Roller pressing device for copper foil surface treatment

CN122918677APending Publication Date: 2026-10-16ANHUI TONGGUAN COPPER FOIL +2
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Patent Information

Application Number
CN202611185745.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-08-06
Publication Date
2026-10-16

AI Technical Summary

Technical Problem

[0004]然而,上述装置在实际使用中仍存在不足:其一,该装置仅采用单级螺纹传动机构实现活动辊筒的位置调节,调节行程与调节精度相互制约,难以同时兼顾大范围调节与高精度定位的需求;其二,拉力传感器仅用于输出张力信号供操作人员读取,张力调节仍需依赖人工读取数据后手动旋转手柄完成,当铜箔连续电镀过程中因导电辊转动、铜箔厚度波动、辊筒表面磨损及温度变化等因素导致张力发生动态变化时,该装置无法对张力波动进行实时自动修正,响应滞后,难以在连续运行过程中维持压制辊与导电辊之间张力的动态稳定

Benefits of technology

本发明通过第一、第二、第三调节组件协同,以丝杆粗调行程、摇臂摆动行程及丝杆位移,解耦调节行程与精度,兼顾大范围换型与高精度定位;同时,通过两端独立设置的张力传感器与控制器,构成对压制辊两端张力的实时检测、比较与独立差动调节闭环,在连续电镀过程中自动修正因导电辊转动、箔厚波动等因素引起的两端张力偏差,实现张力动态平衡与稳定维持,彻底消除人工依赖,提升电镀质量一致性。

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Abstract

The present application relates to copper foil production technical field, disclose a kind of roller down press device for copper foil surface treatment, including fixed component, first, second, third adjusting assembly and controller.First adjusting assembly is realized by screw rod mechanism to move base plate translation along first direction;Second adjusting assembly provides swing stroke by swing arm around moving base plate;Third adjusting assembly is provided with second screw rod mechanism and tension sensor at swing arm power output end, drives the end of pressing roller displacement along second direction.Controller independently obtains two end tension sensor actual tension and compares, controls swing arm action based on comparison result, adjusts the relative position of both ends of pressing roller to conductive roller, so that both ends actual tension is equal and maintained in preset range.The present application decouples adjusting stroke and precision, considers copper foil change type and high-precision positioning, constitutes both ends independent closed loop differential adjustment, automatically corrects both ends tension deviation in continuous electroplating process, realizes tension dynamic balance, improves electroplating quality consistency.
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Description

Technical Field

[0001] This invention relates to the field of copper foil production technology, and more specifically to a roller pressing device for copper foil surface treatment. Background Technology

[0002] Rollers are commonly used devices for copper foil electroplating. Common roller pressing methods include manual screw pressing, manual gravity pressing, and pneumatic pressing. In practice, manual screw pressing is mostly used to control roller tension. Existing roller pressing devices cannot quantify the downward tension of the roller, relying on manual feel and the results of copper foil electroplating. This has problems such as the inability to directly quantify the downward tension, reliance on operator experience, low efficiency, and susceptibility to human error, which seriously affects the consistency of electroplating results and product quality.

[0003] To address the aforementioned problems, a roller pressing device has been proposed in related technologies. This device includes a symmetrically arranged base frame, a support seat mounted on the upper end of the base frame, a support plate connected to the upper end of the support seat, and a first bearing seat connected to the upper end of the support plate. A fixed roller is positioned between the two first bearing seats, and an adjusting mechanism is connected to the upper end of the support plate. A movable roller is positioned between the two adjusting mechanisms. The adjusting mechanism includes a support column, a positioning block, an adjusting rod, a spring, a lifting seat, a connecting plate, a bushing, a threaded sleeve, and a handle. The handle drives the threaded sleeve to rotate on the threaded section of the adjusting rod, thereby adjusting the height of the movable roller. The device also includes a tension sensor mounted on the upper end of the second bearing seat via a sensor base plate for real-time monitoring of the downward tension generated by the movable roller on the copper foil.

