Getter and encapsulation method

Abstract

The application discloses an air getter and a packaging method, and belongs to the technical field of air getters. The air getter comprises a shell, an air getter material and a sealing element. The shell comprises a first supporting sheet and a second supporting sheet. The first supporting sheet is provided with a groove and an outer edge portion. The outer edge portion is arranged along the circumferential edge of the groove. The second supporting sheet is overlapped with the first supporting sheet and covers the groove. The air getter material is arranged in the groove. The sealing element is arranged between the outer edge portion and the second supporting sheet and is arranged along the circumference of the outer edge portion. The sealing element is used for sealing the gap between the outer edge portion and the second supporting sheet. The first supporting sheet and the second supporting sheet are simple in structure, light in weight and thin in thickness, the occupied space of the shell is reduced, and the processing technology of the shell is simplified. The outer edge portion is arranged along the circumferential edge of the groove, and the outer edge portion is used for bearing the sealing element, so that the sealing element is prevented from falling into the groove in the processing process and the air getter material is prevented from being polluted. The packaging process is simple, and the production efficiency is high.

Description

Technical Field

[0001] This invention relates to the field of getter technology, and in particular to a getter and encapsulation method. Background Technology

[0002] A getter is a material used to adsorb and fix gases (such as oxygen, nitrogen, water vapor, etc.). Getters can maintain the vacuum level in a system through physical or chemical adsorption, thereby improving the performance and lifespan of the equipment.

[0003] In the manufacture of getters, a sealable shell is typically used to seal the getter components under pressures lower than the operating pressure. The getter is then activated under operating conditions to allow the internal getter components to function. Due to the requirements for high vacuum and high sealing performance, the getter shell structure is usually quite complex, and the encapsulation process is cumbersome, increasing the cost of getter encapsulation and reducing production efficiency. Summary of the Invention

[0004] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes a getter with a simple encapsulation process and high production efficiency.

[0005] The present invention also provides an encapsulation method using the above-described getter.

[0006] A getter according to a first aspect of the present invention comprises:

[0007] The outer casing includes a first support piece and a second support piece. The first support piece has a groove and an outer edge, the outer edge being disposed along the periphery of the groove. The second support piece overlaps with the first support piece and covers the groove.

[0008] Air-absorbing material is disposed inside the groove;

[0009] A sealing element is disposed between the outer edge and the second support piece, and is arranged circumferentially along the outer edge, the sealing element being used to seal the gap between the outer edge and the second support piece.

[0010] The getter according to embodiments of the present invention has at least the following beneficial effects:

[0011] A groove is formed on the first support piece, which can accommodate the air-absorbing material, allowing the air-absorbing material to be stably positioned between the first and second support pieces. The first and second support pieces have a simple and thin structure, reducing the space occupied by the outer shell and simplifying the processing technology of the outer shell. The outer edge is set along the periphery of the groove and is used to support the sealing element, preventing the sealing element from falling into the groove during processing and causing contamination of the air-absorbing material. The second support piece overlaps with the first support piece and covers the groove. The gap between the outer edge of the first support piece and the second support piece is sealed by the sealing element, so as to seal the air-absorbing material inside the outer shell. The encapsulation process is simple and the production efficiency is high.

[0012] According to some embodiments of the present invention, the thickness of the first support sheet and the second support sheet is less than or equal to 1 mm.

[0013] According to some embodiments of the present invention, the thickness of the seal is less than or equal to 1 mm.

[0014] According to some embodiments of the present invention, the depth of the groove is less than the maximum width of the groove.

[0015] According to some embodiments of the present invention, along the thickness direction of the outer shell, the projection surface of the second support sheet completely covers the projection surface of the outer edge.

[0016] According to some embodiments of the present invention, the first support sheet and the second support sheet are made of an alloy composed of one or more of iron, aluminum, and copper.

[0017] A method for encapsulating a getter according to a second aspect of the present invention includes:

[0018] The first support piece is processed to form a groove on the first support piece;

[0019] The air-absorbing material is placed in the groove, and a sealing material is placed on the outer edge, wherein the melting temperature of the sealing material is lower than the melting temperature of the air-absorbing material;

[0020] The second support piece is stacked on top of the first support piece, covering the groove;

[0021] The stacked first support sheet and second support sheet are placed into the workspace, and the workspace is then evacuated.

[0022] The temperature within the working space is controlled to rise to a first preset temperature, causing the sealing material to melt and form a seal to seal the gap between the outer edge and the second support piece; the first preset temperature is higher than the melting temperature of the sealing material and lower than the melting temperature of the air-absorbing material.

