Horizontal liquid phase epitaxy boat pushing system

Abstract

The application discloses a horizontal liquid phase epitaxy pushing boat system, which comprises a furnace door assembly, a supporting assembly, a furnace door driving assembly and a graphite boat driving assembly, the furnace door assembly comprises a furnace door and a supporting sleeve arranged outside the furnace door, the supporting assembly is used for supporting a graphite boat, the furnace door driving assembly is used for driving the furnace door to move in a first direction, and the graphite boat driving assembly is used for driving the graphite boat to move in the first direction; the supporting assembly comprises a quartz boat seat and a supporting rod, the quartz boat seat is provided with a matching hole, one end of the supporting rod is sleeved in the supporting sleeve through the furnace door, and the other end of the supporting rod is sleeved in the matching hole of the quartz boat seat. The application has the advantages of being capable of meeting the bearing requirement of a large-size graphite boat and good stability.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and in particular to a horizontal liquid phase epitaxial propulsion system. Background Technology

[0002] Horizontal liquid phase epitaxy (LPE) equipment is a key process for the epitaxial growth of infrared materials, boasting advantages such as simple structure, low cost, and stable process results. Its working principle is as follows: A graphite boat carrying the substrate and mother liquor (solid at room temperature) is fed into a sealed reaction chamber via a pusher mechanism. The air inside the reaction chamber is then evacuated using a vacuum system, and high-purity hydrogen is injected to create a clean laminar hydrogen atmosphere. The temperature inside the reaction chamber is heated to the target temperature and stabilized for a period of time, during which the mother liquor has melted into a liquid state. Cooling then begins, and simultaneously, a module moves a pull rod, which in turn moves a slider on the graphite boat, allowing the mother liquor to cover the substrate surface for epitaxial crystallization. Epitaxy is completed when the temperature drops to a certain level. A second pull of the slider removes excess mother liquor from the substrate surface. The temperature is then further reduced to near room temperature, the boat is unloaded, and transported to a load lock. Finally, the graphite boat is removed from the load lock.

[0003] Conventional horizontal liquid phase epitaxy (LPE) equipment uses a quartz rake as a platform to support the graphite boat in its boat-pushing mechanism. Quartz is a commonly used clean component in semiconductor processing equipment, as it does not produce metal contamination and possesses good thermal properties. The LPE process takes approximately 2-3 days and can only produce one substrate at a time, resulting in persistently high costs. Therefore, researchers favor the development of large-size substrate fabrication, which is one of the mainstream solutions for reducing the cost of infrared devices. However, large-size substrate fabrication requires a large graphite boat, which in turn requires a heavy graphite boat. The quartz rake in conventional boat-pushing mechanisms is ill-suited to supporting such a heavy graphite boat in a cantilever structure due to the brittle nature of quartz. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to overcome the shortcomings of the prior art and provide a horizontal liquid phase epitaxial boat pushing system that meets the load-bearing requirements of large-size graphite boats and has good stability.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: A horizontal liquid phase epitaxial boat pushing system includes a furnace door assembly, a support assembly, a furnace door drive assembly, and a graphite boat drive assembly. The furnace door assembly includes a furnace door and a support sleeve disposed outside the furnace door. The support assembly supports the graphite boat. The furnace door drive assembly drives the furnace door to move along a first direction. The graphite boat drive assembly drives the graphite boat to move along the first direction. The support assembly includes a quartz boat seat and a support rod. The quartz boat seat has a mating hole. One end of the support rod passes through the furnace door and is fitted into the support sleeve, and the other end is fitted into the mating hole of the quartz boat seat.

[0006] As a further improvement to the above technical solution: The support rod includes an inner section, a middle section, and an outer section connected in sequence. The inner section is located in the mating hole of the quartz boat seat, the outer section is located in the support sleeve, and the middle section is fitted with a quartz sleeve.

[0007] The diameter of the middle section is larger than the diameter of the inner section.

[0008] The furnace door assembly also includes a first corrugated pipe, and the support sleeve is sealed to the furnace door through the first corrugated pipe.

[0009] The graphite boat drive assembly includes a linear module, a second corrugated pipe, and a tie rod. The second corrugated pipe is fixedly installed on the outside of the furnace door, and the tie rod passes through the furnace door. One end of the tie rod is connected to the graphite boat, and the other end is connected to the end of the second corrugated pipe away from the furnace door. The slide of the linear module is connected to the second corrugated pipe.

