A profile measurement method, device, computer equipment and product

Abstract

The application discloses a profile measurement method and device, computer equipment and product. The profile measurement method comprises the following steps: acquiring profile data of a sample in different postures; wherein the different postures comprise a first posture and a second posture; in the first posture, a first target region on the surface of the sample exceeds the upper limit of the measurement range of a profiler; in the second posture, the first target region is within the measurement range of the profiler; and the profile data in the different postures is spliced to obtain final profile data of the sample. The application aims to improve the accuracy of sample profile measurement.

Description

Technical Field

[0001] This invention relates to the field of contour measurement technology, and specifically to a contour measurement method, apparatus, computer equipment, and product. Background Technology

[0002] A profilometer is a measuring instrument that performs high-precision measurement, quantitative evaluation, and geometric parameter calculation of the two-dimensional contour shape of a workpiece surface. It mainly calculates various geometric dimensions and shape error analysis based on the extracted contour, such as height, width, depth, and angle.

[0003] The probe of a profilometer has a working angle range, meaning that during vertical scanning, the probe tip can maintain reliable contact with the workpiece surface (without slippage, detachment, or interference) and accurately follow the allowable tilt angle of surface contour changes. When using a profilometer to measure the contour of samples (such as threads, gears, etc.), some sample surfaces have areas that exceed the upper limit of the profilometer's measurement range, meaning the slope of these areas exceeds the normal working angle of the probe. Current inspection methods struggle to obtain accurate contour data for these samples. Summary of the Invention

[0004] The present invention aims to improve the accuracy of sample profile measurement.

[0005] According to a first aspect, one embodiment provides a contour measurement method, comprising:

[0006] Acquire contour data of a sample in different postures; wherein, the different postures include a first posture and a second posture, in the first posture, there is a first target region on the sample surface that exceeds the upper limit of the measurement range of the profilometer, and in the second posture, the first target region is within the measurement range of the profilometer;

[0007] Contour data from different poses are stitched together to obtain the final contour data of the sample.

[0008] In one embodiment, the step of stitching together contour data from different poses to obtain the final contour data of the sample includes:

[0009] The feature shape of the sample's contour data under different postures is obtained;

[0010] Based on the characteristic shape, the contour data of the sample under different postures are aligned to obtain the final contour data of the sample.

[0011] In one embodiment, in the first posture, there is a second target region on the sample surface that is within the measurement range of the profilometer; in the second posture, the second target region exceeds the upper limit of the measurement range of the profilometer.

[0012] The step of aligning the contour data of the sample under different poses based on the characteristic shape to obtain the final contour data of the sample includes:

[0013] Based on the characteristic shape, the contour data of the sample under different postures are aligned, and the final contour data of the sample is obtained by splicing the contour data of the second target area on the sample surface under the first posture and the contour data of the first target area on the sample surface under the second posture.

[0014] In one embodiment, the sample surface has a groove or a protrusion, the first target area includes a first sidewall of the groove or protrusion, the second target area includes a second sidewall of the groove or protrusion, and the feature shape includes the planar contours on both sides of the groove or protrusion and the corners on both sides of the groove or protrusion.

[0015] The step of aligning the contour data of the sample in different postures based on the characteristic shape, and stitching the contour data of the second target region on the sample surface in the first posture and the contour data of the first target region on the sample surface in the second posture to obtain the final contour data of the sample, includes:

[0016] Use the planar contours on both sides of the groove or boss in different postures as a baseline to align the contour data of the groove or boss in different postures.

[0017] Using the corners on the same side of the contour data in different postures after the grooves or bosses are aligned as reference points, the contour data in different postures after alignment are aligned, and the final contour data of the sample is obtained by splicing the contour data of the second side wall of the sample surface in the first posture and the contour data of the first side wall of the sample surface in the second posture.

[0018] In one embodiment, in the first posture, there is a second target region on the sample surface that is within the measurement range of the profilometer; in the second posture, the second target region exceeds the upper limit of the measurement range of the profilometer; the different postures also include a third posture, in which neither the first target region nor the second target region is within the measurement range of the profilometer.

[0019] The step of aligning the contour data of the sample under different poses based on the characteristic shape to obtain the final contour data of the sample includes:

[0020] Based on the characteristic shape, the contour data of the sample in different postures are aligned, and the final contour data of the sample is obtained by stitching together the contour data of the second target area of ​​the sample surface in the first posture, the contour data of the first target area of ​​the sample surface in the second posture, and the contour data of the sample surface in the third posture.

[0021] In one embodiment, the sample is a blade, the first target region is the first end of the blade, the second target region is the second end of the blade, the feature shape is a position point in the contour data, and in the third posture, the contour data of the position point on the side closer to the first end or the side closer to the second end exceeds the measurement range of the profilometer. The step of aligning the contour data of the sample in different postures based on the feature shape, and stitching together the contour data of the second target region on the sample surface in the first posture, the contour data of the first target region on the sample surface in the second posture, and the contour data of the sample surface in the third posture to obtain the final contour data of the sample includes:

[0022] The feature shape of the blade in the contour data of the blade surface in the third posture is obtained, and the feature shape near the second target area is used as the first reference point. The corresponding feature shape of the blade in the contour data containing the second target area in the first posture is obtained and used as the second reference point.

[0023] Align the first reference point and the second reference point, adjust the contour data under the first posture or adjust the contour data of the blade surface under the third posture until the contour data under the first posture and the contour data of the blade surface under the third posture overlap in the preset selected area, so as to complete the splicing of the contour data of the second target area under the first posture and the contour data of the blade surface under the third posture.

[0024] The feature shape of the blade in the contour data of the blade surface in the third posture is obtained, and the feature shape close to the first target area is used as the third reference point. The corresponding feature shape of the blade in the contour data containing the first target area in the second posture is obtained and used as the fourth reference point.

