Vacuum-gas linkage fluid regulation system

Abstract

The application discloses a vacuum-gas linkage fluid regulation system and belongs to the technical field of fluid pressure and flow servo regulation. In view of the defects of poor air flow distribution uniformity, slow working condition parameter switching, and complex system structure caused by the need for external buffer elements of the existing centralized air path architecture, the application adopts array-arranged coaxial opposed blowing and sucking execution units, each unit being a three-layer coaxial nested structure: a positive pressure gas supply unit is arranged in the inner layer, and a negative pressure air extraction unit is arranged in the middle layer; the opening degree of each unit valve is synchronously adjusted through a multi-channel fluid servo controller, so that the radial positive pressure momentum generated by the process air flow impacting the workpiece surface and the radial negative pressure momentum generated by the annular air extraction are in-situ vector canceled in the local action layer. The application can realize high-precision flow field regulation without external buffer elements, has high air flow uniformity, fast working condition switching speed, and has air gap self-adaptive capacity, and is suitable for flexible production requirements of multiple types of workpieces.

Description

Technical Field

[0001] This invention belongs to the field of servo control technology of fluid pressure and flow in pneumatic systems, specifically a vacuum-gas linkage fluid control system. Background Technology

[0002] Currently, vacuum fluid systems for handling large-area workpieces generally adopt a centralized gas path architecture: the entire chamber is connected to the process gas source and vacuum pipeline, and the overall pressure and total gas flow rate of the chamber are regulated by the main pipeline valve. Typical existing technologies, such as the gas path system of conventional vacuum processing equipment, adopt an integral chamber structure, with the process gas centrally introduced at the top and the vacuum centrally evacuated at the bottom, relying on the main pipeline valve to achieve global pressure and flow rate control.

[0003] This centralized gas path architecture has the following inherent technical drawbacks in actual production: First, the airflow distribution uniformity is poor. In the single-point source air intake and overall air extraction modes, there are natural pressure gradients and gas concentration gradients in the chamber. The processing intensity of the edge area and the center area of ​​large-area workpieces is significantly different, making it difficult to ensure the quality consistency of batch products. Moreover, the contour occlusion of the workpiece itself will further aggravate the distortion of the local flow field, and the processing quality of irregularly shaped workpieces will fluctuate more.

[0004] Second, the efficiency of switching operating parameters is low. Different types of workpieces correspond to different process gas flow rates and vacuum parameters. When switching, it is necessary to wait for the entire large-volume chamber to reach pressure balance again, which results in a long transition time and a large number of defective products during the transition period. When frequently switching product types, the effective utilization rate of the equipment drops significantly, making it difficult to adapt to the flexible production needs of multiple product types and small batches.

[0005] Third, the system has a complex structure and high energy consumption. To suppress pressure fluctuations, the existing solution requires the addition of external pressure suppression components such as buffer tanks, pressure regulating valves, and accumulators to the main pipeline, resulting in large equipment size and complex pipeline connections. In addition, to compensate for leakage and pressure fluctuations in the large chamber, the vacuum pump and gas source need to be configured with large power redundancy, resulting in high operating energy consumption and gas consumption.

[0006] To address the issue of localized efficiency in airflow control, the field of general fluid components employs coaxial jet nozzle technology, such as the publicly disclosed annular gas jet nozzle. This nozzle utilizes a three-layer coaxial cylinder structure with high-pressure air intake at the center and an outer annular suction layer, leveraging the Venturi jet effect to enhance suction capacity. However, the core purpose of this technology is to improve suction efficiency, and its operating principle is completely opposite to the pressure stability requirements in the surface treatment field. Furthermore, it is merely a single fluid functional element, lacking the design for arrayed arrangement and multi-unit linkage control. It cannot solve the problem of uniformity in processing large-area workpieces, nor does it possess the ability for rapid switching of operating conditions and adaptive air gap compensation, thus failing to meet the multi-dimensional needs of flexible manufacturing.

[0007] In addition, while the partitioned air intake technology used in some precision processing fields can improve uniformity to a certain extent, it still belongs to the centralized chamber architecture of "partitioned air intake + overall air extraction". The air intake and extraction are not on the same axis and in different positions, so it cannot achieve in-situ pressure cancellation. Moreover, the equipment cost is high and the control complexity is large, making it difficult to be directly applied to low-cost, large-scale industrial production scenarios.

