Method, device and medium for dynamic estimation and calibration of dichlorosilane content in a spherical tank

Abstract

The application discloses a method, device and medium for dynamically estimating and calibrating dichlorosilane content in a spherical tank. The method comprises the following steps: inputting the current state, current component parameter and real-time mass flow data of inlet and outlet materials of the spherical tank into a dynamic differential equation model, performing a plurality of dynamic calculation steps, obtaining dynamic calculation data and dichlorosilane content estimation results corresponding to each dynamic calculation step, and obtaining new intermittent measurement data until the new intermittent measurement data is obtained; determining the latest current state and measurement value data corresponding to the current measurement time according to the intermittent measurement data corresponding to the current measurement time; determining the latest current component parameter according to the measurement value data of the last measurement time, the measurement value data of the current measurement time and the dynamic calculation data corresponding to each dynamic calculation; and returning to perform the plurality of dynamic calculation steps based on the latest current component parameter and the latest current state. The application can improve the accuracy of estimating the dichlorosilane content in the spherical tank.

Description

Technical Field

[0001] This application relates to the field of chemical process control and monitoring technology, specifically to a method, equipment, and medium for dynamic prediction and calibration of dichlorosilane content in a spherical tank. Background Technology

[0002] In the polysilicon production process, the stability of the silicon-containing raw materials directly affects the deposition rate, energy consumption level, and operational stability of the reduction reaction. Trichlorosilane raw materials typically contain a small amount of dichlorosilane. Excessive or insufficient dichlorosilane content can alter the atomization and reaction characteristics of the raw materials, leading to uneven reaction zone distribution, increased side reactions, or equipment scaling. Therefore, it is necessary to monitor changes in dichlorosilane content in a timely manner.

[0003] Existing component monitoring methods mainly include online analysis and manual sampling analysis. Online analysis equipment has high purchase and maintenance costs, and is prone to problems such as sampling pipeline blockage, detection element wear, and decreased measurement reliability in corrosive media environments. Manual sampling analysis can only obtain component data at discrete moments, resulting in long detection cycles and delayed results, making it difficult to reflect component changes between adjacent sampling times in a timely manner. Furthermore, some component estimation methods typically rely on fixed material compositions or empirical parameters. When upstream production conditions fluctuate, the actual material composition can easily deviate from the preset conditions, causing estimation errors to accumulate gradually over time. Therefore, existing technologies struggle to balance monitoring cost, continuity, and accuracy, failing to continuously and reliably grasp the dynamic changes in dichlorosilane content within the spherical tank, which is detrimental to the stable operation of subsequent production processes and energy consumption control. Summary of the Invention

[0004] The purpose of this application is to provide a method, device, and medium for dynamic estimation and calibration of dichlorosilane content in a spherical tank, in order to solve the problem of low accuracy in estimating dichlorosilane content in spherical tanks in the prior art.

[0005] To achieve the above objectives, the first aspect of this application provides a method for dynamically predicting and calibrating the content of dichlorosilane in a spherical tank, comprising: The current state of the spherical tank, the current component parameters, and the real-time mass flow rate data of the feed and discharge are input into the dynamic differential equation model. Multiple rounds of dynamic calculation steps are executed to obtain the dynamic calculation data and the estimated dichlorosilane content corresponding to each round of dynamic calculation steps, until new intermittent measurement data are obtained. The moment when new intermittent measurement data is acquired is taken as the current measurement moment; Based on the intermittent measurement data corresponding to the current measurement time, determine the latest current state and the measurement value data corresponding to the current measurement time; If there is intermittent measurement data corresponding to the previous measurement time, the latest current component parameters are determined based on the measurement data of the previous measurement time, the measurement data of the current measurement time, and the dynamic calculation data corresponding to each round of dynamic calculation. Based on the latest current component parameters and the latest current state, return to execute multiple rounds of dynamic calculation steps.

[0006] A second aspect of this application provides a computer device, comprising: The memory is configured to store instructions; and The processor is configured to retrieve instructions from memory and to implement the methods described above when executing instructions.

[0007] A third aspect of this application provides a computer program product, including a computer program that, when executed by a processor, implements the above-described method.

[0008] A fourth aspect of this application provides a computer-readable storage medium storing instructions that cause a computer to perform the methods described above.

[0009] The above technical solution utilizes real-time mass flow data of the spherical tank's inlet and outlet and current component parameters to drive the continuous operation of a dynamic differential equation model. This allows for the continuous acquisition of dichlorosilane content prediction results between adjacent intermittent measurements, compensating for the inability of intermittent measurements to reflect dynamic changes in components within the measurement interval. When new intermittent measurement data is acquired, updating the current state based on the actual measurement results allows the dynamic differential equation model to be re-anchored to the actual state of the material within the spherical tank, reducing the cumulative deviation caused by previous rounds of dynamic calculations. Simultaneously, using the measurement data from two adjacent measurement moments and the dynamic calculation data within the corresponding time interval to determine the latest current component parameters allows these parameters to be updated according to changes in the actual dichlorosilane content in the mixed feed, reducing subsequent prediction deviations caused by using fixed component parameters. By cyclically executing multiple rounds of dynamic calculation steps with the latest current state and current component parameters, a continuous operation process is formed that connects dynamic prediction, actual measurement, state update, and parameter update, thereby improving the continuity, timeliness, and accuracy of dichlorosilane content prediction within the spherical tank.

[0010] Other features and advantages of the embodiments of this application will be described in detail in the following detailed description section. Attached Figure Description

[0011] The accompanying drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the following detailed description to explain the embodiments of this application, but do not constitute a limitation on the embodiments of this application. In the drawings: Figure 1The flowchart illustrates a method for dynamically estimating and calibrating the content of dichlorosilane in a spherical tank according to an embodiment of this application. Figure 2 This schematic diagram illustrates the structure of a dynamic prediction and calibration system for dichlorosilane content in a spherical tank according to an embodiment of this application. Figure 3 The flowchart illustrates another method for dynamically estimating and calibrating the content of dichlorosilane in a spherical tank according to an embodiment of this application. Figure 4 The illustration schematically shows a timing diagram of a dynamic estimation and calibration process for dichlorosilane content in a spherical tank according to an embodiment of this application; Figure 5 The schematic diagram illustrates a structural diagram of a computer device according to an embodiment of this application. Detailed Implementation

[0012] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only for illustration and explanation of the embodiments of this application and are not intended to limit the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0013] Furthermore, if the embodiments of this application involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed in this application.

[0014] The acquisition, transmission, storage, use, and processing of data in this application comply with relevant laws and regulations. Furthermore, it should be noted that certain software, components, models, and other existing industry solutions may be mentioned in the embodiments of this application. These should be considered exemplary, intended only to illustrate the feasibility of implementing the technical solution of this application, and do not imply that the applicant has already used or necessarily used such solutions.

[0015] It should be noted that the acquisition, transmission, storage, use, and processing of data in the technical solution of this application all comply with relevant laws and regulations. In the embodiments of this application, certain existing industry solutions such as software, components, and models may be mentioned. These should be considered exemplary, intended only to illustrate the feasibility of implementing the technical solution of this application, and do not imply that the applicant has already used or necessarily used such solutions.

[0016] Figure 1 A flowchart illustrating a method for dynamically predicting and calibrating the content of dichlorosilane in a spherical tank according to an embodiment of this application is shown. Figure 1 As shown in the embodiment of this application, a method for dynamic prediction and calibration of dichlorosilane content in a spherical tank is provided, which may include the following steps.

[0017] Step 101: Input the current state of the spherical tank, the current component parameters, and the real-time mass flow rate data of the feed and discharge into the dynamic differential equation model, execute multiple rounds of dynamic calculation steps, obtain the dynamic calculation data and dichlorosilane content prediction results corresponding to each round of dynamic calculation steps, until new intermittent measurement data are obtained.

[0018] In this embodiment, the dynamic differential equation model is a computational model established based on the mass conservation relationship of the material inside the spherical tank, used to describe the change in the state of the material inside the spherical tank over time. The current state refers to the state of the material inside the spherical tank at the start of this round of dynamic calculation, including the current total mass and the current dichlorosilane mass fraction. The initial total mass and initial dichlorosilane mass fraction can be used when performing the first dynamic calculation, while subsequent calculations use the current total mass and current dichlorosilane mass fraction obtained from the previous round of dynamic calculation. The current component parameter refers to the dichlorosilane mass fraction in the mixed feed currently participating in the dynamic differential equation model calculation.

