A method for improving flatness of a metal layer of a ceramic metal co-fired body

Abstract

The application discloses a method for improving flatness of a metal layer of a ceramic metal co-fired body, and aims to provide a method for improving flatness of a metal layer of a ceramic metal co-fired body, which can effectively improve the flatness of the metal layer of the ceramic metal co-fired body, thereby improving the quality of the ceramic metal co-fired body. The method comprises the following steps: first, processing two end faces of the co-fired body to be flat; second, measuring thickness t1 between the first end face of the co-fired body and each part of the metal layer by using an instrument, determining a region with the thickness t1 less than a set value and marking the region; third, placing the co-fired body with the first end face downward, supporting the region with the thickness t1 less than the set value by using a support, and suspending the remaining part of the first end face of the co-fired body; fourth, performing heat treatment on the co-fired body, and then cooling the co-fired body; fifth, processing the two end faces of the co-fired body to be flat; and sixth, returning to the first step until the thickness t1 between the first end face of the co-fired body and each part of the metal layer is greater than or equal to the set value.

Description

Technical Field

[0001] This invention relates to the field of ceramic-metal co-fired body technology, and more specifically to a method for improving the flatness of the metal layer in ceramic-metal co-fired bodies. Background Technology

[0002] The production process of ceramic-metal co-fired bodies generally involves high-temperature co-firing of ceramics and metal (metal mesh or metal sheet). Due to limitations in the forming process of ceramic-metal co-fired bodies or deformation of the ceramic-metal co-fired body or metal layer (metal layer refers to metal mesh or metal sheet) during sintering, the metal layer becomes uneven, affecting the quality of the ceramic-metal co-fired body.

[0003] For example, aluminum nitride heaters for semiconductors are components made by embedding a conductor heating element within aluminum nitride ceramic and a metal layer. The manufacturing process typically involves high-temperature co-firing of the ceramic and metal (metal mesh or sheet). For instance, Chinese Patent Publication No. CN120192168A describes an invention entitled "An Aluminum Nitride Ceramic Heater Disc and Its Preparation Method." As a core component in film-forming equipment, the aluminum nitride heater plays a role in electrostatically adsorbing wafers or feeding radio frequency energy into the cavity during the process. The main component affecting electrostatic adsorption and radio frequency in the aluminum nitride heater is the metal layer, typically made of tungsten or molybdenum. During the fabrication of the aluminum nitride heater, limitations in the forming process or deformation of the disc or metal layer during sintering can lead to unevenness in the metal layer, resulting in uneven distribution of radio frequency energy or uneven adsorption forces during the process, ultimately leading to uneven film thickness. Summary of the Invention

[0004] The purpose of this invention is to provide a method for improving the flatness of the metal layer in ceramic-metal co-fired bodies, thereby improving the quality of the ceramic-metal co-fired bodies.

[0005] The technical solution of this invention is: A method for improving the flatness of the metal layer in a ceramic-metal co-fired body includes the following steps: First, the two ends of the co-fired body are machined to be flat, and the metal layer of the co-fired body is parallel to its end faces; Second, the thickness t1 between the first end face of the co-fired body and various parts of the metal layer is measured using an instrument, and the areas where the thickness t1 is less than the set value are identified and marked; the areas where the thickness t1 is less than the set value are the "areas on the metal layer that protrude towards the first end face". Third, place the first end face of the co-fired body downwards, and support the area where the thickness t1 is less than the set value with a support member, while the rest of the first end face of the co-fired body is suspended in the air. Fourth, the co-fired body is heat-treated and then cooled; next, the two ends of the co-fired body are machined flat. Fifth, return to the first step until the thickness t1 between the first end face of the co-fired body and each part of the metal layer is greater than or equal to the set value. This solution provides a method for improving the flatness of the metal layer in a ceramic-metal co-fired body. It uses a support to support areas where the thickness t1 is less than the set value, then uses heat treatment to control the creep of the co-fired body, eliminating or reducing areas protruding towards the first end face on the metal layer. Next, it gradually corrects the shape of the metal layer through multiple heat treatments and end-face machining, thereby effectively improving the flatness of the metal layer in the ceramic-metal co-fired body, and ultimately improving the quality of the ceramic-metal co-fired body.

[0006] Preferably, the fifth step also includes: Sixth, use an instrument to measure the thickness t2 between the second end face of the co-fired body and various parts of the metal layer, determine the areas where the thickness t2 is less than the set value and mark them; among them, the areas where the thickness t2 is less than the set value are "the areas on the metal layer that protrude towards the second end face"; Seventh, place the co-fired body with the second end face facing down, and support the area where the thickness t2 is less than the set value with a support member, while the rest of the second end face of the co-fired body is suspended in the air; Eighth, the co-fired body is heat-treated at a temperature of T for a time of t; then the co-fired body is cooled. Ninth, smooth both ends of the co-fired body; Tenth, return to step six until the thickness t2 between the second end face of the co-fired body and each part of the metal layer is greater than or equal to the set value. This solution provides a method for improving the flatness of the metal layer in a ceramic-metal co-fired body. It uses a support to support areas where the thickness t2 is less than the set value, then uses heat treatment to control the creep of the co-fired body, eliminating or reducing areas protruding towards the second end face on the metal layer. Next, through multiple heat treatments and end-face machining, the shape of the metal layer is gradually corrected, thereby effectively improving the flatness of the metal layer in the ceramic-metal co-fired body, and thus improving the quality of the ceramic-metal co-fired body.