[0004] However, the above-mentioned device still has shortcomings in actual use: First, the device only uses a single-stage threaded transmission mechanism to realize the position adjustment of the movable roller. The adjustment stroke and adjustment accuracy are mutually constrained, making it difficult to simultaneously meet the needs of large-range adjustment and high-precision positioning. Second, the tension sensor is only used to output tension signals for operators to read. Tension adjustment still depends on manual reading of data and manual rotation of the handle. When the tension changes dynamically due to factors such as the rotation of the conductive roller, the fluctuation of copper foil thickness, roller surface wear, and temperature changes during continuous copper foil electroplating, the device cannot automatically correct the tension fluctuation in real time. The response is lagging, making it difficult to maintain the dynamic stability of the tension between the pressing roller and the conductive roller during continuous operation.

[0005] Therefore, how to achieve high-precision setting and dynamic stability maintenance of the tension between the pressing roller and the conductive roller during the continuous electroplating process of copper foil has become a technical problem that urgently needs to be solved in this field. Summary of the Invention

[0006] To solve the above problems, the present invention provides a roller pressing device for copper foil surface treatment, the specific technical solution of which is as follows: A roller pressing device for copper foil surface treatment, comprising a pressing roller and a conductive roller, characterized in that the roller pressing device further comprises: a fixing assembly for mounting the two ends of the conductive roller; a pair of first adjusting assemblies, each including a first screw drive mechanism fixed to the fixing assembly, the first screw drive mechanism including a movable base plate moving along a first direction; a pair of second adjusting assemblies, each including a rocker arm swinging around the movable base plate; a pair of third adjusting assemblies, each including a second screw drive mechanism and a tension sensor disposed at the power output end of the rocker arm, the second screw drive mechanism including a bearing seat two moving along a second direction, the two ends of the pressing roller respectively mounted on the bearing seat two and respectively connected to the tension sensor; and a controller configured to: independently acquire and compare the actual tension of each end tension sensor, and based on the comparison result, independently control the movement of at least one rocker arm to adjust the position of the two ends of the pressing roller relative to the conductive roller, thereby making the actual tension at both ends equal and maintaining it within a preset tension range.

[0007] Preferably, the fixing assembly includes a pair of fixing bases and bearing seats respectively mounted on the fixing bases, with both ends of the conductive roller horizontally mounted in the pair of bearing seats.

[0008] Preferably, the first screw transmission mechanism further includes a ball screw, a stepper motor for driving the ball screw to rotate, a slider threadedly connected to the ball screw, a second base fixed to a corresponding fixed component, and a movable base plate fixed to the slider. A ball screw and a stepper motor are installed inside the second base, and a slider drives the moving base plate to move along the first direction.

[0009] Preferably, the second adjustment assembly further includes a support column fixed to the movable base plate and a cylinder with one end hinged to the movable base plate; The rocker arm is rotatably connected to the support column via a rotating shaft mounted on the support column. The axial direction of the rotating shaft is perpendicular to the first direction. The power input end of the rocker arm is hinged to the extension end of the cylinder so that it can swing around the rotating shaft under the drive of the cylinder.

[0010] Preferably, the power output end of the rocker arm is provided with an elongated groove, and at least a portion of the second lead screw transmission mechanism is accommodated in the elongated groove.

[0011] Preferably, the second lead screw transmission mechanism further includes a second ball screw installed in the long groove, a second stepper motor for driving the second ball screw to rotate, and a second slider threadedly connected to the second ball screw; The top of slider two protrudes from the long groove, and bearing seat two is fixed to the top of slider two. Slider two drives bearing seat two to move along the second direction.

[0012] Preferably, the tension sensor is a bearing seat type tension sensor installed in the bearing housing, and the end journal of the pressure roller is directly supported on the tension sensor at the corresponding end.

[0013] Preferably, the controller is configured to: acquire and compare the actual tension at both ends during the continuous electroplating process of copper foil; when the actual tension at both ends is not equal, independently adjust the extension and retraction of the cylinder corresponding to at least one end to drive the rocker arm at that end to swing independently until the actual tension at both ends is equal.

[0014] Preferably, the controller is further configured to: in response to a command to replace the copper foil, control the stepper motor 1, the cylinder and the stepper motor 2 at each end to work together to move both ends of the pressing roller to a preset initial position so that the actual tension at both ends enters a preset tension range and is equal to each other.

[0015] Preferably, the controller is configured to: after comparing the actual tension at both ends, independently drive the cylinder at the corresponding end according to the tension deviation value to adjust the swing angle of the rocker arm at the corresponding end, so that the actual tension at both ends is equal and maintained within the preset tension range.

