A method for on-line detection of a resonator profile

Abstract

The application discloses a kind of resonator profile online detection methods, first in initial position under adjustment optical probe to working position, then continuously rotate workpiece shaft, the distance value of measurement optical probe to the outer surface of resonator and the thickness value of resonator.By rotating machine tool processing shaft drives optical probe to rotate along the latitude direction of resonator, so that optical probe is aligned with multiple latitude sections of resonator, then continuously rotate workpiece shaft, and the distance of optical probe to the outer spherical surface profile under multiple sections is measured, and the thickness of corresponding latitude position resonator is measured.After testing, the motion transformation of optical probe probe coordinate system relative to machine tool main shaft coordinate system is decomposed into vector translation, and the point cloud coordinates of inner and outer spherical surface profiles are calculated, and the center coordinates of inner and outer spherical surfaces and the ball diameter of inner and outer spherical surfaces are fitted by least square, neural network or machine learning algorithm, and finally the surface accuracy of inner and outer spherical surfaces is evaluated.It has the advantages of non-contact and online detection, and realizes three-dimensional high-precision profile evaluation of inner and outer spherical surfaces of resonator through one detection process, solves the problem that existing test methods can only realize resonator outer spherical surface profile measurement or inner and outer spherical surface profile measurement at the same time, and the measurement result is low in accuracy.

Description

Technical Field

[0001] This invention belongs to the field of hemispherical resonant gyroscope technology, specifically relating to an online detection method for the contour of a resonator. Background Technology

[0002] A hemispherical resonator gyroscope is a rotorless vibrating gyroscope that measures the rotation of its outer shell by utilizing the circumferential precession of the standing wave of a hemispherical harmonic oscillator. Due to its simple structure, small size, high precision, light weight, low power consumption, high reliability, and good environmental adaptability, it is widely used in aviation, aerospace, and marine fields, and is currently the most promising inertial gyroscope in these sectors. The core structure of a hemispherical resonator gyroscope is the hemispherical harmonic oscillator, whose performance determines most of the gyroscope's overall performance. The hemispherical harmonic oscillator is typically made of high-purity fused silica material with a high quality factor, precision-machined into a thin-walled hemispherical part. Ideally, the excitation mode and the sensitive mode have the same frequency. However, the contour of the harmonic oscillator produced in actual manufacturing is not ideal. Machining errors in the contour of the hemispherical harmonic oscillator have a significant impact on its performance, not only leading to unbalanced oscillations, increased support losses, and a reduced quality factor, but also substantially affecting the standing wave characteristics, causing changes in the gyroscope's zero-bias drift, sensitivity, and other performance characteristics. Therefore, in order to manufacture high-performance hemispherical gyroscope resonators, it is necessary to accurately evaluate the profile of the resonator, so as to provide a basis for the high-precision manufacturing of the front-end resonator and the precision leveling of the back-end resonator.

[0003] The hemispherical resonator gyroscope resonator is a typical thin-walled spherical shell structure. Because the top of the inner spherical surface is connected to the supporting anchor, and the top of the outer spherical surface has residual material from the machining process, neither the inner nor outer spherical surface forms a complete spherical structure, increasing the difficulty of measurement. Furthermore, since the thickness of the resonator is generally around 1mm, it is easily deformed. If contact stress exists during contact measurement, it can severely affect the accuracy of the measurement results. Additionally, because hemispherical resonators are generally manufactured using high-precision grinding methods, high accuracy is required during manufacturing. Once removed from the manufacturing equipment, secondary installation errors are unavoidable during subsequent measurements. Currently, there are three main methods for evaluating the profile of hemispherical resonators:

[0004] The first method uses a roundness meter to evaluate the resonator profile. Roundness meters achieve a maximum accuracy of approximately 50 nm. The probe continuously measures the spherical surface of the resonator through physical contact, providing roundness values ​​along various cross-sections. The specific testing method is as follows: After the hemispherical resonator is manufactured, it is removed from the manufacturing equipment and installed on the roundness meter. The measuring probe of the roundness meter measures various cross-sections of the resonator, providing the roundness value. However, the roundness meter is a two-dimensional roundness measurement device; it can only provide the profile accuracy of the resonator along the measurement axis of rotation, and cannot provide accuracy along the resonator's meridian direction.