[0010] The graphite boat drive assembly also includes a digital display vernier caliper, the slide of which is connected to the slide table of the linear module.

[0011] The furnace door drive assembly includes a servo motor, a guide rod, and a main motion plate. The servo motor is connected to the main motion plate in a transmission manner, and the guide rod is slidably connected to the main motion plate to guide the movement of the main motion plate. The main motion plate is connected to the furnace door.

[0012] The furnace door assembly also includes a sleeve support rod, an upper pressure block, a lower pressure block, and a fixing block. The sleeve support rod is fixedly installed on the outside of the furnace door. The upper pressure block and the lower pressure block are respectively pressed onto the upper and lower sides of the support sleeve and connected by an adjusting screw. The upper pressure block is connected to the sleeve support rod through the fixing block.

[0013] The furnace door assembly further includes a clamping rod base plate, a pusher base plate, a clamping rod side plate, a connecting plate, a vertical plate, a first adjusting block, and a second adjusting block. The upper pressing block is connected to the clamping rod side plate, the clamping rod side plate is connected to the clamping rod base plate, the clamping rod base plate is disposed on the pusher base plate and slidably connected to the pusher base plate, the first adjusting block is fixedly disposed on the pusher base plate, and the first adjusting block is provided with an adjusting screw for pushing the clamping rod base plate to move in a second direction, the connecting plate is connected to the pusher base plate, the vertical plate is slidably connected to the connecting plate, the second adjusting block is fixedly disposed on the vertical plate, and the second adjusting block is provided with an adjusting screw for pushing the connecting plate to move in a third direction, and the vertical plate is connected to the furnace door drive assembly.

[0014] Both the support rod and the support sleeve are made of silicon carbide.

[0015] Compared with the prior art, the advantages of the present invention are as follows: 1. The horizontal liquid phase epitaxial boat pushing system of the present invention, by fitting one end of the support rod into the support sleeve outside the furnace door, and the support sleeve supporting the support rod outside the furnace door, can significantly improve the support strength and stability of the support rod compared to the traditional quartz rake or the structure with cantilever support on only one side of the reaction chamber. This allows it to better support heavy and large-sized graphite boats, and avoids deformation or breakage of the support rod due to excessive cantilever length or excessive load. It meets the load-bearing requirements of large-sized graphite boats and has good stability. Furthermore, the quartz boat seat is also fitted with the support rod, and the support rod can support the quartz boat seat and graphite boat with a larger contact area, further improving the load-bearing stability of the overall structure.

[0016] 2. In the horizontal liquid phase epitaxial boat pushing system of the present invention, the support rod is located in the inner section and the middle section of the reaction chamber, which are respectively wrapped by the mating hole of the quartz boat seat and the quartz sleeve, so that there is no exposed part of the support rod in the reaction chamber, which can avoid the process chamber from being contaminated by the support rod material and ensure the cleanliness requirements of the horizontal liquid phase epitaxial process.

[0017] 3. The horizontal liquid phase epitaxial boat pushing system of the present invention, by having a smaller diameter at the position where the support rod is fitted into the quartz boat seat, can reduce the diameter of the mating hole, thereby reducing the processing difficulty of the quartz boat seat; by having a larger diameter at the position where the support rod is fitted into the quartz sleeve, can improve the overall load-bearing capacity of the support rod, thus balancing load-bearing capacity and processing feasibility.

[0018] 4. In the horizontal liquid phase epitaxial pusher system of the present invention, the linear module drives the second bellows to compress, which in turn drives the pull rod to move into the reaction chamber; the linear module also drives the second bellows to extend, which in turn drives the pull rod to move out of the reaction chamber. By using the compression and extension of the second bellows to drive the pull rod in and out, the reaction chamber can be kept sealed while the pull rod is moving. The structure is simple and reliable.

[0019] 5. The horizontal liquid phase epitaxial boat pushing system of the present invention, by setting a digital display vernier caliper, can accurately measure and display the displacement of the pull rod. The operator can intuitively observe the movement distance of the pull rod, realize precise control of the graphite boat position, ensure the accuracy of the graphite boat sliding position, and meet the accuracy requirements of the epitaxial process for the pull rod displacement. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the horizontal liquid phase epitaxial propulsion system of the present invention.

[0021] Figure 2 This is a schematic diagram of the furnace door assembly in the horizontal liquid phase epitaxial push boat system of the present invention.