[0007] Preferably, in the fourth step, the heat treatment temperature is T, where T is 1400-1800℃, and the heat treatment time is t, where t is 10-120min.

[0008] Preferably, the instrument is an eddy current thickness gauge, an ultrasonic thickness gauge, or a CT scanner.

[0009] A method for improving the flatness of the metal layer in a ceramic-metal co-fired body includes the following steps: First, the two ends of the co-fired body are machined to be flat, and the metal layer of the co-fired body is parallel to its end faces; Second, the thickness t1 between the first end face of the co-fired body and various parts of the metal layer is measured using an instrument, and the areas where the thickness t1 is less than the set value are identified and marked. Third, place the first end face of the co-fired body downwards, support the marked area with a support, and suspend the rest of the first end face of the co-fired body in the air; then lay a uniform counterweight on the second end face of the co-fired body outside the marked area. Fourth, the co-fired body is heat-treated and then cooled; next, the two ends of the co-fired body are machined flat. Fifth, return to the first step until the thickness t1 between the first end face of the co-fired body and each part of the metal layer is greater than or equal to the set value. This solution provides a method for improving the flatness of the metal layer in a ceramic-metal co-fired body. It uses supports to support areas where the thickness t1 is less than the set value, and simultaneously lays uniform counterweights outside the marked area to ensure sufficient pressure on the co-fired body outside the marked area during heat treatment. Then, heat treatment controls the creep of the co-fired body, eliminating or reducing areas protruding towards the first end face on the metal layer. Next, multiple heat treatments and end-face machining are used to gradually correct the shape of the metal layer, thereby effectively improving the flatness of the metal layer in the ceramic-metal co-fired body and ultimately improving the quality of the ceramic-metal co-fired body.

[0010] As a preferred embodiment, in the third step, the specific method for uniformly laying counterweights on the second end face of the co-fired body outside the marked area is as follows: A counterweight plate is placed on the second end face of the co-fired body, covering the edge of the second end face. The lower surface of the counterweight plate has clearance grooves, and the clearance grooves correspond one-to-one with the marked areas. In this way, it can be ensured that the counterweight is evenly distributed in the area outside the marked area, which is helpful to control the creep of the co-fired body through subsequent heat treatment and eliminate or reduce the area protruding from the metal layer towards the first end face.

[0011] Preferably, the fifth step also includes: Sixth, use an instrument to measure the thickness t2 between the second end face of the co-fired body and various parts of the metal layer, determine the areas where the thickness t2 is less than the set value, and mark them; Seventh, place the co-fired body with the second end face facing down, support the area where the thickness t2 is less than the set value with a support, and suspend the rest of the second end face of the co-fired body in the air; then lay a uniform counterweight on the part of the first end face of the co-fired body outside the marked area; Eighth, the co-fired body is heat-treated at a temperature of T for a time of t; then the co-fired body is cooled. Ninth, smooth both ends of the co-fired body; Tenth, return to step six until the thickness t2 between the second end face of the co-fired body and each part of the metal layer is greater than or equal to the set value. This solution provides a method for improving the flatness of the metal layer in a ceramic-metal co-fired body. It uses supports to support areas where the thickness t2 is less than the set value, and simultaneously lays uniform counterweights outside the marked areas to ensure sufficient pressure on the areas outside the marked areas during heat treatment. Then, heat treatment controls the creep of the co-fired body, eliminating or reducing areas protruding towards the second end face on the metal layer. Next, multiple heat treatments and end-face machining are used to gradually correct the shape of the metal layer, thereby effectively improving the flatness of the metal layer in the ceramic-metal co-fired body and ultimately improving the quality of the ceramic-metal co-fired body.

[0012] As a preferred embodiment, in step seven, the specific method for uniformly applying counterweights on the portion of the first end face of the co-fired body outside the marked area is as follows: A counterweight plate is placed on the first end face of the co-fired body, covering the edge of the first end face. The lower surface of the counterweight plate has clearance grooves, and the clearance grooves correspond one-to-one with the marked areas. In this way, it can be ensured that the counterweight is evenly distributed in the area outside the marked area, which is helpful to control the creep of the co-fired body through subsequent heat treatment and eliminate or reduce the area protruding from the metal layer towards the first end face.

[0013] Preferably, in the fourth step, the heat treatment temperature is T, where T is 1400-1800℃, and the heat treatment time is t, where t is 10-120min.

[0014] Preferably, the instrument is an eddy current thickness gauge, an ultrasonic thickness gauge, or a CT scanner.

