A controllable passivation method and information storage method for aluminum thin film material and a writing device

Abstract

The application discloses a controllable passivation and information storage method and device based on aluminum film material, and the method comprises the following steps: preparing an aluminum film, covering a water film layer on the aluminum film, and sealing the aluminum film with a cover glass; outputting modulated processing laser through a laser processing module and focusing the processing laser on the aluminum film; generating a local transparent oxide layer through a back light-heat hydration effect on the aluminum film at the focusing position, and completing one controllable passivation; moving the focusing position and changing the light field intensity characteristics of the processing laser to perform multiple passivation transfers, and forming a two-dimensional array pattern with stored information. The application realizes accurate controllable passivation through laser action on a liquid-solid interface photo-thermal induction, utilizes the change of the light transmittance of the oxide layer after passivation to form a distinction, uses the change as an element of stored information, and realizes a rich multi-dimensional multiplex information storage method through the combination of the multiple changes of the light field intensity and the two-dimensional array.

Description

Technical Field

[0001] This invention relates to the technical field of aluminum passivation applications, specifically to a controllable passivation method, information storage method, and writing device for aluminum thin film materials. Background Technology

[0002] Under environmental conditions, the surface of aluminum spontaneously undergoes a passivation reaction with water vapor or oxygen, forming a stable oxide layer 1–4 nm thick. Amorphous alumina films are of great significance for many applications, including heterogeneous catalysis, electronics, corrosion protection, surface coatings, and biosensing. Scientific research has determined the microscopic physical mechanism of atomic passivation on the aluminum metal surface: the passivation layer reconstructs a near-stoichiometric Al₂O₃ surface, which is an oxygen-terminated stable oxide. Furthermore, the surface exhibits triangular, hexagonal, and honeycomb-like features, which originate from different atomic stacking patterns at the interface layers. Surface passivation occurs through a two-stage oxidation process, and the passivation layer is a bilayer oxide film composed of a crystalline Al(OH)₃ top layer and an amorphous Al₂O₃ inner layer. However, according to the Cabrera-Mott theory, the spontaneous passivation of aluminum metal has a limit thickness. Currently, there is a lack of economical, convenient, and environmentally friendly methods to achieve tunability in passivation layer growth, precise control over aluminum thin film materials, environmentally friendly local passivation processes, and effective application cases.

[0003] Lasers have the characteristics of high energy density, extremely small heat-affected zone and excellent processing resolution. They can control the localized passivation of aluminum thin film layers through photothermal thermal effects. At present, there are no methods or devices that combine laser photothermal effects and controllable passivation of aluminum thin film materials and realize their application. Summary of the Invention

[0004] The present invention aims to at least solve one of the technical problems existing in the prior art. To this end, the present invention provides a controllable passivation method and information storage device for aluminum thin film materials, solving the problem of lacking a method for precisely controlling the controllable passivation of aluminum thin film materials and application means based on the passivation of aluminum thin film materials.

[0005] A controllable passivation method for an aluminum thin film material according to a first aspect of an embodiment of the present invention includes: An aluminum film is prepared, and a water film layer is covered on the aluminum film before it is sealed with a coverslip. The processing laser is obtained by modulating a continuous laser and then focused onto the aluminum thin film; A localized oxide layer is generated on the aluminum thin film at the focal point through photothermal hydrolysis, thus completing a controllable passivation process.

[0006] A controllable passivation method for aluminum thin film material according to an embodiment of the present invention has at least the following beneficial effects: The present application discloses a controllable passivation method for aluminum thin film materials based on the photothermal effect to accelerate the hydration reaction passivation between the aluminum thin film and the surface water film layer. The processing laser provides continuous, mild, and efficient energy injection, generating a stable and localized high-temperature interface region in the aluminum thin film, thereby increasing the growth rate of the oxide layer and promoting local passivation without damaging the integrity of the aluminum thin film layer. The film layer is then locally modified into an oxide layer with high light transmittance.

[0007] According to some embodiments of the present invention, the process of preparing an aluminum film, covering the aluminum film with water, and then sealing it with a coverslip includes: The aluminum film is placed on the lower glass slide; 1 μl of pure water is applied to the upper surface of the aluminum film to form a water film layer; A cover glass sheet is then placed over the surface of the aluminum film.