[0022] Figure 3 This is a schematic diagram of the support component in the horizontal liquid phase epitaxial propulsion system of the present invention.

[0023] Figure 4 This is a schematic diagram of the furnace door drive assembly in the horizontal liquid phase epitaxial propulsion system of the present invention.

[0024] Figure 5 This is a schematic diagram of the graphite boat driving component in the horizontal liquid phase epitaxial boat propulsion system of the present invention.

[0025] Legend: 1. Furnace door assembly; 11. Furnace door; 12. Support sleeve; 13. First corrugated pipe; 14. Sleeve support rod; 15. Upper pressure block; 16. Lower pressure block; 17. Fixing block; 18. Adjusting screw; 19. Clamping rod seat base plate; 110. Push boat base plate; 111. Clamping rod seat side plate; 112. Connecting plate; 113. Vertical plate; 114. First adjusting block; 115. Second adjusting block; 116. Guide 1. Graphite boat; 2. Support assembly; 21. Quartz boat seat; 22. Support rod; 23. Quartz sleeve; 3. Furnace door drive assembly; 31. Servo motor; 32. Guide rod; 33. Main motion plate; 4. Graphite boat drive assembly; 41. Linear module; 42. Second bellows; 43. Tie rod; 44. Digital display vernier caliper; 45. Transition connecting block; 46. Caliper connecting block; 47. Bellows connecting block; 9. Graphite boat. Detailed Implementation

[0026] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0027] In the description of this invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0028] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0029] In this invention, unless otherwise explicitly specified and limited, the terms "assembly," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0030] like Figures 1 to 5 As shown, the horizontal liquid phase epitaxial boat pushing system of this embodiment includes a furnace door assembly 1, a support assembly 2, a furnace door drive assembly 3, and a graphite boat drive assembly 4. The furnace door assembly 1 includes a furnace door 11 and a support sleeve 12 disposed outside the furnace door 11. The support assembly 2 is used to support the graphite boat 9. The furnace door drive assembly 3 is used to drive the furnace door 11 to move along a first direction. The graphite boat drive assembly 4 is used to drive the graphite boat 9 to move along the first direction. The support assembly 2 includes a quartz boat seat 21 and a support rod 22. The quartz boat seat 21 has a mating hole. One end of the support rod 22 passes through the furnace door 11 and is fitted into the support sleeve 12, and the other end is fitted into the mating hole of the quartz boat seat 21. The first direction is the direction of entry and exit of the reaction chamber, that is, the direction of movement of pushing the boat forward and backward.

[0031] The horizontal liquid phase epitaxial boat pushing system of this embodiment, by fitting one end of the support rod 22 into the support sleeve 12 outside the furnace door 11, provides support for the support rod 22 outside the furnace door 11. Compared with traditional quartz rakes or structures with cantilever support on only one side of the reaction chamber, this system can significantly improve the support strength and stability of the support rod 22, thereby better supporting the heavy and large-sized graphite boat 9. It avoids deformation or breakage of the support rod 22 due to excessive cantilever length or excessive load, meets the load-bearing requirements of the large-sized graphite boat 9, and has good stability. In addition, the quartz boat seat 21 is also fitted with the support rod 22, and the support rod 22 can provide support for the quartz boat seat 21 and the graphite boat 9 with a larger contact area, further improving the overall load-bearing stability of the structure.

[0032] Furthermore, in this embodiment, the support rod 22 includes an inner section, a middle section, and an outer section connected in sequence. The inner section is located in the mating hole of the quartz boat seat 21, the outer section is located in the support sleeve 12, and the middle section is fitted with a quartz sleeve 23. The inner section and the middle section of the support rod 22 in the reaction chamber are respectively wrapped by the mating hole of the quartz boat seat 21 and the quartz sleeve 23, so that there is no exposed part of the support rod 22 in the reaction chamber. This can prevent the process chamber from being contaminated by the material of the support rod 22 and ensure the cleanliness requirements of the horizontal liquid phase epitaxy process.

[0033] Furthermore, in this embodiment, the support rod 22 is made of silicon carbide. Since silicon carbide has a much higher strength than quartz, it can effectively improve the load-bearing capacity of the support structure, meeting the support requirements of heavy graphite boats. Moreover, the fitting holes in the quartz boat seat 21 and the wrapping of the support rod 22 with the quartz sleeve 23 can prevent impurities from the silicon carbide material from contaminating the reaction chamber. Of course, in other embodiments, the support rod 22 can also be made of other high-strength, high-temperature-resistant materials.

