A method for modeling and reaction kinetics analysis of dielectric barrier discharge plasma

Abstract

The application provides a dielectric barrier discharge plasma modeling and reaction kinetics analysis method, and belongs to the technical field of reaction kinetics analysis. In view of the technical defects of the prior art, such as low model calculation efficiency, poor convergence, imperfect reaction kinetics system, insufficient simulation precision, and low matching degree with actual atmospheric discharge working conditions, the application simplifies and optimizes the geometric structure, highly integrates multi-physical field fine coupling, builds a standardized atmospheric reaction kinetics library, optimizes the boundary condition and the solver algorithm, realizes efficient, stable and accurate simulation of the whole process of the atmospheric pressure DBD discharge process, and constructs a perfect atmospheric environment chemical reaction kinetics analysis framework, so that the correlation mechanism of the discharge parameters, the gas components, the plasma characteristics and the active particle generation law is accurately revealed.

Description

Technical Field

[0001] This invention belongs to the field of reaction kinetics analysis technology and plasma numerical simulation technology. Specifically, it relates to a method for modeling and analyzing the reaction kinetics of dielectric barrier discharge plasma, and more particularly to a systematic implementation method for building a dielectric barrier discharge (DBD) plasma numerical model based on the COMSOL Multiphysics simulation platform and completing the full-dimensional analysis of the discharge chemical reaction kinetics under atmospheric conditions. Background Technology

[0002] Dielectric barrier discharge (DBD) is a typical non-equilibrium low-temperature plasma generation technology. With its advantages such as not requiring high temperature and high pressure, uniform discharge, controllable energy consumption, simple equipment structure, and stable operation under atmospheric pressure, it has extremely high application value in many industrial fields and scientific research scenarios, such as industrial waste gas treatment, air purification, material surface modification, ozone preparation, biological disinfection, and energy conversion.

[0003] Numerical simulation is a core method for revealing the discharge mechanism of DBD plasma, optimizing discharge process parameters, and predicting the generation law of active particles. It can effectively make up for the technical shortcomings of high experimental testing costs, difficulty in real-time monitoring of microscopic parameters, and inability to visualize the discharge transient process. Currently, existing numerical simulation technologies for DBD plasma generally adopt two-dimensional or three-dimensional full-size geometric models. The complex model structure and large mesh size directly lead to extremely high overall computational complexity, long simulation cycle, and difficulty in numerical convergence, making it difficult to achieve large-scale parametric simulation analysis and process iterative optimization.

[0004] Meanwhile, existing simulation models provide a rather crude and simplified description of plasma reaction dynamics, mostly selecting only a few core reaction pathways for simulation while neglecting key secondary reaction processes such as water vapor, metastable particles, charge exchange, and particle quenching under atmospheric conditions. Especially under atmospheric conditions, existing technologies lack a systematic and complete system for configuring reaction pathways and targeted parameter optimization schemes. The selection of reaction cross-section data and rate coefficients is not standardized or authoritative, making it impossible to accurately match the multi-component, multi-reaction, and transient evolution characteristics of real atmospheric discharge environments.

[0005] In addition, traditional DBD simulation models have a single physical field coupling method, often ignoring the neutral particle transport process and the dynamic accumulation effect of charge on the dielectric surface. The boundary conditions are fixed and have poor adjustability, making it impossible to accurately reproduce the non-equilibrium characteristics and transient discharge evolution of atmospheric pressure DBD discharge. This results in a large deviation between the simulation calculation results and the actual experimental data, with insufficient model accuracy and stability. Consequently, it is difficult to effectively guide the optimization of actual DBD reactor structure, the adjustment of discharge process parameters, and the in-depth study of plasma reaction mechanisms, which seriously limits the industrialization of DBD low-temperature plasma technology and the innovative research on its mechanisms. Summary of the Invention