[0016] As can be seen from the above technical solution, the present invention has the following beneficial effects: This invention utilizes the coordinated operation of the first, second, and third adjustment components to decouple the adjustment stroke and precision by adjusting the lead screw coarse stroke, rocker arm swing stroke, and lead screw displacement, thus balancing a wide range of shape changes and high-precision positioning. Simultaneously, through independently set tension sensors and controllers at both ends, a closed loop is formed for real-time detection, comparison, and independent differential adjustment of the tension at both ends of the pressing roller. During continuous electroplating, this automatically corrects tension deviations at both ends caused by factors such as conductive roller rotation and foil thickness fluctuations, achieving dynamic tension balance and stable maintenance, completely eliminating manual dependence and improving the consistency of electroplating quality. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of an embodiment of the present invention; Figure 2 This is a schematic diagram of one side of the structure in an embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of an embodiment of the second adjustment component.

[0018] In the diagram: 1. Fixed component; 11. Fixed base; 12. Bearing seat one; 2. First adjustment component; 21. Second base; 22. Movable base plate; 24. Slider one; 25. Slide rail; 26. Ball screw one; 27. Stepper motor one; 3. Second adjustment component; 31. Cylinder; 32. Rocker arm; 33. Rotating shaft; 34. Support column; 4. Third adjustment component; 41. Stepper motor two; 42. Tension sensor; 43. Ball screw two; 44. Bearing seat two; 45. Slider two; 5. Pressing roller; 6. Conductive roller; 7. Controller. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] In the description of the embodiments of the present invention, it should be noted that the terms "inner", "outer", "upper", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of the invention is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the present invention.

[0021] like Figure 1 and Figure 2 As shown, this embodiment is a roller pressing device for copper foil surface treatment, which includes a pressing roller 5, a conductive roller 6, a fixing component 1, a pair of first adjusting components 2, a pair of second adjusting components 3, a pair of third adjusting components 4, and a controller 7.

[0022] The fixing component 1 serves as the supporting base for the entire device, used to securely mount both ends of the conductive roller 6. The conductive roller 6 typically acts as the driving roller during the electroplating process, propelling the copper foil. The pressing roller 5, which works in conjunction with the conductive roller 6, has its ends respectively mounted in paired third adjusting components 4, allowing the pressing roller 5 to move relative to the conductive roller 6, thereby adjusting the distance between their outer surfaces to accommodate copper foils of different thicknesses.

[0023] Secondly, a three-stage adjustment assembly with independent structure but coordinated control is provided at each end of the conductive roller 6 and the pressing roller 5. Specifically, the first adjustment assemblies 2 are arranged symmetrically on both sides of the fixed assembly 1 in pairs. Each first adjustment assembly 2 includes a first screw drive mechanism mounted on the fixed assembly 1, which can drive a movable base plate 22 to move along a first direction, which is parallel to the axial direction of the conductive roller 6, so that the movable base plates 22 arranged in pairs move closer to or away from the conductive roller 6 at the same time, thereby causing the pressing roller 5 to move away from or closer to the conductive roller 6 quickly, thus providing a large stroke and high rigidity coarse adjustment positioning function.

[0024] Secondly, each of the paired second adjustment components 3 includes a rocker arm 32 located at both ends of the pressure roller 5, which swings around the base plate of the first adjustment component 2. Under the action of the drive source, the rocker arm 32 at each end can swing independently within a certain angle range, thereby driving the third adjustment component 4 installed at its power output end to move closer to or further away from the conductive roller 6, thus realizing the readjustment of the position of the pressure roller 5 and the relative conductive roller 6.

[0025] Secondly, a pair of third adjustment components 4 are installed at the power output end of the rocker arm 32, including a second lead screw drive mechanism and a tension sensor 42. The second lead screw drive mechanism can drive the bearing seat 44 at the end of the pressing roller 5 to move along the second direction. The length direction of the arm of the rocker arm 32 with the power output end is consistent with the second direction, so that the bearing seat 44 can move along the rocker arm 32, thereby adjusting the relative position of the pressing roller 5 with respect to the conductive roller 6 again, so that the pressing roller 5 and the conductive roller 6 can be pressed together in the positive direction of the conductive roller 6 or on the side of the conductive roller 6. More importantly, each bearing seat 44 integrates a tension sensor 42. The journals at both ends of the pressing roller 5 are in direct contact with the corresponding tension sensor 42, so that the tension on the pressing roller 5 can be transmitted to the tension sensor 42, allowing the tension sensors 42 at both ends of the pressing roller 5 to independently, in real time, and accurately sense the tension borne by the pressing roller 5 at each end.

