High efficiency low loss liquid source bubbler

Abstract

This invention provides a high-efficiency, low-loss liquid source bubbler, relating to the technical field of auxiliary equipment for chemical vapor deposition. It includes a bubbler body and a carrier gas inlet pipe. The bubbler body has a receiving cavity and a steam outlet. The receiving cavity is used to contain a liquid source and includes a first chamber and a second chamber that are interconnected. The steam outlet is connected to the first chamber. The volume of the first chamber is larger than the volume of the second chamber, and the cross-sectional area of ​​the first chamber is much larger than that of the second chamber. At least a portion of the carrier gas inlet pipe is fitted into the second chamber, and the outlet of the carrier gas inlet pipe is adjacent to the end of the second chamber opposite to the first chamber to introduce carrier gas into the second chamber. This invention can effectively reduce the volume of the bubbler region, ensuring that the outlet of the carrier gas inlet pipe remains below the liquid source surface, thus guaranteeing liquid source utilization and a stable liquid source output.

Description

Technical Field

[0001] This invention relates to the field of auxiliary equipment for chemical vapor deposition, and in particular to a high-efficiency, low-loss liquid source bubbler. Background Technology

[0002] Chemical vapor deposition (CVD) is a material fabrication technique that utilizes a gaseous precursor to undergo a chemical reaction on a substrate surface, thereby epitaxially growing a solid thin film. Taking the epitaxial growth of group IV materials as an example, high-speed, high-quality group IV material epitaxy at CMOS-compatible temperatures cannot be achieved using commercially available gas sources with high vapor pressures (such as SiH4, GeH4, etc.). However, propargon (Ge3H8) and butargon (Ge4H8) are suitable alternatives. 10 Higher-order precursors, such as those with low bond energies, can be decomposed at lower temperatures to achieve high-speed, high-quality epitaxy of group IV materials at CMOS-compatible temperatures. However, these higher-order precursors are usually liquid sources with low vapor pressure and high viscosity, resulting in small-scale synthesis and preparation. During vapor deposition, process gas or inert gas as a carrier gas needs to be introduced into the liquid source, and then the liquid source vapor is carried out and introduced into the growth chamber through bubbling.

[0003] In related technologies, gas cylinder bubblers are often large in size, and as the liquid source inside the bubbler is gradually consumed, the liquid level drops, and the travel distance of the bubbles blown out by the carrier gas in the liquid source is reduced, resulting in low utilization of the liquid source and insufficient stability of the liquid source steam output. Summary of the Invention

[0004] The present invention aims to at least partially solve one of the technical problems in the related art.

[0005] Therefore, embodiments of the present invention propose a high-efficiency, low-loss liquid source bubbler, which can effectively reduce the volume of the bubbler area, so that the outlet of the carrier gas inlet pipe is continuously located below the liquid source surface, ensuring the utilization rate of the liquid source and a stable output of the liquid source.

[0006] According to an embodiment of the present invention, a high-efficiency, low-loss liquid source bubbler includes a bubbler body and a carrier gas inlet pipe. The bubbler body has a receiving cavity and a steam outlet. The receiving cavity is used to receive a liquid source and includes a first chamber and a second chamber that are interconnected. The steam outlet is connected to the first chamber. The volume of the first chamber is larger than the volume of the second chamber, and the cross-sectional area of ​​the first chamber is much larger than the cross-sectional area of ​​the second chamber. At least a portion of the carrier gas inlet pipe is fitted into the second chamber, and the outlet of the carrier gas inlet pipe is adjacent to the end of the second chamber away from the first chamber to allow carrier gas to be introduced into the second chamber.