[0008] In summary, existing vacuum-gas fluid control systems are always limited by the inherent technical approach of "centralized control + external buffering," which cannot simultaneously take into account processing uniformity, operating condition switching speed, structural simplicity, and operational stability, thus becoming a technical bottleneck restricting the improvement of flexible production efficiency in the surface treatment industry. Summary of the Invention

[0009] The purpose of this invention is to provide a vacuum-gas linkage fluid control system. This invention utilizes the in-situ momentum cancellation mechanism of coaxial opposing airflow and suction and the self-balancing structure of intercavity throttling to achieve high-precision flow field control without external buffering elements. It simultaneously improves the uniformity of airflow distribution, the speed of operating condition switching and the adaptive capability of air gap, while simplifying the system structure, reducing operating energy consumption and maintenance costs, and adapting to the flexible production needs of multiple product categories.

[0010] The technical solution adopted in this invention is as follows: A vacuum-gas linkage fluid control system includes several coaxially opposed blow-suction actuators arranged in an array, each coaxially opposed blow-suction actuator corresponding to a local area of ​​the surface of the workpiece to be processed; Each coaxial opposing blow-suction actuator is a three-layer cylindrical structure nested coaxially from top to bottom: the inner layer is a positive pressure air supply unit, including a positive pressure gas distribution chamber, a miniature positive pressure proportional valve, and a central nozzle. The miniature positive pressure proportional valve is integrated into the top air inlet of the positive pressure gas distribution chamber, and the central nozzle is located at the bottom center of the positive pressure gas distribution chamber with the nozzle pointing vertically downwards; the middle layer is a negative pressure air extraction unit, coaxially arranged around the outside of the positive pressure air supply unit, including a negative pressure air collection chamber, a miniature negative pressure proportional valve, and an annular air extraction slit. The miniature negative pressure proportional valve is integrated into the top air outlet of the negative pressure air collection chamber, and the annular air extraction slit is located at the lower end of the negative pressure air collection chamber, with the slit converging obliquely inwards and upwards; the outer layer is an insulating mounting shell, coaxially wrapped around the outside of the negative pressure air extraction unit; It also includes a multi-channel fluid servo controller, which is electrically connected to each micro positive pressure proportional valve and each micro negative pressure proportional valve respectively. The multi-channel fluid servo controller synchronously adjusts the opening of the micro positive pressure proportional valve and the micro negative pressure proportional valve of the same coaxial opposing blow-suction actuator, so that the radial outward positive pressure momentum generated by the process airflow ejected from the central nozzle after impacting the workpiece surface is in situ vectorally canceled out by the radial inward negative pressure momentum generated by the suction of the annular suction slit in the local action layer above the workpiece surface.

[0011] Preferably, the angle between the centerline of the annular suction slit and the vertical direction is 30° to 45°.

[0012] Preferably, the vertical distance between the lower end face of the coaxial opposing blow-suction actuator and the surface of the shoe material is 10~30mm, and the thickness of the localized action layer is 8~12mm.

[0013] Preferably, the coaxial opposing blow-suction execution units are arranged in a 2-row × 6-column array with a unit spacing of 200mm, covering a shoe material processing station with an overall width of 1200mm.

[0014] Preferably, it is connected to a process gas source and a main vacuum pump and applied to the shoe material processing station inside a vacuum chamber.

[0015] Preferably, each coaxial opposing blow-suction actuator is equipped with a miniature pressure sensor and an optical gas concentration sensor. The signal output terminals of the miniature pressure sensor and the optical gas concentration sensor are both connected to a multi-channel fluid servo controller to form a closed-loop feedback control system.

[0016] Preferably, the side wall of the negative pressure gas collection chamber is provided with a backflush inlet, which is connected to a clean compressed air source through a micro backflush control valve; the control terminal of the micro backflush control valve is connected to a multi-channel fluid servo controller.

[0017] Preferably, the multi-channel fluid servo controller stores multiple sets of process parameter formulas corresponding to different shoe material categories. After the category switching command is issued, all coaxial opposing blowing and suction execution units adjust their parameters synchronously, and the system steady-state reconstruction time is ≤2s.

