High-substitution-rate chemical supply system

Abstract

The application discloses a high-replacement-rate chemical liquid supply system, which is used in the field of electronic semiconductors and comprises a controller, a man-machine interactive screen and a double-branch chemical liquid supply link. The controller controls each valve and sensor in the double-branch chemical liquid supply link according to the user instruction collected by the man-machine interactive screen, so that liquid supplement, N2 injection, vacuum extraction, waste discharge and liquid discharge are realized. The application highlights the contribution of the whole process and control logic of liquid supplement, liquid discharge and waste discharge in the process of chemical liquid supply in semiconductor processing, so that the internal particles in the pipeline are efficiently replaced, and the cleanliness of the pipeline is ensured.

Description

Technical Field

[0001] This invention belongs to the field of electronic semiconductors, and specifically relates to a high displacement rate drug supply system. Background Technology

[0002] In semiconductor process equipment, many different types of reagents are used, such as photoresist PR, OK73, or cyclohexanone. These reagents are indispensable components of semiconductor processes and prerequisites for process implementation. In semiconductor equipment, reagents are generally delivered to the wafer surface from the factory or local devices via pipelines equipped with valves and gauges to ultimately fulfill relevant process requirements. In semiconductor equipment, these pipeline styles are often diverse, and the components used in the pipelines are often different, ultimately leading to variations in the performance of the reagent supply device. Furthermore, since the reagents ultimately reach the wafer surface directly, the cleanliness of the reagents often affects the particle count on the wafer surface, ultimately impacting process performance. As a reagent supply device, it not only needs to fulfill its function of delivering reagents to the wafer surface but also needs to ensure the cleanliness of the device itself. Therefore, the main objective of this invention is to provide a high-cleanliness reagent supply device that uses a high-displacement-rate structure inside the device to displace particles within the device, thereby achieving high cleanliness.

[0003] The shortcomings of the existing technology are as follows:

[0004] 1. In existing semiconductor process equipment, a specific pump is usually used as a power source to deliver the chemical solution to the wafer. However, the specific pump uses a capsule-type membrane, which contains a lot of residual particles that are not easy to be replaced, resulting in low overall cleanliness of the device.

[0005] 2. A new type of liquid medicine supply device is adopted, which can quickly replace the particles inside the pipeline, thereby ensuring the cleanliness of the pipeline;

[0006] 3. The entire liquid supply device is a miniaturized independent module that can achieve self-cleaning of internal pipelines.

[0007] The main objective of this invention is to provide a novel liquid medicine supply system. By employing a specific supply pump and pipeline structure, the supply device performs replenishment, drainage, and internal self-circulation, thereby efficiently displacing particles inside the pipeline and ensuring the cleanliness of the pipeline. Summary of the Invention

[0008] This invention provides a high-displacement-rate pharmaceutical supply system that can displace residual particles in the system, thereby ensuring the cleanliness of the pipeline. As an independent module, the supply system not only achieves efficient pharmaceutical replacement but also performs self-cleaning of the internal pipeline. The independently modular supply system integrates electrical, piping, and control components, making it easily applicable in various scenarios for internal pipeline flushing.

[0009] The above objectives are achieved through the following technical solutions:

[0010] A high-displacement-rate drug supply system, including a controller, a human-machine interface screen, and a dual-branch drug supply path;

[0011] The controller is connected to and controls various valves and sensors in the dual-branch drug supply chain to realize liquid replenishment, N2 injection, vacuuming, waste discharge and liquid discharge.

[0012] The human-computer interaction screen is used for human-computer interaction with users;

[0013] The first branch of the drug solution mixing circuit includes: an input end of a first drug solution supply pump, which is connected to a first drug solution inlet via a first injection drug solution pipeline, to a first N2 inlet via a first injection N2 gas pipeline, and to a first Vac inlet via a first injection Vac gas pipeline; and an output end of the first drug solution supply pump, which is connected to the output ends of the first drug solution supply pump and the second drug solution supply pump via a first Drn waste discharge pipeline, and to the output ends of the first drug solution supply pump and the second drug solution supply pump via a first output drug solution pipeline.

