Temperature control device and control method

Abstract

The application belongs to the technical field of semiconductor process, and discloses a temperature control device and a control method, which comprise: a scroll tube having a scroll tube high-temperature gas outlet and a scroll tube low-temperature gas outlet; a heat exchange part for conveying high-temperature heat transfer medium obtained by heat exchange between low-temperature heat transfer medium and high-temperature gas to a chamber wall heating channel; the chamber wall heating channel is arranged in the chamber wall and is used for heating the chamber wall by using the high-temperature heat transfer medium; and a shower head cooling channel arranged in the shower head, wherein a shower head low-temperature gas inlet of the shower head cooling channel is connected with the scroll tube low-temperature gas outlet through a pipeline and is used for conveying low-temperature gas into the shower head to cool the shower head. According to the application, the scroll tube is used for simultaneously generating high-temperature gas and low-temperature gas, which are respectively used for chamber wall heating and shower head cooling; the temperature of the high-temperature gas and the low-temperature gas can be uniformly adjusted by using an adjusting rod; two independent temperature control systems for heating and cooling do not need to be separately arranged; and the configuration cost is reduced.

Description

Technical Field

[0001] This application belongs to the field of semiconductor process technology, and more specifically, relates to a temperature control device and control method. Background Technology

[0002] In PECVD (plasma-enhanced chemical vapor deposition) dielectric layer deposition processes, temperature control is a core factor determining film quality, device performance, and production yield. This is particularly important in the deposition of SiO2 and SiN. x When using dielectric layers such as SiON, the mainstream process temperature is controlled between 300 and 350°C, and the temperature uniformity of the constant temperature zone in the chamber must be strictly controlled within ±2°C to avoid excessive temperature gradients in the chamber and to prevent the temperature uniformity from deviating from a reasonable range.

[0003] Therefore, deionized water is usually preheated to 80°C before being injected into the inner layer of the chamber wall to minimize the temperature difference with the process temperature. Figure 1 In this process, a jacket is installed on the side wall of the chamber to allow deionized water to flow. Deionized water at 25°C is heated to 80°C through heat exchange before entering the jacket and exiting from the deionized water outlet. The spray head not only distributes the process gases evenly across the wafer surface but also typically acts as a radio frequency (RF) electrode to introduce plasma energy. Figure 1 As can be seen, the spray head is located at the upper end of the chamber 2. A plasma source is introduced above the spray head 1 to generate plasma under the excitation of the radio frequency power supply. Below the spray head is a heater 3, which is used to heat the substrate to the process temperature. Under the dual action of the heater and the plasma, the spray head will bear extremely high heat load, and its body temperature is very likely to exceed the safety threshold.

[0004] To prevent the spray heads from overheating, active cooling is essential, but traditional cooling methods all have significant technological drawbacks. One method involves injecting cooling water, which requires the spray head to have a complex internal flow channel and sealing structure. This increases the difficulty of machining and manufacturing costs. Moreover, under long-term high and low temperature alternation and plasma bombardment, the water channel seals are prone to aging and failure, posing a risk of leakage and chamber failure. Another method involves injecting compressed air. Compressed air generates a large amount of heat during compression, and its own temperature is often high, making it inefficient as a cooling medium.

[0005] Moreover, the heating of deionized water uses one heating device and the cooling of the spray head uses another cooling device. The two devices are controlled independently, and their configuration cost is relatively high.

[0006] Therefore, it is necessary to improve the existing spray head cooling and deionized water heating processes to enhance the cooling efficiency of the spray heads and the heating efficiency of the deionized water. Summary of the Invention

[0007] [Technical Issues]

[0008] The technical problem that this invention aims to solve is that the independent heating system for the chamber wall and the cooling system for the spray head result in low efficiency of chamber temperature control.

[0009] [Technical Solution]

[0010] According to a first aspect of this application, a temperature control device is provided for controlling the temperature of a substrate deposition equipment chamber, comprising: Vortex tubes are used to generate high-temperature and low-temperature gases. The heat exchange section uses the high-temperature gas from the vortex tube to heat the heat transfer medium; The chamber wall heating channel uses the heated heat transfer medium to heat the chamber wall; The spray head cooling channel receives the low-temperature gas from the vortex tube to cool the spray head.

[0011] In one possible implementation, the vortex tube includes a high-temperature flow path for generating high-temperature gas and a low-temperature flow path for generating low-temperature gas, wherein the high-temperature gas from the high-temperature flow path is supplied from the high-temperature gas outlet of the vortex tube to the heat exchange section.

[0012] In one possible implementation, the heat exchange unit is configured to circulate and heat the heat transfer medium using high-temperature gas received from the vortex tube. The chamber wall heating channel is configured to heat the chamber wall using the heated heat transfer medium.

[0013] In one possible implementation, the spray head cooling channel is configured to supply the cryogenic gas from the vortex tube to the internal flow path of the spray head as a cooling fluid circulation.

[0014] In one possible implementation, the spray head cooling channel includes an inflow section at the top of the spray head and an outlet section at the top.