[0005] The second method uses a spherical profilometer to evaluate the resonator profile. The spherical profilometer achieves a maximum accuracy of approximately 100 nm, making it suitable for measuring the profile of hemispherical resonators. This is also a physical contact measurement method; by continuously measuring multiple cross-sections of the outer spherical surface of the resonator using a contact probe, the profile accuracy of the outer spherical surface can be provided. The specific testing method is as follows: after the hemispherical resonator is manufactured, it is removed from the manufacturing equipment and installed on the spherical profilometer. The probe of the spherical profilometer is then used to measure multiple cross-sections of the outer spherical surface of the resonator, providing the profile accuracy of the outer spherical surface. Although the spherical profilometer can achieve three-dimensional profile measurement of the resonator, it can only measure the outer spherical surface of the hemisphere and cannot provide measurement results for the inner spherical surface profile.

[0006] The third method is to use a coordinate measuring machine (CMM) to evaluate the resonator profile. CMMs are general-purpose instruments with a wide range of applications and typically offer micron-level accuracy. They also utilize physical contact measurement, measuring the resonator's spherical surface through a contact probe to determine the profile accuracy. The specific testing method involves removing the hemispherical resonator from the machining equipment after processing and installing a CMM on the measuring platform. Points are collected using the probe to obtain the inner and outer spherical profiles of the resonator. However, due to the low accuracy of CMM spherical measurements and the fact that they involve intermittent sampling, they cannot be used for evaluating spherical profiles in high-precision applications. Summary of the Invention

[0007] The purpose of this invention is to address the shortcomings of existing methods for measuring the contour accuracy of hemispherical gyroscope resonators. Roundness meters can only provide two-dimensional circular cross-sectional accuracy, failing to measure three-dimensional accuracy; while spherical profilers can measure three-dimensional contours, they can only evaluate the accuracy of the outer spherical contour; coordinate measuring machines (CMMs) have micron-level accuracy, which is insufficient for evaluating spherical contours in high-precision applications. Furthermore, current measurement methods cannot achieve online measurement; the resonator must be removed from the machining station during measurement, inevitably introducing errors from secondary clamping during inspection, resulting in low accuracy. Additionally, current methods employ physical contact detection, and the contact pressure inevitably causes deformation of the hemispherical resonator shell, affecting the measurement results. This invention proposes a high-precision online detection method for the inner and outer spherical contours of a hemispherical resonator, offering advantages of non-contact, online detection, and enabling high-precision three-dimensional contour measurement of both the inner and outer spherical surfaces in a single inspection process.

[0008] The technical solution of the present invention:

[0009] A method for online detection of the contour of a harmonic oscillator, the method comprising:

[0010] Step 1: After the resonator 1 is processed, use the optical probe 4 to align with the outer spherical surface 1-4 of the resonator, and adjust the optical probe so that when the optical probe 4 is placed horizontally, it is perpendicular to the detection surface, and the extension line of the focal point of the optical probe 4 passes through the center of the resonator 1.

[0011] Step 2: Use the machine tool spindle 3 to record the measurement starting point position, measure the distance l0 from the optical probe 4 to the outer spherical surface 1-4 of the resonator, and measure the wall thickness h0 of the resonator 1 at the measurement position where the optical probe 4 is located.

[0012] Step 3: Rotate the optical probe 4 along the latitude direction using the optical probe clamp 5 by a preset angle to the next position, record the measurement starting position, and repeat step 2 to obtain the distance l between the outer spherical surface 1-4 of the resonator at 1n rotation positions. i The wall thickness h of the harmonic oscillator i ;

[0013] Step 4: Establish a 4-coordinate system (X) including the optical probe. c ,Y c Z c ), machine tool spindle 3-coordinate system (X J ,Y J Z J Mathematical model of the transformation relationship matrices T and H for translation and rotation motion;

[0014] Step 5: Based on the 4-coordinate system including the optical probe (X... c ,Y c Z c ), machine tool spindle 3-coordinate system (X J ,Y J Z J The mathematical model of the transformation relationship matrices T and H of translation and rotation motion, and the distance l of the outer spherical surface of the harmonic oscillator in 1n rotational positions. i The wall thickness h of the harmonic oscillator i Determine the coordinates of the center of the inner and outer spheres and their diameters.