[0014] The second branch of the drug solution mixing circuit includes: the input end of the second drug solution supply pump, which is connected to the second drug solution inlet through the second injection drug solution pipeline, the second N2 inlet through the second injection N2 gas pipeline, and the second Vac inlet through the second injection Vac gas pipeline; the output end of the second drug solution supply pump, which is connected to the output ends of the first drug solution supply pump and the second drug solution supply pump through the second Drn waste discharge pipeline, and the output ends of the first drug solution supply pump and the second drug solution supply pump through the second output drug solution pipeline.

[0015] The first injection liquid pipeline is equipped with a first liquid control valve to control the on / off supply of liquid from the plant or other sources; the first injection N2 gas pipeline is equipped with an N2 first control valve to control the on / off supply of N2 from the plant end; the first injection Vac gas pipeline is equipped with a plant Vac first control valve to control the on / off supply of plant Vac; the first Drn waste discharge pipeline is equipped with a first liquid supply pump Drn control valve to control the discharge of excess waste gas when the gas-liquid mixture in the first liquid supply pump is in a state of mixing; the first output liquid pipeline is equipped with a first liquid supply pump output control valve to control the on / off output of the first liquid supply pump.

[0016] The second injection liquid pipeline is equipped with a second liquid control valve to control the on / off supply of liquid from the plant or other sources; the second injection N2 gas pipeline is equipped with an N2 second control valve to control the on / off supply of N2 from the plant end; the second injection Vac gas pipeline is equipped with a plant Vac second control valve to control the on / off supply of plant Vac; the second Drn waste discharge pipeline is equipped with a second liquid supply pump Drn control valve to control the discharge of excess waste gas when the gas-liquid mixture in the first liquid supply pump is in a state of mixing; the second output liquid pipeline is equipped with a second liquid supply pump output control valve to control the on / off output of the first liquid supply pump.

[0017] The first liquid supply pump is equipped with an upper liquid level sensor and a lower liquid level sensor for detecting when the first liquid supply pump has finished replenishing and emptying the liquid.

[0018] The second medicine supply pump is equipped with an upper liquid level sensor and a lower liquid level sensor for detecting when the second medicine supply pump has finished replenishing and emptying the medicine.

[0019] The controller is connected to the front-end human-machine interface screen, collects the control logic algorithm, data acquisition instructions and valve control instructions input by the user, parses them into specific parameters, data acquisition commands and valve commands, and executes various control processes: liquid replenishment process, liquid drainage process, waste discharge process and internal circulation process;

[0020] Specific parameters: replenishment volume, discharge volume, waste discharge time, replenishment circulation time, valve opening degree, valve opening and closing time;

[0021] Data acquisition command: Sensor feedback signal;

[0022] Valve commands: Valve opening and closing commands.

[0023] During the fluid replacement process:

[0024] The controller outputs a replenishment command to the first medicine control valve and adjusts the valve opening to replenish the first medicine supply pump in real time.

[0025] The controller outputs a replenishment command to the second medicine control valve and adjusts the valve opening to replenish the second medicine supply pump in real time.

[0026] During the replenishment process, the controller collects feedback signals from the liquid level sensor on the first liquid supply pump, the liquid level sensor on the lower part of the first liquid supply pump, the liquid level sensor on the upper part of the second liquid supply pump, and the liquid level sensor on the lower part of the second liquid supply pump in real time, so as to automatically replenish the first liquid supply pump and the second liquid supply pump when the liquid is low and automatically stop replenishing when the liquid is full, either separately or simultaneously.

[0027] During the drainage process:

[0028] The controller outputs a drain command to the first medicine supply pump and outputs a control valve to drain the first medicine supply pump in real time.

[0029] The controller outputs a drain command to the second medicine supply pump, which then outputs a control valve to drain the second medicine supply pump in real time.

[0030] During the drainage process, the controller collects feedback signals from the liquid level sensor under the first liquid supply pump and the liquid level sensor under the second liquid supply pump in real time, so as to automatically stop drainage when the first liquid supply pump and the second liquid supply pump are emptied, either separately or simultaneously.