[0034] Furthermore, in this embodiment, the support sleeve 12 is made of silicon carbide. The silicon carbide sleeve itself has high structural strength and high temperature resistance, which is suitable for the working environment requirements of the support sleeve 12 position and ensures the stability of the overall support structure.

[0035] Furthermore, in this embodiment, the diameter of the middle section is larger than the diameter of the inner section, meaning the support rod 22 is a variable-diameter straight rod. The diameter of the support rod 22 at the position where it is fitted into the quartz sleeve 23 is larger, while the diameter of the support rod 22 at the position where it is fitted into the quartz boat seat 21 is smaller. Because quartz is brittle, machining large-diameter holes is difficult and the wall thickness is significantly reduced, making it prone to cracking. Therefore, by making the diameter of the support rod 22 at the position where it is fitted into the quartz boat seat 21 smaller, the diameter of the mating hole can be reduced, thereby reducing the machining difficulty of the quartz boat seat 21; by making the diameter of the support rod 22 at the position where it is fitted into the quartz sleeve 23 larger, the overall load-bearing capacity of the support rod 22 can be improved, balancing load-bearing capacity and machining feasibility.

[0036] Furthermore, in this embodiment, two support rods 22 are spaced apart along the second direction, and each support rod 22 is correspondingly provided with a support sleeve 12. The two support rods 22 together form symmetrical support for the quartz boat seat 21, which can further improve the stability of the support structure, make the graphite boat 9 bear force evenly, and improve the support stability. The second direction is the direction perpendicular to the first direction in the horizontal plane. Furthermore, in this embodiment, the furnace door assembly 1 also includes a first bellows 13, and the support sleeve 12 is sealed to the furnace door 11 through the first bellows 13. The first bellows 13 can compensate for the installation error between the support sleeve 12 and the furnace door 11, while ensuring the sealing performance at the furnace door 11 and maintaining the vacuum environment requirements of the reaction chamber.

[0037] Furthermore, in this embodiment, the graphite boat drive assembly 4 includes a linear module 41, a second bellows 42, and a pull rod 43. The second bellows 42 is fixedly installed on the outside of the furnace door 11, and the pull rod 43 passes through the furnace door 11. One end of the pull rod 43 is connected to the graphite boat 9, and the other end is connected to the end of the second bellows 42 away from the furnace door 11. The slide of the linear module 41 is connected to the second bellows 42. The linear module 41 compresses the second bellows 42, which in turn moves the pull rod 43 into the reaction chamber. The linear module 41 also stretches the second bellows 42, which in turn moves the pull rod 43 out of the reaction chamber. By using the compression and stretching of the second bellows 42 to drive the pull rod 43 in and out, the sealing state of the reaction chamber can be maintained while the pull rod 43 moves. The structure is simple and reliable. The second bellows 42 is a self-guiding bellows, eliminating the need for an additional guiding structure, simplifying the overall structure and reducing the difficulty of processing and installation.

[0038] Furthermore, in this embodiment, the graphite boat drive assembly 4 also includes a digital display vernier caliper 44, the slide of which is connected to the slide of the linear module 41. By setting the digital display vernier caliper 44, the displacement of the pull rod can be accurately measured and displayed. The operator can intuitively observe the movement distance of the pull rod 43, thereby achieving precise control of the position of the graphite boat 9, ensuring the accuracy of the sliding position of the graphite boat 9, and meeting the accuracy requirements of the pull rod displacement for the epitaxial process.

[0039] Furthermore, in this embodiment, the graphite boat drive assembly 4 also includes a transition connecting block 45, a caliper connecting block 46, and a bellows connecting block 47. The transition connecting block 45 is connected to the slide of the linear module 41, the slide of the digital display vernier caliper 44 is connected to the transition connecting block 45 through the caliper connecting block 46, and the second bellows 42 is connected to the slide of the linear module 41 through the bellows connecting block 47. The structure is simple and reliable.

[0040] Furthermore, in this embodiment, the furnace door drive assembly 3 includes a servo motor 31, a guide rod 32, and a main motion plate 33. The servo motor 31 is connected to the main motion plate 33 via a transmission connection, and the guide rod 32 is slidably connected to the main motion plate 33 to guide the movement of the main motion plate 33. The main motion plate 33 is connected to the furnace door 11. The servo motor 31 drives the main motion plate 33 to move along the guide rod 32, thereby driving the entire furnace door 11 to move, thus realizing the opening and closing of the furnace door 11. The structure is simple and reliable.