[0025] Align the third reference point and the fourth reference point, adjust the contour data under the second posture or adjust the contour data of the blade surface under the third posture until the contour data under the second posture and the adjusted contour data of the blade surface under the third posture coincide within the preset selected area, so as to complete the splicing of the contour data of the first target area under the second posture and the contour data of the blade surface under the third posture.

[0026] In one embodiment, the sample is a blade, the first target region is the first end of the blade, the second target region is the second end of the blade, and the feature shape includes a first common region and a second common region. The first common region is the region shared by the contour data of the blade in the first posture and the contour data of the blade surface in the third posture, and conforms to a preset feature. The second common region is the region shared by the contour data of the blade in the second posture and the contour data of the blade surface in the third posture, and conforms to a preset feature.

[0027] The step of aligning the contour data of the sample in different postures based on the characteristic shape, and stitching together the contour data of the second target region of the sample surface in the first posture, the contour data of the first target region of the sample surface in the second posture, and the contour data of the sample surface in the third posture to obtain the final contour data of the sample, includes:

[0028] The contour data of the blade in the first common area under the first posture is matched with the contour data of the blade surface in the third posture of the blade in the first common area to complete the splicing of the region corresponding to the second target area in the contour data of the blade in the first posture and the contour data of the blade surface in the third posture.

[0029] The contour data of the blade in the second common area under the second posture is matched with the contour data of the blade surface in the third posture of the blade in the second common area to complete the splicing of the region corresponding to the first target area in the contour data of the blade in the second posture and the contour data of the blade surface in the third posture.

[0030] According to a second aspect, one embodiment provides a contour measuring device, comprising:

[0031] The data acquisition module is used to acquire the contour data of the sample under different postures; wherein, the different postures include a first posture and a second posture, in the first posture, there is a first target area on the sample surface that exceeds the upper limit of the measurement range of the profilometer, and in the second posture, the first target area is within the measurement range of the profilometer;

[0032] The data stitching module is used to stitch together contour data under different postures to obtain the final contour data of the sample.

[0033] According to a third aspect, one embodiment provides a computer device including a memory and a processor, the memory being used to store a program, and the processor being used to implement the contour measurement method by executing the program stored in the memory.

[0034] According to a fourth aspect, one embodiment provides a computer program product including a computer program and / or instructions that, when executed by a processor, implement the contour measurement method.

[0035] According to the contour measurement method, contour measurement device, computer equipment, and computer program product of the above embodiments, contour data of the sample under different postures are acquired. Since the different postures include a first posture and a second posture, in the first posture, there is a first target area on the sample surface that exceeds the upper limit of the measurement range of the contour meter. In the second posture, the first target area is within the measurement range of the contour meter. By adjusting the posture of the sample so that the first target area is within the measurement range of the contour meter, when stitching the contour data under different postures, the target area within the measurement range of the contour meter can be selected for stitching, thereby improving the accuracy of contour detection and obtaining the final contour data of the sample. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the profilometer in one embodiment;

[0037] Figure 2 This is a schematic diagram of the structure when the groove is tilted to the right in one embodiment;

[0038] Figure 3 This is a schematic diagram of the structure when the groove is tilted to the left in another embodiment;

[0039] Figure 4 This is a schematic diagram of the overall outline data of the blade in one embodiment;

[0040] Figure 5 This is a flowchart of the contour measurement method in the embodiments of this application;

[0041] Figure 6 This is a flowchart illustrating how contour data from different poses is stitched together to obtain the final contour data of a sample in one embodiment.

[0042] Figure 7 This is a flowchart illustrating how, in one embodiment, contour data of a sample is aligned based on its characteristic shape under different postures, and the final contour data of the sample is obtained by stitching together the contour data of the second target region on the sample surface under the first posture and the contour data of the first target region on the sample surface under the second posture.

[0043] Figure 8 This is a schematic diagram of the contour data of the groove under different postures in one embodiment;

[0044] Figure 9 This is a schematic diagram illustrating the measurement and stitching of contour data of a groove under different postures in one embodiment;

[0045] Figure 10 This is a schematic diagram of partial profile data of a blade in one embodiment;

[0046] Figure 11 This is a flowchart illustrating how, in one embodiment, contour data of a sample is aligned based on its characteristic shape under different postures, and the final contour data of the sample is obtained by stitching together the contour data of the second target region on the sample surface under the first posture, the contour data of the first target region on the sample surface under the second posture, and the contour data of the sample surface under the third posture.

[0047] Figure 12 This is a schematic diagram illustrating the measurement and stitching of overall and partial contour data of a blade in one embodiment.

[0048] Figure 13 This is a flowchart illustrating how, in one embodiment, contour data of a sample is aligned based on its characteristic shape under different postures, and the final contour data of the sample is obtained by stitching together the contour data of the second target region on the sample surface under the first posture, the contour data of the first target region on the sample surface under the second posture, and the contour data of the sample surface under the third posture.

[0049] Figure 14 This is a schematic diagram illustrating the measurement and stitching of overall and partial contour data of the blade in another embodiment;

[0050] Figure 15 This is a schematic diagram of the contour measuring device in one embodiment. Detailed Implementation

[0051] The present invention will now be described in further detail with reference to specific embodiments and accompanying drawings. Similar elements in different embodiments are referred to by associated similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of the invention. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to the present invention are not shown or described in the specification. This is to avoid obscuring the core parts of the invention with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0052] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments. At the same time, the steps or actions in the method description can be rearranged or adjusted in a manner obvious to those skilled in the art. Therefore, the various orders in the specification and drawings are only for the clear description of a particular embodiment and do not imply a necessary order, unless otherwise stated that a particular order must be followed.

[0053] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this invention, unless otherwise specified, include both direct and indirect connections (linkages).