[0023] According to some embodiments of the present invention, before the temperature within the controlled workspace rises to a first preset temperature, the packaging method further includes:

[0024] The temperature in the working space is controlled to rise to a second preset temperature, and the temperature in the working space is maintained at the second preset temperature for a preset time, so that the gas-absorbing material releases gas; the second preset temperature is lower than the melting temperature of the sealing material.

[0025] According to some embodiments of the present invention, the process of forming a groove on the first support sheet includes:

[0026] The first support piece is stamped to form the groove, the groove has a circular cross-sectional shape, and the depth of the groove is less than the diameter of the groove;

[0027] Alternatively, the first support piece can be stamped to form the groove, the groove having a regular polygonal cross-sectional shape and a depth less than the side length of the groove.

[0028] According to some embodiments of the present invention, the packaging method further includes:

[0029] The metal raw material is stamped to obtain the first support sheet, the thickness of the first support sheet being less than or equal to 1 mm;

[0030] The metal raw material is stamped to obtain the second support sheet, the thickness of which is less than or equal to 1 mm.

[0031] According to some embodiments of the present invention, the packaging method further includes:

[0032] The sealing raw material is hot-pressed to obtain the sealing material; the sealing material is in sheet form and the thickness of the sealing material is less than or equal to 1 mm.

[0033] According to some embodiments of the present invention, after controlling the temperature within the working space to rise to a first preset temperature, causing the sealing material to melt and form a seal to seal the gap between the outer edge and the second support piece, the encapsulation method further includes:

[0034] The temperature within the working space is controlled to decrease to a third preset temperature, causing the sealant to solidify; the third preset temperature is lower than the melting temperature of the sealing material.

[0035] The encapsulation method for getter according to embodiments of the present invention has at least the following beneficial effects:

[0036] The first preset temperature is higher than the melting temperature of the sealing material, causing the sealing material to melt at the first preset temperature to form a seal. The seal has high fluidity in the molten state, allowing it to fill the gap between the outer edge and the second support piece, thereby sealing the gap between the outer edge and the second support piece and enclosing the getter material inside the shell. The encapsulation process is simple and has high production efficiency. The surfaces of the outer edge and the second support piece are relatively flat, and the seal in the molten state has surface tension, allowing the outer edge and the second support piece to fit tightly together, improving the sealing performance of the getter.

[0037] Other features and advantages of the invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. Attached Figure Description

[0038] Figure 1 This is a schematic diagram of the overall structure of a getter according to an embodiment of the present invention;

[0039] Figure 2 This is a schematic diagram of the steps of a getter encapsulation method according to an embodiment of the present invention;

[0040] Figure 3 This is a flowchart illustrating step S100 of a getter encapsulation method according to an embodiment of the present invention.

[0041] Figure 4 This is a partial flowchart illustrating a method for encapsulating a getter according to an embodiment of the present invention.

[0042] Figure 5 This is a partial flowchart illustrating a method for encapsulating a getter according to an embodiment of the present invention.

[0043] Figure label:

[0044] Getter 10;

[0045] Outer shell 100; First support piece 110; Groove 111; Outer edge 112; Second support piece 120;

[0046] 200g of air-absorbing material;

[0047] Seal 310; Sealing material 320;

[0048] Hot pressing mold 400. Detailed Implementation

[0049] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0050] In the description of this invention, it should be understood that the terms "axial", "radial", "circumferential", "upper", "lower", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0051] In the description of this invention, the use of "first" and "second" is for the purpose of distinguishing technical features only, and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or the order of the technical features indicated.

[0052] In the description of this invention, it should be noted that terms such as "set up," "install," and "connect" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.

[0053] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are some embodiments of the present invention, not all embodiments.

[0054] Reference Figure 1 As shown, the getter provided in the embodiment of the present invention includes a shell 100, a getter material 200, and a seal 310. The shell 100 includes a first support plate 110 and a second support plate 120. The first support plate 110 has a groove 111 and an outer edge 112, with the outer edge 112 disposed along the periphery of the groove 111. The second support plate 120 overlaps with the first support plate 110 and covers the groove 111. The getter material 200 is disposed inside the groove 111. The seal 310 is disposed between the outer edge 112 and the second support plate 120 and is disposed along the circumference of the outer edge 112. The seal 310 is used to seal the gap between the outer edge 112 and the second support plate 120.

[0055] A groove 111 is formed on the first support plate 110. The recess of the groove 111 can accommodate the suction material 200, so that the suction material 200 can be stably placed between the first support plate 110 and the second support plate 120. The first support plate 110 and the second support plate 120 have simple and thin structures, reducing the space occupied by the outer shell 100 and simplifying the processing technology of the outer shell 100. The outer edge 112 is arranged along the periphery of the groove 111. The outer edge 112 is used to support the sealing element 310, preventing the sealing element 310 from falling into the groove 111 during processing and causing contamination of the suction material 200. The second support plate 120 overlaps with the first support plate 110 and covers the groove 111. The sealing element 310 seals the gap between the outer edge 112 of the first support plate 110 and the second support plate 120, so as to seal the suction material 200 inside the outer shell 100. The encapsulation process is simple and the production efficiency is high.