[0015] Furthermore,

[0016] Step 1 also includes: using the distance detection function of the optical probe 4, adjusting the distance between the measuring probe 4 and the outer spherical surface 1-4 of the resonator 1 so that the distance is within the measurement range of the optical probe 4.

[0017] Furthermore,

[0018] Step 2 specifically involves the machine tool spindle 3 driving the resonator 1 to rotate continuously and uniformly via the adapter fixture 2, and continuously measuring the distance l0 from the optical probe 4 to the outer spherical surface 1-4 of the resonator.

[0019] Furthermore,

[0020] Step 2 also includes: switching the function of the optical probe 4 from distance measurement to thickness measurement; using the initialization function and continuous rotation function of the machine tool spindle 3, the machine tool spindle 3 drives the resonator 1 to rotate continuously and uniformly through the adapter tool 2, and continuously measuring the wall thickness h0 of the resonator 1 at the measurement position of the optical probe 4.

[0021] Furthermore,

[0022] Step 3 also includes: repeating step 3 until the top of the resonator 1 is measured, to obtain the distance l between the outer spherical surfaces 1-4 of the resonator 1n at each of the n rotational positions. i The wall thickness h of the harmonic oscillator i .

[0023] Furthermore, step 4 specifically involves:

[0024] The motion transformation of the optical probe's 4-coordinate system relative to the machine tool spindle's 3-coordinate system is decomposed into a vector translation T(P). x ,P y ,P z And vector rotation H(θ,φ,γ), therefore, the optical probe coordinate system (X) c ,Y c Z c ) and machine tool spindle coordinate system (X J ,Y J Z J The conversion relationship is as follows:

[0025]

[0026] in

[0027]

[0028] P x P represents the displacement along the X-axis in the machine tool spindle coordinate system. y P represents the displacement along the Y-axis in the machine tool spindle coordinate system. z θ is the displacement along the Z-axis in the machine tool spindle coordinate system; θ is the rotation angle around the X-axis in the machine tool spindle coordinate system; φ is the rotation angle around the Y-axis in the machine tool spindle coordinate system; and γ is the rotation angle around the Z-axis in the machine tool spindle coordinate system.

[0029] Furthermore, step 5 specifically involves:

[0030] Based on the distance to the outer spherical profile measured by optical probe 4, and the measured thicknesses of the inner and outer spherical surfaces, calculate the point cloud coordinates (x, y, y) of the outer spherical profiles 1-4 of the resonator. w ,y w ,z w The point cloud coordinates (x) of the inner sphere 1-2 contour and the inner sphere 1-2 contour.n ,y n ,z n ):

[0031]

[0032] Based on the point cloud coordinates of the inner sphere 1-2 and the outer sphere 1-4 of the harmonic oscillator, an optimization function is established. The surface accuracy index of the inner and outer spheres is evaluated by fitting the center coordinates and diameters of the inner and outer spheres using the least squares algorithm, neural network algorithm, or machine learning.

[0033] Furthermore, step 5, establishing the optimization function, specifically involves:

[0034] min(f) = sqrt[(x w -x wO ) 2 +(y w -y wO ) 2 +(z w -z wO ) 2 ]

[0035] x w y w , z w Point cloud coordinates of the outer sphere, x wO y wO , z wO The coordinates of the center of the outer sphere;

[0036] min(f) = sqrt[(x n -x nO ) 2 +(y n -y wO ) 2 +(z n -z nO ) 2 ]

[0037] x nO y nO , z nO The coordinates of the center of the inner sphere.