[0019] A spherical tank is a storage and buffer container used to receive feed, contain mixed materials, and output materials. Real-time feed and discharge mass flow rate data refers to the material mass flow rate collected in real time during the feed and discharge process of the spherical tank, including single-component feed mass flow rate, mixed feed mass flow rate, and discharge mass flow rate. Multi-round dynamic calculation steps refer to the process of repeatedly performing numerical calculations on a dynamic differential equation model based on current component parameters, real-time feed and discharge mass flow rate data, and the current state, according to continuously set calculation times, and using the state obtained from each round of dynamic calculation for the next round of dynamic calculation. New intermittent measurement data refers to discontinuous measurement data that is acquired again after the previous intermittent measurement data and reflects the actual state of the material inside the spherical tank; the acquisition time is used to end the current set of multi-round dynamic calculation steps. Dynamic calculation data refers to the calculation-related data formed and retained during each round of dynamic calculation, including the mixed feed mass flow rate, discharge mass flow rate, and the dichlorosilane mass fraction predicted by the dynamic differential equation model for that round of dynamic calculation. The dichlorosilane content prediction result refers to the current molar fraction of dichlorosilane in the spherical tank determined based on the dichlorosilane mass fraction obtained from that round of dynamic calculation.

[0020] This step allows for the continuous calculation of changes in dichlorosilane content within the spherical tank based on the material inflow and outflow between two adjacent intermittent measurements, and simultaneously generates dynamic calculation data for each round, thereby compensating for the inability of intermittent measurements to continuously reflect changes in dichlorosilane content.

[0021] Step 102: Take the moment when new intermittent measurement data is obtained as the current measurement moment.

[0022] Step 103: Based on the intermittent measurement data corresponding to the current measurement time, determine the latest current state and the measurement value data corresponding to the current measurement time.

[0023] In this embodiment, the current measurement time refers to the actual time when new intermittent measurement data is acquired, used to identify the material state inside the spherical tank reflected by the intermittent measurement data. The intermittent measurement data corresponding to the current measurement time includes the measured value of the mole fraction of dichlorosilane in the spherical tank and the measured value of the total mass of the material at the current measurement time. The measured value of the mole fraction of dichlorosilane represents the proportion of the amount of dichlorosilane obtained from sampling analysis to the total amount of material in the spherical tank, and the measured value of the total mass of the material represents the mass of all materials in the spherical tank measured at the same time.

[0024] Determining the latest current state involves converting the measured mole fraction of dichlorosilane into the measured mass fraction of dichlorosilane at the current measurement moment, and using the total mass measurement of the material and the measured mass fraction of dichlorosilane as the latest current state. This ensures that the current state of the dynamic differential equation model is consistent with the actual state of the material inside the spherical tank at the current measurement moment. The measured data corresponding to the current measurement moment is generated based on the measured total mass of the material and the measured mass fraction of dichlorosilane, and is used to characterize the actual state of the material inside the spherical tank at the current measurement moment.

[0025] This step allows new intermittent measurement data to be unified to the current measurement time, and the current state to be updated using actual measurement results. This reduces the cumulative deviation caused by previous rounds of dynamic calculations, and at the same time forms measurement data with clear time correspondence.

[0026] Step 104: If intermittent measurement data corresponding to the previous measurement time exists, determine the latest current component parameters based on the measurement data of the previous measurement time, the measurement data of the current measurement time, and the dynamic calculation data corresponding to each round of dynamic calculation.

[0027] In this embodiment of the application, the previous measurement time refers to the measurement time that is before the current measurement time and adjacent to the current measurement time according to the acquisition order of the intermittent measurement data; the existence of intermittent measurement data corresponding to the previous measurement time means that at least two intermittent measurement data have been acquired, thus forming a measurement time interval with the previous measurement time as the starting point and the current measurement time as the ending point.

[0028] The measured data at the previous measurement moment is used to characterize the actual state of the material in the tank at the beginning of the measurement time interval, and the measured data at the current measurement moment is used to characterize the actual state of the material in the tank at the end of the measurement time interval. To determine the latest current component parameters, first, based on the total mass measurement value of the material and the mass fraction measurement value of dichlorosilane corresponding to the two measurement moments, determine the actual mass change of dichlorosilane within the measurement time interval; then, based on the corresponding discharge mass flow rate and dichlorosilane mass fraction dynamically calculated for each round within the measurement time interval, determine the cumulative outflow mass of dichlorosilane, and determine the cumulative mass of the mixed feed based on the corresponding mixed feed mass flow rate dynamically calculated for each round; finally, according to the material mass conservation relationship, based on the actual mass change of dichlorosilane, the cumulative outflow mass of dichlorosilane, and the cumulative mass of the mixed feed, deduce the actual average mass fraction of dichlorosilane in the mixed feed within the measurement time interval, and determine this as the latest current component parameter.

[0029] This step allows for the updating of current component parameters using the actual measurement results from two adjacent measurement times and the dynamic calculation data between the two measurement times. This enables the current component parameters to reflect the actual changes in the mixed feed components, reducing the prediction deviation of dichlorosilane content caused by using fixed component parameters.

[0030] Step 105: Based on the latest current component parameters and the latest current state, return to the multi-round dynamic calculation step.

[0031] In this embodiment, the latest current component parameter refers to the current component parameter that is available for use by the dynamic differential equation model at the current measurement time after being updated based on the relevant data between the previous measurement time and the current measurement time; the latest current state refers to the current state updated based on the intermittent measurement data corresponding to the current measurement time. Returning to execute multiple rounds of dynamic calculation steps means that after the current set of multiple rounds of dynamic calculation steps ends due to the acquisition of new intermittent measurement data, the latest current state is used as the new starting point for calculation, and the latest current component parameter is used as the new model input to restart the next set of multiple rounds of dynamic calculation steps, instead of continuing to use the current state and current component parameter before the update.

[0032] This step allows two adjacent sets of multi-round dynamic calculation steps to be connected continuously in time, and enables the new set of multi-round dynamic calculation steps to adopt the current state and current component parameters updated by actual measurement results, thereby reducing the impact of previous accumulated deviations and changes in the mixed feed components on the subsequent dichlorosilane content prediction results.

[0033] The above technical solution utilizes real-time mass flow data of the spherical tank's inlet and outlet and current component parameters to drive the continuous operation of a dynamic differential equation model. This allows for the continuous acquisition of dichlorosilane content prediction results between adjacent intermittent measurements, compensating for the inability of intermittent measurements to reflect dynamic changes in components within the measurement interval. When new intermittent measurement data is acquired, updating the current state based on the actual measurement results allows the dynamic differential equation model to be re-anchored to the actual state of the material within the spherical tank, reducing the cumulative deviation caused by previous rounds of dynamic calculations. Simultaneously, using the measurement data from two adjacent measurement moments and the dynamic calculation data within the corresponding time interval to determine the latest current component parameters allows these parameters to be updated according to changes in the actual dichlorosilane content in the mixed feed, reducing subsequent prediction deviations caused by using fixed component parameters. By cyclically executing multiple rounds of dynamic calculation steps with the latest current state and current component parameters, a continuous operation process is formed that connects dynamic prediction, actual measurement, state update, and parameter update, thereby improving the continuity, timeliness, and accuracy of dichlorosilane content prediction within the spherical tank.

[0034] In this embodiment of the application, before the first execution of the multi-round dynamic calculation step, the following steps are included: obtaining the initial total mass and initial dichlorosilane mole fraction of the material in the spherical tank at the initial moment; determining the initial dichlorosilane mass fraction in the spherical tank at the initial moment based on the initial dichlorosilane mole fraction, the preset dichlorosilane molecular weight, and the preset trichlorosilane molecular weight; using the initial dichlorosilane mass fraction and the initial total mass as the current state for the first execution of the multi-round dynamic calculation step; and using the preset component parameters as the current component parameters for the first execution of the multi-round dynamic calculation step.

[0035] In this embodiment, the initial time refers to the starting point of the first execution of the multi-round dynamic calculation step; the initial total mass refers to the mass of all materials in the spherical tank at the initial time; the initial dichlorosilane mole fraction refers to the proportion of the amount of dichlorosilane in the spherical tank to the total amount of materials in the spherical tank at the initial time. The preset dichlorosilane molecular weight and preset trichlorosilane molecular weight are the predetermined relative molecular masses of dichlorosilane and trichlorosilane, respectively, used to convert the initial dichlorosilane mole fraction expressed as a molar ratio into the initial dichlorosilane mass fraction expressed as a mass ratio; the initial dichlorosilane mass fraction refers to the proportion of the mass of dichlorosilane in the spherical tank to the total mass of materials in the spherical tank at the initial time. The preset component parameters refer to the pre-set mass fraction of dichlorosilane in the mixed feed before the first execution of the multi-round dynamic calculation step, which can be determined based on the design composition of the mixed feed, historical test results, or production experience.