[0056] The outer edge 112 is arranged along the periphery of the groove 111, meaning that the suction material 200 can be added into the groove 111 from any direction, which is convenient for operation; the sealing member 310 is arranged along the periphery of the outer edge 112, and the sealing member 310 seals the gap between the outer edge 112 and the second support piece 120, so that the suction material 200 in the groove 111 is isolated from the outside world, so as to ensure the performance of the suction material 200. Due to the limited space at the opening of the groove 111, an outer edge 112 is provided along the periphery of the groove 111. The outer edge 112 can stably support the seal 310, preventing the seal 310 from falling into the groove 111 during processing and causing contamination of the getter material 200. The outer edge 112 can increase the contact area between the first support plate 110 and the seal 310, making the connection between the first support plate 110 and the second support plate 120 more reliable and improving the airtightness of the getter. The outer edge 112 and the second support plate 120 overlap to form the outer edge of the outer shell 100. Users can take the getter through the outer edge of the outer shell 100, reducing the force applied directly to the outer wall of the groove 111 when taking the getter, and reducing the risk of the getter material 200 being exposed due to damage to the outer shell 100.

[0057] In some embodiments, the thickness of the first support plate 110 and the second support plate 120 is less than or equal to 1 mm. Limiting the thickness of the first support plate 110 and the second support plate 120 results in a smaller wall thickness of the outer shell 100. The smaller the wall thickness of the outer shell 100, the easier it is to break the outer shell 100 by external force, which can reduce the difficulty of activating the getter in the usage environment. The thickness of the first support plate 110 and the second support plate 120 is less than or equal to 1 mm, which can reduce the amount of material used and save costs while ensuring the sealing effect of the outer shell 100. If the thickness of the first support plate 110 or the second support plate 120 is greater than 1 mm, the wall thickness of the outer shell will be too large, making it difficult to break the outer shell by mechanical means, resulting in difficulty in activating the getter. At the same time, the excessive thickness of the first support plate 110 or the second support plate 120 will also increase the volume and weight of the outer shell, which is not conducive to the lightweighting of the getter.

[0058] In some embodiments, the thickness of the seal 310 is less than or equal to 1 mm. By limiting the thickness of the seal 310 to a small range, the seal 310 can be more easily melted and cured during the encapsulation process, accelerating the encapsulation process and improving production efficiency. The thinner thickness, while ensuring the adhesion effect between the outer edge 112 and the second support piece 120, can reduce the risk of the sealing material 320 forming the seal 310 overflowing during processing, improving the quality of the getter. If the thickness of the seal 310 is too thick, it will result in a longer curing and melting time for the seal 310, affecting production efficiency. In addition, an excessively thick seal 310 may cause local shrinkage during the curing process, resulting in uneven curing and uneven surface of the seal 310, thereby affecting the bonding quality and sealing effect. An excessively thick seal 310 may deform under pressure, resulting in a loose seal, which in turn affects the airtightness and other properties of the getter.

[0059] In some embodiments, the depth of the groove 111 is less than the maximum width of the groove 111, so that the groove 111 forms a flat shape, which can ensure that the air-absorbing material 200 is evenly distributed inside the groove 111, so that the surface area of ​​the air-absorbing material 200 is large, which is conducive to rapid adsorption of gas and improves adsorption efficiency.

[0060] In some embodiments, the cross-sectional shape of the groove 111 is circular, that is, the opening shape of the groove 111 is circular. Given the same area, a circle has a smaller circumference compared to other shapes. The circular opening shape of the groove 111 minimizes the circumference of the opening, thereby reducing the sealing area of ​​the seal 310 and reducing the risk of air leakage. The depth of the groove 111 is less than its maximum width, that is, the depth of the groove 111 is less than its diameter.

[0061] In some embodiments, the cross-sectional shape of the groove 111 is a regular polygon, which can increase the structural stability of the groove 111 and facilitate the processing of the groove 111; generally, the cross-sectional shape of the groove 111 is a regular quadrilateral, and the depth of the groove 111 is less than the maximum width of the groove 111, that is, the depth of the groove 111 is less than the side length of the groove 111.

[0062] In some embodiments, refer to Figure 1 As shown, along the thickness direction of the outer shell 100, the projection surface of the second support piece 120 completely covers the projection surface of the outer edge 112, ensuring that the second support piece 120 can cover the groove 111, avoiding the groove 111 from being exposed due to the relative displacement between the first support piece 110 and the second support piece 120, which would affect the quality of the finished product; the second support piece 120 is stacked on the first support piece 110, and the diameter of the second support piece 120 is greater than or equal to the outer diameter of the outer edge 112, which can ensure that the second support piece 120 covers the edge of the outer edge 112, avoiding the leakage of the seal 310 material, which would affect the appearance of the getter.