[0018] Preferably, the multi-channel fluid servo controller has a built-in array weight adjustment module that dynamically adjusts the flow parameters of coaxial opposing blow-suction actuators at different positions according to the size, contour and placement of the shoe material, thereby offsetting the local flow field distortion caused by workpiece obstruction.

[0019] The beneficial effects of this invention are as follows: 1. This invention employs an arrayed coaxial opposing air-suction unit architecture, dividing the large processing area into multiple independently controllable local partitions. Each partition independently matches the air intake and exhaust parameters, structurally eliminating the inherent pressure and concentration gradients in traditional centralized air paths. Unlike conventional approaches in the field that rely on external buffer devices to suppress pressure fluctuations, this invention utilizes a coaxial opposing structural layout to allow the radial momentum generated by the air intake impacting the wall to be vector-canceled in situ within a thin layer of the shoe material surface. Pressure fluctuations are eliminated at the source, preventing them from spreading into the large chamber space. This "source cancellation instead of external compensation" technical approach breaks through the inherent mindset of existing technologies, simultaneously achieving improved processing uniformity and global chamber pressure stability without increasing system complexity.

[0020] 2. To address the production needs of switching between multiple types of footwear materials, this invention reduces the basic unit of fluid control to a single coaxial opposing blow-suction actuator. The unit's air volume is much smaller than that of a traditional integral chamber, and the proportional valve is directly integrated into the unit body, significantly shortening the air path. More importantly, thanks to the local momentum cancellation mechanism, the flow adjustment of a single unit will not trigger a chain reaction of global pressure fluctuations. After all units adjust their parameters synchronously, they can enter a stable operating condition without waiting for the large chamber to rebalance. This array-based linkage control method breaks the conventional understanding that "multi-unit distributed structures inevitably prolong adjustment time," instead significantly compressing the transition process of product switching and better adapting to flexible production scenarios with multiple varieties and small batches.

[0021] 3. To address the inherent sensitivity of the local thin-layer action mechanism of this invention to air gap fluctuations, this invention incorporates a throttling balance orifice on the shared cavity partition wall of the positive pressure gas distribution chamber and the negative pressure gas collection chamber. This utilizes the self-feedback characteristic of the pressure difference between the two chambers to achieve passive adaptive compensation. When changes in the air gap occur due to shoe material warping, thickness deviation, or transmission jitter, the change in nozzle back pressure is synchronously transmitted to the negative pressure chamber through the throttling orifice, automatically matching the pumping flow rate and maintaining a constant radial momentum offset ratio. Compared to the active compensation method using a ranging sensor and dynamic actuator in existing technologies, this structure requires no additional detection or control components. Automatic correction of air gap fluctuations is achieved solely through improvements to the internal cavity structure. This is a non-obvious, self-balancing effect, and its operational reliability is far superior to complex active control systems.

[0022] 4. Regarding system structure and long-term operational stability, this invention eliminates the reliance on external pressure suppression components, removing essential components such as buffer tanks, pressure regulating valves, and accumulators found in traditional solutions. This simplifies the piping system and reduces equipment size and potential failure points. Simultaneously, by appropriately widening the annular extraction slit and combining it with a timed backflushing self-cleaning structure, the engineering risk of dust accumulation and clogging in slit-type structures is effectively mitigated. Contrary to the conventional expectation that "structural simplification inevitably sacrifices operational stability," this invention, while streamlining external components, improves long-term continuous operation reliability and reduces daily maintenance workload and system energy consumption through internal mechanism optimization and embedded self-cleaning design. Attached Figure Description

[0023] Figure 1 This is a block diagram of the overall architecture of the vacuum-gas linkage fluid control system described in an embodiment of the present invention; Figure 2 This is a schematic diagram of the axial cross-sectional structure of the coaxial opposing blow-suction actuator according to an embodiment of the present invention; Figure 3 This is a flowchart illustrating the working process of the system of the present invention.