[0015] In one possible implementation, a gas temperature regulating mechanism is provided at the high-temperature gas outlet of the vortex tube, including: The three-way valve has its first port aligned with the high-temperature gas outlet of the vortex tube, its second port aligned with the first port, and its third port serving as the high-temperature gas outlet of the vortex tube. The adjusting rod, one end of which passes sequentially through the second interface and the first interface, is inserted into the high-temperature gas outlet of the vortex tube. An elastic tube is disposed around the adjusting rod, with one end sealed to the second interface and the other end sealed to the other end of the adjusting rod. The position of the adjusting rod is adjusted by the extension and retraction of the elastic tube.

[0016] In one possible implementation, the elastic tube is a bellows, one end of which is sealed to the outside of the second interface, and the other end of which is sealed to the other end of the adjusting rod and the sliding mechanism. The position of the adjusting rod is adjusted by driving the bellows to extend or retract through the sliding mechanism.

[0017] In one possible implementation, a sealing plate for sealing the second interface is provided outside the second interface of the tee, and a first flange is fixedly connected to one end of the bellows. The first flange is sealed to the outside of the second interface of the tee and presses the sealing plate onto the outside of the second interface of the tee. Multiple support rods are provided on the first flange. The other end of the bellows is fixedly connected to a second flange. The multiple support rods are slidably connected to the second flange. The other end of the adjusting rod passes through the sealing plate and is sealed to the second flange. The support rods are threaded, and nuts are screwed onto the support rods on both sides of the second flange. The expansion and contraction of the bellows are adjusted by rotating the nuts, thereby controlling the position of the adjusting rod.

[0018] In one possible implementation, a mounting groove is provided on the outside of the second flange, the other end of the adjusting rod is installed in the mounting groove, and a pressure plate is slidably sleeved on the plurality of support rods, the pressure plate pressing on the other end of the adjusting rod, and a nut clamping the second flange, the other end of the adjusting rod, and the pressure plate onto the support rods.

[0019] In one possible implementation, one end of the support rod is rotatably mounted on the first flange, and the other end is connected to a motor. The motor drives the support rod to rotate, causing the nut to move along the support rod.

[0020] In one possible implementation, the chamber wall heating channel is any form of a sandwich, channel, or coil disposed within the chamber wall.

[0021] In one possible implementation, the spray head cooling channel extends above the spray head and avoids the process gas and plasma source gas inlet channels.

[0022] In one possible implementation, the lower part of the spray head is provided with multiple nozzles, and the inlet channels for the process gas and plasma source gas are connected to the multiple nozzles.

[0023] In one possible implementation, the gas pipeline for conveying cryogenic / high-temperature gases includes an inner pipe wall, an outer pipe wall, and an insulation layer therebetween.

[0024] In one possible implementation, the insulation layer is an insulating material or a vacuum layer.

[0025] In one possible implementation, the inner and outer pipe walls are metal layers, and the insulation layer is an insulation material, which is at least one of ceramic fiber, aerogel, glass fiber, PTFE, and PE.

[0026] In one possible implementation, the inner and outer tube walls are made of plastic, and the insulation layer is a vacuum layer.

[0027] In one possible implementation, the plastic is made of PE or PTFE.

[0028] In one possible implementation, an electric heater is wrapped around the outside of the outer tube wall to compensate for the temperature drop in the gas pipeline containing the high-temperature gas.

[0029] In one possible implementation, temperature sensors and flow sensors are installed in both the high-temperature and low-temperature flow paths of the vortex tube. Both temperature sensors and flow sensors are connected to a controller. The controller controls the operation of the motor based on the error between the current value and the target value of the low-temperature gas temperature, thereby adjusting the position of the regulating rod.

[0030] In one possible implementation, the heat exchange section is a hollow sealed cavity containing a coil through which a heat transfer medium is introduced. The high-temperature gas from the vortex tube is introduced into the cavity to exchange heat with the heat transfer medium.

[0031] In one possible implementation, the high-temperature gas that has completed heat exchange with the heat transfer medium in the heat exchange section is also connected to a vacuum pump through a pipeline for cooling the vacuum pump.

[0032] In one possible implementation, the vortex tube further includes a vortex tube inlet on its sidewall, which is connected to a compressed air source via a vortex tube inlet pipe.

[0033] In one possible implementation, an intake valve and a filter are provided on the vortex tube intake line.

[0034] In one possible implementation, the temperature range of the cryogenic gas in the vortex tube is -40 to 25°C, and the flow rate range of the cryogenic gas is 0 to 100 SLM.

[0035] In one possible implementation, the sealing plate is made of PTFE.

[0036] In one possible implementation, the heat transfer medium is deionized water.

[0037] According to a second aspect of this application, a temperature control method for a deposition equipment chamber is provided, employing the temperature control device described above to perform the following operations: Set the target values ​​for the low-temperature gas temperature, high-temperature gas temperature, low-temperature gas flow rate, and high-temperature gas flow rate of the vortex tube according to the process steps. Obtain the current value of the cryogenic gas temperature in the vortex tube, calculate the error between the current value and the target value of the cryogenic gas temperature. If the error is less than the set error threshold, keep the current position of the adjustment rod unchanged. If the error is greater than or equal to the set error threshold, control the position of the adjustment rod to change, thereby adjusting the cryogenic gas temperature and the high-temperature gas temperature of the vortex tube until the error is less than the set error threshold.