[0006] To address the shortcomings of existing technologies, such as low model computation efficiency, poor convergence, incomplete reaction kinetics system, insufficient simulation accuracy, and low matching degree with actual atmospheric discharge conditions, this invention aims to provide a COMSOL-based DBD plasma modeling and reaction kinetics analysis method. By simplifying and optimizing the geometric structure, highly integrating multi-physics fine coupling, building a standardized atmospheric reaction kinetics library, and optimizing boundary conditions and solver algorithms, this invention achieves efficient, stable, and accurate full-process simulation of atmospheric pressure DBD discharge. Furthermore, it constructs a comprehensive atmospheric environmental chemical reaction kinetics analysis framework, accurately revealing the correlation mechanism between discharge parameters, gas composition and plasma characteristics, and the generation law of active particles.

[0007] The present invention employs the following technical solution.

[0008] A method for modeling and analyzing the reaction kinetics of dielectric barrier discharge plasma includes:

[0009] Step 1: Construct a one-dimensional axisymmetric or planar geometric model based on the COMSOL Multiphysics simulation platform;

[0010] Step 2: After constructing a one-dimensional axisymmetric or planar geometric model, perform multiphysics coupling configuration;

[0011] Step 3: After configuring the multiphysics coupling, execute the chemical reaction kinetics library configuration;

[0012] Step 4: After configuring the chemical reaction kinetics library, set the boundary conditions;

[0013] Step 5: After setting the boundary conditions, perform solver optimization and parametric analysis.

[0014] Furthermore, in step 1, the one-dimensional axisymmetric or planar geometric model is simplified and adapted to the core structure of the dual dielectric barrier discharge, which includes three core structures: parallel metal electrodes, dielectric layer and discharge gap.

[0015] Furthermore, in step 2, the built-in plasma module of COMSOL is called to build a multi-physics fully coupled simulation system. The multi-physics fully coupled simulation system uses the coupling current interface, electron energy transport equation and drift-diffusion approximation model to calculate the physical parameters of electron density, electron temperature, ion density and spatial electric field distribution during the discharge process.

[0016] Furthermore, in step 2, the multiphysics fully coupled simulation system also introduces the neutral particle transport equation to achieve full coupling and synchronous solution of charged particles and neutral active particles.

[0017] Furthermore, in step 3, a standardized and complete atmospheric DBD plasma chemical reaction kinetics library is built for the complex working conditions of multi-component atmospheric environment.

[0018] Furthermore, in step 3, the atmospheric DBD plasma chemical reaction kinetics library includes N2, O2, and H2O, comprehensively covering all reaction processes in the plasma discharge process, including elastic collisions, particle excitation, chemical bond dissociation, particle ionization, electron attachment, particle recombination, and Penning ionization.

[0019] Furthermore, in step 3, for the atmospheric environment simulation scenario, the configured core reaction process includes at least the following key reactions:

[0020] Nitrogen ionization reaction: The core reaction for self-sustaining discharge is to achieve the ionization of nitrogen molecules to generate nitrogen ions and secondary electrons.

[0021] Oxygen dissociation reaction: This enables the dissociation of oxygen molecules into oxygen atoms, which is the core pathway for the generation of reactive oxygen species.

[0022] Electron adhesion reaction: This process reduces the generation of negative ions during discharge and improves the particle charge balance system.

[0023] Metastable quenching reaction: This enables the quenching of metastable nitrogen molecules, efficiently generating reactive oxygen particles and supplementing secondary reaction pathways.

[0024] Charge exchange reaction: It reconstructs the plasma space charge transfer process and accurately optimizes the calculation accuracy of electric field distribution.

[0025] Furthermore, in step 4, the model boundary conditions are refined based on the characteristics of the DBD discharge structure and the charge accumulation characteristics on the dielectric surface.