[0026] Secondly, the controller 7, as the control core of the entire device, can be an industrial computer that communicates with the tension sensors 42 at both ends and the drive sources of the various adjustment components. Its core control logic is configured to independently acquire and compare the actual tension fed back by each tension sensor 42. Once a deviation in the actual tension at both ends is detected, or the tension at one end deviates from the preset tension range (e.g., 45N-55N), the controller 7 will independently send a control command to the drive source (e.g., cylinder 31) of at least one of the second adjustment components 3 based on the comparison result, causing it to drive the rocker arm 32 to swing independently, thereby directly changing the position of this end of the pressing roller 5 relative to the conductive roller 6, until the actual tension at both ends of the pressing roller 5 is restored to equality and stabilized within the preset process tension range. This solves the bias problem caused by installation deviation or uneven material supply, thereby achieving real-time dynamic balance of the tension at both ends of the pressing roller 5, ensuring the consistency of the electroplating tension of the copper foil in the width direction, and significantly improving product yield and quality stability. Secondly, during the process of changing copper foil of different thicknesses, the controller 7 is manually controlled to amplify the distance and relative position between the pressing roller 5 and the conductive roller 6 until the copper foil is placed. Then, the controller 7 first controls the first lead screw transmission mechanism to move the rocker arm 32, and then controls the rocker arm 32 to swing so that the pressing roller 5 on the second lead screw transmission mechanism is close to the conductive roller 6, until the actual tension of the tension sensors 42 at both ends is within the preset tension range. Then, the rocker arm 32 is slightly adjusted to make the actual tension at both ends of the pressing roller 5 equal and maintained within the preset tension range.

[0027] Furthermore, the fixed base 11 is firmly connected to the ground or frame via anchor bolts or other means, providing a stable installation reference for the entire device. Above each fixed base 11, a bearing seat 12 is bolted on. The two bearing seats 12 are coaxially arranged, and the journals at both ends of the conductive roller 6 are respectively installed in these bearing seats 12, so that the conductive roller 6 is horizontally and stably supported. This allows the supporting base of the conductive roller 6 to form a one-to-one force closed loop with the independent three-stage adjustment components at both ends of the pressure roller 5. That is, the tension applied by the first to third adjustment components 4 on the left side through the pressure roller 5 is mainly borne by the fixed base 11 and bearing seat 12 on the left side, and the tension applied by the first to third adjustment components 4 on the right side through the pressure roller 5 is mainly borne by the fixed base 11 and bearing seat 12 on the right side. This ensures that the small deformation or force transmission generated by the independent adjustment action of the tension at either end will not cross over to the other end and cause crosstalk, thus providing structural protection for independent control of the tension at both ends at the mechanical structure level.

[0028] Furthermore, the movable base serves as the base of the first adjustment component 2, and its bottom is fixedly connected to the corresponding fixed base 11 or to the ground via bolts. The movable base forms a shell with an open top, and its length direction is a first direction, which is perpendicular to the axis of the conductive roller 6. A ball screw 26 is installed inside the movable base along the first direction. A stepper motor 27 is installed on one side of the movable base along its length direction, and its output shaft is coaxially connected to the screw of the ball screw 26. The slider 24 has an internal thread that matches the external thread of the ball screw 26, and it is fitted onto the ball screw 26 through a threaded pair. The movable base plate 22 is located on the top of the movable base, is slidably connected to its top, and is fixedly connected to the slider 24 below by bolts, thereby forming the first screw transmission mechanism.

[0029] When the stepper motor 27 at one end receives a command pulse from the controller 7 and rotates, it drives the ball screw 26 to rotate synchronously. The rotational motion is converted into precise linear movement of the slider 24 and the float plate fixed to it along the first direction. For example, when replacing with a thicker copper foil, the controller 7 controls the stepper motor 27 to rotate forward, driving the float plate and thus causing the entire second adjustment assembly 3, the third adjustment assembly 4, and the pressure roller 5 mounted on it to move away from the conductive roller 6 by a precisely set distance (e.g., 10cm), providing the correct initial space for subsequent fine pressure adjustment.

