A diaphragm type chemical supply system and a gumming and developing apparatus

Abstract

The application relates to the field of liquid supply devices, in particular to a diaphragm type chemical liquid supply system and a gluing and developing device. The diaphragm type chemical liquid supply system comprises at least one diaphragm type liquid supply pump, the inner cavity of the diaphragm type liquid supply pump is divided into a compression cavity and a liquid storage cavity through a diaphragm, and driving joints in fluid communication with the compression cavity and liquid supplement joints, liquid discharge joints and liquid supply joints in fluid communication with the liquid storage cavity are arranged on the diaphragm type liquid supply pump respectively; a liquid supplement assembly, a liquid discharge assembly and a liquid supply assembly are connected with the liquid supplement joints, the liquid discharge joints and the liquid supply joints respectively; a driving assembly is connected with the driving joints to convey or extract gas in the compression cavity, so as to provide a power source for the diaphragm type liquid supply pump; vacuum is extracted from the compression cavity, the diaphragm is deformed to expand the volume of the liquid storage cavity, negative pressure stable liquid supplement is realized, liquid splashing and bubble mixing caused by traditional positive pressure injection are avoided; then, positive pressure gas is conveyed to the compression cavity, the diaphragm is pushed to stably extrude the liquid storage cavity to supply liquid, and the stability and precision of liquid output are ensured.

Description

Technical Field

[0001] This application relates to the field of liquid supply device technology, specifically to a diaphragm-type chemical liquid supply system and a coating and developing equipment. Background Technology

[0002] The effectiveness and stability of the chemical solution supply system are core elements for ensuring the quality of semiconductor manufacturing processes; especially in coating and developing equipment, most process steps rely on chemical solutions.

[0003] Existing conventional liquid supply methods generally adopt a corrugated pipe type liquid supply tank structure. This structure relies on the stretching and compression of the corrugated pipe, and uses nitrogen gas and vacuum at constant pressure as a power source to force the chemical agents in the corrugated pipe tank into the liquid supply pipeline and deliver them to the process unit.

[0004] Typically, the corrugated tank is installed vertically and undergoes reciprocating stretching and compression movements. Due to the structure of the corrugated pipe, the inlet and outlet pipes of the liquid supply system can only be fixed on the upper side of the corrugated tank. When the chemical liquid enters the tank, it impacts the bottom of the tank and continuously impacts the liquid at the bottom, generating a large number of bubbles. These bubbles dissolve in the chemical liquid during the compression of the corrugated pipe. These dissolved gas molecules precipitate in the liquid supply pipe and form tiny bubbles, which seriously affect the process stability of the equipment. At the same time, in order to eliminate the bubbles, more time is required for debubbling, which seriously affects the liquid supply efficiency of the liquid supply system, thereby reducing the output of the process unit and affecting the machine's capacity. Summary of the Invention

[0005] The purpose of this application is to provide a diaphragm-type chemical supply system and a coating and developing device to achieve stable liquid replenishment and avoid the generation of air bubbles.

[0006] According to a first aspect of the embodiments of this application, a diaphragm-type chemical supply system is provided, comprising: A liquid supply pump assembly includes at least one diaphragm-type liquid supply pump. The inner cavity of the diaphragm-type liquid supply pump is divided into a compression chamber and a storage chamber by a diaphragm. The diaphragm-type liquid supply pump is respectively provided with a drive connector that is in fluid communication with the compression chamber and a liquid replenishment connector, a liquid discharge connector, and a liquid supply connector that are in fluid communication with the storage chamber. A fluid replenishment assembly is connected to the fluid replenishment connector to replenish fluid into the reservoir. A drain assembly is connected to the drain connector to discharge the gas inside the liquid storage chamber; A liquid supply assembly is connected to the liquid supply connector to output the liquid in the storage chamber; A drive assembly, connected to the drive connector, is used to deliver or extract gas into the compression chamber, causing the diaphragm to deform and providing a power source for the diaphragm-type liquid supply pump. The control system is connected to the replenishment component, the drainage component, the supply component, and the drive component respectively to realize the replenishment, drainage, and supply of the diaphragm-type liquid pump.

