Uniform heating and atmosphere control method for high vacuum non-oxidizing oven

Abstract

The application provides a uniform heating and atmosphere control method of a high-vacuum non-oxidation oven, relates to the technical field of high-vacuum non-oxidation ovens, and comprises an adjusting mechanism, the adjusting mechanism comprises a vacuum motor, the vacuum motor is fixedly connected with a bottom wall of an oven body, a gear is fixedly connected with an output end of the vacuum motor, and an arc surface of the gear is provided with an adjusting ring. In the heating process of the high-vacuum non-oxidation oven, the sample fixed position heating has the problem of uneven temperature distribution, the adjusting mechanism can drive the adjusting ring and the placing plate to rotate through the vacuum motor driving the gear, the sample is uniformly rotated and heated in the oven, the top plate drives the sample to be clamped and fixed through the bidirectional cylinder, the abutting block and the contact ring cooperate to position the rotation angle, the problems of uneven heating and poor adaptability are solved, the sample is uniformly rotated and heated, the clamping is stable and reliable, the angle is accurately positioned, and the beneficial effects of improving the heat treatment effect are achieved.

Description

Technical Field

[0001] This invention relates to the field of high vacuum non-oxidizing oven technology, and more particularly to a method for uniform heating and atmosphere control in a high vacuum non-oxidizing oven. Background Technology

[0002] A high-vacuum non-oxidizing oven is a specialized piece of equipment that can heat-treat materials under high temperature and high vacuum conditions while preventing oxidation. This equipment is widely used in precision annealing, drying, and packaging processes in the fields of semiconductors, electronic components, and new materials.

[0003] The invention disclosed in CN109320750A discloses a method for preparing a thermoplastic polyimide film. The key technical points are as follows: the preparation steps are as follows: (1) coating one side of the PI film with polyamic acid resin and pre-baking to form a polyamic acid resin layer; (2) placing the PI film processed in step 1 in a high-temperature non-oxidizing oven under nitrogen protection and gradually heating to imidize the polyamic acid resin layer to obtain a PI film with a single-sided polyimide layer; (3) coating the other side of the PI film with a single-sided polyimide layer obtained in step 2 with polyamic acid resin and pre-baking in an oven to remove the solvent and form a polyamic acid resin layer; (4) placing the PI film processed in step 3 in a high-temperature non-oxidizing oven under nitrogen protection and gradually heating to imidize the polyamic acid resin layer to obtain a thermoplastic polyimide film. The preparation method provided by this invention is simple, and the film obtained has the advantages of high peel strength, good tensile strength, large elongation, and high glass transition temperature.

[0004] Regarding the above-mentioned issues, the following technical defects exist: A high-vacuum oxidation-free oven is a device used for heat treatment of precision samples such as electronic components and semiconductor materials in a high-temperature, high-vacuum, and oxygen-free environment. It typically consists of an oven body, a door installed on one side, and a control panel installed on the side of the door. The oven is evacuated to a high vacuum and then filled with a protective gas to create an oxidation-free heating environment. In actual use, when the sample is placed in a fixed position inside the oven for heating, the temperature is higher on the side closer to the heat source and lower on the side farther from the heat source, resulting in uneven temperature distribution. This leads to uneven heating of the sample, affecting the heat treatment effect and product quality.

[0005] Therefore, it is necessary to provide a new method for uniform heating and atmosphere control in a high-vacuum non-oxidizing oven to solve the above-mentioned technical problems. Summary of the Invention

[0006] The purpose of this invention is to overcome the shortcomings of the prior art and to propose a method for uniform heating and atmosphere control in a high-vacuum non-oxidizing oven.

[0007] To achieve the above objectives, the present invention adopts the following technical solution: It includes an oven body and an adjustment mechanism. A door is installed on one side of the oven body, and a control panel is installed on the side of the oven body near the door. An adjustment mechanism is provided on the bottom wall of the oven body. The adjustment mechanism includes a vacuum motor, which is fixedly connected to the bottom wall of the oven body. A gear is fixedly connected to the output end of the vacuum motor. An adjustment ring is provided on the arc surface of the gear, and the gear meshes with the side wall of the adjustment ring. A limiting frame is provided on the arc surface of the adjustment ring, and the side wall of the limiting frame is slidably connected to the arc surface of the adjustment ring. Three support rods are fixedly connected to the side of the limiting frame near the bottom wall of the oven body, and one end of the arc surface of each support rod is fixedly connected to the bottom wall of the oven body.