[0007] According to an embodiment of the present invention, a high-efficiency, low-loss liquid source bubbler comprises a first chamber and a second chamber within a bubbler body to contain a liquid source. A carrier gas inlet pipe allows carrier gas to be introduced into the liquid source, so that the liquid source vapor is carried out through a steam outlet and introduced into a growth chamber via foaming. Because the volume of the first chamber is larger than that of the second chamber, and the cross-sectional area of ​​the first chamber is much larger than that of the second chamber, the second chamber has a narrower structure compared to the first chamber. Furthermore, the outlet of the carrier gas inlet pipe extends to the end of the second chamber opposite to the first chamber, i.e., to the bottom of the liquid source within the containing chamber. Because of its proximity to the liquid source, when the liquid source is scarce or the liquid source in the bubbler is gradually consumed, causing the liquid level to drop, the narrow structure of the second chamber can keep the outlet of the carrier gas inlet pipe continuously below the liquid source surface, allowing the liquid source vapor to be output stably, ensuring the utilization rate of the liquid source, and reducing the demand for the liquid source. At the same time, the narrow structure of the second chamber also reduces the volume of the foaming area constructed by the receiving cavity. Therefore, compared with related technologies, the present invention can effectively reduce the volume of the foaming area, so that the outlet of the carrier gas inlet pipe is continuously below the liquid source surface, ensuring the utilization rate of the liquid source and a stable liquid source output.

[0008] In some embodiments, the first chamber is located above the second chamber, and the second chamber extends in a straight line or spiral in the vertical direction.

[0009] In some embodiments, the first chamber is located above the second chamber, and the steam outlet is located above the plane containing the liquid source liquid surface in the first chamber in the vertical direction.

[0010] In some embodiments, the volume of the receiving cavity is V. 总 The volume of the first chamber is V1, and the volume of the second chamber is V2, wherein V... 总 =V1+V2, and 0.01V 总 ≤V2≤0.2V 总 .

[0011] In some embodiments, the aerator body includes a cylinder, a spiral tube, and a cap. The cylinder is connected to the spiral tube, the inner cavity of the cylinder forms the first chamber, and the inner cavity of the spiral tube forms the second chamber. The first chamber is open at one end away from the second chamber, and the cap is connected to the cylinder to seal the opening of the first chamber.

[0012] In some embodiments, at least one of the cylinder and the spiral tube is made of a corrosion-resistant and high-strength material.

[0013] In some embodiments, the cylinder and the spiral tube are integrally formed, or the cylinder and the spiral tube are detachably connected, and a sealing structure is provided at the connection between the cylinder and the spiral tube.

[0014] In some embodiments, the cap is detachably connected to the cylinder.

[0015] In some embodiments, the carrier gas inlet pipe includes a first section and a second section that are connected to each other. At least a portion of the first section is located inside the cylinder. The second section is fitted inside the spiral tube and has an outlet for the carrier gas inlet pipe. One end of the first section opposite to the second section is located outside the cylinder and has an inlet for the carrier gas inlet pipe.

[0016] In some embodiments, a mass flow meter is provided on the carrier gas inlet pipe, the mass flow meter being arranged adjacent to the inlet of the carrier gas inlet pipe, and the mass flow meter being used to control at least one parameter information of the carrier gas flow rate and flow velocity.

[0017] In some embodiments, the liquid source bubbler further includes a temperature control container, at least a portion of the bubbler body is disposed within the temperature control container, and a temperature control channel for containing a temperature-controlled liquid is defined between the outer wall surface of the bubbler body and the inner wall surface of the temperature control container, so that the liquid source can exchange heat with the temperature-controlled liquid, thereby regulating the saturated vapor pressure of the liquid source.

[0018] In some embodiments, the temperature-controlled container is provided with a temperature-controlled liquid inlet pipe and a temperature-controlled liquid outlet pipe that communicate with the temperature-controlled channel, so that the temperature-controlled liquid can circulate.

[0019] In some embodiments, the temperature-controlling liquid is one of deionized water, ethanol, ethylene glycol, isopropanol, and silicone oil.

[0020] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0021] Figure 1 This is a perspective view of a high-efficiency, low-loss liquid source bubbler according to an embodiment of the present invention.

[0022] Figure 2 This is a cross-sectional structural schematic diagram of a high-efficiency, low-loss liquid source bubbler according to an embodiment of the present invention.

[0023] Figure 3 This is a schematic diagram of the main structure of a high-efficiency, low-loss liquid source bubbler according to an embodiment of the present invention (the temperature control container is cut out in the figure).