[0054] Before explaining the contour measurement method in detail, let's first introduce the contour measuring instrument. Please refer to [link / reference needed]. Figure 1 The profilometer comprises a base 11, a worktable 12, an X-axis horizontal column 13, a Z-axis vertical column 14, and a measurement module 15. The worktable 12 is mounted on the base 11 and is used to place the workpiece 16 to be measured. The measurement module 15 includes a probe 151, which can move relative to the Z-axis vertical column 14 and the X-axis horizontal column 13 to move the probe 151 on the workpiece surface, thereby acquiring the contour of the workpiece surface and generating a contour curve.

[0055] by Figure 1 Taking the profilometer type shown as an example, a specific description is given. The Z-axis column 14 is mounted on the base 11, and the X-axis column 13 can move up and down along the Z-axis column 14. The measuring module 15 is mounted on the X-axis column 13 and can move left and right along the X-axis. The measuring module 15 is equipped with a measuring rod that can rotate around a pivot axis, and a measuring stylus 151 is mounted at the front end of the measuring rod. The measuring rod is equipped with a grating, and the angular position of the measuring rod can be detected in real time through the grating reading head. During the measurement process, the measuring stylus 151 contacts the workpiece surface with a constant measuring force, and the measuring module 15 moves relative to the X-axis column 13 along the X-axis, thus driving the measuring stylus 151 to move on the workpiece surface. Since the measuring stylus 151 is in contact with the workpiece surface, the measuring stylus 151 will swing up and down with the workpiece surface, and the grating reading head can output the position of the measuring rod in real time, thereby calculating the positional change of the measuring stylus 151 and finally obtaining the surface profile of the workpiece.

[0056] When measuring the contour of samples (such as threads, gears, etc.) with a profilometer, some sample surfaces have grooves or bosses. For the walls of grooves or bosses, the profilometer's stylus has a working angle range, meaning that during vertical scanning, the stylus tip can maintain reliable contact with the workpiece surface (without slippage, detachment, or interference) and accurately follow the allowable tilt angle of the surface contour changes. For example, the normal working angle range of the profilometer is: uphill slope not exceeding 80°, and downhill slope not exceeding 88°. If the wall slope exceeds the normal working angle of the stylus, the common practice is to tilt the sample to reduce the tilt angle of the wall to be measured, thereby achieving accurate measurement of that side of the contour. However, when the slopes of both sides of the groove or boss are large, this tilting method can only meet the measurement requirements of one side; the contour result of the other side remains inaccurate. Therefore, when the width dimension of a groove or boss needs to be obtained, the current detection method struggles to obtain accurate contours on both sides simultaneously, thus failing to obtain reliable width data.

[0057] Combination Figure 2 and Figure 3 To explain, Figure 2 and Figure 3 The measurement module 15 includes a probe 151 and a side rod 152. Please refer to... Figure 2 The groove tilts to the right, and the slope of the right wall surface b decreases relative to the X-axis direction. The slope of the left wall surface a increases beyond the normal operating angle range. Therefore, the contour of the right wall surface b can be accurately measured by the profilometer, but the contour of the left wall surface a cannot be measured normally. Please refer to... Figure 3 The groove tilts to the left, and the slope of the left wall a decreases relative to the X-axis direction. The slope of the right wall b increases beyond the normal operating angle range. Therefore, the profile of the left wall a can be accurately measured by the profiler, but the profile of the right wall b cannot be measured normally by the profiler.

[0058] Furthermore, for complex curved surface samples such as blades, due to their continuously changing curvature, regardless of the placement, there may always be areas where the local slope exceeds the probe's following capability, making accurate measurement impossible, especially at the front a1 and rear b1 positions of the blade. Please refer to [reference needed]. Figure 4 , Figure 4 To obtain the overall initial profile of the blade using a bidirectional scanning profilometer, the front end a1 and rear end b1 of the overall initial profile of the blade have a large slope due to the current placement position and its own curvature, resulting in errors in the obtained profile data.

[0059] To address the aforementioned issues, this application provides a contour measurement method. In this method, contour data of a sample under different postures are acquired. The different postures include a first posture and a second posture. In the first posture, a first target region exists on the sample surface that exceeds the upper limit of the measurement range of the profilometer. In the second posture, the first target region is within the measurement range of the profilometer. The contour data under different postures are stitched together to obtain the final contour data of the sample.

[0060] The following is combined Figure 5 The contour measurement method provided in the embodiments of this application will be described.

[0061] Step S10: Obtain the contour data of the sample under different postures.

[0062] In some embodiments, the different postures include a first posture and a second posture. In the first posture, there is a first target region on the sample surface that exceeds the upper limit of the profilometer's measurement range. In the second posture, the first target region is within the measurement range of the profilometer. The posture change of the sample can be achieved by means of a worktable that can rotate left and right (such as a five-axis motion platform), thereby completing the measurement of the profile data of the sample in different postures.

[0063] For example, a groove exists on the sample surface. The first target area is the left wall of the groove. The first orientation is the groove tilting to the right, and the second orientation is the groove tilting to the left. When the groove tilts to the right, the slope of the left wall increases and exceeds the upper limit of the profilometer's measurement range, meaning the left wall cannot be measured normally. When the groove tilts to the left, the slope of the left wall decreases relative to the X-axis direction, and the left wall falls within the profilometer's measurement range, meaning the left wall can be measured.

[0064] Step S20: Stitch together the contour data under different postures to obtain the final contour data of the sample.

[0065] In some embodiments, the first target region on the sample surface in the first posture exceeds the upper limit of the profilometer's measurement range, but other regions on the sample surface may be within the profilometer's measurement range. In the second posture, the first target region is within the profilometer's measurement range. Therefore, in order to improve the accuracy of the contour data, the contour data in the first posture and the contour data in the second posture can be stitched together. For example, other regions on the sample surface in the first posture and the first target region on the sample surface in the second posture can be stitched together to obtain the final contour data of the sample.