[0008] According to some embodiments of the present invention, the step of obtaining a processing laser by modulating a continuous laser and focusing the processing laser onto the aluminum thin film includes: A single-wavelength continuous laser is output through a laser source; The continuous laser beam is polarized and expanded before being incident on the spatial light modulator. The spatial light modulator applies phase loading to the continuous laser to obtain the processing laser; The processing laser is focused onto the focal plane through an objective lens, and the aluminum film is located at the focal plane.

[0009] According to some embodiments of the present invention, the processing laser is incident from the side of the aluminum film facing away from the water film layer.

[0010] According to some embodiments of the present invention, the thickness of the aluminum film ranges from 20 to 80 nm.

[0011] According to a second aspect of the present invention, an information storage method applies the above-described controllable passivation method for aluminum thin film materials, the method comprising: An information carrier is prepared by covering the aluminum film with a water film layer and then sealing it with a coverslip. The aluminum film is moved sequentially by the processing stage module, and the processing laser scans multiple imprinting points on the aluminum film point by point; the multiple imprinting points are distributed in an array.

[0012] According to some embodiments of the present invention, the processing laser is a chiral vortex beam, wherein the chiral vortex beam is based on a cone coefficient. d Topological load l Rotation angle θ and the eccentricity of the ellipsee Different light field distributions and interference patterns are presented.

[0013] According to some embodiments of the present invention, the processing laser performs point-by-point scanning of multiple imprinting points on the aluminum film, including: The cone coefficient of the chiral vortex light can be independently adjusted. d Topological load l Rotation angle θ and the eccentricity of the ellipse e By altering the intensity distribution and interference pattern of the light field, various modes of light fields can be constructed. The information to be stored and written is obtained, and the mode light field corresponding to each of the imprinting points is encoded. The processing laser outputs the corresponding mode light field according to the position of the imprinting point, and performs imprinting passivation on each imprinting point one by one.

[0014] According to a third aspect of the present invention, a controllable passivation device includes at least a laser processing module and a processing table module; The laser processing module includes at least a laser source, a spatial light modulator, and an objective lens. After the laser source outputs continuous laser light, the spatial light modulator modulates the phase to obtain the processing laser. The processing laser is focused onto the focal plane by the objective lens. The processing stage module includes a two-dimensional displacement platform and a motion driving element. The two-dimensional displacement platform is located on the focal plane of the objective lens and is used to support the aluminum film. The motion driving element drives the two-dimensional displacement platform to move in two dimensions on the focal plane of the objective lens. The processing laser is transmitted to the two-dimensional displacement platform and focused on the aluminum film, so that the processing laser is focused on different imprinting points of the aluminum film for imprinting.

[0015] According to some embodiments of the present invention, the laser processing module further includes an optical polarization control component, which includes two polarizers and a first lens, a second lens, a third lens, and a fourth lens. The two polarizers are located at the light-emitting end of the laser source and are used to deflect the continuous laser. The first lens and the second lens are located between the laser source and the spatial light modulator, and the first lens and the second lens form a 4f optical path. The third lens and the fourth lens are located between the spatial light modulator and the objective lens, and the third lens and the fourth lens form a 4f optical path. The processing table module also includes a monitoring component, which includes an LED light source, a dichroic mirror, and a camera. The LED light source is used to output visible light, the dichroic mirror is used to introduce the visible light into the optical path of the processing laser and project it onto the aluminum film together with the processing laser, and the camera is used to capture the image of the two-dimensional displacement platform to monitor the imprinting passivation process of the aluminum film.