[0024] Figure label:

[0025] 1. Aerator body; 11. Receiving cavity; 111. First chamber; 112. Second chamber; 12. Steam outlet; 13. Cylinder; 14. Spiral tube; 15. Cap; 2. Carrier gas inlet pipe; 21. Carrier gas inlet pipe outlet; 22. First section; 23. Second section; 24. Carrier gas inlet pipe inlet; 3. Temperature-controlled container; 31. Temperature-controlled channel; 32. Temperature-controlled liquid inlet pipe; 33. Temperature-controlled liquid outlet pipe. Detailed Implementation

[0026] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0027] like Figure 1 and Figure 2 As shown, an embodiment of the present invention provides a high-efficiency, low-loss liquid source bubbler, comprising a bubbler body 1 and a carrier gas inlet pipe 2. The bubbler body 1 has a receiving cavity 11 and a steam outlet 12. The receiving cavity 11 is used to receive a liquid source and includes a first chamber 111 and a second chamber 112 that are connected to each other. The steam outlet 12 is connected to the first chamber 111 and is adapted to communicate with a growth chamber to introduce bubbles carrying liquid source steam into the growth chamber. The volume of the first chamber 111 is larger than the volume of the second chamber 112, and the cross-sectional area of ​​the first chamber 111 is much larger than the cross-sectional area of ​​the second chamber 112. At least a portion of the carrier gas inlet pipe 2 is fitted into the second chamber 112. The outlet 21 of the carrier gas inlet pipe is adjacent to the end of the second chamber 112 away from the first chamber 111, and the outlet 21 of the carrier gas inlet pipe is connected to the end of the second chamber 112 away from the first chamber 111 to introduce carrier gas into the second chamber 112.

[0028] According to an embodiment of the present invention, a high-efficiency, low-loss liquid source bubbler comprises a first chamber 111 and a second chamber 112 in the bubbler body 1 to contain a liquid source. A carrier gas inlet pipe 2 can introduce carrier gas into the liquid source so that the liquid source vapor is carried out through the steam outlet 12 and introduced into the growth chamber by foaming. Since the volume of the first chamber 111 is larger than that of the second chamber 112, and the cross-sectional area of ​​the first chamber 111 is much larger than that of the second chamber 112, the second chamber 112 has a narrower structure compared to the first chamber 111. The outlet 21 of the carrier gas inlet pipe extends to the end of the second chamber 112 away from the first chamber 111. That is, near the bottom of the liquid source in the receiving cavity 11, when the liquid source is low or the liquid source in the bubbler is gradually consumed and the liquid level drops, the narrow structure of the second chamber 112 can keep the outlet 21 of the carrier gas inlet pipe continuously below the liquid source liquid level, so that the liquid source vapor can be stably output, ensuring the utilization rate of the liquid source and reducing the demand for the liquid source. At the same time, the narrow structure of the second chamber 112 also reduces the volume of the foaming area constructed by the receiving cavity 11. Therefore, compared with related technologies, the present invention can effectively reduce the volume of the foaming area, so that the outlet of the carrier gas inlet pipe 2 is continuously below the liquid source liquid level, ensuring the utilization rate of the liquid source and a stable liquid source output.

[0029] Specifically, the first chamber 111 and the second chamber 112 are arranged along the extending direction of the receiving cavity 11. The cross-sectional area of ​​the first chamber 111 is orthogonal to the extending direction of the first chamber 111, and the cross-sectional area of ​​the second chamber 112 is orthogonal to the extending direction of the second chamber 112. At least a portion of the carrier gas inlet pipe 2 may be coaxially located within the second chamber 112, and the outer wall surface of the portion of the carrier gas inlet pipe 2 located within the second chamber 112 defines an annular cavity for containing the liquid source between the inner wall surface of the portion of the carrier gas inlet pipe 2 located within the second chamber 112 and the inner wall surface of the second chamber 112.