[0066] For example, the contour data of the left wall when the groove is tilted to the left, the data of the right wall when the groove is tilted to the right, and the planar contour data of the groove are spliced ​​together to obtain the final contour data of the sample.

[0067] According to the contour measurement method of the above embodiment, contour data of the sample under different postures are obtained. Since the different postures include a first posture and a second posture, in the first posture, there is a first target area on the sample surface that exceeds the upper limit of the measurement range of the profilometer. In the second posture, the first target area is within the measurement range of the profilometer. By adjusting the posture of the sample so that the first target area is within the measurement range of the profilometer, when stitching the contour data under different postures, the target area within the measurement range of the profilometer can be selected for stitching, thereby improving the accuracy of contour detection and obtaining the final contour data of the sample.

[0068] Please refer to Figure 6 In some embodiments, step S20 involves stitching together contour data under different postures to obtain the final contour data of the sample, including steps S21 to S22, which are described in detail below.

[0069] Step S21: Obtain the feature shape of the sample's contour data under different postures.

[0070] For example, the characteristic shape can be the planar profile of a groove or boss, the corner of a groove or boss, and the point in the blade with the greatest curvature change near the front end. When the blade is tilted to the right, the profile data after this point is beyond the measurement range of the profilometer. This point can be measured by the profilometer when the blade is placed horizontally and when the blade is tilted to the right.

[0071] Step S22: Align the contour data of the sample under different poses based on the feature shape to obtain the final contour data of the sample.

[0072] In some embodiments, the feature shape is a relatively stable feature. Regardless of the sample's orientation, the feature shape remains fixed in the measured contour data. Therefore, the contour data of the sample in different orientations are aligned based on the feature shape. After alignment, the contour data of the sample in different orientations are stitched together. Accurate partial contour data of the sample in different orientations are selected and stitched together to obtain the final contour data of the sample.

[0073] For example, for the groove in the first posture and the groove in the second posture, the corners on the same side of the groove in different postures are used as reference points for alignment, so as to achieve the alignment of the contour data of the groove in the first posture and the contour data of the groove in the second posture. Then, the final contour data of the sample is generated based on the contour data of a part of the groove in the first posture and the contour data of a part of the groove in the second posture.

[0074] In some embodiments, in the first posture, there is a second target region on the sample surface that is within the measurement range of the profilometer; in the second posture, the second target region exceeds the upper limit of the measurement range of the profilometer.

[0075] Based on the characteristic shape, the contour data of the sample under different poses are aligned to obtain the final contour data of the sample, including:

[0076] Based on the characteristic shape, the contour data of the sample under different postures are aligned, and the final contour data of the sample is obtained by stitching the contour data of the second target area on the sample surface under the first posture and the contour data of the first target area on the sample surface under the second posture.

[0077] In some embodiments, in the first orientation, the first target region on the sample surface exceeds the upper limit of the profilometer's measurement range, but the second target region on the sample surface is within the profilometer's measurement range. In the second orientation, the first target region is within the profilometer's measurement range, while the second target region exceeds the upper limit of the profilometer's measurement range. Therefore, after aligning the profile data of the sample in different orientations based on its characteristic shape, the accurate final profile data of the sample is obtained by stitching together the profile data of the second target region on the sample surface in the first orientation and the profile data of the first target region on the sample surface in the second orientation.

[0078] For example, the contour data of the left wall when the groove is tilted to the left, the data of the right wall when the groove is tilted to the right, and the planar contour data of the groove are spliced ​​together to obtain the final contour data of the sample.

[0079] In some embodiments, the sample surface has a groove or a boss, a first target area includes a first sidewall of the groove or boss, a second target area includes a second sidewall of the groove or boss, and the characteristic shape includes planar contours on both sides of the groove or boss and corners on both sides of the groove or boss.

[0080] Please refer to Figure 7 The contour data of the sample under different postures are aligned based on the feature shape, and the final contour data of the sample is obtained by stitching the contour data of the second target area on the sample surface under the first posture and the contour data of the first target area on the sample surface under the second posture. This includes steps S221a to S221b, which are described in detail below.

[0081] Step S221a: Use the planar contours on both sides of the groove or boss in different postures as reference lines to align the contour data of the groove or boss in different postures.

[0082] Please refer to Figure 8 In some embodiments, contour data a2 corresponds to the first sidewall of the groove, i.e., the left sidewall, and contour data b2 corresponds to the second sidewall of the groove, i.e., the right sidewall. Figure 8 The contour data in (a) is taken with the groove tilted to the right (see [reference]). Figure 2The measurement was taken at this point, and the right contour b2 corresponding to the right side wall of the groove is accurate. Figure 8 The contour data in (b) is taken when the groove is tilted to the left (see Figure 1). Figure 3 The measurement was taken at this point, and the right contour a2 corresponding to the left wall of the groove is accurate. Please refer to... Figure 9 In (a), the contour data of the groove in the right-tilted position is represented in green, and the contour data of the groove in the left-tilted position is represented in red. The planar contours on both sides of the groove in different positions should be at the same height. Therefore, the planar contours on both sides of the groove in different positions are used as the reference line to align the contour data, thereby straightening and aligning the data, so that the contour data in the two different positions are adjusted to the same reference height to eliminate the height difference.

[0083] Step S221b: Use the corners on the same side of the contour data of different postures after the groove or boss is aligned as reference points to align the contour data of different postures after alignment, and stitch the contour data of the second side wall of the sample surface in the first posture and the contour data of the first side wall of the sample surface in the second posture to obtain the final contour data of the sample.