[0026] Furthermore, in step 4, adjustable secondary electron emission boundary conditions are set on the surface of the metal electrode. By adjusting the secondary electron emission coefficient, the secondary electron emission characteristics under different electrode materials and different discharge intensities are adapted to improve the model's versatility. A dynamic surface charge accumulation model is enabled on the surface of the dielectric layer. By integrating the change in charged particle flux over time in real time, the charge density deposited on the dielectric surface is dynamically updated. Moreover, the surface accumulated charge can be back-coupled to the spatial electric field calculation, accurately restoring the closed-loop process of charge accumulation, electric field distortion, and discharge evolution of dielectric barrier discharge. The remaining simulation boundaries adopt reflection, absorption, or flux conservation boundary conditions according to the particle transport characteristics.

[0027] Furthermore, in step 5, a time-adaptive implicit integration method is used in conjunction with a fully coupled solver to perform transient solutions. At the same time, the COMSOL parametric scanning function is enabled to conduct systematic parametric simulation analysis with gas composition, air humidity, excitation voltage amplitude, power supply frequency, and voltage waveform as core variables. This study investigates the influence mechanism of various operating parameters on the DBD discharge mode, electric field distribution, electronic characteristics, and active particle generation law.

[0028] The beneficial effects of the present invention are as follows, compared with the prior art:

[0029] This invention, through geometric structure optimization, fine coupling of multiphysics fields, construction of a standardized atmospheric reaction dynamics library, refined configuration of boundary conditions, and optimization of solver algorithms, achieves the following technical advantages compared to existing technologies:

[0030] This invention balances simulation efficiency and computational accuracy, adapting to large-scale simulation scenarios. It employs a simplified one-dimensional axisymmetric / planar geometric model, eliminating redundant computations of traditional two-dimensional and three-dimensional models while retaining the core physical mechanism of DBD discharge. Through fully coupled multiphysics solutions and precise characterization of electron non-equilibrium properties, it significantly shortens the simulation cycle and reduces hardware computing power requirements while ensuring the computational accuracy of core parameters such as electron density, electron temperature, electric field distribution, and particle concentration. This solves the problems of high computational load, low efficiency, and difficulty in batch parameter iteration of traditional models. Furthermore, it constructs a standardized atmospheric reaction dynamics system, ensuring simulation closely matches real-world conditions. The invention builds a comprehensive... A comprehensive multi-component reaction kinetics library covers all core plasma reaction processes. All parameters are derived from authoritative databases and literature, and dynamic parameter adaptation is achieved through electron temperature functions. This accurately reproduces the multi-stage reaction and transient evolution characteristics of DBD discharge under atmospheric conditions, significantly reducing the deviation between simulation results and experimental data. It solves the technical pain points of traditional models, such as simulation distortion and incomplete mechanism characterization. Optimized boundary and solution algorithms enhance model stability and versatility. By setting adjustable secondary electron emission boundaries and dynamic charge accumulation models on dielectric surfaces, it accurately reproduces the unique charge accumulation effect and electrode discharge characteristics of dielectric barrier discharge, adapting to different electrodes, dielectrics, and discharge conditions. Combined with BDF time-adaptive... By employing an implicit integrator and a fully coupled solution strategy, this invention effectively addresses the divergence problem in strongly nonlinear plasma simulations, significantly improving the model's numerical convergence and stability. It also supports parameterized batch scanning, flexibly adapting to simulation analysis needs under various operating conditions. With a wide range of applications and high engineering guidance value, this invention can accurately realize the study of atmospheric pressure DBD discharge mechanisms, visualize and analyze discharge transient processes, and iteratively optimize process parameters. It can effectively guide the technical optimization of industrial scenarios such as air pollutant degradation, ozone preparation, material modification, and plasma reactor structural design. Furthermore, it provides precise simulation support for in-depth research on plasma reaction mechanisms, experimental result verification, and prediction, possessing extremely strong scientific research and engineering application value. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the overall technical roadmap for the dielectric barrier discharge plasma modeling and reaction kinetics analysis method of the present invention. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of this invention. The embodiments described in this application are merely some embodiments of this invention, and not all embodiments. Based on the spirit of this invention, other embodiments obtained by those skilled in the art without creative effort are all within the protection scope of this invention.