[0015] The beneficial effects of this invention are: supporting the area with a thickness t1 less than a set value by using a support member, and laying a uniform counterweight in the area outside the marked area; then controlling the creep of the co-fired body by heat treatment, eliminating or reducing the area protruding towards the first end face or the second end face on the metal layer; and then gradually correcting the shape of the metal layer by multiple heat treatments and end face processing, thereby effectively improving the flatness of the metal layer of the ceramic-metal co-fired body, and thus improving the quality of the ceramic-metal co-fired body. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the third step in a method for improving the flatness of the metal layer in a ceramic-metal co-fired body, as described in specific embodiments one and two of the present invention.

[0017] Figure 2 This is a schematic diagram of a structure in the third step of a method for improving the flatness of the metal layer in a ceramic-metal co-fired body, as described in specific embodiments three and four of the present invention.

[0018] Figure 3 This is a schematic diagram of the structure of the co-fired body of the present invention before it is ground smooth after heat treatment.

[0019] In the picture: Co-fired body 1, metal layer 1.1, first end face 1.2, second end face 1.3; Support component 2; Platform 3; Counterweight 4, clearance groove 4.1. Detailed Implementation

[0020] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments: Specific embodiment one: A method for improving the flatness of the metal layer in a ceramic-metal co-fired body, comprising the following steps. First, the two end faces of the co-fired body 1 are machined to be flat; specifically, the two end faces of the co-fired body 1 are ground flat. The metal layer 1.1 of the co-fired body 1 is parallel to its end face, and the two end faces of the co-fired body 1 are parallel. In this embodiment, the co-fired body 1 refers to a ceramic-metal co-fired body, which may be an aluminum nitride ceramic-metal co-fired body, an alumina ceramic-metal co-fired body, or a boron nitride ceramic-metal co-fired body, etc. The metal layer 1.1 is a metal mesh or a metal sheet, and the metal layer 1.1 is tungsten or molybdenum. The co-fired body 1 is flat, for example, in the shape of a disc or a rectangular plate. For ease of description, one end face of the two end faces of the co-fired body 1 is defined as the first end face 1.2, and the other end face is defined as the second end face 1.3.

[0021] Second, the thickness t1 between the first end face 1.2 of the co-fired body 1 and various parts of the metal layer 1.1 is measured using an instrument. Areas where the thickness t1 is less than a set value are identified and marked. These areas are defined as "regions on the metal layer 1.1 that protrude towards the first end face 1.2". In this embodiment, areas where the thickness t1 is less than the set value are marked on the first end face 1.2. In this embodiment, the instrument used is an eddy current thickness gauge, an ultrasonic thickness gauge, or a CT scanner.

[0022] Third, such as Figure 1 As shown, the first end face 1.2 of the co-fired body 1 is placed downwards, and the area with a thickness t1 less than the set value is supported by the support member 2, while the rest of the first end face 1.2 of the co-fired body 1 is suspended in the air.

[0023] Fourth, the co-fired body 1 is subjected to heat treatment at a temperature of T, which is between 1400 and 1800°C, for example, T can be 1400°C, 1500°C, 1600°C, or 1800°C. The heat treatment time is t, which is between 10 and 120 minutes, for example, t can be 30 minutes, 45 minutes, or 60 minutes. In this embodiment, the heat treatment of the co-fired body 1 is carried out in a heat treatment furnace.

[0024] Next, the co-fired body 1 was allowed to cool naturally to room temperature.

[0025] Next, the two ends of the co-fired body 1 are machined to be flat; specifically, the two ends of the co-fired body 1 are ground flat.

[0026] Fifth, return to the first step until the thickness t1 between the first end face 1.2 of the co-fired body 1 and each part of the metal layer 1.1 is greater than or equal to the set value. For example... Figure 1 , Figure 3 As shown in the figure, this embodiment of a method for improving the flatness of the metal layer of a ceramic-metal co-fired body involves using a support member 2 to support areas where the thickness t1 is less than a set value, then controlling the creep of the co-fired body 1 through heat treatment to eliminate or reduce the area protruding from the metal layer 1.1 toward the first end face 1.2; then, gradually correcting the shape of the metal layer 1.1 through multiple heat treatments and end face processing, thereby effectively improving the flatness of the metal layer of the ceramic-metal co-fired body, and thus improving the quality of the ceramic-metal co-fired body.

[0027] In this embodiment, as Figure 1 As shown, the specific implementation of the third step is as follows: the first end face 1.2 of the co-fired body 1 is placed downwards on the platform 3 inside the heat treatment furnace, and the area with a thickness t1 less than a set value is supported by a support member 2, which is positioned between the marked area and the platform 3. In this implementation, the marked area refers to the area with a thickness t1 less than the set value.

[0028] like Figure 1 As shown, when the support member 2 cannot stably support the co-fired body 1, the co-fired body 1 is supported by the support member 2 at a certain point on the edge of the first end face 1.2; for example, if the marked area is only one or two points, the co-fired body 1 is supported on the platform 3 by the support member 2 at a certain point on the edge of the first end face 1.2.

[0029] When there are three or more marked areas, and each support member 2 can stably support the co-fired body 1, the co-fired body 1 is supported on the platform 3 by the support members 2.

