Composite support pad for a water cutting apparatus
Patent Information
- Application Number
- CN202610875894.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-06-17
- Publication Date
- 2026-10-16
AI Technical Summary
[0003]针对背景技术中提到的现有技术存在切割过程中会损伤支撑板,造成更换成本大的问题,本发明提供了一种水切割设备的复合支撑垫板,能够降低在切割过程中的更换支撑板的成本,同时能够保证支撑板的支撑强度,减少变形风险
(1)通过将金属支撑板和防护牺牲板进行复合设置,在加工过程中利用防护牺牲板的低成本更换特性,降低生产成本,保证支撑的柔性,降低产品放置时的磕碰风险;
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Figure CN122914384A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of waterjet cutting technology, and more particularly to a composite support plate for waterjet cutting equipment. Background Technology
[0002] For example, announcement number "CN220576168U" discloses "a semiconductor substrate processing equipment," which includes a water tank, a worktable fixedly mounted on the top of the water tank, a moving mechanism and a supporting mechanism on the top of the worktable, and a laser water jet at the bottom of the moving mechanism. The laser water jet includes a fixed cylinder, and a laser emitter is fixedly mounted on the top of the inner wall of the fixed cylinder. During the cutting process of the semiconductor substrate, the semiconductor substrate needs to be fixed on a support plate before being cut by the water jet. This cutting process can cause damage to the support plate, resulting in high replacement costs. Summary of the Invention
[0003] In view of the problem mentioned in the background art that the existing technology can damage the support plate during the cutting process, resulting in high replacement costs, the present invention provides a composite support pad for water jet cutting equipment, which can reduce the cost of replacing the support plate during the cutting process, while ensuring the support strength of the support plate and reducing the risk of deformation.
[0004] To achieve the above objectives, the present invention adopts the following technical solution.
[0005] A composite support plate for a waterjet cutting device includes a metal support plate with a plurality of chip removal grooves extending through both ends of the metal support plate. A protective sacrificial plate is detachably connected to the metal support plate. The metal support plate and the protective sacrificial plate are stacked together, with the protective sacrificial plate abutting against the side of the metal support plate with the chip removal grooves. The protective sacrificial plate has a chip removal channel communicating with the chip removal grooves.
[0006] Preferably, the protective sacrificial plate includes several separate sacrificial plates, each of which has mating teeth on both sides. The mating teeth of adjacent separate sacrificial plates mesh with each other, and the heights of the meshing mating teeth are different. After the mating teeth mesh, a chip discharge channel is left.
[0007] Preferably, the split sacrificial plate includes an arc-shaped groove bottom surface, and the docking teeth include an arc-shaped end face. After the docking teeth are engaged, they form an arc-shaped chip discharge channel, and the openings at both ends of the chip discharge channel are staggered.
[0008] Preferably, the split sacrificial plate includes an arc-shaped inclined groove bottom surface, and the docking teeth include inclined end faces. After the docking teeth are engaged, they form an inclined chip discharge channel, and the openings at both ends of the chip discharge channel are staggered.
[0009] Preferably, after the individual sacrificial plates are assembled into a protective sacrificial plate, the centers of the arc-shaped groove bottom surface and the arc-shaped end surface on each of the individual sacrificial plates coincide.
[0010] Preferably, the protective sacrificial plate is bonded to a metal support plate.
[0011] Preferably, the protective sacrificial plate and the metal support plate are connected by fastening bolts.
[0012] Preferably, the chip removal groove is inclined.
[0013] Preferably, the metal support plate is provided with a positioning component, and when the protective sacrificial plate is connected to the metal support plate, the protective sacrificial plate docks with the positioning component.
[0014] Preferably, the positioning component is a truncated cone mounted on a metal support plate, and the protective sacrificial plate is provided with a conical groove capable of engaging and connecting the truncated cone.
[0015] The beneficial effects of this invention are as follows: (1) By combining the metal support plate and the protective sacrificial plate, the low-cost replacement feature of the protective sacrificial plate is utilized during the processing to reduce production costs, ensure the flexibility of the support, and reduce the risk of collision when placing the product. (2) It can adapt to the wear and tear of different separate sacrificial plates during use, avoiding the need to replace the entire protective sacrificial plates with different degrees of wear, thus reducing replacement costs; (3) By utilizing the bottom surface and end face of the arc groove, each of the separate protective plates can be directly removed without the need to remove adjacent separate protective plates simultaneously. (4) The staggered mating teeth between the individual sacrificial plates can ensure the connection stability of the individual sacrificial plates and improve the interlocking connection strength. Attached Figure Description
[0016] Figure 1 This is the first isometric view of Embodiment 1 in this invention.