[0016] Other features and advantages of the invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein: Figure 1 A schematic flowchart of an embodiment of a controllable passivation method for aluminum thin film materials provided by the present invention; Figure 2 for Figure 1 The flowchart of step S110 in the controllable passivation method shown is as follows; Figure 3 for Figure 2 The flowchart of step S120 in the controllable passivation method shown is as follows; Figure 4 A flowchart illustrating an embodiment of an information storage method provided by the present invention; Figure 5 for Figure 4 The flowchart of step S220 in the information storage method shown is as follows; Figure 6 A schematic diagram of an embodiment of an information storage and writing device provided by the present invention; Figure 7 A comparison of Raman spectra of aluminum thin film with and without imprinted spots. Figure 8 Comparison of optical images of microstructure imprinting and laser ablation with atomic force microscopy characterization; Figure 9 A controllable passivation method for aluminum thin film material provided by the present invention, with a physical image showing a passivation etching process forming a light-transmitting pattern; Figure 10 This invention provides an information storage method, which uses a vortex back-facing rubbing aluminum film to achieve multi-dimensional reuse and recording of information through rubbing.

[0018] Icon labels: Laser processing module 100; laser source 110; spatial light modulator 120; objective lens 130; optical polarization control component 140; polarizer 141; first lens 142; second lens 143; third lens 144; fourth lens 145; Processing table module 200; two-dimensional displacement platform 210; monitoring component 220; LED light source 221; dichroic mirror 222; camera 223. Detailed Implementation

[0019] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0020] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the drawings and are only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0021] In the description of this invention, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features or their sequential relationship.

[0022] In the description of this invention, unless otherwise explicitly defined, terms such as "set up," "install," and "connect" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.

[0023] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are some embodiments of the present invention, not all embodiments.

[0024] Aluminum surfaces spontaneously passivate under environmental conditions, reacting with water vapor or oxygen to form a stable oxide layer 1-4 nm thick. Amorphous alumina films are crucial for numerous applications, including heterogeneous catalysis, electronics, corrosion protection, surface coatings, and biosensing. Scientific research has revealed the microscopic physical mechanism of aluminum surface atomic passivation: the passivation layer reconstructs a near-stoichiometric Al₂O₃ surface, composed of oxygen-terminated stable oxides. Furthermore, the surface exhibits triangular, hexagonal, and honeycomb-like features, stemming from different atomic stacking patterns at the interface layers. Surface passivation occurs through a two-stage oxidation process, resulting in a bilayer oxide film consisting of a crystalline Al(OH)₃ top layer and an amorphous Al₂O₃ inner layer. However, theoretically, spontaneous passivation of aluminum surfaces has a limiting thickness. Currently, there is a lack of economical, convenient, and environmentally friendly methods to achieve tunable passivation layer growth, precise and controllable environmentally friendly localized passivation processes for aluminum film materials, and effective application examples.

[0025] Lasers have the characteristics of high energy density, extremely small heat-affected zone and excellent processing resolution. They can control the localized passivation of aluminum thin film layers through photothermal thermal effects. At present, there are no methods or devices that combine laser photothermal effects and controllable passivation of aluminum thin film materials and realize their application.

[0026] To address the aforementioned issues, this invention proposes a controllable passivation and information storage method and writing device for aluminum thin film materials, thus resolving the lack of precise control methods for the controllable passivation of aluminum thin film materials and application methods based on the passivation of aluminum thin film materials.

[0027] refer to Figures 1 to 6 The present invention provides a method for controllable passivation and information storage of aluminum thin film materials, and a writing device thereof, which are implemented in the following embodiments: Reference Figure 1 As shown in the figure, a controllable passivation method for aluminum thin film material according to an embodiment of the present invention is characterized in that the method includes: Step S110: Prepare an aluminum film, cover the aluminum film with a water film layer, and then seal it with a coverslip; Step S120: Modulate the continuous laser to obtain the processing laser and focus the processing laser onto the aluminum thin film; Step S130: A local oxide layer is generated on the aluminum thin film at the focal position by photothermal hydrolysis, completing a controllable passivation.

[0028] Among them, reference Figure 2 As shown, step S110 includes the following steps: Step S111: Place the aluminum film on the lower glass slide; Step S112: Cover the upper surface of the aluminum film with 1 μl of pure water to form a water film layer; Step S113: Seal the surface of the aluminum film with the top cover glass.