[0008] The above technical solution achieves a high-vacuum, oxidation-free drying oven, a device used for heat treatment of precision samples such as electronic components and semiconductor materials in a high-temperature, high-vacuum, and oxygen-free environment. It typically consists of an oven body, a door mounted on one side, and a control panel mounted on the side of the door. The oven is evacuated to a high vacuum and then filled with protective gas to create an oxidation-free heating environment. In actual use, when samples are placed in a fixed position within the oven for heating, the temperature is uneven, with the side closer to the heat source being warmer and the side farther from the heat source being cooler. This uneven temperature distribution leads to uneven heating of the samples, affecting the heat treatment effect and product quality. This problem can be solved by an adjustment mechanism. The adjustment mechanism uses a vacuum motor to drive gears, rotating the adjustment ring and the placement plate. A bidirectional cylinder drives the top plate to clamp the sample, while a contact block and contact ring work together to position the rotation angle, achieving uniform rotational heating and stable clamping of the sample.

[0009] Preferably, a placement plate is fixedly connected to the side of the adjusting ring away from the gear. An adjusting groove is provided on the side of the placement plate. A top plate is slidably connected to the inner wall of the adjusting groove. Limiting plates are fixedly connected to both ends of the side of the placement plate away from the oven body. The cross-section of the limiting plates is "L". A connecting ring is fixedly connected to the side of the adjusting ring near the bottom wall of the oven body. A limiting groove is provided on the side wall of the connecting ring. A slider is slidably connected to the inner wall of the limiting groove. A connecting rod is fixedly connected to one end of the arc surface of the slider. A bidirectional cylinder is fixedly connected to the end of the connecting rod away from the arc surface of the slider. One output end of the bidirectional cylinder is fixedly connected to the top plate.

[0010] By adopting this preferred solution, the bidirectional cylinder can drive the top plate to slide along the adjustment groove, which can clamp and fix the sample, and the output end of the other end of the bidirectional cylinder can limit the angle of the adjustment ring.

[0011] Preferably, the other output end of the bidirectional cylinder is fixedly connected to an abutment block, and the bottom wall of the oven body is fixedly connected to a contact ring.

[0012] By adopting the above technical solution, the abutting block will abut against the contact ring under the drive of the bidirectional cylinder, thereby positioning the adjusted ring angle and improving the stability of the placement plate during use.

[0013] Preferably, a contact piece is fixedly connected to the side of the limiting plate near the top plate, and the contact piece is an elastic piece.

[0014] By adopting the above technical solution, the elastic contact piece plays a buffering role when clamping the workpiece on the top plate, avoiding damage to the workpiece surface by hard clamping, while providing auxiliary clamping force.

[0015] Preferably, a contact pad is fixedly connected to the side of the contact piece near the top plate, and the side of the contact pad away from the contact piece has anti-slip texture.

[0016] By adopting the above technical solution, the anti-slip texture on the contact pad can increase the friction with the workpiece surface and prevent the workpiece from sliding and shifting during rotation.

[0017] Preferably, an auxiliary mechanism is provided on one side of the oven body. The auxiliary mechanism includes a support plate, which is fixedly connected to one side of the oven body. An air pump is fixedly connected to one side of the support plate. A connecting pipe is installed at the air outlet of the air pump. The connecting pipe is sealed and connected to the side wall of the oven body. The air inlet of the air pump is fixedly connected to a connecting pipe via a flange. One end of the arc surface of the connecting pipe is fixedly connected to an air tank. The air tank is slidably connected to one side of the support plate.

[0018] By adopting the above technical solution, the high-vacuum non-oxidizing oven achieves precise control of the internal atmosphere composition during heating to create an oxygen-free or specific gas environment, preventing samples from oxidizing or undergoing adverse reactions at high temperatures. Traditionally, protective gas is manually introduced into the oven by connecting gas cylinder valves. Operators cannot precisely control the type and content of gases inside the oven and can only roughly estimate the amount of gas introduced based on experience. Furthermore, they cannot actively select to "blow" specific gases into the oven. When different process gases are required, gas cylinders need to be replaced and pipelines reconnected, which is cumbersome, has low control precision, and cannot meet the differentiated atmospheric requirements of different samples. The auxiliary mechanism can solve this problem. The auxiliary mechanism can actively determine the type and content of gases inside the oven and can blow specific gases into the oven as needed, thus solving the problems of low atmosphere control precision and poor adaptability. The auxiliary mechanism achieves active and precise control of the type and content of gases inside the oven.