[0024] In the picture: 1. Main vacuum pump; 2. Process gas source; 3. Main pipeline; 4. Multi-channel fluid servo controller; 5. Coaxial opposing blow-suction actuator; 51. Positive pressure gas distribution chamber; 52. Miniature positive pressure proportional valve; 53. Center nozzle; 54. Negative pressure gas collection chamber; 55. Miniature negative pressure proportional valve; 56. Annular suction slit; 57. Insulated mounting housing; 58. Mounting and fixing flange; 59. Backflush inlet; 510. Throttling balance hole; 8. Footwear material processing station; 9. Miniature backflush control valve. Detailed Implementation

[0025] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining the present invention and are not intended to limit the present invention.

[0026] The vacuum-gas linkage fluid control system described in this embodiment is applied to a continuous plasma surface treatment production line for shoe materials with a width of 1200mm. It is suitable for surface activation and modification treatment of various types of shoe materials, including top-grain cowhide, polyester fabric, rubber soles, and EVA midsoles. The system as a whole is a closed-loop fluid pressure servo architecture controlled by electro-pneumatic proportional valves.

[0027] like Figure 1 As shown, the system adopts a four-layer modular layout, from bottom to top, consisting of the basic power layer, linkage servo control layer, sensing feedback layer, and execution layer, from power supply to terminal execution.

[0028] The basic power layer includes a main vacuum pump 1 and a process gas source 2, both connected to the corresponding circuits of the upper execution layer via main pipeline 3. The main pipeline 3 is a DN25 stainless steel pipe, without any external pressure suppression components such as buffer tanks, pressure regulating valves, or accumulators. The main vacuum pump 1 and process gas source 2 are only used to output a stable basic pressure and do not participate in dynamic flow regulation. In this embodiment, the main vacuum pump 1 is a rotary vane vacuum pump with a rated pumping speed of 10m / s. 3 / h, providing a basic vacuum of -5kPa; process gas source 2 is a process gas of argon and oxygen mixed in a certain proportion, with a stable supply pressure of 0.2MPa.

[0029] The linkage servo control layer is equipped with a multi-channel fluid servo controller 4. The control cycle of the multi-channel fluid servo controller 4 is no more than 5ms. It has a built-in process parameter recipe module that can be stored and recalled, an array weight adjustment module, and a timed backflush control module. The multi-channel fluid servo controller 4 outputs independent positive pressure valve control signals, negative pressure valve control signals, and backflush control signals to each valve in the execution layer, and receives real-time detection signals from the sensing feedback layer, forming a complete closed-loop feedback control system.

[0030] The sensing feedback layer is equipped with a miniature pressure sensor and an optical gas concentration sensor for each execution unit. The sampling frequency of the two types of sensors is not less than 200Hz, which is used to collect pressure and active gas concentration data in the corresponding unit's working area in real time, and feed the detection signal back to the multi-channel fluid servo controller 4.

[0031] The execution layer is positioned directly above the shoe material processing station 8, and consists of several coaxially opposed blowing and suction execution units 5 arranged in an array. In this embodiment, 12 coaxially opposed blowing and suction execution units 5 are used in 2 rows × 6 columns, with a horizontal spacing of 200mm between the units, uniformly covering the 1200mm wide shoe material processing station 8. The vertical distance between the lower end face of each coaxially opposed blowing and suction execution unit 5 and the surface of the shoe material below is 10~30mm, and in this embodiment, a value of 20mm is preferred.

[0032] like Figure 2 As shown, the coaxial opposing blow-suction execution unit 5 is a three-layer coaxial nested cylindrical structure that is rotationally symmetrical about the vertical central axis. From top to bottom, it is divided into three parts: the interface section, the cavity section, and the working end.

[0033] The inner layer is a positive pressure gas supply unit, including a positive pressure gas distribution chamber 51, a miniature positive pressure proportional valve 52, and a central nozzle 53. The positive pressure gas distribution chamber 51 is a cylindrical cavity, and a miniature positive pressure proportional valve 52 is installed at the central interface at its top, which is used to independently adjust the process gas inlet flow rate of the unit; the bottom center of the positive pressure gas distribution chamber 51 contracts inward to form the central nozzle 53, and the nozzle 53 is set vertically downward.