[0036] This step converts the dichlorosilane mole fraction obtained at the initial moment into the dichlorosilane mass fraction required by the dynamic differential equation model, and provides the current state and current component parameters for the first execution of multiple rounds of dynamic calculation steps, enabling the dynamic differential equation model to start running from the calculation starting point corresponding to the material conditions inside the spherical tank at the initial moment.

[0037] In one embodiment, the moment when the dynamic differential equation model begins running is determined as the initial moment before the first execution of the multi-round dynamic calculation steps. At the initial moment The initial total mass of the material inside the spherical tank can be obtained based on the detection data from the level gauge and density meter, or the mass data output by the weighing system. Simultaneously, samples were taken from the material inside the spherical tank for analysis to obtain the initial molar fraction of dichlorosilane. Since the dynamic differential equation model uses the mass fraction of dichlorosilane to characterize the compositional state of the material inside the spherical tank, therefore, based on the initial molar fraction of dichlorosilane... Preset dichlorosilane molecular weight and the preset molecular weight of trichlorosilane The initial dichlorosilane mass fraction is determined according to the following formula. :

[0038] in, The initial mass fraction of dichlorosilane in the spherical tank at the initial moment; The initial mole fraction of dichlorosilane in the spherical tank at the initial moment; The molecular weight of dichlorosilane is preset; The preset molecular weight of trichlorosilane is 0; 0 indicates the initial time.

[0039] Initial total mass and initial dichlorosilane mass fraction Together, they represent the current state of the first multi-round dynamic calculation step, and the pre-set mass fraction of dichlorosilane in the mixed feed is used. This serves as the current component parameter for the first execution of the multi-round dynamic calculation step.

[0040] For example, the initial time can be set to Preset trichlorosilane molecular weight Preset dichlorosilane molecular weight And obtain the initial total mass at the initial moment. and initial mole fraction of dichlorosilane .

[0041] The initial dichlorosilane mass fraction was calculated using the above formula. and preset component parameters Set to 0.10 to complete the initialization of the current state and current component parameters required for the first execution of the multi-round dynamic calculation step.

[0042] In this embodiment, the steps of performing multiple rounds of dynamic calculation until new intermittent measurement data is obtained, and obtaining the dynamic calculation data and dichlorosilane content prediction results corresponding to each round of dynamic calculation, include: real-time acquisition of infeed and discharge mass flow rate data; the infeed and discharge mass flow rate data includes single-component infeed mass flow rate, mixed infeed mass flow rate, and discharge mass flow rate; based on the single-component infeed mass flow rate, mixed infeed mass flow rate, discharge mass flow rate, current state, and current component parameters, numerical integration is performed on the dynamic differential equation model to obtain the current total mass and current dichlorosilane mass fraction of the material in the spherical tank predicted by the dynamic differential equation model; wherein, after acquiring... Before new intermittent measurement data, the current component parameters remain unchanged in each round of dynamic calculation steps; the mixed feed mass flow rate, discharge mass flow rate, and current dichlorosilane mass fraction are used as the dynamic calculation data corresponding to this round of dynamic calculation steps; the current dichlorosilane molar fraction in the spherical tank is calculated using the current dichlorosilane mass fraction, the preset dichlorosilane molecular weight, and the preset trichlorosilane molecular weight; the current dichlorosilane molar fraction is used as the estimated dichlorosilane content corresponding to this round of dynamic calculation steps; the current total mass and the current dichlorosilane mass fraction are used as the latest current state of the dynamic differential equation model; the process returns to the step of obtaining real-time feed and discharge mass flow rate data.

[0043] In this embodiment, the single-component feed mass flow rate refers to the mass of material composed solely of trichlorosilane entering the spherical tank per unit time; the mixed feed mass flow rate refers to the mass of a mixture of trichlorosilane and dichlorosilane entering the spherical tank per unit time; and the discharge mass flow rate refers to the mass of material flowing out of the spherical tank per unit time. Numerical integration refers to discretizing and solving the state changes of the dynamic differential equation model between adjacent calculation times according to continuous calculation moments. Based on the current state, current component parameters, and the single-component feed mass flow rate, mixed feed mass flow rate, and discharge mass flow rate obtained in this round, the current total mass and current dichlorosilane mass fraction are calculated at the corresponding moment. The current total mass refers to the mass of all material in the spherical tank obtained through this round of dynamic calculation, and the current dichlorosilane mass fraction refers to the proportion of the dichlorosilane mass obtained through this round of dynamic calculation to the total mass of material in the spherical tank.

[0044] The dynamic calculation steps performed before acquiring new intermittent measurement data belong to the same group of continuous calculation processes. The current component parameters use the same value in this group of continuous calculations, while the current total mass and current dichlorosilane mass fraction are updated with each round of dynamic calculation. After each round of dynamic calculation is completed, the mixed feed mass flow rate, discharge mass flow rate, and the calculated current dichlorosilane mass fraction are recorded to form the dynamic calculation data corresponding to that round of dynamic calculation steps. Then, the component representation is converted by the current dichlorosilane mass fraction, the preset dichlorosilane molecular weight, and the preset trichlorosilane molecular weight to obtain the current dichlorosilane mole fraction. The latest current state refers to the current total mass and current dichlorosilane mass fraction obtained from this round of dynamic calculation and used for the next round of dynamic calculation. Returning to the step of acquiring real-time feed and discharge mass flow rate data means using the latest current state as the starting point for the next round of dynamic calculation, re-acquiring the feed and discharge real-time mass flow rate data for the next calculation moment, and continuing the calculation until new intermittent measurement data is acquired.

[0045] This step allows the dynamic differential equation model to advance round by round according to the material feeding and discharging conditions of the spherical tank, and continuously generate the predicted results of dichlorosilane content between two adjacent intermittent measurements. At the same time, by keeping the current component parameters unchanged in the same set of continuous calculations and updating the current state round by round, the connection between each round of dynamic calculations in time can be guaranteed, reflecting the dynamic changes in the total mass of material in the spherical tank and the dichlorosilane content as the material feeding and discharging process occurs.

[0046] In one embodiment, the feed side of the spherical tank is connected to a single-component feed line and a mixed feed line, respectively, while the discharge side is connected to a discharge line. The single-component feed can be trichlorosilane, and the mixed feed can be a mixture of trichlorosilane and dichlorosilane. Flow acquisition units corresponding to the feed and discharge lines collect the mass flow rates of the single-component feed, the mixed feed, and the discharge in real time, and provide the collected real-time mass flow rate data to the dynamic differential equation model.

[0047] The dynamic differential equation model uses the total mass of the material inside the spherical tank and the mass fraction of dichlorosilane as state variables, and satisfies the following formula:

[0048]

[0049] Where m is the total mass of the material in the spherical tank; y is the mass fraction of dichlorosilane in the material in the spherical tank; and t is time. The mass flow rate of the trichlorosilane; The mass flow rate of the mixture composed of the trichlorosilane and the dichlorosilane; The discharge mass flow rate; The mass fraction of dichlorosilane in the mixed feed; The rate of change of the total mass of the material inside the spherical tank over time; The percentage change in the mass fraction of dichlorosilane in the material inside the spherical tank over time.

[0050] In each round of dynamic calculation, the current total mass and current dichlorosilane mass fraction at the start of that round of dynamic calculation are used as the current state, and the real-time collected data is used to calculate the current state. , and and current component parameters Input the dynamic differential equation model, perform numerical integration on the above dynamic differential equation, and obtain the current total mass at the end of this round of dynamic calculation. and the current mass fraction of dichlorosilane In the same set of multi-round dynamic calculation steps, as long as no new intermittent measurement data has been acquired, the current component parameters... That is, it remains unchanged, while the current total mass and the current mass fraction of dichlorosilane The data is then updated round by round based on the real-time mass flow rate data of each round of material feeding and discharging.