[0031] During the waste discharge process:

[0032] The controller outputs a waste discharge command to the first control valve of N2 and the first drug supply pump Drn control valve to discharge waste from the first drug supply pump in real time.

[0033] The controller outputs a waste discharge command to the N2 second control valve and the Drn control valve of the second medicine supply pump, so that the waste discharge of the second medicine supply pump can be carried out in real time.

[0034] The first liquid supply pump and the first liquid supply pump discharge waste separately or simultaneously.

[0035] During the internal loop:

[0036] The controller outputs a signal to open the first control valve N2, the first liquid supply pump output control valve, the second liquid supply pump output control valve, and the plant maintenance Vac second control valve, so as to deliver liquid medicine from the first liquid supply pump to the second liquid supply pump.

[0037] The controller outputs a signal to open the N2 second control valve, the first liquid supply pump output control valve, the second liquid supply pump output control valve, and the plant maintenance Vac first control valve, so as to realize the second liquid supply pump delivers liquid to the first liquid supply pump.

[0038] The self-circulation within the supply device prevents the liquid medicine from stagnating and forming crystals or particles.

[0039] The present invention has the following beneficial effects and advantages:

[0040] (1) Existing specific pumps use a bladder structure, which prevents particles from being discharged from the pump and results in relatively poor overall cleanliness of the pipeline. The present invention uses a novel liquid supply device with a dedicated supply pump to efficiently discharge particles from the pump.

[0041] (2) This liquid supply device has functions such as liquid inlet, liquid outlet and waste discharge, realizing the separation of gas and liquid in the liquid, thereby ensuring that there are no bubbles in the liquid and avoiding the impact of bubbles on process performance.

[0042] (3) This liquid supply device can achieve internal self-circulation to prevent the liquid from stagnating and crystallizing, which would ultimately affect the cleanliness. Attached Figure Description

[0043] Figure 1 The present invention relates to a high displacement rate drug supply system.

[0044] Figure 2 This is a schematic diagram of the fluid replenishment process of the present invention.

[0045] Figure 3 This is a schematic diagram of the drainage process of the present invention.

[0046] Figure 4 This is a schematic diagram of the waste discharge process of the present invention.

[0047] Figure 5 This is a schematic diagram of the replenishment cycle from the first drug supply pump to the second drug supply pump according to the present invention.

[0048] Figure 6 This is a schematic diagram of the replenishment cycle from the second drug supply pump to the first drug supply pump according to the present invention.

[0049] Wherein, 01 is the first liquid inlet; 02 is the first liquid control valve; 03 is the first liquid supply pump 1; 04 is the first control valve for N2; 05 is the first inlet for N2; 06 is the first inlet for the plant's Vac; 07 is the first control valve for the plant's Vac; 08 is the output control valve for the first liquid supply pump; 09 is the output terminal of the first and second liquid supply pumps; 10 is the control valve for the first liquid supply pump Drn; 11 is the control valve for the first and second liquid supply pumps Drn. Output terminals: 12 is the output control valve of the second medicine supply pump; 13 is the control valve of the second medicine supply pump (Drn); 14 is the control valve of the second medicine; 15 is the plant's second medicine inlet; 16 is the plant's N2 second inlet; 17 is the plant's N2 second control valve; 18 is the plant's Vac second inlet; 19 is the plant's Vac second control valve; 20 is the second medicine supply pump; 21 and 22 are the level sensors of the second medicine supply pump; 23 and 24 are the level sensors of the first medicine supply pump. Detailed Implementation

[0050] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0051] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0052] like Figure 1 As shown, this is the main component of a high-displacement-rate drug supply system.

[0053] The first liquid inlet 01 can generally be connected to the plant terminal or other liquid sources to input liquid into the first liquid supply pump 03.

[0054] The first liquid control valve 02 is used to control the on / off supply of liquid to the plant or other sources. When the liquid is started to be delivered to the first liquid supply pump 03, the first liquid control valve 02 is opened, and the first liquid inlet 01 can supply liquid to the first liquid supply pump 03.

[0055] The first liquid supply pump 03 is used to store the liquid from the first liquid inlet 01 of the plant, separate the gas and liquid in the liquid, and then transport the liquid to the downstream pipeline.