[0034] The middle layer is a negative pressure extraction unit, coaxially arranged around the outer side of the inner positive pressure supply unit. It includes a negative pressure collection chamber 54, a miniature negative pressure proportional valve 55, and an annular extraction slit 56. The negative pressure collection chamber 54 is an annular cavity, with a miniature negative pressure proportional valve 55 installed at its top side interface for independently adjusting the vacuum suction force of the unit. The lower end of the negative pressure collection chamber 54 converges inward, forming a continuous annular extraction slit 56. The width of the annular extraction slit 56 is 1.5~2mm, preferably 1.8mm in this embodiment. The extraction direction of the slit converges obliquely inward and upward, with the angle between the slit's centerline and the vertical central axis being 30°~45°, preferably 35° in this embodiment. Appropriately widening the slit width can effectively reduce the risk of organic volatile matter condensation and fiber dust accumulation and blockage in the slit gaps during the plasma treatment of shoe materials, extending the continuous operation cycle of the equipment.

[0035] On the common cavity partition wall between the positive pressure gas distribution chamber 51 and the negative pressure gas collection chamber 54, 4 to 8 throttling balance holes 510 are uniformly opened along the circumference, with 6 holes preferred in this embodiment. The diameter of the throttling balance holes 510 is 0.3 to 0.8 mm, with 0.5 mm preferred in this embodiment. The throttling balance holes 510 connect the positive pressure gas distribution chamber 51 and the negative pressure gas collection chamber 54, and utilize the self-feedback characteristic of the pressure difference between the two chambers to achieve automatic momentum balance under air gap fluctuations.

[0036] The upper sidewall of the negative pressure air collection chamber 54 is also provided with a backflush inlet 59. The backflush inlet 59 is connected to a clean compressed air source via a pipeline to a micro backflush control valve 9. The control terminal of the micro backflush control valve 9 is connected to a multi-channel fluid servo controller 4, which opens periodically according to a preset cycle to reverse the flow of compressed air into the negative pressure air collection chamber 54. The airflow blows outward from the annular suction slit 56, removing dust and polymer deposits adhering to the inner wall and edges of the slit, thus achieving online self-cleaning.

[0037] The outer layer is an insulating mounting shell 57, which is coaxially wrapped around the outside of the middle negative pressure suction unit and is used for sealing and isolating the internal air passage of the unit and fixing the overall structure. The upper part of the insulating mounting shell 57 extends outward to form an annular mounting flange 58, which is used to fix the coaxial opposing blow-suction execution unit 5 as a whole to the top mounting plate of the equipment chamber.

[0038] See Figure 3 This system achieves local in-situ vector cancellation of fluid momentum through coaxially opposed blow-suction structures and synchronous valve control, and achieves passive adaptive compensation for air gap fluctuations through inter-cavity throttling balance holes. The specific working process is as follows: When the equipment is running normally, the process gas enters the positive pressure gas distribution chamber 51 through the micro positive pressure proportional valve 52, and is ejected vertically downwards by the central nozzle 53 in the form of a columnar positive pressure process gas flow. After the gas flow vertically impacts the shoe material surface below, it diffuses radially outwards along the shoe material surface, forming a thin layer of diffused gas flow that adheres closely to the surface, generating radially outward positive pressure momentum.

[0039] At the same time, the basic negative pressure in the negative pressure collection chamber 54 acts on the surface of the shoe material through the annular suction slit 56, guiding the radially diffused airflow to converge inward. The airflow turns and flows obliquely upward into the annular suction slit 56, forming a suction return airflow and generating radially inward negative pressure momentum.

[0040] The multi-channel fluid servo controller 4 synchronously adjusts the opening of the micro positive pressure proportional valve 52 and the micro negative pressure proportional valve 55 of the same coaxial opposing blow-suction actuator 5, so that the radially outward positive pressure momentum and the radially inward negative pressure momentum are equal in magnitude and opposite in direction, and in-situ vector cancellation is completed in a local action layer with a thickness of about 10mm above the surface of the shoe material.

[0041] When the air gap decreases due to warping, thickness differences, or transmission vibration in the shoe material, the back pressure of the central nozzle 53 increases, and the static pressure in the positive pressure gas distribution chamber 51 rises. At this time, the amount of air supplied from the positive pressure chamber to the negative pressure gas collection chamber 54 automatically increases through the throttling balance hole 510, causing the static pressure in the negative pressure gas collection chamber 54 to rise synchronously. The suction flow rate of the annular suction slit 56 automatically increases to match and maintain a constant radial momentum offset ratio. Conversely, when the air gap increases, the static pressure in the positive pressure chamber decreases, the throttling supply decreases, the pressure in the negative pressure chamber drops synchronously, and the suction flow rate automatically decreases. The entire process requires no sensors or active control; adaptive balance is achieved solely through the self-feedback of the fluid pressure difference.