[0007] In one embodiment, the diaphragm-type liquid supply pump includes a first outer shell, a second outer shell, and an inner shell that are disposed opposite to each other, wherein the inner shell is disposed against the inner wall of the first outer shell, and the outline of the inner shell is adapted to the outline of the inner wall of the first outer shell; the first outer shell and the second outer shell are clamped and fixed to the diaphragm and the inner shell by fastening components to form the liquid storage cavity between the diaphragm and the inner shell and the compression cavity between the second outer shell and the diaphragm.

[0008] In one embodiment, the diaphragm-type liquid supply pump has a flat disc structure with a raised center and flat edges, and the inner cavity contours of the first outer shell, the second outer shell, and the inner shell all have transition sections that slope from the center to the edge; the liquid replenishment connector is disposed on the transition section of the inner shell, and the liquid replenishment connector has a liquid inlet formed at the connection with the liquid storage cavity, the liquid inlet extending from the transition section of the inner shell to the center of the inner shell.

[0009] In one embodiment, the second outer shell is further provided with a sealing groove, and a sealing ring is provided in the sealing groove, so that the compression cavity forms a sealed chamber.

[0010] In one embodiment, the diaphragm-type liquid supply pump further includes a detection component, which includes a first sensor disposed on the first housing, a second sensor disposed on the second housing, and a magnetic element disposed on the diaphragm; the first sensor and the second sensor are respectively connected to the control system. The magnetic component moves with the deformation of the diaphragm, triggering the first sensor or the second sensor to determine the fluid state in the storage chamber.

[0011] In one embodiment, the fluid replenishment assembly includes a main fluid replenishment line, a fluid replenishment on / off valve, and at least one fluid replenishment line; one end of the main fluid replenishment line is connected to a liquid source, and the other end is connected to one end of the at least one fluid replenishment line through the fluid replenishment on / off valve; the other end of the at least one fluid replenishment line is connected to the fluid replenishment connector in a corresponding manner; and the fluid replenishment on / off valve is connected to the control system.

[0012] In one embodiment, the liquid supply assembly includes a main liquid supply line, a liquid supply on / off valve, and at least one liquid supply line; one end of the main liquid supply line is used to connect to a liquid source, and the other end is connected to one end of the at least one liquid supply line through the liquid supply on / off valve, the other end of the at least one liquid supply line is connected to the liquid supply connector in a corresponding manner, and the liquid supply on / off valve is connected to the control system.

[0013] In one embodiment, the driving component includes: At least one set of liquid supply drive components, each set of liquid supply drive components includes a liquid supply gas drive pipeline, a check valve and a liquid supply drive on / off valve; one end of the liquid supply gas drive pipeline is used to connect to a gas source, and the check valve and the liquid supply drive on / off valve are connected sequentially from the gas source; the other end of the liquid supply gas drive pipeline is connected to the drive connector one by one. The liquid replenishment drive assembly includes a liquid replenishment gas drive main pipeline, a liquid replenishment drive on / off valve, a vacuum generator, and at least one branch pipeline; one end of the liquid replenishment gas drive main pipeline is connected to a gas source, and the liquid replenishment drive on / off valve and the vacuum generator are sequentially connected from the gas source; one end of each branch pipeline is connected to the portion of the liquid supply gas drive pipeline located between the liquid supply drive on / off valve and the drive connector, and the other end is connected to the vacuum generator, and each branch pipeline is equipped with a control valve; The liquid supply drive on / off valve, the liquid replenishment drive on / off valve, the vacuum generator, and the control valve are respectively connected to the control system.

[0014] In one embodiment, the control system is configured to control a plurality of the diaphragm-type liquid supply pumps to operate alternately.

[0015] According to a second aspect of the embodiments of this application, a coating and developing apparatus is provided, including the diaphragm-type chemical supply system described above.

[0016] Compared with the prior art, the beneficial effects of this application are as follows: (1) This application provides a diaphragm-type chemical liquid supply system. The drive component evacuates the compression chamber, causing the diaphragm to deform and expand the volume of the liquid storage chamber, thereby achieving stable negative pressure liquid replenishment and avoiding liquid splashing and bubble mixing caused by traditional positive pressure injection. By delivering positive pressure gas to the compression chamber, the diaphragm is pushed to smoothly squeeze the liquid storage chamber for liquid supply, ensuring the stability and accuracy of liquid output.