[0056] The first control valve 04 of N2 is used to control the on / off of the supply of N2 at the plant end. When the first liquid supply pump 03 delivers liquid to the downstream end, the first control valve 05 of N2 at the plant end opens, and the N2 at the plant end enters the first liquid supply pump 03, driving the internal structure of the first liquid supply pump 03 to move. At the same time, the output control valve 08 of the first liquid supply pump opens, and the liquid stored in the first liquid supply pump 03 is output to the output end 09 of the first liquid supply pump and the second liquid supply pump through the output control valve 08.

[0057] The first inlet 05 of the plant N2 is used to provide power to the first liquid supply pump 03. When the first control valve 04 of the plant N2 is opened, the plant N2 directly enters the first liquid supply pump 03 through the pipeline, driving the structure in the pump to move, thereby allowing the pump to output liquid.

[0058] The first inlet 06 of the plant's Vac is used to provide vacuum Vac to the first liquid supply pump 03. When the first control valve 07 of the plant's Vac is opened, the Vac enters the first liquid supply pump 03, driving the structural components in the pump to move, thereby facilitating the liquid to enter the first liquid supply pump 03 better.

[0059] The first control valve 07 of the plant Vac is used to control the supply and disconnection of the plant Vac. When it is necessary to deliver liquid to the supply pump, the first control valve 07 of the plant Vac opens. Its function is to accelerate the movement of the structural components in the first liquid supply pump 03, thereby making it easier to supply liquid to the first liquid supply pump 03.

[0060] The first liquid supply pump output control valve 08 is used to control the on / off state of the output of the first liquid supply pump 03. When the first liquid supply pump 03 needs to deliver liquid to the downstream end, the first liquid supply pump output control valve 08 is opened, and the first liquid supply pump 03 can supply liquid to the downstream end.

[0061] The output terminals 09 of the first and second liquid supply pumps enable the first and second liquid supply pumps to supply liquid to the downstream end simultaneously or alternately. When the liquid in the first liquid supply pump 03 is used up, it can be directly switched to the second liquid supply pump 20 to supply liquid. At this time, the first liquid supply pump 03 can be replenished simultaneously. This cycle ensures uninterrupted liquid supply to the downstream end, thereby improving the liquid supply continuity of the entire device.

[0062] When the first liquid supply pump Drn control valve 10 is filled with liquid, the pump is in a gas-liquid mixed state. At this time, the first liquid supply pump Drn control valve 10 is opened, and the gas in the first liquid supply pump 03 can be discharged from the first liquid supply pump Drn control valve 10. Finally, it is discharged through the output terminal 11 of the first liquid supply pump and the second liquid supply pump Drn, so as to avoid the liquid in the pump being mixed with gas and affecting the performance of subsequent processes.

[0063] The output terminals 11 of the first and second drug supply pumps can discharge the gas and liquid output from the first and second drug supply pumps respectively.

[0064] The output control valve 12 of the second medicine supply pump is used to control the on / off of the medicine at the output end of the second medicine supply pump 20. When the second medicine supply pump 20 supplies liquid to the rear end, the output control valve 12 of the second medicine supply pump is opened.

[0065] When the second liquid supply pump 20 is filled with liquid, the pump is in a gas-liquid mixed state. At this time, the second liquid supply pump 20 'Drn' control valve 13 opens, and the gas in the second liquid supply pump 20 can be discharged from the second liquid supply pump 20 'Drn' control valve 13. Finally, it is discharged through the output terminal 11 of the first liquid supply pump and the second liquid supply pump 'Drn', so as to avoid the liquid in the pump being mixed with gas and affecting the subsequent process performance.

[0066] The second liquid control valve 14 is used to control the on / off supply of liquid from the plant or other sources. When liquid is started to be delivered to the second liquid supply pump, the second liquid control valve 14 is opened, and the second liquid inlet 15 can supply liquid to the supply pump.

[0067] The second liquid inlet 15 can generally be connected to the plant terminal or other liquid sources to input liquid into the second liquid supply pump.