[0017] Figure 2 This is a cross-sectional view of Embodiment 1 of the present invention.
[0018] Figure 3 This is the second isometric view of Embodiment 1 in this invention.
[0019] Figure 4 This is an isometric view of Embodiment 2 of the present invention.
[0020] Figure 5 This is an exploded view of Embodiment 2 of the present invention.
[0021] Figure 6This is a cross-sectional view of Embodiment 2 of the present invention.
[0022] Figure 7 This is a schematic diagram of the operation flow of Embodiment 2 in this invention.
[0023] Figure 8 This is a cross-sectional view of Embodiment 3 of the present invention.
[0024] In the picture: 1. Metal support plate; 11. Chip removal groove; 12. Frustum; 13. Reinforcing rib; 2. Protective sacrificial plate; 21. Chip removal channel; 22. Conical groove; 3. Split sacrificial plate, 31. Butt joint teeth, 32. Arc-shaped groove bottom surface, 33. Arc-shaped end face, 34. Sloping groove bottom surface, 35. Sloping end face; 4. Fastening bolts. Detailed Implementation
[0025] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.
[0026] Example 1:
[0027] like Figure 1 , Figure 2 , Figure 3 As shown, a composite support plate for a waterjet cutting device includes a metal support plate 1, on which a plurality of chip removal grooves 11 are provided. The chip removal grooves 11 penetrate through both end faces of the metal support plate 1. A protective sacrificial plate 2 is detachably connected to the metal support plate 1. The metal support plate 1 and the protective sacrificial plate 2 are stacked. The protective sacrificial plate 2 abuts against the side of the metal support plate 1 where the chip removal grooves 11 are provided. The protective sacrificial plate 2 is provided with a chip removal channel 21 that communicates with the chip removal grooves 11.
[0028] This embodiment presents a composite support plate for a waterjet cutting device. The main body comprises two core components: a metal support plate 1 and a protective sacrificial plate 2. The protective sacrificial plate 2 covers the upper surface of the metal support plate 1 and is a replaceable low-hardness material layer, forming a composite structure of "rigid support + flexible protection." This structurally addresses the inherent defects of pure wood and pure steel plate supports. The metal support plate 1 is made of low-carbon steel (such as Q235) or wear-resistant alloy steel, with a thickness of 10mm-30mm. After heat treatment, it possesses high flatness and high rigidity, providing a stable support platform and completely avoiding the problem of water absorption and deformation of wooden plates, thus ensuring the flatness requirements for quartz material cutting. The protective sacrificial plate 2 is made of rubber or a thin layer of wood, with a thickness of 2mm-5mm. It is detachably fixed to the metal support plate 1 using countersunk bolts or adhesive. As the direct contact surface for the high-pressure water jet, the protective sacrificial plate 2 acts as a buffer and provides sacrificial protection. After the water jet penetrates the quartz workpiece, it only cuts this protective layer and does not damage the metal support plate 1 below, thus protecting the flatness and integrity of the steel plate substrate. The lower surface of the metal support plate 1 is provided with crisscrossing reinforcing ribs or anti-slip textures. The reinforcing ribs enhance the overall load-bearing capacity of the steel plate substrate, preventing deformation during large-span applications. The anti-slip textures increase the friction between the pad and the equipment worktable, preventing the pad from shifting during cutting and further ensuring cutting accuracy. The upper surface of the metal support plate 1 is also provided with a chip removal groove 11, which is preferably 5mm wide and 3mm deep. This groove can promptly discharge quartz powder waste and high-pressure water generated during cutting, preventing waste from accumulating on the surface of the support plate and causing workpiece damage. It also reduces water retention on the surface of the support plate, thus reducing erosion of the protective layer and the substrate. The protective sacrificial plate 2 is a modular and detachable design. When the cut on the surface of the protective layer is too deep and affects the support, the operator only needs to loosen the countersunk bolts or peel off the adhesive to quickly replace it. The metal support plate 1 is always fixed on the equipment workbench and does not need to be disassembled, which greatly reduces the difficulty of maintenance and downtime.