[0017] (2) In this application, the diaphragm-type liquid supply pump has a flat disc structure with a raised center and flat edges, which occupies little space; and the center and the edge are provided with an inclined transition section, and the liquid inlet extends from the transition section of the inner shell to the center of the inner shell, so that when replenishing the liquid, the liquid flows along the inner wall of the liquid storage cavity, avoiding direct impact on the bottom of the liquid storage cavity to generate bubbles.

[0018] (3) In this application, the control system is configured with multiple diaphragm-type liquid supply pumps working alternately, which realizes uninterrupted continuous liquid supply, eliminates the waiting time that a single pump system must interrupt during the liquid replenishment and defoaming process, improves the liquid supply efficiency, and thus significantly improves the output efficiency of the process unit and the overall production capacity. Attached Figure Description

[0019] Figure 1 A schematic diagram of a diaphragm-type chemical supply system; Figure 2 A schematic diagram showing the connection of the replenishment component, the supply component, and the drainage component in a diaphragm-type chemical supply system; Figure 3 A schematic diagram showing the connection of the drive components in a diaphragm-type chemical supply system; Figure 4 This is a schematic diagram of the internal structure of a diaphragm-type liquid supply pump. Figure 5 This is a schematic diagram of a diaphragm-type liquid supply pump. Figure 6 A schematic diagram of the diaphragm pump in the replenishment state; Figure 7 A schematic diagram showing the state of a diaphragm-type liquid supply pump under both liquid supply and liquid discharge conditions; Figure 8 This is a schematic diagram of a diaphragm-type chemical supply system applied to a coating and developing equipment.

[0020] The meanings of the reference numerals in the attached figures are as follows: 1. Liquid supply assembly; 101. Liquid supply main pipeline; 102. Liquid supply on / off valve; 103. Liquid supply pipeline. 2. Drainage component, 201. Drainage main pipeline, 202. Drainage on-off valve, 203. Drainage pipeline, 3. Liquid replenishment assembly, 301. Main liquid replenishment pipeline, 302. Liquid replenishment on / off valve, 303. Liquid replenishment pipeline. 4. Drive components, 401, First liquid supply drive component, 4011, First liquid supply gas drive pipeline, 4012, First check valve, 4013, First liquid supply drive on / off valve, 402, Second liquid supply drive component, 4021, Second liquid supply gas drive pipeline, 4022, Second check valve, 4023, Second liquid supply drive on / off valve, 403, Liquid replenishment drive component, 4031, Liquid replenishment gas drive main pipeline, 4032, Liquid replenishment drive on / off valve, 4033, Vacuum tube generator, 4034, Branch pipeline, 4035, First control valve, 4036, Second control valve; 5. Liquid supply pump assembly, 501. Diaphragm liquid supply pump, 5011. First housing, 50111. First sensor, 50112. Second sensor, 5012. Second housing, 5013. Inner housing, 50131. Liquid inlet, 5014. Diaphragm, 5015. Sealing ring, 5016. Magnetic component, 5017. Liquid replenishment connector, 5018. Liquid drain connector, 5019. Liquid supply connector, 5020. Drive connector. Detailed Implementation

[0021] Unless otherwise defined, the technical or scientific terms used in this specification and claims shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. Specific embodiments of this application will be described below in conjunction with the accompanying drawings. It should be noted that, in order to provide a concise description, this specification cannot exhaustively describe all features of the actual embodiments. Without departing from the spirit and scope of this application, those skilled in the art can modify and substitute the embodiments of this application, and the resulting embodiments are also within the protection scope of this application.

[0022] To address the problems existing in the prior art, this application provides a diaphragm-type chemical supply system and a coating and developing device.