[0068] The second inlet 16 of the plant N2 is used to provide power to the second liquid supply pump 20. When the second control valve 17 of the plant N2 is opened, the plant N2 directly enters the second liquid supply pump 20 through the pipeline, driving the structure in the pump to move, thereby allowing the pump to output liquid.

[0069] The second control valve 17 of the plant N2 is used to control the on / off of the supply of the plant N2. When the second liquid supply pump delivers liquid to the downstream end, the second control valve 17 of the plant N2 opens, and the plant N2 enters the second liquid supply pump 20, which drives the internal structure of the second liquid supply pump 20 to move. At the same time, the output control valve 12 of the second liquid supply pump opens, and the liquid stored in the second liquid supply pump 20 is output to the output end 09 of the first liquid supply pump and the second liquid supply pump through the output control valve 12.

[0070] The second inlet 18 of the plant Vac is used to provide vacuum Vac to the second liquid supply pump 20. When the second control valve 19 of the plant Vac is opened, the plant Vac enters the second liquid supply pump 20 through the second inlet 18, which drives the structural components in the pump to move, so that the liquid can enter the second liquid supply pump 20 better.

[0071] The second control valve 19 of the plant Vac is used to control the supply and disconnection of the plant Vac. When it is necessary to deliver liquid to the second liquid supply pump 20, the second control valve 19 of the plant Vac is opened. Its function is to accelerate the movement of the structural components in the second liquid supply pump 20, so as to supply liquid to the second liquid supply pump 20 more conveniently.

[0072] The second liquid supply pump 20 is used to store the liquid from the second liquid inlet 15 of the plant, separate the gas and liquid in the liquid, and then transport the liquid to the pipeline at the back end.

[0073] The upper liquid level sensor 21 and the lower liquid level sensor 22 of the second liquid supply pump are used to detect when the second liquid supply pump 20 has completed replenishment and when the liquid has been emptied.

[0074] The upper liquid level sensor 23 and the lower liquid level sensor 24 of the first liquid supply pump are used to detect when the first liquid supply pump 03 has completed replenishment and when the liquid has been emptied.

[0075] The liquid level sensor 23 on the first liquid supply pump and the liquid level sensor 21 on the second liquid supply pump are respectively located on the top of the inner wall of the first liquid supply pump 03 and the second liquid supply pump 20. The liquid level sensor 24 on the first liquid supply pump and the liquid level sensor 22 on the second liquid supply pump are respectively located on the bottom of the inner wall of the first liquid supply pump 03 and the second liquid supply pump 20.

[0076] Furthermore, the first liquid supply pump 03 and the second liquid supply pump 20 in this invention adopt the existing bladder structure and are implemented by installing two liquid level sensors inside the diaphragm pump.

[0077] Liquid replenishment process of the supply unit:

[0078] like Figure 2 The diagram shows the first liquid supply pump 03 and the second liquid supply pump 20 replenishing liquid. During replenishment, the corresponding plant control valve and Vac control valve need to be opened. When replenishment is completed, the sensor 24 on the first liquid supply pump and the sensor 22 on the second liquid supply pump are triggered to indicate that the supply pump is full.

[0079] In actual use, the first liquid supply pump 03 and the second liquid supply pump 20 are not limited to replenishing liquid at the same time; the replenishment of the first liquid supply pump 03 and the second liquid supply pump 20 can be independent of each other.

[0080] The liquid discharge process of the supply unit:

[0081] like Figure 3 The diagram shows the first and second chemical supply pumps 03 and 20 discharging liquid respectively. During discharging, the corresponding plant control valve and N2 control valve must be opened. Upon completion of discharging, the sensors 23 and 21 below the first and second chemical supply pumps are triggered, indicating that the pumps are empty. In actual use, the first and second chemical supply pumps 03 and 20 are not limited to discharging simultaneously; their discharging can be independent.

[0082] Waste discharge process of the supply unit:

[0083] like Figure 4The diagram shows the first liquid supply pump 03 and the second liquid supply pump 20 at the waste discharge point (Drn). During waste discharge, the corresponding plant control valve and N2 control valve need to be opened. After a certain period of waste discharge, all the gas in the supply pumps can be discharged, leaving only the liquid medicine. The waste discharge of the first liquid supply pump 03 and the first liquid supply pump 20 can be independent of each other.