[0041] Furthermore, in this embodiment, the furnace door assembly 1 also includes a sleeve support rod 14, an upper pressure block 15, a lower pressure block 16, and a fixing block 17. The sleeve support rod 14 is fixedly disposed on the outside of the furnace door 11. The upper pressure block 15 and the lower pressure block 16 are respectively pressed onto the upper and lower sides of the support sleeve 12 and connected by an adjusting screw 18. The upper pressure block 15 is connected to the sleeve support rod 14 through the fixing block 17. By supporting the support sleeve 12 with the sleeve support rod 14 fixedly disposed on the outside of the furnace door 11, the support sleeve 12 can be stably fixed on the outside of the furnace door 11, ensuring stable support of the outer section of the support rod 22 by the support sleeve 12. In addition, since the inner section of the support rod 22 bears the weight, the pitch of the support rod 22 can be adjusted by adjusting the tightness of the adjusting screw 18, compensating for the angle error caused by processing and installation, so that the support rod 22 always remains in a horizontal state, ensuring the stability of the graphite boat 9 when entering and exiting the reaction chamber.

[0042] Furthermore, in this embodiment, the furnace door assembly 1 also includes a clamping rod base plate 19, a pusher base plate 110, a clamping rod side plate 111, a connecting plate 112, a vertical plate 113, a first adjusting block 114, and a second adjusting block 115. The upper pressing block 15 is connected to the clamping rod side plate 111, and the clamping rod side plate 111 is connected to the clamping rod base plate 19. The clamping rod base plate 19 is disposed on the pusher base plate 110, and the clamping rod base plate 19 is slidably connected to the pusher base plate 110. The first adjusting block 114 is fixedly disposed on... On the pusher base plate 110, the first adjusting block 114 is provided with an adjusting screw (not shown in the figure) for pushing the clamping rod base plate 19 to move in the second direction. The connecting plate 112 is connected to the pusher base plate 110, and the upright plate 113 is slidably connected to the connecting plate 112. The second adjusting block 115 is fixedly mounted on the upright plate 113, and the second adjusting block 115 is provided with an adjusting screw (not shown in the figure) for pushing the connecting plate 112 to move in the third direction. The upright plate 113 is connected to the furnace door drive assembly 3. The third direction is the vertical direction. The adjusting screw of the first adjusting block 114 can push the clamping rod base plate 19 to drive the furnace door 11 to make a slight adjustment in position in the second direction. The adjusting screw of the second adjusting block 115 can push the upright plate 113 to drive the entire furnace door 11 to make a slight adjustment in position in the third direction, which facilitates the alignment of the furnace door 11 with the reaction chamber door.

[0043] Furthermore, in this embodiment, the clamping rod base plate 19 is slidably disposed on the push boat base plate 110 and guided by a guide plate 116. The guide plate 116 is fixedly disposed on the push boat base plate 110 to limit the sliding of the clamping rod base plate 19, ensuring the stability and accuracy of the second direction position adjustment and preventing the clamping rod base plate 19 from shifting during movement.

[0044] Furthermore, in this embodiment, the connecting plate 112 is slidably connected to the upright plate 113 via a slotted hole and a locking screw. The slotted hole provides sufficient sliding adjustment space, and together with the adjusting screw of the second adjusting block, it enables the connecting plate 112 to move smoothly and vertically. The operation is simple and convenient. After adjustment, the locking screw can lock the connecting plate 112 onto the upright plate 113 to maintain the adjusted position. The upright plate 113 is connected to the main motion plate 33. When the servo motor 31 drives the main motion plate 33 to move, it can drive the upright plate 113 to move synchronously, thereby driving the entire furnace door 11 and the entire structure connected to the furnace door 11 to move synchronously, realizing the automatic opening and closing of the furnace door 11 without manual operation, which is suitable for automated production needs.

[0045] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make many possible variations and modifications to the technical solutions of the present invention using the methods and techniques disclosed above, or modify them into equivalent embodiments with equivalent changes, without departing from the spirit and technical essence of the present invention. Therefore, any simple modifications, equivalent substitutions, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solutions of the present invention shall still fall within the protection scope of the technical solutions of the present invention.