[0019] Preferably, the support plate has a connecting groove at the position corresponding to the gas tank, and the connecting groove is used to improve the stability of the contact between the bottom of the gas tank and the side of the support plate.

[0020] By adopting the above technical solution, the connecting groove can guide the bottom of the gas tank, thereby improving the convenience and stability of gas tank installation.

[0021] Preferably, an adjusting rod is fixedly connected to the arc surface of the gas tank, and a guide groove is fixedly connected to the side wall of the connecting groove at the position corresponding to the two adjusting rods, and the two adjusting rods are slidably connected to the inner walls of the two guide grooves respectively.

[0022] By adopting the above technical solution, the adjusting rod can slide in the guide groove, which can provide guidance for the installation and disassembly of the gas tank and facilitate the rapid replacement of the gas tank.

[0023] Preferably, a connecting plate is fixedly connected to the side of the support plate away from the gas tank, and a positioning rod is threaded through the inner wall of the connecting plate. One end of the arc surface of the positioning rod slides through the bottom wall of the connecting groove, and a rotating block is fixedly connected to the other end of the arc surface of the positioning rod.

[0024] By adopting the above technical solution, rotating the rotating block can drive the positioning rod to move, so that the end of the positioning rod abuts against the gas tank, thereby locking the gas tank in the connecting groove and preventing the gas tank from loosening during use.

[0025] Compared with the prior art, the advantages and positive effects of the present invention are as follows: 1. In this invention, by setting an adjustment mechanism, the problem of uneven temperature distribution when heating the sample at a fixed position during the high vacuum non-oxidizing oven heating process is solved. The adjustment mechanism can drive the gear of the vacuum motor to drive the adjustment ring and the placement plate to rotate, so that the sample rotates and is heated evenly in the oven. The bidirectional cylinder drives the top plate to clamp and fix the sample. The abutment block and the contact ring cooperate to position the rotation angle, which solves the problems of uneven heating and poor adaptability, and achieves the beneficial effects of uniform sample rotation heating, stable and reliable clamping, accurate angle positioning, and improved heat treatment effect.

[0026] 2. In this invention, by setting up an auxiliary mechanism, in the process of atmosphere control in a high-vacuum non-oxidizing oven, the traditional manual gas supply has the problems of not being able to actively control the type and content of gas and having low control accuracy. The auxiliary mechanism can actively send specific gas from the gas tank into the oven through a gas pump. The gas tank can be replaced with different types of gas. The composition of the gas in the oven and the amount of gas filling can be actively determined according to the process requirements. The sliding installation of the gas tank enables quick replacement, which solves the problems of low atmosphere control accuracy and poor adaptability. It achieves the beneficial effects of actively selecting the type of gas to be blown in, accurately controlling the gas content, adjusting the atmosphere environment as needed, and meeting the process requirements of different samples. Attached Figure Description

[0027] Figure 1 This is a three-dimensional structural schematic diagram of a uniform heating and atmosphere control method for a high-vacuum non-oxidizing oven proposed in this invention; Figure 2 This is a partial structural schematic diagram of a method for uniform heating and atmosphere control in a high-vacuum non-oxidizing oven proposed in this invention. Figure 3 This is a schematic diagram of the adjustment mechanism for a uniform heating and atmosphere control method in a high-vacuum non-oxidizing oven proposed in this invention. Figure 4 This invention presents an enlarged schematic diagram of the regulating mechanism for a method of uniform heating and atmosphere control in a high-vacuum non-oxidizing oven. Figure 5 This is a partially disassembled structural diagram of the regulating mechanism for a uniform heating and atmosphere control method in a high-vacuum non-oxidizing oven proposed in this invention. Figure 6 for Figure 5 Enlarged view of point A; Figure 7 This is a partial structural diagram of the regulating mechanism for a uniform heating and atmosphere control method for a high-vacuum non-oxidizing oven proposed in this invention. Figure 8 for Figure 7 Enlarged view of point B; Figure 9 This is a schematic diagram of the auxiliary mechanism for a uniform heating and atmosphere control method for a high-vacuum non-oxidizing oven proposed in this invention. Figure 10 This is an enlarged schematic diagram of the auxiliary mechanism for a uniform heating and atmosphere control method in a high-vacuum non-oxidizing oven proposed in this invention.