[0029] In step S111, an aluminum thin film is prepared by resistive thermal evaporation deposition. Under the premise of maintaining a high vacuum environment, a tungsten boat containing aluminum raw materials is heated, causing the aluminum raw materials to melt and eventually vaporize. As the current increases to a certain value, the vaporized material rises and deposits onto the surface of a fixed substrate above the deposition chamber, continuously depositing to form a thin film. During the thin film preparation process, a film thickness gauge can be used to set the target film thickness, and the deposition rate and the thickness of the deposited film can be monitored in real time. The thermal evaporation process can prepare high-quality continuous aluminum thin films, ensuring a smooth, continuous surface morphology with a slightly grainy texture, forming a dense, smooth film layer rather than a loose, island-like structure. The film enters a stable bulk film state. The prepared aluminum thin film is placed on the stage of an inverted microscope for passivation.

[0030] It is important to note that the thickness of the intermediate aluminum film ranges from 20 to 80 nm, and only the intermediate layer absorbs to simulate the dielectric-metal-dielectric system. Regarding the effect of aluminum film thickness on the hydration passivation effect: the thinner the film, the less time is required for passivation. Based on this, the thickness of the aluminum film is limited to greater than or equal to 20 nm to prevent the aluminum layer from being too thin, which would cause the aluminum film to be destructively ablated and detached by the processing laser; the thickness of the aluminum film is limited to less than or equal to 80 nm to prevent the aluminum layer from being too thick, causing the optical constant to approach that of the aluminum bulk, transforming it into a three-dimensional solid and making it unsuitable for the hydration passivation method applied to two-dimensional heterogeneous thin film materials.

[0031] In step S112, the glass slide is placed facing upwards, and a layer of water is covered on the upper surface of the aluminum film. The water serves as the basis for the hydration effect with the aluminum film. Through the hydration effect, the aluminum film undergoes chemical modification and passivation, generating a transparent oxide layer. To reduce the absorption of laser energy and prevent uneven water distribution, the volume of water is limited to 1 μl.

[0032] In step S113, an upper cover glass is sealed on the surface of the aluminum film. Under the action of capillary tension, water forms a stable water film layer with a thickness of micrometers. The water film layer generates sufficient capillary pressure to hold the upper cover glass in place, so as to maintain the uniform distribution of the water film and not directly promote the chemical reaction.

[0033] Reference Figure 3 As shown, for step S120, obtaining the processing laser after continuous laser modulation and focusing the processing laser onto the aluminum thin film specifically includes: Step S121: Output a single-wavelength continuous laser through laser source 110; Step S122: After polarization modulation and beam expansion, the continuous laser light is incident on the spatial light modulator 120; Step S123: The spatial light modulator 120 applies phase loading to the continuous laser to obtain the processing laser; Step S124: Focus the processing laser onto the focal plane through objective lens 130, so that the aluminum film is at the focal plane.

[0034] In step S121, a single-wavelength continuous laser is output through the laser source 110. In this embodiment of the invention, a continuous laser with a wavelength of 532nm is used. The photon energy of the 532nm wavelength continuous laser is insufficient to directly excite aluminum to generate a large number of hot electrons, so that the energy is continuously and stably input, rather than pulsed instantaneous high peak power, so as to eliminate the destructive effects such as shock waves, melting, and ablation caused by the laser.

[0035] In step S122, the continuous laser is incident on the spatial light modulator 120 after polarization modulation and beam expansion. Specifically, the continuous laser is deflected by a polarizing mirror to adjust its polarization state, and the beam is expanded by optical elements such as lenses to change the spot size so that the spot size of the continuous laser is adapted to the spatial light modulator 120 when it enters the spatial light modulator 120.

[0036] In step S123, the spatial light modulator 120 applies phase loading to the continuous laser, thereby changing the spatial and intensity distribution of the laser light field to obtain the processing laser. The spatial light modulator 120 can control the light field structure and intensity distribution of the processing laser in real time, thereby controlling the position and rate of the processing laser accelerating the passivation effect on the aluminum film, and thus adjusting the generated passivation pattern and its passivation rate in real time.

[0037] In step S124, the processing laser is focused onto the focal plane of the objective lens 130 to concentrate and precisely form a micro hot spot with a thickness of 20-80 nm and a spot area at the micrometer level. This improves the accuracy of the hydration passivation range and promotes the accelerated hydration reaction induced by the photothermal effect. The aluminum film is placed on the focal plane of the objective lens 130 so that the processing laser is accurately focused on the aluminum film, achieving the maximum efficiency of micro-area photothermal catalysis of the hydration passivation reaction.