[0038] In one possible implementation, the set error threshold is 5°C.

[0039] [Beneficial Effects]

[0040] (1) The vortex tube generates high-temperature gas and low-temperature gas at the same time, which are used for heating the chamber wall and cooling the spray head respectively. The temperature of the high-temperature gas and the low-temperature gas can be uniformly adjusted by adjusting the rod. There is no need to configure two separate temperature control systems for heating and cooling, which reduces the configuration cost.

[0041] (2) The vortex tube can quickly generate hot and cold airflows instantly when it is ventilated, and the position of the regulating rod can be controlled by the expansion and contraction elasticity of the bellows under sealed conditions, so that the gas temperature can be quickly adjusted under good vortex tube sealing conditions, thereby improving the accuracy of temperature control in the deposition equipment chamber.

[0042] (3) Directly cooling the spray head with compressed air is not low enough and may contain water vapor. By passing the filtered compressed air into the vortex tube to generate low-temperature gas, the spray head can be cooled. This not only provides sufficient cooling gas but also avoids the impact of water vapor on the process.

[0043] (4) The low-temperature gas inlet and cooling channel of the spray head are kept away from the process gas and plasma gas channels and do not affect each other.

[0044] (5) Low temperature / high temperature gas pipelines adopt a double-layer insulation structure to maintain the temperature of the gas in the pipeline.

[0045] (6) An electric heater is wrapped around the outer side of the outer tube wall, which can be used to compensate for the temperature drop of the gas pipeline of high temperature gas. Attached Figure Description

[0046] Figure 1 This is a schematic diagram of chamber temperature control in the prior art; Figure 2 This is a schematic diagram illustrating the working principle of a vortex tube. Figure 3This is a two-dimensional schematic diagram of a temperature control device according to an embodiment of this application; Figure 4 This is a schematic diagram of the heat exchange section according to an embodiment of this application; Figure 5 This is a schematic diagram of the cooling channel of the spray head according to an embodiment of this application; Figure 6 This is a schematic diagram of one form of the gas temperature regulating mechanism according to an embodiment of this application; Figure 7 This is a schematic diagram of another form of the gas temperature regulating mechanism according to an embodiment of this application; Figure 8 This is a three-dimensional schematic diagram of a temperature control device according to an embodiment of this application; Figure 9 This is a schematic diagram of the double-walled tube structure according to an embodiment of this application.

[0047] Figure label: 1. Spray head; 602. Insulation layer; 3. Heater; 4. Vortex tube; 41. Vortex tube air inlet; 42. Vortex tube high-temperature gas outlet; 43. Vortex tube low-temperature gas outlet; 44. Inlet valve; 45. Filter; 200. Heat exchange section; 201. Heat exchange section low-temperature deionized water inlet; 202. Heat exchange section high-temperature plasma water outlet; 203. Heat exchange section high-temperature gas inlet; 204. Heat exchange section low-temperature gas outlet; 300. Chamber wall heating channel; 301. Chamber wall low-temperature deionized water outlet; 302. Spray head cooling channel. Channel 400, spray head low temperature gas inlet 401, process gas and plasma source gas inlet channel 402, spray head cooling gas outlet 403, gas temperature regulating mechanism 500, tee 501, adjusting rod 502, sealing plate 503, bellows 504, first flange 505, second flange 506, support rod 507, nut 508, mounting groove 509, pressure plate 510, disc 511, elastic pipe fitting 600, outer pipe wall 601, heat insulation layer 602, inner pipe wall 603. Detailed Implementation

[0048] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0049] A vortex tube can separate a high-temperature airflow and a low-temperature airflow simultaneously using only compressed air without the use of any refrigerant or electrical energy. Its working principle is mainly based on the vortex effect and energy separation in fluid mechanics.

[0050] like Figure 2As shown, high-pressure compressed air is injected into the cylindrical chamber of the vortex tube 4 at extremely high speed through a tangential nozzle along the tangential direction. Due to the tangential force, the air rapidly forms a high-speed rotating outer vortex inside the vortex tube. Figure 1 The outer spiral is the outer vortex. As this outer vortex rotates along the pipe wall towards the hot end, according to the law of conservation of angular momentum, the rotational speed of the outer air increases sharply as the radius of rotation decreases. During this process, energy separation occurs. As the outer air rotates at high speed and rubs against each other, its kinetic energy is converted into heat energy, causing its temperature to rise sharply. This hot air is eventually discharged from the hot end, forming high-temperature gas.

[0051] In the central region of the vortex tube, a low-pressure inner vortex rotating in the opposite direction will form, such as... Figure 1 The spiral on the inner side is the inner vortex. As the outer air continuously transfers kinetic energy to the outer layer through viscous shear force, the inner air loses energy during expansion and reverse flow, causing a sharp drop in temperature. This portion of cold air flows in the opposite direction along the tube axis and is discharged from the cold end, forming a low-temperature gas.