[0063] In some embodiments, the shape of the second support piece 120 and the outer contour shape of the outer edge 112 are both circular, making the overall shape of the getter disc circular, reducing sharp edges and corners on the getter surface. Since the getter shell 100 has a thin wall thickness, the overall shape of the getter disc is circular, preventing damage caused by friction and collision between getters during transportation. Given the same area, a circle has a smaller circumference compared to other shapes. By making the shape of the second support piece 120 and the outer contour shape of the outer edge 112 circular, the circumference of the second support piece 120 and the length of the outer contour of the outer edge 112 can be minimized, thereby reducing the sealing area of ​​the seal 310 and reducing the risk of leakage. The diameter of the second support piece 120 is greater than or equal to the outer diameter of the outer edge 112.

[0064] In some embodiments, the outer contours of the second support piece 120 and the outer edge portion 112 are regular polygons of the same shape, which facilitates the stacking and storage of multiple getters and improves the utilization of space; generally, the outer contours of the second support piece 120 and the outer edge portion 112 are squares, and the side length of the second support piece 120 is greater than or equal to the side length of the outer edge portion 112.

[0065] In some embodiments, the first support plate 110 and the second support plate 120 are made of an alloy composed of one or more of iron, aluminum, and copper. Iron has high tensile strength and hardness, and can be processed into various shapes through cold rolling, hot rolling, stretching, etc., making it easy to form and beneficial for the processing of the first support plate 110 and the second support plate 120. Aluminum has a lower density than iron, which is beneficial for achieving a lightweight design of the outer shell 100, and it is easy to cut and form, while also having good corrosion resistance. Copper has good ductility and wear resistance, and is easy to process into thin sheets. The alloy is composed of two or three of iron, aluminum, and copper. By adjusting the composition ratio, the advantages of each material can be combined to improve the performance of the first support plate 110 and the second support plate 120. For example, iron-aluminum alloy is an alloy composed mainly of iron and aluminum, which has the characteristics of light weight, high hardness, good wear resistance, and strong impact resistance; copper-iron alloy is an alloy composed mainly of copper and iron, which has good ductility, wear resistance, and corrosion resistance; aluminum-copper alloy is an alloy composed mainly of aluminum and copper, which is light and has high tensile strength; iron-aluminum-copper alloy is an alloy composed mainly of aluminum, copper, and iron, which is lightweight and has corrosion resistance and wear resistance.

[0066] Reference Figure 2 and Figure 3 As shown, the encapsulation method for a getter according to a second aspect embodiment of the present invention includes:

[0067] Step S100: The first support piece 110 is processed to form a groove 111 on the first support piece 110;

[0068] Step S200: Place the air-absorbing material 200 into the groove 111 and place the sealing material 320 on the outer edge 112. The melting temperature of the sealing material 320 is lower than the melting temperature of the air-absorbing material 200.

[0069] Step S300: Stack the second support piece 120 on the first support piece 110 and cover the groove 111;

[0070] Step S400: Place the stacked first support piece 110 and second support piece 120 into the working space and perform vacuum treatment on the working space.

[0071] Step S500: Control the temperature in the working space to rise to the first preset temperature, so that the sealing material 320 melts to form a sealing element 310 to seal the gap between the outer edge 112 and the second support piece 120; the first preset temperature is higher than the melting temperature of the sealing material 320 and lower than the melting temperature of the air-absorbing material 200.

[0072] The first preset temperature is higher than the melting temperature of the sealing material 320, causing the sealing material 320 to melt at the first preset temperature to form a sealing element 310. The sealing element 310 has high fluidity in the molten state, allowing it to fill the gap between the outer edge 112 and the second support piece 120, thereby sealing the gap between the outer edge 112 and the second support piece 120 and enclosing the getter material 200 inside the outer shell 100. The encapsulation process is simple and the production efficiency is high. The surfaces of the outer edge 112 and the second support piece 120 are relatively flat, and the sealing element 310 in the molten state has surface tension, allowing the outer edge 112 and the second support piece 120 to fit tightly together, improving the sealing performance of the getter.