[0051] After each round of dynamic calculation is completed, the mass flow rate of the mixed feed used in the dynamic calculation will be used. Discharge mass flow rate and the calculated current dichlorosilane mass fraction Save this as the dynamic calculation data corresponding to this round of dynamic calculation steps. Simultaneously, calculate the current dichlorosilane mass fraction according to the following formula. Convert to current dichlorosilane mole fraction :

[0052] in, Let t be the current mole fraction of dichlorosilane in the spherical tank; Let t be the current mass fraction of dichlorosilane in the spherical tank at time t; The mass fraction of trichlorosilane in the spherical tank at time t; The molecular weight of dichlorosilane is preset; The preset molecular weight of trichlorosilane is given; t is the calculation time corresponding to this round of dynamic calculation. The current molar fraction of dichlorosilane is used. The estimated dichlorosilane content for this round of dynamic calculation steps is output through the output unit.

[0053] Subsequently, the current total mass obtained from this round of dynamic calculation will be... and the current mass fraction of dichlorosilane As the latest current state of the dynamic differential equation model, the real-time mass flow rate data of the feed and discharge materials for the next calculation time step are retrieved, and the next round of dynamic calculation is executed. This is based on the current component parameters. For example, we can start from the initial moment. Start continuous reading , and Calculate and output round by round. ; until During the period when new intermittent measurement data are acquired, the current component parameters The value remains at 0.10 throughout each round of dynamic calculation. The current set of multi-round dynamic calculation steps ends when new intermittent measurement data is obtained.

[0054] In this embodiment of the application, the intermittent measurement data includes the measured value of the mole fraction of dichlorosilane in the spherical tank and the measured value of the total mass of the material at the current measurement time. The step of determining the latest current state and the measurement value data corresponding to the current measurement time based on the intermittent measurement data corresponding to the current measurement time includes: determining the measured value of the mass fraction of dichlorosilane in the spherical tank at the current measurement time based on the measured value of the mole fraction of dichlorosilane, a preset molecular weight of dichlorosilane, and a preset molecular weight of trichlorosilane; taking the measured value of the total mass of the material in the spherical tank and the measured value of the mass fraction of dichlorosilane at the current measurement time as the latest current state; and generating the measurement value data corresponding to the current measurement time based on the measured value of the total mass of the material and the measured value of the mass fraction of dichlorosilane at the current measurement time.

[0055] In this embodiment, both the measured mole fraction of dichlorosilane and the measured total mass of the material are actual measurement results obtained at the current measurement moment. The mole fraction of dichlorosilane can be obtained by sampling the material in the spherical tank and performing laboratory analysis. The measured total mass of the material can be determined by the detection data from a level gauge and a density meter, or by a weighing system. Since the current state of the dynamic differential equation model uses the mass fraction of dichlorosilane to characterize the component state of the material in the spherical tank, the measured mole fraction of dichlorosilane is converted into a component representation based on preset dichlorosilane molecular weights and preset trichlorosilane molecular weights to obtain the measured mass fraction of dichlorosilane at the same current measurement moment. Using the measured total mass of the material and the measured mass fraction of dichlorosilane as the latest current state means replacing the previous dynamically calculated current state with the actual measurement results at the current measurement moment. Generating the measurement data corresponding to the current measurement moment means associating and recording the measured total mass of the material and the measured mass fraction of dichlorosilane at the same current measurement moment, ensuring a consistent time correspondence between the two.

[0056] This step converts the actual measurement results, expressed as mole fraction, into the mass fraction used in the dynamic differential equation model, ensuring that the latest current state corresponds to the actual state of the material inside the spherical tank at the current measurement moment, and reducing the state deviation caused by previous dynamic calculations. At the same time, it can generate measurement data with clear time relationships and consistent component representation.

[0057] In one embodiment, the measurement time can be set at irregular intervals. Acquire intermittent measurement data, where k = 1, 2, 3, ..., representing the acquisition order of the intermittent measurement data. At the current measurement time... The material inside the spherical tank was sampled, and the molar fraction of dichlorosilane was obtained through laboratory analysis. Simultaneously, the liquid level and density of the material inside the spherical tank are obtained through a level gauge and a density meter, and the total mass of the material is determined based on the liquid level and density. Alternatively, the total mass of the material can be obtained directly through a weighing system. Mole fraction measurement of dichlorosilane and the total mass measurement of materials All correspond to the same current measurement time .

[0058] The current measurement time is calculated using the following formula. The corresponding mole fraction measurement of dichlorosilane is converted to the mass fraction measurement of dichlorosilane:

[0059] in, This is the measured mass fraction of dichlorosilane at the current measurement time; The molecular weight of dichlorosilane is preset; The molecular weight of trichlorosilane is preset; This is the current measurement time; is the measured molar fraction of dichlorosilane at the current measurement time; k is the order in which the intermittent measurement data were acquired.

[0060] Obtain the mass fraction measurement value of dichlorosilane Then, the current state of the dynamic differential equation model is updated to the current measurement time. The actual measurement results show that the state update relationship satisfies:

[0061]

[0062] in, To be at the current measurement time The current total mass of materials inside the spherical tank after the status update is completed; To be at the current measurement time The current dichlorosilane mass fraction after the status update is complete; Indicates the current measurement time The moment after the status update is completed.

[0063] Therefore, and As the latest current state, and and According to the current measurement time Perform associated storage to generate the measurement value data corresponding to the current measurement time.

[0064] For example, at the current measurement time The mole fraction of dichlorosilane was obtained through sampling analysis. =0.072, and simultaneously obtain the total mass measurement value of the material. =48t. (Based on the preset molecular weight of dichlorosilane) =101.01 g / mol, preset molecular weight of trichlorosilane Given a concentration of 135.45 g / mol, the measured mass fraction of dichlorosilane was calculated using the formula described above. ≈0.0547, and update the latest current state of the dynamic differential equation model according to the following result:

[0065]

[0066] Simultaneously, based on the total mass measurement of the material (48t) and the mass fraction of dichlorosilane (0.0547), the measurement data corresponding to the current measurement moment is generated.

[0067] In this embodiment, the dynamic calculation data includes the mixed feed mass flow rate, discharge mass flow rate, and dichlorosilane mass fraction predicted by the dynamic differential equation model for each round of dynamic calculation; the measured data includes the total mass measurement value of the material in the spherical tank and the measured value of the dichlorosilane mass fraction; the step of determining the latest current component parameters based on the measured data at the previous measurement time, the measured data at the current measurement time, and the dynamic calculation data corresponding to each round of dynamic calculation includes: based on the total mass measurement value and the measured value of the dichlorosilane mass fraction corresponding to the previous measurement time, and the measured value at the current measurement time... The actual mass change of dichlorosilane is determined by measuring the total mass and the mass fraction of dichlorosilane at each time point. The cumulative outflow mass of dichlorosilane is determined based on the discharge mass flow rate and the mass fraction of dichlorosilane in each round of dynamic calculation. The cumulative mass of the mixed feed is obtained by integrating the mass flow rate of the mixed feed in each round of dynamic calculation. The actual average mass fraction of dichlorosilane in the mixed feed is determined based on the actual mass change of dichlorosilane, the cumulative outflow mass of dichlorosilane, and the cumulative mass of the mixed feed. The actual average mass fraction of dichlorosilane is used as the latest current component parameter.

[0068] In this embodiment, the actual mass change of dichlorosilane refers to the increase or decrease in the actual mass of dichlorosilane in the spherical tank from the previous measurement time to the current measurement time. This can be determined by comparing the total mass measurement value and the dichlorosilane mass fraction measurement value at the two measurement times, and then subtracting the actual mass of dichlorosilane at the previous measurement time from the actual mass of dichlorosilane at the current measurement time. The cumulative outflow mass of dichlorosilane refers to the cumulative mass of dichlorosilane discharged from the spherical tank during the time interval from the previous measurement time to the current measurement time. This can be determined by comparing the discharge mass flow rate of each dynamic calculation step with the dichlorosilane mass fraction predicted by the dynamic differential equation model, and then integrating this flow rate over the time interval.

[0069] The cumulative mass of the mixed feed refers to the total mass of the mixed feed entering the spherical tank within the same time interval. It is obtained by integrating the mass flow rate of the mixed feed in each round of dynamic calculation within that time interval. Since the single-component feed does not contain dichlorosilane, the mass of dichlorosilane input into the mixed feed is used to compensate for changes in the actual mass of dichlorosilane in the spherical tank and the mass of dichlorosilane flowing out with the discharge. Therefore, the actual average mass fraction of dichlorosilane in the mixed feed can be determined based on the sum of the actual mass change of dichlorosilane and the cumulative outflow mass of dichlorosilane, as well as the cumulative mass of the mixed feed. The actual average mass fraction of dichlorosilane refers to the average mass ratio of dichlorosilane obtained by weighting the mixed feed mass from the previous measurement time to the current measurement time, and is used to reflect the actual component level of the mixed feed within that time interval.