[0030] like Figure 3 As shown, the second adjustment assembly 3 specifically includes a support column 34, a cylinder 31, and a rocker arm 32. The support column 34 is a rigid column, and its bottom end is vertically fixed to the upper surface of the float plate by bolts. Therefore, when the float plate moves under the drive of the first adjustment assembly 2, the support column 34 moves synchronously with it. A rotating shaft 33 is horizontally welded to the upper part of the support column 34, and a bearing is installed on the outside of the rotating shaft 33. The axial direction of the rotating shaft 33 is set to be perpendicular to the projection of the first direction (i.e., the axial direction of the ball screw 26) in the vertical direction.

[0031] The rocker arm 32 is a lever structure with a shaft hole near its fulcrum. It is rotatably mounted on a bearing on the rotating shaft 33 through this hole, allowing the rocker arm 32 to swing freely around the axis of the rotating shaft 33. The power input end of the rocker arm 32 is hinged to the extension end (piston rod end) of a cylinder 31 via a pin. The tail end of the cylinder 31 is hinged to the same float plate. Thus, a lever-swinging mechanism is formed between the cylinder 31, the rocker arm 32, and the support column 34, with the rotating shaft 33 as the fulcrum and the linear extension and retraction of the cylinder 31 as the driving force.

[0032] When the piston rod of cylinder 31 extends or retracts, its linear motion pushes the power input end of rocker arm 32 through the hinge point, forcing rocker arm 32 to swing around rotation axis 33. The power output end of rocker arm 32 then undergoes arc displacement with the swing, thereby causing the entire third adjustment assembly 4 installed thereto to change its spatial position, thus realizing the adjustment of the position of the end of the pressure roller 5 with angular variation. Because the cylinder 31 and support column 34 on each side are mounted on the float plate, the power transmission chains of the two sets of second adjustment assemblies 3 are completely independent and do not interfere with each other, which facilitates the separate position adjustment of the two ends of the pressure roller 5.

[0033] At the power output end of the rocker arm 32 (i.e., the end furthest from the hinge point between the rotating shaft 33 and the cylinder 31), a long slot extending along the rocker arm 32 is formed; this slot is a through slot. Most components of the second screw drive mechanism of the third adjusting assembly 4, such as the second ball screw 43 and the second slider 45, are housed and installed within the internal space of this long slot. The inner wall of the long slot not only provides a mounting reference surface but also guides or constrains the movement range of the second slider 45 installed within it, thus making the third adjusting assembly 4 compact. As the rocker arm 32 swings, the entire third adjusting assembly 4 changes its position relative to the conductive roller 6. The second direction refers to the length direction of the lever arm of the rocker arm 32 with the long slot, which changes with the swing of the rocker arm 32.

[0034] Secondly, the second screw drive mechanism includes a ball screw 43, a stepper motor 41 that drives the ball screw 43 to rotate, and a slider 45 that is threadedly connected to the ball screw 43. The stepper motor 41 is fixedly installed at the end of the long slot of the rocker arm 32. The screw of the ball screw 43 is installed in the long slot, and one end of it is connected to the output shaft of the stepper motor 41. The slider 45 is screwed onto the ball screw 43 through its internal threaded hole. The two side walls of the long slot provide rotational constraint and linear guidance for the slider 45. The top of the slider 45 protrudes upward from the opening plane of the long slot, forming a mounting platform. The bearing seat 44 at the end of the pressure roller 5 is directly fixed to this mounting platform by bolts.

[0035] When stepper motor 41 is rotated under control, it drives ball screw 43 to rotate, causing slider 45 to move bearing housing 44 and the end of pressure roller 5 in a high-precision linear motion along the axial direction (i.e., the second direction) of ball screw 43. Because stepper motor 41 has extremely high angular displacement resolution, coupled with the deceleration and force amplification characteristics of the ball screw mechanism itself and its precision transmission characteristics, the third adjustment component 4 can output micron-level position adjustment, thereby improving the position adjustment accuracy of pressure roller 5 relative to conductive roller 6, and further improving the tension adjustment accuracy of pressure roller 5.