[0073] In step S100, the first support plate 110 is processed to form a groove 111 on the first support plate 110. The groove 111 can accommodate the getter material 200, ensuring that the getter material 200 can be stably placed between the first support plate 110 and the second support plate 120. By processing the first support plate 110 to form the groove 111, the wall thickness of the groove 111 is small enough to facilitate the penetration of the outer shell 100 to activate the getter during use. As a processing material, the first support plate 110 can form a thin outer edge 112 at the periphery of the groove 111 without special processing. The thin sheets are easier to fit together, which helps the sealant 310 to seal the gap between the outer edge 112 and the second support plate 120 in step S500. Furthermore, by using the first support piece 110 for processing, the surface area of ​​the outer edge 112 can be increased while minimizing material usage. This improves the contact area between the outer edge 112 and the second support piece 120, facilitating a tighter bond between them. The width of the outer edge 112 can be greater than 3 mm to ensure that the sealing material 320 can be stably placed on it.

[0074] In step S500, the sealing material 320 forms a sealing element 310. Since the outer edge 112 is located around the groove 111, the sealing element 310 seals the gap between the outer edge 112 and the second support piece 120, thus isolating the internal space of the groove 111 from the external environment. The thickness of the first support piece 110 is small, and the wall thickness of the groove 111 formed on the first support piece 110 is also small, making the end face of the groove 111 small and unable to support the sealing material 320. In step S200, the sealing material 320 is placed on the outer edge 112 in advance. The outer edge 112 supports the sealing material 320, making it difficult for the sealing material 320 to fall into the groove 111. At the same time, the groove 111 is closed by connecting the sealing element 310, the outer edge 112, and the second support piece 120.

[0075] In step S300, the second support plate 120 is stacked on the first support plate 110. The second support plate 120 can cover the groove 111, preventing impurities from entering the groove 111 and contaminating the getter material 200 during the process of placing the stacked first support plate 110 and second support plate 120 into the working space in step S400. When the seal 310 is in a molten state, the gravity of the second support plate 120 makes the first support plate 110 and the second support plate 120 fit more tightly, so that the seal 310 fills the gap between the outer edge 112 and the second support plate 120 as much as possible, so as to ensure the sealing performance of the getter.

[0076] In step S400, the working space is evacuated to create a vacuum working space. Then, in step S500, the gap between the outer edge 112 and the second support plate 120 is sealed. Evacuating the working space reduces the gas inside the outer casing 100, increases the vacuum level inside the getter, and thus ensures the performance of the getter. If the sealing member 310 does not completely fill the gap between the outer edge 112 and the second support plate 120 in step S500, a partial vacuum may form between the outer edge 112 and the second support plate 120, resulting in a lower air pressure between the outer edge 112 and the second support plate 120. The ambient air pressure causes the first support plate 110 and the second support plate 120 to press together, improving the fit between the first support plate 110 and the second support plate 120. In step S400, the working space is evacuated until the air pressure in the working space drops to a set air pressure (e.g., 10⁻² Pa), at which point the evacuation operation is stopped.

[0077] In step S500, the first preset temperature is higher than the melting temperature of the sealing material 320, causing the sealing material 320 to melt and form the seal 310. To ensure that the sealing material 320 can completely dissolve, in step S500, the temperature in the working space can be maintained at the first preset temperature for a set time (e.g., 2 minutes). At the same time, the first preset temperature is lower than the melting temperature of the getter material 200 to prevent the getter material 200 from dissolving under high temperature, which would affect the properties or performance of the getter material 200. The getter material 200 can be calcium oxide powder, Cu-ZSM-5 molecular sieve, etc.

[0078] In some embodiments, before the temperature within the controlled workspace rises to a first preset temperature, the packaging method further includes:

[0079] The temperature in the working space is controlled to rise to the second preset temperature, and the temperature in the working space is maintained at the second preset temperature for a preset time, so that the gas-absorbing material 200 releases gas; the second preset temperature is lower than the melting temperature of the sealing material 320.

[0080] Under the influence of the second preset temperature and the vacuum environment, the gas inside the suction material 200 overflows, improving the gas adsorption effect of the suction material 200. The second preset temperature is lower than the melting temperature of the sealing material 320, keeping the sealing material 320 in a solid state and preventing the sealing material 320 from melting prematurely, which would prevent the gas inside the suction material 200 from flowing out of the outer shell 100. By preheating the temperature in the working space to the second preset temperature, not only can the overflow rate of the gas inside the suction material 200 be accelerated, but the working space can also be preheated, making it easier to raise the temperature of the working space to the first preset temperature in step S500. By gradually raising the temperature of the working space from room temperature to the melting temperature of the sealing material 320 in two steps, it is beneficial to uniformly heat the sealing material 320 and reduce the risk of uneven thickness of the sealing element 310 due to uneven heating of the sealing material 320.

[0081] In some embodiments, refer to Figure 3 As shown, the first support piece 110 is processed to form a groove 111 on the first support piece 110, including:

[0082] The first support piece 110 is stamped to form a groove 111. The cross-sectional shape of the groove 111 is circular, and the depth of the groove 111 is less than the diameter of the groove 111.