[0030] Specific embodiment two: A method for improving the flatness of the metal layer in a ceramic-metal co-fired body, comprising the following steps. First, the two end faces of the co-fired body 1 are machined to be flat; specifically, the two end faces of the co-fired body 1 are ground flat. The metal layer 1.1 of the co-fired body 1 is parallel to its end face, and the two end faces of the co-fired body 1 are parallel. In this embodiment, the co-fired body 1 refers to a ceramic-metal co-fired body, which may be an aluminum nitride ceramic-metal co-fired body, an alumina ceramic-metal co-fired body, or a boron nitride ceramic-metal co-fired body, etc. The metal layer 1.1 is a metal mesh or a metal sheet, and the metal layer 1.1 is tungsten or molybdenum. The co-fired body 1 is flat, for example, in the shape of a disc or a rectangular plate. For ease of description, one end face of the two end faces of the co-fired body 1 is defined as the first end face 1.2, and the other end face is defined as the second end face 1.3.

[0031] Second, the thickness t1 between the first end face 1.2 of the co-fired body 1 and various parts of the metal layer 1.1 is measured using an instrument. Areas where the thickness t1 is less than a set value are identified and marked. These areas are defined as "regions on the metal layer 1.1 that protrude towards the first end face 1.2". In this embodiment, areas where the thickness t1 is less than the set value are marked on the first end face 1.2. In this embodiment, the instrument used is an eddy current thickness gauge, an ultrasonic thickness gauge, or a CT scanner.

[0032] Third, such as Figure 1 As shown, the first end face 1.2 of the co-fired body 1 is placed downwards, and the area with a thickness t1 less than the set value is supported by the support member 2, while the rest of the first end face 1.2 of the co-fired body 1 is suspended in the air.

[0033] Fourth, the co-fired body 1 is subjected to heat treatment at a temperature of T, which is between 1400 and 1800°C, for example, T can be 1400°C, 1500°C, 1600°C, or 1800°C. The heat treatment time is t, which is between 10 and 120 minutes, for example, t can be 30 minutes, 45 minutes, or 60 minutes. In this embodiment, the heat treatment of the co-fired body 1 is carried out in a heat treatment furnace.

[0034] Next, the co-fired body 1 was allowed to cool naturally to room temperature.

[0035] Next, the two ends of the co-fired body 1 are machined to be flat; specifically, the two ends of the co-fired body 1 are ground flat.

[0036] Fifth, return to the first step until the thickness t1 between the first end face 1.2 of the co-fired body 1 and each part of the metal layer 1.1 is greater than or equal to the set value.

[0037] Sixth, the thickness t2 between the second end face 1.3 and various parts of the metal layer 1.1 of the co-fired body 1 is measured using an instrument. Areas where the thickness t2 is less than a set value are identified and marked. These areas are defined as "regions on the metal layer 1.1 that protrude towards the second end face 1.3". In this embodiment, areas where the thickness t2 is less than the set value are marked on the second end face 1.3. In this embodiment, the instrument used is an eddy current thickness gauge, an ultrasonic thickness gauge, or a CT scanner.

[0038] Seventh, place the second end face 1.3 of the co-fired body 1 downwards, and support the area where the thickness t2 is less than the set value with the support member 2, while the rest of the second end face 1.3 of the co-fired body 1 is suspended in the air.

[0039] Eighth, the co-fired body 1 is heat-treated at a temperature of T, which is between 1400 and 1800°C, for example, T can be 1400°C, 1500°C, 1600°C, or 1800°C. The heat treatment time is t, which is between 10 and 120 minutes, for example, t can be 30 minutes, 45 minutes, or 60 minutes. Then, the co-fired body 1 is allowed to cool naturally to room temperature. In this embodiment, the heat treatment of the co-fired body 1 is carried out in a heat treatment furnace.

[0040] Ninth, the two ends of the co-fired body 1 are machined to be flat. Specifically, the two ends of the co-fired body 1 are ground flat.

[0041] Tenth, return to step six until the thickness t2 between the second end face 1.3 of the co-fired body 1 and each part of the metal layer 1.1 is greater than or equal to the set value.

[0042] like Figure 1 , Figure 3 As shown in this embodiment, a method for improving the flatness of the metal layer in a ceramic-metal co-fired body involves using a support member 2 to support areas where the thickness t1 is less than a set value, controlling the creep of the co-fired body 1 through heat treatment to eliminate or reduce the area protruding towards the first end face 1.2 on the metal layer 1.1, and then gradually correcting the shape of the metal layer 1.1 through multiple heat treatments and end face processing, thereby effectively improving the flatness of the metal layer in the ceramic-metal co-fired body. Next, the support member 2 supports areas where the thickness t2 is less than a set value, controlling the creep of the co-fired body 1 through heat treatment to eliminate or reduce the area protruding towards the second end face 1.3 on the metal layer 1.1, and then gradually correcting the shape of the metal layer 1.1 through multiple heat treatments and end face processing, thereby effectively improving the flatness of the metal layer in the ceramic-metal co-fired body, and thus improving the quality of the ceramic-metal co-fired body.