[0036] Secondly, the tension sensor 42 is a bearing-type tension sensor, which is directly manufactured into a standard bearing housing with bearing mounting holes, but integrates a high-precision strain gauge or piezoelectric sensing element. During installation, the bearing-type tension sensor 42 is fixed to the inside of the bearing housing 44 by bolts. The end journal of the pressure roller 5 is directly inserted into the inner hole of the tension sensor 42 and rotated and supported by a bearing (such as a rolling bearing). In this way, all the radial force of the pressure roller 5 under the reaction of the copper foil is directly applied to the sensing element of the tension sensor 42 through its journal and bearing, without any intermediate loss or component force, so that the output electrical signal is precisely proportional to the actual tension borne by that end of the pressure roller 5, thereby realizing the accurate acquisition of tension signals at both ends.

[0037] In the continuous copper foil electroplating process, controller 7 executes a cyclic control program at an extremely high frequency (e.g., once per millisecond). First, it independently acquires the actual tension values ​​measured by tension sensors 42 installed at the left and right ends of the pressing roller 5 via an analog signal acquisition module, denoted as T_left and T_right. Controller 7 then compares these two values. Ideally, T_left equals T_right, and both are within the preset process tension range (T_min to T_max, such as 45N-55N), in which case no intervention is performed.

[0038] Once it is detected that T_left ≠ T_right, for example, if the tension on the left side is too high, indicating that the left pressing roller 5 is too tight, the controller 7 will calculate the deviation and adjust the left side to restore balance as quickly as possible. For example, it can send an analog or pulse signal to the solenoid valve of the cylinder 31 of the second adjustment component 3 on the left side, controlling the piston rod of the cylinder 31 to retract slightly, driving the rocker arm 32 at that end to swing upward (away from the direction of the conductive roller 6) around the rotation axis 33 by a small angle, thereby causing the entire third adjustment component 4 and the left end of the pressing roller 5 installed at the power output end to lift slightly, instantly reducing the tension applied to the copper foil at that end. This adjustment process is carried out in real time until the new T_left and T_right are equal again and fall within the preset range, thus solving the bias problem caused by uneven material thickness or installation deviation. The relationship between the extension or retraction length of cylinder 31 and the tension on the pressing roller 5 is calculated using data obtained from actual production. For example, when electroplating 0.5mm copper foil, the extension or retraction of cylinder 31 in the second adjustment component 3 is manually fine-tuned based on the collected data from tension sensor 42. Combined with the changes in tension sensor 42 data, statistics are performed to fit the relationship between the extension or retraction length of cylinder 31 and the tension on the pressing roller 5, such as L=kT+b, where L is the extension or retraction length of cylinder 31, T is the tension on the pressing roller 5, and k and b are the fitted values. This value is stored in controller 7 (industrial computer) for subsequent active control of cylinder 31 to adjust the tension on the pressing roller 5. This ensures that even under complex disturbances such as copper foil thickness fluctuations and surface wear of the pressing roller 5, the system can still quickly, smoothly, and without steady-state error adjust the tension at both ends of the pressing roller 5 to be completely equal and stable within the preset range, achieving high-precision and high-stability dynamic balance control.

[0039] This device has two main operating modes. The first is the type-change setting mode: when changing to copper foil of different thicknesses, the controller 7 coordinates the control of the paired first, second, and third adjustment components 4 to automatically complete the large stroke and high-precision setting of the initial position at both ends of the pressing roller 5 until the readings of the tension sensors 42 at both ends are equal and within the preset range. The second is the dynamic balance maintenance mode: during continuous electroplating, the tension sensors 42 at both ends detect the tension at both ends of the pressing roller 5 in real time and independently. The controller 7 independently compares the two signals. Once a deviation or drift is detected, it immediately finely adjusts the cylinders 31 of the second adjustment components 3 at both ends based on the relationship between the extension or retraction length of the cylinder 31 and the tension on the pressing roller 5, causing the rocker arm 32 to swing, thereby changing the gap between the two ends of the pressing roller 5 and the conductive roller 6, and thus changing the tension at both ends of the pressing roller 5. This forms a closed-loop control of "detection-comparison-differential adjustment," dynamically maintaining the tension at both ends to always be equal and constant.

[0040] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

[0041] The technologies, shapes, and structures not described in detail in this invention are all known technologies.