[0052] The hot end of a vortex tube is typically equipped with an adjustable frustum-shaped regulating valve. By adjusting the opening of this valve, the resistance and flow rate of the discharged hot gas can be changed, thereby precisely controlling the ratio of hot and cold gas and the temperature difference between the two ends. Opening the regulating valve more fully lowers the temperature and reduces the flow rate of the low-temperature gas at the cold end; opening the regulating valve less fully raises the temperature and increases the flow rate of the low-temperature gas at the cold end.

[0053] The applicant discovered that a vortex tube can be used to generate both high-temperature and low-temperature gases simultaneously. While supplying low-temperature gas to the spray head, the high-temperature gas can be used to heat deionized water. This not only enables simultaneous cooling and heating but also reduces the need for additional cooling and heating devices.

[0054] This application provides a temperature control device for temperature control of the chamber of a substrate deposition equipment, such as... Figure 3 As shown, it includes a vortex tube 4 for simultaneously generating high-temperature gas and low-temperature gas; a heat exchange section 200 for exchanging heat between deionized water and high-temperature gas to obtain high-temperature deionized water; a chamber wall heating channel 300 disposed inside the chamber wall to heat the chamber wall using high-temperature deionized water; and a spray head cooling channel 400 disposed inside the spray head for introducing low-temperature gas into the spray head to cool it.

[0055] The vortex tube 4 includes a vortex tube inlet 41 on its side wall, which can be connected to a compressed air source via a vortex tube inlet pipe. The compressed air source is injected tangentially into the vortex tube 4, where it separates into a high-temperature flow path containing high-temperature gas and a low-temperature flow path containing low-temperature gas. One end of the vortex tube 4 is a high-temperature gas outlet 42, from which the high-temperature gas exits, and the other end is a low-temperature gas outlet 43, from which the low-temperature gas exits. The high-temperature gas is transported from the high-temperature gas outlet 42 along the pipe to a heat exchange section 200. The heat exchange section 200 has a low-temperature deionized water inlet, a high-temperature plasma water outlet 202, a high-temperature gas inlet 203, and a low-temperature gas outlet 204. The low-temperature deionized water inlet 201 is used to introduce low-temperature deionized water, such as deionized water at 25°C, into the heat exchange section 200. The high-temperature gas from the vortex tube enters the heat exchange section 200 through the high-temperature gas inlet 203, where it exchanges heat with the low-temperature deionized water, becoming low-temperature gas, and is discharged from the low-temperature gas outlet 204 of the heat exchange section. The deionized water absorbs the heat from the high-temperature gas and becomes high-temperature deionized water, for example, deionized water heated to 80°C, and is discharged from the high-temperature plasma water outlet 202 of the heat exchange section.

[0056] The high-temperature plasma water outlet 202 of the heat exchange section is connected to the chamber wall heating channel 300 via a pipeline. The chamber wall heating channel 300 can be a sandwich structure disposed within the chamber wall; for example, there may be one or more sandwich structures between the outer and inner walls of the chamber wall, through which high-temperature deionized water is introduced to heat the chamber wall. Alternatively, it can be a heating coil embedded within the chamber wall instead of a sandwich structure. The high-temperature deionized water entering the chamber wall heating channel 300 heats the chamber wall, maintaining a certain temperature to avoid an excessive temperature gradient with the interior of the process chamber.

[0057] After the high-temperature deionized water exchanges heat with the chamber wall, it is discharged from the low-temperature deionized water outlet 301 of the chamber wall and circulates to the low-temperature deionized water inlet 201 of the heat exchange section.

[0058] like Figure 4As shown, the heat exchange section 200 is a hollow, sealed cavity. Its low-temperature deionized water inlet 201 is connected to a coil inside the heat exchange section. The coil extends from one end of the heat exchange section 200 to the other end, connecting to the high-temperature deionized water outlet 202. The high-temperature gas inlet 203 and the low-temperature gas outlet 204 are connected to the interior of the heat exchange section 200. High-temperature gas enters the heat exchange section 200 and flows along the outside of the coil, exchanging heat only without mixing with the deionized water. The high-temperature gas flow path and the deionized water flow path are completely separated by the wall. After heat exchange, the high-temperature gas is converted into low-temperature gas and discharged outwards through the low-temperature gas outlet.

[0059] In one feasible embodiment, the cryogenic gas outlet 204 of the heat exchange section is also connected to a vacuum pump via a pipeline. The vacuum pump generates a large amount of heat during the evacuation of the process chamber. Sustained high temperatures can lead to rotor expansion, aging of seals, carbonization of lubricating oil, and even mechanical seizure. By supplying cooled gas to the vacuum pump, the heat of compression can be effectively removed, maintaining the pump body within a safe operating temperature range and extending the equipment's lifespan.