Claims

1. A horizontal liquid phase epitaxial propulsion system, characterized in that: The furnace includes a furnace door assembly (1), a support assembly (2), a furnace door drive assembly (3), and a graphite boat drive assembly (4). The furnace door assembly (1) includes a furnace door (11) and a support sleeve (12) located outside the furnace door (11). The support assembly (2) is used to support the graphite boat (9). The furnace door drive assembly (3) is used to drive the furnace door (11) to move along a first direction. The graphite boat drive assembly (4) is used to drive the graphite boat (9) to move along a first direction. The support assembly (2) includes a quartz boat seat (21) and a support rod (22). The quartz boat seat (21) has a mating hole. One end of the support rod (22) passes through the furnace door (11) and is fitted into the support sleeve (12). The other end is fitted into the mating hole of the quartz boat seat (21).

2. The horizontal liquid phase epitaxial propulsion system according to claim 1, characterized in that: The support rod (22) includes an inner section, a middle section and an outer section connected in sequence. The inner section is located in the mating hole of the quartz boat seat (21), the outer section is located in the support sleeve (12), and the middle section is fitted with a quartz sleeve (23).

3. The horizontal liquid phase epitaxial boat propulsion system according to claim 2, characterized in that: The diameter of the middle section is larger than the diameter of the inner section.

4. The horizontal liquid phase epitaxial boat propulsion system according to claim 1, characterized in that: The furnace door assembly (1) also includes a first corrugated pipe (13), and the support sleeve (12) is sealed to the furnace door (11) through the first corrugated pipe (13).

5. The horizontal liquid phase epitaxial boat propulsion system according to claim 1, characterized in that: The graphite boat drive assembly (4) includes a linear module (41), a second corrugated pipe (42), and a pull rod (43). The second corrugated pipe (42) is fixedly installed on the outside of the furnace door (11). The pull rod (43) passes through the furnace door (11). One end of the pull rod (43) is connected to the graphite boat (9), and the other end is connected to the end of the second corrugated pipe (42) away from the furnace door (11). The slide of the linear module (41) is connected to the second corrugated pipe (42).

6. The horizontal liquid phase epitaxial propulsion system according to claim 5, characterized in that: The graphite boat drive assembly (4) also includes a digital vernier caliper (44), the slide of which is connected to the slide of the linear module (41).

7. The horizontal liquid phase epitaxial boat pushing system according to claim 1, characterized in that: The furnace door drive assembly (3) includes a servo motor (31), a guide rod (32) and a main motion plate (33). The servo motor (31) is connected to the main motion plate (33) in a transmission connection. The guide rod (32) is slidably connected to the main motion plate (33) to guide the movement of the main motion plate (33). The main motion plate (33) is connected to the furnace door (11).

8. The horizontal liquid phase epitaxial boat propulsion system according to claim 1, characterized in that: The furnace door assembly (1) also includes a sleeve support rod (14), an upper pressure block (15), a lower pressure block (16), and a fixing block (17). The sleeve support rod (14) is fixedly installed on the outside of the furnace door (11). The upper pressure block (15) and the lower pressure block (16) are pressed onto the upper and lower sides of the support sleeve (12) respectively and connected by an adjusting screw (18). The upper pressure block (15) is connected to the sleeve support rod (14) through the fixing block (17).

9. The horizontal liquid phase epitaxial propulsion system according to claim 8, characterized in that: The furnace door assembly (1) further includes a clamping rod base plate (19), a push boat base plate (110), a clamping rod side plate (111), a connecting plate (112), a vertical plate (113), a first adjusting block (114), and a second adjusting block (115). The upper pressing block (15) is connected to the clamping rod side plate (111), and the clamping rod side plate (111) is connected to the clamping rod base plate (19). The clamping rod base plate (19) is mounted on the push boat base plate (110) and is slidably connected to the push boat base plate (110). The first adjusting block (114) is fixedly installed. On the pusher base plate (110), the first adjusting block (114) is provided with an adjusting screw for pushing the clamping rod base plate (19) to move in the second direction. The connecting plate (112) is connected to the pusher base plate (110). The upright plate (113) is slidably connected to the connecting plate (112). The second adjusting block (115) is fixedly installed on the upright plate (113). The second adjusting block (115) is provided with an adjusting screw for pushing the connecting plate (112) to move in the third direction. The upright plate (113) is connected to the furnace door drive assembly (3).

10. The horizontal liquid phase epitaxial boat propulsion system according to any one of claims 1 to 9, characterized in that: Both the support rod (22) and the support sleeve (12) are made of silicon carbide.

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