[0084] In some embodiments, due to the lack of a horizontal reference, it is difficult to achieve data alignment in the horizontal direction using only planar contours. Therefore, the corners on the same side of the contour data in different postures after alignment of the groove or boss are used as reference points to align the contour data. This is because when the probe scans to the corner of the sample, due to the abrupt change in the surface normal, the contour data obtained by measurement will inevitably show a turning point at that corner, regardless of the posture. This turning point will remain fixed regardless of whether the actual shape of the subsequent contour is accurate. By aligning the two corners, precise alignment of the two sets of contour data can be achieved, obtaining accurate overall contour data describing the groove. Accurate dimensional parameters, such as groove width, can then be obtained using the aligned contour data.

[0085] For example, please return to the reference. Figure 9 In (a), reference points c and d represent two corners on the same side of the contour data under different orientations. Please refer to [reference needed]. Figure 9 In (b), reference points c and d coincide, and the contour data under different poses also coincide accordingly. Please refer to... Figure 9In step (c), the right wall of the contour data of the groove in a right-tilted position and the left wall of the contour data of the groove in a left-tilted position are spliced ​​together. At the same time, the planar contour data is also spliced ​​together to obtain the final overall contour data. Among them, the planar contour data in any position can be used for splicing because the corresponding plane usually does not exceed the measurement range and can be measured normally, regardless of the position. The key is to select the positions of the first and second side walls of the groove.

[0086] In some embodiments, the measurement process for bosses is similar to that for grooves, and will not be described again here. The measurement and splicing process for grooves or bosses can be saved as a template. For subsequent measurements of grooves of the same specifications, the system can manually or automatically adjust the worktable based on the profilometer measurement process stored in the template (for example, the template can record the required tilt angle of the groove and automatically rotate the electrically tiltable worktable at that angle) to achieve the required tilt posture. This allows the system to acquire multiple measurement data points based on the placement of the groove or boss on the worktable and the steps described above when measuring grooves or bosses (grooves at the same location on the same batch of workpieces). Subsequently, the system automatically matches the preset baselines and reference points in the template with the corresponding relative positions in the current groove measurement data, achieving automatic splicing of the measurement data and automating the entire measurement and splicing process.

[0087] In some embodiments, in a first posture, there is a second target region on the sample surface that is within the measurement range of the profilometer. In a second posture, the second target region is outside the upper limit of the measurement range of the profilometer. Different postures also include a third posture in which neither the first target region nor the second target region is within the measurement range of the profilometer.

[0088] Based on the characteristic shape, the contour data of the sample under different poses are aligned to obtain the final contour data of the sample, including:

[0089] Based on the characteristic shape, the contour data of the sample under different postures are aligned, and the final contour data of the sample is obtained by stitching together the contour data of the second target area on the sample surface under the first posture, the contour data of the first target area on the sample surface under the second posture, and the contour data of the sample surface under the third posture.

[0090] In some embodiments, for complex curved surface samples such as blades, due to their continuously changing curvature, regardless of the placement orientation, there may always be areas where the local slope exceeds the probe's following capability, making accurate measurement impossible. Therefore, the overall contour data of the sample can be acquired first in one orientation (e.g., the third orientation), and then the sample's orientation can be changed (e.g., the first / second orientation) to reduce the local slope in areas exceeding the upper limit of the profilometer's measurement range, thereby obtaining accurate local contour data. Finally, the overall and local contour data of the sample can be stitched together to obtain the complete and accurate contour data required for the sample measurement.

[0091] In some embodiments, for areas with large curvature that cannot be accurately measured in one measurement (commonly at the ends of blades), the actual slope of the area is reduced by adjusting the placement posture, such as tilting the blade, to obtain accurate contour data for that local area. This can be done by adjusting the measurement one by one, that is, by adjusting the placement posture one by one to obtain local contours that can accurately describe each area. Taking the left end of the blade (i.e., the front end of the blade) as an example, adjusting the worktable to tilt the blade to the right creates a placement angle where the left end is higher than the right end. This can effectively reduce the slope of the area at the left end of the blade, bringing it within the normal measurement range of the probe, and controlling the probe to start measuring to obtain contour data that can accurately describe that local area.

[0092] Please return to the reference. Figure 4 In some embodiments, Figure 4 This provides the overall profile data of the blade in its third attitude, which can be acquired using a two-way scanning profilometer. Figure 4 Region a1 is the first target region, i.e., the front end of the blade, and region b1 is the second target region, i.e., the rear end of the blade. Regions a1 and b1 exceed the climbing ability of the probe in the current attitude and are both outside the normal measurement range of the profilometer. It is clear that the profilometer data on both sides contains errors. Please refer to... Figure 10 , Figure 10 The first target region of the sample in the first posture (i.e., the blade tip) is within the normal measurement range of the profilometer and represents accurate local profile data.

[0093] In some embodiments, the sample is a blade, the first target region is the first end of the blade, and the second target region is the second end of the blade. The first end and the second end can be either the front end or the rear end of the blade, respectively. When the first end is the front end, the second end is the rear end; when the first end is the rear end, the second end is the front end. The characteristic shape is a position point in the contour data, and in the third posture, the contour data of the side closer to the first end or the side closer to the second end of this position point exceeds the measurement range of the profilometer. Specifically, the characteristic shape is the critical curvature inflection point at the transition position where the front or rear end of the blade intersects with the blade profile. This point indicates that when measured in the third posture, it will exceed the probe's climbing ability when near the front or rear end, and the contour is clear and the characteristic is unique in the first or second posture. Therefore, this point is designated as the characteristic shape of the two measurement data as a common splicing reference position. Optionally, the selection of the characteristic shape in the measurement of a boss or groove can also follow a similar method, for example, the characteristic shape is the critical inflection point at the intersection of the sidewall of the groove or boss with the two side planes. Please refer to... Figure 11 Based on the characteristic shape, the contour data of the sample under different postures are aligned, and the final contour data of the sample is obtained by stitching together the contour data of the second target area of ​​the sample surface under the first posture, the contour data of the first target area of ​​the sample surface under the second posture, and the contour data of the sample surface under the third posture. This includes steps S222a to S222d, which are explained in detail below.