[0060] like Figure 5 As shown, the cryogenic gas from the vortex tube 4 is connected via a pipeline to the cryogenic gas inlet 401 of the spray head cooling channel 400. The cryogenic gas inlet 401 is connected to the spray head cooling channel 400 and is used to cool the spray head. The upper middle part of the spray head is the process gas and plasma source gas inlet channel 402. It can be seen that this process gas and plasma source gas inlet channel 402 extends downwards to the lower part of the spray head 1. Multiple nozzles are located at the lower part of the spray head 1, thereby injecting the process gas and remote plasma source gas into the process chamber. The spray head cooling channel 400 needs to avoid this inlet channel 402 and the multiple nozzle areas at the lower part of the spray head. Therefore, the cryogenic gas inlet 401 is located at the upper part of the spray head, and the spray head cooling channel extends at the upper part of the spray head 1, avoiding the process gas and plasma source gas inlet channel 402. This application does not limit the arrangement of the cooling channel 400 on the top of the spray head. For example, the cooling channel 400 of the spray head can be a series of annular channels, a serpentine cooling channel, or one or more layers, as long as it covers most of the area of ​​the spray head as much as possible to achieve a better cooling effect.

[0061] The spray head is also equipped with a spray head cooling gas outlet 403. The cooled gas that has been cooled is discharged from the spray head cooling gas outlet 403. Since it is a pollution-free gas, it can be directly discharged into the atmosphere.

[0062] In one feasible embodiment, such as Figure 6As shown, an intake valve 44 and a filter 45 can be installed on the vortex tube intake pipe. The intake valve 44 controls the flow of compressed air, while the filter 45 filters out particulate impurities in the compressed air. The low-temperature gas generated by the compressed air is used to cool the spray head. If there are particulate impurities in the compressed air, they may also mix into the low-temperature gas. If the spray head cooling channel 400 leaks, particulate impurities may enter the spray head or even the chamber, causing contamination to the substrate deposition space.

[0063] In one feasible embodiment, a gas temperature regulating mechanism 500 is provided at the high-temperature gas outlet of the vortex tube, such as... Figure 6 As shown, the device includes a tee 501. The first port of the tee 501 is aligned with the high-temperature gas outlet 42 of the vortex tube. The tee can be connected to the high-temperature gas outlet of the vortex tube by means such as welding, or it can be integrally formed. The second port of the tee is aligned with the first port, and the third port of the tee serves as the high-temperature gas outlet of the vortex tube. One end of an adjusting rod 502 passes through the second port and the first port in sequence and is inserted axially into the high-temperature gas outlet 42 of the vortex tube. The axial movement of the adjusting rod 502 changes the flow rate of the high-temperature gas discharged from the vortex tube 4, thereby controlling the temperature changes of the high-temperature gas and the low-temperature gas in the vortex tube.

[0064] Current methods for regulating the high-temperature gas in vortex tubes typically involve, for example: Figure 1 As shown, the flow rate of the high-temperature gas is adjusted by a frustum-shaped regulating valve, thereby controlling the temperature change of the high-temperature gas in the vortex tube. When adjustment is needed, the silencer at the high-temperature gas end is removed, and the frustum-shaped regulating valve is tightened with a flathead screwdriver. For example, turning it clockwise increases the temperature and flow rate at the low-temperature gas end, while turning it counterclockwise decreases the temperature and flow rate. However, this adjustment method makes it difficult to achieve a sealed adjustment at the high-temperature gas end because both the regulating valve and the high-temperature gas need to be adjusted.

[0065] like Figure 6 As shown, this application can use an elastic tube 600 disposed around the adjusting rod 502, with one end sealed to the second interface and the other end sealed to the other end of the adjusting rod, so that the position of the adjusting rod can be adjusted by the extension and retraction of the elastic tube.

[0066] For example, the elastic fitting is a bellows. A more specific example of the gas temperature regulating mechanism 500 is described below. This application provides a sealing plate 503 on the outside of the second interface of the tee to seal the second interface. This sealing plate 503 can be made of plastic, such as polytetrafluoroethylene (PTFE). The sealing plate 503 is attached to the outer end face of the second interface of the tee, thereby completely sealing the second interface. Furthermore, a bellows 504 is also provided on the outside of the sealing plate 503. One end of the bellows 504 is fixedly connected to the outside of the second interface of the tee, for example, by fasteners such as bolts.

[0067] More specifically, one end of the bellows 504 is fixedly connected to a first flange 505. The first flange 505 can be fixedly connected to the outside of the second interface of the tee by bolts or other fasteners, thereby sealing and fixing one end of the bellows to the outside of the second interface of the tee. The first flange 505 has a step size corresponding to the outer edge of the sealing plate 503. The depth of the step is equivalent to the thickness of the sealing plate 503, and the outer edge size of the step is equivalent to the outer edge size of the sealing plate. For example, if the sealing plate 503 is a circular plate with a thickness of 5mm, then the step is a circular step with a depth of 5mm. If the diameter of the sealing plate 503 is 150mm, then the outer edge diameter of the step is also 150mm, thus pressing the sealing plate 503 precisely onto the outside of the second interface of the tee, thereby sealing and connecting one end of the bellows to the second interface of the tee.

[0068] The other end of the bellows 504 is fixedly connected to a second flange 506. Multiple through holes with axes parallel to the axis of the scroll tube are spaced apart along the circumference of the second flange 506. Multiple support rods 507 are also provided outside the second interface of the tee. The support rods 507 are parallel to the axis of the scroll tube and pass through the through holes, allowing the second flange 506 to move along the support rods 507. Since the bellows 504 is a telescopic structure, it can extend and retract as the second flange 506 moves along the support rods 507, while the bellows 504 constantly compresses the sealing plate 503, thus sealing the second interface of the tee.