[0028] Legend: 1. Oven body; 2. Adjustment mechanism; 201. Vacuum motor; 202. Gear; 203. Adjustment ring; 204. Support rod; 205. Limiting frame; 206. Connecting ring; 207. Limiting groove; 208. Slider; 209. Connecting rod; 210. Two-way cylinder; 211. Top plate; 212. Placement plate; 213. Adjustment groove; 214. Limiting plate; 215. Contact piece; 216. Contact pad; 217. Abutment block; 218. Contact ring; 3. Auxiliary mechanism; 301. Connecting pipe; 302. Support plate; 303. Air pump; 304. Connecting pipe; 305. Air tank; 306. Connecting groove; 307. Guide groove; 308. Adjustment rod; 309. Connecting plate; 310. Positioning rod; 311. Rotating block; 4. Control panel; 5. Oven door. Detailed Implementation

[0029] To better understand the above-mentioned objectives, features, and advantages of the present invention, the present invention will be further described below in conjunction with the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0030] Numerous specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways than those described herein, and therefore the invention is not limited to the specific embodiments disclosed in the following specification.

[0031] Example 1, such as Figure 1-10 As shown, the present invention provides a method for uniform heating and atmosphere control of a high vacuum non-oxidizing oven, including an oven body 1 and an adjustment mechanism 2. A door 5 is installed on one side of the oven body 1, a control panel 4 is installed on the side of the oven body 1 near the door 5, the adjustment mechanism 2 is provided on the bottom wall of the oven body 1, and an auxiliary mechanism 3 is provided on one side of the oven body 1.

[0032] The specific settings and functions of its adjustment mechanism 2 and auxiliary mechanism 3 will be explained below.

[0033] like Figure 3 - Figure 8As shown, the adjustment mechanism 2 includes a vacuum motor 201, which is fixedly connected to the bottom wall of the oven body 1. A gear 202 is fixedly connected to the output end of the vacuum motor 201. An adjustment ring 203 is provided on the arc surface of the gear 202, and the gear 202 meshes with the side wall of the adjustment ring 203. A limiting frame 205 is provided on the arc surface of the adjustment ring 203, and the side wall of the limiting frame 205 is slidably connected to the arc surface of the adjustment ring 203. Three support rods 204 are fixedly connected to the side of the limiting frame 205 near the bottom wall of the oven body 1, and one end of the arc surface of the support rods 204 is fixedly connected to the bottom wall of the oven body 1. The high vacuum non-oxidizing oven is a device used for heat treatment of precision samples such as electronic components and semiconductor materials in a high temperature, high vacuum, and oxygen-free environment. The equipment typically consists of an oven body 1, an oven door 5 installed on one side, and a control panel 4 installed on the side of the oven door 5. The oven is evacuated to a high vacuum and then filled with protective gas to create an oxidation-free heating environment. In actual use, when a sample is placed in a fixed position inside the oven for heating, the temperature is higher on the side closer to the heat source and lower on the side farther from the heat source, resulting in uneven temperature distribution. This leads to uneven heating of the sample, affecting the heat treatment effect and product quality. This problem can be solved by an adjustment mechanism 2. The adjustment mechanism 2 is equipped with a vacuum motor 201 driving a gear 202 to rotate an adjustment ring 203 and a placement plate 212. A two-way cylinder 210 drives a top plate 211 to clamp the sample, while a contact block 217 and a contact ring 218 cooperate to adjust the rotation angle. Positioning is achieved, enabling uniform rotational heating and stable clamping of the sample. A placement plate 212 is fixedly connected to the side of the adjusting ring 203 away from the gear 202. An adjusting groove 213 is formed on the side of the placement plate 212, and a top plate 211 is slidably connected to the inner wall of the adjusting groove 213. Limiting plates 214 are fixedly connected to both ends of the side of the placement plate 212 away from the oven body 1. The limiting plates 214 have an "L"-shaped cross-section. A connecting ring 206 is fixedly connected to the side of the adjusting ring 203 near the bottom wall of the oven body 1. A limiting groove 207 is formed on the side wall of the connecting ring 206, and a slider 208 is slidably connected to the inner wall of the limiting groove 207. A connecting rod 209 is fixedly connected to one end of the arc surface of the slider 208, and the end of the connecting rod 209 away from the arc surface of the slider 208 is fixed... A bidirectional cylinder 210 is connected, with one output end of the cylinder fixedly connected to the top plate 211. The cylinder 210 drives the top plate 211 to slide along the adjustment groove 213, clamping and fixing the sample. The other output end of the cylinder 210 limits the angle of the adjustment ring 203. A stop block 217 is fixedly connected to the other output end of the cylinder 210. A contact ring 218 is fixedly connected to the bottom wall of the oven body 1. The stop block 217 abuts against the contact ring 218 under the action of the cylinder 210, positioning the adjusted angle of the adjustment ring 203 and improving the stability of the placement plate 212 during use. A contact piece 215, which is an elastic piece, is fixedly connected to the side of the limiting plate 214 near the top plate 211.The elastic contact piece 215 acts as a buffer when the top plate 211 clamps the workpiece, preventing damage to the workpiece surface from rigid clamping, and also provides auxiliary clamping force. A contact pad 216 is fixedly connected to the side of the contact piece 215 closest to the top plate 211. The side of the contact pad 216 away from the contact piece 215 has anti-slip textures. These textures increase friction with the workpiece surface, preventing the workpiece from sliding or shifting during rotation.