[0038] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0039] This invention enables online contour measurement of hemispherical resonators after machining, avoiding the accuracy loss caused by secondary clamping and physical contact measurement in existing offline detection methods. It also enables high-precision three-dimensional contour measurement of hemispherical resonators, solving the problem that existing roundness meters, spherical contour meters, and coordinate measuring machines cannot fully achieve high-precision three-dimensional contour measurement of the inner and outer spherical surfaces of hemispherical resonators. The measurement method is based on high-precision contour measurement technology at the machining end, making efficient online reshaping of the resonator possible and significantly improving machining efficiency and accuracy. The measurement method is based on high-precision measurement of the outer spherical surface and wall thickness, calculating the inner spherical contour to avoid the limitation of existing optical measurement methods that cannot measure the inner spherical contour. Utilizing the miniaturization and ease of online installation of the optical probe, this invention achieves online measurement of the spherical contour using a high-precision optical probe through rotation of the machining axis and workpiece axis. Finally, this invention employs a high-precision optical probe, calculating the contour of the inner and outer spherical surfaces of the hemispherical resonator through displacement and thickness measurements, achieving high-precision contour measurement of the inner and outer spherical surfaces using an optical probe. This invention decomposes the motion transformation of the probe coordinate system relative to the machine tool spindle coordinate system into vector translation and vector rotation. The elements required for evaluating the profile of a hemispherical harmonic oscillator can be realized simply by rotating the probe and rotating the workpiece. Attached Figure Description

[0040] Figure 1 Schematic diagram of the position of the resonator and probe

[0041] Figure 2 Schematic diagram of the measurement principle (initial position)

[0042] Figure 3 Schematic diagram of the measurement principle (position i)

[0043] Figure 4 This is a schematic diagram of the point cloud data after coordinate transformation of the spherical contour of the harmonic oscillator.

[0044] In the diagram: 1-hemispherical resonator, 1-1-anchor post, 1-2-inner spherical surface, 1-3-spherical shell, 1-4-outer spherical surface, 1-5-process handle, 2-adapter fixture, 3-machine tool spindle, 4-optical probe, 5-optical probe fixture. Detailed Implementation

[0045] The present invention will now be described clearly and specifically with reference to the accompanying drawings.

[0046] The technical solution of this invention is based on the online state after the resonator is processed. A high-precision (10nm) optical non-contact probe is used to align with the initial position of the outer spherical surface of the hemispherical resonator, ensuring that the optical probe is roughly perpendicular to the detection surface when placed horizontally. The distance of the optical probe is adjusted to be within the working distance (0.1-2mm). Then, the workpiece axis is rotated continuously, and the distance detection function of the optical probe is used to continuously measure (more than 3 cycles) the distance l0 from the optical probe to the outer spherical surface of the resonator. After the distance measurement is completed, the thickness detection function of the optical probe is switched to continuously measure (more than 3 cycles) the thickness h0 of the resonator.

[0047] The optical probe is rotated along the longitude direction of the resonator by rotating the machining axis of the machine tool (the optical probe is mounted on the machining axis). This ensures that the optical probe is approximately perpendicular to the detection surface when aligned with each latitude section of the resonator. The optical probe is aligned with multiple latitude sections of the resonator, and the rotation angle of the probe (the rotation angle of the optical probe from the horizontal position to the current position) is recorded sequentially. Then, the workpiece axis is continuously rotated, and the distance l from the optical probe to the outer spherical surface at the corresponding section is repeatedly measured. i Harmonic oscillator wall thickness h i .

[0048] The motion transformation of the probe coordinate system relative to the machine tool spindle coordinate system is decomposed into vector translation and vector rotation. This is based on the distance l between the probe and the outer spherical contour obtained from the probe measurement. i and the measured thickness h of the inner and outer spherical surfaces. i The point cloud coordinates of the outer and inner spherical contours are calculated. Based on these coordinates, an optimization function f(x,y,z) is established to fit the center coordinates and diameters of the inner and outer spheres, thus evaluating the surface accuracy and other indicators of the inner and outer spheres. This invention achieves high-precision evaluation of the inner and outer spherical contours of a harmonic oscillator in a single measurement, solving the problem that existing measurement methods cannot simultaneously achieve high-precision rating of the three-dimensional contours of the inner and outer spherical contours of a harmonic oscillator.