[0038] It is important to note that the processing laser is incident from the side of the aluminum film facing away from the water film layer. Although forward etching can also achieve a transparent effect, the forward-incident laser is easily affected by water scattering, resulting in uneven distribution of the etched structure. The processing laser is incident from the side of the glass substrate, i.e., back-inducing wet etching, which has the following advantages: Since the processing laser does not pass through the water film layer, the absorption of laser energy by the water film layer is avoided. Moreover, by utilizing the absorption of light by the liquid at the solid-liquid interface, the solid-liquid interface is rapidly heated, which can reduce the threshold of laser processing and reduce the laser power requirements.

[0039] In step S130, a local heat source is excited by the back-acting laser on the irradiation site of the aluminum thin film, thereby driving the micro-area photothermal synergistic catalytic hydration passivation reaction. The interaction between the laser and the aluminum thin film is precisely controlled below the ablation threshold, realizing the modified passivation reaction rather than destroying the film layer. The aluminum thin film undergoes a hydration reaction with water to produce AlO(OH) (alumina hydroxide) and Al(OH)3 to form a passivation layer. During this process, the overall thickness and integrity of the aluminum thin film are not damaged, and the formation of the passivation layer does not significantly change the effective mass thickness of the electron beam penetrating the film layer.

[0040] Reference Figure 7 The image shows the Raman spectral data of the aluminum film before and after the printing process. Without the printing process, the Raman peak of the aluminum film is located at 826.39 cm⁻¹. -1 The location corresponds to the stretching vibration mode of the Al-O bond, confirming the typical amorphous characteristics of the natural oxide layer. However, after laser-induced back-side imprinting, this characteristic peak changes to 517.53 cm⁻¹. -1 and 916.92cm -1 Two clear signals indicate that a fundamental change has occurred in the surface chemical structure: laser back-induction is a local micro-region thermochemical process that accelerates the oxidation of aluminum; the dominant components in the transparent oxide layer at the processing site are AlO(OH) (alumina hydroxide) and Al(OH)3, rather than the purely chemically stoichiometric Al2O3.

[0041] Reference Figure 8 As shown, Figure 8 Atomic force microscopy (AFM) characterization of the line structures formed by laser-driven back-accelerated photothermal hydrolysis effect imprinting and high-power laser processing, respectively. AFM characterization shows that the film layer of the chiral vortex photoimprinting was not damaged and the imprinted area was slightly raised, while the high-power laser action produced a perforated, pore-like structure. This indicates that in the controllable passivation reaction of this invention, the interaction between the laser and the aluminum thin film is precisely controlled below the ablation threshold, achieving a write-to-passivation reaction rather than damaging the film layer.

[0042] Reference Figure 9 Based on the above-mentioned controllable passivation method for aluminum thin film materials, by precisely controlling local passivation, it is possible to locally modify the aluminum thin film into an oxide layer. The transmittance of the oxide layer is greater than that of the aluminum thin film, thereby enabling the formation of patterns based on the transmittance. Based on this principle, this invention also provides an information storage method.

[0043] Reference Figure 4 As shown, the information storage method specifically includes the following steps: Step S210: Prepare the information carrier, which is made by covering an aluminum film with a water film layer and then sealing it with a coverslip; Step S220: The aluminum film is moved sequentially by the processing stage module 200, and the processing laser scans multiple imprinting points on the aluminum film point by point; the multiple imprinting points are distributed in an array.

[0044] In step S210, referring to step S110, an aluminum film is placed on the lower glass slide, and 1 μl of pure water is covered on the upper surface of the aluminum film to form a water film layer. The upper cover glass slide is then sealed on the surface of the aluminum film to complete the preparation of the information carrier, which serves as a carrier for laser photothermal induced passivation and carries information through local passivation.