[0030] In addition, the liquid source can be a metal-organic liquid source (i.e., MO source) or other low vapor pressure liquid sources. Among them, metal-organic liquid sources include trimethylgallium (Ga(CH3)3) and trimethylaluminum (Al(CH3)3), while other low vapor pressure liquid sources include propargon (Ge3H8) and butargon (Ge4H). 10 The carrier gas can be at least one of hydrogen (H2), helium (He), neon (Ne), argon (Ar), and nitrogen (N2), that is, the carrier gas includes, but is not limited to, any mixture of one or more of the aforementioned gases in any proportion.

[0031] like Figure 2 and Figure 3As shown, in some embodiments, the first chamber 111 and the second chamber 112 are arranged in a vertical direction, with the first chamber 111 located above the second chamber 112, and the second chamber 112 extending in a straight line or spiral in a vertical direction.

[0032] Understandably, designing the second chamber 112 as a spiral structure extending in the vertical direction can extend the distance and time for the bubbles ejected by the carrier gas to travel in the liquid source compared to a straight extension structure. This helps to ensure that the bubbles travel a sufficiently long path even when the volume of the liquid source is small, further improving the carrying efficiency of the carrier gas to the liquid source and the utilization rate of the liquid source. At the same time, it can also reduce the volume of the entire liquid source bubbler and improve the space utilization rate.

[0033] In addition, based on the above structure, it can be seen that the second chamber 112 is a spiral structure with a small volume, which makes the distance and time the bubble travels in the liquid source have minimal impact from the decrease in the liquid source level, thus ensuring that the vapor pressure of the liquid source in the gas produced by bubbling remains constant for a long time.

[0034] like Figure 2 As shown, in some embodiments, the first chamber 111 is located above the second chamber 112, and the steam outlet 12 is located above the plane where the liquid source liquid surface is located in the first chamber 111 in the vertical direction, close to the top of the first chamber 111, and connected to the growth chamber so that bubbles carrying liquid source steam can be introduced into the epitaxial growth chamber.

[0035] like Figure 2 As shown, in some embodiments, the volume of the receiving cavity 11 is V. 总 The volume of the first chamber 111 is V1, and the volume of the second chamber 112 is V2, where V... 总 =V1+V2, and 0.01V 总 ≤V2≤0.2V 总 In other words, the volume of the second chamber 112 accounts for 1% to 20% of the volume of the receiving chamber 11.

[0036] It is understandable that by adopting the above structural design, the volume of the foaming area constructed by the receiving cavity 11 can be effectively reduced while ensuring that the liquid source bubbler has good foaming performance. This makes the liquid source bubbler suitable for foaming expensive or low-capacity liquid sources, thereby saving the volume of the liquid source.

[0037] like Figure 2 and Figure 3As shown, in some embodiments, the aerator body 1 includes a cylinder 13, a spiral tube 14, and a cap 15. The cylinder 13 is connected to the spiral tube 14. The inner cavity of the cylinder 13 forms a first chamber 111, and the inner cavity of the spiral tube 14 forms a second chamber 112. The first chamber 111 is open at one end away from the second chamber 112, and the cap 15 is connected to the cylinder 13 to seal the opening of the first chamber 111.

[0038] It is understandable that the use of a cylinder 13, a spiral tube 14, and a cap 15 to form the bubbler body 1 simplifies the overall structure of the liquid source bubbler, facilitates production and processing, and helps reduce production costs.

[0039] Specifically, based on the above structure, the cylinder 13 and the spiral tube 14 are arranged in the vertical direction. The cylinder 13 can extend in the vertical direction. The bottom of the cylinder 13 is connected to the top of the spiral tube 14. The cylinder 13 is a hollow structure with an open top. The cap 15 is provided on the top of the cylinder 13 to seal the cylinder 13. The spiral tube 14 is a blind tube with an open top. At least part of the carrier gas inlet pipe 2 can be fitted into the inner cavity of the spiral tube 14. The outlet 21 of the carrier gas inlet pipe can extend to the vicinity of the bottom of the spiral tube 14 and communicate with the inner cavity of the spiral tube 14.

[0040] Furthermore, the cylinder 13 is not limited to a cylindrical shape; it can also be a round cylinder to ensure consistent mechanical properties throughout the cylinder 13. The spiral tube 14 can extend in a constant diameter spiral or a variable diameter spiral in the vertical direction.