[0049] Step 1) After the hemispherical resonator 1 is fabricated, keep it online. Use the optical probe 4 to align with the outer spherical surface 1-4 near the equator of the resonator. Adjust the optical probe to ensure that it is approximately perpendicular to the detection surface when placed horizontally, so that the extension line of the optical probe's focal point passes through the center of the resonator 1 (as shown in the attached diagram). Figure 1 Using the optical probe distance detection function, the distance between the measuring probe 4 and the outer spherical surface 1-4 (equatorial axis) of the resonator 1 is further adjusted so that it is within the measurement range of the optical probe 4.

[0050] Step 2: Record the starting position of the measurement using the machine tool spindle 3;

[0051] Then, the machine tool spindle 3 drives the resonator 1 to rotate continuously and uniformly for 3-4 revolutions via the adapter 2, continuously measuring the distance l0 from the optical probe 4 to the outer spherical surface 1-4 of the resonator (as shown in the attached figure). Figure 2 Switch the optical probe 4 function from distance measurement to thickness measurement. Utilize the initialization and continuous rotation functions of the machine tool spindle 3. The machine tool spindle 3 drives the resonator 1 to rotate continuously and uniformly for 3 to 4 revolutions through the adapter 2. Continuously measure the wall thickness h0 of the resonator 1 at the measurement position of the optical probe 4.

[0052] Step 3: Rotate the optical probe 45-15° along the latitude direction using the optical probe clamp 5 to the next position (as shown in the attached image). Figure 3 Record the starting position of the measurement, and repeat step 2 to obtain the distance l from the optical probe 4 to the outer wall 1-4 of the resonator 1. i The wall thickness h of the harmonic oscillator i .

[0053] Repeat step 3 until the top of the resonator 1 is measured, obtaining the distance l from the outer wall 1-4 of the sphere at each of the n rotational positions of the resonator 1. i The wall thickness h of the harmonic oscillator i .

[0054] Step 4: Establish a 4-coordinate system (X) including the optical probe. c ,Y c Z c ), machine tool spindle 3-coordinate system (X J ,Y J Z J Mathematical model of the transformation relationship matrices T and H for translation and rotation motion;

[0055] Step 5: Based on the 4-coordinate system including the optical probe (X... c ,Y c Z c ), machine tool spindle 3-coordinate system (X J ,Y J Z J The mathematical model of the transformation relationship matrix T and H of translation and rotation motion, and the distance l of the outer wall of the sphere at 1-4 under 1n rotational positions of the harmonic oscillator. i The wall thickness h of the harmonic oscillator i Determine the coordinates of the centers of the inner and outer spheres and their diameters to evaluate the surface accuracy of the harmonic oscillator.

[0056] Step four specifically involves: establishing a 4-coordinate system (X, Y, Z) including the optical probe. c ,Y c Z c ), machine tool spindle 3-coordinate system (X J ,Y J ZJ The mathematical model of the transformation relationship matrices T and H for translation and rotation is as follows:

[0057] The motion transformation of the optical probe's 4-coordinate system relative to the machine tool spindle's 3-coordinate system is decomposed into a vector translation T(P). x ,P y ,P z And vector rotation H(θ,φ,γ), therefore, the optical probe coordinate system (X) c ,Y c Z c ) and machine tool spindle coordinate system (X J ,Y J Z J The conversion relationship is as follows:

[0058]

[0059] in

[0060]

[0061] P x P represents the displacement along the X-axis in the machine tool spindle coordinate system. y P represents the displacement along the Y-axis in the machine tool spindle coordinate system. z This represents the displacement along the Z-axis in the machine tool spindle coordinate system.

[0062] θ is the rotation angle about the X-axis in the machine tool spindle coordinate system, φ is the rotation angle about the Y-axis in the machine tool spindle coordinate system, and γ is the rotation angle about the Z-axis in the machine tool spindle coordinate system.