[0042] With the above structure, the airflow adjustment of a single coaxial opposing blow-suction actuator 5 will not cause fluctuations in the overall pressure of the vacuum chamber, and the adjustment of the vacuum suction force will not cause changes in the gas concentration in the chamber. The pressure side effects caused by flow adjustment are offset at the local source, and the influence of air gap fluctuations is automatically compensated without relying on external buffer devices for compensation, thus achieving high-precision flow field control without secondary costs.

[0043] When the type of footwear material being processed changes, this system achieves rapid steady-state reconstruction according to the following process: The process parameter sets corresponding to different shoe material categories are pre-stored in the formula module of the multi-channel fluid servo controller 4, including single-unit positive pressure flow rate, negative pressure flow rate, and array position weight parameters. After the switching command is issued, the multi-channel fluid servo controller 4 synchronously outputs adjustment signals to the miniature positive pressure proportional valve 52 and miniature negative pressure proportional valve 55 of all coaxial opposing blow-suction actuators 5, and all units adjust their openings synchronously.

[0044] Because pressure vector cancellation is completed instantaneously within the local area, and air gap fluctuations can self-balance, there is no need to wait for the overall chamber pressure to rebalance, and the system's steady-state reconstruction time is ≤2s. During product category switching, the maximum fluctuation amplitude of chamber pressure is ≤±2%, which is much smaller than the ±15% fluctuation amplitude of the traditional centralized solution; the steady-state recovery time is shortened from about 55s in the traditional solution to about 1.5s, almost eliminating non-conforming products during the transition phase.

[0045] Meanwhile, the array weight adjustment module built into the multi-channel fluid servo controller 4 can dynamically adjust the flow parameters of the coaxial opposing blow-suction execution units 5 at different positions according to the size, outline and placement of the shoe material, actively offsetting the local flow field distortion caused by workpiece obstruction, and ensuring the uniformity of processing across the entire width.

[0046] During equipment operation, the timed backflushing control module of the multi-channel fluid servo controller 4 executes a self-cleaning program according to a preset cycle. In this embodiment, it is set to be once every 8 hours, and is started during equipment standby or workpiece changing intervals: 1 second before backflushing starts, the micro positive pressure proportional valve 52 is closed to maintain the residual pressure in the positive pressure gas distribution chamber 51; then, the micro backflushing control valves 9 of all units are opened simultaneously, and 0.3MPa clean compressed air is introduced to continuously purge for 3-5 seconds to remove the dust accumulated in the annular extraction slit; after backflushing ends, the micro positive pressure proportional valve 52 is opened again after a 2-second delay, and the residual pressure in the positive pressure chamber is used to purge the throttling balance hole in the reverse direction before resuming normal operation. The entire process does not affect the normal production rhythm.

[0047] The typical operating parameters for different types of footwear materials in this embodiment are shown in the table below:

[0048] Compared with existing centralized gas path systems, this embodiment achieves the following technical effects: The strength deviation of the plasma treatment on the surface of the shoe material is controlled within 3%, and the accuracy can still be maintained stably within the fluctuation range of ±3mm in the air gap, which is more than 85% higher than the traditional solution, and the batch yield is increased to more than 99.5%. The transition time of process parameters has been shortened from 60s to less than 2s, and the effective utilization rate of equipment has been increased by more than 15%, making it suitable for flexible production needs of multiple categories and small batches. No external components such as buffer tanks and pressure regulating valves are needed, reducing equipment size by 25% and system energy consumption and gas consumption by 10% to 15%. By combining slit width optimization with timed backflushing self-cleaning, the continuous maintenance-free operation time of the equipment has been extended from 7 days in the traditional structure to more than 30 days, and the daily maintenance workload has been significantly reduced. Without the need for additional ranging and adjustment mechanisms, it can automatically compensate for the effects of shoe material warping, thickness differences, and transmission bounce, and its adaptability to different types of substrates is significantly better than conventional solutions.