[0070] This step allows us to use the actual measurement results from two adjacent measurement times and the dynamic calculation data within the corresponding time interval to deduce the actual average mass fraction of dichlorosilane in the mixed feed according to the mass conservation relationship of dichlorosilane. Based on this, we can update the current component parameters, enabling the current component parameters to be adjusted according to the actual changes in the mixed feed components, thereby reducing subsequent prediction deviations caused by inconsistencies between fixed component parameters and the actual feed composition.

[0071] In this embodiment of the application, the step of determining the actual mass change of dichlorosilane includes: determining the mass of dichlorosilane in the spherical tank at the previous measurement time based on the measured mass fraction and total mass of dichlorosilane at the previous measurement time; determining the mass of dichlorosilane in the spherical tank at the current measurement time based on the measured mass fraction and total mass of dichlorosilane at the current measurement time; and determining the actual mass change of dichlorosilane by the difference between the mass of dichlorosilane in the spherical tank at the previous measurement time and the mass of dichlorosilane in the spherical tank at the current measurement time.

[0072] In this embodiment, the mass of dichlorosilane in the spherical tank at the previous measurement time refers to the actual mass of dichlorosilane present in the spherical tank at the previous measurement time, which can be obtained by multiplying the total mass measurement value corresponding to the previous measurement time by the dichlorosilane mass fraction measurement value; the mass of dichlorosilane in the spherical tank at the current measurement time refers to the actual mass of dichlorosilane present in the spherical tank at the current measurement time, which can be obtained by multiplying the total mass measurement value corresponding to the current measurement time by the dichlorosilane mass fraction measurement value. The actual change in the mass of dichlorosilane is obtained by subtracting the mass of dichlorosilane in the spherical tank at the previous measurement time from the mass of dichlorosilane in the spherical tank at the current measurement time; a positive value indicates an increase in the mass of dichlorosilane in the spherical tank during the time interval, while a negative value indicates a decrease in the mass of dichlorosilane in the spherical tank during the time interval.

[0073] This step converts the total mass measurement and dichlorosilane mass fraction measurement at two adjacent measurement times into the actual change in dichlorosilane inventory. This allows the actual change in dichlorosilane mass to simultaneously reflect the changes in the total mass and composition of the material in the spherical tank, providing a basis for characterizing the actual change in dichlorosilane inventory within that time interval.

[0074] In this embodiment of the application, the step of determining the cumulative outflow mass of dichlorosilane based on the discharge mass flow rate and the mass fraction of dichlorosilane in each round of dynamic calculation includes: determining the dichlorosilane outflow mass flow rate for the corresponding dynamic calculation step according to the discharge mass flow rate and the mass fraction of dichlorosilane; and integrating the dichlorosilane outflow mass flow rate to obtain the cumulative outflow mass of dichlorosilane.

[0075] In this embodiment, the dichlorosilane outflow mass flow rate refers to the mass of dichlorosilane discharged from the spherical tank per unit time under the corresponding dynamic calculation step. It can be obtained by multiplying the discharge mass flow rate of that round of dynamic calculation step by the mass fraction of dichlorosilane. The discharge mass flow rate characterizes the total mass of material discharged from the spherical tank per unit time, and the dichlorosilane mass fraction characterizes the mass proportion of dichlorosilane in the discharged material. Integrating the dichlorosilane outflow mass flow rate means accumulating the dichlorosilane outflow mass flow rate over time from the previous measurement time to the current measurement time, according to the calculation time corresponding to each round of dynamic calculation step, thereby obtaining the total mass of dichlorosilane discharged during that time interval.

[0076] This step converts the instantaneous discharge situation under each round of dynamic calculation into the cumulative outflow mass of dichlorosilane within the corresponding time interval. This allows the calculation results to reflect the dynamic changes in material mass flow rate and dichlorosilane mass fraction within the time interval, providing a basis for determining the cumulative outflow of dichlorosilane in the spherical tank.

[0077] In one embodiment, the flow acquisition unit continuously collects the mixed feed mass flow rate and discharge mass flow rate of the spherical tank and provides the acquisition results to the calculation unit. When performing multiple rounds of dynamic calculation steps, the calculation unit saves the mixed feed mass flow rate, discharge mass flow rate, and the dichlorosilane mass fraction predicted by the dynamic differential equation model according to the calculation time corresponding to each round of dynamic calculation steps. When intermittent measurement data corresponding to the current measurement time is obtained, and intermittent measurement data corresponding to the previous measurement time also exists, the calibration unit obtains the measurement value data corresponding to the previous measurement time and the current measurement time, and retrieves the dynamic calculation data saved between the two measurement times from the calculation unit.

[0078] The calibration unit determines the actual mass change of dichlorosilane based on the total mass measurement value and the dichlorosilane mass fraction measurement value corresponding to the current measurement time and the previous measurement time, respectively, according to the following formula:

[0079] in, This represents the actual mass change of dichlorosilane from the previous measurement time to the current measurement time. This represents the total mass measurement value at the current measurement moment. This is the measured mass fraction of dichlorosilane at the current measurement time; This is the total mass measurement value corresponding to the previous measurement time. This is the measured mass fraction of dichlorosilane at the previous measurement time. This is the current measurement time; This is the time of the previous measurement.

[0080] Specifically, This indicates the mass of dichlorosilane in the spherical tank at the current measurement moment. This represents the mass of dichlorosilane in the spherical tank at the previous measurement time. Subtracting the latter from the former yields the change in the actual amount of dichlorosilane in the tank during that time interval.

[0081] For each round of dynamic calculation between the previous measurement time and the current measurement time, the calculation unit multiplies the discharge mass flow rate at the corresponding calculation time with the dichlorosilane mass fraction predicted by the dynamic differential equation model to obtain the dichlorosilane outflow mass flow rate at the corresponding calculation time, and integrates the dichlorosilane outflow mass flow rate according to the following formula:

[0082] in, This represents the cumulative mass of dichlorosilane that flowed out from the previous measurement time to the current measurement time. This is the current measurement time; This refers to the previous measurement time; For a moment The discharge mass flow rate of the lower spherical tank; For the dynamic differential equation model at time 1000... Predicted mass fraction of dichlorosilane in the spherical tank; This is the time variable for integration.

[0083] The calculation unit also integrates the mixed feed mass flow rate stored between the previous measurement time and the current measurement time to obtain the cumulative mass of the mixed feed:

[0084] Since the single-component feed is trichlorosilane, the newly added dichlorosilane in the spherical tank is brought in by the mixed feed. Therefore, the mass of dichlorosilane brought in by the mixed feed from the previous measurement time to the current measurement time can be determined by the sum of the actual change in the mass of dichlorosilane in the spherical tank and the cumulative mass of dichlorosilane flowing out with the tank discharge. The calibration unit calculates the actual average mass fraction of dichlorosilane in the mixed feed using the following formula:

[0085] in, This represents the actual average mass fraction of dichlorosilane in the mixed feed during the period from the previous measurement time to the current measurement time. This represents the actual mass change of dichlorosilane; This represents the cumulative outflow mass of dichlorosilane. This refers to the previous measurement time; This is the current measurement time; For a moment The mass flow rate of the mixed feed below; For integration time; This represents the cumulative mass of the mixed feed.

[0086] In one embodiment, the initial time can be... The acquired actual measurement data is used as the measurement value data corresponding to the previous measurement time. The total mass of the material inside the spherical tank is measured to be 50t, and the mass fraction of dichlorosilane is measured to be approximately 0.0378. From the initial time... Initially, the calculation unit continuously stores the mixed feed mass flow rate, discharge mass flow rate, and dichlorosilane mass fraction for each round of dynamic calculation steps. At the current measurement moment... The total mass of the material in the spherical tank was measured to be 48t, and the mass fraction of dichlorosilane was measured to be approximately 0.0547. Therefore, the actual mass change of dichlorosilane was 0.7370t.