[0069] The support rod 507 may be threaded, and nuts 508 are screwed onto the support rods on both sides of the second flange 506. By turning the nuts 508 with a wrench, the nuts 508 move along the support rod 507, thereby causing the second flange 506 to move along the support rod 507. For example, if there are two support rods 507, two nuts 508 are screwed onto each support rod 507, located on opposite sides of the second flange. The two nuts 508 rotate in the same direction; for example, if the nut 508 on one side of the second flange 506 rotates clockwise, the nut 508 on the other side also rotates clockwise, ensuring that the nuts 508 move in the same direction on the support rod 507.

[0070] The adjusting rod 502 passes through the sealing plate and connects to the second flange 506. For example, a mounting groove 509 is provided on the outside of the second flange. The end of the adjusting rod 502 away from the vortex tube 4 is a disc 511 installed in the mounting groove 509. A pressure plate 510 is also slidably sleeved on the support rod 507, pressing against the outside of the disc 511. A nut clamps the second flange 506 and the pressure plate 510 onto the support rod 507. As the nut moves, the pressure plate extends and retracts along with the bellows, thereby causing the adjusting rod 502 to move axially. It should be noted that the pressure plate 510, the disc 511, and the second flange 506 can be assembled as described above, or they can be integrally connected, for example, integrally molded.

[0071] More specifically, for example, to reduce the flow rate of the high-temperature gas outlet, the adjusting rod needs to be moved to the right. First, rotate the nut 508 on the right side of the second flange 506, then rotate all the right-side nuts of the support rods 507, moving the nuts a short distance to the right. Since the left-side nuts are still against the left side of the second flange, the bellows continues to press against the sealing plate, sealing the second interface of the tee. Then, rotate the nut on the left side of the second flange, pushing the bellows to contract. While maintaining the seal on the second interface, adjust the adjusting rod to the desired position.

[0072] For example, to increase the flow rate of the high-temperature gas outlet, the adjusting rod needs to be moved to the left. First, rotate the nut on the left side of the second flange, rotating all the left-side nuts of the support rods so that the nuts move a certain distance to the left. Because the bellows has a certain capacity for contraction and expansion, the left side of the bellows moves with the left-side nut, causing the bellows to expand. The left-side nut still presses against the left side of the second flange, ensuring that the bellows continues to press against the sealing plate, sealing the second interface of the tee. Then, rotate the nut on the right side of the second flange, pushing the bellows to expand. While maintaining the seal on the second interface, adjust the adjusting rod to the desired position.

[0073] like Figure 6As shown, the end of the adjusting rod is frustoconical. The adjusting rod is inserted into the high-temperature gas outlet of the vortex tube. As the adjusting rod moves, the gap between the outer periphery of the end of the adjusting rod and the high-temperature gas outlet of the vortex tube can be adjusted, thereby adjusting the flow rate of the high-temperature gas.

[0074] It should be noted that corrugated pipe is only a suitable expansion joint, but this application does not limit it to the use of corrugated pipe, and rubber expansion joints can also be used, for example.

[0075] In addition, to facilitate control of the nut's movement, multiple support rods can be rotatably mounted at one end on the first flange, with the other end connected to a motor. The motor drives the support rods to rotate, causing the nut to move along the support rods. It should be noted that a structure can be included to restrict the nut's rotation, ensuring that the nut moves when the support rods rotate.

[0076] However, this application does not exclude the possibility of rotating the nut by directly driving it, such as by manually tightening the nut or by using a drive mechanism. For example, teeth could be provided on the outer circumference of the nut, and the nut could be driven to rotate through tooth meshing.

[0077] Temperature and flow sensors are installed on the pipes connected to the high-temperature gas outlet 42 and the low-temperature gas outlet 43 of the vortex tube 4. Both sensors are connected to a controller, transmitting temperature and flow data. The controller automatically adjusts the position of the regulating lever based on the measured temperature and flow rate to maintain the target temperature and flow rate. For example, to cool the PECVD chamber, the target temperature for the cooling gas can be set to -20°C and the flow rate to 50 SLM. The target temperature for the high-temperature gas can be set to 80°C and the flow rate to 30 SLM. The controller controls the opening of the high-temperature outlet and the supply pressure to meet the targets.

[0078] Table 1 below shows the flow rate and temperature data of high-temperature and low-temperature gases obtained by adjusting the position of the regulating lever.

[0079] Table 1

[0080] The temperature adjustment range of the cryogenic gas in the vortex tube of this application is -40~25℃, and the flow rate adjustment range is 0~100SLM.

[0081] In one feasible embodiment, the gas pipeline for conveying cryogenic / high-temperature gases has a double-walled structure, such as... Figure 8As shown, a heat insulation layer 602 is formed between the outer tube wall 601 and the inner tube wall 603. The heat insulation layer 602 can be a heat insulation material or a vacuum layer. Specifically, the high-temperature gas pipeline connecting the third interface of the tee to the high-temperature gas inlet of the heat exchange section, the low-temperature gas pipeline connecting the low-temperature gas outlet of the vortex tube to the low-temperature gas inlet of the spray head, and the high-temperature plasma water outlet of the heat exchange section can all adopt a double-layer pipe structure.