[0029] In this embodiment, the composite support plate replaces the traditional wooden plate with a metal support plate 1 to achieve stable support with high rigidity and high flatness, thereby improving the accuracy of quartz waterjet cutting from the source. The replaceable protective sacrificial plate 2 solves the problem of easy damage to the pure steel plate plate and extends the service life of the core components of the plate. At the same time, the detachable structure and chip removal, as well as the enhanced auxiliary design, further optimize the operation process, reduce material replacement and labor costs, and take into account cutting quality, production efficiency and overall cost control.
[0030] In this embodiment, a chip removal channel 21 is provided on the protective sacrificial plate 2. The chip removal channel 21 is a hole structure provided on the protective sacrificial plate 2. The chip removal channel 21 is connected to the chip removal groove 11, so that during the processing, high-pressure water flow and quartz powder waste can enter the chip removal groove 11 on the metal support plate 1 through the chip removal channel 21, thereby avoiding water flow and waste from interfering with subsequent cutting processing on the protective sacrificial plate 2 and the workpiece.
[0031] Furthermore, in this embodiment, crisscrossing reinforcing ribs 13 are provided on the metal support plate 1 to improve the support strength of the metal support plate 1.
[0032] Since the protective sacrificial plate 2 is connected to the metal support plate 1, the rigidity of the metal support plate 1 restricts the structure of the sacrificial protective layer, thereby mitigating the structural expansion caused by water absorption by the wooden sacrificial protective layer and improving the stability of the support.
[0033] The protective sacrificial plate 2 is bonded to the metal support plate 1. The protective sacrificial plate 2 is bonded to the metal support plate 1 with adhesive to ensure the stability of the connection between the protective sacrificial plate 2 and the metal support plate 1.
[0034] like Figure 1 , Figure 2 , Figure 3 As shown, a fastening bolt 4 connects the protective sacrificial plate 2 and the metal support plate 1. In this embodiment, the metal support plate 1 and the protective sacrificial plate 2 are bonded together with an adhesive. The protective sacrificial plate 2 can be connected to the metal support plate 1 via the fastening bolt 4. The protective sacrificial plate 2 has a through hole, and the metal support plate 1 has a threaded hole. The fastening bolt 4 passes through the through hole in the protective sacrificial plate 2 and is threaded into the threaded hole, thereby ensuring the connection stability between the protective sacrificial plate 2 and the metal support plate 1.
[0035] The chip removal channel 11 is inclined. The chip removal channel 11 is inclined so that after the water flows into the chip removal channel 21, the water can be quickly discharged through the inclined chip removal channel 11.
[0036] like Figure 2As shown, a positioning component is provided on the metal support plate 1. When the protective sacrificial plate 2 is connected to the metal support plate 1, the protective sacrificial plate 2 docks with the positioning component. The positioning component on the metal support plate 1 includes, but is not limited to, a positioning cone, a positioning post, and a positioning block. The protective sacrificial plate 2 can dock with the positioning component, thereby ensuring that the protective sacrificial plate 2 is accurately positioned on the metal support plate 1. The positioning component is a frustum 12 provided on the metal support plate 1, and the protective sacrificial plate 2 is provided with a conical groove 22 that can engage with the frustum 12. Through the engaging connection between the frustum 12 and the conical groove 22 and the guiding effect of the inclined conical surface, the protective sacrificial plate 2 is helped to quickly dock with the metal support plate 1, achieving a preliminary pre-positioning effect, which facilitates the convenience and accuracy when replacing the protective sacrificial plate 2.
[0037] Example 2:
[0038] like Figure 4 , Figure 5 As shown, the protective sacrificial plate 2 includes several separate sacrificial plates 3. Each separate sacrificial plate 3 has mating teeth 31 on both sides. The mating teeth 31 of adjacent separate sacrificial plates 3 mesh with each other. The heights of the meshing mating teeth 31 are different, and a chip discharge channel 21 is left after the mating teeth 31 mesh. By configuring the protective sacrificial plate 2 as multiple separate sacrificial plates 3, during processing, there may be situations where only specific parts of the workpiece are cut. Therefore, during use, there may be instances where significant cutting damage occurs in localized areas of the separate sacrificial plates 3. Once the cutting damage reaches a certain level, the uniformity of support decreases, requiring replacement of the protective sacrificial plate 2 to ensure the support strength for the workpiece. Since the cutting wear is only in localized areas, replacing the entire plate would reduce the utilization rate of the protective sacrificial plate 2 during use. Therefore, to address the above problems, in this embodiment, the protective sacrificial plate 2 is configured as a combination of multiple separate sacrificial plates 3. The structure includes a mating tooth 31 on each of the separate sacrificial plates 3, located on both sides of the plate. Specifically, the mating teeth 31 on both sides are staggered and have different heights. This allows the teeth to mesh, but one side's tooth tip and groove will not engage, forming a chip discharge channel 21. This allows water and waste materials during processing to flow into the chip discharge groove 11. During use, if one of the separate sacrificial plates 3 experiences severe wear, only that plate needs to be replaced, reducing replacement costs.
