Non-oxidation limited vertical cavity surface emitting laser and preparation method thereof

Abstract

The application relates to the technical field of lasers, in particular to a non-oxidation-limiting vertical cavity surface emitting laser and a preparation method thereof, which comprises, from bottom to top, a substrate, a buffer layer, an N-type DBR, an N-type cladding layer, an active region, a P-type cladding layer, a limiting layer, a P-type DBR, a contact layer and a passivation layer, wherein the material of the limiting layer is Fe-doped AlGaAs. When the layer is epitaxially grown by MOCVD, iron (Fe) is introduced as a deep level dopant, the deep acceptor level (about 0.47 eV from the top of the valence band) formed by Fe in AlGaAs compensates the background carriers, the material presents a semi-insulating characteristic (the resistivity can reach 10 7 -10 11 Ω·cm), thereby effectively blocking the expansion of the transverse current. The thermal conductivity (10-25 watts per meter kelvin) of the Fe-doped AlGaAs is 15-35 times that of aluminum oxide (0.7 watts per meter kelvin), which significantly improves the heat dissipation performance of the device.