[0034] like Figure 9 and Figure 10As shown, the auxiliary mechanism 3 includes a support plate 302, which is fixedly connected to one side of the oven body 1. An air pump 303 is fixedly connected to one side of the support plate 302. A connecting pipe 301 is installed at the outlet of the air pump 303, and the connecting pipe 301 is sealed and connected to the side wall of the oven body 1. The air inlet of the air pump 303 is fixedly connected to a connecting pipe 304 via a flange. One end of the arc surface of the connecting pipe 304 is fixedly connected to a gas tank 305, which is slidably connected to one side of the support plate 302. During the heating process, the high-vacuum non-oxidizing oven requires precise control of the internal atmosphere composition to create an oxygen-free or specific gas environment, preventing the sample from oxidizing or deteriorating at high temperatures. To prevent adverse reactions, the traditional method involves manually connecting gas cylinder valves to fill the oven with protective gas. Operators cannot precisely control the type and content of the gas inside the oven, relying only on experience to roughly estimate the filling volume. Furthermore, it's impossible to actively select which specific gas to "blow" into the oven. When different process gases are needed, the gas cylinder must be replaced and the tubing 301 reconnected, resulting in cumbersome operation, low control precision, and difficulty in meeting the diverse atmospheric requirements of different samples. The auxiliary mechanism 3 solves this problem. It can actively determine the type and content of the gas inside the oven and can blow specific gases into the oven as needed, thus addressing the issues of low atmosphere control precision and poor adaptability. Auxiliary mechanism 3 enables active and precise control of the type and content of gases inside the oven. A connecting groove 306 is provided on the support plate 302 corresponding to the gas tank 305. The connecting groove 306 improves the stability of the contact between the bottom of the gas tank 305 and the side of the support plate 302. The connecting groove 306 guides the bottom of the gas tank 305, improving the convenience and stability of its installation. An adjusting rod 308 is fixedly connected to the arc surface of the gas tank 305. Guide grooves 307 are fixedly connected to the side wall of the connecting groove 306 at positions corresponding to the two adjusting rods 308. The two adjusting rods 308 are slidably connected to the inner walls of the two guide grooves 307 respectively. The groove 307 slides within the space, providing guidance for the installation and removal of the gas cylinder 305, facilitating quick replacement of the gas cylinder 305. A connecting plate 309 is fixedly connected to the side of the support plate 302 away from the gas cylinder 305. A positioning rod 310 is threaded through the inner wall of the connecting plate 309. One end of the arc surface of the positioning rod 310 slides through the bottom wall of the connecting groove 306, and the other end of the arc surface of the positioning rod 310 is fixedly connected to a rotating block 311. Rotating the rotating block 311 can drive the positioning rod 310 to move, causing the end of the positioning rod 310 to abut against the gas cylinder 305, thereby locking the gas cylinder 305 within the connecting groove 306 and preventing the gas cylinder 305 from loosening during use.