[0041] In some specific embodiments, the diameter of the cylinder 13 is D1, and 50mm≤D1≤100mm; the diameter of the spiral tube 14 is D2, and 0<D2≤15mm.

[0042] For example, the diameter of the cylinder 13 is 100 mm and the height is 80 mm, the diameter of the spiral tube 14 is 15 mm and the height is 100 mm, and the bubbler body 1 stores the low vapor pressure liquid source. Because the volume of the lower spiral tube 14 is relatively small, the low vapor pressure liquid source generally occupies the spiral tube 14 completely, and the liquid level of the low vapor pressure liquid source is located at 20-60% of the height of the cylinder 13. It should be noted that the specific dimensions described above are for ease of description and understanding only and should not be considered as limitations on the present invention.

[0043] like Figure 2 and Figure 3As shown, in some embodiments, at least one of the cylinder 13 and the spiral tube 14 is made of a corrosion-resistant and high-strength material; in other words, the cylinder 13 is made of a corrosion-resistant and high-strength material; or, the spiral tube 14 is made of a corrosion-resistant and high-strength material; or, both the cylinder 13 and the spiral tube 14 are made of corrosion-resistant and high-strength materials, in order to reduce the risk of corrosion and damage to the cylinder 13 or the spiral tube 14 by the liquid source and the temperature-controlled liquid described below, and to ensure the service life of the bubbler body 1.

[0044] Specifically, the materials of the cylinder 13 and the spiral tube 14 include, but are not limited to, stainless steel, pure titanium, titanium alloy, or other corrosion-resistant and high-strength materials.

[0045] like Figure 2 and Figure 3 As shown, in some embodiments, the cylinder 13 and the spiral tube 14 are integrally formed, or the cylinder 13 and the spiral tube 14 are detachably connected, and a sealing structure is provided at the connection between the cylinder 13 and the spiral tube 14. In other words, the cylinder 13 and the spiral tube 14 are either an integral structure or separate structures that are tightly connected.

[0046] It is understandable that when the cylinder 13 and the spiral tube 14 are an integral structure, it is beneficial to further simplify the construction and disassembly of the bubbler body 1. When the cylinder 13 and the spiral tube 14 are separate structures that are tightly connected, if either of the two connected parts fails, only the corresponding damaged part needs to be replaced to enable the bubbler body 1 to work normally, without having to scrap the entire bubbler body 1, thus effectively reducing the maintenance cost of the bubbler body 1.

[0047] like Figures 1 to 3 As shown, in some embodiments, the cover 15 and the cylinder 13 are detachably connected. Similarly, if either the cover 15 or the cylinder 13 is damaged or fails, only the corresponding damaged part needs to be replaced, which can effectively reduce maintenance costs and ensure the service life of each component.

[0048] like Figure 2 As shown, in some embodiments, the carrier gas inlet pipe 2 includes a first section 22 and a second section 23 that are connected to each other. At least a portion of the first section 22 is located inside the cylinder 13. The second section 23 is fitted inside the spiral tube 14 and is provided with an outlet 21 of the carrier gas inlet pipe. One end of the first section 22 opposite to the second section 23 is located outside the cylinder 13 and is provided with an inlet 24 of the carrier gas inlet pipe.

[0049] It is understandable that placing at least a portion of the first section 22 inside the cylinder 13 allows the liquid source inside the cylinder 13 to preheat the carrier gas inside the first section 22. Meanwhile, since the second section 23 is located inside the spiral tube 14, the temperature difference between the carrier gas in the carrier gas inlet pipe 2 and the liquid source inside the bubbler body 1 can be further reduced, so that the liquid source vapor can be smoothly carried out and introduced into the growth chamber through the carrier gas foaming method.

[0050] In addition, it can effectively avoid heat exchange between the carrier gas and the liquid source, which would cause changes in the temperature of the liquid source and thus affect the stable output of the liquid source vapor.