Claims

1. A roller pressing device for copper foil surface treatment, the roller pressing device comprising a pressing roller (5) and a conductive roller (6), characterized in that, The roller pressing device further includes: Fixing assembly (1) for mounting both ends of the conductive roller (6); The first adjustment components (2) arranged in pairs each include a first lead screw transmission mechanism fixed to the fixed component (1), and the first lead screw transmission mechanism includes a movable base plate (22) that moves along a first direction; The paired second adjustment components (3) each include a rocker arm (32) that swings around the movable base plate (22); The paired third adjustment components (4) each include a second lead screw drive mechanism and a tension sensor (42) located at the power output end of the rocker arm (32). The second lead screw drive mechanism includes a bearing seat (44) that moves in a second direction. The two ends of the pressure roller (5) are respectively mounted on the bearing seat (44) and respectively connected to the tension sensor (42); and The controller (7) is configured to independently acquire and compare the actual tension of each end of the tension sensor (42), and based on the comparison result, independently control the movement of at least one of the rocker arms (32) to adjust the position of the two ends of the pressing roller (5) relative to the conductive roller (6), thereby making the actual tension at both ends equal and maintaining it within a preset tension range.

2. The roller pressing device according to claim 1, characterized in that: The fixing component (1) includes a pair of fixing bases (11) and bearing seats (12) respectively mounted on the fixing bases (11), and the two ends of the conductive roller (6) are horizontally mounted in the pair of bearing seats (12).

3. The roller pressing device according to claim 1, characterized in that: The first screw transmission mechanism further includes a ball screw (26), a stepper motor (27) that drives the ball screw (26) to rotate, a slider (24) that is threadedly connected to the ball screw (26), a second base (21) fixed to the corresponding fixed component (1), and a movable base plate (22) fixed to the slider (24). The ball screw (26) and the stepper motor (27) are installed in the second base (21), and the slider (24) drives the movable base plate (22) to move along the first direction.

4. The roller pressing device according to claim 3, characterized in that: The second adjustment component (3) also includes a support column (34) fixed on the movable base plate (22) and a cylinder (31) with one end hinged to the movable base plate (22); The rocker arm (32) is rotatably connected to the support column (34) via a rotating shaft (33) mounted on the support column (34). The axial direction of the rotating shaft (33) is perpendicular to the first direction. The power input end of the rocker arm (32) is hinged to the telescopic end of the cylinder (31) so that it swings around the rotating shaft (33) under the drive of the cylinder (31).

5. The roller pressing device according to claim 4, characterized in that: The power output end of the rocker arm (32) is provided with a long slot, and at least a part of the second lead screw transmission mechanism is accommodated in the long slot.

6. The roller pressing device according to claim 5, characterized in that: The second screw transmission mechanism also includes a second ball screw (43) installed in the long groove, a second stepper motor (41) that drives the second ball screw (43) to rotate, and a second slider (45) that is threadedly connected to the second ball screw (43). The top of the second slider (45) protrudes from the long groove, the second bearing seat (44) is fixed to the top of the second slider (45), and the second slider (45) drives the second bearing seat (44) to move along the second direction.

7. The roller pressing device according to claim 1, characterized in that: The tension sensor (42) is a bearing seat type tension sensor (42) installed in the bearing seat (44), and the end journal of the pressing roller (5) is directly supported on the tension sensor (42) at the corresponding end.

8. The roller pressing device according to claim 6, characterized in that: The controller (7) is configured to: acquire and compare the actual tension at both ends during the continuous electroplating process of copper foil; when the actual tension at both ends is not equal, independently adjust the extension and retraction of the cylinder (31) corresponding to at least one end to drive the rocker arm (32) at that end to swing independently until the actual tension at both ends is equal.

9. The roller pressing device according to claim 8, characterized in that: The controller (7) is also configured to: in response to the instruction to replace the copper foil, control the stepper motor (27), cylinder (31) and stepper motor (41) at each end to work together to move the two ends of the pressing roller (5) to a preset initial position so that the actual tension at both ends enters the preset tension range and is equal to each other.

10. The roller pressing device according to claim 8, characterized in that: The controller (7) is configured to: after comparing the actual tensions at both ends, independently drive the cylinder (31) at the corresponding end according to the tension deviation value to adjust the swing angle of the rocker arm (32) at the corresponding end, so that the actual tensions at both ends are equal and maintained within the preset tension range.