[0083] Stamping can quickly and continuously process grooves 111 on the first support plate 110, making it suitable for mass production. It allows for high automation, reduces manual intervention, and improves production efficiency. Multiple first support plates 110 can be stamped separately using a hydraulic press to form precise and consistent groove 111 shapes, ensuring high consistency in the size and shape of each groove 111. The stamping process efficiently utilizes metal materials, minimizing scrap and waste. Furthermore, the production cost of the stamping process itself is relatively low, especially in mass production, where the manufacturing cost of individual parts can be significantly reduced.

[0084] It should be noted that the first support piece 110 can be a finished product or a raw material. The raw material can be cut to obtain multiple finished products. Alternatively, the finished product can be stamped to form a groove 111. Or, the raw material can be stamped to form multiple grooves 111, and then cut using a cutting mechanism or other equipment to form multiple finished products.

[0085] The cross-sectional shape of the groove 111 is circular, which can minimize the circumference of the groove opening and thus reduce the sealing area of ​​the seal 310, thereby reducing the risk of air leakage. The depth of the groove 111 is less than the diameter of the groove 111, so that the air-absorbing material 200 located in the groove 111 accumulates into a flat shape, which can increase the heat-receiving area of ​​the air-absorbing material 200 and thus accelerate the rate at which the air-absorbing material 200 releases gas at the second preset temperature. The diameter of the groove 111 is large enough to make the groove opening of the groove 111 larger, which facilitates the overflow of gas inside the air-absorbing material 200.

[0086] It should be noted that, in order to ensure the bearing effect of the groove 111 on the air-absorbing material 200, the depth of the groove 111 is greater than 3 mm.

[0087] In some embodiments, refer to Figure 3 As shown, the first support piece 110 is processed to form a groove 111 on the first support piece 110, including:

[0088] The first support piece 110 is stamped to form a groove 111. The cross-sectional shape of the groove 111 is a regular polygon, and the depth of the groove 111 is less than the side length of the groove 111.

[0089] The first support plate 110 is stamped to form a groove 111 with a positive polygonal cross-sectional shape. Stamping is a processing method that uses molds and presses to stamp, shear, bend, etc. on materials. It has the advantages of high efficiency, precision, and low cost. It can quickly carry out mass production, the product dimensions are stable, the unit cost is low, and the material utilization rate is high.

[0090] By using a stamping process, while forming the groove 111, an outer edge 112 can be formed around the periphery of the groove 111. The outer edge 112 can support the sealing material 320 in step 200, so that the sealing material 320 can be melted to form a seal 310. Since the wall thickness of the groove 111 is relatively thin, the sealing material 320 cannot be placed directly at the opening of the groove 111. If the outer edge 112 is formed at the edge of the groove 111, the processing technology will be complicated and the cost will be increased. In this embodiment of the invention, the outer edge 112 is formed around the periphery of the groove 111 while forming the groove 111, saving processing steps. The outer edge 112 formed by stamping is bent between the side wall of the groove 111, which can strengthen the overall structural strength of the outer shell 100.

[0091] Thin metal sheets are relatively flexible and can be plastically processed on hydraulic presses with a capacity of less than 2 tons to change their shape. In this embodiment of the invention, thin metal sheets are used as the encapsulation material, and the getter material 200 is heat-treated and sealed using stamping and hot-melt sealing material 320. This enables efficient and continuous production of getters without requiring complex raw materials or production equipment.

[0092] In some embodiments, the encapsulation method further includes:

[0093] The metal raw material is stamped to obtain the first support sheet 110, the thickness of the first support sheet 110 is less than or equal to 1 mm;

[0094] The metal raw material is stamped to obtain a second support sheet 120, the thickness of which is less than or equal to 1 mm.

[0095] Stamping allows for the efficient production of large quantities of metal sheets of the same specifications, ensuring dimensional stability and surface finish. It reduces subsequent processing workload, offers high processing speed, and significantly improves production efficiency, making it suitable for mass production. Furthermore, stamping results in high material utilization, minimal waste, and lower production costs.

[0096] The first support piece 110 is obtained by stamping and processed by stamping, which can ensure the continuity of the production process and speed up production efficiency.

[0097] The thickness of the first support plate 110 is small, so that the wall thickness of the groove 111 formed on the first support plate 110 is small enough; by limiting the thickness of the second support plate 120 and the wall thickness of the groove 111, the wall thickness of the outer shell 100 is small enough, which facilitates the activation of the getter during use and is beneficial to the lightweighting of the getter.

[0098] The getter is generally small in size, and during the processing, it is not easy to apply the sealing material 320 to the groove opening of the groove 111 by means of application. Generally, the width of the outer edge 112 is 3 mm to 10 mm, making it difficult to stably and evenly distribute the solid sealing material 320 on the outer edge 112.