[0033] like Figure 1 As shown, this invention proposes a method for modeling and analyzing the reaction kinetics of dielectric barrier discharge plasma, comprising the following steps:

[0034] Step 1: Construct a one-dimensional axisymmetric or planar geometric model based on the COMSOL Multiphysics simulation platform;

[0035] In a preferred but non-limiting embodiment of the present invention, in step 1, the one-dimensional axisymmetric or planar geometric model is simplified and adapted to the core structure of dual dielectric barrier discharge. It precisely includes three core structures: parallel metal electrodes, dielectric layer and discharge gap. It abandons the redundant structural design of traditional two-dimensional and three-dimensional models. While retaining the core physical characteristics of DBD discharge, it significantly reduces the number of model meshes and computational dimensions, taking into account both model simulation accuracy and computational efficiency, and adapts to the low-temperature plasma discharge simulation scenario under atmospheric pressure air environment.

[0036] Step 2: After constructing a one-dimensional axisymmetric or planar geometric model, perform multiphysics coupling configuration;

[0037] In a preferred but non-limiting embodiment of the present invention, in step 2, the built-in plasma module of COMSOL is invoked to build a multiphysics fully coupled simulation system. This system couples the current interface, electron energy transport equations, and drift-diffusion approximation model to accurately calculate core physical parameters such as electron density, electron temperature, ion density, and spatial electric field distribution during the discharge process. The electron energy transport equations are specifically used to describe the non-equilibrium electron energy distribution, effectively improving the calculation accuracy of the inelastic collision process of plasma and accurately reproducing the non-equilibrium characteristics of low-temperature plasma electrons.

[0038] In a preferred but non-limiting embodiment of the present invention, in step 2, the multiphysics fully coupled simulation system simultaneously introduces a neutral particle transport equation, breaking the limitation of the traditional model that only solves for charged particles, realizing the full coupling and synchronous solution of charged particles and neutral active particles, and completely covering the entire process of particle transport, energy transfer and field strength evolution in the DBD discharge process.

[0039] Step 3: After configuring the multiphysics coupling, execute the chemical reaction kinetics library configuration;

[0040] In a preferred but non-limiting embodiment of the present invention, in step 3, a standardized and complete atmospheric DBD plasma chemical reaction kinetics library is built for the complex multi-component working conditions of the atmospheric environment (air) to accurately match the core components of air.

[0041] In a preferred but non-limiting embodiment of the present invention, in step 3, the atmospheric DBD plasma chemical reaction kinetics library includes This system comprehensively covers all core reaction processes in plasma discharge, including elastic collisions, particle excitation, chemical bond dissociation, particle ionization, electron attachment, particle recombination, and Penning ionization. All cross-sectional data and rate coefficients for each reaction are derived from the authoritative LXCat database and industry-recognized authoritative literature. Furthermore, all parameters are entered into the model as electron temperature functions, achieving dynamic adaptive matching of parameters with the discharge state and closely reflecting the transient characteristics of real discharges.

[0042] In a preferred but non-limiting embodiment of the present invention, in step 3, for the atmospheric environment simulation scenario, the configured core reaction process includes at least the following key reactions:

[0043] Nitrogen ionization reaction: The core reaction for self-sustaining discharge is to achieve the ionization of nitrogen molecules to generate nitrogen ions and secondary electrons.

[0044] Oxygen dissociation reaction: This enables the dissociation of oxygen molecules into oxygen atoms, which is the core pathway for the generation of reactive oxygen species.

[0045] Electron adhesion reaction: This process reduces the generation of negative ions during discharge and improves the particle charge balance system.

[0046] Metastable quenching reaction: This enables the quenching of metastable nitrogen molecules, efficiently generating reactive oxygen particles and supplementing secondary reaction pathways.