[0049] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A vacuum-gas linkage fluid control system, characterized in that: It includes several coaxially opposed blow-suction execution units (5) arranged in an array, each coaxially opposed blow-suction execution unit (5) corresponding to a local area of ​​the surface of the workpiece to be processed; Each coaxial opposing blow-suction actuator (5) is a three-layer cylindrical structure coaxially nested from top to bottom: the inner layer is a positive pressure gas supply unit, including a positive pressure gas distribution chamber (51), a micro positive pressure proportional valve (52) and a central nozzle (53). The micro positive pressure proportional valve (52) is integrated at the top air inlet of the positive pressure gas distribution chamber (51), and the central nozzle (53) is located at the bottom center of the positive pressure gas distribution chamber (51), with the nozzle vertically downward; the middle layer is a negative pressure suction unit. The gas unit is coaxially arranged around the outside of the positive pressure gas supply unit, and includes a negative pressure gas collection chamber (54), a miniature negative pressure proportional valve (55) and an annular suction slit (56). The miniature negative pressure proportional valve (55) is integrated into the top gas outlet of the negative pressure gas collection chamber (54), and the annular suction slit (56) is opened at the lower end of the negative pressure gas collection chamber (54). The slit converges obliquely inward and upward. The outer layer is an insulating mounting shell (57), which is coaxially wrapped around the outside of the negative pressure suction unit. It also includes a multi-channel fluid servo controller (4), which is electrically connected to each micro positive pressure proportional valve (52) and each micro negative pressure proportional valve (55). The multi-channel fluid servo controller (4) synchronously adjusts the opening of the micro positive pressure proportional valve (52) and the micro negative pressure proportional valve (55) of the same coaxial opposing blow-suction execution unit (5), so that the radial outward positive pressure momentum generated by the process airflow ejected by the central nozzle (53) after impacting the workpiece surface is in situ vectorly canceled out by the radial inward negative pressure momentum generated by the suction of the annular suction slit (56) in the local action layer above the workpiece surface.

2. The vacuum-gas linkage fluid control system according to claim 1, characterized in that, The angle between the centerline of the annular slit (56) and the vertical direction is 30°~45°.

3. The vacuum-gas linkage fluid control system according to claim 1, characterized in that, The vertical distance between the lower end face of the coaxial opposing blow-suction actuator (5) and the surface of the shoe material is 10~30mm, and the thickness of the local action layer is 8~12mm.

4. The vacuum-gas linkage fluid control system according to claim 1, characterized in that, The coaxial opposing blow-suction execution units (5) are arranged in a 2-row × 6-column array with a unit spacing of 200mm, covering a shoe material processing station (8) with an overall width of 1200mm.

5. The vacuum-gas linkage fluid control system according to claim 1, characterized in that, It is connected to the process gas source (2) and the main vacuum pump (1) and applied to the shoe material processing station (8) in the vacuum chamber.

6. The vacuum-gas linkage fluid control system according to claim 1, characterized in that, Each coaxial opposing blow-suction actuator (5) is equipped with a miniature pressure sensor and an optical gas concentration sensor. The signal output terminals of the miniature pressure sensor and the optical gas concentration sensor are connected to a multi-channel fluid servo controller (4) to form a closed-loop feedback control system.

7. The vacuum-gas linkage fluid control system according to claim 1, characterized in that, The negative pressure gas collection chamber (54) has a backflush inlet (59) on its side wall. The backflush inlet (59) is connected to a clean compressed air source through a micro backflush control valve (9). The control terminal of the micro backflush control valve (9) is connected to a multi-channel fluid servo controller (4).

8. The vacuum-gas linkage fluid control system according to claim 1, characterized in that, The multi-channel fluid servo controller (4) stores multiple sets of process parameter formulas corresponding to different shoe material categories. After the category switching command is issued, all coaxial opposing blow-suction execution units (5) adjust the parameters synchronously, and the system steady-state reconstruction time is ≤2s.

9. The vacuum-gas linkage fluid control system according to claim 1, characterized in that, The multi-channel fluid servo controller (4) has a built-in array weight adjustment module that dynamically adjusts the flow parameters of the coaxial opposing blow-suction execution units (5) at different positions according to the size, outline and placement of the shoe material, so as to offset the local flow field distortion caused by the workpiece obstruction.

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