[0039] like Figure 4 , Figure 5 , Figure 6As shown, the split sacrificial plate 3 includes an arc-shaped groove bottom surface 32, and the docking teeth 31 includes an arc-shaped end surface 33. After the docking teeth 31 are engaged, they form an arc-shaped chip discharge channel 21, and the openings at both ends of the chip discharge channel 21 are staggered. The split sacrificial plate 3 is provided with an arc-shaped groove bottom surface 32 and an arc-shaped end surface 33, wherein the arc-shaped groove bottom surface 32 and the arc-shaped end surface 33 are respectively the tooth groove and tooth top of the docking tooth 31. When two adjacent split sacrificial plates 3 are docked, the arc-shaped groove bottom surface 32 and the arc-shaped end surface 33 are set opposite each other. Since the arc-shaped groove bottom surface 32 and the arc-shaped end surface 33 are both arc-shaped structures, after the docking tooth 31 of the adjacent split sacrificial plates 3 are docked, a chip discharge channel 21 is formed. Since the chip discharge channel 21 is formed by the combination of the arc-shaped groove bottom surface 32 and the arc-shaped end surface 33, the chip discharge channel 21 is an arc-shaped structure. Thus, in the vertical direction, the openings at both ends of the chip discharge channel 21 are staggered. That is, when the high-speed water flow cuts vertically downward, it will not directly pass through the chip discharge channel 21 and penetrate into the metal support plate 1, thereby protecting the metal support plate 1 and extending the service life of the metal support plate 1.
[0040] Because of the arc-shaped groove bottom surface 32 and arc-shaped end surface 33, when removing the split sacrificial plate 3, preferably, it can only be removed when the curvature of the arc-shaped groove bottom surface 32 and the arc-shaped end surface 33 is matched. Furthermore, in this embodiment, a chip removal channel 21 is formed between the arc-shaped groove bottom surface 32 and the arc-shaped end surface 33, meaning there is a gap between them. The arc-shaped groove bottom surface 32 and the arc-shaped end surface 33 can be intermittently abutting or not abutting at all; that is, the chip removal channel 21 can be formed between half of the mating teeth 31, or it can be formed between all the mating teeth 31. Preferably, in this embodiment, half of the mating teeth 31 are used to form the chip removal channel 21. Because the heights of the mating teeth 31 are different, when the two split sacrificial plates... After docking, half of the docking teeth 31 will abut against each other, while the other half will not. That is, the longer docking teeth 31 will abut in the tooth groove, while the shorter docking teeth 31 will not abut in the tooth groove. This forms a chip removal channel 21 between the half of the docking teeth 31. This method can form a limiting constraint in the X and Y axes through the docking teeth 31. Since the longer docking teeth 31 abut in the tooth groove of the adjacent split sacrificial plate 3 and abut against each other, and since it is an arc-shaped structure, the bottom surface 32 of the arc groove will form a downward squeezing effect on the arc end face 33. This forms a limiting constraint in the Z axis direction between the split sacrificial plates 3, ensuring the docking stability between the split sacrificial plates 3. Furthermore, the arc-shaped chip removal channel 21 formed between the bottom surface 32 and the end surface 33 of the arc-shaped groove provides a guiding effect when water flows into the chip removal channel 21. This allows the water to form a certain initial velocity along the extension direction of the chip removal channel 11 when it enters the chip removal groove 11 from the chip removal channel 21, thereby improving the discharge efficiency of the water in the chip removal groove 11.