[0099] In some embodiments, refer to Figure 4 and Figure 5 As shown, the encapsulation method also includes:

[0100] The sealing raw material is hot-pressed to obtain sealing material 320; sealing material 320 is in sheet form and the thickness of sealing material 320 is less than or equal to 1 mm.

[0101] The sealing raw material is hot-pressed, that is, after the sealing raw material is heated and melted in the hot press mold 400, the molten sealing raw material is pressed into the shape of the hot press mold 400 under high pressure to form a sheet-like sealing material 320. Through hot pressing, the formed sealing material 320 has a flat upper and lower surface, which is conducive to the stable placement of the sealing material 320 on the outer edge 112. With this setting, the sealing element 310 formed by the sealing material 320 is easier to fit with the outer edge 112 and the second support piece 120, thereby improving the sealing effect.

[0102] If the groove 111 is polygonal, the inner contour of the sealing material 320 is also polygonal, and the side length of the inner contour of the sealing material 320 is greater than the side length of the groove 111; if the groove 111 is circular, the inner contour of the sealing material 320 is circular, and the diameter of the inner contour of the sealing material 320 is greater than the diameter of the groove 111; this arrangement reduces the risk of the sealing material 320 melting and falling into the groove 111.

[0103] If the outer contour of the outer edge portion 112 is polygonal, the outer contour of the sealing material 320 is also polygonal, and the side length of the outer contour of the sealing material 320 is less than the side length of the outer contour of the outer edge portion 112; if the outer contour of the outer edge portion 112 is circular, the outer contour of the sealing material 320 is circular, and the diameter of the outer contour of the sealing material 320 is less than the diameter of the outer contour of the outer edge portion 112; this arrangement reduces the risk of the sealing material 320 overflowing outside the outer edge portion 112 after melting.

[0104] The thickness of the sealing material 320 is less than or equal to 1 mm, forming a thinner seal 310. This thinner seal 310 cures more quickly, reducing curing time and thus reducing waiting time during production, improving efficiency. Limiting the thickness of the sealing material 320 helps reduce the presence of air bubbles and impurities, providing a uniform bonding surface, reducing gaps between materials, and resulting in a tighter bond, thereby improving the bonding strength between the first support piece 110 and the second support piece 120. Furthermore, limiting the thickness of the sealing material 320 saves material, avoids overuse, and reduces the risk of molten seal 310 overflowing and contaminating other areas.

[0105] The contact surfaces of the outer edge 112 and the second support piece 120 are flat, and the thinner seal 310 can better fill the tiny gaps, making the contact surfaces of the outer edge 112 and the second support piece 120 more compact, thereby enhancing the bonding strength.

[0106] Sealing material 320 can be glass. Glass is a non-toxic and environmentally friendly material that does not release harmful gases, thus improving safety performance.

[0107] The sealing material 320 can also be an aluminum alloy welding material. Aluminum alloy welding materials have a low density, providing strong adhesion without adding excessive weight. Simultaneously, aluminum alloy materials are easy to process and can melt at lower temperatures, reducing the risk of deformation of the first support piece 110 and the second support piece 120. For example, the sealing material 320 can be an aluminum-silicon alloy welding material.

[0108] In some embodiments, after the temperature within the controlled working space is raised to a first preset temperature, causing the sealing material 320 to melt and form a seal 310 to seal the gap between the outer edge 112 and the second support piece 120, the encapsulation method further includes:

[0109] The temperature within the working space is controlled to decrease to a third preset temperature, causing the seal 310 to solidify; the third preset temperature is lower than the melting temperature of the sealing material 320.

[0110] The third preset temperature is lower than the melting temperature of the sealing material 320, so that the seal 310 solidifies and hardens. The hardened seal 310 can provide stronger adhesion, so that the outer edge 112 and the surface of the second support piece 120 are firmly bonded together to prevent separation.

[0111] The temperature inside the workspace can be reduced by condensation or other methods to accelerate the curing of the seal 310 and improve production efficiency; alternatively, heating of the workspace can be stopped, and the temperature can be allowed to drop naturally.