[0063] Step 5 specifically involves:

[0064] Based on the distance l between the outer spherical contour and the inner spherical surface measured by optical probe 4, and the thickness h of the inner and outer spherical surfaces measured, calculate the point cloud coordinates (x, y, y) of the outer spherical contour 1-4. w ,y w ,z w The point cloud coordinates (x) of the inner sphere 1-2 contour and the inner sphere 1-2 contour. n ,y n ,z n )(like Figure 4 As shown):

[0065]

[0066] Based on the point cloud coordinates of the inner sphere 1-2 and outer sphere 1-4 contours, an optimization function f is established. The surface shape accuracy index of the inner and outer spheres is evaluated by fitting the center coordinates and diameters of the inner and outer spheres using the least squares algorithm, neural network algorithm, or machine learning.

[0067] min(f) = sqrt[(x w -x wO ) 2 +(y w -y wO ) 2 +(z w -z wO ) 2 ]

[0068] x w y w , z w Point cloud coordinates of the outer sphere, x wO y wO , z wO The coordinates of the center of the outer sphere;

[0069] min(f) = sqrt[(x n -x nO ) 2 +(y n -y wO ) 2 +(z n -z nO ) 2 ]

[0070] x nO y nO , z nO The coordinates of the center of the inner sphere.

[0071] This invention enables online contour measurement of hemispherical resonators after machining, avoiding the accuracy loss caused by secondary clamping and physical contact measurement in existing offline detection methods. It also enables high-precision three-dimensional contour measurement of hemispherical resonators, solving the problem that existing roundness meters, spherical contour meters, and coordinate measuring machines cannot fully achieve high-precision three-dimensional contour measurement of the inner and outer spherical surfaces of hemispherical resonators. The measurement method is based on high-precision contour measurement technology at the machining end, making efficient online reshaping of the resonator possible and significantly improving machining efficiency and accuracy. The measurement method is based on high-precision measurement of the outer spherical surface and wall thickness, calculating the inner spherical contour to avoid the limitation of existing optical measurement methods that cannot measure the inner spherical contour. Utilizing the miniaturization and ease of online installation of the optical probe, this invention achieves online measurement of the spherical contour using a high-precision optical probe through rotation of the machining axis and workpiece axis. Finally, this invention employs a high-precision optical probe, calculating the contour of the inner and outer spherical surfaces of the hemispherical resonator through displacement and thickness measurements, achieving high-precision contour measurement of the inner and outer spherical surfaces using an optical probe. This invention decomposes the motion transformation of the probe coordinate system relative to the machine tool spindle coordinate system into vector translation and vector rotation. The elements required for evaluating the profile of a hemispherical harmonic oscillator can be realized simply by rotating the probe and rotating the workpiece.

Claims

1. A method for online detection of the contour of a harmonic oscillator, characterized in that, The method includes: Step 1: After the resonator (1) is processed, use an optical probe (4) to align with the outer spherical surface (1-4) of the resonator. Adjust the optical probe so that when the optical probe (4) is placed horizontally, it is perpendicular to the detection surface, and the extension line of the focal point of the optical probe (4) passes through the center of the resonator (1). Step 2: Use the machine tool spindle (3) to record the measurement starting point position, measure the distance l0 from the optical probe (4) to the outer spherical surface (1-4) of the resonator, and measure the wall thickness h0 of the resonator (1) at the measurement position of the optical probe (4); Step 3: Rotate the optical probe (4) along the latitude direction using the optical probe clamp (5) to the next position by a preset angle, record the measurement starting point position, and repeat step 2 to obtain the distance l between the outer spherical surface (1-4) of the resonator (1) at n rotation positions. i The wall thickness h of the harmonic oscillator i ; Step 4: Establish a coordinate system (X) including the optical probe (4). c ,Y c Z c ), machine tool spindle (3) coordinate system (X) J ,Y J Z J Mathematical model of the transformation relationship matrices T and H for translation and rotation motion; Step 5: Based on the coordinate system (X) containing the optical probe (4) c ,Y c Z c ), machine tool spindle (3) coordinate system (X) J ,Y J Z J Mathematical models of the transformation matrices T and H of translation and rotation motion, and the distance l of the outer spherical surface of the harmonic oscillator (1-4) under n rotational positions. i The wall thickness h of the harmonic oscillator i Determine the coordinates of the center of the inner and outer spheres and their diameters.