[0047] Charge exchange reaction: It reconstructs the plasma space charge transfer process and accurately optimizes the calculation accuracy of electric field distribution.

[0048] Step 4: After configuring the chemical reaction kinetics library, set the boundary conditions;

[0049] In a preferred but non-limiting embodiment of the present invention, in step 4, the model boundary conditions are finely configured based on the DBD discharge structure characteristics and the charge accumulation characteristics of the dielectric surface.

[0050] In a preferred but non-limiting embodiment of the present invention, in step 4, adjustable secondary electron emission boundary conditions are set on the surface of the metal electrode. By adjusting the secondary electron emission coefficient, the secondary electron emission characteristics under different electrode materials and different discharge intensities are adapted to improve the versatility of the model. A dynamic surface charge accumulation model is enabled on the surface of the dielectric layer. By integrating the change of charged particle flux over time in real time, the charge density deposited on the dielectric surface is dynamically updated. The surface accumulated charge can be back-coupled to the spatial electric field calculation, accurately restoring the closed-loop process of charge accumulation, electric field distortion, and discharge evolution of dielectric barrier discharge. The remaining simulation boundaries adopt reflection, absorption, or flux conservation boundary conditions according to the particle transport characteristics to avoid boundary numerical anomalies and ensure stable operation of the simulation process.

[0051] Step 5: After setting the boundary conditions, perform solver optimization and parametric analysis.

[0052] In a preferred but non-limiting embodiment of the present invention, in step 5, a time-adaptive implicit integration method (BDF scheme) combined with a fully coupled solver is used to perform transient solutions. Compared with traditional explicit solution algorithms, this effectively solves the problems of solution divergence and convergence difficulties caused by strong nonlinearity and multivariate coupling in plasma simulation, significantly improving numerical stability. Simultaneously, the COMSOL parametric scanning function is enabled, using gas composition, air humidity, excitation voltage amplitude, power supply frequency, and voltage waveform as core variables to conduct systematic parametric simulation analysis. This accurately studies the influence mechanism of various operating parameters on the DBD discharge mode, electric field distribution, electronic characteristics, and active particle generation law, achieving quantitative analysis of discharge characteristics and reaction kinetics.

[0053] Specific embodiments of the present invention are shown below:

[0054] Example 1: DBD Modeling and Reaction Kinetic Analysis under Standard Atmospheric Environmental Conditions

[0055] A standard atmospheric condition DBD simulation model was built based on the method of this invention. Specific parameter settings are as follows: a one-dimensional axisymmetric dual-dielectric barrier discharge model was constructed, with an electrode spacing of 1 mm and a dielectric layer thickness of 0.5 mm; a sinusoidal AC excitation voltage with a peak value of 5 kV and a frequency of 10 kHz was applied; and a configuration including… The complete reaction set of the three core components comprehensively covers all reaction processes such as ionization, dissociation, electron attachment, particle recombination, metastable quenching, and charge exchange; it uses a surface charge accumulation model and adjustable secondary electron emission boundary conditions, and employs an optimized fully coupled solver to perform transient solutions.

[0056] Through simulation, the spatiotemporal distribution patterns of electron density, spatial electric field intensity, and electron temperature at different discharge moments are accurately obtained, and the O atoms are also obtained. ozone, The concentration evolution characteristics of metastable nitrogen and other core active particles were analyzed, and the ignition mechanism, self-sustaining discharge law, and dynamic mechanism of active particle generation and consumption of DBD discharge under standard atmospheric conditions were systematically analyzed, providing data support for the study of basic discharge mechanism.

[0057] Example 2: Study on the Influence of Air Humidity on Atmospheric DBD Discharge Characteristics

[0058] Based on the dry air simulation model in Example 1, different gradient water vapor components were introduced, and the air humidity range was set as follows: The water vapor content variable was precisely controlled using parametric scanning, while other simulation parameters remained consistent. The study focused on the influence of different humidity conditions on DBD discharge intensity, electron distribution, and electric field evolution, and monitored OH hydroxyl groups in real time. The generation pathways, concentration changes, and consumption mechanisms of water-soluble reactive particles such as peroxyhydroxyl groups were investigated. The kinetic mechanism of water vapor participating in plasma reactions was analyzed in depth, and the potential contribution of water-soluble reactive particles to the oxidative degradation of air pollutants was clarified.