[0041] like Figure 7As shown, after the individual sacrificial plates 3 form the protective sacrificial plate 2, the centers of the arc-shaped groove bottom surface 32 and the arc-shaped end surface 33 on each individual sacrificial plate 3 coincide. When the split sacrificial plate 3 adopts the arc-shaped groove bottom surface 32 and arc-shaped end surface 33, since the contact area of the adjacent split sacrificial plates 3 is an arc-shaped structure, in order to ensure that the split sacrificial plate 3 can be disassembled without disassembling the adjacent split sacrificial plates 3, the centers of the arc-shaped groove bottom surface 32 and arc-shaped end surface 33 on each split sacrificial plate 3 coincide, so that the rotation path of each split sacrificial plate 3 is a concentric ring. Therefore, the rotation path of each split sacrificial plate 3 always contacts the rotation path of the adjacent split sacrificial plate 3, but does not interfere with each other. Thus, when the adjacent split sacrificial plates 3 are fixed on the metal support plate 1, the split sacrificial plates 3 on both sides can be separated. The separation path of the split sacrificial plate 3 needs to rotate around the coincident center, so that the middle split sacrificial plate 3 can be separated without affecting or interfering with the adjacent split sacrificial plates 3.
[0042] like Figure 2 As shown, a positioning component is provided on the metal support plate 1. When the protective sacrificial plate 2 is connected to the metal support plate 1, the protective sacrificial plate 2 docks with the positioning component. The positioning component on the metal support plate 1 includes, but is not limited to, a positioning cone, a positioning post, and a positioning block. The protective sacrificial plate 2 can dock with the positioning component, thereby ensuring that the protective sacrificial plate 2 is accurately positioned on the metal support plate 1. The positioning component is a frustum 12 provided on the metal support plate 1, and the protective sacrificial plate 2 is provided with a conical groove 22 that can engage with the frustum 12. Through the engaging connection between the frustum 12 and the conical groove 22 and the guiding effect of the inclined conical surface, the protective sacrificial plate 2 is helped to quickly dock with the metal support plate 1, achieving a preliminary pre-positioning effect, which facilitates the convenience and accuracy when replacing the protective sacrificial plate 2.
[0043] Example 3:
[0044] like Figure 8As shown, the split sacrificial plate 3 includes an arc-shaped inclined groove bottom surface 34, and the docking tooth 31 includes an inclined end surface 35. After the docking tooth 31 is engaged, it forms an inclined chip discharge channel 21, and the openings at both ends of the chip discharge channel 21 are staggered. The split sacrificial plate 3 is provided with an inclined groove bottom surface 34 and an inclined end surface 35, wherein the inclined groove bottom surface 34 and the inclined end surface 35 are respectively the tooth groove and tooth top of the docking tooth 31. When two adjacent split sacrificial plates 3 are docked, the docking tooth 31 of the two split sacrificial plates 3 are docked, and the inclined groove bottom surface 34 and the inclined end surface 35 are set opposite to each other. Since both the inclined groove bottom surface 34 and the inclined end surface 35 are inclined structures, after the docking tooth 31 of the adjacent split sacrificial plates 3 are docked, a chip discharge channel 21 is formed. Since the chip discharge channel 21 is formed by the combination of the inclined groove bottom surface 34 and the inclined end surface 35, the chip discharge channel 21 is an inclined structure. Thus, in the vertical direction, the two ends of the chip discharge channel 21 are staggered. That is, when the high-speed water flow cuts vertically downward, it will not directly pass through the chip discharge channel 21 and penetrate into the metal support plate 1, thereby protecting the metal support plate 1 and extending the service life of the metal support plate 1.
[0045] Because of the inclined groove bottom surface 34 and inclined end surface 35, when removing the split sacrificial plate 3, preferably, it can only be removed when the curvature of the inclined groove bottom surface 34 and the inclined end surface 35 is matched. Furthermore, in this embodiment, a chip removal channel 21 is formed between the inclined groove bottom surface 34 and the inclined end surface 35, meaning there is a gap between them. The inclined groove bottom surface 34 and the inclined end surface 35 can be intermittently abutting or not abutting at all; that is, the chip removal channel 21 can be formed between half of the mating teeth 31, or it can be formed between all the mating teeth 31. Preferably, in this embodiment, half of the mating teeth 31 are used to form the chip removal channel 21. Because the heights of the mating teeth 31 are different, when the two split sacrificial plates... After docking, half of the docking teeth 31 will abut against each other, while the other half will not. That is, the longer docking teeth 31 will abut in the tooth groove, while the shorter docking teeth 31 will not abut in the tooth groove. This forms a chip removal channel 21 between the half of the docking teeth 31. This method can form a limiting constraint in the X and Y axes through the docking teeth 31. Since the longer docking teeth 31 abut in the tooth groove of the adjacent split sacrificial plate 3 and abut against each other, and since it is an inclined structure, the bottom surface 34 of the inclined groove will form a downward squeezing effect on the inclined end face 35. This forms a limiting constraint in the Z axis direction between the split sacrificial plates 3, ensuring the docking stability between the split sacrificial plates 3. Furthermore, due to the inclined chip removal channel 21 formed between the inclined bottom surface 34 and the inclined end surface 35, when the water flows into the chip removal channel 21, it can generate a certain guiding effect when passing through the inclined chip removal channel 21. As a result, when the water flows from the chip removal channel 21 into the chip removal groove 11, it can form a certain initial velocity along the extension direction of the chip removal groove 11, thereby improving the discharge efficiency of the water in the chip removal groove 11.