2. The online detection method for the contour of a harmonic oscillator according to claim 1, characterized in that, Step 1 also includes: using the distance detection function of the optical probe (4), adjusting the distance from the measuring probe (4) to the outer spherical surface (1-4) of the resonator (1) so that the distance is within the measurement range of the optical probe (4).

3. The online detection method for the contour of a harmonic oscillator according to claim 2, characterized in that, Step 2 is as follows: The machine tool spindle (3) drives the resonator (1) to rotate continuously and uniformly through the adapter (2), and continuously measures the distance l0 from the optical probe (4) to the outer spherical surface (1-4) of the resonator.

4. The online detection method for the contour of a harmonic oscillator according to claim 3, characterized in that, Step 2 also includes: switching the optical probe (4) function from distance measurement function to thickness measurement function, using the initialization function and continuous rotation function of the machine tool spindle (3), the machine tool spindle (3) drives the resonator (1) to rotate continuously and uniformly through the adapter (2), and continuously measuring the wall thickness h0 of the resonator (1) at the measurement position of the optical probe (4).

5. The online detection method for the contour of a harmonic oscillator according to claim 4, characterized in that, Step 3 also includes: repeating step 3 until the top of the resonator (1) is measured to obtain the distance l between the outer spherical surfaces (1-4) of the resonator (1) at n rotational positions. i The wall thickness h of the harmonic oscillator i .

6. The online detection method for the contour of a harmonic oscillator according to claim 5, characterized in that, Step 4 specifically involves: The motion transformation of the optical probe (4) coordinate system relative to the machine tool spindle (3) coordinate system is decomposed into a vector translation T(P). x ,P y ,P z And vector rotation H(θ,φ,γ), therefore, the optical probe coordinate system (X) c ,Y c Z c ) and machine tool spindle coordinate system (X J ,Y J Z J The conversion relationship is as follows: in P x P represents the displacement along the X-axis in the machine tool spindle coordinate system. y P represents the displacement along the Y-axis in the machine tool spindle coordinate system. z θ is the displacement along the Z-axis in the machine tool spindle coordinate system; θ is the rotation angle around the X-axis in the machine tool spindle coordinate system; φ is the rotation angle around the Y-axis in the machine tool spindle coordinate system; and γ is the rotation angle around the Z-axis in the machine tool spindle coordinate system.

7. The online detection method for the contour of a harmonic oscillator according to claim 6, characterized in that, Step 5 specifically involves: Based on the distance to the outer spherical profile measured by the optical probe (4), and the thicknesses of the inner and outer spherical surfaces measured, the point cloud coordinates (x, y, y) of the outer spherical profile of the harmonic oscillator (1-4) are calculated. w ,y w ,z w Point cloud coordinates (x) of the inner sphere (1-2) profile and the inner sphere (1-2) profile. n ,y n ,z n ): Based on the point cloud coordinates of the inner sphere (1-2) and outer sphere (1-4) of the harmonic oscillator, an optimization function is established. The surface accuracy index of the inner and outer spheres is evaluated by fitting the center coordinates and diameters of the inner and outer spheres using the least squares algorithm, neural network algorithm, or machine learning.

8. The online detection method for the contour of a harmonic oscillator according to claim 7, characterized in that, Step 5, establishing the optimization function, specifically involves: min(f)=sqrt[(x w -x wO ) 2 +(y w -y wO ) 2 +(z w -z wO ) 2 ] x w y w , z w Point cloud coordinates of the outer sphere, x wO y wO , z wO The coordinates of the center of the outer sphere; min(f)=sqrt[(x n -x nO ) 2 +(y n -y wO ) 2 +(z n -z nO ) 2 ] x nO y nO , z nO The coordinates of the center of the inner sphere.

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