[0084] Internal circulation process of the supply device:

[0085] like Figure 5 As shown, the first medicine supply pump 03 can deliver medicine to the second medicine supply pump 20, and simultaneously... Figure 6 As shown, the second chemical supply pump 20 can deliver chemical solution to the first chemical supply pump 03, while maintaining self-circulation within the supply device. This not only ensures continuous replenishment and discharge of the supply pump to a certain extent, saving chemical solution in the plant, but also prevents the chemical solution from stagnating and forming crystals or particles, which would ultimately affect the overall process performance, for some chemical solutions.

[0086] The outstanding contribution of this invention lies in the entire process and control logic of replenishment, drainage and waste discharge of the liquid supply device to achieve efficient replacement of particles inside the pipeline, thereby ensuring the cleanliness of the pipeline; the self-circulation inside the liquid supply device not only prevents some liquids from stagnating and crystallizing, affecting the process performance, but also enables the supply pump to continuously replenish and discharge liquid, thereby washing away the particles inside the pump and finally discharging them, achieving the purpose of pipeline cleanliness.

[0087] The above description is merely a preferred embodiment of the present invention and does not constitute any limitation on the present invention. Any simple modifications, alterations, or equivalent structural changes made to the above embodiments based on the technical essence of the present invention shall still fall within the protection scope of the present invention.

Claims

1. A high-displacement-rate drug supply system, characterized in that, This includes a controller, a human-machine interface screen, and a dual-branch drug supply chain. The controller is connected to and controls various valves and sensors in the dual-branch drug supply chain to realize liquid replenishment, N2 injection, vacuuming, waste discharge and liquid discharge. The human-computer interaction screen is used for human-computer interaction with users; The first branch of the drug solution mixing branch includes: the input end of the first drug solution supply pump (03) is connected to the first drug solution inlet (01) through the first injection drug solution pipeline, the first N2 inlet (05) through the first injection N2 gas pipeline, and the first Vac inlet (06) through the first injection Vac gas pipeline; the output end of the first drug solution supply pump (03) is connected to the output end (11) of the first drug solution supply pump and the second drug solution supply pump through the first Drn waste discharge pipeline, and the output end (09) of the first drug solution supply pump and the second drug solution supply pump through the first output drug solution pipeline. The second branch of the drug solution mixing branch includes: the input end of the second drug solution supply pump (20) is connected to the second drug solution inlet (15) through the second injection drug solution pipeline, the second N2 inlet (16) through the second injection N2 gas pipeline, and the second Vac inlet (18) through the second injection Vac gas pipeline; the output end of the second drug solution supply pump (20) is connected to the output end (11) of the first drug solution supply pump and the second drug solution supply pump through the second Drn waste discharge pipeline, and the output end (09) of the first drug solution supply pump and the second drug solution supply pump through the second output drug solution pipeline.

2. The high displacement rate drug supply system according to claim 1, characterized in that, The first injection liquid pipeline is equipped with a first liquid control valve (02) for controlling the supply of liquid from the plant or other sources; the first injection N2 gas pipeline is equipped with an N2 first control valve (04) for controlling the supply of N2 from the plant end; the first injection Vac gas pipeline is equipped with a plant Vac first control valve (07) for controlling the supply of plant Vac; the first Drn waste discharge pipeline is equipped with a first liquid supply pump Drn control valve (10) for controlling the discharge of excess waste gas when the gas-liquid mixture in the first liquid supply pump is in a state of mixing; the first output liquid pipeline is equipped with a first liquid supply pump output control valve (08) for controlling the output of the first liquid supply pump (03).

3. The high displacement rate drug supply system according to claim 1, characterized in that, The second injection liquid pipeline is equipped with a second liquid control valve (14) for controlling the supply of liquid from the plant or other sources; the second injection N2 gas pipeline is equipped with an N2 second control valve (17) for controlling the supply of N2 from the plant end; the second injection Vac gas pipeline is equipped with a plant Vac second control valve (19) for controlling the supply of plant Vac; the second Drn waste discharge pipeline is equipped with a second liquid supply pump Drn control valve (13) for controlling the discharge of excess waste gas when the gas-liquid mixture in the first liquid supply pump is in a mixed state; the second output liquid pipeline is equipped with a second liquid supply pump output control valve (12) for controlling the output of the first liquid supply pump (03).