[0035] The overall working principle is as follows: First, a uniform heating program is started. The operator places the sample on the placement plate 212. The bidirectional cylinder 210 is started and drives the top plate 211 to move along the adjustment groove 213 towards the limiting plate 214. The elastic contact piece 215 and contact pad 216 on the top plate 211 and the limiting plate 214 cooperate to clamp and fix the sample. Then, the vacuum motor 201 is started and drives the gear 202 to rotate. The gear 202 drives the adjusting ring 203, which meshes with it, to rotate within the limiting frame 205. The adjusting ring 203 drives the connecting ring 206 and the slider 208 to rotate synchronously. The slider 208 drives the connecting rod. 209 and the bidirectional cylinder 210 rotate around the axis of the adjusting ring 203. The slider 208 at the end of the connecting rod 209 slides along the limiting groove 207 for guidance. The adjusting ring 203 can simultaneously drive the placement plate 212 and the top plate 211 to rotate. The placement plate 212 drives the clamped sample to rotate at a constant speed in the oven body 1, so that each surface of the sample receives heat evenly. When the adjusting ring 203 rotates to the position, the other output end of the bidirectional cylinder 210 drives the abutment block 217 to move towards the contact ring 218, so that the abutment block 217 abuts against the contact ring 218 to limit the adjusting ring 203, thereby completing the uniform heating of the sample.

[0036] First, the operator selects a gas cylinder 305 containing a specific gas according to process requirements, pushes the gas cylinder 305 into the connecting groove 306, and guides the adjusting rod 308 along the guide groove 307. The bottom of the gas cylinder 305 is positioned against the bottom wall of the connecting groove 306. The positioning rod 310 is tightened to lock the gas cylinder 305. Then, the required gas flow rate and filling time are set through the control panel 4. The air pump 303 starts and draws the specific gas in the gas cylinder 305 into the connecting pipe 304 according to the set parameters. After pressurization, the gas is actively sent into the oven body 1 through the connecting pipe 301. The operator can actively decide the type and content of gas blown into the oven as needed to precisely control the atmosphere in the oven and replace the oxygen in the oven. When it is necessary to change to a different gas, the positioning rod 310 is loosened to remove the current gas cylinder 305. After replacing it with a gas cylinder 305 containing a different gas, the above steps are repeated.

[0037] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the protection scope of the present invention.

Claims

1. A method for uniform heating and atmosphere control in a high-vacuum non-oxidizing oven, comprising an oven body (1) and an adjustment mechanism (2), characterized in that: A door (5) is installed on one side of the oven body (1), and a control panel (4) is installed on the side of the oven body (1) near the door (5). An adjustment mechanism (2) is provided on the bottom wall of the oven body (1). The adjustment mechanism (2) includes a vacuum motor (201). The vacuum motor (201) is fixedly connected to the bottom wall of the oven body (1). A gear (202) is fixedly connected to the output end of the vacuum motor (201). The arc surface of the gear (202) is provided with... There is an adjusting ring (203), the gear (202) meshes with the side wall of the adjusting ring (203), the arc surface of the adjusting ring (203) is provided with a limiting frame (205), the side wall of the limiting frame (205) is slidably connected to the arc surface of the adjusting ring (203), and three support rods (204) are fixedly connected to the side of the limiting frame (205) near the bottom wall of the oven body (1), and one end of the arc surface of the support rod (204) is fixedly connected to the bottom wall of the oven body (1).

2. The method for uniform heating and atmosphere control in a high-vacuum non-oxidizing oven according to claim 1, characterized in that: The adjusting ring (203) is fixedly connected to a placement plate (212) on the side away from the gear (202). An adjusting groove (213) is provided on the side of the placement plate (212). A top plate (211) is slidably connected to the inner wall of the adjusting groove (213). Limiting plates (214) are fixedly connected to both ends of the side of the placement plate (212) away from the oven body (1). The limiting plates (214) have an "L"-shaped cross-section. The adjusting ring (203) is located near the bottom wall of the oven body (1). A connecting ring (206) is fixedly connected to one side. A limiting groove (207) is provided on the side wall of the connecting ring (206). A slider (208) is slidably connected to the inner wall of the limiting groove (207). A connecting rod (209) is fixedly connected to one end of the arc surface of the slider (208). A two-way cylinder (210) is fixedly connected to one end of the arc surface of the connecting rod (209) away from the slider (208). One output end of the two-way cylinder (210) is fixedly connected to the top plate (211).