[0043] In this embodiment, the specific implementation of the third step is as follows: Figure 1As shown, the co-fired body 1 is placed face down on platform 3 inside the heat treatment furnace, and the area with a thickness t1 less than a set value is supported by support member 2, which is positioned between the marked area and platform 3. In this embodiment, the marked area refers to the area with a thickness t1 less than the set value. When support member 2 cannot stably support the co-fired body 1, the co-fired body 1 is supported by support member 2 at a certain point on the edge of the first end face 1.2; for example, if there are only one or two marked areas, the co-fired body 1 is supported on platform 3 by support member 2 at a certain point on the edge of the first end face 1.2. When there are three or more marked areas, and each support member 2 can stably support the co-fired body 1, the first end face 1.2 of the co-fired body 1 is supported on platform 3 by all support members 2.

[0044] In this embodiment, the specific implementation of the seventh step is as follows: the second end face 1.3 of the co-fired body 1 is placed downwards on the platform 3 inside the heat treatment furnace, and the area with a thickness t2 less than a set value is supported by a support member 2, which is positioned between the marked area and the platform 3. In this embodiment, the marked area refers to the area with a thickness t2 less than the set value. When the support member 2 cannot stably support the co-fired body 1, the co-fired body 1 is supported by the support member 2 at a certain point on the edge of the second end face 1.3; for example, if there are only one or two marked areas, the co-fired body 1 is supported on the platform 3 by the support member 2 at a certain point on the edge of the second end face 1.3. When there are three or more marked areas, and each support member 2 can stably support the co-fired body 1, the second end face 1.3 of the co-fired body 1 is supported on the platform 3 by the support member 2.

[0045] Specific embodiment three: A method for improving the flatness of the metal layer in a ceramic-metal co-fired body, comprising the following steps. First, the two end faces of the co-fired body 1 are machined to be flat; specifically, the two end faces of the co-fired body 1 are ground flat. The metal layer 1.1 of the co-fired body 1 is parallel to its end face, and the two end faces of the co-fired body 1 are parallel. In this embodiment, the co-fired body 1 refers to a ceramic-metal co-fired body, which may be an aluminum nitride ceramic-metal co-fired body, an alumina ceramic-metal co-fired body, or a boron nitride ceramic-metal co-fired body, etc. The metal layer 1.1 is a metal mesh or a metal sheet, and the metal layer 1.1 is tungsten or molybdenum. The co-fired body 1 is flat, for example, in the shape of a disc or a rectangular plate. For ease of description, one end face of the two end faces of the co-fired body 1 is defined as the first end face 1.2, and the other end face is defined as the second end face 1.3.

[0046] Second, the thickness t1 between the first end face 1.2 of the co-fired body 1 and various parts of the metal layer 1.1 is measured using an instrument. Areas where the thickness t1 is less than a set value are identified and marked. These areas are defined as "regions on the metal layer 1.1 that protrude towards the first end face 1.2". In this embodiment, areas where the thickness t1 is less than the set value are marked on the first end face 1.2. In this embodiment, the instrument used is an eddy current thickness gauge, an ultrasonic thickness gauge, or a CT scanner.

[0047] Third, such as Figure 2 As shown, the first end face 1.2 of the co-fired body 1 is placed downwards, and the marked area is supported by the support member 2, while the rest of the first end face 1.2 of the co-fired body 1 is suspended in the air. Specifically, the first end face 1.2 of the co-fired body 1 is placed downwards on the platform 3 inside the heat treatment furnace, and the marked area is supported by the support member 2, which is positioned between the marked area and the platform 3, while the rest of the first end face 1.2 of the co-fired body 1 is suspended in the air. When the support member 2 cannot stably support the co-fired body 1, the co-fired body 1 is supported by the support member 2 at a certain point on the edge of the first end face 1.2; for example, if there are only one or two marked areas, the co-fired body 1 is supported on the platform 3 by the support member 2 at a certain point on the edge of the first end face 1.2. When there are three or more marked areas, and each support member 2 can stably support the co-fired body 1, the first end face 1.2 of the co-fired body 1 is supported on the platform 3 by the support member 2. Next, a uniform counterweight 4 is laid on the second end face 1.3 of the co-fired body 1, outside the marked area. Specifically, a counterweight plate is placed on the second end face 1.3 of the co-fired body 1, covering the edge of the second end face 1.3; the lower surface of the counterweight plate is provided with a relief groove 4.1, and the relief groove 4.1 corresponds one-to-one with the marked area. The groove shape of the relief groove 4.1 matches the marked area. In this way, it can be ensured that the counterweight 4 is evenly distributed outside the marked area, which is beneficial for controlling the creep of the co-fired body 1 through subsequent heat treatment, and eliminating or reducing the area protruding from the metal layer 1.1 towards the first end face 1.2. The marked area in the third step refers to the area where the thickness t1 is less than the set value.

[0048] Fourth, the co-fired body 1 is subjected to heat treatment at a temperature of T, which is between 1400 and 1800°C, for example, T can be 1400°C, 1500°C, 1600°C, or 1800°C. The heat treatment time is t, which is between 10 and 120 minutes, for example, t can be 30 minutes, 45 minutes, or 60 minutes. In this embodiment, the heat treatment of the co-fired body 1 is carried out in a heat treatment furnace.