[0059] Meanwhile, through iterative simulation of multiple sets of parameters, the optimal humidity conditions are optimized and matched to maximize the overall yield of active particles in the DBD system, providing accurate simulation basis for optimizing process parameters in practical industrial applications such as pollutant degradation and waste gas treatment.

[0060] The dielectric barrier discharge plasma modeling and reaction kinetics analysis method of the present invention can be widely applied to multiple technical fields such as plasma simulation numerical calculation, DBD discharge micro-mechanism diagnosis, plasma chemical reaction mechanism research, industrial DBD reactor structure optimization design, and atmospheric environment plasma pollution control process optimization, adapting to the dual needs of scientific research experiment simulation prediction and industrial production process iteration.

[0061] It should be recognized that embodiments of the present invention may be implemented or carried out by computer hardware, a combination of hardware and software, or by computer instructions stored in a non-transitory computer-readable storage medium.

[0062] The method can be implemented using standard programming techniques, including a non-transitory computer-readable storage medium configured with a computer program in the computer program, wherein the storage medium is configured such that the computer operates in a specific and predefined manner.

[0063] Each program can be implemented in a high-level procedural or object-oriented programming language to communicate with the computer system; however, if required, the program can be implemented in assembly or machine language.

[0064] In any case, the language can be either compiled or interpreted.

[0065] Furthermore, for this purpose, the program can run on programmed application-specific integrated circuits.

[0066] The processes described herein (or variations and / or combinations thereof) can be executed under the control of one or more computer systems configured with executable instructions, and can be implemented by hardware or a combination thereof as code (e.g., executable instructions, one or more computer programs, or one or more applications) that commonly executes on one or more processors. The computer program includes a plurality of instructions executable by one or more processors.

[0067] Furthermore, the method can be implemented in any suitable computing platform, including but not limited to personal computers, minicomputers, mainframes, workstations, networked or distributed computing environments, standalone or integrated computer platforms, or in communication with charged particle tools or other imaging devices.

[0068] Various aspects of the present invention can be implemented in machine-readable code stored on a non-transitory storage medium or device, whether portable or integrated into a computing platform, such as a hard disk, optical read and / or write storage medium, RAM, ROM, etc., such that it can be read by a programmable computer, and when the storage medium or device is read by the computer, it can be used to configure and operate the computer to perform the processes described herein.

[0069] Furthermore, machine-readable code, or parts thereof, can be transmitted via wired or wireless networks.

[0070] When such media includes instructions or programs that combine with a microprocessor or other data processor to implement the steps described above, the invention described herein includes these and other different types of non-transitory computer-readable storage media.

[0071] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A method for modeling and analyzing the reaction kinetics of dielectric barrier discharge plasma, characterized in that, include: Step 1: Construct a one-dimensional axisymmetric or planar geometric model based on the COMSOL Multiphysics simulation platform; Step 2: After constructing a one-dimensional axisymmetric or planar geometric model, perform multiphysics coupling configuration; Step 3: After configuring the multiphysics coupling, execute the chemical reaction kinetics library configuration; Step 4: After configuring the chemical reaction kinetics library, set the boundary conditions; Step 5: After setting the boundary conditions, perform solver optimization and parametric analysis.

2. The method for modeling and reaction kinetics analysis of dielectric barrier discharge plasma according to claim 1, characterized in that, In step 1, a one-dimensional axisymmetric or planar geometric model is used to simplify and adapt the core structure of the dual dielectric barrier discharge, which includes three core structures: parallel metal electrodes, dielectric layer, and discharge gap.