[0094] Step S222a: Obtain the feature shape in the contour data of the blade surface in the third posture, and take the feature shape close to the second target area as the first reference point. Obtain the corresponding feature shape in the contour data of the blade containing the second target area in the first posture, and take it as the second reference point.

[0095] In some embodiments, the first target region is the second end of the blade, i.e., the rear end of the blade, and the second target region is the first end of the blade, i.e., the front end of the blade. The first posture is a blade tilted to the right, forming a posture with the left end higher than the right end, and the third posture is a blade in a horizontal position. The feature shape in the contour data of the blade surface when in the horizontal position is acquired, and the feature shape near the front end of the blade is used as the first reference point. The corresponding feature shape in the contour data of the blade including the left end when tilted to the right is acquired and used as the second reference point.

[0096] Please refer to Figure 12 In (a), for example, the first reference point is e and the second reference point is f.

[0097] Step S222b: Align the first reference point and the second reference point, adjust the contour data under the first attitude or adjust the contour data of the blade surface under the third attitude until the contour data under the first attitude and the adjusted contour data of the blade surface under the third attitude overlap within the preset selected area, so as to complete the splicing of the contour data of the second target area under the first attitude and the contour data of the blade surface under the third attitude.

[0098] Please refer to Figure 12 (b) and (c) in the text. Figure 12 In (b), it means that the first reference point and the second reference point have been aligned, and the contour data in the first attitude has been adjusted (e.g., rotated) to make it close to the contour data of the blade surface in the third attitude. The rotation process can be implemented manually or by matching, which is not limited here. Figure 12 The reference point in (c) is aligned, and the contour data of the blade surface in the first attitude and the third attitude within the selected area can be matched to achieve stitching. The contour data in this selected area are all accurately measured within the normal measurement range of the profilometer in both the first and third attitudes.

[0099] Step S222c: Obtain the feature shape in the contour data of the blade surface in the third posture, and take the feature shape close to the first target area as the third reference point. Obtain the corresponding feature shape in the contour data of the blade containing the first target area in the second posture, and take it as the fourth reference point.

[0100] Step S222d: Align the third reference point and the fourth reference point, adjust the contour data under the second attitude or adjust the contour data of the blade surface under the third attitude until the contour data under the second attitude and the adjusted contour data of the blade surface under the third attitude overlap within the preset selected area, so as to complete the splicing of the contour data of the first target area under the second attitude and the contour data of the blade surface under the third attitude.

[0101] In some embodiments, the implementation of steps S222c to S222d is similar to that of steps S222a to S222b, and will not be described again here.

[0102] In some embodiments, the sample is a blade, the first target region is the first end of the blade, and the second target region is the second end of the blade. The first end and the second end can be either the front end or the rear end of the blade, respectively. When the first end is the front end, the second end is the rear end; when the first end is the rear end, the second end is the front end. The feature shape includes a first common region and a second common region. The first common region is the region shared by the contour data of the blade in the first posture and the contour data of the blade surface in the third posture, and conforms to a preset feature. The second common region is the region shared by the contour data of the blade in the second posture and the contour data of the blade surface in the third posture, and conforms to a preset feature. The preset feature is a contour segment that can be accurately measured in both the first and third postures, or in both the first and second postures, thereby ensuring that the corresponding contour data of these two postures can overlap subsequently.

[0103] Please refer to Figure 13 Based on the characteristic shape, the contour data of the sample under different postures are aligned, and the final contour data of the sample is obtained by stitching together the contour data of the second target area of ​​the sample surface under the first posture, the contour data of the first target area of ​​the sample surface under the second posture, and the contour data of the sample surface under the third posture. This includes steps S223a to S223b, which are described in detail below.

[0104] Step S223a: Match the contour data of the blade in the first common area under the first posture with the contour data of the blade surface in the third posture of the blade in the first common area to complete the splicing of the region corresponding to the second target area in the contour data of the blade in the first posture and the contour data of the blade surface in the third posture.

[0105] Please refer to Figure 14 (a) and Figure 14 In (b) of the above, in some embodiments, instead of manually selecting a reference point, a matching algorithm, such as least squares fitting or iterative nearest point, is performed on the contour data within the two matching regions based on the common area (the area enclosed by the box in the figure) to achieve optimal alignment, thereby completing the precise splicing of the two sets of contour data.

[0106] Step S223b: Match the contour data of the blade in the second common area under the second attitude with the contour data of the blade surface in the third attitude of the blade in the second common area to complete the splicing of the region corresponding to the first target area in the contour data of the blade in the second attitude and the contour data of the blade surface in the third attitude.

[0107] In some embodiments, the splicing process in step S223b is similar to that in step S223a, and will not be described again here. Accurate overall profile data of the blade can be obtained through the splicing process from steps S223a to S223b.

[0108] In some embodiments, the splicing process of steps S223a to S223b can be stored in a template. When measuring blades of the same specification, the system can obtain measurement data according to the measurement method in the template, and then match the measurement data of the current blade with the position of the preset common area in the template, thereby completing the splicing of the measurement data of the current blade and realizing the automation of the splicing process.

[0109] Please refer to Figure 15 In one embodiment, a contour measuring device is provided, comprising:

[0110] Data acquisition module 100 (e.g.) Figure 1 The profilometer body shown is used to acquire profile data of a sample in different postures; wherein, the different postures include a first posture and a second posture. In the first posture, there is a first target region on the sample surface that exceeds the upper limit of the measurement range of the profilometer. In the second posture, the first target region is within the measurement range of the profilometer.