[0049] Next, the co-fired body 1 was allowed to cool naturally to room temperature.

[0050] Next, the two ends of the co-fired body 1 are machined to be flat; specifically, the two ends of the co-fired body 1 are ground flat.

[0051] Fifth, return to the first step until the thickness t1 between the first end face 1.2 of the co-fired body 1 and each part of the metal layer 1.1 is greater than or equal to the set value.

[0052] like Figure 2 , Figure 3 As shown in this embodiment, a method for improving the flatness of the metal layer in a ceramic-metal co-fired body involves using a support member 2 to support areas where the thickness t1 is less than a set value. Simultaneously, by laying a uniform counterweight 4 outside the marked area, sufficient pressure is applied to the co-fired body 1 outside the marked area during heat treatment. Then, heat treatment is used to control the creep of the co-fired body 1, eliminating or reducing the area protruding towards the first end face 1.2 on the metal layer 1.1. Next, the shape of the metal layer 1.1 is gradually corrected through multiple heat treatments and end face processing, thereby effectively improving the flatness of the metal layer in the ceramic-metal co-fired body and ultimately improving the quality of the ceramic-metal co-fired body.

[0053] In this embodiment, the third step is implemented as follows: the first end face 1.2 of the co-fired body 1 is placed downwards on the platform 3 inside the heat treatment furnace, and the area with a thickness t1 less than a set value is supported by a support member 2, which is positioned between the marked area and the platform 3. In this embodiment, the marked area refers to the area with a thickness t1 less than the set value. When the support member 2 cannot stably support the co-fired body 1, the co-fired body 1 is supported by the support member 2 at a certain point on the edge of the first end face 1.2; for example, if there are only one or two marked areas, the co-fired body 1 is supported on the platform 3 by the support member 2 at a certain point on the edge of the first end face 1.2. When there are three or more marked areas, and each support member 2 can stably support the co-fired body 1, the first end face 1.2 of the co-fired body 1 is supported on the platform 3 by the support member 2.

[0054] Specific embodiment four: A method for improving the flatness of the metal layer in a ceramic-metal co-fired body, comprising the following steps. First, the two end faces of the co-fired body 1 are machined to be flat; specifically, the two end faces of the co-fired body 1 are ground flat. The metal layer 1.1 of the co-fired body 1 is parallel to its end face, and the two end faces of the co-fired body 1 are parallel. In this embodiment, the co-fired body 1 refers to a ceramic-metal co-fired body, which may be an aluminum nitride ceramic-metal co-fired body, an alumina ceramic-metal co-fired body, or a boron nitride ceramic-metal co-fired body, etc. The metal layer 1.1 is a metal mesh or a metal sheet, and the metal layer 1.1 is tungsten or molybdenum. The co-fired body 1 is flat, for example, in the shape of a disc or a rectangular plate. For ease of description, one end face of the two end faces of the co-fired body 1 is defined as the first end face 1.2, and the other end face is defined as the second end face 1.3.

[0055] Second, the thickness t1 between the first end face 1.2 of the co-fired body 1 and various parts of the metal layer 1.1 is measured using an instrument. Areas where the thickness t1 is less than a set value are identified and marked. These areas are defined as "regions on the metal layer 1.1 that protrude towards the first end face 1.2". In this embodiment, areas where the thickness t1 is less than the set value are marked on the first end face 1.2. In this embodiment, the instrument used is an eddy current thickness gauge, an ultrasonic thickness gauge, or a CT scanner.

[0056] Third, such as Figure 2 As shown, the first end face 1.2 of the co-fired body 1 is placed downwards, and the marked area is supported by the support member 2, while the rest of the first end face 1.2 of the co-fired body 1 is suspended in the air. Specifically, the first end face 1.2 of the co-fired body 1 is placed downwards on the platform 3 inside the heat treatment furnace, and the marked area is supported by the support member 2, which is positioned between the marked area and the platform 3, while the rest of the first end face 1.2 of the co-fired body 1 is suspended in the air. When the support member 2 cannot stably support the co-fired body 1, the co-fired body 1 is supported by the support member 2 at a certain point on the edge of the first end face 1.2; for example, if there are only one or two marked areas, the co-fired body 1 is supported on the platform 3 by the support member 2 at a certain point on the edge of the first end face 1.2. When there are three or more marked areas, and each support member 2 can stably support the co-fired body 1, the first end face 1.2 of the co-fired body 1 is supported on the platform 3 by the support member 2. Next, a uniform counterweight 4 is laid on the second end face 1.3 of the co-fired body 1, outside the marked area. Specifically, a counterweight plate is placed on the second end face 1.3 of the co-fired body 1, covering the edge of the second end face 1.3; the lower surface of the counterweight plate is provided with a relief groove 4.1, and the relief groove 4.1 corresponds one-to-one with the marked area. The groove shape of the relief groove 4.1 matches the marked area. In this way, it can be ensured that the counterweight 4 is evenly distributed outside the marked area, which is beneficial for controlling the creep of the co-fired body 1 through subsequent heat treatment, and eliminating or reducing the area protruding from the metal layer 1.1 towards the first end face 1.2. The marked area in the third step refers to the area where the thickness t1 is less than the set value.