[0023] like Figures 1-7 As shown, according to a first aspect of this application, a diaphragm-type chemical supply system includes: The liquid supply pump assembly 5 includes at least one diaphragm-type liquid supply pump 501. The inner cavity of each diaphragm-type liquid supply pump 501 is divided into a compression chamber and a storage chamber by a diaphragm 5014. Each diaphragm-type liquid supply pump 501 is respectively provided with a drive connector 5020 that communicates with the compression chamber and a liquid supply connector 5017, a liquid drain connector 5018, and a liquid supply connector 5019 that communicate with the storage chamber. A liquid supply assembly 3 is connected to the liquid supply connector 5017 to supply liquid to the storage chamber. A liquid drain assembly 2 is connected to the liquid drain connector 5018. The system comprises: a liquid supply assembly 1, connected to the liquid supply connector 5019, for discharging gas from the liquid storage chamber; a liquid supply component 1, connected to the liquid supply connector 5019, for outputting liquid from the liquid storage chamber; a drive component 4, connected to the drive connector 5020, for supplying or extracting gas into the compression chamber, causing the diaphragm 5014 to deform, thus providing a power source for the diaphragm-type liquid supply pump 501; and a control system, connected to the liquid replenishment component 3, the liquid discharge component 2, the liquid supply component 1, and the drive component 4, respectively, to realize the liquid replenishment, liquid discharge, and liquid supply of the diaphragm-type liquid supply pump 501.

[0024] In this application, the drive component 4 evacuates the compression chamber, causing the diaphragm 5014 to deform and expand the volume of the liquid storage chamber, thereby achieving stable negative pressure liquid replenishment and avoiding liquid splashing and bubble mixing caused by traditional positive pressure injection. By supplying positive pressure gas to the compression chamber, the diaphragm 5014 is pushed to smoothly squeeze the liquid storage chamber for liquid supply, ensuring the stability and accuracy of liquid output.

[0025] Combination Figures 4-5 As shown, in one specific embodiment, the diaphragm-type liquid supply pump 501 includes a first outer shell 5011, a second outer shell 5012, and an inner shell 5013 that are disposed opposite to each other. The inner shell 5013 is disposed against the inner wall of the first outer shell 5011, and the outline of the inner shell 5013 is adapted to the outline of the inner wall of the first outer shell 5011. The first outer shell 5011 and the second outer shell 5012 clamp and fix the diaphragm 5014 and the inner shell 5013 by fastening components, so as to form the liquid storage cavity between the diaphragm 5014 and the inner shell 5013 and the compression cavity between the second outer shell 5012 and the diaphragm 5014.

[0026] In this embodiment, the inner wall of the liquid storage chamber is smooth and fluid, reducing dead zones and turbulence in liquid flow, which is beneficial for stable liquid replenishment and drainage, and suppresses the generation and retention of air bubbles. Simultaneously, the combination of the first outer shell 5011 and the second outer shell 5012, clamped and fixed by a fastening assembly, not only ensures precise positioning and uniform force distribution between the diaphragm 5014 and the inner shell 5013, guaranteeing the isolation and sealing effect between the compression chamber and the liquid storage chamber, but also simplifies the pump assembly process and reduces the manufacturing and maintenance costs of the equipment. The fastening assembly can be a conventional fastening device such as bolts or clips, and is not limited here.

[0027] In one specific embodiment, the diaphragm-type liquid supply pump 501 has a flat disc structure with a raised center and flat edges, and the inner cavity contours of the first outer shell 5011, the second outer shell 5012, and the inner shell 5013 all have transition sections that slope from the center to the edge; the liquid replenishment connector 5017 is disposed on the transition section of the inner shell 5013, and the liquid replenishment connector 5017 has a liquid inlet 50131 formed at the connection with the liquid storage cavity, and the liquid inlet 50131 extends from the transition section of the inner shell 5013 to the center of the inner shell 5013.

[0028] In this embodiment, the diaphragm-type liquid supply pump 501 forms a streamlined liquid storage cavity that smoothly transitions from the edge to the center, effectively eliminating dead flow angles and local eddies caused by the structure of traditional cavities. By placing the liquid replenishment connector 5017 on the transition section of the inner shell 5013, the liquid can be smoothly guided along the inclined wall when replenishing the liquid storage cavity, completely avoiding the mixing of air bubbles and liquid splashing caused by the vertical impact of liquid on the bottom of the cavity, and significantly suppressing the generation and retention of air bubbles during the replenishment and drainage processes.