[0051] For example, as shown in the figure, the steam outlet 12 and the air inlet 24 of the carrier gas inlet pipe are respectively located on both sides of the cylinder 13 along the first direction, which can be the radial direction of the cylinder 13. The second section 23 extends along the spiral tube 14 to the vicinity of the bottom of the receiving cavity 11 of the bubbler body 1.

[0052] It should be noted that in the related technologies, changes in carrier gas flow rate, liquid source temperature, and liquid level height during the foaming process of the liquid source bubbler will affect the stable output of liquid source vapor.

[0053] like Figure 2 As shown, in some embodiments, a mass flow meter (not shown) is provided on the carrier gas inlet pipe 2. The mass flow meter is arranged near the inlet 24 of the carrier gas inlet pipe. The mass flow meter is used to control at least one parameter information of the carrier gas flow rate and flow velocity. The mass flow meter can be a small-range, high-precision mass flow meter.

[0054] It is understandable that the carrier gas flow rate is directly proportional to the bubble generation rate, but excessive flow rate will create airflow or even cause liquid source splashing, affecting the contact efficiency between the carrier gas and the liquid source. Therefore, the flow rate of the carrier gas can be controlled by a mass flow meter to ensure that the carrier gas flows slowly and stably, thus guaranteeing the subsequent bubble generation effect.

[0055] like Figures 1 to 3 As shown, in some embodiments, the liquid source bubbler further includes a temperature control container 3, at least a portion of the bubbler body 1 is disposed inside the temperature control container 3, and a temperature control channel 31 for containing the temperature control liquid is defined between the outer wall surface of the bubbler body 1 and the inner wall surface of the temperature control container 3, so that the liquid source can exchange heat with the temperature control liquid, thereby regulating the saturated vapor pressure of the liquid source.

[0056] It is understandable that the temperature control container 3 is used to store the temperature control liquid at the set temperature, and the temperature control liquid at the set temperature is tightly wrapped around the outer wall of the bubbler body 1 in order to adjust the saturated vapor pressure of the liquid source inside the bubbler body 1. The higher the temperature of the temperature control liquid, the higher the saturated vapor pressure of the liquid source, and the higher the partial pressure of the liquid source vapor carried by the carrier gas.

[0057] Specifically, the temperature control container 3 and the bubbler body 1 can be integrally formed. The temperature control container 3 is not limited to a cylindrical tube, such as a cylindrical tube. In this case, the diameter of the temperature control container 3 is larger than the diameter of the aforementioned cylinder 13. When the diameter of the cylinder 13 is 100mm, the diameter of the temperature control container 3 can be 150mm.

[0058] For example, as shown in the figure, the spiral tube 14 of the bubbler body 1 is completely submerged in the lower part of the temperature-controlled liquid in the temperature-controlled container 3, while the lower part of the cylinder 13 is submerged in the upper part of the temperature-controlled liquid in the temperature-controlled container 3.

[0059] like Figures 1 to 3 As shown, in some embodiments, the temperature control container 3 is provided with a temperature control liquid inlet pipe 32 and a temperature control liquid outlet pipe 33 that are connected to the temperature control channel 31, so as to realize the circulation of the temperature control liquid, so that the liquid source in the bubbler body 1 can be heated and maintained at the corresponding temperature, thereby ensuring the stable output of liquid source steam.

[0060] Specifically, the temperature control container 3 can extend in the vertical direction, the temperature control liquid inlet pipe 32 can be arranged near the top of the temperature control container 3, and the temperature control liquid outlet pipe 33 can be arranged near the bottom of the temperature control container 3, so that the output direction of the liquid source vapor is opposite to the flow direction of the temperature control liquid, thereby further optimizing the heating effect of the temperature control liquid on the liquid source.

[0061] In some embodiments, the temperature-controlling liquid is one of deionized water, ethanol, ethylene glycol, isopropanol, and silicone oil. It should be noted that the temperature-controlling liquid includes, but is not limited to, deionized water, ethanol (C2H6O), ethylene glycol (C2H6O2), isopropanol (C3H8O), silicone oil, etc.