[0057] Fourth, the co-fired body 1 is subjected to heat treatment at a temperature of T, which is between 1400 and 1800°C, for example, T can be 1400°C, 1500°C, 1600°C, or 1800°C. The heat treatment time is t, which is between 10 and 120 minutes, for example, t can be 30 minutes, 45 minutes, or 60 minutes. In this embodiment, the heat treatment of the co-fired body 1 is carried out in a heat treatment furnace.

[0058] Next, the co-fired body 1 was allowed to cool naturally to room temperature.

[0059] Next, the two ends of the co-fired body 1 are machined to be flat; specifically, the two ends of the co-fired body 1 are ground flat.

[0060] Fifth, return to the first step until the thickness t1 between the first end face 1.2 of the co-fired body 1 and each part of the metal layer 1.1 is greater than or equal to the set value.

[0061] Sixth, the thickness t2 between the second end face 1.3 and various parts of the metal layer 1.1 of the co-fired body 1 is measured using an instrument. Areas where the thickness t2 is less than a set value are identified and marked. These areas are defined as "regions on the metal layer 1.1 that protrude towards the second end face 1.3". In this embodiment, areas where the thickness t2 is less than the set value are marked on the second end face 1.3. In this embodiment, the instrument used is an eddy current thickness gauge, an ultrasonic thickness gauge, or a CT scanner.

[0062] Seventh, place the co-fired body 1 with its second end face 1.3 facing downwards and its first end face 1.2 facing upwards. Support the marked area with the support member 2, leaving the rest of the second end face 1.3 of the co-fired body 1 suspended in the air. Specifically, place the co-fired body 1 with its second end face 1.3 facing downwards on the platform 3 inside the heat treatment furnace, and support the marked area with the support member 2, which is positioned between the marked area and the platform 3. Leave the rest of the second end face 1.3 of the co-fired body 1 suspended in the air. When the support member 2 cannot stably support the co-fired body 1, the co-fired body 1 will be supported by the support member 2 at a certain point on the edge of the second end face 1.3. For example, if there are only one or two marked areas, the co-fired body 1 will be supported on the platform 3 by the support member 2 at a certain point on the edge of the second end face 1.3. When there are three or more marked areas, and the support member 2 can stably support the co-fired body 1, the second end face 1.3 of the co-fired body 1 will be supported on the platform 3 by the support member 2. Next, a uniform counterweight 4 is laid on the first end face 1.2 of the co-fired body 1, outside the marked area. Specifically, the second end face 1.3 of the co-fired body 1 is placed downwards on the platform 3 inside the heat treatment furnace, and a counterweight plate is placed on the first end face 1.2 of the co-fired body 1, covering the edge of the first end face 1.2. The lower surface of the counterweight plate is provided with a relief groove 4.1, and the relief groove 4.1 corresponds one-to-one with the marked area, and the groove shape of the relief groove 4.1 matches the marked area. The marked area in this step refers to the area where the thickness t2 is less than the set value. In this way, it can be ensured that the counterweight 4 is evenly distributed outside the marked area, which is beneficial for controlling the creep of the co-fired body 1 through subsequent heat treatment, and eliminating or reducing the area protruding from the metal layer 1.1 towards the first end face 1.2. The marked area in the seventh step refers to the area where the thickness t2 is less than the set value.

[0063] Eighth, the co-fired body 1 is heat-treated at a temperature of T, which is between 1400 and 1800°C, for example, T can be 1400°C, 1500°C, 1600°C, or 1800°C. The heat treatment time is t, which is between 10 and 120 minutes, for example, t can be 30 minutes, 45 minutes, or 60 minutes. Then, the co-fired body 1 is allowed to cool naturally to room temperature. In this embodiment, the heat treatment of the co-fired body 1 is carried out in a heat treatment furnace.

[0064] Ninth, the two ends of the co-fired body 1 are machined to be flat; specifically, the two ends of the co-fired body 1 are ground flat.

[0065] Tenth, return to step six until the thickness t2 between the second end face 1.3 of the co-fired body 1 and each part of the metal layer 1.1 is greater than or equal to the set value.

[0066] like Figure 2 , Figure 3 As shown in this embodiment, a method for improving the flatness of the metal layer in a ceramic-metal co-fired body is described. A support member 2 supports areas where the thickness t2 is less than a set value. Simultaneously, a uniform counterweight 4 is laid outside the marked area to ensure sufficient pressure on the co-fired body 1 outside the marked area during heat treatment. Heat treatment controls the creep of the co-fired body 1, eliminating or reducing areas protruding towards the first end face 1.2 and towards the second end face 1.3 on the metal layer 1.1. Then, through multiple heat treatments and end-face processing, the shape of the metal layer 1.1 is gradually corrected, thereby effectively improving the flatness of the metal layer in the ceramic-metal co-fired body and thus improving the quality of the ceramic-metal co-fired body.