[0029] In one specific embodiment, the second outer shell 5012 is further provided with a sealing groove 5015, and a sealing ring 5015 is provided in the sealing groove, so that the compression cavity forms a sealed chamber.

[0030] In this embodiment, the sealing structure enables the compression chamber to form an independent and stable sealed chamber, effectively preventing leakage of the driving gas during the conveying or suction process. This ensures that the diaphragm 5014 can accurately deform in response to changes in the driving gas pressure, thereby improving the accuracy and consistency of liquid replenishment and supply. Simultaneously, integrating the sealing groove into the second outer shell 5012 body simplifies the pump body assembly structure, facilitates the rapid positioning and replacement of the sealing ring 5015, and improves the production and assembly efficiency of the equipment as well as the convenience of long-term maintenance.

[0031] In one specific embodiment, the diaphragm-type liquid supply pump 501 further includes a detection component, which includes a first sensor 50111 disposed on the first housing 5011, a second sensor 50112 disposed on the second housing 5012, and a magnetic element 5016 disposed on the diaphragm 5014; the first sensor 50111 and the second sensor 50112 are respectively connected to the control system. The magnetic component 5016 moves with the deformation of the diaphragm 5014, triggering the first sensor 50111 or the second sensor 50112 to determine the fluid state in the storage chamber.

[0032] Specifically, when the magnetic component triggers the first sensor 50111, it indicates that the diaphragm 5014 is in a state close to the inner shell, meaning that the fluid in the storage chamber has been discharged; when the diaphragm 5014 triggers the second sensor 50112, it indicates that the diaphragm 5014 is in a state close to the second outer shell, meaning that the reservoir is in a state of full liquid, drawing in the chemical liquid.

[0033] In this embodiment, the magnetic component 5016 moves to different extreme positions as the diaphragm 5014 deforms, triggering the corresponding sensor to accurately determine the full or empty state of the liquid storage chamber. This detection method is compact and highly responsive, eliminating the need for contact detection elements within the liquid storage chamber and avoiding the risk of contamination to the chemical liquid. It also provides a precise basis for the control system to schedule the timing of replenishment, drainage, and supply of liquid, ensuring the long-term stability and reliability of the liquid supply system.

[0034] Combination Figure 2 As shown, in one specific embodiment, the fluid replenishment assembly 3 includes a main fluid replenishment line 301, a fluid replenishment on / off valve 302, and at least one fluid replenishment line 303; one end of the main fluid replenishment line 301 is used to connect to a liquid source, and the other end is connected to one end of the at least one fluid replenishment line 303 through the fluid replenishment on / off valve 302; the other end of the at least one fluid replenishment line 303 is connected to the fluid replenishment connector 5018 in a one-to-one correspondence; and the fluid replenishment on / off valve 302 is connected to the control system.

[0035] The replenishment valve 302 can be a multi-way distribution valve depending on the working conditions. The outlet end of the multi-way distribution valve is connected to the replenishment connector 5018 one by one through the pipeline to realize the coordinated control of centralized liquid supply and multi-way diversion, which significantly improves the system integration and replenishment efficiency, and realizes the centralized management and synchronous / asynchronous switching of replenishment supply of multi-pump system.

[0036] In one specific embodiment, the liquid supply assembly 1 includes a main liquid supply line 101, a liquid supply on / off valve 102, and at least one liquid supply line 103; one end of the main liquid supply line 101 is used to connect to a liquid source, and the other end is connected to one end of the at least one liquid supply line 103 through the liquid supply on / off valve 102; the other end of the at least one liquid supply line 103 is connected to the liquid supply connector 5019 in a one-to-one correspondence; and the liquid supply on / off valve 102 is connected to the control system.

[0037] The liquid supply on / off valve 102 can be a multi-way distribution valve depending on the operating conditions. The piping configuration of the liquid supply assembly enables centralized management and independent output of liquid supply from multiple pumps, significantly improving the system's integration and liquid supply reliability. The liquid supply on / off valve 102 is connected to the control system, allowing the liquid supply action to be precisely scheduled according to a preset sequence. This ensures that the liquid supply process of each pump is independently controllable and does not interfere with each other, guaranteeing the stability and consistency of the liquid supply output under multiple pump alternating or collaborative working modes.