[0062] Therefore, compared with related technologies, the present invention has the following technical advantages: 1) The present invention effectively reduces the volume of the foaming area through the specially designed structure of the foamer body 1, which can ensure that the outlet 21 of the carrier gas inlet pipe is always below the liquid surface of the liquid source. It is suitable for expensive or low-capacity liquid sources and can save the volume of the liquid source. 2) By designing the lower part of the bubbler body 1 as a spiral structure, the present invention greatly increases the distance and time that the bubbles blown out by the carrier gas travel in the liquid source. Even with a small volume of liquid source, a sufficiently long bubble travel path is still achieved, which improves the carrying efficiency of the carrier gas to the liquid source and achieves a high utilization rate of the liquid source from the source. 3) By designing the lower part of the bubbler body 1 to be a spiral structure with a small volume, the present invention makes the distance and time that the bubbles travel in the liquid source have little impact on the decrease of the liquid source liquid level, and can ensure that the vapor pressure of the liquid source in the gas produced by bubbling remains constant for a long time. 4) This invention achieves precise flow control by introducing a small-range, high-precision mass flow meter into the carrier gas inlet pipe 2 to control the slow and stable flow of the carrier gas. 5) The present invention maintains the temperature of the low vapor pressure liquid source within a stable range by circulating the temperature-controlled liquid in the temperature-controlled container 3, thereby maintaining the saturated vapor pressure of the liquid source stable and the partial pressure of the liquid source in the gas produced by bubbling stable. 6) This invention utilizes the characteristic that the vapor pressure of most liquid sources increases with increasing temperature, and adjusts the partial pressure of the liquid source in the carrier gas by controlling the temperature of the temperature-controlled liquid in the temperature-controlled container 3, thereby achieving precise control of the partial pressure of the liquid source.

[0063] In other words, this invention provides a controllable pressure, high efficiency, and low loss liquid source bubbler, which aims to save raw materials and achieve stable and adjustable liquid source partial pressure. At the same time, the liquid source bubbler designed in this invention can achieve stable and adjustable liquid source output, which is of great significance to the field of chemical vapor deposition.

[0064] The working process of this high-efficiency, low-loss liquid source bubbler will now be explained, taking as an example the liquid source is butgermanane, the temperature-controlled liquid is deionized water, and the carrier gas is H2: First, remove the cap 15 from the top of the bubbler body 1, and add low vapor pressure liquid source butgerane (Ge4H) into the bubbler body 1. 10 The butegrenine completely fills the spiral tube 14 and fills half the volume of the cylinder 13; The second step is to open the temperature-controlled liquid inlet pipe 32 and add 50°C temperature-controlled liquid (i.e., deionized water) to the temperature-controlled container 3. When the level of the deionized water rises to near the temperature-controlled liquid inlet pipe 32, open the temperature-controlled liquid outlet pipe 33 to achieve the circulation of 50°C deionized water, so as to heat the butgerane in the bubbler body 1. The third step is to wait 5 to 10 minutes to allow the temperature of butgermanium to stabilize at around 50°C, at which point its saturated vapor pressure is relatively high and stable. Then, open the valve of the carrier gas inlet pipe 2 and introduce carrier gas (i.e., H2) into the bubbler body 1 at a flow rate of 10 ml / min. Since the carrier gas inlet pipe 2 extends to the bottom of the spiral tube 14, the bubbles carrying butgermanium vapor formed after H2 comes into contact with butgermanium also migrate upward in a spiral trajectory and eventually escape at the liquid surface. Fourth step: After the pressure of the hydrogen-germanium vapor mixture in the bubbler exceeds 1 atmosphere, open the liquid source vapor outlet 12 to introduce H2 carrying the germanium vapor into the growth chamber for epitaxial growth; if it is necessary to increase the flow rate of germanium during the growth process, the carrier gas flow rate should be increased or the temperature of the temperature control liquid should be increased, and vice versa. Fifth step: When growth is complete, first close the valve of the carrier gas inlet pipe 2 to stop blowing bubbles into the butgermanium, and close the liquid source vapor outlet 12; close the temperature control liquid inlet pipe 32 to drain all the 50°C deionized water; finally open the temperature control liquid inlet pipe 32 to introduce deionized water at about 5°C to reduce the saturated vapor pressure of butgermanium and thus reduce the loss of butgermanium.