[0087] The calculation unit also integrates the discharge mass flow rate and dichlorosilane mass fraction saved from each round of dynamic calculation within the 8-hour time interval to obtain the cumulative outflow mass of dichlorosilane. Based on the mixed feed mass flow rate saved in each round of dynamic calculation steps, the cumulative mass of the mixed feed is obtained by integration. Substituting the actual mass change of dichlorosilane, the cumulative outflow mass of dichlorosilane, and the cumulative mass of the mixed feed into the above formula, the actual average mass fraction of dichlorosilane in the mixed feed is calculated. =0.15.

[0088] The calibration unit sends 0.15 to the calculation unit, which uses it as the latest current component parameter and calculates it from the current measurement time. The input value for the mass fraction of dichlorosilane in the mixed feed is updated to 0.15. Until the next intermittent measurement data is obtained, all subsequent dynamic calculation steps will use the updated current component parameter of 0.15.

[0089] In this embodiment of the application, the method further includes: if there is no intermittent measurement data corresponding to the previous measurement time, then keep the current component parameters unchanged, and return to perform multiple rounds of dynamic calculation steps based on the latest current state.

[0090] In this embodiment, the absence of intermittent measurement data corresponding to the previous measurement time means that the currently acquired intermittent measurement data is the first intermittent measurement data acquired, and a measurement time interval from the previous measurement time to the current measurement time has not yet been formed. Therefore, there is a lack of the previous set of measurement values ​​used to determine the current component parameters. Maintaining the current component parameters unchanged means not updating the current component parameters based on the intermittent measurement data acquired this time, but continuing to use the current component parameters used in the previous multiple rounds of dynamic calculation steps before acquiring this intermittent measurement data; during the initial run, these current component parameters can be preset component parameters. Returning to execute multiple rounds of dynamic calculation steps based on the latest current state means that after updating the current state using the intermittent measurement data corresponding to the current measurement time, the latest current state is used as the new calculation starting point, and dynamic calculation continues with the unchanged current component parameters.

[0091] This step avoids updating the current component parameters with incomplete measurement interval data when intermittent measurement data is obtained for the first time but data from the previous measurement time is missing. At the same time, it updates the current state with the actual measurement results, allowing the multi-round dynamic calculation steps to continue.

[0092] In this embodiment of the application, the step of constructing a dynamic differential equation model includes: using the total mass of the material in the spherical tank and the mass fraction of dichlorosilane as state variables, and constructing a dynamic differential equation model based on the single-component feed mass flow rate, the mixed feed mass flow rate and component parameters, and the discharge mass flow rate of the spherical tank.

[0093] In this embodiment, state variables refer to physical quantities that characterize the state of the material inside the spherical tank at any given time and can change with the feeding and discharging process. The total mass of the material inside the spherical tank and the mass fraction of dichlorosilane are jointly set as state variables to characterize the mass stock and component state of the material inside the spherical tank, respectively. Constructing a dynamic differential equation model based on the single-component feed mass flow rate, the mass flow rate and component parameters of the mixed feed, and the discharge mass flow rate of the spherical tank refers to establishing differential relationships between each state variable and time according to the material mass conservation relationship. The change in the total mass of the material inside the spherical tank is determined by the mass balance between the single-component feed and the mixed feed entering the spherical tank and the material flowing out of the spherical tank. The change in the mass fraction of dichlorosilane in the material inside the spherical tank is jointly determined by the dichlorosilane introduced by the mixed feed, the influence of each feed stream on the component of the material inside the spherical tank, and the discharge from the spherical tank.

[0094] This step establishes a correlation between the material feeding and discharging process of the spherical tank and the changes in the total mass of the material inside the tank and the mass fraction of dichlorosilane. This allows the material feeding and discharging mass flow rates and component parameters to be used to estimate the changes in the state of the material inside the spherical tank over time, providing a model basis for subsequent dynamic calculations.

[0095] In one embodiment, the spherical tank is equipped with two feed streams and one discharge stream. The single-component feed is trichlorosilane, and the mixed feed is a mixture of trichlorosilane and dichlorosilane. The mixed feed can be a trichlorosilane stream containing dichlorosilane from a recovery system. The flow acquisition unit collects the mass flow rates of the single-component trichlorosilane feed, the mixed feed, and the spherical tank discharge, and sends the collected mass flow rate data to the calculation unit.

[0096] The calculation unit sets the total mass m of the material in the tank and the mass fraction y of dichlorosilane as the state variables of the dynamic differential equation model, and sets the single-component feed mass flow rate of trichlorosilane, the mass flow rate of the mixed feed, the discharge mass flow rate, and the mass fraction of dichlorosilane in the mixed feed as the input parameters of the dynamic differential equation model. The mass fraction of dichlorosilane in the mixed feed is a component parameter.

[0097] Based on the total mass conservation relationship between the single-component feed and mixed feed entering the spherical tank and the material flowing out of the spherical tank, a differential equation is established to describe the change of the total mass of the material inside the spherical tank with time.

[0098] In this embodiment, the single-component feed is trichlorosilane, and the mixed feed is a mixture of trichlorosilane and dichlorosilane, wherein the component parameter is the mass fraction of dichlorosilane in the mixed feed; the dynamic differential equation model satisfies the following formula:

[0099] Based on the mass of dichlorosilane introduced by the mixed feed, the mass of dichlorosilane discharged from the spherical tank, and the change in the total mass of the material inside the spherical tank, a differential equation is established for the change of the mass fraction of dichlorosilane in the material inside the spherical tank over time:

[0100] Where m is the total mass of the material in the spherical tank; y is the mass fraction of dichlorosilane in the material in the spherical tank; and t is time. The mass flow rate of trichlorosilane; The mass flow rate of the mixture composed of trichlorosilane and dichlorosilane; This refers to the discharge mass flow rate; This refers to the mass fraction of dichlorosilane in the mixed feed. The rate of change of the total mass of the material inside the spherical tank over time; The percentage change in the mass fraction of dichlorosilane in the material inside the spherical tank over time.

[0101] In the above dynamic differential equation model, It represents the net change in mass of the material inside the spherical tank per unit time. This represents the mass of dichlorosilane introduced into the spherical tank per unit time by the mixed feed. The single-component feed is trichlorosilane, which does not introduce dichlorosilane into the tank. The discharge from the spherical tank carries out dichlorosilane according to the current mass fraction of dichlorosilane in the tank, and the discharge has a proportional impact on both the total mass of the material and the mass of dichlorosilane. After converting the dichlorosilane mass conservation relationship to a relationship based on the change in dichlorosilane mass fraction, the effect of the discharge mass flow rate is already incorporated into the change in the total mass m.

[0102] Therefore, the two differential equations mentioned above are combined to form a dynamic differential equation model, which enables the computing unit to determine the total mass change rate and dichlorosilane mass fraction change rate of the material in the spherical tank based on the single-component feed mass flow rate, the mixed feed mass flow rate, the discharge mass flow rate, and the component parameters, thus providing a model basis for calculating the current total mass and current dichlorosilane mass fraction of the material in the spherical tank.

[0103] Figure 2 The diagram schematically illustrates the structure of a dynamic prediction and calibration system for dichlorosilane content in a spherical tank according to an embodiment of this application. Figure 2As shown in this embodiment, the system includes a feeding unit, a spherical tank, a discharging unit, a flow acquisition unit, a sampling input unit, a calibration unit, a calculation unit, and an output unit. The feeding unit includes a pure trichlorosilane feed and a trichlorosilane mixed feed containing dichlorosilane. The pure trichlorosilane feed is input into the spherical tank as a single-component feed, and the trichlorosilane mixed feed containing dichlorosilane is input into the spherical tank as a mixed feed. The spherical tank is used to contain the mixture formed by the two feeds and discharges the material from the spherical tank through the discharging unit. The flow acquisition unit is used to collect the mass flow rates of the single-component feed, the mixed feed, and the discharging feed from the spherical tank, and sends the real-time mass flow rate data of the feed and discharge to the calculation unit. The sampling input includes the total mass measurement value and the mole fraction measurement value of the material in the spherical tank obtained at the intermittent measurement time. The corresponding intermittent measurement data is then input into the calibration unit. The calibration unit is used to convert the mole fraction measurement value of dichlorosilane into the mass fraction measurement value of dichlorosilane. Based on the total mass measurement value and the mass fraction measurement value of dichlorosilane, it updates the current state of the dynamic differential equation model. If there is intermittent measurement data corresponding to the previous measurement time, it determines the latest current component parameters based on the measurement data corresponding to the two adjacent measurement times and the dynamic calculation data within the corresponding time interval. Then, it sends the latest current state and the latest current component parameters to the calculation unit. If there is no intermittent measurement data corresponding to the previous measurement time, the current component parameters remain unchanged, and the latest current state is sent to the calculation unit. The calculation unit inputs the current state of the spherical tank, the current component parameters, and the real-time mass flow data of the inlet and outlet collected by the flow acquisition unit into the dynamic differential equation model. Through multiple rounds of dynamic calculation, it obtains the current total mass of the material in the spherical tank, the current mass fraction of dichlorosilane, and the current molar fraction of dichlorosilane. The current molar fraction of dichlorosilane is then sent to the output unit as the estimated result of the dichlorosilane content. The output unit is used to output the estimated result of the dichlorosilane content in the spherical tank for use in spherical tank component monitoring or related production process control.