[0067] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Any simple modifications, alterations, and equivalent transformations made to the above embodiments based on the technical essence of the present invention shall still fall within the protection scope of the present invention.

Claims

1. A method for improving the flatness of the metal layer in a ceramic-metal co-fired body, characterized in that, Includes the following steps, First, the two ends of the co-fired body are machined to be flat, and the metal layer of the co-fired body is parallel to its end faces; Second, the thickness t1 between the first end face of the co-fired body and various parts of the metal layer is measured using an instrument, and the areas where the thickness t1 is less than the set value are identified and marked. Third, place the first end face of the co-fired body downwards, and support the area where the thickness t1 is less than the set value with a support member, while the rest of the first end face of the co-fired body is suspended in the air. Fourth, the co-fired body is heat-treated and then cooled; next, the two ends of the co-fired body are machined flat. Fifth, return to the first step until the thickness t1 between the first end face of the co-fired body and each part of the metal layer is greater than or equal to the set value.

2. The method for improving the flatness of the metal layer in a ceramic-metal co-fired body according to claim 1, characterized in that, The fifth step is followed by: Sixth, use an instrument to measure the thickness t2 between the second end face of the co-fired body and various parts of the metal layer, determine the areas where the thickness t2 is less than the set value, and mark them; Seventh, place the co-fired body with the second end face facing down, and support the area where the thickness t2 is less than the set value with a support member, while the rest of the second end face of the co-fired body is suspended in the air; Eighth, the co-fired body is heat-treated at a temperature of T for a time of t; then the co-fired body is cooled. Ninth, smooth both ends of the co-fired body; Tenth, return to step six until the thickness t2 between the second end face of the co-fired body and each part of the metal layer is greater than or equal to the set value.

3. A method for improving the flatness of the metal layer in a ceramic-metal co-fired body according to claim 1 or 2, characterized in that, In the fourth step, the heat treatment temperature is T, which is 1400-1800℃, and the heat treatment time is t, which is 10-120min.

4. A method for improving the flatness of the metal layer in a ceramic-metal co-fired body according to claim 1 or 2, characterized in that, The instrument is an eddy current thickness gauge, an ultrasonic thickness gauge, or a CT scanner.

5. A method for improving the flatness of the metal layer in a ceramic-metal co-fired body, characterized in that, Includes the following steps, First, the two ends of the co-fired body are machined to be flat; Second, the thickness t1 between the first end face of the co-fired body and various parts of the metal layer is measured using an instrument, and the areas where the thickness t1 is less than the set value are identified and marked. Third, place the first end face of the co-fired body downwards, support the marked area with a support, and suspend the rest of the first end face of the co-fired body in the air; spread a uniform counterweight on the second end face of the co-fired body outside the marked area. Fourth, the co-fired body is heat-treated and then cooled; next, the two ends of the co-fired body are machined flat. Fifth, return to the first step until the thickness t1 between the first end face of the co-fired body and each part of the metal layer is greater than or equal to the set value.

6. The method for improving the flatness of the metal layer in a ceramic-metal co-fired body according to claim 5, characterized in that, In the third step, the specific method for uniformly laying counterweights on the second end face of the co-fired body outside the marked area is as follows: A counterweight plate is placed on the second end face of the co-fired body, covering the edge of the second end face of the co-fired body. The lower surface of the counterweight plate is provided with a relief groove, and the relief groove corresponds one-to-one with the marked area.

7. A method for improving the flatness of the metal layer in a ceramic-metal co-fired body according to claim 5 or 6, characterized in that, The fifth step is followed by: Sixth, use an instrument to measure the thickness t2 between the second end face of the co-fired body and various parts of the metal layer, determine the areas where the thickness t2 is less than the set value, and mark them; Seventh, place the co-fired body with the second end face facing down, support the area where the thickness t2 is less than the set value with a support, and suspend the rest of the second end face of the co-fired body; then lay a uniform counterweight on the part of the first end face of the co-fired body outside the marked area; Eighth, the co-fired body is heat-treated at a temperature of T for a time of t; then the co-fired body is cooled. Ninth, smooth both ends of the co-fired body; Tenth, return to step six until the thickness t2 between the second end face of the co-fired body and each part of the metal layer is greater than or equal to the set value.

8. The method for improving the flatness of the metal layer in a ceramic-metal co-fired body according to claim 7, characterized in that, In the seventh step, the specific method for uniformly laying counterweights on the first end face of the co-fired body outside the marked area is as follows: A counterweight plate is placed on the first end face of the co-fired body, covering the edge of the first end face of the co-fired body. The lower surface of the counterweight plate is provided with a relief groove, and the relief groove corresponds one-to-one with the marked area.

9. A method for improving the flatness of the metal layer in a ceramic-metal co-fired body according to claim 5 or 6, characterized in that, In the fourth step, the heat treatment temperature is T, which is 1400-1800℃, and the heat treatment time is t, which is 10-120min.

10. A method for improving the flatness of the metal layer in a ceramic-metal co-fired body according to claim 5 or 6, characterized in that, The instrument is an eddy current thickness gauge, an ultrasonic thickness gauge, or a CT scanner.

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