[0065] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0066] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0067] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0068] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0069] In this invention, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0070] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A high-efficiency, low-loss liquid source bubbler, characterized in that, include: A bubbler body having a receiving cavity and a steam outlet, the receiving cavity being used to receive a liquid source and including a first chamber and a second chamber communicating with each other, the steam outlet communicating with the first chamber, the volume of the first chamber being greater than the volume of the second chamber, and the cross-sectional area of ​​the first chamber being much greater than the cross-sectional area of ​​the second chamber. A carrier gas inlet pipe, at least a portion of which is fitted into the second chamber, with the outlet of the carrier gas inlet pipe adjacent to one end of the second chamber away from the first chamber to allow carrier gas to be introduced into the second chamber.

2. The high-efficiency, low-loss liquid source bubbler according to claim 1, characterized in that, The first chamber is located above the second chamber, wherein, The second chamber extends in a straight line or spiral along the vertical direction; and / or, The steam outlet is located above the plane containing the liquid source in the first chamber in the vertical direction.

3. The high-efficiency, low-loss liquid source bubbler according to claim 1, characterized in that, The volume of the receiving cavity is V 总 The volume of the first chamber is V1, and the volume of the second chamber is V2, wherein V... 总 =V1+V2, and 0.01V 总 ≤V2≤0.2V 总 .

4. The high-efficiency, low-loss liquid source bubbler according to claim 1, characterized in that, The bubbler body includes: A cylindrical body and a spiral tube, wherein the cylindrical body is connected to the spiral tube, the inner cavity of the cylindrical body forms the first chamber, and the inner cavity of the spiral tube forms the second chamber; A cap is provided, with the first chamber having an open end opposite to the second chamber. The cap is connected to the cylinder to seal the open end of the first chamber.

5. The high-efficiency, low-loss liquid source bubbler according to claim 4, characterized in that, At least one of the cylinder and the spiral tube is made of a corrosion-resistant and high-strength material.

6. The high-efficiency, low-loss liquid source bubbler according to claim 4, characterized in that, The cylindrical body and the spiral tube are integrally formed, or the cylindrical body and the spiral tube are detachably connected, and a sealing structure is provided at the connection between the cylindrical body and the spiral tube; and / or, The cap is detachably connected to the cylinder.

7. The high-efficiency, low-loss liquid source bubbler according to any one of claims 4-6, characterized in that, The carrier gas inlet pipe includes a first section and a second section that are connected to each other. At least a portion of the first section is located inside the cylinder. The second section is fitted inside the spiral tube and has an outlet for the carrier gas inlet pipe. One end of the first section opposite to the second section is located outside the cylinder and has an inlet for the carrier gas inlet pipe.

8. The high-efficiency, low-loss liquid source bubbler according to claim 1, characterized in that, A mass flow meter is installed on the carrier gas inlet pipe. The mass flow meter is located near the inlet of the carrier gas inlet pipe. The mass flow meter is used to control at least one parameter of the carrier gas flow rate and velocity.

9. The high-efficiency, low-loss liquid source bubbler according to claim 1, characterized in that, It also includes a temperature-controlled container, with at least a portion of the bubbler body disposed within the temperature-controlled container. A temperature-controlled channel for containing a temperature-controlled liquid is defined between the outer wall surface of the bubbler body and the inner wall surface of the temperature-controlled container, so that the liquid source can exchange heat with the temperature-controlled liquid, thereby regulating the saturated vapor pressure of the liquid source.

10. The high-efficiency, low-loss liquid source bubbler according to claim 9, characterized in that, The temperature-controlled container is provided with a temperature-controlled liquid inlet pipe and a temperature-controlled liquid outlet pipe that are connected to the temperature-controlled channel, so that the temperature-controlled liquid can circulate. And / or, the temperature-controlling liquid is one of deionized water, ethanol, ethylene glycol, isopropanol, and silicone oil.

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