[0038] Combination Figure 3As shown, in one specific embodiment, the driving component 4 includes at least one set of liquid supply driving components. In this embodiment, two sets of liquid supply driving components are used, namely a first liquid supply driving component 401 and a second liquid supply driving component 402. The first liquid supply driving component 401 includes a first liquid supply gas driving pipeline 4011, a first check valve 4012, and a first liquid supply driving on / off valve 4013. One end of the first liquid supply gas driving pipeline 4011 is used to connect to a gas source, and the first check valve is sequentially connected from the gas source. 4012 and the first liquid supply drive on / off valve 4013; the other end of the first liquid supply gas drive pipeline 4011 is connected to the drive connector 5020 of a diaphragm liquid supply pump 501; the second liquid supply drive assembly 402 has the same structure and connection method as the first liquid supply drive assembly, including the second liquid supply gas drive pipeline 4021, the second check valve 4022 and the second liquid supply drive on / off valve 4023, and the second liquid supply drive assembly 402 is connected to the drive connector 5020 of another diaphragm liquid supply pump 501; The liquid replenishment drive assembly 403 includes a liquid replenishment gas drive main pipeline 4031, a liquid replenishment drive on / off valve 4032, a vacuum generator 4033, and at least one branch pipeline 4034. One end of the liquid replenishment gas drive main pipeline 4031 is connected to a gas source, and the liquid replenishment drive on / off valve 4032 and the vacuum generator 4033 are sequentially connected from the gas source. One end of each branch pipeline 4034 is connected to the portion of the liquid supply gas drive pipeline 4011 located between the liquid supply drive on / off valve 4013 and the drive connector 5020, and the other end is connected to the vacuum generator 4033. Each branch pipeline 4034 is provided with a control valve. In this embodiment, a first branch pipeline is provided that is connected to one of the diaphragm liquid supply pumps 501, and a second branch pipeline is provided that is connected to another diaphragm liquid supply pump 501. A first control valve 4035 is provided on the first branch pipeline, and a second control valve 4036 is provided on the second branch pipeline. The first liquid supply drive on / off valve 4013, the second liquid supply drive on / off valve 4023, the liquid replenishment drive on / off valve 4032, the vacuum generator 4033, the first control valve 4035, and the second control valve 4036 are respectively connected to the control system.

[0039] The configuration of drive component 4 enables independent control and coordinated operation of positive pressure liquid supply drive and negative pressure liquid replenishment drive, significantly improving the reliability and control accuracy of system operation. The liquid supply drive component ensures unidirectional delivery of positive pressure gas to the compression chamber, effectively preventing pressure fluctuations caused by gas backflow and ensuring the stability and consistency of liquid supply and discharge actions. The liquid replenishment drive component allows the negative pressure generated by the vacuum generator 4033 to be independently introduced into each compression chamber, achieving independent or synchronous precise control of the liquid replenishment action of each diaphragm liquid supply pump 501. At the same time, an independent control valve is set on the branch pipeline 4034, which, together with the interlocking switching of the liquid supply drive on / off valve and the liquid replenishment drive on / off valve 4032, avoids mutual interference between the positive pressure liquid supply and negative pressure liquid replenishment circuits, and also enables independent and controllable liquid replenishment for each diaphragm liquid supply pump 501.

[0040] like Figures 2-6 As shown, in the replenishment state, the control system first controls the replenishment drive on / off valve 4032 and the first control valve 4035 to open simultaneously. Under the action of the driving gas, the vacuum generator 4033 draws the compression chamber of the diaphragm-type liquid supply pump 501 into a negative pressure vacuum. At this time, the replenishment on / off valve 302 is opened, and the chemical liquid enters from the inlet 50131 along the inner wall of the liquid storage chamber through the replenishment main pipeline 301 and the replenishment pipeline 303. There is no impact between the liquids, which effectively reduces the bubbles generated during the replenishment stage. When the diaphragm 5014 and the magnetic component 5016 move together to the second metal shell 5012, the second sensor 50112 detects the magnetic signal, indicating that the chemical liquid in the inner shell 5013 has been filled. The control system controls the replenishment drive on / off valve 4032, the first control valve 4035, the vacuum generator 4033 and the replenishment on / off valve 302 to close together, completing one replenishment operation.