4. The high displacement rate drug supply system according to claim 1, characterized in that, The first liquid supply pump (03) is equipped with an upper liquid level sensor (23) and a lower liquid level sensor (24) for detecting when the first liquid supply pump (03) has finished replenishing the liquid and when the liquid has been emptied. The second liquid supply pump (20) is equipped with an upper liquid level sensor (21) and a lower liquid level sensor (22) to detect when the second liquid supply pump (20) has finished replenishing the liquid and when the liquid has been emptied.

5. The high displacement rate drug supply system according to claim 1, characterized in that, The controller is connected to the front-end human-machine interface screen, collects the control logic algorithm, data acquisition instructions and valve control instructions input by the user, parses them into specific parameters, data acquisition commands and valve commands, and executes various control processes: liquid replenishment process, liquid drainage process, waste discharge process and internal circulation process; Specific parameters: replenishment volume, drainage volume, waste discharge time, replenishment circulation time, valve opening degree, valve opening and closing time; Data acquisition command: Sensor feedback signal; Valve commands: Valve opening and closing commands.

6. The high displacement rate drug supply system according to claim 5, characterized in that, During the fluid replacement process: The controller outputs a replenishment command to the first medicine control valve (02) and adjusts the valve opening to replenish the first medicine supply pump (03) in real time; The controller outputs a replenishment command to the second medicine control valve (14) and adjusts the valve opening to replenish the second medicine supply pump (20) in real time.

7. The high displacement rate drug supply system according to claim 6, characterized in that, During the replenishment process, the controller collects feedback signals from the upper liquid level sensor (23) of the first liquid supply pump, the lower liquid level sensor (24) of the first liquid supply pump, the upper liquid level sensor (21) of the second liquid supply pump, and the lower liquid level sensor (22) of the second liquid supply pump in real time, so as to automatically replenish the first liquid supply pump (03) and the second liquid supply pump (20) when the liquid is low and automatically stop replenishing when the liquid is full, either separately or simultaneously.

8. The high displacement rate drug supply system according to claim 5, characterized in that, During the drainage process: The controller outputs a drain command to the first liquid supply pump output control valve (08) to drain the first liquid supply pump (03) in real time; The controller outputs a drain command to the second medicine supply pump output control valve (12) to drain the second medicine supply pump (20) in real time; During the drainage process, the controller collects the feedback signals from the liquid level sensor (24) of the first liquid supply pump and the liquid level sensor (22) of the second liquid supply pump in real time, so as to automatically stop drainage when the first liquid supply pump (03) and the second liquid supply pump (20) are emptied, respectively or simultaneously.

9. The high displacement rate drug supply system according to claim 5, characterized in that, During the waste discharge process: The controller outputs a waste discharge command to the first control valve (04) of N2 and the first liquid supply pump control valve (10) to discharge waste from the first liquid supply pump (03) in real time. The controller outputs a waste discharge command to the N2 second control valve (17) and the second liquid supply pump Drn control valve (13) to discharge waste from the second liquid supply pump (20) in real time. The first liquid supply pump (03) and the first liquid supply pump (20) discharge waste separately or simultaneously.

10. The high displacement rate drug supply system according to claim 5, characterized in that, During the internal loop: The controller outputs a signal to control the opening of the first control valve (04) of N2, the output control valve (08) of the first liquid supply pump, the output control valve (12) of the second liquid supply pump, and the second control valve (19) of the plant maintenance Vac, so as to realize the delivery of liquid medicine from the first liquid supply pump (03) to the second liquid supply pump (20); The controller outputs a signal to control the opening of the second control valve (17) of N2, the output control valve (08) of the first liquid supply pump, the output control valve (12) of the second liquid supply pump, and the first control valve (07) of the plant Vac, so as to realize that the second liquid supply pump (20) delivers liquid to the first liquid supply pump (03); The self-circulation within the supply device prevents the liquid medicine from stagnating and forming crystals or particles.

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