[0111] The data stitching module 200 (such as a host computer) is used to stitch contour data under different postures to obtain the final contour data of the sample.

[0112] In some embodiments, the data stitching module 200 is used to stitch contour data under different postures to obtain the final contour data of the sample, including: acquiring the feature shapes of the contour data of the sample under different postures; aligning the contour data of the sample under different postures based on the feature shapes to obtain the final contour data of the sample.

[0113] For example, the characteristic shape can be the planar profile of a groove or boss, the corner of a groove or boss, and the point in the blade with the greatest curvature change near the front end. When the blade is tilted to the right, the profile data after this point is beyond the measurement range of the profilometer. This point can be measured by the profilometer when the blade is placed horizontally and when the blade is tilted to the right.

[0114] In some embodiments, the feature shape is a relatively stable feature. Regardless of the sample's orientation, the feature shape remains fixed in the measured contour data. Therefore, the contour data of the sample in different orientations are aligned based on the feature shape. After alignment, the contour data of the sample in different orientations are stitched together. Accurate partial contour data of the sample in different orientations are selected and stitched together to obtain the final contour data of the sample.

[0115] For example, for the groove in the first posture and the groove in the second posture, the corners on the same side of the groove in different postures are used as reference points for alignment, so as to achieve the alignment of the contour data of the groove in the first posture and the contour data of the groove in the second posture. Then, the final contour data of the sample is generated based on the contour data of a part of the groove in the first posture and the contour data of a part of the groove in the second posture.

[0116] In some embodiments, in the first posture, there is a second target region on the sample surface that is within the measurement range of the profilometer, and in the second posture, the second target region exceeds the upper limit of the measurement range of the profilometer; the data stitching module 200 is further configured to align the profile data of the sample in different postures based on the feature shape to obtain the final profile data of the sample, including: aligning the profile data of the sample in different postures based on the feature shape, and stitching the profile data of the second target region on the sample surface in the first posture and the profile data of the first target region on the sample surface in the second posture to obtain the final profile data of the sample.

[0117] In some embodiments, in the first orientation, the first target region on the sample surface exceeds the upper limit of the profilometer's measurement range, but the second target region on the sample surface is within the profilometer's measurement range. In the second orientation, the first target region is within the profilometer's measurement range, while the second target region exceeds the upper limit of the profilometer's measurement range. Therefore, after aligning the profile data of the sample in different orientations based on its characteristic shape, the accurate final profile data of the sample is obtained by stitching together the profile data of the second target region on the sample surface in the first orientation and the profile data of the first target region on the sample surface in the second orientation.

[0118] For example, the contour data of the left wall when the groove is tilted to the left, the data of the right wall when the groove is tilted to the right, and the planar contour data of the groove are spliced ​​together to obtain the final contour data of the sample.

[0119] In one embodiment, a computer device is provided, including a memory and a processor, the memory for storing a program and the processor for implementing a contour measurement method by executing the program stored in the memory.

[0120] In one embodiment, a computer program product is provided, including a computer program and / or instructions, which implement a contour measurement method when executed by a processor.

[0121] In the above embodiments, implementation can be achieved, in whole or in part, by software, hardware, firmware, or any combination thereof. Furthermore, as those skilled in the art will understand, the principles herein can be reflected in a computer program product on a computer-readable storage medium pre-loaded with computer-readable program code. Any tangible, non-transitory computer-readable storage medium may be used, including magnetic storage devices (hard disks, floppy disks, etc.), optical storage devices (CDs, DVDs, Blu-ray discs, etc.), flash memory, and / or the like. These computer program instructions can be loaded onto a general-purpose computer, a special-purpose computer, or other programmable data processing apparatus to form a machine, such that instructions executing on the computer or other programmable data processing apparatus can generate means for performing a specified function. These computer program instructions can also be stored in a computer-readable storage medium that can instruct the computer or other programmable data processing apparatus to operate in a particular manner, such that instructions stored in the computer-readable storage medium can form an article of manufacture, including means for implementing the specified function. The computer program instructions can also be loaded onto a computer or other programmable data processing apparatus to perform a series of operational steps on the computer or other programmable apparatus to produce a computer-implemented process, such that instructions executing on the computer or other programmable apparatus can provide steps for implementing the specified function.

[0122] This document describes various exemplary embodiments with reference to them. However, those skilled in the art will recognize that changes and modifications can be made to the exemplary embodiments without departing from the scope of this document. For example, various operational steps and components for performing operational steps can be implemented in different ways depending on the specific application or considering any number of cost functions associated with the operation of the system (e.g., one or more steps can be deleted, modified, or combined with other steps).

[0123] While the principles herein have been illustrated in various embodiments, numerous modifications to the structures, arrangements, proportions, elements, materials, and components, particularly suited to specific environments and operational requirements, may be used without departing from the principles and scope of this disclosure. These modifications and other alterations or alterations will be included within the scope of this document. Those skilled in the art will recognize that many changes can be made to the details of the above embodiments without departing from the fundamental principles of the invention.

Claims

1. A contour measurement method, characterized in that, include: Acquire contour data of a sample in different postures; wherein, the different postures include a first posture and a second posture, in the first posture, there is a first target region on the sample surface that exceeds the upper limit of the measurement range of the profilometer, and in the second posture, the first target region is within the measurement range of the profilometer; Contour data from different poses are stitched together to obtain the final contour data of the sample.

2. The contour measurement method as described in claim 1, characterized in that, The process of stitching together contour data from different poses to obtain the final contour data of the sample includes: The feature shape of the sample's contour data under different postures is obtained; Based on the characteristic shape, the contour data of the sample under different postures are aligned to obtain the final contour data of the sample.