[0112] In this embodiment, a first support sheet 110 is obtained by stamping the metal raw material. The first support sheet 110 is a circular sheet with a thickness of 0.2 mm. The first support sheet 110 is then stamped to form a circular groove 111 with a diameter of 15 mm and a depth of 5 mm. An outer edge 112 is formed at the periphery of the groove 111. A second support sheet 120 is obtained by stamping the metal raw material. The second support sheet 120 is a circular sheet with a thickness of 0.3 mm, and the diameter of the second support sheet 120 is larger than the outer diameter of the first support sheet 110. A sealing material 320 is obtained by hot pressing the sealing raw material. The sealing material 320 is a sheet of glass, and the thickness of the sealing material 320 is 0.1 mm. In step S200, the suction material 200 is placed into the groove 111, and the sealing material 320 is placed on the outer edge 112. The suction material 200 is calcium oxide powder. In step S300, the second support sheet 120 is stacked on the first support sheet 110 and covers the groove 111. In step S400, the stacked first support sheet 110 and second support sheet 120 are placed into the working space, and the working space is evacuated until the pressure in the working space reaches 110. -2Below Pa; control the temperature in the working space to rise to 600°C and maintain the temperature in the working space at 600°C for 5 minutes, causing the getter material 200 to release gas; in step S500, control the temperature in the working space to rise to 1100°C, causing the sealing material 320 to melt and form a sealing element 310 to seal the gap between the outer edge 112 and the second support piece 120; control the temperature in the working space to drop to 50°C, causing the sealing element 310 to solidify; increase the pressure in the working space to atmospheric pressure, and remove the prepared getter. Place the prepared getter in an atmosphere with a pressure of 10 Pa and a volume of 0.002 m³. 3 In a closed testing environment, the outer shell 100 was broken by external mechanical means, connecting the internal space of the groove 111 to the testing environment. After 24 hours, the pressure in the closed environment decreased to about 0.3 Pa.

[0113] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. A getter, characterized in that, include: The outer casing includes a first support piece and a second support piece. The first support piece has a groove and an outer edge, the outer edge being disposed along the periphery of the groove. The second support piece overlaps with the first support piece and covers the groove. Air-absorbing material is disposed inside the groove; A sealing element is disposed between the outer edge and the second support piece, and is arranged circumferentially along the outer edge, the sealing element being used to seal the gap between the outer edge and the second support piece.

2. The getter according to claim 1, characterized in that, The thickness of the first support sheet and the second support sheet is less than or equal to 1 mm.

3. The getter according to claim 1, characterized in that, The thickness of the seal is less than or equal to 1 mm.

4. The getter according to any one of claims 1 to 3, characterized in that, The depth of the groove is less than the maximum width of the groove.

5. The getter according to any one of claims 1 to 3, characterized in that, Along the thickness direction of the outer shell, the projection surface of the second support piece completely covers the projection surface of the outer edge.

6. The getter according to any one of claims 1 to 3, characterized in that, The first support plate and the second support plate are made of one or more alloys of iron, aluminum, and copper.

7. A method for encapsulating a getter, characterized in that, include: The first support piece is processed to form a groove on the first support piece; The air-absorbing material is placed in the groove, and a sealing material is placed on the outer edge, wherein the melting temperature of the sealing material is lower than the melting temperature of the air-absorbing material; The second support piece is stacked on top of the first support piece, covering the groove; The stacked first support sheet and second support sheet are placed into the workspace, and the workspace is then evacuated. The temperature within the working space is controlled to rise to a first preset temperature, causing the sealing material to melt and form a seal to seal the gap between the outer edge and the second support piece; the first preset temperature is higher than the melting temperature of the sealing material and lower than the melting temperature of the air-absorbing material.

8. The encapsulation method for the getter according to claim 7, characterized in that, Before the temperature within the controlled workspace rises to a first preset temperature, the packaging method further includes: The temperature in the workspace is controlled to rise to a second preset temperature, and the temperature in the workspace is maintained at the second preset temperature for a preset time, so that the gas-absorbing material releases gas; the second preset temperature is lower than the melting temperature of the sealing material.

9. The encapsulation method for the getter according to claim 7, characterized in that, The process of processing the first support sheet to form a groove on the first support sheet includes: The first support piece is stamped to form the groove, the groove has a circular cross-sectional shape, and the depth of the groove is less than the diameter of the groove; Alternatively, the first support piece can be stamped to form the groove, the groove having a regular polygonal cross-sectional shape and a depth less than the side length of the groove.

10. The encapsulation method for the getter according to claim 7, characterized in that, The encapsulation method further includes: The metal raw material is stamped to obtain the first support sheet, the thickness of the first support sheet being less than or equal to 1 mm; The metal raw material is stamped to obtain the second support sheet, the thickness of which is less than or equal to 1 mm.

11. The encapsulation method for the getter according to claim 7, characterized in that, The encapsulation method further includes: The sealing raw material is hot-pressed to obtain the sealing material; the sealing material is in sheet form and the thickness of the sealing material is less than or equal to 1 mm.

12. The encapsulation method for the getter according to claim 7, characterized in that, After controlling the temperature within the workspace to rise to a first preset temperature, causing the sealing material to melt and form a seal to seal the gap between the outer edge and the second support piece, the encapsulation method further includes: The temperature within the working space is controlled to decrease to a third preset temperature, causing the sealant to solidify; the third preset temperature is lower than the melting temperature of the sealing material.

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