[0045] In step S220, the processing laser is incident from the back of the glass substrate of the slide. The processing stage module 200 moves the aluminum film sequentially according to the preset array coordinates, so that the laser focus is aligned with each imprinting point in turn. The processing laser scans the aluminum film point by point, where the multiple imprinting points are distributed in an array. Each imprinting point serves as the smallest information storage unit. By scanning with the processing laser, different passivation patterns with high light transmittance are generated for each imprinting point, that is, information is written into each smallest information storage unit. After completing the array scan, an information storage carrier including multiple smallest information storage units is formed. The information storage carrier based on the aluminum film has high information density, physical non-replicability, and multi-level verifiability, and can be used as a new type of anti-counterfeiting mark or information recording scheme.

[0046] In this embodiment of the invention, the average power of the processing laser is controlled at 18mW, and the single-point passivation time is adjusted within the range of 2 to 35 seconds according to the film thickness. Taking the single-point imprinting time of a 40nm thick aluminum film as an example, the single-point passivation imprinting time does not exceed 2 seconds. It can be seen that the information storage method provided by this invention has the advantages of high passivation efficiency, low laser threshold, time and energy saving, and environmental friendliness. Furthermore, multiple imprinting points are arranged in an array, and the array spacing is precisely set according to the processing laser light field parameters to ensure that the passivation imprinting patterns between adjacent imprinting points do not overlap, thus avoiding recognition difficulties.

[0047] It should be noted that traditional Gaussian light only carries intensity or wavelength information, and the data dimension that can be written for each smallest information storage unit is small, which can only realize binary storage method and has low information storage efficiency. The embodiments of the present invention further limit the processing laser to chiral vortex light. Vortex light has a helical phase wavefront and orbital angular momentum. Theoretically, the topological charge number can take infinitely many values, and different topological charge numbers can represent different data channels.

[0048] The output optical field distribution of chiral vortex light depends on multiple factors, such as the phase distribution of different annular zones and the phase gradient between the zones. l The relationship can effectively control the lobe shape distribution of the chiral light field, combined with the cone coefficient. dThe sign and magnitude of the gradient topological charge between the phases of the annular partition can be controlled simultaneously to achieve the control of three degrees of freedom: the magnitude, direction, and spatial distribution shape of the chiral light field.

[0049] Therefore, the cone coefficient is adjusted independently. d Topological load l Rotation angle θ and the eccentricity of the ellipse e This allows chiral vortex light to exhibit different light field distributions and interference patterns. Each independently controllable factor serves as an information-carrying variable, significantly increasing the degree of information freedom. Multidimensional reuse of information storage is achieved without significantly increasing physical volume. Within the smallest information storage unit, the light field morphology is used as the encoding dimension to significantly improve single-point capacity. For example, if each encoding dimension takes only 4 states, the total number of states is 4. 4 =256 types, meaning a single storage unit can record 256 levels of information (8 bits).

[0050] Specifically, refer to Figure 5 As shown, in step S220, the processing laser scans multiple imprinting points on the aluminum film point by point, specifically including the following steps: Step S221: Independently adjust the cone coefficient of the chiral vortex light. d Topological load l Rotation angle θ and the eccentricity of the ellipse e By altering the intensity distribution and interference pattern of the light field, various modes of light fields can be constructed. Step S222: Obtain the information to be stored and written, and encode it to obtain the mode light field corresponding to each imprint point; Step S223: The processing laser outputs a corresponding mode light field according to the position of the imprinting point, and performs imprinting passivation on each imprinting point.

[0051] In step S221, the taper coefficient d Determine the ring diameter and topological charge number l The number of spiral wavefronts, i.e., the orbital angular momentum number, and the rotation angle are determined by... θ Orientation controlling the distribution of petal shape, elliptic eccentricity e The degree of ellipticity of the light field morphology can be controlled. By independently adjusting these four parameters, various modes of chiral vortex light can be generated, each mode corresponding to a unique spatial distribution of light intensity.

[0052] In step S222, the information to be stored and written is acquired, and converted into a combination of mode light field parameters corresponding to each imprinting point according to a preset encoding rule. The encoding rule maps different data to different vortex light modes, such as encoding information based on topological charge number. l =1 represents "00" l=2 represents "01" l =3 represents "10" l =4 represents "11", and is also combined with the radial order. p Rotation angle θ and ellipticity e Multiple states are achieved to encode multi-bit information at a single point. Each imprint point is assigned a specific combination of mode light field parameters, enabling different imprint points to carry different information states, thereby achieving multi-dimensional data reuse and storage within the same aluminum film area.