[0082] For example, the double-walled tube structure includes an inner tube wall 603, an outer tube wall 601, and a filler therebetween. For example, the inner tube wall 603 and the outer tube wall 601 can both be metal layers, and the intermediate filler can be a heat insulation layer, including at least one selected from ceramic fiber, aerogel, glass fiber, PTFE (polytetrafluoroethylene), and PE (polyethylene).

[0083] Alternatively, both the inner tube wall 603 and the outer tube wall 601 can be made of plastic, and a vacuum can be created between the inner tube wall 603 and the outer tube wall 601. The preferred plastic material is PE / PTFE.

[0084] Furthermore, an electric heater can be wound around the outside of the outer tube wall 601 to form a thermal sheath and compensate for the temperature drop in the high-temperature gas pipeline.

[0085] Table 2 shows the performance parameters of the inner and outer pipe walls made of stainless steel, and the intermediate heat insulation layer made of alumina ceramic, PE, PTFE, and hydrogel. Among them, PTFE has the lowest thermal conductivity (0.20~0.25) and the best heat insulation performance.

[0086] Table 2

[0087] The working process of this temperature control device is explained below. Step S1: Check the process steps and set the target temperature and target flow rate (Tc_set, Th_set, Qc_set, Qh_set) according to the process steps. For example, the process steps are deposition, cooling, standby, etc.

[0088] Tc_set is the target temperature value of the cryogenic gas in the vortex tube, Th_set is the target temperature value of the high-temperature gas in the vortex tube, Qc_set is the target flow rate of the cryogenic gas in the vortex tube, and Qh_set is the target flow rate of the high-temperature gas in the vortex tube.

[0089] For example, Tc_set=-25℃, Th_set=5℃, Qc_set=50SLM, Qh_set=50SLM.

[0090] Step S2: Obtain the current sensor values, including the current temperature of the vortex tube's cryogenic gas Tc, the current temperature of the vortex tube's high-temperature gas Th, the current flow rate of the vortex tube's cryogenic gas Qc, and the current flow rate of the vortex tube's high-temperature gas Qh.

[0091] Step S3: Calculate the error ΔTc between the current value of the cryogenic gas temperature and the target value of the cryogenic gas temperature. If ΔTc is less than the set error threshold, keep the current position of the adjusting rod unchanged. If ΔTc is greater than or equal to the set error threshold, control the nut to rotate, so that the bellows can extend and retract to control the position change of the adjusting rod, thereby adjusting the cryogenic gas temperature of the vortex tube and the high-temperature gas temperature of the vortex tube, and return to step S2 until ΔTc is less than the set error threshold.

[0092] The set error threshold is 5℃.

[0093] Of course, the present invention may have other various embodiments. Without departing from the spirit and essence of the present invention, those skilled in the art can make various corresponding changes and modifications according to the present invention, but these corresponding changes and modifications are all within the protection scope of the claims of the present invention.

Claims

1. A temperature control device for controlling the temperature of a chamber in a substrate deposition equipment, characterized in that, include: Vortex tubes are used to generate high-temperature and low-temperature gases. The heat exchange section uses the high-temperature gas from the vortex tube to heat the heat transfer medium. The chamber wall heating channel uses the heated heat transfer medium to heat the chamber wall; The spray head cooling channel receives the low-temperature gas from the vortex tube to cool the spray head.

2. The temperature control device according to claim 1, characterized in that, The vortex tube includes a high-temperature flow path for generating high-temperature gas and a low-temperature flow path for generating low-temperature gas. The high-temperature gas from the high-temperature flow path is supplied to the heat exchange section from the high-temperature gas outlet of the vortex tube.

3. The temperature control device according to claim 1, characterized in that, The heat exchange section is configured to circulate and heat the heat transfer medium using high-temperature gas received from the vortex tube. The chamber wall heating channel is configured to heat the chamber wall using the heated heat transfer medium.

4. The temperature control device according to claim 1, characterized in that, The cooling channel of the spray head is configured to supply the low-temperature gas from the vortex tube to the internal flow path of the spray head as a cooling fluid circulation.

5. The temperature control device according to claim 4, characterized in that, The spray head cooling channel includes an inflow section at the top of the spray head and an outlet section at the top.

6. The temperature control device according to claim 2, characterized in that, A gas temperature regulating mechanism is provided at the high-temperature gas outlet of the vortex tube, including: The three-way valve has its first port aligned with the high-temperature gas outlet of the vortex tube, its second port aligned with the first port, and its third port serving as the high-temperature gas outlet of the vortex tube. The adjusting rod, one end of which passes sequentially through the second interface and the first interface, is inserted into the high-temperature gas outlet of the vortex tube. An elastic tube is disposed around the adjusting rod, with one end sealed to the second interface and the other end sealed to the other end of the adjusting rod. The position of the adjusting rod is adjusted by the extension and retraction of the elastic tube.

7. The temperature control device according to claim 6, characterized in that, The elastic tube is a corrugated tube. One end of the corrugated tube is sealed to the outside of the second interface, and the other end of the corrugated tube is sealed to the other end of the adjusting rod and the sliding mechanism. The position of the adjusting rod is adjusted by driving the corrugated tube to extend and retract through the sliding mechanism.