3. The contour measurement method as described in claim 2, characterized in that, In the first posture, there is a second target region on the sample surface that is within the measurement range of the profilometer; in the second posture, the second target region exceeds the upper limit of the measurement range of the profilometer. The step of aligning the contour data of the sample under different poses based on the characteristic shape to obtain the final contour data of the sample includes: Based on the characteristic shape, the contour data of the sample under different postures are aligned, and the final contour data of the sample is obtained by splicing the contour data of the second target area on the sample surface under the first posture and the contour data of the first target area on the sample surface under the second posture.

4. The contour measurement method as described in claim 3, characterized in that, The sample surface has grooves or protrusions, the first target area includes a first sidewall of the groove or protrusion, the second target area includes a second sidewall of the groove or protrusion, and the feature shape includes the planar contours on both sides of the groove or protrusion and the corners on both sides of the groove or protrusion. The step of aligning the contour data of the sample in different postures based on the characteristic shape, and stitching the contour data of the second target region on the sample surface in the first posture and the contour data of the first target region on the sample surface in the second posture to obtain the final contour data of the sample, includes: Use the planar contours on both sides of the groove or boss in different postures as a baseline to align the contour data of the groove or boss in different postures. Using the corners on the same side of the contour data in different postures after the grooves or bosses are aligned as reference points, the contour data in different postures after alignment are aligned, and the final contour data of the sample is obtained by splicing the contour data of the second side wall of the sample surface in the first posture and the contour data of the first side wall of the sample surface in the second posture.

5. The contour measurement method as described in claim 2, characterized in that, In the first posture, there is a second target area on the sample surface that is within the measurement range of the profilometer. In the second posture, the second target area exceeds the upper limit of the measurement range of the profilometer. The different postures also include a third posture in which neither the first target area nor the second target area is within the measurement range of the profilometer. The step of aligning the contour data of the sample under different poses based on the characteristic shape to obtain the final contour data of the sample includes: Based on the characteristic shape, the contour data of the sample under different postures are aligned, and the final contour data of the sample is obtained by stitching together the contour data of the second target area of ​​the sample surface under the first posture, the contour data of the first target area of ​​the sample surface under the second posture, and the contour data of the sample surface under the third posture.

6. The contour measurement method as described in claim 5, characterized in that, The sample is a blade, the first target area is the first end of the blade, the second target area is the second end of the blade, the feature shape is a position point in the contour data, and in the third posture, the contour data of the side of the position point closer to the first end or the side closer to the second end is outside the measurement range of the profilometer. The process of aligning the contour data of the sample in different postures based on the feature shape, and stitching together the contour data of the second target area of ​​the sample surface in the first posture, the contour data of the first target area of ​​the sample surface in the second posture, and the contour data of the sample surface in the third posture to obtain the final contour data of the sample, includes: The feature shape of the blade in the contour data of the blade surface in the third posture is obtained, and the feature shape near the second target area is used as the first reference point. The corresponding feature shape of the blade in the contour data containing the second target area in the first posture is obtained and used as the second reference point. Align the first reference point and the second reference point, adjust the contour data under the first posture or adjust the contour data of the blade surface under the third posture until the contour data under the first posture and the contour data of the blade surface under the third posture overlap in the preset selected area, so as to complete the splicing of the contour data of the second target area under the first posture and the contour data of the blade surface under the third posture. The feature shape of the blade in the contour data of the blade surface in the third posture is obtained, and the feature shape close to the first target area is used as the third reference point. The corresponding feature shape of the blade in the contour data containing the first target area in the second posture is obtained and used as the fourth reference point. Align the third reference point and the fourth reference point, adjust the contour data under the second posture or adjust the contour data of the blade surface under the third posture until the contour data under the second posture and the adjusted contour data of the blade surface under the third posture coincide within the preset selected area, so as to complete the splicing of the contour data of the first target area under the second posture and the contour data of the blade surface under the third posture.

7. The contour measurement method as described in claim 5, characterized in that, The sample is a blade, the first target area is the first end of the blade, the second target area is the second end of the blade, and the feature shape includes a first common area and a second common area. The first common area is the area that is common to the contour data of the blade in the first posture and the contour data of the blade surface in the third posture and conforms to the preset features. The second common area is the area that is common to the contour data of the blade in the second posture and the contour data of the blade surface in the third posture and conforms to the preset features. The step of aligning the contour data of the sample in different postures based on the characteristic shape, and stitching together the contour data of the second target region of the sample surface in the first posture, the contour data of the first target region of the sample surface in the second posture, and the contour data of the sample surface in the third posture to obtain the final contour data of the sample, includes: The contour data of the blade in the first common area under the first posture is matched with the contour data of the blade surface in the third posture of the blade in the first common area to complete the splicing of the region corresponding to the second target area in the contour data of the blade in the first posture and the contour data of the blade surface in the third posture. The contour data of the blade in the second common area under the second posture is matched with the contour data of the blade surface in the third posture of the blade in the second common area to complete the splicing of the region corresponding to the first target area in the contour data of the blade in the second posture and the contour data of the blade surface in the third posture.

8. A contour measuring device, characterized in that, include: The data acquisition module is used to acquire the contour data of the sample under different postures; wherein, the different postures include a first posture and a second posture, in the first posture, there is a first target area on the sample surface that exceeds the upper limit of the measurement range of the profilometer, and in the second posture, the first target area is within the measurement range of the profilometer; The data stitching module is used to stitch together contour data under different postures to obtain the final contour data of the sample.

9. A computer device comprising a memory and a processor, the memory being used to store a program, characterized in that, The processor is used to implement the contour measurement method as described in any one of claims 1-7 by executing the program stored in the memory.

10. A computer program product comprising a computer program and / or instructions, characterized in that, When the computer program and / or instructions are executed by the processor, they implement the contour measurement method as described in any one of claims 1-7.

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