[0053] In step S223, the processing laser outputs the corresponding mode light field obtained in step S222 based on the position coordinates of each imprinting point, and performs imprinting passivation point by point. The spatial light modulator 120 loads the phase distribution corresponding to the point in real time. After the laser is diffracted and focused, a specific light intensity distribution is formed on the surface of the aluminum film, driving the micro-area photothermal synergistic catalytic hydration passivation reaction. Transparency occurs preferentially at the position with stronger light field intensity, and then gradually expands along the light field distribution until the hydration reaction at that point is completed.

[0054] Reference Figure 10 As shown, an embodiment of information recording using vortex photolithography is presented, utilizing topological charge number. l A vortex optical field with a density of 2, a ring spacing of 45 μm, a wavelength of 532 nm, and a power of 18 mW was generated. The single-point writing time was less than 1 second. A 9×9 array of dots was obtained for imprinting, and this was further utilized based on the topological charge number. l =3 and number of cycles d The perfect vortex light field with a small ring radius of 0.4 imprints the letters “O”, “P”, “T”, “I”, “C” and “A” in each array, respectively. The imprinted positions of the letters are shown by blue dashed lines.

[0055] The embodiments of the present invention achieve high-precision spatial positioning and large-area array fabrication of passivation patterns by combining point-by-point scanning with multi-dimensional control of vortex light fields. It can print multi-dimensional reuse patterns composed of different topological charges, rotation angles and ellipticities on aluminum thin films, and realize multi-level high-density information recording of a single storage unit.

[0056] Reference Figure 6 As shown, the present invention also proposes an information storage and writing device, including a laser processing module 100, a processing table module 200, an optical polarization control component 140, and a monitoring component 220.

[0057] Specifically, the laser source 110 is used to output continuous laser light as the basis and energy source for the photothermal catalytic hydration reaction. In this embodiment of the invention, the wavelength of the continuous laser light is 532 nm.

[0058] The spatial light modulator 120 is used to modulate the continuous laser and load the phase to obtain the processing laser, and the objective lens 130 is used to focus the processing laser onto the focal plane.

[0059] The optical polarization control assembly 140 includes two polarizers 141 and a first lens 142, a second lens 143, a third lens 144, and a fourth lens 145. The two polarizers 141 are located at the light-emitting end of the laser source 110 and are used to deflect the continuous laser beam. The first lens 142 and the second lens 143 are located between the laser source 110 and the spatial light modulator 120, forming a 4f optical path. The third lens 144 and the fourth lens 145 are located between the spatial light modulator 120 and the objective lens 130, forming a 4f optical path. The first lens 142 and the second lens 143 expand the continuous laser beam so that its spot size is adapted to the optical polarization control assembly 140. The third lens 144 and the fourth lens 145 collimate and adjust the spot size of the processing laser so that it is adapted to the objective lens 130.

[0060] The processing stage module 200 includes a two-dimensional displacement platform 210 and a motion drive element. The two-dimensional displacement platform 210 is located on the focal plane of the objective lens 130 and is used to support the aluminum film. The motion drive element drives the two-dimensional displacement platform 210 to move in two dimensions on the focal plane of the objective lens 130, thereby changing the position of the processing laser focused on the aluminum film. The aluminum film is moved sequentially according to the preset array coordinates, so that the laser focus is aligned with each imprinting point in turn, and multiple imprinting points are scanned point by point. The processing laser is focused on the aluminum film through the objective lens 130, so that the processing laser is focused on different imprinting points of the aluminum film for imprinting.

[0061] The monitoring component 220 includes an LED light source 221, a dichroic mirror 222, and a camera 223. The LED light source 221 is used to output visible light. The dichroic mirror 222 is used to introduce the visible light into the optical path of the processing laser and project it onto the aluminum film together with the processing laser to achieve visible light illumination, thereby facilitating the observation of the laser imprinting on the aluminum film. The camera 223 is used to acquire images from the two-dimensional displacement platform 210 and monitor the imprinting passivation process of the aluminum film by comparing multiple images taken successively.