8. The temperature control device according to claim 7, characterized in that, A sealing plate for sealing the second interface is provided on the outside of the tee. One end of the bellows is fixedly connected to a first flange. The first flange is sealed to the outside of the second interface of the tee and presses the sealing plate onto the outside of the second interface of the tee. Multiple support rods are provided on the first flange. The other end of the bellows is fixedly connected to a second flange. The multiple support rods are slidably connected to the second flange. The other end of the adjusting rod passes through the sealing plate and is sealed to the second flange. The support rods are threaded, and nuts are screwed onto the support rods on both sides of the second flange. The expansion and contraction of the bellows are adjusted by rotating the nuts, thereby controlling the position of the adjusting rod.

9. The temperature control device according to claim 8, characterized in that, An installation groove is provided on the outside of the second flange, and the other end of the adjusting rod is installed in the installation groove. A pressure plate is also slidably sleeved on the multiple support rods. The pressure plate presses on the other end of the adjusting rod, and the nut clamps the second flange, the other end of the adjusting rod, and the pressure plate on the support rods.

10. The temperature control device according to claim 8, characterized in that, One end of the support rod is rotatably mounted on the first flange, and the other end is connected to a motor. The motor drives the support rod to rotate, causing the nut to move along the support rod.

11. The temperature control device according to claim 1, characterized in that, The chamber wall heating channel can be any form of interlayer, channel, or coil located within the chamber wall.

12. The temperature control device according to claim 1, characterized in that, The cooling channel of the spray head extends to the upper part of the spray head and avoids the inlet channels of process gas and plasma source gas.

13. The temperature control device according to claim 12, characterized in that, The lower part of the spray head is provided with multiple nozzles, and the inlet channels for the process gas and plasma source gas are connected to the multiple nozzles.

14. The temperature control device according to claim 1, characterized in that, Gas pipelines used to transport cryogenic / high-temperature gases include an inner pipe wall, an outer pipe wall, and an insulation layer between them.

15. The temperature control device according to claim 14, characterized in that, The insulation layer is either an insulation material or a vacuum layer.

16. The temperature control device according to claim 15, characterized in that, The inner and outer pipe walls are metal layers, and the insulation layer is an insulation material, which is at least one of ceramic fiber, aerogel, glass fiber, PTFE, and PE.

17. The temperature control device according to claim 15, characterized in that, The inner and outer pipe walls are made of plastic, and the insulation layer is a vacuum layer.

18. The temperature control device according to claim 17, characterized in that, The plastic is made of PE or PTFE.

19. The temperature control device according to claim 14, characterized in that, An electric heater is wrapped around the outside of the outer tube wall to compensate for the temperature drop in the gas pipeline containing high-temperature gas.

20. The temperature control device according to claim 10, characterized in that, Temperature sensors and flow sensors are installed in both the high-temperature and low-temperature flow paths of the vortex tube. Both temperature sensors and flow sensors are connected to the controller. The controller controls the motor operation based on the error between the current value and the target value of the low-temperature gas temperature, thereby adjusting the position of the regulating rod.

21. The temperature control device according to claim 1, characterized in that, The heat exchange section is a hollow sealed cavity containing a coil through which a heat transfer medium is introduced. The high-temperature gas from the vortex tube is introduced into the cavity to exchange heat with the heat transfer medium.

22. The temperature control device according to claim 21, characterized in that, The high-temperature gas that has completed heat exchange with the heat transfer medium in the heat exchange section is also connected to the vacuum pump through a pipeline for cooling the vacuum pump.

23. The temperature control device according to claim 1, characterized in that, The vortex tube also includes a vortex tube inlet on its side wall, which is connected to a compressed air source through a vortex tube inlet pipe.

24. The temperature control device according to claim 23, characterized in that, An intake valve and a filter are installed on the intake pipe of the vortex tube.

25. The temperature control device according to claim 1, characterized in that, The temperature adjustment range of the cryogenic gas in the vortex tube is -40~25℃, and the flow rate adjustment range of the cryogenic gas is 0~100SLM.

26. The temperature control device according to claim 8, characterized in that, The sealing plate is made of PTFE.

27. The temperature control device according to claim 1, characterized in that, The heat transfer medium is deionized water.

28. A temperature control method, characterized in that, Using the temperature control device according to any one of claims 1 to 27, the following operations are performed: Set the target values ​​for the low-temperature gas temperature, high-temperature gas temperature, low-temperature gas flow rate, and high-temperature gas flow rate of the vortex tube according to the process steps. Obtain the current value of the cryogenic gas temperature in the vortex tube, calculate the error between the current value and the target value of the cryogenic gas temperature. If the error is less than the set error threshold, keep the current position of the adjustment rod unchanged. If the error is greater than or equal to the set error threshold, control the position of the adjustment rod to change, thereby adjusting the cryogenic gas temperature and the high-temperature gas temperature of the vortex tube until the error is less than the set error threshold.

29. The temperature control method according to claim 28, characterized in that, The set error threshold is 5°C.

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