[0041] Combined Figure 7 As shown, in both the draining and supplying states, the control system first opens the first supply drive on / off valve 4013 to pressurize the compression chamber. After a period of time, it opens the drain on / off valve 202 to discharge the air bubbles in the storage chamber, thus achieving draining. Then, it closes the drain on / off valve 202 and opens the supply on / off valve 102 to continuously pressurize the compression chamber, further squeezing the chemical in the storage chamber against the diaphragm and transporting it from the supply assembly 1 to the subsequent process, thus achieving the supplying action. When the magnetic component 5016 triggers the first sensor 50111, it indicates that the supplying action is complete.

[0042] In one embodiment, the control system is configured to control a plurality of the diaphragm-type liquid supply pumps 501 to operate alternately.

[0043] Multiple diaphragm-type liquid supply pumps 501 work alternately to achieve uninterrupted continuous liquid supply, eliminating the waiting time that a single pump system must interrupt during the liquid replenishment and defoaming processes, improving liquid supply efficiency, and thus significantly improving the output efficiency of the process unit and the overall machine capacity.

[0044] Specifically, in combination Figures 1-7 As shown, taking two diaphragm-type liquid supply pumps 501 as an example, namely the first liquid supply pump and the second liquid supply pump, the first liquid supply pump and the second liquid supply pump are replenished first through the liquid replenishment action. The first liquid supply pump first supplies liquid to the process unit. When the magnetic component 5016 in the first liquid supply pump triggers the first sensor 50111, it indicates that the first liquid supply pump has completed the liquid supply action. At this time, the control system controls the second liquid supply pump to start the liquid supply operation. When the second liquid supply pump supplies liquid, the control system controls the first liquid supply pump to perform the liquid replenishment action. After the first liquid supply pump completes the liquid replenishment, it waits for the magnetic component on the second liquid supply pump to trigger its corresponding first sensor 50111, and then controls the first liquid supply pump to supply liquid again. This cycle is used to achieve uninterrupted continuous liquid supply.

[0045] like Figure 8 As shown, according to a second aspect of this application, a coating and developing apparatus is provided, including the diaphragm-type chemical supply system described above.

[0046] In this embodiment, the diaphragm-type liquid supply pump 501 has a flat disc structure with a raised center and flat edges, and is vertically installed in the coating and developing equipment. It occupies little space and multiple diaphragm-type liquid supply pumps 501 can be arranged side by side to work alternately, so as to achieve uninterrupted continuous liquid supply. This eliminates the waiting time that a single pump system must interrupt during the liquid replenishment and defoaming processes, improves the liquid supply efficiency, and thus significantly improves the output efficiency of the process unit and the overall machine capacity.

[0047] The above description of the embodiments is intended to enable those skilled in the art to understand and apply this application. It will be apparent to those skilled in the art that various modifications can be easily made to these embodiments, and the general principles described herein can be applied to other embodiments without creative effort. Therefore, this application is not limited to the embodiments described herein, and any improvements and modifications made by those skilled in the art based on the disclosure of this application without departing from the scope and spirit of this application are within the scope of this application.

Claims

1. A diaphragm-type chemical supply system, characterized in that, include: The liquid supply pump assembly includes at least one diaphragm liquid supply pump. The inner cavity of each diaphragm liquid supply pump is divided into a compression chamber and a storage chamber by a diaphragm. Each diaphragm liquid supply pump is respectively provided with a drive connector that is in fluid communication with the compression chamber and a liquid replenishment connector, a liquid discharge connector, and a liquid supply connector that are in fluid communication with the storage chamber. A fluid replenishment assembly is connected to the fluid replenishment connector to replenish fluid into the reservoir. A drain assembly is connected to the drain connector to discharge the gas inside the liquid storage chamber; A liquid supply assembly is connected to the liquid supply connector to output the liquid in the storage chamber; A drive assembly, connected to the drive connector, is used to deliver or extract gas into the compression chamber, causing the diaphragm to deform and providing a power source for the diaphragm-type liquid supply pump. The control system is connected to the replenishment component, the drainage component, the supply component, and the drive component respectively to realize the replenishment, drainage, and supply of the diaphragm-type liquid pump.