3. The method for uniform heating and atmosphere control in a high-vacuum non-oxidizing oven according to claim 2, characterized in that: The other output end of the bidirectional cylinder (210) is fixedly connected to an abutment block (217), and the bottom wall of the oven body (1) is fixedly connected to a contact ring (218).

4. The method for uniform heating and atmosphere control in a high-vacuum non-oxidizing oven according to claim 2, characterized in that: The limiting plate (214) is fixedly connected to a contact piece (215) on the side near the top plate (211), and the contact piece (215) is an elastic piece.

5. The method for uniform heating and atmosphere control in a high-vacuum non-oxidizing oven according to claim 4, characterized in that: The contact piece (215) is fixedly connected to a contact pad (216) on the side near the top plate (211), and the contact pad (216) has anti-slip texture on the side away from the contact piece (215).

6. The method for uniform heating and atmosphere control in a high-vacuum non-oxidizing oven according to claim 1, characterized in that: An auxiliary mechanism (3) is provided on one side of the oven body (1). The auxiliary mechanism (3) includes a support plate (302). The support plate (302) is fixedly connected to one side of the oven body (1). An air pump (303) is fixedly connected to one side of the support plate (302). A connecting pipe (301) is installed at the air outlet of the air pump (303). The connecting pipe (301) is sealed and connected to the side wall of the oven body (1). The air inlet of the air pump (303) is fixedly connected to a connecting pipe (304) by means of a flange. One end of the arc surface of the connecting pipe (304) is fixedly connected to a gas tank (305). The gas tank (305) is slidably connected to one side of the support plate (302).

7. The method for uniform heating and atmosphere control in a high-vacuum non-oxidizing oven according to claim 6, characterized in that: The support plate (302) has a connecting groove (306) at the position corresponding to the gas tank (305). The connecting groove (306) is used to improve the stability of the contact between the bottom of the gas tank (305) and the side of the support plate (302).

8. The method for uniform heating and atmosphere control in a high-vacuum non-oxidizing oven according to claim 6, characterized in that: An adjusting rod (308) is fixedly connected to the arc surface of the gas tank (305). A guide groove (307) is fixedly connected to the side wall of the connecting groove (306) at the position corresponding to the two adjusting rods (308). The two adjusting rods (308) are slidably connected to the inner walls of the two guide grooves (307) respectively.

9. The method for uniform heating and atmosphere control in a high-vacuum non-oxidizing oven according to claim 6, characterized in that: A connecting plate (309) is fixedly connected to the side of the support plate (302) away from the gas tank (305). A positioning rod (310) is threaded through the inner wall of the connecting plate (309). One end of the arc surface of the positioning rod (310) slides through the bottom wall of the connecting groove (306). A rotating block (311) is fixedly connected to the other end of the arc surface of the positioning rod (310).

10. A method for uniform heating and atmosphere control in a high-vacuum non-oxidizing oven according to any one of claims 1-9, comprising the steps of: S1. The adjustment mechanism (2) drives the placement plate (212) to rotate at a constant speed through the vacuum motor (201), so that the sample is heated evenly in the oven. The two-way cylinder (210) drives the top plate (211) to automatically clamp samples of different sizes. The abutment block (217) and the contact ring (218) cooperate to accurately position the rotation angle, eliminate the problem of uneven temperature distribution, and ensure that the surfaces of the sample are heated evenly. S2. Auxiliary mechanism (3) actively sends the protective gas in the gas tank (305) into the oven through the gas pump (303). The operator can select the type and content of gas according to the process requirements. The gas tank (305) can be quickly replaced to achieve precise control of the atmosphere in the oven and prevent the sample from oxidizing at high temperature. During the operation of the S3 oven, the control panel (4) displays various parameters in real time. After completion, it will automatically stop and prompt. The operator takes out the sample and performs cleaning and maintenance, checks the gas tank (305) for remaining amount and replaces it in time. The monitoring data is automatically recorded and saved for process traceability.

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