[0104] Figure 3 A flowchart illustrating another method for dynamically predicting and calibrating the content of dichlorosilane in a spherical tank according to an embodiment of this application is shown. Figure 3As shown in this embodiment, before the first execution of the multi-round dynamic calculation step, the initial total mass and initial dichlorosilane mole fraction of the material in the spherical tank at the initial moment are obtained. The initial dichlorosilane mass fraction is determined based on the initial dichlorosilane mole fraction, the preset dichlorosilane molecular weight, and the preset trichlorosilane molecular weight. The initial total mass and initial dichlorosilane mass fraction are used as the current state of the dynamic differential equation model, and the preset component parameters are used as the current component parameters. After entering the real-time calculation loop, the single-component feed mass flow rate, mixed feed mass flow rate, and discharge mass flow rate of the spherical tank are acquired in real time. Based on the current state, current component parameters, and the acquired real-time feed and discharge mass flow rate data, the dynamic differential equation model is numerically integrated to obtain the current total mass and current dichlorosilane mass fraction of the material in the spherical tank. The current dichlorosilane mass in the spherical tank can also be determined based on the current total mass and current dichlorosilane mass fraction. The mixed feed mass flow rate, discharge mass flow rate, and current dichlorosilane mass fraction are used as the dynamic calculation data corresponding to this round of dynamic calculation steps. The current dichlorosilane mole fraction is calculated based on the current dichlorosilane mass fraction, the preset dichlorosilane molecular weight, and the preset trichlorosilane molecular weight. The current dichlorosilane mole fraction is output as the dichlorosilane content prediction result, and the current total mass and current dichlorosilane mass fraction are used as the latest current state. If no new intermittent measurement data is obtained, the current component parameters remain unchanged, and the process returns to the step of acquiring real-time mass flow data of feed and discharge to continue the next round of dynamic calculation. When new intermittent measurement data is acquired, the corresponding acquisition time is taken as the current measurement time. The mass fraction measurement value of dichlorosilane is determined based on the mole fraction measurement value of dichlorosilane at the current measurement time. The mass measurement value of dichlorosilane in the spherical tank can also be determined based on the total mass measurement value and the mass fraction measurement value of dichlorosilane. The total mass measurement value and the mass fraction measurement value of dichlorosilane are taken as the latest current state, and the measurement data corresponding to the current measurement time is generated. If no intermittent measurement data exists for the previous measurement time, the current component parameters remain unchanged, and the process returns to execute multiple rounds of dynamic calculation steps based on the latest current state. If intermittent measurement data exists for the previous measurement time, the actual mass change of dichlorosilane is determined based on the measurement values ​​corresponding to the previous and current measurement times. The cumulative outflow mass of dichlorosilane is determined based on the discharge mass flow rate and dichlorosilane mass fraction corresponding to each round of dynamic calculation steps between two adjacent measurement times. The mass flow rate of the mixed feed is integrated to obtain the cumulative mass of the mixed feed, and then the actual average mass fraction of dichlorosilane in the mixed feed is determined. The actual average mass fraction of dichlorosilane is used as the latest current component parameter, and the process returns to execute multiple rounds of dynamic calculation steps based on the latest current component parameter and the latest current state.

[0105] Figure 4The illustration schematically shows a timing diagram of a dynamic estimation and calibration process for dichlorosilane content in a spherical tank according to an embodiment of this application. Figure 4 As shown in this embodiment, the dynamic differential equation model runs continuously along the time axis, performing multiple rounds of dynamic calculations based on the real-time mass flow data of the feed and discharge materials, continuously generating dynamic calculation data and dichlorosilane content prediction results, and updating the current state after each round of dynamic calculation. From 00:00 until the first sampling inspection, the dynamic differential equation model performs real-time dynamic calculations based on the initialized current state and preset component parameters; at 06:00, the first sampling inspection is conducted, and the latest current state is determined based on the measured values ​​of dichlorosilane mole fraction and total mass obtained from the first sampling inspection, and the model state is reset. Since there is no intermittent measurement data corresponding to the previous measurement time, the current component parameters remain unchanged. After the first model state reset is completed, the dynamic differential equation model continues to run based on the latest current state until the second sampling inspection is conducted at 12:00; the model state is reset again based on the intermittent measurement data obtained from the second sampling inspection, and the latest current component parameters are determined based on the measurement data corresponding to the first and second sampling inspections and the dynamic calculation data corresponding to each round of dynamic calculations between 06:00 and 12:00. The vertical red marker line following the second sampling indicates the current operating time. At this current operating time, the dynamic differential equation model continues to perform dynamic calculations based on the latest current state and the latest current component parameters determined by the second sampling. When the third sampling is conducted at 18:00, the model state is reset based on the intermittent measurement data obtained from the third sampling, and the current component parameters are updated again based on the measurement data corresponding to the second and third samplings and the dynamic calculation data corresponding to each round of dynamic calculations between 12:00 and 18:00. Thus, through continuous dynamic calculations and intermittent measurements triggered at different times, continuous prediction of dichlorosilane content and periodic calibration of the current state and current component parameters are achieved.

[0106] Figure 5 A schematic diagram illustrating the structure of a computer device according to an embodiment of this application is provided. Figure 5 As shown in the illustration, this application provides a computer device that may include: Memory 510 is configured to store instructions; and Processor 520 is configured to retrieve instructions from memory 510 and to implement the methods described above when executing instructions.

[0107] This application also provides a computer program product, including a computer program that, when executed by a processor, implements the above-described method.

[0108] This application also provides a computer-readable storage medium storing instructions that cause a computer to perform the above-described method.

[0109] Those skilled in the art will understand that embodiments of this application can be provided as methods, systems, or computer program products. Therefore, this application can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this application can take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0110] This application is described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of this application. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a computer, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create instructions for implementing the flowchart illustrations. Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0111] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0112] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0113] In a typical configuration, a computing device includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.

[0114] Memory may include non-persistent memory in computer-readable media, such as random access memory (RAM) and / or non-volatile memory, such as read-only memory (ROM) or flash RAM. Memory is an example of computer-readable media.

[0115] Computer-readable media includes both permanent and non-permanent, removable and non-removable media that can store information using any method or technology. Information can be computer-readable instructions, data structures, modules of programs, or other data. Examples of computer storage media include, but are not limited to, phase-change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technologies, CD-ROM, digital versatile optical disc (DVD) or other optical storage, magnetic tape, magnetic disk storage or other magnetic storage devices, or any other non-transferable medium that can be used to store information accessible by a computing device. As defined herein, computer-readable media does not include transient computer-readable media, such as modulated data signals and carrier waves.

[0116] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0117] The above are merely embodiments of this application and are not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. A method for dynamic prediction and calibration of dichlorosilane content in a spherical tank, characterized in that, include: The current state of the spherical tank, the current component parameters, and the real-time mass flow rate data of the feed and discharge are input into the dynamic differential equation model. Multiple rounds of dynamic calculation steps are executed to obtain the dynamic calculation data and dichlorosilane content prediction results corresponding to each round of dynamic calculation steps, until new intermittent measurement data are obtained. The moment when new intermittent measurement data is acquired is taken as the current measurement moment; Based on the intermittent measurement data corresponding to the current measurement time, determine the latest current state and the measurement value data corresponding to the current measurement time; If there is intermittent measurement data corresponding to the previous measurement time, the latest current component parameters are determined based on the measurement data of the previous measurement time, the measurement data of the current measurement time, and the dynamic calculation data corresponding to each round of dynamic calculation. Based on the latest current component parameters and the latest current state, return to execute the multi-round dynamic calculation steps.