2. The diaphragm-type chemical supply system according to claim 1, characterized in that, The diaphragm-type liquid supply pump includes a first outer shell, a second outer shell, and an inner shell that are arranged opposite to each other. The inner shell is fitted to the inner wall of the first outer shell, and the outline of the inner shell is adapted to the outline of the inner wall of the first outer shell. The first outer shell and the second outer shell are clamped and fixed to the diaphragm and the inner shell by fastening components to form the liquid storage cavity between the diaphragm and the inner shell and the compression cavity between the second outer shell and the diaphragm.

3. The diaphragm-type chemical supply system according to claim 2, characterized in that, The diaphragm-type liquid supply pump has a flat disc structure with a raised center and flat edges. The inner cavities of the first outer shell, the second outer shell, and the inner shell all have transition sections that slope from the center to the edge. The liquid replenishment connector is located on the transition section of the inner shell, and the liquid replenishment connector has an inlet at the connection with the liquid storage cavity. The inlet extends from the transition section of the inner shell to the center of the inner shell.

4. The diaphragm-type chemical supply system according to claim 3, characterized in that, The second outer shell is also provided with a sealing groove, and a sealing ring is provided in the sealing groove to make the compression chamber a sealed chamber.

5. The diaphragm-type chemical supply system according to claim 2, characterized in that, The diaphragm-type liquid supply pump further includes a detection component, which includes a first sensor disposed on the first housing, a second sensor disposed on the second housing, and a magnetic component disposed on the diaphragm; the first sensor and the second sensor are respectively connected to the control system. The magnetic component moves with the deformation of the diaphragm, triggering the first sensor or the second sensor to determine the fluid state in the storage chamber.

6. The diaphragm-type chemical supply system according to claim 1, characterized in that, The fluid replenishment assembly includes a main fluid replenishment line, a fluid replenishment on / off valve, and at least one fluid replenishment line; one end of the main fluid replenishment line is connected to a liquid source, and the other end is connected to one end of the at least one fluid replenishment line through the fluid replenishment on / off valve. The other end of the at least one fluid replenishment line is connected to the fluid replenishment connector in a corresponding manner. The fluid replenishment on / off valve is connected to the control system.

7. The diaphragm-type chemical supply system according to claim 1, characterized in that, The liquid supply assembly includes a main liquid supply line, a liquid supply on / off valve, and at least one liquid supply line; one end of the main liquid supply line is used to connect to a liquid source, and the other end is connected to one end of the at least one liquid supply line through the liquid supply on / off valve. The other end of the at least one liquid supply line is connected to the liquid supply connector in a corresponding manner. The liquid supply on / off valve is connected to the control system.

8. The diaphragm-type chemical supply system according to claim 1, characterized in that, The driving component includes: At least one set of liquid supply drive components, each set of liquid supply drive components includes a liquid supply gas drive pipeline, a check valve and a liquid supply drive on / off valve; one end of the liquid supply gas drive pipeline is used to connect to a gas source, and the check valve and the liquid supply drive on / off valve are connected sequentially from the gas source; the other end of the liquid supply gas drive pipeline is connected to the drive connector one by one. The liquid replenishment drive assembly includes a liquid replenishment gas drive main pipeline, a liquid replenishment drive on / off valve, a vacuum generator, and at least one branch pipeline; one end of the liquid replenishment gas drive main pipeline is connected to a gas source, and the liquid replenishment drive on / off valve and the vacuum generator are sequentially connected from the gas source; one end of each branch pipeline is connected to the portion of the liquid supply gas drive pipeline located between the liquid supply drive on / off valve and the drive connector, and the other end is connected to the vacuum generator, and each branch pipeline is equipped with a control valve; The liquid supply drive on / off valve, the liquid replenishment drive on / off valve, the vacuum generator, and the control valve are respectively connected to the control system.

9. The diaphragm-type chemical supply system according to claim 1, characterized in that, The control system is configured to control multiple diaphragm-type liquid supply pumps to operate alternately.

10. A coating and developing apparatus, characterized in that, The diaphragm-type chemical supply system includes any one of claims 1-9.

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