterally along the groove axis at a speed of 2500 to 5000 rpm and then cuts the surface to be machined, and the cutting is carried out to a position 0.1 to 0.5 mm away from the final surface machining dimension; S12: Move the cutting tool downwards along the longitudinal direction of the groove, and cut the surface to be machined at a feed rate of 1mm / min to 5mm / min, cutting to a position 0.1 to 0.5mm away from the final machining dimension of the upper and lower surfaces.

3. The method for machining the groove surface of a quartz boat without tool marks according to claim 1, characterized in that: Step 2, the second stage, includes the following steps: S21: The machining tool retracts to its initial height, and the rotational speed of the machining tool is increased by at least 500 revolutions. S22: The machining tool is fed laterally along the groove axis at a speed of 3000 to 5500 rpm to cut the surface to be machined and machine to the final surface size; S23: Move the cutting tool downwards along the longitudinal direction of the groove, and cut the surface to be machined at a feed rate of 1mm / min to 5mm / min until the final dimensions of the upper and lower surfaces are reached.

4. The method for machining the groove surface of a quartz boat without tool marks according to claim 1, characterized in that: When the machining allowance is large in the first stage, the machining stages are increased accordingly, and the rotation speed of the machining tool in the next stage is increased stepwise based on the previous stage.

5. The method for machining the groove surface of a quartz boat without tool marks according to claim 4, characterized in that: Each machining stage includes transverse cutting and longitudinal cutting.

6. The method for machining the groove surface of a quartz boat without tool marks according to any one of claims 1 to 5, characterized in that: The machining tool includes a tool body (11) and a machining edge (13) smaller than the groove machining surface is provided on the outer circumference of the tool body (11).

7. The method for machining the groove surface of a quartz boat without tool marks according to claim 6, characterized in that: A tool shaft mounting hole (12) is provided at the center of the tool body (11), and a tool body annular groove (14) is provided between the outer side of the tool shaft mounting hole (12) and the machining cutting edge (13).

8. The method for machining the groove surface of a quartz boat without tool marks according to claim 7, characterized in that: The cutting edge (13) is provided with a cutting edge inclined surface (15) between the cutting edge (13) and the cutting edge annular groove (14), and the included angle between the two cutting edge inclined surfaces is 30 to 60 degrees.

9. The method for machining the groove surface of a quartz boat without tool marks according to claim 7, characterized in that: An inclined surface (16) of the annular groove (14) of the cutter body is provided between the cutter body and the cutter body on one side of the cutter shaft mounting hole (12), and the included angle between the two inclined surfaces of the annular groove is 30 to 60 degrees.

10. The method for machining the groove surface of a quartz boat without tool marks according to claim 6, characterized in that: The cutting edge (13) is made of resin-bonded diamond grit and is degreased.

Citation Information

Patent Citations

  • Special groove processing machine for lengthened quartz boat of semiconductor

    CN223507431U