2. The method according to claim 1, characterized in that, Before the first execution of the multi-round dynamic calculation step, the following is included: Obtain the initial total mass and initial mole fraction of dichlorosilane in the spherical tank at the initial time. Based on the initial dichlorosilane mole fraction, the preset dichlorosilane molecular weight, and the preset trichlorosilane molecular weight, the initial dichlorosilane mass fraction in the spherical tank at the initial time is determined; The initial dichlorosilane mass fraction and the initial total mass are taken as the current state for the first execution of the multi-round dynamic calculation step; The preset component parameters are used as the current component parameters for the first execution of the multi-round dynamic calculation steps.

3. The method according to claim 2, characterized in that, The step of performing multiple rounds of dynamic calculations to obtain dynamic calculation data and dichlorosilane content prediction results for each round of dynamic calculations until new intermittent measurement data is obtained includes: Real-time mass flow rate data of the feed and discharge materials is acquired; the real-time mass flow rate data of the feed and discharge materials includes the mass flow rate of single-component feed, the mass flow rate of mixed feed, and the mass flow rate of discharge materials. Based on the single-component feed mass flow rate, the mixed feed mass flow rate, the discharge mass flow rate, the current state, and the current component parameters, the dynamic differential equation model is numerically integrated to obtain the current total mass and current dichlorosilane mass fraction of the material in the spherical tank predicted by the dynamic differential equation model; wherein, before new intermittent measurement data are obtained, the current component parameters remain unchanged in each round of dynamic calculation steps; The mixed feed mass flow rate, the discharge mass flow rate, and the current dichlorosilane mass fraction are used as the dynamic calculation data corresponding to this round of dynamic calculation steps; The current molar fraction of dichlorosilane in the spherical tank is calculated using the current mass fraction of dichlorosilane, the preset molecular weight of dichlorosilane, and the preset molecular weight of trichlorosilane. The current molar fraction of dichlorosilane is used as the estimated result of the dichlorosilane content corresponding to this round of dynamic calculation steps; The current total mass and the current dichlorosilane mass fraction are taken as the latest current state of the dynamic differential equation model; Return to the step of acquiring the real-time mass flow rate data of the feed and discharge materials.

4. The method according to any one of claims 1 to 3, characterized in that, The intermittent measurement data includes the measured mole fraction of dichlorosilane in the spherical tank and the measured total mass of the material at the current measurement time. The step of determining the latest current state and the measurement value data corresponding to the current measurement time based on the intermittent measurement data corresponding to the current measurement time includes: Based on the measured molar fraction of dichlorosilane, the preset molecular weight of dichlorosilane, and the preset molecular weight of trichlorosilane, determine the measured mass fraction of dichlorosilane in the spherical tank at the current measurement time; The total mass measurement value and the mass fraction of dichlorosilane in the spherical tank at the current measurement time are taken as the latest current state; Based on the measured total mass of the material and the measured mass fraction of dichlorosilane at the current measurement time, the corresponding measurement data for the current measurement time is generated.

5. The method according to claim 4, characterized in that, The mass fraction of the dichlorosilane was determined according to the following formula: in, This is the measured mass fraction of dichlorosilane at the current measurement time; The preset molecular weight of dichlorosilane; The preset molecular weight of trichlorosilane; This is the current measurement time; This represents the measured mole fraction of dichlorosilane at the current measurement time.

6. The method according to any one of claims 1 to 3, characterized in that, The dynamic calculation data includes the mixed feed mass flow rate, the discharge mass flow rate, and the dichlorosilane mass fraction predicted by the dynamic differential equation model for each round of dynamic calculation; the measurement data includes the total mass measurement value of the material in the spherical tank and the dichlorosilane mass fraction measurement value. The step of determining the latest current component parameters based on the measurement data from the previous measurement time, the measurement data from the current measurement time, and the dynamic calculation data corresponding to each round of dynamic calculation includes: Based on the total mass measurement value and dichlorosilane mass fraction measurement value corresponding to the previous measurement time, and the total mass measurement value and dichlorosilane mass fraction measurement value corresponding to the current measurement time, determine the actual mass change of dichlorosilane; Based on the discharge mass flow rate and the mass fraction of dichlorosilane in each round of dynamic calculation, the cumulative outflow mass of dichlorosilane is determined. Integrate the mixed feed mass flow rate of each round of dynamic calculation step to obtain the cumulative mass of the mixed feed. The actual average mass fraction of dichlorosilane in the mixed feed is determined based on the actual mass change of dichlorosilane, the cumulative outflow mass of dichlorosilane, and the cumulative mass of the mixed feed. The actual average mass fraction of the dichlorosilane is used as the latest current component parameter.

7. The method according to claim 6, characterized in that, The actual average mass fraction of the dichlorosilane is determined according to the following formula: in, The actual average mass fraction of dichlorosilane in the mixed feed; This represents the actual mass change of the dichlorosilane. The cumulative outflow mass of the dichlorosilane; This refers to the previous measurement time; This is the current measurement time; For a moment The mass flow rate of the mixed feed below; For integration time; The cumulative mass of the mixed feed.

8. The method according to claim 6, characterized in that, The steps for determining the actual mass change of dichlorosilane include: Based on the measured value of the mass fraction and the total mass of dichlorosilane at the previous measurement time, determine the mass of dichlorosilane in the spherical tank at the previous measurement time. Based on the measured values ​​of dichlorosilane mass fraction and total mass at the current measurement time, determine the mass of dichlorosilane in the spherical tank at the current measurement time; The actual change in the mass of dichlorosilane is determined by the difference between the mass of dichlorosilane in the spherical tank at the previous measurement time and the mass of dichlorosilane in the spherical tank at the current measurement time.

9. The method according to claim 8, characterized in that, The actual mass change of the dichlorosilane is determined according to the following formula: in, This represents the actual mass change of the dichlorosilane. This represents the total mass measurement value at the current measurement moment. This is the measured mass fraction of dichlorosilane at the current measurement time; This is the total mass measurement value corresponding to the previous measurement time. This is the measured mass fraction of dichlorosilane at the previous measurement time. This is the current measurement time; This is the time of the previous measurement.

10. The method according to claim 6, characterized in that, The step of determining the cumulative outflow mass of dichlorosilane based on the discharge mass flow rate and the mass fraction of dichlorosilane in each round of dynamic calculation includes: Based on the discharge mass flow rate and the dichlorosilane mass fraction, determine the dichlorosilane outflow mass flow rate for the corresponding dynamic calculation step; The cumulative outflow mass of dichlorosilane is obtained by integrating the outflow mass flow rate of the dichlorosilane.

11. The method according to claim 10, characterized in that, The cumulative outflow mass of the dichlorosilane is determined according to the following formula: in, The cumulative outflow mass of the dichlorosilane; This is the current measurement time; This refers to the previous measurement time; For a moment The discharge mass flow rate of the spherical tank described below; For the dynamic differential equation model at time... The predicted mass fraction of dichlorosilane in the spherical tank; This is the time variable for integration.

12. The method according to any one of claims 1 to 3, characterized in that, The method further includes: If there is no intermittent measurement data corresponding to the previous measurement time, then keep the current component parameters unchanged, and return to execute the multi-round dynamic calculation steps based on the latest current state.

13. The method according to any one of claims 1 to 3, characterized in that, The steps for constructing the dynamic differential equation model include: Using the total mass of the material in the spherical tank and the mass fraction of dichlorosilane as state variables, the dynamic differential equation model is constructed based on the single-component feed mass flow rate, the mixed feed mass flow rate and component parameters of the spherical tank, and the discharge mass flow rate.

14. The method according to claim 13, characterized in that, The single-component feed is trichlorosilane, and the mixed feed is a mixture of trichlorosilane and dichlorosilane. The component parameter is the mass fraction of dichlorosilane in the mixed feed. The dynamic differential equation model satisfies the following formula: Where m is the total mass of the material in the spherical tank; y is the mass fraction of dichlorosilane in the material in the spherical tank; and t is time. The mass flow rate of the trichlorosilane; The mass flow rate of the mixture composed of the trichlorosilane and the dichlorosilane; The discharge mass flow rate; The mass fraction of dichlorosilane in the mixed feed is given.

15. A computer device, characterized in that, include: The memory is configured to store instructions; as well as A processor is configured to retrieve the instructions from the memory and, when executing the instructions, to implement the method according to any one of claims 1 to 14.

16. A computer program product, comprising a computer program, characterized in that, When the computer program is executed by a processor, it implements the method according to any one of claims 1 to 14.

17. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores instructions for causing a computer to perform the method according to any one of claims 1 to 14.

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