[0046] like Figure 2 As shown, a positioning component is provided on the metal support plate 1. When the protective sacrificial plate 2 is connected to the metal support plate 1, the protective sacrificial plate 2 docks with the positioning component. The positioning component on the metal support plate 1 includes, but is not limited to, a positioning cone, a positioning post, and a positioning block. The protective sacrificial plate 2 can dock with the positioning component, thereby ensuring that the protective sacrificial plate 2 is accurately positioned on the metal support plate 1. The positioning component is a frustum 12 provided on the metal support plate 1, and the protective sacrificial plate 2 is provided with a conical groove 22 that can engage with the frustum 12. Through the engaging connection between the frustum 12 and the conical groove 22 and the guiding effect of the inclined conical surface, the protective sacrificial plate 2 is helped to quickly dock with the metal support plate 1, achieving a preliminary pre-positioning effect, which facilitates the convenience and accuracy when replacing the protective sacrificial plate 2.
[0047] In addition to the above embodiments, within the scope disclosed in the claims and specification of this invention, the technical features of this invention can be reselected and combined to form new embodiments. These can be achieved by those skilled in the art without creative effort. Therefore, these embodiments not described in detail in this invention should also be regarded as specific embodiments of this invention and within the protection scope of this invention.
Claims
1. A composite support plate for a waterjet cutting device, characterized in that, It includes a metal support plate, on which a plurality of chip removal grooves are provided, the chip removal grooves passing through both end faces of the metal support plate, and a protective sacrificial plate is detachably connected to the metal support plate. The metal support plate and the protective sacrificial plate are stacked, and the protective sacrificial plate abuts against the side of the metal support plate where the chip removal grooves are provided. The protective sacrificial plate is provided with a chip removal channel communicating with the chip removal grooves.
2. The composite support plate for a waterjet cutting device according to claim 1, characterized in that, The protective sacrificial plate includes several separate sacrificial plates. Each of the separate sacrificial plates has docking teeth on both sides. The docking teeth of adjacent separate sacrificial plates mesh with each other. The heights of the meshing docking teeth are different. After the docking teeth mesh, a chip discharge channel is left.
3. The composite support plate for a waterjet cutting device according to claim 2, characterized in that, The split sacrificial plate includes an arc-shaped groove bottom surface, and the docking teeth include an arc-shaped end face. After the docking teeth are engaged, they form an arc-shaped chip discharge channel, and the openings at both ends of the chip discharge channel are staggered.
4. The composite support plate for a waterjet cutting device according to claim 2, characterized in that, The split sacrificial plate includes an inclined groove bottom surface, and the docking teeth include an inclined end face. After the docking teeth are engaged, they form an inclined chip discharge channel, and the openings at both ends of the chip discharge channel are staggered.
5. A composite support plate for a waterjet cutting device according to claim 3, characterized in that, After the individual sacrificial plates are assembled into a protective sacrificial plate, the centers of the arc-shaped groove bottom surface and the arc-shaped end surface on each of the individual sacrificial plates coincide.
6. The composite support plate for a waterjet cutting device according to claim 1, characterized in that, The protective sacrificial plate is bonded to the metal support plate.
7. The composite support plate for a waterjet cutting device according to claim 1, characterized in that, The protective sacrificial plate is connected to the metal support plate by fastening bolts.
8. A composite support plate for a waterjet cutting device according to claim 1, characterized in that, The chip removal groove is inclined.
9. A composite support plate for a waterjet cutting device according to any one of claims 1-8, characterized in that, The metal support plate is provided with a positioning component. When the protective sacrificial plate is connected to the metal support plate, the protective sacrificial plate docks with the positioning component.
10. A composite support pad for a waterjet cutting device according to claim 9, characterized in that, The positioning component is a truncated cone mounted on a metal support plate, and the protective sacrificial plate is provided with a conical groove that can engage and connect the truncated cone.
Citation Information
Patent Citations
Semiconductor substrate processing equipment
CN220576168U