3. The method for modeling and reaction kinetics analysis of dielectric barrier discharge plasma according to claim 2, characterized in that, In step 2, the built-in plasma module of COMSOL is called to build a multi-physics fully coupled simulation system. The multi-physics fully coupled simulation system uses the coupling current interface, electron energy transport equation and drift-diffusion approximation model to calculate the physical parameters of electron density, electron temperature, ion density and spatial electric field distribution during the discharge process.

4. The method for modeling and reaction kinetics analysis of dielectric barrier discharge plasma according to claim 3, characterized in that, In step 2, the multiphysics fully coupled simulation system also introduces the neutral particle transport equation to achieve full coupling and synchronous solution of charged particles and neutral active particles.

5. The method for modeling and reaction kinetics analysis of dielectric barrier discharge plasma according to claim 4, characterized in that, In step 3, a standardized and complete atmospheric DBD plasma chemical reaction kinetics library is built to address the complex multi-component working conditions of the atmospheric environment.

6. The method for modeling and reaction kinetics analysis of dielectric barrier discharge plasma according to claim 5, characterized in that, In step 3, the atmospheric DBD plasma chemical reaction kinetics library includes N2, O2, and H2O, comprehensively covering all reaction processes in the plasma discharge process, including elastic collisions, particle excitation, chemical bond dissociation, particle ionization, electron attachment, particle recombination, and Penning ionization.

7. The method for modeling and reaction kinetics analysis of dielectric barrier discharge plasma according to claim 6, characterized in that, In step 3, for the atmospheric environment simulation scenario, the configured core reaction process shall include at least the following key reactions: Nitrogen ionization reaction: The core reaction for self-sustaining discharge is to achieve the ionization of nitrogen molecules to generate nitrogen ions and secondary electrons. Oxygen dissociation reaction: This enables the dissociation of oxygen molecules into oxygen atoms, which is the core pathway for the generation of reactive oxygen species. Electron adhesion reaction: This process reduces the generation of negative ions during discharge and improves the particle charge balance system. Metastable quenching reaction: This enables the quenching of metastable nitrogen molecules, efficiently generating reactive oxygen particles and supplementing secondary reaction pathways. Charge exchange reaction: It reconstructs the plasma space charge transfer process and accurately optimizes the calculation accuracy of electric field distribution.

8. The method for modeling and reaction kinetics analysis of dielectric barrier discharge plasma according to claim 7, characterized in that, In step 4, the model boundary conditions are refined based on the DBD discharge structure characteristics and the charge accumulation characteristics on the dielectric surface.

9. The method for modeling and reaction kinetics analysis of dielectric barrier discharge plasma according to claim 8, characterized in that, In step 4, adjustable secondary electron emission boundary conditions are set on the surface of the metal electrode. By adjusting the secondary electron emission coefficient, the secondary electron emission characteristics under different electrode materials and different discharge intensities are adapted to improve the versatility of the model. A dynamic surface charge accumulation model is enabled on the surface of the dielectric layer. By integrating the change of charged particle flux over time in real time, the charge density deposited on the dielectric surface is dynamically updated. The surface accumulated charge can be back-coupled to the calculation of the spatial electric field, accurately restoring the closed-loop process of charge accumulation, electric field distortion, and discharge evolution of dielectric barrier discharge. The remaining simulation boundaries adopt reflection, absorption, or flux conservation boundary conditions according to the particle transport characteristics.

10. The method for modeling and reaction kinetics analysis of dielectric barrier discharge plasma according to claim 9, characterized in that, In step 5, a time-adaptive implicit integration method is used in conjunction with a fully coupled solver to perform transient solutions. At the same time, the COMSOL parametric scanning function is enabled to conduct systematic parametric simulation analysis with gas composition, air humidity, excitation voltage amplitude, power supply frequency and voltage waveform as core variables. The study investigates the influence mechanism of various operating parameters on the DBD discharge mode, electric field distribution, electronic characteristics and active particle generation law.

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