[0062] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0063] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. A controllable passivation method for aluminum thin film materials, characterized in that, The method includes: An aluminum film is prepared, and a water film layer is covered on the aluminum film before it is sealed with a coverslip. The processing laser is obtained by modulating a continuous laser and then focused onto the aluminum thin film; A localized oxide layer is generated on the aluminum thin film at the focal point through photothermal hydrolysis, thus completing a controllable passivation process.

2. The controllable passivation method according to claim 1, characterized in that, The process of preparing the aluminum film, which involves covering the aluminum film with water and then sealing it with a coverslip, includes: The aluminum film is placed on the lower glass slide; 1 μl of pure water is applied to the upper surface of the aluminum film to form a water film layer; A cover glass sheet is then placed over the surface of the aluminum film.

3. The information storage method according to claim 1, characterized in that, The process of obtaining a processing laser by modulating a continuous laser and focusing the processing laser onto the aluminum thin film includes: A single-wavelength continuous laser is output through a laser source; The continuous laser beam is polarized and expanded before being incident on the spatial light modulator. The spatial light modulator applies phase loading to the continuous laser to obtain the processing laser; The processing laser is focused onto the focal plane through an objective lens, and the aluminum film is located at the focal plane.

4. The controllable passivation method according to claim 1, characterized in that, The processing laser is incident from the side of the aluminum film facing away from the water film layer.

5. The controllable passivation method according to claim 1, characterized in that, The thickness of the aluminum film ranges from 20 to 80 nm.

6. An information storage method, characterized in that, The controllable passivation method for the aluminum thin film material according to any one of claims 1 to 5, the method comprising: An information carrier is prepared by covering the aluminum film with a water film layer and then sealing it with a coverslip. The aluminum film is moved sequentially by the processing stage module, and the processing laser scans multiple imprinting points on the aluminum film point by point; the multiple imprinting points are distributed in an array.

7. The information storage method according to claim 6, characterized in that, The processing laser is a chiral vortex beam, and the chiral vortex beam is based on the cone coefficient. d Topological load l Rotation angle θ and the eccentricity of the ellipse e Different light field distributions and interference patterns are presented.

8. The information storage method according to claim 7, characterized in that, The processing laser scans the aluminum film point by point, including: The cone coefficient of the chiral vortex light can be independently adjusted. d Topological load l Rotation angle θ and the eccentricity of the ellipse e By altering the intensity distribution and interference pattern of the light field, various modes of light fields can be constructed. The information to be stored and written is obtained, and the mode light field corresponding to each of the imprinting points is encoded. The processing laser outputs the corresponding mode light field according to the position of the imprinting point, and performs imprinting passivation on each imprinting point one by one.

9. An information storage and writing device, characterized in that, It includes at least a laser processing module and a processing table module; The laser processing module includes at least a laser source, a spatial light modulator, and an objective lens. After the laser source outputs continuous laser light, the spatial light modulator modulates the phase to obtain the processing laser. The processing laser is focused onto the focal plane by the objective lens. The processing stage module includes a two-dimensional displacement platform and a motion driving element. The two-dimensional displacement platform is located on the focal plane of the objective lens and is used to support the aluminum film. The motion driving element drives the two-dimensional displacement platform to move in two dimensions on the focal plane of the objective lens. The processing laser is transmitted to the two-dimensional displacement platform and focused on the aluminum film, so that the processing laser is focused on different imprinting points of the aluminum film for imprinting.

10. The information storage and writing device according to claim 9, characterized in that: The laser processing module further includes an optical polarization control component, which includes two polarizers and a first lens, a second lens, a third lens, and a fourth lens. The two polarizers are located at the light-emitting end of the laser source and are used to deflect the continuous laser. The first lens and the second lens are located between the laser source and the spatial light modulator, forming a 4f optical path. The third lens and the fourth lens are located between the spatial light modulator and the objective lens, forming a 4f optical path. The processing table module also includes a monitoring component, which includes an LED light source, a dichroic mirror, and a camera. The LED light source is used to output visible light, the dichroic mirror is used to introduce the visible light into the optical path of the processing laser and project it onto the aluminum film together with the processing laser, and the camera is used to capture the image of the two-dimensional displacement platform to monitor the imprinting passivation process of the aluminum film.

Images